WO2018129863A1 - Sapphire crystal growth furnace with low energy consumption - Google Patents

Sapphire crystal growth furnace with low energy consumption Download PDF

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Publication number
WO2018129863A1
WO2018129863A1 PCT/CN2017/088930 CN2017088930W WO2018129863A1 WO 2018129863 A1 WO2018129863 A1 WO 2018129863A1 CN 2017088930 W CN2017088930 W CN 2017088930W WO 2018129863 A1 WO2018129863 A1 WO 2018129863A1
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furnace body
water
furnace
crystal growth
heat exchanger
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PCT/CN2017/088930
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French (fr)
Chinese (zh)
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蔺崇召
姚刚
孙占喜
李吾臣
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许昌天戈硅业科技有限公司
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Publication of WO2018129863A1 publication Critical patent/WO2018129863A1/en

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/20—Aluminium oxides

Definitions

  • the invention relates to the technical field of sapphire preparation equipment, in particular to a low energy consumption sapphire crystal growth furnace.
  • Sapphire is a single crystal of alumina (Q-A1203), also known as corundum. In terms of color, pure alumina crystals are transparent and colorless. In the natural sapphire growth, the crystal contains Titanium ions (Ti 3+ ) and iron ions (Fe 3+ ) cause the crystal to appear blue and become blue sapphire (Blue Sapphire).
  • the sapphire crystal is very chemically stable, generally insoluble in water and free from acid and alkali corrosion, and has a high crystal hardness of 9 grades, which is second only to the hardest diamond. It has good light transmission, thermal conductivity and electrical insulation, good mechanical and mechanical properties, and has the characteristics of wear resistance and wind erosion resistance.
  • the object of the present invention is to provide a low-energy sapphire crystal growth furnace in order to solve the above-mentioned technical problems, and the heating system in the crystal growth furnace can be flexibly adjusted, and the heat of the enthalpy cooling circulating water can be reused through the heat exchanger. Used for insulation inside the furnace body.
  • a low-energy sapphire crystal growth furnace including a furnace body, a crucible, a heating system, a cooler, a heat exchanger and a controller, and a heating system for the furnace Heating inside the body, the cooler is used to cool the circulating water, and the heat exchanger has a circulating water flow path and a protective air flow path for heat exchange;
  • the inner wall and the bottom wall of the furnace body are provided with a heat insulation layer, and an upper portion of the side wall of the furnace body is provided with an air inlet hole for filling an inert protective gas into the furnace body, and a lower portion of the side wall of the furnace body is provided for pumping a venting port of the vacuum, the crucible is disposed inside the furnace body, and a through hole is formed at a top center of the furnace body through which the pulling rod is passed, and the lower end of the pulling rod passes through the through hole and is placed above the crucible, and The lower end of the pull rod is provided with a seed crystal;
  • the bottom of the crucible is provided with a cooling assembly, and the cooling assembly comprises a water-cooling tray closely attached to the bottom of the crucible and is used for supporting
  • the struts of the water-cooled tray, the inner tray of the water-cooling tray is provided with a water-cooling tube, and the bottom of the furnace body is provided with a pipe mouth at the lower end of the struts, the struts are hollow rod bodies, and the water inlet end and the water outlet end of the water-cooled tube are worn
  • the inside of the support rod is placed outside the furnace; the water outlet of the water-cooled tube is connected with a drain pipe, and the tail end of the drain pipe is divided into two branch pipes, one of which is connected to the inlet of the circulating water flow channel of the heat exchanger, and the other
  • the root branch pipe is connected to the water inlet of the cooler, and the flow control valve is disposed on the two branch pipes, and the flow control valve is connected to the controller through the wire, and the water outlet of the heat
  • the inlet pipe is connected to the inlet end of the water-cooling pipe, the inlet of the protective gas flow path of the heat exchanger is connected to the gas supply system, and the outlet of the heat-protecting gas flow path is connected to the gas inlet hole on the furnace body;
  • the heating system comprises an annular base cylinder, a heating ring and a motor for driving the base cylinder to move up and down, the annular base cylinder cover is disposed outside the crucible, the heating ring is disposed on the inner wall of the annular base cylinder, and the heating ring passes through the electric wire and the furnace
  • the heating element power supply outside the body is connected to the controller, and two furnaces are symmetrically arranged on the furnace cover of the furnace body, and the motor and the controller are connected by wires, and a pulling wire is arranged on the output shaft of the motor, and the lower end of the pulling wire is worn.
  • the furnace body is connected to the upper end of the annular base cylinder.
