WO2014080834A1 - 感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法 - Google Patents
感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法 Download PDFInfo
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- WO2014080834A1 WO2014080834A1 PCT/JP2013/080831 JP2013080831W WO2014080834A1 WO 2014080834 A1 WO2014080834 A1 WO 2014080834A1 JP 2013080831 W JP2013080831 W JP 2013080831W WO 2014080834 A1 WO2014080834 A1 WO 2014080834A1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
- C08F20/02—Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
- C08F20/10—Esters
- C08F20/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F20/30—Esters containing oxygen in addition to the carboxy oxygen containing aromatic rings in the alcohol moiety
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D4/00—Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
- C09D4/06—Organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond in combination with a macromolecular compound other than an unsaturated polymer of groups C09D159/00 - C09D187/00
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0076—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/188—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by direct electroplating
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
- H05K3/184—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
Definitions
- the present invention relates to a photosensitive resin composition, a photosensitive element, a resist pattern forming method, and a printed wiring board manufacturing method.
- a photosensitive resin composition includes a support film and a photosensitive element (laminated layer) including a layer formed on the support film using the photosensitive resin composition (hereinafter also referred to as “photosensitive resin composition layer”). Often used as a body).
- the printed wiring board is manufactured as follows, for example. First, a photosensitive resin composition layer of a photosensitive element is formed (laminated) on a circuit forming substrate (photosensitive layer forming step). Next, after peeling off and removing the support film, the exposed portion is cured by irradiating a predetermined portion of the photosensitive resin composition layer with actinic rays (exposure step). Thereafter, by removing (developing) the unexposed portion of the photosensitive resin composition layer from the substrate, a resist made of a cured product of the photosensitive resin composition (hereinafter also referred to as “resist cured product”) is formed on the substrate. A pattern is formed (development process). Using the obtained resist pattern as a mask, etching or plating is performed to form a circuit on the substrate (circuit forming process), and finally the resist is peeled and removed to produce a printed wiring board (peeling process). ).
- a photosensitive resin composition capable of forming a resist pattern excellent in resolution (resolution) and adhesion.
- a photosensitive resin composition capable of forming a resist pattern having an L / S (line width / space width) of 10/10 (unit: ⁇ m) or less in package substrate production is required.
- the resolution of the resist pattern can be increased by, for example, improving the crosslink density after curing of the photosensitive resin composition.
- the crosslink density is improved, the resist pattern becomes hard and brittle, and the problem that the resist pattern is missing tends to occur in the transporting process and the like.
- As a method for solving this problem there is a technique for improving the flexibility of the resist pattern.
- the resist pattern tends to collapse, and as a result, the resolution tends to decrease. Therefore, it can be said that high resolution and flexibility of the resist pattern to be formed are mutually contradictory characteristics.
- No. pamphlet and International Publication No. 12/067107 pamphlet have improved the above-mentioned required characteristics by using a specific binder polymer, photopolymerizable compound, photopolymerization initiator, and sensitizing dye.
- a resin composition is disclosed.
- the present invention relates to a photosensitive resin composition capable of forming a resist pattern having excellent resolution, adhesion, and flexibility with excellent developability, a photosensitive element using the same, a method of forming a resist pattern, and printed wiring It aims at providing the manufacturing method of a board.
- the present inventors have found that the number of structural units of 1 to 20 and the number of structural units of 2 to 7 propyleneoxy groups exceed the total number of structural units of 10.
- the first aspect of the present invention comprises a binder polymer having a structural unit derived from (meth) acrylic acid, a structural unit derived from styrene or ⁇ -methylstyrene, and a structural unit derived from benzyl (meth) acrylate. And having an ethyleneoxy group and a propyleneoxy group, the number of structural units of the ethyleneoxy group is 1 to 20, the number of structural units of the propyleneoxy group is 2 to 7, and the ethyleneoxy group and the propyleneoxy group A photosensitive resin composition containing a photopolymerizable compound containing a first bisphenol-type di (meth) acrylate having a total number of structural units of more than 10 and a photopolymerization initiator.
- the photosensitive resin composition can form a resist pattern excellent in resolution, adhesion, and flexibility with excellent developability by taking the above-described embodiment.
- a resist pattern having L / S (line width / space width) of 10/10 (unit: ⁇ m) or less can be formed.
- the photosensitive resin composition is at least selected from the group consisting of a pyrazoline derivative and a bisalkoxyanthracene from the viewpoint of further improving sensitivity, resolution of the resist pattern to be formed, adhesion, flexibility, and release properties after curing. It is preferable to further contain one kind of sensitizing dye.
- the photosensitive resin composition has an ethyleneoxy group from the viewpoint of further improving resolution, adhesion, flexibility, and developability, and the number of structural units of the ethyleneoxy group is 8 or less. It is preferable to further contain a second bisphenol-type di (meth) acrylate different from the bisphenol-type di (meth) acrylate.
- a 2nd aspect of this invention is a photosensitive element provided with a support film and the photosensitive resin composition layer which is a coating film of the photosensitive resin composition of the said 1st aspect provided on the said support film. is there.
- a step of forming a photosensitive resin composition layer which is a coating film of the photosensitive resin composition of the first aspect on the substrate (photosensitive layer forming step), and the above photosensitive property
- a step of irradiating at least a part of the resin composition layer with actinic rays (exposure step) and a step of removing regions other than the region irradiated with the actinic rays of the photosensitive resin composition layer from the substrate And a development step).
- the wavelength of the active light to be irradiated is preferably in the range of 340 nm to 430 nm.
- 4th aspect of this invention is a manufacturing method of a printed wiring board including the process of carrying out the etching process or the plating process of the board
- (meth) acrylic acid means acrylic acid or methacrylic acid
- (meth) acrylate means acrylate or the corresponding methacrylate
- (meth) acryloyloxy group means An acryloyloxy group or a methacryloyloxy group is meant.
- (Poly) ethyleneoxy group means at least one ethyleneoxy group or polyethyleneoxy group in which two or more ethylene groups are linked by an ether bond.
- the ethyleneoxy group is a group represented by (—CH 2 CH 2 —O—) and is also referred to as an oxyethylene group.
- (Poly) propyleneoxy group means at least one propyleneoxy group or a polypropyleneoxy group in which two or more propylene groups are linked by an ether bond.
- the propyleneoxy group is a group represented by (—CHCH 3 CH 2 —O—), a group represented by (—CH 2 CHCH 3 —O—) or (—CH 2 CH 2 CH 2 —O -) And is also referred to as an oxypropylene group.
- EO-modified means a compound having a (poly) ethyleneoxy group
- PO-modified means a compound having a (poly) propyleneoxy group.
- PO-modified means a compound having both a (poly) ethyleneoxy group and a (poly) propyleneoxy group.
- the term “process” is not limited to an independent process, and even if it cannot be clearly distinguished from other processes, the term “process” is used if the intended purpose of the process is achieved. included.
- the numerical range indicated by using “to” indicates a range including the numerical values described before and after “to” as the minimum value and the maximum value, respectively.
- the content of each component in the composition means the total amount of the plurality of substances present in the composition unless there is a specific notice when there are a plurality of substances corresponding to each component in the composition.
- the term “layer” includes a structure formed in a part in addition to a structure formed over the entire surface when observed as a plan view.
- the term “lamination” indicates that the layers are stacked, and two or more layers may be bonded, or two or more layers may be detachable.
- the photosensitive resin composition of one embodiment of the present invention has (A) component: a structural unit derived from (meth) acrylic acid, a structural unit derived from styrene, and a structural unit derived from benzyl (meth) acrylate.
- the photosensitive resin composition may further contain other components as necessary.
- a structural unit derived from (meth) acrylic acid By including a structural unit derived from (meth) acrylic acid, a structural unit derived from styrene or ⁇ -methylstyrene, and a binder polymer having a structural unit derived from benzyl (meth) acrylate, sensitivity, resolution, adhesion,
- the present inventors have added an ethyleneoxy group having excellent flexibility in addition to a propyleneoxy group and a bisphenol A derivative structure that are hydrophobic and effective in low swelling.
- a photopolymerizable compound having a specific structure in combination with a binder polymer having a specific structure, it is possible to form a rough cross-linked network while having low swellability, and to improve the contradictory properties of adhesion and developability in a balanced manner. I guess I can do it.
