WO2016076645A1 - Carbon nanotube x-ray source having glass tube housing and method for manufacturing same - Google Patents

Carbon nanotube x-ray source having glass tube housing and method for manufacturing same Download PDF

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Publication number
WO2016076645A1
WO2016076645A1 PCT/KR2015/012174 KR2015012174W WO2016076645A1 WO 2016076645 A1 WO2016076645 A1 WO 2016076645A1 KR 2015012174 W KR2015012174 W KR 2015012174W WO 2016076645 A1 WO2016076645 A1 WO 2016076645A1
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cathode
housing
electrode
electrode terminal
ray source
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PCT/KR2015/012174
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French (fr)
Korean (ko)
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유승민
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주식회사 바텍
(주)바텍이우홀딩스
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Publication of WO2016076645A1 publication Critical patent/WO2016076645A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith

Definitions

  • the present invention relates to an X-ray source having a nano-structured material such as carbon nanotubes as an electron-emitting means, and more particularly to an X-ray source of the vacuum tube housing of the X-ray source.
  • CNT carbon-nano-tube
  • An X-ray source for emitting X-rays includes a cathode for providing electrons, a gate electrode for activating electron emission of the cathode, a focus electrode for concentrating electrons emitted by the gate electrode to the anode, and an accelerated electron. Includes an anode containing a target that is hit to generate X-rays.
  • an X-ray source using a carbon-nano-tube (“CNT”) is connected to a positive electrode and is made of a metal material including a target material such as tungsten. Collides with the anode 11 that emits X-rays and the (-) pole to provide electrons, and emits electrons from the cathode 21 having the CNT tip attached to the surface and the CNT tip of the cathode 21 surface.
  • CNT carbon-nano-tube
  • the housing 30 formed of ceramic and the anode 11 maintain a vacuum between the focus electrode 23, which is an electrode, the anode 11 and the cathode 21, and form a space for the electrons emitted from the CNT tip to be accelerated.
  • X-rays emitted from the window 40 is made of a transparent radiation.
  • electrodes such as a cathode, an anode, a gate electrode, and a focus electrode are coupled to the housing 30 through a brazing process at a temperature of 600 ° C. or higher. Therefore, in the case of the CNT X-ray source, a ceramic having high heat resistance was used as the material of the housing 30. In addition, the brazing joints B bonded through the brazing process are metalized by high temperature treatment with a metal material.
  • the brazing joint B is very sensitive to the high power of the electrons when performing the high power operation of the tube voltage as described above. Can fall.
  • the inside of the ceramic housing 30 is maintained in a vacuum, there is a problem that the durability of the X-ray source may be significantly reduced if the mechanical strength is lowered.
  • the present invention has been made to solve the above problems, and an object thereof is to provide an X-ray source that can be bonded to the electrode in the glass tube housing without using the brazing method.
  • the present invention has been made in order to achieve the above object, (S10) the air discharge pipe is formed and the terminal forming step of forming the electrode terminal through the one side of the housing of the glass material, the first end is opened, (S20) Cathode portion alignment step of physically contacting the cathode portion and the electrode terminal by inserting the cathode portion with a CNT tip through the first end in the housing, (S30) the anode portion coupling for sealing the first end of the housing with the anode portion Step, (S40) X-ray source manufacturing method and the manufacturing method comprising the vacuum forming and sealing step of forming a vacuum in the housing through the air discharge pipe (S41) and sealing the air discharge pipe (S42) Provide an X-ray source.
  • the cathode part may include at least one of a cathode in which the CNT tip is formed, a gate electrode and a focus electrode electrically insulated from the cathode, and disposed between the cathode and the anode part, wherein the electrode terminal is in focus with the gate electrode.
  • the first electrode terminal may be in physical contact with at least one of the electrodes, and the second electrode terminal may be in physical contact with the cathode.
  • (S25) it is preferable to further include a cathode portion bonding step for bonding the contact portion of the cathode portion and the electrode terminal.
  • the contact portion of the cathode portion and the electrode terminal may be spot welded.
  • the auxiliary electrode may include a gate electrode that excites electrons at the CNT tip, and a focus electrode which accelerates the electrons excited at the CNT tip toward the anode portion.
  • the anode portion joining step (S30) is a thermal bonding process of heating the first end side of the housing, pressurizing the anode portion to the housing side and press fitting, and cooling the glass housing in which the anode portion is press-fitted. Can be performed.
  • the housing is formed of glass, not ceramic, while using a nano-structured material such as CNT as an electron emitter, it is easy to emit high power X-rays by applying a high voltage because the brazing method is not used. .
  • the brazing process when using the brazing process, the brazing process is required in the vacuum environment, so a vacuum chamber for the brazing process is required, but when the housing is formed of glass, the parts are joined to the housing by a simple spot welding and thermal bonding process.
  • the vacuum can be made from the air discharge tube, the X-ray source can be manufactured by the compact manufacturing equipment.
  • FIG. 1 is a conceptual diagram showing an X-ray source according to the prior art
  • FIG. 2 is an exploded view showing an assembly process of an X-ray source according to the present invention
  • FIG. 3 is a conceptual diagram illustrating a process of bonding the first electrode terminal of the glass tube and the cathode side of the X-ray source according to the present invention
  • FIG. 4 is a plan view illustrating a first electrode terminal for applying a voltage to a gate electrode and a focus electrode in a glass tube of an X-ray source according to the present invention
  • FIG. 5 is a conceptual diagram illustrating a process of bonding a second electrode terminal for applying a voltage to a lower surface of a cathode part of an X-ray source and a cathode according to the present invention
  • FIG. 6 is a conceptual diagram illustrating a process of forming a vacuum inside an X-ray source according to the present invention
  • FIG. 7 is a conceptual diagram showing a completion state of an X-ray source according to the present invention.
  • FIG. 8 is a flowchart illustrating a manufacturing process of an X-ray source according to the present invention.
  • the present embodiment includes a glass housing 130 having a first end opening and a narrow air discharge pipe 131 formed at a second end thereof; A cathode 121 having a CNT tip 124 formed thereon, a cathode portion 120 having a gate electrode 122 and a focus electrode 123 fixed to a second end side in the housing 130, and a housing And a positive electrode portion 110 that seals the first end of the 130 and provides the positive electrode 112 with the target 111 formed in the direction toward the negative electrode portion 120.