  • a low-energy sapphire crystal growth furnace of the present invention is provided with a temperature sensor on the pulling wire, and the temperature sensor is connected to the controller through a wire.
  • the side wall of the furnace body is also provided with an observation window.
  • the heat-insulating layer is made of zirconia.
  • the sapphire crystal growth furnace of the invention is a relatively environmentally friendly low-energy crystal growth furnace, and the heating system in the crystal growth furnace can be flexibly adjusted, and does not need to completely wrap the heating element of the crucible, but the continuous movement of the heating element can ensure that the crucible is reached.
  • the desired crystal growth temperature, the crystal growth furnace of the present invention is further provided with a heat exchanger for heat exchange between the shielding gas and the cooling circulating water, and the heat of the circulating water is used to make the shielding gas charged into the furnace body.
  • the protective gas with a certain temperature enters the furnace body, which can further improve the heat preservation effect in the furnace, and realize the reuse of the heat of the ⁇ cooling cycle water.
  • 1 is a schematic view showing the internal structure of a sapphire crystal growth furnace of the present invention
  • furnace body 2, ⁇ , 3, cooler, 4, heat exchanger, 5, insulation layer, 6, air inlet, 7, vent, 8, pull rod, 9, Seed crystal, 10, water-cooled plate, 11, pole, 12, water-cooled tube, 13, drain, 14, flow control valve, 15, inlet pipe, 16, ring base, 17, heating ring, 18, motor, 19 , pulling the line.
  • a low-energy sapphire crystal growth furnace including furnace body 1, ⁇ 2, heating system, cooler 3, heat exchanger 4 And a controller for heating the inside of the furnace body 1 for cooling the circulating water, the heat exchanger 4 having a circulating water flow path for heat exchange and a protective air flow path, the side wall of the furnace body 1 There is also an observation window.
  • the inner wall and the bottom wall of the furnace body 1 are provided with a heat insulating layer 5, and the heat insulating layer 5 is made of zirconia.
  • An air intake hole 6 for charging an inert protective gas into the furnace body 1 is disposed at an upper portion of the side wall of the furnace body 1.
  • the lower portion of the side wall of the furnace body 1 is provided with an exhaust hole 7 for evacuating, and the crucible 2 is disposed at Inside the furnace body 1, the top center of the furnace body 1 is provided with a through hole through which the pull rod 8 passes, the lower end of the pull rod 8 passes through the through hole and is placed above the crucible 2, and the lower end of the crystal rod 8 is pulled.
  • the tip is provided with a seed crystal 9.
  • the bottom of the crucible 2 is provided with a cooling assembly, and the cooling assembly comprises a water-cooling tray 10 closely attached to the bottom of the crucible 2 and a strut 11 for supporting the water-cooling tray 10.
  • the inner tray of the water-cooling tray 10 is provided with a water-cooling tube 12, and a furnace
  • the bottom of the body 1 is provided with a pipe mouth corresponding to the lower end of the strut 11, the strut 11 is a hollow rod body, and the water inlet end and the water outlet end of the water cooling pipe 12 pass through the inside of the strut 11 and are placed outside the furnace body 1;
  • the water outlet end of the water-cooling pipe 12 is connected with a drain pipe 13, and the tail end of the drain pipe 13 is divided into two branch pipes, one of which is connected to the inlet of the circulating water channel of the heat exchanger 4, and the other branch pipe is connected to the cooler.
  • the water inlet of the 3, and the flow control valve 14 is disposed on the two branch pipes, and the flow control valve 14 is connected to the controller through the wire, and the circulating water flow outlet of the heat exchanger 4 and the water outlet of the cooler 3 are collected through the pipeline.
  • the inlet pipe 15 is connected to the inlet end of the water-cooling pipe 12, the protective gas flow path inlet of the heat exchanger 4 is connected to the gas supply system, and the protective gas flow path outlet of the heat exchanger 4 is connected to the intake hole 6 on the furnace body 1.
  • the heating system includes an annular base cylinder 16, a heating ring 17, and The motor 18 for driving the base cylinder to move up and down, the annular base cylinder 16 is disposed outside the crucible 2, the heating ring 17 is disposed on the inner wall of the annular base cylinder 16, and the heating ring 17 passes through the electric wires and the heating element power supply outside the furnace body 1 and
  • the controller is connected, and two furnaces 18 are symmetrically disposed on the furnace cover of the furnace body 1.
  • the motor 18 and the controller are connected by wires, and the output shaft of the motor 18 is wound with a pulling wire 19, and the lower end of the pulling wire 19 passes through
  • the furnace body 1 is fixedly connected to the upper end of the annular base cylinder 16.
