WO2017220030A1 - Method for calibrating beam spot - Google Patents

Method for calibrating beam spot Download PDF

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Publication number
WO2017220030A1
WO2017220030A1 PCT/CN2017/089866 CN2017089866W WO2017220030A1 WO 2017220030 A1 WO2017220030 A1 WO 2017220030A1 CN 2017089866 W CN2017089866 W CN 2017089866W WO 2017220030 A1 WO2017220030 A1 WO 2017220030A1
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Prior art keywords
beam spot
focus
focus value
preset
value
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PCT/CN2017/089866
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French (fr)
Chinese (zh)
Inventor
郭超
马旭龙
向虎
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天津清研智束科技有限公司
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Priority to RU2019101537A priority Critical patent/RU2722267C1/en
Publication of WO2017220030A1 publication Critical patent/WO2017220030A1/en

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/60—Analysis of geometric attributes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/80—Analysis of captured images to determine intrinsic or extrinsic camera parameters, i.e. camera calibration

Definitions

  • the present disclosure relates to a calibration method, for example, to a calibration method of a beam spot.
  • Calibration also known as calibration, correction. Even if the size, shape and position of the beam spot reaches a preset state, the state is recorded in the system.
  • the size, shape and position of the beam spot of the high energy beam may affect the quality of the processing process.
  • the size of the beam spot should be kept to a minimum to make the energy more concentrated; the beam spot size is too large, which may result in energy inconsistency, resulting in processing defects.
  • the shape of the beam spot should be kept round, and the distortion of the beam spot may result in a decrease in processing accuracy.
  • the position of the beam spot should be accurate, and the beam spot with a deviation in position may cause the processing precision to decrease. Therefore, the beam spot can be calibrated before high energy beam processing.
  • One of the calibration methods for beam spot in the related art is manual calibration, that is, manually adjusting the size, shape and position of the beam spot to a preset state.
  • Manual calibration methods can be performed with standard parts, such as marking points on standard parts, and the position of the points is precisely positioned. Adjust the beam spot to coincide with the marked point, adjust the beam spot to make it the smallest size and the roundest shape. The number of marked points can be greater than one, and the marked points can be distributed in an array.
  • Manual calibration methods rely on human experience, lack of reliability and time-consuming and laborious.
  • the calibration method for the beam spot can also be an automatic calibration, that is, relying on a computer and a sensor to adjust the size, shape and position of the beam spot to a preset state.
  • a visual sensing method can be used to capture an image by an imaging device to extract beam spot size, shape, and position information.
  • the positional information of the beam spot is difficult to extract due to the distortion of the captured image, the positional relationship of the imaging device with respect to the plane of the beam spot, and the influence of the focus on the position of the beam spot cannot be eliminated, and the position information of the beam spot is difficult to extract, and cannot be quickly Complete the calibration.
  • a calibration method for beam spot to solve the problem of insufficient reliability of the calibration method in the related art and The position information of the beam spot is difficult to extract, and the problem of calibration cannot be completed quickly.
  • a method for calibrating a beam spot comprising:
  • a functional relationship between the positional parameters of the beam spot and the focus value is generated to adjust the positional parameters of the beam spot based on the current focus value and the functional relationship.
  • the placing the beam spot in a preset state includes:
  • changing the focus value of the beam spot at least once includes:
  • the focus value of the beam spot is changed for the first time such that the position of the focus focus after the beam spot change is higher or lower than the position of the focus focus when the beam spot is in a preset state.
  • the method further includes:
  • the second change is performed. Determining a focus value of the beam spot such that a position of the focus focus after the beam spot is changed is lower than a position of the focus focus when the beam spot is in a preset state;
  • the second change is performed. Determining the focus value of the beam spot such that the position of the focus focus after the beam spot is changed is higher than when the beam spot is in a preset state The focus of the focus position.
  • the function relationship between the generated beam spot position parameter and the focus value includes:
  • a function relationship between the beam spot position parameter and the focus value is generated according to the focus value of the beam spot in the preset state and the position parameter, and the focus value of the beam spot after the focus value is changed and the new position parameter.
  • X is the coordinate control parameter of the beam spot position in the X direction
  • Y is the coordinate control parameter of the beam spot position in the Y direction
  • F is the focus value
  • k is the coefficient
  • b is a constant
  • the method further includes:
  • Corresponding preset coordinates are generated according to each of the marker points in the image.
  • the imaging device is a charge coupled device CCD camera, a complementary metal oxide semiconductor CMOS camera, an infrared camera, a near infrared camera or a far infrared camera.
  • the method further includes:
  • the beam spot corresponding to the first preset coordinate is calibrated
  • the beam spot corresponding to the next preset coordinate is calibrated until the beam spot corresponding to all the preset coordinates is calibrated.
  • the method further includes:
  • a functional relationship between the positional parameters of each beam spot and the focus value of the beam spot is generated to adjust the positional parameter of each beam spot based on the current focus value of each beam spot and a functional relationship corresponding to the beam spot.
  • the beam bundle can be realized by setting the beam spot in a preset state and generating a functional relationship between the beam spot position parameter and the focus value, and according to the function relationship and the circularity when the beam spot is in a preset state.
  • the calibration of the spot position and can calibrate the influence of the focus on the position of the beam spot, and the calibration of the beam spot can be unaffected by the image distortion, without solving the complex pose relationship between the imaging device and the plane of the beam spot.
  • the method is fast, convenient and reliable.
  • 1 is a schematic structural view of a calibration system in an embodiment
  • FIG. 2 is a flow chart showing a method of calibrating a beam spot of a high energy beam in an embodiment
  • FIG. 3 is a schematic structural view of a middle standard plate member in an embodiment
  • FIG. 4 is a schematic diagram of an image of a standard panel photographed by an imaging device in an embodiment
  • FIG. 6 is a positional relationship between a beam spot and a preset coordinate when the beam spot is adjusted to a preset coordinate in an embodiment
  • Figure 8 is a diagram showing the positional relationship between the beam spot and the preset coordinates when the beam spot focus value is changed for the second time in an embodiment.
  • the embodiment provides a calibration method for a beam spot of a high energy beam, which can calibrate the position of a beam spot of a high energy beam in the field of high energy beam processing such as additive manufacturing, and the method can be completed by a calibration system, such as As shown in FIG. 1, the calibration system may include a radiation generating device 1, a working plane 2, an imaging device 3, and a computer 4, wherein the radiation generating device 1 may generate a beam 5, which may be a laser or an electron beam, the present embodiment
  • the beam 5 is an electron beam
  • the radiation generating device 1 may have an accelerating voltage of 60 kV and a power of 0 to 10 kW, and the electron beam may be used in a high vacuum environment formed by a pump or a valve.
  • the work plane 2 is the plane on which the workpiece to be machined is placed.
  • the beam 5 is formed on the working plane 2
  • the imaging device 3 can take a beam spot on the working plane 2, and acquire an image
  • the computer 4 receives the image captured by the imaging device 3 and processes the image.
  • the computer 4 can also control the radiation generating device 1 to adjust the size, shape and position of the beam spot on the working plane 2 to achieve calibration of the beam spot position.
  • the imaging device 3 may be a Charged Coupled Device (CCD) camera, a Complementary Metal Oxide Semiconductor (CMOS) camera, an infrared camera, a near infrared camera, or a far infrared camera.
  • CCD Charged Coupled Device
  • CMOS Complementary Metal Oxide Semiconductor
  • the near-infrared camera is a camera that uses near-infrared imaging
  • the far-infrared camera is a camera that uses far-infrared imaging.
  • the wavelength of near-infrared rays can be between (0.75-1) and (2.5-3) ⁇ m; the wavelength of far infrared rays It can be located between (25-40) and 1000 ⁇ m.
  • the calibration system described above can be used on an additive manufacturing apparatus to calibrate the beam spot of the high energy beam during the additive manufacturing process.
  • the computer 4 can perform the following calibration method.
  • the calibration method of the beam spot of the high energy beam of the present embodiment may include the following steps.
  • step 100 the position of the beam spot in the image is adjusted to a preset coordinate, so that the beam spot is in a preset state, and the circularity of the beam spot in the image when the beam spot is in the preset state is recorded.