- the photopolymerizable compound with a binder polymer having a structural unit derived from styrene or ⁇ -methylstyrene and a structural unit derived from benzyl (meth) acrylate, resolution and flexibility are improved. I guess.
- (A) component Binder polymer
- the photosensitive resin composition is a structural unit derived from (meth) acrylic acid represented by the following general formula (1) as the component (A), represented by the following general formula (2).
- the binder polymer includes, for example, (meth) acrylic acid, styrene or ⁇ -methylstyrene, benzyl (meth) acrylate and other polymerizable monomers used as necessary as the polymerizable monomer (monomer). It can be obtained by radical polymerization according to a conventional method.
- polymerizable monomers are polymerizable with (meth) acrylic acid, styrene or ⁇ -methylstyrene, and benzyl (meth) acrylate, (meth) acrylic acid, styrene and benzyl (meth) acrylate If it is a polymerizable monomer different from, there is no particular limitation.
- Examples of other polymerizable monomers include (meth) acrylic acid alkyl ester, (meth) acrylic acid cycloalkyl ester, (meth) acrylic acid benzyl derivative, (meth) acrylic acid furfuryl, (meth) acrylic acid tetrahydro Furfuryl, isobornyl (meth) acrylate, adamantyl (meth) acrylate, dicyclopentanyl (meth) acrylate, dimethylaminoethyl (meth) acrylate, diethylaminoethyl (meth) acrylate, glycidyl (meth) acrylate 2,2,2-trifluoroethyl (meth) acrylate, 2,2,3,3-tetrafluoropropyl (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate, dicyclopenta (meth) acrylate Nyloxyethyl, (meth) acrylic acid iso
- the content of the structural unit derived from benzyl (meth) acrylate in the binder polymer is based on the total mass of the polymerizable monomer constituting the binder polymer (100% by mass) from the viewpoint of excellent resolution and peelability.
- the same applies hereinafter preferably 3% by mass to 85% by mass, more preferably 5% by mass to 75% by mass, still more preferably 10% by mass to 70% by mass, and even more preferably 10% by mass.
- a content of ⁇ 50% by weight is particularly preferred. From the viewpoint of excellent resolution, the content is preferably 3% by mass or more, more preferably 5% by mass or more, and still more preferably 10% by mass or more.
- this content rate is 85 mass% or less, It is more preferable that it is 75 mass% or less, It is further more preferable that it is 70 mass% or less, 50 It is particularly preferable that the content is not more than mass%.
- the content of the structural unit derived from styrene or ⁇ -methylstyrene in the binder polymer is such that the polymerizable monomer constituting the binder polymer is excellent in the adhesion and releasability of the resist pattern to be formed. It is preferably 10% by mass to 70% by mass based on the total mass, more preferably 15% by mass to 60% by mass, and still more preferably 20% by mass to 55% by mass. This content is preferably 10% by mass or more, more preferably 15% by mass or more, and still more preferably 20% by mass or more from the viewpoint of excellent adhesion of the resist pattern to be formed. Moreover, from the point which is excellent in the peelability of the resist pattern formed, this content rate is preferably 70% by mass or less, more preferably 60% by mass or less, and further 55% by mass or less. preferable.
- the binder polymer preferably further has a structural unit derived from (meth) acrylic acid alkyl ester from the viewpoint of improving developability and peeling properties.
- the (meth) acrylic acid alkyl ester is preferably a (meth) acrylic acid alkyl ester having an alkyl group having 1 to 12 carbon atoms, more preferably a (meth) acrylic acid alkyl ester having an alkyl group having 1 to 8 carbon atoms. preferable.
- Examples of the (meth) acrylic acid alkyl ester include, for example, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, pentyl (meth) acrylate, (meth) Hexyl acrylate, heptyl (meth) acrylate, octyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, nonyl (meth) acrylate, decyl (meth) acrylate, undecyl (meth) acrylate, and ( A meta) dodecyl acrylate is mentioned. These can be used individually by 1 type or in combination of 2 or more types.
- the content of the structural unit constitutes the binder polymer in terms of excellent peelability, resolution and adhesion of the resist pattern to be formed. It is preferably 1% by mass to 30% by mass, more preferably 1% by mass to 20% by mass based on the total mass (100% by mass) of the polymerizable monomer to be treated, and 2% by mass to 10% by mass. % Is more preferable.
- the content is preferably 1% by mass or more, and more preferably 2% by mass or more.
- the content is preferably 30% by mass or less, more preferably 20% by mass or less, and further preferably 10% by mass or less.
- the acid value of the binder polymer is preferably 90 mgKOH / g to 250 mgKOH / g, more preferably 100 mgKOH / g to 240 mgKOH / g, in terms of excellent developability and adhesion of the resist pattern to be formed. More preferably, it is 120 mgKOH / g to 235 mgKOH / g, and particularly preferably 130 mgKOH / g to 230 mgKOH / g. From the viewpoint of shortening the development time, the acid value is preferably 90 mgKOH / g or more, more preferably 100 mgKOH / g or more, further preferably 120 mgKOH / g or more, and 130 mgKOH / g or more. It is particularly preferred.
- the acid value is preferably 250 mgKOH / g or less, more preferably 240 mgKOH / g or less, and 235 mgKOH / g. More preferably, it is more preferably 230 mgKOH / g or less.
- the polymerizable monomer (monomer) which has carboxy groups, such as (meth) acrylic acid, in a small quantity.
- the weight average molecular weight (Mw) of the binder polymer is 10,000 to 200,000 in terms of excellent developability and adhesion when measured by gel permeation chromatography (GPC) (converted by a calibration curve using standard polystyrene). It is preferably 15,000 to 100,000, more preferably 20,000 to 80,000, and particularly preferably 23,000 to 60,000. In terms of excellent developability, the weight average molecular weight is preferably 200000 or less, more preferably 100000 or less, still more preferably 80000 or less, and particularly preferably 60000 or less. In terms of excellent adhesion, the weight average molecular weight is preferably 10,000 or more, more preferably 15,000 or more, further preferably 23,000 or more, and particularly preferably 30000 or more.
- the degree of dispersion (weight average molecular weight / number average molecular weight) of the binder polymer is preferably 3.0 or less, more preferably 2.8 or less, and more preferably 2.5 or less in terms of excellent resolution and adhesion. More preferably.
- the binder polymer may have a characteristic group in its molecule that is sensitive to light having a wavelength in the range of 340 nm to 430 nm, if necessary.
- the characteristic group include a group constituted by removing at least one hydrogen atom from a sensitizing dye described later.
- one type of binder polymer may be used alone, or two or more types of binder polymers may be used in any combination.
- the content of the component (A) in the photosensitive resin composition is 30 to 70 parts by mass in 100 parts by mass of the total amount of the components (A) and (B) in terms of excellent film formability, sensitivity and resolution.
- the mass is preferably 35 parts by mass, more preferably 35 parts by mass to 65 parts by mass, and particularly preferably 40 parts by mass to 60 parts by mass.
- the content is preferably 30 parts by mass or more, more preferably 35 parts by mass or more, and 40 parts by mass or more. Particularly preferred.
- the content is preferably 70 parts by mass or less, more preferably 65 parts by mass or less, and further preferably 60 parts by mass or less.
- the photopolymerizable compound as the component (B) has an ethyleneoxy group and a propyleneoxy group, the ethyleneoxy group has 1 to 20 structural units, and the propyleneoxy group has 2 to 7 structural units.
- at least one first bisphenol-type di (meth) acrylate (hereinafter also referred to as “specific polymerizable compound”) in which the total number of structural units of the ethyleneoxy group and the propyleneoxy group exceeds 10, is an essential component.
- the component (B) may further contain a photopolymerizable compound other than the first bisphenol di (meth) acrylate as necessary.
- the specific polymerizable compound has a propyleneoxy group and exhibits low swelling due to suppression of molecular motion of the crosslinked network after photocuring, it is considered that the formed resist pattern has excellent resolution. Furthermore, it is considered that the flexibility of the formed resist pattern is further improved by having an ethyleneoxy group which is a flexible partial structure.
- the total number of structural units of propyleneoxy groups in one molecule is 2-7.
- the number of structural units indicates the number of propyleneoxy groups added in the molecule. Therefore, an integer value is shown for a single molecule, but a rational number that is an average value is shown as an aggregate of a plurality of types of molecules.
- the total number of structural units of ethyleneoxy groups in one molecule is 1-20.
