WO2017170449A1 - 半導体装置製造用粘着性フィルムおよび半導体装置の製造方法 - Google Patents
半導体装置製造用粘着性フィルムおよび半導体装置の製造方法 Download PDFInfo
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- WO2017170449A1 WO2017170449A1 PCT/JP2017/012476 JP2017012476W WO2017170449A1 WO 2017170449 A1 WO2017170449 A1 WO 2017170449A1 JP 2017012476 W JP2017012476 W JP 2017012476W WO 2017170449 A1 WO2017170449 A1 WO 2017170449A1
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- WIPO (PCT)
- Prior art keywords
- adhesive film
- semiconductor device
- adhesive
- resin layer
- solvent
- Prior art date
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- 229920001400 block copolymer Polymers 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 150000004292 cyclic ethers Chemical class 0.000 description 1
- 239000012933 diacyl peroxide Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 1
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 1
- POLCUAVZOMRGSN-UHFFFAOYSA-N dipropyl ether Chemical compound CCCOCCC POLCUAVZOMRGSN-UHFFFAOYSA-N 0.000 description 1
- 229940069096 dodecene Drugs 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003759 ester based solvent Substances 0.000 description 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- BXOUVIIITJXIKB-UHFFFAOYSA-N ethene;styrene Chemical group C=C.C=CC1=CC=CC=C1 BXOUVIIITJXIKB-UHFFFAOYSA-N 0.000 description 1
- UHKJHMOIRYZSTH-UHFFFAOYSA-N ethyl 2-ethoxypropanoate Chemical compound CCOC(C)C(=O)OCC UHKJHMOIRYZSTH-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 229920001038 ethylene copolymer Polymers 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 1
- 229920001903 high density polyethylene Polymers 0.000 description 1
- 239000004700 high-density polyethylene Substances 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- VKPSKYDESGTTFR-UHFFFAOYSA-N isododecane Natural products CC(C)(C)CC(C)CC(C)(C)C VKPSKYDESGTTFR-UHFFFAOYSA-N 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 150000003951 lactams Chemical class 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- CWKLZLBVOJRSOM-UHFFFAOYSA-N methyl pyruvate Chemical compound COC(=O)C(C)=O CWKLZLBVOJRSOM-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N n-Octanol Natural products CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- CFJYNSNXFXLKNS-UHFFFAOYSA-N p-menthane Chemical compound CC(C)C1CCC(C)CC1 CFJYNSNXFXLKNS-UHFFFAOYSA-N 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 229920002480 polybenzimidazole Polymers 0.000 description 1
- 229920002577 polybenzoxazole Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000223 polyglycerol Polymers 0.000 description 1
- 229920001228 polyisocyanate Polymers 0.000 description 1
- 239000005056 polyisocyanate Substances 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000013464 silicone adhesive Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 229920001935 styrene-ethylene-butadiene-styrene Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 208000024891 symptom Diseases 0.000 description 1
- 229930006978 terpinene Natural products 0.000 description 1
- 150000003507 terpinene derivatives Chemical class 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J125/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Adhesives based on derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
- C09J133/08—Homopolymers or copolymers of acrylic acid esters
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
- C09J133/10—Homopolymers or copolymers of methacrylic acid esters
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J175/00—Adhesives based on polyureas or polyurethanes; Adhesives based on derivatives of such polymers
- C09J175/04—Polyurethanes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/312—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature
Definitions
- the present invention relates to an adhesive film for manufacturing a semiconductor device and a method for manufacturing the semiconductor device.
- a support member such as a glass substrate, a ceramic substrate, or a metal substrate is provided on the surface on which the circuit pattern is formed from the viewpoint of improving the handleability of the semiconductor wafer. May be attached with an adhesive.
- a step of peeling the support member from the semiconductor wafer and a step of removing the adhesive residue are required.
- the semiconductor wafer peeled off from the support member is then transferred to a dicing process and divided into individual semiconductor chips.
- a dicing tape is bonded to the circuit pattern of the semiconductor wafer, and then the support member is peeled off from the semiconductor wafer.
- the adhesive residue remaining on the circuit pattern after the support member is peeled off is washed with a solvent.
- the cleaning of the adhesive residue with the solvent is performed in a state where the semiconductor wafer is stuck on the dicing tape, and therefore, the dicing tape is required to have high solvent resistance.
- Patent Document 1 Japanese Patent Laid-Open No. 2013-239595
- Patent Document 1 (a) a step of bonding a support member to the circuit surface side of a semiconductor wafer via an adhesive, (b) a step of thinning a back surface opposite to the circuit surface of the semiconductor wafer, c) a step of bonding a dicing tape having at least an ultraviolet curable pressure-sensitive adhesive layer on the back surface opposite to the circuit surface of the semiconductor wafer; and (d) peeling the semiconductor wafer from the adhesive layer and the support member.
- a dicing method for a semiconductor wafer comprising: (e) cleaning the adhesive residue on the semiconductor wafer with an organic solvent; and (f) cutting the semiconductor wafer into chips. And before the process of said (e), the adhesive layer of the area
- the present inventor has found the following problems with respect to a conventional adhesive film used in a method for producing a semiconductor device using a support member.
- the adhesive film used for the semiconductor wafer in which the circuit pattern was formed on both sides is required to have the characteristic of following the unevenness of the circuit surface from the viewpoint of improving the adhesion with the circuit surface. Therefore, a resin layer having excellent unevenness followability has been used for such an adhesive film.
- a resin layer excellent in unevenness followability is inferior in solvent resistance.
- the use of an adhesive film having excellent solvent resistance deteriorates the unevenness followability.
- the solvent enters the gap between the adhesive film and the circuit surface, causing problems such as peeling of the adhesive film. That is, according to the study of the present inventor, the conventional adhesive film used in the method for manufacturing a semiconductor device using a support member, between the followability to the circuit pattern and the solvent resistance, It became clear that there was a trade-off relationship. That is, the present inventor has found that there is room for improvement in the conventional adhesive film from the viewpoint of improving the followability to the circuit pattern and the solvent resistance in a balanced manner.
- the present invention has been made in view of the above circumstances, and provides a pressure-sensitive adhesive film for manufacturing a semiconductor device that achieves both a followability to a circuit pattern and solvent resistance, and a method for manufacturing a semiconductor device using the same. is there.
- the present inventor has intensively studied to achieve the above problems.
- an adhesive film having a solvent-resistant resin layer, an uneven absorption resin layer, and an adhesive resin layer in this order is used, and the adhesive resin layer is on the circuit surface side of the semiconductor wafer.
- this adhesive film it was found that both the followability to the circuit pattern and the solvent resistance could be achieved, and the present invention was completed.
- the following adhesive film for manufacturing a semiconductor device and a method for manufacturing the semiconductor device are provided.
- a semiconductor wafer having a first circuit surface including a first circuit pattern and a second circuit surface including a second circuit pattern opposite to the first circuit surface, and an adhesive layer on the first circuit surface side of the semiconductor wafer Preparing a structure including a support member provided via the adhesive film and an adhesive film bonded to the second circuit surface side of the semiconductor wafer; Removing the support member from the structure; A step of removing the residue of the adhesive layer on the first circuit surface side of the semiconductor wafer with a solvent, and the adhesive film in a method for producing a semiconductor device, comprising: It has a solvent resistant resin layer, a ruggedness absorbent resin layer, and an adhesive resin layer in this order, A pressure-sensitive adhesive film for manufacturing a semiconductor device, used so that the pressure-sensitive adhesive layer is on the second circuit surface side of the semiconductor wafer.
- the solvent-resistant resin layer is a pressure-sensitive adhesive film for manufacturing a semiconductor device containing a resin having a solubility parameter of 9.0 or more.
- the solvent-resistant resin layer is a pressure-sensitive adhesive film for manufacturing a semiconductor device, which contains a resin having a tensile modulus (E ′) of 300 MPa or less at 25 ° C.
- E ′ tensile modulus
- Adhesive for semiconductor device manufacture wherein the solvent-resistant resin layer includes one or more selected from the group consisting of polyvinyl chloride resin, polyvinylidene chloride resin, polyvinyl acetate resin, polyester, polyimide, and polyamide. Sex film.
- corrugated absorptive resin layer contains 1 type, or 2 or more types selected from the group which consists of polyolefin resin, polystyrene resin, and (meth) acrylic resin.
- a pressure-sensitive adhesive film for manufacturing a semiconductor device wherein the uneven absorbent resin layer contains at least one selected from ethylene / ⁇ -olefin copolymers and ethylene / vinyl acetate copolymers.
- the pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer contains one or more selected from (meth) acrylic pressure-sensitive adhesives, silicone-based pressure-sensitive adhesives, urethane-based pressure-sensitive adhesives, olefin-based pressure-sensitive adhesives, and styrene-based pressure-sensitive adhesives.
- Adhesive film for semiconductor device manufacturing is one or more selected from (meth) acrylic pressure-sensitive adhesives, silicone-based pressure-sensitive adhesives, urethane-based pressure-sensitive adhesives, olefin-based pressure-sensitive adhesives, and styrene-based pressure-sensitive adhesives.
