WO2015105275A1 - Cylindrical three-electrode field emission x-ray tube - Google Patents

Cylindrical three-electrode field emission x-ray tube Download PDF

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Publication number
WO2015105275A1
WO2015105275A1 PCT/KR2014/011469 KR2014011469W WO2015105275A1 WO 2015105275 A1 WO2015105275 A1 WO 2015105275A1 KR 2014011469 W KR2014011469 W KR 2014011469W WO 2015105275 A1 WO2015105275 A1 WO 2015105275A1
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electrode body
cylindrical
electrode
field emission
ray tube
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PCT/KR2014/011469
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French (fr)
Korean (ko)
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김대준
김동일
유승민
박관수
서승완
박지혜
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(주)브이에스아이
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/20—Arrangements for controlling gases within the X-ray tube
    • H01J2235/205—Gettering

Definitions

  • the present invention relates to an X-ray tube for generating X-rays, and more particularly to a novel structure of an X-ray tube incorporating a three-pole field emission device.
  • An X-ray tube has an electron emitting device in a high vacuum space, and is an apparatus for generating X-rays by irradiating electrons generated from the electron emitting device to a target in a tube.
  • the electron-emitting device is a core device embedded in the X-ray tube.
  • various technologies are used, such as using a cold cathode nano-electron source such as carbon nanotube (CNT) in an electron gun using hot electrons.
  • CNT carbon nanotube
  • the field emission device using field emission is a kind of electron emission device, and uses the principle of drawing electrons from the metal surface by a strong electric field.
  • the field emission device uses the principle that electron emission occurs at the cathode when the electric field caused by the anode voltage is strongly applied above 1 kV / ⁇ m using a bipolar tube, and in recent years, a three-pole type electric field is used to more efficiently control the emitted electrons. Emission device is used.
  • the 3-pole field emission device when electrons are emitted from the field emission device formed on the cathode according to the induction of electron emission of the gate electrode, the emitted electrons are focused on the anode by the focusing electrode, and electrons collide with the target formed on the anode. It is configured to express lines, visible light, and the like.
  • an X-ray tube incorporating a field emission device electrons emitted from the field emission device are irradiated to other areas in addition to the target irradiated in the X-ray tube to cause a problem. Therefore, between the electrodes of the field emission device is insulated with an insulator to maintain the insulation state of each electrode, when the electrons emitted to such a heating element collides with the charge, it lowers the breakdown voltage characteristics between the electrodes as well as field emission due to arcing phenomenon It may destroy the device and further cause the X-ray tube to be inoperable.
  • the technical problem of the present invention is to provide an X-ray tube with a built-in three-pole field emission device, to provide a cylindrical three-pole field emission device X-ray tube suitable for small size that can improve the withstand voltage characteristics and maintain the product life for a longer time than the existing will be.
  • a cylindrical tripolar field emission X-ray tube is disposed on a cathode electrode body, an emitter positioned on the cathode electrode body to emit electrons, and disposed opposite to the cathode electrode body.
  • An anode electrode a metal material which is applied to the center region of the anode electrode and generates X-rays in response to electrons emitted from the emitter, and the cathode electrode body and the substrate to control the amount of electrons emitted from the emitter
  • a gate electrode body disposed between anode electrodes and disposed at a predetermined distance from the anode electrode, and a cylindrical insulating case bonded to the anode electrode and the cathode electrode body to seal the inside thereof.
  • the cathode electrode body is provided with a circular electrode plate at the bottom, and includes a cylindrical electrode body formed in the center of the electrode plate, the emitter is installed above the cylindrical electrode body.
  • the gate electrode body is positioned on the first electrode body and the first electrode body provided on the electrode plate, the upper part is open to emit electrons emitted from the emitter only to the upper side, and the side wraps the emitter. And a third electrode body positioned above the second electrode body, the third electrode body serving as a gate.
  • the gate electrode body further includes a focusing electrode body installed on the third electrode body to focus electrons emitted from the emitter to the metal material.
  • the cylindrical insulating case is composed of two stages of an upper case and a lower case, and the upper case is bonded to the first electrode body and the anode electrode and is configured to surround a part of the cathode electrode body and the side of the gate electrode body.
  • the lower case is joined to the circular electrode plate and the first electrode body and is configured to surround a portion of the cathode electrode body.
  • the cylindrical insulating case is composed of two stages of an upper case and a lower case, and the upper case is bonded to the first electrode body and the anode electrode and is configured to surround a part of the cathode electrode body and the side of the gate electrode body.
  • the lower case is joined to the circular electrode plate and the first electrode body and is configured to surround a portion of the cathode electrode body.
  • the circular electrode plate is formed by stacking two electrode plates.
  • the cylindrical tripolar field emission X-ray tube according to the embodiment of the present invention further includes a getter portion formed on the outer circumferential surface of the second electrode body.
  • the gate electrode body is spaced apart by a distance set with respect to the anode electrode.
  • the electrons generated in the field emission device are not charged to the insulator, thereby preventing problems caused by the insulator charging, and supplying more electrons to the metal material layer for X-ray emission to provide a three-pole electric field.
  • the product lifespan can be maintained longer than existing products.
  • the manufacturing can be assembled very easily and there is an effect that can be easily replaced.
  • FIG. 1 is a view schematically showing a cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention.
  • FIG. 2 is a view of a cathode electrode body according to an embodiment of the present invention.
  • FIG. 3 is a view showing a coupling structure and a detailed configuration diagram of a cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention.
  • Figure 4 is a coupling structure and detailed configuration of the cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention.
  • first and second may be used to describe various components, but the components may not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.
  • first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.
  • a cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention.
  • a cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention is an electron emission device emitting electrons, and has a structure in which a three pole field emission device is applied.
  • Cylindrical tripolar field emission x-ray tube is the cathode electrode body 10, the emitter 20, the lower case 30, the gate electrode body 40, the upper case 50 , An anode electrode 60, and a metal material 70.
  • the cathode electrode body 10 is composed of electrode body structures (see FIG. 2), and its shape is formed of a circular electrode plate and a cylindrical electrode body protruding upward from the center of the electrode plate.
