WO2020066727A1 - ダイヤフラムバルブ - Google Patents
ダイヤフラムバルブ Download PDFInfo
- Publication number
- WO2020066727A1 WO2020066727A1 PCT/JP2019/036267 JP2019036267W WO2020066727A1 WO 2020066727 A1 WO2020066727 A1 WO 2020066727A1 JP 2019036267 W JP2019036267 W JP 2019036267W WO 2020066727 A1 WO2020066727 A1 WO 2020066727A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- diaphragm
- stem
- bonnet
- cylindrical body
- valve
- Prior art date
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
- F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
Definitions
- the present invention relates to a diaphragm valve and a method for adjusting a Cv value of the diaphragm valve.
- Valves such as ball valves are used in many product fields such as manufacturing equipment, plant equipment, and inspection equipment as equipment for controlling the flow of fluid.
- the valve has a valve body having a communication part communicating the inlet flow path and the outlet flow path, and a valve element disposed in the communication part.
- the valve body In the case of a manual valve, the valve body is driven by a handle provided at the top, in the case of an automatic valve, a motor or the like is driven, and a connecting member called a stem is interposed between the handle or the motor and the valve body.
- the diaphragm valve 50 is called a direct-touch type metal diaphragm valve, and is provided with a fluid inflow passage 52a and a fluid outflow passage 52b.
- a compression coil spring (biasing member) 61 a mechanism for introducing the operating air for driving the piston 59, 60 of upper and lower are provided.
- each of the pistons 59 and 60 In order to move the stem 58 upward, the operating air is applied to each of the pistons 59 and 60.
- an upper operation air introduction chamber 79 and a lower operation air introduction chamber 80 are formed below the respective pistons 59 and 60.
- the upper and lower pistons 59, 60 are formed with axial passages 59a and radial passages 59b, 60b for sending the introduced operation air to the respective operation air introduction chambers 79, 80.
- the pistons 59 and 60 receive an upward force.
- a counter plate 76 is interposed between the pistons 59 and 60.
- the diaphragm holder 57 moves to the uppermost position, and is in the maximum open state when the diaphragm 56 is not pressed.
- the amount of fluid flowing at this time is related to a capacity coefficient of the valve called a Cv value.
- the Cv value is a flow rate numerical value representing US gallon / min as a flow rate when flowing 60 ° F. fresh water flowing through a valve when a pressure difference is 1 Psi in a specific operation range. Since this Cv value is proportional to the opening area through which the fluid flows when the valve is fully opened, it is necessary to use an appropriate combination of components in order to minimize the variation of the Cv value in the same product.
- components that affect the opening area through which fluid flows when the valve is fully opened include a valve body 52, an annular valve seat 55, a diaphragm 56, a holding adapter 65, a diaphragm holding 57, and the like.
- a diaphragm valve having a small variation in the Cv value in consideration of the variation in the dimensions of these members is a very labor- and time-consuming operation.
- An object of the present invention is to provide a diaphragm valve capable of adjusting a Cv value at the time of assembling the diaphragm valve, and a method of adjusting the Cv value.
- the present invention (1) provides a valve body provided with a fluid flow path, a diaphragm for opening and closing the fluid flow path, an actuator for pressing the diaphragm, and a casing between the valve body and the casing of the actuator.
- a diaphragm valve comprising: an interposed bonnet; a stem moved by the actuator; and a diaphragm holder having an outer edge having a diameter larger than an outer diameter of the stem disposed between the stem and the diaphragm.
- the bonnet has a through-hole in which a female screw coaxial with the stem is engraved, and the through-hole has a cylindrical body in which a male screw that is screwed to the female screw is engraved on an outer surface.
- the stem is inserted into the tubular body, and the end face of the tubular body on the diaphragm side is fitted with the diaphragm of the through hole. Projecting toward the diaphragm side from the opening side on the diaphragm side, the end surface on the stem side of the outer periphery of the diaphragm press contacts the diaphragm side end surface of the cylindrical body, and the position of the contact surface in the stem axial direction is determined. And a diaphragm valve that can be adjusted by screwing the male screw and the female screw.
