WO2014084163A1 - Mg-Si系熱電変換材料及びその製造方法、熱電変換用焼結体、熱電変換素子、並びに熱電変換モジュール - Google Patents
Mg-Si系熱電変換材料及びその製造方法、熱電変換用焼結体、熱電変換素子、並びに熱電変換モジュール Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/02—Making non-ferrous alloys by melting
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0408—Light metal alloys
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C23/00—Alloys based on magnesium
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/855—Thermoelectric active materials comprising inorganic compositions comprising compounds containing boron, carbon, oxygen or nitrogen
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- the present invention relates to an Mg—Si based thermoelectric conversion material and a method for producing the same, and a thermoelectric conversion sintered body, a thermoelectric conversion element, and a thermoelectric conversion module using the Mg—Si based thermoelectric conversion material.
- thermoelectric conversion element that performs reversible thermoelectric conversion using the Seebeck effect or the Peltier effect
- a method using a thermoelectric conversion module has been proposed.
- thermoelectric conversion element includes a thermoelectric conversion part obtained by cutting a sintered body obtained by sintering a thermoelectric conversion material into a predetermined size, and a first electrode and a second electrode provided in the thermoelectric conversion part.
- thermoelectric conversion module is obtained by modularizing such a thermoelectric conversion element.
- Bi-Te, Pb-Te, Si-Ge, Fe-Si, and Mg-Si materials are known as thermoelectric conversion materials. Attention has been paid to Mg—Si-based thermoelectric conversion materials (Patent Documents 1 to 3, etc.).
- thermoelectric conversion technology can be applied not only to the waste heat in the above-mentioned waste incineration but also to various heats such as waste heat from various manufacturing factories, exhaust heat of automobiles, geothermal heat, and solar heat.
- the Mg—Si based thermoelectric conversion material is mainly composed of Mg and Si.
- elements other than Mg and Si are also widely used.
- Patent Document 3 reports that inclusion of Sb in addition to Mg and Si improves thermoelectric conversion performance and high-temperature durability.
- the present invention has been proposed in view of such a conventional problem, and is used when a sintered body of a thermoelectric conversion material is manufactured, or a sintered body for a thermoelectric conversion part having a predetermined size from the sintered body.
- the yield is high because cracks are unlikely to occur when cutting out, and in the case of a sintered body with a large size, a high productivity that enables cutting out a large number of sintered bodies for thermoelectric conversion sections from one sintered body
- An object is to provide a manufacturing method.
- the present invention also provides an Mg—Si based thermoelectric conversion material having stable high thermoelectric conversion performance, a thermoelectric conversion sintered body using the Mg—Si based thermoelectric conversion material, a thermoelectric conversion element excellent in durability, and An object is to provide a thermoelectric conversion module.
- the present inventors of the present invention have made extensive studies to solve the above problems. As a result, the present inventors have found that the above problem can be solved by mixing at least Sb and Zn in addition to Mg and Si at the time of melt synthesis of the Mg—Si thermoelectric conversion material, and have completed the present invention. More specifically, the present invention provides the following.
- thermoelectric conversion material represented by [2] A thermoelectric conversion sintered body obtained by sintering the Mg—Si thermoelectric conversion material according to [1]. [3] A thermoelectric conversion element comprising a thermoelectric conversion part made of the sintered body for thermoelectric conversion described in [2] above, and a first electrode and a second electrode provided in the thermoelectric conversion part. [4] A thermoelectric conversion module comprising the thermoelectric conversion element according to [3]. [5] A method for producing an Mg—Si-based thermoelectric conversion material including a step of heating and melting a composition raw material containing Mg, Si, Sb, and Zn.
- the content of Sb and Zn in the composition raw material is 0.1 to 3.0 at% in atomic weight ratio, respectively, and the total content of elements other than Mg and Si is 0.2 to 5 in atomic weight ratio.
- thermoelectric conversion module when a sintered body of a thermoelectric conversion material is manufactured, or when a sintered body for a thermoelectric conversion part of a predetermined size is cut out from the sintered body, cracks are unlikely to occur, so the yield is high.
- a sintered body having a large size it is possible to provide a highly productive manufacturing method capable of cutting out a large number of sintered bodies for thermoelectric conversion sections from one sintered body.
- an Mg—Si based thermoelectric conversion material having stable high thermoelectric conversion performance, a sintered body for thermoelectric conversion using the Mg—Si based thermoelectric conversion material, and a thermoelectric conversion element excellent in durability And a thermoelectric conversion module.
- FIG. 3 is a diagram showing Seebeck coefficients at various temperatures of the sintered bodies obtained in Example 1 and Comparative Examples 1 to 5.
- FIG. 3 is a graph showing the electrical conductivity at various temperatures of the sintered bodies obtained in Example 1 and Comparative Examples 1 to 5.
- FIG. 4 is a diagram showing power factors at various temperatures of the sintered bodies obtained in Example 1 and Comparative Examples 1 to 5.
- FIG. 3 is a graph showing thermal conductivity at various temperatures of the sintered bodies obtained in Example 1 and Comparative Examples 1 to 5.
- FIG. 3 is a diagram showing dimensionless figure of merit at each temperature of the sintered bodies obtained in Example 1 and Comparative Examples 1 to 5. It is a figure which shows the electrical resistivity change at the time of performing a high temperature durability test about the sintered compact obtained in Example 1 and Comparative Examples 2-5.