  • a temperature sensor is disposed on the pulling wire 19, and the temperature sensor is connected to the controller through a wire.
  • the sapphire crystal growth furnace of the invention is a relatively environmentally friendly low-energy crystal growth furnace, and the heating system in the crystal growth furnace can be flexibly adjusted, and does not need to completely wrap the heating element of the crucible, but the continuous movement of the heating element can ensure that the crucible is reached.
  • the desired crystal growth temperature, the crystal growth furnace of the present invention is further provided with a heat exchanger for heat exchange between the shielding gas and the cooling circulating water, and the heat of the circulating water is used to make the shielding gas charged into the furnace body.
  • the protective gas with a certain temperature enters the furnace body, which can further improve the heat preservation effect in the furnace, and realize the reuse of the heat of the ⁇ cooling cycle water.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Disclosed is a sapphire crystal growth furnace with low energy consumption, comprising a furnace body (1), a crucible (2), a heating system, a cooler (3), a heat exchanger (4), and a controller. The heating system is used for internal heating the furnace body (1). The cooler (3) is used for the cooling circulating water. The heat exchanger (4) has a circulating water flow channel and a shielding gas flow channel capable of exchanging heat. The sapphire crystal growth furnace of the present invention is an environmentally-friendly crystal growth furnace with low energy consumption, the heating system in the crystal growth furnace can be flexibly adjusted, and the crucible can be ensured to reach a required crystal growth temperature without completely covering the crucible (2) with the heating element but just keeping moving the heating element. The crystal growth furnace of the present invention is further provided with a heat exchanger (4); the heat exchanger (4) is used for heat exchange between a shielding gas and circulating cooling water. The temperature of the shielding gas introduced into the furnace body (1) rises by means of the heat of the circulating cooling water, and the shielding gas with a certain temperature enters the furnace body (1) to further improve the heat preservation effect in the furnace, so that recycling of the heat of the circulating cooling water of the crucible (2) is achieved.

Description

一种低能耗蓝宝石晶体生长炉Low energy sapphire crystal growth furnace 技术领域Technical field
本发明涉及蓝宝石制备设备技术领域，具体涉及一种低能耗蓝宝石长晶炉。The invention relates to the technical field of sapphire preparation equipment, in particular to a low energy consumption sapphire crystal growth furnace.
背景技术Background technique
蓝宝石(Sapphire)是一种氧化铝(Q-A1203)的单晶，又称为刚玉，就颜色而言，单纯的氧化铝结晶是呈现透明无色的，在自然界蓝宝石在生长时，晶体内含有钛离子(Ti3+)与铁离子(Fe3+)时，会使晶体呈现蓝色，而成为蓝色蓝宝石(Blue Sapphire)。蓝宝石晶体化学性质非常稳定，一般不溶于水和不受酸、碱腐蚀，晶体硬度很高，为莫氏硬度9级，仅次于最硬的金刚石。它具有很好的透光性，热传导性和电气绝缘性，力学机械性能好，并且具有耐磨和抗风蚀的特点。其独特的品格结构、优异的力学性能、良好的热学性能使蓝宝石晶体成为LED、大规模集成电路SOI和SOS等最为理想的衬底材料，随着现代科学技术的发展，对蓝宝石晶体材料的尺寸、质量不断提出新的要求。目前，低成本、高质量的大尺寸蓝宝石单晶具有越来越大的市场需求。Sapphire is a single crystal of alumina (Q-A1203), also known as corundum. In terms of color, pure alumina crystals are transparent and colorless. In the natural sapphire growth, the crystal contains Titanium ions (Ti 3+ ) and iron ions (Fe 3+ ) cause the crystal to appear blue and become blue sapphire (Blue Sapphire). The sapphire crystal is very chemically stable, generally insoluble in water and free from acid and alkali corrosion, and has a high crystal hardness of 9 grades, which is second only to the hardest diamond. It has good light transmission, thermal conductivity and electrical insulation, good mechanical and mechanical properties, and has the characteristics of wear resistance and wind erosion resistance. Its unique character structure, excellent mechanical properties and good thermal properties make sapphire crystal the most ideal substrate material for LED, large-scale integrated circuit SOI and SOS. With the development of modern science and technology, the size of sapphire crystal material Quality continues to demand new requirements. At present, low-cost, high-quality large-size sapphire single crystals have an increasing market demand.