  • the shape of the beam spot in the image may be circular and elliptical.
  • the preset coordinates may be preset before being calibrated, and the method for acquiring the preset coordinates is as follows.
  • a standard plate member 6 which is in the form of a flat plate in the standard plate member 6.
  • At least one marker point 7 is disposed, and the marker point 7 may be arranged in an array, for example, may be a circular array, or an N ⁇ N array setting (for example, 5 ⁇ 5, or 7 ⁇ 7, etc.), where N is A positive integer.
  • the above marking point 7 may be a hole, a laser marking pattern, a painting or a polishing point, and the marking point 7 may be strongly contrasted with other parts of the standard panel 6, and is easily identifiable.
  • the shape of the marker point 7 may be a regular pattern such as a circle, a square or a regular polygon. Since the setting of the marker point 7 is performed on the standard panel 6, the relative position of the marker point 7 on the standard panel 6 is precise and unique.
  • the standard plate member 6 is placed on the working plane 2 of the calibration device, and the upper surface of the standard plate member 6 is photographed by the imaging device 3.
  • the imaging device 3 is photographed, the image captured by the imaging device 3 is distorted, and the captured image is as As shown in FIG. 4, the photographed standard panel 6 and the marker point 7 thereon are different from the shape of the standard panel 6 and the marker point 7, and the coordinates 8 of the marker point 7 in the image are calculated by the computer 4, in which the image is
  • the coordinate 8 may be the above-mentioned preset coordinates. Since the marker point 7 is set to at least one, the number of preset coordinates is at least one.
  • the preset coordinates may be stored in the computer 4, the relative pose between the imaging device 3 and the work plane 2 is unchanged, and the preset coordinates may not be updated.
  • the marker point 7 and the beam spot are both in the form of pixels, and the coordinates of the marker point 7 or the beam spot can be represented by the coordinates of the marker point 7 or the center of the beam spot.
  • the coordinates are in pixels and the resolution can be less than 1 pixel.
  • the image of the beam spot under the focus value is captured by the imaging device 3, and the positional relationship between the beam spot 9 and the preset coordinates is as shown in FIG. 5, where ⁇ in the figure Expressed as a preset coordinate, the beam spot size, shape, and position are in a random state, and the size, shape, and position of the beam spot 9 are calculated by the computer 4.
  • the focus value is a parameter that characterizes the focus state of the high energy beam.
  • the focus value may be the current value in the focus coil.
  • the beam spot shown in FIG. 5 is adjusted to be placed at a preset coordinate and is in a preset state (as shown in FIG. 6 ).
  • the step of causing the beam spot to be in a preset state may include:
  • the preset value depends on the shooting range and resolution of the imaging device 3 and the calculation method of the computer 4. In the embodiment, the resolution of the imaging device 3 exceeds 20 million pixels, and the preset value can be selected. It is 0.2mm, 0.1mm or 0.05mm.
  • the astigmatism, the focus value, and the position parameter of the beam spot when the beam spot is in the preset state are recorded by the computer 4, and in this embodiment, when the beam spot is in the preset state, the beam spot is
  • the position parameter may refer to the preset coordinates described above, and the position parameter of the beam spot may be a coordinate control parameter in the X and Y directions on the captured image.
  • the focus value of the beam spot is changed at least once while keeping the beam astigmatism constant.
  • the absolute value of the difference between the circularity of the current beam spot in the image and the circularity of the beam spot in the image in the preset state may be made smaller than the preset value.
  • the value changes the focus value of the beam spot. At this time, since the focus value of the beam spot changes, not only the size of the beam spot is changed, but also the position parameter of the beam spot changes accordingly.
  • the focus value of the beam spot can be changed once, and at this time, the focus value of the beam spot is changed, and the position of the focus focus after the beam spot change can be made higher or lower than the focus focus of the beam spot when the beam spot is in the preset state. Location, as shown in Figure 7.
  • the focus value of the beam spot can be changed twice, and the focus value of the beam spot is changed for the first time, so that the position of the focus focus after the beam spot is changed is higher than the focus focus when the beam spot is in the preset state.
  • the position (as shown in Fig. 7) changes the focus value of the beam spot a second time, and the changed focus focus is lower than the focus focus when the beam spot is in the preset state (as shown in Fig. 8).
  • the focus focus may be the center of the beam spot in the image.
  • step 120 a functional relationship between the positional parameters of the beam spot and the focus value is generated to adjust the positional parameters of the beam spot based on the current focus value and the functional relationship.
  • the focus value and the position parameter of the beam spot in the preset state are recorded;
  • a function relationship between the beam spot position parameter and the focus value is generated according to the focus value of the beam spot in the preset state and the position parameter, and the focus value of the beam spot after the focus value is changed and the new position parameter.
  • the focus value and the position parameter of the beam spot in the preset state, and the focus value of the beam spot after the focus value is changed, and the new position parameter are generated to generate a beam.
  • a functional relationship between the spot position parameter and the focus value is generated.
  • the focus value of the beam spot is changed twice, after the first focus value of the beam spot is changed for the first time, the first focus value of the beam spot after the first focus value change is recorded, and the position parameter is changed. Until the spot Moving to the preset coordinates, recording the first position parameter of the beam spot, after changing the first focus value of the beam spot for the second time, recording the second focus value of the beam spot after the second focus value change, and changing the position The parameter is moved until the beam spot moves to the preset coordinates, and the second position parameter of the beam spot is recorded,
  • the first focus value and the first position parameter of the beam spot after the first change of the focus value, and the beam spot after the second change of the focus value generate a functional relationship between the beam spot position parameter and the focus value.
  • the number of times the focus value is changed can also be greater than 2 times, and the more the number of times, the more accurate the functional relationship between the beam spot position parameter and the focus value.
  • the position parameter may be represented in a coordinate form in the image, and the position parameter may include parameters in two directions of X and Y, and the function relationship may be a function relationship between the focus value F and the X direction coordinate and focus.
  • the functional relationship formed between the value F and the Y direction coordinate, that is, the function relationship can be as well as Where X is the coordinate control parameter of the beam spot position in the X direction, Y is the coordinate control parameter of the beam spot position in the Y direction, F is the focus value, k is the coefficient, and b is a constant.
  • the position parameter of the beam spot of a focus value used in the manufacturing process may be determined according to the function relationship, that is, the current coordinate control parameter of the beam spot can be calculated according to the function relationship.
  • the error between the coordinates of the beam spot on the working plane and the given coordinates is small, which can improve the precision of the beam spot processing.
  • the focus value of the beam spot can be adjusted by changing the current in the focus coil, and the current adjustment in the astigmatism coil can be changed.
  • the beam spot shape adjusts the position of the beam spot by changing the current in the deflection yoke.
  • the preset coordinates may be one, and calibration of a beam spot may be completed.
  • the preset coordinates can also be multiple, and the calibration method of the beam spot can be divided into two types.
  • the beam spot corresponding to the first preset coordinate may be calibrated, that is, the operation in step 100-step 120 is performed on the beam spot corresponding to the first preset coordinate;
  • the beam spot corresponding to the next preset coordinate is calibrated, and the beam spot corresponding to the preset coordinate is also subjected to the operations in step 100-step 120;
  • the operation in step 100 can be performed on all the beam spots, that is, the position of each beam spot in the image is adjusted to the preset coordinates corresponding to the beam spot, and each beam spot is pre- Set the state, record the circularity of the beam spot in the image when each beam spot is in a preset state;
  • the focus value of each beam spot is changed, and the focus value of each beam spot is changed while keeping each beam spot astigmatism unchanged. Change at least once;
  • the above calibration method may be performed by the above computer 4, which may include a processor and a storage medium; wherein the storage medium stores executable instructions that are executed by the processor to cause the processor to perform the above Calibration method.
  • the storage medium may be a non-transitory storage medium, including: a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk, and the like.
  • the medium of the program code may also be a transient storage medium.
  • a beam spot calibration method the calibration of the beam spot is not affected by image distortion, and there is no need to solve the pose relationship between the imaging device and the plane of the beam spot.

