WO2016051592A1 - 位置検出装置 - Google Patents
位置検出装置 Download PDFInfo
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- WO2016051592A1 WO2016051592A1 PCT/JP2014/076563 JP2014076563W WO2016051592A1 WO 2016051592 A1 WO2016051592 A1 WO 2016051592A1 JP 2014076563 W JP2014076563 W JP 2014076563W WO 2016051592 A1 WO2016051592 A1 WO 2016051592A1
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- coil
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- position detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D1/00—Measuring arrangements giving results other than momentary value of variable, of general application
Definitions
- the present invention relates to a position detection device that detects a linear position (axial position) of a measurement object and outputs a position signal to the outside.
- Patent Document 1 discloses a sensor configured as follows. A plurality of voltage taps 7 are arranged so as to equally divide the voltage in the middle portion of the measuring coil 1 to which the AC power supply is applied to both ends, and the voltage at each voltage tap 7 is added by the addition amplifier 10 and output. A ring 6 made of a material capable of changing the magnetic resistance (impedance) of the coil 1 is arranged on the outer periphery of the measurement coil 1 so as to be movable in the central axis direction of the measurement coil 1.
- the impedance of the measurement coil 1 in the portion where the ring 6 is located changes, the voltage of the voltage tap 7 changes. Since the overall weighting amount changes according to the position of the ring 6 in the measurement coil 1, the output voltage of the summing amplifier 10 which is the final output changes, so that the position of the ring 6 can be detected.
- Patent Document 2 discloses a position detection device configured as follows.
- the magnetic response member 11 made of a rod-like magnetic body linearly displaces the hollow portion of the cylindrical coil portion 10 made up of six coil sections in accordance with the displacement of the detection target.
- a range of length 4K corresponding to the four coil sections LA, LB, LC, and LD of the coil unit 10 is an effective detection range.
- the coils in each coil section are excited by a common AC signal sin ⁇ t and detect voltages V ⁇ , VA, VB, VC, VD, and V ⁇ across the coil sections.
- the detected voltages are input to the analog arithmetic circuits 20 and 21 in a predetermined combination, they are added or subtracted according to a predetermined arithmetic expression, and two alternating currents showing sine and cosine function characteristics according to the detection target position. Output signals sin ⁇ sin ⁇ t and cos ⁇ sin ⁇ t are generated.
- phase angle ⁇ of the sine and cosine function which is the amplitude component of each AC output signal, corresponds to the position to be detected, and the phase angle ⁇ in the range of 90 degrees corresponds to the length K of one coil. . Since the effective detection range of 4K length corresponds to the range of 0 to 360 degrees of the phase angle ⁇ , the absolute position of the detection target can be detected within the range of 4K by detecting the phase angle ⁇ .
- Patent Document 1 since the gain of the entire sensor is determined due to the influence of uncertain factors such as the characteristics of the ring 6, it is necessary to individually adjust the gain of the sensor. That is, there is a problem that it is difficult to obtain the absolute position accuracy of the ring 6 on the measurement principle. Further, since the detection value related to the entire position detection range is constant, the resolution decreases as the detection range is lengthened. Furthermore, the temperature characteristics also deteriorate in proportion to increasing the detection range.
- the magnetic response member 11 is required to be a uniform object at least for a length of 4K or more in the detection target range. Further, since the phase angle ⁇ changes from 0 degrees to 360 degrees corresponding to the length 4K, the absolute position detection range is limited to the substantial length 4K. In order to detect the absolute position for a range exceeding 4K in length, an auxiliary configuration for combining the basic configurations and processing the position signals output from them is required.
- the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a position detection device that has fewer restrictions on the shape of the measurement body and can easily detect the absolute position over a longer range. It is to provide.
- the position detection device of the present invention is arranged such that the longitudinal direction is aligned on a concentric axis, each of which has three or more sensor coils that are excited by an AC signal having the same frequency, A plurality of differential signal output means for outputting differential signals at both ends of each sensor coil; A plurality of subtraction signal output means for subtracting differential signals corresponding to the two sensor coils and outputting a subtraction signal;
- the axial position of the measuring body when the measuring body, which is located on the outer peripheral side or the inner peripheral side of the sensor coil portion and moves along the concentric axial direction, is made of a material that changes the impedance of the sensor coil,
- Coil specifying means for specifying a sensor coil corresponding to the current position of the measurement object based on the result of calculating a plurality of differential signals,
- the position detecting means synthesizes and outputs position signals based on the sensor coil specified by the coil specifying means
- the position detection unit is positioned so that the change of the plurality of subtraction signals continues according to the arrangement order of the plurality of sensor coils based on the sensor coil specified by the coil specification unit. Since the signals are synthesized and output, the absolute position of the measurement object can be continuously output according to the number of sensor coils arranged. Moreover, since the length of the measurement body should just be more than the axial direction length of at least 1 sensor coil, the restrictions regarding the shape of a measurement body become fewer.
- FIG. 10 is a functional block diagram illustrating a configuration of a coil sensor unit and an arithmetic circuit according to a fifth embodiment. It is a vertical side view of a coil sensor part. It is a functional block diagram which is 6th Embodiment and shows the whole structure of a position detection apparatus. It is an operation
- 3 is a coil (sensor coil), 9 is a detection circuit, 12 is a sensor coil section, 13 is a measuring body, 16 is a differential amplifier circuit (differential signal output means), 17 is an arithmetic circuit (subtraction signal output means), 19 Is a controller (position detecting means, coil specifying means), and 28 is a position detecting device.
- FIG. 4 is a longitudinal side view illustrating a configuration example of the sensor unit.
- a plurality of (for example, six) coils 3A to 3F are arranged on the outer peripheral side of the hollow cylindrical coil holder 1 with an insulating material 2 therebetween so as to be continuous in the axial direction.
- the coil holder 1 and the coil (sensor coil) 3 are inserted into a hollow cylindrical sensor sleeve 4.
- the front end portion (left end side in the figure) of the sensor sleeve 4 is sealed with a front end portion cover 5.
- the rear end of the sensor sleeve 4 is connected to the front end of the sensor case 6.
- the wiring 7 connected to both ends of each coil 3 is led out from the rear end to the inside of the sensor case 6 through the inside of the coil holder 1.