- the number of structural units indicates how much ethyleneoxy group is added in the molecule. Therefore, an integer value is shown for a single molecule, but a rational number that is an average value is shown as an aggregate of a plurality of types of molecules.
- the total number of structural units of propyleneoxy groups in the specific polymerizable compound is 2 or more and preferably 3 or more from the viewpoint of excellent resist resolution. Moreover, it is preferable that it is 5 or less from a developable viewpoint.
- the total number of structural units of the ethyleneoxy group in the specific polymerizable compound is preferably 4 or more, more preferably 6 or more, and still more preferably 8 or more from the viewpoint of excellent developability. . Moreover, it is preferable that it is 16 or less from a viewpoint of resolution, and it is more preferable that it is 14 or less.
- the specific polymerizable compound is preferably a compound represented by the following general formula (4a).
- m 1 + m 2 is 2 to 7 and n 1 + n 2 is 1 to 20.
- m 1 + m 2 + n 1 + n 2 exceeds 10.
- m 1 , m 2 , n 1 and n 2 represent the number of structural units. Therefore, an integer value is shown for a single molecule, and a rational number that is an average value is shown as an aggregate of a plurality of types of molecules. Hereinafter, the same applies to the number of structural units.
- Examples of commercially available compounds include 2,2-bis (4- (methacryloxide decaethoxytetrapropoxy) phenyl) propane (Hitachi Chemical Co., Ltd., “FA-3200MY”).
- Content of the said specific polymerizable compound in the said photosensitive resin composition is 100 mass of total amounts of (A) component and (B) component from a viewpoint of suppressing swelling by suppression of the molecular motion in a crosslinked network after photocuring.
- the amount is preferably 1 to 60 parts by mass, more preferably 5 to 50 parts by mass, and still more preferably 10 to 40 parts by mass.
- it is preferable that it is 30 mass parts or less, It is more preferable that it is 25 mass parts or less, It is still more preferable that it is 23 mass parts or less.
- the photosensitive resin composition can contain a photopolymerizable compound other than the specific polymerizable compound as component (B).
- a photopolymerizable compound other than the specific polymerizable compound as component (B).
- Other photopolymerizable compounds are not particularly limited as long as photopolymerization is possible.
- the other photopolymerizable compound is preferably a compound having an ethylenically unsaturated bond.
- the compound having an ethylenically unsaturated bond includes a compound having one ethylenically unsaturated bond in the molecule, a compound having two ethylenically unsaturated bonds in the molecule, and three ethylenically unsaturated bonds in the molecule. Examples thereof include the compounds described above.
- content of the said other photopolymerizable compound in (B) component is from a viewpoint which suppresses swelling physically by the bulkiness in a crosslinked network.
- the total amount of component (B) is preferably 2 to 60 parts by mass, more preferably 6 to 50 parts by mass, and 10 to 40 parts by mass. Is more preferable.
- the component (B) preferably contains at least one compound having two ethylenically unsaturated bonds in the molecule as the other photopolymerizable compound.
- the content is 100 parts by mass of the total amount of the component (A) and the component (B).
- the amount is preferably 5 to 60 parts by mass, more preferably 5 to 55 parts by mass, and still more preferably 10 to 50 parts by mass.
- Examples of compounds having two ethylenically unsaturated bonds in the molecule include bisphenol-type di (meth) acrylate compounds, hydrogenated bisphenol A di (meth) acrylate compounds different from the specific polymerizable compound, and urethane in the molecule.
- Examples include di (meth) acrylate compounds having a bond, polyalkylene glycol di (meth) acrylate having both (poly) ethyleneoxy group and (poly) propyleneoxy group in the molecule, and trimethylolpropane di (meth) acrylate. It is done.
- the above component (B) is a bisphenol-type di (meth) acrylate compound or a hydrogenated bisphenol A-based di (meth) acrylate that is different from the specific polymerizable compound from the viewpoint of improving resolution and release characteristics as other photopolymerizable compounds.
- At least a compound having two ethylenically unsaturated bonds in a molecule selected from the group consisting of a compound and a polyalkylene glycol di (meth) acrylate having a (poly) ethyleneoxy group and a (poly) propyleneoxy group in the molecule
- Examples of the bisphenol type di (meth) acrylate compound different from the specific polymerizable compound include compounds represented by the following general formula (4b).
- R 41 and R 42 each independently represent a hydrogen atom or a methyl group.
- XO each independently represent an ethylene group, indicating the (XO) m 1 and (XO) m 2, respectively (poly) ethyleneoxy group.
- m 1 and m 2 are the number of structural units of each structural unit, and each independently represents 0 to 40.
- m 1 and m 2 are independently 0 to 8, it is preferable to use a compound m 1 + m 2 is 8 or less, m 1 And m 2 are each independently 0 to 6, and it is more preferable to use a compound in which m 1 + m 2 is 6 or less.
- the lower limit of m 1 + m 2 is preferably 2 or more, more preferably 4 or more from the viewpoint of flexibility.
- the content thereof is a total amount of the component (A) and the component (B) 100.
- the amount in the part by mass is preferably 1 part by mass to 50 parts by mass, more preferably 5 parts by mass to 50 parts by mass, and still more preferably 10 parts by mass to 45 parts by mass.
- Examples of the hydrogenated bisphenol A-based di (meth) acrylate compound include 2,2-bis (4- (methacryloxypentaethoxy) cyclohexyl) propane.
- the photosensitive resin composition contains a hydrogenated bisphenol A di (meth) acrylate compound, the content thereof is from 1 part by weight to 50 parts in 100 parts by weight of the total amount of the components (A) and (B).
- the amount is preferably 5 parts by mass, and more preferably 5 to 40 parts by mass.
- the component (B) preferably contains at least one polyalkylene glycol di (meth) acrylate as another photopolymerizable compound from the viewpoint of improving the flexibility of the resist pattern.
- the photosensitive resin composition contains polyalkylene glycol di (meth) acrylate, the content thereof is 5 to 30 parts by mass in 100 parts by mass of the total amount of the components (A) and (B). It is preferably 10 to 25 parts by mass.
- the polyalkylene glycol di (meth) acrylate compound is preferably a polyalkylene glycol di (meth) acrylate having both a (poly) ethyleneoxy group and a (poly) propyleneoxy group in the molecule.
- the (poly) ethyleneoxy group and the (poly) propyleneoxy group may be successively present in blocks or randomly.
- the propyleneoxy group in the (poly) propyleneoxy group may be either an n-propyleneoxy group or an isopropyleneoxy group.
- the secondary carbon of the propylene group may be bonded to an oxygen atom, or the primary carbon may be bonded to an oxygen atom.
- Polyalkylene glycol di (meth) acrylate includes (poly) n-butyleneoxy group, (poly) isobutyleneoxy group, (poly) n-pentyleneoxy group, (poly) hexyleneoxy group, structural isomers thereof, etc. (Poly) alkyleneoxy group having about 4 to 6 carbon atoms.
- the component (B) may contain at least one photopolymerizable compound having three or more ethylenically unsaturated bonds in the molecule as another photopolymerizable compound.
- Examples of the compound having three or more ethylenically unsaturated bonds include trimethylolpropane tri (meth) acrylate, EO-modified trimethylolpropane tri (meth) acrylate (having an ethyleneoxy group having 1 to 5 structural units) , PO-modified trimethylolpropane tri (meth) acrylate, EO / PO-modified trimethylolpropane tri (meth) acrylate, tetramethylolmethanetri (meth) acrylate, tetramethylolmethanetetra (meth) acrylate, pentaerythritol tri (meth) acrylate And dipentaerythritol hexa (meth) acrylate. These can be used alone or in combination of two or more.
- tetramethylol methane triacrylate Shin Nakamura Chemical Co., Ltd., “A-TMM-3”, etc.
- EO Modified trimethylolpropane trimethacrylate Hitachi Chemical Co., Ltd., “TMPT21E”, “TMPT30E”, etc.
- pentaerythritol triacrylate Sartomer Co., Ltd., “SR444”, etc.
- dipentaerythritol hexaacrylate Shin Nakamura Chemical Co., Ltd.