  • the emitter 20 is positioned above the cylindrical electrode body.
  • the emitter 20 is an example of applying a carbon nanotube (CNT) emitter, and the CNT emitter is formed by forming CNT on a plate through a printing technique and is a nano electron source emitting electrons. .
  • the nano electron source applied to the emitter 20 is not limited to the CNT emitter.
  • the cathode electrode body 10 will be described later in more detail with reference to FIG. 2.
  • the gate electrode body 40 includes three electrode bodies, namely, first to third electrode bodies 41, 42, and 43.
  • the first electrode body 41 is an electrode body that serves as a support body that can be bonded to the upper case 50, and is provided below the three electrode bodies 41, 42, and 43, and the second electrode body 42 is The upper part is opened so that the electrons emitted from the emitter 20 can be emitted only to the upper part, and the side part surrounds the emitter 20.
  • the third electrode body 43 is an electrode body for performing a gate role and is positioned above the second electrode body 42.
  • the gate electrode body 40 may further include a fourth electrode body 44 that focuses emitted electrons, which is referred to as a focusing electrode body.
  • Cylindrical insulating case is composed of a cylindrical insulator, it is composed of a structure divided into two upper and lower stages, that is, the lower case 30 and the upper case 50.
  • the lower case 30 and the upper case 50 are formed of, for example, a material such as glass or ceramic.
  • the lower case 30 and the upper case 50 may be configured independently of each other, but may be integrated into one.
  • the upper case 50 is configured to completely surround a portion of the cathode electrode body 10 and the side of the gate electrode body 40, and the lower case 30 has a structure to surround a portion of the cathode electrode body 10.
  • the anode electrode 60 is attached to the upper case 50 so as to be positioned above the gate electrode body 40.
  • the anode electrode 60 has a circular shape and is bonded to the upper case 50 and configured to seat the second metal body 62 on the center side.
  • the metal body 61 and the 2nd metal body 62 which are located in the center of the 1st metal body 61, and perform the window reverse term which project X-rays to the outside are included.
  • Be beryllium having a property of transmitting X-rays is used.
  • the metal material 70 is composed of, for example, one of tungsten, silver, copper, rhodium, or a combination of two or more thereof.
  • the metal material 70 and the gate electrode body 40 are hermetically sealed by the upper case 50, electrons emitted from the emitter 20 are focused on the metal material 70, and the metal material 70 is X-rays are generated in response to the input electrons and irradiated to the outside through the window 62.
  • the cylindrical tripolar field emission X-ray tube constructed as described above is discharged from the emitter 20 because the second electrode body 42 of the gate electrode body 40 sufficiently surrounds the emitter 20 for emitting electrons.
  • the former is unlikely to collide with the upper case 50 except for the open upper side.
  • the gate electrode body 40 and the anode electrode 60 has a set distance L. That is, the gate electrode body 40 is spaced apart from the anode electrode 60 by the set distance L. If the distance between the gate electrode body 40 and the anode electrode 60 is longer than the set distance (L), the electrons emitted from the emitter 20 is not focused on the metal material 70, the vicinity of the metal material 70 It is delivered up to the first metal body 61. This is because electrons emitted from the emitter 20 are radially spread and emitted. When the distance between the gate electrode body 40 and the anode electrode 60 is shorter than the set distance L, there arises a problem that the gate electrode body 40 and the anode electrode 60 are electrically conductive.
  • the distance between the gate electrode body 40 and the anode electrode 60 is shown as the distance between the fourth electrode body 44 and the anode electrode 60, the cylindrical tripolar field emission according to the embodiment of the present invention.
  • the X-ray tube does not employ the fourth electrode body 44, the distance between the third electrode body 43 and the anode electrode 60 becomes.
  • FIG. 2 is a view of the cathode electrode body 10 according to an embodiment of the present invention.
  • the cathode electrode body 10 includes a circular electrode plate 11 at a lower portion thereof, and a cylindrical electrode body 12 is positioned and coupled to a central portion of the electrode plate 11.
  • the emitter electrode 20 is bonded to the cylindrical electrode body 12.
  • the electrode plate 11 of the cathode electrode body 10 may be composed of one electrode plate, and as shown in FIG. 2B, two electrode plates 11-1 and 11-2 may be stacked. It can also be configured. In one embodiment of the present invention, it is preferable to configure the two electrode plates (11-1, 11-2) to facilitate the assembly with the lower case 30 to be bonded in a later step.
  • Figure 3 shows the arrangement of the configuration before the combination of the three-pole field emission X-ray tube according to an embodiment of the present invention.
  • a cylindrical tripolar field emission device X-ray tube according to an exemplary embodiment will be described.
  • the cathode electrode body 10, the emitter 20, the lower case 30, and the gate electrode body 40 may be described.
  • an upper case 50, an anode electrode 60, and a metal material 70 may be described.
  • the lower case 30 is vertically bonded to the electrode plate 11 or 11-1 of the cathode electrode body 10 and the first electrode body 42 of the gate electrode body 40, respectively, and the upper case 50 is The first electrode body 41 and the anode electrode 60 of the gate electrode body 40 are configured to be joined up and down, respectively.
  • the fourth electrode body 44 is positioned above the third electrode body 43, and serves to prevent diffusion of electrons generated from the emitter 20 and to concentrate the electrons on the metal material 70. .
  • the fourth electrode body 44 is formed to have the same inner / outer diameter as the third electrode body 43, and it is not a problem even if it is formed to have a different inner / outer diameter.
  • the getter part 80 may be further provided on one side of the outer circumferential surface of the second electrode body 42, and the inner vacuum degree may be increased by reacting with the gas remaining inside through the getter part 80.
  • the getter may be activated by applying heat to the getter unit 80 or by applying energy to the getter unit 80 by applying a laser or a high frequency wave.
  • the getter may be activated to adsorb residual gas remaining in the container to maintain the vacuum degree therein.
  • X-ray tube according to an embodiment of the present invention configured as described above is suitable for small size, can be easily assembled in manufacturing and has the advantage that can be easily replaced.