- the wiring 7 may be routed around the outside (surface) of the coil 3.
- a sensor lead cable 8 is connected to the lower part of the sensor case 6, and a wiring 10 drawn from the detection circuit 9 shown in FIG. 1 is routed inside the sensor lead cable 8.
- the wires 7 and 10 are connected by soldering in the sensor case 6, and the rear end portion of the sensor case 6 is covered with the rear end cover 11. The above constitutes the sensor unit 12.
- the measuring body 13 has a ring shape and is arranged so that the outer peripheral side of the sensor sleeve 4 is linearly displaced in the axial direction. Since the measuring body 13 is only required to be a member (material) that changes the impedance (inductance) of each coil 3, it may be either a magnetic material or a non-magnetic material. If a magnetic material is used for the measuring body 13, the impedance of the coil 3 increases when the measuring body 13 approaches, and if a non-magnetic material is used, the impedance decreases conversely. Further, the axial length of the measuring body 13 may be equal to the axial length (one section) of at least one coil 3. Thus, the measurement body 13 may be very simple, for example, a pipe made of a non-magnetic material, has a feature of extremely low cost, and excellent strength and environmental resistance.
- FIG. 1 is a functional block diagram mainly showing the configuration of the detection circuit 9.
- the coils 3A to 3F are connected in series, and one end of the coil 3A, which is the upper end of the series circuit, is oscillated and output from the oscillator 14 provided in the detection circuit 9, and an AC signal is applied via the excitation unit 15. .
- the detection circuit 9 includes six differential amplifier circuits 16A to 16F (differential signal output means) each corresponding to the coils 3A to 3F.
- the input terminals of the differential amplifier circuits 16A to 16F correspond to each other. Are connected to both ends of the coils 3A to 3F.
- the differential amplifier circuits 16A to 16F output the voltages across the corresponding coils 3A to 3F as Va to Vf.
- five arithmetic circuits 17 (1) to 17 (5) are arranged, and voltages Va and Vb are applied to the input terminals X and Y of the arithmetic circuit 17 (1). Have been entered.
- voltages Vb and Vc, voltages Vc and Vd, voltages Vd and Ve, and voltages Ve and Vf are input to the input terminals X and Y of the arithmetic circuits 17 (2) to 17 (5), respectively.
- a gain may be applied to the differential amplifier circuits 16A to 16F and the arithmetic circuits 17 (1) to 17 (5), and a signal input to the A / D converter 18 at the next stage by applying the gain.
- the S / N ratio can be improved by increasing the level.
- FIG. 2 shows an internal configuration example of the arithmetic circuit 17.
- the input terminal X is connected to the input terminal A of the arithmetic unit 17c via the rectifier 17Xa and the low-pass filter (LPF) 17Xb.
- the input terminal Y is connected to the input terminal B of the computing unit 17c through the rectifier 17Ya and the LPF 17Yb. That is, the input signal is input to the computing unit 17c after the AC signal is rectified in the rectifying unit 17a and smoothed by the LPF 17b.
- the arithmetic unit 17c outputs the subtraction result (AB) of the signals given to the input terminals A and B.
- the computing unit 17c is arranged at the first stage, followed by the rectifying unit 17a and the LPF 17b.
- the computing unit 17c in FIG. 2A is replaced with a computing unit 17d.
- the arithmetic unit 17d outputs a result obtained by dividing the subtraction result (A ⁇ B) by the addition value (A + B), which is a so-called ratio that eliminates the effect of reference voltage fluctuation in the A / D converter 18 in the next stage.
- the configuration corresponds to the metric operation.
- the arithmetic circuits 17 (3) to 17 (5) output signals Vcd, Vde, and Vef as calculation results, respectively.
- These calculation results are input to the controller 19 (position detecting means, coil specifying means) via the A / D converters 18 (1) to 18 (5), respectively.
- the controller 19 switches and inputs signals Vab to Vef and the like in a time division manner. You may do it.
- the controller 19 is composed of a CPU, microcomputer, gate array, FPGA (Field Programmable Gate Array), etc., and reads the signals Vab to Vef via the A / D converter 18 to obtain the position of the measuring body 13.
- a non-volatile memory 21 such as a flash ROM is connected to the controller 19, and the controller 19 is based on the information stored in advance in the non-volatile memory 21. Gain component), linearity correction, temperature drift characteristic correction, and the like.
- the controller 19 outputs the obtained position of the measuring body 13 to the upper unit 23 via the external interface (I / F) 22.
- the external I / F 22 can be connected to a network system by providing a network I / F function in addition to outputting position data in parallel.
- an external device 25 is connected to the controller 19 via a contact output unit 24.
- the controller 19 can implement a limit switch function by outputting an ON / OFF signal (contact opening / closing signal) to the external device 25 via the contact output unit 24.
- the limit switch function is a function for turning on / off the contact of the contact output unit 24 with a predetermined position of the measuring body 13 as a threshold value.
- the limit switch function When the position detection device (sensor) is viewed as one device, the limit switch function is equivalent to hardware operation (operates as long as it is not damaged once set). Even if data transmission / reception with the upper unit 23 or the upper unit 23 becomes abnormal due to some trouble, the limit switch function operates as prescribed as a single position detection device. Therefore, it becomes an element that improves the safety of the system, such as operating as a safety device. Since the position detection device of the present embodiment is an absolute type, the position data has high reliability and is easily adapted to the requirement of high reliability required for the limit switch function.
- the limit switch function can be turned ON / OFF corresponding to a plurality of positions within the detection range.
- the threshold value may be designated at an arbitrary position by an input signal from the external I / F 22, or may be switched by a setting switch 26 or the like.
- a speed limit detection function for outputting an ON / OFF signal according to a comparison result between a change in position per predetermined time and a predetermined threshold value may be added to the above limit switch function.
- the speed limit detection function is a function for turning the output signal ON or OFF when the moving speed of the measuring body 13 is equal to or higher than a predetermined threshold value that is a reference (a guideline for the limit), and various settings are performed by the external device 25. Can do.
- the detection circuit 9 receives power supply from the external power supply 27, generates an internal power supply 28 having a voltage of about 5 V, for example, by a power supply circuit (not shown), and operates by supplying the internal power supply 28 to each unit.
