WO2018142939A1 - Multi-tube burner - Google Patents

Multi-tube burner Download PDF

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Publication number
WO2018142939A1
WO2018142939A1 PCT/JP2018/001237 JP2018001237W WO2018142939A1 WO 2018142939 A1 WO2018142939 A1 WO 2018142939A1 JP 2018001237 W JP2018001237 W JP 2018001237W WO 2018142939 A1 WO2018142939 A1 WO 2018142939A1
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Prior art keywords
gas pipe
gas
injection port
auxiliary
pipe
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PCT/JP2018/001237
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French (fr)
Japanese (ja)
Inventor
信敏 佐藤
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株式会社フジクラ
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Publication of WO2018142939A1 publication Critical patent/WO2018142939A1/en

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
    • F23D14/22—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other

Definitions

  • the present invention relates to a multi-tube burner, which is suitable for manufacturing, for example, an optical fiber preform.
  • a manufacturing method is used in which a raw material gas is sprayed with a flame and glass particles obtained by the combustion reaction are deposited on a target.
  • production methods include VAD (Vapor-phase Axial Deposition), OVD (Outside Vapor Deposition), and MCVD (Modified Chemical Vapor Deposition). Glass particles are called soot.
  • Patent Document 1 As a burner used in such a method for producing a porous glass deposit, a burner that oxidizes a silicon-containing compound not containing a halide is disclosed in Patent Document 1 below. A plurality of injection regions are provided on one surface of the burner of Patent Document 1 below.
  • a first region for injecting a mixed gas of octamethylcyclotetrasiloxane, which is a raw material gas, and oxygen, which is a combustible gas, is disposed at the center of the burner outlet, and a second region for injecting nitrogen is provided. It is provided so as to surround the first region. Further, a plurality of third regions for injecting oxygen, which is an auxiliary combustion gas, are provided at predetermined intervals around the second region, and a plurality of injecting a mixed gas of methane, which is an inflammable gas, and oxygen, which is an auxiliary combustion gas.
  • the fourth region is provided outside the third region at a predetermined interval.
  • the 1st field which injects the mixed gas of source gas and auxiliary combustion gas is provided in the innermost peripheral side of the injection mouth of a burner. For this reason, there is a concern that soot spreads to the outer peripheral side of the first region due to the flame that spreads widely, and the amount of soot deposited on the target decreases.
  • the present invention provides a multi-tube burner capable of depositing soot efficiently.
  • a multi-tube burner of the present invention includes a raw material gas pipe for flowing a raw material gas, a flammable gas pipe for flowing a flammable gas, and a first auxiliary flammable gas pipe for flowing a flammable gas.
  • the injection port of the raw material gas pipe and the injection port of the first auxiliary combustible gas pipe are disposed inside the injection port of the combustible gas pipe, and the injection port of the first auxiliary combustible gas pipe is the raw material gas. It is arranged to surround the injection port of the tube.
  • the raw material gas is injected inside the auxiliary combustion gas, and the combustible gas is injected so as to surround the auxiliary combustion gas and the raw material gas.
  • the auxiliary combustion gas acts like a wall that suppresses the diffusion of the raw material gas, and the raw material gas is easily confined inside the auxiliary combustion gas. Accordingly, it is possible to reduce the outward diffusion of the soot. Thus, it is possible to suppress the soot from diffusing, and to suppress a decrease in the amount of soot deposited on the target. Further, since the injection port of the first auxiliary combustible gas pipe and the injection port of the raw material gas pipe are separately arranged, the gas flow rate can be set individually.
  • the flow rate of the auxiliary combustion gas injected from the injection port of the first auxiliary combustion gas pipe is set so that the soot does not diffuse outward due to the expanded flame. Can be adjusted.
  • the flow rate of the combustible gas does not need to be increased so much that the soot temperature is lowered by the gas flow, so that it is difficult for the soot to adhere to the target.
  • the amount of soot deposited per unit raw material gas can be increased.
  • soot can be deposited efficiently.
  • the second auxiliary combustible gas pipe further flows a second auxiliary combustible gas pipe, and an injection port of the second auxiliary combustible gas pipe is an inner side of the injection port of the combustible gas pipe. It is preferable that it is arranged outside the injection port.
  • the combustible gas can be burned more efficiently and the temperature of the soot deposited on the target can be controlled.
  • the auxiliary combustion gas doubles the raw material gas, the raw material gas can be more easily confined inside the auxiliary combustion gas.
  • a first seal gas pipe for flowing a seal gas is further provided, the injection port of the raw material gas pipe is disposed inside the injection port of the first seal gas pipe, and the injection port of the first auxiliary combustion gas pipe is The first sealing gas pipe is preferably disposed so as to surround the injection port.
  • the raw material gas can be prevented from diffusing outward, and the reaction position between the raw material gas and the combustible gas injected from the raw material gas injection port and the combustible gas injection port is sealed. It can be adjusted by the gas flow rate or the like. Therefore, it is possible to further reduce the soot from diffusing to the outside, and to deposit the soot on an appropriate range of the target.
  • the ratio of the flow rate of the raw material gas flowing through the raw material gas tube and the flow rate of the auxiliary combustible gas flowing through the first auxiliary combustion gas tube is preferably within a range of 0.35 to 0.75.
  • the flow rate of the raw material gas changes within a predetermined range when the deposition efficiency is 100% when all Si atoms contained in the raw material become soot (SiO 2 ) and adhere to the target.
  • the deposition efficiency of 50% or more can be ensured.
  • the ratio is preferably in the range of 0.4 to 0.75.
  • the flow rate of the raw material gas changes within a predetermined range when the deposition efficiency is 100% when all Si atoms contained in the raw material become soot (SiO 2 ) and adhere to the target.
  • the deposition efficiency 100% when all Si atoms contained in the raw material become soot (SiO 2 ) and adhere to the target.
  • the injection port of the raw material gas pipe is disposed inside the injection port of the first auxiliary combustion gas pipe, and the injection port of the first auxiliary combustion gas pipe extends over the entire circumference of the injection port of the raw material gas pipe. It is preferable to surround.
  • a plurality of the first auxiliary combustion gas pipes are provided, and the injection ports of the plurality of first auxiliary combustion gas pipes are arranged at predetermined intervals around the injection port of the raw material gas pipe. It is also possible. In this case, the production of the multi-tube burner can be facilitated.
  • a multi-tube burner capable of efficiently depositing soot is provided.
  • FIG. 1 is a view showing a state where an injection port which is an injection port of a multi-tube burner according to the present embodiment is viewed from the gas injection side.
  • the multi-tube burner 1 includes a raw material gas pipe 11, a first seal gas pipe 12, a plurality of first auxiliary combustible gas pipes 13, a plurality of second auxiliary combustible gas pipes 14, and a combustible gas.
  • the gas tube 15 and the second seal gas tube 16 are provided.
  • the raw material gas pipe 11 the first seal gas pipe 12, the respective first auxiliary gas pipes 13, the respective second auxiliary gas pipes 14, the combustible gas pipes 15, the first
  • the two-seal gas pipe 16 is hatched, the hatched line does not indicate the cross section of the pipe.
  • the source gas pipe 11 is a pipe through which source gas flows, and a gas supply device is connected to the end of the source gas pipe 11 opposite to the injection end side through a connecting pipe.
  • the raw material of the raw material gas include octamethylcyclotetrasiloxane.
  • silicon-containing compounds that do not contain halides such as octamethylcyclotetrasiloxane and hexamethyldisiloxane are used as a raw material gas, hydrochloric acid is not generated by the combustion reaction of the raw materials, so the halides are contained. Silicon-containing compounds that are not preferred are preferred as source gases.
  • the first seal gas pipe 12 is a pipe through which a seal gas flows, and a gas supply device is connected to the end of the first seal gas pipe 12 opposite to the injection end side through a connecting pipe.
  • seal gas inert gas, such as nitrogen and argon, is mentioned, for example.
  • the plurality of first auxiliary combustion gas pipes 13 are pipes through which auxiliary combustion gas flows.
  • the end of the first auxiliary combustible gas pipe 13 opposite to the injection end side is connected to a gas supply device via a connecting pipe.
  • Examples of the auxiliary gas include oxygen.
  • the plural second auxiliary gas pipes 14 are pipes through which auxiliary gas flows.
  • An end portion of the second auxiliary combustible gas pipe 14 opposite to the injection end side is connected to a gas supply device via a connecting pipe.
  • the first auxiliary gas pipe 13 and the second auxiliary gas pipe 14 may be connected to the gas supply device via a common communication pipe, or connected to the gas supply device via separate connection pipes. May be. However, when the first auxiliary gas pipe 13 and the second auxiliary gas pipe 14 are connected to the gas supply device via separate connecting pipes, the first auxiliary gas pipe 13 and the second auxiliary gas pipe 14 are connected.
  • the flow rate and type of auxiliary combustion gas can be changed.
  • the combustible gas pipe 15 is a pipe through which combustible gas flows, and a gas supply device is connected to the end of the combustible gas pipe 15 opposite to the injection end side through a connecting pipe.
  • Examples of the combustible gas include hydrogen and methane.
  • the second seal gas pipe 16 is a pipe through which seal gas flows, and a gas supply device is connected to the end of the second seal gas pipe 16 opposite to the injection end side through a connecting pipe.
  • the first seal gas pipe 12 and the second seal gas pipe 16 may be connected to the gas supply apparatus via a common communication pipe, or connected to the gas supply apparatus via separate connection pipes. Also good. However, when the first seal gas pipe 12 and the second seal gas pipe 16 are connected to the gas supply device via separate connecting pipes, the seal gas is generated between the first seal gas pipe 12 and the second seal gas pipe 16. The flow rate and type of can be changed.
  • the gas supply apparatus described above supplies the source gas to the source gas pipe 11, supplies the combustible gas to the combustible gas pipe 15, and the first auxiliary gas pipe 13 and the second auxiliary gas pipe 14.
  • An auxiliary combustible gas is supplied to the first seal gas pipe 12 and the second seal gas pipe 16.
  • the gas supply device can individually change the supply amount and flow rate of the raw material gas, the combustible gas, the auxiliary combustible gas, and the seal gas.
  • the respective injection ports 11A to 16A that are the injection ports of the respective gas pipes will be described.
  • the respective injection ports 11A to 16A are viewed from the gas injection side, the respective injection ports 11A to 16A are arranged as follows.
  • the injection port 12A of the first seal gas pipe 12 is arranged so as to surround the outer periphery of the injection port 11A of the source gas pipe 11 over the entire circumference. That is, the injection port 11 ⁇ / b> A of the source gas pipe 11 is disposed inside the injection port 12 ⁇ / b> A of the first seal gas pipe 12.
  • the injection ports 13A of the plurality of first auxiliary combustible gas pipes 13 are arranged at predetermined intervals so as to surround the outer periphery of the injection port 12A of the first seal gas pipe 12. Therefore, each injection port 13 ⁇ / b> A of the plurality of first auxiliary combustible gas pipes 13 also surrounds the injection port 11 ⁇ / b> A of the source gas pipe 11.
  • the injection ports 14A of the plurality of second auxiliary combustion gas pipes 14 are arranged at predetermined intervals outside the injection ports 13A of the plurality of first auxiliary combustion gas pipes 13.
  • a plurality of injection ports 13A are arranged at predetermined equal intervals on a circle having a diameter larger than the diameter of the injection port 12A with the same position as the center of the injection port 11A as the center.
  • a plurality of injection ports 14A are arranged at predetermined intervals equal to each other on a circle larger than the circle.
  • a combustible gas pipe 15 is disposed outside the injection ports 14A of the plurality of second auxiliary combustible gas pipes 14 so as to surround the injection ports 14A. That is, the injection port 11A of the raw material gas pipe 11, the injection port 12A of the first seal gas pipe 12, the injection ports 13A of the plurality of first auxiliary combustible gas pipes 13, the plurality of injection ports 11A arranged in the positional relationship as described above.
  • Each injection port 14 ⁇ / b> A of the second auxiliary combustible gas pipe 14 is disposed inside the injection port 15 ⁇ / b> A of the combustible gas pipe 15.
  • the injection port 16A of the second seal gas pipe 16 is disposed outside the injection port 15A of the combustible gas pipe 15 so as to surround the outer periphery of the injection port 15A over the entire circumference.
  • the injection port 11A of the source gas pipe 11 from the inner side to the outer side of the multi-tube burner 1, the injection port 11A of the source gas pipe 11, the injection port 12A of the first seal gas pipe 12, the injection port 15A of the combustible gas pipe 15,
  • the injection ports are arranged concentrically in the order of the injection port 16A of the two-seal gas pipe 16.
  • the area of the injection region AR4 of the combustible gas is made larger than the area of the injection region AR1 of the raw material gas at the injection port 11A of the raw material gas pipe 11. Further, the area of the injection region AR4 of the combustible gas is larger than the area of the injection region AR2 of the seal gas that combines the injection port 12A of the first seal gas pipe 12 and the injection port 16A of the second seal gas pipe 16. Has been.