随着技术进步，人工生产蓝宝石晶体的方法越来越多，但无论哪一种好方法，只有达到蓝宝石晶体的长晶温度，蓝宝石晶体才能生长，然而现有的很多长晶炉加热元件结构较为简单，若要使炉内达到2000多度的高温，保证蓝宝石晶体生长的温度，就得不停的大功率加热，对电的消耗巨大，能源浪费严重。With the advancement of technology, there are more and more methods for artificially producing sapphire crystals. However, no matter which kind of good method, only the crystallization temperature of sapphire crystal can reach the growth of sapphire crystals. However, many existing crystal growth furnaces have more heating elements. Simple, if the furnace is to reach a high temperature of more than 2,000 degrees to ensure the temperature of sapphire crystal growth, it will have to be heated at a high power, which consumes a lot of electricity and wastes energy.
发明内容Summary of the invention
本发明的目的是为解决上述技术问题的不足，提供一种低能耗蓝宝石长晶炉，长晶炉内的加热***可灵活调节，并且通过换热器可将坩埚冷却循环水的热量重新利用，用于炉体内部的保温。The object of the present invention is to provide a low-energy sapphire crystal growth furnace in order to solve the above-mentioned technical problems, and the heating system in the crystal growth furnace can be flexibly adjusted, and the heat of the enthalpy cooling circulating water can be reused through the heat exchanger. Used for insulation inside the furnace body.
本发明为解决上述技术问题的不足，所采用的技术方案是：一种低能耗蓝宝石长晶炉，包括炉体、坩埚、加热***、冷却器、换热器和控制器，加热***用于炉体内部的加热，冷却器用于冷却循环水，换热器具有可进行热交换的循环水流道和保护气流道；The invention solves the above-mentioned technical problems, and adopts the technical scheme: a low-energy sapphire crystal growth furnace, including a furnace body, a crucible, a heating system, a cooler, a heat exchanger and a controller, and a heating system for the furnace Heating inside the body, the cooler is used to cool the circulating water, and the heat exchanger has a circulating water flow path and a protective air flow path for heat exchange;
所述炉体的内壁和底壁上均设置有隔热层，炉体的侧壁上部设置有用于向炉体内部充入惰性保护气的进气孔，炉体的侧壁下部设置有用于抽真空的排气孔，所述坩埚设置在炉体内部，炉体的顶部中心位置设置可供拉晶杆穿过的通孔，拉晶杆的下端穿过该通孔并置于坩埚上方，且拉晶杆的下端端头设置有籽晶；The inner wall and the bottom wall of the furnace body are provided with a heat insulation layer, and an upper portion of the side wall of the furnace body is provided with an air inlet hole for filling an inert protective gas into the furnace body, and a lower portion of the side wall of the furnace body is provided for pumping a venting port of the vacuum, the crucible is disposed inside the furnace body, and a through hole is formed at a top center of the furnace body through which the pulling rod is passed, and the lower end of the pulling rod passes through the through hole and is placed above the crucible, and The lower end of the pull rod is provided with a seed crystal;
所述坩埚的底部设置有冷却组件，冷却组件包括与坩埚底部紧密贴合的水冷盘以及用于支撑 水冷盘的支杆，水冷盘的内部盘设有水冷管，炉体的底部对应支杆的下端处设置有管道口，所述支杆为中空杆体，水冷管的进水端和出水端均穿过支杆内部并置于炉体外；所述水冷管的出水端连接有排水管，排水管的尾端分为两根支管，其中一根支管连接至换热器的循环水流道进口，另外一根支管连接至冷却器的进水口，且两根支管上均设置有流量控制阀，流量控制阀通过导线与控制器连接，换热器的循环水流道出口和冷却器的出水口通过管道汇集后经进水管连接至水冷管的进水端，所述换热器的保护气流道进口连接至供气***，换热器的保护气流道出口连接至炉体上的进气孔；The bottom of the crucible is provided with a cooling assembly, and the cooling assembly comprises a water-cooling tray closely attached to the bottom of the crucible and is used for supporting The struts of the water-cooled tray, the inner tray of the water-cooling tray is provided with a water-cooling tube, and the bottom of the furnace body is provided with a pipe mouth at the lower end of the struts, the struts are hollow rod bodies, and the water inlet end and the water outlet end of the water-cooled tube are worn The inside of the support rod is placed outside the furnace; the water outlet of the water-cooled tube is connected with a drain pipe, and the tail end of the drain pipe is divided into two branch pipes, one of which is connected to the inlet of the circulating water flow channel of the heat exchanger, and the other The root branch pipe is connected to the water inlet of the cooler, and the flow control valve is disposed on the two branch pipes, and the flow control valve is connected to the controller through the wire, and the water outlet of the heat exchanger and the water outlet of the cooler are collected through the pipe. The inlet pipe is connected to the inlet end of the water-cooling pipe, the inlet of the protective gas flow path of the heat exchanger is connected to the gas supply system, and the outlet of the heat-protecting gas flow path is connected to the gas inlet hole on the furnace body;