- the sensor unit 12 and the detection circuit 9 constitute a position detection device 29.
- the operation of this embodiment will be described with reference to FIG. If the impedance (inductance) of one coil 3 increases when the measuring body 13 moves along the sensor sleeve 4, the impedance decreases in another coil 3.
- the detection circuit 9 performs differential signal processing on the signals of the two coils 3 in the same manner as the half-bridge type differential transformer.
- FIG. 5 shows signal changes in the respective parts when the measuring body 13 is displaced.
- the material of the measurement body 13 is a non-magnetic conductor.
- the length of the measurement body 13 is equal to one section of the coil 3.
- the coil 3A is located at the left end in the figure, and subsequently the coils 3B to 3D are sequentially arranged in the right direction in the figure. There is no upper limit as long as the number of coils 3 is three or more.
- the coils 3A to 3D are all the same.
- Each signal Va to Vc is a plot of the signal level when the central portion of the measurement body 13 is located, and changes so as to be proportional to the impedance of the coil 3. In a state where the measurement body 13 does not overlap any of the coils 3, each of the signals Va to Vc shows a maximum value (Vmax in FIG. 5).
- the level of the signal Va gradually decreases.
- the level of the signal Va becomes the lowest value (Vmin in the figure). From there, when the measuring body 13 further moves in the POS direction, the level of the signal Va starts to rise again, and when there is no overlap between the coil 3A and the measuring body 13, the signal Va returns to the maximum value.
- the range in which the signal Va changes depending on the position of the measurement body 13 is only the range that overlaps with the coil 3A.
- the length of the range corresponds to two sections of the coil 3.
- the levels of the signals Vb and Vc change as the measurement body 13 passes.
- This section is a range in which the center of the measurement body 13 is located between the center of the coil 3A and the center of the coil 3B.
- the level of the signal Va gradually increases (monotonically increases) and the level of the signal Vb gradually decreases (monotonically decreases) within this range.
- the calculated value “Va ⁇ Vb” in this range is a signal that increases with a constant slope. If the coils 3A and 3B have the same characteristics, the calculated value “Va ⁇ Vb” becomes zero at the center point of the first measurement interval.
- This operation principle is the operation principle of the differential transformer constituted by the coils 3A and 3B and the measurement body 13.
- the sensor operates as a sensor for detecting the position of the measurement body 13 in the POS direction in the first measurement section, and the calculated value “Va ⁇ Vb” indicates the position of the measurement body 13 in the first measurement section. Will show. Further, the fact that the operating principle is the same as that of the differential transformer means that the position detection device 29 has the same merit that the differential transformer has.
- the calculated value “Vb ⁇ Vc” is the “measurement interval by coils C and D” (hereinafter referred to as the third measurement interval).
- the calculated value “Vc ⁇ Vd” changes as the measuring body 13 moves in the POS direction. And since each said measurement area generate
- the calculated value “Va ⁇ Vb” is output as data indicating the position of the most terminal section (the measurement body 13 in the figure is the left end). Further, when the measurement object 13 is in the second measurement section, the calculated value “Vb ⁇ Vc” is added to the position data with the position data corresponding to the length of one section as “offset”.
- N N times the position data corresponding to the length of one section is used as the “offset” in the position data. to add.
- This state is shown in “Waveform synthesis” in FIG.
- position data that changes linearly (changes continuously) over a plurality of measurement sections can be read.
- the number of coils 3 is “4”
- the number of sections whose positions can be measured is “3”.
- the sensor unit 12 is composed of N coils 3, the section “N ⁇ 1” is the measurement range. Note that the process of adding an offset to the position data as described above can be easily realized if the controller 19 digitally processes the data.
- the measurement section current measurement section
- the calculated values “Va + Vb” to “Vd + Ve”... May be compared with each other, and the minimum value Vmin_ab and the like are indicated.
- the section becomes the current measurement section.
- none of the measurement sections shows the minimum value, it indicates that the measurement body 13 is out of the measurable range, so that it is easy to detect an abnormal position of the measurement body 13 (dropping of the measurement body 13). it can.
- a signal CHK_AB corresponding to the added value “Va + Vb” for determining the endmost (leftmost) section, that is, the first measurement section is obtained by the following equation.
- the waveform of the signal CHK_AB shown in FIG. 6 is compared with the calculated value “Va + Vb” shown in FIG. 5, the features that maintain the minimum value Vmin_ab ′ and the like in the first measurement interval match, and the current measurement interval is discriminated. It can be seen that it can be used.
- a signal CHK_BC corresponding to the addition value “Vb + Vc” for discriminating the second measurement section adjacent to the endmost (leftmost) section is obtained by the calculation of the following equation.
- CHK_CD, CHK_DE (not shown), etc. may be processed in the same manner as the signal CHK_BC.
- the calculation is different only for the signal CHK_AB, but other operations are obtained by the same calculation as the signal CHK_BC.
- the determination of the measurement segment at the right end may be performed using a signal obtained by performing the same calculation as the CHK_AB signal. Therefore, even in a configuration in which only a differential signal is input as data, a signal for determining a measurement interval can be internally generated by calculation of the controller 19.
- the method shown in FIG. 7 may be used to obtain a signal for determining the measurement interval.
- the position detection accuracy and resolution of the position detection device 29 of the present embodiment can be considered as follows. First, the accuracy (linearity) within one section is as high as a differential transformer. Further, the detection accuracy over the section of the plurality of coils 3 is determined by the position accuracy of the coils 3 arranged in the axial direction.
- the coil 3 itself is wound in a simple and easy to obtain shape accuracy, and the coil holding material 1 is also cylindrical. It is easy to improve the positional accuracy of the coil 3 by using a servo motor or a ball screw having excellent positional accuracy by making use of the characteristics of these members. Therefore, the sensor unit 12 can be manufactured so as to obtain high accuracy in detection accuracy (including absolute position accuracy) over a plurality of coil sections.
- the resolution it is easy to handle the division number (resolution) of one section of the coil 3 to be constant, and when the number of sections of the coil 3 is increased in order to widen the detection range, it does not depend on the number of sections.
- the resolution (distance per 1 bit of data) remains constant.
