WO2018206843A1 - Procédé et système de commande permettant de commander une pompe à vide - Google Patents

Procédé et système de commande permettant de commander une pompe à vide Download PDF

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Publication number
WO2018206843A1
WO2018206843A1 PCT/FI2018/050321 FI2018050321W WO2018206843A1 WO 2018206843 A1 WO2018206843 A1 WO 2018206843A1 FI 2018050321 W FI2018050321 W FI 2018050321W WO 2018206843 A1 WO2018206843 A1 WO 2018206843A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pump
estimate
rotational speed
speed
inlet
Prior art date
Application number
PCT/FI2018/050321
Other languages
English (en)
Inventor
Lauri NYGREN
Manu HUTTUNEN
Teemu KINNARINEN
Tuomo Lindh
Jero Ahola
Antti HÄKKINEN
Vesa Karvonen
Original Assignee
Lappeenrannan Teknillinen Yliopisto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lappeenrannan Teknillinen Yliopisto filed Critical Lappeenrannan Teknillinen Yliopisto
Publication of WO2018206843A1 publication Critical patent/WO2018206843A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P11/00—Arrangements for controlling dynamo-electric converters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Definitions

  • the disclosure relates generally to vacuum systems. More particularly, the disclosure relates to a method and to a control system for controlling a vacuum pump of a vacuum system. Furthermore, the disclosure relates to a computer program for controlling a vacuum pump of a vacuum system.
  • Vacuum engineering deals with technological processes and equipment that use vacuum to achieve better results than those run under atmospheric pressure.
  • Exemplifying application of vacuum technology are, among others, pyrolytic chromium carbide coating, manufacturing of non-reflecting glass, glass coloring, vacuum impregnation, vacuum filtering, vacuum dewatering and drying, and Vacuum coating.
  • vacuum coaters are capable of applying various types of coatings on metal, glass, plastic, and ceramic surfaces, providing high quality and uniform thickness and color.
  • vacuum dryers can be used for delicate materials and save significant quantities of energy due to lower drying temperatures.
  • a typical vacuum system comprises a vacuum chamber, a vacuum pump for maintaining the vacuum inside the vacuum chamber, an electric drive for running the vacuum pump, and a control system for controlling the vacuum pump based on control and status information related to the vacuum system.
  • the control system can be configured to optimize the operation of the vacuum system for example by adjusting the rotation speed of the vacuum pump so that the energy efficiency of the vacuum pump and the electric drive is maximized.
  • the control system can be configured to carry out condition monitoring of the vacuum system.
  • the control system can be configured to monitor vacuum system leaks and vacuum evacuation.
  • Vacuum systems of the kind described above are, however, not free from challenges.
  • a challenge related to many vacuum systems is that instrumentation for producing the above-mentioned control and status information may comprise elements, such as e.g. a flow rate sensor, which are expensive and/or prone to failures.
  • a method for controlling a vacuum pump of a vacuum system comprises:
  • the above-described method according to the invention is based on an assumption that the theoretical suction speed can be estimated on the basis of the rotational speed and that the theoretical suction speed is independent of the inlet and outlet pressures of the vacuum pump. Furthermore, the method is based on an assumption that above-mentioned leak flow can be estimated on the basis of the pressure difference between the outlet and the inlet of the vacuum pump.
  • the outlet pressure of the vacuum pump is the atmospheric pressure that can be assumed to be constant. If the outlet pressure of the vacuum pump can vary, a measured value of the outlet pressure of the vacuum pump or a measured value of the pressure difference over the vacuum pump can be used in addition to or instead of the measured value of the inlet pressure.
  • the estimated suction speed does not correspond to the actual amount of air or other gas, but to the volumetric flow rate of the gas in the conditions prevailing at the inlet of the vacuum pump.
  • the estimated value of the suction speed can be converted into e.g. a volumetric flow rate value corresponding to given conditions by using known theoretic methods.
  • a need for a flow rate sensor can be avoided in many cases because the suction speed is estimated based on the measured inlet pressure, the rotational speed of the vacuum pump, and properties of the vacuum pump. Therefore, the typical drawbacks of the flow rate measurement can be avoided.
  • the vacuum pump is advantageously driven with an electric motor supplied with a frequency converter that can be configured to produce an estimate for the rotational speed.
  • the frequency converter can be configured to estimate the electric power received by the frequency converter from an electric power grid and/or the shaft power of the vacuum pump. In this exemplifying case, it is possible to estimate the isentropic efficiency of the vacuum pump, and/or the specific energy consumption of vacuum pump, and/or the total energy efficiency of the combination of the vacuum pump, the electric motor, and the frequency converter.
  • a control system for controlling a vacuum pump of a vacuum system.
  • a control system comprises a processor configured to: - determine an estimate for theoretical suction speed of the vacuum pump based on data indicative of rotational speed of the vacuum pump and data indicative of the theoretical suction speed at a predetermined rotational speed, - determine an estimate for leak flow from an outlet of the vacuum pump back to an inlet of the vacuum pump based on measured inlet pressure of the vacuum pump,
  • a new vacuum system that comprises: - a vacuum chamber,
  • control system for controlling the vacuum pump.
  • a computer program for controlling a vacuum pump of a vacuum system.
  • a computer program according to the invention comprises computer executable instructions for controlling a programmable processor to:
  • the computer program product comprises a non-volatile computer readable medium, e.g. a compact disc "CD”, encoded with a computer program according to the invention.
  • a non-volatile computer readable medium e.g. a compact disc "CD”
  • figure 1 shows a flowchart of a method according to an exemplifying and non-limiting embodiment of the invention for controlling a vacuum pump of a vacuum system