- FIG. 6 is a diagram showing dimensionless figure of merit at each temperature of the sintered bodies obtained in Examples 2 to 4.
- the method for producing an Mg—Si-based thermoelectric conversion material according to the present invention includes a step of heating and melting a composition raw material containing Mg, Si, Sb, and Zn.
- the composition raw material contains Mg, Si, Sb, and Zn, but besides that, Al, Bi, P, Ga, As, In, Ag, Cu, Au, Ni, Fe, Mn, Co, Ta,
- arbitrary elements One or more elements selected from the group consisting of Nd, Nb, and Pb (hereinafter also referred to as “arbitrary elements”) may be contained.
- these raw materials those having high purity (for example, purity of 99.9% or more) are preferable.
- the mixing ratio of Mg and Si in the composition raw material is 2: 1 by atomic weight ratio.
- the content of Sb and Zn in the composition raw material is preferably 0.1 to 3.0 at%, more preferably 0.1 to 2.0 at%, respectively, in atomic weight ratio. It is more preferably 1.5 at%, particularly preferably 0.5 to 1.0 at%.
- the content of the above-mentioned optional element in the composition raw material is preferably 0 to 3.0 at%, more preferably 0 to 2.0 at%, and 0 to 1.5 at% in terms of atomic weight ratio. Is more preferable, and 0 to 0.5 at% is particularly preferable.
- the total content of elements other than Mg and Si is 0.2 by atomic weight ratio. Is preferably from 5.0 to 5.0 at%, more preferably from 0.2 to 4.0 at%, further preferably from 0.2 to 3.0 at%, and from 0.5 to 2.5 at%. Particularly preferred is 1.0 to 2.0 at%.
- thermoelectric conversion material As a manufacturing method of the Mg—Si based thermoelectric conversion material according to the present invention, a material that does not contain the above optional element in the composition raw material is preferable. In this case, the contents of Sb and Zn are the same as described above. The total content of Sb and Zn is the same as when the content of the above-mentioned arbitrary element is zero.
- Such a composition raw material is heat-treated in a reducing atmosphere and preferably under reduced pressure under a temperature condition not lower than the melting point of Mg and lower than the melting point of Si, and the Mg—Si thermoelectric conversion material according to the present invention is melt-synthesized.
- under reducing atmosphere refers to an atmosphere containing hydrogen gas in an amount of 5% by volume or more and optionally containing an inert gas as another component.
- the pressure condition at the time of heating and melting may be atmospheric pressure, but considering the safety, a reduced pressure condition of, for example, about 1.33 ⁇ 10 ⁇ 3 Pa is preferable.
- the heating temperature at the time of heat melting is 650 ° C. or more and less than 1414 ° C., preferably 1085 ° C. or more and less than 1414 ° C., and the heating time is, for example, 2 to 10 hours.
- the obtained Mg—Si-based thermoelectric conversion material can be made more uniform.
- the temperature raising condition include a temperature raising condition of 150 to 250 ° C./hour until reaching 150 ° C., and a temperature raising condition of 350 to 450 ° C./hour until reaching 1100 ° C. As such, a temperature drop condition of 900 to 1000 ° C./hour can be mentioned.
- the heating and melting is usually performed in a state where the composition raw material is charged into a melting crucible and sealed with a lid. It is preferable to polish the contact surface between the melting crucible and the lid to enhance the adhesion so that Mg volatilized during heating and melting does not scatter. It is also preferable to pressurize the lid. Thereby, an Mg—Si based thermoelectric conversion material having the same composition ratio as that of the composition raw material can be obtained. Since the thermoelectric conversion material does not contain Mg oxide, Si oxide, unreacted Mg, and unreacted Si, a thermoelectric conversion element manufactured using this material has high expected performance. .
- the material cooled after heating and melting can be used as it is as an Mg—Si-based thermoelectric conversion material, but it is preferable to grind it into a fine powder having a particle size of several ⁇ m or less for the convenience of sintering. .
- Mg—Si based thermoelectric conversion material is manufactured by the above manufacturing method.
- This Mg—Si based thermoelectric conversion material is represented, for example, by the chemical composition formula: Mg 66.7-a Si 33.3-b Sb x Zn y A z .
- A is selected from the group consisting of the above optional elements (Al, Bi, P, Ga, As, In, Ag, Cu, Au, Ni, Fe, Mn, Co, Ta, Nd, Nb, and Pb). One or more elements).
- x, y, and z satisfy the conditions of 0.1 ⁇ x ⁇ 3.0, 0.1 ⁇ y ⁇ 3.0, 0 ⁇ z ⁇ 3.0, and 0.2 ⁇ x + y + z ⁇ 5.0.
- the ranges of x, y, and z are preferably 0.1 ⁇ x ⁇ 2.0, 0.1 ⁇ y ⁇ 2.0, and 0 ⁇ z ⁇ 2.0, and 0.1 ⁇ x ⁇ 1.
- x + y + z is preferably 0.2 ⁇ x + y + z ⁇ 4.0, more preferably 0.2 ⁇ x + y + z ⁇ 3.0, and 0.5 ⁇ x + y + z ⁇ 2.5. Is more preferable, and it is particularly preferable that 1.0 ⁇ x + y + z ⁇ 2.0.