- A-DPH ethoxylated pentaerythritol tetraacrylate
- the component (B) contains a photopolymerizable compound having three or more ethylenically unsaturated bonds in the molecule as the other photopolymerizable compound, the content thereof is resolution, adhesion, resist shape and after curing. From the viewpoint of improving the release property in a well-balanced manner, it is preferably 3 to 30 parts by mass, preferably 5 to 25 parts by mass, in 100 parts by mass of the total amount of component (A) and component (B). More preferred is 5 to 20 parts by mass.
- the component (B) is a molecule as another photopolymerizable compound from the standpoint of improving the resolution, adhesion, resist shape and release properties after curing in a well-balanced manner, or suppressing the occurrence of scum.
- a photopolymerizable compound having one ethylenically unsaturated bond may be contained therein.
- Examples of the photopolymerizable compound having one ethylenically unsaturated bond in the molecule include nonylphenoxypolyethyleneoxyacrylate, phthalic acid compounds, and (meth) acrylic acid alkyl esters.
- the content thereof is a total of 100 components (A) and (B).
- the amount in the mass part is preferably 1 part by mass to 20 parts by mass, more preferably 3 parts by mass to 15 parts by mass, and still more preferably 5 parts by mass to 12 parts by mass.
- the content of the entire component (B) in the photosensitive resin composition is preferably 30 parts by mass to 70 parts by mass with respect to 100 parts by mass of the total amount of the components (A) and (B), and 35 parts by mass. More preferably, the content is set to ⁇ 65 parts by mass, and particularly preferably 35 parts to 50 parts by mass.
- the content is 30 parts by mass or more, sufficient sensitivity of the photosensitive resin composition and resolution of the resist pattern to be formed tend to be easily obtained.
- it is 70 parts by mass or less a film (photosensitive resin composition layer) tends to be easily formed, and a good resist shape tends to be easily obtained.
- Component (C) Photopolymerization initiator
- the photosensitive resin composition contains at least one photopolymerization initiator as the component (C).
- photopolymerization initiators include benzophenone, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1,2-methyl-1- [4- (methylthio) phenyl] -2- Aromatic ketones such as morpholino-propanone-1; quinones such as alkyl anthraquinones; benzoin ether compounds such as benzoin alkyl ether; benzoin compounds such as benzoin and alkylbenzoin; benzyl derivatives such as benzyldimethyl ketal; 2- (2-chlorophenyl) ) -4,5-diphenylimidazole dimer, 2,4,5-triarylimidazole dimer such as 2- (2-fluorophenyl) -4,5-diphenylimidazole dimer; 9-phenylacridine, Induction of acridine such as 1,7- (9,9'-acridinyl) heptane A conductor
- the component (C) preferably contains at least one 2,4,5-triarylimidazole dimer from the viewpoint of improving the sensitivity of the photosensitive resin composition and the adhesion of the resist pattern to be formed, More preferably, it contains 2- (2-chlorophenyl) -4,5-diphenylimidazole dimer.
- the 2,4,5-triarylimidazole dimer may be symmetric or asymmetric in structure.
- the content of the component (C) in the photosensitive resin composition is preferably 0.1 parts by mass to 10 parts by mass with respect to 100 parts by mass of the total amount of the components (A) and (B). Part to 7 parts by weight is more preferable, 2 parts to 6 parts by weight is further preferable, and 3 parts to 5 parts by weight is particularly preferable.
- the content of the component (C) is 0.1 parts by mass or more, good sensitivity, resolution, or adhesion tends to be obtained, and when it is 10 parts by mass or less, a good resist shape is easily obtained. Tend.
- the photosensitive resin composition of the present embodiment preferably contains at least one sensitizing dye selected from the group consisting of a pyrazoline derivative and a bisalkoxyanthracene as the (D) component. .
- the sensitizing dye which is a component can be used individually by 1 type or in combination of 2 or more types.
- the component (D) is selected from the group consisting of a pyrazoline derivative and a bisalkoxyanthracene from the viewpoint of sensitivity and adhesion. It is preferable to contain at least one sensitizing dye.
- the pyrazoline compound is preferably at least one selected from the group consisting of a compound represented by the following general formula (8) and a compound represented by the general formula (9).
- R 9 to R 11 are each independently a linear or branched alkyl group having 1 to 12 carbon atoms, or a linear or branched alkoxy group having 1 to 10 carbon atoms. Represents an aryl group having 6 to 8 carbon atoms or a halogen atom.
- A, b and c each independently represent an integer of 0 to 5, and the sum of a, b and c is 1 to 6. When the sum of a, b and c is 2 or more, a plurality of R 9 to R 11 may be the same as or different from each other.
- R 9 to R 11 is a linear or branched alkyl group having 1 to 12 carbon atoms, or a linear or branched group having 1 to 10 carbon atoms. It is preferably a linear alkoxy group having 1 to 4 carbon atoms, a linear or branched alkyl group having 1 to 4 carbon atoms, a linear or branched alkoxy group having 1 to 4 carbon atoms, or a phenyl group. More preferred is a tert-butyl group, an isopropyl group, a methoxy group, or an ethoxy group.
- the pyrazoline compound represented by the general formula (8) can be used without particular limitation. Specific examples thereof include 1-phenyl-3- (4-isopropylstyryl) -5- (4-isopropylphenyl) -Pyrazoline, 1-phenyl-3- (4-tert-butyl-styryl) -5- (4-tert-butylphenyl) -pyrazoline, 1-phenyl-3- (4-methoxystyryl) -5- (4- Methoxyphenyl) -pyrazoline, 1-phenyl-3- (3,5-dimethoxystyryl) -5- (3,5-dimethoxyphenyl) -pyrazoline, 1-phenyl-3- (3,4-dimethoxystyryl) -5 -(3,4-Dimethoxyphenyl) -pyrazoline, 1-phenyl-3- (2,6-dimethoxystyryl) -5- (2,6-dimethoxyphenyl)
- R 12 to R 14 are each independently a linear or branched alkyl group having 1 to 12 carbon atoms, or a linear or branched alkoxy group having 1 to 10 carbon atoms. Represents an aryl group having 6 to 8 carbon atoms or a halogen atom.
- D, e and f each independently represent an integer of 0 to 5, and the sum of d, e and f is 1 to 6. When the sum of d, e, and f is 2 or more, a plurality of R 12 to R 14 may be the same as or different from each other.
- R 12 to R 14 is a linear or branched alkyl group having 1 to 12 carbon atoms or a linear or branched group having 1 to 10 carbon atoms.
- the pyrazoline compound represented by the general formula (9) can be used without particular limitation.
- examples thereof include 1-phenyl-3,5-bis (4-tert-butylphenyl) -pyrazoline, 1-phenyl-3,5-bis (4-methoxyphenyl) -pyrazoline, 1-phenyl-3- (4-methoxyphenyl) -5- (4-tert-butylphenyl) -pyrazoline, 1-phenyl-3- (4-tert-butylphenyl) -5- (4-methoxyphenyl) -pyrazoline, 1-phenyl-3- (4-isopropylphenyl) -5- (4-tert-butylphenyl) -pyrazoline, 1-phenyl- 3- (4-tert-butylphenyl) -5- (4-isopropylphenyl) -pyrazoline, 1-phenyl-3- (4-methoxyphenyl) 5- (4-Isopropylphenyl) -
- the bisalkoxyanthracene compound preferably includes a compound represented by the following general formula (10).
- R 15 and R 16 are each independently an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 5 to 12 carbon atoms, a phenyl group, a benzyl group, or 2 carbon atoms. -12 alkanoyl or benzoyl groups.
- R 17 to R 24 are each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, a halogen atom, a cyano group, a carboxyl group, a phenyl group, an alkoxycarbonyl group having 2 to 6 carbon atoms, or the number of carbon atoms 6-8 aryloxy groups or benzoyl groups.
- R 15 and R 16 in the general formula (10) include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, and a hexyl group.
- Examples of the combination of R 15 and R 16 include a combination of ethyl groups, a combination of propyl groups, and a combination of butyl groups.
- R 17 to R 24 examples include a hydrogen atom, a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a propenyl group, a butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, and an ethoxycarbonyl group. , Hydroxyethoxycarbonyl group, and phenoxy group.
- R 17 to R 24 are all hydrogen atoms; any one of them is a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a propenyl group, a butenyl group, a pentenyl group, A xenyl group, a heptenyl group, an ethoxycarbonyl group, a hydroxyethoxycarbonyl group, or a phenoxy group, all of which are hydrogen atoms; any two of them are independently a methyl group, an ethyl group, a propyl group, A group selected from the group consisting of a butyl group, a pentyl group, a hexyl group, a propenyl group, a butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an ethoxy
- R 15 and R 16 are preferably each independently an alkyl group having 1 to 4 carbon atoms.
