WO2019114010A1 - 全自动检测基板尺寸设备、基板检测线及其检测方法 - Google Patents

全自动检测基板尺寸设备、基板检测线及其检测方法 Download PDF

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Publication number
WO2019114010A1
WO2019114010A1 PCT/CN2017/117414 CN2017117414W WO2019114010A1 WO 2019114010 A1 WO2019114010 A1 WO 2019114010A1 CN 2017117414 W CN2017117414 W CN 2017117414W WO 2019114010 A1 WO2019114010 A1 WO 2019114010A1
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WIPO (PCT)
Prior art keywords
substrate
traveling
frame
servo motor
size
Prior art date
Application number
PCT/CN2017/117414
Other languages
English (en)
French (fr)
Inventor
齐维滨
林健
张学良
王宏
姜威
吕河江
林俊荣
Original Assignee
北京铂阳顶荣光伏科技有限公司
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Publication date
Application filed by 北京铂阳顶荣光伏科技有限公司 filed Critical 北京铂阳顶荣光伏科技有限公司
Priority to KR1020187027623A priority Critical patent/KR20190087998A/ko
Priority to EP17894659.6A priority patent/EP3524928A4/en
Priority to JP2018544115A priority patent/JP2020506367A/ja
Priority to US16/305,670 priority patent/US20210220877A1/en
Publication of WO2019114010A1 publication Critical patent/WO2019114010A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/04—Sorting according to size
    • B07C5/10—Sorting according to size measured by light-responsive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C2301/00—Sorting according to destination
    • B07C2301/0008—Electronic Devices, e.g. keyboard, displays

Definitions

  • the invention is set in the field of mechanical equipment, and particularly relates to a fully automatic detecting substrate size device, a substrate detecting line and a detecting method thereof.
  • the thin-film battery is a high-tech achievement that uses solar energy to generate electricity. After entering the 21st century, the conversion efficiency of thin-film batteries has reached an unprecedented rapid development.
  • Thin film batteries are one of many solar cells and the preparation process is complicated.
  • PVD Physical Vapor Deposition
  • TCO transparent conductive film coating and CIGS solar thin film coating
  • the dimensional accuracy requirements of the material are very strict.
  • the current drive line does not have an automatic detection device for the size of the substrate. Only the full-time personnel can check the raw materials when they are put into storage or the raw material manufacturers provide the qualification documents. The dimensional accuracy of the materials cannot be guaranteed. It is urgent to develop an automatic test material. Size equipment.
  • the object of the present invention is to provide a device for fully detecting substrate size to solve the deficiencies in the prior art, which can replace the manual automatic detection of the size of the substrate, and has the advantages of high detection speed and high detection precision.
  • Another object of the present invention is to provide a detection line capable of automatic feeding, automatic detection and automatic cutting, which effectively improves the substrate detection efficiency.
  • Another object of the present invention is to provide a detection method for a detection line which can accurately detect the size of a substrate and realize automatic loading and automatic unloading.
  • the gantry type traveling mechanism includes a first traveling mechanism, a second traveling mechanism, and a beam
  • the beam is located above the carrier board
  • the traveling mechanism is fixedly mounted at two ends of the beam
  • the first traveling mechanism and the second traveling mechanism respectively cooperate with two of the traveling rails
  • one side of the beam is provided with a second traveling rail
  • a third traveling mechanism is mounted on the second traveling rail
  • the laser sensor is fixedly mounted on the third traveling mechanism.
  • the third traveling mechanism includes a second frame, a slider, and a second servo motor, and the slider and the second servo motor are fixedly mounted on the second frame
  • the second traveling rail is a double rail structure
  • the slider is slidably mounted on the second traveling rail
  • the side surface of the beam is further provided with a second tooth disposed in parallel with the second traveling rail
  • a second output gear is disposed on the output shaft of the second servo motor, and the second output gear is meshed with the second rack
  • the laser sensor is fixedly disposed on the second frame.
  • a groove is formed on one of the carrier plates, and the groove is located at a feeding end of the carrier plate, and a position sensor is disposed in the groove.
  • the fourth traveling mechanism includes a fourth servo motor, a third rack, and a third traveling rail
  • the third traveling rail is two, arranged along a width direction of the carrier board.
  • the top of the third frame is provided with two sliding sleeves, and the two sliding sleeves are respectively set on two of the third traveling rails, and the third rack is also fixed on the bottom surface of the carrier board.
  • the fourth servo motor is fixed on the top of the third frame and meshes with the third rack.
  • the present invention also provides a substrate detecting line comprising a sequentially connected automatic loading device, a substrate size detecting device and a blanking output table, wherein the substrate size detecting device adopts the aforementioned fully automatic detecting substrate size device.
  • a detection method applied to the above detection line specifically comprising the following steps,
  • the automatic feeding device extracts the substrate from the rack, flips the substrate from the vertical direction to the horizontal direction, and horizontally places the substrate on the substrate size detecting device;
  • the conveyor belt on the substrate size detecting device transports the substrate to a preset position, the laser sensor scans the four sides of the substrate one by one, and transmits the collected data to the data processing device, through the data
  • the processing device calculates a length, a width, and a diagonal dimension of the substrate, and compares the value with a preset value to determine whether the substrate size is qualified;
  • the conveyor conveys the substrate to a blanking output station, the blanking output station transmits the substrate according to a detection result fed back by the data processing device, and when the substrate is qualified, transmits the substrate to In the next station, when the substrate size is unsatisfactory, it is rotated 90 degrees and then transferred to the branch station.
  • the present invention comprises a main frame, a carrying plate, a conveyor belt, a door type traveling mechanism and a laser sensor.
  • the door type walking mechanism can walk along the length direction of the main frame by cooperating with the walking track on the carrying board, the door
  • the walking mechanism is provided with a third traveling mechanism, and the third traveling mechanism can walk along the gantry running mechanism, that is, walk along the width direction of the main frame, so that the laser sensor can collect the positions of the respective points on the substrate on the carrying plate. Coordinates, the collected information is processed by the data processing device to obtain accurate substrate size information.
