CN102345161A - Crystal growth furnace heater and sapphire crystal growth furnace - Google Patents
Crystal growth furnace heater and sapphire crystal growth furnace Download PDFInfo
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- CN102345161A CN102345161A CN2011102658125A CN201110265812A CN102345161A CN 102345161 A CN102345161 A CN 102345161A CN 2011102658125 A CN2011102658125 A CN 2011102658125A CN 201110265812 A CN201110265812 A CN 201110265812A CN 102345161 A CN102345161 A CN 102345161A
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- well heater
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Abstract
The invention discloses a crystal growth furnace heater with a cylindrical shape. The heater comprises: a plurality of electrodes distributed annularly and arranged at one end of the cylinder; a connecting ring disposed at the other end of the cylinder; a tungsten wire mesh, one end of which is connected to each of the multiple electrodes, and the other end of which is connected to the connecting ring, thus forming a barrel cylinder. On the other hand, the invention provides a sapphire crystal growth furnace with the above heater. The heater of the invention employs a double-star loaded three-phase alternating-current power supply mode, and can improve the load balance. The tungsten wire mesh heating body can endow the heater with good uniformity, reliability and stability.
Description
Technical field
The present invention relates to a kind of crystal growing furnace well heater and sapphire crystal growth stove.
Background technology
The type of heating that sapphire crystal growth stove of the prior art adopts generally has the DC heating mode, exchanges type of heating, Frequency Induction Heating mode etc.Wherein often use in the DC heating mode kyropoulos sapphire crystal growth technology at home, often use in the sapphire crystal growth technology that the interchange type of heating is introduced abroad.The Frequency Induction Heating mode adopts coil-induced mode to control sapphire crystal growth, but is not suitable for the major diameter sapphire crystal growth.
Above-mentioned interchange type of heating mostly adopts the birdcage well heater of external single phase alternating current power supply as heating member.In the making of birdcage well heater; Heating rod may cause contact resistance different because of the length difference, and single heating rod ruptures easily, and these all can cause the problem that heating is uneven; And then causing a temperature inequality in the crystal furnace, negative consequence is difficult to compensate through other modes in this.
Summary of the invention
To the correlation technique problem of prior art, the object of the present invention is to provide a kind of crystal growing furnace well heater and sapphire crystal growth stove, to improve in the prior art a temperature uneven problem in the sapphire crystal stove.
For realizing above-mentioned purpose, the present invention provides a kind of crystal growing furnace well heater, and this well heater is tubular, comprising:
A plurality of electrodes are scattered in annular, are arranged on an end of tubular;
Shack is arranged on another end of tubular;
Tungsten silk screen, an end is connected with each electrode of a plurality of electrodes, and the other end is connected with shack, forms the cylindrical shell of tubular.
Preferably, the middle part of each electrode of a plurality of electrodes, be provided with along the radial direction of tubular and extend towards the outside of tubular add long handle.
Preferably, shack comprises the internal layer shack, and is set in the outside outer shack of internal layer shack; Wherein, tungsten silk screen is fixedly connected in the gap between internal layer shack and the outer shack.
Preferably, tungsten silk screen is interconnected by spiral helicine tungsten filament and forms.
Preferably, tungsten silk screen and each electrode and be integral solder with the mode of connection of shack.
Preferably, a plurality of electrodes comprise six electrodes, and per two electrodes are one group and form three groups of electrodes.
On the other hand, the present invention provides a kind of sapphire crystal growth stove, has above-mentioned well heater.
Preferably, a plurality of electrodes of well heater are connected with the output terminal of three-phase alternating-current supply.
Than prior art, beneficial effect of the present invention is:
(1) the present invention adopts the three-phase alternating-current supply power supply mode of double star load, can improve the harmony of load;
(2) hot face is more even.Because heating member adopts the reticulated structure of tungsten filament establishment, heater strip quantity is more than 20 times of birdcage well heater, and is careful and intensive, becomes the cylindrical surface radiations heat energy fully.Even there is a spot of tungsten filament to be damaged, the uniformity coefficient of well heater radiating surface is also made a difference hardly;
(3) reliability is high.The connecting portion of well heater all adopts integral solder technology, guarantees that the connection portion is more solid and reliable, can effectively avoid the generation of situation such as birdcage heater heats rod becomes flexible, comes off.And heater strip reticulates structure, even the tungsten filament of fracture is arranged, also can obtain the support of tungsten silk screen and keeps netted original shape;
(4) stability is stronger.Because multi-electrode supports, the fine adjustment of the concentricity of well heater keeps the nature plumbness to be difficult for taking place deformation.And reticulated structure more is rich in ductility, and easy fracture not under the condition of high temperature is guaranteed heating stability.