  • figure 2 illustrates the principle utilized in methods according to exemplifying and non-limiting embodiments of the invention for controlling a vacuum pump of a vacuum system
  • figure 3 shows exemplifying actual and estimated suction speeds as functions of inlet pressure at several rotational speeds for a dry claw vacuum pump
  • figure 4 illustrates a vacuum system according to an exemplifying and non-limiting embodiment of the invention.
  • Figure 1 shows a flowchart of a method according to an exemplifying and non- limiting embodiment of the invention for controlling a vacuum pump of a vacuum system.
  • the method comprises the following actions:
  • action 102 determining an estimate for theoretical suction speed Sth of the vacuum pump based on data indicative of rotational speed n of the vacuum pump and data indicative of the theoretical suction speed S n at a predetermined rotational speed n n
  • action 103 determining an estimate for leak flow Sieak from an outlet of the vacuum pump back to an inlet of the vacuum pump based on the measured inlet pressure
  • action 104 determining a difference Sth - eak between the estimate of the theoretical suction speed and the estimate of the leak flow so as to obtain an estimate for suction speed S of the vacuum pump
  • action 105 controlling the rotational speed n of the vacuum pump based at least partly on the estimate of the suction speed of the vacuum pump.
  • the theoretical suction speed Sth is assumed to be substantially directly proportional to the rotational speed so that the theoretical suction speed Sth at the prevailing rotational speed n can be computed according to the following equation: where n es t is the estimate of the prevailing rotational speed n, n n is the above- mentioned predetermined rotational speed, and S n is the above-mentioned theoretical suction speed at the predetermined rotational speed n n .
  • the predetermined rotational speed n n can be for example the nominal rotation speed of the vacuum pump.
  • the method is based on an assumption that the above-mentioned leak flow Sieak can be determined based on the pressure difference between the outlet and the inlet of the vacuum pump and that an estimate of the leak flow Sieak corresponding to a given pressure difference and a given rotational speed is a valid estimate for the leak flow also with different rotational speeds when the pressure difference is the above-mentioned given pressure difference, i.e. the pressure difference is unchanged.
  • the leak flow is estimated based on a known suction curve of the vacuum pump.
  • an exemplifying known suction curve is denoted with a reference 220.
  • the known suction curve 220 expresses the suction speed S as a function of the inlet pressure p m at the above-mentioned predetermined rotational speed n n .
  • Figure 2 shows also a suction curve 221 which corresponds to the prevailing rotational speed n.
  • the suction curve 221 is assumed to be unknown.
  • the estimate of the leak flow Sieak is a difference between the suction speed S n at a first point 222 of the suction curve 220 where the inlet pressure iniet equals to the outlet pressure p ou t of the vacuum pump and suction speed S n i at a second point 223 of the suction curve 220 where the inlet pressure iniet is the measured inlet pressure p n .
  • the estimate of the leak flow eak is the following difference:
  • the estimate of the leak flow eak is assumed to be a valid estimate also in cases where the rotational speed differs from predetermined rotational speed n n and the inlet pressure is the measured inlet pressure pin
  • the difference S n - S n i is suitable for estimating the leak flow Seak also in a case where the rotational speed is the prevailing rotational speed n and the inlet pressure is the measured inlet pressure pin.
  • the estimate for the suction speed S corresponding to the measured inlet pressure p, n and the prevailing rotational speed n is:
  • the estimate of the leak flow Seak can be computed according to the following equation based on the assumption that the leak flow is an isentropic nozzle flow: where p n is the gas density at the inlet of the vacuum pump, C is a flow coefficient, A is a nozzle throat area, p ou t is the outlet pressure of the vacuum pump, out is the gas density at the outlet of the vacuum pump, k is the isentropic exponent that is about 1 .4 for air, and p ra tio is a pressure ratio that is the maximum of the following:
  • p is the gas density at the inlet or the outlet of the vacuum pump
  • p is the inlet or outlet pressure
  • Rspedfic is the specific gas constant that is about 287.058 Jkg _1 K " 1 for air
  • T is the gas temperature at the inlet or the outlet of the vacuum pump.
  • the temperatures at the inlet and the outlet of the vacuum pump can be measured with suitable temperature sensors. It is also possible that the temperature is measured only at the inlet the vacuum pump and the temperature at the outlet of the vacuum pump is estimated according to the following equation based on an assumption of isentropic compression: where Tin is the temperature at the inlet of the vacuum pump and T ou t is the temperature at the outlet of the vacuum pump, It is also possible that the temperature is measured only at the outlet the vacuum pump and the temperature at the inlet of the vacuum pump is solved from the above-presented equation (7).
  • the product CA in equation (4) can be computed with the aid of the following formula based on an assumption that the theoretical suction speed S n at the predetermined rotational speed n n equals the leak flow eak when the inlet pressure has the predetermined ultimate value
  • the ultimate value p u it of the inlet pressure, the theoretical suction speed S n , and the predetermined rotational speed n n are given as plate values of a vacuum pump or in a data sheet of the vacuum pump.
  • the estimate of the suction speed S can be obtained with the aid of the estimate of the prevailing rotational speed n, the measured inlet pressure p m or a measured pressure difference over the vacuum pump, and the values Pult, Sn, and n n .
  • the product CA in equation (4) can be solved also by applying a suitable fitting method, e.g.
  • a method according to an exemplifying and non-limiting embodiment of the invention comprises computing an estimate for the ideal isentropic power consumption Ps of the vacuum pump according to the following equation: where S es t is the estimate of the suction speed.