- a semiconductor wafer having a first circuit surface including a first circuit pattern and a second circuit surface including a second circuit pattern opposite to the first circuit surface, and an adhesive layer on the first circuit surface side of the semiconductor wafer Preparing a structure including a support member provided via the adhesive film and an adhesive film bonded to the second circuit surface side of the semiconductor wafer; Removing the support member from the structure; A step of removing a residue of the adhesive layer on the first circuit surface side of the semiconductor wafer with a solvent, and a method of manufacturing a semiconductor device, comprising: The manufacturing method of the semiconductor device which uses the adhesive film for semiconductor device manufacture as described in any one of said [1] thru
- a pressure-sensitive adhesive film for manufacturing a semiconductor device that has both a followability to a circuit pattern and a solvent resistance, and a method for manufacturing a semiconductor device using the same.
- FIG. 1 is a sectional view showing typically an example of structure of adhesive film 50 of an embodiment concerning the present invention.
- FIG. 2 is a cross-sectional view schematically showing an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention.
- an adhesive film 50 for manufacturing a semiconductor device according to this embodiment (hereinafter also referred to as “adhesive film 50”) is a semiconductor device comprising at least the following steps (A) to (C).
- the adhesive film has a solvent-resistant resin layer 10, a concavo-convex absorbent resin layer 20, and an adhesive resin layer 30 in this order, and the adhesive resin layer 30 is formed on the semiconductor wafer 60. It is used so that it may become the 2nd circuit surface 65B side.
- C Step of removing residue of adhesive layer 70 on first circuit surface 65A side of semiconductor wafer 60 with a solvent
- the present inventor has found the following problems with respect to a conventional adhesive film used in a method for manufacturing a semiconductor device using a support member.
- the adhesive film used for the semiconductor wafer in which the circuit pattern was formed on both sides is required to have the characteristic of following the unevenness of the circuit surface from the viewpoint of improving the adhesion with the circuit surface. Therefore, a resin layer having excellent unevenness followability has been used for such an adhesive film.
- a resin layer excellent in unevenness followability is inferior in solvent resistance.
- the present inventor based on the above-mentioned knowledge about the conventional adhesive film used in a method for manufacturing a semiconductor device using a support member, can manufacture a semiconductor device capable of improving the followability to a circuit pattern and the solvent resistance in a well-balanced manner.
- the adhesive film 50 having the solvent-resistant resin layer 10, the uneven absorbent resin layer 20, and the adhesive resin layer 30 in this order is used, and the adhesive film 50 is used as the adhesive resin. It has been found that by using the layer 30 so as to be on the second circuit surface 65B side of the semiconductor wafer 60, both the followability to the circuit pattern and the solvent resistance can be achieved.
- the adhesive film 50 includes the solvent-resistant resin layer 10, swelling and deformation of the entire adhesive film 50 can be suppressed even when the adhesive film 50 is immersed in the solvent. Property can be improved. Moreover, when the adhesive film 50 includes the uneven absorbent resin layer 20, the absorbability of the unevenness of the circuit pattern is improved, and the followability of the adhesive film 50 to the circuit pattern can be improved. From the above, according to the adhesive film 50 according to the present embodiment, both the followability to the circuit pattern and the solvent resistance can be achieved.
- Adhesive Film hereinafter, the adhesive film 50 used in the method for manufacturing a semiconductor device according to this embodiment will be described.
- the solvent resistant resin layer 10 is a layer provided for the purpose of improving the properties of the adhesive film 50 such as solvent resistance, handleability and mechanical properties.
- the solvent-resistant resin layer 10 is not particularly limited as long as it has solvent resistance that does not cause swelling or deformation with respect to the solvent used when removing the residue of the adhesive layer 70, but for example, solvent resistance
- the resin film comprised with resin is mentioned.
- Examples of the solvent-resistant resin constituting the solvent-resistant resin layer 10 include polyesters such as polyethylene terephthalate, polybutylene terephthalate, and polyethylene naphthalate; polyvinyl chloride resins; polyvinylidene chloride resins; polyvinyl acetate resins; Polyamide such as nylon-6, nylon-66, polymetaxylene adipamide; polyimide; polyetherimide; polyamideimide; polycarbonate; modified polyphenylene ether; polyacetal; polyarylate; One or more selected from ketones, fluorine resins, liquid crystal polymers, polybenzimidazoles, polybenzoxazoles, and the like can be given.
- polyesters such as polyethylene terephthalate, polybutylene terephthalate, and polyethylene naphthalate
- polyvinyl chloride resins polyvinylidene chloride resins
- polyvinyl acetate resins Polyamide such as nylon-6, nylon-66, polymetaxylene a
- polyvinyl chloride resin polyvinylidene chloride resin
- polyvinyl acetate resin polyester, polyimide, and polyamide from the viewpoint of excellent balance of solvent resistance, mechanical strength, transparency, price, etc.
- One or more selected from the group is preferred, and from the viewpoint of excellent balance between solvent resistance and flexibility, selected from the group consisting of polyvinyl chloride resins, polyvinylidene chloride resins, and polyvinyl acetate resins.
- the solubility parameter of the solvent resistant resin constituting the solvent resistant resin layer 10 is preferably 9.0 or more. When such a solvent resistant resin is used, swelling or deformation of the adhesive film 50 when removing the residue of the adhesive layer 70 can be further suppressed.
- the solubility parameter is a value defined by regular solution theory introduced by Hildebrand.
- the upper limit of the solubility parameter of the solvent-resistant resin constituting the solvent-resistant resin layer 10 is not particularly limited, but is, for example, 30.0 or less, preferably 20.0 or less, more preferably 15.0 or less. .
- the tensile modulus (E ′) of the solvent-resistant resin constituting the solvent-resistant resin layer 10 under the condition of 25 ° C. is preferably 300 MPa or less.
- the minimum of a tensile elasticity modulus (E ') is not specifically limited, For example, it is 1 MPa or more, Preferably it is 10 MPa or more, More preferably, it is 50 MPa or more.
- the stretchability and flexibility of the adhesive film 50 are improved, and the adhesive film 50 is easily expanded in the in-plane direction in the process of picking up the semiconductor chip 90. By doing so, the interval between the adjacent semiconductor chips 90 can be easily increased, and the semiconductor chip 90 can be easily picked up from the adhesive film 50.
- the adhesive force between the semiconductor chip 90 and the adhesive resin layer 30 is likely to decrease due to shear stress between the semiconductor chip 90 and the adhesive resin layer 30 caused by the expansion in the in-plane direction of the adhesive film 50. It becomes easy to pick up the semiconductor chip 90 from the adhesive film 50.
- a solvent-resistant resin having a tensile modulus (E ′) of not more than the above upper limit value is used, the overall unevenness absorbability of the adhesive film 50 is further improved, and the circuit surface including the circuit pattern of the semiconductor wafer 60. The adhesiveness between the circuit surface of the semiconductor wafer 60 and the adhesive film 50 can be further improved.
- the tensile modulus (E ′) can be measured according to JIS K7161.
- the solvent resistant resin layer 10 may be a single layer or two or more layers.
- the form of the resin film used to form the solvent-resistant resin layer 10 may be a stretched film or a film stretched in a uniaxial direction or a biaxial direction. From the viewpoint of improving the solvent resistance and mechanical strength of the conductive resin layer 10, it is preferably a film stretched in a uniaxial direction or a biaxial direction.
- the thickness of the solvent resistant resin layer 10 is preferably 10 ⁇ m or more and 1000 ⁇ m or less, more preferably 10 ⁇ m or more and 500 ⁇ m or less, and further preferably 20 ⁇ m or more and 300 ⁇ m or less from the viewpoint of obtaining good film properties.
- the solvent resistant resin layer 10 may be subjected to a surface treatment in order to improve the adhesion with other layers. Specifically, corona treatment, plasma treatment, undercoat treatment, primer coat treatment, or the like may be performed.
- the uneven absorbent resin layer 20 is a layer provided for the purpose of improving the followability of the adhesive film 50 to the circuit pattern and improving the adhesion of the adhesive film 50 to the circuit surface.
- the uneven absorbent resin layer 20 the uneven absorbability of the adhesive film 50 as a whole is improved, following the unevenness of the circuit surface including the circuit pattern of the semiconductor wafer 60, the circuit surface of the semiconductor wafer 60 and the adhesive film Adhesion with 50 can be improved. Furthermore, it is possible to prevent the circuit pattern formed on the surface of the semiconductor wafer 60 from being broken by an external force applied when the semiconductor wafer 60 is processed.
- the resin constituting the uneven absorbent resin layer 20 is not particularly limited as long as it exhibits uneven absorbency, but is selected from the group consisting of polyolefin resins, polystyrene resins, and (meth) acrylic resins, for example. 1 type or 2 types or more are mentioned.
- polyolefin resins examples include polyethylene such as linear low density polyethylene (LLDPE), low density polyethylene, and high density polyethylene; polypropylene; ethylene and ⁇ -olefins containing ethylene and ⁇ -olefins having 3 to 12 carbon atoms. Copolymers, ethylene-based propylene / ⁇ -olefin copolymers containing propylene and ⁇ -olefins having 4 to 12 carbon atoms, ethylene / cyclic olefin copolymers, ethylene / ⁇ -olefin / cyclic olefin copolymers, etc.