- a material not containing the optional element A that is, a material represented by the chemical composition formula: Mg 66.7-a Si 33.3-b Sb x Zn y is preferable.
- Sb is replaced with Si sites in Mg 2 Si crystal structure, since Zn is considered to be replaced with Mg sites in Mg 2 Si crystal structure, chemical composition formula in the case of not containing any element A Mg 66. 7-y Si 33.3-x Sb x Zn y is assumed to be represented.
- the Mg—Si-based thermoelectric conversion material according to the present invention is less susceptible to cracking when manufacturing a sintered body or cutting the sintered body into a predetermined size, and has high thermoelectric conversion performance.
- the reason why cracks are difficult to occur is not clear, but it is presumed that Zn contributes to strengthening bonds between atoms from the microscopic viewpoint, and has an effect of suppressing the introduction of cracks.
- the sintered body for thermoelectric conversion according to the present invention is formed by sintering the Mg—Si based thermoelectric conversion material according to the present invention.
- a pressure compression sintering method such as a hot press sintering method (HP), a hot isostatic pressing method (HIP), or a discharge plasma sintering method.
- Plasma sintering is preferred.
- the spark plasma sintering method is a type of pressure compression sintering using the direct current pulse current method. It is a method of heating and sintering by applying a large pulse current to various materials. -This is a method in which an electric current is passed through a conductive material such as graphite and the material is processed and processed by Joule heating.
- a jig as shown in FIG. 1 is used for the discharge plasma sintering.
- the space surrounded by the graphite die 10 and the graphite punches 11a and 11b shown in FIG. 1 is filled with the powder of the Mg—Si thermoelectric conversion material according to the present invention.
- carbon paper is sandwiched between contact portions of the Mg—Si based thermoelectric conversion material, the graphite die 10, and the graphite punches 11a and 11b. Then, it sinters using a discharge plasma sintering apparatus.
- the sintering pressure for spark plasma sintering is preferably 5 to 60 MPa. When the sintering pressure is less than 5 MPa, it is difficult to obtain a sintered body having a sufficient density, and the strength may be insufficient. On the other hand, when the sintering pressure exceeds 60 MPa, it is not preferable in terms of cost.
- the sintering temperature is preferably 600 to 1000 ° C. When the sintering temperature is less than 600 ° C., it is difficult to obtain a sintered body having a sufficient density, and the strength may be insufficient. On the other hand, when the sintering temperature exceeds 1000 ° C., not only the sintered body is damaged, but Mg may be volatilized rapidly and scattered. Sintering is performed under reduced pressure and preferably in an inert gas atmosphere.
- the sintered body for thermoelectric conversion is usually manufactured using one type of thermoelectric conversion material, but may be a sintered body having a multilayer structure using a plurality of types of thermoelectric conversion materials. Can be manufactured by laminating a plurality of types of thermoelectric conversion materials in a desired order before sintering and then sintering.
- a plurality of different types of compositions may be used in combination, and the Mg—Si thermoelectric conversion material according to the present invention and other Mg—Si thermoelectric conversions may be used.
- a combination of materials may be used.
- thermoelectric conversion material a Mg—Si thermoelectric conversion material, and an electrode material are filled in this order in a space surrounded by the graphite die 10 and the graphite punches 11a and 11b as shown in FIG.
- a sintered body in which the electrodes are integrated can be obtained.
- a thermoelectric conversion element can be obtained by cutting such a sintered body into a predetermined size.
- thermoelectric conversion element includes a thermoelectric conversion part made of the above-described sintered body for thermoelectric conversion, and a first electrode and a second electrode provided in the thermoelectric conversion part. Since this thermoelectric conversion element can stably exhibit high thermoelectric conversion performance, is not weathered, and has excellent durability, it is excellent in stability and reliability.
- thermoelectric conversion part is cut out from the sintered body to a desired size using a wire saw or the like.
- a large-sized sintered body excellent in physical strength without cracks for example, a large-diameter columnar sintered body having a diameter of 30 mm or more is obtained, so that many thermoelectric conversion parts are cut out from one sintered body. And has high productivity.
- the sintered body after cutting is preferably used after the surface is polished and smoothed by a mirror finishing method or the like.
- the formation method of the first electrode and the second electrode is not particularly limited, and a known method can be adopted.
- the electrode can be formed by applying electroless nickel plating or the like to the sintered body.
- the first electrode and the second electrode may be formed after the thermoelectric conversion portion is cut out from the sintered body, or the first electrode and the second electrode are formed on the sintered body. You may make it cut out a thermoelectric conversion element, after forming 2 electrodes.
- thermoelectric conversion module according to the present invention includes the thermoelectric conversion element according to the present invention.
- This thermoelectric conversion module can be manufactured by modularizing the thermoelectric conversion element according to the present invention by a known method.
- Example 1 60.36 parts by mass of Mg (manufactured by Nippon Thermochemical, purity: 99.93%, size: chip shape of 1.4 mm ⁇ 0.5 mm), 34.87 parts by mass of Si (manufactured by MEMC Electronic Materials, purity: 99.9999999%, size: granular with a diameter of 4 mm or less), 2.30 parts by mass of Sb (manufactured by Electronics and Materials Corporation, purity: 99.9999%, size: granular with a diameter of 5 mm or less), and 2.