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  • Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
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Abstract

A method for calibrating a beam spot comprises: calibrating a position of a beam spot in an image to a preset coordinate, such that the beam spot is in a preset state, and storing a circularity of the beam spot in the preset state in the image; without changing astigmatism of the beam spot, changing a focus value of the beam spot at least once; and generating a functional relation between a position parameter of the beam spot and the focus value, and adjusting the position parameter of the beam spot according to a current focus value and the functional relation.

Description

束斑的标定方法Beam spot calibration method 技术领域Technical field
本公开涉及一种标定方法，例如，涉及一种束斑的标定方法。The present disclosure relates to a calibration method, for example, to a calibration method of a beam spot.
背景技术Background technique
标定，也称作校准、矫正。即使束斑的尺寸、形状和位置达到预设的状态，并将该状态记录在***中。Calibration, also known as calibration, correction. Even if the size, shape and position of the beam spot reaches a preset state, the state is recorded in the system.
在增材制造(如，3D(Dimension)打印)等高能束加工领域，高能束的束斑的尺寸、形状和位置可能影响加工工艺的质量。例如，束斑的尺寸应维持在最小，以使得能量更加集中；束斑尺寸过大，可能导致能量不集中，造成加工缺陷。束斑的形状应保持圆形，畸变的束斑可能导致加工的精度下降。束斑的位置应准确，位置存在偏差的束斑可能导致加工的精度下降。因此，在进行高能束加工前，可以对束斑进行标定。In the field of high energy beam processing such as additive manufacturing (eg, 3D (Dimension) printing), the size, shape and position of the beam spot of the high energy beam may affect the quality of the processing process. For example, the size of the beam spot should be kept to a minimum to make the energy more concentrated; the beam spot size is too large, which may result in energy inconsistency, resulting in processing defects. The shape of the beam spot should be kept round, and the distortion of the beam spot may result in a decrease in processing accuracy. The position of the beam spot should be accurate, and the beam spot with a deviation in position may cause the processing precision to decrease. Therefore, the beam spot can be calibrated before high energy beam processing.
相关技术中对束斑的标定方法之一是手动标定，即手动调节束斑的尺寸、形状和位置使之达到预设的状态。手动标定方法可以借助一些标准零件，如在标准零件上事先做好标记点，标记点的位置是经过精确定位的。调节束斑使之与标记点重合，调节束斑使其尺寸最小、形状最圆。标记点的数量可以大于1个，标记点可以呈阵列分布。手动标定方法依赖人的经验，可靠性不足且费时费力。One of the calibration methods for beam spot in the related art is manual calibration, that is, manually adjusting the size, shape and position of the beam spot to a preset state. Manual calibration methods can be performed with standard parts, such as marking points on standard parts, and the position of the points is precisely positioned. Adjust the beam spot to coincide with the marked point, adjust the beam spot to make it the smallest size and the roundest shape. The number of marked points can be greater than one, and the marked points can be distributed in an array. Manual calibration methods rely on human experience, lack of reliability and time-consuming and laborious.
对束斑的标定方法还可以是自动化标定，即依靠计算机和传感器来调节束斑的尺寸、形状和位置使之达到预设的状态。相关技术中，可以使用视觉传感方法，通过成像设备拍摄图像，提取束斑尺寸、形状和位置信息。但是该标定方法中，由于拍摄图像的畸变、成像设备相对束斑所在平面的位姿关系难以求解、不能消除聚焦对束斑位置的影响等原因，导致束斑的位置信息难以提取，无法快速地完成标定。The calibration method for the beam spot can also be an automatic calibration, that is, relying on a computer and a sensor to adjust the size, shape and position of the beam spot to a preset state. In the related art, a visual sensing method can be used to capture an image by an imaging device to extract beam spot size, shape, and position information. However, in the calibration method, the positional information of the beam spot is difficult to extract due to the distortion of the captured image, the positional relationship of the imaging device with respect to the plane of the beam spot, and the influence of the focus on the position of the beam spot cannot be eliminated, and the position information of the beam spot is difficult to extract, and cannot be quickly Complete the calibration.
发明内容Summary of the invention
一种束斑的标定方法，以解决相关技术中标定方法存在的可靠性不足以及 束斑的位置信息难以提取，无法快速地完成标定的问题。A calibration method for beam spot to solve the problem of insufficient reliability of the calibration method in the related art and The position information of the beam spot is difficult to extract, and the problem of calibration cannot be completed quickly.
一种束斑的标定方法，包括：A method for calibrating a beam spot, comprising:
调节束斑在图像中的位置至预设坐标处，使束斑处于预设状态，记录所述束斑处于预设状态时图像中束斑的圆形度；Adjusting the position of the beam spot in the image to a preset coordinate, so that the beam spot is in a preset state, and recording the circularity of the beam spot in the image when the beam spot is in a preset state;
在保持所述束斑像散不变的情况下，改变至少一次所述束斑的聚焦值；以及Changing the focus value of the beam spot at least once while maintaining the beam astigmatism unchanged;
生成束斑的位置参数与聚焦值之间的函数关系，以根据当前聚焦值和所述函数关系调整束斑的位置参数。A functional relationship between the positional parameters of the beam spot and the focus value is generated to adjust the positional parameters of the beam spot based on the current focus value and the functional relationship.
可选的，所述使束斑处于预设状态包括：Optionally, the placing the beam spot in a preset state includes:
调整束斑的聚焦值，使所述束斑尺寸达到预设最小值；Adjusting a focus value of the beam spot such that the beam spot size reaches a preset minimum value;
调整束斑的像散，使所述束斑圆形度处于预设圆形度；以及Adjusting the astigmatism of the beam spot such that the beam circularity is at a predetermined circularity;
调整束斑的位置参数，使所述束斑的中心与预设坐标的中心之间的距离小于预设值。Adjusting the positional parameter of the beam spot such that the distance between the center of the beam spot and the center of the preset coordinates is less than a preset value.
可选的，所述在保持所述束斑像散不变的情况下，改变至少一次所述束斑的聚焦值包括：Optionally, if the beam astigmatism is kept unchanged, changing the focus value of the beam spot at least once includes:
保持所述束斑的像散不变，使图像中当前束斑的圆形度与处于预设状态时图像中束斑的圆形度的差值的绝对值小于预设值；以及Maintaining the astigmatism of the beam spot unchanged, such that the absolute value of the difference between the circularity of the current beam spot in the image and the circularity of the beam spot in the image in the preset state is less than a preset value;
第一次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置高于或低于所述束斑处于预设状态时的聚焦焦点的位置。The focus value of the beam spot is changed for the first time such that the position of the focus focus after the beam spot change is higher or lower than the position of the focus focus when the beam spot is in a preset state.
可选的，所述方法还包括：Optionally, the method further includes:
在所述第一次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置高于所述束斑处于预设状态时的聚焦焦点的位置之后，第二次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置低于所述束斑处于预设状态时的聚焦焦点的位置；或After the first change of the focus value of the beam spot such that the position of the focus focus after the beam spot is changed is higher than the position of the focus focus when the beam spot is in a preset state, the second change is performed. Determining a focus value of the beam spot such that a position of the focus focus after the beam spot is changed is lower than a position of the focus focus when the beam spot is in a preset state; or
在所述第一次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置低于所述束斑处于预设状态时的聚焦焦点的位置之后，第二次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置高于所述束斑处于预设状态时 的聚焦焦点的位置。After the first change of the focus value of the beam spot such that the position of the focus focus after the beam spot is changed is lower than the position of the focus focus when the beam spot is in a preset state, the second change is performed. Determining the focus value of the beam spot such that the position of the focus focus after the beam spot is changed is higher than when the beam spot is in a preset state The focus of the focus position.
可选的，所述生成束斑位置参数与聚焦值之间的函数关系包括：Optionally, the function relationship between the generated beam spot position parameter and the focus value includes:
记录处于预设状态时的束斑的聚焦值以及位置参数；Recording the focus value of the beam spot and the position parameter when in the preset state;
记录聚焦值改变后的束斑的聚焦值，改变位置参数直至束斑移动至预设坐标处，记录该新的位置参数；以及Recording the focus value of the beam spot after the change of the focus value, changing the position parameter until the beam spot moves to the preset coordinate, and recording the new position parameter;
根据处于预设状态时的束斑的聚焦值以及位置参数，和聚焦值改变后的束斑的聚焦值以及新的位置参数，生成束斑位置参数与聚焦值之间的函数关系。A function relationship between the beam spot position parameter and the focus value is generated according to the focus value of the beam spot in the preset state and the position parameter, and the focus value of the beam spot after the focus value is changed and the new position parameter.