  • the area of the injection region AR3 of the auxiliary combustion gas which includes the injection ports 13A of the plurality of first auxiliary combustion gas pipes 13 and the injection ports 14A of the plurality of second auxiliary combustion gas pipes 14, The area of the combustible gas injection area AR4 is increased.
  • injection regions AR1 to AR4 are regions where gas is injected, and the combustible gas injection region AR4 includes the outer periphery of each injection port 13A of the first auxiliary combustible gas tube 13 and the second auxiliary combustible gas tube.
  • the outer periphery of each of the 14 injection ports 14A and the outer periphery of the injection port 12A of the first seal gas pipe 12 are surrounded over the entire periphery.
  • the temperature of the soot deposited on the target is controlled by the auxiliary combustion gas injected from the injection port 14A of the second auxiliary combustion gas pipe 14.
  • the temperature of the auxiliary combustion gas injected from the injection port 14A of the second auxiliary combustion gas pipe 14 is combusted with the combustible gas, so that the temperature can be increased.
  • the raw material gas can be prevented from diffusing outside by the seal gas injected from the injection port 12A of the first seal gas pipe 12, and the raw material gas and the flammable gas can be reduced depending on the flow rate of the seal gas.
  • the reaction position can be adjusted.
  • the injection port 11A of the source gas pipe 11 and the injection port 13A of the first auxiliary combustible gas pipe 13 are arranged inside the injection port 15A of the combustible gas pipe 15.
  • the injection port 13A of the first auxiliary combustible gas pipe 13 is disposed so as to surround the injection port 11A of the raw material gas pipe 11 via the injection port 12A of the first seal gas pipe 12.
  • the raw material gas is injected inside the auxiliary combustion gas, and the inflammable gas is injected so as to surround the auxiliary combustion gas and the raw material gas. Therefore, the auxiliary gas acts like a wall that suppresses the diffusion of the raw material gas, so that the raw material gas can be easily confined inside the auxiliary gas. Accordingly, it is possible to reduce the outward diffusion of the soot. Accordingly, it is possible to suppress a decrease in the amount of soot deposited on the target due to the diffusion of soot.
  • the gas flow rate can be set individually. Therefore, the flow rate of the auxiliary combustible gas injected from the injection port 13A of the first auxiliary combustible gas pipe 13 is set so that the soot does not diffuse to the outside due to the enlarged flame even if the flame becomes larger due to the increase in the amount of raw material gas. Can be adjusted. Accordingly, the flow rate of the combustible gas does not need to be increased so much that the soot temperature is lowered by the gas flow, so that it is difficult for the soot to adhere to the target.
  • the optimum deposition efficiency can be adjusted according to the increase or decrease in the amount of the source gas.
  • the amount of soot deposited per unit raw material gas can be increased.
  • soot can be deposited efficiently.
  • the multi-tube burner 1 of the present embodiment further includes a second auxiliary combustible gas pipe 14 through which auxiliary gas flows.
  • the injection port 14 ⁇ / b> A of the second auxiliary combustible gas pipe 14 is disposed on the inner side of the injection port 15 ⁇ / b> A of the combustible gas pipe 15, and is disposed on the outer side of the injection port 13 ⁇ / b> A of the first auxiliary combustible gas pipe 13.
  • combustible gas can be burned more efficiently and the temperature of the soot deposited on the target can be controlled.
  • the auxiliary combustion gas doubles the raw material gas, the raw material gas can be more easily confined inside the auxiliary combustion gas.
  • the multi-tube burner 1 of the present embodiment further includes a first seal gas pipe 12 through which a seal gas flows, and an injection port 11A of the source gas pipe 11 is disposed inside the injection port 12A of the first seal gas pipe 12.
  • a first seal gas pipe 12 through which a seal gas flows
  • an injection port 11A of the source gas pipe 11 is disposed inside the injection port 12A of the first seal gas pipe 12.
  • the injection port 16A of the second seal gas pipe 16 is disposed so as to surround the outer periphery of the injection port 15A of the combustible gas pipe 15. Therefore, it is possible to suppress the flame from spreading greatly, and soot can be deposited in a more appropriate range of the target.
  • FIG. 2 is a view showing a state in which the injection port of the multi-tube burner according to the present embodiment is viewed from the gas injection side.
  • the multi-tube burner 2 according to the second embodiment includes a raw material gas pipe 11, a first seal gas pipe 12, a first combustible gas pipe 23, and a first auxiliary combustible gas pipe 24.
  • a plurality of second auxiliary combustible gas pipes 14, a second combustible gas pipe 25, and a second seal gas pipe 16 are provided. That is, in this embodiment, it replaces with the some 1st auxiliary combustion gas pipe 13 of 1st Embodiment, and the 1st auxiliary combustion gas pipe 24 is provided.
  • tube 15 of 1st Embodiment replaces with the combustible gas pipe
  • Two combustible gas pipes 25 are provided.
  • the flammable gas pipe 25 and the second seal gas pipe 16 are indicated by hatching, the hatching does not indicate a cross section of the pipe.
  • the first combustible gas pipe 23 is a pipe through which a combustible gas flows like the combustible gas pipe 15 of the first embodiment, and the first combustible gas pipe 23 has an end opposite to the injection end side.
  • a gas supply device is connected via the connecting pipe.
  • combustible gas the gas similar to the combustible gas of 1st Embodiment can be mentioned.
  • the first auxiliary combustible gas pipe 24 is a pipe through which auxiliary combustible gas flows in the same manner as the first auxiliary combustible gas pipe 13 of the first embodiment.
  • the end of the first auxiliary combustible gas pipe 24 opposite to the injection end side is connected to a gas supply device via a connecting pipe.
  • Examples of the auxiliary combustion gas include the same gases as the auxiliary combustion gas of the first embodiment.
  • the second combustible gas pipe 25 is a pipe for flowing a combustible gas having the same configuration as the combustible gas pipe 15 of the first embodiment.
  • combustible gas the gas similar to the combustible gas of 1st Embodiment can be mentioned.
  • the injection port 11 ⁇ / b> A of the source gas pipe 11 and the injection port 12 ⁇ / b> A of the first seal gas pipe 12 surrounding the raw gas pipe 11 are disposed inside the injection port 23 ⁇ / b> A of the first combustible gas pipe 23. Accordingly, the injection port 23A of the first combustible gas pipe 23 surrounds the outer periphery of the injection port 12A of the first seal gas pipe 12 over the entire circumference, and the raw material gas pipe is connected via the injection port 12A of the first seal gas pipe 12. 11 injection ports 11A are surrounded all around.
  • the injection port 23A of the first combustible gas pipe 23 is disposed inside the injection port 24A of the first auxiliary combustible gas pipe 24. Therefore, the injection port 24A of the first auxiliary combustible gas pipe 24 surrounds the entire outer periphery of the injection port 23A of the first combustible gas pipe 23, and the injection port 23A of the first combustible gas pipe 23 and the first seal gas.
  • the injection port 11A of the source gas pipe 11 is surrounded over the entire circumference via the injection port 12A of the pipe 12. Further, outside the injection port 13A of the first auxiliary combustible gas pipe 13, the injection ports 14A of the plurality of second auxiliary gas pipes 14 are arranged at predetermined intervals.
  • the injection port 25A of the second combustible gas pipe 25 is arranged so as to surround the outer periphery of the injection port 24A of the first auxiliary combustible gas pipe 24 over the entire circumference. That is, the injection port 11A of the raw material gas pipe 11, the injection port 12A of the first seal gas pipe 12, the injection port 23A of the first combustible gas pipe 23, and the first auxiliary combustible gas pipe arranged in the above positional relationship.
  • the 24 injection ports 24 ⁇ / b> A and the injection ports 14 ⁇ / b> A of the plurality of second auxiliary combustible gas pipes 14 are arranged inside the injection ports 15 ⁇ / b> A of the second combustible gas pipes 25.
  • a plurality of second auxiliary combustible gas pipes 14 are arranged between the inner wall of the injection port 25A of the second combustible gas pipe 25 and the outer wall of the injection port 24A of the first auxiliary combustible gas pipe 24.
  • the injection region AR4 of the injection port 23A of the first combustible gas pipe 23 surrounds the outer periphery of the injection port 12A of the first seal gas pipe 12 over the entire circumference.
  • the injection region AR3 of the injection port 24A of the first auxiliary combustible gas pipe 24 surrounds the outer periphery of the injection port 23A of the first combustible gas pipe 23 over the entire circumference. Therefore, the injection region AR3 of the injection port 24A of the first auxiliary combustible gas pipe 24 surrounds the outer periphery of the injection port 11A of the source gas pipe 11 over the entire circumference via the injection port 23A of the first combustible gas pipe 23. Yes.
  • the injection region AR4 of the injection port 25A of the second combustible gas pipe 25 includes the outer periphery of each injection port 14A of the second auxiliary combustible gas pipe 14, and the outer periphery of the injection port 24A of the first auxiliary combustible gas pipe 24. Is surrounded all around.
  • the injection port 24A of the first auxiliary combustible gas pipe 24 surrounds the outside of the injection port 11A of the raw material gas pipe 11 over the entire circumference.
  • the auxiliary combustion gas Therefore, the diffusion of the raw material gas can be further suppressed, and the combustion can be made uniform in the circumferential direction, so that the soot generation can be made uniform in the circumferential direction.
  • the injection ports 11A to 16A of the first embodiment are viewed from the gas injection side, the injection ports 11A to 16A are on the same surface as long as the positional relationship described above in the first embodiment is satisfied. It does not need to be arranged even if it is arranged.
  • the injection ports 11A, 12A, 23A, 24A, 14A, 25A, and 16A of the second embodiment are viewed from the gas injection side, the injection ports have the positional relationship described above in the second embodiment. As long as they are arranged, they may or may not be arranged on the same surface. Moreover, although each said injection port was made circular, it may be non-circular.
  • the second auxiliary gas pipe 14, the first seal gas pipe 12, and the second seal gas pipe 16 are provided. However, all of the second auxiliary combustion gas pipe 14, the first sealing gas pipe 12, and the second sealing gas pipe 16 may be omitted, and the second auxiliary combustion gas pipe 14, the first sealing gas pipe 12, and the first sealing gas pipe 12 may be omitted. One or two of the two seal gas pipes 16 may be omitted.
  • Example 1 Soot was deposited on the target by the OVD method using the multi-tube burner 1 in the first embodiment.
  • the deposition efficiency of soot was measured when the flow rate of the raw material gas flowing through the raw material gas tube 11 and the flow rate of the auxiliary combustion gas flowing through the first auxiliary combustion gas tube 13 were changed.
  • the deposition efficiency is calculated from the weight of the soot deposited on the target during the experiment, assuming that all Si atoms contained in the raw material are SiO 2 and adhere to the target as 1.0 (100%). .
  • the diameter of the injection port 11A of the raw material gas pipe 11 was 3.6 mm, and the diameter of the injection port 13A of the first auxiliary combustible gas pipe 13 was 1.6 mm.
  • octamethylcyclotetrasiloxane was used as a raw material for the raw material gas
  • hydrogen was used as the combustible gas
  • oxygen was used as the auxiliary combustible gas
  • nitrogen was used as the seal gas.
  • the flow rate of the raw material gas was changed from 20 m / s to 35 m / s
  • the flow rate of the auxiliary combustible gas was changed from 10 m / s to 20 m / s.
  • the flow rate of the raw material gas was changed to a predetermined ratio with the flow rate of the auxiliary combustible gas.
  • the flow rate of the combustible gas was fixed at 0.15 m / s.
  • the diameter of the injection port 14A of the second auxiliary combustion gas pipe 14 is the same as the injection port 13A of the first auxiliary combustion gas pipe 13, and the flow rate of the auxiliary combustion gas flowing through the second auxiliary combustion gas pipe 14 is the first auxiliary combustion property.
  • the flow velocity is the same as that flowing through the gas pipe 13.
  • the flow rate of the seal gas was fixed at 0.3 m / s.
  • FIG. 3 is a graph showing the relationship between the gas flow rate ratio and the deposition efficiency in Example 1.
  • the deposition efficiency is 0.5 or more.
  • the flow rate ratio was within the range of 0.4 to 0.75, the deposition efficiency was 0.7 or more.
  • the flow rate ratio is within the range of 0.35 to 0.75, even if the flow rate of the source gas changes within the range of 20 g / min to 38 g / min, a deposition efficiency of 50% or more is secured. I can confirm that I can do it. Further, if the flow rate ratio is in the range of 0.4 to 0.75, even if the flow rate of the raw material gas is changed in the range of 20 g / min to 38 g / min, it is possible to ensure a deposition efficiency of 70% or more. I was able to confirm.
  • Example 2 The diameter of the injection port of the raw material gas pipe is 2.8 mm, and the other conditions are the same as in Example 1 except that the flow rate of the raw material gas flowing through the raw material gas pipe and the flow rate of the auxiliary combustion gas flowing through the first auxiliary combustion gas pipe are changed. The deposition efficiency of soot was measured.
  • FIG. 4 is a graph showing the relationship between the gas flow rate ratio and the deposition efficiency in Example 2. As shown in FIG. 4, when the ratio of the flow rate of the auxiliary combustible gas to the flow rate of the raw material gas (flow rate ratio) is within the range of 0.35 to 0.75, the deposition efficiency is 0. It became 5 or more. When the flow rate ratio was in the range of 0.4 to 0.75, the deposition efficiency was 0.7 or more, as in Example 1.
  • a multi-tube burner capable of efficiently depositing soot is provided, and can be used in industries for manufacturing optical fibers.