- R 17 , R 18 , R 19 , R 20 , R 21 , R 22 , R 23 , and R 24 are each preferably a hydrogen atom.
- Specific examples of the compound represented by the general formula (10) include 9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 9,10-dibutoxyanthracene and the like.
- the content of the component (D) in the photosensitive resin composition is preferably 0.01 to 10 parts by mass with respect to 100 parts by mass as the total of the components (A) and (B). More preferably, the content is from 05 parts by mass to 5 parts by mass, and even more preferably from 0.1 parts by mass to 3 parts by mass. When the content is 0.01 parts by mass or more, sensitivity and resolution tend to be easily obtained. When the content is 10 parts by mass or less, a sufficiently good resist shape tends to be easily obtained.
- (E) component amine compound It is preferable that the said photosensitive resin composition contains at least 1 sort (s) of an amine compound as (E) component.
- the amine compound include bis [4- (dimethylamino) phenyl] methane, bis [4- (diethylamino) phenyl] methane, and leucocrystal violet. These can be used alone or in combination of two or more.
- the content is preferably 0.01 parts by mass to 10 parts by mass with respect to 100 parts by mass of the total amount of the components (A) and (B). 0.05 to 5 parts by mass, more preferably 0.1 to 2 parts by mass. If this content is 0.01 parts by mass or more, sufficient sensitivity tends to be obtained. If the amount is 10 parts by mass or less, after the film is formed, precipitation of excess (E) component as foreign matter tends to be suppressed.
- the above-mentioned photosensitive resin composition may contain, if necessary, a photopolymerizable compound (such as an oxetane compound) having at least one cationically polymerizable cyclic ether group in the molecule, a cationic polymerization initiator, malachite green, Victoria pure blue, Dyes such as brilliant green and methyl violet, photochromic agents such as tribromophenylsulfone, diphenylamine, benzylamine, triphenylamine, diethylaniline and 2-chloroaniline, thermochromic inhibitors, and plasticizers such as 4-toluenesulfonamide , Pigments, fillers, antifoaming agents, flame retardants, stabilizers, adhesion-imparting agents, leveling agents, peeling accelerators, antioxidants, perfumes, imaging agents, thermal crosslinking agents, and the like.
- a photopolymerizable compound such as an oxetane compound having at least one
- these contents are each 100 parts by mass of the total amount of the component (A) and the component (B). It is preferably about 0.01 to 20 parts by mass.
- the photosensitive resin composition of this embodiment may further contain at least one organic solvent.
- organic solvents include alcohol solvents such as methanol and ethanol; ketone solvents such as acetone and methyl ethyl ketone; glycol ether solvents such as methyl cellosolve, ethyl cellosolve and propylene glycol monomethyl ether; aromatic hydrocarbon solvents such as toluene; And aprotic polar solvents such as N-dimethylformamide. These may be used alone or in combination of two or more. Content of the organic solvent contained in the said photosensitive resin composition can be suitably selected according to the objective etc. For example, it can be used as a solution having a solid content of about 30% by mass to 60% by mass.
- the photosensitive resin composition containing the organic solvent is also referred to as “coating liquid”.
- the photosensitive resin composition layer which is a coating film of the photosensitive resin composition, can be formed by applying the coating liquid on the surface of a support film, a metal plate, etc., which will be described later, and drying. It does not restrict
- the metal plate include metal plates such as copper, copper-based alloys, iron-based alloys such as nickel, chromium, iron, and stainless steel.
- metal plates such as copper, a copper-type alloy, and an iron-type alloy, are mentioned.
- the thickness of the photosensitive resin composition layer to be formed is not particularly limited and can be appropriately selected depending on the application.
- the thickness of the photosensitive resin composition layer is preferably, for example, about 1 ⁇ m to 100 ⁇ m after drying.
- the surface of the photosensitive resin composition layer opposite to the metal plate may be covered with a protective film.
- the protective film include polymer films such as polyethylene and polypropylene.
- the photosensitive resin composition to the photosensitive element.
- the photosensitive resin composition of another embodiment of this invention can be used for the formation method of the resist pattern mentioned later. That is, another embodiment of the present invention comprises (A) component: a structural unit derived from (meth) acrylic acid, a structural unit derived from styrene or ⁇ -methylstyrene, and a structural unit derived from benzyl (meth) acrylate.
- the photosensitive element of this invention is equipped with a support film and the photosensitive resin composition layer which is a coating film of the said photosensitive resin composition provided on this support film.
- the coating film is one in which the photosensitive resin composition is in an uncured state.
- the said photosensitive element may have other layers, such as a protective film, as needed.
- FIG. 1 shows an embodiment of the photosensitive element.
- the support film 2, the photosensitive resin composition layer 3 which is a coating film of the said photosensitive resin composition, and the protective film 4 are laminated
- the photosensitive element 1 can be obtained as follows, for example. On the support film 2, the coating liquid which is the said photosensitive resin composition containing an organic solvent is apply
- the photosensitive element 1 does not necessarily have to include the protective film 4.
- a polymer film having heat resistance and solvent resistance such as polyester such as polyethylene terephthalate, polypropylene, and polyethylene can be used.
- the thickness of the support film is preferably 1 ⁇ m to 100 ⁇ m, more preferably 5 ⁇ m to 50 ⁇ m, and even more preferably 5 ⁇ m to 30 ⁇ m.
- the support film can be prevented from being broken when the support film is peeled off.
- the fall of the resolution is suppressed because it is 100 micrometers or less.
- the protective film preferably has a smaller adhesive force to the photosensitive resin composition layer than that of the support film to the photosensitive resin composition layer.
- a low fish eye film is preferred.
- fish eye means that when a material is heat-melted, kneaded, extruded, biaxially stretched, casting method, etc., foreign materials, undissolved materials, oxidatively deteriorated materials, etc. are present in the film. It means what was taken in. That is, “low fish eye” means that the above-mentioned foreign matter or the like in the film is small.
- a polymer film having heat resistance and solvent resistance such as polyester such as polyethylene terephthalate, polyolefin such as polypropylene and polyethylene
- polyester such as polyethylene terephthalate
- polyolefin such as polypropylene and polyethylene
- commercially available products include polypropylene films such as Alfane MA-410 and E-200 from Oji Paper Co., Ltd., Shin-Etsu Film Co., Ltd., and PS series polyethylene terephthalate films such as PS-25 from Teijin Limited. It is done.
- the protective film 4 may be the same as the support film 2.
- the thickness of the protective film is preferably 1 ⁇ m to 100 ⁇ m, more preferably 5 ⁇ m to 50 ⁇ m, still more preferably 5 ⁇ m to 30 ⁇ m, and particularly preferably 15 ⁇ m to 30 ⁇ m.
- the thickness of the protective film is 1 ⁇ m or more, the protective film can be prevented from being broken when the photosensitive resin composition layer and the support film are laminated on the substrate while peeling off the protective film.
- it is 100 ⁇ m or less, it is excellent in handleability and inexpensiveness.
- the photosensitive element of the present embodiment can be manufactured as follows, for example. That is, the photosensitive element comprises a step of preparing a coating solution prepared by dissolving the component (A): binder polymer, the component (B): a photopolymerizable compound, and the photopolymerization initiator (C) in the organic solvent.
- the coating liquid is coated on a support (support film) to form a coating layer, and the coating layer is dried to form a photosensitive resin composition layer. be able to.
- photosensitive resin composition solution onto the support film can be performed by a known method such as roll coating, comma coating, gravure coating, air knife coating, die coating, or bar coating.
- the drying conditions for the coating layer are not particularly limited as long as at least a part of the organic solvent can be removed from the coating layer. It is preferable to carry out at 70 to 150 ° C. for about 5 to 30 minutes. After drying, the amount of the remaining organic solvent in the photosensitive resin composition layer is preferably 2% by mass or less from the viewpoint of preventing diffusion of the organic solvent in the subsequent step.
- the thickness of the photosensitive resin composition layer in the photosensitive element can be appropriately selected depending on the application.