可选的，所述束斑的位置参数与聚焦值之间函数关系为
Figure PCTCN2017089866-appb-000001
以及
Figure PCTCN2017089866-appb-000002
或者为(X，Y)＝f(F)，其中：Optionally, the function relationship between the position parameter of the beam spot and the focus value is
Figure PCTCN2017089866-appb-000001
as well as
Figure PCTCN2017089866-appb-000002
Or (X,Y)=f(F), where:
X为所述束斑位置在X方向上的坐标控制参数，Y为所述束斑位置在Y方向上的坐标控制参数，F为聚焦值，k为系数，b为常数，(X，Y)＝f(F)表示X、Y两个方向的坐标共同与聚焦值F之间的函数关系。X is the coordinate control parameter of the beam spot position in the X direction, Y is the coordinate control parameter of the beam spot position in the Y direction, F is the focus value, k is the coefficient, b is a constant, (X, Y) =f(F) represents a function relationship between the coordinates of the X and Y directions and the focus value F.
可选的，所述调节束斑至预设坐标处之前，所述方法还包括：Optionally, before the adjusting the beam spot to the preset coordinates, the method further includes:
在标准板件上设置至少一个标志点；Setting at least one marker point on the standard board;
通过成像装置拍摄所述标准板件的图像；Taking an image of the standard panel by an imaging device;
根据所述图像中的每个标志点生成对应的预设坐标。Corresponding preset coordinates are generated according to each of the marker points in the image.
可选的，所述成像装置为电荷耦合元件CCD相机、互补金属氧化物半导体CMOS相机、红外相机、近红外相机或者远红外相机。Optionally, the imaging device is a charge coupled device CCD camera, a complementary metal oxide semiconductor CMOS camera, an infrared camera, a near infrared camera or a far infrared camera.
可选的，所述方法还包括：Optionally, the method further includes:
所述预设坐标大于或等于两个时，对第一个预设坐标对应的束斑进行标定；以及When the preset coordinates are greater than or equal to two, the beam spot corresponding to the first preset coordinate is calibrated;
所述第一个预设坐标对应的束斑标定结束后，对下一个预设坐标对应的束斑进行标定，直至对所有的预设坐标对应的束斑标定完毕。After the beam spot calibration corresponding to the first preset coordinate is finished, the beam spot corresponding to the next preset coordinate is calibrated until the beam spot corresponding to all the preset coordinates is calibrated.
可选的，所述方法还包括：Optionally, the method further includes:
所述预设坐标大于或等于两个时，调节每个束斑在图像中的位置至所述束斑对应的预设坐标处，并使每个束斑处于预设状态，记录每个束斑处于预设状 态时图像中束斑的圆形度；When the preset coordinates are greater than or equal to two, adjust the position of each beam spot in the image to the preset coordinates corresponding to the beam spot, and make each beam spot in a preset state, and record each beam spot. Presupposed The circularity of the beam spot in the image;
在所有束斑均调节至对应的预设坐标处并处于预设状态后，保持每个束斑像散不变的情况下，改变至少一次束斑的聚焦值；以及Changing the focus value of the beam spot at least once after all beam spots are adjusted to the corresponding preset coordinates and are in a preset state, while keeping each beam spot astigmatism unchanged;
生成每个束斑的位置参数与该束斑的聚焦值之间的函数关系，以根据每个束斑的当前聚焦值和该束斑对应的函数关系调整每个束斑的位置参数。以上技术方案中，通过使束斑处于预设状态以及生成束斑位置参数与聚焦值之间的函数关系，并根据该函数关系以及束斑处于预设状态时的圆形度，能够实现对束斑位置的标定，并可以标定聚焦对束斑位置的影响，在对束斑进行标定时可以不受图像畸变的影响，无需求解成像装置相对束斑所在平面之间的复杂的位姿关系，该方法具有快速、方便、可靠的特点。A functional relationship between the positional parameters of each beam spot and the focus value of the beam spot is generated to adjust the positional parameter of each beam spot based on the current focus value of each beam spot and a functional relationship corresponding to the beam spot. In the above technical solution, the beam bundle can be realized by setting the beam spot in a preset state and generating a functional relationship between the beam spot position parameter and the focus value, and according to the function relationship and the circularity when the beam spot is in a preset state. The calibration of the spot position, and can calibrate the influence of the focus on the position of the beam spot, and the calibration of the beam spot can be unaffected by the image distortion, without solving the complex pose relationship between the imaging device and the plane of the beam spot. The method is fast, convenient and reliable.
附图说明DRAWINGS
图1是一实施例中的标定***的结构示意图；1 is a schematic structural view of a calibration system in an embodiment;
图2是一实施例中高能束的束斑的标定方法的流程图；2 is a flow chart showing a method of calibrating a beam spot of a high energy beam in an embodiment;
图3是一实施例中中标准板件的结构示意图；3 is a schematic structural view of a middle standard plate member in an embodiment;
图4是一实施例中中成像装置拍摄的标准板件的图像示意图；4 is a schematic diagram of an image of a standard panel photographed by an imaging device in an embodiment;
图5是一实施例中未调节束斑时束斑与预设坐标之间的位置关系；5 is a positional relationship between a beam spot and a preset coordinate when the beam spot is not adjusted in an embodiment;
图6是一实施例中调节束斑至预设坐标处时束斑与预设坐标之间的位置关系；6 is a positional relationship between a beam spot and a preset coordinate when the beam spot is adjusted to a preset coordinate in an embodiment;
图7是一实施例中第一次改变束斑聚焦值时束斑与预设坐标之间的位置关系；以及7 is a positional relationship between a beam spot and a preset coordinate when the beam spot focus value is changed for the first time in an embodiment;
图8是一实施例中第二次改变束斑聚焦值时束斑与预设坐标之间的位置关系。Figure 8 is a diagram showing the positional relationship between the beam spot and the preset coordinates when the beam spot focus value is changed for the second time in an embodiment.
图中：In the picture:
1、射线发生装置；2、工作平面；3、成像装置；4、计算机；5、射线束；6、标准板件；7、标志点；8、坐标；9、束斑。 1, ray generating device; 2, working plane; 3, imaging device; 4, computer; 5, beam; 6, standard plate; 7, marking points; 8, coordinates; 9, beam spots.
具体实施方式detailed description
下面结合附图并通过具体实施方式来说明以下技术方案。在不冲突的情况下，以下实施例以及实施例中的技术特征可以相互任意组合。The following technical solutions are described below with reference to the accompanying drawings and specific embodiments. The technical features in the following embodiments and the embodiments may be arbitrarily combined with each other without conflict.
本实施例提供一种高能束的束斑的标定方法，该方法可以对增材制造等高能束加工领域中的高能束的束斑的位置进行标定，该方法可以通过一种标定***完成，如图1所示，该标定***可以包括射线发生装置1、工作平面2、成像装置3以及计算机4，其中射线发生装置1可以产生射线束5，该射线束5可以是激光或者电子束，本实施例射线束5为电子束，上述射线发生装置1的加速电压可以为60kV，功率可以为0-10kW，并且上述电子束可以是在泵、阀的作用下形成的高真空环境中使用。工作平面2是放置需要加工的工件的平面。The embodiment provides a calibration method for a beam spot of a high energy beam, which can calibrate the position of a beam spot of a high energy beam in the field of high energy beam processing such as additive manufacturing, and the method can be completed by a calibration system, such as As shown in FIG. 1, the calibration system may include a radiation generating device 1, a working plane 2, an imaging device 3, and a computer 4, wherein the radiation generating device 1 may generate a beam 5, which may be a laser or an electron beam, the present embodiment For example, the beam 5 is an electron beam, and the radiation generating device 1 may have an accelerating voltage of 60 kV and a power of 0 to 10 kW, and the electron beam may be used in a high vacuum environment formed by a pump or a valve. The work plane 2 is the plane on which the workpiece to be machined is placed.