- a cylindrical body is provided as a Cv value adjusting member that is not provided in a conventional diaphragm valve.
- a male screw to be screwed with a female screw formed in the hood is formed on the outer peripheral surface.
- the stem is inserted into the tubular body, and a diaphragm retainer is arranged between the stem and the diaphragm.
- the diaphragm end face of the cylindrical body is brought into contact with the end face on the stem side of the outer periphery of the diaphragm retainer, and the position of the contact face can be adjusted by adjusting the degree of screwing of the male screw and the female screw. By assembling, the Cv value can be precisely adjusted.
- the bonnet is provided with a concave portion at an upper portion, and the cylindrical body has a cylindrical flange at an upper portion having a diameter larger than that of the male screw and smaller than an inner diameter of the concave portion.
- the valve according to the present invention (1) wherein a portion is provided, and the cylindrical body flange portion is fixed to a bottom surface of the recess by screw means.
- the Cv value is determined by the degree of screwing of the male screw and the female screw, the Cv value changes when the cylindrical body is rotated with respect to the bonnet. To prevent such a thing from occurring, the Cv value after assembly is prevented from being changed by fixing the cylindrical body flange portion provided on the cylindrical body to the bottom surface of the recess by a screw means. Can be.
- the present invention (3) is characterized in that the diaphragm-side end face of the actuator presses the actuator-side end face of the cylindrical body, and the actuator is fixed to the bonnet or the valve body. This is the diaphragm valve of 1).
- the present invention (3) is for preventing a change in the Cv value after assembling the diaphragm valve, similarly to the present invention (2).
- the diaphragm-side end surface of the actuator presses the actuator-side end surface of the tubular body, and the actuator is fixed to the bonnet or the valve body so that the Cv value does not change after assembly. can do.
- a diaphragm for opening and closing a fluid flow path is placed on a valve body provided with a fluid flow path, and a holding adapter for pressing and holding an outer peripheral portion of the diaphragm toward the valve body is mounted on the diaphragm.
- the stem having the diaphragm retainer at the lower end is placed on the diaphragm without pressing the diaphragm, the stem is inserted through the inside of the tubular body, and the tubular body is bonnet. It is housed inside by screwing or the like.
- a fluid is caused to flow in a fully open state in which no pressing force is applied to the diaphragm, and the Cv value is measured. It is preferable that the Cv value at the first measurement be slightly larger than the target Cv value. After the diaphragm-side end surface of the cylindrical body is brought into contact with the stem-side end surface of the presser adapter, the measurement result of the Cv value is checked, and the female screw cut on the inner peripheral surface of the bonnet and the cylindrical cylindrical body are formed.
- the diaphragm valve of the present invention it is possible to manufacture a diaphragm valve having a small Cv value variation without approaching the target Cv value without selecting the members at the time of assembly. Further, even when a problem occurs in the actuator, it is not necessary to remove the bonnet from the valve body, so that the fluid in the flow passage is not exposed to the outside air.
- FIG. 1 shows a fully opened state of a diaphragm valve according to Embodiment 1 of the present invention.
- 2 shows a fully closed state of the diaphragm valve according to the first embodiment.
- 7 shows a state before the tubular body is set during the assembly of the diaphragm valve of the first embodiment. 7 shows a state after the tubular body has been set during the assembly of the diaphragm valve of the first embodiment.
- FIG. 2 is a perspective view of a tubular body used for the diaphragm valve of the first embodiment.
- FIG. 3 shows a cross-sectional view of an adjustment jig for turning a cylindrical body. 7 shows a fully opened state of a diaphragm valve according to Embodiment 2 of the present invention.
- FIG. 9 shows a fully closed state of the diaphragm valve of the second embodiment.
- 9 shows a state before the stem is inserted into the tubular body during the assembly of the diaphragm valve of the second embodiment.
- FIG. 14 shows a state after the holding adapter is fixed to the valve body and the stem is inserted into the tubular body during the assembly of the diaphragm valve of the second embodiment.
