WO2020194635A1 - Inspection device - Google Patents

Inspection device Download PDF

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Publication number
WO2020194635A1
WO2020194635A1 PCT/JP2019/013466 JP2019013466W WO2020194635A1 WO 2020194635 A1 WO2020194635 A1 WO 2020194635A1 JP 2019013466 W JP2019013466 W JP 2019013466W WO 2020194635 A1 WO2020194635 A1 WO 2020194635A1
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WO
WIPO (PCT)
Prior art keywords
inspection device
inspected
inspection
porous sheet
sheet
Prior art date
Application number
PCT/JP2019/013466
Other languages
French (fr)
Japanese (ja)
Inventor
吉隆 北村
克彦 岸本
Original Assignee
シャープ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Priority to PCT/JP2019/013466 priority Critical patent/WO2020194635A1/en
Publication of WO2020194635A1 publication Critical patent/WO2020194635A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00

Definitions

  • the present invention relates to an inspection device provided with an inspection stage on which an object to be inspected is placed.
  • Patent Document 1 discloses an inspection device for inspecting an organic EL panel.
  • the inspection device of the present invention is an inspection device provided with an inspection stage on which the object to be inspected is placed, and includes a vacuum chuck mechanism for vacuum-adsorbing the object to be inspected on the inspection stage.
  • a foreign matter trapping sheet on the inspection stage that comes into contact with the inspected object by vacuum suction of the inspected object onto the inspection stage is provided.
  • 2 is a schematic top view and a schematic cross-sectional view of the inspection device and the flexible display panel when the flexible display panel is mounted on the inspection device according to the first embodiment of the present invention.
  • It is the schematic top view and schematic sectional view of the inspection apparatus which concerns on the comparative form of this invention. It is a figure for demonstrating the subject of the inspection apparatus which concerns on the comparative form of this invention.
  • It is the schematic sectional drawing of the porous sheet which concerns on Embodiment 1 of this invention.
  • It is the schematic top view and schematic sectional view of the inspection apparatus which concerns on Embodiment 2 of this invention.
  • FIG. 1 is a schematic top view and a schematic cross-sectional view of the inspection device 2 according to the present embodiment.
  • FIG. 1A is a schematic top view of the inspection device 2
  • FIG. 1B is a cross-sectional view taken along the line AA in FIG. 1A.
  • FIG. 1C is an enlarged view of a part of the upper surface of the inspection stage 4, which will be described later.
  • the inspection device 2 includes an inspection stage 4, a vacuum chuck mechanism 6, a foreign matter trapping sheet 8, and a support sheet 10.
  • the inspection device 2 may be provided with a conventionally known inspection device (not shown) for inspecting an object to be inspected, such as an image pickup device or a sensor.
  • the inspection device 2 includes an inspection stage 4 on which the inspected object is placed in order to inspect the inspected object.
  • the inspection device 2 can inspect the inspected object by placing the inspected object at a position overlapping the upper surface side of the inspection stage 4.
  • the vacuum chuck mechanism 6 shown in FIG. 1 (b) is provided on the lower surface side of the inspection stage 4.
  • the vacuum chuck mechanism 6 vacuum-sucks a member on the upper surface side of the inspection stage 4 at a position overlapping the upper surface of the inspection stage 4 by, for example, a vacuum pump (not shown).
  • the inspection stage 4 may contain a ceramic sintering material, that is, the inspection stage 4 may be formed by sintering a ceramic sintering material.
  • the inspection stage 4 may include a porous body containing pores 4A generated during sintering of the ceramic sintered material, as shown in FIG. 1 (c).
  • the pores 4A of the porous body may be used as vacuum suction holes used for vacuum suction of the object to be inspected by the vacuum chuck mechanism 6.
  • the inspection stage 4 is provided with vacuum suction holes substantially uniformly, and the vacuum chuck mechanism 6 facilitates suction of the object to be inspected to substantially the entire surface of the inspection stage 4.
  • the diameter dA of the pore 4A included in the inspection stage 4 is preferably 2 ⁇ m to 3 ⁇ m. Further, from the viewpoint of ensuring durability, the thickness of the inspection stage 4 is preferably 1 mm or more.
  • the foreign matter trapping sheet 8 is provided on the upper surface side of the inspection stage 4, and includes a porous sheet 12 and a deformation prevention layer 14.
  • at least a part of the object to be inspected comes into contact with the upper surface 8S of the foreign matter trapping sheet 8 by vacuum suction of the object to be inspected by the vacuum chuck mechanism 6.
  • at least a part of the object to be inspected is brought into contact with the upper surface of the porous sheet 12 by vacuum adsorption of the object to be inspected by the vacuum chuck mechanism 6.
  • the porous sheet 12 is a layer having a lower rigidity than the inspection stage 4.
  • the porous sheet 12 may contain, for example, a plurality of fibrous materials.
  • the porous sheet 12 has a film thickness d1 as shown in FIG. 1B.
  • the deformation prevention layer 14 is a layer for preventing the porous sheet 12 from being deformed by vacuum suction by the vacuum chuck mechanism 6, and is between the inspection stage 4 and the porous sheet 12. Be placed. From the viewpoint of improving the handling of the porous sheet 12 and the deformation prevention layer 14, it is preferable that the porous sheet 12 and the deformation prevention layer 14 are integrated.
  • the deformation prevention layer 14 may have a structure in which fine wires are woven into a mesh, or may have a thin wire including a honeycomb structure.
  • the diameter of the thin wire contained in the deformation prevention layer 14 is preferably 5 ⁇ m or less.
  • the mesh size of the network structure or the honeycomb structure formed by the fine wires is preferably 5 ⁇ m or less.
  • the deformation prevention layer 14 can be provided with the rigidity necessary to prevent deformation due to the vacuum suction without hindering the vacuum suction of each member on the inspection stage 4 by the vacuum chuck mechanism 6. Further, from the viewpoint of preventing deformation, the value obtained by dividing the height of the thin wire provided in the deformation prevention layer 14 by the width of the thin wire is preferably 1 or more.
  • the deformation prevention layer 14 may have, for example, a mesh structure in which a metal wire having a diameter of 10 to 100 ⁇ m is woven vertically and horizontally.
  • the metal wire may be, for example, a 30 ⁇ m Au thin wire or a 15 ⁇ m Al thin wire used in wire bonding.
  • the deformation prevention layer 14 may be formed by forming a large number of openings in a metal plate having a thickness of 50 to 100 ⁇ m.
  • the processing on the metal plate may be physical processing including, for example, laser processing or milling, or may be chemical processing including wet etching or dry etching.
  • the support sheet 10 is a layer having a higher rigidity than the foreign matter trapping sheet 8 and is formed on a part of the upper surface of the inspection stage 4. As shown in FIG. 1A, the support sheet 10 may be formed around the porous sheet 12 in a top view. Further, the support sheet 10 does not have to be provided with a gas flow path, and the object to be inspected may not be adsorbed on the upper surface of the support sheet 10 by the vacuum chuck mechanism 6.
  • the support sheet 10 includes an upper surface 10S that comes into contact with a part of the object to be inspected by vacuum suction of the object to be inspected by the vacuum chuck mechanism 6.
  • the upper surface 8S and the upper surface 10S are substantially flush with each other.
  • the foreign matter trapping sheet 8 and the support sheet 10 may be adhered to the inspection stage 4 via the breathable adhesive layer 16 shown in FIG. 1 (b). ..
  • the adhesive layer 16 preferably has less adhesive residue when the foreign matter trapping sheet 8 and the support sheet 10 are peeled from the inspection stage 4.
  • the adhesive strength of the adhesive layer 16 is preferably 0.1 N / 25 mm or more and 10 N / 25 mm or less. Due to the adhesive layer 16, the foreign matter trapping sheet 8 and the support sheet 10 can be easily separated from the inspection stage 4 in the present embodiment.
  • FIG. 2 is a diagram for explaining a state in which an object to be inspected is placed on the inspection device 2 according to the present embodiment.
  • a flexible display panel P including an OLED panel and the like will be described as an example of an object to be inspected using the inspection device 2.
  • FIG. 2A is a schematic top view of the inspection device 2 on which the flexible display panel P is mounted
  • FIG. 2B is a cross-sectional view taken along the line AA in FIG. 2A. Is.
  • the flexible display panel P includes a display area DA having a display surface and a frame area NA provided around the display area DA.
  • the terminal portion TA shown in FIG. 1 (a) is formed in the frame region NA.
  • the terminal portion TA and the wiring connected to each sub-pixel circuit of the display area DA are electrically conductive via the routing wiring L formed in the frame area NA.
  • An external device for applying a video signal may be mounted on the terminal portion TA in each sub-pixel circuit connected to each sub-pixel in the display area DA.
  • the flexible display panel P when the flexible display panel P is inspected using the inspection device 2, as shown in FIGS. 2A and 2B, the flexible display panel P is a foreign substance in the inspection stage 4. It is arranged at a position on the capture sheet 8 side that overlaps with the inspection stage 4. At this time, the display area DA is arranged at a position where it overlaps with the foreign matter capturing sheet 8. Similarly, the frame region NA including the terminal portion TA is arranged at a position where it overlaps with the support sheet 10.
  • the lower surface of the display area DA which is a part of the flexible display panel P different from the terminal portion TA, comes into contact with the foreign matter capturing sheet 8. Therefore, the display area DA is supported by the inspection stage 4 via the foreign matter capturing sheet 8.
  • the lower surface of the frame region NA which is a part of the flexible display panel P including the terminal portion TA, comes into contact with the support sheet 10. Therefore, the frame region DA, particularly the terminal portion TA, is directly supported on the support sheet 10.
  • the flexible display panel P is attracted to the inspection device 2 by operating the vacuum chuck mechanism 6 in a state where the flexible display panel P is arranged at a position overlapping the inspection stage 4. With the flexible display panel P adsorbed on the inspection device 2, the flexible display panel P is inspected by an inspection instrument (not shown).
  • the display area DA and the frame area are used when the flexible display panel P is attracted to the inspection device 2. It is possible to reduce the occurrence of damage at the boundary with the NA.
  • the thickness d2 of the flexible display panel P shown in FIG. 2B may be 150 ⁇ m to 200 ⁇ m. Further, when the flexible display panel P is a display panel having a touch panel, the thickness d2 may be 250 ⁇ m to 300 ⁇ m.
  • the flexible display panel P may have, for example, a structure in which a laminated film having an adhesive layer, a polyimide substrate, and a device layer having a thin film transistor layer or a light emitting element layer are laminated in order from the lower layer.
  • the thickness of the laminated film may be 100 ⁇ m
  • the thickness of the polyimide substrate may be 16 ⁇ m
  • the thickness of the device layer may be 20 to 30 ⁇ m.
  • the flexible display panel P may be provided with a laminated film having a thickness of about 75 ⁇ m on the upper layer of the device layer.
  • FIG. 3 is a schematic top view and a schematic cross-sectional view of the inspection device 20 according to the comparative form.
