WO2021193051A1 - Thermal flow direction sensor - Google Patents

Thermal flow direction sensor Download PDF

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Publication number
WO2021193051A1
WO2021193051A1 PCT/JP2021/009439 JP2021009439W WO2021193051A1 WO 2021193051 A1 WO2021193051 A1 WO 2021193051A1 JP 2021009439 W JP2021009439 W JP 2021009439W WO 2021193051 A1 WO2021193051 A1 WO 2021193051A1
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WO
WIPO (PCT)
Prior art keywords
flow direction
detection unit
direction detection
support
substrate
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PCT/JP2021/009439
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French (fr)
Japanese (ja)
Inventor
林　泰正
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ホルトプラン合同会社
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Application filed by ホルトプラン合同会社 filed Critical ホルトプラン合同会社
Publication of WO2021193051A1 publication Critical patent/WO2021193051A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement

Definitions

  • the present invention relates to a thermal flow direction sensor that measures the flow direction of a fluid using a thermal operation principle.
  • Wind speed is an important environmental factor at agricultural sites such as living spaces, industrial equipment, and cultivation equipment. Furthermore, information on the wind direction from which direction the wind is coming from is important for understanding the environment. For example, in a living space, it is better to be able to grasp the direction of the flow of harmful substances such as cigarette smoke. Even in the industrial field, there are applications such as clean rooms that pay attention to the wind direction. In addition, in data centers and server rooms that play a central role in ICT and cloud computing, if airflow management is not performed properly, the server will not be cooled properly and processing speed will be restricted. become.
  • the so-called weathercock type that is generally used in outdoor meteorological observation is known as a weathercock in which the blades come to the leeward side due to the stress of the wind.
  • the Japan Meteorological Agency and outdoor meteorological observations use an anemometer called an airplane type equipped with a propeller for detecting wind speed.
  • an ultrasonic type that obtains the wind speed and direction from the transmission speed of ultrasonic waves. This is a method of simultaneously measuring wind speeds in a plurality of directions and deriving a vector from the plurality of wind speeds to obtain a wind direction.
  • an ultrasonic oscillator with at least two axes and a receiver are required, and if three sets of these are used to calculate the wind direction on three axes, a three-dimensional wind direction can also be obtained.
  • This thermal anemometer combines three Pt self-heating anemometers with directivity and calculates the wind direction by utilizing the difference in sensitivity due to directivity, and it is easy to miniaturize.
  • the structure is also relatively simple, and it has the feature of being able to measure the breeze speed.
  • thermo flow direction sensor used for this thermal wind direction anemometer, a circuit or the like mounted on a substrate is known. Specifically, as shown in FIGS. 8 and 9, in this thermal flow direction sensor, the temperature of the heat from the heater element 20 that generates heat by the supply current and the heater element 20 that changes according to the flow velocity of the fluid.
  • a flow direction detection unit 2 having a temperature measuring element 21 (21a, 21b, 21c, 21d) for detecting the above, a temperature measuring unit 3 for measuring the temperature of the fluid, a circuit unit 4 for calculating the flow direction of the fluid, and the like.
  • a substrate 1 to be mounted is provided, and the flow direction of a fluid in the space around the sensor is measured (see, for example, Patent Document 1).
  • a pair of heater elements 20 and temperature measuring elements 21 are formed on the front surface and the back surface of the flow direction detection unit substrate portion 11 by the substrate support portion 13. It was arranged so as to face each other along the support axis direction of 2.
  • a tetrahedron having the temperature measuring elements 21 (21a, 21b, 21c, 21d) on the front surface and the back surface of the substrate portion 11 for the flow direction detection unit as vertices is formed, and the temperature measuring elements 21 (21a, 21b, 21c, 21c, The axes connecting 21d) are arranged so as not to be in the same direction.
  • FIG. 10 is a side view of the flow direction detection unit substrate portion 11 and the flow direction detection unit support portion 13. For simplification of the figure, only the temperature measuring element 21 is shown.
  • the fluid is in a state of being perpendicularly in contact with the surfaces of the flow direction detection unit substrate portion 11 and the flow direction detection unit support portion 13.
  • Qa1 represents the heat radiated from the flow direction detection unit 2
  • Qa2 represents the heat radiated from the flow direction detection support 13
  • Qb represents the heat transferred in the flow direction detection support 13. If there is no wind, the amount of heat released from Qa1 and Qa2 is small, and the amount of heat released from Qb is an order of magnitude higher.
  • Q corresponds to Qa1 and Qa2 in terms of the amount of heat dissipated to the fluid.
  • U is the fluid velocity
  • T is the temperature of the heating element
  • Ta is the temperature of the fluid.
  • a and b are constants, a represents the amount of heat flowing through the fluid regardless of the fluid velocity, and b represents the amount of heat that increases with the fluid velocity. This means that as the fluid velocity increases, so does the heat conduction of the fluid in proportion to ⁇ U.
  • the surface area of the support portion 13 for the flow direction detection unit is larger than that of the substrate portion 11 for the flow direction detection unit. Therefore, as the fluid velocity increases, Qa2 becomes larger than Qa1 and Qb increases accordingly. To increase. Then, the temperature of the temperature measuring element 21a closer to the flow direction detecting unit support 13 becomes lower than that of the temperature measuring element 21c farther from the flow direction detecting unit support portion 13. Since the principle of wind direction detection uses a phenomenon in which the amount of heat radiated to the fluid is larger on the wind side and the temperature is lowered, this sensor may erroneously detect that there is a flow direction from the lower position. ..
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a thermal flow direction sensor capable of accurately measuring the flow direction of a fluid.
  • the present invention has a plurality of heater elements that generate heat by a supply current and a temperature measuring element that detects the temperature of heat from the heater element that changes according to the flow velocity of the fluid.
  • a thermal flow direction including a flow direction detection unit, a circuit unit that calculates the flow direction of a fluid based on the temperature information detected by the temperature measuring element of the flow direction detection unit, and at least a substrate on which the flow direction detection unit is mounted.
  • the sensor is a sensor, and the substrate integrally extends from the main portion of the substrate, the substrate portion for the flow direction detection unit on which the flow direction detection unit is mounted, and the substrate portion for the flow direction detection unit from the main substrate portion, and the flow direction.
  • the slender shape for supporting the detection unit is provided, and the flow direction detection unit has a pair of the heater element and the temperature measuring element on the front surface and / or the back surface of the substrate portion for the flow direction detection unit. It is mounted so as to be arranged in a facing state, and the temperature detection axial direction by the pair of heater elements and the temperature measuring element intersects with the support axial direction of the current direction detection unit by the current direction detection unit support unit. It is characterized by being.
  • At least four flow direction detection units are provided and mounted on the support portion for the flow direction detection unit so that the axial directions connecting the temperature measuring elements of each flow direction detection unit are all different directions. .. According to this, it is possible to obtain the three-dimensional direction of the flow direction of the fluid based on the temperature information of the four temperature measuring elements.
  • the temperature detection axial direction by the pair of the heater elements and the temperature measuring element and the support axial direction of the flow direction detection unit by the flow direction detection unit support unit are 45 to 90 degrees. It is preferable that the flow direction detection unit is mounted on the substrate portion for the flow direction detection unit so as to intersect at an angle, and more preferably, the flow direction detection unit includes a pair of the heater elements and the temperature detection axial direction by the temperature measuring element. It is preferable that the support portion for the flow direction detection unit is mounted on the substrate portion for the flow direction detection unit in such a manner that the support axis direction of the flow direction detection unit intersects at an angle of 90 degrees. According to this, when the temperature measuring element of each flow direction detection unit detects the heat temperature of the heater element, the influence of heat dissipation in the support unit for the flow direction detection unit can be further reduced.
  • the flow direction is provided with a plurality of the flow direction detection unit substrate portion and the flow direction detection unit support portion, and has the pair of heater elements and the temperature measuring element on the front surface and / or the back surface of each flow direction detection unit substrate portion. It is preferable that a detection unit is provided. According to this, the above-mentioned arrangement structure of the flow direction detecting portion and the supporting portion can be easily manufactured.
  • the flow direction detection unit substrate portion includes a first flow direction detection unit substrate portion and a second flow direction detection in which the flow direction detection unit having the pair of heater elements and the temperature measuring element is provided on the front surface and / or the back surface.
  • the support portion for the flow direction detection unit includes the substrate portion for the portion, and the support portion for the flow direction detection unit includes the support portion for the first flow direction detection unit connected to the substrate portion for the first flow direction detection unit and the substrate for the second flow direction detection unit. It is preferable to provide a support portion for a second flow direction detection portion that is connected to the portion.
  • the support portion for the flow direction detection unit extends while branching from the support portion main body for the flow direction detection unit extending from the main part of the substrate and the tip end portion of the support portion main body for the flow direction detection unit, and the first flow direction detection.
  • a support portion for the first flow direction detection unit and a support portion for the second flow direction detection unit, which are connected to the substrate portion for the unit and the substrate portion for the second flow direction detection unit, may be provided, respectively.
  • the support portion for the first flow direction detection unit and the support portion for the second flow direction detection unit extend while branching in a separation direction at an angle of 180 degrees from each other, and the substrate portion for the first flow direction detection unit and the support portion for the flow direction detection unit It may be connected to each of the second flow direction detection unit substrate portions. Further, the support portion for the first flow direction detection unit and the support portion for the second flow direction detection unit extend while branching in a separation direction at an angle of 90 degrees from each other, and the substrate portion for the first flow direction detection unit and the support portion for the flow direction detection unit It may be connected to each of the second flow direction detection part substrate portions.
  • the support portion for the first flow direction detection unit and the support portion for the second flow direction detection unit extend while branching in a direction away from each other, and then bend and extend in a direction close to each other to extend the first flow direction.
  • the substrate portion for the detection unit and the substrate portion for the second flow direction detection unit may be connected to each other. According to these, the influence of heat dissipation in the support portion for the flow direction detection portion can be surely reduced by making the structure simple.
  • the support for the first flow direction detection unit and the support for the second flow direction detection unit are the pair of the heater elements of the flow direction detection unit mounted on the substrate portion for the first flow direction detection unit and the heater elements.
  • the temperature detection axial direction by the temperature measuring element and the pair of heater elements of the flow direction detecting unit mounted on the substrate portion for the second flow direction detecting unit and the temperature detecting axial direction by the temperature measuring element are 90. It may be connected to the first substrate portion for the flow direction detection unit and the substrate portion for the second flow direction detection unit so as to intersect at an angle of degree. According to this, the influence of heat dissipation in the support portion for the flow direction detection unit can be surely reduced, and the flow direction of the fluid can be easily measured.
  • the temperature measuring element of each flow direction detection unit detects the heat temperature of the heater element
  • the influence of heat dissipation in the support unit for the flow direction detection unit can be reduced, and the flow direction of the fluid can be accurately adjusted. It becomes possible to calculate.
  • the arrangement of the heater element and the temperature measuring element of the flow direction detection unit is devised, it is possible to manufacture and provide a thermal flow direction sensor at low cost.
  • the installation location which was difficult to install in terms of price, but also the wind direction detection, which was conventionally limited to the laboratory, can be expanded to the general living space, and the number of installations has not been large in the past. It can also be installed on a clean bench.
  • thermal flow direction sensor which concerns on 1st Embodiment of this invention. It is an enlarged view which shows the front surface and the back surface of the substrate part for the 1st flow direction detection part and the substrate part for the 2nd flow direction detection part of the thermal type flow direction sensor of FIG. It is a block diagram which shows the electrical structure of the thermal flow direction sensor of FIG. It is a structural schematic diagram of the thermal flow direction sensor which concerns on 2nd Embodiment of this invention. It is an enlarged view which shows the front surface and the back surface of the substrate part for the 1st flow direction detection part and the substrate part for the 2nd flow direction detection part of the thermal type flow direction sensor of FIG.
  • FIG. 8 is an enlarged view of the front surface and the back surface of the substrate portion for the flow direction detection unit of the conventional thermal flow direction sensor of FIG.
  • FIG. 8 is a schematic diagram which shows the heat dissipation state of the substrate part for a flow direction detection part and the support part for a flow direction detection part in the conventional thermal flow direction sensor of FIG.
  • a flow direction detection unit 2 and an air temperature measurement unit 3 are mounted on a substrate 1 formed in a predetermined shape, and the flow direction of a fluid in the space around the flow direction detection unit 2 is mounted. To measure.
  • a circuit unit 4 is provided outside the substrate 1.
  • the substrate 1 is formed in a polygonal thin plate shape, and a substrate main portion 10, two substrate portions 11 for flow direction detection units on which flow direction detection units 2 are mounted, and an air temperature measurement unit 3 are mounted.
  • FR-4 made of glass epoxy which is widely sold as a printed circuit board, is preferably used, but a substrate made of polyamide may also be used, and thermal conductivity such as a ceramic substrate or a silicon substrate may be used.
  • a substrate made of a member having a low rate may be used.
  • the main board portion 10 is formed in a rectangular shape when viewed from the front, and a predetermined circuit pattern in which the front surface and the back surface are asymmetrical or symmetrical is mounted.
  • the main board portion 10 is an external circuit that uses a mounting hole 15 for mounting the sensor on another device or structure, and data related to temperature information of the flow direction detection unit 2 and the temperature measuring unit 3 by a digital signal or an analog signal.
  • An electrical connector 16 that transmits to the unit 4 is provided.
  • the flow direction detection unit substrate portion 11 is composed of a first flow direction detection unit substrate portion 111 and a second flow direction detection unit substrate portion 112 having a circular shape in a front view, and includes a first flow direction detection unit substrate portion 111.
  • the flow direction detection unit 2 is mounted on the front surface and the back surface of the second flow direction detection unit substrate portion 112.
  • the flow direction detection unit 2 is for detecting the flow direction of the fluid, and as shown in FIG. 2, the heater element 20 that generates heat by the supply current and the heater element that changes according to the flow velocity of the fluid. It has a temperature measuring element 21 (21a, 21b, 21c, 21d) for detecting the temperature of heat from 20, and one flow direction is provided by the pair of heater elements 20 and the temperature measuring element 21 (21a, 21b, 21c, 21d).
  • the detection unit 2 is configured. Further, the pair of heater elements 20 and the temperature measuring elements 21 (21a, 21b, 21c, 21d) are arranged so as to face each other, and are thermally directly connected via the flow direction detection unit substrate portion 11. It has become.
  • the arrangement of the heater element 20 and the temperature measuring element 21 (21a, 21b, 21c, 21d) will be specifically described.
  • FIG. 2A on the surface of the first flow direction detection unit substrate portion 111, The heater element 20 is arranged in a facing state so that the heater element 20 is on the upper side of FIG. 2 and the temperature measuring element 21a is on the lower side of FIG.
  • the heater element 20 On the back surface of the portion 111, the heater element 20 is arranged in a facing state so that the heater element 20 is on the lower side of FIG. 2 and the temperature measuring element 21b is on the upper side of FIG.
  • the pair of heater elements 20 and the temperature measuring elements 21 (21a, 21b) are arranged upside down.
  • the heater element 20 faces the lower side of FIG. 2 and the temperature measuring element 21c faces the upper side of FIG.