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  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Pre-Mixing And Non-Premixing Gas Burner (AREA)

Abstract

This multi-tube burner (1) comprises a raw material gas tube (11) for flowing a raw material gas, a flammable gas tube (15) for flowing a flammable gas, and first combustion-helping gas tubes (13) for flowing a combustion-helping gas. The ejection port (11A) of the raw material gas tube (11) and the ejection ports (13A) of the first combustion-helping gas tubes (13) are disposed on the inner side of the ejection port (15A) of the flammable gas tube (15), the ejection ports (13A) of the first combustion-helping gas tubes (13) being disposed in such a manner as to surround the ejection port (11A) of the raw material gas tube (11).

Description

多重管バーナMulti-tube burner
　本発明は、多重管バーナに関し、例えば光ファイバ母材等を製造する場合に好適なものである。 The present invention relates to a multi-tube burner, which is suitable for manufacturing, for example, an optical fiber preform.
　光ファイバ母材などを製造する場合、原料ガスを火炎と共に吹き付け、その燃焼反応により得られるガラス粒子をターゲットに堆積させる製法が用いられる。この様な製法として、例えば、ＶＡＤ法（Vapor-phase Axial Deposition）、ＯＶＤ（Outside Vapor Deposition）法、ＭＣＶＤ（Modified Chemical Vapor Deposition）法などを挙げることができる。なお、ガラス粒子はスートと呼ばれている。 When manufacturing an optical fiber preform or the like, a manufacturing method is used in which a raw material gas is sprayed with a flame and glass particles obtained by the combustion reaction are deposited on a target. Examples of such production methods include VAD (Vapor-phase Axial Deposition), OVD (Outside Vapor Deposition), and MCVD (Modified Chemical Vapor Deposition). Glass particles are called soot.
　このような多孔質ガラス堆積体の製法に用いられるバーナとして、ハロゲン化物を含有しないケイ素含有化合物を酸化させるバーナが下記特許文献１に開示されている。下記特許文献１のバーナの一面には複数の射出領域が設けられている。 As a burner used in such a method for producing a porous glass deposit, a burner that oxidizes a silicon-containing compound not containing a halide is disclosed in Patent Document 1 below. A plurality of injection regions are provided on one surface of the burner of Patent Document 1 below.
　具体的には、原料ガスであるオクタメチルシクロテトラシロキサンと助燃性ガスである酸素との混合ガスを射出させる第１領域がバーナの射出口における中央に配置され、窒素を射出させる第２領域が第１領域を囲うように設けられている。また、助燃性ガスである酸素を射出させる複数の第３領域が第２領域の周りに所定間隔で設けられ、可燃性ガスであるメタンと助燃性ガスである酸素との混合ガスを射出させる複数の第４領域が第３領域の外側に所定間隔で設けられている。 Specifically, a first region for injecting a mixed gas of octamethylcyclotetrasiloxane, which is a raw material gas, and oxygen, which is a combustible gas, is disposed at the center of the burner outlet, and a second region for injecting nitrogen is provided. It is provided so as to surround the first region. Further, a plurality of third regions for injecting oxygen, which is an auxiliary combustion gas, are provided at predetermined intervals around the second region, and a plurality of injecting a mixed gas of methane, which is an inflammable gas, and oxygen, which is an auxiliary combustion gas. The fourth region is provided outside the third region at a predetermined interval.
特表平１１－５１０７７８号公報Japanese National Patent Publication No. 11-510778
　ところで、原料ガス量が増加した場合、燃焼反応を起こした際の火炎の広がりが大きくなり、その火炎によりスートが拡散する傾向がある。上記特許文献１のバーナでは、原料ガスと助燃性ガスとの混合ガスを射出させる第１領域がバーナの射出口の最も内周側に設けられている。このため、大きく広がった火炎により第１領域よりも外周側にスートが拡散し、ターゲットに堆積するスートの堆積量が減ることが懸念される。 By the way, when the amount of the raw material gas increases, the flame spreads when the combustion reaction occurs, and soot tends to diffuse due to the flame. In the burner of the above-mentioned patent document 1, the 1st field which injects the mixed gas of source gas and auxiliary combustion gas is provided in the innermost peripheral side of the injection mouth of a burner. For this reason, there is a concern that soot spreads to the outer peripheral side of the first region due to the flame that spreads widely, and the amount of soot deposited on the target decreases.
　一方、第２領域から射出される窒素ガスの流速を大きくすれば、第１領域よりも外側にスートが拡散することが低減可能であると考えられる。しかし、窒素ガスの流速を大きくした場合、ガスの流れによってスートの温度が低くなり、ターゲットにスートが付着せずにスートの堆積量が減ることが懸念される。 On the other hand, if the flow rate of the nitrogen gas injected from the second region is increased, it is considered that soot diffusion outside the first region can be reduced. However, when the flow rate of nitrogen gas is increased, the soot temperature is lowered by the gas flow, and there is a concern that the amount of soot deposited may be reduced without the soot adhering to the target.
　そこで、本発明は、効率良くスートを堆積させ得る多重管バーナを提供するものである。 Therefore, the present invention provides a multi-tube burner capable of depositing soot efficiently.
　上記課題を解決するため、本発明の多重管バーナは、原料ガスを流す原料ガス管と、可燃性ガスを流す可燃性ガス管と、助燃性ガスを流す第１助燃性ガス管と、を備え、前記原料ガス管の射出ポート及び前記第１助燃性ガス管の射出ポートは、前記可燃性ガス管の射出ポートの内側に配置され、前記第１助燃性ガス管の射出ポートは、前記原料ガス管の射出ポートを囲むように配置されることを特徴とする。 In order to solve the above problems, a multi-tube burner of the present invention includes a raw material gas pipe for flowing a raw material gas, a flammable gas pipe for flowing a flammable gas, and a first auxiliary flammable gas pipe for flowing a flammable gas. The injection port of the raw material gas pipe and the injection port of the first auxiliary combustible gas pipe are disposed inside the injection port of the combustible gas pipe, and the injection port of the first auxiliary combustible gas pipe is the raw material gas. It is arranged to surround the injection port of the tube.
　このような多重管バーナによれば、助燃性ガスの内側で原料ガスが射出され、その助燃性ガス及び原料ガスを囲むように可燃性ガスが射出される。このため、助燃性ガスが原料ガスの拡散を抑える壁のように作用し、助燃性ガスの内側に原料ガスを閉じ込め易くなる。従って、スートが外側に拡散することを低減することができる。このようにスートが拡散することを抑制して、ターゲットに堆積するスートの堆積量の減少を抑制することができる。
　また、第１助燃性ガス管の射出ポートと原料ガス管の射出ポートとが別々に配置されているため、ガスの流速を個別に設定することが可能となる。従って、原料ガス量が増加することで火炎の広がりが大きくなっても、その広がった火炎によりスートが外側に拡散しないように第１助燃性ガス管の射出ポートから射出する助燃性ガスの流速を調整することができる。これにより、可燃性ガスの流速をさほど大きくしなくてもすみ、ガスの流れによりスートの温度が低くなることでターゲットにスートが付着しにくくなることを低減できる。この結果、ターゲットに堆積するスートの堆積量の減少を抑制することができる。
　このように本発明の多重管バーナによれば、単位原料ガス当たりのスートの堆積量を増加し得る。こうして、効率良くスートを堆積させることができる。 According to such a multi-tube burner, the raw material gas is injected inside the auxiliary combustion gas, and the combustible gas is injected so as to surround the auxiliary combustion gas and the raw material gas. For this reason, the auxiliary combustion gas acts like a wall that suppresses the diffusion of the raw material gas, and the raw material gas is easily confined inside the auxiliary combustion gas. Accordingly, it is possible to reduce the outward diffusion of the soot. Thus, it is possible to suppress the soot from diffusing, and to suppress a decrease in the amount of soot deposited on the target.
Further, since the injection port of the first auxiliary combustible gas pipe and the injection port of the raw material gas pipe are separately arranged, the gas flow rate can be set individually. Therefore, even if the spread of the flame increases as the amount of the raw material gas increases, the flow rate of the auxiliary combustion gas injected from the injection port of the first auxiliary combustion gas pipe is set so that the soot does not diffuse outward due to the expanded flame. Can be adjusted. Thus, the flow rate of the combustible gas does not need to be increased so much that the soot temperature is lowered by the gas flow, so that it is difficult for the soot to adhere to the target. As a result, it is possible to suppress a decrease in the amount of soot deposited on the target.
Thus, according to the multi-tube burner of the present invention, the amount of soot deposited per unit raw material gas can be increased. Thus, soot can be deposited efficiently.
　また、前記助燃性ガスを流す第２助燃性ガス管をさらに備え、前記第２助燃性ガス管の射出ポートは、前記可燃性ガス管の射出ポートよりも内側における前記第１助燃性ガス管の射出ポートよりも外側に配置されることが好ましい。 The second auxiliary combustible gas pipe further flows a second auxiliary combustible gas pipe, and an injection port of the second auxiliary combustible gas pipe is an inner side of the injection port of the combustible gas pipe. It is preferable that it is arranged outside the injection port.
　このようにすれば、より効率的に可燃性ガスを燃焼させることができ、ターゲットに堆積したスートの温度をコントロールすることができる。また、助燃性ガスが原料ガスを二重に囲うため、助燃性ガスの内側に原料ガスをより閉じ込め易くすることができる。 In this way, the combustible gas can be burned more efficiently and the temperature of the soot deposited on the target can be controlled. Moreover, since the auxiliary combustion gas doubles the raw material gas, the raw material gas can be more easily confined inside the auxiliary combustion gas.
　また、シールガスを流す第１シールガス管をさらに備え、前記原料ガス管の射出ポートは、前記第１シールガス管の射出ポートの内側に配置され、前記第１助燃性ガス管の射出ポートは、前記第１シールガス管の射出ポートを囲むように配置されることが好ましい。 In addition, a first seal gas pipe for flowing a seal gas is further provided, the injection port of the raw material gas pipe is disposed inside the injection port of the first seal gas pipe, and the injection port of the first auxiliary combustion gas pipe is The first sealing gas pipe is preferably disposed so as to surround the injection port.
　このようにすれば、原料ガスが外側に拡散することを抑制することができるとともに、原料ガスの射出ポート及び可燃性ガスの射出ポートから射出される原料ガスと可燃性ガスとの反応位置をシールガスの流速等により調整することができる。従って、スートが外側に拡散することをより一段と低減することができるとともに、ターゲットの適切な範囲にスートを堆積させることができる。 In this way, the raw material gas can be prevented from diffusing outward, and the reaction position between the raw material gas and the combustible gas injected from the raw material gas injection port and the combustible gas injection port is sealed. It can be adjusted by the gas flow rate or the like. Therefore, it is possible to further reduce the soot from diffusing to the outside, and to deposit the soot on an appropriate range of the target.
　また、前記原料ガス管を流れる前記原料ガスの流速と前記第１助燃性ガス管を流れる前記助燃性ガスの流速との比は、０．３５～０．７５の範囲内であることが好ましい。 Further, the ratio of the flow rate of the raw material gas flowing through the raw material gas tube and the flow rate of the auxiliary combustible gas flowing through the first auxiliary combustion gas tube is preferably within a range of 0.35 to 0.75.
　このようにすれば、原料に含まれるＳｉ原子すべてがスート（ＳｉＯ２）となってターゲットに付着した場合の堆積効率を１００％とした場合に、原料ガスの流量が所定の範囲内で変化しても、５０％以上の堆積効率を確保することができる。 In this way, the flow rate of the raw material gas changes within a predetermined range when the deposition efficiency is 100% when all Si atoms contained in the raw material become soot (SiO 2 ) and adhere to the target. However, the deposition efficiency of 50% or more can be ensured.
　また、前記比は、０．４～０．７５の範囲内であることが好ましい。 The ratio is preferably in the range of 0.4 to 0.75.