可选的，上述射线束5在工作平面2上形成束斑，成像装置3可以拍摄工作平面2上的束斑，并获取图像，计算机4接收成像装置3拍摄的图像，并对该图像进行处理，计算机4还可以控制射线发生装置1，以调整射线束斑的尺寸、形状以及在工作平面2上的位置，实现对束斑位置的标定。Optionally, the beam 5 is formed on the working plane 2, the imaging device 3 can take a beam spot on the working plane 2, and acquire an image, and the computer 4 receives the image captured by the imaging device 3 and processes the image. The computer 4 can also control the radiation generating device 1 to adjust the size, shape and position of the beam spot on the working plane 2 to achieve calibration of the beam spot position.
本实施例中，上述成像装置3可以是电荷耦合元件(Charged Coupled Device，CCD)相机、互补金属氧化物半导体(Complementary Metal Oxide Semiconductor，CMOS)相机、红外相机、近红外相机或远红外相机。其中，近红外相机是利用近红外线成像的相机，远红外相机是利用远红外线成像的相机，近红外线的波长可以位于为(0.75-1)～(2.5-3)μm之间；远红外线的波长可以位于(25-40)～1000μm之间。In this embodiment, the imaging device 3 may be a Charged Coupled Device (CCD) camera, a Complementary Metal Oxide Semiconductor (CMOS) camera, an infrared camera, a near infrared camera, or a far infrared camera. Among them, the near-infrared camera is a camera that uses near-infrared imaging, and the far-infrared camera is a camera that uses far-infrared imaging. The wavelength of near-infrared rays can be between (0.75-1) and (2.5-3) μm; the wavelength of far infrared rays It can be located between (25-40) and 1000 μm.
本实施例中，上述标定***可以用于增材制造装置上，可以对增材制造过程中高能束的束斑进行标定。计算机4可以执行以下的标定方法。In this embodiment, the calibration system described above can be used on an additive manufacturing apparatus to calibrate the beam spot of the high energy beam during the additive manufacturing process. The computer 4 can perform the following calibration method.
如图2所示，本实施例的高能束的束斑的标定方法可以包括以下步骤。As shown in FIG. 2, the calibration method of the beam spot of the high energy beam of the present embodiment may include the following steps.
在步骤100中，调节束斑在图像中的位置至预设坐标处，使束斑处于预设状态，记录束斑处于预设状态时图像中束斑的圆形度。In step 100, the position of the beam spot in the image is adjusted to a preset coordinate, so that the beam spot is in a preset state, and the circularity of the beam spot in the image when the beam spot is in the preset state is recorded.
束斑在图像中的形状可以是圆形和椭圆形，圆形度的计算公式可以为e＝L1/L2，L1为图形的短轴长度，L2为图形的长轴长度，/为除法运算符。The shape of the beam spot in the image may be circular and elliptical. The calculation formula of the circularity may be e=L1/L2, L1 is the short axis length of the graphic, L2 is the long axis length of the graphic, and / is the division operator. .
本实施例中，上述预设坐标可以是在进行标定之前预先设置好的，可选的，上述预设坐标的获取方法如下。In this embodiment, the preset coordinates may be preset before being calibrated, and the method for acquiring the preset coordinates is as follows.
可参照图3，提供一标准板件6，该标准板件6呈平面板状，在标准板件6 上设置至少一个标志点7，该标志点7为多个时可以呈阵列设置，例如可以是圆环形阵列，或者N×N阵列设置(例如5×5，或者7×7等)，N为正整数。上述标志点7可以是孔、激光打标图案、喷漆或抛光点，标志点7可以与标准板件6的其他部位反差强烈、易于识别。标志点7的形状可以是圆形、方形或者正多边形等规则图案。由于是在标准板件6上进行标志点7的设置，所以标志点7在标准板件6上的相对位置精确且唯一。Referring to FIG. 3, a standard plate member 6 is provided, which is in the form of a flat plate in the standard plate member 6. At least one marker point 7 is disposed, and the marker point 7 may be arranged in an array, for example, may be a circular array, or an N×N array setting (for example, 5×5, or 7×7, etc.), where N is A positive integer. The above marking point 7 may be a hole, a laser marking pattern, a painting or a polishing point, and the marking point 7 may be strongly contrasted with other parts of the standard panel 6, and is easily identifiable. The shape of the marker point 7 may be a regular pattern such as a circle, a square or a regular polygon. Since the setting of the marker point 7 is performed on the standard panel 6, the relative position of the marker point 7 on the standard panel 6 is precise and unique.
将标准板件6放置在标定装置的工作平面2上，通过成像装置3对标准板件6的上表面进行拍摄，由于成像装置3拍摄时，成像装置3拍摄的图像存在畸变，拍摄的图像如图4所示，拍摄的标准板件6以及其上的标志点7与标准板件6和标志点7的形状有差别，通过计算机4计算出标志点7在图像中的坐标8，该图像中的坐标8可以为上述预设坐标，由于标志点7设置为至少一个，因此预设坐标的个数为至少一个。The standard plate member 6 is placed on the working plane 2 of the calibration device, and the upper surface of the standard plate member 6 is photographed by the imaging device 3. When the imaging device 3 is photographed, the image captured by the imaging device 3 is distorted, and the captured image is as As shown in FIG. 4, the photographed standard panel 6 and the marker point 7 thereon are different from the shape of the standard panel 6 and the marker point 7, and the coordinates 8 of the marker point 7 in the image are calculated by the computer 4, in which the image is The coordinate 8 may be the above-mentioned preset coordinates. Since the marker point 7 is set to at least one, the number of preset coordinates is at least one.
本实施例中，上述预设坐标可以存储在计算机4中，成像装置3与工作平面2之间的相对位姿不变，预设坐标可以不更新。In this embodiment, the preset coordinates may be stored in the computer 4, the relative pose between the imaging device 3 and the work plane 2 is unchanged, and the preset coordinates may not be updated.
成像装置3拍摄的图像中，标志点7和束斑均以像素形式存在，可以用标志点7或束斑的中心的坐标代表标志点7或束斑的坐标。该坐标以像素为单位，分辨率可以低于1个像素。In the image captured by the imaging device 3, the marker point 7 and the beam spot are both in the form of pixels, and the coordinates of the marker point 7 or the beam spot can be represented by the coordinates of the marker point 7 or the center of the beam spot. The coordinates are in pixels and the resolution can be less than 1 pixel.
在设置好上述的预设坐标之后，通过成像装置3拍摄一个聚焦值下的束斑的图像，此时该束斑9与预设坐标之间的位置关系如图5所示，图中的×表示为预设坐标，此时束斑尺寸、形状以及位置为随机状态，通过计算机4计算出该束斑9的尺寸、形状以及位置。After the preset coordinates are set, the image of the beam spot under the focus value is captured by the imaging device 3, and the positional relationship between the beam spot 9 and the preset coordinates is as shown in FIG. 5, where × in the figure Expressed as a preset coordinate, the beam spot size, shape, and position are in a random state, and the size, shape, and position of the beam spot 9 are calculated by the computer 4.
聚焦值是表征高能束的聚焦状态的参数，当高能束为电子束时，聚焦值可以是聚焦线圈中的电流值。The focus value is a parameter that characterizes the focus state of the high energy beam. When the high energy beam is an electron beam, the focus value may be the current value in the focus coil.
