WO2020166565A1 - 焼成治具 - Google Patents
焼成治具 Download PDFInfo
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- WO2020166565A1 WO2020166565A1 PCT/JP2020/005150 JP2020005150W WO2020166565A1 WO 2020166565 A1 WO2020166565 A1 WO 2020166565A1 JP 2020005150 W JP2020005150 W JP 2020005150W WO 2020166565 A1 WO2020166565 A1 WO 2020166565A1
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- layer
- base material
- firing jig
- coating layer
- firing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D5/0006—Composite supporting structures
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Definitions
- This specification discloses the technique regarding a firing jig.
- a technique relating to a firing jig used for firing an electronic component material or firing an active material used in a lithium battery is disclosed.
- Patent Document 1 discloses a ceramic jig for electronic parts as a jig for firing an Al 2 O 3 —SiO 2 second layer on the surface of a SiC substrate (first layer).
- a firing jig is disclosed in which a layer is formed and a third layer of 8Y-ZrO 2 (8 wt% Y 2 O 3 -ZrO 2 ) is formed on the surface of the second layer.
- the third layer is provided to prevent the object to be fired (ceramics for electronic parts) from reacting with the firing jig.
- the second layer is provided to prevent the third layer from peeling off from the SiC substrate (first layer).
- the second layer prevents oxygen that has passed through the third layer from reaching the SiC substrate, and suppresses oxidation of the surface of the SiC substrate.
- the third layer is peeled off from the firing jig.
- materials that can be used in the second layer in addition to Al 2 O 3 —SiO 2 materials, Al 2 O 3 , Al 2 O 3 —SiO 2 —MgO materials, and MgO—Al 2 O are used. 3- ZrO 2 quality is mentioned.
- Al 2 O 3 , mullite, ZrO 2 , and Y 2 O are listed in addition to the 8Y-ZrO 2 substance.
- ZrO 2 is known as a material having low reactivity (hardly reactive material). Therefore, by forming ZrO 2 in the outermost layer (top coat layer) of the firing jig, it is possible to suppress the reaction of the electronic component (or the raw material of the electronic component) with the constituent material of the firing jig to a certain extent.
- Patent Document 1 also presupposes that the reaction between the electronic component and the firing jig can be suppressed by using the material of the third layer (top coat layer) including ZrO 2 , and the third layer is treated by firing. Measures are taken against peeling from the tool.
- the firing jig may include a SiC-based or Si-SiC-based base material and a coating layer coating the surface of the base material.
- the coating layer is exposed on the surface of the coating layer and the first layer mainly composed of Al 2 O 3 —SiO 2 provided on the surface of the base material, and is exposed to Y 2 O 3 , HfO 2 ,
- a second layer containing at least one selected from CeO 2 , NiO, WC, Ni, and Mo as a main component may be provided.
- the firing jig may include a SiC-based or Si-SiC-based base material and a coating layer coating the surface of the base material.
- the coating layer is exposed on the surface of the coating layer and the first layer mainly composed of Al 2 O 3 —SiO 2 provided on the surface of the base material, and is exposed to Y 2 O 3 , HfO 2 ,
- a second layer containing at least one selected from CeO 2 and NiO as a main component may be provided.
- the calculation result of the reaction product in the thermodynamic equilibrium state of the multi-component system with respect to BaTiO 3 is shown.
- the result of an experimental example is shown.
- the SEM photograph of a coating layer is shown.
- firing jig a ceramic capacitor containing barium titanate (BaTiO 3 ) as a main component and a firing jig for firing an electronic component material such as a raw material of the ceramic capacitor are disclosed.
- an active material of a lithium battery containing lithium cobalt oxide (LiCoO 2 ) as a main component, and a firing jig for firing an active material such as a raw material of the active material are also disclosed.
- Both firing jigs may have a common feature that they include a SiC-based or Si-SiC-based base material and a coating layer that covers the surface of the base material.