- the thickness after drying is preferably 1 ⁇ m to 100 ⁇ m, more preferably 1 ⁇ m to 50 ⁇ m, and even more preferably 5 ⁇ m to 40 ⁇ m. Industrial coating becomes easy because the thickness of the photosensitive resin composition layer is 1 ⁇ m or more. When it is 100 ⁇ m or less, adhesion and resolution tend to be sufficiently obtained.
- the transmittance of the photosensitive resin composition layer with respect to ultraviolet rays is preferably 5% to 75%, more preferably 10% to 65%, and more preferably 15% to ultraviolet rays in the wavelength range of 350 nm to 420 nm. More preferably, it is -55%.
- the transmittance can be measured with a UV spectrometer. As the UV spectrometer, a 228A type W beam spectrophotometer (Hitachi Ltd.) can be used.
- the photosensitive element may further include an intermediate layer such as a cushion layer, an adhesive layer, a light absorption layer, and a gas barrier layer.
- an intermediate layer such as a cushion layer, an adhesive layer, a light absorption layer, and a gas barrier layer.
- these intermediate layers for example, the intermediate layers described in JP-A-2006-098982 can also be applied in the present invention.
- the photosensitive element of this embodiment can be suitably used, for example, for a resist pattern forming method described later.
- a resist pattern can be formed using the photosensitive resin composition.
- the resist pattern forming method of one embodiment of the present invention includes: (i) a step of forming a photosensitive resin composition layer, which is a coating film of the photosensitive resin composition, on a substrate (photosensitive layer forming step); ii) a step (exposure step) of irradiating at least a part of the photosensitive resin composition layer with actinic rays; and (iii) a region other than the region irradiated with the actinic rays of the photosensitive resin composition layer. Removing from the substrate (developing step).
- the method for forming the resist pattern may further include other steps as necessary.
- the photosensitive resin composition layer which is a coating film of the said photosensitive resin composition is formed on a board
- a substrate circuit forming substrate
- a conductor layer formed on the insulating layer can be used.
- the photosensitive resin composition layer is formed on the substrate after the protective film is removed and then the photosensitive resin composition layer of the photosensitive element. This is performed by pressure-bonding to the substrate while heating. Thereby, the laminated body by which the board
- the photosensitive layer forming step is preferably performed under reduced pressure from the viewpoint of adhesion and followability.
- Heating at least one of the photosensitive resin composition layer and the substrate at the time of pressure bonding is preferably performed at a temperature of 70 ° C. to 130 ° C., and about 0.1 MPa to 1.0 MPa (1 kgf / cm 2 to 10 kgf / cm 2). It is preferable to press-fit with a pressure of about). These conditions are not particularly limited, and are appropriately selected as necessary. If the photosensitive resin composition layer is heated to 70 ° C. to 130 ° C., it is not necessary to pre-heat the substrate in advance. Adhesion and follow-up can be further improved by pre-heat treatment of the circuit forming substrate.
- the exposure method there is a method (mask exposure method) in which an actinic ray is irradiated in an image form through a negative or positive mask pattern called an artwork.
- a method of irradiating actinic rays in an image form by a direct drawing exposure method such as an LDI (Laser Direct Imaging) exposure method or a DLP (Digital Light Processing) exposure method may be employed.
- LDI Laser Direct Imaging
- DLP Digital Light Processing
- the wavelength of the actinic ray is preferably in the range of 340 nm to 430 nm, and more preferably in the range of 350 nm to 420 nm, from the viewpoint of obtaining the effects of the present invention more reliably.
- development step the uncured portion of the photosensitive resin composition layer is removed from the circuit-forming substrate by a development process, whereby the photosensitive resin composition layer is a cured product that is photocured. A resist pattern is formed on the substrate.
- development processing includes wet development and dry development, and wet development is widely used.
- development is performed by a known development method using a developer corresponding to the photosensitive resin composition.
- development methods include methods using dipping, paddle, spraying, brushing, slapping, scrubbing, rocking immersion, etc. From the viewpoint of improving resolution, the high pressure spraying method is most suitable. . You may develop by combining these 2 or more types of methods.
- the developer is appropriately selected according to the configuration of the photosensitive resin composition.
- the developer include an alkaline aqueous solution, an aqueous developer, an organic solvent developer, and the like.
- the alkaline aqueous solution When used as a developer, it is safe and stable and has good operability.
- Examples of the base of the alkaline aqueous solution include alkali hydroxides such as lithium, sodium, or potassium hydroxide; alkali carbonates such as lithium, sodium, potassium, or ammonium carbonate or bicarbonate; potassium phosphate, sodium phosphate, and the like.
- Alkali metal phosphates; alkali metal pyrophosphates such as sodium pyrophosphate and potassium pyrophosphate are used.
- the aqueous developer is, for example, a developer containing water or an alkaline aqueous solution and one or more organic solvents.
- the base of the alkaline aqueous solution in addition to the substances described above, borax, sodium metasilicate, tetramethylammonium hydroxide, ethanolamine, ethylenediamine, diethylenetriamine, 2-amino-2-hydroxymethyl-1 1,3-propanediol, 1,3-diamino-2-propanol, morpholine and the like.
- the pH of the aqueous developer is preferably as low as possible within the range where development is sufficiently performed, preferably pH 8 to 12, and more preferably pH 9 to 10.
- organic solvents used in the aqueous developer include acetone, ethyl acetate, alkoxyethanol having an alkoxy group having 1 to 4 carbon atoms, ethyl alcohol, isopropyl alcohol, butyl alcohol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol And monobutyl ether. These are used individually by 1 type or in combination of 2 or more types.
- the content of the organic solvent in the aqueous developer is usually preferably 2% by mass to 90% by mass.
- the temperature can be adjusted according to alkali developability.
- a small amount of a surfactant, an antifoaming agent or the like can be mixed in the aqueous developer.
- the resist pattern is formed by heating at about 60 ° C. to 250 ° C. or exposing at about 0.2 J / cm 2 to 10 J / cm 2 as necessary.
- the method may further include a step of further curing.
- the method for producing a printed wiring board according to the present invention includes a resist pattern formed on a conductive layer of a substrate (circuit forming substrate) including an insulating layer and a conductive layer formed on the insulating layer by the above-described resist pattern forming method.
- the manufacturing method of a printed wiring board may include other processes, such as a resist removal process, as needed. Etching or plating of the substrate is performed on the conductor layer of the substrate using the formed resist pattern as a mask.
- the conductor layer of the circuit forming substrate that is not covered with the cured resist is removed by etching to form a conductor pattern.
- the etching method is appropriately selected according to the conductor layer to be removed.
- the etching solution include cupric chloride solution, ferric chloride solution, alkaline etching solution, hydrogen peroxide etching solution and the like. Among these, it is preferable to use a ferric chloride solution because it has a good etch factor.
- the plating process copper and solder are plated on the conductor layer of the circuit forming substrate that is not covered with the cured resist, using the resist pattern (cured resist) formed on the substrate as a mask. After the plating treatment, the hardened resist is removed, and the conductor layer covered with the hardened resist is etched to form a conductor pattern.
- the method of plating treatment may be electrolytic plating treatment or electroless plating treatment.
- Plating treatment includes copper plating such as copper sulfate plating, copper pyrophosphate plating, solder plating such as high-throw solder plating, watt bath (nickel sulfate-nickel chloride) plating, nickel plating such as nickel sulfamate, hard gold plating, soft Examples thereof include gold plating such as gold plating.
- the resist pattern on the substrate is removed (peeled).
- the resist pattern can be removed using, for example, a stronger alkaline aqueous solution than the alkaline aqueous solution used in the development step.
- a stronger alkaline aqueous solution a 1% by mass to 10% by mass sodium hydroxide aqueous solution, a 1% by mass to 10% by mass potassium hydroxide aqueous solution, or the like is used.
- a 1% by mass to 10% by mass aqueous sodium hydroxide solution or an aqueous potassium hydroxide solution is preferably used, and a 1% by mass to 5% by mass aqueous sodium hydroxide solution or an aqueous potassium hydroxide solution is more preferably used.
- Examples of the resist pattern peeling method include an immersion method and a spray method, and these may be used alone or in combination.
- a desired printed wiring board can be manufactured by further removing the conductor layer covered with the cured resist by the etching treatment and forming the conductor pattern.
- the etching method is appropriately selected according to the conductor layer to be removed. For example, the above-described etching solution can be applied.