  • the quality of the thin film battery is further improved by controlling the quality of the substrate.
  • the substrate detecting line provided by the present invention naturally adopts the above-described effective effects by adopting the above-described fully automatic detecting substrate size device.
  • the method for using the substrate detecting line provided by the invention can realize automatic film loading, automatic detection and automatic unloading of the substrate, and realize automatic detection of the substrate size.
  • Figure 1 is an isometric view of the overall structure of the present invention.
  • Figure 2 is a front view of the present invention
  • Figure 3 is a left side view of the present invention.
  • Figure 4 is a schematic view showing the structure of the portion A of Figure 2 enlarged and partially cut away;
  • Figure 5 is a plan view of the present invention.
  • Figure 6 is a schematic structural view showing the portion B of Figure 3 enlarged and partially cut away;
  • Figure 7 is an isometric view of the positioning mechanism
  • Figure 8 is a plan view showing a positioning mechanism of the present invention.
  • Fig. 9 is a schematic structural view of a substrate detecting line.
  • the conveying direction of the conveyor belt 3 is parallel to the longitudinal direction of the carrier plate;
  • a walking rail 6 arranged along the length thereof, the gantry type moving mechanism 4 is mounted on the walking rail 6, and the laser sensor 5 is mounted on the gantry type traveling mechanism 4 via the third traveling mechanism 10, and it should be noted that the present invention also Including the data processing device, the laser sensor 5 is connected to the data processing device, and the two can be connected through a wired connection or a wireless connection.
  • the data processing device can be a smart device such as a desktop computer, a notebook computer or a tablet computer.
  • the feeding device is loaded or manually loaded, the substrate is transported to a suitable position by the conveyor belt 3, and then the conveyor belt 3 stops working, and the gantry traveling mechanism 4 moves along the traveling rail 6 under the driving of its own driving device.
  • the third traveling mechanism 10 is driven by the driving device of its own to move on the gantry traveling mechanism 4, while the laser sensor 5 scans four sides of the substrate, and each side scans the position coordinates of the two end points and transmits the data to the data.
  • the processing device the data processing device calculates the exact size of the substrate by calculation. It should be noted that the data processing device belongs to the prior art, and is not shown in the figure.
  • the conveyor belt 3 is also a prior art, and each of the conveyor belts 3 can be separately provided with a driving device, or can adopt a structure as shown in FIG.
  • a drive shaft 42 is connected to the drive rollers of all the belts 3, so that a drive unit can be provided.
  • the gantry type walking mechanism 4 includes a first traveling mechanism 7 , a second traveling mechanism 8 and a beam 9 , and the beam 9 is located above the carrier plate 2 along the width of the carrier plate 2 .
  • the first traveling mechanism 7 and the second traveling mechanism 8 are fixedly mounted on both ends of the beam 9, and the first traveling mechanism 7 and the second traveling mechanism 8 respectively cooperate with the traveling rails 6 on the outermost two carrying plates 2.
  • a second traveling rail 11 is disposed on one side of the beam 9.
  • the third traveling mechanism 10 is mounted on the second traveling rail 11, and the laser sensor 5 is fixedly mounted on the third traveling mechanism 10.
  • the traveling rail 6 has a monorail structure and is fixed on the outer side surface of the carrier plate 2.
  • the traveling rail 6 preferably adopts a cylindrical rail.
  • the first traveling mechanism 7 and the second traveling mechanism 8 have the same structure, including the first a frame 12, an upper traveling wheel 13, a lower traveling wheel 14, and a first servo motor 15, the number of the upper traveling wheel 13 and the lower traveling wheel 14 are both two, and is installed at a lower portion of the inner side of the first frame 12, of course
  • the number of walking wheels can also be greater than two, two of which are optimal solutions, because the higher the number, the higher the cost, but the more the number of walking wheels, the higher the walking stability of the running mechanism, the two upper walking wheels 13 and
  • the top surface of the traveling rail 6 is rollingly connected, and the two lower traveling wheels 14 are rollingly connected to the bottom surface of the traveling rail 6.
  • the upper traveling wheel 13 and the lower traveling wheel 14 are preferably slotted, and the outer side of the carrying board 2 is further provided with a first surface.
  • a rack 16, the first servo motor 15 is also fixedly disposed on the inner side of the first frame 12, and the output shaft is provided with a first output gear 17, and the first output gear 17 meshes with the first rack 16.
  • the upper walking wheel 13 and the lower traveling wheel 14 are respectively two, and the four wheels are combined, and the four wheels are matched with the walking rail 6, so that the stability of walking can be effectively improved.
  • three wheels or more than four wheels can be used here.
  • the third traveling mechanism 10 includes a second frame 18, a slider 19 and a second servo motor 20, and the slider 19 and the second servo motor 20 are fixedly mounted on the second frame 18.
  • the second traveling rail 11 is a double-track structure, and the slider 19 is slidably mounted on the second traveling rail 11.
  • the cross-sectional shape of the traveling rail 11 is preferably trapezoidal, and the corresponding slider 19 also has a trapezoidal groove, and the side of the beam 9 a second rack 21 disposed in parallel with the second traveling rail 11 is further disposed.
  • the output shaft of the second servo motor 20 is provided with a second output gear 22, and the second output gear 22 meshes with the second rack 21;
  • the sensor 5 is fixedly disposed on the second frame 18, and more specifically, the second frame 18 includes a vertical portion and a horizontal portion, and the two constitute an L-shaped structure, and the slider 19 and the second servo motor 20 are both disposed on the vertical In the straight portion, the horizontal portion is located above the beam and parallel to the beam 9, the laser sensor 5 is fixed on the bottom surface of the horizontal portion, and the area of the beam 9 is avoided, and the sensing end of the laser sensor 5 faces the top surface of the carrier plate 2.