- composition raw material 47 parts by mass of Zn (manufactured by High Purity Chemical Laboratory, purity: 99.9%, size: granular having a diameter of 150 ⁇ m or less) was mixed to obtain a composition raw material.
- the Sb content in this composition raw material is 0.5 at%, and the Zn content is 1.0 at%.
- the composition raw material obtained was made of a molten crucible made of Al 2 O 3 (manufactured by Nippon Chemical Ceramics Co., Ltd., inner diameter 34 mm, outer diameter 40 mm, height 150 mm; lid portion 40 mm in diameter, thickness 2.5 mm. The contact surface was polished.). The lid was brought into close contact with the opening of the melting crucible and was left in the heating furnace, and pressurized with a weight from the outside of the heating furnace through a ceramic rod to 3 kg / cm 2 .
- the inside of the heating furnace was depressurized with a rotary pump until it became 5 Pa or less, and then depressurized with a diffusion pump until 1.33 ⁇ 10 ⁇ 2 Pa.
- the inside of the heating furnace was heated at 200 ° C./hour until reaching 150 ° C., and kept at 150 ° C. for 1 hour to dry the composition raw material.
- the heating furnace was filled with a mixed gas of hydrogen gas and argon gas, the partial pressure of hydrogen gas was 0.005 MPa, and the partial pressure of argon gas was 0.052 MPa.
- the obtained Mg—Si-based thermoelectric conversion material was pulverized using an automatic mortar until the particle size became 25 to 75 ⁇ m. Then, the space surrounded by the graphite die 10 (inner diameter 15 mm) and the graphite punches 11a and 11b shown in FIG. 1 was filled with powder of the Mg—Si thermoelectric conversion material. At that time, in order to prevent sticking, carbon paper was sandwiched between contact portions of the Mg—Si based thermoelectric conversion material, the graphite die 10, and the graphite punches 11a and 11b.
- sintering was performed in a reduced pressure atmosphere using a discharge plasma sintering apparatus (manufactured by ELENIX, “PAS-III-Es”) to obtain a sintered body.
- the sintering conditions are as follows. Sintering temperature: 840 ° C Pressure: 30.0 MPa Temperature rising rate: 300 ° C / min x 2 min ( ⁇ 600 ° C) 100 ° C / min x 2 min (600-800 ° C) 10 ° C / min x 4 min (800-840 ° C) 0 ° C / min x 5 min (840 ° C) Cooling conditions: Vacuum cooling Atmosphere: Ar 60 Pa (vacuum when cooling)
- the adhered carbon paper was removed with sandpaper.
- the shape of the obtained sintered compact is a column shape (a circle with a diameter of 15 mm on the top and bottom surfaces and a height of 10 mm).
- FIG.2 The appearance of the obtained sintered body is shown in FIG.
- the sintered body is cut along the diameter using a wire saw (Musashino Electronics, "CS-203"), and the cut surface is mirror-finished using an automatic polishing machine (Musashino Electronics, "MA-150”). processed.
- FIG.2 The result of having observed the cut surface after mirror surface processing with the optical microscope (200-times multiplication factor) is shown in FIG.2 (b).
- FIGS. 2A and 2B a dense sintered body free from voids could be obtained.
- a composition raw material was obtained.
- the Sb content in this composition material is 0.5 at%.
- the sintered compact was obtained like Example 1 using this composition raw material.
- a composition raw material was obtained.
- the Zn content in this composition material is 1.0 at%.
- the sintered compact was obtained like Example 1 using this composition raw material.
- composition raw material 04 parts by mass of Al (manufactured by Furuuchi Chemical Co., Ltd., purity: 99.99%, size: chip shape of 10 mm ⁇ 15 mm ⁇ 0.5 mm) was mixed to obtain a composition raw material.
- the Sb content in the composition raw material is 0.5 at%, and the Al content is 1.0 at%.
- the sintered compact was obtained like Example 1 using this composition raw material.
- the sintered body of Comparative Example 2 containing Sb as an element other than Mg and Si was prone to cracks and had a low yield of 34.7%.
- the sintered body of Example 1 containing Sb and Zn as elements other than Mg and Si and the sintered body of Comparative Example 5 containing Sb and Al are less prone to cracking and the yield was 100%. It was.
- thermoelectric conversion characteristics (Calculation of Seebeck coefficient) A 2.0 mm ⁇ 2.0 mm ⁇ 8.0 mm sample was cut out from the sintered bodies obtained in Example 1 and Comparative Examples 1 to 5 using a wire saw (Musashino Electronics, “CS-203”). . After lightly polishing the surface of the sample, the Seebeck coefficient was measured as follows using a Seebeck coefficient measuring device (“ZEM-2” manufactured by ULVAC-RIKO).
- thermocouple probe
- the measurement temperature was 50 ° C. to 600 ° C., and the measurement was performed in increments of 50 ° C.
- the measurement atmosphere was a He atmosphere, and the temperature difference between the electrodes was set to 20 ° C., 30 ° C., or 40 ° C.