  • the heater element 20 is on the upper side of FIG. 2 and the temperature measuring element 21d is on the lower side of FIG.
  • the pair of heater elements 20 and temperature measuring elements 21 (21c, 21d) are arranged upside down on the front surface and the back surface of the second flow direction detection unit substrate portion 112. ing.
  • a (A1, A2) in FIG. 2 is a heater element 20 of each flow direction detection unit 2 on the front surface and the back surface of the first flow direction detection unit substrate portion 111 or the second flow direction detection unit substrate portion 112.
  • the temperature detection axis direction by the temperature measuring element 21 (21a, 21b, 21c, 21d) is shown.
  • the detection axial direction A1 of the flow direction detection unit 2 of the first flow direction detection unit board portion 111 and the detection axial direction A2 of the flow direction detection unit 2 of the second flow direction detection unit 112 are parallel to each other. It is in a state.
  • the four temperature measuring elements 21 (21a, 21b, 21c, 21d) of the above-mentioned flow direction detection unit 2 are arranged so that the axial directions connecting the two temperature measuring elements 21 are all different directions. .. That is, if two temperature measuring elements 21 of the four temperature measuring elements 21 are connected by a straight line, a tetrahedron having six axes is formed, but there is a combination in which the angles of these axes are the same. By arranging the four temperature measuring elements 21 so as not to occur, the three-dimensional direction of the flow direction of the fluid can be obtained.
  • the flow direction detection unit 2 is provided with a pair of heater elements 20 of the flow direction detection unit on the front surface and the back surface of the first flow direction detection unit substrate portion 111 or the second flow direction detection unit substrate portion 112.
  • the temperature detection axial direction A (A1, A2) by the temperature measuring element 21 and the support axial direction B of the first flow direction detection unit support 131 and the second flow direction detection support 132, which will be described later, are 90 degrees. It is implemented in such a way that it intersects at an angle of.
  • the substrate portion 12 for the air temperature measuring unit is formed in a rectangular shape when viewed from the front, and the air temperature measuring unit 3 is mounted on the surface thereof.
  • the air temperature measuring unit 3 has an air temperature measuring element (not shown), and measures the air temperature of the fluid around the air temperature measuring unit 3 by the air temperature measuring element.
  • the support portion 13 for the flow direction detection unit is an elongated support portion main body 130 for the flow direction detection portion extending from the central portion of one end portion in the length direction of the main substrate portion 10 and the support portion main body 130 for the flow direction detection portion. From the elongated first support portion 131 for the flow direction detection portion and the tip portion of the support portion main body 130 for the flow direction detection portion, which extends from the tip portion while branching and is connected to the substrate portion 111 for the first flow direction detection portion. The elongated support portion 132 for the second flow direction detection unit, which extends while branching and is connected to the substrate portion 112 for the second flow direction detection unit, is provided, and the support portion 131 for the first flow direction detection unit and the second support portion 132 are provided.
  • the support portion 132 for the flow direction detection unit extends from the tip end portion of the support portion main body 130 for the flow direction detection unit while branching in the separation direction at an angle of 180 degrees from each other.
  • B in FIG. 2 is the support axial direction of the support part 131 for the first flow direction detection part and the support part 132 for the second flow direction detection part (the support part 131 for the first flow direction detection part and the second flow direction).
  • the direction of the axis supporting the flow direction detection unit 2 of the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112 by the detection unit support unit 132) is shown.
  • the flow direction detection unit 2 mounted on the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112 is integrally formed with the substrate main portion 10 to support the flow direction detection unit. It has a structure supported by the portion 13. By forming the support portion 13 for the flow direction detection unit in an elongated shape in this way, heat conduction from the flow direction detection unit 2 to the main substrate portion 10 can be suppressed.
  • the support portion 14 for the air temperature measuring unit is formed in an elongated shape that integrally extends from both side portions of one end portion in the length direction of the main substrate portion 10 to the substrate portion 12 for the air temperature measuring unit, and the air temperature is formed at the tip portion.
  • the substrate portion 12 for the measuring unit is continuously provided on the same plane. Therefore, the air temperature measuring unit 3 mounted on the air temperature measuring unit substrate portion 12 has a structure supported by the air temperature measuring unit supporting unit 14 integrally formed with the main substrate portion 10.
  • the substrate portion 11 for the flow direction detection unit and the substrate portion 12 for the air temperature measurement unit are integrally connected via the support unit 13 for the flow direction detection unit and the support unit 14 for the air temperature measurement unit, respectively. It has a structure. Therefore, the flow direction detection unit 2 mounted on the substrate portion 11 for the flow direction detection unit and the air temperature measurement unit 3 mounted on the substrate portion 12 for the air temperature measurement unit are separated from the main substrate portion 10 by a predetermined distance and are separated from each other by a predetermined distance. Will be placed apart from each other.
  • the circuit unit 4 of this sensor is composed of a quantization device 41 (AD converter), an arithmetic unit 42 (CPU), and an information output device 43.
  • the quantization device 41 (AD converter) has an AD conversion function that converts temperature information from the temperature measuring element 21 of the flow direction detection unit 2 and temperature information from the temperature measuring unit 3 into digital signals, respectively. ..
  • the arithmetic unit 42 calculates the flow direction of the fluid based on the temperature information of the heater element 20 detected by the flow direction detection unit 2 and the temperature information of the ambient fluid measured by the air temperature measurement unit 3.
  • the circuit unit 4 has a function of calculating the temperature difference between the temperature measuring elements 21 for each axis (X-axis, Y-axis, Z-axis) in order to obtain the flow direction of the three-dimensional direction of the fluid, and each of them.
  • the information output device 43 outputs the flow direction of the fluid calculated by the arithmetic unit 42 to a predetermined device.
  • the computing device 42 is of a thermal type such as a KING formula based on the temperature information of the heater element 20 detected by the flow direction detection unit 2 and the temperature information of the ambient fluid measured by the air temperature measuring unit 3.
  • the flow velocity and flow rate of the fluid may be calculated using the operating principle.
  • the heater element 20 mounted on the surface of the flow direction detection board portion 11 is heated by the supply current from the internal power supply wiring (not shown) of the flow direction detection unit board portion 11. .. Then, when this sensor is arranged in the fluid, the heat of the heater element 20 changes according to the flow velocity of the fluid, and the heat directly to the temperature measuring element 21 via the substrate portion 11 for the flow direction detection unit. Conduct. Then, the temperature measuring element 21 detects the temperature of the heat conducted from the heater element 20.
  • the air temperature measuring element (not shown) measures the air temperature of the fluid around the air temperature measuring unit 3.
  • the flow direction of the fluid is calculated based on the temperature information of the heater element 20 detected by the flow direction detection unit 2 and the temperature information of the ambient fluid measured by the air temperature measurement unit 3.
  • each temperature measuring element 21 changes according to the flow velocity and the flow velocity of the fluid, and the temperature changes due to the positional relationship of each temperature measuring element 21. Makes a difference. Then, on the upstream side and the downstream side of the heater element 20 which is a heating element placed in the fluid, the temperature on the upstream side is lower than that on the downstream side, and the temperature difference between the upstream side and the downstream side is the flow velocity of the fluid. It grows according to. Therefore, this principle can be used to calculate the flow direction of the fluid.
  • the left-right direction in FIG. 2A is the X-axis
  • the right side is the plus direction of the X-axis.
  • the back direction is the Y axis
  • the back side Y axis is the plus direction.
  • the vertical direction is the Z-axis direction
  • the upward direction is the positive direction of the Z-axis.
  • the temperature difference may be obtained from the average value of the two temperature measuring elements 21 on the plus side of the X-axis and the two temperature measuring elements 21 on the minus side, or the individual differences between the left and right may be obtained first.
  • the temperature difference may be obtained from the average value thereof.
  • the vector Z representing the flow of the fluid in the Z-axis direction and its strength is obtained from the temperature difference between the temperature measuring element 21b and / or the temperature measuring element 21c and the temperature measuring element 21a and / or the temperature measuring element 21d.
  • the difference may be derived after obtaining the average value of the two temperature measuring elements 21 in the upper direction and the lower position, or the difference between the individual temperature measuring elements 21 may be obtained and then averaged to obtain the difference. May be good.
  • the vector Y representing the flow of the fluid in the Y-axis direction and its strength is obtained from the temperature difference between the temperature measuring element 21a and / or the temperature measuring element 21c and the temperature measuring element 21b and / or the temperature measuring element 21d.
  • the three-dimensional direction of the flow direction of the fluid can be obtained from the vectors X, Y, and Z of the three axes (X-axis, Y-axis, and Z-axis) thus obtained.
  • the amount of heat radiated from the flow direction detection unit substrate portion 11 increases as the fluid velocity increases.
  • the amount of heat radiation Qa2 from the support portion 13 for the flow direction detection unit is larger than that of Qa1, and the amount of heat radiation Qb from the substrate portion 11 for the flow direction detection unit to the support unit 13 for the flow direction detection unit increases accordingly. Therefore, as shown in FIGS.
  • the temperature measuring element 21c As the temperature of the temperature measuring element 21a becomes lower, the sensor may erroneously detect that there is a flow direction from the lower position.
  • each flow direction detection unit 2 has a pair of flow direction detection units 2 on the front surface and the back surface of the first flow direction detection unit substrate portion 111 or the second flow direction detection unit substrate portion 112.
  • the temperature detection axial direction A (A1, A2) by the heater element 20 and the temperature measuring element 21 and the support axial direction B of the first flow direction detection unit support 131 or the second flow direction detection support 132 It is implemented in such a way that it intersects at an angle of 90 degrees.
  • each flow direction detection unit 2 detects the temperature of the heat of the heater element 20
  • the influence of heat dissipation in the support unit 13 for the flow direction detection unit can be reduced, and the flow direction of the fluid can be accurately adjusted. It becomes possible to calculate well.
  • a flow direction detection unit 2 and an air temperature measurement unit 3 are mounted on a substrate 1 formed in a predetermined shape, and the flow direction of a fluid in the space around the flow direction detection unit 2 is mounted. To measure.
  • a circuit unit 4 is provided outside the substrate 1.
  • the heater element 20 is on the upper right side of FIG. 2, and the temperature measuring element 21a is on the lower left side of FIG.
  • the heater element 20 is located on the lower right side of FIG. 2, and is a temperature measuring element, as shown in FIG. 5 (b).
  • 21b is arranged in a facing state so as to be obliquely upper left in FIG. 2, whereby a pair of heater elements 20 and temperature measuring elements 21 (21a, 21b) are arranged on the front surface and the back surface of the substrate portion 111 for the first flow direction detection unit. Is upside down.
  • the heater element 20 is on the lower right side of FIG. 2, and the temperature measuring element 21c is on the upper left side of FIG.
  • the heater element 20 is located on the upper right side of FIG. 2 and the temperature measuring element 21d, as shown in FIG. 5 (b).
  • the heater element 20 is arranged so as to face each other so as to be on the lower left side of FIG. Is upside down.
  • the detection axial direction A1 of the flow direction detection unit 2 of the first flow direction detection unit board portion 111 and the detection axial direction A2 of the flow direction detection unit 2 of the second flow direction detection unit 112 The heater element 20 of each flow direction detection unit 2 and the temperature measuring elements 21 (21a, 21b, 21c, 21d) are arranged in a facing state so that they are at an angle of 90 degrees with each other.
  • the support portion 13 for the flow direction detection unit includes an elongated support portion main body 130 for the flow direction detection portion extending from the central portion of one end portion in the length direction of the main substrate portion 10 and a support portion main body for the flow direction detection portion.
  • An elongated first flow direction detection part support 131 extending from the tip of 130 while branching and being connected to the first flow direction detection board portion 111, and the tip of the flow direction detection support main body 130. It is provided with an elongated support portion 132 for a second flow direction detection unit, which extends from the portion while branching and is connected to the substrate portion 112 for the second flow direction detection unit.
  • the support for the flow direction detection unit 2 extends from the tip end portion of the support unit main body 130 for the flow direction detection unit while branching in the separation direction at an angle of 90 degrees from each other.
  • B1 in FIG. 5 is the support axial direction of the support part 131 for the 1st flow direction detection part (the flow direction detection part 2 of the substrate part 111 for the 1st flow direction detection part by the support part 131 for the 1st flow direction detection part.
  • B2 in FIG. 5 indicates the support axial direction of the support portion 132 for the second flow direction detection unit (for the second flow direction detection unit by the support unit 132 for the second flow direction detection unit). The direction of the axis supporting the flow direction detection unit 2 of the substrate portion 112) is shown.
  • the flow direction detection unit 2 is a heater element of each flow direction detection unit 2 on the front surface and the back surface of the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112. 20 and the temperature detection axial direction A (A1, A2) by the temperature measuring element 21, and the support axial direction B (B1, B2) of the first flow direction detection unit support 131 and the second flow direction detection support 132. ) Will be implemented in a manner that intersects at an angle of 90 degrees.
  • the support portion 131 for the first flow direction detection unit and the support portion 132 for the second flow direction detection unit are oblique with respect to the substrate portion 111 for the first flow direction detection unit and the substrate portion 112 for the second flow direction detection unit. Since the direction is downward, the angles that hinder the detection of the fluid flow direction are concentrated in the diagonally downward position. Therefore, the angle at which the flow direction of the fluid can be satisfactorily detected is widened, and a more practical flow direction detection unit 2 can be provided.
  • the left-right direction is the X-axis and the right side is the plus direction of the X-axis.
  • the depth direction is the Y-axis, and the depth side is the plus direction of the Y-axis.
  • the vertical direction is the Z-axis, and the upward direction is the positive direction of the Z-axis.
  • the axis A1 has an angle of 45 degrees with respect to the X-axis and the Z-axis
  • the axis A2 also has an angle of 45 degrees with respect to the X-axis and the Z-axis.
  • the axes A1 and A2 are not in a parallel relationship.
  • the temperature difference between 21a and 21b arranged on the axis A1 and the temperature difference between 21c and 21d arranged on the axis A2 measure the components of both the X-axis and the Z-axis. Therefore, the strength of the X-axis can be found by calculating the vector AV of the composite vector from the difference between the axes A1 and the axis A2 and projecting it from the vector AV to the X-axis using a trigonometric function. Similarly, by projecting from the vector AV to the Z-axis with a trigonometric function, the strength of the Z-axis can be found. Similarly, it is possible to project the Y-axis with a trigonometric function, but it can also be simply obtained from the difference between the 21a and 21c arranged on the front surface and the 21b and 21d arranged on the back surface.
  • this sensor has a flow direction detection unit 2, an air temperature measurement unit 3, and a circuit unit 4 mounted on a substrate 1 formed in a predetermined shape, and is a space around the flow direction detection unit 2. Measure the flow direction of the fluid in.
  • the heater element 20 is on the lower right side of FIG. 7, and the temperature measuring element 21a is on the upper left side of FIG.
  • the heater element 20 is located on the upper right side of FIG. 7, and the temperature measuring element 21b, as shown in FIG. 7B.
  • the heater element 20 is located on the upper right side of FIG. 7, and the temperature measuring element 21b, as shown in FIG. 7B.
  • the heater element 20 is on the upper right side of FIG. 7, and the temperature measuring element 21c is on the lower left side of FIG.