- the thickness of the base material may be 0.4 to 5 mm. Within this range, the heat capacity of the base material is controlled, and the electronic component material or the active material material of the lithium battery can be efficiently fired.
- the coating layer has a first layer provided on the surface of the base material and containing Al 2 O 3 —SiO 2 as a main component, and a second layer exposed on the surface layer of the coating layer. It may have the common feature of having layers.
- the second layer may contain at least one selected from Y 2 O 3 , HfO 2 , CeO 2 , NiO, WC, Ni, and Mo as a main component.
- the second layer may contain at least one selected from Y 2 O 3 , HfO 2 , CeO 2 , and NiO as a main component.
- the “electronic component material” includes not only a molded electronic component such as a ceramic capacitor but also a raw material (intermediate) for forming the molded body.
- the “active material” includes not only the active material of the lithium battery itself but also the raw material (intermediate) for forming the active material.
- the phrase “the first layer is mainly composed of Al 2 O 3 —SiO 2 substance” means that the Al 2 O 3 —SiO 2 substance occupies 50% by mass or more of the raw materials (compounds) constituting the first layer. Means that.
- the first layer may contain Al 2 O 3 -SiO 2 material and less than 50% by mass of Al 2 O 3 material.
- the first layer may contain Al 2 O 3 —SiO 2 substance in an amount of 70% by mass or more, 80% by mass or more, 90% by mass or more, and Al 2 O 3 —SiO 2 It may be composed of only quality (which may include unavoidable impurities).
- the "main component" of the second layer means a raw material (component) that accounts for 50% by mass or more of the raw material (compound) forming the second layer.
- the mass of Y 2 O 3 is 50% or more of the total mass of the second layer.
- the total mass of Y 2 O 3 and HfO 2 is 50% or more of the total mass of the second layer.
- the second layer alone or in combination, may contain 60% by mass or more, 70% by mass or more, 80% by mass or more, and 90% by mass or more. Alternatively, it may be substantially composed of only the above-mentioned raw materials (which may contain unavoidable impurities).
- the above-mentioned firing jig is different from the conventionally used material for the second layer (top coat layer).
- the material listed as the second layer for electronic component materials is the calculation of the thermodynamic equilibrium state of a multi-component system in a high temperature environment with respect to barium titanate (BaTiO 3 ) used in general electronic component materials (simulation). However, the material has a low reactivity. It should be noted that Al 2 O 3 , ZrO 2 and the like, which have been conventionally used as the top coat layer, are more likely to form reaction products in a high temperature environment in the calculation of the thermodynamic equilibrium state of a multi-component system than BaTiO 3. was gotten.
- the materials mentioned as the second layer for the electronic component material are , good to oxide (Y 2 O 3, HfO 2 , CeO 2, NiO) actually conducted experiments to create samples for common lithium cobalt acid used in the active material material (LiCoO 2) This is the material from which the results were obtained.
- the material mentioned as the second layer has a low reactivity with respect to BaTiO 3 and LiCoO 2 as compared with the material conventionally used as the top coat layer.
- the conventional baking jig if Al 2 O 3 , ZrO 2 or the like is used as the top coat layer, it is premised that the reaction between the object to be baked and the baking jig can be suppressed. We were working to improve durability. However, even if the durability of the coating layer is improved, if the object to be fired reacts with the coating layer (top coat layer), the production yield of the object to be fired is not improved.
- the above-described firing jig is realized by a technical idea completely different from the conventional one, in that the top coat layer itself has low reactivity with respect to the article to be fired (electronic component material).
- the second layer may contain at least one selected from Y 2 O 3 , HfO 2 , CeO 2 , and NiO as a main component. Since these materials are oxides, they are chemically stable and easy to handle. Further, as described above, it was confirmed in the experiment that these materials gave good results (low reactivity) to LiCoO 2 .
- the firing jig for electronic component materials can be used as it is as a firing jig for electronic components.