　このようにすれば、原料に含まれるＳｉ原子すべてがスート（ＳｉＯ２）となってターゲットに付着した場合の堆積効率を１００％とした場合に、原料ガスの流量が所定の範囲内で変化しても、７０％以上の堆積効率を確保することができる。 In this way, the flow rate of the raw material gas changes within a predetermined range when the deposition efficiency is 100% when all Si atoms contained in the raw material become soot (SiO 2 ) and adhere to the target. However, it is possible to ensure a deposition efficiency of 70% or more.
　また、前記原料ガス管の射出ポートは、前記第１助燃性ガス管の射出ポートの内側に配置され、前記第１助燃性ガス管の射出ポートは前記原料ガス管の射出ポートを全周に渡って囲むことが好ましい。 In addition, the injection port of the raw material gas pipe is disposed inside the injection port of the first auxiliary combustion gas pipe, and the injection port of the first auxiliary combustion gas pipe extends over the entire circumference of the injection port of the raw material gas pipe. It is preferable to surround.
　このように第１助燃性ガス管の射出ポートが原料ガス管の射出ポートを囲むことで、第１助燃性ガス管の射出ポートの射出領域が原料ガス管の射出ポートの外側を全周にわたって囲うこととなる。このため、助燃性ガスによって原料ガスの拡散をより一段と抑えることができると共に、周方向に均一な燃焼に近づけることができ、スートの発生を周方向において均一に近づけることができる。 In this way, the injection port of the first auxiliary combustion gas pipe surrounds the injection port of the raw material gas pipe, so that the injection region of the injection port of the first auxiliary combustion gas pipe surrounds the outer periphery of the injection port of the raw material gas pipe over the entire circumference. It will be. For this reason, the diffusion of the raw material gas can be further suppressed by the auxiliary combustion gas, the combustion can be made uniform in the circumferential direction, and the soot generation can be made uniform in the circumferential direction.
　また、前記第１助燃性ガス管を複数有し、複数の前記第１助燃性ガス管のそれぞれの射出ポートは、前記原料ガス管の射出ポートの周囲に所定間隔ごとに配置されるようにすることも可能である。この場合、多重管バーナの作製を容易にすることができる。 In addition, a plurality of the first auxiliary combustion gas pipes are provided, and the injection ports of the plurality of first auxiliary combustion gas pipes are arranged at predetermined intervals around the injection port of the raw material gas pipe. It is also possible. In this case, the production of the multi-tube burner can be facilitated.
　以上のように、本発明によれば、効率良くスートを堆積させ得る多重管バーナが提供される。 As described above, according to the present invention, a multi-tube burner capable of efficiently depositing soot is provided.
本発明の第１実施形態に係る多重管バーナの射出ポートをガスの射出側から見た様子を示す図である。It is a figure which shows a mode that the injection port of the multi-tube burner which concerns on 1st Embodiment of this invention was seen from the injection side of gas. 本発明の第２実施形態に係る多重管バーナの射出ポートをガスの射出側から見た様子を示す図である。It is a figure which shows a mode that the injection port of the multi-tube burner which concerns on 2nd Embodiment of this invention was seen from the injection | emission side of gas. 実施例１におけるガスの流速比と堆積効率との関係を示すグラフである。6 is a graph showing the relationship between the gas flow rate ratio and the deposition efficiency in Example 1; 実施例２におけるガスの流速比と堆積効率との関係を示すグラフである。It is a graph which shows the relationship between the flow rate ratio of the gas in Example 2, and deposition efficiency.
　以下、本発明に係る多重管バーナの好適な実施形態について図面を参照しながら詳細に説明する。 Hereinafter, a preferred embodiment of a multi-tube burner according to the present invention will be described in detail with reference to the drawings.
（第１実施形態）
　図１は、本実施形態に係る多重管バーナの射出口である射出ポートをガスの射出側から見た様子を示す図である。図１に示すように、多重管バーナ１は、原料ガス管１１と、第１シールガス管１２と、複数の第１助燃性ガス管１３と、複数の第２助燃性ガス管１４と、可燃性ガス管１５と、第２シールガス管１６とを備える。なお、図１では、視認の容易のため原料ガス管１１、第１シールガス管１２、それぞれの第１助燃性ガス管１３、それぞれの第２助燃性ガス管１４、可燃性ガス管１５、第２シールガス管１６に斜線を付して示しているが、当該斜線は管の断面を示すものではない。 (First embodiment)
FIG. 1 is a view showing a state where an injection port which is an injection port of a multi-tube burner according to the present embodiment is viewed from the gas injection side. As shown in FIG. 1, the multi-tube burner 1 includes a raw material gas pipe 11, a first seal gas pipe 12, a plurality of first auxiliary combustible gas pipes 13, a plurality of second auxiliary combustible gas pipes 14, and a combustible gas. The gas tube 15 and the second seal gas tube 16 are provided. In FIG. 1, for easy visual recognition, the raw material gas pipe 11, the first seal gas pipe 12, the respective first auxiliary gas pipes 13, the respective second auxiliary gas pipes 14, the combustible gas pipes 15, the first Although the two-seal gas pipe 16 is hatched, the hatched line does not indicate the cross section of the pipe.
　原料ガス管１１は原料ガスを流す管であり、この原料ガス管１１における射出端側とは反対の端部には連結管を介してガス供給装置が接続される。原料ガスの原料としては、例えば、オクタメチルシクロテトラシロキサン等が挙げられる。このようなオクタメチルシクロテトラシロキサンや、ヘキサメチルジシロキサン等のハロゲン化物を含有しないケイ素含有化合物が原料ガスとして用いられた場合には原料の燃焼反応により塩酸が発生しないため、当該ハロゲン化物を含有しないケイ素含有化合物は原料ガスとして好ましい。 The source gas pipe 11 is a pipe through which source gas flows, and a gas supply device is connected to the end of the source gas pipe 11 opposite to the injection end side through a connecting pipe. Examples of the raw material of the raw material gas include octamethylcyclotetrasiloxane. When silicon-containing compounds that do not contain halides such as octamethylcyclotetrasiloxane and hexamethyldisiloxane are used as a raw material gas, hydrochloric acid is not generated by the combustion reaction of the raw materials, so the halides are contained. Silicon-containing compounds that are not preferred are preferred as source gases.
　第１シールガス管１２はシールガスを流す管であり、この第１シールガス管１２における射出端側とは反対の端部には連結管を介してガス供給装置が接続される。シールガスとしては、例えば、窒素、アルゴン等の不活性ガスが挙げられる。 The first seal gas pipe 12 is a pipe through which a seal gas flows, and a gas supply device is connected to the end of the first seal gas pipe 12 opposite to the injection end side through a connecting pipe. As seal gas, inert gas, such as nitrogen and argon, is mentioned, for example.
　複数の第１助燃性ガス管１３はそれぞれ助燃性ガスを流す管である。これら第１助燃性ガス管１３の射出端側とは反対の端部には、連結管を介してガス供給装置に接続される。助燃性ガスとしては、例えば、酸素が挙げられる。 The plurality of first auxiliary combustion gas pipes 13 are pipes through which auxiliary combustion gas flows. The end of the first auxiliary combustible gas pipe 13 opposite to the injection end side is connected to a gas supply device via a connecting pipe. Examples of the auxiliary gas include oxygen.
　複数の第２助燃性ガス管１４はそれぞれ助燃性ガスを流す管である。これら第２助燃性ガス管１４における射出端側とは反対の端部には、連結管を介してガス供給装置に接続される。なお、第１助燃性ガス管１３と第２助燃性ガス管１４とは共用の連通管を介してガス供給装置に接続されていても良く、別々の連結管を介してガス供給装置に接続されていても良い。ただし、第１助燃性ガス管１３と第２助燃性ガス管１４とが別々の連結管を介してガス供給装置に接続された場合、第１助燃性ガス管１３と第２助燃性ガス管１４とで助燃性ガスの流量や種類を変えることができる。 The plural second auxiliary gas pipes 14 are pipes through which auxiliary gas flows. An end portion of the second auxiliary combustible gas pipe 14 opposite to the injection end side is connected to a gas supply device via a connecting pipe. The first auxiliary gas pipe 13 and the second auxiliary gas pipe 14 may be connected to the gas supply device via a common communication pipe, or connected to the gas supply device via separate connection pipes. May be. However, when the first auxiliary gas pipe 13 and the second auxiliary gas pipe 14 are connected to the gas supply device via separate connecting pipes, the first auxiliary gas pipe 13 and the second auxiliary gas pipe 14 are connected. The flow rate and type of auxiliary combustion gas can be changed.
　可燃性ガス管１５は可燃性ガスを流す管であり、この可燃性ガス管１５における射出端側とは反対の端部には連結管を介してガス供給装置が接続される。可燃性ガスとしては、例えば、水素、メタン等が挙げられる。 The combustible gas pipe 15 is a pipe through which combustible gas flows, and a gas supply device is connected to the end of the combustible gas pipe 15 opposite to the injection end side through a connecting pipe. Examples of the combustible gas include hydrogen and methane.
　第２シールガス管１６はシールガスを流す管であり、この第２シールガス管１６における射出端側とは反対の端部には連結管を介してガス供給装置が接続される。なお、第１シールガス管１２と第２シールガス管１６とは共用の連通管を介してガス供給装置に接続されていても良く、別々の連結管を介してガス供給装置に接続されていても良い。ただし、第１シールガス管１２と第２シールガス管１６とが別々の連結管を介してガス供給装置に接続された場合、第１シールガス管１２と第２シールガス管１６とでシールガスの流量や種類を変えることができる。 The second seal gas pipe 16 is a pipe through which seal gas flows, and a gas supply device is connected to the end of the second seal gas pipe 16 opposite to the injection end side through a connecting pipe. The first seal gas pipe 12 and the second seal gas pipe 16 may be connected to the gas supply apparatus via a common communication pipe, or connected to the gas supply apparatus via separate connection pipes. Also good. However, when the first seal gas pipe 12 and the second seal gas pipe 16 are connected to the gas supply device via separate connecting pipes, the seal gas is generated between the first seal gas pipe 12 and the second seal gas pipe 16. The flow rate and type of can be changed.
　なお、上記で説明したガス供給装置は、原料ガス管１１に原料ガスを供給し、可燃性ガス管１５に可燃性ガスを供給し、第１助燃性ガス管１３及び第２助燃性ガス管１４に助燃性ガスを供給し、第１シールガス管１２及び第２シールガス管１６にシールガスを供給する。このガス供給装置は、原料ガス、可燃性ガス、助燃性ガス、シールガスそれぞれの供給量と流速とを個別に変更できるようになっている。 Note that the gas supply apparatus described above supplies the source gas to the source gas pipe 11, supplies the combustible gas to the combustible gas pipe 15, and the first auxiliary gas pipe 13 and the second auxiliary gas pipe 14. An auxiliary combustible gas is supplied to the first seal gas pipe 12 and the second seal gas pipe 16. The gas supply device can individually change the supply amount and flow rate of the raw material gas, the combustible gas, the auxiliary combustible gas, and the seal gas.
　次に、それぞれのガス管の射出口である射出ポート１１Ａ～１６Ａの配置について説明する。それぞれの射出ポート１１Ａ～１６Ａをガスの射出側から見る場合に、それぞれの射出ポート１１Ａ～１６Ａは次のように配置される。 Next, the arrangement of the injection ports 11A to 16A that are the injection ports of the respective gas pipes will be described. When the respective injection ports 11A to 16A are viewed from the gas injection side, the respective injection ports 11A to 16A are arranged as follows.
　原料ガス管１１の射出ポート１１Ａの外周を全周にわたって囲むように、第１シールガス管１２の射出ポート１２Ａが配置される。つまり、原料ガス管１１の射出ポート１１Ａは第１シールガス管１２の射出ポート１２Ａの内側に配置される。この第１シールガス管１２の射出ポート１２Ａの外周を囲うように複数の第１助燃性ガス管１３のそれぞれの射出ポート１３Ａが所定間隔ごとに配置される。従って、複数の第１助燃性ガス管１３のそれぞれの射出ポート１３Ａは、原料ガス管１１の射出ポート１１Ａをも囲っている。また、複数の第１助燃性ガス管１３のそれぞれの射出ポート１３Ａよりも外側には、複数の第２助燃性ガス管１４のそれぞれの射出ポート１４Ａが所定間隔ごとに配置される。 The injection port 12A of the first seal gas pipe 12 is arranged so as to surround the outer periphery of the injection port 11A of the source gas pipe 11 over the entire circumference. That is, the injection port 11 </ b> A of the source gas pipe 11 is disposed inside the injection port 12 </ b> A of the first seal gas pipe 12. The injection ports 13A of the plurality of first auxiliary combustible gas pipes 13 are arranged at predetermined intervals so as to surround the outer periphery of the injection port 12A of the first seal gas pipe 12. Therefore, each injection port 13 </ b> A of the plurality of first auxiliary combustible gas pipes 13 also surrounds the injection port 11 </ b> A of the source gas pipe 11. In addition, the injection ports 14A of the plurality of second auxiliary combustion gas pipes 14 are arranged at predetermined intervals outside the injection ports 13A of the plurality of first auxiliary combustion gas pipes 13.