  • a first electrode terminal 150 made of metal is formed around the housing 130 to be exposed to the inside and the outside of the housing 130. This may be thermally bonded before being hardened in the molten state of the housing 130 or may be press-fitted by giving a step of a shape corresponding to the junction of the housing 130 and the first electrode terminal 150.
  • the housing 130 and the first electrode terminal 150 may be integrally formed by using a thermal bonding process of cooling after fitting and pressing in a heated state.
  • the second electrode terminal 160 made of a metal connecting the inside and the outside of the housing 130 is integrally formed at the second end of the housing 130. They may be integrally molded by cooling the second electrode terminal 160 in the molten state of the housing 130 and then cooling the housing 130.
  • the cathode 121 is electrically disconnected by the gate electrode 122 and the focus electrode 123 and the insulating spacer 125 therebetween, and the gate electrode 122 and the focus electrode 123 are electrically disconnected.
  • auxiliary electrodes surrounding each outer circumferential surface.
  • the gate electrode 122 and the focus electrode 123 of the cathode part 120 contact the first electrode terminal 150 formed around the housing 130 through the auxiliary electrode, and the cathode 121 is connected to the housing 130. Is in contact with the second electrode terminal 160 at the inner second end side of the.
  • the negative electrode part 120 is inserted into and aligned with the second end side inside the housing 130 through the negative electrode fixing jig 200 made of a conductor. 3 and 4, a connecting portion 151 is provided on an inner surface of the first electrode terminal 150, and the connecting portion 151 is formed as a leaf spring to act as an elastic piece.
  • the second electrode terminal 160 inside the housing 130 is formed in the form of a bent plate spring acts as an elastic piece.
  • the gate electrode 122 and the focus electrode 123 of the cathode 120 may be connected to each other.
  • the auxiliary electrode maintains the physical and electrical contact with the first electrode terminal 150 by the elasticity of the connecting portion 151 of the first electrode terminal 150, and the cathode 121 is the second electrode terminal 160.
  • the physical and electrical contact state is maintained by the elasticity of the.
  • the welding electrode (not shown) is connected to the outside of the first electrode terminal 150, and then a current is applied to the cathode fixing jig 200.
  • the spot electrode is connected to the auxiliary electrode connecting the gate electrode 122 and the focus electrode 123 to the contact portion 151 of the first electrode terminal 150.
  • the welding jig 210 is inserted through the air discharge pipe 131 to be connected to the cathode 121, and a welding electrode (not shown) is formed at an outer side of the second electrode terminal 160.
  • a welding electrode (not shown) is formed at an outer side of the second electrode terminal 160.
  • the cathode 120 may be firmly coupled to the housing 130 through a process of spot welding the portion requiring electrical connection after press fitting the cathode 120 into the housing.
  • the anode portion 110 seals the first end of the housing 130. This is achieved by heat bonding to cool the housing 130 after heating and fitting the anode 110 into the housing 130.
  • the cathode part 120 and the anode part 110 may be firmly coupled in the housing 130. Thereafter, the air discharge pipe 131 of the housing 130 is connected to an external vacuum pump (not shown), and the inside of the housing 130 through the air discharge pipe 131 connected to the inside of the housing through the air discharge port 132. To release the air to create a vacuum.
  • the air outlet 132 is sealed to form a seal 132 ′, and then the air discharge tube 131 is removed to complete the X-ray source. do.
  • the seal 132 ′ is formed by heating the air discharge pipe 131 around the air outlet 132 to seal the air outlet 132.
  • the X-ray source according to the present invention is manufactured through the following process. Reference is made together to FIGS. 2 to 7.
  • the first and second electrode terminals 150 and 160 are formed by penetrating through the first and second electrode terminals 150 and 160 at one side of the glass housing 130 having the first end open and the air discharge pipe 131 formed at the second end. Is prepared to form a housing 130 (S10), and the negative electrode portion 120 having the CNT tip 124 is inserted into the housing 130 through the first end to the negative electrode portion 120 in a predetermined position At the same time, the gate electrode 122 and the focus electrode 123 are in physical contact with the first electrode terminal 150, and the cathode 121 and the second electrode terminal 160 are in physical contact with each other.
  • the first electrode terminal 150, the auxiliary electrode, the second electrode terminal 160, and the cathode 121 are spot welded to fix the cathode part 120 to the housing 130 (S25).
  • the cathode part 120 is fixed in the housing 130, the anode part 110 is thermally bonded to the first end of the housing 130 to seal the first end (S30).
  • a vacuum is formed in the housing 130 through the air discharge pipe 131 (S41) and the air discharge pipe 131 is sealed (S42) to complete an X-ray source of vacuum (S40).
  • the air discharge pipe 131 is formed at the second end of the housing 130, but is preferably selected to a position that is advantageous for sealing after bleeding the air of the housing 130, it is limited to the position of the second end It is not.
  • the X-ray tube having a tube-like housing made of glass is hardly affected by the coupling relationship of components even under high voltage and high power environment, for example, a tube voltage of 120 kVp or more for CT imaging. Therefore, high power driving to obtain a high quality or three-dimensional X-ray image can be achieved.

Abstract

The present invention relates to an X-ray source which can combine a negative electrode part having a CNT electron emitter and a positive electrode part within a housing made of a glass material without passing through a brazing process, and a method for manufacturing the same. The present invention provides a method for manufacturing an X-ray source by spot-welding a negative electrode part to one end of a tube-shaped housing made of a glass material and thermally bonding a positive electrode part to the other end thereof, and an X-ray source manufactured thereby. The inside of the housing is vacuumized through an air discharge tube, and is sealed after the air discharge tube is heated.

Description

유리튜브 하우징을 갖는 탄소나노튜브 Ｘ선 소스 및 그 제조방법Carbon nanotube X-ray source with glass tube housing and manufacturing method
본 발명은 탄소나노튜브 등의 나노구조물질을 전자방출수단으로 갖는 X선 소스에 관한 것으로서, 더욱 상세하게는 X선 소스의 진공 튜브 하우징이 유리로 이루어진 X선 소스에 관한 것이다.The present invention relates to an X-ray source having a nano-structured material such as carbon nanotubes as an electron-emitting means, and more particularly to an X-ray source of the vacuum tube housing of the X-ray source.