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Abstract

The present invention relates to a cylindrical three-electrode field emission X-ray tube, comprising: a cathode electrode having an electronic source formed therein for emitting electrons; an anode electrode disposed to face the cathode electrode; a metallic material applied on the central region of the anode electrode to generate X-rays with the emitted electrons radiated thereon; carbon nanotubes formed, as a field emission element, on a part corresponding to an intersection; a gate electrode disposed with a predetermined gap so as to control electrons emitted from the carbon nanotubes; and a cylindrical insulating case, the upper and lower portions of which are bonded to the cathode electrode and the anode electrode, respectively.

Description

원통형 3극 전계 방출 X-선관Cylindrical 3-pole field emission X-ray tube
본 발명은 X선을 발생시키는 X-선관에 관한 것으로, 더욱 상세하게는 3극 전계방출소자를 내장한 X-선관의 신규 구조에 관한 것이다.The present invention relates to an X-ray tube for generating X-rays, and more particularly to a novel structure of an X-ray tube incorporating a three-pole field emission device.
X-선관은 고진공의 공간내에 전자방출소자를 구비하고, 전자방출소자로부터 발생한 전자를 튜브(Tube)내의 타겟(target)에 조사시켜 X선을 발생시키는 장치이다.An X-ray tube has an electron emitting device in a high vacuum space, and is an apparatus for generating X-rays by irradiating electrons generated from the electron emitting device to a target in a tube.
전자방출소자는 X-선관내에 내장되는 핵심 소자로 일반적으로 열전자를 활용한 전자총에서 CNT(Carbon Nano Tube, 탄소나노튜브)와 같은 냉음극 나노 전자원을 사용하는 등 다양한 기술이 활용되고 있다. 이중에서 전계방출(Field emission)을 이용한 전계방출소자는 전자방출소자의 일종으로, 강력한 전계에 의해서 금속 표면에서 전자를 끌어내는 원리를 이용한 것이다.The electron-emitting device is a core device embedded in the X-ray tube. In general, various technologies are used, such as using a cold cathode nano-electron source such as carbon nanotube (CNT) in an electron gun using hot electrons. The field emission device using field emission is a kind of electron emission device, and uses the principle of drawing electrons from the metal surface by a strong electric field.
전계방출소자는 2극관을 사용하여 양극 전압에 의한 전계를 1kV/㎛ 이상으로 강력하게 가하면 음극에서 전자 방출이 일어나게 되는 원리를 이용한 것이며, 최근에는 방출되는 전자를 더욱 효율적으로 제어하기 위해 3극형 전계방출 소자를 활용하고 있다. 3극 전계방출소자는 게이트 전극의 전자방출 유도에 따라 캐소드에 형성된 전계방출소자로부터 전자가 방출되면, 방출된 전자가 집속용 전극에 의해 애노드에 집속되어 애노드 상에 형성된 타겟에 전자가 충돌하여 X선, 가시광 등을 발현할 수 있도록 구성된다.The field emission device uses the principle that electron emission occurs at the cathode when the electric field caused by the anode voltage is strongly applied above 1 kV / μm using a bipolar tube, and in recent years, a three-pole type electric field is used to more efficiently control the emitted electrons. Emission device is used. In the 3-pole field emission device, when electrons are emitted from the field emission device formed on the cathode according to the induction of electron emission of the gate electrode, the emitted electrons are focused on the anode by the focusing electrode, and electrons collide with the target formed on the anode. It is configured to express lines, visible light, and the like.
일반적으로 전계방출소자를 내재한 X-선관에 있어서, 전계방출소자로부터 방출된 전자는 X-선관내에 조사되는 타겟외에도 다른 영역에 조사되어 문제를 야기시킨다. 따라서 전계방출소자의 전극들 간에는 각 전극의 절연 상태를 유지시키기 위하여 절연체로 절연을 시키는데 이러한 전열체에 방출된 전자가 충돌하여 대전할 경우, 전극간 내전압 특성을 저하시킴은 물론 아킹현상으로 전계방출소자를 파괴시키고 나아가서는 X-선관의 구동불능을 유발할 수도 있다.In general, in an X-ray tube incorporating a field emission device, electrons emitted from the field emission device are irradiated to other areas in addition to the target irradiated in the X-ray tube to cause a problem. Therefore, between the electrodes of the field emission device is insulated with an insulator to maintain the insulation state of each electrode, when the electrons emitted to such a heating element collides with the charge, it lowers the breakdown voltage characteristics between the electrodes as well as field emission due to arcing phenomenon It may destroy the device and further cause the X-ray tube to be inoperable.
본 발명의 기술적 과제는 3극 전계방출소자를 내장한 X-선관으로, 내전압 특성 향상은 물론 제품의 수명을 기존제품보다 장시간 유지가 가능한 소형에 적합한 원통형 3극 전계방출소자 X-선관을 제공하는 것이다.The technical problem of the present invention is to provide an X-ray tube with a built-in three-pole field emission device, to provide a cylindrical three-pole field emission device X-ray tube suitable for small size that can improve the withstand voltage characteristics and maintain the product life for a longer time than the existing will be.
상술한 목적을 달성하기 위해 본 발명의 특징에 따른 원통형 3극 전계방출 X-선관은 캐소드 전극체, 상기 캐소드 전극체 상에 위치하며 전자를 방출하는 에미터, 상기 캐소드 전극체에 대향하여 배치된 애노드 전극, 상기 애노드 전극의 중심영역에 도포되어 있으며 상기 에미터에서 방출된 전자에 대응하여 X-선을 발생시키는 금속물질, 상기 에미터로부터 방출되는 전자량을 제어하기 위하여 상기 캐소드 전극체와 상기 애노드 전극 사이에 위치하며 상기 애노드 전극과 설정거리를 두고 배치된 게이트 전극체, 상기 애노드 전극과 상기 캐소드 전극체에 각각 접합되어 내부를 밀폐시키는 원통형 절연 케이스를 포함한다.In order to achieve the above object, a cylindrical tripolar field emission X-ray tube according to a feature of the present invention is disposed on a cathode electrode body, an emitter positioned on the cathode electrode body to emit electrons, and disposed opposite to the cathode electrode body. An anode electrode, a metal material which is applied to the center region of the anode electrode and generates X-rays in response to electrons emitted from the emitter, and the cathode electrode body and the substrate to control the amount of electrons emitted from the emitter A gate electrode body disposed between anode electrodes and disposed at a predetermined distance from the anode electrode, and a cylindrical insulating case bonded to the anode electrode and the cathode electrode body to seal the inside thereof.