- 7 shows a state before the actuator is connected to the bonnet when the Cv value of the diaphragm valve of the second embodiment is adjusted.
- 1 shows a cross-sectional view of a conventional diaphragm valve described in Patent Document 1.
- FIG. 1 shows a cross-sectional view of a conventional diaphragm valve described in Patent Document 1.
- FIG. 1 shows a fully opened state of a diaphragm valve according to a first embodiment of the present invention.
- the whole is composed of three components: a valve body 2, an actuator 4, and a bonnet 3 between them.
- the diaphragm valve 1 is provided on a valve body 2 having a fluid inflow passage 2a and a fluid outflow passage 2b, an actuator 4 mounted above the valve body 2 via a bonnet 3, and a peripheral edge of the fluid inflow passage 2a.
- the pressure is lowered by the pressing force of the compression coil spring 11, and is increased by supplying a working fluid (hereinafter simply referred to as "operation air") to the actuator 4 to move the diaphragm 2f in the closing or opening direction.
- operation air a working fluid
- a stem 8 upper and lower pistons 9, 10, and a drive for driving the upper and lower pistons 9, 10.
- a means 13 In the fluid inflow passage 2a and the fluid outflow passage 2b, the inflow and outflow may be reversed.
- the diaphragm 2f has an upwardly convex arc shape as a natural spherical shell shape.
- the diaphragm 2f is made of, for example, a nickel alloy thin plate, cut out in a circular shape, and is formed in a spherical shell shape having a central portion bulging upward.
- the diaphragm 2f may be made of a stainless steel sheet or a laminate of a stainless steel sheet and a nickel-cobalt alloy sheet.
- a presser adapter 15 is disposed between the lower end surface of the bonnet 3 and the bottom surface of the valve body recess 2c of the valve body 2.
- the outer peripheral edge of the diaphragm 2f is formed by the presser adapter 15 and the valve body recess of the valve body 2.
- the bonnet 3 is held between the bottom surface of the bonnet 3c and fixed by screwing.
- the upper piston 9 includes a disc-shaped piston main body 21 and a protruding shaft portion 22 extending upward from the upper surface of the central part of the piston main body 21.
- the lower piston 10 includes a disc-shaped piston main body 23, an upper protruding shaft portion 24 extending upward from a central upper surface of the piston main body 23, and a lower protruding shaft portion 25 extending downward from a central lower surface of the piston main body 23. Consists of
- the counter plate 26 is fixed so as to be located between the upper piston 9 and the lower piston 10, thereby forming a moving space for the pistons 9 and 10 above and below the counter plate 26, respectively. I have.
- the upper end of the upper protruding shaft portion 24 of the lower piston 10 is fitted into a recess provided on the lower surface of the piston body 21 of the upper piston 9.
- the compression coil spring 11 is provided so as to urge the upper piston 9 downward, whereby the upper and lower pistons 9 and 10 move up and down integrally.
- the actuator 4 is mainly housed in the casing 4a and is connected to the driving means 13 via a one-touch joint 31.
- the driving means 13 sends operation air to each of the pistons 9 to move the stem 8 upward.
- the upper operation air introduction chamber 29 and the lower operation air introduction chamber 30 for this purpose are formed below the pistons 9 and 10, respectively.
- the upper and lower pistons 9, 10 are formed with axial passages 9a, 10a and radial passages 9b, 10b for sending the operation air introduced through the one-touch joint 31 to the respective operation air introduction chambers 29, 30. ing.
- exhaust ports 4b and 4c for bleeding air from the operation air introduction chambers 29 and 30 are provided in the casing 4a.
- FIG. 1 shows a fully opened state.
- a connecting member 6 is provided at a lower portion of the actuator 4 as a part of the actuator 4, and a connecting member recess 6c surrounded by a connecting member standing wall 6d is formed at an upper portion. It is housed in the member recess 6c.