　本実施形態の場合、射出ポート１１Ａの中心と同じ位置を中心とし射出ポート１２Ａの直径よりも大きい直径の円上に、複数の射出ポート１３Ａが互いに等しい所定の間隔ごとに配置されており、当該円よりも大きい円上に複数の射出ポート１４Ａが互いに等しい所定の間隔ごとに配置される。 In the case of the present embodiment, a plurality of injection ports 13A are arranged at predetermined equal intervals on a circle having a diameter larger than the diameter of the injection port 12A with the same position as the center of the injection port 11A as the center. A plurality of injection ports 14A are arranged at predetermined intervals equal to each other on a circle larger than the circle.
　複数の第２助燃性ガス管１４のそれぞれの射出ポート１４Ａの外側には、これら射出ポート１４Ａを囲うように可燃性ガス管１５が配置される。つまり、上記のような位置関係で配置される原料ガス管１１の射出ポート１１Ａ、第１シールガス管１２の射出ポート１２Ａ、複数の第１助燃性ガス管１３のそれぞれの射出ポート１３Ａ、複数の第２助燃性ガス管１４のそれぞれの射出ポート１４Ａは、可燃性ガス管１５の射出ポート１５Ａの内側に配置される。また、可燃性ガス管１５の射出ポート１５Ａの外側には、射出ポート１５Ａの外周を全周にわたって囲むように、第２シールガス管１６の射出ポート１６Ａが配置される。 A combustible gas pipe 15 is disposed outside the injection ports 14A of the plurality of second auxiliary combustible gas pipes 14 so as to surround the injection ports 14A. That is, the injection port 11A of the raw material gas pipe 11, the injection port 12A of the first seal gas pipe 12, the injection ports 13A of the plurality of first auxiliary combustible gas pipes 13, the plurality of injection ports 11A arranged in the positional relationship as described above. Each injection port 14 </ b> A of the second auxiliary combustible gas pipe 14 is disposed inside the injection port 15 </ b> A of the combustible gas pipe 15. Further, the injection port 16A of the second seal gas pipe 16 is disposed outside the injection port 15A of the combustible gas pipe 15 so as to surround the outer periphery of the injection port 15A over the entire circumference.
　また、本実施形態では、多重管バーナ１の内側から外側に向かって、原料ガス管１１の射出ポート１１Ａ、第１シールガス管１２の射出ポート１２Ａ、可燃性ガス管１５の射出ポート１５Ａ、第２シールガス管１６の射出ポート１６Ａの順で、当該射出ポートが同心円状に配置されている。 Further, in the present embodiment, from the inner side to the outer side of the multi-tube burner 1, the injection port 11A of the source gas pipe 11, the injection port 12A of the first seal gas pipe 12, the injection port 15A of the combustible gas pipe 15, The injection ports are arranged concentrically in the order of the injection port 16A of the two-seal gas pipe 16.
　また、原料ガス管１１の射出ポート１１Ａにおける原料ガスの射出領域ＡＲ１の面積に比べて、可燃性ガスの射出領域ＡＲ４の面積が大きくされている。また、第１シールガス管１２の射出ポート１２Ａと第２シールガス管１６の射出ポート１６Ａとを合わせたシールガスの射出領域ＡＲ２の面積に比べて、可燃性ガスの射出領域ＡＲ４の面積が大きくされている。また、複数の第１助燃性ガス管１３のそれぞれの射出ポート１３Ａと複数の第２助燃性ガス管１４のそれぞれの射出ポート１４Ａとを合わせた助燃性ガスの射出領域ＡＲ３の面積に比べて、可燃性ガスの射出領域ＡＲ４の面積が大きくされている。なお、これら射出領域ＡＲ１～ＡＲ４はガスが射出される領域であり、可燃性ガスの射出領域ＡＲ４は、第１助燃性ガス管１３のそれぞれの射出ポート１３Ａの外周と、第２助燃性ガス管１４のそれぞれの射出ポート１４Ａの外周と、第１シールガス管１２の射出ポート１２Ａの外周とを全周にわたって囲っている。 Further, the area of the injection region AR4 of the combustible gas is made larger than the area of the injection region AR1 of the raw material gas at the injection port 11A of the raw material gas pipe 11. Further, the area of the injection region AR4 of the combustible gas is larger than the area of the injection region AR2 of the seal gas that combines the injection port 12A of the first seal gas pipe 12 and the injection port 16A of the second seal gas pipe 16. Has been. In addition, compared to the area of the injection region AR3 of the auxiliary combustion gas, which includes the injection ports 13A of the plurality of first auxiliary combustion gas pipes 13 and the injection ports 14A of the plurality of second auxiliary combustion gas pipes 14, The area of the combustible gas injection area AR4 is increased. These injection regions AR1 to AR4 are regions where gas is injected, and the combustible gas injection region AR4 includes the outer periphery of each injection port 13A of the first auxiliary combustible gas tube 13 and the second auxiliary combustible gas tube. The outer periphery of each of the 14 injection ports 14A and the outer periphery of the injection port 12A of the first seal gas pipe 12 are surrounded over the entire periphery.
　次に多重管バーナ１によるガスの燃焼とスートの生成について説明する。可燃性ガス管１５の射出ポート１５Ａから射出される可燃性ガスは、第１助燃性ガス管１３の射出ポート１３Ａから射出される助燃性ガスとともに燃焼する。この燃焼火炎内で、原料ガス管１１の射出ポート１１Ａから射出される原料ガスの燃焼反応によりスートが生成される。そして、生成されたスートがターゲットに堆積する。 Next, gas combustion and soot generation by the multi-tube burner 1 will be described. The combustible gas injected from the injection port 15 </ b> A of the combustible gas pipe 15 burns together with the auxiliary combustible gas injected from the injection port 13 </ b> A of the first auxiliary combustible gas pipe 13. In this combustion flame, soot is generated by the combustion reaction of the raw material gas injected from the injection port 11A of the raw material gas pipe 11. Then, the generated soot is deposited on the target.
　このとき、第２助燃性ガス管１４の射出ポート１４Ａから射出される助燃性ガスによってターゲットに堆積したスートの温度がコントロールされる。具体的には、第２助燃性ガス管１４の射出ポート１４Ａから射出される助燃性ガスが可燃性ガスと共に燃焼することで、温度を高くすることができる。また、第１シールガス管１２の射出ポート１２Ａから射出されるシールガスによって原料ガスが外側に拡散することを抑制することができると共に、当該シールガスの流速等によって原料ガスと可燃性ガスとの反応位置を調整することができる。さらに、第２シールガス管１６の射出ポート１６Ａから射出されるシールガスによって火炎が広がることを抑制することができ、さらに、シールガスの周りの気体に可燃性ガスが触れることを抑制することができる。 At this time, the temperature of the soot deposited on the target is controlled by the auxiliary combustion gas injected from the injection port 14A of the second auxiliary combustion gas pipe 14. Specifically, the temperature of the auxiliary combustion gas injected from the injection port 14A of the second auxiliary combustion gas pipe 14 is combusted with the combustible gas, so that the temperature can be increased. Further, the raw material gas can be prevented from diffusing outside by the seal gas injected from the injection port 12A of the first seal gas pipe 12, and the raw material gas and the flammable gas can be reduced depending on the flow rate of the seal gas. The reaction position can be adjusted. Furthermore, it is possible to suppress the flame from spreading due to the seal gas injected from the injection port 16A of the second seal gas pipe 16, and to further prevent the combustible gas from touching the gas around the seal gas. it can.
　以上のように本実施形態に係る多重管バーナ１では、原料ガス管１１の射出ポート１１Ａ及び第１助燃性ガス管１３の射出ポート１３Ａが、可燃性ガス管１５の射出ポート１５Ａの内側に配置されている。また、第１助燃性ガス管１３の射出ポート１３Ａは、第１シールガス管１２の射出ポート１２Ａを介して、原料ガス管１１の射出ポート１１Ａを囲むように配置されている。 As described above, in the multi-tube burner 1 according to the present embodiment, the injection port 11A of the source gas pipe 11 and the injection port 13A of the first auxiliary combustible gas pipe 13 are arranged inside the injection port 15A of the combustible gas pipe 15. Has been. Further, the injection port 13A of the first auxiliary combustible gas pipe 13 is disposed so as to surround the injection port 11A of the raw material gas pipe 11 via the injection port 12A of the first seal gas pipe 12.
　このような多重管バーナ１によれば、助燃性ガスの内側で原料ガスが射出され、その助燃性ガス及び原料ガスを囲むように可燃性ガスが射出される。このため、助燃性ガスが原料ガスの拡散を抑える壁のように作用して、助燃性ガスの内側に原料ガスを閉じ込め易くすることができる。従って、スートが外側に拡散することを低減することができる。これによりスートが拡散することでターゲットに堆積するスートの堆積量の減少を抑制することができる。 According to such a multi-tube burner 1, the raw material gas is injected inside the auxiliary combustion gas, and the inflammable gas is injected so as to surround the auxiliary combustion gas and the raw material gas. Therefore, the auxiliary gas acts like a wall that suppresses the diffusion of the raw material gas, so that the raw material gas can be easily confined inside the auxiliary gas. Accordingly, it is possible to reduce the outward diffusion of the soot. Accordingly, it is possible to suppress a decrease in the amount of soot deposited on the target due to the diffusion of soot.
　また、第１助燃性ガス管１３の射出ポート１３Ａと原料ガス管１１の射出ポート１１Ａとが別々に配置されているため、ガスの流速を個別に設定することが可能となる。従って、原料ガス量が増加することで火炎が大きくなっても、大きくなった火炎によりスートが外側に拡散しないように第１助燃性ガス管１３の射出ポート１３Ａから射出する助燃性ガスの流速を調整することができる。これにより、可燃性ガスの流速をさほど大きくしなくても良いので、ガスの流れによりスートの温度が低くなることでターゲットにスートが付着しにくくなることを低減できる。この結果、ターゲットに堆積するスートの堆積量の減少を抑制することができる。なお、原料ガスと可燃性ガスとの流速を個々に調整可能になるので、原料ガス量の増減に応じて最適な堆積効率を調整することもできる。 Further, since the injection port 13A of the first auxiliary combustible gas pipe 13 and the injection port 11A of the raw material gas pipe 11 are arranged separately, the gas flow rate can be set individually. Therefore, the flow rate of the auxiliary combustible gas injected from the injection port 13A of the first auxiliary combustible gas pipe 13 is set so that the soot does not diffuse to the outside due to the enlarged flame even if the flame becomes larger due to the increase in the amount of raw material gas. Can be adjusted. Accordingly, the flow rate of the combustible gas does not need to be increased so much that the soot temperature is lowered by the gas flow, so that it is difficult for the soot to adhere to the target. As a result, it is possible to suppress a decrease in the amount of soot deposited on the target. Note that since the flow rates of the source gas and the combustible gas can be individually adjusted, the optimum deposition efficiency can be adjusted according to the increase or decrease in the amount of the source gas.
　このように本実施形態に係る多重管バーナ１によれば、単位原料ガス当たりのスートの堆積量を増加し得る。こうして、効率良くスートを堆積させることができる。 Thus, according to the multi-tube burner 1 according to the present embodiment, the amount of soot deposited per unit raw material gas can be increased. Thus, soot can be deposited efficiently.
　また、本実施形態の多重管バーナ１は、助燃性ガスを流す第２助燃性ガス管１４をさらに備えている。この第２助燃性ガス管１４の射出ポート１４Ａは、可燃性ガス管１５の射出ポート１５Ａよりも内側に配置され、第１助燃性ガス管１３の射出ポート１３Ａよりも外側に配置されている。このため、より効率的に可燃性ガスを燃焼させることができ、ターゲットに堆積したスートの温度をコントロールすることができる。また、助燃性ガスが原料ガスを二重に囲うので、助燃性ガスの内側に原料ガスをより閉じ込め易くすることができる。 Moreover, the multi-tube burner 1 of the present embodiment further includes a second auxiliary combustible gas pipe 14 through which auxiliary gas flows. The injection port 14 </ b> A of the second auxiliary combustible gas pipe 14 is disposed on the inner side of the injection port 15 </ b> A of the combustible gas pipe 15, and is disposed on the outer side of the injection port 13 </ b> A of the first auxiliary combustible gas pipe 13. For this reason, combustible gas can be burned more efficiently and the temperature of the soot deposited on the target can be controlled. Moreover, since the auxiliary combustion gas doubles the raw material gas, the raw material gas can be more easily confined inside the auxiliary combustion gas.