所述加热***包括环形基筒、加热环以及用于驱动基筒上下移动的电机，环形基筒罩设在坩埚的外部，加热环设置在环形基筒的内壁上，且加热环通过导线与炉体外部的加热元件电源和控制器连接，所述炉体的炉盖上对称设置有两个电机，电机与控制器通过导线连接，电机的输出轴上绕设有提拉线，提拉线的下端穿过炉体并与环形基筒的上端固定连接。The heating system comprises an annular base cylinder, a heating ring and a motor for driving the base cylinder to move up and down, the annular base cylinder cover is disposed outside the crucible, the heating ring is disposed on the inner wall of the annular base cylinder, and the heating ring passes through the electric wire and the furnace The heating element power supply outside the body is connected to the controller, and two furnaces are symmetrically arranged on the furnace cover of the furnace body, and the motor and the controller are connected by wires, and a pulling wire is arranged on the output shaft of the motor, and the lower end of the pulling wire is worn. The furnace body is connected to the upper end of the annular base cylinder.
作为本发明一种低能耗蓝宝石长晶炉的进一步优化：所述提拉线上设置有温度传感器，温度传感器通过导线与控制器连接。Further optimization of a low-energy sapphire crystal growth furnace of the present invention is provided with a temperature sensor on the pulling wire, and the temperature sensor is connected to the controller through a wire.
作为本发明一种低能耗蓝宝石长晶炉的进一步优化：所述炉体的侧壁还开设有观察窗。As a further optimization of the low-energy sapphire crystal growth furnace of the present invention, the side wall of the furnace body is also provided with an observation window.
作为本发明一种低能耗蓝宝石长晶炉的进一步优化：所述隔热层的材质为氧化锆。Further optimization of a low-energy sapphire crystal growth furnace of the present invention: the heat-insulating layer is made of zirconia.
有益效果Beneficial effect
本发明的蓝宝石长晶炉为较为环保的低能耗长晶炉，长晶炉内的加热***可灵活调节，不需要完全包裹坩埚的加热元件，但是通过加热元件的不断移动，就能够保证坩埚达到所需的长晶温度，本发明的长晶炉还配有换热器，换热器用于保护气和冷却循环水之间的热量交换，利用冷却循环水的热量使充入炉体内的保护气升温，带有一定温度的保护气进入炉体内，能进一步提高炉内的保温效果，实现了坩埚冷却循环水热量的重新利用。The sapphire crystal growth furnace of the invention is a relatively environmentally friendly low-energy crystal growth furnace, and the heating system in the crystal growth furnace can be flexibly adjusted, and does not need to completely wrap the heating element of the crucible, but the continuous movement of the heating element can ensure that the crucible is reached. The desired crystal growth temperature, the crystal growth furnace of the present invention is further provided with a heat exchanger for heat exchange between the shielding gas and the cooling circulating water, and the heat of the circulating water is used to make the shielding gas charged into the furnace body. When the temperature rises, the protective gas with a certain temperature enters the furnace body, which can further improve the heat preservation effect in the furnace, and realize the reuse of the heat of the 坩埚 cooling cycle water.
附图说明DRAWINGS
图1为本发明蓝宝石长晶炉的内部结构示意图；1 is a schematic view showing the internal structure of a sapphire crystal growth furnace of the present invention;
图中标记：1、炉体，2、坩埚，3、冷却器，4、换热器，5、隔热层，6、进气孔，7、排气孔，8、拉晶杆，9、籽晶,10、水冷盘，11、支杆，12、水冷管，13、排水管，14、流量控制阀，15、进水管，16、环形基筒，17、加热环，18、电机，19、提拉线。Marked in the figure: 1, furnace body, 2, 坩埚, 3, cooler, 4, heat exchanger, 5, insulation layer, 6, air inlet, 7, vent, 8, pull rod, 9, Seed crystal, 10, water-cooled plate, 11, pole, 12, water-cooled tube, 13, drain, 14, flow control valve, 15, inlet pipe, 16, ring base, 17, heating ring, 18, motor, 19 , pulling the line.