상기 캐소드 전극체는 하부에 원형의 전극 플레이트를 구비하고, 상기 전극 플레이트의 중심부에 형성된 원통형 전극체를 포함하며, 상기 에미터는 상기 원통형 전극체의 상부에 설치된다.The cathode electrode body is provided with a circular electrode plate at the bottom, and includes a cylindrical electrode body formed in the center of the electrode plate, the emitter is installed above the cylindrical electrode body.
상기 게이트 전극체는 상기 전극 플레이트 상에 설치되는 제1 전극체, 상기 제1 전극체 상부에 위치하여 상기 에미터에서 방출되는 전자를 상부로만 방출되도록 상부가 오픈되어 있고 측부가 상기 에미터를 감싸도록 한 구성된 제2 전극체, 그리고 상기 제2 전극체 상부에 위치하며, 게이트(gate) 역할을 수행하는 제3 전극체를 포함한다.The gate electrode body is positioned on the first electrode body and the first electrode body provided on the electrode plate, the upper part is open to emit electrons emitted from the emitter only to the upper side, and the side wraps the emitter. And a third electrode body positioned above the second electrode body, the third electrode body serving as a gate.
상기 게이트 전극체는 상기 제3 전극체 상에 설치되어 상기 에미터에서 방출되는 전자를 상기 금속물질에 집속시키는 포커싱 전극체를 더 포함한다.The gate electrode body further includes a focusing electrode body installed on the third electrode body to focus electrons emitted from the emitter to the metal material.
상기 원통형 절연 케이스는 상부 케이스 및 하부 케이스의 2단으로 구성되며, 상기 상부 케이스는 상기 제1 전극체와 상기 애노드 전극에 접합되며 상기 캐소드 전극체의 일부와 상기 게이트 전극체의 측부를 감싸도록 구성되고, 상기 하부 케이스는 상기 원형의 전극 플레이트와 상기 제1 전극체에 접합되며 상기 캐소드 전극체의 일부를 감싸도록 구성된다.The cylindrical insulating case is composed of two stages of an upper case and a lower case, and the upper case is bonded to the first electrode body and the anode electrode and is configured to surround a part of the cathode electrode body and the side of the gate electrode body. The lower case is joined to the circular electrode plate and the first electrode body and is configured to surround a portion of the cathode electrode body.
상기 원통형 절연 케이스는 상부 케이스 및 하부 케이스의 2단으로 구성되며, 상기 상부 케이스는 상기 제1 전극체와 상기 애노드 전극에 접합되며 상기 캐소드 전극체의 일부와 상기 게이트 전극체의 측부를 감싸도록 구성되고, 상기 하부 케이스는 상기 원형의 전극 플레이트와 상기 제1 전극체에 접합되며 상기 캐소드 전극체의 일부를 감싸도록 구성된다.The cylindrical insulating case is composed of two stages of an upper case and a lower case, and the upper case is bonded to the first electrode body and the anode electrode and is configured to surround a part of the cathode electrode body and the side of the gate electrode body. The lower case is joined to the circular electrode plate and the first electrode body and is configured to surround a portion of the cathode electrode body.
상기 원형의 전극 플레이트는 2개의 전극 플레이트를 적층시켜 구성된다.The circular electrode plate is formed by stacking two electrode plates.
본 발명의 실시 예에 따른 원통형 3극 전계방출 X-선관은 제2 전극체의 외주면에 형성된 게터부를 더 포함한다.The cylindrical tripolar field emission X-ray tube according to the embodiment of the present invention further includes a getter portion formed on the outer circumferential surface of the second electrode body.
상기 게이트 전극체는 상기 애노드 전극에 대해 설정된 거리만큼 이격되어 설치된다.The gate electrode body is spaced apart by a distance set with respect to the anode electrode.
본 발명의 실시 예에 따르면, 전계방출소자에서 생성된 전자가 절연체에 대전되지 않도록 하여 절연체 대전에 의한 문제를 방지하고, X-선 방출을 위한 금속물질층에 보다 많은 전자를 공급하여 3극 전계방출소자를 내장한 X-선관의 내전압 특성 향상은 물론 제품의 수명을 기존제품보다 장시간 유지할 수 있게 한다. 또한 본 발명의 실시 예에 따르면, 제조상 매우 용이하게 조립될 수 있으며 또한 손쉽게 교체가 가능한 효과가 있다.According to an embodiment of the present invention, the electrons generated in the field emission device are not charged to the insulator, thereby preventing problems caused by the insulator charging, and supplying more electrons to the metal material layer for X-ray emission to provide a three-pole electric field. In addition to improving the breakdown voltage characteristics of X-ray tubes with built-in emitters, the product lifespan can be maintained longer than existing products. In addition, according to an embodiment of the present invention, the manufacturing can be assembled very easily and there is an effect that can be easily replaced.
도 1은 본 발명의 일실시예에 따른 원통형 3극 전계방출 X-선관을 개략적으로 나타낸 도면.1 is a view schematically showing a cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention.
도 2는 본 발명의 일실시예에 따른 캐소드 전극체에 대한 도면.2 is a view of a cathode electrode body according to an embodiment of the present invention.
도 3은 본 발명의 일실시예에 따른 원통형 3극 전계방출 X-선관의 결합구조 및 세부 구성도를 나타낸 도면. 3 is a view showing a coupling structure and a detailed configuration diagram of a cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention.
도 4는 본 발명의 일실시예에 따른 원통형 3극 전계방출 X-선관의 결합구조 및 세부 구성도.Figure 4 is a coupling structure and detailed configuration of the cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention.