- the operation principle described so far is an application of a half-bridge type differential transformer (DVRT), and has characteristics associated with the operation principle of DVRT.
- the position detection device 29 when the DVRT primary coil and the secondary coil are separated from each other as a differential transformer (LVDT), the position detection device 29 also has a primary coil over the entire area of the N coils 3. If an (excitation coil) is separately provided and the N coils 3 are secondary coils, the sensor can be handled as a sensor having the above-described sensor characteristics (see the fifth embodiment).
- ⁇ Coil 3> As a material of the coil 3, a magnet wire whose surface is insulated can be used. Since one coil 3 is wound in several layers (or even one layer is acceptable) and arranged at a pitch for each section, the length of one coil 3 is one section or less. Further, the insulation can be enhanced by winding an insulator (insulating paper) around the outer periphery of the coil 3. Further, the connection wiring 10 to the detection circuit 9 may be routed to the outer peripheral side of the coil 3.
- the coil holding material 1 fixes the self shape of the coil 3 and fixes the relative positions of the plurality of coils 3, and may be an electrical conductor, but functions as a short coil and thus has an effect of reducing the impedance of the coil 3. . Therefore, when using a conductor, it is better to use stainless steel or nickel alloy (Hastelloy, Inconel ... registered trademark) with high electrical resistance. Also, the thinner the better.
- the coil holding material 1 may be an insulator such as resin.
- a magnetic material may be used for the coil holding material 1.
- the impedance of the coil 3 can be increased, and the sensitivity can be further increased (signal change is increased).
- a magnetic material can be disposed on the inner periphery of the nonmagnetic coil support 1. Since the coil material (magnet wire) itself is insulated, the insulator 2 between the coil 3 and the coil holding material 1 is not necessarily required, but when the dielectric strength between the coil 3 and the case 6 is improved. I need it. Moreover, if a molded coil etc. are used for the coil 3 and the coils 3 are adhere
- the sensor sleeve 4 is not essential for the position detection operation. This is necessary for mechanical protection of the coil part and for realizing a sealed structure. As shown in FIG. 4, when the measuring body 13 is positioned on the outer peripheral side, the sensor sleeve 4 needs to be made of a nonmagnetic material. Since the sensor sleeve 4 itself also functions as a short coil, the use of one having a low electrical conductivity is not desirable because the impedance of the coil 3 is lowered and the signal change is reduced. Accordingly, a material having high electrical conductivity is appropriate. For example, austenitic stainless steel, nickel alloy (Hastelloy, Inconel, etc.) can be used.
- the thickness is thin. However, it is necessary to consider the balance with mechanical strength. Particularly when the sensor coil unit 12 is built in a cylinder (see the eleventh embodiment), the hydraulic pressure is required. A thickness that does not break is necessary.
- the sensor sleeve 4 can be made of a resin material, for example, a glass epoxy reinforced or carbon fiber reinforced pipe, which is advantageous in terms of weight reduction and cost reduction. is there.
- the sensor case 6, the front end cover 5, and the rear end cover 11 are members for fixing the relative positions of the coil holding material 1, the sensor sleeve 4, etc., or for realizing a sealed structure. Any of materials, conductors, and insulators may be used.
- the sensor lead cable 8 is used to lead the wiring 7 of the coil 3 to the outside of the sensor coil unit 12 and connect it to the detection circuit 9.
- the end of the drawer cable 8 may be connected to a connector.
- O-ring Packing
- These are made of an insulator and do not affect the position detection operation, so that they can be arbitrarily attached at a necessary place. Further, bonding between the members can be performed by methods such as adhesion, press-fitting, welding, and screw fixing.
- the sensor coil unit 12 is configured by arranging a plurality of coils 3 each excited by an AC signal having the same frequency so that the longitudinal direction is aligned on a concentric axis.
- the plurality of differential amplifier circuits 16 output differential signals at both ends of each coil 3, and the arithmetic unit 17 subtracts the differential signals corresponding to the two coils 3 and outputs a subtraction signal to the controller 19.
- the controller 19 is located on the outer peripheral side of the sensor coil unit 12 and subtracts the axial position of the measurement body 13 when the measurement body 13 made of a material that changes the impedance of the coil 3 moves along the concentric axis direction. By calculating the signal, it is output as a position signal that changes linearly.
- the controller 19 specifies the coil 3 corresponding to the current position of the measuring body 13 based on the result of calculating a plurality of differential signals. Specifically, a sum signal of two differential signals is obtained by calculating a plurality of subtraction signals, and the coil 3 corresponding to the current position of the measuring body 13 is specified based on the sum signal. Alternatively, the coil 3 is specified based on the result of multiplying a plurality of subtraction signals. Then, based on the identified coil 3, the position signal is synthesized and output so that the change of the plurality of subtraction signals continues in accordance with the arrangement order of the plurality of coils 3.
- the position signal can be output continuously and linearly according to the number of coils 3 arranged, the position detection range of the measuring body 13 can be expanded extremely easily.
- the length in the axial direction of the measuring body 13 only needs to be equal to or larger than the length of at least one coil 3, restrictions on the outer shape of the measuring body 13 are small, and the degree of freedom in design can be improved.
- the gain of the position detection device 29 is not affected by the characteristics of the measurement body 13, and the level of the position signal is proportional to the number of coils 3 arranged, so the detection range is expanded.
- the resolution does not decrease and the temperature characteristics do not deteriorate.
- the detection circuit 9 has an electronic limit switch function for outputting a switch signal for turning on and off the contact output unit 24 at a preset position based on the position signal, the detection circuit 9 is connected to the upper unit 23 and the upper unit 23. Even if the transmission / reception of data falls into an abnormal operation due to some trouble, the position detection device 29 can operate as prescribed as a single unit, and restricts the position of the measurement body 13 via the external device 25, etc. The safety of the system can be improved.
- the limit switch function includes a speed limit detection function that outputs an ON / OFF signal according to a comparison result between a change in position per predetermined time and a predetermined threshold value, the moving speed of the measuring body 13 is too high. By limiting the speed when it becomes, safety can be improved.
- a separate adder may be disposed after the dynamic amplifier circuit 16 to obtain the addition signal.