- the base material, the first base material, the thermal expansion coefficient of the first layer are equal to or higher than the thermal expansion coefficient of the base material
- the thermal expansion coefficient of the second layer is equal to or higher than the thermal expansion coefficient of the first layer.
- the material of the layer and the second layer may be selected.
- the thermal expansion coefficient of the base material (SiC material, Si-SiC material) used in the firing jig is about 4 (ppm/k).
- the materials listed as the second layer each have a coefficient of thermal expansion of 4 (ppm/k) or more.
- the coefficient of thermal expansion of the first layer By setting the coefficient of thermal expansion of the first layer to be equal to or higher than the coefficient of thermal expansion of the base material and the coefficient of thermal expansion of the second layer to be equal to or higher than the coefficient of thermal expansion of the first layer, the coefficient of thermal expansion of the base material and the second layer due to heating. The difference can be relaxed and the coating layer can be prevented from peeling from the substrate.
- a third layer containing Al 2 O 3 as a main component may be provided between the first layer and the second layer.
- the third layer is mainly composed of Al 2 O 3 quality
- the third layer contains an Al 2 O 3 quality more than 50 wt%.
- the third layer may contain 60% by mass or more of Al 2 O 3 substance, 70% by mass or more, 80% by mass or more, 90% by mass or more, and substantially. Alternatively, it may be composed only of Al 2 O 3 .
- a graded layer whose composition gradually changes is provided between the first layer and the second layer. It may be provided.
- the third layer is provided between the first layer and the second layer, the gradient layer is provided between the first layer and the third layer and/or between the third layer and the second layer. You can stay. Further, a plurality of layers may be provided between the first layer and the second layer.
- the flat grains may be particles in which the particles forming the second layer are melted and solidified when firing (sintering) the second layer.
- the flat grains may be laminated in the direction in which the substrate, the first layer and the second layer are laminated. That is, the flat grains may be laminated in the thickness direction of the coating layer. There is no particular limitation as long as the number of laminated flat grains is two or more. Due to the presence of the flat grains in the second layer, the difference in thermal expansion between the base material and the second layer is relaxed, and peeling of the second layer can be suppressed.
- the thermal expansion coefficient of the material forming the second layer may be equal to or higher than the thermal expansion coefficient of the base material (SiC material, Si-SiC material).
- the base material when the firing jig is heated, the base material may apply a compressive force to the second layer, or the second layer may apply a tensile force to the base material. If the flat grains are laminated in the second layer, the force applied to the second layer (added by the second layer) during heating is relaxed, and the peeling of the coating layer due to the difference in thermal expansion coefficient is further suppressed.
- the flatness of flat grains ((length in short side/length in long side) x 100) may be 95% or less. Further, if the flatness ratio of the flat grains is 95% or less, the strength of the flat grains themselves is secured, and as a result, the strength of the second layer is secured.
- the flat grains may have a flat shape or a curved shape. In particular, when the flat grains have a curved shape, it is easy to obtain the effect of alleviating the difference in thermal expansion between the base material and the second layer.
- the flat grains may be present on the entire surface of the second layer or may be present partially. Even if the flat grains are partially present in the second layer, the effect of alleviating the difference in thermal expansion can be obtained.
- the flatness of the flat particles can be calculated by the above formula by measuring the length (longitudinal direction) and horizontal (short direction) of the particles from a SEM image (eg, 1000 times) of the cross section of the coating layer. it can.
- the thickness of the coating layer may be 20 to 600 ⁇ m. Further, the thickness of the first layer may be larger than the thickness of the second layer. Specifically, the thickness of the first layer may be 50 to 500 ⁇ m, and the thickness of the second layer may be 5 to 500 ⁇ m.
- the thickness of the first layer is 50 ⁇ m or more, the reaction with the material to be fired can be suppressed, the strength of the coating layer can be maintained, and peeling of the coating layer can be further suppressed.