  • FIG. 3A is a schematic top view of the inspection device 20, and
  • FIG. 3B is a cross-sectional view taken along the line AA in FIG. 3A.
  • the configuration of the inspection device 20 according to the comparative embodiment is different from that of the inspection device 2 according to the present embodiment only in that it does not include the foreign matter trapping sheet 8, the support sheet 10, and the adhesive layer 16. Therefore, the inspection of the inspected object using the inspection device 20 is performed in a state where the inspected object is directly adsorbed on the inspection stage 4 by using the vacuum chuck mechanism 6.
  • FIG. 4 is a diagram for explaining a problem of the inspection device 20 according to the comparative form, and both of FIG. 4A and FIG. 4B correspond to FIG. 3B. A cross-sectional view at the position is shown.
  • foreign matter E As shown in FIG. 4A may be generated.
  • the foreign matter E when the object to be inspected is the flexible display panel P, for example, a lump of the organic substance adhered in the chamber of the vapor deposition machine when the organic layer of the flexible display panel P is formed by vapor deposition can be mentioned.
  • examples of the foreign matter E include fragments of the substrate glass or fragments of the plastic tray generated during the division of the substrate of the flexible display panel P or the transportation of the substrate.
  • the foreign matter E includes, for example, small pieces of metal generated by scraping the parts of the transport system in the transport of the substrate of the flexible display panel P, or fiber scraps generated from the human body or clothing of the worker. Can be mentioned.
  • the foreign matter E When the foreign matter E is present on the inspection stage 4 and the object to be inspected is adsorbed on the inspection stage 4, the foreign matter E and the object to be inspected come into contact with each other. For this reason, the foreign matter E may cause scratches or the like on the object to be inspected.
  • the flexible display panel P is adsorbed on the inspection stage 4 in a state where the foreign matter E is present on the inspection stage 4, a part of the flexible display panel P is caused by the foreign matter E as shown in FIG. 4B. It is pushed up and becomes a panel deformation part PD.
  • the inspection by the inspection device 20 is executed in the state where the panel deformed portion PD is generated in the display area DA, the flexible display panel P which is a good product is regarded as a defective product due to the presence of the panel deformed portion PD. It may be falsely detected.
  • the panel deformed portion PD is placed in a portion that should be originally determined to be a bright portion. If it occurs, it may be detected that the portion is a dark part. It is difficult to determine whether the portion is a dark part due to the panel deformation portion PD or a dark part due to color mixing, and color mixing occurs in the flexible display panel P in which color mixing does not originally occur. There is a possibility of erroneously determining that the product is defective.
  • FIG. 5 is a diagram for explaining the effect of the inspection device 2 according to the present embodiment, and in both of FIG. 5 (a) and FIG. 5 (b), FIG. 2 (b) shows. A cross-sectional view at the corresponding position is shown.
  • foreign matter E may be generated on the foreign matter trapping sheet 8.
  • the flexible display panel P is arranged on the inspection device 2 in a state where the foreign matter E is present on the foreign matter capturing sheet 8, also in the present embodiment, as shown in FIG. 5A, one of the display areas DA. A panel deformed portion PD is generated in the portion.
  • the foreign matter E becomes the porous sheet 12 of the foreign matter capturing sheet 8 as shown in FIG. 5 (b). It is captured by the recess 12R generated in. This is because the porous sheet 12 has a lower rigidity than the inspection stage 4, so that the foreign matter E pushed by the flexible display panel P by vacuum suction is pushed into the porous sheet 12.
  • the inspection device 2 By capturing the foreign matter E in the recess 12R on the porous sheet 12, the occurrence of scratches or the like due to the foreign matter E on the object to be inspected adsorbed at the position where it overlaps with the porous sheet 12 is reduced. Therefore, when the inspection device 2 according to the present embodiment is used to inspect the object to be inspected, even if foreign matter E is generated on the inspection device 2, scratches on the object to be inspected or the like may occur. Occurrence can be reduced.
  • the panel deformed portion PD is removed from the display area DA of the flexible display panel P. Therefore, in the present embodiment, even when the foreign matter E is generated on the inspection device 2, the inspection of the flexible display panel P can be performed in a state where the unevenness in the display area DA of the flexible display panel P is reduced. Therefore, in the present embodiment, the probability that the flexible display panel P, which is originally a good product, is erroneously detected as a defective product can be reduced, and the yield in the manufacturing process of the flexible display panel P can be improved.
  • the deformation prevention layer 14 is formed only on the lower layer of the porous sheet 12. Therefore, although the deformation prevention layer 14 reduces the deformation of the porous sheet 12 due to vacuum adsorption, it does not inhibit the deformation of the porous sheet 12 due to the foreign matter E. Therefore, the deformation prevention layer 14 does not interfere with the function of the porous sheet 12 to take in the foreign matter E.
  • the panel deformed portion PD is generated in the frame region NA of the flexible display panel P.
  • the frame area NA does not have any defects that affect the display quality, such as color mixing. Therefore, even if the panel deformation portion PD occurs in the frame region NA of the flexible display panel P, the influence on the inspection of the flexible display panel P is small.
  • the support sheet 10 has a higher rigidity than the porous sheet 12, the terminal portion TA of the flexible display panel P is more reliably held by the support sheet 10. For this reason, it becomes easier to mount an external device on the terminal portion TA for carrying out the above-mentioned color mixing inspection and the like, and the inspection using the inspection device 2 becomes easier.
  • the porous sheet 12 when the porous sheet 12 includes a fibrous material, the porous sheet 12 may capture the foreign matter E by taking in the foreign matter E between the fibrous materials.
  • the ratio of the length to the diameter of the fibrous material included in the porous sheet 12 may be 1000 or more and 1: 1. That is, the fibrous material included in the porous sheet 12 may have a length of 1000 times or more the diameter of the fibrous material.
  • the diameter of the fibrous material included in the porous sheet 12 is preferably 1/10 or less of the thickness d2 of the object to be inspected such as the flexible display panel P.
  • the porous sheet 12 can acquire appropriate rigidity, that is, flexibility for capturing the foreign matter E.
  • the diameter of the fibrous material included in the porous sheet 12 is expressed by using decitex, which is a unit indicating the gram weight per 10,000 m
  • the diameter of the fibrous material according to the present embodiment is It is preferably 5, 5 decitex or less.
  • the diameter of the fibrous material according to the present embodiment is preferably 30 ⁇ m or less, and more preferably 10 ⁇ m or less.
  • the porous sheet 12 may have conductivity.
  • the porous sheet 12 may contain a fibrous conductive material, and the fibrous material described above may be the conductive material.
  • the conductive material may contain, for example, Pt, Au, or carbon.
  • the above-mentioned film thickness d1 is preferably 20 ⁇ m or more.
  • the foreign matter E generated on the inspection device 2 is a foreign matter E having a maximum size of about several ⁇ m.
  • the porous sheet 12 can more efficiently capture the foreign matter E having a size of about several ⁇ m.
  • the film thickness d1 is preferably 1 mm or less, and more preferably 300 ⁇ m or less.
  • the porosity of the porous sheet 12 is preferably 20% by volume or more and 50% by volume or less with respect to the total volume of the porous sheet 12.
  • the porosity of the porous sheet 12 is 20% by volume or more, the maximum amount of foreign matter E that can be captured by the same porous sheet 12 can be sufficiently secured, and the porous sheet 12 can be replaced, that is, the foreign matter trapping sheet. The frequency of replacement of 8 can be reduced.
  • the porosity of the porous sheet 12 is 50% by volume or less, the rigidity of the porous sheet 12 for the porous sheet 12 to appropriately support an object to be inspected such as the flexible display panel P is increased. It can be secured sufficiently.
  • FIG. 6A is a cross-sectional view of the porous sheet 12 in a plane orthogonal to the length direction of the fibrous material included in the porous sheet 12.
  • FIG. 6B is a cross-sectional view corresponding to FIG. 6A, showing a case where the porous sheet 12 is compressed in the thickness direction of the porous sheet 12.
  • the vertical direction toward the paper surface is the thickness direction of the porous sheet 12.
  • the fibrous material 12f of the porous sheet 12 has such that the centers of the fibrous material 12f substantially coincide with each other in a regular triangular lattice dot shape. Assume a model aligned in the porous sheet 12. Further, it is assumed that the fibrous material 12f of the porous sheet 12 has substantially the same shape in the length direction.
  • the radius of the fibrous material 12f is a, and the minimum distance between the gaps between the fibrous materials 12f adjacent to each other is b.
  • a has a value of 1/10 or less of the thickness of the flexible display panel P.
  • b has a value of a or less.
  • the porosity K of the porous sheet 12 is represented by the following formula (1).
  • T1 is represented by the following equation (2) using a and b.
  • the region of the equilateral triangle formed by the centers of the three fibrous materials 12f adjacent to each other is defined as the region C.
  • the cross-sectional area of the fibrous material 12f included in the region C is half of the total cross-sectional area of the fibrous material 12f. Therefore, assuming that the filling rate of the fibrous material 12f in the porous sheet 12 in the region C is F, the following formula (3) is established.
  • the filling rate F is substantially the same as the filling rate of the fibrous material 12f with respect to the total volume of the porous sheet 12. Can be considered to be. Therefore, the above-mentioned equation (1) is derived by subtracting the filling factor F from 1.
  • T2 is represented by the following equation (4) using a and b.
  • the porous sheet 12 has a structure in which n layers of the fibrous material 12f are laminated in the thickness direction of the porous sheet 12.
  • n is a natural number of 2 or more.
  • the film thickness d1 of the porous sheet 12 in the state where the porous sheet 12 is not compressed is represented by the following formula (5).
  • the film thickness d3 of the porous sheet 12 in the compressed state of the porous sheet 12 is represented by the following formula (6).
  • the maximum height H of the foreign matter E which can be reliably captured by the porous sheet 12, is set to the maximum amount of deformation in the thickness direction of the porous sheet 12 so that the porous sheet 12 can be deformed by being pushed by the foreign matter E. Equivalent to. Therefore, the maximum height H is expressed by the following equation (7).
  • the foreign matter trapping sheet 8 can reliably trap the foreign matter E up to the maximum height H represented by the above formula (7) on the porous sheet 12.
  • the inspection device 2 since the inspection device 2 includes the adhesive layer 16, the foreign matter trapping sheet 8 and the support sheet 10 can be separated from the inspection stage 4. Therefore, when a large amount of foreign matter is generated on the foreign matter trapping sheet 8 or the support sheet 10, the foreign matter trapping sheet 8 or the support sheet 10 can be easily replaced.
  • the foreign matter trapping sheet 8 When the foreign matter trapping sheet 8 is provided with a conductive material, the foreign matter trapping sheet 8 may be replaced even when the conductive material is oxidized and the foreign matter trapping sheet 8 loses its conductivity.