  • one of the carrier plates 2 is provided with a groove 23, and the groove 23 is located at the feeding end of the carrier plate 2, and the position sensor 24 is disposed in the groove 23.
  • the position sensor 24 starts to collect information, and when the substrate completely passes the position sensor 24, the preset position where the substrate has moved can be known, and then the controller can be controlled.
  • the belt 3 stops working and starts to collect the substrate size information.
  • the arrangement of the position sensor 24 increases the degree of automation of the present invention.
  • the bottom of each is fitted with a cam 27, the lever 2 8 is located directly below the guiding hole 36, and its two ends are respectively hingedly connected with two cams 27, and the third servo motor 30 is disposed on one of the cam mounting rods 26 for driving the cam 27 on the cam mounting rod 26, pushing The bottom of the rod 29 abuts against the top surface of the bracket 28.
  • the fourth traveling mechanism includes a fourth servo motor 31, a third rack 32, and a third traveling rail 33.
  • the third traveling rail 33 is two, arranged along the width direction of the carrier board 2, and the top of the third rack 25 is provided.
  • Two sliding sleeves 35, two sliding sleeves 35 are respectively set on the two third traveling rails 33, and the third racking bar 32 is also fixed on the bottom surface of the carrier plate 2, and parallel with the third traveling rail 33, the fourth servo
  • the motor 31 is fixed to the top of the third frame 25 and meshes with the third rack 32.
  • the present invention also has some auxiliary arrangements.
  • the carrier plate 2 adopts a hollow structure, and a plurality of air holes 40 are opened at the top thereof. After the substrate is adjusted in position, each load is carried by the air suction device. The plate 2 is evacuated to form a negative pressure inside, so that the substrate is firmly attracted to the carrier plate 2 to prevent displacement due to external factors.
  • the bottom of the first running mechanism 7 and the second running mechanism 8 are provided with a guard plate 41, which can effectively prevent the clothes of the worker from being caught in the mechanical mechanism, thereby ensuring the personal safety of the worker.
  • a substrate detecting line as shown in Fig. 9, includes a self-feeding device 37, a substrate size detecting device 38, and a blanking output table 39 which are sequentially connected, and the substrate size detecting device 38 employs the above-described fully automatic detecting substrate size device.
  • Both the automatic loading device 37 and the unloading output table 39 are prior art, and can realize automatic loading and automatic discharging.
  • the structure of a conventional automatic loading device 37 comprises: a conveying table, a mechanical turning arm frame, a walking track, a lifting mechanism and an alarm device, and the conveying table can be conveyed by a similar roller, the conveying table There is a mechanical flip arm frame, a vacuum suction cup is arranged on the mechanical flip arm frame, the vacuum suction cup can be stretched, and an advanced double-layer adsorption structure (two layers inside and outside) is adopted, and the suction piece is more firm, and the outer layer of the suction cup is cut off.
  • each suction cup has a separate air valve for switching control, free to choose the number of suction cups to facilitate the operation of the various sheets of the substrate operation; mechanical flip arm can slide along the walking track, To achieve elongation and contraction, a mechanical flip arm is provided with a sensor for sensing whether there is a substrate on the rack and whether it is close to the substrate.
  • the mechanical flip arm is mechanically flipped, and the running speed is fast (the fastest film speed is 35 seconds / Sheet), stable operation, no jitter, can meet the thickness of the substrate from 1mm-12mm, equipped with double-turn transfer chain protection, can ensure flip
  • the process is safe and reliable, and the swing arm is controlled by servo motor, which can meet the customer's requirements for speed, and makes the arm-turning mechanism of the device more stable and reliable.
  • the flip angle can be adjusted within the range of 95-110 degrees, which can meet various angles.
  • the substrate holder is placed on the sheet.
  • the alarm device alarms according to the result of the sensor sensing, specifically the traffic light alarm device, which can automatically alarm and display the abnormal situation, and has an emergency stop switch, which can be controlled when an abnormality occurs.
  • the lifting mechanism is used for mechanically flipping the arm frame to suck the substrate, preventing the substrate stacked on the substrate frame from being close to each other, and pressing the adjacent substrate during the flipping process.
  • the sucked substrate is lifted up and down, and then reversed, and the sensor on the boom is used to detect whether it is raised to a suitable height to avoid bumping into other substrates.
  • the flip arm is flipped horizontally and placed on the transport table, and the vacuum chuck on the reverse arm frame loses suction, and the substrate and the suction cup are separated.
  • a positioning structure is provided on the transport table so that the substrate is placed in a suitable position on the transport table each time.
  • the lifting mechanism can be a motor plus mechanical rod structure.
  • the existing unloading output table 39 has a conveying device and a rotating device.
  • the conveying device is opposite to the next station, and the conveying device sends the substrate to the next station to continue processing.
  • the substrate size exceeds the error value, In the case of failure, the conveyor is rotated 90 by the rotating device to align it with the branching station, and the substrate is sent to the base of the branch station, waiting for the blanking.
  • the present invention also provides a method for detecting the above substrate detection line, comprising the following steps,
  • the conveyor belt 3 on the substrate size detecting device 38 transports the substrate 43 to a preset position, the laser sensor 5 scans the four sides of the substrate 43 one by one, and transmits the collected data to the data processing device, and calculates by the data processing device.
  • the length, width and diagonal dimension of the substrate 43 are compared and compared with a preset value to determine whether the size of the substrate 43 is acceptable;
  • the conveyor belt 3 conveys the substrate 43 to the blanking output table 39.
  • the blanking output station 39 transfers the substrate 43 according to the detection result fed back by the data processing device. When the size of the substrate 43 is qualified, it is transferred to the next station. When the size of the substrate 43 is unacceptable, it is rotated by 90 degrees and then transferred to the branch station.