- FIG. 8 shows the second embodiment.
- the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Hereinafter, different parts will be described.
- a differential amplifier circuit 16G differential signal output means, temperature detection means
- an LPF 32 LPF
- a / D converter 18 (6) are added.
- the inverting input terminal of the differential amplifier circuit 16G is connected to one end (ground) of the coil 3F, and the non-inverting input terminal is connected to one end of the coil 3A (inverted input terminal of the differential amplifier circuit 16A).
- the output signal of the differential amplifier circuit 16G is input to the controller 19A (temperature detection means, not shown) via the LPF 32 and the A / D converter 18 (6).
- the data read by the controller 19A via the A / D converter 18 (6) becomes a DC equivalent voltage applied to both ends of the series circuit of the coils 3A to 3F.
- the controller 19A can measure the temperature of the coil 3.
- the resistance value of a general annealed copper wire used as a magnet wire changes at about ⁇ 0.39% / ° C. depending on the temperature.
- the signal source 33 in the figure corresponds to the oscillation circuit 14 and the excitation circuit 15 of the first embodiment, but by driving the signal source 33 at a constant current, a direct current component can always flow through the coil 3 at a constant value. It is.
- the voltage (DC component) across the series circuit of the coils 3A to 3F is proportional to the DC resistance of the series circuit. Therefore, the controller 19A can reversely calculate the temperature of the coil 3 from the data value read via the A / D converter 18 (6).
- the temperature of the coil 3 can be accurately measured even when, for example, the sensor coil unit 12 and the detection circuit 31 are installed apart from each other.
- the measured temperature may be used to cancel the temperature drift due to the coil 3.
- the controller 19A includes the differential amplifier circuit 16G that outputs the differential signals at both ends of the sensor coil unit 12, and the controller 19A The temperature was detected. Therefore, it is possible to perform processing for preventing the sensor coil unit 12 from being overheated.
- FIG. 9 shows a modification of the drive format of the sensor coil unit 12.
- the signal source 33 (1) is connected to both ends of the series circuit of the coils 3A to 3C using the two signal sources 33 (1) and 33 (2), and the signal source 33 (2) Are connected to both ends of the series circuit of the coils 3D to 3F.
- the operation is possible even if the signal source 33 (1) and the signal source 33 (2) are different in frequency and phase relationship.
- the merit of driving the sensor coil unit 12 with the two signal sources 33 (1) and 33 (2) is that the number of the coils 3 driven by one signal source 33 is reduced, so that more current is supplied to the coil 3. This makes it possible to improve the noise resistance and reduce the influence of an external magnetic field.
- the coil 3 and the signal source 33 can be connected one by one and driven individually.
- the coils 3A to 3C are driven.
- the signal source 33 (1) is connected to the series circuit, it is also possible to drive by connecting one end side of each of the coils 3A to 3C in common (common).
- two measuring bodies 13 (1) and 13 (2) are arranged in the sensor coil unit 12.
- the range in which the measurement body 13 changes the characteristics of the coil 3 is within a finite range from where the measurement body 13 is positioned. Therefore, as long as the two measuring bodies 13 (1) and 13 (2) do not approach the position where they start to influence the impedance change of the coil 3 that is the position detection target, the two measuring bodies 13 (1) , 13 (2) can be detected as independent phenomena. It is possible to increase the number of measurement bodies 13 to three or more. Furthermore, when a plurality of measuring bodies 13 approach each other within the above-described limit range, it is possible to detect a measurement abnormality and issue a warning to the host unit 23.
- the fifth embodiment shown in FIGS. 11 and 12 has a configuration in which a primary coil is provided as described in the first embodiment.
- a primary coil (excitation coil) 42 is disposed opposite to the sensor coil unit 41 using the coils 3A to 3F as secondary coils, and a signal source 33 is connected to both ends of the primary coil 42 to supply an AC signal.
- the primary coil 42 is disposed inside the sensor sleeve 4.
- the position detection device 51 of the sixth embodiment shown in FIG. 13 includes the configuration of the detection circuit 38 of the second embodiment (the detection circuit 9 of the first embodiment may be used).
- data for correcting the linearity of the position detection device 51 is stored in advance in the nonvolatile memory 21 (storage means), and when the position of the measurement body 13 is detected, the controller 19B The linearity of the detection position is corrected using the data.
- acquisition of data used for the correction will be described.
- a linear displacement detection sensor with excellent absolute value accuracy and linearity is prepared.
- the optical linear scale 52 is used.
- the detection head 53 of the linear scale 52 and the measuring body 13 are connected and fixed to a table (not shown) that moves linearly. This moving table can be moved at an arbitrary position from the outside.
- the scale 54 of the optical linear scale 52 is installed so that the sensor output data (position data) can be read as the detection head 53 moves.
- the controller 19B of the position detection device 51 reads the position data via the correction I / F 54.
- the position output of an optical sensor is an A / B phase output.
- the correction I / F 54 can input an accurate absolute position by inputting such a two-phase output.
- the moving base is gradually moved from one end of the sensor coil section 12 toward the other end.
- the controller 19B acquires the deviation between the accurate absolute position obtained by the optical linear scale 52 and the position detected by the sensor coil unit 12 and stores the deviation at a fixed distance of the position.
- the memory 21 For example, when the entire measurement range is output as 16-bit data, the data value indicates 0 to 65535.
- the deviation is stored in increments of 1024 data values, all 64 points of deviation data are recorded in the nonvolatile memory 21 as table values.
- the process of recording the deviation data is performed when the position detection device 51 is manufactured in the factory. For this reason, the correction data recording process is performed by writing a dedicated correction program in the controller 19B or by starting the correction program written in advance by instructing from the outside (such as input by the setting switch 25).
- the position detection device 51 actually detects the position of the measuring body 13 after the recording process is completed, if the position is between, for example, the 64 correction points, a straight line is calculated from the correction points before and after the position. Interpolated correction data is calculated. Then, position data whose linearity is corrected is calculated by subtracting the correction data from the data before correction.
- the nonvolatile memory 21 in which correction data for correcting the linearity of the position signal is stored in advance is provided, and the controller 19B performs the correction when determining the position signal.
- the linearity is corrected using the data. Therefore, position detection accuracy can be improved.