- the printed wiring board manufacturing method of the present invention can be applied not only to a single-layer printed wiring board but also to a multilayer printed wiring board, and also to a printed wiring board having a small-diameter through hole. .
- the photosensitive resin composition of one embodiment of the present invention can be suitably used for the production of a wiring board. That is, one of the preferred embodiments of the present invention is derived from the component (A): a structural unit derived from (meth) acrylic acid, a structural unit derived from styrene or ⁇ -methylstyrene, and benzyl (meth) acrylate.
- a photopolymerizable compound comprising a first bisphenol-type di (meth) acrylate having a total number of structural units of the ethyleneoxy group and the propyleneoxy group of more than 10, and a component (C): a photopolymerization initiator And an application of the photosensitive resin composition containing the composition to the production of a printed wiring board.
- a more preferred embodiment is application of the photosensitive resin composition to the production of a high-density package substrate, and application of the photosensitive resin composition to a semi-additive construction method.
- an example of the manufacturing process of the wiring board by a semi-additive construction method is demonstrated, referring drawings.
- a substrate (circuit forming substrate) in which the conductor layer 10 is formed on the insulating layer 15 is prepared.
- the conductor layer 10 is, for example, a metal copper layer.
- the photosensitive resin composition layer 32 is formed on the conductor layer 10 of the substrate by the photosensitive layer forming step.
- the mask 20 is arrange
- the resist pattern 30 which is a photocuring part is formed on a board
- a plating layer 42 is formed on the conductor layer 10 by plating using the resist pattern 30 that is a photocured portion as a mask.
- FIG. 2F after the resist pattern 30 which is a photocuring portion is peeled off with a strong alkaline aqueous solution, a part of the plating layer 42 and the conductor layer 10 masked by the resist pattern 30 are removed by an etching process.
- the circuit pattern 40 is formed.
- 2A to 2F the method of forming the resist pattern 30 using the mask 20 has been described. However, the resist pattern 30 may be formed by direct drawing exposure without using the mask 20.
- Examples 1 to 7 and Comparative Examples 1 to 5 Preparation of solution of photosensitive resin composition
- the components (A) to (E) and the dyes shown in Tables 2 and 3 were prepared.
- the blending amount of the component (A) shown in Tables 2 and 3 is the mass (solid content) of the nonvolatile content. Details of each component shown in Tables 2 and 3 are as follows. In Tables 2 and 3, “-” means not blended.
- Binder polymer [synthesis of binder polymer (A-1)] A polymerizable monomer (monomer) of 90 g of methacrylic acid, 6 g of methyl methacrylate, 150 g of styrene and 54 g of benzyl methacrylate (mass ratio 30/2/50/18) and 1.5 g of azobisisobutyronitrile. The solution obtained by mixing was designated as “Solution a”.
- Solution b A solution obtained by dissolving 0.5 g of azobisisobutyronitrile in 100 g of a mixed solution (mass ratio 3: 2) of 60 g of methyl cellosolve and 40 g of toluene was designated as “Solution b”.
- a flask equipped with a stirrer, reflux condenser, thermometer, dropping funnel and nitrogen gas introduction tube was charged with 300 g of a mixture of 180 g of methyl cellosolve and 120 g of toluene (mass ratio 3: 2), and nitrogen gas was introduced into the flask.
- the mixture was heated with stirring while being blown, and the temperature was raised to 80 ° C.
- the solution a was added dropwise to the mixed solution in the flask over 4 hours, and then kept at 80 ° C. for 2 hours with stirring.
- the solution b was added dropwise to the solution in the flask over 10 minutes, and then the solution in the flask was kept at 80 ° C. for 3 hours while stirring. Further, the temperature of the solution in the flask was raised to 90 ° C. over 30 minutes, kept at 90 ° C. for 2 hours, and then cooled to obtain a binder polymer (A-1) solution.
- the nonvolatile content (solid content) of the binder polymer (A-1) was 47.4% by mass, the weight average molecular weight was 23000, the acid value was 196 mgKOH / g, and the dispersity was 2.7.
- the weight average molecular weight was measured by gel permeation chromatography (GPC) and was derived by conversion using a standard polystyrene calibration curve.
- GPC gel permeation chromatography
- Binder Polymer (A-2) 90 g of methacrylic acid which is a polymerizable monomer (monomer), 6 g of methyl methacrylate, 150 g of styrene and 54 g of benzyl methacrylate (mass ratio 30/2/50/18) and 0.72 g of azobisisobutyronitrile.
- the solution obtained by mixing was designated as “Solution a ′”.
- a flask equipped with a stirrer, reflux condenser, thermometer, dropping funnel and nitrogen gas introduction tube was charged with 300 g of a mixture of 180 g of methyl cellosolve and 120 g of toluene (mass ratio 3: 2), and nitrogen gas was introduced into the flask.
- the mixture was heated with stirring while being blown, and the temperature was raised to 80 ° C.
- the solution a ′ was added dropwise to the mixed solution in the flask over 4 hours, and then kept at 80 ° C. for 2 hours with stirring.
- the solution b was added dropwise to the solution in the flask over 10 minutes, and then the solution in the flask was kept at 80 ° C. for 3 hours while stirring. Further, the temperature of the solution in the flask was raised to 90 ° C. over 30 minutes, kept at 90 ° C. for 2 hours, and then cooled to obtain a binder polymer (A-2) solution.
- Binder Polymers (A-3) to (A-4) As the polymerizable monomer (monomer), the binder polymer (A-3) was obtained in the same manner as the solution of the binder polymer (A-1) except that the materials shown in Table 1 were used at the mass ratio shown in the same table. ) To (A-4) were obtained.
- Table 1 shows the mass ratio (%), acid value, weight average molecular weight and dispersity of the polymerizable monomers (monomers) for the binder polymers (A-1) to (A-4).
- “-” means not blended.
- the photosensitive resin composition solution obtained above was coated on a 16 ⁇ m thick polyethylene terephthalate film (Toray Industries, Inc., “FB-40”), and a hot air convection dryer at 70 ° C. and 110 ° C. Then, a photosensitive resin composition layer having a dried film thickness of 25 ⁇ m was formed. A protective film (Oji Paper Co., Ltd., “E-200K”) is bonded onto the photosensitive resin composition layer, and a polyethylene terephthalate film (supporting film), the photosensitive resin composition layer, and the protective film are sequentially formed. Each laminated photosensitive element was obtained.
- a copper-clad laminate (Hitachi Chemical Co., Ltd., “MCL-E-679F”) (hereinafter referred to as “substrate”) (hereinafter referred to as “substrate”) composed of a glass epoxy material and copper foil (thickness 16 ⁇ m) formed on both sides thereof.
- substrate composed of a glass epoxy material and copper foil (thickness 16 ⁇ m) formed on both sides thereof.
- a photosensitive layer was formed (laminated) on the copper surface of the substrate using the photosensitive elements according to Examples 1 to 7 and Comparative Examples 1 to 5, respectively.
- Lamination is performed under conditions of a temperature of 120 ° C. and a lamination pressure of 4 kgf / cm 2 (0.4 MPa) so that the photosensitive resin composition layer of each photosensitive element is in close contact with the copper surface of the substrate while removing the protective film. Went under.
- the obtained laminated substrate was allowed to cool to 23 ° C.
- a density step of 0.00 to 2.00, a density step of 0.05, a tablet size of 20 mm ⁇ 187 mm, and a size of each step of 41 mm steps of 3 mm ⁇ 12 mm A photo tool with a tablet was placed.
- a direct drawing exposure machine (Hitachi Via Mechanics Co., Ltd., “DE-1UH”) using a blue-violet laser diode with a wavelength of 405 nm as a light source, a photo tool and polyethylene with an energy amount (exposure amount) of 100 mJ / cm 2
- the photosensitive resin composition layer was exposed through a terephthalate film.
- the illuminance was measured using an ultraviolet illuminometer (USHIO Inc., “UIT-150”) to which a 405 nm probe was applied.
- the flexibility of the resist pattern was evaluated as follows.
- An FPC (Flexible Printed Circuit) substrate (Nikkan Kogyo Co., Ltd., “F-30VC1”, substrate thickness: 25 ⁇ m, copper thickness: 18 ⁇ m) was heated to 80 ° C., and Examples 1 to 7 and comparison were made on the copper surface.
- the FPC substrate on which the photosensitive resin composition layer and the support were laminated was used as a test piece for evaluating flexibility.