　さらに、本実施形態の多重管バーナ１は、シールガスを流す第１シールガス管１２をさらに備え、この第１シールガス管１２の射出ポート１２Ａの内側に原料ガス管１１の射出ポート１１Ａが配置されている。このため、原料ガスが外側に拡散することを抑制することができるとともに、射出ポート１１Ａ，１５Ａから射出される原料ガスと可燃性ガスとの反応位置をシールガスの流速等により調整することができる。従って、スートが外側に拡散することをより一段と低減することができ、ターゲットの適切な範囲にスートを堆積させることができる。 Furthermore, the multi-tube burner 1 of the present embodiment further includes a first seal gas pipe 12 through which a seal gas flows, and an injection port 11A of the source gas pipe 11 is disposed inside the injection port 12A of the first seal gas pipe 12. Has been. For this reason, it is possible to suppress the diffusion of the raw material gas to the outside, and it is possible to adjust the reaction position between the raw material gas injected from the injection ports 11A and 15A and the combustible gas by the flow rate of the seal gas. . Therefore, it is possible to further reduce the soot from diffusing outward, and it is possible to deposit the soot on an appropriate range of the target.
　また、本実施形態の多重管バーナ１は、可燃性ガス管１５の射出ポート１５Ａの外周を囲うように第２シールガス管１６の射出ポート１６Ａが配置されている。従って、火炎が大きく広がることを抑制することができ、ターゲットのより適切な範囲にスートを堆積させることができる。 Further, in the multiple tube burner 1 of the present embodiment, the injection port 16A of the second seal gas pipe 16 is disposed so as to surround the outer periphery of the injection port 15A of the combustible gas pipe 15. Therefore, it is possible to suppress the flame from spreading greatly, and soot can be deposited in a more appropriate range of the target.
（第２実施形態）
　次に、本発明の第２実施形態に係る多重管バーナについて図２を参照して説明する。なお、第１実施形態と同一又は同等の構成要素については、同一の参照符号を付して特に説明する場合を除き重複する説明は省略する。 (Second Embodiment)
Next, a multi-tube burner according to a second embodiment of the present invention will be described with reference to FIG. In addition, about the component which is the same as that of 1st Embodiment, or an equivalent component, the overlapping description is abbreviate | omitted except the case where it attaches | subjects the same referential mark and demonstrates especially.
　図２は、本実施形態に係る多重管バーナの射出ポートをガスの射出側から見た様子を示す図である。図２に示すように、第２実施形態に係る多重管バーナ２は、原料ガス管１１と、第１シールガス管１２と、第１可燃性ガス管２３と、第１助燃性ガス管２４と、複数の第２助燃性ガス管１４と、第２可燃性ガス管２５と、第２シールガス管１６とを備える。すなわち、本実施形態では、第１実施形態の複数の第１助燃性ガス管１３に代えて第１助燃性ガス管２４が備えられる。また、本実施形態では、第１実施形態の可燃性ガス管１５に代えて、第１助燃性ガス管２４を隔てて内側に配置される第１可燃性ガス管２３と外側に配置される第２可燃性ガス管２５とが設けられる。なお、図２では、視認の容易のため原料ガス管１１、第１シールガス管１２、第１可燃性ガス管２３、第１助燃性ガス管２４、それぞれの第２助燃性ガス管１４、第２可燃性ガス管２５、第２シールガス管１６に斜線を付して示しているが、当該斜線は管の断面を示すものではない。 FIG. 2 is a view showing a state in which the injection port of the multi-tube burner according to the present embodiment is viewed from the gas injection side. As shown in FIG. 2, the multi-tube burner 2 according to the second embodiment includes a raw material gas pipe 11, a first seal gas pipe 12, a first combustible gas pipe 23, and a first auxiliary combustible gas pipe 24. A plurality of second auxiliary combustible gas pipes 14, a second combustible gas pipe 25, and a second seal gas pipe 16 are provided. That is, in this embodiment, it replaces with the some 1st auxiliary combustion gas pipe 13 of 1st Embodiment, and the 1st auxiliary combustion gas pipe 24 is provided. Moreover, in this embodiment, it replaces with the combustible gas pipe | tube 15 of 1st Embodiment, and the 1st combustible gas pipe | tube 23 arrange | positioned inside the 1st auxiliary | assistant combustible gas pipe 24 and the 1st arrange | positioned outside. Two combustible gas pipes 25 are provided. In FIG. 2, for easy visual recognition, the raw material gas pipe 11, the first seal gas pipe 12, the first combustible gas pipe 23, the first auxiliary combustible gas pipe 24, the second auxiliary combustible gas pipe 14, the first 2 Although the flammable gas pipe 25 and the second seal gas pipe 16 are indicated by hatching, the hatching does not indicate a cross section of the pipe.
　第１可燃性ガス管２３は第１実施形態の可燃性ガス管１５と同様に可燃性ガスを流す管であり、この第１可燃性ガス管２３における射出端側とは反対の端部には連結管を介してガス供給装置が接続される。可燃性ガスとしては、第１実施形態の可燃性ガスと同様のガスを挙げることができる。 The first combustible gas pipe 23 is a pipe through which a combustible gas flows like the combustible gas pipe 15 of the first embodiment, and the first combustible gas pipe 23 has an end opposite to the injection end side. A gas supply device is connected via the connecting pipe. As combustible gas, the gas similar to the combustible gas of 1st Embodiment can be mentioned.
　第１助燃性ガス管２４は第１実施形態の第１助燃性ガス管１３と同様にそれぞれ助燃性ガスを流す管である。この第１助燃性ガス管２４の射出端側とは反対の端部には、連結管を介してガス供給装置に接続される。助燃性ガスとしては、第１実施形態の助燃性ガスと同様のガスを挙げることができる。 The first auxiliary combustible gas pipe 24 is a pipe through which auxiliary combustible gas flows in the same manner as the first auxiliary combustible gas pipe 13 of the first embodiment. The end of the first auxiliary combustible gas pipe 24 opposite to the injection end side is connected to a gas supply device via a connecting pipe. Examples of the auxiliary combustion gas include the same gases as the auxiliary combustion gas of the first embodiment.
　第２可燃性ガス管２５は第１実施形態の可燃性ガス管１５と同様の構成とされる可燃性ガスを流す管である。可燃性ガスとしては、第１実施形態の可燃性ガスと同様のガスを挙げることができる。 The second combustible gas pipe 25 is a pipe for flowing a combustible gas having the same configuration as the combustible gas pipe 15 of the first embodiment. As combustible gas, the gas similar to the combustible gas of 1st Embodiment can be mentioned.
　次に、それぞれのガス管の射出ポートの配置について説明する。ただし、第１実施形態と同様の射出ポートの配置については、その説明を省略する。原料ガス管１１の射出ポート１１Ａ及びこれを囲う第１シールガス管１２の射出ポート１２Ａは第１可燃性ガス管２３の射出ポート２３Ａの内側に配置される。従って、第１可燃性ガス管２３の射出ポート２３Ａは、第１シールガス管１２の射出ポート１２Ａの外周を全周にわたって囲み、第１シールガス管１２の射出ポート１２Ａを介して、原料ガス管１１の射出ポート１１Ａを全周に渡って囲んでいる。 Next, the arrangement of the injection port of each gas pipe will be described. However, the description of the injection port arrangement similar to that of the first embodiment is omitted. The injection port 11 </ b> A of the source gas pipe 11 and the injection port 12 </ b> A of the first seal gas pipe 12 surrounding the raw gas pipe 11 are disposed inside the injection port 23 </ b> A of the first combustible gas pipe 23. Accordingly, the injection port 23A of the first combustible gas pipe 23 surrounds the outer periphery of the injection port 12A of the first seal gas pipe 12 over the entire circumference, and the raw material gas pipe is connected via the injection port 12A of the first seal gas pipe 12. 11 injection ports 11A are surrounded all around.
　また、第１可燃性ガス管２３の射出ポート２３Ａは第１助燃性ガス管２４の射出ポート２４Ａの内側に配置される。従って、第１助燃性ガス管２４の射出ポート２４Ａは、第１可燃性ガス管２３の射出ポート２３Ａの外周を全周にわたって囲み、第１可燃性ガス管２３の射出ポート２３Ａ及び第１シールガス管１２の射出ポート１２Ａを介して、原料ガス管１１の射出ポート１１Ａを全周に渡って囲んでいる。また、第１助燃性ガス管１３の射出ポート１３Ａの外側には、複数の第２助燃性ガス管１４のそれぞれの射出ポート１４Ａが所定間隔ごとに配置される。 Further, the injection port 23A of the first combustible gas pipe 23 is disposed inside the injection port 24A of the first auxiliary combustible gas pipe 24. Therefore, the injection port 24A of the first auxiliary combustible gas pipe 24 surrounds the entire outer periphery of the injection port 23A of the first combustible gas pipe 23, and the injection port 23A of the first combustible gas pipe 23 and the first seal gas. The injection port 11A of the source gas pipe 11 is surrounded over the entire circumference via the injection port 12A of the pipe 12. Further, outside the injection port 13A of the first auxiliary combustible gas pipe 13, the injection ports 14A of the plurality of second auxiliary gas pipes 14 are arranged at predetermined intervals.
　また、第２可燃性ガス管２５の射出ポート２５Ａは、第１助燃性ガス管２４の射出ポート２４Ａの外周を全周にわたって囲むように配置される。つまり、上記のような位置関係で配置される原料ガス管１１の射出ポート１１Ａ、第１シールガス管１２の射出ポート１２Ａ、第１可燃性ガス管２３の射出ポート２３Ａ、第１助燃性ガス管２４の射出ポート２４Ａ、複数の第２助燃性ガス管１４のそれぞれの射出ポート１４Ａは、第２可燃性ガス管２５の射出ポート１５Ａの内側に配置される。従って、第２可燃性ガス管２５の射出ポート２５Ａの内壁と、第１助燃性ガス管２４の射出ポート２４Ａの外壁との間には、複数の第２助燃性ガス管１４が配置される。 Further, the injection port 25A of the second combustible gas pipe 25 is arranged so as to surround the outer periphery of the injection port 24A of the first auxiliary combustible gas pipe 24 over the entire circumference. That is, the injection port 11A of the raw material gas pipe 11, the injection port 12A of the first seal gas pipe 12, the injection port 23A of the first combustible gas pipe 23, and the first auxiliary combustible gas pipe arranged in the above positional relationship. The 24 injection ports 24 </ b> A and the injection ports 14 </ b> A of the plurality of second auxiliary combustible gas pipes 14 are arranged inside the injection ports 15 </ b> A of the second combustible gas pipes 25. Therefore, a plurality of second auxiliary combustible gas pipes 14 are arranged between the inner wall of the injection port 25A of the second combustible gas pipe 25 and the outer wall of the injection port 24A of the first auxiliary combustible gas pipe 24.
　このような多重管バーナ２では、第１可燃性ガス管２３の射出ポート２３Ａの射出領域ＡＲ４は、第１シールガス管１２の射出ポート１２Ａの外周を全周にわたって囲っている。また、第１助燃性ガス管２４の射出ポート２４Ａの射出領域ＡＲ３は、第１可燃性ガス管２３の射出ポート２３Ａの外周を全周にわたって囲っている。従って、第１助燃性ガス管２４の射出ポート２４Ａの射出領域ＡＲ３は、第１可燃性ガス管２３の射出ポート２３Ａを介して、原料ガス管１１の射出ポート１１Ａの外周を全周にわたって囲っている。さらに、第２可燃性ガス管２５の射出ポート２５Ａの射出領域ＡＲ４は、第２助燃性ガス管１４のそれぞれの射出ポート１４Ａの外周と、第１助燃性ガス管２４の射出ポート２４Ａの外周とを全周にわたって囲っている。 In such a multi-tube burner 2, the injection region AR4 of the injection port 23A of the first combustible gas pipe 23 surrounds the outer periphery of the injection port 12A of the first seal gas pipe 12 over the entire circumference. In addition, the injection region AR3 of the injection port 24A of the first auxiliary combustible gas pipe 24 surrounds the outer periphery of the injection port 23A of the first combustible gas pipe 23 over the entire circumference. Therefore, the injection region AR3 of the injection port 24A of the first auxiliary combustible gas pipe 24 surrounds the outer periphery of the injection port 11A of the source gas pipe 11 over the entire circumference via the injection port 23A of the first combustible gas pipe 23. Yes. Further, the injection region AR4 of the injection port 25A of the second combustible gas pipe 25 includes the outer periphery of each injection port 14A of the second auxiliary combustible gas pipe 14, and the outer periphery of the injection port 24A of the first auxiliary combustible gas pipe 24. Is surrounded all around.