  • the foreign matter trapping sheet 8 includes any of Pt, Au, or carbon as a conductive material, the deterioration of the conductivity of the foreign matter trapping sheet 8 due to the oxidation of the conductive material is delayed, and the foreign matter is trapped. The frequency of replacement of the capture sheet 8 can be reduced.
  • FIG. 7 is a schematic top view and a schematic sectional view of the inspection device 2 according to the present embodiment.
  • FIG. 7A is a schematic top view of the inspection device 2
  • FIG. 7B is a cross-sectional view taken along the line AA in FIG. 1A.
  • the porous sheet 12 is on the surface of the porous sheet 12 on the side where the object to be inspected is vacuum-adsorbed.
  • the configuration is different only in that the film 18 is further provided as shown in each figure.
  • the film 18 is made of a conductive material and has a film thickness d4.
  • the inspection device 2 can reduce the probability that the flexible display panel P, which is a good product, is erroneously detected as a defective product, and can improve the yield in the manufacturing process of the flexible display panel P. ..
  • the porous sheet 12 since the porous sheet 12 has a film 18 made of a conductive material on the upper surface 8S side, it can be used as an object to be inspected such as a flexible display panel P on the inspection stage 4. , The generation of static electricity can be reduced more efficiently.
  • the film thickness d4 of the film 18 is preferably 100 nm or less. When the film thickness d4 is 100 nm or less, it is possible to reduce the inhibition of the capture of foreign matter E by the porous sheet 12 by the film 18.
  • the film thickness d4 of the film 18 is preferably 1 nm or more. When the film thickness d4 is 1 nm or more, the film 18 can acquire sufficient conductivity, and the film 18 can be formed relatively easily.
  • the film 18 may contain, for example, Pt, Au, or carbon as the conductive material. By including these materials in the film 18, even if the film thickness d4 of the film 18 is about several nm, the oxidation of the film 18 is reduced and the conductivity of the film 18 is more easily maintained.

Abstract

This inspection device (2) is provided with an inspection stage (4) on which an inspection target is placed, the inspection device comprising: a vacuum chuck mechanism (6) for vacuum-suctioning the inspection target on the inspection stage; and a foreign substance capture sheet (8) that is provided on the inspection stage and comes into contact with the inspection target by the vacuum-suctioning of the inspection target on the inspection stage.

Description

検査装置Inspection equipment
　本発明は、被検査物を載置する検査ステージを備えた検査装置に関する。 The present invention relates to an inspection device provided with an inspection stage on which an object to be inspected is placed.
　特許文献１には、有機ＥＬパネルを検査するための検査装置が開示されている。 Patent Document 1 discloses an inspection device for inspecting an organic EL panel.
日本国再公表特許「国際公開番号２０１５／０５６３６５」Japanese republished patent "International Publication No. 2015/056365"
　特許文献１に記載されているような検査装置を用いて、被検査物を検査する場合、検査装置のステージと被検査物との間の異物の存在により、被検査物に傷等が発生する可能性がある。 When an inspected object is inspected using an inspection device as described in Patent Document 1, the inspected object is scratched or the like due to the presence of foreign matter between the stage of the inspection device and the inspected object. there is a possibility.
　上記課題を解決するために、本発明の検査装置は、被検査物を載置する検査ステージを備えた検査装置であって、前記被検査物を前記検査ステージ上に真空吸着する真空チャック機構と、前記検査ステージ上への前記被検査物の真空吸着により、前記被検査物と接する、前記検査ステージ上の異物捕捉シートとを備える。 In order to solve the above problems, the inspection device of the present invention is an inspection device provided with an inspection stage on which the object to be inspected is placed, and includes a vacuum chuck mechanism for vacuum-adsorbing the object to be inspected on the inspection stage. A foreign matter trapping sheet on the inspection stage that comes into contact with the inspected object by vacuum suction of the inspected object onto the inspection stage is provided.
　上記構成により、検査装置のステージと被検査物との間に異物が存在した場合であっても、当該被検査物への傷等の発生を低減できる。 With the above configuration, even if a foreign substance is present between the stage of the inspection device and the object to be inspected, it is possible to reduce the occurrence of scratches on the object to be inspected.
本発明の実施形態１に係る検査装置の概略上面図および概略断面図である。It is a schematic top view and schematic sectional view of the inspection apparatus which concerns on Embodiment 1 of this invention. 本発明の実施形態１に係る検査装置にフレキシブル表示パネルを載置した際の、当該検査装置およびフレキシブル表示パネルの概略上面図および概略断面図である。2 is a schematic top view and a schematic cross-sectional view of the inspection device and the flexible display panel when the flexible display panel is mounted on the inspection device according to the first embodiment of the present invention. 本発明の比較形態に係る検査装置の概略上面図および概略断面図である。It is the schematic top view and schematic sectional view of the inspection apparatus which concerns on the comparative form of this invention. 本発明の比較形態に係る検査装置の課題を説明するための図である。It is a figure for demonstrating the subject of the inspection apparatus which concerns on the comparative form of this invention. 本発明の実施形態１に係る検査装置の効果を説明するための、当該検査装置の概略上面図および概略断面図である。It is the schematic top view and schematic sectional view of the inspection apparatus for demonstrating the effect of the inspection apparatus which concerns on Embodiment 1 of this invention. 本発明の実施形態１に係る多孔質シートの概略断面図である。It is the schematic sectional drawing of the porous sheet which concerns on Embodiment 1 of this invention. 本発明の実施形態２に係る検査装置の概略上面図および概略断面図である。It is the schematic top view and schematic sectional view of the inspection apparatus which concerns on Embodiment 2 of this invention.
　〔実施形態１〕
　図１は、本実施形態に係る検査装置２の概略上面図および概略断面図である。図１の（ａ）は、検査装置２の概略上面図であり、図１の（ｂ）は、図１の（ａ）における、Ａ－Ａ線矢視断面図である。図１の（ｃ）は、後述する検査ステージ４の上表面の一部を拡大して示す図である。 [Embodiment 1]
FIG. 1 is a schematic top view and a schematic cross-sectional view of the inspection device 2 according to the present embodiment. FIG. 1A is a schematic top view of the inspection device 2, and FIG. 1B is a cross-sectional view taken along the line AA in FIG. 1A. FIG. 1C is an enlarged view of a part of the upper surface of the inspection stage 4, which will be described later.
　図１に示すように、本実施形態に係る検査装置２は、検査ステージ４と、真空チャック機構６と、異物捕捉シート８と、支持シート１０とを備える。この他、検査装置２は、撮像装置、あるいはセンサ等、被検査物を検査するための、図示しない従来公知の検査器具を備えていてもよい。 As shown in FIG. 1, the inspection device 2 according to the present embodiment includes an inspection stage 4, a vacuum chuck mechanism 6, a foreign matter trapping sheet 8, and a support sheet 10. In addition, the inspection device 2 may be provided with a conventionally known inspection device (not shown) for inspecting an object to be inspected, such as an image pickup device or a sensor.
　検査装置２は、被検査物を検査するために、当該被検査物を載置する検査ステージ４を備える。本実施形態において、検査装置２は、検査ステージ４の上面側と重畳する位置に、被検査物を載置することにより、当該被検査物の検査が可能となる。 The inspection device 2 includes an inspection stage 4 on which the inspected object is placed in order to inspect the inspected object. In the present embodiment, the inspection device 2 can inspect the inspected object by placing the inspected object at a position overlapping the upper surface side of the inspection stage 4.
　検査ステージ４の下面側には、図１の（ｂ）に示す、真空チャック機構６が設けられている。真空チャック機構６は、例えば、図示しない真空ポンプ等により、検査ステージ４の上面側の部材を、検査ステージ４の上面と重畳する位置に真空吸着する。 The vacuum chuck mechanism 6 shown in FIG. 1 (b) is provided on the lower surface side of the inspection stage 4. The vacuum chuck mechanism 6 vacuum-sucks a member on the upper surface side of the inspection stage 4 at a position overlapping the upper surface of the inspection stage 4 by, for example, a vacuum pump (not shown).
　ここで、例えば、検査ステージ４は、セラミックの焼結材料を含んでいてもよく、すなわち、検査ステージ４は、セラミックの焼結材料を焼結することにより形成してもよい。この場合、検査ステージ４は、図１の（ｃ）に示すように、セラミックの焼結材料の焼結の際に生じる細孔４Ａを含む、多孔質体を備えていてもよい。当該多孔質体の細孔４Ａは、真空チャック機構６による、被検査物の真空吸着に使用される真空吸着孔として使用してもよい。これにより、検査ステージ４は、略均一に真空吸着孔を備え、真空チャック機構６により、被検査物を、検査ステージ４の略全面に吸着させやすくなる。真空吸着孔としての機能を担保する観点から、検査ステージ４が備える細孔４Ａの直径ｄＡは、２μｍから３μｍであることが好ましい。また、耐久性を確保する観点から、検査ステージ４の厚みは、１ｍｍ以上であることが好ましい。 Here, for example, the inspection stage 4 may contain a ceramic sintering material, that is, the inspection stage 4 may be formed by sintering a ceramic sintering material. In this case, the inspection stage 4 may include a porous body containing pores 4A generated during sintering of the ceramic sintered material, as shown in FIG. 1 (c). The pores 4A of the porous body may be used as vacuum suction holes used for vacuum suction of the object to be inspected by the vacuum chuck mechanism 6. As a result, the inspection stage 4 is provided with vacuum suction holes substantially uniformly, and the vacuum chuck mechanism 6 facilitates suction of the object to be inspected to substantially the entire surface of the inspection stage 4. From the viewpoint of ensuring the function as the vacuum suction hole, the diameter dA of the pore 4A included in the inspection stage 4 is preferably 2 μm to 3 μm. Further, from the viewpoint of ensuring durability, the thickness of the inspection stage 4 is preferably 1 mm or more.
　異物捕捉シート８は、検査ステージ４の上面側に設けられ、多孔質シート１２と、変形防止層１４とを含む。本実施形態において、真空チャック機構６による被検査物の真空吸着により、被検査物の少なくとも一部は、異物捕捉シート８の上面８Ｓと接する。特に、本実施形態においては、真空チャック機構６による被検査物の真空吸着により、被検査物の少なくとも一部と多孔質シート１２の上面とが接する。 The foreign matter trapping sheet 8 is provided on the upper surface side of the inspection stage 4, and includes a porous sheet 12 and a deformation prevention layer 14. In the present embodiment, at least a part of the object to be inspected comes into contact with the upper surface 8S of the foreign matter trapping sheet 8 by vacuum suction of the object to be inspected by the vacuum chuck mechanism 6. In particular, in the present embodiment, at least a part of the object to be inspected is brought into contact with the upper surface of the porous sheet 12 by vacuum adsorption of the object to be inspected by the vacuum chuck mechanism 6.