- the thermoelectric force generated between the sample and the probe and the temperature difference between the samples were read, and the Seebeck coefficient was calculated by dividing the electromotive force difference between the probes by the temperature difference. The results are shown in FIG.
- the amount of heat absorbed was measured using a standard sample (sapphire) with a known specific heat. Subsequently, sapphire was removed, the above sample was set, and the amount of absorbed heat was measured. Subsequently, for the thermal diffusivity measurement, the blackening treatment by graphite spray was uniformly performed on the surface having the R thermocouple. In addition, it masked so that a graphite spray might not be applied to a silver paste in the blackening process. Then, the thermal diffusivity was measured in increments of 50 ° C. from 50 ° C. to 600 ° C., and the thermal conductivity was calculated from the thermal diffusivity, specific heat, and sample density. The results are shown in FIG.
- Example 1 As shown in FIGS. 3 to 7, the sintered body of Example 1 containing Sb and Zn as elements other than Mg and Si is compared with the sintered body of Comparative Example 1 containing no elements other than Mg and Si. Although the absolute value of the Seebeck coefficient was small, the electrical conductivity value was large and the thermal conductivity value was small. As a result, a dimensionless figure of merit as high as 0.98 at 873K could be realized.
- the sintered body of Comparative Example 2 containing Sb as an element other than Mg and Si has a larger value of thermal conductivity than the sintered body of Example 1, and as a result, the dimensionless figure of merit at 873K is 0. Stayed at 88.
- the sintered bodies of Comparative Examples 3 and 4 containing Al or Zn as an element other than Mg and Si have a larger absolute value of Seebeck coefficient than the sintered body of Comparative Example 1, and the value of thermal conductivity. Although the electrical conductivity was small, the dimensionless figure of merit was not improved so much.
- the sintered body of Comparative Example 5 containing Sb and Al as elements other than Mg and Si had the same thermal conductivity value as that of the sintered body of Comparative Example 2, but the power factor As a result, the dimensionless figure of merit at 873K remained at 0.69.
- a sample was set on the stage of the four-probe measuring device, and after pressing the probe against the sample, the voltage when an arbitrary current was applied was obtained, and the resistance value was calculated. At that time, the interval between the four probes contacting the measurement surface was set to 1 mm. The current condition was up to 30 mA.
- the electrical resistivity was calculated by multiplying the obtained resistance value by a correction coefficient.
- the correction coefficient is represented by w ⁇ C ⁇ F, and w represents the thickness of the sample.
- F is a correction factor for the thickness of the sample. Since the thickness of the sample fluctuated by polishing, F was calculated from the relationship shown in Table 2 below.
- the sample was put in an annular furnace maintained at 600 ° C. in the atmosphere. After 1 hour, the sample was taken out from the annular furnace, the measurement surface was polished, and the electrical resistivity was calculated by the same method as described above. Similarly, the sample was taken out when the heating time in the annular furnace was 5, 10, 50, 100, 500, 1000 hours, and the electrical resistivity was calculated. The results are shown in FIG.
- the sintered body of Example 1 containing Sb and Zn as elements other than Mg and Si is comparable to the sintered body of Comparative Example 2 containing Sb as an element other than Mg and Si.
- the electrical resistivity was low and the high temperature durability was excellent.
- Example 2 61.29 parts by mass of Mg (manufactured by Nippon Thermochemical, purity: 99.93%, size: chip shape of 1.4 mm ⁇ 0.5 mm), 35.14 parts by mass of Si (manufactured by MEMC Electronic Materials, purity: 99.9999999%, size: granules having a diameter of 4 mm or less), 2.32 parts by mass of Sb (manufactured by Electronics and Materials Corporation, purity: 99.9999%, size: granules having a diameter of 5 mm or less), and 1.
- composition raw material 25 parts by mass of Zn (manufactured by High Purity Chemical Laboratory, purity: 99.9%, size: granular having a diameter of 150 ⁇ m or less) was mixed to obtain a composition raw material.
- the Sb content in the composition raw material is 0.5 at%, and the Zn content is 0.5 at%.
- the sintered compact was obtained like Example 1 using this composition raw material.
- Example 3 59.31 parts by mass of Mg (manufactured by Nippon Thermochemical, purity: 99.93%, size: chip shape of 1.4 mm ⁇ 0.5 mm), 33.74 parts by mass of Si (manufactured by MEMC Electronic Materials, purity: 99.9999999%, size: granular with a diameter of 4 mm or less), 4.52 parts by mass of Sb (manufactured by Electronics and Materials Corporation, purity: 99.9999%, size: granular with a diameter of 5 mm or less), and 2.
- composition raw material 43 parts by mass of Zn (manufactured by High Purity Chemical Laboratory, purity: 99.9%, size: granular with a diameter of 150 ⁇ m or less) was mixed to obtain a composition raw material.
- the Sb content in the composition material is 1.0 at%
- the Zn content is 1.0 at%.
- the sintered compact was obtained like Example 1 using this composition raw material.
- Example 4 60.22 parts by mass of Mg (manufactured by Nippon Thermochemical, purity: 99.93%, size: 1.4 mm ⁇ 0.5 mm chip shape), 34.00 parts by mass of Si (manufactured by MEMC Electronic Materials, purity: 99.9999999%, size: granules having a diameter of 4 mm or less), 4.56 parts by mass of Sb (manufactured by Electronics and Materials Corporation, purity: 99.9999%, size: granules having a diameter of 5 mm or less), and 1.