- a connecting member through hole 6a is formed in the center of the connecting member 6, and a lower protruding shaft portion 25 is inserted into the connecting member through hole 6a from above and a stem 8 is inserted from below into the lower member of the lower protruding shaft portion 25. The upper end of the stem 8 can be brought into contact with and separated from the connecting member through hole 6a.
- the actuator 4 and the connecting member 6 are screwed together by forming a thread on the outer peripheral surface of the connecting member standing wall 6d and the inner peripheral surface of the lower portion of the actuator 4, and fixed from the side by a fastening member such as a bolt, and welding. Fix with such fixing means.
- the actuator 4 presses the diaphragm 2f in a state where the operation air is not introduced, and the so-called normally closed type configuration in which the flow path is closed has been described.
- the compression coil spring 11 is disposed on the diaphragm 2f side, and the operation air is disposed.
- a so-called normally open type actuator configured to press the piston 23 toward the anti-diaphragm side and not to press the diaphragm 2f may be used.
- a connecting member male screw 6b is engraved on the lower outer peripheral surface of the connecting member 6, and the connecting member male screw 6b is screwed with a bonnet upper female screw 3b carved on the side surface of the bonnet upper recess 3a at the upper part of the bonnet 3.
- the bonnet 3 is connected to the valve body 2 by screwing the bonnet male screw 3c engraved on the outer peripheral surface of the bonnet 3 and the valve body female screw 2d.
- the lower end of the stem 8 is provided with a diaphragm retainer 7 having a diameter larger than the outer diameter of the stem 8, and the lower end of the diaphragm retainer 7 is provided with a contact portion 7 b.
- the amount of upward movement of the stem 8 has a correlation with the Cv value, and therefore, the amount of upward movement of the stem 8 needs to be adjusted to obtain a required Cv value.
- a bonnet through hole 3e is formed in the center of the bonnet 3, and the cylindrical body 5 is inserted into the through hole 3e.
- This cylindrical body 5 is a Cv value adjusting member that is the most important component of the present invention.
- a cylindrical male screw 5a is engraved on the outer periphery of the lower part of the cylindrical body 5, and the cylindrical male screw 5a is screwed with the bonnet lower female screw 3d.
- the cylindrical body 5 is provided with a cylindrical body through hole 5b, and the stem 8 is inserted into the cylindrical body through hole 5b.
- a diaphragm holder 7 is attached to a lower end of the stem 8.
- the diaphragm holder 7 may be integral with the stem 8.
- the diaphragm retainer 7 is partially accommodated in the bonnet lower recess 3f.
- the outer edge portion 7a of the diaphragm retainer 7 is in contact with the lower end surface of the tubular body 5 at the outer edge upper surface 7c. Therefore, the Cv value can be adjusted by the vertical position of the contact surface.
- a cylindrical body flange 5c is formed on the upper part of the cylindrical body 5, and the cylindrical body flange 5c is fixed to the bottom surface of the upper hood recess 3a by a screw means. (See Figs. 3 and 5)
- FIG. 2 shows a state in which the diaphragm valve of the first embodiment shown in FIG. 1 is changed from a fully closed state to a fully closed state. 2 and thereafter, the same description as in FIG. 1 is omitted.
- the air in the operation air introduction chambers 29 and 30 is released, the pistons 9 and 10 are pushed downward by the urging force of the compression coil spring 11, and the stem 8 is also pushed downward, so that the diaphragm 2f is deformed as shown in FIG. It is brought into contact with the annular valve seat 2e and is in a fully closed state.
- FIG. 3 shows a state before the cylindrical body 5 is set during the assembly of the diaphragm valve 1 of the first embodiment.
- a female screw 5d is engraved on the cylindrical body flange portion 5c, and a set screw 5e screwed with the female screw 5d is shown.
- the fluid flows from the fluid inflow passage 2a to the fluid outflow passage 2b to measure the Cv value.
- the desired Cv value is 3.0, for example, adjust the dimensions of the parts so that the value is slightly larger than that value, for example, about 3.2. ing.
- the cylindrical body 5 is set, and the screw is adjusted so that the outer edge upper surface 7c, which is the upper edge of the outer edge 7a of the diaphragm retainer 7, is moved downward at the lower end of the cylindrical body 5,
- the Cv value is measured by flowing a fluid.