　本実施形態において、多孔質シート１２は、検査ステージ４と比較して剛性の低い層である。本実施形態において、多孔質シート１２は、例えば、複数の繊維状材料を含んでいてもよい。なお、多孔質シート１２は、図１の（ｂ）に示すように、膜厚ｄ１を有している。 In the present embodiment, the porous sheet 12 is a layer having a lower rigidity than the inspection stage 4. In this embodiment, the porous sheet 12 may contain, for example, a plurality of fibrous materials. The porous sheet 12 has a film thickness d1 as shown in FIG. 1B.
　本実施形態において、変形防止層１４は、多孔質シート１２が、真空チャック機構６による真空吸着によって、変形することを防止するための層であり、検査ステージ４と多孔質シート１２との間に配置される。多孔質シート１２と変形防止層１４とのハンドリングを改善する観点から、多孔質シート１２と変形防止層１４とは、一体化されていることが好ましい。 In the present embodiment, the deformation prevention layer 14 is a layer for preventing the porous sheet 12 from being deformed by vacuum suction by the vacuum chuck mechanism 6, and is between the inspection stage 4 and the porous sheet 12. Be placed. From the viewpoint of improving the handling of the porous sheet 12 and the deformation prevention layer 14, it is preferable that the porous sheet 12 and the deformation prevention layer 14 are integrated.
　変形防止層１４は、細線が網目状に編み込まれた構造を備えていてもよく、あるいは、ハニカム構造を含む細線を備えていてもよい。変形防止層１４に含まれる細線の直径は、５μｍ以下であることが好ましい。また、細線によって形成される網目構造またはハニカム構造の網目の大きさは、５μｍ以下であることが好ましい。 The deformation prevention layer 14 may have a structure in which fine wires are woven into a mesh, or may have a thin wire including a honeycomb structure. The diameter of the thin wire contained in the deformation prevention layer 14 is preferably 5 μm or less. Further, the mesh size of the network structure or the honeycomb structure formed by the fine wires is preferably 5 μm or less.
　上記構成により、変形防止層１４は、真空チャック機構６による、検査ステージ４上の各部材の真空吸着を妨げることなく、当該真空吸着による変形を防止するために必要な剛性を備えることができる。また、変形を防止する観点から、変形防止層１４が備える細線の高さを、当該細線の幅で割った値は、１以上であることが好ましい。 With the above configuration, the deformation prevention layer 14 can be provided with the rigidity necessary to prevent deformation due to the vacuum suction without hindering the vacuum suction of each member on the inspection stage 4 by the vacuum chuck mechanism 6. Further, from the viewpoint of preventing deformation, the value obtained by dividing the height of the thin wire provided in the deformation prevention layer 14 by the width of the thin wire is preferably 1 or more.
　変形防止層１４は、例えば、直径が１０～１００μｍの金属ワイヤを、縦横に編み込んだメッシュ構造を備えていてもよい。当該金属ワイヤは、例えば、ワイヤボンディングで使用される、３０μｍのＡｕ細線、または、１５μｍのＡｌ細線であってもよい。 The deformation prevention layer 14 may have, for example, a mesh structure in which a metal wire having a diameter of 10 to 100 μm is woven vertically and horizontally. The metal wire may be, for example, a 30 μm Au thin wire or a 15 μm Al thin wire used in wire bonding.
　また、変形防止層１４は、厚さ５０～１００μｍの金属プレートに対し、多数の開口を形成することにより形成してもよい。当該金属プレートに対する加工は、例えば、レーザ加工またはミリング等を含む、物理的加工であってもよく、あるいは、ウェットエッチングまたはドライエッチング等を含む、化学的加工であってもよい。 Further, the deformation prevention layer 14 may be formed by forming a large number of openings in a metal plate having a thickness of 50 to 100 μm. The processing on the metal plate may be physical processing including, for example, laser processing or milling, or may be chemical processing including wet etching or dry etching.
　支持シート１０は、異物捕捉シート８よりも剛性の高い層であり、検査ステージ４の上面の一部に形成されている。支持シート１０は、図１の（ａ）に示すように、上面視において、多孔質シート１２の周囲に形成されていてもよい。また、支持シート１０は、気体の流路を備えていなくともよく、真空チャック機構６によって、支持シート１０の上面に被検査物が吸着されなくともよい。 The support sheet 10 is a layer having a higher rigidity than the foreign matter trapping sheet 8 and is formed on a part of the upper surface of the inspection stage 4. As shown in FIG. 1A, the support sheet 10 may be formed around the porous sheet 12 in a top view. Further, the support sheet 10 does not have to be provided with a gas flow path, and the object to be inspected may not be adsorbed on the upper surface of the support sheet 10 by the vacuum chuck mechanism 6.
　本実施形態において、図１の（ｂ）に示すように、支持シート１０は、真空チャック機構６による被検査物の真空吸着により、被検査物の一部と接触する上面１０Ｓを備えている。ここで、上面８Ｓと、上面１０Ｓとの、検査ステージ４の上面からの高さが同一であるため、上面８Ｓと、上面１０Ｓとは、略面一となる。 In the present embodiment, as shown in FIG. 1B, the support sheet 10 includes an upper surface 10S that comes into contact with a part of the object to be inspected by vacuum suction of the object to be inspected by the vacuum chuck mechanism 6. Here, since the heights of the upper surface 8S and the upper surface 10S from the upper surface of the inspection stage 4 are the same, the upper surface 8S and the upper surface 10S are substantially flush with each other.
　なお、本実施形態において、異物捕捉シート８と、支持シート１０とは、図１の（ｂ）に示す、通気性を備えた接着層１６を介して、検査ステージ４に接着されていてもよい。接着層１６は、異物捕捉シート８と、支持シート１０とを、検査ステージ４から剥離した際の糊残りが少なくなるものが好ましい。接着層１６の粘着力は、０．１Ｎ／２５ｍｍ以上、１０Ｎ／２５ｍｍ以下が好ましい。当該接着層１６があるために、本実施形態においては、異物捕捉シート８と、支持シート１０とは、検査ステージ４から容易に剥離できる。 In the present embodiment, the foreign matter trapping sheet 8 and the support sheet 10 may be adhered to the inspection stage 4 via the breathable adhesive layer 16 shown in FIG. 1 (b). .. The adhesive layer 16 preferably has less adhesive residue when the foreign matter trapping sheet 8 and the support sheet 10 are peeled from the inspection stage 4. The adhesive strength of the adhesive layer 16 is preferably 0.1 N / 25 mm or more and 10 N / 25 mm or less. Due to the adhesive layer 16, the foreign matter trapping sheet 8 and the support sheet 10 can be easily separated from the inspection stage 4 in the present embodiment.
　図２は、本実施形態に係る検査装置２に、被検査物を載置した状態について説明するための図である。本実施形態においては、検査装置２を使用して検査する被検査物として、ＯＬＥＤパネル等を含む、フレキシブル表示パネルＰを例に挙げて説明する。図２の（ａ）は、フレキシブル表示パネルＰを載置した検査装置２の概略上面図であり、図２の（ｂ）は、図２の（ａ）における、Ａ－Ａ線矢視断面図である。 FIG. 2 is a diagram for explaining a state in which an object to be inspected is placed on the inspection device 2 according to the present embodiment. In the present embodiment, a flexible display panel P including an OLED panel and the like will be described as an example of an object to be inspected using the inspection device 2. FIG. 2A is a schematic top view of the inspection device 2 on which the flexible display panel P is mounted, and FIG. 2B is a cross-sectional view taken along the line AA in FIG. 2A. Is.
　本実施形態において、フレキシブル表示パネルＰは、図２の（ａ）に示すように、表示面を有する表示領域ＤＡと、当該表示領域ＤＡの周囲に設けられた額縁領域ＮＡとを備える。額縁領域ＮＡには、図１の（ａ）に示す、端子部ＴＡが形成されている。端子部ＴＡと、表示領域ＤＡ各サブ画素回路に接続する配線とは、額縁領域ＮＡに形成された引き回し配線Ｌを介して、電気的に導通している。端子部ＴＡには、表示領域ＤＡの各サブ画素と接続する各サブ画素回路に、映像信号を印加するための外部機器が実装されてもよい。 In the present embodiment, as shown in FIG. 2A, the flexible display panel P includes a display area DA having a display surface and a frame area NA provided around the display area DA. The terminal portion TA shown in FIG. 1 (a) is formed in the frame region NA. The terminal portion TA and the wiring connected to each sub-pixel circuit of the display area DA are electrically conductive via the routing wiring L formed in the frame area NA. An external device for applying a video signal may be mounted on the terminal portion TA in each sub-pixel circuit connected to each sub-pixel in the display area DA.
　本実施形態において、検査装置２を使用してフレキシブル表示パネルＰを検査する場合、図２の（ａ）および図２の（ｂ）に示すように、フレキシブル表示パネルＰが、検査ステージ４の異物捕捉シート８側の、検査ステージ４と重畳する位置に配置される。この際、表示領域ＤＡは、異物捕捉シート８と重畳する位置に配置される。同様に、端子部ＴＡを含む額縁領域ＮＡは、支持シート１０と重畳する位置に配置される。 In the present embodiment, when the flexible display panel P is inspected using the inspection device 2, as shown in FIGS. 2A and 2B, the flexible display panel P is a foreign substance in the inspection stage 4. It is arranged at a position on the capture sheet 8 side that overlaps with the inspection stage 4. At this time, the display area DA is arranged at a position where it overlaps with the foreign matter capturing sheet 8. Similarly, the frame region NA including the terminal portion TA is arranged at a position where it overlaps with the support sheet 10.
　ゆえに、フレキシブル表示パネルＰの、端子部ＴＡとは異なる一部である、表示領域ＤＡの下面は、異物捕捉シート８と接する。このため、表示領域ＤＡは、異物捕捉シート８を介して、検査ステージ４に支持される。一方、フレキシブル表示パネルＰの、端子部ＴＡを含む一部である、額縁領域ＮＡの下面は、支持シート１０と接する。このため、額縁領域ＤＡ、特に、端子部ＴＡは、支持シート１０上において直接支持される。 Therefore, the lower surface of the display area DA, which is a part of the flexible display panel P different from the terminal portion TA, comes into contact with the foreign matter capturing sheet 8. Therefore, the display area DA is supported by the inspection stage 4 via the foreign matter capturing sheet 8. On the other hand, the lower surface of the frame region NA, which is a part of the flexible display panel P including the terminal portion TA, comes into contact with the support sheet 10. Therefore, the frame region DA, particularly the terminal portion TA, is directly supported on the support sheet 10.
　検査ステージ４と重畳する位置に、フレキシブル表示パネルＰを配置した状態において、真空チャック機構６を稼働することにより、フレキシブル表示パネルＰを、検査装置２に吸着する。検査装置２にフレキシブル表示パネルＰを吸着した状態において、図示しない検査器具による、フレキシブル表示パネルＰの検査が実行される。 The flexible display panel P is attracted to the inspection device 2 by operating the vacuum chuck mechanism 6 in a state where the flexible display panel P is arranged at a position overlapping the inspection stage 4. With the flexible display panel P adsorbed on the inspection device 2, the flexible display panel P is inspected by an inspection instrument (not shown).