- the thickness of the first layer is 500 ⁇ m or less, the reaction with the material to be fired can be suppressed, the strength of the coating layer can be more stable, and the peeling of the coating layer can be further suppressed.
- the second layer is surely formed on the entire surface of the substrate, and it is possible to sufficiently suppress the object to be fired from reacting with the firing jig.
- the thickness of the second layer is 500 ⁇ m or less, delamination of the second layer itself is suppressed, and as a result, delamination of the second layer from the base material (first layer) can be suppressed.
- the thickness of the second layer may be 10 ⁇ m or more, and may be 50 ⁇ m or more.
- the thickness of the second layer may be 200 ⁇ m or less, 150 ⁇ m or less, and 100 ⁇ m or less.
- the second layer is a layer exposed on the surface of the coating layer, and can also be referred to as a top coat layer.
- the porosity (porosity) of the coating layers may be 10 to 60% by volume.
- the porosity is 10% by volume or more, the reaction with the material to be fired can be suppressed, the strength of the coating layer can be more stable, and the peeling of the coating layer can be further suppressed.
- the porosity is 60% by volume or less, the reaction with the material to be fired can be suppressed, the strength of the coating layer can be maintained, and peeling of the coating layer can be further suppressed.
- the thermal conductivity of the coating layer may be 2 to 250 W/(m ⁇ k).
- the thermal conductivity of the coating layer is 2 to 250 W/(m ⁇ k)
- the in-plane temperature of the object to be fired can be made uniform when the object to be fired is fired. More preferably, the thermal conductivity of the coating layer is 3 to 30 W/(m ⁇ k).
- the SEM image of the cross section of the coating layer (for example, 1000 times) is trimmed to create an image of each layer (first layer, second layer, etc.), and image processing software (ImageNos version 1.04: Free software) to distinguish the voids and other parts by binarization, and calculate the area ratio of the voids to the whole.
- the second layer is mainly composed of at least one selected from Y 2 O 3 , HfO 2 , CeO 2 , NiO, WC, Ni and Mo. Good as an ingredient.
- Y 2 O 3 , HfO 2 , CeO 2 , NiO, WC, Ni, and Mo are thermodynamics for BaTiO 3 by thermodynamic equilibrium calculation software (FactSage: GTT-Technologies, Thermfact Ltd.). In the calculation of the static equilibrium state, it was confirmed that it did not react with BaTiO 3 (no reaction product was formed).
- SiC is an example of a substrate material
- Al 2 O 3 ⁇ SiO 2 which is an example of the material of the first layer also shows the calculation results of the thermodynamic equilibrium for BaTiO 3. It was confirmed that SiC, Al 2 O 3 .SiO 2 reacts with BaTiO 3 to form a reaction product. Note that FIG. 1 also shows the thermal expansion coefficients of the above-mentioned materials for the second layer, SiC, and Al 2 O 3 .SiO 2 .
- the coefficient of thermal expansion of each layer does not decrease as it goes from the substrate to the surface of the coating layer, that is, the coefficient of thermal expansion of the first layer is equal to or higher than the coefficient of thermal expansion of the substrate and the coefficient of thermal expansion of the second layer is By selecting the materials of the base material, the first layer, and the second layer so that the coefficient of thermal expansion of one layer or more is obtained, peeling of the coating layer can be further suppressed.
- the electronic component material is The reaction with the second layer
- the electronic component material is The reaction with the second layer
- samples in which the second layer (top coat layer) was formed using Y 2 O 3 , HfO 2 , CeO 2 , and NiO were prepared, and the characteristics of each sample with respect to BaTiO 3 and LiCoO 2 were evaluated. (Samples 1 to 20). Further, for comparison, samples in which the second layer was formed using ZrO 2 were also prepared (Samples 21 to 24), and the characteristics were also evaluated. The evaluation result is shown in FIG.
- a method for preparing a sample will be described.
- a SiC sintered body plate was used as a substrate, and in other samples, a Si-SiC plate was used as a substrate.