- the adjustment is completed by setting the value to the target value of 3.0. Assuming that the value is 3.1, the Cv value is measured by adjusting again.
- the set screw 5e may be screwed into the female screw 5d to fix the tubular body flange portion 5c to the bottom surface of the bonnet upper recess 3a so that the tubular body 5 does not rotate after assembly. it can.
- a force is applied to the cylindrical body 5 on the side opposite to the diaphragm, so that the Cv value is slightly lowered. Therefore, in the above-described adjustment, it is preferable that the adjustment be made in consideration of the change in the Cv value due to the fixing of the set screw 5e.
- the female screw 5d formed on the cylindrical body flange portion 5c shows an example in which four female threads are provided at equal intervals in the illustrated example, but two female threads may be provided.
- FIG. 5 is a perspective view of the cylindrical body 5 used in the diaphragm valve of the first embodiment.
- FIG. 6 is a cross-sectional view of an adjusting jig 40 for adjusting the Cv value by turning the tubular body 5.
- the adjusting jig 40 has an adjusting jig recess 40a into which the upper portion of the stem 8 is inserted, and four projections 40b are formed on the lower end surface.
- the protrusion 40b is inserted into the female screw 5d, and can be hooked to rotate the tubular body 5.
- FIG. 7 shows a diaphragm valve according to a second embodiment of the present invention in a fully opened state.
- the difference from the first embodiment in FIG. 1 lies in the shape of the tubular body 5 and the method of fixing the tubular body 5.
- the tubular body 5 does not have the tubular body flange portion 5c of the first embodiment.
- the upper surface of the tubular body 5 is pressed against the lower end surface of the connecting member 6 to prevent rotation.
- the actuator 4 is fixed by the lower end surface of the connecting member 6 integrated with the actuator 4 abutting on the cylindrical body 5.
- the lower end surface of the connecting member 6 is The actuator 4 abuts and is fixed to the upper end surface of the bonnet 3 without abutting on the body 5.
- the connecting member 6 is formed by engraving such that the threads of the cylindrical male screw 5a and the bonnet lower female screw 3d and the connecting member male screw 6b and the bonnet upper female screw 3b of the connecting member 6 are reverse threads.
- the tubular body 5 is prevented from rotating with the lower end face.
- FIG. 8 shows a fully closed state of the diaphragm valve according to the second embodiment, and the operation of changing from fully open to fully closed is the same as that described in FIG.
- FIG. 9 shows a state before the stem 8 is inserted into the tubular body 5 during the assembly of the diaphragm valve 1 according to the second embodiment. In this state, the fluid cannot flow because it leaks when the fluid flows.
- FIG. 10 shows a state after the holding adapter 15 is fixed to the valve body 2 and the stem 8 is inserted into the tubular body 5 during the assembly of the diaphragm valve 1 of the second embodiment.
- the fluid does not leak, so that the fluid can flow.
- the Cv value is measured by flowing the fluid from the fluid inflow passage 2a to the fluid outflow passage 2b.
- the parts are set to a value slightly larger than that value, for example, about 3.2. The dimensions are adjusted.
- the cylindrical body 5 is screw-adjusted so that the lower end surface of the cylindrical body 5 moves the outer edge upper surface 7c, which is the upper end surface of the outer edge portion 7a of the diaphragm holder 7, downward.
- Flow and measure the Cv value The adjustment is completed when the value is the target 3.0. Assuming that the value is 3.1, the Cv value is measured again by adjusting again.
- the cylindrical body 5 can be gradually rotated and moved to a desired Cv value while the fluid is flowing. In this way, it is possible to put the Cv value within the allowable range of the target value.