具体实施方式detailed description
下面结合附图和实施例对本发明作进一步描述：The present invention is further described below in conjunction with the accompanying drawings and embodiments:
如图所示：一种低能耗蓝宝石长晶炉，包括炉体1、坩埚2、加热***、冷却器3、换热器4 和控制器，加热***用于炉体1内部的加热，冷却器3用于冷却循环水，换热器4具有可进行热交换的循环水流道和保护气流道，所述炉体1的侧壁还开设有观察窗。所述炉体1的内壁和底壁上均设置有隔热层5，隔热层5的材质为氧化锆。炉体1的侧壁上部设置有用于向炉体1内部充入惰性保护气的进气孔6，炉体1的侧壁下部设置有用于抽真空的排气孔7，所述坩埚2设置在炉体1内部，炉体1的顶部中心位置设置可供拉晶杆8穿过的通孔，拉晶杆8的下端穿过该通孔并置于坩埚2上方，且拉晶杆8的下端端头设置有籽晶9。As shown in the figure: a low-energy sapphire crystal growth furnace, including furnace body 1, 坩埚 2, heating system, cooler 3, heat exchanger 4 And a controller for heating the inside of the furnace body 1 for cooling the circulating water, the heat exchanger 4 having a circulating water flow path for heat exchange and a protective air flow path, the side wall of the furnace body 1 There is also an observation window. The inner wall and the bottom wall of the furnace body 1 are provided with a heat insulating layer 5, and the heat insulating layer 5 is made of zirconia. An air intake hole 6 for charging an inert protective gas into the furnace body 1 is disposed at an upper portion of the side wall of the furnace body 1. The lower portion of the side wall of the furnace body 1 is provided with an exhaust hole 7 for evacuating, and the crucible 2 is disposed at Inside the furnace body 1, the top center of the furnace body 1 is provided with a through hole through which the pull rod 8 passes, the lower end of the pull rod 8 passes through the through hole and is placed above the crucible 2, and the lower end of the crystal rod 8 is pulled. The tip is provided with a seed crystal 9.
所述坩埚2的底部设置有冷却组件，冷却组件包括与坩埚2底部紧密贴合的水冷盘10以及用于支撑水冷盘10的支杆11，水冷盘10的内部盘设有水冷管12，炉体1的底部对应支杆11的下端处设置有管道口，所述支杆11为中空杆体，水冷管12的进水端和出水端均穿过支杆11内部并置于炉体1外；所述水冷管12的出水端连接有排水管13，排水管13的尾端分为两根支管，其中一根支管连接至换热器4的循环水流道进口，另外一根支管连接至冷却器3的进水口，且两根支管上均设置有流量控制阀14，流量控制阀14通过导线与控制器连接，换热器4的循环水流道出口和冷却器3的出水口通过管道汇集后经进水管15连接至水冷管12的进水端，所述换热器4的保护气流道进口连接至供气***，换热器4的保护气流道出口连接至炉体1上的进气孔6；所述加热***包括环形基筒16、加热环17以及用于驱动基筒上下移动的电机18，环形基筒16罩设在坩埚2的外部，加热环17设置在环形基筒16的内壁上，且加热环17通过导线与炉体1外部的加热元件电源和控制器连接，所述炉体1的炉盖上对称设置有两个电机18，电机18与控制器通过导线连接，电机18的输出轴上绕设有提拉线19，提拉线19的下端穿过炉体1并与环形基筒16的上端固定连接。提拉线19上设置有温度传感器，温度传感器通过导线与控制器连接。The bottom of the crucible 2 is provided with a cooling assembly, and the cooling assembly comprises a water-cooling tray 10 closely attached to the bottom of the crucible 2 and a strut 11 for supporting the water-cooling tray 10. The inner tray of the water-cooling tray 10 is provided with a water-cooling tube 12, and a furnace The bottom of the body 1 is provided with a pipe mouth corresponding to the lower end of the strut 11, the strut 11 is a hollow rod body, and the water inlet end and the water outlet end of the water cooling pipe 12 pass through the inside of the strut 11 and are placed outside the furnace body 1; The water outlet end of the water-cooling pipe 12 is connected with a drain pipe 13, and the tail end of the drain pipe 13 is divided into two branch pipes, one of which is connected to the inlet of the circulating water channel of the heat exchanger 4, and the other branch pipe is connected to the cooler. The water inlet of the 3, and the flow control valve 14 is disposed on the two branch pipes, and the flow control valve 14 is connected to the controller through the wire, and the circulating water flow outlet of the heat exchanger 4 and the water outlet of the cooler 3 are collected through the pipeline. The inlet pipe 15 is connected to the inlet end of the water-cooling pipe 12, the protective gas flow path inlet of the heat exchanger 4 is connected to the gas supply system, and the protective gas flow path outlet of the heat exchanger 4 is connected to the intake hole 6 on the furnace body 1. The heating system includes an annular base cylinder 16, a heating ring 17, and The motor 18 for driving the base cylinder to move up and down, the annular base cylinder 16 is disposed outside the crucible 2, the heating ring 17 is disposed on the inner wall of the annular base cylinder 16, and the heating ring 17 passes through the electric wires and the heating element power supply outside the furnace body 1 and The controller is connected, and two furnaces 18 are symmetrically disposed on the furnace cover of the furnace body 1. The motor 18 and the controller are connected by wires, and the output shaft of the motor 18 is wound with a pulling wire 19, and the lower end of the pulling wire 19 passes through The furnace body 1 is fixedly connected to the upper end of the annular base cylinder 16. A temperature sensor is disposed on the pulling wire 19, and the temperature sensor is connected to the controller through a wire.