  • the heater element 20 is located on the lower right side of FIG. 7, and is a temperature measuring element, as shown in FIG. 7 (b).
  • 21d is arranged so as to face each other so as to be obliquely upper left in FIG. 7, whereby a pair of heater element 20 and temperature measuring element 21 (21c, 21d) are arranged on the front surface and the back surface of the substrate portion 112 for the second flow direction detection unit. ) Is upside down.
  • the detection axial direction A1 of the flow direction detection unit 2 of the first flow direction detection unit board portion 111 and the detection axial direction A2 of the flow direction detection unit 2 of the second flow direction detection unit 112 The heater element 20 of each flow direction detection unit 2 and the temperature measuring elements 21 (21a, 21b, 21c, 21d) are arranged in a facing state so that they are at an angle of 90 degrees with each other.
  • the support portion 13 for the flow direction detection unit includes an elongated support portion main body 130 for the flow direction detection portion extending from the central portion of one end portion in the length direction of the main substrate portion 10 and a support portion main body for the flow direction detection portion.
  • An elongated first flow direction detection part support 131 that extends from the tip of 130 while branching and is connected to the first flow direction detection board portion 111, and the tip of the flow direction detection support main body 130. It is provided with an elongated support portion 132 for the second flow direction detecting portion, which extends from the portion while branching and is connected to the substrate portion 112 for the second flow direction detecting portion.
  • first flow direction detection unit support 131 and the second flow direction detection support 132 extend from the tip of the flow direction detection support main body 130 while branching in a separation direction at an angle of 90 degrees from each other. , Bend and extend in a direction close to each other, and are connected to the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112.
  • B1 in FIG. 7 is the support axial direction of the support part 131 for the first flow direction detection part (the flow direction detection part 2 of the substrate part 111 for the first flow direction detection part by the support part 131 for the first flow direction detection part.
  • B2 in FIG. 7 indicates the support axial direction of the support portion 132 for the second flow direction detection unit (for the second flow direction detection unit by the support unit 132 for the second flow direction detection unit). The direction of the axis supporting the flow direction detection unit 2 of the substrate portion 112) is shown.
  • the flow direction detection unit 2 is a heater element in each flow direction detection unit 2 on the front surface and the back surface of the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112. 20 and the temperature detection axial direction A (A1, A2) by the temperature measuring element 21, and the support axial direction B (B1, B2) of the first flow direction detection unit support 131 and the second flow direction detection support 132. ) Will be implemented in a manner that intersects at an angle of 90 degrees.
  • the distance between the flow direction detection unit 2 of the substrate portion 111 for the first flow direction detection unit and the flow direction detection unit 2 of the support unit 112 for the second flow direction detection unit becomes close, so that the detection range of the fluid flow direction is pinpointed. It becomes possible to catch it with.
  • two substrate portions 11 for the flow direction detection unit are provided, but other number may be provided.
  • the support portion 13 for the flow direction detection unit is branched into two, it may be branched into other numbers.
  • a plurality of flow direction detection unit support portions 13 may be provided directly on the substrate main portion 10.
  • flow direction detection unit 2 is mounted on each surface of the front surface and the back surface of the flow direction detection unit substrate portion 11, it may be mounted on only one of the surfaces.
  • the temperature detection axial direction A by the heater element 20 and the temperature measuring element 21 of each flow direction detection unit 2 and the support axial direction B of the flow direction detection unit 2 by the flow direction detection unit support 13 intersect at an angle of 90 degrees. However, they may intersect at other angles. However, in order to measure the flow direction of the fluid with high accuracy, it is preferable that the detection axial direction A and the support axial direction B intersect within a range of 45 degrees to 90 degrees (including 45 degrees and 90 degrees).
  • Substrate 10 ... Substrate main part 11 ... Board part for flow direction detection part 111 ... Board part for first flow direction detection part 112 ... Board part for second flow direction detection part 12 ... Board part for temperature measurement part 13 ... Flow direction detection Support part for part 130 ... Support part main body for flow direction detection part 131 ... Support part for first flow direction detection part 132 ... Support part for second flow direction detection part 14 ... Support part for temperature measurement part 15 ... Mounting hole 16 ... Electricity Target connector 2 ... Flow direction detection unit 20 ... Heater element 21 (21a, 21b, 21c, 21d) ... Temperature measuring element 3 ... Temperature measuring unit 4 ... Circuit unit 41 ... Quantifying device 42 ... Computing device 43 ... Information output device

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Abstract

The purpose of the present invention is to provide a thermal flow direction sensor capable of accurately measuring the flow direction of a fluid. The present invention comprises: a flow velocity detection unit 2 that has a temperature measurement element for detecting the temperature of heat; an air temperature measurement unit 3 that measures the air temperature; a circuit unit 4 that calculates the flow velocity and the flow rate of the fluid; and a substrate 1 on which the flow velocity detection unit 2 and the air temperature measurement unit 3 are mounted. The flow direction detection unit 2 is mounted on a substrate part in a shape such that a heater element 20 and a temperature measurement element 21 in each pair are arranged to face each other on a front surface and a rear surface of a flow direction detection unit substrate part 11, and a temperature detection axis direction A (A1, A2) by means of one pair of a heat element 20 and a temperature measurement element 21 of each flow direction detection unit 2 intersects a support axial direction B of the flow direction detection unit 2 by means of a flow direction detection unit support part 13.

Description

熱式流向センサThermal flow direction sensor
　本発明は、熱式の動作原理を用いて流体の流向を計測する熱式流向センサに関するものである。 The present invention relates to a thermal flow direction sensor that measures the flow direction of a fluid using a thermal operation principle.
　居住空間、工業設備、栽培設備などの農業現場では、風速が重要な環境要素である。さらに、どの方向からの風かという風向の情報は、環境把握を行う上で重要である。例えば、居住空間では、タバコの煙など有害物質の流れの方向を把握できた方がよい。工業分野でもクリーンルームなどの風向きに留意を払うアプリケーションが存在する。また、ＩＣＴ化・クラウド化等で中心的な役割を果たすデータセンタやサーバルームなどでは、気流管理が適切に行われないと、サーバの冷却が適切に行われなくなり、処理速度の制約を受けることになる。 Wind speed is an important environmental factor at agricultural sites such as living spaces, industrial equipment, and cultivation equipment. Furthermore, information on the wind direction from which direction the wind is coming from is important for understanding the environment. For example, in a living space, it is better to be able to grasp the direction of the flow of harmful substances such as cigarette smoke. Even in the industrial field, there are applications such as clean rooms that pay attention to the wind direction. In addition, in data centers and server rooms that play a central role in ICT and cloud computing, if airflow management is not performed properly, the server will not be cooled properly and processing speed will be restricted. become.
　これらの環境では、屋外環境と異なり、空間の風速は１ｍ／ｓ以下であることが多く、また、設置場所も限られるため、小型である必要がある。また、屋外環境であっても、センサの小型化・低コスト化の要求は強くなっており、これらのニーズを満たすセンサデバイスが求められている。 In these environments, unlike the outdoor environment, the wind speed in the space is often 1 m / s or less, and the installation location is limited, so it is necessary to be small. Further, even in an outdoor environment, there is an increasing demand for miniaturization and cost reduction of sensors, and sensor devices that meet these needs are required.
　ところで、センサデバイスとして、様々な方式が提案・実用化されている。例えば、屋外気象観測で一般的に用いられるのは、いわゆる風見鶏タイプのもので、風の応力によって風下側に羽根が来るようにした風向計が知られている。また、気象庁や屋外気象観測は、これに風速検出のプロペラを仕込んだ飛行機型と呼ばれる風向風速計が用いられる。 By the way, various methods have been proposed and put into practical use as sensor devices. For example, the so-called weathercock type that is generally used in outdoor meteorological observation is known as a weathercock in which the blades come to the leeward side due to the stress of the wind. In addition, the Japan Meteorological Agency and outdoor meteorological observations use an anemometer called an airplane type equipped with a propeller for detecting wind speed.
　また、上述の風向風速計以外にも、超音波の伝達速度から風速と風向を求める、超音波式のものが知られている。これは、複数方向の風速を同時に計測し、その複数の風速からベクトルを導き出して風向を得る方法である。風向の算出には、最低２軸の超音波発振器と受信機が必要で、これを３組用いて３軸で計算すると、３次元での風向も得られる。 In addition to the above-mentioned anemometer, an ultrasonic type that obtains the wind speed and direction from the transmission speed of ultrasonic waves is known. This is a method of simultaneously measuring wind speeds in a plurality of directions and deriving a vector from the plurality of wind speeds to obtain a wind direction. To calculate the wind direction, an ultrasonic oscillator with at least two axes and a receiver are required, and if three sets of these are used to calculate the wind direction on three axes, a three-dimensional wind direction can also be obtained.
　ところが、これらの従来の風向風速計は、装置の大きさが２０ｃｍ四方以上の空間を必要とするのが一般的であり、また装置コストも高額なものがほとんどである。また、１ｍ／ｓ以下の微風速を良好に検出できるのは、上述の風向風速計のうち超音波式のみであるが、超音波式の風向風速計も分解能を上げるためには使用周波数を上げるか、発振器と受信機の間の距離を広げなければならなかった。 However, these conventional anemometers generally require a space with a size of 20 cm square or more, and most of them are expensive. In addition, only the ultrasonic type of the above-mentioned anemometers can satisfactorily detect a breeze speed of 1 m / s or less, but the ultrasonic type anemometer also increases the operating frequency in order to improve the resolution. Or the distance between the oscillator and the receiver had to be increased.
　そこで、従来から熱式の風向風速計が実用化されていた。この熱式の風向風速計は、指向性を持たせたＰｔ自己発熱式風速センサを３つ組み合わせて、指向性による感度の違いを利用して風向を算出するものであり、小型化が容易で、構造も比較的簡単であり、微風速を計測可能という特徴を備えている。 Therefore, a thermal anemometer has been put into practical use. This thermal anemometer combines three Pt self-heating anemometers with directivity and calculates the wind direction by utilizing the difference in sensitivity due to directivity, and it is easy to miniaturize. The structure is also relatively simple, and it has the feature of being able to measure the breeze speed.
　この熱式の風向風速計に用いる熱式流向センサとして、基板上に必要な回路等を実装したものが知られている。具体的には、この熱式流向センサは、図８および図９に示すように、供給電流により熱を発生するヒータ素子２０と、流体の流速に応じて変化するヒータ素子２０からの熱の温度を検出する測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）とを有する流向検出部２と、流体の気温を計測する気温計測部３と、流体の流向を演算する回路部４と、それらが実装される基板１とを備え、センサの周囲の空間における流体の流向を計測する（例えば、特許文献１参照） As a thermal flow direction sensor used for this thermal wind direction anemometer, a circuit or the like mounted on a substrate is known. Specifically, as shown in FIGS. 8 and 9, in this thermal flow direction sensor, the temperature of the heat from the heater element 20 that generates heat by the supply current and the heater element 20 that changes according to the flow velocity of the fluid. A flow direction detection unit 2 having a temperature measuring element 21 (21a, 21b, 21c, 21d) for detecting the above, a temperature measuring unit 3 for measuring the temperature of the fluid, a circuit unit 4 for calculating the flow direction of the fluid, and the like. A substrate 1 to be mounted is provided, and the flow direction of a fluid in the space around the sensor is measured (see, for example, Patent Document 1).
　そして、この熱式流向センサは、流向検出部用基板部分１１の表面および裏面において、一対のヒータ素子２０および測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）が基板支持部１３による流向検出部２の支持軸方向に沿って対向状態に配置されていた。なお、流向検出部用基板部分１１の表面および裏面の各測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）を頂点とする四面体を形成し、各測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）を結ぶ軸は全て同じ方向とならないように配置されている。 In this thermal flow direction sensor, a pair of heater elements 20 and temperature measuring elements 21 (21a, 21b, 21c, 21d) are formed on the front surface and the back surface of the flow direction detection unit substrate portion 11 by the substrate support portion 13. It was arranged so as to face each other along the support axis direction of 2. A tetrahedron having the temperature measuring elements 21 (21a, 21b, 21c, 21d) on the front surface and the back surface of the substrate portion 11 for the flow direction detection unit as vertices is formed, and the temperature measuring elements 21 (21a, 21b, 21c, 21c, The axes connecting 21d) are arranged so as not to be in the same direction.
特開２０１６－１１８５１１号公報Japanese Unexamined Patent Publication No. 2016-118511
　しかしながら、上述の熱式流向センサのヒータ素子２０と測温素子２１の配置構造の場合、流体の流速が大きくなるほど、流体の流向を誤検出する場合があるという問題があった。 However, in the case of the above-mentioned arrangement structure of the heater element 20 and the temperature measuring element 21 of the thermal flow direction sensor, there is a problem that the flow direction of the fluid may be erroneously detected as the flow velocity of the fluid increases.
　この点について、図１０を参照しつつ具体的に説明する。図１０は、流向検出部用基板部分１１および流向検出部用支持部１３を側面から見た図である。図を簡略化するため、測温素子２１のみを図示している。流体は、流向検出部用基板部分１１および流向検出部用支持部１３の表面に垂直に当たっている状態とする。Ｑａ１は、流向検出部２から放熱される熱を表わし、Ｑａ２は流向検出部用支持部１３から放熱される熱を表わし、Ｑｂは流向検出部用支持部１３内を伝達する熱を表わす。無風の状態であれば、Ｑａ１およびＱａ２の放熱量は少なく、Ｑｂの放熱量の方が１桁高い状態となる。 This point will be specifically described with reference to FIG. FIG. 10 is a side view of the flow direction detection unit substrate portion 11 and the flow direction detection unit support portion 13. For simplification of the figure, only the temperature measuring element 21 is shown. The fluid is in a state of being perpendicularly in contact with the surfaces of the flow direction detection unit substrate portion 11 and the flow direction detection unit support portion 13. Qa1 represents the heat radiated from the flow direction detection unit 2, Qa2 represents the heat radiated from the flow direction detection support 13, and Qb represents the heat transferred in the flow direction detection support 13. If there is no wind, the amount of heat released from Qa1 and Qa2 is small, and the amount of heat released from Qb is an order of magnitude higher.
　ところが、流体が本センサとの間で相対速度を持って流れ始めると、Ｑａ１およびＱａ２の放熱量は大きくなる。これは、熱式流速センサの測定原理で良く用いられるＫｉｎｇの下記［式１］で表される。 However, when the fluid starts to flow with the sensor at a relative velocity, the amount of heat released from Qa1 and Qa2 increases. This is represented by King's following [Equation 1], which is often used in the measurement principle of the thermal flow velocity sensor.
［式１］
Figure JPOXMLDOC01-appb-I000001
[Equation 1]
Figure JPOXMLDOC01-appb-I000001
　このとき、Ｑは流体への放熱量でＱａ１およびＱａ２に相当する。Ｕは流体速度、Ｔは発熱体の温度、Ｔａは流体の温度となる。ａとｂは定数で、ａが流体速度に関わらず流体に流れる熱量を表し、ｂは流体速度に応じて増加する熱量を表わす。つまり、流体速度が上昇すると、√Ｕに比例して流体の熱伝導も増加することを意味する。 At this time, Q corresponds to Qa1 and Qa2 in terms of the amount of heat dissipated to the fluid. U is the fluid velocity, T is the temperature of the heating element, and Ta is the temperature of the fluid. a and b are constants, a represents the amount of heat flowing through the fluid regardless of the fluid velocity, and b represents the amount of heat that increases with the fluid velocity. This means that as the fluid velocity increases, so does the heat conduction of the fluid in proportion to √U.