최근 들어, X선 발생장치의 소형화를 위해 탄소나노튜브(carbon-nano-tube, 이하 CNT) 등의 나노물질을 이용한 X선 소스가 소개된바 있다. CNT는 탄소로 이루어진 탄소동소체로서 하나의 탄소가 다른 탄소원자와 육각형 벌집무늬로 결합되어 튜브형태를 이루는 물질이며, 우수한 기계적 특성과 전기적 선택성을 가지며, 뛰어난 전계 방출 특성을 가진다. 따라서, X선 장치의 X선 소스에 적용되는 경우, 저전력으로 실온에서도 전자빔(전계, electron beam)를 방출할 수 있으며, 짧은 동작주기로 입력전력의 90% 이상 전자를 방출할 수 있어서, 전계제어 및 전계 집중효과가 매우 우수하다. Recently, an X-ray source using nanomaterials such as carbon-nano-tube (CNT) has been introduced for miniaturization of an X-ray generator. CNT is a carbon allotrope composed of carbon, which is a material in which a single carbon is combined with other carbon atoms in a hexagonal honeycomb pattern to form a tube, and has excellent mechanical and electrical selectivity and excellent field emission characteristics. Therefore, when applied to the X-ray source of the X-ray apparatus, it can emit an electron beam (electron beam) even at room temperature with low power, and can emit electrons of 90% or more of the input power in a short operating cycle, so that the electric field control and The field concentration effect is very good.
X선을 방출하기 위한 X선 소스는 전자를 제공하는 음극(cathode)와, 음극의 전자방출을 활성화시키는 게이트 전극과, 게이트 전극에 의해 방출된 전자를 양극으로 집중하는 포커스 전극과, 가속된 전자가 부딪혀 X선을 발생시키는 타겟 포함의 양극(anode)을 포함한다. An X-ray source for emitting X-rays includes a cathode for providing electrons, a gate electrode for activating electron emission of the cathode, a focus electrode for concentrating electrons emitted by the gate electrode to the anode, and an accelerated electron. Includes an anode containing a target that is hit to generate X-rays.
이하, 도 1을 참조하여 종래기술에 의한 X선 소스를 설명한다. Hereinafter, an X-ray source according to the prior art will be described with reference to FIG. 1.
도1에 도시된 바와 같이, 탄소나노튜브(carbon-nano-tube, "CNT"라 함)를 이용한 X선 소스는 (+)극이 연결되며, 텅스텐 등 타겟재질을 포함하는 금속물질로 이루어져 전자가 부딪히면 X선을 방출하는 양극(11)과, (-)극이 연결되어 전자가 제공되며, 표면에 CNT 팁이 부착된 음극(21)과, 음극(21) 표면의 CNT 팁으로부터 전자방출을 활성화시키기 위한 추가 (+) 전기장을 형성하는 전극인 게이트 전극(22) 및 게이트 전극(22)에 의해 CNT 팁에서 방출된 전자를 양극(11)의 중심부를 향해 집중시키도록 소정의 전기장을 형성하는 전극인 포커스 전극(23)와, 양극(11) 및 음극(21) 사이를 진공으로 유지시키며 CNT 팁에서 방출된 전자가 가속될 공간을 형성하며 세라믹으로 형성된 하우징(30)과, 양극(11)에서 방출된 X선이 투과 조사되는 윈도우(40)로 이루어진다. As shown in FIG. 1, an X-ray source using a carbon-nano-tube (“CNT”) is connected to a positive electrode and is made of a metal material including a target material such as tungsten. Collides with the anode 11 that emits X-rays and the (-) pole to provide electrons, and emits electrons from the cathode 21 having the CNT tip attached to the surface and the CNT tip of the cathode 21 surface. A predetermined electric field to concentrate electrons emitted from the CNT tip by the gate electrode 22 and the gate electrode 22, which forms an additional (+) electric field for activation, toward the center of the anode 11 The housing 30 formed of ceramic and the anode 11 maintain a vacuum between the focus electrode 23, which is an electrode, the anode 11 and the cathode 21, and form a space for the electrons emitted from the CNT tip to be accelerated. X-rays emitted from the window 40 is made of a transparent radiation.
한편, CNT X선 소스의 경우 음극, 양극, 게이트 전극 및 포커스 전극 등과 같은 전극을 600℃ 이상의 온도에서 브레이징(brazing) 공정을 통해 하우징(30)에 결합한다. 따라서, CNT X선 소스의 경우 내열성이 큰 세라믹을 하우징(30)의 재료로 이용하였다. 그리고, 브레이징 공정을 통해 접합된 브레이징 접합부(B)는 금속재료로 고온처리 되어 메탈라이징(metalizing)된다. Meanwhile, in the case of a CNT X-ray source, electrodes such as a cathode, an anode, a gate electrode, and a focus electrode are coupled to the housing 30 through a brazing process at a temperature of 600 ° C. or higher. Therefore, in the case of the CNT X-ray source, a ceramic having high heat resistance was used as the material of the housing 30. In addition, the brazing joints B bonded through the brazing process are metalized by high temperature treatment with a metal material.
최근 X선 촬영 기술이 발달하면서, 고화질의 영상 획득이 요구되고 있으며, 특히, 삼차원 X선 영상을 위해서는 높은 에너지, 통상적으로 관전압 60~120kVp 정도의 X선 출력이 필요하다. 그러나, 전술한 형태의 세라믹 하우징(30)에 전극들이 브레이징 접합된 종래의 X선 소스의 경우, 위와 같은 관전압의 고출력 작동을 실행하는 경우 브레이징 접합부(B)가 전자의 고출력에 매우 민감하여 기계적 강도가 떨어질 수 있다. 또한, 세라믹 하우징(30) 내부는 진공으로 유지되기 때문에, 기계적 강도가 떨어지면 X선 소스의 내구성이 현저히 떨어질 수 있는 문제점이 있다. Recently, with the development of X-ray imaging technology, high-quality image acquisition is required. In particular, for three-dimensional X-ray imaging, high energy, typically, X-ray output of about 60 to 120 kVp tube voltage is required. However, in the case of the conventional X-ray source in which the electrodes are brazed to the ceramic housing 30 of the above-described type, the brazing joint B is very sensitive to the high power of the electrons when performing the high power operation of the tube voltage as described above. Can fall. In addition, since the inside of the ceramic housing 30 is maintained in a vacuum, there is a problem that the durability of the X-ray source may be significantly reduced if the mechanical strength is lowered.