- the connecting member male screw 6b is screwed onto the bonnet upper female screw 3b, and the lower end surface of the connecting member 6 presses the upper end surface of the tubular body 5 so that the tubular body 5 is screwed so as not to move. . In this way, it is possible to prevent the cylindrical body 5 from rotating after the assembly of the diaphragm valve.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
Abstract
Description
図1は、この発明による実施例1のダイヤフラムバルブの全開状態を示している。全体的に、バルブボディ2とアクチュエータ4とその間のボンネット3の3つの構成部分からなっている。
図7は、この発明によるダイヤフラムバルブの実施例2の全開状態を示している。図1の実施例1と異なっている点は、筒状体5の形状と筒状体5の固定方法である。この実施例では、筒状体5には実施例1にある筒状体フランジ部5cがない。筒状体5の上面が連結部材6の下端面に押されて回転防止がなされている。本実施例ではアクチュエータ4は、アクチュエータ4と一体となっている連結部材6の下端面が筒状体5に当接することで固定されているが、実施例1では連結部材6の下端面は筒状体5に当接することなくアクチュエータ4がボンネット3の上端面に当接して固定される。また、本実施例では、筒状体雄ねじ5a及びボンネット下部雌ねじ3dと連結部材6の連結部材雄ねじ6b及びボンネット上部雌ねじ3bのねじ山が逆ねじとなるように刻設することで連結部材6の下端面に伴って筒状体5が回転することを防止する。
2 ;バルブボディ
2a;流体流入通路
2b;流体流出通路
2c;バルブボディ凹所
2d;バルブボディ雌ねじ
2e;環状弁座
2f;ダイヤフラム
3 ;ボンネット
3a;ボンネット上側凹所
3b;ボンネット上部雌ねじ
3c;ボンネット雄ねじ
3e;ボンネット貫通孔
3d;ボンネット下部雌ねじ
3f;ボンネット下側凹所
4 ;アクチュエータ
4a:ケーシング
4b;排気口
4c;排気口
5 ;筒状体
5a;筒状体雄ねじ
5b;筒状体貫通孔
5c;筒状体ブランジ部
6 ;連結部材
6a;連結部材貫通孔
6b;連結部材雄ねじ
6c;連結部材凹所
6d;連結部材立設壁
7 ;ダイヤフラム押え
7a;外縁部
7b;当接部
7c;外縁部上面
8 ;ステム
9 ;ピストン
9a;軸方向通路
9b;径方向通路
10;ピストン
10a;軸方向通路
10b;径方向通路
11;圧縮コイルばね
13;駆動手段
15;押えアダプタ
21;ピストン本体
22;突出軸部
23;ピストン本体
24;上側突出軸部
25;下側突出軸部
26;カウンタプレート
29;操作エア導入室
30;操作エア導入室
31; ワンタッチ継手
Claims (4)
- 流体流路が設けられたバルブボディと、
前記流体流路を開閉するダイヤフラムと、
前記ダイヤフラムを押圧するためのアクチュエータと、
前記バルブボディと前記アクチュエータのケーシングとの間に介在させられたボンネットと、
前記アクチュエータによって移動させられるステムと、
前記ステムと前記ダイヤフラムとの間に配されたステムの外径よりも大径の外縁部を備えたダイヤフラム押さえと、を有するダイヤフラムバルブであって、
前記ボンネットは、前記ステムと同軸の雌ねじが刻設された貫通孔を備えており、
前記貫通孔には、前記雌ネジに螺合する雄ねじが外面に刻設された筒状体が螺入され、当該筒状体には前記ステムが挿入されており、
前記筒状体のダイヤフラム側の端面は、前記貫通孔のダイヤフラム側の開口面よりダイヤフラム側に突出しており、
前記ダイヤフラム押さえ外縁部のステム側の端面と、前記筒状体のダイヤフラム側端面とが当接し、当該当接した面のステム軸方向の位置を、前記雄ねじと前記雌ねじとのねじ合わせによって調節することができるダイヤフラムバルブ。 - 前記ボンネットは、上部に凹所が設けられており、
前記筒状体には、上部に前記雄ねじよりも大径かつ前記凹所の内径よりも小径の筒状体フランジ部が設けられており、
前記凹所の底面に前記筒状体フランジ部が、ねじ手段によって固定されることを特徴とする請求項1に記載のダイヤフラムバルブ。 - 前記アクチュエータは、当該アクチュエータのダイヤフラム側の端面が前記筒状体のアクチュエータ側の端面を押圧して、前記ボンネットまたは前記バルブボディに固定されることを特徴とする請求項1に記載のダイヤフラムバルブ。
- 流体流路が設けられたバルブボディに流体流路を開閉するダイヤフラムを載置し、当該ダイヤフラムの外周縁部をバルブボディ側に押圧保持する押さえアダプタをダイヤフラム上に載置し、前記ダイヤフラムを開または閉方向に変形させるステムであって、当該ステムの外径よりも大径の外縁部を備えたダイヤフラム押さえを下端部に備えるステムをダイヤフラム上に載置するステップと、
筒形状のボンネットの内周面に刻設された雌ねじに、筒状体の外周面に刻設された雄ねじを螺合させて、前記ボンネット内部に前記筒状体を収容させるステップと、
前記筒状体に前記ステムを挿通させ、前記筒状体が収容されたボンネットを前記バルブボディに取り付けて、前記ボンネットのダイヤフラム側の端面で前記押えアダプタを押圧して前記ダイヤフラムを前記バルブボディに固定するステップと、