Description of drawings
Fig. 1 is the front view of crystal growing furnace well heater of the present invention;
Fig. 2 is the vertical view of crystal growing furnace well heater of the present invention;
Fig. 3 is the partial enlarged drawing of the I portion shown in Fig. 1;
Fig. 4 is the partial enlarged drawing of tungsten silk screen.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the invention is described.
One aspect of the present invention provides a kind of crystal growing furnace well heater.This well heater global shape is tubular, as shown in Figure 1, is the front view of well heater.An end of tubular is provided with a plurality of electrodes 1, according to embodiments of the invention, six electrodes 1 is set.Fig. 2 is the vertical view of well heater, and six electrodes 1 are scattered in annular, and per two electrodes 1 wherein are one group, are divided into into three groups, are connected with the output terminal of three-phase supply respectively.For example, two adjacent electrodes 1 are divided into one group, six electrodes 1 are divided into three groups of a, b, c, respectively with the output terminals A of three-phase supply mutually, B phase, C be connected mutually.
According to embodiments of the invention,, be provided with the protruding long handle 11 that adds in the middle part of each electrode 1 of six electrodes 1.Add outside (that is outside of above-mentioned tubular) convexity of annular that long handle 11 forms towards six electrodes 1, and extend along the radial direction of tubular.Add long handle 11 and be the connecting portion between electrode 1 and the three-phase supply.
Another end of above-mentioned tubular is provided with shack 3, and is corresponding with the ring structure that six electrodes 1 form.Well heater also comprises the tungsten silk screen 5 as heating member.As shown in Figure 1, an end of tungsten silk screen 5 is connected with each electrode 1, and the other end is connected with shack 3, forms the cylindrical shell of above-mentioned tubular.Fig. 4 is the partial enlarged drawing of tungsten silk screen 5.As shown in Figure 4, tungsten silk screen 5 is formed by connecting spiral helicine tungsten filament is interlaced.
According to embodiments of the invention, tungsten silk screen 5 is connected with the mode of each electrode 1 with integral solder, also is connected with the mode of integral solder with shack 3.Shack 3 comprises internal layer shack 31, and the outer shack 33 that is set in internal layer shack 31 outsides.Referring to Fig. 3, between internal layer shack 31 and outer shack 33, have certain clearance, the end of tungsten silk screen 5 is encapsulated in this gap and is fixedly welded in this gap.
According to above-mentioned, what well heater of the present invention adopted is the three-phase alternating-current supply power supply mode of double star load, and this mode can improve the harmony of load.The heating member that tungsten silk screen 5 forms is careful and intensive, becomes the cylindrical surface radiations heat energy fully, can make heating appliances that good homogeneous degree, reliability and stability are arranged.
The present invention provides a kind of sapphire crystal growth stove on the other hand, and this reactors is equipped with above-mentioned well heater.A plurality of electrodes 1 of well heater are connected with the output terminal of three-phase alternating-current supply, and preferred embodiment does, what connecting portion was positioned at each electrode 1 adds long handle 11 places.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. a crystal growing furnace well heater is characterized in that, said well heater is tubular, comprising:
A plurality of electrodes (1) are scattered in annular, are arranged on an end of said tubular;
Shack (3) is arranged on another end of said tubular;
Tungsten silk screen (5), an end is connected with each electrode (1) of said a plurality of electrodes (1), and the other end is connected with said shack (3), forms the cylindrical shell of said tubular.
2. well heater according to claim 1 is characterized in that, the middle part of each electrode (1) of said a plurality of electrodes (1), be provided with along the radial direction of said tubular and extend towards the outside of said tubular add long handle (11).
3. well heater according to claim 1 and 2 is characterized in that, said shack (3) comprises internal layer shack (31), and is set in the outside outer shack (33) of said internal layer shack (31);
Wherein, said tungsten silk screen (5) is fixedly connected in the gap between said internal layer shack (31) and the outer shack (33).
4. according to each described well heater among the claim 1-3, it is characterized in that said tungsten silk screen (5) is interconnected by spiral helicine tungsten filament and forms.
5. well heater according to claim 4 is characterized in that, said tungsten silk screen (5) and said each electrode (1) and be integral solder with the mode of connection of said shack (3).
6. according to each described well heater in claim 1-3 or 5, it is characterized in that said a plurality of electrodes (1) comprise six electrodes (1), per two electrodes (1) are one group and form three groups of electrodes (1).