따라서, 밀봉특성이 매우 우수하면서도, 진공도 확보를 위한 기계적 강도가 우수한 유리 재질을 이용하여 CNT X선 소스를 제작할 필요성이 대두되고 있다. Therefore, there is a need to manufacture a CNT X-ray source using a glass material having excellent sealing properties and excellent mechanical strength for securing a degree of vacuum.
본 발명은 상기와 같은 제반 문제점을 해결하기 위하여 안출된 것으로서, 유리 튜브 하우징 내에 전극들을 브레이징 공법을 쓰지 않고 접합할 수 있는 X선 소스를 제공하는데 그 목적이 있다. The present invention has been made to solve the above problems, and an object thereof is to provide an X-ray source that can be bonded to the electrode in the glass tube housing without using the brazing method.
본 발명은 상기와 같은 목적을 달성하기 위하여 안출된 것으로서, (S10) 공기배출관이 형성되고 제1 단부가 개방된 유리재질의 하우징 일측에 전극단자를 관통 형성하는 단자형성단계, (S20) 상기 제 1 단부를 통해 CNT 팁이 구비된 음극부를 상기 하우징에 삽입하여 상기 음극부와 상기 전극단자와 물리적으로 접촉시키는 음극부정렬단계, (S30) 상기 하우징의 제1 단부를 양극부로 밀봉하는 양극부결합단계, (S40) 상기 공기배출관을 통해 상기 하우징 내부에 진공을 조성하고(S41) 상기 공기배출관을 밀봉하는(S42) 진공 형성 및 밀봉단계를 포함하는 X선 소스 제조방법 및 상기 제조 방법으로 제조된 X선 소스를 제공한다. The present invention has been made in order to achieve the above object, (S10) the air discharge pipe is formed and the terminal forming step of forming the electrode terminal through the one side of the housing of the glass material, the first end is opened, (S20) Cathode portion alignment step of physically contacting the cathode portion and the electrode terminal by inserting the cathode portion with a CNT tip through the first end in the housing, (S30) the anode portion coupling for sealing the first end of the housing with the anode portion Step, (S40) X-ray source manufacturing method and the manufacturing method comprising the vacuum forming and sealing step of forming a vacuum in the housing through the air discharge pipe (S41) and sealing the air discharge pipe (S42) Provide an X-ray source.
상기 음극부는, 상기 CNT 팁이 형성된 음극, 상기 음극과 전기적으로 절연되고 상기 음극과 상기 양극부 사이에 배치되는 게이트 전극과 포커스 전극 중 적어도 하나를 포함하고, 상기 전극단자는, 상기 게이트 전극과 포커스 전극 중 적어도 하나와 물리적으로 접촉되는 제1 전극단자, 상기 음극과 물리적으로 접촉되는 제2 전극단자를 포함할 수 있다. The cathode part may include at least one of a cathode in which the CNT tip is formed, a gate electrode and a focus electrode electrically insulated from the cathode, and disposed between the cathode and the anode part, wherein the electrode terminal is in focus with the gate electrode. The first electrode terminal may be in physical contact with at least one of the electrodes, and the second electrode terminal may be in physical contact with the cathode.
한편, 상기 (S20) 음극부정렬단계 후 (S30)양극부결합단계 전, (S25) 상기 음극부와 상기 전극단자의 접촉부분을 접합하는 음극부접합단계를 더 포함하는 것이 바람직하다.On the other hand, after the (S20) cathode portion alignment step (S30) before the anode portion bonding step, (S25) it is preferable to further include a cathode portion bonding step for bonding the contact portion of the cathode portion and the electrode terminal.
예컨대, 상기 음극부와 상기 전극단자의 접촉부분을 점용접할 수 있다. For example, the contact portion of the cathode portion and the electrode terminal may be spot welded.
보조전극은 상기 CNT 팁에서 전자를 여기 시키는 게이트 전극과, 상기 CNT 팁에서 여기된 전자를 상기 양극부를 향해 유도하여 가속하는 포커스 전극으로 이루어질 수 있다. The auxiliary electrode may include a gate electrode that excites electrons at the CNT tip, and a focus electrode which accelerates the electrons excited at the CNT tip toward the anode portion.
상기 양극부결합단계(S30)는, 상기 하우징의 상기 제1 단부 측을 가열하고, 상기 양극부를 상기 하우징 측으로 가압하여 끼움압입하고, 상기 양극부가 끼움압입된 상기 유리하우징을 냉각시키는 열접합과정으로 수행될 수 있다. The anode portion joining step (S30) is a thermal bonding process of heating the first end side of the housing, pressurizing the anode portion to the housing side and press fitting, and cooling the glass housing in which the anode portion is press-fitted. Can be performed.
전술한 본 발명에 따르면, CNT 등의 나노구조물질을 전자 에미터로 사용하면서도 하우징을 세라믹이 아닌 유리로 형성하였기 때문에, 브레이징 공법을 이용하지 않기 때문에, 고전압 인가를 통한 고출력 X선 방출이 용이하다. According to the present invention described above, since the housing is formed of glass, not ceramic, while using a nano-structured material such as CNT as an electron emitter, it is easy to emit high power X-rays by applying a high voltage because the brazing method is not used. .
또한, 브레이징 공정을 이용하는 경우, 진공 환경에서 브레이징 작업을 해야 하기 때문에, 브레이징 공정을 위한 진공챔버가 필요하지만, 유리로 하우징을 형성할 경우에 단순한 점용접 및 열접합 공정으로 부품들을 하우징에 결합시킬 수 있으며, 공기배출튜브로 진공을 만들 수 있기 때문에, 컴팩트한 제조설비로 X선 소스를 제조할 수 있다.In addition, when using the brazing process, the brazing process is required in the vacuum environment, so a vacuum chamber for the brazing process is required, but when the housing is formed of glass, the parts are joined to the housing by a simple spot welding and thermal bonding process. In addition, since the vacuum can be made from the air discharge tube, the X-ray source can be manufactured by the compact manufacturing equipment.