　なお、上述したように、本実施形態においては、上面８Ｓと、上面１０Ｓとが略面一であることから、フレキシブル表示パネルＰの検査装置２への吸着の際に、表示領域ＤＡと額縁領域ＮＡとの境界に、ダメージが生じることを低減することができる。 As described above, in the present embodiment, since the upper surface 8S and the upper surface 10S are substantially flush with each other, the display area DA and the frame area are used when the flexible display panel P is attracted to the inspection device 2. It is possible to reduce the occurrence of damage at the boundary with the NA.
　なお、フレキシブル表示パネルＰが、タッチパネルを有さない表示パネルであった場合、図２の（ｂ）に示す、フレキシブル表示パネルＰの厚みｄ２は、１５０μｍ～２００μｍであってもよい。また、フレキシブル表示パネルＰが、タッチパネルを有する表示パネルであった場合、上記厚みｄ２は、２５０μｍ～３００μｍであってもよい。 When the flexible display panel P is a display panel without a touch panel, the thickness d2 of the flexible display panel P shown in FIG. 2B may be 150 μm to 200 μm. Further, when the flexible display panel P is a display panel having a touch panel, the thickness d2 may be 250 μm to 300 μm.
　フレキシブル表示パネルＰは、例えば、粘着層を備えた積層フィルムと、ポリイミド基板と、薄膜トランジスタ層または発光素子層を備えたデバイス層とが、下層から順に積層された構造を備えていてもよい。積層フィルムの厚みは１００μｍであってもよく、ポリイミド基板の１６μｍであってもよく、デバイス層の厚みは２０～３０μｍであってもよい。さらに、フレキシブル表示パネルＰは、当該デバイス層の上層に、厚みが７５μｍ程度の積層フィルムを備えていてもよい。 The flexible display panel P may have, for example, a structure in which a laminated film having an adhesive layer, a polyimide substrate, and a device layer having a thin film transistor layer or a light emitting element layer are laminated in order from the lower layer. The thickness of the laminated film may be 100 μm, the thickness of the polyimide substrate may be 16 μm, and the thickness of the device layer may be 20 to 30 μm. Further, the flexible display panel P may be provided with a laminated film having a thickness of about 75 μm on the upper layer of the device layer.
　次に、本実施形態に係る検査装置２の効果を、図３に示す、比較形態に係る検査装置２０の課題と対比して説明する。 Next, the effect of the inspection device 2 according to the present embodiment will be described in comparison with the problem of the inspection device 20 according to the comparative embodiment shown in FIG.
　図３は、比較形態に係る検査装置２０の概略上面図および概略断面図である。図３の（ａ）は、検査装置２０の概略上面図であり、図３の（ｂ）は、図３の（ａ）における、Ａ－Ａ線矢視断面図である。 FIG. 3 is a schematic top view and a schematic cross-sectional view of the inspection device 20 according to the comparative form. FIG. 3A is a schematic top view of the inspection device 20, and FIG. 3B is a cross-sectional view taken along the line AA in FIG. 3A.
　比較形態に係る検査装置２０は、本実施形態に係る検査装置２と比較して、異物捕捉シート８、支持シート１０、および接着層１６を備えていない点においてのみ、構成が異なる。このため、検査装置２０を使用した被検査物の検査は、真空チャック機構６を使用して、検査ステージ４上に直接被検査物を吸着した状態において実行される。 The configuration of the inspection device 20 according to the comparative embodiment is different from that of the inspection device 2 according to the present embodiment only in that it does not include the foreign matter trapping sheet 8, the support sheet 10, and the adhesive layer 16. Therefore, the inspection of the inspected object using the inspection device 20 is performed in a state where the inspected object is directly adsorbed on the inspection stage 4 by using the vacuum chuck mechanism 6.
　図４は、比較形態に係る検査装置２０の課題を説明するための図であり、図４の（ａ）と図４の（ｂ）との何れにおいても、図３の（ｂ）に対応する位置における断面図を示している。 FIG. 4 is a diagram for explaining a problem of the inspection device 20 according to the comparative form, and both of FIG. 4A and FIG. 4B correspond to FIG. 3B. A cross-sectional view at the position is shown.
　被検査物の検査工程においては、図４の（ａ）に示す、異物Ｅが発生する場合がある。異物Ｅとしては、被検査物がフレキシブル表示パネルＰである場合、例えば、フレキシブル表示パネルＰの有機層を蒸着により形成した際に、蒸着機のチャンバ内において付着した有機物の塊が挙げられる。また、異物Ｅとしては、例えば、フレキシブル表示パネルＰの基板の分断、あるいは、基板の搬送において発生する、基板ガラスの破片、またはプラスチック製のトレイの破片が挙げられる。他にも、異物Ｅとしては、例えば、フレキシブル表示パネルＰの基板の搬送において、搬送系の部品が削れることによって生じる、金属の小片、あるいは、作業員の人体または被服から発生する繊維くず等が挙げられる。 In the inspection process of the object to be inspected, foreign matter E as shown in FIG. 4A may be generated. As the foreign matter E, when the object to be inspected is the flexible display panel P, for example, a lump of the organic substance adhered in the chamber of the vapor deposition machine when the organic layer of the flexible display panel P is formed by vapor deposition can be mentioned. Further, examples of the foreign matter E include fragments of the substrate glass or fragments of the plastic tray generated during the division of the substrate of the flexible display panel P or the transportation of the substrate. In addition, the foreign matter E includes, for example, small pieces of metal generated by scraping the parts of the transport system in the transport of the substrate of the flexible display panel P, or fiber scraps generated from the human body or clothing of the worker. Can be mentioned.
　検査ステージ４上に異物Ｅが存在する状態において、検査ステージ４上に被検査物が吸着すると、当該異物Ｅと被検査物とが当接する。このために、異物Ｅによって、被検査物に傷等が発生する可能性がある。 When the foreign matter E is present on the inspection stage 4 and the object to be inspected is adsorbed on the inspection stage 4, the foreign matter E and the object to be inspected come into contact with each other. For this reason, the foreign matter E may cause scratches or the like on the object to be inspected.
　また、検査ステージ４上に異物Ｅが存在する状態において、検査ステージ４上にフレキシブル表示パネルＰが吸着すると、図４の（ｂ）に示すように、異物Ｅによってフレキシブル表示パネルＰの一部が押し上げられ、パネル変形部ＰＤとなる。ここで、表示領域ＤＡにパネル変形部ＰＤが生じている状態において、検査装置２０による検査が実行された場合、パネル変形部ＰＤの存在により、良品であるフレキシブル表示パネルＰを不良品であると誤検知する場合がある。 Further, when the flexible display panel P is adsorbed on the inspection stage 4 in a state where the foreign matter E is present on the inspection stage 4, a part of the flexible display panel P is caused by the foreign matter E as shown in FIG. 4B. It is pushed up and becomes a panel deformation part PD. Here, when the inspection by the inspection device 20 is executed in the state where the panel deformed portion PD is generated in the display area DA, the flexible display panel P which is a good product is regarded as a defective product due to the presence of the panel deformed portion PD. It may be falsely detected.
　例えば、パネル変形部ＰＤを表示領域ＤＡに有するフレキシブル表示パネルＰに対し、カメラを用いた混色検査等の表示品位検査を実行した場合、本来明部と判定されるべき箇所にパネル変形部ＰＤが生じていると、当該箇所を暗部であると検知する場合がある。当該箇所は、パネル変形部ＰＤにより暗部となっているのか、あるいは、混色により暗部となっているのかが判断することが困難であり、本来混色が生じていないフレキシブル表示パネルＰを、混色が発生した不良品であると誤って判断する可能性がある。 For example, when a display quality inspection such as a color mixing inspection using a camera is performed on a flexible display panel P having a panel deformed portion PD in the display area DA, the panel deformed portion PD is placed in a portion that should be originally determined to be a bright portion. If it occurs, it may be detected that the portion is a dark part. It is difficult to determine whether the portion is a dark part due to the panel deformation portion PD or a dark part due to color mixing, and color mixing occurs in the flexible display panel P in which color mixing does not originally occur. There is a possibility of erroneously determining that the product is defective.
　図５は、本実施形態に係る検査装置２が奏する効果について説明するための図であり、図５の（ａ）と図５の（ｂ）との何れにおいても、図２の（ｂ）に対応する位置における断面図を示している。 FIG. 5 is a diagram for explaining the effect of the inspection device 2 according to the present embodiment, and in both of FIG. 5 (a) and FIG. 5 (b), FIG. 2 (b) shows. A cross-sectional view at the corresponding position is shown.
　本実施形態においても、図５の（ａ）に示すように、異物捕捉シート８上に、異物Ｅが生じる場合がある。異物捕捉シート８上に異物Ｅが存在する状態において、フレキシブル表示パネルＰを検査装置２上に配置した場合、本実施形態においても、図５の（ａ）に示すように、表示領域ＤＡの一部にパネル変形部ＰＤが生じる。 Also in this embodiment, as shown in FIG. 5A, foreign matter E may be generated on the foreign matter trapping sheet 8. When the flexible display panel P is arranged on the inspection device 2 in a state where the foreign matter E is present on the foreign matter capturing sheet 8, also in the present embodiment, as shown in FIG. 5A, one of the display areas DA. A panel deformed portion PD is generated in the portion.
　しかしながら、本実施形態において、真空チャック機構６による、フレキシブル表示パネルＰの吸着が実行されることにより、図５の（ｂ）に示すように、異物Ｅが、異物捕捉シート８の多孔質シート１２に生じる凹部１２Ｒに捕捉される。これは、多孔質シート１２が、検査ステージ４と比較して剛性が低いために、真空吸着によってフレキシブル表示パネルＰに押された異物Ｅが、多孔質シート１２に押し込まれることによる。 However, in the present embodiment, as the flexible display panel P is sucked by the vacuum chuck mechanism 6, the foreign matter E becomes the porous sheet 12 of the foreign matter capturing sheet 8 as shown in FIG. 5 (b). It is captured by the recess 12R generated in. This is because the porous sheet 12 has a lower rigidity than the inspection stage 4, so that the foreign matter E pushed by the flexible display panel P by vacuum suction is pushed into the porous sheet 12.
　多孔質シート１２上の凹部１２Ｒ中に、異物Ｅが捕捉されることにより、多孔質シート１２と重畳する位置に吸着された被検査物への、異物Ｅによる傷等の発生が低減する。したがって、本実施形態に係る検査装置２を使用して、被検査物の検査を行う場合には、検査装置２上に異物Ｅが生じた場合であっても、被検査物への傷等の発生を低減できる。 By capturing the foreign matter E in the recess 12R on the porous sheet 12, the occurrence of scratches or the like due to the foreign matter E on the object to be inspected adsorbed at the position where it overlaps with the porous sheet 12 is reduced. Therefore, when the inspection device 2 according to the present embodiment is used to inspect the object to be inspected, even if foreign matter E is generated on the inspection device 2, scratches on the object to be inspected or the like may occur. Occurrence can be reduced.