- the seventh embodiment shown in FIG. 14 shows a detection state when the length of the measurement body 13A is doubled for one section of the coil 3.
- the coil 3 as a differential transformer is composed of every other two coils 3, and the differential signals are (Va ⁇ Vc), (Vb ⁇ Vd), and (Vc ⁇ Ve).
- the “measurement section using coils A and C” is first followed by the “measurement section using coils B and D”.
- the measurable section range is “N ⁇ 2” if the number of coils 3 is N.
- the addition signal (Va + Vc) can be obtained by the following calculation.
- the eighth embodiment shown in FIG. 15 has a configuration in which a columnar measurement body 55 is fixed to the tip of a rod-shaped support body 56 having a smaller diameter and displaced inside the coil holding material 1.
- the material of the coil holding material 1 needs to be a non-magnetic material or an insulator such as resin in order to detect a change in signal.
- the material of the support 56 can be any of a magnetic material, a non-magnetic material, a conductor, and an insulator.
- the influence of the support body 56 is more significant than the impedance change of the coil 3 caused by the measurement body 13. If you do not use the one with less, the error will increase.
- the front end cover 5A has a through-hole for introducing the measuring body 55 into the coil holding material 1.
- the sensor case 6A also has a shape having a communication portion 6B communicating with the hollow portion of the coil holding material 1, and the rear end cover 11A also has a shape having a hole having the same diameter as the communication portion 6B at the center. ing.
- the detection circuit 9 is arranged in the internal space of the sensor case 6.
- the wiring 57 led to the outside via the lead-out cable 8 serves as a power line connected to the external power source 27 and a connection line between the upper unit 23 and the external device 25. If comprised in this way, the position detection apparatus 29 can be comprised more compactly.
- the heat-resistant temperature of the position detection device 29 may be limited by the operable temperature range of a semiconductor element or the like mounted on the detection circuit 9.
- the tenth embodiment shown in FIG. 17 shows a case where the coil 3 has a single layer winding.
- the coil 3 may be wound only by continuously winding the wire in one direction and taking out the taps of the coils A to D in the middle. Therefore, workability is extremely good and the manufacturing process can be simplified.
- the tenth embodiment shown in FIG. 18 shows a configuration in which the sensor coil unit 12 is arranged inside a rod 62 that reciprocates inside the cylinder 61.
- a hole is formed in the rod 62 with a diameter that does not contact the sensor sleeve 4, and the measuring body 13 is fixed to the inner wall end of the rod 62.
- the cylinder pressure is applied to the sensor sleeve 4 and the measurement body 13, but the sensor coil portion 12 is applicable because it has a strong structure as described above. Only the metallic ring (measurement body 13) is coupled to the movable rod 62 and has extremely strong resistance to vibration and impact applied to the rod 62. Note that O-rings (packings) necessary for the cylinder 61, oil ports, and the like are not shown.
- the present invention is not limited to the embodiments described above or shown in the drawings, and the following modifications or expansions are possible.