- LLDPE linear low density polyethylene
- polypropylene ethylene and ⁇ -olefins containing ethylene and ⁇ -olefins having 3 to 12 carbon atoms.
- Copolymers ethylene-based propylene / ⁇ -olefin copolymers containing propylene and ⁇ -olefins
- Ethylene / (meth) ethyl acrylate copolymer Ethylene / (meth) ethyl acrylate copolymer, ethylene / (meth) methyl acrylate copolymer, ethylene / (meth) propyl propyl copolymer, ethylene / butyl (meth) acrylate copolymer
- Ethylene / unsaturated carboxylic acid ester copolymers such as ethylene
- Ethylene / vinegar Examples include vinyl acid copolymers, ethylene / vinyl propionate copolymers, ethylene / vinyl butyrate copolymers, ethylene / vinyl ester copolymers such as ethylene / vinyl stearate copolymers, and the like.
- Examples of the ⁇ -olefin having 3 to 12 carbon atoms in the ethylene / ⁇ -olefin copolymer include propylene, 1-butene, 1-pentene, 3-methyl-1-butene, 1-hexene, and 4-methyl-1 -Pentene, 3-methyl-1-pentene, 1-heptene, 1-octene, 1-decene, 1-dodecene and the like are preferable, and propylene, 1-butene and the like are preferable.
- low density polyethylene polypropylene; ethylene / propylene copolymer, ethylene / 1-butene copolymer, ethylene / propylene / alpha-olefin having 4 to 12 carbon atoms, which is superior in unevenness absorbability.
- Ethylene / ⁇ -olefin copolymers such as terpolymers; terpolymers of propylene / 1-butene / ⁇ -olefins having 5 to 12 carbon atoms; ethylene / vinyl acetate copolymers are preferred, ethylene ⁇ -olefin copolymers and ethylene / vinyl acetate copolymers are more preferred.
- polystyrene resins include styrene / butadiene copolymers, acrylonitrile / butadiene / styrene copolymers (ABS), styrene / isoprene / styrene block copolymers (SIS), and styrene / ethylene / butylene / styrene block copolymers.
- polystyrene elastomers such as a polymer (SEBS), a styrene-ethylene / propylene-styrene block copolymer (SEPS), other styrene / diene block copolymers, or hydrogenated products thereof.
- the (meth) acrylic resin include (meth) acrylic polymers having an alkyl ester of (meth) acrylic acid as a component.
- the thickness of the uneven absorbent resin layer 20 is not particularly limited as long as the unevenness of the circuit surface including the circuit pattern of the semiconductor wafer can be embedded, but is preferably 10 ⁇ m or more and 500 ⁇ m or less, for example, It is more preferably 20 ⁇ m or more and 400 ⁇ m or less, further preferably 30 ⁇ m or more and 300 ⁇ m or less, and particularly preferably 50 ⁇ m or more and 250 ⁇ m or less.
- the adhesive resin layer 30 is a layer provided on one surface side of the uneven absorbent resin layer 20, and contacts the second circuit surface 65 ⁇ / b> B of the semiconductor wafer 60 when the adhesive film 50 is attached to the semiconductor wafer 60. It is a layer that adheres.
- Examples of the adhesive constituting the adhesive resin layer 30 include (meth) acrylic adhesives, silicone adhesives, urethane adhesives, olefin adhesives, and styrene adhesives.
- a (meth) acrylic pressure-sensitive adhesive having a (meth) acrylic polymer as a base polymer is preferable from the viewpoint that the adhesive force can be easily adjusted.
- a radiation cross-linking pressure-sensitive adhesive that reduces the pressure-sensitive adhesive force by radiation can be used. Since the adhesive resin layer 30 composed of the radiation-crosslinking adhesive is cross-linked by radiation irradiation and the adhesive strength is remarkably reduced, the semiconductor chip 90 is picked up from the adhesive resin layer 30 in the pick-up process of the semiconductor chip 90. It becomes easy to do. Examples of radiation include ultraviolet rays, electron beams, and infrared rays. As the radiation crosslinking adhesive, an ultraviolet crosslinking adhesive is preferable.
- Examples of the (meth) acrylic polymer contained in the (meth) acrylic adhesive include, for example, a homopolymer of a (meth) acrylic ester compound, a copolymer of a (meth) acrylic ester compound and a comonomer, and the like. Can be mentioned.
- Examples of (meth) acrylic acid ester compounds include methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, hydroxyethyl (meth) acrylate, and hydroxypropyl (meth).
- Examples include acrylate, dimethylaminoethyl (meth) acrylate, and glycidyl (meth) acrylate. These (meth) acrylic acid ester compounds may be used individually by 1 type, and may be used in combination of 2 or more types.
- Examples of the comonomer constituting the (meth) acrylic copolymer include vinyl acetate, (meth) acrylonitrile, (meth) acrylamide, styrene, (meth) acrylic acid, itaconic acid, methylol (meth) acrylamide, And maleic anhydride. These comonomers may be used individually by 1 type, and may be used in combination of 2 or more types.
- the radiation-crosslinking-type pressure-sensitive adhesive is, for example, a pressure-sensitive adhesive such as the above (meth) acrylic pressure-sensitive adhesive, a crosslinkable compound (component having a carbon-carbon double bond), a photopolymerization initiator or a thermal polymerization initiator, including.
- crosslinkable compound examples include monomers, oligomers or polymers having a carbon-carbon double bond in the molecule and capable of crosslinking by radical polymerization.
- crosslinkable compounds include trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, tetraethylene glycol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, neo Esters of (meth) acrylic acid and polyhydric alcohols such as pentyl glycol di (meth) acrylate and dipentaerythritol hexa (meth) acrylate; ester (meth) acrylate oligomers; 2-propenyl di-3-butenyl cyanurate, 2 -Isocyanurates or isocyanurate compounds such as hydroxyethylbis (2- (meth) acryloxyethyl) isocyanurate and tris
- the content of the crosslinkable compound is preferably 5 to 900 parts by weight, more preferably 5 to 100 parts by weight, and still more preferably 10 to 50 parts by weight with respect to 100 parts by weight of the adhesive.
- the content of the crosslinkable compound is within the above range, it becomes easier to adjust the adhesive force than when the content is less than the above range, and the sensitivity to heat and light is higher than when the content is more than the above range.
- the storage stability is less likely to decrease due to the excessively high value.
- the photopolymerization initiator may be any compound that can be cleaved by irradiation to generate radicals, such as benzoin alkyl ethers such as benzoin methyl ether, benzoin isopropyl ether, and benzoin isobutyl ether; benzyl, benzoin, and benzophenone.
- aromatic ketones such as ⁇ -hydroxycyclohexyl phenyl ketone; aromatic ketals such as benzyldimethyl ketal; polyvinylbenzophenone; thioxanthones such as chlorothioxanthone, dodecylthioxanthone, dimethylthioxanthone, and diethylthioxanthone.
- thermal polymerization initiator examples include organic peroxide derivatives and azo polymerization initiators.
- An organic peroxide derivative is preferable because nitrogen is not generated during heating.
- thermal polymerization initiator examples include ketone peroxide, peroxyketal, hydroperoxide, dialkyl peroxide, diacyl peroxide, peroxyester, and peroxydicarbonate.
- crosslinking agent examples include epoxy compounds such as sorbitol polyglycidyl ether, polyglycerol polyglycidyl ether, pentaerythritol polyglycidyl ether, diglycerol polyglycidyl ether; tetramethylolmethane-tri- ⁇ -aziridinylpropionate , Trimethylolpropane-tri- ⁇ -aziridinylpropionate, N, N′-diphenylmethane-4,4′-bis (1-aziridinecarboxamide), N, N′-hexamethylene-1,6-bis Aziridine compounds such as (1-aziridinecarboxamide); isocyanate compounds such as tetramethylene diisocyanate, hexamethylene diisocyanate, and polyisocyanate.
- epoxy compounds such as sorbitol polyglycidyl ether, polyglycerol polyglycidyl ether, pentaerythri
- the content of the crosslinking agent is 0.1 parts by mass or more and 10 parts by mass or less with respect to 100 parts by mass of the (meth) acrylic polymer from the viewpoint of improving the balance between the heat resistance and adhesion of the adhesive resin layer 30. It is preferable that
- the thickness of the adhesive resin layer 30 is not particularly limited, for example, it is preferably 1 ⁇ m or more and 100 ⁇ m or less, and more preferably 3 ⁇ m or more and 50 ⁇ m or less.
- the adhesive resin layer 30 can be formed by, for example, applying an adhesive coating solution on the unevenness absorbent resin layer 20.
- a conventionally known coating method such as a roll coater method, a reverse roll coater method, a gravure roll method, a bar coat method, a comma coater method, a die coater method, or the like can be employed.