아래에서는 첨부한 도면을 참조하여 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자가 용이하게 실시할 수 있도록 본 발명의 실시 예를 상세히 설명한다. 그러나 본 발명은 여러 가지 상이한 형태로 구현될 수 있으며 여기에서 설명하는 실시 예에 한정되지 않는다. 그리고 도면에서 본 발명을 명확하게 설명하기 위해서 설명과 관계없는 부분은 생략하였다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention.
제1, 제2 등의 용어는 다양한 구성 요소들을 설명하는데 사용될 수 있지만, 상기 구성 요소들은 상기 용어들에 의해 한정될 수 없다. 상기 용어들은 하나의 구성 요소를 다른 구성 요소로부터 구별하는 목적으로만 사용된다. 예를 들어, 본 발명의 권리범위를 벗어나지 않으면서 제1 구성 요소는 제2 구성요소로 명명될 수 있고, 유사하게 제2 구성 요소도 제1 구성 요소로 명명될 수 있다.Terms such as first and second may be used to describe various components, but the components may not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.
이하, 첨부한 도면들을 참조하여 본 발명의 바람직한 실시예들을 보다 상세하게 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명의 일 실시예에 따른 원통형 3극 전계방출 X-선관을 도시한 것이다. 도 1을 참조하면, 본 발명의 일 실시 예에 따른 원통형 3극 전계방출 X-선관은 전자를 방출하는 전자방출소자로서, 3극 전계방출소자를 적용한 구조이다.1 illustrates a cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention. Referring to FIG. 1, a cylindrical tripolar field emission X-ray tube according to an embodiment of the present invention is an electron emission device emitting electrons, and has a structure in which a three pole field emission device is applied.
본 발명의 실시 예에 따른 원통형 3극 전계방출 x-선관은 캐소드 전극체(10), 에미터(20), 하부 케이스(30), 게이트(gate) 전극체(40), 상부 케이스(50), 애노드 전극(60), 그리고 금속물질(70)을 포함한다. Cylindrical tripolar field emission x-ray tube according to an embodiment of the present invention is the cathode electrode body 10, the emitter 20, the lower case 30, the gate electrode body 40, the upper case 50 , An anode electrode 60, and a metal material 70.
캐소드 전극체(10)는 전극체 구조물들(도 2 참조)로 이루어지며, 그 형상은 원형의 전극 플레이트 및 상기 전극 플레이트의 중심부에서 상부로 돌출된 원통형의 전극체로 이루어진다. 상기 원통형 전극체 상부에는 에미터(20)가 위치하도록 한다. 여기서 에미터(20)는 일 예로 CNT(Carbon Nano Tube, 탄소나노튜브) 에미터를 적용하였으며, CNT 에미터는 CNT를 프린팅 기법을 통해 평판 상에 형성하여 구성되며, 전자를 방출하는 나노 전자원이다. 에미터(20)로 적용되는 나노 전자원으로는 CNT 에미터에 한정되지 않는다. 캐소드 전극체(10)에 대해서는 도 2를 참조로 하여 보다 상세히 후술토록 한다. The cathode electrode body 10 is composed of electrode body structures (see FIG. 2), and its shape is formed of a circular electrode plate and a cylindrical electrode body protruding upward from the center of the electrode plate. The emitter 20 is positioned above the cylindrical electrode body. Here, the emitter 20 is an example of applying a carbon nanotube (CNT) emitter, and the CNT emitter is formed by forming CNT on a plate through a printing technique and is a nano electron source emitting electrons. . The nano electron source applied to the emitter 20 is not limited to the CNT emitter. The cathode electrode body 10 will be described later in more detail with reference to FIG. 2.
게이트 전극체(40)는 3개의 전극체 즉, 제1 내지 제3 전극체(41, 42, 43)를 포함한다. 제1 전극체(41)는 상부 케이스(50)와 접합될 수 있는 지지체 역할을 수행하는 전극체로 3개의 전극체(41, 42, 43) 중 하부에 구비되며, 제 2 전극체(42)는 제 1 전극체(41) 상부에 위치하여 에미터(20)에서 방출되는 전자를 상부로만 방출될 수 있도록 상부가 오픈되어 있고, 측부는 에미터(20)를 감싸도록 한 구성된다. 제 3 전극체(43)는 게이트(Gate) 역할을 수행하기 위한 전극체로 제 2 전극체(42) 상부에 위치토록 한다. 한편 게이트 전극체(40)는 방출되는 전자를 집속하는 제 4 전극체(44)를 더 구비할 수 있으며 이를 포커싱(Focusing) 전극체로 지칭한다.The gate electrode body 40 includes three electrode bodies, namely, first to third electrode bodies 41, 42, and 43. The first electrode body 41 is an electrode body that serves as a support body that can be bonded to the upper case 50, and is provided below the three electrode bodies 41, 42, and 43, and the second electrode body 42 is The upper part is opened so that the electrons emitted from the emitter 20 can be emitted only to the upper part, and the side part surrounds the emitter 20. The third electrode body 43 is an electrode body for performing a gate role and is positioned above the second electrode body 42. Meanwhile, the gate electrode body 40 may further include a fourth electrode body 44 that focuses emitted electrons, which is referred to as a focusing electrode body.
원통형 절연 케이스는 원통 형상의 절연체로 구성되며, 상하 2단 즉 하부 케이스(30)와 상부 케이스(50)로 분리된 구조로 구성된다. 하부 케이스(30)와 상부 케이스(50)는 예컨대, 유리 또는 세라믹(ceramic) 등의 재질로 형성된다. 하부 케이스(30)와 상부 케이스(50)는 서로 독립되어 구성될 수 있지만, 하나로 일체화되어 구성될 수 있다.Cylindrical insulating case is composed of a cylindrical insulator, it is composed of a structure divided into two upper and lower stages, that is, the lower case 30 and the upper case 50. The lower case 30 and the upper case 50 are formed of, for example, a material such as glass or ceramic. The lower case 30 and the upper case 50 may be configured independently of each other, but may be integrated into one.