本发明的蓝宝石长晶炉为较为环保的低能耗长晶炉，长晶炉内的加热***可灵活调节，不需要完全包裹坩埚的加热元件，但是通过加热元件的不断移动，就能够保证坩埚达到所需的长晶温度，本发明的长晶炉还配有换热器，换热器用于保护气和冷却循环水之间的热量交换，利用冷却循环水的热量使充入炉体内的保护气升温，带有一定温度的保护气进入炉体内，能进一步提高炉内的保温效果，实现了坩埚冷却循环水热量的重新利用。The sapphire crystal growth furnace of the invention is a relatively environmentally friendly low-energy crystal growth furnace, and the heating system in the crystal growth furnace can be flexibly adjusted, and does not need to completely wrap the heating element of the crucible, but the continuous movement of the heating element can ensure that the crucible is reached. The desired crystal growth temperature, the crystal growth furnace of the present invention is further provided with a heat exchanger for heat exchange between the shielding gas and the cooling circulating water, and the heat of the circulating water is used to make the shielding gas charged into the furnace body. When the temperature rises, the protective gas with a certain temperature enters the furnace body, which can further improve the heat preservation effect in the furnace, and realize the reuse of the heat of the 坩埚 cooling cycle water.
以上说明对本发明而言只是说明性的，而非限制性的，本领域普通技术人员理解，在不脱离权利要求所限定的精神和范围的情况下，可作出许多修改、变化或等效，但都将落入本发明的保护范围之内。 The above description is intended to be illustrative, and not restrictive, and many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention. All will fall within the scope of protection of the present invention.

Claims (4)

  1. 一种低能耗蓝宝石长晶炉，其特征在于：包括炉体(1)、坩埚(2)、加热***、冷却器(3)、换热器(4)和控制器，加热***用于炉体(1)内部的加热，冷却器(3)用于冷却循环水，换热器(4)具有可进行热交换的循环水流道和保护气流道；A low-energy sapphire crystal growth furnace characterized by comprising a furnace body (1), a crucible (2), a heating system, a cooler (3), a heat exchanger (4) and a controller, and a heating system for the furnace body (1) internal heating, a cooler (3) for cooling circulating water, and a heat exchanger (4) having a circulating water flow path and a protective air flow path for heat exchange;
    所述炉体(1)的内壁和底壁上均设置有隔热层(5)，炉体(1)的侧壁上部设置有用于向炉体(1)内部充入惰性保护气的进气孔(6)，炉体(1)的侧壁下部设置有用于抽真空的排气孔(7)，所述坩埚(2)设置在炉体(1)内部，炉体(1)的顶部中心位置设置可供拉晶杆(8)穿过的通孔，拉晶杆(8)的下端穿过该通孔并置于坩埚(2)上方，且拉晶杆(8)的下端端头设置有籽晶(9)；The inner wall and the bottom wall of the furnace body (1) are provided with a heat insulation layer (5), and an upper portion of the side wall of the furnace body (1) is provided with an air inlet for charging an inert protective gas into the furnace body (1). The hole (6), the lower portion of the side wall of the furnace body (1) is provided with a vent hole (7) for evacuating, the raft (2) is disposed inside the furnace body (1), and the top center of the furnace body (1) Positioning a through hole through which the pull rod (8) passes, the lower end of the pull rod (8) passes through the through hole and is placed above the crucible (2), and the lower end of the pull rod (8) is disposed Seed crystal (9);