　本センサは、流向検出部用基板部分１１よりも流向検出部用支持部１３の方が表面積が大きいため、流体速度が大きくなればなるほど、Ｑａ１よりもＱａ２が大きくなって、これに伴いＱｂが増加する。すると、流向検出部用支持部１３から遠い測温素子２１ｃより、流向検出部用支持部１３に近い測温素子２１ａの温度が低くなる。風向検出の原理は、風上側の方が流体への放熱量が大きくなり、温度が低下する現象を用いていることから、本センサは下方位からの流向があると誤検知する虞があった。 In this sensor, the surface area of the support portion 13 for the flow direction detection unit is larger than that of the substrate portion 11 for the flow direction detection unit. Therefore, as the fluid velocity increases, Qa2 becomes larger than Qa1 and Qb increases accordingly. To increase. Then, the temperature of the temperature measuring element 21a closer to the flow direction detecting unit support 13 becomes lower than that of the temperature measuring element 21c farther from the flow direction detecting unit support portion 13. Since the principle of wind direction detection uses a phenomenon in which the amount of heat radiated to the fluid is larger on the wind side and the temperature is lowered, this sensor may erroneously detect that there is a flow direction from the lower position. ..
　本発明は、上述の問題に鑑みてなされたものであり、流体の流向を精度良く計測することができる熱式流向センサを提供することを目的とする。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a thermal flow direction sensor capable of accurately measuring the flow direction of a fluid.
　本発明は、上記目的を達成するために、供給電流により熱を発生するヒータ素子と、流体の流速に応じて変化する前記ヒータ素子からの熱の温度を検出する測温素子とを有する複数の流向検出部と、前記流向検出部の前記測温素子で検出された温度情報に基づいて、流体の流向を演算する回路部と、少なくとも前記流向検出部が実装される基板とを備える熱式流向センサであって、前記基板は、基板主要部と、前記流向検出部が実装される流向検出部用基板部分と、前記基板主要部から前記流向検出部用基板部分に一体的に延び、前記流向検出部を支持する細長形状の流向検出部用支持部とを備え、前記流向検出部は、前記流向検出部用基板部分の表面および／または裏面において、一対の前記ヒータ素子と前記測温素子が対向状態に配置されるとともに、一対の前記ヒータ素子と前記測温素子による温度の検出軸方向と、前記流向検出部用支持部による前記流向検出部の支持軸方向とが交差する態様で実装されていることを特徴とする。 In order to achieve the above object, the present invention has a plurality of heater elements that generate heat by a supply current and a temperature measuring element that detects the temperature of heat from the heater element that changes according to the flow velocity of the fluid. A thermal flow direction including a flow direction detection unit, a circuit unit that calculates the flow direction of a fluid based on the temperature information detected by the temperature measuring element of the flow direction detection unit, and at least a substrate on which the flow direction detection unit is mounted. The sensor is a sensor, and the substrate integrally extends from the main portion of the substrate, the substrate portion for the flow direction detection unit on which the flow direction detection unit is mounted, and the substrate portion for the flow direction detection unit from the main substrate portion, and the flow direction. The slender shape for supporting the detection unit is provided, and the flow direction detection unit has a pair of the heater element and the temperature measuring element on the front surface and / or the back surface of the substrate portion for the flow direction detection unit. It is mounted so as to be arranged in a facing state, and the temperature detection axial direction by the pair of heater elements and the temperature measuring element intersects with the support axial direction of the current direction detection unit by the current direction detection unit support unit. It is characterized by being.
　これによれば、各流向検出部の測温素子がヒータ素子の熱を温度を検出する際、流向検出部用支持部における放熱の影響を軽減することができ、ひいては流体の流向を精度良く演算することが可能となる。 According to this, when the temperature measuring element of each flow direction detection unit detects the temperature of the heater element, the influence of heat dissipation in the support part for the flow direction detection unit can be reduced, and the flow direction of the fluid can be calculated accurately. It becomes possible to do.
　また、前記流向検出部は、少なくとも４個設けられ、各流向検出部の前記測温素子を結ぶ軸方向が全て異なる方向となるように前記流向検出部用支持部に実装されているのが好ましい。これによれば、４個の測温素子の温度情報に基づいて流体の流向の三次元方位を求めることができる。 Further, it is preferable that at least four flow direction detection units are provided and mounted on the support portion for the flow direction detection unit so that the axial directions connecting the temperature measuring elements of each flow direction detection unit are all different directions. .. According to this, it is possible to obtain the three-dimensional direction of the flow direction of the fluid based on the temperature information of the four temperature measuring elements.
　また、前記流向検出部は、一対の前記ヒータ素子と前記測温素子による温度の検出軸方向と、前記流向検出部用支持部による前記流向検出部の支持軸方向とが４５度～９０度の角度で交差する態様で前記流向検出部用基板部分に実装されているのが好ましく、さらに好ましくは、前記流向検出部は、一対の前記ヒータ素子と前記測温素子による温度の検出軸方向と、前記流向検出部用支持部による前記流向検出部の支持軸方向とが９０度の角度で交差する態様で前記流向検出部用基板部分に実装されているのがよい。これによれば、各流向検出部の測温素子がヒータ素子の熱の温度を検出する際、流向検出部用支持部における放熱の影響をより軽減することができる。 Further, in the flow direction detection unit, the temperature detection axial direction by the pair of the heater elements and the temperature measuring element and the support axial direction of the flow direction detection unit by the flow direction detection unit support unit are 45 to 90 degrees. It is preferable that the flow direction detection unit is mounted on the substrate portion for the flow direction detection unit so as to intersect at an angle, and more preferably, the flow direction detection unit includes a pair of the heater elements and the temperature detection axial direction by the temperature measuring element. It is preferable that the support portion for the flow direction detection unit is mounted on the substrate portion for the flow direction detection unit in such a manner that the support axis direction of the flow direction detection unit intersects at an angle of 90 degrees. According to this, when the temperature measuring element of each flow direction detection unit detects the heat temperature of the heater element, the influence of heat dissipation in the support unit for the flow direction detection unit can be further reduced.
　また、前記流向検出部用基板部分および前記流向検出部用支持部が複数設けられ、各流向検出部用基板部分の表面および／または裏面に一対の前記ヒータ素子と前記測温素子を有する前記流向検出部が設けられているのが好ましい。これによれば、流向検出部と支持部の上述の配置構造を容易に製作することができる。 Further, the flow direction is provided with a plurality of the flow direction detection unit substrate portion and the flow direction detection unit support portion, and has the pair of heater elements and the temperature measuring element on the front surface and / or the back surface of each flow direction detection unit substrate portion. It is preferable that a detection unit is provided. According to this, the above-mentioned arrangement structure of the flow direction detecting portion and the supporting portion can be easily manufactured.
　前記流向検出部用基板部分は、表面および／または裏面に一対の前記ヒータ素子と前記測温素子を有する前記流向検出部が設けられた第１の流向検出部用基板部分と第２の流向検出部用基板部分を備え、前記流向検出部用支持部は、前記第１の流向検出部用基板部分に連設する第１の流向検出部用支持部と、前記第２の流向検出部用基板部分に連設する第２の流向検出部用支持部とを備えるのが好ましい。この場合、前記流向検出部用支持部は、前記基板主要部から延びる流向検出部用支持部本体と、該流向検出部用支持部本体の先端部から分岐しながら延び、前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設する前記第１の流向検出部用支持部および前記第２の流向検出部用支持部を備えてもよい。また、前記第１の流向検出部用支持部および前記第２の流向検出部用支持部は、互いに１８０度の角度で離間方向に分岐しながら延び、前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設してもよい。また、前記第１の流向検出部用支持部および前記第２の流向検出部用支持部は、互いに９０度の角度で離間方向に分岐しながら延び、前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設してもよい。また、前記第１の流向検出部用支持部および前記第２の流向検出部用支持部は、互いに離間方向に分岐しながら延びたあと、互いに近接方向に屈曲して延びて前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設してもよい。これらによれば、簡易な構造にして、流向検出部用支持部における放熱の影響を確実に軽減することができる。 The flow direction detection unit substrate portion includes a first flow direction detection unit substrate portion and a second flow direction detection in which the flow direction detection unit having the pair of heater elements and the temperature measuring element is provided on the front surface and / or the back surface. The support portion for the flow direction detection unit includes the substrate portion for the portion, and the support portion for the flow direction detection unit includes the support portion for the first flow direction detection unit connected to the substrate portion for the first flow direction detection unit and the substrate for the second flow direction detection unit. It is preferable to provide a support portion for a second flow direction detection portion that is connected to the portion. In this case, the support portion for the flow direction detection unit extends while branching from the support portion main body for the flow direction detection unit extending from the main part of the substrate and the tip end portion of the support portion main body for the flow direction detection unit, and the first flow direction detection. A support portion for the first flow direction detection unit and a support portion for the second flow direction detection unit, which are connected to the substrate portion for the unit and the substrate portion for the second flow direction detection unit, may be provided, respectively. Further, the support portion for the first flow direction detection unit and the support portion for the second flow direction detection unit extend while branching in a separation direction at an angle of 180 degrees from each other, and the substrate portion for the first flow direction detection unit and the support portion for the flow direction detection unit It may be connected to each of the second flow direction detection unit substrate portions. Further, the support portion for the first flow direction detection unit and the support portion for the second flow direction detection unit extend while branching in a separation direction at an angle of 90 degrees from each other, and the substrate portion for the first flow direction detection unit and the support portion for the flow direction detection unit It may be connected to each of the second flow direction detection part substrate portions. Further, the support portion for the first flow direction detection unit and the support portion for the second flow direction detection unit extend while branching in a direction away from each other, and then bend and extend in a direction close to each other to extend the first flow direction. The substrate portion for the detection unit and the substrate portion for the second flow direction detection unit may be connected to each other. According to these, the influence of heat dissipation in the support portion for the flow direction detection portion can be surely reduced by making the structure simple.
　前記第１の流向検出部用支持部および前記第２の流向検出部用支持部は、前記第１の流向検出部用基板部分に実装されている前記流向検出部の一対の前記ヒータ素子と前記測温素子による温度の検出軸方向と、前記第２の流向検出部用基板部分に実装されている前記流向検出部の一対の前記ヒータ素子と前記測温素子による温度の検出軸方向とが９０度の角度で交差する態様で前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設してもよい。これによれば、流向検出部用支持部における放熱の影響を確実に軽減するとともに、流体の流向を容易に計測することができる。 The support for the first flow direction detection unit and the support for the second flow direction detection unit are the pair of the heater elements of the flow direction detection unit mounted on the substrate portion for the first flow direction detection unit and the heater elements. The temperature detection axial direction by the temperature measuring element and the pair of heater elements of the flow direction detecting unit mounted on the substrate portion for the second flow direction detecting unit and the temperature detecting axial direction by the temperature measuring element are 90. It may be connected to the first substrate portion for the flow direction detection unit and the substrate portion for the second flow direction detection unit so as to intersect at an angle of degree. According to this, the influence of heat dissipation in the support portion for the flow direction detection unit can be surely reduced, and the flow direction of the fluid can be easily measured.
　本発明によれば、各流向検出部の測温素子がヒータ素子の熱の温度を検出する際、流向検出部用支持部における放熱の影響を軽減することができ、ひいては流体の流向を精度良く演算することが可能となる。 According to the present invention, when the temperature measuring element of each flow direction detection unit detects the heat temperature of the heater element, the influence of heat dissipation in the support unit for the flow direction detection unit can be reduced, and the flow direction of the fluid can be accurately adjusted. It becomes possible to calculate.
　また、流向検出部のヒータ素子と測温素子の配置を工夫したものであるため、熱式流向センサを低コストで製作、提供することができる。これにより、従来は価格面で設置が難しかった設置場所はもとより、従来は実験室に限定されていた風向検出を一般居住空間にも広げることができ、また従来は設置数を多く設けられなかったクリーンベンチなどにも設置することが可能となる。 In addition, since the arrangement of the heater element and the temperature measuring element of the flow direction detection unit is devised, it is possible to manufacture and provide a thermal flow direction sensor at low cost. As a result, not only the installation location, which was difficult to install in terms of price, but also the wind direction detection, which was conventionally limited to the laboratory, can be expanded to the general living space, and the number of installations has not been large in the past. It can also be installed on a clean bench.
本発明の第１の実施形態に係る熱式流向センサの構成概略図である。It is a structural schematic diagram of the thermal flow direction sensor which concerns on 1st Embodiment of this invention. 図１の熱式流向センサの第１の流向検出部用基板部分および第２の流向検出部用基板部分の表面および裏面を示す拡大図である。It is an enlarged view which shows the front surface and the back surface of the substrate part for the 1st flow direction detection part and the substrate part for the 2nd flow direction detection part of the thermal type flow direction sensor of FIG. 図１の熱式流向センサの電気的構成を示すブロック図である。It is a block diagram which shows the electrical structure of the thermal flow direction sensor of FIG. 本発明の第２の実施形態に係る熱式流向センサの構成概略図である。It is a structural schematic diagram of the thermal flow direction sensor which concerns on 2nd Embodiment of this invention. 図４の熱式流向センサの第１の流向検出部用基板部分および第２の流向検出部用基板部分の表面および裏面を示す拡大図である。It is an enlarged view which shows the front surface and the back surface of the substrate part for the 1st flow direction detection part and the substrate part for the 2nd flow direction detection part of the thermal type flow direction sensor of FIG. 本発明の第３の実施形態に係る熱式流向センサの構成概略図である。It is a structural schematic diagram of the thermal flow direction sensor which concerns on 3rd Embodiment of this invention. 図６の熱式流向センサの第１の流向検出部用基板部分および第２の流向検出部用基板部分の表面および裏面を示す拡大図である。It is an enlarged view which shows the front surface and the back surface of the substrate part for the 1st flow direction detection part and the substrate part for the 2nd flow direction detection part of the thermal type flow direction sensor of FIG. 従来の熱式流向センサの構成概略図である。It is a block diagram of the structure of the conventional thermal flow direction sensor. 図８の従来の熱式流向センサの流向検出部用基板部分の表面および裏面の拡大図である。FIG. 8 is an enlarged view of the front surface and the back surface of the substrate portion for the flow direction detection unit of the conventional thermal flow direction sensor of FIG. 図８の従来の熱式流向センサにおける流向検出部用基板部分および流向検出部用支持部の放熱状態を示す模式図である。It is a schematic diagram which shows the heat dissipation state of the substrate part for a flow direction detection part and the support part for a flow direction detection part in the conventional thermal flow direction sensor of FIG.