도 1은 종래기술에 따른 X선 소스를 도시한 개념도, 1 is a conceptual diagram showing an X-ray source according to the prior art,
도 2는 본 발명에 따른 X선 소스의 조립 과정을 도시한 분해도, 2 is an exploded view showing an assembly process of an X-ray source according to the present invention;
도 3은 본 발명에 따른 X선 소스의 음극부 측면과 유리 튜브의 제1 전극 단자를 접합하는 과정을 도시한 개념도, 3 is a conceptual diagram illustrating a process of bonding the first electrode terminal of the glass tube and the cathode side of the X-ray source according to the present invention,
도 4는 본 발명에 따른 X선 소스의 유리 튜브 내에서 게이트 전극 및 포커스 전극에 전압을 인가하기 위한 제1 전극단자를 도시한 평면도, 4 is a plan view illustrating a first electrode terminal for applying a voltage to a gate electrode and a focus electrode in a glass tube of an X-ray source according to the present invention;
도 5는 본 발명에 따른 X선 소스의 음극부 하면과 음극에 전압을 인가하기 위한 제2 전극단자를 접합하는 과정을 도시한 개념도, 5 is a conceptual diagram illustrating a process of bonding a second electrode terminal for applying a voltage to a lower surface of a cathode part of an X-ray source and a cathode according to the present invention;
도 6은 본 발명에 따른 X선 소스 내부에 진공을 형성하는 과정을 도시한 개념도, 6 is a conceptual diagram illustrating a process of forming a vacuum inside an X-ray source according to the present invention;
도 7은 본 발명에 따른 X선 소스의 완성 상태를 도시한 개념도, 그리고7 is a conceptual diagram showing a completion state of an X-ray source according to the present invention, and
도 8은 본 발명에 따른 X선 소스의 제조 과정을 도시한 순서도이다. 8 is a flowchart illustrating a manufacturing process of an X-ray source according to the present invention.
[부호의 설명][Description of the code]
10: 양극부 11: 양극10: anode portion 11: anode
20, 120: 음극부 21, 121: 음극20, 120: cathode 21, 121: cathode
22, 122: 게이트 전극 23: 포커스 전극22, 122: gate electrode 23: focus electrode
24, 124: CNT 팁24, 124: CNT tip
이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 설명한다. 본 발명의 실시형태는 여러 가지의 다른 형태로 변형될 수 있으며, 본 발명의 범위가 이하 설명하는 실시형태로만 한정되는 것은 아니다. 도면에서의 요소들의 형상 및 크기 등은 보다 명확한 설명을 위해 과장될 수 있으며, 도면상의 동일한 부호로 표시되는 요소는 동일한 요소이다. Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings. Embodiments of the present invention may be modified in various other forms, and the scope of the present invention is not limited to the embodiments described below. Shapes and sizes of the elements in the drawings may be exaggerated for clarity, elements denoted by the same reference numerals in the drawings are the same elements.
그리고 명세서 전체에서, 어떤 부분이 다른 부분과 "연결"되어 있다고 할 때 이는 "직접적으로 연결"되어 있는 경우뿐만 아니라 그 중간에 다른 소자를 사이에 두고 "전기적으로 연결"되어 있는 경우도 포함한다. 또한, 어떤 부분이 어떤 구성요소를 "포함" 또는 "구비"한다고 할 때, 이는 특별이 반대되는 기재가 없는 한 다른 구성요소를 제외하는 것이 아니라 다른 구성요소를 더 포함하거나 구비할 수 있는 것을 의미한다. In the specification, when a part is "connected" to another part, this includes not only a "directly connected" but also a "electrically connected" between other elements in between. In addition, when a part is said to "include" or "include" a certain component, it means that it is possible to further include or have other components rather than to exclude the other components unless otherwise stated. do.
도 2에 도시된 바와 같이, 본 실시예는 제1 단부가 개방되고 제2 단부에는 좁은 공기배출관(131)이 형성된 유리재질의 하우징(130)과; 하우징(130) 내의 제2 단부측에 고정되고, CNT팁(124)이 형성된 음극(121)과 게이트 전극(122)와 포커스 전극(123)가 하나의 조립체로 이루어진 음극부(120), 그리고 하우징(130)의 제1 단부를 밀봉하며, 음극부(120)를 향하는 방향으로 타겟(111)이 형성된 양극(112)을 제공하는 양극부(110)를 포함한다. As shown in FIG. 2, the present embodiment includes a glass housing 130 having a first end opening and a narrow air discharge pipe 131 formed at a second end thereof; A cathode 121 having a CNT tip 124 formed thereon, a cathode portion 120 having a gate electrode 122 and a focus electrode 123 fixed to a second end side in the housing 130, and a housing And a positive electrode portion 110 that seals the first end of the 130 and provides the positive electrode 112 with the target 111 formed in the direction toward the negative electrode portion 120.
하우징(130)의 둘레에는 금속으로 이루어진 제1 전극단자(150)가 형성되어 하우징(130)의 내외부로 노출된다. 이는 하우징(130)의 용융상태에서 굳기 전에 열접합 하거나, 하우징(130)과 제1 전극단자(150)의 접합부를 대응하는 형태의 단차를 주어 끼움 압입할 수 있다. 특히 가열된 상태에서 끼움 압입 후 식히는 열접합 공정을 이용하여 하우징(130)과 제1 전극단자(150)는 일체로 성형될 수 있다. A first electrode terminal 150 made of metal is formed around the housing 130 to be exposed to the inside and the outside of the housing 130. This may be thermally bonded before being hardened in the molten state of the housing 130 or may be press-fitted by giving a step of a shape corresponding to the junction of the housing 130 and the first electrode terminal 150. In particular, the housing 130 and the first electrode terminal 150 may be integrally formed by using a thermal bonding process of cooling after fitting and pressing in a heated state.
하우징(130) 제2 단부에는 하우징(130)의 내측과 외측을 연결하는 금속으로 이루어진 제2 전극단자(160)가 일체로 형성된다. 이 들은 하우징(130)의 용융상태에서 제2 전극단자(160)를 하우징(130)에 관통시킨 후 냉각시켜 일체로 성형할 수 있다.The second electrode terminal 160 made of a metal connecting the inside and the outside of the housing 130 is integrally formed at the second end of the housing 130. They may be integrally molded by cooling the second electrode terminal 160 in the molten state of the housing 130 and then cooling the housing 130.