- drying conditions of the applied pressure-sensitive adhesive but in general, drying is preferably performed for 10 seconds to 10 minutes in a temperature range of 80 to 200 ° C. More preferably, it is dried at 80 to 170 ° C. for 15 seconds to 5 minutes.
- it may be heated at 40 to 80 ° C. for about 5 to 300 hours.
- the total light transmittance of the adhesive film 50 according to this embodiment is preferably 85% or more, and more preferably 90% or more. In this way, transparency can be imparted to the adhesive film 50. And by making radiation transmittance from the solvent-resistant resin layer 10 side in the adhesive film 50 which concerns on this embodiment by making the total light transmittance of the adhesive film 50 more than the said lower limit, it is an adhesive resin layer. 30 can be more effectively irradiated with radiation, and the radiation irradiation efficiency can be improved.
- the total light transmittance of the adhesive film 50 can be measured according to JIS K7105 (1981).
- the uneven absorbent resin layer 20 is formed on one surface of the solvent-resistant resin layer 10 by extrusion lamination.
- the pressure-sensitive adhesive resin layer 30 is formed by applying and drying the pressure-sensitive adhesive coating solution on the unevenness-absorbing resin layer 20, and the pressure-sensitive adhesive film 50 is obtained.
- the solvent-resistant resin layer 10 and the uneven absorbent resin layer 20 may be formed by coextrusion molding, or the film-like solvent resistant resin layer 10 and the film-like uneven absorbent resin layer 20 are laminated. (Lamination) may be formed.
- the adhesive film 50 preferably further includes an adhesive layer (not shown) between the solvent resistant resin layer 10 and the uneven absorbent resin layer 20.
- the adhesive layer may be, for example, a (meth) acrylic polymer having an alkyl ester of (meth) acrylic acid or a (meth) acrylic / methacrylic acid ester / unsaturated carboxylic acid terpolymer (meth).
- the adhesive film 50 according to the present embodiment may further have a release layer such as a release film laminated on the adhesive resin layer 30.
- a release layer such as a release film laminated on the adhesive resin layer 30.
- the polyester film etc. to which the mold release process was given are mentioned, for example.
- the release layer is removed from the adhesive resin layer 30 before the adhesive film 50 is attached to the second circuit surface 65B of the semiconductor wafer 60.
- the semiconductor device manufacturing method according to the present embodiment includes at least the following three steps.
- a step of preparing a structure 100 including a support member 80 provided on the circuit surface 65A side via an adhesive layer 70 and an adhesive film bonded to the second circuit surface 65B side of the semiconductor wafer 60 (B Step for removing support member 80 from structure 100
- C Step for removing residue of adhesive layer 70 on first circuit surface 65A side of semiconductor wafer 60 with a solvent And method for manufacturing semiconductor device according to this embodiment Then, the adhesive film 50 for semiconductor device manufacture which concerns on this embodiment mentioned above is used as said adhesive film.
- a structure 100 including a support member 80 provided on the surface 65A side through an adhesive layer 70 and an adhesive film 50 bonded to the second circuit surface 65B side of the semiconductor wafer 60 is prepared.
- Such a structure can be produced, for example, by the following procedure.
- the support member 80 is bonded to the first circuit surface 65A of the semiconductor wafer 60 having the first circuit surface 65A including the first circuit pattern 63A via the adhesive layer 70.
- the back surface side opposite to the first circuit surface 65A of the semiconductor wafer is processed to form a second circuit surface 65B including the second circuit pattern 63B.
- the structure 100 can be manufactured by attaching the semiconductor wafer 60 to the adhesive film 50 so that the second circuit surface 65B side faces the adhesive resin layer 30.
- the semiconductor wafer 60 is not particularly limited, and examples thereof include semiconductor wafers such as silicon, germanium, gallium-arsenic, gallium-phosphorus, and gallium-arsenic-aluminum.
- the support member 80 For example, a glass substrate, a ceramic substrate, a metal substrate etc. can be used.
- a method of bonding the support member 80 on the first circuit surface 65A of the semiconductor wafer 60 for example, after applying an adhesive on the first circuit surface 65A of the semiconductor wafer 60, the applied adhesive is dried and bonded.
- a method of forming the agent layer 70 and then bonding the support member 80 onto the adhesive layer 70 is exemplified.
- a well-known adhesive agent can be used, for example, a (meth) acrylic-type adhesive agent, an epoxy-type adhesive agent, a silicone type adhesive agent, a urethane type adhesive agent Olefin-based adhesives, styrene-based adhesives, and the like. Of these, olefin-based adhesives are preferable.
- the adhesive film 50 may be attached to the semiconductor wafer 60 by a human hand, but is usually performed by an automatic attaching machine equipped with a roll-shaped surface protective film. There are no particular restrictions on the temperature of the adhesive film 50 and the semiconductor wafer 60 at the time of attachment, but 25 ° C. to 80 ° C. is preferable. Further, the pressure between the adhesive film 50 and the semiconductor wafer 60 at the time of attachment is not particularly limited, but is preferably 0.3 MPa to 0.5 MPa.
- the support member 80 is removed from the structure 100.
- the support member 80 may be peeled off by hand, but can be generally performed by an apparatus called an automatic peeling machine.
- the residue of the adhesive layer 70 on the first circuit surface 65A side of the semiconductor wafer 60 is removed with a solvent.
- the solvent include ketone solvents such as acetone, methyl ethyl ketone, methyl isoamyl ketone, 2-heptanone, and cyclohexanone; ethylene glycol, propylene glycol, diethylene glycol, ethylene glycol monoacetate, propylene glycol monoacetate, diethylene glycol monoacetate, or monomethyl thereof.
- Polyhydric alcohol solvents such as ether, monoethyl ether, monopropyl ether, monobutyl ether or monophenyl ether; cyclic ether solvents such as dioxane; ethyl lactate, methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, pyruvin Ester solvents such as ethyl acetate, methyl methoxypropionate, ethyl ethoxypropionate; hexane, cyclohexane, methyl Hydrocarbon solvents such as chlorohexane, benzene, tetramethylbenzene, toluene, xylene, limonene, myrcene, menthane, n-nonane, n-decane, 1-decene, isononane, isodecane, isoundecane, isododecane,
- a hydrocarbon solvent is preferable from the viewpoint of excellent balance of the removal performance of the adhesive layer 70 and the price.
- the solubility parameter of the solvent is preferably less than 9.0. When such a solvent is used, the residue of the adhesive layer 70 can be more efficiently removed, and the swelling or deformation of the adhesive film 50 can be further suppressed.
- the solubility parameter of the solvent is a value defined by regular solution theory introduced by Hildebrand.
- Process (D) In the method for manufacturing a semiconductor device according to the present embodiment, it is preferable to further include a step (D) of obtaining a plurality of semiconductor chips 90 by dicing the semiconductor wafer 60 after the step (C). Dicing of the semiconductor chip 90 can be performed by a known method.
- dicing An operation of dividing the semiconductor wafer 60 by providing the semiconductor wafer 60 with a cut having the same depth as the thickness of the semiconductor wafer 60 to obtain a plurality of divided semiconductor chips 90 (hereinafter referred to as “full-cut dicing”). "), And (B) An operation for providing a plurality of semiconductor chips 90 by irradiating a laser beam with an altered region that does not reach the cutting of the semiconductor wafer 60 (hereinafter also referred to as “stealth dicing”). Is included.
- the dicing can be performed using a dicing blade (dicing saw), laser light, or the like.
- the semiconductor wafer 60 When dicing is full cut dicing, the semiconductor wafer 60 is divided into a plurality of semiconductor chips 90 by dicing. On the other hand, when the dicing is stealth dicing, the semiconductor wafer 60 is not divided into a plurality of semiconductor chips 90 only by dicing, and the semiconductor wafer 60 is divided by expansion of the adhesive film 50 after dicing. Thus, a plurality of divided semiconductor chips 90 are obtained.
- a step (E) of picking up the semiconductor chip 90 from the adhesive resin layer 30 may be further performed after the step (D). With this pickup, the semiconductor chip 90 can be peeled from the adhesive film 50.
- the semiconductor chip 90 can be picked up by a known method.
- the adhesive resin layer 30 in the state where the region where the semiconductor chip 90 is attached is expanded in the in-plane direction of the film and the interval between the adjacent semiconductor chips 90 is expanded. It is preferable to pick up the semiconductor chip 90 from the layer 30. By doing so, the interval between the adjacent semiconductor chips 90 is enlarged, so that the semiconductor chips 90 can be easily picked up from the adhesive film 50. Furthermore, since the adhesive force between the semiconductor chip 90 and the adhesive resin layer 30 is reduced due to the shear stress between the semiconductor chip 90 and the adhesive resin layer 30 caused by the expansion in the in-plane direction of the adhesive film 50, the adhesiveness is reduced. It becomes easy to pick up the semiconductor chip 90 from the film 50.
- the adhesive resin layer for the semiconductor chip 90 is formed by irradiating the adhesive film 50 with radiation before the step (E) to crosslink the adhesive resin layer 30. It is preferable to further include a step (F) of reducing the adhesive strength of 30. By performing the step (F), the semiconductor chip 90 can be more easily picked up from the adhesive resin layer 30. Moreover, it can further suppress that the surface of the semiconductor chip 90 is contaminated by the adhesive component constituting the adhesive resin layer 30. Radiation is irradiated from the solvent-resistant resin layer 10 side of the adhesive film 50, for example.