  • a method according to an exemplifying and non-limiting embodiment of the invention comprises varying the rotational speed of the vacuum pump so as to find a value of the rotational speed at which the energy efficiency of a combination of the vacuum pump and an electric drive running the vacuum pump is maximized, i.e. the following ratio is maximized: where is electric power consumed for rotating the vacuum pump.
  • the actual amount of air or other gas can be described by mass flow rate, kg/h, or by standard volumetric flow rate.
  • a computer program according to an exemplifying and non-limiting embodiment of the invention comprises computer executable instructions for controlling a programmable processing system to carry out actions related to a method according to any of the above-described exemplifying embodiments of the invention.
  • a computer program according to an exemplifying and non-limiting embodiment of the invention comprises software modules for controlling a vacuum pump of a vacuum system.
  • the software modules comprise computer executable instructions for controlling a programmable processor to: - determine an estimate for the theoretical suction speed Sth of the vacuum pump based on data indicative of the rotational speed n of the vacuum pump and data indicative of the theoretical suction speed S n at a predetermined rotational speed n n ,
  • the above-mentioned software modules can be e.g. subroutines or functions implemented with a suitable programming language.
  • a computer readable medium e.g. a compact disc "CD”
  • a signal according to an exemplifying and non-limiting embodiment of the invention is encoded to carry information defining a computer program according to an exemplifying embodiment of invention.
  • the processor 430 is configured to determine the estimate of the leak flow Sieak based on a suction curve expressing the suction speed as a function of the inlet pressure at a constant rotational speed, e.g. the above-mentioned predetermined rotational speed n n .
  • the estimate of the leak flow Sieak can be a difference between a first suction speed value at a first point of the suction curve where the inlet pressure equals to the outlet pressure p ou t of the vacuum pump and a second suction speed value at a second point of the suction curve where the inlet pressure is the measured inlet pressure p- m .
  • the processor 403 is configured to determine the estimate of the leak flow >->leak based on: - a predetermined ultimate value p u it of the inlet pressure at which the leak flow equals the theoretical suction speed at the predetermined rotational speed, and
  • the processor 403 is configured to compute the estimate of the leak flow Sieak according to the following equation based on the assumption that the leak flow is an isentropic nozzle flow:
  • n gas density at the inlet of the vacuum pump
  • C is a flow coefficient
  • A is a nozzle throat area
  • p ou t is outlet pressure of the vacuum pump
  • out is gas density at the outlet of the vacuum pump
  • k is an isentropic exponent
  • p ra tio is a pressure ratio being a maximum of the following: p pout and (1 + (k - 1 )l2f ⁇ ⁇ k) .
  • the processor 403 is configured to compute estimates for the gas densities at the inlet and the outlet of the vacuum pump 406 according to the following equation applied separately for the inlet of the vacuum pump and for the outlet of the vacuum pump:
  • a control system comprises a temperature sensor 410 for measuring the temperature Tin at the inlet of the vacuum pump 406, and the processor 403 is configured to compute an estimate for the temperature Tout at the outlet of the vacuum pump 406 accord to the following equation based on an assumption of isentropic compression:
  • the processor 403 is configured to compute an estimate for the product CA according to the following formula based on an assumption that the theoretical suction speed S n at the predetermined rotational speed n n equals the leak flow Sieak when the inlet pressure has the predetermined ultimate value uit: In a control system according to an exemplifying and non-limiting embodiment of the invention, the processor 403 is configured to compute an estimate for ideal isentropic power consumption Ps according to the following equation: where S es t is the estimate for suction speed. In a control system according to an exemplifying and non-limiting embodiment of the invention, the processor 403 is configured to vary the rotational speed of the vacuum pump 406 so as to find a value of the rotational speed at which the following ratio is maximized:
  • a control system comprises an electric motor 407 for driving the vacuum pump 406 and a frequency converter 408 for supplying voltage to the electric motor in accordance with a control signal produced by the processor 403. It is however also possible that a control system according to another exemplifying embodiment of the invention is a separate device with respect to means, such as the electric motor 407 and the frequency converter 408, for driving the vacuum pump.
  • the frequency converter 408 is advantageously configured to produce an estimate nest for the rotational speed n of the vacuum pump 406. It is also possible that the control system comprises a speed sensor connected to the shaft of the vacuum pump 406. Furthermore, the frequency converter 408 can be configured to produce an estimate for electric power received by the frequency converter 408 from an electric power grid, an estimate f es t for torque directed to the vacuum pump 406 and/or an estimate for mechanical power supplied to the vacuum pump.
  • the processor 403 can be configured to compute an estimate of the isentropic efficiency of the vacuum pump 406, and/or an estimate of the specific energy consumption of vacuum pump, and/or an estimate of the energy efficiency of the combination of the vacuum pump 406, the electric motor 407, and the frequency converter 408.
  • the processor 403 can be implemented with one or more processor circuits each of which can be a programmable processor circuit provided with appropriate software, a dedicated hardware processor such as for example an application specific integrated circuit "ASIC", or a configurable hardware processor such as for example a field programmable gate array "FPGA”.
  • the processor 406 can be communicatively connected to a memory 405 that can be implemented with one or more memory circuits each of which can be a random access memory "RAM" circuit.
  • the processor 403 and/or the memory 405 are part/parts of the frequency converter 408.
  • the processor 403 and/or the memory 405 are part/parts of a programmable logic circuit "PLC" which is a separate device with respect to the frequency converter 408.
  • PLC programmable logic circuit