- the thickness of the first layer was 50 ⁇ m for Samples 2, 3, 10, 21, 22 and 100 ⁇ m for the other samples.
- each sample was fired at 1350° C. for 2 hours in the air atmosphere.
- the second layer was formed on the surface of the first layer with the material and the thickness shown in FIG. 2 by using the thermal spraying method.
- a reaction test and a peeling test were performed on the obtained samples 1 to 24. Separate samples were used for the reaction test and the peeling test. Further, the coating layer of Sample 5 was observed with a SEM (scanning electron microscope: JSM-5600 manufactured by JEOL Ltd.) at 300 times.
- FIG. 3 shows a SEM photograph.
- the second layer was composed of a plurality of flat grains, and each flat grain was laminated in the thickness direction. It was also confirmed that each flat grain had an irregularly curved shape instead of a flat plate shape, and a gap was provided between the flat grains. It is presumed that the gap relaxes the thermal expansion of the second layer (flat grains forming the second layer).
- reaction test A reaction test was conducted on each sample.
- 10 g of the material to be fired (BaTiO 3 , LiCoO 2 ) was placed on the center part of the surface of the sample, and the sample on which BaTiO 3 was placed was fired at 1200° C. for 1 hour in the air atmosphere and then allowed to reach room temperature. Thirty-five cycles were conducted in which the cooling treatment was one cycle. Further, for the sample on which LiCoO 2 was placed, 35 cycles of a test in which one cycle was a treatment of firing at 1000° C. for 1 hour in the air atmosphere and then cooling to room temperature were performed. At the start of each cycle, the materials to be fired (BaTiO 3 , LiCoO 2 ) were replaced with new ones. Therefore, in the reaction test, a total of 350 g of the article to be fired was fired.
- the permeation of the constituent elements (Ba, Ti, Li, Co) of the material to be fired into the sample and the adhesion of the coating layer were evaluated.
- the constituent elements (Ba, Ti, Li, Co) of the material to be fired into the sample and the adhesion of the coating layer were evaluated.
- Ba, Ti, Li, and Co elements were mapped using an EDS (energy dispersive X-ray spectrometer) attached to the SEM, and constituent elements of the object to be burned penetrated from the surface layer of the coating layer. The depth to be measured was measured and evaluated. The deeper the penetration depth from the surface layer, the more the object to be fired reacts with the sample (corresponding to the firing jig).
- a sample having a penetration depth of the above constituent elements of 10 ⁇ m or less from the surface layer is “A”
- a sample having a penetration depth of more than 10 ⁇ m and 20 ⁇ m or less from the surface layer is “B”
- a sample having a penetration depth of more than 20 ⁇ m and 30 ⁇ m or less from the surface layer is “ C”
- a sample having a penetration depth of more than 30 ⁇ m from the surface layer was designated as "D”.
- Adhesion was evaluated by visually observing the presence or absence of peeling of the coating layer when exchanging the material to be fired (after completion of one cycle). "A” is the sample in which peeling was not confirmed after 30 cycles, "B” in which peeling was confirmed in 21 to 30 cycles, and "C” in which peeling was confirmed in 11 to 20 cycles. The sample in which peeling was confirmed during 1 to 10 cycles was designated as “D”. The evaluation result is shown in FIG.
- peel test A peel test was performed on each sample. The peeling test was performed by preparing a sample different from the reaction test. In the peeling test, for each sample, 6 cycles of a test in which one cycle was a treatment of baking at 1350° C. for 2 hours in the air atmosphere and then cooling to room temperature were performed. After the completion of each cycle, 10 mm x 15 mm gum tape (Kikusui Tape Co., Ltd., cloth tape No, 212 50 mm 25M) was attached to the surface of each sample, and then the gum tape was peeled off to check whether the coating layer was peeled off. It was visually confirmed and evaluated. The gum tape was attached to the center of the sample.