流体を前記流体通路に流してCv値を測定するステップと、
前記筒状体のダイヤフラム側端面を前記ダイヤフラム押さえ外縁部のステム側の端面に当接させるステップと、
前記雄ねじと前記雌ねじのねじ合わせを変化させた後に、流体を前記流体流路に流してCv値を測定することを繰り返して目標とするCv値とするステップと、
目標とするCv値に調整されたのちに、前記筒状体を前記ボンネットに固定するステップと、を有するダイヤフラムバルブのCv値を調整する方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17/043,025 US20210018103A1 (en) | 2018-09-26 | 2019-09-17 | Diaphragm valve |
JP2020548487A JPWO2020066727A1 (ja) | 2018-09-26 | 2019-09-17 | ダイヤフラムバルブ |
KR1020207027589A KR20200123226A (ko) | 2018-09-26 | 2019-09-17 | 다이어프램 밸브 |
CN201980023936.7A CN111936775A (zh) | 2018-09-26 | 2019-09-17 | 隔膜阀 |
SG11202009648TA SG11202009648TA (en) | 2018-09-26 | 2019-09-17 | Diaphragm valve |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018-179889 | 2018-09-26 | ||
JP2018179889 | 2018-09-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2020066727A1 true WO2020066727A1 (ja) | 2020-04-02 |
Family
ID=69952013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2019/036267 WO2020066727A1 (ja) | 2018-09-26 | 2019-09-17 | ダイヤフラムバルブ |
Country Status (7)
Country | Link |
---|---|
US (1) | US20210018103A1 (ja) |
JP (1) | JPWO2020066727A1 (ja) |
KR (1) | KR20200123226A (ja) |
CN (1) | CN111936775A (ja) |
SG (1) | SG11202009648TA (ja) |
TW (1) | TW202026554A (ja) |
WO (1) | WO2020066727A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111623141A (zh) * | 2020-06-11 | 2020-09-04 | 江苏阀邦半导体材料科技有限公司 | 一种应用在半导体阀门的金属对金属直接密合结构和处理工艺 |
WO2022153868A1 (en) * | 2021-01-14 | 2022-07-21 | Hitachi Metals, Ltd. | Bellows diaphragm assembly |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111757998B (zh) * | 2018-03-19 | 2022-05-27 | 日立金属株式会社 | 隔膜阀以及使用该隔膜阀的质量流量控制装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016121775A (ja) * | 2014-12-25 | 2016-07-07 | 株式会社フジキン | 流体制御器 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101706008A (zh) * | 2009-11-10 | 2010-05-12 | 温州希伯伦流体设备有限公司 | 智能控制隔膜阀 |
JP5802532B2 (ja) * | 2011-12-05 | 2015-10-28 | 株式会社フジキン | ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット |
JP6530929B2 (ja) * | 2015-02-27 | 2019-06-12 | 株式会社フジキン | 流体制御器 |
CN207728938U (zh) * | 2017-11-13 | 2018-08-14 | 青岛精锐机械制造有限公司 | 一种气动隔膜阀 |
-
2019
- 2019-09-17 JP JP2020548487A patent/JPWO2020066727A1/ja active Pending
- 2019-09-17 CN CN201980023936.7A patent/CN111936775A/zh active Pending
- 2019-09-17 KR KR1020207027589A patent/KR20200123226A/ko not_active Application Discontinuation
- 2019-09-17 US US17/043,025 patent/US20210018103A1/en not_active Abandoned
- 2019-09-17 WO PCT/JP2019/036267 patent/WO2020066727A1/ja active Application Filing