- composition raw material 41 parts by mass of Zn (manufactured by High Purity Chemical Laboratory, purity: 99.9%, size: granular having a diameter of 150 ⁇ m or less) was mixed to obtain a composition raw material.
- the Sb content in the composition raw material is 1.0 at%, and the Zn content is 0.5 at%.
- the sintered compact was obtained like Example 1 using this composition raw material.
- a composition raw material was obtained. The content of Sb in this composition raw material is 1.0 at%. And although it tried trying manufacture of a sintered compact like Example 1 using this composition raw material, a crack generate
- thermoelectric conversion characteristics Similar to Example 1 and Comparative Examples 1 to 5, the Seebeck coefficient, electrical conductivity, and thermal conductivity were determined for the sintered bodies obtained in Examples 2 to 4, and the dimensionless figure of merit (ZT) was calculated. . The results are shown in FIG.
- each of the sintered bodies of Examples 2 to 4 containing Sb and Zn as elements other than Mg and Si has a dimensionless figure of merit at 873 K of 0.7 or more, and the thermoelectric conversion performance is improved. It was excellent.
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Description
(AはAl、Bi、P、Ga、As、In、Ag、Cu、Au、Ni、Fe、Mn、Co、Ta、Nd、Nb、及びPbよりなる群から選ばれる1種以上の元素を示す。x、y、zは0.1≦x≦3.0、0.1≦y≦3.0、0≦z≦3.0、0.2≦x+y+z≦5.0の条件を満たす。a、bは正数であり、a+b=x+y+zの条件を満たす。)
で表されるMg-Si系熱電変換材料。
[2] 上記[1]記載のMg-Si系熱電変換材料を焼結してなる熱電変換用焼結体。
[3] 上記[2]記載の熱電変換用焼結体からなる熱電変換部と、該熱電変換部に設けられた第1電極及び第2電極とを備える熱電変換素子。
[4] 上記[3]記載の熱電変換素子を備える熱電変換モジュール。
[5] Mg、Si、Sb、及びZnを含有する組成原料を加熱溶融する工程を含むMg-Si系熱電変換材料の製造方法。
[6] 上記組成原料中のSb及びZnの含有量がそれぞれ原子量比で0.1~3.0at%であり、Mg及びSi以外の元素の含有量の合計が原子量比で0.2~5.0at%である上記[5]記載のMg-Si系熱電変換材料の製造方法。
[7] 上記[5]又は[6]記載のMg-Si系熱電変換材料の製造方法により製造されるMg-Si系熱電変換材料。
本発明に係るMg-Si系熱電変換材料の製造方法は、Mg、Si、Sb、及びZnを含有する組成原料を加熱溶融する工程を含む。
また、Sb、Zn等の元素をMg2Si結晶構造中のMg又はSiの一部と置換・固溶させるためには、Mg及びSi以外の元素の含有量の合計は原子量比で0.2~5.0at%であることが好ましく、0.2~4.0at%であることがより好ましく、0.2~3.0at%であることがさらに好ましく、0.5~2.5at%であることが特に好ましく、1.0~2.0at%であることが最も好ましい。
加熱溶融の際の圧力条件としては、大気圧でもよいが、安全性を考慮すれば例えば1.33×10-3Pa程度の減圧条件が好ましい。
本発明に係るMg-Si系熱電変換材料は、上記の製造方法によって製造されるものである。このMg-Si系熱電変換材料は、例えば、化学組成式:Mg66.7-aSi33.3-bSbxZnyAzで表される。
ここで、Aは上記の任意元素(Al、Bi、P、Ga、As、In、Ag、Cu、Au、Ni、Fe、Mn、Co、Ta、Nd、Nb、及びPbよりなる群から選ばれる1種以上の元素)を示す。x、y、zは0.1≦x≦3.0、0.1≦y≦3.0、0≦z≦3.0、0.2≦x+y+z≦5.0の条件を満たす。a、bは正数であり、a+b=x+y+zの条件を満たす。x、y、zの範囲は、0.1≦x≦2.0、0.1≦y≦2.0、0≦z≦2.0であることが好ましく、0.1≦x≦1.5、0.1≦y≦1.5、0≦z≦1.5であることがより好ましく、0.5≦x≦1.0、0.5≦y≦1.0、0≦z≦0.5であることがさらに好ましい。また、x+y+zの範囲は、0.2≦x+y+z≦4.0であることが好ましく、0.2≦x+y+z≦3.0であることがより好ましく、0.5≦x+y+z≦2.5であることがさらに好ましく、1.0≦x+y+z≦2.0であることが特に好ましい。
なお、SbはMg2Si結晶構造中のSiサイトに置換し、ZnはMg2Si結晶構造中のMgサイトに置換すると考えられるため、任意元素Aを含まない場合の化学組成式はMg66.7-ySi33.3-xSbxZnyで表されると推測される。
本発明に係る熱電変換用焼結体は、本発明に係るMg-Si系熱電変換材料を焼結してなるものである。