- the dose of ultraviolet rays applied to the adhesive film 50 is preferably 100 mJ / cm 2 or more, and more preferably 350 mJ / cm 2 or more.
- the dose of ultraviolet rays is equal to or more than the lower limit, the adhesive strength of the adhesive resin layer 30 can be sufficiently reduced, and as a result, generation of adhesive residue on the surface of the semiconductor chip 90 can be further suppressed.
- the dose of ultraviolet irradiation against adhesive film 50 from the viewpoint of productivity, for example, at 1500 mJ / cm 2 or less, preferably 1200 mJ / cm 2 or less.
- Ultraviolet irradiation can be performed using, for example, a high-pressure mercury lamp or LED.
- the step (F) may be performed before the step (D) or after the step (D), but is preferably performed after the step (D).
- the method for manufacturing a semiconductor device according to the present embodiment may include other steps other than those described above. As other steps, known steps can be used in the method of manufacturing a semiconductor device.
- step (E) an arbitrary process generally performed in a manufacturing process of electronic components such as a process of mounting the obtained semiconductor chip 90 on a circuit board, a wire bonding process, a sealing process, etc. You may perform a process etc. further.
- the method may further include a step of forming an electrode and a protective film on the non-circuit surface by a method usually used for the circuit formation surface of the semiconductor wafer 60.
- the manufacturing method provided with the process of performing electrode formation and resin sealing is also called WLP (Wafer Level Package).
- you may further have the process of forming a rewiring layer in the circuit surface of the semiconductor wafer 60.
- FIG. A semiconductor device obtained by forming a redistribution layer in a wide region exceeding the semiconductor chip area is also called a fan-out package.
- Solvent resistant resin 1 soft polyvinyl chloride (solubility parameter: 9.8, tensile elastic modulus (E ′) at 25 ° C .: 150 MPa (measured according to JIS K7161))
- Concavity and convexity absorbent resin 1 Ethylene / ⁇ -olefin copolymer (Mitsui Chemicals, trade name: TAFMER (registered trademark))
- Concavity and convexity absorbent resin 2 Ethylene / vinyl acetate copolymer (Mitsui DuPont Polychemical Co., Ltd., trade name: EVAFLEX (registered trademark))
- Adhesive 1 Acrylic adhesive (manufactured by Soken Chemical Co., Ltd., trade name: SK Dyne (registered trademark))
- Adhesive 1 Olefin adhesive resin (Mitsui Chemicals, trade name: Apel (registered trademark))
- Example 1 On a soft polyvinyl chloride film (thickness: 70 ⁇ m) composed of the solvent-resistant resin 1, an acrylic adhesive (manufactured by Toagosei Co., Ltd., trade name: Aron Tuck) was applied at a thickness of 10 ⁇ m. Subsequently, the film (thickness: 100 micrometers) comprised by the uneven
- Example 2 A pressure-sensitive adhesive film is obtained in the same manner as in Example 1 except that a film (thickness: 100 ⁇ m) made of the uneven absorbent resin 2 is used instead of the film made of the uneven absorbent resin 1. Table 1 shows the results obtained when the following evaluation was performed on the adhesive film obtained in Example 2.
- the adhesive film of Example 1 was excellent in followability to the circuit pattern and solvent resistance. Moreover, since the adhesive film of Example 2 also has an uneven
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Abstract
Description
ここで、サポート部材から剥離された半導体ウェハは、その後、ダイシング工程に移され、個々の半導体チップに分断される。このとき、半導体ウェハのハンドリング性を良好に保つ観点から、半導体ウェハの裏面の回路パターン形成後に、半導体ウェハの回路パターンにダイシングテープが貼り合わされ、その後に、半導体ウェハからサポート部材が剥離される。サポート部材を剥離した後に回路パターンに残存する接着剤残渣は、溶剤により洗浄される。
ここで、溶剤による接着剤残渣の洗浄は、半導体ウェハがダイシングテープに貼られた状態で行われるため、ダイシングテープには高い耐溶剤性が求められる。
まず、両面に回路パターンが形成された半導体ウェハに使用される粘着性フィルムには、回路面との密着性を良好にする観点から、回路面の凹凸に追従する特性が求められる。そのため、このような粘着性フィルムには凹凸追従性に優れる樹脂層が使用されていた。
しかし、本発明者の検討によれば、凹凸追従性に優れる樹脂層は耐溶剤性に劣ることを知見した。
さらに、本発明者の検討によれば、耐溶剤性に優れる粘着性フィルムを使用すると、今度は凹凸追従性が悪化することが明らかになった。凹凸追従性が悪いと、溶剤が粘着性フィルムと回路面の隙間に入ってきてしまい、粘着性フィルムが剥れる等の問題が生じてしまう。
つまり、本発明者の検討によれば、サポート部材を使用した半導体装置の製造方法に使用される、従来の粘着性フィルムには、回路パターンへの追従性と耐溶剤性との間には、トレードオフの関係が存在することが明らかになった。すなわち、本発明者は、従来の粘着性フィルムには、回路パターンへの追従性および耐溶剤性をバランスよく向上させるという観点において、改善の余地があることを見出した。