- the coil 3 may be directly wound around the coil support 1 made of an insulator. In FIG. 4, if it is not necessary to wire each coil 3 through the inside of the coil support 1, the coil support 1 need not be hollow (pipe shape).
- An electronic limit switch function and a speed limit detection function may be provided as necessary.
- a thermistor or the like may be used as the temperature detection means.
- the position detection device is useful for the purpose of detecting the linear movement position of the measurement object.
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Abstract
Description
各センサコイルの両端の差動信号を出力する複数の差動信号出力手段と、
2つのセンサコイルに対応する差動信号を減算して、減算信号を出力する複数の減算信号出力手段と、
前記センサコイル部の外周側又は内周側に位置し、前記センサコイルのインピーダンスを変化させる材料からなる測定体が前記同心軸方向に沿って移動した際の前記測定体の軸方向位置を、前記減算信号を演算することで線形に変化する位置信号として出力する位置検出手段とを備えるものにおいて、
複数の差動信号を演算した結果に基づいて、前記測定体の現在位置に対応するセンサコイルを特定するコイル特定手段を備え、
前記位置検出手段は、前記コイル特定手段により特定されるセンサコイルに基づいて、複数の減算信号の変化が、複数のセンサコイルの配列順に応じて連続するように位置信号を合成して出力することを特徴とする。
以下、第1実施形態について図1から図7を参照して説明する。図4は、センサ部の構成例を示す縦断側面図である。中空円筒状のコイル保持体1の外周側には、間に絶縁材2を介して、複数(例えば6個の)のコイル3A~3Fが軸方向に連続するように配置されている。これらのコイル保持体1及びコイル(センサコイル)3等は、中空円筒状のセンサスリーブ4の内部に挿入されている。センサスリーブ4の先端部(図中左端側)は、先端部カバー5により封止されている。
尚、図3に示すように、A/Dコンバータ18を1つだけ用い、その入力側にマルチプレクサ20を配置して、コントローラ19が信号Vab~Vef等を時分割で切り換えて入力するように構成しても良い。
また、検出回路9は外部電源27からの電源供給を受けて、図示しない電源回路により例えば電圧5V程度の内部電源28を生成し、その内部電源28が各部に供給されることで動作する。尚、センサ部12及び検出回路9が位置検出装置29を構成している。
各信号Va~Vcは、測定体13の中心部が位置した時の信号レベルをプロットしたもので、コイル3のインピーダンスに比例するように変化している。測定体13が何れのコイル3にもオーバーラップしていない状態では、各信号Va~Vcは何れも最大値(図5中のVmax)を示している。
CHK_AB=(Va-Vb)-2×(Vb-Vc)
=(Va+Vb)-2×Vc
図6に示す信号CHK_ABの波形と図5の演算値「Va+Vb」とを比較すると、第1測定区間で最低値Vmin_ab’等を維持する特徴が一致しており、現在の測定区間を判別するために使用できることが判る。
CHK_BC=(Vc-Vd)-(Va-Vb)
=(Vb+Vc)-Va-Vd
図6に示す信号CHK_BCの波形と図5の演算値「Vb+Vc」とを比較すると、やはり第2測定区間で最低値Vmin_bc’を維持する特徴が一致している。そして、信号CHK_CD、CHK_DE(図示せず)…についても、信号CHK_BCと同様な処理をすれば良い。
CHK_BC=(Vc-Vd)×(Va-Vb)
得られた信号CHK_BCは、第2測定区間においてのみ負の値をとるので、測定体13が第2測定区間に位置していることを判別できる。
<コイル3>
コイル3の材料としては、表面が絶縁されたマグネットワイヤが使用できる。1つのコイル3は何層か(1層でも可)に巻装され、1区間毎のピッチで配置されるので、1つのコイル3の長さは1区間以下となる。また、コイル3の外周に絶縁体(絶縁紙)を巻きつけて絶縁強化を図ることもできる。また、検出回路9への接続配線10はコイル3の外周側に引き回しても良い。
コイル保持材1は、コイル3の自己形状保持、及び複数のコイル3の相対位置を固定するもので、電気的導体でも良いが、ショートコイルとして機能するのでコイル3のインピーダンスを低下させる効果がある。したがって、導体を使う場合は、電気抵抗が高いステンレス鋼やニッケル合金(ハステロイ、インコネル…登録商標)を用いた方が良い。またその厚みも薄い方が良い。また、コイル保持材1は、樹脂などの絶縁体でも良い。
センサスリーブ4は、位置検出動作には必須なものでは無い。コイル部の機械的な保護や、密閉構造を実現するため等に必要となる。図4に示すように測定体13が外周側に位置する場合、センサスリーブ4は非磁性材の必要がある。センサスリーブ4自体は、やはりショートコイルとして機能するので、電気伝導度の低いものを使うとコイル3のインピータンスが低下して信号変化が小さくなり望ましくない。したがって、電気伝導度の高いものが適切である。例えば、オーステナイト系ステンレスや、ニッケル合金(ハステロイ、インコネル…登録商標)などが使用可能である。
センサケース6、先端部カバー5、後端カバー11は、コイル保持材1、センサスリーブ4等の相対位置の固定をするため、或いは密閉構造を実現するための部材であり、磁性材、非磁性材、導電体、絶縁体何れでも良い。
センサ引出しケーブル8は、コイル3の配線7をセンサコイル部12の外部に引出して、検出回路9に接続するために使用する。引出しケーブル8の末端は、コネクタ接続されていても良い。
気密性等を高めるために、適宜Oリング(パッキン)などが使用可能である。これらは一般的に、その材質は絶縁体であり位置検出動作に影響を与えないから、必要な個所に任意に装着可能である。また、各部材間の接合は、接着・圧入・溶接・ネジ固定などの方法をとることができる。
図8は第2実施形態を示すもので、第1実施形態と同一部分には同一符号を付して説明を省略し、以下異なる部分について説明する。図8に示すように、第2実施形態の検出回路31では、差動増幅回路16G(差動信号出力手段、温度検出手段)、LPF32及びA/Dコンバータ18(6)が追加されている。差動増幅回路16Gの反転入力端子はコイル3Fの一端(グランド)に接続されており、非反転入力端子はコイル3Aの一端(差動増幅回路16Aの反転入力端子)に接続されている。差動増幅回路16Gの出力信号は、LPF32及びA/Dコンバータ18(6)を介してコントローラ19A(温度検出手段,図示せず)に入力されている。
図9に示す第3実施形態は、センサコイル部12の駆動形式の変形例を示す。図9(a)では、2つの信号源33(1)及び33(2)を用いて、信号源33(1)をコイル3A~3Cの直列回路の両端に接続し、信号源33(2)をコイル3D~3Fの直列回路の両端に接続する。この場合、コイル3A~3Cとコイル3D~3Fとを電気的に接続する必要はない。また、信号源33(1)と信号源33(2)との周波数や位相関係が違っていても動作は可能である。このように2つの信号源33(1)及び33(2)でセンサコイル部12を駆動するメリットは、1つの信号源33で駆動するコイル3の数が減るため、コイル3に電流をより多く流すことが可能になり、耐ノイズ性の向上や、外部磁界の影響が低減できる。