  • the following steps are further included: when the substrate 43 is placed on the conveyor belt 3, the conveyor belt 3 moves with the substrate 43, and the substrate 43 passes through the position sensor 24 when the tail portion of the substrate 43 leaves the position.
  • the conveyor belt 3 stops running, and at this time, the substrate 43 is located at the detecting position.
  • the positioning mechanism starts to work at this time, and the push rod 29 of the positioning mechanism protrudes through the through hole by the third servo motor 30.
  • the beam 9 is inclined by 45° to roughly determine the approximate range of the lower substrate, and then returns to the middle of the substrate to start scanning the four sides of the substrate 43 one by one.
  • Each side of the substrate 43 scans at least two dot end points to determine the range of the edge of the substrate 43.
  • the data processing device automatically synthesizes the coordinate values of the substrate distance position, and performs four operations to determine the length and width of the substrate 43. The specific size of the diagonal.
  • the data processing device checks the size of the substrate and compares the size set by the user to determine whether it meets the specifications.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

公开了一种全自动检测基板尺寸设备（38），包括主机架（1）、承载板（2）、传送带（3）、门式行走机构（4）和激光传感器（5），承载板（2）为多个，等间距地固定在主机架（1）上，相邻两个承载板（2）之间设有1个传送带（3），位于两侧的承载板（2）上均设有沿其长度方向布置的行走轨道（6），门式行走机构（4）安装在行走轨道（6）上，激光传感器（5）通过第三行走机构（10）安装在门式行走机构（4）上。还公开了一种基板检测线，包括顺次连接的自动上料装置（37）、前述的基板尺寸检测设备（38）和下料输出台（39）。还公开了一种基板尺寸检测方法。本发明能够代替人工自动检测基板的尺寸，具有检测速度快和检测精度高的优点。

Description

全自动检测基板尺寸设备、基板检测线及其检测方法 技术领域
本发明设于机械设备领域，具体涉及一种全自动检测基板尺寸设备、基板检测线及其检测方法。
背景技术
随着科学技术日新月异，国民的环保意识也在迅速提高，新能源替代化石类等不可再生能源已成为大势所趋。而薄膜电池正是利用太阳能进行发电的高科技成果，进入二十一世纪后，薄膜电池的转化效率更是达到了前所未有的快速发展。
薄膜电池是众多太阳能电池中的一种，且制备工艺复杂。诸如PVD(Physical Vapor Deposition，物理气相沉积)镀膜、TCO透明导电膜镀膜以及CIGS太阳能薄膜电池镀膜对材料的尺寸精度要求都十分严格。为保证最重要的沉积工序正常运转，前段工序基板符合工艺要求是必要的。现用传动线没有针对基板尺寸的自动检测装置，只有专职人员在原材料入库时的抽检或者原材料厂商提供合格证明文件，所述材料的尺寸精度得不到保证，亟需研发一款自动检测材料尺寸设备。
发明内容
本发明的目的是提供一种全自动检测基板尺寸设备，以解决现有技术中的不足，它能够代替人工自动检测基板的尺寸，具有检测速度快和检测精度高的优点。
本发明的另一目的是提供一种检测线，它能够自动上料、自动检测和自动下料，有效提高基板检测效率。
本发明的另一目的是提供一种检测线的检测方法，它能够准确地检测出基板的尺寸，并实现自动上料和自动卸料。
本发明提供了一种全自动检测基板尺寸设备包括主机架、承载板、传送带、门式行走机构和激光传感器,所述承载板为多个，等间距地固定在所述主机架上，相邻2个所述承载板之间设有1 个所述传送带，位于两侧的所述承载板上均设有沿其长度方向布置的行走轨道，所述门式行走机构安装在所述行走轨道上，所述激光传感器通过第三行走机构安装在所述门式行走机构上。