对图5中所示的束斑进行调整，使其置于预设坐标处并处于预设状态(如图6所示)，本实施例中，上述使束斑处于预设状态可以包括：The beam spot shown in FIG. 5 is adjusted to be placed at a preset coordinate and is in a preset state (as shown in FIG. 6 ). In this embodiment, the step of causing the beam spot to be in a preset state may include:
调整束斑的聚焦值，使所述束斑尺寸达到预设最小值；Adjusting a focus value of the beam spot such that the beam spot size reaches a preset minimum value;
调整束斑的像散，使所述束斑圆形度处于预设圆形度；Adjusting the astigmatism of the beam spot such that the beam circularity is at a preset circularity;
调整束斑的位置参数，使所述束斑的中心与预设坐标的中心之间的距离小于预设值。该预设值取决于成像装置3的拍摄范围、分辨率以及计算机4的计算方法，本实施例中，上述成像装置3分辨率超过2000万像素，预设值可选用 为0.2mm、0.1mm或者0.05mm。在将束斑调整至预设状态后，通过计算机4记录束斑处于预设状态时束斑的像散、聚焦值以及位置参数，本实施例中，束斑处于预设状态时，束斑的位置参数可以是指上述预设坐标，束斑的位置参数可以以拍摄图像上X、Y方向上的坐标控制参数。Adjusting the positional parameter of the beam spot such that the distance between the center of the beam spot and the center of the preset coordinates is less than a preset value. The preset value depends on the shooting range and resolution of the imaging device 3 and the calculation method of the computer 4. In the embodiment, the resolution of the imaging device 3 exceeds 20 million pixels, and the preset value can be selected. It is 0.2mm, 0.1mm or 0.05mm. After the beam spot is adjusted to the preset state, the astigmatism, the focus value, and the position parameter of the beam spot when the beam spot is in the preset state are recorded by the computer 4, and in this embodiment, when the beam spot is in the preset state, the beam spot is The position parameter may refer to the preset coordinates described above, and the position parameter of the beam spot may be a coordinate control parameter in the X and Y directions on the captured image.
在110中，在保持束斑像散不变的情况下，改变至少一次束斑的聚焦值。In 110, the focus value of the beam spot is changed at least once while keeping the beam astigmatism constant.
在保持步骤100中束斑的像散不变的情况下，可以使图像中当前束斑的圆形度与处于预设状态时图像中束斑的圆形度的差值的绝对值小于预设值，改变该束斑的聚焦值，此时由于束斑的聚焦值发生变化，不仅改变束斑的尺寸，束斑的位置参数也相应的发生变化。In the case that the astigmatism of the beam spot is unchanged in the maintaining step 100, the absolute value of the difference between the circularity of the current beam spot in the image and the circularity of the beam spot in the image in the preset state may be made smaller than the preset value. The value changes the focus value of the beam spot. At this time, since the focus value of the beam spot changes, not only the size of the beam spot is changed, but also the position parameter of the beam spot changes accordingly.
本实施例中，可以改变一次束斑的聚焦值，此时改变束斑的聚焦值，能够使束斑改变后的聚焦焦点的位置高于或低于束斑处于预设状态时的聚焦焦点的位置，如图7所示。In this embodiment, the focus value of the beam spot can be changed once, and at this time, the focus value of the beam spot is changed, and the position of the focus focus after the beam spot change can be made higher or lower than the focus focus of the beam spot when the beam spot is in the preset state. Location, as shown in Figure 7.
也可以根据需要多次改变束斑的聚焦值，以提高标定的准确性。本实施例中，可选改变束斑的聚焦值两次，此时第一次改变束斑的聚焦值，使得束斑改变后的聚焦焦点的位置高于束斑处于预设状态时的聚焦焦点的位置(如图7所示)，第二次改变束斑的聚焦值，改变后的聚焦焦点低于束斑处于预设状态时的聚焦焦点(如图8所示)。本实施例中，聚焦焦点可以是图像中束斑的中心。It is also possible to change the focus value of the beam spot as many times as necessary to improve the accuracy of the calibration. In this embodiment, the focus value of the beam spot can be changed twice, and the focus value of the beam spot is changed for the first time, so that the position of the focus focus after the beam spot is changed is higher than the focus focus when the beam spot is in the preset state. The position (as shown in Fig. 7) changes the focus value of the beam spot a second time, and the changed focus focus is lower than the focus focus when the beam spot is in the preset state (as shown in Fig. 8). In this embodiment, the focus focus may be the center of the beam spot in the image.
在步骤120中，生成束斑的位置参数与聚焦值之间的函数关系，以根据当前聚焦值和所述函数关系调整束斑的位置参数。In step 120, a functional relationship between the positional parameters of the beam spot and the focus value is generated to adjust the positional parameters of the beam spot based on the current focus value and the functional relationship.
可选的，在调整束斑处于预设状态时，记录处于预设状态时的束斑的聚焦值以及位置参数；Optionally, when the adjustment beam spot is in a preset state, the focus value and the position parameter of the beam spot in the preset state are recorded;
在改变束斑的聚焦值后，记录聚焦值改变后的束斑的聚焦值，并改变位置参数直至束斑移动至预设坐标处，记录该新的位置参数；以及After changing the focus value of the beam spot, recording the focus value of the beam spot after the focus value is changed, and changing the position parameter until the beam spot moves to the preset coordinates, and recording the new position parameter;
根据处于预设状态时的束斑的聚焦值以及位置参数，和聚焦值改变后的束斑的聚焦值以及新的位置参数，生成束斑位置参数与聚焦值之间的函数关系。A function relationship between the beam spot position parameter and the focus value is generated according to the focus value of the beam spot in the preset state and the position parameter, and the focus value of the beam spot after the focus value is changed and the new position parameter.
可选的，若只改变1次束斑的聚焦值，根据处于预设状态时的束斑的聚焦值以及位置参数，和聚焦值改变后的束斑的聚焦值以及新的位置参数，生成束斑位置参数与聚焦值之间的函数关系。Optionally, if only the focus value of the beam spot is changed once, the focus value and the position parameter of the beam spot in the preset state, and the focus value of the beam spot after the focus value is changed, and the new position parameter are generated to generate a beam. A functional relationship between the spot position parameter and the focus value.
可选的，若改变2次束斑的聚焦值，可以在第一次改变束斑的第一聚焦值后，记录第一次聚焦值改变后的束斑的第一聚焦值，并改变位置参数直至束斑 移动至预设坐标处，记录束斑的第一位置参数，在第二次改变束斑的第一聚焦值后，记录第二次聚焦值改变后的束斑的第二聚焦值，并改变位置参数直至束斑移动至预设坐标处，记录束斑的第二位置参数，Optionally, if the focus value of the beam spot is changed twice, after the first focus value of the beam spot is changed for the first time, the first focus value of the beam spot after the first focus value change is recorded, and the position parameter is changed. Until the spot Moving to the preset coordinates, recording the first position parameter of the beam spot, after changing the first focus value of the beam spot for the second time, recording the second focus value of the beam spot after the second focus value change, and changing the position The parameter is moved until the beam spot moves to the preset coordinates, and the second position parameter of the beam spot is recorded,
根据处于预设状态时的束斑的聚焦值以及位置参数，第一次改变聚焦值后的束斑的第一聚焦值以及第一位置参数，和第二次改变聚焦值后的束斑的第二聚焦值以及第二位置参数，生成束斑位置参数与聚焦值之间的函数关系。改变聚焦值的次数还可以大于2次，次数越多，束斑位置参数和聚焦值之间的函数关系越准确。According to the focus value of the beam spot in the preset state and the position parameter, the first focus value and the first position parameter of the beam spot after the first change of the focus value, and the beam spot after the second change of the focus value The second focus value and the second position parameter generate a functional relationship between the beam spot position parameter and the focus value. The number of times the focus value is changed can also be greater than 2 times, and the more the number of times, the more accurate the functional relationship between the beam spot position parameter and the focus value.
本实施例中，上述位置参数在图像中可以以坐标形式体现，位置参数可以包括X、Y两个方向的参数，上述函数关系可以是聚焦值F与X方向坐标之间形成的函数关系以及聚焦值F与Y方向坐标之间形成的函数关系，即函数关系可以为
Figure PCTCN2017089866-appb-000003
以及
Figure PCTCN2017089866-appb-000004
其中X为所述束斑位置在X方向上的坐标控制参数，Y为所述束斑位置在Y方向上的坐标控制参数，F为聚焦值，k为系数，b为常数。上述函数关系也可以是X、Y两个方向的坐标共同与聚焦值F之间的函数关系，即函数关系可以为(X，Y)＝f(F)，其中X为所述束斑位置在X方向上的坐标控制参数，Y为所述束斑位置在Y方向上的坐标控制参数，F为聚焦值。In this embodiment, the position parameter may be represented in a coordinate form in the image, and the position parameter may include parameters in two directions of X and Y, and the function relationship may be a function relationship between the focus value F and the X direction coordinate and focus. The functional relationship formed between the value F and the Y direction coordinate, that is, the function relationship can be
Figure PCTCN2017089866-appb-000003
as well as
Figure PCTCN2017089866-appb-000004
Where X is the coordinate control parameter of the beam spot position in the X direction, Y is the coordinate control parameter of the beam spot position in the Y direction, F is the focus value, k is the coefficient, and b is a constant. The above functional relationship may also be a function relationship between the coordinates of the X and Y directions and the focus value F, that is, the function relationship may be (X, Y)=f(F), where X is the beam spot position. The coordinate control parameter in the X direction, Y is the coordinate control parameter of the beam spot position in the Y direction, and F is the focus value.