図10に示す第4実施形態は、センサコイル部12に2つの測定体13(1)及び13(2)を配置した構成である。位置検出装置29では、前述したように測定体13がコイル3の特性に変化を及ぼす範囲が、測定体13の位置するところから有限の範囲内に収まっている。従って、2つの測定体13(1)、13(2)が、それぞれ位置検出の対象となるコイル3のインピーダンス変化に相互に影響を及ぼし始める位置に近づかない限り、2つの測定体13(1)、13(2)の変位は、それぞれ独立した現象として検知することができる。尚、測定体13を3つ以上に増やすことも可能である。更に、複数の測定体13が、上述した制限範囲内にお互い近づいた場合は測定異常として検出し、上位ユニット23へ警告を発するなども可能である。
図11及び図12に示す第5実施形態は、第1実施形態で述べたように1次コイルを設けた構成である。センサコイル部41に、コイル3A~3Fを2次コイルとして1次コイル(励磁コイル)42を対向配置し、1次コイル42の両端に信号源33を接続して交流信号を供給する。この場合、図4相当図である図12に示すように、1次コイル42は、センサスリーブ4の内部に配置される。センサコイル部41をこのように構成することで、位置検出装置43を、ハーフブリッジ型差動トランスと同様の特徴を備える位置センサとすることができる。
図13に示す第6実施形態の位置検出装置51は、第2実施形態の検出回路38の構成
を備えている(第1実施形態の検出回路9でも良い)。第6実施形態では、不揮発性メモリ21(記憶手段)に位置検出装置51の直線性を補正するためのデータを予め記憶させておき、測定体13の位置を検出した際に、コントローラ19Bが前記データを用いて検出位置の直線性を補正する。以下、その補正に用いるデータの取得について説明する。
図14に示す第7実施形態は、測定体13Aの長さをコイル3の1区間分の2倍としたときの検出状態を示す。この場合、差動トランスとしてのコイル3は、1つおきの2つのコイル3によって構成され、差動信号は(Va-Vc),(Vb-Vd),(Vc-Ve)となる。図中に示すように最初は「コイルA、Cによる測定区間」、続いて「コイルB、Dによる測定区間」になる。このような場合は、測定可能な区間範囲は、コイル3の数がN個であれば、測定範囲数は「N-2」となる。
加算信号/測定区間 3A及び3C 3B及び3D 3C及び3E
Va+Vc L L ×
Vb+Vd L L L
Va+Vc × L L
となっている。例えば、コイル3B及び3Dが測定区間となる場合は、加算信号(Va+Vc),(Vb+Vd),(Va+Vc)が全て最低値(L)を示している。これにより、測定区間の特定が可能である。
(Va-Vc)+2(Vc-Ve)
=Va-Vc+2Vc-2Ve=(Va+Vc)-2Ve
加算信号(Va+Vc)が最低値を示す区間で信号Veはゼロレベルであるから、第2項の影響はない。
図15に示す第8実施形態は、円柱状の測定体55を、それより径小となる棒状の支持体56の先端に固定し、コイル保持材1の内部で変位させるようにした構成である。この場合、コイル保持材1の材質は、信号の変化を検出するため非磁性材か樹脂などの絶縁体の必要がある。また、支持体56の材質は、磁性材、非磁性材、導電体、絶縁体何れも使用可能であるが、磁性材を用いる場合、測定体13によるコイル3のインピーダンス変化よりも、十分に影響が少ないものを使用しないと誤差などが増える。
図16に示す第9実施形態は、センサケース6の内部空間に検出回路9を配置した構成である。この場合、引出ケーブル8を介して外部に導出される配線57は、外部電源27に接続される電源線や、上位ユニット23及び外部機器25との接続線となる。このように構成すれば、位置検出装置29をよりコンパクトに構成できる。但し、位置検出装置29の耐熱温度は、検出回路9に実装されている半導体素子などの動作可能温度範囲で制限される場合がある。
図17に示す第10実施形態は、コイル3を1層巻きとした場合を示す。1層巻きの場合、コイル3を巻く作業は、ワイヤを常に一方向に巻き続け、途中で各コイルA~Dのタップを出すだけで良い。したがって、極めて作業性が良く、製造工程を簡略化することができる。
図18に示す第10実施形態は、センサコイル部12を、シリンダ61の内部を往復移動するロッド62の内部に配置した構成を示す。ロッド62の内部にセンサスリーブ4が接触しない径で穴をあけ、測定体13をロッド62の内壁端部に固定する。センサのスリーブ4や測定体13にはシリンダの圧力がかかるが、センサコイル部12は前述のように強固な構造であるため、適用が可能である。可動するロッド62に結合されるのは金属性のリング(測定体13)のみであり、ロッド62に加わる振動・衝撃に対して極めて強い耐性を持つ。尚、シリンダ61として必要なOリング(パッキン)類やオイルのポート等は図示していない。
コイル3を、絶縁体からなるコイル支持体1に直接巻き付けても良い。
図4において、各コイル3の配線をコイル支持体1の内部を介して行う必要が無ければ、コイル支持体1は中空(パイプ形状)である必要はない。
電子リミットスイッチ機能や、制限速度検出機能は、必要に応じて設ければ良い。
温度検出手段は、サーミスタ等を用いても良い。
Claims (9)
- 長手方向が同心軸上に並ぶように配置され、それぞれが同じ周波数の交流信号によって励磁される3個以上のセンサコイル(3)を有してなるセンサコイル部(12,41)と、
各センサコイル(3)の両端の差動信号を出力する複数の差動信号出力手段(16)と、
2つのセンサコイル(3)に対応する差動信号を減算して、減算信号を出力する複数の減算信号出力手段(17)と、
前記センサコイル部(12,41)の外周側又は内周側に位置し、前記センサコイル(3)のインピーダンスを変化させる材料からなる測定体(13,55)が前記同心軸方向に沿って移動した際の前記測定体(13)の軸方向位置を、前記減算信号を演算することで線形に変化する位置信号として出力する位置検出手段(19,19A,19B)とを備える位置検出装置において、
複数の差動信号を演算した結果に基づいて、前記測定体(13,55)の現在位置に対応するセンサコイル(3)を特定するコイル特定手段(19,19A,19B)を備え、
前記位置検出手段(19,19A,19B)は、前記コイル特定手段(19,19A,19B)により特定されるセンサコイル(3)に基づいて、複数の減算信号の変化が、複数のセンサコイル(3)の配列順に応じて連続するように位置信号を合成して出力することを特徴とする位置検出装置。 - 請求項1記載の位置検出装置において、
前記コイル特定手段(19,19A,19B)は、2つの差動信号の加算信号に基づいて、前記測定体(13,55)の現在位置に対応するセンサコイル(3)を特定する。 - 請求項2記載の位置検出装置において、
前記コイル特定手段(19,19A,19B)は、複数の前記減算信号を演算することで2つの差動信号の加算信号を求める。 - 請求項1記載の位置検出装置において、
前記コイル特定手段(19,19A,19B)は、複数の前記減算信号を乗算した結果に基づいて、前記測定体(13,55)の現在位置に対応するセンサコイル(3)を特定する。 - 請求項1から4の何れか一項に記載の位置検出装置において、
前記センサコイル(3)は、一層巻で構成されている。 - 請求項1から5の何れか一項に位置検出装置において、
前記センサコイル部(12)の両端の差動信号を出力する差動信号出力手段(16G)を有し、前記差動信号に基づいて前記センサコイル部の温度を検出する温度検出手段(19A)を備える。 - 請求項1から6の何れか一項に記載の位置検出装置において、
前記位置検出手段(19B)は、前記位置信号を線形に変化する信号として出力し、
前記位置信号の線形性を補正するための補正データが予め記憶されている記憶手段(21)を備え、
前記位置検出手段(19B)は、前記減算信号を演算して前記位置信号を求める際に、前記補正データを用いて線形性を補正するように構成されている。 - 請求項1から7の何れか一項に記載の位置検出装置において、
前記位置信号に基づいて、予め設定された位置でオン・オフするスイッチ信号を出力する電子リミットスイッチ機能(19,23)を備える。 - 請求項8記載の位置検出装置において、
前記電子リミットスイッチ機能は、設定された所定時間に対する前記位置信号の変化量が、設定された変化量を超えた際にオン・オフするスイッチ信号を出力する制限速度検出機能(19,23)も備える。
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