FI20175411A - Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi - Google Patents

Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi

Info

Publication number
FI20175411A
FI20175411A FI20175411A FI20175411A FI20175411A FI 20175411 A FI20175411 A FI 20175411A FI 20175411 A FI20175411 A FI 20175411A FI 20175411 A FI20175411 A FI 20175411A FI 20175411 A FI20175411 A FI 20175411A
Authority
FI
Finland
Prior art keywords
vacuum pump
controlling
estimate
speed
rotational speed
Prior art date
Application number
FI20175411A
Other languages
English (en)
Swedish (sv)
Inventor
Manu Huttunen
Teemu Kinnarinen
Tuomo Lindh
Jero Ahola
Antti Häkkinen
Vesa Karvonen
Lauri Nygren
Original Assignee
Lappeenrannan Teknillinen Yliopisto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lappeenrannan Teknillinen Yliopisto filed Critical Lappeenrannan Teknillinen Yliopisto
Priority to FI20175411A priority Critical patent/FI20175411A/fi
Priority to PCT/FI2018/050321 priority patent/WO2018206843A1/en
Publication of FI20175411A publication Critical patent/FI20175411A/fi

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/50—Correcting or compensating means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P11/00—Arrangements for controlling dynamo-electric converters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Computer Hardware Design (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Menetelmä tyhjiöpumpun ohjaamiseksi käsittää, että mitataan (101) tyhjiöpumpun tulopaine, määritetään (102) estimaatti teoreettiselle imunopeudelle tyhjiöpumpun pyörintänopeuden ilmaisevan datan ja teoreettisen imunopeuden ennalta määrätyllä pyörintänopeudella ilmaisevan datan perusteella, määritetään (103) mitatun tulopaineen perusteella estimaatti vuotovirralle tyhjiöpumpun lähdöstä takaisin tyhjiöpumpun tuloon, määritetään (104) teoreettisen imunopeuden ja vuotovirran estimaattien välinen erotus estimaatin tyhjiöpumpun imunopeudelle saamiseksi, ja ohjataan (105) tyhjiöpumpun pyörintänopeutta ainakin osittain imunopeuden estimaatin perusteella. Pyörintänopeutta voidaan ohjata esimerkiksi siten, että tyhjiöpumpun hyötysuhde maksimoituu.
FI20175411A 2017-05-08 2017-05-08 Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi FI20175411A (fi)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI20175411A FI20175411A (fi) 2017-05-08 2017-05-08 Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi
PCT/FI2018/050321 WO2018206843A1 (en) 2017-05-08 2018-05-03 A method and a control system for controlling a vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20175411A FI20175411A (fi) 2017-05-08 2017-05-08 Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi

Publications (1)

Publication Number Publication Date
FI20175411A true FI20175411A (fi) 2018-11-09

Family

ID=62186495

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20175411A FI20175411A (fi) 2017-05-08 2017-05-08 Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi

Country Status (2)

Country Link
FI (1) FI20175411A (fi)
WO (1) WO2018206843A1 (fi)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282000A (ja) * 1988-09-20 1990-03-22 Nippon Ferrofluidics Kk ターボ分子ポンプの運転状態検出方法
JP2009074512A (ja) * 2007-09-25 2009-04-09 Shimadzu Corp ターボ分子ポンプ
JP6050081B2 (ja) * 2012-10-05 2016-12-21 株式会社荏原製作所 ドライ真空ポンプ装置

Also Published As

Publication number Publication date
WO2018206843A1 (en) 2018-11-15

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