　このように本実施形態の多重管バーナ２によれば、第１助燃性ガス管２４の射出ポート２４Ａが原料ガス管１１の射出ポート１１Ａの外側を全周にわたって囲っている。このため、第１実施形態のように複数の第１助燃性ガス管１３のそれぞれの射出ポート１３Ａが原料ガス管１１の射出ポート１１Ａの周囲に所定間隔で配置される場合に比べ、助燃性ガスによって原料ガスの拡散をより一段と抑えることができ、また、周方向に均一な燃焼に近づけることができるのでスートの発生を周方向において均一に近づけることができる。 Thus, according to the multi-tube burner 2 of the present embodiment, the injection port 24A of the first auxiliary combustible gas pipe 24 surrounds the outside of the injection port 11A of the raw material gas pipe 11 over the entire circumference. For this reason, compared with the case where each injection port 13A of the plurality of first auxiliary combustion gas pipes 13 is arranged around the injection port 11A of the raw material gas pipe 11 at a predetermined interval as in the first embodiment, the auxiliary combustion gas Therefore, the diffusion of the raw material gas can be further suppressed, and the combustion can be made uniform in the circumferential direction, so that the soot generation can be made uniform in the circumferential direction.
　以上、本発明について、実施形態を例に説明したが、本発明はこれらに限定されるものではない。 As mentioned above, although this invention was demonstrated to the example for embodiment, this invention is not limited to these.
　例えば、上記第１実施形態の射出ポート１１Ａ～１６Ａをガスの射出側から見た場合に、射出ポート１１Ａ～１６Ａは、第１実施形態で上述した位置関係となっている限り、同一の面上に配置されていても配置されていなくても良い。同様に、上記第２実施形態の射出ポート１１Ａ、１２Ａ、２３Ａ、２４Ａ、１４Ａ、２５Ａ、１６Ａをガスの射出側から見た場合に、当該射出ポートは、第２実施形態で上述した位置関係となっている限り、同一の面上に配置されていても配置されていなくても良い。また、上記の各射出ポートが円形とされたが円形以外であっても良い。 For example, when the injection ports 11A to 16A of the first embodiment are viewed from the gas injection side, the injection ports 11A to 16A are on the same surface as long as the positional relationship described above in the first embodiment is satisfied. It does not need to be arranged even if it is arranged. Similarly, when the injection ports 11A, 12A, 23A, 24A, 14A, 25A, and 16A of the second embodiment are viewed from the gas injection side, the injection ports have the positional relationship described above in the second embodiment. As long as they are arranged, they may or may not be arranged on the same surface. Moreover, although each said injection port was made circular, it may be non-circular.
　また、上記実施形態では、第２助燃性ガス管１４、第１シールガス管１２及び第２シールガス管１６が設けられた。しかし、第２助燃性ガス管１４と第１シールガス管１２と第２シールガス管１６との全てが省略されていても良く、第２助燃性ガス管１４と第１シールガス管１２と第２シールガス管１６との１つ又は２つが省略されていても良い。 In the above embodiment, the second auxiliary gas pipe 14, the first seal gas pipe 12, and the second seal gas pipe 16 are provided. However, all of the second auxiliary combustion gas pipe 14, the first sealing gas pipe 12, and the second sealing gas pipe 16 may be omitted, and the second auxiliary combustion gas pipe 14, the first sealing gas pipe 12, and the first sealing gas pipe 12 may be omitted. One or two of the two seal gas pipes 16 may be omitted.
　以下、実施例を挙げて本発明の内容をより具体的に説明するが、本発明はこれに限定されるものでは無い。 Hereinafter, the content of the present invention will be described more specifically with reference to examples, but the present invention is not limited thereto.
（実施例１）
　上記第１実施形態における多重管バーナ１を用いてＯＶＤ法によりターゲットにスートを堆積させた。このとき、原料ガス管１１に流す原料ガスの流速と第１助燃性ガス管１３に流す助燃性ガスの流速を変化させたときのスートの堆積効率を測定した。なお、堆積効率は、原料に含まれるＳｉ原子すべてがＳｉＯ２となってターゲットに付着した場合を１．０（１００％）として、実験した際にターゲットに堆積したスートの重量より算出している。 Example 1
Soot was deposited on the target by the OVD method using the multi-tube burner 1 in the first embodiment. At this time, the deposition efficiency of soot was measured when the flow rate of the raw material gas flowing through the raw material gas tube 11 and the flow rate of the auxiliary combustion gas flowing through the first auxiliary combustion gas tube 13 were changed. The deposition efficiency is calculated from the weight of the soot deposited on the target during the experiment, assuming that all Si atoms contained in the raw material are SiO 2 and adhere to the target as 1.0 (100%). .
　なお、原料ガス管１１の射出ポート１１Ａの直径は３．６ｍｍとし、第１助燃性ガス管１３の射出ポート１３Ａの直径は１．６ｍｍとした。また、原料ガスの原料はオクタメチルシクロテトラシロキサンを用い、可燃性ガスは水素を用い、助燃性ガスは酸素を用い、シールガスは窒素を用いた。また、原料ガスの流速は２０ｍ／ｓ～３５ｍ／ｓで変化させ、助燃性ガスの流速は１０ｍ／ｓ～２０ｍ／ｓまで変化させた。 The diameter of the injection port 11A of the raw material gas pipe 11 was 3.6 mm, and the diameter of the injection port 13A of the first auxiliary combustible gas pipe 13 was 1.6 mm. In addition, octamethylcyclotetrasiloxane was used as a raw material for the raw material gas, hydrogen was used as the combustible gas, oxygen was used as the auxiliary combustible gas, and nitrogen was used as the seal gas. The flow rate of the raw material gas was changed from 20 m / s to 35 m / s, and the flow rate of the auxiliary combustible gas was changed from 10 m / s to 20 m / s.
　なお、原料ガスの流速は助燃性ガスの流速と所定の比率になるように変化させた。また、可燃性ガスの流速は０．１５ｍ／ｓで固定とした。さらに、第２助燃性ガス管１４の射出ポート１４Ａの直径は第１助燃性ガス管１３の射出ポート１３Ａと同じとし、第２助燃性ガス管１４を流れる助燃性ガスの流速は第１助燃性ガス管１３を流れる流速と同じとしている。さらに、シールガスの流速は０．３ｍ／ｓで固定とした。 Note that the flow rate of the raw material gas was changed to a predetermined ratio with the flow rate of the auxiliary combustible gas. The flow rate of the combustible gas was fixed at 0.15 m / s. Furthermore, the diameter of the injection port 14A of the second auxiliary combustion gas pipe 14 is the same as the injection port 13A of the first auxiliary combustion gas pipe 13, and the flow rate of the auxiliary combustion gas flowing through the second auxiliary combustion gas pipe 14 is the first auxiliary combustion property. The flow velocity is the same as that flowing through the gas pipe 13. Furthermore, the flow rate of the seal gas was fixed at 0.3 m / s.
　図３は、実施例１におけるガスの流速比と堆積効率との関係を示すグラフである。図３に示すように、原料ガスの流速に対する助燃性ガスの流速の比率（流速比）が０．３５～０．７５の範囲内である場合、堆積効率は０．５以上となった。また、流速比が０．４～０．７５の範囲内である場合、堆積効率は０．７以上となった。 FIG. 3 is a graph showing the relationship between the gas flow rate ratio and the deposition efficiency in Example 1. As shown in FIG. 3, when the ratio of the flow rate of the auxiliary combustible gas to the flow rate of the raw material gas (flow rate ratio) is in the range of 0.35 to 0.75, the deposition efficiency is 0.5 or more. In addition, when the flow rate ratio was within the range of 0.4 to 0.75, the deposition efficiency was 0.7 or more.
　このように、流速比が０．３５～０．７５の範囲内であれば、原料ガスの流量が２０ｇ／ｍｉｎ～３８ｇ／ｍｉｎの範囲内で変化しても、５０％以上の堆積効率を確保することができることが確認できた。また、流速比が０．４～０．７５の範囲内であれば、原料ガスの流量が２０ｇ／ｍｉｎ～３８ｇ／ｍｉｎの範囲内で変化しても、７０％以上の堆積効率を確保することができることが確認できた。 Thus, if the flow rate ratio is within the range of 0.35 to 0.75, even if the flow rate of the source gas changes within the range of 20 g / min to 38 g / min, a deposition efficiency of 50% or more is secured. I can confirm that I can do it. Further, if the flow rate ratio is in the range of 0.4 to 0.75, even if the flow rate of the raw material gas is changed in the range of 20 g / min to 38 g / min, it is possible to ensure a deposition efficiency of 70% or more. I was able to confirm.
（実施例２）
　原料ガス管の射出ポートの直径を２．８ｍｍとし、その他は実施例１と同じ条件で、原料ガス管に流す原料ガスの流速と第１助燃性ガス管に流す助燃性ガスの流速を変化させたときのスートの堆積効率を測定した。 (Example 2)
The diameter of the injection port of the raw material gas pipe is 2.8 mm, and the other conditions are the same as in Example 1 except that the flow rate of the raw material gas flowing through the raw material gas pipe and the flow rate of the auxiliary combustion gas flowing through the first auxiliary combustion gas pipe are changed. The deposition efficiency of soot was measured.
　図４は、実施例２におけるガスの流速比と堆積効率との関係を示すグラフである。図４に示すように、原料ガスの流速に対する助燃性ガスの流速の比率（流速比）が０．３５～０．７５の範囲内である場合、実施例１と同様に、堆積効率は０．５以上となった。また、流速比が０．４～０．７５の範囲内である場合、実施例１と同様に、堆積効率は０．７以上となった。 FIG. 4 is a graph showing the relationship between the gas flow rate ratio and the deposition efficiency in Example 2. As shown in FIG. 4, when the ratio of the flow rate of the auxiliary combustible gas to the flow rate of the raw material gas (flow rate ratio) is within the range of 0.35 to 0.75, the deposition efficiency is 0. It became 5 or more. When the flow rate ratio was in the range of 0.4 to 0.75, the deposition efficiency was 0.7 or more, as in Example 1.
　このように、原料ガス管の射出ポートの直径が小さい場合にも、実施例１と同じように堆積効率を確保することができることが確認できた。なお、この堆積効率には、原料ガスの流速と第１助燃性ガス管を流れる助燃性ガスの流速との比が主に寄与すると考えられる。例えば、シールガスを用い無い場合には、シールガスを用いる場合よりも原料ガスが拡散してスートが堆積する範囲が広くなる傾向にあるが、堆積効率への影響は上記原料ガスの流速に対する助燃性ガスの流速の比率の影響と比べれば小さいと考えられる。 Thus, even when the diameter of the injection port of the raw material gas pipe was small, it was confirmed that the deposition efficiency could be secured in the same manner as in Example 1. In addition, it is thought that ratio of the flow rate of raw material gas and the flow rate of the auxiliary combustion gas which flows through a 1st auxiliary combustion gas pipe | tube mainly contributes to this deposition efficiency. For example, when the seal gas is not used, the range in which the source gas diffuses and soot accumulates tends to be wider than when the seal gas is used, but the effect on the deposition efficiency is an auxiliary combustion for the flow rate of the source gas. This is considered to be small compared with the influence of the ratio of the flow rate of the sex gas.
　以上説明したように、本発明によれば、効率良くスートを堆積させ得る多重管バーナが提供され、光ファイバを製造する産業等において利用することができる。 As described above, according to the present invention, a multi-tube burner capable of efficiently depositing soot is provided, and can be used in industries for manufacturing optical fibers.
１，２・・・多重管バーナ
１１・・・原料ガス管
１２・・・第１シールガス管
１３，２４・・・第１助燃性ガス管
１４・・・第２助燃性ガス管
１５・・・可燃性ガス管
１６・・・第２シールガス管
２３・・・第１可燃性ガス管
２５・・・第２可燃性ガス管
１１Ａ・・・原料ガス管の射出ポート
１２Ａ・・・第１シールガス管の射出ポート
１３Ａ，２４Ａ・・・第１助燃性ガス管の射出ポート
１４Ａ・・・第２助燃性ガス管の射出ポート
１５Ａ・・・可燃性ガス管の射出ポート
１６Ａ・・・第２シールガス管の射出ポート
２３Ａ・・・第１可燃性ガス管の射出ポート
２５Ａ・・・第２可燃性ガス管の射出ポート 1, 2 ... Multiple pipe burner 11 ... Raw material gas pipe 12 ... First seal gas pipe 13, 24 ... First auxiliary gas pipe 14 ... Second auxiliary gas pipe 15 ... Combustible gas pipe 16 ... second seal gas pipe 23 ... first combustible gas pipe 25 ... second combustible gas pipe 11A ... injection port 12A of raw material gas pipe ... first Injection port 13A, 24A of the seal gas pipe ... Injection port 14A of the first auxiliary gas pipe ... Injection port 15A of the second auxiliary gas pipe ... Injection port 16A of the combustible gas pipe ... No. 2 seal gas pipe injection port 23A ... first combustible gas pipe injection port 25A ... second combustible gas pipe injection port