第1回路パターンを含む第1回路面および上記第1回路面の反対側の第2回路パターンを含む第2回路面を有する半導体ウェハと、上記半導体ウェハの上記第1回路面側に接着剤層を介して設けられたサポート部材と、上記半導体ウェハの上記第2回路面側に貼り合わされた粘着性フィルムと、を備える構造体を準備する工程と、
上記構造体から上記サポート部材を除去する工程と、
上記半導体ウェハの上記第1回路面側の上記接着剤層の残渣を溶剤により除去する工程と、を少なくとも備える半導体装置の製造方法における上記粘着性フィルムであって、
耐溶剤性樹脂層と、凹凸吸収性樹脂層と、粘着性樹脂層と、をこの順番に有し、
上記粘着性樹脂層が上記半導体ウェハの上記第2回路面側になるように用いられる半導体装置製造用粘着性フィルム。
[2]
上記[1]に記載の半導体装置製造用粘着性フィルムにおいて、
上記耐溶剤性樹脂層は溶解度パラメータが9.0以上である樹脂を含む半導体装置製造用粘着性フィルム。
[3]
上記[1]または[2]に記載の半導体装置製造用粘着性フィルムにおいて、
上記耐溶剤性樹脂層は25℃の条件での引張弾性率(E')が300MPa以下である樹脂を含む半導体装置製造用粘着性フィルム。
[4]
上記[1]乃至[3]いずれか一つに記載の半導体装置製造用粘着性フィルムにおいて、
上記溶剤の溶解度パラメータが9.0未満である半導体装置製造用粘着性フィルム。
[5]
上記[1]乃至[4]いずれか一つに記載の半導体装置製造用粘着性フィルムにおいて、
上記溶剤が炭化水素系溶剤を含む半導体装置製造用粘着性フィルム。
[6]
上記[1]乃至[5]いずれか一つに記載の半導体装置製造用粘着性フィルムにおいて、
上記耐溶剤性樹脂層と、上記凹凸吸収性樹脂層との間に接着層をさらに有する半導体装置製造用粘着性フィルム。
[7]
上記[6]に記載の半導体装置製造用粘着性フィルムにおいて、
上記接着層が(メタ)アクリル系接着剤およびポリオレフィン系接着剤から選択される少なくとも一種を含む半導体装置製造用粘着性フィルム。
[8]
上記[1]乃至[7]いずれか一つに記載の半導体装置製造用粘着性フィルムにおいて、
上記耐溶剤性樹脂層がポリ塩化ビニル系樹脂、ポリ塩化ビニリデン系樹脂、ポリ酢酸ビニル系樹脂、ポリエステル、ポリイミド、およびポリアミドからなる群から選択される一種または二種以上を含む半導体装置製造用粘着性フィルム。
[9]
上記[1]乃至[8]いずれか一つに記載の半導体装置製造用粘着性フィルムにおいて、
上記凹凸吸収性樹脂層がポリオレフィン系樹脂、ポリスチレン系樹脂、および(メタ)アクリル系樹脂からなる群から選択される一種または二種以上を含む半導体装置製造用粘着性フィルム。
[10]
上記[9]に記載の半導体装置製造用粘着性フィルムにおいて、
上記凹凸吸収性樹脂層がエチレン・α-オレフィン共重合体およびエチレン・酢酸ビニル共重合体から選択される少なくとも一種を含む半導体装置製造用粘着性フィルム。
[11]
上記[1]乃至[10]いずれか一つに記載の半導体装置製造用粘着性フィルムにおいて、
上記粘着性樹脂層を構成する粘着剤が(メタ)アクリル系粘着剤、シリコーン系粘着剤、ウレタン系粘着剤、オレフィン系粘着剤、およびスチレン系粘着剤から選択される一種または二種以上を含む半導体装置製造用粘着性フィルム。
[12]
第1回路パターンを含む第1回路面および上記第1回路面の反対側の第2回路パターンを含む第2回路面を有する半導体ウェハと、上記半導体ウェハの上記第1回路面側に接着剤層を介して設けられたサポート部材と、上記半導体ウェハの上記第2回路面側に貼り合わされた粘着性フィルムと、を備える構造体を準備する工程と、
上記構造体から上記サポート部材を除去する工程と、
上記半導体ウェハの上記第1回路面側の上記接着剤層の残渣を溶剤により除去する工程と、を少なくとも備える半導体装置の製造方法であって、
上記粘着性フィルムとして、上記[1]乃至[11]いずれか一つに記載の半導体装置製造用粘着性フィルムを用いる半導体装置の製造方法。
図1に示すように、本実施形態に係る半導体装置製造用粘着性フィルム50(以下、「粘着性フィルム50」とも示す。)は以下の工程(A)~(C)を少なくとも備える半導体装置の製造方法における粘着性フィルムであって、耐溶剤性樹脂層10と、凹凸吸収性樹脂層20と、粘着性樹脂層30と、をこの順番に有し、粘着性樹脂層30が半導体ウェハ60の第2回路面65B側になるように用いられるものである。
(A)第1回路パターン63Aを含む第1回路面65Aおよび第1回路面65Aの反対側の第2回路パターン63Bを含む第2回路面65Bを有する半導体ウェハ60と、半導体ウェハ60の第1回路面65A側に接着剤層70を介して設けられたサポート部材80と、半導体ウェハ60の第2回路面65B側に貼り合わされた粘着性フィルム50と、を備える構造体100を準備する工程
(B)構造体100からサポート部材80を除去する工程
(C)半導体ウェハ60の第1回路面65A側の接着剤層70の残渣を溶剤により除去する工程
まず、両面に回路パターンが形成された半導体ウェハに使用される粘着性フィルムには、回路面との密着性を良好にする観点から、回路面の凹凸に追従する特性が求められる。そのため、このような粘着性フィルムには凹凸追従性に優れる樹脂層が使用されていた。
しかし、本発明者の検討によれば、凹凸追従性に優れる樹脂層は耐溶剤性に劣ることを知見した。
つまり、本発明者の検討によれば、サポート部材を使用した半導体装置の製造方法に使用される、従来の粘着性フィルムには、回路パターンへの追従性と耐溶剤性との間には、トレードオフの関係が存在することが明らかになった。すなわち、本発明者は、従来の粘着性フィルムには、回路パターンへの追従性および耐溶剤性をバランスよく向上させるという観点において、改善の余地があることを見出した。
粘着性フィルム50が耐溶剤性樹脂層10を備えることにより、粘着性フィルム50が溶剤に浸されても粘着性フィルム50全体の膨潤や変形を抑制することができ、粘着性フィルム50の耐溶剤性を良好にすることができる。また、粘着性フィルム50が凹凸吸収性樹脂層20を備えることにより、回路パターンの凹凸の吸収性が良好になり、粘着性フィルム50の回路パターンへの追従性を向上させることができる。
以上から、本実施形態に係る粘着性フィルム50によれば、回路パターンへの追従性と耐溶剤性とを両立することができる。
以下、本実施形態に係る半導体装置の製造方法で用いる粘着性フィルム50について説明する。
耐溶剤性樹脂層10は、粘着性フィルム50の耐溶剤性や取り扱い性、機械的特性等の特性をより良好にすることを目的として設けられる層である。
耐溶剤性樹脂層10は、接着剤層70の残渣を除去する際に使用する溶剤に対し、膨潤や変形等が起きない程度の耐溶剤性があれば特に限定されないが、例えば、耐溶剤性樹脂により構成された樹脂フィルムが挙げられる。
このような耐溶剤性樹脂を用いると、接着剤層70の残渣を除去する際の粘着性フィルム50の膨潤や変形等をより一層抑制することができる。
本実施形態において、溶解度パラメータはヒルデブラント(Hildebrand)によって導入された正則溶液論により定義された値である。
耐溶剤性樹脂層10を構成する耐溶剤性樹脂の溶解度パラメータの上限は特に限定されないが、例えば30.0以下であり、好ましくは20.0以下であり、より好ましくは15.0以下である。
このような耐溶剤性樹脂を用いると、粘着性フィルム50の伸縮性や柔軟性が向上し、半導体チップ90をピックアップする工程において粘着性フィルム50を面内方向に拡張し易くなる。
こうすることにより、隣接する半導体チップ90間の間隔が拡大し易くなるため、粘着性フィルム50から半導体チップ90をピックアップし易くなる。さらに、粘着性フィルム50の面内方向の拡張によって生じる、半導体チップ90と粘着性樹脂層30とのずり応力により、半導体チップ90と粘着性樹脂層30との粘着力が低下し易くなるため、粘着性フィルム50から半導体チップ90をピックアップし易くなる。
さらに、引張弾性率(E')が上記上限値以下である耐溶剤性樹脂を用いると、粘着性フィルム50の全体の凹凸吸収性がより一層向上し、半導体ウェハ60の回路パターンを含む回路面の凹凸に追従し、半導体ウェハ60の回路面と粘着性フィルム50との密着性をより一層向上させることができる。
引張弾性率(E')はJIS K7161に従って測定することができる。
また、耐溶剤性樹脂層10を形成するために使用する樹脂フィルムの形態としては、延伸フィルムであってもよいし、一軸方向または二軸方向に延伸したフィルムであってもよいが、耐溶剤性樹脂層10の耐溶剤性および機械的強度を向上させる観点から、一軸方向または二軸方向に延伸したフィルムであることが好ましい。
耐溶剤性樹脂層10は他の層との接着性を改良するために、表面処理を行ってもよい。具体的には、コロナ処理、プラズマ処理、アンダーコート処理、プライマーコート処理等を行ってもよい。
凹凸吸収性樹脂層20は、粘着性フィルム50の回路パターンへの追従性を良好にし、回路面との粘着性フィルム50の密着性を良好にすることを目的として設けられる層である。
凹凸吸収性樹脂層20を備えることで、粘着性フィルム50全体の凹凸吸収性が向上し、半導体ウェハ60の回路パターンを含む回路面の凹凸に追従し、半導体ウェハ60の回路面と粘着性フィルム50との密着性を向上させることができる。さらに半導体ウェハ60を加工する際に加わる外力等によって半導体ウェハ60の表面に形成された回路パターンが割れることを抑制することができる。