また、焼結温度は600~1000℃が好ましい。焼結温度が600℃未満である場合、十分な密度を有する焼結体を得ることが難しく、強度が不足する虞がある。一方、焼結温度が1000℃を超える場合、焼結体に損傷が生じるばかりでなく、Mgが急激に揮発して飛散する虞がある。
また、焼結は減圧下且つ好ましくは不活性ガス雰囲気下で行われる。
本発明に係る熱電変換素子は、上記の熱電変換用焼結体からなる熱電変換部と、該熱電変換部に設けられた第1電極及び第2電極とを備えるものである。この熱電変換素子は、安定して高い熱電変換性能を発揮でき、風化せず、耐久性に優れているため、安定性及び信頼性に優れたものである。
60.36質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、34.87質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)、2.30質量部のSb(エレクトロニクス アンド マテリアルズ コーポレーション製、純度:99.9999%、大きさ:直径5mm以下の粒状)、及び2.47質量部のZn(高純度化学研究所製、純度:99.9%、大きさ:直径150μm以下の粒状)を混合し、組成原料を得た。この組成原料中のSbの含有量は0.5at%であり、Znの含有量は1.0at%である。
焼結温度:840℃
圧力:30.0MPa
昇温レート:300℃/分×2分(~600℃)
100℃/分×2分(600~800℃)
10℃/分×4分(800~840℃)
0℃/分×5分(840℃)
冷却条件:真空放冷
雰囲気:Ar 60Pa(冷却時は真空)
図2(a)、(b)から分かるように、ボイドの存在しない緻密な焼結体を得ることができた。
63.39質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、及び36.61質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)を混合し、組成原料を得た。そして、この組成原料を用いて実施例1と同様にして焼結体を得た。
62.24質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、35.42質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)、及び2.34質量部のSb(エレクトロニクス アンド マテリアルズ コーポレーション製、純度:99.9999%、大きさ:直径5mm以下の粒状)を混合し、組成原料を得た。この組成原料中のSbの含有量は0.5at%である。そして、この組成原料を用いて実施例1と同様にして焼結体を得た。
62.37質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、36.58質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)、及び1.05質量部のAl(フルウチ化学製、純度:99.99%、大きさ:10mm×15mm×0.5mmのチップ状)を混合し、組成原料を得た。この組成原料中のAlの含有量は1.0at%である。そして、この組成原料を用いて実施例1と同様にして焼結体を得た。
61.45質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、36.04質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)、及び2.52質量部のZn(高純度化学研究所製、純度:99.9%、大きさ:直径150μm以下の粒状)を混合し、組成原料を得た。この組成原料中のZnの含有量は1.0at%である。そして、この組成原料を用いて実施例1と同様にして焼結体を得た。
61.25質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、35.38質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)、2.34質量部のSb(エレクトロニクス アンド マテリアルズ コーポレーション製、純度:99.9999%、大きさ:直径5mm以下の粒状)、及び1.04質量部のAl(フルウチ化学製、純度:99.99%、大きさ:10mm×15mm×0.5mmのチップ状)を混合し、組成原料を得た。この組成原料中のSbの含有量は0.5at%であり、Alの含有量は1.0at%である。そして、この組成原料を用いて実施例1と同様にして焼結体を得た。
ワイヤーソー(ムサシノ電子製、「CS-203」)を用いて、実施例1、比較例2、5で得られた焼結体から2.0mm×2.0mm×8.0mmの試料をそれぞれ切り出し、クラックが発生した試料の数とクラックが発生しなかった試料の数とを確認した。また、この確認結果から歩留まりを算出した。結果を表1に示す。
(ゼーベック係数の算出)
ワイヤーソー(ムサシノ電子製、「CS-203」)を用いて、実施例1、比較例1~5で得られた焼結体から2.0mm×2.0mm×8.0mmの試料を切り出した。試料の表面を軽く研磨した後、ゼーベック係数測定装置(アルバック理工製、「ZEM-2」)を用いて以下のようにゼーベック係数を測定した。
上記と同様に、上下電極及びプローブを用いた四端子法によって抵抗値を測定し、プローブ間の距離と試料の断面積とから抵抗率を算出し、その逆数から電気伝導率を算出した。結果を図4に示す。
上記のようにして算出したゼーベック係数及び電気伝導率を用いてパワーファクターを算出した。結果を図5に示す。
ワイヤーソー(ムサシノ電子製、「CS-203」)を用いて、実施例1、比較例1~5で得られた焼結体から8.0mm×8.0mm×1.0mmの試料を切り出した。試料の表面を軽く研磨した後、8mm×8mmの一方の面の隅にR熱電対を銀ペーストで接着した。そして、この試料について、レーザーフラッシュ法熱伝導率測定装置(アルバック理工製、「TC・7000H」)を用いて以下のように熱伝導率を測定した。
上記のようにして算出したゼーベック係数、電気伝導率、及び熱伝導率を用いて無次元性能指数(ZT)を算出した。結果を図7に示す。