一种可选的实施方式中，所述门式行走机构包括第一行走机构、第二行走机构和横梁，所述横梁位于所述承载板的上方，所述第一行走机构和所述第二行走机构固定安装在所述横梁的两端，所述第一行走机构和所述第二行走机构分别与2条所述行走轨道配合，所述横梁的一侧设有第二行走轨道，所述第三行走机构安装在所述第二行走轨道上，所述激光传感器固定安装在所述第三行走机构上。
一种可选的实施方式中，所述行走轨道为单轨结构，固定在所述承载板的外侧面上；所述第一行走机构与所述第二行走机构的结构相同，均包括第一机架、上行走轮、下行走轮和第一伺服电机，所述上行走轮和所述下行走轮的数量均为2个，安装在所述第一机架内侧面的下部，2个所述上行走轮与所述行走轨道的顶面滚动连接，2个所述下行走轮与所述行走轨道的底面滚动连接，所述承载板的外侧面上还设有第一齿条，所述第一伺服电机也固定设置在所述第一机架的内侧面上，其输出轴上设有第一输出齿轮，所述第一输出齿轮与所述第一齿条相啮合。
一种可选的实施方式中，所述第三行走机构包括第二机架、滑块和第二伺服电机，所述滑块和所述第二伺服电机均固定安装在所述第二机架上，所述第二行走轨道为双轨结构，所述滑块可滑动地安装在所述第二行走轨道上，所述横梁的侧面还设有与所述第二行走轨道平行布置的第二齿条，所述第二伺服电机的输出轴上设有第二输出齿轮，所述第二输出齿轮与所述第二齿条相啮合；所述激光传感器固定设置在所述第二机架上。
一种可选的实施方式中，其中一块所述承载板上开设有凹槽，所述凹槽位于所述承载板的进料端，所述凹槽内设有位置传感器。
一种可选的实施方式中，位于最外侧的所述承载板的底部设 有定位机构，所述定位机构通过第四行走机构安装在所述承载板的底部，且可沿所述承载板的宽度方向移动；所述承载板的板面上沿长度方向等间距设置有多个通孔，每个所述通孔均沿所述承载板的宽度方向布置；所述定位机构包括第三机架、凸轮安装杆、凸轮、托杆、推杆和第三伺服电机，所述第三机架的顶杆上设有与所述通孔一一相对设置的导向孔，每个所述导向孔内均安装有1个所述推杆，所述凸轮安装杆为2根，固定设置在所述第三机架的底部，2根所述凸轮安装杆的底部均安装有1个所述凸轮，所述托杆位于所述导向孔的正下方，其两端分别与2个所述凸轮铰接连接，所述第三伺服电机设置在其中一个所述凸轮安装杆上，用于驱动该凸轮安装杆上的凸轮。
一种可选的实施方式中，所述第四行走机构包括第四伺服电机、第三齿条和第三行走轨道，所述第三行走轨道为两条，沿所述承载板的宽度方向布置，所述第三机架的顶部设有2个滑套，2个所述滑套分别套装在2条所述第三行走轨道上，所述第三齿条也固定在所述承载板的底面上，且与所述第三行走轨道平行，所述第四伺服电机固定在所述第三机架的顶部，且与所述第三齿条相啮合。
本发明还提供了一种基板检测线，包括顺次连接的自动上料装置、基板尺寸检测设备和下料输出台，所述基板尺寸检测设备采用前述的全自动检测基板尺寸设备。
一种可选的实施方式中，还包括报警装置，所述报警装置为红绿灯报警装置，其固定在所述自动上料装置上。
一种应用于上述检测线的检测方法，具体包括以下步骤，
取片：自动上料装置从料架上提取基板，将基板从竖直方向翻转至水平方向，并将所述基板水平放置在所述基板尺寸检测设备上；
尺寸检测：所述基板尺寸检测设备上的传送带将所述基板运至预设位置，激光传感器对所述基板的四条边逐个扫描，并将采 集到的数据发送给数据处理装置，通过所述数据处理装置算出所述基板的长、宽和对角线尺寸，并将其与预设值进行比对，判断所述基板尺寸是否合格；
卸片：所述传送带将所述基板传送至下料输出台，所述下料输出台根据所述数据处理装置反馈的检测结果传送所述基板，当所述基板尺寸合格时，将其传送至下一工位，当所述基板尺寸不合格时，将其旋转90度后传送至分支工位。
与现有技术相比，本发明包括主机架、承载板、传送带、门式行走机构和激光传感器,门式行走机构通过与承载板上行走轨道的配合，可沿主机架的长度方向行走，门式行走机构上设有第三行走机构，第三行走机构可沿门式行走机构行走，即沿主机架的宽度方向行走，这样激光传感器便可以采集到位于承载板上的基板的各个点的位置坐标，采集到的信息通过数据处理装置处理后得出准确的基板尺寸信息。通过对基板质量的控制，使薄膜电池的质量得到进一步提高。
本发明提供的基板检测线由于采用了上述全自动检测基板尺寸设备，其自然具备上述有效效果。
本发明提供的基板检测线使用方法，可以实现基板的自动上片、自动检测和自动卸片，实现基板尺寸的全自动检测。
附图说明
图1是本发明整体结构的轴测图；
图2是本发明的主视图；
图3是本发明的左视图；
图4是图2中A部放大后并局部剖开的结构示意图；
图5是本发明的俯视图；
图6是图3中B部放大后并局部剖开的结构示意图；
图7是定位机构的轴测图；
图8是本发明设有定位机构的俯视图；
图9是基板检测线的结构示意图。
附图标记说明：1-主机架，2-承载板，3-传送带，4-门式行走机构，5-激光传感器，6-行走轨道，7-第一行走机构，8-第二行走机构，9-横梁，10-第三行走机构，11-第二行走轨道，12-第一机架，13-上行走轮，14-下行走轮，15-第一伺服电机，16-第一齿条，17-第一输出齿轮，18-第二机架，19-滑块，20-第二伺服电机，21-第二齿条，22-第二输出齿轮，23-凹槽，24-位置传感器，25-第三机架，26-凸轮安装杆，27-凸轮，28-托杆，29-推杆，30-第三伺服电机，31-第四伺服电机，32-第三齿条，33-第三行走轨道，34-通孔，35-滑套，36-导向孔，37-自动上料装置，38-基板尺寸检测设备，39-下料输出台，40-气孔，41-护板，42-传动轴，43-基板。
具体实施方式
下面通过参考附图描述的实施例是示例性的，仅用于解释本发明，而不能解释为对本发明的限制。