- 2019-09-17 SG SG11202009648TA patent/SG11202009648TA/en unknown
- 2019-09-25 TW TW108134538A patent/TW202026554A/zh unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016121775A (ja) * | 2014-12-25 | 2016-07-07 | 株式会社フジキン | 流体制御器 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111623141A (zh) * | 2020-06-11 | 2020-09-04 | 江苏阀邦半导体材料科技有限公司 | 一种应用在半导体阀门的金属对金属直接密合结构和处理工艺 |
CN111623141B (zh) * | 2020-06-11 | 2022-04-26 | 江苏阀邦半导体材料科技有限公司 | 一种应用在半导体阀门的金属对金属直接密合结构和处理工艺 |
WO2022153868A1 (en) * | 2021-01-14 | 2022-07-21 | Hitachi Metals, Ltd. | Bellows diaphragm assembly |
US11655912B2 (en) | 2021-01-14 | 2023-05-23 | Hitachi Metals, Ltd. | Bellows diaphragm assembly |
Also Published As
Publication number | Publication date |
---|---|
KR20200123226A (ko) | 2020-10-28 |
JPWO2020066727A1 (ja) | 2021-08-30 |
SG11202009648TA (en) | 2020-10-29 |
CN111936775A (zh) | 2020-11-13 |
US20210018103A1 (en) | 2021-01-21 |
TW202026554A (zh) | 2020-07-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2020066727A1 (ja) | ダイヤフラムバルブ | |
KR101232436B1 (ko) | 조절 밸브 | |
KR101919679B1 (ko) | 유체 제어기 | |
US7401760B2 (en) | Vacuum regulating valve | |
US20050166971A1 (en) | Y-pattern piston check valve, piston valve assembly for a Y-pattern piston check valve, and method | |
US20100038566A1 (en) | Valve and actuator assemblies | |
KR20000070604A (ko) | 다이어프램 밸브 | |
WO2011114553A1 (ja) | 流体圧機器の弁構造 | |
US7175157B2 (en) | Fluid controller | |
JP2008309255A (ja) | 逃がし弁 | |
US7487792B2 (en) | Constant flow valve | |
KR20070030180A (ko) | 밸브 보디 및 이것을 구비한 밸브 | |
KR101907283B1 (ko) | 유체 제어기 | |
EP1426626B1 (en) | A locking device for a valve | |
US20190195372A1 (en) | Flow control valve and mass flow controller using the same | |
JP7065531B2 (ja) | バルブ装置および流体制御装置 | |
JP4549981B2 (ja) | 流体制御機器 | |
WO2019163879A1 (ja) | 減圧弁 | |
JP5970426B2 (ja) | 圧力作動弁及び圧力作動弁における設定圧力の設定方法 | |
US20140061526A1 (en) | Diaphragm valve | |
JP7246075B2 (ja) | 膨張弁 | |
TWI807271B (zh) | 閥裝置 | |
US20240240726A1 (en) | Diaphragm valve with actuator bearing element | |
JP7526465B2 (ja) | 流量調整弁 | |
JP7378311B2 (ja) | 弁装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 19867364 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20207027589 Country of ref document: KR Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 2020548487 Country of ref document: JP Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 19867364 Country of ref document: EP Kind code of ref document: A1 |