도 3에 도시된 바와 같이, 음극(121)은 게이트 전극(122) 및 포커스 전극(123)와 그 사이의 절연스페이서(125)에 의해 전기적으로 단절되고, 게이트 전극(122) 및 포커스 전극(123)는 각각의 외주면을 두르는 보조전극에 의해 전기적으로 연결된다. 그리고 음극부(120)의 게이트 전극(122)와 포커스 전극(123)는 보조전극을 통해 하우징(130) 둘레에 형성된 제1 전극단자(150)과 접촉되고, 음극(121)은 하우징(130)의 내부 제2 단부측에서 제2 전극단자(160)와 접촉된다. As shown in FIG. 3, the cathode 121 is electrically disconnected by the gate electrode 122 and the focus electrode 123 and the insulating spacer 125 therebetween, and the gate electrode 122 and the focus electrode 123 are electrically disconnected. ) Are electrically connected by auxiliary electrodes surrounding each outer circumferential surface. In addition, the gate electrode 122 and the focus electrode 123 of the cathode part 120 contact the first electrode terminal 150 formed around the housing 130 through the auxiliary electrode, and the cathode 121 is connected to the housing 130. Is in contact with the second electrode terminal 160 at the inner second end side of the.
음극부(120)는 도전체로 이루어진 음극부 고정용 지그(200)를 통해 하우징(130) 내부의 제2 단부 측에 삽입 및 정렬된다. 도 3 및 도 4를 참조하면, 제1 전극단자(150)의 내면에는 접속부(151)가 구비되고, 상기 접속부(151)는 판 스프링의 형태로 이루어져 탄성편으로 작용한다. 또한, 하우징(130) 내부의 제2 전극단자(160)는 구부러진 판 스프링의 형태로 이루어져 탄성편으로 작용한다.The negative electrode part 120 is inserted into and aligned with the second end side inside the housing 130 through the negative electrode fixing jig 200 made of a conductor. 3 and 4, a connecting portion 151 is provided on an inner surface of the first electrode terminal 150, and the connecting portion 151 is formed as a leaf spring to act as an elastic piece. In addition, the second electrode terminal 160 inside the housing 130 is formed in the form of a bent plate spring acts as an elastic piece.
따라서, 음극부 고정용 지그(200)로 하우징(130) 내부의 제2 단부 측으로 음극부(120)를 삽입하면, 음극부(120)의 게이트 전극(122) 및 포커스 전극(123)를 연결하는 보조전극은 제1 전극단자(150)의 접속부(151)의 탄성에 의해 제1 전극단자(150)와 물리적, 전기적으로 접촉된 상태를 유지하고, 음극(121)은 제2 전극단자(160)의 탄성에 의해 물리적, 전기적으로 접촉된 상태를 유지한다. Accordingly, when the cathode 120 is inserted into the second end of the housing 130 by the cathode fixing jig 200, the gate electrode 122 and the focus electrode 123 of the cathode 120 may be connected to each other. The auxiliary electrode maintains the physical and electrical contact with the first electrode terminal 150 by the elasticity of the connecting portion 151 of the first electrode terminal 150, and the cathode 121 is the second electrode terminal 160. The physical and electrical contact state is maintained by the elasticity of the.
음극부(120)가 정렬된 후 제1 전극단자(150) 외부로 용접용 전극(미도시)을 연결한 후 음극 고정용 지그(200)에 전류를 인가하면 점선의 화살표 방향으로 전류가 흐른다. 게이트 전극(122) 및 포커스 전극(123)를 연결하는 보조전극은 제1 전극단자(150)의 접속부(151)와 접하는 부분(S)에서 점용접(spot welding)이 이루어진다. After the cathode part 120 is aligned, the welding electrode (not shown) is connected to the outside of the first electrode terminal 150, and then a current is applied to the cathode fixing jig 200. The spot electrode is connected to the auxiliary electrode connecting the gate electrode 122 and the focus electrode 123 to the contact portion 151 of the first electrode terminal 150.
이어서, 도5에 도시된 바와 같이, 공기 배출관(131)을 통해 용접용지그(210)를 삽입시켜 음극(121)과 접속시키고 제2 전극단자(160)의 외측부에는 용접용 전극(미도시)을 연결한 후 점선 화살표 방향으로 전류를 인가하면, 음극(121)과 제2 전극단자(160)가 접하는 부분(S)에서 점용접이 이루어진다. Subsequently, as shown in FIG. 5, the welding jig 210 is inserted through the air discharge pipe 131 to be connected to the cathode 121, and a welding electrode (not shown) is formed at an outer side of the second electrode terminal 160. When the current is applied in the direction indicated by the dotted arrow, the spot welding is performed at the portion S in which the cathode 121 and the second electrode terminal 160 are in contact with each other.
전술한 바와 같이, 음극부(120)를 하우징에 끼움 압입 후 전기접속이 필요한 부분을 점용접 하는 과정을 통해 음극부(120)가 하우징(130)에 견고하게 결합될 수 있다. As described above, the cathode 120 may be firmly coupled to the housing 130 through a process of spot welding the portion requiring electrical connection after press fitting the cathode 120 into the housing.
도 6에 도시된 바와 같이, 양극부(110)는 하우징(130)의 제1 단부를 밀봉한다. 이는 하우징(130) 가열한 후 양극부(110)를 하우징(130)에 끼움 압입 한 후 냉각하는 열접합에 의해 이루어진다. As shown in FIG. 6, the anode portion 110 seals the first end of the housing 130. This is achieved by heat bonding to cool the housing 130 after heating and fitting the anode 110 into the housing 130.
전술한 과정을 통해 하우징(130) 내에 음극부(120) 및 양극부(110)가 견고히 결합될 수 있다. 이 후, 하우징(130)의 공기배출관(131)은 외부의 진공펌프(도시하지 않음)와 연결되며, 공기배출구(132)를 통해 하우징 내부와 연결된 공기배출관(131)을 통해 하우징(130) 내부의 공기를 배출하여 진공상태를 만든다. Through the above-described process, the cathode part 120 and the anode part 110 may be firmly coupled in the housing 130. Thereafter, the air discharge pipe 131 of the housing 130 is connected to an external vacuum pump (not shown), and the inside of the housing 130 through the air discharge pipe 131 connected to the inside of the housing through the air discharge port 132. To release the air to create a vacuum.