＜第１の実施形態＞
　次に、本発明に係る熱式流向センサ（以下、本センサという）の第１の実施形態について図１～図３を参照しつつ説明する。 <First Embodiment>
Next, a first embodiment of the thermal flow direction sensor (hereinafter referred to as the present sensor) according to the present invention will be described with reference to FIGS. 1 to 3.
　本センサは、図１に示すように、所定の形状に形成された基板１において、流向検出部２および気温計測部３が実装されており、前記流向検出部２の周囲の空間における流体の流向を計測する。なお、基板１の外部において回路部４が設けられている。以下、各構成について具体的に説明する。 As shown in FIG. 1, in this sensor, a flow direction detection unit 2 and an air temperature measurement unit 3 are mounted on a substrate 1 formed in a predetermined shape, and the flow direction of a fluid in the space around the flow direction detection unit 2 is mounted. To measure. A circuit unit 4 is provided outside the substrate 1. Hereinafter, each configuration will be specifically described.
　前記基板１は、多角形の薄板状に形成されており、基板主要部１０と、流向検出部２が実装される２個の流向検出部用基板部分１１と、気温計測部３が実装される２個の気温計測部用基板部分１２と、基板主要部１０から流向検出部用基板部分１１まで一体的に延びる流向検出部用支持部１３と、基板主要部１０の両側部から気温計測部用基板部分１２まで延びる２個の気温計測部用支持部１４とから構成される。 The substrate 1 is formed in a polygonal thin plate shape, and a substrate main portion 10, two substrate portions 11 for flow direction detection units on which flow direction detection units 2 are mounted, and an air temperature measurement unit 3 are mounted. Two substrate portions 12 for the air temperature measurement unit, support portions 13 for the flow direction detection unit that integrally extend from the main substrate portion 10 to the substrate portion 11 for the flow direction detection unit, and for the air temperature measurement unit from both sides of the main substrate portion 10. It is composed of two support portions 14 for air temperature measuring portions extending to the substrate portion 12.
　この基板１としては、プリント基板として一般に広く販売されているガラスエポキシ製のＦＲ－４が好適に用いられるが、ポリアミド製の基板でもよく、セラミック製の基板、シリコン製の基板のように熱伝導率が低い部材で形成された基板でもよい。 As the substrate 1, FR-4 made of glass epoxy, which is widely sold as a printed circuit board, is preferably used, but a substrate made of polyamide may also be used, and thermal conductivity such as a ceramic substrate or a silicon substrate may be used. A substrate made of a member having a low rate may be used.
　前記基板主要部１０は、正面視矩形状に形成されており、表面と裏面が非対称または対称の所定の回路パターンが実装されている。なお、基板主要部１０は、本センサを他の装置や構造物に取り付けるための取付孔１５や、流向検出部２や気温計測部３の温度情報に関するデータをデジタル信号またはアナログ信号により外部の回路部４に伝達する電気的コネクタ１６が設けられている。 The main board portion 10 is formed in a rectangular shape when viewed from the front, and a predetermined circuit pattern in which the front surface and the back surface are asymmetrical or symmetrical is mounted. The main board portion 10 is an external circuit that uses a mounting hole 15 for mounting the sensor on another device or structure, and data related to temperature information of the flow direction detection unit 2 and the temperature measuring unit 3 by a digital signal or an analog signal. An electrical connector 16 that transmits to the unit 4 is provided.
　前記流向検出部用基板部分１１は、正面視円形状の第１の流向検出部用基板部分１１１と第２の流向検出部用基板部分１１２からなり、第１の流向検出部用基板部分１１１と第２の流向検出部用基板部分１１２の表面および裏面に流向検出部２が実装されている。 The flow direction detection unit substrate portion 11 is composed of a first flow direction detection unit substrate portion 111 and a second flow direction detection unit substrate portion 112 having a circular shape in a front view, and includes a first flow direction detection unit substrate portion 111. The flow direction detection unit 2 is mounted on the front surface and the back surface of the second flow direction detection unit substrate portion 112.
　この流向検出部２は、流体の流向を検出するためのものであって、図２に示すように、供給電流により熱を発生するヒータ素子２０と、流体の流速に応じて変化する前記ヒータ素子２０からの熱の温度を検出する測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）とを有し、一対のヒータ素子２０と測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）で一つの流向検出部２を構成する。また、一対のヒータ素子２０と測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）は、互いに対向状態で配置されており、流向検出部用基板部分１１を介して熱的に直接接続された構造となっている。 The flow direction detection unit 2 is for detecting the flow direction of the fluid, and as shown in FIG. 2, the heater element 20 that generates heat by the supply current and the heater element that changes according to the flow velocity of the fluid. It has a temperature measuring element 21 (21a, 21b, 21c, 21d) for detecting the temperature of heat from 20, and one flow direction is provided by the pair of heater elements 20 and the temperature measuring element 21 (21a, 21b, 21c, 21d). The detection unit 2 is configured. Further, the pair of heater elements 20 and the temperature measuring elements 21 (21a, 21b, 21c, 21d) are arranged so as to face each other, and are thermally directly connected via the flow direction detection unit substrate portion 11. It has become.
　これらヒータ素子２０および測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）の配置について具体的に説明すると、図２（ａ）に示すように、第１の流向検出部用基板部分１１１の表面では、ヒータ素子２０が図２の上側、測温素子２１ａが図２の下側となるように対向状態に配置される一方、図２（ｂ）に示すように、第１の流向検出部用基板部分１１１の裏面では、ヒータ素子２０が図２の下側、測温素子２１ｂが図２の上側となるように対向状態に配置され、第１の流向検出部用基板部分１１１の表面と裏面で一対のヒータ素子２０および測温素子２１（２１ａ、２１ｂ）が上下逆の配置となっている。 The arrangement of the heater element 20 and the temperature measuring element 21 (21a, 21b, 21c, 21d) will be specifically described. As shown in FIG. 2A, on the surface of the first flow direction detection unit substrate portion 111, The heater element 20 is arranged in a facing state so that the heater element 20 is on the upper side of FIG. 2 and the temperature measuring element 21a is on the lower side of FIG. On the back surface of the portion 111, the heater element 20 is arranged in a facing state so that the heater element 20 is on the lower side of FIG. 2 and the temperature measuring element 21b is on the upper side of FIG. The pair of heater elements 20 and the temperature measuring elements 21 (21a, 21b) are arranged upside down.
　一方、図２（ａ）に示すように、第２の流向検出部用基板部分１１２の表面では、ヒータ素子２０が図２の下側、測温素子２１ｃが図２の上側となるように対向状態に配置される一方、図２（ｂ）に示すように、第２の流向検出部用基板部分１１２の裏面では、ヒータ素子２０が図２の上側、測温素子２１ｄが図２の下側となるように対向状態に配置され、これにより第２の流向検出部用基板部分１１２の表面と裏面で１対のヒータ素子２０および測温素子２１（２１ｃ、２１ｄ）が上下逆の配置となっている。 On the other hand, as shown in FIG. 2A, on the surface of the second flow direction detection unit substrate portion 112, the heater element 20 faces the lower side of FIG. 2 and the temperature measuring element 21c faces the upper side of FIG. On the other hand, as shown in FIG. 2B, on the back surface of the second flow direction detection unit substrate portion 112, the heater element 20 is on the upper side of FIG. 2 and the temperature measuring element 21d is on the lower side of FIG. The pair of heater elements 20 and temperature measuring elements 21 (21c, 21d) are arranged upside down on the front surface and the back surface of the second flow direction detection unit substrate portion 112. ing.
　なお、図２中のＡ（Ａ１、Ａ２）は、第１の流向検出部用基板部分１１１または第２の流向検出部用基板部分１１２の表面および裏面において、各流向検出部２のヒータ素子２０と測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）による温度の検出軸方向を示す。本実施形態では、第１の流向検出部用基板部分１１１の流向検出部２の検出軸方向Ａ１と、第２の流向検出部用基板部分１１２の流向検出部２の検出軸方向Ａ２は平行な状態になっている。 Note that A (A1, A2) in FIG. 2 is a heater element 20 of each flow direction detection unit 2 on the front surface and the back surface of the first flow direction detection unit substrate portion 111 or the second flow direction detection unit substrate portion 112. The temperature detection axis direction by the temperature measuring element 21 (21a, 21b, 21c, 21d) is shown. In the present embodiment, the detection axial direction A1 of the flow direction detection unit 2 of the first flow direction detection unit board portion 111 and the detection axial direction A2 of the flow direction detection unit 2 of the second flow direction detection unit 112 are parallel to each other. It is in a state.
　また、上述の流向検出部２の４個の測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）は、２個の測温素子２１を結ぶ軸方向が全て異なる方向となるように配置されている。つまり、４個の測温素子２１のうち、２個の測温素子２１を直線でそれぞれ接続すると、６本の軸を有する四面体を構成するが、これらの軸の角度が同一となる組み合わせが生じないように４個の測温素子２１を配置すると、流体の流向の三次元方位を求めることができる。 Further, the four temperature measuring elements 21 (21a, 21b, 21c, 21d) of the above-mentioned flow direction detection unit 2 are arranged so that the axial directions connecting the two temperature measuring elements 21 are all different directions. .. That is, if two temperature measuring elements 21 of the four temperature measuring elements 21 are connected by a straight line, a tetrahedron having six axes is formed, but there is a combination in which the angles of these axes are the same. By arranging the four temperature measuring elements 21 so as not to occur, the three-dimensional direction of the flow direction of the fluid can be obtained.
　また、本実施形態では、流向検出部２は、第１の流向検出部用基板部分１１１または第２の流向検出部用基板部分１１２の表面および裏面において、流向検出部の一対のヒータ素子２０と測温素子２１による温度の検出軸方向Ａ（Ａ１、Ａ２）と、後述する第１の流向検出部用支持部１３１および第２の流向検出部用支持部１３２の支持軸方向Ｂとが９０度の角度で交差する態様で実装されている。 Further, in the present embodiment, the flow direction detection unit 2 is provided with a pair of heater elements 20 of the flow direction detection unit on the front surface and the back surface of the first flow direction detection unit substrate portion 111 or the second flow direction detection unit substrate portion 112. The temperature detection axial direction A (A1, A2) by the temperature measuring element 21 and the support axial direction B of the first flow direction detection unit support 131 and the second flow direction detection support 132, which will be described later, are 90 degrees. It is implemented in such a way that it intersects at an angle of.
　前記気温計測部用基板部分１２は、図１に示すように、いずれも正面視矩形状に形成されており、表面に気温計測部３が実装されている。この気温計測部３は、図示略の気温計測用素子を有しており、気温計測用素子により気温計測部３の周囲の流体の気温を計測する。 As shown in FIG. 1, the substrate portion 12 for the air temperature measuring unit is formed in a rectangular shape when viewed from the front, and the air temperature measuring unit 3 is mounted on the surface thereof. The air temperature measuring unit 3 has an air temperature measuring element (not shown), and measures the air temperature of the fluid around the air temperature measuring unit 3 by the air temperature measuring element.
　前記流向検出部用支持部１３は、基板主要部１０の長さ方向の一方端部の中央部から延びる細長形状の流向検出部用支持部本体１３０と、該流向検出部用支持部本体１３０の先端部から分岐しながら延び、第１の流向検出部用基板部分１１１に連設する細長形状の第１の流向検出部用支持部１３１と、該流向検出部用支持部本体１３０の先端部から分岐しながら延び、第２の流向検出部用基板部分１１２に連設する細長形状の第２の流向検出部用支持部１３２とを備え、第１の流向検出部用支持部１３１と第２の流向検出部用支持部１３２が流向検出部用支持部本体１３０の先端部から互いに１８０度の角度で離間方向に分岐しながら延びている。なお、図２中のＢは、第１の流向検出部用支持部１３１および第２の流向検出部用支持部１３２の支持軸方向（第１の流向検出部用支持部１３１および第２の流向検出部用支持部１３２による第１の流向検出部用基板部分１１１および第２の流向検出部用基板部分１１２の流向検出部２を支持する軸線の方向）を示す。 The support portion 13 for the flow direction detection unit is an elongated support portion main body 130 for the flow direction detection portion extending from the central portion of one end portion in the length direction of the main substrate portion 10 and the support portion main body 130 for the flow direction detection portion. From the elongated first support portion 131 for the flow direction detection portion and the tip portion of the support portion main body 130 for the flow direction detection portion, which extends from the tip portion while branching and is connected to the substrate portion 111 for the first flow direction detection portion. The elongated support portion 132 for the second flow direction detection unit, which extends while branching and is connected to the substrate portion 112 for the second flow direction detection unit, is provided, and the support portion 131 for the first flow direction detection unit and the second support portion 132 are provided. The support portion 132 for the flow direction detection unit extends from the tip end portion of the support portion main body 130 for the flow direction detection unit while branching in the separation direction at an angle of 180 degrees from each other. In addition, B in FIG. 2 is the support axial direction of the support part 131 for the first flow direction detection part and the support part 132 for the second flow direction detection part (the support part 131 for the first flow direction detection part and the second flow direction). The direction of the axis supporting the flow direction detection unit 2 of the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112 by the detection unit support unit 132) is shown.
　このため、第１の流向検出部用基板部分１１１および第２の流向検出部用基板部分１１２に実装された流向検出部２は、基板主要部１０に一体的に形成された流向検出部用支持部１３により支持された構造となっている。このように流向検出部用支持部１３を細長形状に形成することにより、流向検出部２から基板主要部１０への熱伝導を抑えることができる。 Therefore, the flow direction detection unit 2 mounted on the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112 is integrally formed with the substrate main portion 10 to support the flow direction detection unit. It has a structure supported by the portion 13. By forming the support portion 13 for the flow direction detection unit in an elongated shape in this way, heat conduction from the flow direction detection unit 2 to the main substrate portion 10 can be suppressed.
　前記気温計測部用支持部１４は、基板主要部１０の長さ方向の一方端部の両側部から気温計測部用基板部分１２まで一体的に延びる細長形状に形成されており、先端部に気温計測部用基板部分１２が同一平面上に連設されている。このため、気温計測部用基板部分１２に実装された気温計測部３は、基板主要部１０に一体的に形成された気温計測部用支持部１４により支持された構造となっている。 The support portion 14 for the air temperature measuring unit is formed in an elongated shape that integrally extends from both side portions of one end portion in the length direction of the main substrate portion 10 to the substrate portion 12 for the air temperature measuring unit, and the air temperature is formed at the tip portion. The substrate portion 12 for the measuring unit is continuously provided on the same plane. Therefore, the air temperature measuring unit 3 mounted on the air temperature measuring unit substrate portion 12 has a structure supported by the air temperature measuring unit supporting unit 14 integrally formed with the main substrate portion 10.
　このように、基板１は、流向検出部用基板部分１１と気温計測部用基板部分１２がそれぞれ流向検出部用支持部１３と気温計測部用支持部１４を介して一体的に連設された構造となっている。よって、流向検出部用基板部分１１に実装された流向検出部２と、気温計測部用基板部分１２に実装された気温計測部３は、基板主要部１０と所定距離を隔てるとともに、互いに所定距離を隔てた状態で配置されることになる。 In this way, in the substrate 1, the substrate portion 11 for the flow direction detection unit and the substrate portion 12 for the air temperature measurement unit are integrally connected via the support unit 13 for the flow direction detection unit and the support unit 14 for the air temperature measurement unit, respectively. It has a structure. Therefore, the flow direction detection unit 2 mounted on the substrate portion 11 for the flow direction detection unit and the air temperature measurement unit 3 mounted on the substrate portion 12 for the air temperature measurement unit are separated from the main substrate portion 10 by a predetermined distance and are separated from each other by a predetermined distance. Will be placed apart from each other.