これらの中でも、凹凸吸収性により優れる点で、低密度ポリエチレン;ポリプロピレン;エチレン・プロピレン共重合体、エチレン・1-ブテン共重合体、エチレン・プロピレン・炭素原子数4~12のα-オレフィンの三元共重合体等のエチレン・α-オレフィン共重合体;プロピレン・1-ブテン・炭素原子数5~12のα-オレフィンの三元共重合体;エチレン・酢酸ビニル共重合体等が好ましく、エチレン・α-オレフィン共重合体およびエチレン・酢酸ビニル共重合体がより好ましい。
(メタ)アクリル系樹脂としては、(メタ)アクリル酸のアルキルエステルを成分とする(メタ)アクリル系重合体等が挙げられる。
粘着性樹脂層30は、凹凸吸収性樹脂層20の一方の面側に設けられる層であり、粘着性フィルム50を半導体ウェハ60に貼り付ける際に、半導体ウェハ60の第2回路面65Bに接触して粘着する層である。
放射線架橋型粘着剤としては、紫外線架橋型粘着剤が好ましい。
また、(メタ)アクリル系共重合体を構成するコモノマーとしては、例えば、酢酸ビニル、(メタ)アクリルニトリル、(メタ)アクリルアミド、スチレン、(メタ)アクリル酸、イタコン酸、メチロール(メタ)アクリルアミド、無水マレイン酸等が挙げられる。これらのコモノマーは一種単独で用いてもよく、二種以上を併用して用いてもよい。
なお、粘着剤が、ポリマーの側鎖に炭素-炭素二重結合を有する放射線架橋型ポリマーである場合は、架橋性化合物を加えなくてもよい。
架橋剤の含有量は、粘着性樹脂層30の耐熱性や密着力とのバランスを向上させる観点から、(メタ)アクリル系重合体100質量部に対し、0.1質量部以上10質量部以下であることが好ましい。
粘着剤塗布液を塗布する方法としては、従来公知の塗布方法、例えば、ロールコーター法、リバースロールコーター法、グラビアロール法、バーコート法、コンマコーター法、ダイコーター法等が採用できる。塗布された粘着剤の乾燥条件には特に制限はないが、一般的には、80~200℃の温度範囲において、10秒~10分間乾燥することが好ましい。更に好ましくは、80~170℃において、15秒~5分間乾燥する。架橋剤と粘着剤との架橋反応を十分に促進させるために、粘着剤塗布液の乾燥が終了した後、40~80℃において5~300時間程度加熱してもよい。
まず、耐溶剤性樹脂層10の一方の面に凹凸吸収性樹脂層20を押出しラミネート法によって形成する。次いで、凹凸吸収性樹脂層20上に粘着剤塗布液を塗布し乾燥させることによって、粘着性樹脂層30を形成し、粘着性フィルム50が得られる。
また、耐溶剤性樹脂層10と凹凸吸収性樹脂層20とは共押出成形によって形成してもよいし、フィルム状の耐溶剤性樹脂層10とフィルム状の凹凸吸収性樹脂層20とをラミネート(積層)して形成してもよい。
本実施形態に係る粘着性フィルム50は、耐溶剤性樹脂層10と、凹凸吸収性樹脂層20との間に接着層(図示せず)をさらに有することが好ましい。これにより、耐溶剤性樹脂層10と凹凸吸収性樹脂層20との密着性を向上させることができる。
上記接着層は、例えば、(メタ)アクリル酸のアルキルエステルを成分とする(メタ)アクリル系重合体、エチレン・(メタ)アクリル酸エステル・不飽和カルボン酸三元共重合体等の(メタ)アクリル系接着剤;変性ポリオレフィン樹脂等のポリオレフィン系接着剤等が挙げられる。これらの中でも(メタ)アクリル系接着剤が好ましい。
本実施形態に係る粘着性フィルム50は、粘着性樹脂層30上に離型フィルム等の離型層をさらに積層させてもよい。離型層としては、例えば、離型処理が施されたポリエステルフィルム等が挙げられる。なお、離型層は、粘着性フィルム50を半導体ウェハ60の第2回路面65Bに貼り付ける前に粘着性樹脂層30から取り除かれる。
次に、本実施形態に係る半導体装置の製造方法について説明する。
本実施形態に係る半導体装置の製造方法は、以下の3つの工程を少なくとも備えている。
(A)第1回路パターン63Aを含む第1回路面65Aおよび第1回路面65Aの反対側の第2回路パターン63Bを含む第2回路面65Bを有する半導体ウェハ60と、半導体ウェハ60の第1回路面65A側に接着剤層70を介して設けられたサポート部材80と、半導体ウェハ60の第2回路面65B側に貼り合わされた粘着性フィルムと、を備える構造体100を準備する工程
(B)構造体100からサポート部材80を除去する工程
(C)半導体ウェハ60の第1回路面65A側の接着剤層70の残渣を溶剤により除去する工程
そして、本実施形態に係る半導体装置の製造方法では、上記粘着性フィルムとして、前述した本実施形態に係る半導体装置製造用粘着性フィルム50を用いる。
はじめに、第1回路パターン63Aを含む第1回路面65Aおよび第1回路面65Aの反対側の第2回路パターン63Bを含む第2回路面65Bを有する半導体ウェハ60と、半導体ウェハ60の第1回路面65A側に接着剤層70を介して設けられたサポート部材80と、半導体ウェハ60の第2回路面65B側に貼り合わされた粘着性フィルム50と、を備える構造体100を準備する。
まず、第1回路パターン63Aを含む第1回路面65Aを有する半導体ウェハ60の第1回路面65A上に接着剤層70を介してサポート部材80を貼り合わせる。次いで、半導体ウェハの第1回路面65Aとは反対側の裏面側を回路加工し、第2回路パターン63Bを含む第2回路面65Bを形成する。
次いで、第2回路面65B側が粘着性樹脂層30と対向するように半導体ウェハ60を粘着性フィルム50に貼り付けることにより構造体100を作製することができる。
半導体ウェハ60の第1回路面65A上にサポート部材80を貼り合わせる方法としては、例えば、半導体ウェハ60の第1回路面65A上に接着剤を塗布した後、塗布した接着剤を乾燥させて接着剤層70を形成し、次いで、接着剤層70上にサポート部材80を貼り合わせる方法が挙げられる。
貼り付け時の粘着性フィルム50および半導体ウェハ60の温度には特に制限はないが、25℃~80℃が好ましい。
また、貼り付け時の粘着性フィルム50と半導体ウェハ60との圧力については特に制限はないが、0.3MPa~0.5MPaが好ましい。
次いで、構造体100からサポート部材80を除去する。
サポート部材80の剥離は手により行われる場合もあるが、一般には自動剥がし機と称される装置によって行うことができる。
次いで、半導体ウェハ60の第1回路面65A側の接着剤層70の残渣を溶剤により除去する。
溶剤としては、例えば、アセトン、メチルエチルケトン、メチルイソアミルケトン、2-ヘプタノン、シクロヘキサノン等のケトン系溶剤;エチレングリコール、プロピレングリコール、ジエチレングリコール、エチレングリコールモノアセテート、プロピレングリコールモノアセテート、ジエチレングリコールモノアセテートあるいはこれらのモノメチルエーテル、モノエチルエーテル、モノプロピルエーテル、モノブチルエーテルまたはモノフェニルエーテル等の多価アルコール系溶剤;ジオキサン等の環式エーテル系溶剤;乳酸エチル、酢酸メチル、酢酸エチル、酢酸ブチル、ピルビン酸メチル、ピルビン酸エチル、メトキシプロピオン酸メチル、エトキシプロピオン酸エチル等のエステル系溶剤;ヘキサン、シクロヘキサン、メチルシクロヘキサン、ベンゼン、テトラメチルベンゼン、トルエン、キシレン、リモネン、ミルセン、メンタン、n-ノナン、n-デカン、1-デセン、イソノナン、イソデカン、イソウンデカン、イソドデカン、テルピネン、インデン等の炭化水素系溶剤;メタノール、エタノール、プロパノール、イソプロパノール、ブタノール等の一価アルコール系溶剤;γ-ブチロラクトン等のラクトン系溶剤;γ-ブチロラクタム等のラクタム系溶剤;ジエチルエーテルやアニソール等のエーテル系溶剤;ジメチルホルムアルデヒド、ジメチルアセトアルデヒド等のアルデヒド類系溶剤等が挙げられる。
このような溶剤を用いると、接着剤層70の残渣をより効率的に除去しつつ、粘着性フィルム50の膨潤や変形等をより一層抑制することができる。
上記溶剤の溶解度パラメータはヒルデブラント(Hildebrand)によって導入された正則溶液論により定義された値である。
本実施形態に係る半導体装置の製造方法において、工程(C)の後に半導体ウェハ60をダイシングし、複数の半導体チップ90を得る工程(D)をさらに備えることが好ましい。
半導体チップ90のダイシングは、公知の方法で行うことができる。
(a)半導体ウェハ60に対してこの半導体ウェハ60の厚さと同じ深さの切れ込みを設けることによって半導体ウェハ60を分断し、複数の分断された半導体チップ90を得る操作(以下、「フルカットダイシング」ともいう)、および、
(b)レーザー光を照射することにより、半導体ウェハ60に対し、半導体ウェハ60の切断までには至らない変質領域を設け、複数の半導体チップ90を得る操作(以下、「ステルスダイシング」ともいう)が含まれる。
上記ダイシングは、ダイシングブレード(ダイシングソー)、レーザー光等を用いて行うことができる。
一方、ダイシングがステルスダイシングである場合には、ダイシングのみによっては半導体ウェハ60が複数の半導体チップ90に分断されるまでには至らず、ダイシング後の粘着性フィルム50の拡張によって半導体ウェハ60が分断されて複数の分断された半導体チップ90が得られる。
本実施形態に係る半導体装置の製造方法において、工程(D)の後に粘着性樹脂層30から半導体チップ90をピックアップする工程(E)をさらにおこなってもよい。
このピックアップにより、粘着性フィルム50から半導体チップ90を剥離することができる。
半導体チップ90のピックアップは、公知の方法で行うことができる。