상부 케이스(50)는 캐소드 전극체(10) 일부와 게이트 전극체(40)의 측부를 완전히 감싸도록 구성되며, 하부 케이스(30)는 캐소드 전극체(10) 일부를 감싸도록 한 구조이다. The upper case 50 is configured to completely surround a portion of the cathode electrode body 10 and the side of the gate electrode body 40, and the lower case 30 has a structure to surround a portion of the cathode electrode body 10.
애노드 전극(60)은 게이트 전극체(40) 상부에 위치하도록 상부 케이스(50)와 접합되어 설치된다. 보다 상세히는, A의 수직 단면도에 도시된 바와 같이 애노드 전극(60)은 원형의 형태를 가지며 상부 케이스(50) 상에 접합되고, 중심측에 제2 금속체(62)가 안착되도록 구성된 제1 금속체(61)와, 제1 금속체(61)의 중심측에 위치하여 X선(X-ray)를 외부로 투사시키는 윈도우(window) 역항을 하는 제2 금속체(62)를 포함한다. 여기서 제2 금속체(61)의 재질로는 X선을 투과시키는 특성을 가지는 Be(beryllium) 등이 이용된다.The anode electrode 60 is attached to the upper case 50 so as to be positioned above the gate electrode body 40. In more detail, as shown in the vertical cross-sectional view of A, the anode electrode 60 has a circular shape and is bonded to the upper case 50 and configured to seat the second metal body 62 on the center side. The metal body 61 and the 2nd metal body 62 which are located in the center of the 1st metal body 61, and perform the window reverse term which project X-rays to the outside are included. As the material of the second metal body 61, Be (beryllium) having a property of transmitting X-rays is used.
애노드 전극(60)의 중심 즉, 제2 금속체(62)의 하부에는 에미터(20)에서 방출된 전자가 집중적으로 충돌하여 X선을 발생하는 금속물질(70)을 구비된다. 금속물질(70)은 예컨대 텅스텐, 은, 구리, 로듐 중 하나 또는 2 이상의 조합으로 구성된다. In the center of the anode electrode 60, that is, the lower portion of the second metal body 62, the electrons emitted from the emitter 20 intensively collide with the metal material 70 that generates X-rays. The metal material 70 is composed of, for example, one of tungsten, silver, copper, rhodium, or a combination of two or more thereof.
금속물질(70) 및 게이트 전극체(40)는 상부 케이스(50)에 의해 고진공으로 밀폐되며, 에미터(20)에서 방출된 전자가 금속물질(70)에 집속되고, 금속물질(70)은 입력된 전자에 대응하여 X선을 발생시켜 윈도우(62)를 통해 외부로 조사된다.The metal material 70 and the gate electrode body 40 are hermetically sealed by the upper case 50, electrons emitted from the emitter 20 are focused on the metal material 70, and the metal material 70 is X-rays are generated in response to the input electrons and irradiated to the outside through the window 62.
상기와 같이 구성한 원통형 3극 전계방출 X-선관은 게이트 전극체(40)의 제 2 전극체(42)가 전자를 방출하는 에미터(20)를 충분히 감싸기 때문에, 에미터(20)로부터 방출된 전자는 오픈된 상측을 제외하고는 상부 케이스(50)와 가급적 충돌하지 않게 된다.The cylindrical tripolar field emission X-ray tube constructed as described above is discharged from the emitter 20 because the second electrode body 42 of the gate electrode body 40 sufficiently surrounds the emitter 20 for emitting electrons. The former is unlikely to collide with the upper case 50 except for the open upper side.
한편, 상기와 같이 구성한 원통형 3극 전계방출 X-선관에서 게이트 전극체(40)와 애노드 전극(60) 간에는 설정거리(L)를 가진다. 즉, 게이트 전극체(40)는 애노드 전극(60)에서 설정거리(L) 만큼 이격되어 있다. 만약 게이트 전극체(40)와 애노드 전극(60) 간의 거리가 설정거리(L)보다 길면 에미터(20)에서 방출된 전자가 금속물질(70)에 집속되지 못하고, 금속물질(70) 주변의 제1 금속체(61)까지 전달된다. 이런 이유는 에미터(20)에서 방출되는 전자가 방사형으로 퍼져 방출되기 때문이다. 그리고 게이트 전극체(40)와 애노드 전극(60) 간의 거리가 설정거리(L)보다 짧으면, 게이트 전극체(40)와 애노드 전극(60) 간이 전기적으로 도통되는 문제가 발생한다.On the other hand, in the cylindrical tripolar field emission X-ray tube constructed as described above, the gate electrode body 40 and the anode electrode 60 has a set distance L. That is, the gate electrode body 40 is spaced apart from the anode electrode 60 by the set distance L. If the distance between the gate electrode body 40 and the anode electrode 60 is longer than the set distance (L), the electrons emitted from the emitter 20 is not focused on the metal material 70, the vicinity of the metal material 70 It is delivered up to the first metal body 61. This is because electrons emitted from the emitter 20 are radially spread and emitted. When the distance between the gate electrode body 40 and the anode electrode 60 is shorter than the set distance L, there arises a problem that the gate electrode body 40 and the anode electrode 60 are electrically conductive.
도 1에서는 게이트 전극체(40)와 애노드 전극(60) 간의 거리가 제4 전극체(44)와 애노드 전극(60) 간의 거리로 도시되어 있지만, 본 발명의 실시 예에 따른 원통형 3극 전계방출 X-선관이 제4 전극체(44)를 채용하지 않는 경우이면 제3 전극체(43)과 애노드 전극(60) 간의 거리가 된다.In FIG. 1, although the distance between the gate electrode body 40 and the anode electrode 60 is shown as the distance between the fourth electrode body 44 and the anode electrode 60, the cylindrical tripolar field emission according to the embodiment of the present invention. When the X-ray tube does not employ the fourth electrode body 44, the distance between the third electrode body 43 and the anode electrode 60 becomes.
도 2는 본 발명의 일실시예에 따른 캐소드 전극체(10)에 대한 도면이다.2 is a view of the cathode electrode body 10 according to an embodiment of the present invention.