7. a sapphire crystal growth stove is characterized in that, has each described well heater among the claim 1-6.
8. well heater according to claim 7 is characterized in that, a plurality of electrodes (1) of said well heater are connected with the output terminal of three-phase alternating-current supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011102658125A CN102345161A (en) | 2011-08-29 | 2011-08-29 | Crystal growth furnace heater and sapphire crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011102658125A CN102345161A (en) | 2011-08-29 | 2011-08-29 | Crystal growth furnace heater and sapphire crystal growth furnace |
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| Publication Number | Publication Date |
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| CN102345161A true CN102345161A (en) | 2012-02-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011102658125A Withdrawn CN102345161A (en) | 2011-08-29 | 2011-08-29 | Crystal growth furnace heater and sapphire crystal growth furnace |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102851745A (en) * | 2012-09-26 | 2013-01-02 | 南京晶升能源设备有限公司 | Sectional wolfram wire mesh heater for sapphire single crystal furnace |
| CN102978691A (en) * | 2012-12-13 | 2013-03-20 | 苏州工业园区杰士通真空技术有限公司 | Novel heating system of sapphire crystal growing furnace |
| CN103469295A (en) * | 2013-03-29 | 2013-12-25 | 浙江晶盛机电股份有限公司 | Sapphire crystal growth furnace having three heaters |
| CN104195641A (en) * | 2014-09-04 | 2014-12-10 | 南京晶升能源设备有限公司 | Riveted tungsten plate heater for sapphire single crystal furnace |
| CN105113019A (en) * | 2015-09-29 | 2015-12-02 | 何康玉 | Heating electrode with heating tungsten bars |
| CN105401220A (en) * | 2014-09-12 | 2016-03-16 | 浙江上城科技有限公司 | Method and equipment for eliminating stress of sapphire thin sheet |
| CN106835278A (en) * | 2017-01-13 | 2017-06-13 | 许昌天戈硅业科技有限公司 | A kind of crystal growth furnace heater and sapphire crystal growing furnace |
| CN106868594A (en) * | 2017-01-13 | 2017-06-20 | 许昌天戈硅业科技有限公司 | A kind of low energy consumption sapphire crystal growing furnace |
| CN113737272A (en) * | 2021-08-17 | 2021-12-03 | 浙江海纳半导体有限公司 | Three-phase alternating current heater of thermal field of czochralski monocrystalline silicon furnace and heating method thereof |
-
2011
- 2011-08-29 CN CN2011102658125A patent/CN102345161A/en not_active Withdrawn
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102851745A (en) * | 2012-09-26 | 2013-01-02 | 南京晶升能源设备有限公司 | Sectional wolfram wire mesh heater for sapphire single crystal furnace |
| CN102851745B (en) * | 2012-09-26 | 2015-08-19 | 南京晶升能源设备有限公司 | Sectional wolfram wire mesh heater for sapphire single crystal furnace |
| CN102978691A (en) * | 2012-12-13 | 2013-03-20 | 苏州工业园区杰士通真空技术有限公司 | Novel heating system of sapphire crystal growing furnace |
| CN103469295A (en) * | 2013-03-29 | 2013-12-25 | 浙江晶盛机电股份有限公司 | Sapphire crystal growth furnace having three heaters |
| CN104195641A (en) * | 2014-09-04 | 2014-12-10 | 南京晶升能源设备有限公司 | Riveted tungsten plate heater for sapphire single crystal furnace |
| CN105401220A (en) * | 2014-09-12 | 2016-03-16 | 浙江上城科技有限公司 | Method and equipment for eliminating stress of sapphire thin sheet |
| CN105113019A (en) * | 2015-09-29 | 2015-12-02 | 何康玉 | Heating electrode with heating tungsten bars |
| CN106835278A (en) * | 2017-01-13 | 2017-06-13 | 许昌天戈硅业科技有限公司 | A kind of crystal growth furnace heater and sapphire crystal growing furnace |
| CN106868594A (en) * | 2017-01-13 | 2017-06-20 | 许昌天戈硅业科技有限公司 | A kind of low energy consumption sapphire crystal growing furnace |
| CN113737272A (en) * | 2021-08-17 | 2021-12-03 | 浙江海纳半导体有限公司 | Three-phase alternating current heater of thermal field of czochralski monocrystalline silicon furnace and heating method thereof |
| CN113737272B (en) * | 2021-08-17 | 2022-05-27 | 浙江海纳半导体有限公司 | Three-phase alternating current heater of thermal field of czochralski monocrystalline silicon furnace and heating method thereof |
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Application publication date: 20120208 |