- samples 1-20 As shown in FIG. 2, Y 2 O 3, HfO 2, CeO 2, NiO, WC, Ni, samples (samples 1-20) forming the second layer with Mo, the second with ZrO 2 It was confirmed that the sample exhibited excellent characteristics as compared with the samples having layers (Samples 21 to 24) (for example, Samples 5, 12, 18, 19, 20, 23 were compared). It was also confirmed that the same effects were obtained in both the Si-SiC plate and the SiC sintered body plate (Samples 2, 3, Samples 5, 6, 12, 13 and 21, 22 and 23). , 24).
- samples (Samples 1 to 15) in which the second layer was formed using Y 2 O 3 and HfO 2 as a result of changing the thickness of the second layer from 10 ⁇ m to 200 ⁇ m, good results were obtained. It was confirmed. Particularly, the samples (Samples 2 to 7 and Samples 10 to 14) having the thickness of 50 to 150 ⁇ m showed good results.
- the sample (Sample 16-21) in which the second layer was formed using CeO 2 , NiO, WC, Ni, Mo was a sample in which the second layer was formed using Y 2 O 3 and HfO 2 (Sample 5). , 12), it has been confirmed that it exhibits excellent characteristics.
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Abstract
Description
本明細書では、例えば、チタン酸バリウム(BaTiO3)を主成分とするセラミックスコンデンサ、及び、そのセラミックスコンデンサの原料といった電子部品材を焼成するための焼成治具を開示する。また、本明細書では、例えば、コバルト酸リチウム(LiCoO2)を主成分とするリチウム電池の活物質、及び、その活物質の原料といった活物質材を焼成するための焼成治具も開示する。双方の焼成治具は、SiC質又はSi-SiC質の基材と、基材の表面を被覆しているコーティング層を備えているという共通した特徴を有していてよい。基材の厚みとしては、0.4~5mmであってもよい。この範囲であると、基材の熱容量が制御され、効率よく電子部品材またはリチウム電池の活物質材を焼成することができる。また、双方の焼成治具において、コーティング層は、基材表面に設けられているAl2O3-SiO2質を主成分とする第1層と、コーティング層の表層に露出している第2層を備えているという共通した特徴を有していてよい。電子部品材においては、第2層は、Y2O3,HfO2,CeO2,NiO,WC,Ni,Moから選択される少なくとも1種を主成分としてよい。また、活物質材においては、第2層は、Y2O3,HfO2,CeO2,NiOから選択される少なくとも1種を主成分としてよい。
上記したように、電子部品材を焼成するための焼成治具において、第2層は、Y2O3,HfO2,CeO2,NiO,WC,Ni,Moから選択される少なくとも1種を主成分としてよい。図1に示すように、Y2O3,HfO2,CeO2,NiO,WC,Ni,Moは、熱力学平衡計算ソフト(FactSage:GTT-Technologies,Thermfact Ltd.製)によるBaTiO3に対する熱力学的平衡状態の計算において、BaTiO3と反応しない(反応生成物が形成されない)ことが確認された。それに対し、従来第2層(トップコート層)として有用であると認識されているZrO2,Al2O3,TiO2は、BaTiO3と反応し、反応生成物(Ba化合物)が生成されることが確認された。なお、図1に示すように、HfO2はBaTiO3と反応しないが、HfはBaTiO3と反応して反応生成物(BaHfO3)が生成されることが確認された。すなわち、単にY,Hf,Ce,Niといった元素を含む化合物(あるいは単体)がBaTiO3と反応しないのではなく、上記した酸化物の形態(HfO2,Y2O3,CeO2,NiO)であるからこそBaTiO3と反応しないことが確認された。