도 2의 (a)를 참조하면, 캐소드 전극체(10)는 하부에 원형의 전극 플레이트(11)를 구비하고, 전극 플레이트(11)의 중심부에 원통형 전극체(12)를 위치하여 결합시키며, 원통형 전극체(12) 상부에 에미터 전극(20)이 접합되도록 한다. Referring to FIG. 2A, the cathode electrode body 10 includes a circular electrode plate 11 at a lower portion thereof, and a cylindrical electrode body 12 is positioned and coupled to a central portion of the electrode plate 11. The emitter electrode 20 is bonded to the cylindrical electrode body 12.
캐소드 전극체(10)의 전극 플레이트(11)는 한 개의 전극 플레이트로 구성할 수 있고, 도 2의 (b)에 도시된 바와 같이 2개의 전극 플레이트(11-1,11-2)를 적층하여 구성할 수도 있다. 본 발명의 일 실시 예에서는 후공정상에서 접합되는 하부 케이스(30)와의 조립을 용이하게 하도록 2개의 전극 플레이트(11-1,11-2)로 구성하는 것이 바람직하다.The electrode plate 11 of the cathode electrode body 10 may be composed of one electrode plate, and as shown in FIG. 2B, two electrode plates 11-1 and 11-2 may be stacked. It can also be configured. In one embodiment of the present invention, it is preferable to configure the two electrode plates (11-1, 11-2) to facilitate the assembly with the lower case 30 to be bonded in a later step.
도 3은 본 발명의 일 실시 예에 따른 3극 전계방출 X-선관의 결합되기 이전의 구성도를 정렬시켜 도시한 것이다. 도 3을 참조하여 본 발명의 일 실시 예에 따른 원통형 3극 전계방출소자 X선관을 설명하면, 캐소드 전극체(10), 에미터(20), 하부 케이스(30), 게이트 전극체(40), 상부 케이스(50), 애노드 전극(60) 및 금속물질(70)을 구비한다. Figure 3 shows the arrangement of the configuration before the combination of the three-pole field emission X-ray tube according to an embodiment of the present invention. Referring to FIG. 3, a cylindrical tripolar field emission device X-ray tube according to an exemplary embodiment will be described. The cathode electrode body 10, the emitter 20, the lower case 30, and the gate electrode body 40 may be described. And an upper case 50, an anode electrode 60, and a metal material 70.
하부 케이스(30)는 캐소드 전극체(10)의 전극 플레이트(11 또는 11-1)와 게이트 전극체(40)의 제1 전극체(42)에 각각 상하로 접합되며, 상부 케이스(50)는 게이트 전극체(40)의 제1 전극체(41)와 애노드 전극(60)에 각각 상하로 접합하도록 구성한다. The lower case 30 is vertically bonded to the electrode plate 11 or 11-1 of the cathode electrode body 10 and the first electrode body 42 of the gate electrode body 40, respectively, and the upper case 50 is The first electrode body 41 and the anode electrode 60 of the gate electrode body 40 are configured to be joined up and down, respectively.
제 4 전극체(44)는 제 3 전극체(43) 상부에 위치하며, 에미터(20)에서 발생된 전자의 확산을 방지하고 전자가 금속물질(70)에 집속될 수 있는 기능을 수행한다. 한편 제 4 전극체(44)는 제 3 전극체(43)와 같은 내/외경을 갖도록 형성되며, 다른 내/외경을 갖도록 형성하여도 문제가 되지는 않는다.The fourth electrode body 44 is positioned above the third electrode body 43, and serves to prevent diffusion of electrons generated from the emitter 20 and to concentrate the electrons on the metal material 70. . On the other hand, the fourth electrode body 44 is formed to have the same inner / outer diameter as the third electrode body 43, and it is not a problem even if it is formed to have a different inner / outer diameter.
한편, 제2 전극체(42)의 외주면 일측에 게터부(80)가 추가로 구비될 수 있으며, 게터부(80)를 통해 내부에 남아있는 기체와 반응하여 내부 진공도를 높일 수 있다. 예를 들어 게터부(80)에 열을 가하거나, 레이저, 고주파를 인가하는 방법으로 게터부(80)에 에너지를 가하여 게터를 활성화시킬 수 있다. 또한, 게터를 활성화하여 용기 내부에 남아있는 잔류가스를 흡착시켜 내부의 진공도를 유지시킬 수 있다.Meanwhile, the getter part 80 may be further provided on one side of the outer circumferential surface of the second electrode body 42, and the inner vacuum degree may be increased by reacting with the gas remaining inside through the getter part 80. For example, the getter may be activated by applying heat to the getter unit 80 or by applying energy to the getter unit 80 by applying a laser or a high frequency wave. In addition, the getter may be activated to adsorb residual gas remaining in the container to maintain the vacuum degree therein.
상기와 같이 구성된 본 발명의 일 실시 예에 따른 X선관은 소형에 적합하고, 제조상 매우 용이하게 조립될 수 있으며 또한 손쉽게 교체가 가능한 잇점을 갖추고 있다.X-ray tube according to an embodiment of the present invention configured as described above is suitable for small size, can be easily assembled in manufacturing and has the advantage that can be easily replaced.
앞서 설명한 본 발명의 상세한 설명에서는 본 발명의 바람직한 실시 예들만을 설명하였지만, 해당 기술분야의 숙련된 당업자 또는 해당 기술분야에 통상의 지식을 갖는 자라면 후술될 특허청구범위에 기재된 본 발명의 사상 및 기술영역으로부터 벗어나지 않는 범위 내에서 본 발명을 다양하게 수정 및 변경시킬 수 있을 것이다. 따라서, 전술한 설명 및 아래의 도면은 본 발명의 기술사상을 한정하는 것이 아닌 본 발명을 예시하는 것으로 해석되어야 한다.In the foregoing detailed description of the present invention, only preferred embodiments of the present invention have been described, but those skilled in the art or those skilled in the art will have the spirit and scope of the present invention as set forth in the claims below. Various modifications and variations of the present invention will be possible without departing from the scope of the art. Therefore, the above description and the drawings below should be construed as illustrating the present invention, not limiting the technical spirit of the present invention.