도 7에 도시된 바와 같이, 하우징(130) 내부에 진공이 형성되면, 공기배출구(132)를 밀봉하여 밀봉부(132')를 형성한 후 공기배출관(131)을 제거하여 X선 소스를 완성한다. 밀봉부(132')는 공기배출구(132) 주변의 공기배출관(131)을 가열하여 공기배출구(132)를 밀봉함으로써 형성된다. As shown in FIG. 7, when a vacuum is formed inside the housing 130, the air outlet 132 is sealed to form a seal 132 ′, and then the air discharge tube 131 is removed to complete the X-ray source. do. The seal 132 ′ is formed by heating the air discharge pipe 131 around the air outlet 132 to seal the air outlet 132.
도 8에 도시된 바와 같이, 본 발명에 따른 X선 소스는 아래와 같은 공정을 통해 제조된다. 도 2 내지 도 7을 함께 참조한다.As shown in FIG. 8, the X-ray source according to the present invention is manufactured through the following process. Reference is made together to FIGS. 2 to 7.
우선, 제1 단부가 개방되고 제2 단부에 공기배출관(131)이 형성된 유리재질의 하우징(130) 일측에 제1,2 전극단자(150,160)를 관통 형성하여 제1,2 전극단자(150,160)가 형성된 하우징(130)을 준비하고(S10), 상기 제 1 단부를 통해 CNT 팁(124)이 구비된 음극부(120)를 상기 하우징(130)에 삽입하여 음극부(120)를 정해진 위치에 정렬하는 동시에 상기 게이트 전극(122) 및 포커스 전극(123)를 제1 전극단자(150)와 물리적으로 접촉시키고 상기 음극(121)과 상기 제2 전극단자(160)을 물리적으로 접촉시킨다. 이후, 제1 전극단자(150)와 보조전극 그리고 제2 전극단자(160)와 음극(121)을 점용접하여 음극부(120)를 하우징(130)에 고정시킨다.(S25). 음극부(120)가 하우징(130) 내에 고정되면, 하우징(130)의 제1 단부에 양극부(110)를 열접합하여 제1 단부를 밀봉한다(S30). 이후, 상기 공기배출관(131)을 통해 상기 하우징(130) 내부에 진공을 조성하고(S41) 상기 공기배출관(131)을 밀봉하여(S42) 진공의 X선 소스를 완성한다(S40).First, the first and second electrode terminals 150 and 160 are formed by penetrating through the first and second electrode terminals 150 and 160 at one side of the glass housing 130 having the first end open and the air discharge pipe 131 formed at the second end. Is prepared to form a housing 130 (S10), and the negative electrode portion 120 having the CNT tip 124 is inserted into the housing 130 through the first end to the negative electrode portion 120 in a predetermined position At the same time, the gate electrode 122 and the focus electrode 123 are in physical contact with the first electrode terminal 150, and the cathode 121 and the second electrode terminal 160 are in physical contact with each other. Thereafter, the first electrode terminal 150, the auxiliary electrode, the second electrode terminal 160, and the cathode 121 are spot welded to fix the cathode part 120 to the housing 130 (S25). When the cathode part 120 is fixed in the housing 130, the anode part 110 is thermally bonded to the first end of the housing 130 to seal the first end (S30). Thereafter, a vacuum is formed in the housing 130 through the air discharge pipe 131 (S41) and the air discharge pipe 131 is sealed (S42) to complete an X-ray source of vacuum (S40).
본 실시예에서, 공기배출관(131)은 하우징(130)의 제2 단부에 형성되었으나 하우징(130)의 공기를 빼낸 후 밀봉하기 유리한 위치로 선택되는 것이 바람직하고, 제2 단부의 위치로 한정되는 것은 아니다.In the present embodiment, the air discharge pipe 131 is formed at the second end of the housing 130, but is preferably selected to a position that is advantageous for sealing after bleeding the air of the housing 130, it is limited to the position of the second end It is not.
전술한 바와 같이 유리로 이루어진 튜브 형태의 하우징을 갖는 X선 튜브는 고전압 고출력의 환경, 일례로 CT 촬영을 위한 120kVp 이상의 관전압하에서도 부품의 결합관계에는 거의 영향을 받지 않는다. 따라서, 고화질 또는 삼차원의 X선 이미지를 획득하기 위한 고출력의 구동을 이룰 수 있다. As described above, the X-ray tube having a tube-like housing made of glass is hardly affected by the coupling relationship of components even under high voltage and high power environment, for example, a tube voltage of 120 kVp or more for CT imaging. Therefore, high power driving to obtain a high quality or three-dimensional X-ray image can be achieved.
또한, 유리가 세라믹에 비해 가격이 싸고, 브레이징 공정에 비해 저렴한 비용으로 열접합 등을 수행할 수 있으므로 X선 소스의 원가를 감소시킬 수 있다. In addition, since glass is cheaper than ceramic and thermal bonding can be performed at a lower cost than the brazing process, the cost of the X-ray source can be reduced.
이상에서 설명한 본 발명은 전술한 실시예 및 도면에 의하여 한정되는 것이 아니고, 본 발명의 기술적 사상을 벗어나지 않는 범위 내에서 여러 가지 치환, 변형 및 변경이 가능하다는 것이 본 발명이 속하는 분야에서 통상의 지식을 가진 자에게 있어서 명백할 것이다. The present invention described above is not limited to the above-described embodiments and drawings, and it is common knowledge in the field of the present invention that various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. It will be evident to those who have.