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Computer Hardware Design (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Procédé de commande d'une pompe à vide comprenant : la mesure (101) de la pression d'entrée de la pompe à vide, la détermination (102) d'une estimation pour une vitesse d'aspiration théorique sur la base de données indiquant la vitesse de rotation de la pompe à vide et de données indiquant la vitesse d'aspiration théorique à une vitesse de rotation prédéfinie, la détermination (103) d'une estimation pour un écoulement de fuite depuis la sortie de la pompe à vide de retour vers l'entrée de la pompe à vide sur la base de la pression d'entrée mesurée, la détermination (104) d'une différence entre les estimations de la vitesse d'aspiration théorique et de l'écoulement de fuite de façon à obtenir une estimation de la vitesse d'aspiration de la pompe à vide, et la commande (105) de la vitesse de rotation de la pompe à vide sur la base, au moins en partie, de l'estimation de la vitesse d'aspiration. La vitesse de rotation peut être commandée, par exemple, de telle sorte que l'efficacité d'une pompe à vide est maximisée.
PCT/FI2018/050321 2017-05-08 2018-05-03 Procédé et système de commande permettant de commander une pompe à vide WO2018206843A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20175411 2017-05-08
FI20175411A FI20175411A (fi) 2017-05-08 2017-05-08 Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi

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WO2018206843A1 true WO2018206843A1 (fr) 2018-11-15

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PCT/FI2018/050321 WO2018206843A1 (fr) 2017-05-08 2018-05-03 Procédé et système de commande permettant de commander une pompe à vide

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282000A (ja) * 1988-09-20 1990-03-22 Nippon Ferrofluidics Kk ターボ分子ポンプの運転状態検出方法
JP2009074512A (ja) * 2007-09-25 2009-04-09 Shimadzu Corp ターボ分子ポンプ
JP2014074380A (ja) * 2012-10-05 2014-04-24 Ebara Corp ドライ真空ポンプ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282000A (ja) * 1988-09-20 1990-03-22 Nippon Ferrofluidics Kk ターボ分子ポンプの運転状態検出方法
JP2009074512A (ja) * 2007-09-25 2009-04-09 Shimadzu Corp ターボ分子ポンプ
JP2014074380A (ja) * 2012-10-05 2014-04-24 Ebara Corp ドライ真空ポンプ装置

Also Published As

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