図3に示すように、第2層は複数の偏平粒で構成されており、各偏平粒は厚み方向に積層している確認された。各偏平粒は、平板状ではなく、不規則に湾曲した形状であり、偏平粒間に隙間が設けられていることも確認された。この隙間が、第2層(第2層を構成する偏平粒)の熱膨張を緩和するものと推察される。
各試料について反応試験を行った。反応試験は、試料の表面の中央部分に被焼成物(BaTiO3,LiCoO2)10gを載置し、BaTiO3を載置した試料については、大気雰囲気で1200℃,1時間焼成した後に室温まで冷却する処理を1サイクルとする試験を、35サイクル行った。また、LiCoO2を載置した試料については、大気雰囲気で1000℃,1時間焼成した後に室温まで冷却する処理を1サイクルとする試験を、35サイクル行った。なお、各サイクルを開始するにあたり、被焼成物(BaTiO3,LiCoO2)は、新しいものと交換した。そのため、反応試験においては、合計350gの被焼成物を焼成した。
各試料について剥離試験を行った。剥離試験は、反応試験とは別の試料を作成して行った。剥離試験は、各試料について、大気雰囲気で1350℃,2時間焼成した後に室温まで冷却する処理を1サイクルとする試験を、6サイクル行った。各サイクル終了後、各試料の表面に10mm×15mmのガムテープ(菊水テープ(株)製、布テープ No,212 50ミリ 25M)を貼り付けた後、そのガムテープを剥がし、コーティング層の剥離の有無を目視で確認して評価した。なお、ガムテープは、試料の中央部分に貼り付けた。また、ガムテープを試料(コーティング層)に密着させるため、ガムテープを試料に貼り付けた後、ガムテープ上に2kgの重りを10秒間載せた。6サイクル終了後に剥離が確認されなかった試料を「A」、4または5サイクル終了後に剥離が確認された試料を「B」、2または3サイクル終了後に剥離が確認された試料を「C」、1サイクル終了後に剥離が確認された試料を「D」とした。評価結果を図2に示す。
上記反応試験及び剥離試験の結果、評価「A」が3個以上の試料を判定「A」、評価「A」が1又は2個で評価「C」及び評価「D」がない試料を判定「B」、評価「A」が1個もない試料を判定「C」とした。判定「A」及び「B」の試料(焼成治具)は、電子部品材及びリチウム電池で用いられる活物質材との反応性が低く、焼成治具として有用であることを示している。特に、判定「A」の試料(焼成治具)は、電子部品材及びリチウム電池で用いられる活物質材用の焼成治具として優れた特性を有しているといえる。
Claims (6)
- 電子部品材の焼成に用いられる焼成治具であり、
SiC質又はSi-SiC質の基材と、基材の表面を被覆しているコーティング層を備えており、
コーティング層は、
基材表面に設けられているAl2O3-SiO2質を主成分とする第1層と、
コーティング層の表層に露出しており、Y2O3,HfO2,CeO2,NiO,WC,Ni,Moから選択される少なくとも1種を主成分とする第2層と、
を備える焼成治具。 - リチウム電池の活物質材の焼成に用いられる焼成治具であり、
SiC質又はSi-SiC質の基材と、基材の表面を被覆しているコーティング層を備えており、
コーティング層は、
基材表面に設けられているAl2O3-SiO2質を主成分とする第1層と、
コーティング層の表層に露出しており、Y2O3,HfO2,CeO2,NiOから選択される少なくとも1種を主成分とする第2層と、
を備える焼成治具。 - 第2層が、Y2O3,HfO2,CeO2,NiOから選択される少なくとも1種を主成分とする請求項1に記載の焼成治具。
- 第1層の熱膨張係数が基材の熱膨張係数以上であり、第2層の熱膨張係数が第1層の熱膨張係数以上となるように、基材、第1層及び第2層の材料が選択されている請求項1から3のいずれか一項に記載の焼成治具。
- 第1層と第2層の間に、Al2O3質を主成分とする第3層が設けられている請求項1から4のいずれか一項に記載の焼成治具。
- 第2層内に、第2層を構成する粒子が溶融凝固した偏平粒が複数存在し、
偏平粒が、基材と第1層と第2層が積層している方向に積層している請求項1から5のいずれか一項に記載の焼成治具。
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