　次に本センサの回路部４の電気的構成について、図３を参照しつつ説明する。 Next, the electrical configuration of the circuit unit 4 of this sensor will be described with reference to FIG.
　本センサの回路部４は、量子化装置４１（ＡＤコンバータ）、演算装置４２（ＣＰＵ）、情報出力装置４３によって構成されている。 The circuit unit 4 of this sensor is composed of a quantization device 41 (AD converter), an arithmetic unit 42 (CPU), and an information output device 43.
　前記量子化装置４１（ＡＤコンバータ）は、流向検出部２の測温素子２１からの温度情報と、気温計測部３からの温度情報を、それぞれデジタル信号に変換するＡＤ変換機能を有している。 The quantization device 41 (AD converter) has an AD conversion function that converts temperature information from the temperature measuring element 21 of the flow direction detection unit 2 and temperature information from the temperature measuring unit 3 into digital signals, respectively. ..
　前記演算装置４２は、流向検出部２で検出されたヒータ素子２０の温度情報と、気温計測部３で計測された周囲流体の気温情報とに基づいて流体の流向を演算する。具体的には、回路部４は、流体の三次元方位の流向を求めるために、測温素子２１間の温度差を各軸（Ｘ軸、Ｙ軸、Ｚ軸）について演算する機能と、各測温素子２１の誤差および温度特性に基づいて各軸（Ｘ軸、Ｙ軸、Ｚ軸）の温度差の値を補正する機能と、各軸（Ｘ軸、Ｙ軸、Ｚ軸）の合成ベクトルを演算する機能と、この合成ベクトルの値から三次元方位を演算する機能を有している。 The arithmetic unit 42 calculates the flow direction of the fluid based on the temperature information of the heater element 20 detected by the flow direction detection unit 2 and the temperature information of the ambient fluid measured by the air temperature measurement unit 3. Specifically, the circuit unit 4 has a function of calculating the temperature difference between the temperature measuring elements 21 for each axis (X-axis, Y-axis, Z-axis) in order to obtain the flow direction of the three-dimensional direction of the fluid, and each of them. A function to correct the temperature difference value of each axis (X-axis, Y-axis, Z-axis) based on the error and temperature characteristics of the temperature measuring element 21, and a composite vector of each axis (X-axis, Y-axis, Z-axis). It has a function to calculate the three-dimensional orientation from the value of this composite vector and a function to calculate the three-dimensional orientation.
　前記情報出力装置４３は、演算装置４２により演算された流体の流向を所定の装置に出力する。 The information output device 43 outputs the flow direction of the fluid calculated by the arithmetic unit 42 to a predetermined device.
　なお、前記演算装置４２は、流向検出部２で検出されたヒータ素子２０の温度情報と、気温計測部３で計測された周囲流体の気温情報とに基づいて、ＫＩＮＧの式などの熱式の動作原理を用いて流体の流速や流量を演算してもよい。 The computing device 42 is of a thermal type such as a KING formula based on the temperature information of the heater element 20 detected by the flow direction detection unit 2 and the temperature information of the ambient fluid measured by the air temperature measuring unit 3. The flow velocity and flow rate of the fluid may be calculated using the operating principle.
　次に、本センサの作用動作について説明する。 Next, the operation and operation of this sensor will be described.
　まず、流向検出部２において、流向検出部用基板部分１１の内部電源配線（図示略）からの供給電流により、流向検出部用基板部分１１の表面に実装されているヒータ素子２０が加熱される。そして、本センサが流体中に配置されると、その流体の流速に応じてヒータ素子２０の熱は変化して、流向検出部用基板部分１１を介して測温素子２１へと熱的に直接伝導する。そして、測温素子２１が、ヒータ素子２０から伝導してきた熱の温度を検出する。 First, in the flow direction detection unit 2, the heater element 20 mounted on the surface of the flow direction detection board portion 11 is heated by the supply current from the internal power supply wiring (not shown) of the flow direction detection unit board portion 11. .. Then, when this sensor is arranged in the fluid, the heat of the heater element 20 changes according to the flow velocity of the fluid, and the heat directly to the temperature measuring element 21 via the substrate portion 11 for the flow direction detection unit. Conduct. Then, the temperature measuring element 21 detects the temperature of the heat conducted from the heater element 20.
　一方、気温計測部３において、図示略の気温計測用素子が気温計測部３の周囲の流体の気温を計測する。 On the other hand, in the air temperature measuring unit 3, the air temperature measuring element (not shown) measures the air temperature of the fluid around the air temperature measuring unit 3.
　そして、回路部４において、流向検出部２で検出されたヒータ素子２０の温度情報と、気温計測部３で計測された周囲流体の気温情報とに基づいて流体の流向を演算する。 Then, in the circuit unit 4, the flow direction of the fluid is calculated based on the temperature information of the heater element 20 detected by the flow direction detection unit 2 and the temperature information of the ambient fluid measured by the air temperature measurement unit 3.
　具体的には、本センサを流体中に配置すると、その流体の流速や流速に応じて各測温素子２１で検出される温度に変化が生じるとともに、各測温素子２１の位置関係による温度変化の違いが生じる。そして、流体中に置かれた発熱体であるヒータ素子２０の上流側と下流側では、上流側が下流側より温度が低下し、また、上流側と下流側との間の温度差は流体の流速に応じて大きくなる。従って、この原理を利用して流体の流向を演算することができる。 Specifically, when this sensor is placed in a fluid, the temperature detected by each temperature measuring element 21 changes according to the flow velocity and the flow velocity of the fluid, and the temperature changes due to the positional relationship of each temperature measuring element 21. Makes a difference. Then, on the upstream side and the downstream side of the heater element 20 which is a heating element placed in the fluid, the temperature on the upstream side is lower than that on the downstream side, and the temperature difference between the upstream side and the downstream side is the flow velocity of the fluid. It grows according to. Therefore, this principle can be used to calculate the flow direction of the fluid.
　例えば、本実施形態の場合、図２（ａ）の左右方向をＸ軸として、右側をＸ軸のプラス方向とする。また、奥方向をＹ軸として、奥側Ｙ軸のプラス方向とする。さらに、上下方向をＺ軸方向として、上方向をＺ軸のプラス方向とする。まず、測温素子２１ａおよび／または測温素子２１ｂと、測温素子２１ｃおよび／または測温素子２１ｄとの温度差から流体のＸ軸方向の流れとその強さを表わすベクトルＸを求める。このとき、Ｘ軸プラス側の２個の測温素子２１およびマイナス側の２個の測温素子２１の平均値から温度差を求めてもよいし、左右の個々の差を先に求めて、それらの平均値から温度差を求めてもよい。また、測温素子２１ｂおよび／または測温素子２１ｃと測温素子２１ａおよび／または測温素子２１ｄとの温度差から、流体のＺ軸方向の流れとその強さを表わすベクトルＺを求める。このとき、上方位および下方位の２個の測温素子２１の平均値を求めてから差を導いてもよいし、個別の測温素子２１の差を求めてから平均化して差を求めてもよい。また、測温素子２１ａおよび／または測温素子２１ｃと測温素子２１ｂおよび／または測温素子２１ｄとの温度差から、流体のＹ軸方向の流れとその強さを表わすベクトルＹを求める。このようにして求めた３軸（Ｘ軸、Ｙ軸、Ｚ軸）のベクトルＸ、ベクトルＹ、ベクトルＺから流体の流向の三次元方位を求めることができる。 For example, in the case of this embodiment, the left-right direction in FIG. 2A is the X-axis, and the right side is the plus direction of the X-axis. Further, the back direction is the Y axis, and the back side Y axis is the plus direction. Further, the vertical direction is the Z-axis direction, and the upward direction is the positive direction of the Z-axis. First, the vector X representing the flow of the fluid in the X-axis direction and its strength is obtained from the temperature difference between the temperature measuring element 21a and / or the temperature measuring element 21b and the temperature measuring element 21c and / or the temperature measuring element 21d. At this time, the temperature difference may be obtained from the average value of the two temperature measuring elements 21 on the plus side of the X-axis and the two temperature measuring elements 21 on the minus side, or the individual differences between the left and right may be obtained first. The temperature difference may be obtained from the average value thereof. Further, the vector Z representing the flow of the fluid in the Z-axis direction and its strength is obtained from the temperature difference between the temperature measuring element 21b and / or the temperature measuring element 21c and the temperature measuring element 21a and / or the temperature measuring element 21d. At this time, the difference may be derived after obtaining the average value of the two temperature measuring elements 21 in the upper direction and the lower position, or the difference between the individual temperature measuring elements 21 may be obtained and then averaged to obtain the difference. May be good. Further, the vector Y representing the flow of the fluid in the Y-axis direction and its strength is obtained from the temperature difference between the temperature measuring element 21a and / or the temperature measuring element 21c and the temperature measuring element 21b and / or the temperature measuring element 21d. The three-dimensional direction of the flow direction of the fluid can be obtained from the vectors X, Y, and Z of the three axes (X-axis, Y-axis, and Z-axis) thus obtained.
　このとき、本センサは、流向検出部用基板部分１１よりも流向検出部用支持部１３の方が表面積が多いため、流体速度が大きくなればなるほど、流向検出部用基板部分１１からの放熱量Ｑａ１よりも流向検出部用支持部１３からの放熱量Ｑａ２が大きくなって、これに伴い流向検出部用基板部分１１から流向検出部用支持部１３への放熱量Ｑｂが増加する。このため、図８および図９に示すように、ヒータ素子２０と測温素子２１が流向検出部用支持部１３の支持軸方向に沿って配置されている従来のセンサの場合、測温素子２１ｃより測温素子２１ａの温度が低くなって、本センサは下方位からの流向があると誤検知する虞があった。 At this time, since the surface area of the flow direction detection unit support portion 13 is larger than that of the flow direction detection unit substrate portion 11, the amount of heat radiated from the flow direction detection unit substrate portion 11 increases as the fluid velocity increases. The amount of heat radiation Qa2 from the support portion 13 for the flow direction detection unit is larger than that of Qa1, and the amount of heat radiation Qb from the substrate portion 11 for the flow direction detection unit to the support unit 13 for the flow direction detection unit increases accordingly. Therefore, as shown in FIGS. 8 and 9, in the case of a conventional sensor in which the heater element 20 and the temperature measuring element 21 are arranged along the support axis direction of the flow direction detection unit support portion 13, the temperature measuring element 21c As the temperature of the temperature measuring element 21a becomes lower, the sensor may erroneously detect that there is a flow direction from the lower position.
　この点、本実施形態では、各流向検出部２は、第１の流向検出部用基板部分１１１または第２の流向検出部用基板部分１１２の表面および裏面において、各流向検出部２における一対のヒータ素子２０と測温素子２１による温度の検出軸方向Ａ（Ａ１、Ａ２）と、第１の流向検出部用支持部１３１または第２の流向検出部用支持部１３２の支持軸方向Ｂとが９０度の角度で交差する態様で実装されている。 In this regard, in the present embodiment, each flow direction detection unit 2 has a pair of flow direction detection units 2 on the front surface and the back surface of the first flow direction detection unit substrate portion 111 or the second flow direction detection unit substrate portion 112. The temperature detection axial direction A (A1, A2) by the heater element 20 and the temperature measuring element 21 and the support axial direction B of the first flow direction detection unit support 131 or the second flow direction detection support 132 It is implemented in such a way that it intersects at an angle of 90 degrees.
　このため、各流向検出部２の測温素子２１がヒータ素子２０の熱を温度を検出する際、流向検出部用支持部１３における放熱の影響を軽減することができ、ひいては流体の流向を精度良く演算することが可能となる。 Therefore, when the temperature measuring element 21 of each flow direction detection unit 2 detects the temperature of the heat of the heater element 20, the influence of heat dissipation in the support unit 13 for the flow direction detection unit can be reduced, and the flow direction of the fluid can be accurately adjusted. It becomes possible to calculate well.
＜第２の実施形態＞
　次に、本発明に係る熱式流向センサの第２の実施形態について図４および図５を参照しつつ説明する。なお、以下では上記の実施形態と異なる構成についてのみ説明することとし、同一の構成については説明を省略して同一の符号を付すこととする。 <Second embodiment>
Next, a second embodiment of the thermal flow direction sensor according to the present invention will be described with reference to FIGS. 4 and 5. In the following, only the configurations different from the above-described embodiment will be described, and the same configurations will be omitted and the same reference numerals will be given.
　本センサは、図４に示すように、所定の形状に形成された基板１において、流向検出部２および気温計測部３が実装されており、前記流向検出部２の周囲の空間における流体の流向を計測する。なお、基板１の外部において回路部４が設けられている。 As shown in FIG. 4, in this sensor, a flow direction detection unit 2 and an air temperature measurement unit 3 are mounted on a substrate 1 formed in a predetermined shape, and the flow direction of a fluid in the space around the flow direction detection unit 2 is mounted. To measure. A circuit unit 4 is provided outside the substrate 1.
　また、図５（ａ）に示すように、第１の流向検出部用基板部分１１１の表面では、ヒータ素子２０が図２の右斜上側、測温素子２１ａが図２の左斜下側となるように対向状態に配置される一方、図５（ｂ）に示すように、第１の流向検出部用基板部分１１１の裏面では、ヒータ素子２０が図２の右斜下側、測温素子２１ｂが図２の左斜上側となるように対向状態に配置され、これにより第１の流向検出部用基板部分１１１の表面と裏面で一対のヒータ素子２０および測温素子２１（２１ａ、２１ｂ）が上下逆の配置となっている。 Further, as shown in FIG. 5A, on the surface of the substrate portion 111 for the first flow direction detection unit, the heater element 20 is on the upper right side of FIG. 2, and the temperature measuring element 21a is on the lower left side of FIG. On the back side of the first flow direction detection unit substrate portion 111, the heater element 20 is located on the lower right side of FIG. 2, and is a temperature measuring element, as shown in FIG. 5 (b). 21b is arranged in a facing state so as to be obliquely upper left in FIG. 2, whereby a pair of heater elements 20 and temperature measuring elements 21 (21a, 21b) are arranged on the front surface and the back surface of the substrate portion 111 for the first flow direction detection unit. Is upside down.
　一方、図５（ａ）に示すように、第２の流向検出部用基板部分１１２の表面では、ヒータ素子２０が図２の右斜下側、測温素子２１ｃが図２の左斜上側となるように対向状態に配置される一方、図５（ｂ）に示すように、第２の流向検出部用基板部分１１２の裏面では、ヒータ素子２０が図２の右斜上側、測温素子２１ｄが図２の左斜下側となるように対向状態に配置され、これにより第２の流向検出部用基板部分１１２の表面と裏面で一対のヒータ素子２０および測温素子２１（２１ｃ、２１ｄ）が上下逆の配置となっている。 On the other hand, as shown in FIG. 5A, on the surface of the second flow direction detection unit substrate portion 112, the heater element 20 is on the lower right side of FIG. 2, and the temperature measuring element 21c is on the upper left side of FIG. On the back surface of the second flow direction detection unit substrate portion 112, the heater element 20 is located on the upper right side of FIG. 2 and the temperature measuring element 21d, as shown in FIG. 5 (b). Are arranged so as to face each other so as to be on the lower left side of FIG. Is upside down.