Claims (8)

  1. (S10) 공기배출관이 형성되고 제1 단부가 개방된 유리재질의 하우징 일측에 전극단자를 관통 형성하는 단자형성단계,(S10) a terminal forming step of forming an air discharge pipe and penetrating the electrode terminal on one side of the housing of the glass material, the first end is opened;
    (S20) 상기 제 1 단부를 통해 CNT 팁이 구비된 음극부를 상기 하우징에 삽입하여 상기 음극부와 상기 전극단자와 물리적으로 접촉시키는 음극부정렬단계, (S20) a cathode portion alignment step of physically contacting the cathode portion and the electrode terminal by inserting a cathode portion having a CNT tip through the first end into the housing;
    (S30) 상기 하우징의 제1 단부를 양극부로 밀봉하는 양극부결합단계, (S30) anodic part coupling step of sealing the first end of the housing with an anode part,
    (S40) 상기 공기배출관을 통해 상기 하우징 내부에 진공을 조성하고(S41) 상기 공기배출관을 밀봉하는(S42) 진공 형성 및 밀봉단계(S40) forming a vacuum in the housing through the air discharge pipe (S41) and sealing the air discharge pipe (S42) vacuum forming and sealing step
    를 포함하는 X선 소스 제조방법.X-ray source manufacturing method comprising a.
  2. 청구항 1에 있어서, The method according to claim 1,
    상기 음극부는, 상기 CNT 팁이 형성된 음극, 상기 음극과 전기적으로 절연되고 상기 음극과 상기 양극부 사이에 배치되는 게이트 전극과 포커스 전극 중 적어도 하나를 포함하고, The cathode part may include at least one of a cathode in which the CNT tip is formed, a gate electrode and a focus electrode electrically insulated from the cathode and disposed between the cathode and the anode part,
    상기 전극단자는, 상기 게이트 전극과 포커스 전극 중 적어도 하나와 물리적으로 접촉되는 제1 전극단자, 상기 음극과 물리적으로 접촉되는 제2 전극단자를 포함하는 X선 소스 제조방법.The electrode terminal includes a first electrode terminal in physical contact with at least one of the gate electrode and the focus electrode, and a second electrode terminal in physical contact with the cathode.
  3. 청구항 1 또는 2에 있어서, The method according to claim 1 or 2,
    상기 (S20) 음극부정렬단계 후 (S30)양극부결합단계 전,After the (S20) cathode sub-alignment step (S30) before the positive electrode bonding step,
    (S25) 상기 음극부와 상기 전극단자의 접촉부분을 접합하는 음극부접합단계를 더 포함하는 X선 소스 제조방법.(S25) X-ray source manufacturing method further comprising a cathode portion bonding step of bonding the contact portion of the cathode and the electrode terminal.
  4. 청구항 3에 있어서, The method according to claim 3,
    상기 (S25) 음극부접합단계는, 상기 음극부와 상기 전극단자의 접촉부분을 점용접하는 X선 소스 제조방법.Wherein (S25) the cathode portion bonding step, X-ray source manufacturing method for spot welding the contact portion of the cathode portion and the electrode terminal.
  5. 유리 재질로 이루어진 튜브 형상의 하우징,Tubular housing made of glass,
    상기 하우징의 일측을 관통하는 전극단자,An electrode terminal penetrating one side of the housing,
    상기 하우징의 내부에서 상기 전극단자와 물리적으로 접촉하고 CNT 팁을 포함하는 음극부; 및 A cathode part in physical contact with the electrode terminal in the housing and including a CNT tip; And
    상기 CNT 팁과 대향하도록 상기 하우징의 일단에 결합된 양극부An anode coupled to one end of the housing to face the CNT tip
    를 포함하는 X선 소스.X-ray source comprising a.
  6. 청구항 5에 있어서, The method according to claim 5,
    상기 음극부는, 상기 CNT 팁이 형성된 음극, 상기 음극과 전기적으로 절연되고 상기 음극과 상기 양극부 사이에 배치되는 게이트 전극과 포커스 전극 중 적어도 하나를 포함하고,The cathode part may include at least one of a cathode in which the CNT tip is formed, a gate electrode and a focus electrode electrically insulated from the cathode and disposed between the cathode and the anode part,
    상기 전극단자는 상기 게이트 전극과 포커스 전극 중 적어도 하나와 물리적으로 접촉되는 제1 전극단자, 상기 음극과 물리적으로 접촉되는 제 2 전극단자를 포함하는 X선 소스.The electrode terminal may include a first electrode terminal in physical contact with at least one of the gate electrode and the focus electrode, and a second electrode terminal in physical contact with the cathode.
  7. 청구항 5 또는 6에 있어서, The method according to claim 5 or 6,
    상기 음극부와 상기 전극단자의 접촉부분은 점용접된 X선 소스.And a contact portion of the cathode portion and the electrode terminal is spot welded.
  8. 청구항 5에 있어서, The method according to claim 5,
    상기 하우징의 일측에 구비되어 밀봉된 공기배출구를 포함하는 X선 소스.X-ray source provided on one side of the housing including a sealed air outlet.
PCT/KR2015/012174 2014-11-12 2015-11-12 Carbon nanotube x-ray source having glass tube housing and method for manufacturing same WO2016076645A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010244940A (en) * 2009-04-08 2010-10-28 Toshiba Corp Rotating anode x-ray tube device
KR101168146B1 (en) * 2010-12-02 2012-07-24 원광대학교산학협력단 Apparatus on generating electron beam or X-ray using CNT yarn
WO2013131628A1 (en) * 2012-03-05 2013-09-12 Roberto Molteni Compact x-ray sources for moderate loading with x-ray tube with carbon nanotube cathode
WO2014119080A1 (en) * 2013-01-29 2014-08-07 双葉電子工業株式会社 X-ray radiation source and x-ray tube
KR101439208B1 (en) * 2013-04-30 2014-09-12 (주)선재하이테크 X-ray tube structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010244940A (en) * 2009-04-08 2010-10-28 Toshiba Corp Rotating anode x-ray tube device
KR101168146B1 (en) * 2010-12-02 2012-07-24 원광대학교산학협력단 Apparatus on generating electron beam or X-ray using CNT yarn
WO2013131628A1 (en) * 2012-03-05 2013-09-12 Roberto Molteni Compact x-ray sources for moderate loading with x-ray tube with carbon nanotube cathode
WO2014119080A1 (en) * 2013-01-29 2014-08-07 双葉電子工業株式会社 X-ray radiation source and x-ray tube
KR101439208B1 (en) * 2013-04-30 2014-09-12 (주)선재하이테크 X-ray tube structure

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