また、Mg、Si以外の元素としてAl又はZnを含有する比較例3、4の焼結体は、比較例1の焼結体と比較してゼーベック係数の絶対値が大きく、熱伝導率の値が小さかったものの、電気伝導率の値が小さく、その結果、無次元性能指数はそれほど向上しなかった。
また、Mg、Si以外の元素としてSb及びAlを含有する比較例5の焼結体は、比較例2の焼結体と比較して熱伝導率の値が同程度であったものの、パワーファクターの値が小さく、その結果、873Kにおける無次元性能指数は0.69にとどまった。
ワイヤーソー(ムサシノ電子製、「CS-203」)を用いて、実施例1、比較例2~5で得られた焼結体から10.0mm×10.0mm×2.0mmの試料を切り出した。自動研磨装置(ムサシノ電子製、「MA-150」)を用いて試料の表面酸化膜を除去した後、四探針測定装置(共和理研製、「K-503RS」)を用いて以下のように電気抵抗率を測定した。
61.29質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、35.14質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)、2.32質量部のSb(エレクトロニクス アンド マテリアルズ コーポレーション製、純度:99.9999%、大きさ:直径5mm以下の粒状)、及び1.25質量部のZn(高純度化学研究所製、純度:99.9%、大きさ:直径150μm以下の粒状)を混合し、組成原料を得た。この組成原料中のSbの含有量は0.5at%であり、Znの含有量は0.5at%である。そして、この組成原料を用いて実施例1と同様にして焼結体を得た。
59.31質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、33.74質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)、4.52質量部のSb(エレクトロニクス アンド マテリアルズ コーポレーション製、純度:99.9999%、大きさ:直径5mm以下の粒状)、及び2.43質量部のZn(高純度化学研究所製、純度:99.9%、大きさ:直径150μm以下の粒状)を混合し、組成原料を得た。この組成原料中のSbの含有量は1.0at%であり、Znの含有量は1.0at%である。そして、この組成原料を用いて実施例1と同様にして焼結体を得た。
60.22質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、34.00質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)、4.56質量部のSb(エレクトロニクス アンド マテリアルズ コーポレーション製、純度:99.9999%、大きさ:直径5mm以下の粒状)、及び1.41質量部のZn(高純度化学研究所製、純度:99.9%、大きさ:直径150μm以下の粒状)を混合し、組成原料を得た。この組成原料中のSbの含有量は1.0at%であり、Znの含有量は0.5at%である。そして、この組成原料を用いて実施例1と同様にして焼結体を得た。
61.14質量部のMg(日本サーモケミカル製、純度:99.93%、大きさ:1.4mm×0.5mmのチップ状)、34.26質量部のSi(MEMC Electronic Materials製、純度:99.9999999%、大きさ:直径4mm以下の粒状)、及び4.59質量部のSb(エレクトロニクス アンド マテリアルズ コーポレーション製、純度:99.9999%、大きさ:直径5mm以下の粒状)を混合し、組成原料を得た。この組成原料中のSbの含有量は1.0at%である。そして、この組成原料を用いて実施例1と同様にして焼結体の製造を試みたが、クラックが発生し、焼結体を得ることができなかった。
ワイヤーソー(ムサシノ電子製、「CS-203」)を用いて、実施例2~4で得られた焼結体から8.0mm×8.0mm×1.0mmの試料2本と、2.0mm×2.0mm×12.0mmの試料3本とをそれぞれ切り出し、クラックの有無を確認した。その結果、試料にはクラックが全く発生していなかった。
実施例1、比較例1~5と同様に、実施例2~4で得られた焼結体についてゼーベック係数、電気伝導率、及び熱伝導率を求め、無次元性能指数(ZT)を算出した。結果を図9に示す。
11a、11b グラファイト製パンチ
Claims (7)
- 化学組成式:Mg66.7-aSi33.3-bSbxZnyAz
(AはAl、Bi、P、Ga、As、In、Ag、Cu、Au、Ni、Fe、Mn、Co、Ta、Nd、Nb、及びPbよりなる群から選ばれる1種以上の元素を示す。x、y、zは0.1≦x≦3.0、0.1≦y≦3.0、0≦z≦3.0、0.2≦x+y+z≦5.0の条件を満たす。a、bは正数であり、a+b=x+y+zの条件を満たす。)
で表されるMg-Si系熱電変換材料。 - 請求項1記載のMg-Si系熱電変換材料を焼結してなる熱電変換用焼結体。
- 請求項2記載の熱電変換用焼結体からなる熱電変換部と、該熱電変換部に設けられた第1電極及び第2電極とを備える熱電変換素子。
- 請求項3記載の熱電変換素子を備える熱電変換モジュール。
- Mg、Si、Sb、及びZnを含有する組成原料を加熱溶融する工程を含むMg-Si系熱電変換材料の製造方法。
- 前記組成原料中のSb及びZnの含有量がそれぞれ原子量比で0.1~3.0at%であり、Mg及びSi以外の元素の含有量の合計が原子量比で0.2~5.0at%である請求項5記載のMg-Si系熱電変換材料の製造方法。
- 請求項5又は6記載のMg-Si系熱電変換材料の製造方法により製造されるMg-Si系熱電変換材料。
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JPWO2014084163A1 (ja) | 2017-01-05 |
EP2913857B1 (en) | 2017-05-24 |
US9627600B2 (en) | 2017-04-18 |
EP2913857A4 (en) | 2015-12-30 |
JP6222666B2 (ja) | 2017-11-01 |
US20150311419A1 (en) | 2015-10-29 |
EP2913857A1 (en) | 2015-09-02 |
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