本发明的实施例：如图1和图3所示，一种全自动检测基板尺寸设备，包括主机架1、承载板2、传送带3、门式行走机构4和激光传感器5,承载板2为多个，等间距地固定在主机架1上，相邻2个承载板2之间设有一个传送带3，传送带3的传送方向与承载板的长度方向平行；位于两侧的承载板2上均设有沿其长度方向布置的行走轨道6，门式行走机构4安装在行走轨道6上，激光传感器5通过第三行走机构10安装在门式行走机构4上，需要说明的是，本发明还包括数据处理装置，激光传感器5与数据处理装置连接，二者既可通过有线连接也可通过无线连接，数据处理装置可以是台式电脑、笔记本电脑或者平板电脑等智能设备。
工作时，采用上料设备上料或人工上料，基板通过传送带3运至合适的位置，然后传送带3停止工作，门式行走机构4在其自带的驱动装置的驱动下沿行走轨道6移动，同时第三行走机构10在其自带的驱动装置驱动下在门式行走机构4上移动，同时激光传感器5扫描基板的四条边，每条边扫描2个端点的位置坐标，并传输给数据处理装置，数据处理装置通过运算得出该基板的准 确尺寸。需要说明的是，数据处理装置属于现有技术，在图中未示出，传送带3也为现有技术，每个传送带3可单独设置驱动装置，也可采用如图5所示的结构，通过一根传动轴42来连接所有传动带3的主动辊，这样设置一个驱动装置即可。使用本发明可以实时获取每一块待加工基板的尺寸信息，从而提高薄膜电池的质量。
在一种具体地实施方式中，请结合图2、门式行走机构4包括第一行走机构7、第二行走机构8和横梁9，横梁9位于承载板2的上方，沿承载板2的宽度方向布置，第一行走机构7和第二行走机构8固定安装在横梁9的两端，第一行走机构7和第二行走机构8分别与最外侧的2个承载板2上的行走轨道6配合，横梁9的一侧设有第二行走轨道11，第三行走机构10安装在第二行走轨道11上，激光传感器5固定安装在第三行走机构10上。
如图4所示，行走轨道6为单轨结构，固定在承载板2的外侧面上，行走轨道6优选采用圆柱状轨道；第一行走机构7与第二行走机构8的结构相同，均包括第一机架12、上行走轮13、下行走轮14和第一伺服电机15，上行走轮13和下行走轮14的数量均为两个，安装在第一机架12内侧面的下部，当然行走轮的数量也可以大于两个，两个为最优方案，因为数量越多成本越高，但行走轮数量越多则会相应地提高行走机构的行走稳定性，两个上行走轮13与行走轨道6的顶面滚动连接，两个下行走轮14与行走轨道6的底面滚动连接，上行走轮13和下行走轮14均优选采用槽轮，承载板2的外侧面上还设有第一齿条16，第一伺服电机15也固定设置在第一机架12的内侧面上，其输出轴上设有第一输出齿轮17，第一输出齿轮17与第一齿条16相啮合。
当第一伺服电机15转动时，带动第一输出齿轮17转动，第一输出齿轮17与第一齿条16啮合，从而实现第一行走机构7和第二行走机构8沿着行走轨道6移动，上行走轮13和下行走轮14分别为两个，合起来也就是四个轮子，通过四个轮子与行走轨道6 配合，可以有效提高行走的稳定性。当然此处也可使用三个轮子或者多于四个轮子的方案。
如图3和图6所示，第三行走机构10包括第二机架18、滑块19和第二伺服电机20，滑块19和第二伺服电机20均固定安装在第二机架18上，第二行走轨道11为双轨结构，滑块19可滑动地安装在第二行走轨道11上，行走轨道11的断面形状优选为梯形，相应的滑块19上也具有梯形槽，横梁9的侧面还设有与第二行走轨道11平行布置的第二齿条21，第二伺服电机20的输出轴上设有第二输出齿轮22，第二输出齿轮22与第二齿条21相啮合；激光传感器5固定设置在第二机架18上，更具体地，第二机架18包括竖直部分和水平部分，二者构成一个L形结构，滑块19和第二伺服电机20均设于竖直部分，水平部分则位于横梁的上方，且与横梁9平行，激光传感器5固定在水平部分的底面上，且避开横梁9的区域，激光传感器5的感应端朝向承载板2的顶面。
为了实现全自动控制，如图5所示，其中一块承载板2上开设有凹槽23，凹槽23位于承载板2的进料端，凹槽23内设有位置传感器24。当传送带3带着基板移动，基板移动至位置传感器24的位置时，位置传感器24开始采集信息，当基板完全通过位置传感器24时可知基板已运动之预设位置，此时便可通过控制器控制传动带3停止工作，开始采集基板尺寸信息。位置传感器24的设置提高了本发明的自动化程度。
在实际使用过程中，如图8所示，基板43通过传送带3移动至预设位置时，通常其边缘都很难保持与承载板2的边缘平齐，这种状态下虽然可以正常完成尺寸信息采集，但是会造成一定的误差，为了消除误差，如图7和图8所示，本发明还设置了定位机构，定位机构设置在位于最外侧的承载板2的底部，定位机构通过第四行走机构安装在承载板2的底部，且可沿承载板2的宽度方向移动；承载板2的板面上沿长度方向等间距设置有多个通孔34，每个通孔34均沿承载板2的宽度方向布置；定位机构包括 第三机架25、凸轮安装杆26、凸轮27、托杆28、推杆29和第三伺服电机30，第三机架25的顶杆上设有与通孔34一一相对设置的导向孔36，每个导向孔36内均安装有1个推杆29，凸轮安装杆26为两根，固定设置在第三机架25的底部，两根凸轮安装杆26的底部均安装有一个凸轮27，托杆28位于导向孔36的正下方，其两端分别与2个凸轮27铰接连接，第三伺服电机30设置在其中一个凸轮安装杆26上，用于驱动该凸轮安装杆26上的凸轮27，推杆29的底部抵接在托杆28的顶面上。第四行走机构包括第四伺服电机31、第三齿条32和第三行走轨道33，第三行走轨道33为两条，沿承载板2的宽度方向布置，第三机架25的顶部设有两个滑套35，两个滑套35分别套装在两条第三行走轨道33上，第三齿条32也固定在承载板2的底面上，且与第三行走轨道33平行，第四伺服电机31固定在第三机架25的顶部，且与第三齿条32相啮合。