    所述坩埚(2)的底部设置有冷却组件，冷却组件包括与坩埚(2)底部紧密贴合的水冷盘(10)以及用于支撑水冷盘(10)的支杆(11)，水冷盘(10)的内部盘设有水冷管(12)，炉体(1)的底部对应支杆(11)的下端处设置有管道口，所述支杆(11)为中空杆体，水冷管(12)的进水端和出水端均穿过支杆(11)内部并置于炉体(1)外；所述水冷管(12)的出水端连接有排水管(13)，排水管(13)的尾端分为两根支管，其中一根支管连接至换热器(4)的循环水流道进口，另外一根支管连接至冷却器(3)的进水口，且两根支管上均设置有流量控制阀(14)，流量控制阀(14)通过导线与控制器连接，换热器(4)的循环水流道出口和冷却器(3)的出水口通过管道汇集后经进水管(15)连接至水冷管(12)的进水端，所述换热器(4)的保护气流道进口连接至供气***，换热器(4)的保护气流道出口连接至炉体(1)上的进气孔(6)；The bottom of the crucible (2) is provided with a cooling assembly including a water-cooling tray (10) closely fitting with the bottom of the crucible (2) and a strut (11) for supporting the water-cooling tray (10), and a water-cooling tray ( 10) The inner disc is provided with a water-cooling tube (12), and the bottom of the furnace body (1) is provided with a pipe port at a lower end of the strut (11), the strut (11) is a hollow rod body, and the water-cooling tube (12) Both the inlet end and the outlet end pass through the inside of the strut (11) and are placed outside the furnace body (1); the water outlet end of the water-cooling pipe (12) is connected with a drain pipe (13), and the drain pipe (13) The tail end is divided into two branch pipes, one of which is connected to the inlet of the circulating water channel of the heat exchanger (4), the other branch pipe is connected to the water inlet of the cooler (3), and the flow is set on both branches The control valve (14), the flow control valve (14) is connected to the controller through a wire, and the outlet of the circulating water passage of the heat exchanger (4) and the outlet of the cooler (3) are collected by the pipe and connected through the inlet pipe (15). To the inlet end of the water-cooling pipe (12), the protective gas flow path inlet of the heat exchanger (4) is connected to the gas supply system, and the protective gas flow path outlet of the heat exchanger (4) is connected to the furnace body (1) Air intake hole (6);
    所述加热***包括环形基筒(16)、加热环(17)以及用于驱动基筒上下移动的电机(18)，环形基筒(16)罩设在坩埚(2)的外部，加热环(17)设置在环形基筒(16)的内壁上，且加热环(17)通过导线与炉体(1)外部的加热元件电源和控制器连接，所述炉体(1)的炉盖上对称设置有两个电机(18)，电机(18)与控制器通过导线连接，电机(18)的输出轴上绕设有提拉线(19)，提拉线(19)的下端穿过炉体(1)并与环形基筒(16)的上端固定连接。The heating system comprises an annular base cylinder (16), a heating ring (17) and a motor (18) for driving the base cylinder to move up and down. The annular base cylinder (16) is disposed outside the crucible (2), and the heating ring ( 17) disposed on the inner wall of the annular base cylinder (16), and the heating ring (17) is connected to the heating element power supply and the controller outside the furnace body (1) through a wire, and the furnace body (1) is symmetric on the furnace cover There are two motors (18), the motor (18) and the controller are connected by wires, the output shaft of the motor (18) is wound with a pulling wire (19), and the lower end of the pulling wire (19) passes through the furnace body (1) And is fixedly connected to the upper end of the annular base cylinder (16).
  2. 如权利要求1所述的一种低能耗蓝宝石长晶炉，其特征在于：所述提拉线(19)上设置有温度传感器，温度传感器通过导线与控制器连接。A low-energy sapphire crystal growth furnace according to claim 1, wherein the pulling wire (19) is provided with a temperature sensor, and the temperature sensor is connected to the controller through a wire.
  3. 如权利要求1所述的一种低能耗蓝宝石长晶炉，其特征在于：所述炉体(1)的侧壁还开设有观察窗。A low-energy sapphire crystal growth furnace according to claim 1, characterized in that the side wall of the furnace body (1) is further provided with an observation window.
  4. 如权利要求1所述的一种低能耗蓝宝石长晶炉，其特征在于：所述隔热层(5)的材质为氧化锆。 A low-energy sapphire crystal growth furnace according to claim 1, wherein the heat insulating layer (5) is made of zirconia.
PCT/CN2017/088930 2017-01-13 2017-06-19 Sapphire crystal growth furnace with low energy consumption WO2018129863A1 (en)

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