本实施例中，在上述函数关系生成后，可根据该函数关系确定生产制造过程中采用的一聚焦值的束斑的位置参数，即根据函数关系能够计算出该束斑当前的坐标控制参数。在该坐标控制参数的控制下，束斑在工作平面上的坐标与给定坐标之间的误差很小，可以提高束斑加工的精度。In this embodiment, after the function relationship is generated, the position parameter of the beam spot of a focus value used in the manufacturing process may be determined according to the function relationship, that is, the current coordinate control parameter of the beam spot can be calculated according to the function relationship. Under the control of the coordinate control parameters, the error between the coordinates of the beam spot on the working plane and the given coordinates is small, which can improve the precision of the beam spot processing.
本实施例中，上述标定方法中，使用的射线发射装置1发射的射线束5为电子束时，可通过改变聚焦线圈中的电流调节束斑的聚焦值，通过改变像散线圈中的电流调节束斑形状，通过改变偏转线圈中的电流调节束斑的位置。In the present embodiment, in the above calibration method, when the radiation beam 5 emitted by the radiation emitting device 1 is an electron beam, the focus value of the beam spot can be adjusted by changing the current in the focus coil, and the current adjustment in the astigmatism coil can be changed. The beam spot shape adjusts the position of the beam spot by changing the current in the deflection yoke.
本实施例中，上述预设坐标可以是一个，可以完成一个束斑的标定。预设坐标也可以是多个，束斑的标定方式可以分为两种。In this embodiment, the preset coordinates may be one, and calibration of a beam spot may be completed. The preset coordinates can also be multiple, and the calibration method of the beam spot can be divided into two types.
第一种标定方法中，可以对第一个预设坐标对应的束斑进行标定，即对第一个预设坐标对应的束斑进行步骤100-步骤120中的操作；In the first calibration method, the beam spot corresponding to the first preset coordinate may be calibrated, that is, the operation in step 100-step 120 is performed on the beam spot corresponding to the first preset coordinate;
在第一个预设坐标对应的束斑标定结束后，对下一个预设坐标对应的束斑进行标定，同样对该预设坐标对应的束斑进行步骤100-步骤120中的操作；以及 After the beam spot calibration corresponding to the first preset coordinate is finished, the beam spot corresponding to the next preset coordinate is calibrated, and the beam spot corresponding to the preset coordinate is also subjected to the operations in step 100-step 120;
以此类推，完成所有的束斑的标定。By analogy, all the calibration of the beam spot is completed.
第二种标定方法中，可以对所有的束斑进行步骤100中的操作，即调节每个束斑在图像中的位置至该束斑对应的预设坐标处，并使每个束斑处于预设状态，记录每个束斑处于预设状态时图像中该束斑的圆形度；In the second calibration method, the operation in step 100 can be performed on all the beam spots, that is, the position of each beam spot in the image is adjusted to the preset coordinates corresponding to the beam spot, and each beam spot is pre- Set the state, record the circularity of the beam spot in the image when each beam spot is in a preset state;
在所有束斑均调节至对应的预设坐标处并处于预设状态后，保持每个束斑像散不变的情况下，改变每个束斑的聚焦值，且每个束斑的聚焦值改变至少一次；以及After all beam spots are adjusted to the corresponding preset coordinates and are in a preset state, the focus value of each beam spot is changed, and the focus value of each beam spot is changed while keeping each beam spot astigmatism unchanged. Change at least once; and
生成每个束斑的位置参数与该束斑的聚焦值之间的函数关系，即每个束斑均对应有一个函数关系，以根据每个束斑的当前聚焦值和该束斑对应的函数关系调整每个束斑的位置参数。上述标定方法可由上述计算机4执行，计算机4可以包括处理器以及存储介质；其中，所述存储介质存储有可执行指令，所述指令被所述处理器执行，以使所述处理器执行上述的标定方法。存储介质可以是非暂态存储介质，包括：U盘、移动硬盘、只读存储器(Read-Only Memory，ROM)、随机存取存储器(Random Access Memory，RAM)、磁碟或者光盘等多种可以存储程序代码的介质，也可以是暂态存储介质。Generating a functional relationship between the positional parameters of each beam spot and the focus value of the beam spot, that is, each beam spot corresponds to a functional relationship, according to a current focus value of each beam spot and a function corresponding to the beam spot The relationship adjusts the positional parameters of each beam spot. The above calibration method may be performed by the above computer 4, which may include a processor and a storage medium; wherein the storage medium stores executable instructions that are executed by the processor to cause the processor to perform the above Calibration method. The storage medium may be a non-transitory storage medium, including: a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk, and the like. The medium of the program code may also be a transient storage medium.
工业实用性Industrial applicability
一种束斑标定方法，对束斑进行标定时不会受图像畸变的影响，无需求解成像装置相对束斑所在平面之间的位姿关系。 A beam spot calibration method, the calibration of the beam spot is not affected by image distortion, and there is no need to solve the pose relationship between the imaging device and the plane of the beam spot.

Claims (12)

  1. 一种束斑的标定方法，包括：A method for calibrating a beam spot, comprising:
    调节束斑在图像中的位置至预设坐标处，使束斑处于预设状态，记录所述束斑处于预设状态时图像中束斑的圆形度；Adjusting the position of the beam spot in the image to a preset coordinate, so that the beam spot is in a preset state, and recording the circularity of the beam spot in the image when the beam spot is in a preset state;
    在保持所述束斑像散不变的情况下，改变至少一次所述束斑的聚焦值；以及Changing the focus value of the beam spot at least once while maintaining the beam astigmatism unchanged;
    生成束斑的位置参数与聚焦值之间的函数关系，以根据当前聚焦值和所述函数关系调整束斑的位置参数。A functional relationship between the positional parameters of the beam spot and the focus value is generated to adjust the positional parameters of the beam spot based on the current focus value and the functional relationship.
  2. 根据权利要求1所述的方法，其中，所述使束斑处于预设状态包括：The method of claim 1 wherein said placing the beam spot in a preset state comprises:
    调整束斑的聚焦值，使所述束斑尺寸达到预设最小值；Adjusting a focus value of the beam spot such that the beam spot size reaches a preset minimum value;
    调整束斑的像散，使所述束斑圆形度处于预设圆形度；以及Adjusting the astigmatism of the beam spot such that the beam circularity is at a predetermined circularity;
    调整束斑的位置参数，使所述束斑的中心与预设坐标的中心之间的距离小于预设值。Adjusting the positional parameter of the beam spot such that the distance between the center of the beam spot and the center of the preset coordinates is less than a preset value.
  3. 根据权利要求2所述的方法，其中，所述在保持所述束斑像散不变的情况下，改变至少一次所述束斑的聚焦值包括：The method according to claim 2, wherein said changing the focus value of said beam spot at least once without maintaining said beam spot astigmatism comprises:
    保持所述束斑的像散不变，使图像中当前束斑的圆形度与处于预设状态时图像中束斑的圆形度的差值的绝对值小于预设值；以及Maintaining the astigmatism of the beam spot unchanged, such that the absolute value of the difference between the circularity of the current beam spot in the image and the circularity of the beam spot in the image in the preset state is less than a preset value;
    第一次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置高于或低于所述束斑处于预设状态时的聚焦焦点的位置。The focus value of the beam spot is changed for the first time such that the position of the focus focus after the beam spot change is higher or lower than the position of the focus focus when the beam spot is in a preset state.