定位机构的工作原理为：第三伺服电机30转动，并带着凸轮27旋转，凸轮27通过托杆28带着另一侧的凸轮27同步旋转，由于采用的是凸轮，所述托杆28的运动轨迹具有一个最高点和一个最低点，当托杆28运动至最高点时，托杆28将所有推杆29托至最高点，此时各个推杆29的顶部均从相应的通孔34伸出，并高于承载板2的顶面以及基板43的顶面，当托杆28运动至最高点时第三伺服电机30停止转动，第四伺服电机31工作，通过第四伺服电机31与第三齿条32的配合，带着第三机架25沿着第三行走轨道33行走，此时各个推杆29均沿着通孔34的长度方向运动，并推着基板43的边缘移动，将基板推正，即基板的长边与承载板2的长边平行。然后第四伺服电机31反向转动，第三伺服电机30反向(或正向)转动，第三机架25回到原位，托杆28运动至最低点，各个推杆29缩回到承载板2的下方。
除上述实施方式外，本发明还具有一些辅助设置，如图1所示，承载板2采用空心结构，其顶部开设有多个气孔40，当基板 调整好位置后，通过抽气装置对各个承载板2抽气，使其内部形成负压，从而将基板牢牢地吸在承载板2上，以防止因外界因素导致基本产生位移。
如图2所示，第一行走机构7和第二行走机构8的底部均设有护板41，可以有效防止工作人员的衣服卷入机械机构中，从而保证工作人员的人身安全。
一种基板检测线，如图9所示，包括顺次连接的自动上料装置37、基板尺寸检测设备38和下料输出台39，基板尺寸检测设备38采用上述全自动检测基板尺寸设备。
自动上料装置37和下料输出台39均为现有技术，可以实现自动上料和自动卸料。
下面提供一种现有的自动上料装置37的结构，自动上料装置37包括：输送台、机械翻转臂架、行走轨道、抬升机构和报警装置，输送台可以通过类似滚轮进行传送，输送台上设有机械翻转臂架，机械翻转臂架上设置有真空吸盘，真空吸盘可以伸缩，并采用先进的双层吸附结构(内外两层)，吸片更加牢固，杜绝了吸盘外层划破而导致的吸附漏气的缺陷，每个吸盘都有单独的气阀进行开关控制，可自由选择吸盘工作数量，方便各种尺寸基板的上片操作需求；机械翻转臂架可以沿着行走轨道滑动，实现伸长和收缩，机械翻转臂架上设置有传感器，用于感应机架上是否有基板以及是否接近基板，机械翻转臂架采用机械式翻转，运行速度快(最快上片速度35秒/片)，运行稳定，无任何抖动，可满足厚度为1mm-12mm的基板上片，装配双道翻转传输链条保护，可确保翻转过程安全可靠，翻臂采用伺服电机控制，既能满足客户对速度的要求，也使得设备的翻臂机构更加的稳定可靠，翻转角度在95度-110度范围内可调，可满足各种角度基板架上片。报警装置根据传感器感应的结果报警，具体为红绿灯报警装置，对出现的异常情况可自动报警并有显示，并设有急停开关，可在出现异常时进行控制。抬升机构，用于机械翻转臂架吸取基板时， 防止基板架上叠加的基板距离较近，翻转过程中挤压相邻的基板。通过抬升机构，将吸取的基板先抬起退后，再反转，同时臂架上的传感器用于检测其是否抬升到合适的高度，以免磕碰到其它基板。吸取基板后，翻转臂架翻转水平，放置在输送台上，反转臂架上的真空吸盘失去吸力，基板和吸盘分开。输送台上会设置定位结构，以便基板每次放到输送台的合适位置。抬升机构可以为电机加机械杆结构。
现有的下料输出台39具有输送装置和旋转装置，当基板尺寸合格时，输送装置与下一工位相对，输送装置将基板送至下一工位继续加工，当基板尺寸超过误差值，不合格时，通过旋转装置将输送装置旋转90，使其与分支工位对齐，基板被送至分支工位的基座，等待下料。
本发明还提供了一种上述基板检测线的检测方法，包括以下步骤，
取片：自动上料装置37从料架上提取基板43，将基板43从竖直方向翻转至水平方向，并将基板43水平放置在基板尺寸检测设备38上；
尺寸检测：基板尺寸检测设备38上的传送带3将基板43运至预设位置，激光传感器5对基板43的四条边逐个扫描，并将采集到的数据发送给数据处理装置，通过数据处理装置计算出基板43的长、宽和对角线尺寸，并将其与预设值进行比对，判断基板43尺寸是否合格；
卸片：传送带3将基板43传送至下料输出台39，下料输出台39根据数据处理装置反馈的检测结果传送基板43，当基板43尺寸合格时，将其传送至下一工位，当基板43尺寸不合格时，将其旋转90度后传送至分支工位。
上述方法中，在进行尺寸检测时，还包括以下步骤：基板43被放置在传送带3上时，传送带3带着基板43移动的同时，基板43会经过位置传感器24，当基板43的尾部离开位置传感器24时， 传送带3停止运行，此时基板43位于检测位置，为了提高尺寸检测的精度，此时定位机构开始工作，定位机构的推杆29在第三伺服电机30的作用下伸出通孔34，并高于基板43的顶面，同时在第四伺服电机31的作用下，推杆29沿着通孔34的长度方向运动，并推着基板43的边缘移动，将基板43推正。然后在两个第一伺服电机15的驱动下，横梁9做45°的斜线运动，来粗略确定下基板的大致范围，然后回到基板的中间，开始对基板43的4个边进行逐个扫描，基板43的每条边至少扫描2个点端点，以便确定基板43边的范围，最终由数据处理装置自动合成基板距离位置的坐标值，并进行四则运算，从而确定基板43的长、宽、对角线的具体尺寸。最后数据处理装置会核对基板尺寸与用户事先设定的尺寸进行比较，来判断其是否合乎规格要求。
以上依据图式所示的实施例详细说明了本发明的构造、特征及作用效果，以上所述仅为本发明的较佳实施例，但本发明不以图面所示限定实施范围，凡是依照本发明的构想所作的改变，或修改为等同变化的等效实施例，仍未超出说明书与图示所涵盖的精神时，均应在本发明的保护范围内。

Claims (10)

  1. 一种全自动检测基板尺寸设备，其特征在于：包括主机架(1)、承载板(2)、传送带(3)、门式行走机构(4)和激光传感器(5),所述承载板(2)为多个，等间距地固定在所述主机架(1)上，相邻两个所述承载板(2)之间设有一个所述传送带(3)，位于两侧的所述承载板(2)上均设有沿其长度方向布置的行走轨道(6)，所述门式行走机构(4)安装在所述行走轨道(6)上，所述激光传感器(5)通过第三行走机构(10)安装在所述门式行走机构(4)上。