Claims (7)

  1. 　原料ガスを流す原料ガス管と、
    　可燃性ガスを流す可燃性ガス管と、
    　助燃性ガスを流す第１助燃性ガス管と、
    を備え、
    　前記原料ガス管の射出ポート及び前記第１助燃性ガス管の射出ポートは、前記可燃性ガス管の射出ポートの内側に配置され、
    　前記第１助燃性ガス管の射出ポートは、前記原料ガス管の射出ポートを囲むように配置される
    ことを特徴とする多重管バーナ。     A source gas pipe through which source gas flows,
    A combustible gas pipe for flowing a combustible gas;
    A first auxiliary gas pipe for flowing auxiliary gas,
    With
    The injection port of the source gas pipe and the injection port of the first auxiliary combustible gas pipe are disposed inside the injection port of the combustible gas pipe,
    The multi-tube burner, wherein an injection port of the first auxiliary combustible gas pipe is disposed so as to surround the injection port of the raw material gas pipe.
  2. 　前記助燃性ガスを流す第２助燃性ガス管をさらに備え、
    　前記第２助燃性ガス管の射出ポートは、前記可燃性ガス管の射出ポートの内側における前記第１助燃性ガス管の射出ポートよりも外側に配置される
    ことを特徴とする請求項１に記載の多重管バーナ。     A second auxiliary gas pipe for flowing the auxiliary gas;
    The injection port of the second auxiliary combustible gas pipe is disposed outside the injection port of the first auxiliary combustible gas pipe inside the injection port of the combustible gas pipe. Multi-tube burner.
  3. 　シールガスを流す第１シールガス管をさらに備え、
    　前記原料ガス管の射出ポートは、前記第１シールガス管の射出ポートの内側に配置され、
    　前記第１助燃性ガス管の射出ポートは、前記第１シールガス管の射出ポートを囲むように配置される
    ことを特徴とする請求項１又は２に記載の多重管バーナ。     A first seal gas pipe for flowing a seal gas;
    The injection port of the source gas pipe is disposed inside the injection port of the first seal gas pipe,
    3. The multi-tube burner according to claim 1, wherein an injection port of the first auxiliary combustible gas pipe is disposed so as to surround the injection port of the first seal gas pipe.
  4. 　前記原料ガス管を流れる前記原料ガスの流速と前記第１助燃性ガス管を流れる前記助燃性ガスの流速との比は、０．３５～０．７５の範囲内である
    ことを特徴とする請求項１～３のいずれか１項に記載の多重管バーナ。     The ratio between the flow rate of the raw material gas flowing through the raw material gas pipe and the flow rate of the auxiliary combustible gas flowing through the first auxiliary combustible gas pipe is in a range of 0.35 to 0.75. Item 4. The multi-tube burner according to any one of Items 1 to 3.
  5. 　前記比は、０．４～０．７５の範囲内である
    ことを特徴とする請求項４に記載の多重管バーナ。     The multi-tube burner according to claim 4, wherein the ratio is in the range of 0.4 to 0.75.
  6. 　前記原料ガス管の射出ポートは、前記第１助燃性ガス管の射出ポートの内側に配置される
    ことを特徴とする請求項１～５のいずれか１項に記載の多重管バーナ。     The multi-tube burner according to any one of claims 1 to 5, wherein an injection port of the source gas pipe is disposed inside an injection port of the first auxiliary combustible gas pipe.
  7. 　前記第１助燃性ガス管を複数有し、
    　複数の前記第１助燃性ガス管のそれぞれの射出ポートは、前記原料ガス管の射出ポートの周囲に所定間隔ごとに配置される
    ことを特徴とする請求項１～５のいずれか１項に記載の多重管バーナ。     A plurality of the first auxiliary combustible gas pipes;
    The injection port of each of the plurality of first auxiliary combustible gas pipes is arranged at predetermined intervals around the injection port of the raw material gas pipe. Multi-tube burner.
PCT/JP2018/001237 2017-01-31 2018-01-17 Multi-tube burner WO2018142939A1 (en)

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JP2007076957A (en) * 2005-09-14 2007-03-29 Sumitomo Electric Ind Ltd Burner for glass synthesis and method of manufacturing glass fine particle deposit using the burner
JP2016064954A (en) * 2014-09-25 2016-04-28 住友電気工業株式会社 Burner for glass fine particle deposition, and production method of glass fine particle deposited body

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WO2022014147A1 (en) * 2020-07-14 2022-01-20 株式会社フジクラ Device for manufacturing optical fiber base material and method for manufacturing optical fiber base material
JP7467638B2 (en) 2020-07-14 2024-04-15 株式会社フジクラ Optical fiber preform manufacturing apparatus and method for manufacturing optical fiber preform

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