Claims (9)

  1. 캐소드 전극체,Cathode electrode body,
    상기 캐소드 전극체 상에 위치하며 전자를 방출하는 에미터,An emitter positioned on the cathode electrode body to emit electrons,
    상기 캐소드 전극체에 대향하여 배치된 애노드 전극,An anode disposed to face the cathode electrode body;
    상기 애노드 전극의 중심영역에 도포되어 있으며 상기 에미터에서 방출된 전자에 대응하여 X-선을 발생시키는 금속물질,A metal material coated on a center region of the anode electrode and generating X-rays in response to electrons emitted from the emitter,
    상기 에미터로부터 방출되는 전자량을 제어하기 위하여 상기 캐소드 전극체와 상기 애노드 전극 사이에 위치하며 상기 애노드 전극과 설정거리를 두고 배치된 게이트 전극체,A gate electrode body disposed between the cathode electrode body and the anode electrode to be disposed at a set distance from the anode electrode to control the amount of electrons emitted from the emitter;
    상기 애노드 전극과 상기 캐소드 전극체에 각각 접합되어 내부를 밀폐시키는 원통형 절연 케이스를 포함하는 원통형 3극 전계방출 X-선관.And a cylindrical insulated case bonded to the anode electrode and the cathode electrode body to seal the interior thereof.
  2. 제 1 항에 있어서,The method of claim 1,
    상기 캐소드 전극체는 하부에 원형의 전극 플레이트를 구비하고, 상기 전극 플레이트의 중심부에 형성된 원통형 전극체를 포함하며,The cathode electrode body has a circular electrode plate at the bottom, and includes a cylindrical electrode body formed in the center of the electrode plate,
    상기 에미터는 상기 원통형 전극체의 상부에 설치되는 원통형 3극 전계방출 X-선관.The emitter is a cylindrical tripolar field emission X-ray tube installed on the upper portion of the cylindrical electrode body.
  3. 제 2 항에 있어서,The method of claim 2,
    상기 게이트 전극체는 The gate electrode body is
    상기 전극 플레이트 상에 설치되는 제1 전극체,A first electrode body provided on the electrode plate,
    상기 제1 전극체 상부에 위치하여 상기 에미터에서 방출되는 전자를 상부로만 방출되도록 상부가 오픈되어 있고 측부가 상기 에미터를 감싸도록 한 구성된 제2 전극체, 그리고A second electrode body positioned above the first electrode body and configured to have an upper portion open to emit electrons emitted from the emitter only to the upper side, and a side part to surround the emitter; and
    상기 제2 전극체 상부에 위치하며, 게이트(gate) 역할을 수행하는 제3 전극체를 포함하는 원통형 3극 전계방출 X-선관.The cylindrical tripolar field emission X-ray tube which is positioned above the second electrode body and includes a third electrode body serving as a gate.
  4. 제 3 항에 있어서,The method of claim 3, wherein
    상기 게이트 전극체는 상기 제3 전극체 상에 설치되어 상기 에미터에서 방출되는 전자를 상기 금속물질에 집속시키는 포커싱 전극체를 더 포함하는 원통형 3극 전계방출 X-선관.And the gate electrode body further comprises a focusing electrode body disposed on the third electrode body to focus electrons emitted from the emitter onto the metal material.
  5. 제 3 항에 있어서,The method of claim 3, wherein
    상기 원통형 절연 케이스는 상부 케이스 및 하부 케이스의 2단으로 구성되며,The cylindrical insulating case is composed of two stages of the upper case and the lower case,
    상기 상부 케이스는 상기 제1 전극체와 상기 애노드 전극에 접합되며 상기 캐소드 전극체의 일부와 상기 게이트 전극체의 측부를 감싸도록 구성되고,The upper case is bonded to the first electrode body and the anode electrode and configured to surround a portion of the cathode electrode body and the side of the gate electrode body,
    상기 하부 케이스는 상기 원형의 전극 플레이트와 상기 제1 전극체에 접합되며 상기 캐소드 전극체의 일부를 감싸도록 구성된The lower case is joined to the circular electrode plate and the first electrode body and configured to surround a portion of the cathode electrode body.
    원통형 3극 전계방출 X-선관.Cylindrical 3-pole field emission X-ray tube.
  6. 제 4 항에 있어서,The method of claim 4, wherein
    상기 원통형 절연 케이스는 상부 케이스 및 하부 케이스의 2단으로 구성되며,The cylindrical insulating case is composed of two stages of the upper case and the lower case,
    상기 상부 케이스는 상기 제1 전극체와 상기 애노드 전극에 접합되며 상기 캐소드 전극체의 일부와 상기 게이트 전극체의 측부를 감싸도록 구성되고,The upper case is bonded to the first electrode body and the anode electrode and configured to surround a portion of the cathode electrode body and the side of the gate electrode body,
    상기 하부 케이스는 상기 원형의 전극 플레이트와 상기 제1 전극체에 접합되며 상기 캐소드 전극체의 일부를 감싸도록 구성된The lower case is joined to the circular electrode plate and the first electrode body and configured to surround a portion of the cathode electrode body.
    원통형 3극 전계방출 X-선관.Cylindrical 3-pole field emission X-ray tube.
  7. 제 2 항에 있어서,The method of claim 2,
    상기 원형의 전극 플레이트는 2개의 전극 플레이트를 적층시켜 구성된 원통형 3극 전계방출 X-선관.The circular electrode plate is a cylindrical tripolar field emission X-ray tube formed by stacking two electrode plates.
  8. 제 1 항에 있어서,The method of claim 1,
    상기 제2 전극체의 외주면에 형성된 게터부를 더 포함하는 것을 특징으로 하는 원통형 3극 전계방출 X-선관.And a getter portion formed on an outer circumferential surface of the second electrode body.
  9. 제 1 항에 있어서,The method of claim 1,
    상기 게이트 전극체는 상기 애노드 전극에 대해 설정된 거리만큼 이격되어 설치된 원통형 3극 전계방출 X-선관.The gate electrode body is a cylindrical three-pole field emission X-ray tube spaced apart from the set distance to the anode electrode.
PCT/KR2014/011469 2014-01-13 2014-11-27 Cylindrical three-electrode field emission x-ray tube WO2015105275A1 (en)

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