  2. 根据权利要求1所述的全自动检测基板尺寸设备，其特征在于：所述门式行走机构(4)包括第一行走机构(7)、第二行走机构(8)和横梁(9)，所述横梁(9)位于所述承载板(2)的上方，所述第一行走机构(7)和所述第二行走机构(8)固定安装在所述横梁(9)的两端，所述第一行走机构(7)和所述第二行走机构(8)分别与2条所述行走轨道(6)配合，所述横梁(9)的一侧设有第二行走轨道(11)，所述第三行走机构(10)安装在所述第二行走轨道(11)上，所述激光传感器(5)固定安装在所述第三行走机构(10)上。
  3. 根据权利要求2所述的全自动检测基板尺寸设备，其特征在于：所述行走轨道(6)为单轨结构，固定在所述承载板(2)的外侧面上；所述第一行走机构(7)与所述第二行走机构(8)的结构相同，均包括第一机架(12)、上行走轮(13)、下行走轮(14)和第一伺服电机(15)，所述上行走轮(13)和所述下行走轮(14)的数量均为2个，安装在所述第一机架(12)内侧面的下部，2个所述上行走轮(13)与所述行走轨道(6)的顶面滚动连接，2个所述下行走轮(14)与所述行走轨道(6)的底面滚动连接，所述承载板(2)的外侧面上还设有第一齿条(16)，所述第一伺服电机(15)也固定设置在所述第一机架(12)的内 侧面上，其输出轴上设有第一输出齿轮(17)，所述第一输出齿轮(17)与所述第一齿条(16)相啮合。
  4. 根据权利要求2所述的全自动检测基板尺寸设备，其特征在于：所述第三行走机构(10)包括第二机架(18)、滑块(19)和第二伺服电机(20)，所述滑块(19)和所述第二伺服电机(20)均固定安装在所述第二机架(18)上，所述第二行走轨道(11)为双轨结构，所述滑块(19)可滑动地安装在所述第二行走轨道(11)上，所述横梁(9)的侧面还设有与所述第二行走轨道(11)平行布置的第二齿条(21)，所述第二伺服电机(20)的输出轴上设有第二输出齿轮(22)，所述第二输出齿轮(22)与所述第二齿条(21)相啮合；所述激光传感器(5)固定设置在所述第二机架(18)上。
  5. 根据权利要求1-4任意一项所述的全自动检测基板尺寸设备，其特征在于：其中一块所述承载板(2)上开设有凹槽(23)，所述凹槽(23)位于所述承载板(2)的进料端，所述凹槽(23)内设有位置传感器(24)。
  6. 根据权利要求1-4任意一项所述的全自动检测基板尺寸设备，其特征在于：位于最外侧的所述承载板(2)的底部设有定位机构，所述定位机构通过第四行走机构安装在所述承载板(2)的底部，且可沿所述承载板(2)的宽度方向移动；所述承载板(2)的板面上沿长度方向等间距设置有多个通孔(34)，每个所述通孔(34)均沿所述承载板(2)的宽度方向布置；所述定位机构包括第三机架(25)、凸轮安装杆(26)、凸轮(27)、托杆(28)、推杆(29)和第三伺服电机(30)，所述第三机架(25)的顶杆上设有与所述通孔(34)一一相对设置的导向孔(36)，每个所述导向孔(36)内均安装有一个所述推杆(29)，所述凸轮安装杆(26)为两根，固定设置在所述第三机架(25)的底部，两根所述凸轮安装杆(26)的底部均安装有一个所述凸轮(27)，所述托杆(28)位于所述导向孔(36)的正下方，其两端分别与两 个所述凸轮(27)铰接连接，所述第三伺服电机(30)设置在其中一个所述凸轮安装杆(26)上，用于驱动该凸轮安装杆(26)上的凸轮(27)。
  7. 根据权利要求6所述的全自动检测基板尺寸设备，其特征在于：所述第四行走机构包括第四伺服电机(31)、第三齿条(32)和第三行走轨道(33)，所述第三行走轨道(33)为两条，沿所述承载板(2)的宽度方向布置，所述第三机架(25)的顶部设有两个滑套(35)，两个所述滑套(35)分别套装在2条所述第三行走轨道(33)上，所述第三齿条(32)也固定在所述承载板(2)的底面上，且与所述第三行走轨道(33)平行，所述第四伺服电机(31)固定在所述第三机架(25)的顶部，且与所述第三齿条(32)相啮合。
  8. 一种基板检测线，包括顺次连接的自动上料装置(37)、基板尺寸检测设备(38)和下料输出台(39)，其特征在于：所述基板尺寸检测设备(38)采用权利要求1-7任意一项所述的全自动检测基板尺寸设备。
  9. 根据权利要求8所述的基板检测线，其特征在于：还包括报警装置，所述报警装置为红绿灯报警装置，其固定在所述自动上料装置(37)上。
  10. 一种应用于如权利要求8或9所述检测线的检测方法，其特征在于：具体包括以下步骤，
    取片：自动上料装置(37)从料架上提取基板(43)，将基板(43)从竖直方向翻转至水平方向，并将所述基板(43)水平放置在所述基板尺寸检测设备(38)上；
    尺寸检测：所述基板尺寸检测设备(38)上的传送带(3)将所述基板(43)运至预设位置，激光传感器(5)对所述基板(43)的四条边逐个扫描，并将采集到的数据发送给数据处理装置，通过所述数据处理装置计算出所述基板(43)的长、宽和对角线尺寸，并将其与预设值进行比对，判断所述基板(43)尺寸是否合 格；
    卸片：所述传送带(3)将所述基板(43)传送至下料输出台(39)，所述下料输出台(39)根据所述数据处理装置反馈的检测结果传送所述基板(43)，当所述基板(43)尺寸合格时，将其传送至下一工位，当所述基板(43)尺寸不合格时，将其旋转90度后传送至分支工位。
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