　これにより、本実施形態では、第１の流向検出部用基板部分１１１の流向検出部２の検出軸方向Ａ１と、第２の流向検出部用基板部分１１２の流向検出部２の検出軸方向Ａ２が互いに９０度の角度となるように各流向検出部２のヒータ素子２０と各測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）が対向状態に配置されている。 As a result, in the present embodiment, the detection axial direction A1 of the flow direction detection unit 2 of the first flow direction detection unit board portion 111 and the detection axial direction A2 of the flow direction detection unit 2 of the second flow direction detection unit 112 The heater element 20 of each flow direction detection unit 2 and the temperature measuring elements 21 (21a, 21b, 21c, 21d) are arranged in a facing state so that they are at an angle of 90 degrees with each other.
　また、前記流向検出部用支持部１３は、基板主要部１０の長さ方向の一方端部の中央部から延びる細長形状の流向検出部用支持部本体１３０と、該流向検出部用支持部本体１３０の先端部から分岐しながら延び、第１の流向検出部用基板部分１１１に連設する細長形状の第１の流向検出部用支持部１３１と、該流向検出部用支持部本体１３０の先端部から分岐しながら延び、第２の流向検出部用基板部分１１２に連設する細長形状の第２の流向検出部用支持部１３２とを備え、第１の流向検出部用支持部１３１と第２の流向検出部用支持が流向検出部用支持部本体１３０の先端部から互いに９０度の角度で離間方向に分岐しながら延びている。 Further, the support portion 13 for the flow direction detection unit includes an elongated support portion main body 130 for the flow direction detection portion extending from the central portion of one end portion in the length direction of the main substrate portion 10 and a support portion main body for the flow direction detection portion. An elongated first flow direction detection part support 131 extending from the tip of 130 while branching and being connected to the first flow direction detection board portion 111, and the tip of the flow direction detection support main body 130. It is provided with an elongated support portion 132 for a second flow direction detection unit, which extends from the portion while branching and is connected to the substrate portion 112 for the second flow direction detection unit. The support for the flow direction detection unit 2 extends from the tip end portion of the support unit main body 130 for the flow direction detection unit while branching in the separation direction at an angle of 90 degrees from each other.
　なお、図５中のＢ１は、第１の流向検出部用支持部１３１の支持軸方向（第１の流向検出部用支持部１３１による第１の流向検出部用基板部分１１１の流向検出部２を支持する軸線の方向）を示し、図５中のＢ２は、第２の流向検出部用支持部１３２の支持軸方向（第２の流向検出部用支持部１３２による第２の流向検出部用基板部分１１２の流向検出部２を支持する軸線の方向）を示す。 In addition, B1 in FIG. 5 is the support axial direction of the support part 131 for the 1st flow direction detection part (the flow direction detection part 2 of the substrate part 111 for the 1st flow direction detection part by the support part 131 for the 1st flow direction detection part. B2 in FIG. 5 indicates the support axial direction of the support portion 132 for the second flow direction detection unit (for the second flow direction detection unit by the support unit 132 for the second flow direction detection unit). The direction of the axis supporting the flow direction detection unit 2 of the substrate portion 112) is shown.
　而して、本実施形態では、流向検出部２は、第１の流向検出部用基板部分１１１および第２の流向検出部用基板部分１１２の表面および裏面において、各流向検出部２のヒータ素子２０と測温素子２１による温度の検出軸方向Ａ（Ａ１、Ａ２）と、第１の流向検出部用支持部１３１および第２の流向検出部用支持部１３２の支持軸方向Ｂ（Ｂ１、Ｂ２）とが９０度の角度で交差する態様で実装されることになる。 Thus, in the present embodiment, the flow direction detection unit 2 is a heater element of each flow direction detection unit 2 on the front surface and the back surface of the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112. 20 and the temperature detection axial direction A (A1, A2) by the temperature measuring element 21, and the support axial direction B (B1, B2) of the first flow direction detection unit support 131 and the second flow direction detection support 132. ) Will be implemented in a manner that intersects at an angle of 90 degrees.
　このため、第１の流向検出部用支持部１３１および第２の流向検出部用支持部１３２が第１の流向検出部用基板部分１１１および第２の流向検出部用基板部分１１２に対して斜め下方位になるため、流体の流向の検出阻害となる角度が斜め下方位に集約される。よって、流体の流向を良好に検出できる角度が広がり、より実用的な流向検出部２を備えることが可能となる。 Therefore, the support portion 131 for the first flow direction detection unit and the support portion 132 for the second flow direction detection unit are oblique with respect to the substrate portion 111 for the first flow direction detection unit and the substrate portion 112 for the second flow direction detection unit. Since the direction is downward, the angles that hinder the detection of the fluid flow direction are concentrated in the diagonally downward position. Therefore, the angle at which the flow direction of the fluid can be satisfactorily detected is widened, and a more practical flow direction detection unit 2 can be provided.
　なお、本実施形態における、流向の算出方法の例を以下に示す。図５（ａ）において、左右方向をＸ軸かつ右側をＸ軸のプラス方向とする。奥行方向をＹ軸とし、奥側をＹ軸のプラス方向とする。上下方向をＺ軸とし、上方向をＺ軸のプラス方向とする。説明を容易にするため、軸Ａ１は、Ｘ軸、Ｚ軸に対して４５度の角度を持ち、軸Ａ２も同様にＸ軸、Ｚ軸に対して45度の角度を持つものとする。軸Ａ１とＡ２は平行の関係ではない。このため、軸Ａ１に配置される２１ａおよび２１ｂの温度差および、軸Ａ２に配置される２１ｃおよび２１ｄの温度差は、Ｘ軸とＺ軸の双方の成分を測定している事となる。そのため、軸Ａ１と軸Ａ２の差から合成ベクトルのベクトルＡＶを計算し、三角関数を用いてベクトルＡＶからＸ軸に投影すれば、Ｘ軸の強さが判る。同様にして三角関数にてベクトルＡＶからＺ軸に投影すれば、Ｚ軸の強さが判る。同様にＹ軸に対しても三角関数で投影させる事も可能だが、表面に配置された２１ａおよび２１ｃと、裏面に配置された２１ｂおよび２１ｄとの差から単純に得ることもできる。 An example of the flow direction calculation method in this embodiment is shown below. In FIG. 5A, the left-right direction is the X-axis and the right side is the plus direction of the X-axis. The depth direction is the Y-axis, and the depth side is the plus direction of the Y-axis. The vertical direction is the Z-axis, and the upward direction is the positive direction of the Z-axis. For the sake of simplicity, it is assumed that the axis A1 has an angle of 45 degrees with respect to the X-axis and the Z-axis, and the axis A2 also has an angle of 45 degrees with respect to the X-axis and the Z-axis. The axes A1 and A2 are not in a parallel relationship. Therefore, the temperature difference between 21a and 21b arranged on the axis A1 and the temperature difference between 21c and 21d arranged on the axis A2 measure the components of both the X-axis and the Z-axis. Therefore, the strength of the X-axis can be found by calculating the vector AV of the composite vector from the difference between the axes A1 and the axis A2 and projecting it from the vector AV to the X-axis using a trigonometric function. Similarly, by projecting from the vector AV to the Z-axis with a trigonometric function, the strength of the Z-axis can be found. Similarly, it is possible to project the Y-axis with a trigonometric function, but it can also be simply obtained from the difference between the 21a and 21c arranged on the front surface and the 21b and 21d arranged on the back surface.
＜第３の実施形態＞
　次に、本発明に係る流向検出センサの第２の実施形態について図６および図７を参照しつつ説明する。 <Third embodiment>
Next, a second embodiment of the flow direction detection sensor according to the present invention will be described with reference to FIGS. 6 and 7.
　本センサは、図６に示すように、所定の形状に形成された基板１において、流向検出部２、気温計測部３および回路部４が実装されており、前記流向検出部２の周囲の空間における流体の流向を計測する。  As shown in FIG. 6, this sensor has a flow direction detection unit 2, an air temperature measurement unit 3, and a circuit unit 4 mounted on a substrate 1 formed in a predetermined shape, and is a space around the flow direction detection unit 2. Measure the flow direction of the fluid in.
　また、図７（ａ）に示すように、第１の流向検出部用基板部分１１１の表面では、ヒータ素子２０が図７の右斜下側、測温素子２１ａが図７の左斜上側となるように対向状態に配置される一方、図７（ｂ）に示すように、第１の流向検出部用基板部分１１１の裏面では、ヒータ素子２０が図７の右斜上側、測温素子２１ｂが図７の左斜下側となるように対向状態に配置され、これにより第１の流向検出部用基板部分１１１の表面と裏面で一対のヒータ素子２０および測温素子２１（２１ａ、２１ｂ）が上下逆の配置となっている。 Further, as shown in FIG. 7A, on the surface of the substrate portion 111 for the first flow direction detection unit, the heater element 20 is on the lower right side of FIG. 7, and the temperature measuring element 21a is on the upper left side of FIG. On the back side of the substrate portion 111 for the first flow direction detection unit, the heater element 20 is located on the upper right side of FIG. 7, and the temperature measuring element 21b, as shown in FIG. 7B. Are arranged so as to face each other so as to be on the lower left side of FIG. Is upside down.
　一方、図７（ａ）に示すように、第２の流向検出部用基板部分１１２の表面では、ヒータ素子２０が図７の右斜上側、測温素子２１ｃが図７の左斜下側となるように対向状態に配置される一方、図７（ｂ）に示すように、第２の流向検出部用基板部分１１２の裏面では、ヒータ素子２０が図７の右斜下側、測温素子２１ｄが図７の左斜上側となるように対向状態に配置され、これにより第２の流向検出部用基板部分１１２の表面と裏面で１対のヒータ素子２０および測温素子２１（２１ｃ、２１ｄ）が上下逆の配置となっている。 On the other hand, as shown in FIG. 7A, on the surface of the second flow direction detection unit substrate portion 112, the heater element 20 is on the upper right side of FIG. 7, and the temperature measuring element 21c is on the lower left side of FIG. On the back surface of the second flow direction detection unit substrate portion 112, the heater element 20 is located on the lower right side of FIG. 7, and is a temperature measuring element, as shown in FIG. 7 (b). 21d is arranged so as to face each other so as to be obliquely upper left in FIG. 7, whereby a pair of heater element 20 and temperature measuring element 21 (21c, 21d) are arranged on the front surface and the back surface of the substrate portion 112 for the second flow direction detection unit. ) Is upside down.
　これにより、本実施形態では、第１の流向検出部用基板部分１１１の流向検出部２の検出軸方向Ａ１と、第２の流向検出部用基板部分１１２の流向検出部２の検出軸方向Ａ２が互いに９０度の角度となるように各流向検出部２のヒータ素子２０と各測温素子２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）が対向状態に配置されている As a result, in the present embodiment, the detection axial direction A1 of the flow direction detection unit 2 of the first flow direction detection unit board portion 111 and the detection axial direction A2 of the flow direction detection unit 2 of the second flow direction detection unit 112 The heater element 20 of each flow direction detection unit 2 and the temperature measuring elements 21 (21a, 21b, 21c, 21d) are arranged in a facing state so that they are at an angle of 90 degrees with each other.
　また、前記流向検出部用支持部１３は、基板主要部１０の長さ方向の一方端部の中央部から延びる細長形状の流向検出部用支持部本体１３０と、該流向検出部用支持部本体１３０の先端部から分岐しながら延びて第１の流向検出部用基板部分１１１に連設する細長形状の第１の流向検出部用支持部１３１と、該流向検出部用支持部本体１３０の先端部から分岐しながら延びて第２の流向検出部用基板部分１１２に連設する細長形状の第２の流向検出部用支持部１３２とを備える。第１の流向検出部用支持部１３１と第２の流向検出部用支持部１３２は、流向検出部用支持部本体１３０の先端部から互いに９０度の角度で離間方向に分岐しながら延びたあと、互いに近接方向に屈曲して延びて前記第１の流向検出部用基板部分１１１および第２の流向検出部用基板部分１１２に連設する。 Further, the support portion 13 for the flow direction detection unit includes an elongated support portion main body 130 for the flow direction detection portion extending from the central portion of one end portion in the length direction of the main substrate portion 10 and a support portion main body for the flow direction detection portion. An elongated first flow direction detection part support 131 that extends from the tip of 130 while branching and is connected to the first flow direction detection board portion 111, and the tip of the flow direction detection support main body 130. It is provided with an elongated support portion 132 for the second flow direction detecting portion, which extends from the portion while branching and is connected to the substrate portion 112 for the second flow direction detecting portion. After the first flow direction detection unit support 131 and the second flow direction detection support 132 extend from the tip of the flow direction detection support main body 130 while branching in a separation direction at an angle of 90 degrees from each other. , Bend and extend in a direction close to each other, and are connected to the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112.
　なお、図７中のＢ１は、第１の流向検出部用支持部１３１の支持軸方向（第１の流向検出部用支持部１３１による第１の流向検出部用基板部分１１１の流向検出部２を支持する軸線の方向）を示し、図７中のＢ２は、第２の流向検出部用支持部１３２の支持軸方向（第２の流向検出部用支持部１３２による第２の流向検出部用基板部分１１２の流向検出部２を支持する軸線の方向）を示す。 In addition, B1 in FIG. 7 is the support axial direction of the support part 131 for the first flow direction detection part (the flow direction detection part 2 of the substrate part 111 for the first flow direction detection part by the support part 131 for the first flow direction detection part. B2 in FIG. 7 indicates the support axial direction of the support portion 132 for the second flow direction detection unit (for the second flow direction detection unit by the support unit 132 for the second flow direction detection unit). The direction of the axis supporting the flow direction detection unit 2 of the substrate portion 112) is shown.
　而して、本実施形態では、流向検出部２は、第１の流向検出部用基板部分１１１および第２の流向検出部用基板部分１１２の表面および裏面において、各流向検出部２におけるヒータ素子２０と測温素子２１による温度の検出軸方向Ａ（Ａ１、Ａ２）と、第１の流向検出部用支持部１３１および第２の流向検出部用支持部１３２の支持軸方向Ｂ（Ｂ１、Ｂ２）とが９０度の角度で交差する態様で実装されることになる。 Thus, in the present embodiment, the flow direction detection unit 2 is a heater element in each flow direction detection unit 2 on the front surface and the back surface of the first flow direction detection unit substrate portion 111 and the second flow direction detection unit substrate portion 112. 20 and the temperature detection axial direction A (A1, A2) by the temperature measuring element 21, and the support axial direction B (B1, B2) of the first flow direction detection unit support 131 and the second flow direction detection support 132. ) Will be implemented in a manner that intersects at an angle of 90 degrees.