こうすることにより、隣接する半導体チップ90間の間隔が拡大するため、粘着性フィルム50から半導体チップ90をピックアップし易くなる。さらに、粘着性フィルム50の面内方向の拡張によって生じる、半導体チップ90と粘着性樹脂層30とのずり応力により、半導体チップ90と粘着性樹脂層30との粘着力が低下するため、粘着性フィルム50から半導体チップ90をピックアップし易くなる。
本実施形態に係る半導体装置の製造方法において、工程(E)の前に粘着性フィルム50に対して放射線を照射し、粘着性樹脂層30を架橋させることで、半導体チップ90に対する粘着性樹脂層30の粘着力を低下させる工程(F)をさらに備えることが好ましい。
工程(F)をおこなうことで、粘着性樹脂層30から半導体チップ90をより一層容易にピックアップすることができる。また、粘着性樹脂層30を構成する粘着成分により半導体チップ90の表面が汚染されることをより一層抑制することができる。
放射線は、例えば、粘着性フィルム50の耐溶剤性樹脂層10側から照射される。
放射線として紫外線を用いる場合、粘着性フィルム50に対して照射する紫外線の線量は、100mJ/cm2以上が好ましく、350mJ/cm2以上がより好ましい。
紫外線の線量が上記下限値以上であると、粘着性樹脂層30の粘着力を十分に低下させることができ、その結果、半導体チップ90表面に糊残りが発生することをより抑制することができる。
また、粘着性フィルム50に対して照射する紫外線の線量の上限は特に限定されないが、生産性の観点から、例えば、1500mJ/cm2以下であり、好ましくは1200mJ/cm2以下である。
紫外線照射は、例えば、高圧水銀ランプやLEDを用いておこなうことができる。
工程(F)は工程(D)の前におこなってもよいし、工程(D)の後におこなってもよいが、工程(D)の後におこなうことが好ましい。
本実施形態に係る半導体装置の製造方法は、上記以外のその他の工程を有していてもよい。その他の工程としては、半導体装置の製造方法において公知の工程を用いることができる。
また、半導体ウェハ60の回路面に再配線層を形成する工程をさらに有してもよい。半導体チップ面積を超える広い領域に再配線層を形成することにより得られる半導体装置は、ファンアウトパッケージ(Fan-out Package)とも呼ばれている。
耐溶剤性樹脂1:軟質ポリ塩化ビニル(溶解度パラメータ:9.8、25℃の条件での引張弾性率(E'):150MPa(JIS K7161に準じて測定))
凹凸吸収性樹脂1:エチレン・α-オレフィン共重合体(三井化学社製、商品名:タフマー(登録商標))
凹凸吸収性樹脂2:エチレン・酢酸ビニル共重合体(三井デュポンポリケミカル社製、商品名:エバフレックス(登録商標))
粘着剤1:アクリル系粘着剤(総研化学社製、商品名:SKダイン(登録商標))
接着剤1:オレフィン系接着樹脂(三井化学社製、商品名:アペル(登録商標))
耐溶剤性樹脂1により構成された軟質ポリ塩化ビニルフィルム(厚さ:70μm)上に、アクリル系接着剤(東亞合成社製、商品名:アロンタック)を厚さ10μmで塗布した。次いでアクリル系接着層上に、凹凸吸収性樹脂層となる凹凸吸収性樹脂1により構成されたフィルム(厚さ:100μm)を積層した。
次いで、得られたフィルムの凹凸吸収性樹脂層上に、粘着剤1の塗布液を塗布した後、乾燥させて、厚さ20μmの粘着性樹脂層を形成し、粘着性フィルムを得た。
得られた粘着性フィルムについて以下の評価をおこなった。得られた結果を表1に示す。
凹凸吸収性樹脂1により構成されたフィルムの代わりに凹凸吸収性樹脂2により構成されたフィルム(厚さ:100μm)を使用する以外は実施例1と同様にして粘着性フィルムを得る。
実施例2で得られる粘着性フィルムについて以下の評価をおこなった場合、得られる結果を表1に示す。
凹凸吸収性樹脂層となる凹凸吸収性樹脂1により構成されたフィルム(厚さ:200μm)上に、粘着剤1の塗布液を塗布した後、乾燥させて、厚さ20μmの粘着性樹脂層を形成し、粘着性フィルムを得た。
得られた粘着性フィルムについて以下の評価をおこなった。得られた結果を表1に示す。
耐溶剤性樹脂1により構成された軟質ポリ塩化ビニルフィルム(厚さ:70μm)上に、粘着剤1の塗布液を塗布した後、乾燥させて、厚さ20μmの粘着性樹脂層を形成し、粘着性フィルムを得た。
得られた粘着性フィルムについて以下の評価をおこなった。得られた結果を表1に示す。
(1)回路パターンへの追従性の評価
実施例・比較例で得られた粘着性フィルムを使用して図2に示す構造体100からサポート部材80を除いた構造体Aを作製した。ここで、接着剤層70を形成するための接着剤としては接着剤1を用いた。次いで、得られた構造体Aをリモネン(溶解度パラメータ:7.8)に25℃で10分間浸漬し、接着剤層70を除去した。
次いで、下記の基準で粘着性フィルムの回路パターンへの追従性を評価した。
〇:半導体ウェハと粘着性フィルムの剥離が観察されず、半導体ウェハの回路面と粘着性フィルムとの密着性が良好であった。
×:半導体ウェハと粘着性フィルムの剥離が観察され、半導体ウェハの回路面と粘着性フィルムとの密着性が劣っていた。
得られた粘着性フィルムをリモネン(溶解度パラメータ:7.8)に25℃で10分間浸漬した。次いで、下記の基準で粘着性フィルムの耐溶剤性を評価した。
〇:目視により、粘着性フィルムの膨潤や変形が観察されなかった
×:目視により、粘着性フィルムの膨潤や変形が観察された
これに対し、耐溶剤性樹脂層を有さない比較例1の粘着性フィルムは回路パターンへの追従性および耐溶剤性が劣っていた。また、凹凸吸収性樹脂層を有さない比較例2の粘着性フィルムは回路パターンへの追従性が劣っていた。
すなわち、比較例1および2の粘着性フィルムでは、回路パターンへの追従性と耐溶剤性とを両立できないことが理解できる。
Claims (12)
- 第1回路パターンを含む第1回路面および前記第1回路面の反対側の第2回路パターンを含む第2回路面を有する半導体ウェハと、前記半導体ウェハの前記第1回路面側に接着剤層を介して設けられたサポート部材と、前記半導体ウェハの前記第2回路面側に貼り合わされた粘着性フィルムと、を備える構造体を準備する工程と、
前記構造体から前記サポート部材を除去する工程と、
前記半導体ウェハの前記第1回路面側の前記接着剤層の残渣を溶剤により除去する工程と、を少なくとも備える半導体装置の製造方法における前記粘着性フィルムであって、
耐溶剤性樹脂層と、凹凸吸収性樹脂層と、粘着性樹脂層と、をこの順番に有し、
前記粘着性樹脂層が前記半導体ウェハの前記第2回路面側になるように用いられる半導体装置製造用粘着性フィルム。 - 請求項1に記載の半導体装置製造用粘着性フィルムにおいて、
前記耐溶剤性樹脂層は溶解度パラメータが9.0以上である樹脂を含む半導体装置製造用粘着性フィルム。 - 請求項1または2に記載の半導体装置製造用粘着性フィルムにおいて、
前記耐溶剤性樹脂層は25℃の条件での引張弾性率(E')が300MPa以下である樹脂を含む半導体装置製造用粘着性フィルム。 - 請求項1乃至3いずれか一項に記載の半導体装置製造用粘着性フィルムにおいて、
前記溶剤の溶解度パラメータが9.0未満である半導体装置製造用粘着性フィルム。 - 請求項1乃至4いずれか一項に記載の半導体装置製造用粘着性フィルムにおいて、
前記溶剤が炭化水素系溶剤を含む半導体装置製造用粘着性フィルム。 - 請求項1乃至5いずれか一項に記載の半導体装置製造用粘着性フィルムにおいて、
前記耐溶剤性樹脂層と、前記凹凸吸収性樹脂層との間に接着層をさらに有する半導体装置製造用粘着性フィルム。 - 請求項6に記載の半導体装置製造用粘着性フィルムにおいて、
前記接着層が(メタ)アクリル系接着剤およびポリオレフィン系接着剤から選択される少なくとも一種を含む半導体装置製造用粘着性フィルム。 - 請求項1乃至7いずれか一項に記載の半導体装置製造用粘着性フィルムにおいて、
前記耐溶剤性樹脂層がポリ塩化ビニル系樹脂、ポリ塩化ビニリデン系樹脂、ポリ酢酸ビニル系樹脂、ポリエステル、ポリイミド、およびポリアミドからなる群から選択される一種または二種以上を含む半導体装置製造用粘着性フィルム。 - 請求項1乃至8いずれか一項に記載の半導体装置製造用粘着性フィルムにおいて、
前記凹凸吸収性樹脂層がポリオレフィン系樹脂、ポリスチレン系樹脂、および(メタ)アクリル系樹脂からなる群から選択される一種または二種以上を含む半導体装置製造用粘着性フィルム。 - 請求項9に記載の半導体装置製造用粘着性フィルムにおいて、
前記凹凸吸収性樹脂層がエチレン・α-オレフィン共重合体およびエチレン・酢酸ビニル共重合体から選択される少なくとも一種を含む半導体装置製造用粘着性フィルム。 - 請求項1乃至10いずれか一項に記載の半導体装置製造用粘着性フィルムにおいて、
前記粘着性樹脂層を構成する粘着剤が(メタ)アクリル系粘着剤、シリコーン系粘着剤、ウレタン系粘着剤、オレフィン系粘着剤、およびスチレン系粘着剤から選択される一種または二種以上を含む半導体装置製造用粘着性フィルム。 - 第1回路パターンを含む第1回路面および前記第1回路面の反対側の第2回路パターンを含む第2回路面を有する半導体ウェハと、前記半導体ウェハの前記第1回路面側に接着剤層を介して設けられたサポート部材と、前記半導体ウェハの前記第2回路面側に貼り合わされた粘着性フィルムと、を備える構造体を準備する工程と、
前記構造体から前記サポート部材を除去する工程と、
前記半導体ウェハの前記第1回路面側の前記接着剤層の残渣を溶剤により除去する工程と、を少なくとも備える半導体装置の製造方法であって、
前記粘着性フィルムとして、請求項1乃至11いずれか一項に記載の半導体装置製造用粘着性フィルムを用いる半導体装置の製造方法。
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