　また、多孔質シート１２上の凹部１２Ｒ中に、異物Ｅが捕捉されることにより、フレキシブル表示パネルＰの表示領域ＤＡからパネル変形部ＰＤが除去される。したがって、本実施形態においては、検査装置２上に異物Ｅが生じた場合であっても、フレキシブル表示パネルＰの表示領域ＤＡにおける凹凸を低減した状態において、フレキシブル表示パネルＰの検査を実行できる。このために、本実施形態においては、本来良品であるフレキシブル表示パネルＰを、不良品であると誤検知する蓋然性を低減でき、フレキシブル表示パネルＰの製造工程における歩留まりを改善できる。 Further, by capturing the foreign matter E in the recess 12R on the porous sheet 12, the panel deformed portion PD is removed from the display area DA of the flexible display panel P. Therefore, in the present embodiment, even when the foreign matter E is generated on the inspection device 2, the inspection of the flexible display panel P can be performed in a state where the unevenness in the display area DA of the flexible display panel P is reduced. Therefore, in the present embodiment, the probability that the flexible display panel P, which is originally a good product, is erroneously detected as a defective product can be reduced, and the yield in the manufacturing process of the flexible display panel P can be improved.
　なお、変形防止層１４は、多孔質シート１２の下層のみに形成されている。このため、変形防止層１４は、真空吸着による多孔質シート１２の変形を低減するものの、異物Ｅによる多孔質シート１２の変形を阻害しない。このために、変形防止層１４は、多孔質シート１２の、異物Ｅを取り込む機能を阻害しない。 The deformation prevention layer 14 is formed only on the lower layer of the porous sheet 12. Therefore, although the deformation prevention layer 14 reduces the deformation of the porous sheet 12 due to vacuum adsorption, it does not inhibit the deformation of the porous sheet 12 due to the foreign matter E. Therefore, the deformation prevention layer 14 does not interfere with the function of the porous sheet 12 to take in the foreign matter E.
　また、多孔質シート１２よりも剛性の高い支持シート１０上に異物Ｅが生じた場合、フレキシブル表示パネルＰの額縁領域ＮＡにパネル変形部ＰＤが生じる。しかしながら、額縁領域ＮＡは、混色等、表示品位に影響する不良は生じない。このため、フレキシブル表示パネルＰの額縁領域ＮＡにパネル変形部ＰＤが生じた場合であっても、フレキシブル表示パネルＰの検査に与える影響は小さい。 Further, when the foreign matter E is generated on the support sheet 10 having higher rigidity than the porous sheet 12, the panel deformed portion PD is generated in the frame region NA of the flexible display panel P. However, the frame area NA does not have any defects that affect the display quality, such as color mixing. Therefore, even if the panel deformation portion PD occurs in the frame region NA of the flexible display panel P, the influence on the inspection of the flexible display panel P is small.
　加えて、支持シート１０が多孔質シート１２よりも剛性が高いことにより、フレキシブル表示パネルＰの端子部ＴＡが、支持シート１０によってより確実に保持される。このために、上述した混色検査等を実施するための、端子部ＴＡへの外部機器の実装がより容易となり、検査装置２を使用した検査がより簡便となる。 In addition, since the support sheet 10 has a higher rigidity than the porous sheet 12, the terminal portion TA of the flexible display panel P is more reliably held by the support sheet 10. For this reason, it becomes easier to mount an external device on the terminal portion TA for carrying out the above-mentioned color mixing inspection and the like, and the inspection using the inspection device 2 becomes easier.
　本実施形態において、多孔質シート１２が繊維状材料を備える場合、多孔質シート１２は、繊維状材料間に異物Ｅを取り込むことにより、異物Ｅを捕捉してもよい。本実施形態において、多孔質シート１２が備える繊維状材料の長さと直径との比は、１０００以上：１であってもよい。すなわち、多孔質シート１２が備える繊維状材料は、当該繊維状材料の直径の１０００倍以上の長さを有していてもよい。上記構成によれば、異物Ｅを多孔質シート１２が捕捉した際の、多孔質シート１２に含まれる繊維状材料からの発塵が防止でき、また、異物Ｅを繊維状材料中に、効率よく取り込むために必要な剛性を、多孔質シート１２が備えることが可能である。 In the present embodiment, when the porous sheet 12 includes a fibrous material, the porous sheet 12 may capture the foreign matter E by taking in the foreign matter E between the fibrous materials. In the present embodiment, the ratio of the length to the diameter of the fibrous material included in the porous sheet 12 may be 1000 or more and 1: 1. That is, the fibrous material included in the porous sheet 12 may have a length of 1000 times or more the diameter of the fibrous material. According to the above configuration, when the porous sheet 12 captures the foreign matter E, dust generation from the fibrous material contained in the porous sheet 12 can be prevented, and the foreign matter E can be efficiently contained in the fibrous material. The porous sheet 12 can provide the rigidity required for taking in.
　また、多孔質シート１２が備える繊維状材料の直径は、フレキシブル表示パネルＰ等の被検査物の厚みｄ２の、１０分の１以下であることが好ましい。当該繊維状材料を多孔質シート１２に用いることにより、多孔質シート１２は、異物Ｅを補足するために適切な剛性、すなわち柔軟性を獲得することができる。 Further, the diameter of the fibrous material included in the porous sheet 12 is preferably 1/10 or less of the thickness d2 of the object to be inspected such as the flexible display panel P. By using the fibrous material for the porous sheet 12, the porous sheet 12 can acquire appropriate rigidity, that is, flexibility for capturing the foreign matter E.
　本実施形態において、１０，０００ｍあたりのグラム重量を示す単位である、デシテックスを用いて、多孔質シート１２が備える繊維状材料の直径を表した場合、本実施形態に係る繊維状材料の直径は、５デシテックス以下であることが好ましい。また、本実施形態に係る繊維状材料の直径は、３０μｍ以下であることが好ましく、１０μｍ以下であることがより好ましい。上記構成により、多孔質シート１２が、異物を繊維状材料中に、効率よく取り込むことが可能である。なお、本実施形態に係る繊維状材料の直径が、０．１デシテックス以上、あるいは０．１μｍ以上であれば、当該繊維状材料を人工的に製造できる。 In the present embodiment, when the diameter of the fibrous material included in the porous sheet 12 is expressed by using decitex, which is a unit indicating the gram weight per 10,000 m, the diameter of the fibrous material according to the present embodiment is It is preferably 5, 5 decitex or less. Further, the diameter of the fibrous material according to the present embodiment is preferably 30 μm or less, and more preferably 10 μm or less. With the above configuration, the porous sheet 12 can efficiently take in foreign matter into the fibrous material. If the diameter of the fibrous material according to the present embodiment is 0.1 decitex or more, or 0.1 μm or more, the fibrous material can be artificially produced.
　本実施形態において、多孔質シート１２は、導電性を有していてもよい。例えば、多孔質シート１２は、繊維状の導電性材料を含んでいてもよく、上述した繊維状材料が、当該導電性材料であってもよい。これにより、検査ステージ４上におけるフレキシブル表示パネルＰ等の被検査物に、静電気が発生することを低減でき、当該静電気による被検査物へのダメージを低減できる。導電性材料は、例えば、Ｐｔ、Ａｕ、あるいはカーボンの何れかを含んでいてもよい。 In the present embodiment, the porous sheet 12 may have conductivity. For example, the porous sheet 12 may contain a fibrous conductive material, and the fibrous material described above may be the conductive material. As a result, it is possible to reduce the generation of static electricity on the inspected object such as the flexible display panel P on the inspection stage 4, and it is possible to reduce the damage to the inspected object due to the static electricity. The conductive material may contain, for example, Pt, Au, or carbon.
　上述した膜厚ｄ１は、２０μｍ以上であることが好ましい。フレキシブル表示パネルの検査を、検査装置２を使用して行う場合、一般に、検査装置２上に発生する異物Ｅは、最大で数μｍ程度の大きさを有する異物Ｅが想定される。膜厚ｄ１が２０μｍ以上であることにより、数μｍ程度の大きさを有する異物Ｅを、多孔質シート１２がより効率よく捕捉することが可能である。 The above-mentioned film thickness d1 is preferably 20 μm or more. When the inspection of the flexible display panel is performed using the inspection device 2, it is generally assumed that the foreign matter E generated on the inspection device 2 is a foreign matter E having a maximum size of about several μm. When the film thickness d1 is 20 μm or more, the porous sheet 12 can more efficiently capture the foreign matter E having a size of about several μm.
　また、膜厚ｄ１は、１ｍｍ以下であることが好ましく、３００μｍ以下であることがより好ましい。上記構成により、多孔質シート１２が変形して、異物Ｅを捕捉するために必要な柔軟性を、多孔質シート１２が備えることが可能である。 Further, the film thickness d1 is preferably 1 mm or less, and more preferably 300 μm or less. With the above configuration, the porous sheet 12 can be deformed to provide the flexibility required to capture the foreign matter E.
　また、多孔質シート１２の空隙率は、多孔質シート１２全体の体積に対して、２０体積パーセント以上、５０体積パーセント以下であることが好ましい。多孔質シート１２の空隙率が、２０体積パーセント以上であることにより、同一の多孔質シート１２が捕捉できる異物Ｅの最大量が十分に確保でき、多孔質シート１２の交換、すなわち、異物捕捉シート８の交換の頻度を低減できる。また、多孔質シート１２の空隙率が、５０体積パーセント以下であることにより、フレキシブル表示パネルＰ等の被検査物を、多孔質シート１２が適切に支持するための、多孔質シート１２の剛性を十分に確保することができる。 Further, the porosity of the porous sheet 12 is preferably 20% by volume or more and 50% by volume or less with respect to the total volume of the porous sheet 12. When the porosity of the porous sheet 12 is 20% by volume or more, the maximum amount of foreign matter E that can be captured by the same porous sheet 12 can be sufficiently secured, and the porous sheet 12 can be replaced, that is, the foreign matter trapping sheet. The frequency of replacement of 8 can be reduced. Further, since the porosity of the porous sheet 12 is 50% by volume or less, the rigidity of the porous sheet 12 for the porous sheet 12 to appropriately support an object to be inspected such as the flexible display panel P is increased. It can be secured sufficiently.
　多孔質シート１２の空隙率に関して、図６を参照して説明を行う。図６の（ａ）は、多孔質シート１２を、当該多孔質シート１２が備える繊維状材料の長さ方向と直交する面における断面図である。また、図６の（ｂ）は、図６の（ａ）に対応する断面図であり、多孔質シート１２を、多孔質シート１２の厚み方向に圧縮した場合について示している。なお、図６においては、紙面に向かって上下方向を、多孔質シート１２の厚み方向とする。 The porosity of the porous sheet 12 will be described with reference to FIG. FIG. 6A is a cross-sectional view of the porous sheet 12 in a plane orthogonal to the length direction of the fibrous material included in the porous sheet 12. Further, FIG. 6B is a cross-sectional view corresponding to FIG. 6A, showing a case where the porous sheet 12 is compressed in the thickness direction of the porous sheet 12. In FIG. 6, the vertical direction toward the paper surface is the thickness direction of the porous sheet 12.