  4. 根据权利要求3所述的方法，还包括：The method of claim 3 further comprising:
    在所述第一次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置高于所述束斑处于预设状态时的聚焦焦点的位置之后，第二次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置低于所述束斑处于预设状态时 的聚焦焦点的位置；或After the first change of the focus value of the beam spot such that the position of the focus focus after the beam spot is changed is higher than the position of the focus focus when the beam spot is in a preset state, the second change is performed. Determining the focus value of the beam spot such that the position of the focus focus after the beam spot is changed is lower than when the beam spot is in a preset state The focus of the focus; or
    在所述第一次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置低于所述束斑处于预设状态时的聚焦焦点的位置之后，第二次改变所述束斑的聚焦值，使所述束斑改变后的聚焦焦点的位置高于所述束斑处于预设状态时的聚焦焦点的位置。After the first change of the focus value of the beam spot such that the position of the focus focus after the beam spot is changed is lower than the position of the focus focus when the beam spot is in a preset state, the second change is performed. The focus value of the beam spot is such that the position of the focus focus after the beam spot is changed is higher than the position of the focus focus when the beam spot is in the preset state.
  5. 根据权利要求3所述的方法，其中，所述生成束斑位置参数与聚焦值之间的函数关系包括：The method of claim 3 wherein said generating a functional relationship between the beam spot position parameter and the focus value comprises:
    记录处于预设状态时的束斑的聚焦值以及位置参数；Recording the focus value of the beam spot and the position parameter when in the preset state;
    记录聚焦值改变后的束斑的聚焦值，改变位置参数直至束斑移动至预设坐标处，记录该新的位置参数；以及Recording the focus value of the beam spot after the change of the focus value, changing the position parameter until the beam spot moves to the preset coordinate, and recording the new position parameter;
    根据处于预设状态时的束斑的聚焦值以及位置参数，和聚焦值改变后的束斑的聚焦值以及新的位置参数，生成束斑位置参数与聚焦值之间的函数关系。A function relationship between the beam spot position parameter and the focus value is generated according to the focus value of the beam spot in the preset state and the position parameter, and the focus value of the beam spot after the focus value is changed and the new position parameter.
  6. 根据权利要求4所述的方法，其中，所述生成束斑位置参数与聚焦值之间的函数关系包括：The method of claim 4 wherein said generating a functional relationship between the beam spot position parameter and the focus value comprises:
    记录处于预设状态时的束斑的聚焦值以及位置参数；Recording the focus value of the beam spot and the position parameter when in the preset state;
    记录聚焦值改变后的束斑的聚焦值，改变位置参数直至束斑移动至预设坐标处，记录该新的位置参数；以及Recording the focus value of the beam spot after the change of the focus value, changing the position parameter until the beam spot moves to the preset coordinate, and recording the new position parameter;
    根据处于预设状态时的束斑的聚焦值以及位置参数，和聚焦值改变后的束斑的聚焦值以及新的位置参数，生成束斑位置参数与聚焦值之间的函数关系。A function relationship between the beam spot position parameter and the focus value is generated according to the focus value of the beam spot in the preset state and the position parameter, and the focus value of the beam spot after the focus value is changed and the new position parameter.
  7. 根据权利要求5所述的方法，其中，所述束斑的位置参数与聚焦值之间函数关系为
    Figure PCTCN2017089866-appb-100001
    以及
    Figure PCTCN2017089866-appb-100002
    或者为(X，Y)＝f(F)，其中：    The method of claim 5 wherein the functional relationship between the positional parameters of the beam spot and the focus value is
    Figure PCTCN2017089866-appb-100001
    as well as
    Figure PCTCN2017089866-appb-100002
    Or (X,Y)=f(F), where:
    X为所述束斑位置在X方向上的坐标控制参数，Y为所述束斑位置在Y方 向上的坐标控制参数，F为聚焦值，k为系数，b为常数，(X，Y)＝f(F)表示X、Y两个方向的坐标共同与聚焦值F之间的函数关系。X is the coordinate control parameter of the beam spot position in the X direction, and Y is the beam spot position on the Y side. The upward coordinate control parameter, F is the focus value, k is the coefficient, b is the constant, and (X, Y)=f(F) represents the relationship between the coordinates of the X and Y directions and the focus value F.
  8. 根据权利要求6所述的方法，其中，所述束斑的位置参数与聚焦值之间函数关系为
    Figure PCTCN2017089866-appb-100003
    以及
    Figure PCTCN2017089866-appb-100004
    或者为(X，Y)＝f(F)，其中：    The method of claim 6 wherein the functional relationship between the positional parameters of the beam spot and the focus value is
    Figure PCTCN2017089866-appb-100003
    as well as
    Figure PCTCN2017089866-appb-100004
    Or (X,Y)=f(F), where:
    X为所述束斑位置在X方向上的坐标控制参数，Y为所述束斑位置在Y方向上的坐标控制参数，F为聚焦值，k为系数，b为常数，(X，Y)＝f(F)表示X、Y两个方向的坐标共同与聚焦值F之间的函数关系。X is the coordinate control parameter of the beam spot position in the X direction, Y is the coordinate control parameter of the beam spot position in the Y direction, F is the focus value, k is the coefficient, b is a constant, (X, Y) =f(F) represents a function relationship between the coordinates of the X and Y directions and the focus value F.
  9. 根据权利要求1-8任一所述的方法，所述调节束斑至预设坐标处之前，所述方法还包括：The method according to any one of claims 1-8, before the adjusting the beam spot to the preset coordinates, the method further comprises:
    在标准板件上设置至少一个标志点；Setting at least one marker point on the standard board;
    通过成像装置拍摄所述标准板件的图像；Taking an image of the standard panel by an imaging device;
    根据所述图像中的每个标志点生成对应的预设坐标。Corresponding preset coordinates are generated according to each of the marker points in the image.
  10. 根据权利要求9所述的方法，其中，所述成像装置为电荷耦合元件CCD相机、互补金属氧化物半导体CMOS相机、红外相机、近红外相机或者远红外相机。The method of claim 9, wherein the imaging device is a charge coupled device CCD camera, a complementary metal oxide semiconductor CMOS camera, an infrared camera, a near infrared camera, or a far infrared camera.
  11. 根据权利要求10所述的方法，还包括：The method of claim 10 further comprising:
    所述预设坐标大于或等于两个时，对第一个预设坐标对应的束斑进行标定；以及When the preset coordinates are greater than or equal to two, the beam spot corresponding to the first preset coordinate is calibrated;
    所述第一个预设坐标对应的束斑标定结束后，对下一个预设坐标对应的束斑进行标定，直至对所有的预设坐标对应的束斑标定完毕。After the beam spot calibration corresponding to the first preset coordinate is finished, the beam spot corresponding to the next preset coordinate is calibrated until the beam spot corresponding to all the preset coordinates is calibrated.
  12. 根据权利要求10所述的方法，还包括：The method of claim 10 further comprising:
    所述预设坐标大于或等于两个时，调节每个束斑在图像中的位置至所述束 斑对应的预设坐标处，并使每个束斑处于预设状态，记录每个束斑处于预设状态时图像中束斑的圆形度；Adjusting the position of each beam spot in the image to the beam when the preset coordinates are greater than or equal to two The preset coordinates corresponding to the spots, and each beam spot is in a preset state, and the circularity of the beam spot in the image when each beam spot is in a preset state is recorded;
    在所有束斑均调节至对应的预设坐标处并处于预设状态后，保持每个束斑像散不变的情况下，改变至少一次束斑的聚焦值；以及Changing the focus value of the beam spot at least once after all beam spots are adjusted to the corresponding preset coordinates and are in a preset state, while keeping each beam spot astigmatism unchanged;
    生成每个束斑的位置参数与该束斑的聚焦值之间的函数关系，以根据每个束斑的当前聚焦值和该束斑对应的函数关系调整每个束斑的位置参数。 A functional relationship between the positional parameters of each beam spot and the focus value of the beam spot is generated to adjust the positional parameter of each beam spot based on the current focus value of each beam spot and a functional relationship corresponding to the beam spot.
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