　このため、第１の流向検出部用基板部分１１１の流向検出部２と第２の流向検出部用支持部１１２の流向検出部２の距離が近くなるため、流体の流向の検出範囲をピンポイントでとらえることが可能となる。 Therefore, the distance between the flow direction detection unit 2 of the substrate portion 111 for the first flow direction detection unit and the flow direction detection unit 2 of the support unit 112 for the second flow direction detection unit becomes close, so that the detection range of the fluid flow direction is pinpointed. It becomes possible to catch it with.
　以上の各実施形態では、流向検出部用基板部分１１を２個設けるものとしたが、その他の個数設けてもよい。 In each of the above embodiments, two substrate portions 11 for the flow direction detection unit are provided, but other number may be provided.
　また、前記流向検出部用支持部１３を２つに分岐させたが、その他の個数に分岐させてもよい。あるいは、流向検出部用支持部１３を分岐させるのではなく、複数の流向検出部用支持部１３を基板主要部１０に直接設けてもよい。 Further, although the support portion 13 for the flow direction detection unit is branched into two, it may be branched into other numbers. Alternatively, instead of branching the flow direction detection unit support portion 13, a plurality of flow direction detection unit support portions 13 may be provided directly on the substrate main portion 10.
　また、前記流向検出部用基板部分１１の表面および裏面の各面に流向検出部２を実装したが、いずれか一方の面のみに実装してもよい。 Further, although the flow direction detection unit 2 is mounted on each surface of the front surface and the back surface of the flow direction detection unit substrate portion 11, it may be mounted on only one of the surfaces.
　また、各流向検出部２のヒータ素子２０と測温素子２１による温度の検出軸方向Ａと、流向検出部用支持部１３による流向検出部２の支持軸方向Ｂを９０度の角度で交差させたが、その他の角度で交差させてもよい。ただ、流体の流向を精度良く計測するためには、検出軸方向Ａと支持軸方向Ｂは４５度～９０度（４５度および９０度を含む）の範囲内で交差させるのが好ましい。 Further, the temperature detection axial direction A by the heater element 20 and the temperature measuring element 21 of each flow direction detection unit 2 and the support axial direction B of the flow direction detection unit 2 by the flow direction detection unit support 13 intersect at an angle of 90 degrees. However, they may intersect at other angles. However, in order to measure the flow direction of the fluid with high accuracy, it is preferable that the detection axial direction A and the support axial direction B intersect within a range of 45 degrees to 90 degrees (including 45 degrees and 90 degrees).
　以上、図面を参照して本発明の実施形態を説明したが、本発明は、図示した実施形態のものに限定されない。図示された実施形態に対して、本発明と同一の範囲内において、あるいは均等の範囲内において、種々の修正や変形を加えることが可能である。 Although the embodiments of the present invention have been described above with reference to the drawings, the present invention is not limited to those of the illustrated embodiments. Various modifications and modifications can be made to the illustrated embodiment within the same range as the present invention or within the same range.
　応用分野としては、エアコン等の空調管理やそれによるエネルギーマネジメント分野など、人の生活環境への利用が見込まれる。また、産業分野では、クリーンルームなどの気流環境を重要視する製造現場や、温室などの栽培施設における風の管理など、従来ではセンサ設置が難しかった場所での設置が可能となる。 As an application field, it is expected to be used for people's living environment such as air conditioning management such as air conditioners and energy management field by it. Further, in the industrial field, it can be installed in a place where it was difficult to install a sensor in the past, such as a manufacturing site where an airflow environment is important such as a clean room, or wind management in a cultivation facility such as a greenhouse.
１…基板
　１０…基板主要部
　１１…流向検出部用基板部分
　　１１１…第１の流向検出部用基板部分
　　１１２…第２の流向検出部用基板部分
　１２…気温計測部用基板部分
　１３…流向検出部用支持部
　　１３０…流向検出部用支持部本体
　　１３１…第１の流向検出部用支持部
　　１３２…第２の流向検出部用支持部
　１４…気温計測部用支持部
　１５…取付孔
　１６…電気的コネクタ
２…流向検出部
　２０…ヒータ素子
　２１（２１ａ、２１ｂ、２１ｃ、２１ｄ）…測温素子
３…気温計測部
４…回路部
　４１…量子化装置
　４２…演算装置
　４３…情報出力装置 1 ... Substrate 10 ... Substrate main part 11 ... Board part for flow direction detection part 111 ... Board part for first flow direction detection part 112 ... Board part for second flow direction detection part 12 ... Board part for temperature measurement part 13 ... Flow direction detection Support part for part 130 ... Support part main body for flow direction detection part 131 ... Support part for first flow direction detection part 132 ... Support part for second flow direction detection part 14 ... Support part for temperature measurement part 15 ... Mounting hole 16 ... Electricity Target connector 2 ... Flow direction detection unit 20 ... Heater element 21 (21a, 21b, 21c, 21d) ... Temperature measuring element 3 ... Temperature measuring unit 4 ... Circuit unit 41 ... Quantifying device 42 ... Computing device 43 ... Information output device

Claims (11)

  1. 　供給電流により熱を発生するヒータ素子と、流体の流速に応じて変化する前記ヒータ素子からの熱の温度を検出する測温素子とを有する複数の流向検出部と、
    　前記流向検出部の前記測温素子で検出された温度情報に基づいて、流体の流向を演算する回路部と、
    　少なくとも前記流向検出部が実装される基板とを備える熱式流向センサであって、
    　前記基板は、基板主要部と、前記流向検出部が実装される流向検出部用基板部分と、前記基板主要部から前記流向検出部用基板部分に一体的に延び、前記流向検出部を支持する細長形状の流向検出部用支持部とを備え、
    　前記流向検出部は、前記流向検出部用基板部分の表面および／または裏面において、一対の前記ヒータ素子と前記測温素子が対向状態に配置されるとともに、一対の前記ヒータ素子と前記測温素子による温度の検出軸方向と、前記流向検出部用支持部による前記流向検出部の支持軸方向とが交差する態様で実装されていることを特徴とする熱式流向センサ。     A plurality of flow direction detection units having a heater element that generates heat by a supply current and a temperature measuring element that detects the temperature of heat from the heater element that changes according to the flow velocity of the fluid.
    A circuit unit that calculates the flow direction of the fluid based on the temperature information detected by the temperature measuring element of the flow direction detection unit, and a circuit unit.
    A thermal flow direction sensor including at least a substrate on which the flow direction detection unit is mounted.
    The substrate integrally extends from the main substrate portion, the substrate portion for the flow direction detection unit on which the flow direction detection unit is mounted, and the substrate portion for the flow direction detection unit from the main substrate portion to support the flow direction detection unit. Equipped with an elongated support for flow direction detection,
    In the flow direction detection unit, the pair of the heater elements and the temperature measuring element are arranged in a facing state on the front surface and / or the back surface of the substrate portion for the flow direction detecting unit, and the pair of the heater elements and the temperature measuring element are arranged. A thermal flow direction sensor, characterized in that the temperature detection axial direction is intersected with the support axial direction of the flow direction detection unit by the flow direction detection unit support portion.
  2. 　前記流向検出部は、少なくとも４個設けられ、各流向検出部の前記測温素子を結ぶ軸方向が全て異なる方向となるように前記流向検出部用支持部に実装されている請求項１に記載の熱式流向センサ。 The first aspect of the present invention, wherein at least four flow direction detection units are provided, and the flow direction detection units are mounted on the support unit for the flow direction detection unit so that the axial directions connecting the temperature measuring elements of the flow direction detection units are all different directions. Thermal flow direction sensor.
  3. 　前記流向検出部は、一対の前記ヒータ素子と前記測温素子による温度の検出軸方向と、前記流向検出部用支持部による前記流向検出部の支持軸方向とが４５度～９０度の角度で交差する態様で前記流向検出部用基板部分に実装されている請求項１に記載の熱式流向センサ。 In the flow direction detection unit, the temperature detection axial direction by the pair of heater elements and the temperature measuring element and the support axial direction of the flow direction detection unit by the flow direction detection unit support unit are at an angle of 45 to 90 degrees. The thermal flow direction sensor according to claim 1, which is mounted on the substrate portion for the flow direction detection unit in an intersecting manner.
  4. 　前記流向検出部は、一対の前記ヒータ素子と前記測温素子による温度の検出軸方向と、前記流向検出部用支持部による前記流向検出部の支持軸方向とが９０度の角度で交差する態様で前記流向検出部用基板部分に実装されている請求項３に記載の熱式流向センサ。 The flow direction detection unit has a mode in which the temperature detection axis direction by the pair of heater elements and the temperature measuring element intersects with the support axis direction of the flow direction detection unit by the support unit for the flow direction detection unit at an angle of 90 degrees. The thermal flow direction sensor according to claim 3, which is mounted on the substrate portion for the flow direction detection unit.
  5. 　前記流向検出部用基板部分および前記流向検出部用支持部が複数設けられ、
    　各流向検出部用基板部分の表面および／または裏面に一対の前記ヒータ素子と前記測温素子を有する前記流向検出部が設けられている請求項１に記載の熱式流向センサ。     A plurality of the substrate portion for the flow direction detection unit and the support portion for the flow direction detection unit are provided.
    The thermal flow direction sensor according to claim 1, wherein the flow direction detection unit having the pair of the heater element and the temperature measuring element is provided on the front surface and / or the back surface of each flow direction detection unit substrate portion.
  6. 　前記流向検出部用基板部分は、表面および／または裏面に一対の前記ヒータ素子と前記測温素子を有する前記流向検出部が設けられた第１の流向検出部用基板部分と第２の流向検出部用基板部分を備え、
    　前記流向検出部用支持部は、前記第１の流向検出部用基板部分に連設する第１の流向検出部用支持部と、前記第２の流向検出部用基板部分に連設する第２の流向検出部用支持部とを備える請求項５に記載の熱式流向センサ。     The flow direction detection unit substrate portion includes a first flow direction detection unit substrate portion and a second flow direction detection in which the flow direction detection unit having the pair of heater elements and the temperature measuring element is provided on the front surface and / or the back surface. Equipped with a board part for parts
    The flow direction detection unit support portion is connected to the first flow direction detection unit support portion connected to the first flow direction detection unit substrate portion and the second flow direction detection unit support portion to be connected to the second flow direction detection unit substrate portion. The thermal flow direction sensor according to claim 5, further comprising a support part for a flow direction detection unit.
  7. 　前記流向検出部用支持部は、前記基板主要部から延びる流向検出部用支持部本体と、該流向検出部用支持部本体の先端部から分岐しながら延び、前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設する前記第１の流向検出部用支持部および前記第２の流向検出部用支持部を備える請求項６に記載の熱式流向センサ。 The support portion for the flow direction detection unit extends while branching from the support portion main body for the flow direction detection portion extending from the main portion of the substrate and the tip end portion of the support portion main body for the flow direction detection portion, and the substrate for the first flow direction detection unit. The thermal flow direction sensor according to claim 6, further comprising a support portion for the first flow direction detection unit and a support portion for the second flow direction detection unit, which are connected to the portion and the substrate portion for the second flow direction detection unit, respectively. ..
  8. 　前記第１の流向検出部用支持部および前記第２の流向検出部用支持部は、互いに１８０度の角度で離間方向に分岐しながら延び、前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設する請求項６に記載の熱式流向センサ。 The support portion for the first flow direction detection unit and the support portion for the second flow direction detection unit extend while branching in a separation direction at an angle of 180 degrees from each other, and the substrate portion for the first flow direction detection unit and the first support portion. The thermal flow direction sensor according to claim 6, which is connected to each of the substrate portions for the flow direction detection unit of 2.
  9. 　前記第１の流向検出部用支持部および前記第２の流向検出部用支持部は、互いに９０度の角度で離間方向に分岐しながら延び、前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設する請求項６に記載の熱式流向センサ。 The support portion for the first flow direction detection unit and the support portion for the second flow direction detection unit extend while branching in a separation direction at an angle of 90 degrees from each other, and the substrate portion for the first flow direction detection unit and the first support portion. The thermal flow direction sensor according to claim 6, which is connected to each of the substrate portions for the flow direction detection unit of 2.
  10. 　前記第１の流向検出部用支持部および前記第２の流向検出部用支持部は、互いに離間方向に分岐しながら延びたあと、互いに近接方向に屈曲して延びて前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設する請求項６に記載の熱式流向センサ。 The support portion for the first flow direction detection unit and the support portion for the second flow direction detection unit extend while branching in a direction away from each other, and then bend and extend in a direction close to each other to extend the first flow direction detection unit. The thermal flow direction sensor according to claim 6, which is connected to the board portion for the second flow direction detection unit and the board portion for the second flow direction detection unit, respectively.
  11. 　前記第１の流向検出部用支持部および前記第２の流向検出部用支持部は、前記第１の流向検出部用基板部分に実装されている前記流向検出部の一対の前記ヒータ素子と前記測温素子による温度の検出軸方向と、前記第２の流向検出部用基板部分に実装されている前記流向検出部の一対の前記ヒータ素子と前記測温素子による温度の検出軸方向とが９０度の角度で交差する態様で前記第１の流向検出部用基板部分および前記第２の流向検出部用基板部分にそれぞれ連設する請求項６に記載の熱式流向センサ。 The support for the first flow direction detection unit and the support for the second flow direction detection unit are the pair of the heater elements of the flow direction detection unit mounted on the substrate portion for the first flow direction detection unit and the heater elements. The temperature detection axial direction by the temperature measuring element and the pair of heater elements of the flow direction detecting unit mounted on the substrate portion for the second flow direction detecting unit and the temperature detecting axial direction by the temperature measuring element are 90. The thermal flow direction sensor according to claim 6, which is connected to the first flow direction detection unit substrate portion and the second flow direction detection unit substrate portion in a manner of intersecting at an angle of degrees.
PCT/JP2021/009439 2020-03-25 2021-03-10 Thermal flow direction sensor WO2021193051A1 (en)

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JPH095135A (en) * 1995-06-19 1997-01-10 Hitachi Ltd Thermal flowmeter and its measuring element
US20060005635A1 (en) * 2002-10-29 2006-01-12 Hybrid Electronics Australia Pty. Ltd. Flow transducer and method
JP2015068659A (en) * 2013-09-27 2015-04-13 林　泰正 Manufacturing method of thermal flow velocity/rate sensor, and thermal flow velocity/rate sensor
JP2015210196A (en) * 2014-04-27 2015-11-24 林　泰正 Thermal flow velocity and flow rate sensor and method for manufacturing the same
JP2017198496A (en) * 2016-04-26 2017-11-02 Koa株式会社 Flow rate sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH095135A (en) * 1995-06-19 1997-01-10 Hitachi Ltd Thermal flowmeter and its measuring element
US20060005635A1 (en) * 2002-10-29 2006-01-12 Hybrid Electronics Australia Pty. Ltd. Flow transducer and method
JP2015068659A (en) * 2013-09-27 2015-04-13 林　泰正 Manufacturing method of thermal flow velocity/rate sensor, and thermal flow velocity/rate sensor
JP2015210196A (en) * 2014-04-27 2015-11-24 林　泰正 Thermal flow velocity and flow rate sensor and method for manufacturing the same
JP2017198496A (en) * 2016-04-26 2017-11-02 Koa株式会社 Flow rate sensor

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