　本実施形態においては、図６の（ａ）に示すように、多孔質シート１２の繊維状材料１２ｆは、繊維状材料１２ｆのそれぞれの中心が、正三角格子点状に略一致するように、多孔質シート１２中に整列しているモデルを仮定する。また、多孔質シート１２の繊維状材料１２ｆは、長さ方向に略同一の形状を有していると仮定する。 In the present embodiment, as shown in FIG. 6A, the fibrous material 12f of the porous sheet 12 has such that the centers of the fibrous material 12f substantially coincide with each other in a regular triangular lattice dot shape. Assume a model aligned in the porous sheet 12. Further, it is assumed that the fibrous material 12f of the porous sheet 12 has substantially the same shape in the length direction.
　ここで、繊維状材料１２ｆの半径をａ、互いに隣接する繊維状材料１２ｆの間隙の最小距離をｂとおく。なお、被検査物が上述するフレキシブル表示パネルＰ等の柔軟な被検査物である場合、ａはフレキシブル表示パネルＰの厚みの１０分の１以下の値を有する。しかしながら、被検査物が柔軟でない場合には、ａはこれ以上の値であってもよい。また、ｂはａ以下の値を有する。この場合、多孔質シート１２の空隙率Ｋは、下記の式（１）によって表される。 Here, the radius of the fibrous material 12f is a, and the minimum distance between the gaps between the fibrous materials 12f adjacent to each other is b. When the object to be inspected is a flexible object to be inspected such as the above-mentioned flexible display panel P, a has a value of 1/10 or less of the thickness of the flexible display panel P. However, if the object to be inspected is not flexible, a may be a value higher than this. Further, b has a value of a or less. In this case, the porosity K of the porous sheet 12 is represented by the following formula (1).
Figure JPOXMLDOC01-appb-M000002
 　多孔質シート１２の空隙率Ｋの導出について、図６の（ａ）を参照しつつ説明する。
Figure JPOXMLDOC01-appb-M000002
The derivation of the porosity K of the porous sheet 12 will be described with reference to FIG. 6A.
　図６の（ａ）に示すように、多孔質シート１２の厚み方向において互いに隣接する繊維状材料１２ｆにおいて、一方の繊維状材料１２ｆの中心から、他方の繊維状材料１２ｆの中心までの、多孔質シート１２の厚み方向における距離を、Ｔ１とおく。ここで、Ｔ１は、ａおよびｂを用いて、下記の式（２）によって表される。 As shown in FIG. 6A, in the fibrous materials 12f adjacent to each other in the thickness direction of the porous sheet 12, the porosity from the center of one fibrous material 12f to the center of the other fibrous material 12f. The distance of the quality sheet 12 in the thickness direction is T1. Here, T1 is represented by the following equation (2) using a and b.
Figure JPOXMLDOC01-appb-M000003
 　ここで、図６の（ａ）に示すように、互いに隣接する３つの繊維状材料１２ｆの中心同士が形成する正三角形の領域を、領域Ｃとおく。ここで、領域Ｃに含まれる、繊維状材料１２ｆの断面積は、繊維状材料１２ｆの全断面積の半分である。したがって、領域Ｃにおける、多孔質シート１２中の繊維状材料１２ｆの充填率をＦとすると、下記の式（３）が成立する。
Figure JPOXMLDOC01-appb-M000003
Here, as shown in FIG. 6A, the region of the equilateral triangle formed by the centers of the three fibrous materials 12f adjacent to each other is defined as the region C. Here, the cross-sectional area of the fibrous material 12f included in the region C is half of the total cross-sectional area of the fibrous material 12f. Therefore, assuming that the filling rate of the fibrous material 12f in the porous sheet 12 in the region C is F, the following formula (3) is established.
Figure JPOXMLDOC01-appb-M000004
 　さらに、繊維状材料１２ｆは、多孔質シート１２中において多数積層されていると仮定した場合、充填率Ｆは、多孔質シート１２の全体の体積に対する、繊維状材料１２ｆの充填率と略同一であると見なせる。したがって、１から充填率Ｆを引くことにより、上述した式（１）が導出される。
Figure JPOXMLDOC01-appb-M000004
Further, assuming that a large number of fibrous materials 12f are laminated in the porous sheet 12, the filling rate F is substantially the same as the filling rate of the fibrous material 12f with respect to the total volume of the porous sheet 12. Can be considered to be. Therefore, the above-mentioned equation (1) is derived by subtracting the filling factor F from 1.
　次いで、多孔質シート１２が捕捉することができる、異物Ｅの最大高さＨについて、図６の（ｂ）を参照しつつ説明する。 Next, the maximum height H of the foreign matter E that can be captured by the porous sheet 12 will be described with reference to FIG. 6B.
　図６の（ｂ）に示すように、多孔質シート１２が、繊維状材料１２ｆ同士が接触するまで、厚み方向に圧縮された場合を仮定する。ここで、図６の（ｂ）に示すように、多孔質シート１２の厚み方向において互いに隣接する繊維状材料１２ｆにおいて、一方の繊維状材料１２ｆの中心から、他方の繊維状材料１２ｆの中心までの、多孔質シート１２の厚み方向における距離を、Ｔ２とおく。この場合、ここで、Ｔ２は、ａおよびｂを用いて、下記の式（４）によって表される。 As shown in FIG. 6B, it is assumed that the porous sheet 12 is compressed in the thickness direction until the fibrous materials 12f come into contact with each other. Here, as shown in FIG. 6B, in the fibrous materials 12f adjacent to each other in the thickness direction of the porous sheet 12, from the center of one fibrous material 12f to the center of the other fibrous material 12f. The distance of the porous sheet 12 in the thickness direction is T2. In this case, here, T2 is represented by the following equation (4) using a and b.
Figure JPOXMLDOC01-appb-M000005
 　ここで、本実施形態において、多孔質シート１２は、多孔質シート１２の厚み方向に、ｎ層の繊維状材料１２ｆの層が積層された構造を有していると仮定する。なお、ｎは２以上の自然数である。この場合、多孔質シート１２が圧縮されていない状態における、多孔質シート１２の膜厚ｄ１は、下記の式（５）によって表される。
Figure JPOXMLDOC01-appb-M000005
Here, in the present embodiment, it is assumed that the porous sheet 12 has a structure in which n layers of the fibrous material 12f are laminated in the thickness direction of the porous sheet 12. Note that n is a natural number of 2 or more. In this case, the film thickness d1 of the porous sheet 12 in the state where the porous sheet 12 is not compressed is represented by the following formula (5).
Figure JPOXMLDOC01-appb-M000006
 　同様に、多孔質シート１２が圧縮された状態における、多孔質シート１２の膜厚ｄ３は、下記の式（６）によって表される。
Figure JPOXMLDOC01-appb-M000006
Similarly, the film thickness d3 of the porous sheet 12 in the compressed state of the porous sheet 12 is represented by the following formula (6).
Figure JPOXMLDOC01-appb-M000007
 　ここで、多孔質シート１２が確実に捕捉できる、異物Ｅの最大高さＨは、異物Ｅに押されることにより、多孔質シート１２が変形できる、多孔質シート１２の厚み方向の最大変形量に相当する。したがって、当該最大高さＨは、下記の式（７）によって表される。
Figure JPOXMLDOC01-appb-M000007
Here, the maximum height H of the foreign matter E, which can be reliably captured by the porous sheet 12, is set to the maximum amount of deformation in the thickness direction of the porous sheet 12 so that the porous sheet 12 can be deformed by being pushed by the foreign matter E. Equivalent to. Therefore, the maximum height H is expressed by the following equation (7).
Figure JPOXMLDOC01-appb-M000008
 　以上より、異物捕捉シート８は、上記の式（７）に示す、最大高さＨまでの異物Ｅを、多孔質シート１２に、確実に捕捉することができる。
Figure JPOXMLDOC01-appb-M000008
From the above, the foreign matter trapping sheet 8 can reliably trap the foreign matter E up to the maximum height H represented by the above formula (7) on the porous sheet 12.
　なお、上述したように、本実施形態においては、検査装置２が接着層１６を備えているために、異物捕捉シート８と、支持シート１０とを、検査ステージ４から剥離できる。ゆえに、異物捕捉シート８上または支持シート１０上に多く異物が発生した場合には、容易に異物捕捉シート８または支持シート１０を交換することができる。 As described above, in the present embodiment, since the inspection device 2 includes the adhesive layer 16, the foreign matter trapping sheet 8 and the support sheet 10 can be separated from the inspection stage 4. Therefore, when a large amount of foreign matter is generated on the foreign matter trapping sheet 8 or the support sheet 10, the foreign matter trapping sheet 8 or the support sheet 10 can be easily replaced.
　異物捕捉シート８が導電性材料を備えている場合、当該導電性材料が酸化し、異物捕捉シート８の導電性が失われた場合においても、異物捕捉シート８を交換してもよい。ここで、異物捕捉シート８が、Ｐｔ、Ａｕ、あるいはカーボンの何れかを導電性材料として備えている場合、当該導電性材料の酸化による、異物捕捉シート８の導電性の低下を遅延させ、異物捕捉シート８の交換の頻度を低減することができる。 When the foreign matter trapping sheet 8 is provided with a conductive material, the foreign matter trapping sheet 8 may be replaced even when the conductive material is oxidized and the foreign matter trapping sheet 8 loses its conductivity. Here, when the foreign matter trapping sheet 8 includes any of Pt, Au, or carbon as a conductive material, the deterioration of the conductivity of the foreign matter trapping sheet 8 due to the oxidation of the conductive material is delayed, and the foreign matter is trapped. The frequency of replacement of the capture sheet 8 can be reduced.
　〔実施形態２〕
　図７は、本実施形態に係る検査装置２の概略上面図および概略断面図である。図７の（ａ）は、検査装置２の概略上面図であり、図７の（ｂ）は、図１の（ａ）における、Ａ－Ａ線矢視断面図である。 [Embodiment 2]
FIG. 7 is a schematic top view and a schematic sectional view of the inspection device 2 according to the present embodiment. FIG. 7A is a schematic top view of the inspection device 2, and FIG. 7B is a cross-sectional view taken along the line AA in FIG. 1A.
　本実施形態に係る検査装置２は、前実施形態に係る検査装置２と比較して、多孔質シート１２が、多孔質シート１２の、被検査物を真空吸着する側の表面に、図７の各図に示す、皮膜１８をさらに備えている点においてのみ、構成が異なる。皮膜１８は、導電性材料からなり、膜厚ｄ４を有する。 In the inspection device 2 according to the present embodiment, as compared with the inspection device 2 according to the previous embodiment, the porous sheet 12 is on the surface of the porous sheet 12 on the side where the object to be inspected is vacuum-adsorbed. The configuration is different only in that the film 18 is further provided as shown in each figure. The film 18 is made of a conductive material and has a film thickness d4.
　本実施形態においても、検査装置２は、同様の理由から、良品であるフレキシブル表示パネルＰを、不良品であると誤検知する蓋然性を低減でき、フレキシブル表示パネルＰの製造工程における歩留まりを改善できる。 Also in the present embodiment, for the same reason, the inspection device 2 can reduce the probability that the flexible display panel P, which is a good product, is erroneously detected as a defective product, and can improve the yield in the manufacturing process of the flexible display panel P. ..
　また、本実施形態に係る検査装置２は、多孔質シート１２が、導電性材料からなる皮膜１８を、上面８Ｓ側に有するために、検査ステージ４上におけるフレキシブル表示パネルＰ等の被検査物に、静電気が発生することをより効率よく低減できる。 Further, in the inspection device 2 according to the present embodiment, since the porous sheet 12 has a film 18 made of a conductive material on the upper surface 8S side, it can be used as an object to be inspected such as a flexible display panel P on the inspection stage 4. , The generation of static electricity can be reduced more efficiently.
　皮膜１８の膜厚ｄ４は、１００ｎｍ以下であることが好ましい。膜厚ｄ４が１００ｎｍ以下であることにより、多孔質シート１２による異物Ｅの捕捉を、皮膜１８が阻害することを低減できる。また、皮膜１８の膜厚ｄ４は、１ｎｍ以上であることが好ましい。膜厚ｄ４が１ｎｍ以上であることにより、皮膜１８が十分な導電性を獲得でき、かつ、比較的容易に皮膜１８を形成することが可能である。 The film thickness d4 of the film 18 is preferably 100 nm or less. When the film thickness d4 is 100 nm or less, it is possible to reduce the inhibition of the capture of foreign matter E by the porous sheet 12 by the film 18. The film thickness d4 of the film 18 is preferably 1 nm or more. When the film thickness d4 is 1 nm or more, the film 18 can acquire sufficient conductivity, and the film 18 can be formed relatively easily.
　皮膜１８は、導電性材料として、例えば、Ｐｔ、Ａｕ、あるいはカーボンの何れかを含んでいてもよい。皮膜１８がこれらの材料を含むことにより、皮膜１８の膜厚ｄ４が数ｎｍ程度であっても、皮膜１８の酸化が低減され、皮膜１８の導電性がより維持されやすくなる。 The film 18 may contain, for example, Pt, Au, or carbon as the conductive material. By including these materials in the film 18, even if the film thickness d4 of the film 18 is about several nm, the oxidation of the film 18 is reduced and the conductivity of the film 18 is more easily maintained.
　本発明は上述した各実施形態に限定されるものではなく、請求項に示した範囲で種々の変更が可能であり、異なる実施形態にそれぞれ開示された技術的手段を適宜組み合わせて得られる実施形態についても本発明の技術的範囲に含まれる。さらに、各実施形態にそれぞれ開示された技術的手段を組み合わせることにより、新しい技術的特徴を形成することができる。 The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and the embodiments obtained by appropriately combining the technical means disclosed in the different embodiments. Is also included in the technical scope of the present invention. Furthermore, new technical features can be formed by combining the technical means disclosed in each embodiment.
２　　検査装置
４　　検査ステージ
６　　真空チャック機構
８　　異物捕捉シート
１０　支持シート
１２　多孔質シート
１４　変形防止層
１８　皮膜
Ｐ　　フレキシブル表示パネル
ＴＡ　端子部 2 Inspection device 4 Inspection stage 6 Vacuum chuck mechanism 8 Foreign matter trapping sheet 10 Support sheet 12 Porous sheet 14 Deformation prevention layer 18 Film P Flexible display panel TA terminal

Claims (20)

  1. 　被検査物を載置する検査ステージを備えた検査装置であって、
    　前記被検査物を前記検査ステージ上に真空吸着する真空チャック機構と、
    　前記検査ステージ上への前記被検査物の真空吸着により、前記被検査物と接する、前記検査ステージ上の異物捕捉シートとを備えた検査装置。     An inspection device equipped with an inspection stage on which an object to be inspected is placed.
    A vacuum chuck mechanism that vacuum-sucks the object to be inspected onto the inspection stage,
    An inspection device including a foreign matter trapping sheet on the inspection stage that comes into contact with the object to be inspected by vacuum suction of the object to be inspected onto the inspection stage.
  2. 　前記異物捕捉シートは、前記被検査物の真空吸着により、前記被検査物と接する多孔質シートと、前記真空チャック機構による真空吸着により、多孔質シートが変形することを防止する、前記検査ステージと前記多孔質シートとの間の変形防止層とを含む請求項１に記載の検査装置。 The foreign matter trapping sheet includes the porous sheet in contact with the object to be inspected by vacuum adsorption of the object to be inspected and the inspection stage that prevents the porous sheet from being deformed by vacuum adsorption by the vacuum chuck mechanism. The inspection device according to claim 1, further comprising an anti-deformation layer between the porous sheet and the porous sheet.
  3. 　前記多孔質シートは、複数の繊維状材料を含む請求項２に記載の検査装置。 The inspection device according to claim 2, wherein the porous sheet contains a plurality of fibrous materials.
  4. 　前記繊維状材料の長さと直径との比が、１０００以上：１である請求項３に記載の検査装置。 The inspection device according to claim 3, wherein the ratio of the length to the diameter of the fibrous material is 1000 or more: 1.
  5. 　前記繊維状材料の直径が、被検査物の厚みの１０分の１以下である請求項３または４に記載の検査装置。 The inspection device according to claim 3 or 4, wherein the diameter of the fibrous material is 1/10 or less of the thickness of the object to be inspected.
  6. 　前記繊維状材料の直径が、０．１デシテックス以上、５デシテックス以下である請求項３から５の何れか１項に記載の検査装置。 The inspection device according to any one of claims 3 to 5, wherein the diameter of the fibrous material is 0.1 decitex or more and 5 decitex or less.
  7. 　前記繊維状材料の直径が、０．１μｍ以上、３０μｍ以下である請求項３から５の何れか１項に記載の検査装置。 The inspection device according to any one of claims 3 to 5, wherein the diameter of the fibrous material is 0.1 μm or more and 30 μm or less.
  8. 　前記繊維状材料の半径をａ、互いに隣接する前記繊維状材料の間隙の最小距離をｂ、前記多孔質シートの空隙率をＫとし、ａが前記被検査物の厚みの１０分の１以下の値を有し、ｂがａ以下の値を有する場合、下記の式（１）が成立する請求項３から７の何れか１項に記載の検査装置。
    Figure JPOXMLDOC01-appb-M000001
         The radius of the fibrous material is a, the minimum distance between the gaps between the fibrous materials adjacent to each other is b, the porosity of the porous sheet is K, and a is 1/10 or less of the thickness of the object to be inspected. The inspection device according to any one of claims 3 to 7, wherein the inspection apparatus has a value and b has a value of a or less, and the following formula (1) is established.
    Figure JPOXMLDOC01-appb-M000001
  9. 　前記多孔質シートが、導電性を有する請求項２から８の何れか１項に記載の検査装置。 The inspection device according to any one of claims 2 to 8, wherein the porous sheet has conductivity.
  10. 　前記多孔質シートが、前記多孔質シートの、前記被検査物を真空吸着する側の表面に、導電性材料からなる皮膜をさらに備えた請求項９に記載の検査装置。 The inspection device according to claim 9, wherein the porous sheet further includes a film made of a conductive material on the surface of the porous sheet on the side where the object to be inspected is vacuum-adsorbed.
  11. 　前記皮膜の膜厚が、１ｎｍ以上、１００ｎｍ以下である請求項１０に記載の検査装置。 The inspection device according to claim 10, wherein the film thickness of the film is 1 nm or more and 100 nm or less.
  12. 　前記多孔質シートが、繊維状の導電性材料を含む請求項９に記載の検査装置。 The inspection device according to claim 9, wherein the porous sheet contains a fibrous conductive material.
  13. 　前記導電性材料が、Ｐｔ、Ａｕ、またはカーボンの何れかである請求項１０から１２の何れか１項に記載の検査装置。 The inspection device according to any one of claims 10 to 12, wherein the conductive material is any of Pt, Au, or carbon.
  14. 　前記多孔質シートの膜厚が、２０μｍ以上、１ｍｍ以下である請求項２から１３の何れか１項に記載の検査装置。 The inspection device according to any one of claims 2 to 13, wherein the thickness of the porous sheet is 20 μm or more and 1 mm or less.
  15. 　前記多孔質シートの空隙率が、２０体積パーセント以上、５０体積パーセント以下である請求項２から１４の何れか１項に記載の検査装置。 The inspection device according to any one of claims 2 to 14, wherein the porosity of the porous sheet is 20% by volume or more and 50% by volume or less.
  16. 　前記変形防止層が、網目状の細線を備えた請求項２から１５の何れか１項に記載の検査装置。 The inspection device according to any one of claims 2 to 15, wherein the deformation prevention layer is provided with a mesh-like thin wire.
  17. 　前記変形防止層が、ハニカム構造を含む細線を備えた請求項２から１５の何れか１項に記載の検査装置。 The inspection device according to any one of claims 2 to 15, wherein the deformation prevention layer includes a thin wire including a honeycomb structure.
  18. 　前記検査ステージが、セラミックの焼結材料を含み、前記焼結材料が、前記真空チャック機構による前記被検査物の真空吸着に使用される真空吸着孔を有する多孔質体を備えた請求項１から１７の何れか１項に記載の検査装置。 1. From claim 1, wherein the inspection stage includes a ceramic sintered material, and the sintered material comprises a porous body having a vacuum suction hole used for vacuum suction of the object to be inspected by the vacuum chuck mechanism. The inspection device according to any one of 17.
  19. 　前記被検査物が、端子部を有するフレキシブル表示パネルであり、前記真空チャック機構による真空吸着により、前記フレキシブル表示パネルの、前記端子部とは異なる一部が、異物捕捉シートを介して、前記検査ステージ上に支持され、前記端子部を含む一部が、前記異物捕捉シートよりも剛性の高い支持シートにより支持される請求項１から１８の何れか１項に記載の検査装置。 The object to be inspected is a flexible display panel having a terminal portion, and due to vacuum suction by the vacuum chuck mechanism, a part of the flexible display panel different from the terminal portion is inspected via a foreign matter trapping sheet. The inspection device according to any one of claims 1 to 18, which is supported on a stage and a part including the terminal portion is supported by a support sheet having a higher rigidity than the foreign matter trapping sheet.
  20. 　前記異物捕捉シートと、前記支持シートとの、前記被検査物と接する面の、前記検査ステージからの高さが同一である請求項１９に記載の検査装置。 The inspection device according to claim 19, wherein the height of the surface of the foreign matter trapping sheet and the support sheet in contact with the object to be inspected is the same from the inspection stage.
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