- a direct drawing exposure machine (Hitachi Via Mechanics Co., Ltd., “DE-1UH”) using a 405 nm blue-violet laser diode as a light source was used, and the number of remaining step steps after development of the 41-step tablet.
- the photosensitive resin composition layer was photocured by exposure with an energy amount of 16 steps. Thereafter, the support film was peeled and developed to obtain a flexibility evaluation substrate in which a resist pattern was laminated on an FPC substrate.
- Flexibility was evaluated by a mandrel test, and the substrate for flexibility evaluation was cut into strips having a width of 2 cm and a length of 10 cm, and rubbed against a cylindrical rod at 180 ° for 5 reciprocations. Thereafter, the minimum cylindrical diameter (mm) without peeling between the FPC substrate and the resist pattern was determined. The smaller the diameter of the cylinder, the better the flexibility. The results are shown in Tables 4 and 5.
- ⁇ Development evaluation> The developability of the photosensitive resin composition layer was evaluated by measuring the minimum development time (seconds) as follows.
- the laminated substrate was cut into a 5 cm square to obtain a laminated substrate for evaluation.
- the minimum development time (seconds) required for the photosensitive resin composition layer not to remain on the substrate was measured.
- a binder polymer having a structural unit derived from (meth) acrylic acid, a structural unit derived from styrene or ⁇ -methylstyrene, and a structural unit derived from benzyl (meth) acrylate;
- An ethyleneoxy group and a propyleneoxy group the ethyleneoxy group has 1 to 20 structural units, the propyleneoxy group has 2 to 7 structural units, the ethyleneoxy group and the propyleneoxy group
- a photopolymerizable compound containing a first bisphenol-type di (meth) acrylate having a total number of structural units exceeding 10;
- a photopolymerization initiator Containing a photosensitive resin composition.
- the photosensitive resin composition according to ⁇ 1> further containing at least one sensitizing dye selected from the group consisting of a pyrazoline derivative and a bisalkoxyanthracene.
- the photosensitive resin composition as described in ⁇ 1> or ⁇ 2> containing.
- a method for producing a printed wiring board including a step of etching or plating a substrate on which a resist pattern
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Abstract
Description
本発明の一実施形態の感光性樹脂組成物は、(A)成分:(メタ)アクリル酸に由来する構造単位、スチレンに由来する構造単位及び(メタ)アクリル酸ベンジルに由来する構造単位を有するバインダーポリマーと、(B)成分:エチレンオキシ基及びプロピレンオキシ基を有し、上記エチレンオキシ基の構造単位数が1~20であり、上記プロピレンオキシ基の構造単位数が2~7であり、上記エチレンオキシ基及び上記プロピレンオキシ基の総構造単位数が10を超える第一のビスフェノール型ジ(メタ)アクリレートを含む光重合性化合物と、(C)成分:光重合開始剤と、を含有する。上記感光性樹脂組成物は、必要に応じて更にその他の成分を含んでいてもよい。
上記感光性樹脂組成物は、(A)成分として、下記一般式(1)で表される(メタ)アクリル酸に由来する構造単位、下記一般式(2)で表されるスチレン又はα-メチルスチレンに由来する構造単位、及び下記一般式(3)で表される(メタ)アクリル酸ベンジルに由来する構造単位を有するバインダーポリマーの少なくとも1種を含む。
次に、光重合性化合物(以下「(B)成分」ともいう。)について説明する。(B)成分である光重合性化合物は、エチレンオキシ基及びプロピレンオキシ基を有し、上記エチレンオキシ基の構造単位数が1~20であり、上記プロピレンオキシ基の構造単位数が2~7であり、上記エチレンオキシ基及び上記プロピレンオキシ基の総構造単位数が10を超える第一のビスフェノール型ジ(メタ)アクリレート(以下、「特定重合性化合物」ともいう)の少なくとも1種を必須成分として含む。(B)成分は、必要に応じて第一のビスフェノール型ジ(メタ)アクリレート以外の光重合性化合物を更に含んでいてもよい。
上記感光性樹脂組成物は、(C)成分として光重合開始剤の少なくとも1種を含む。(C)成分である光重合開始剤としては、特に制限はなく、通常用いられる光重合開始剤から適宜選択することができる。光重合開始剤の例としては、ベンゾフェノン、2-ベンジル-2-ジメチルアミノ-1-(4-モルホリノフェニル)-ブタノン-1,2-メチル-1-[4-(メチルチオ)フェニル]-2-モルホリノ-プロパノン-1等の芳香族ケトン;アルキルアントラキノン等のキノン類;ベンゾインアルキルエーテル等のベンゾインエーテル化合物;ベンゾイン、アルキルベンゾイン等のベンゾイン化合物;ベンジルジメチルケタール等のベンジル誘導体;2-(2-クロロフェニル)-4,5-ジフェニルイミダゾール二量体、2-(2-フルオロフェニル)-4,5-ジフェニルイミダゾール二量体等の2,4,5-トリアリールイミダゾール二量体;9-フェニルアクリジン、1,7-(9,9’-アクリジニル)ヘプタン等のアクリジン誘導体が挙げられる。これらは1種単独で又は2種類以上を組み合わせて用いることができる。
本実施形態の感光性樹脂組成物は、(D)成分として、ピラゾリン誘導体及びビスアルコキシアントラセンからなる群より選ばれる少なくとも1種の増感色素を含有することが好ましい。(D)成分である増感色素は1種単独で、又は2種以上を組み合わせて用いることができる。
上記感光性樹脂組成物は、(E)成分としてアミン系化合物の少なくとも1種を含むことが好ましい。アミン系化合物の例としては、ビス[4-(ジメチルアミノ)フェニル]メタン、ビス[4-(ジエチルアミノ)フェニル]メタン、ロイコクリスタルバイオレット等が挙げられる。これらは1種単独で又は2種以上を組み合わせて用いることができる。
上記感光性樹脂組成物は、必要に応じて、分子内に少なくとも1つのカチオン重合可能な環状エーテル基を有する光重合性化合物(オキセタン化合物等)、カチオン重合開始剤、マラカイトグリーン、ビクトリアピュアブルー、ブリリアントグリーン、メチルバイオレット等の染料、トリブロモフェニルスルホン、ジフェニルアミン、ベンジルアミン、トリフェニルアミン、ジエチルアニリン、2-クロロアニリン等の光発色剤、熱発色防止剤、4-トルエンスルホンアミド等の可塑剤、顔料、充填剤、消泡剤、難燃剤、安定剤、密着性付与剤、レベリング剤、剥離促進剤、酸化防止剤、香料、イメージング剤、熱架橋剤などを含有してもよい。これらは、1種単独で又は2種類以上を組み合わせて使用される。感光性樹脂組成物がその他の成分を含む場合、これらの含有量(複数種含む場合には、総含有量)は、(A)成分及び(B)成分の総量100質量部に対して、それぞれ0.01質量部~20質量部程度とすることが好ましい。
本実施形態の感光性樹脂組成物は、有機溶剤の少なくとも1種を更に含んでいてもよい。有機溶剤の例としては、メタノール、エタノール等のアルコール溶剤;アセトン、メチルエチルケトン等のケトン溶剤;メチルセロソルブ、エチルセロソルブ、プロピレングリコールモノメチルエーテル等のグリコールエーテル溶剤;トルエン等の芳香族炭化水素溶剤;N,N-ジメチルホルムアミド等の非プロトン性極性溶剤などが挙げられる。これらは1種単独でも、2種以上を混合して用いてもよい。上記感光性樹脂組成物に含まれる有機溶剤の含有量は目的等に応じて適宜選択することができる。例えば、固形分が30質量%~60質量%程度となる溶液として用いることができる。以下、有機溶剤を含む感光性樹脂組成物を「塗布液」ともいう。
本発明の感光性エレメントは、支持フィルムと、該支持フィルム上に設けられる上記感光性樹脂組成物の塗膜である感光性樹脂組成物層とを備える。なお、上記塗膜は上記感光性樹脂組成物が未硬化状態のものである。上記感光性エレメントは、必要に応じて保護フィルム等のその他の層を有していてもよい。
UV分光計としては、228A型Wビーム分光光度計((株)日立製作所)を使用できる。
上記感光性樹脂組成物を用いて、レジストパターンを形成することができる。本発明の一実施形態のレジストパターンの形成方法は、(i)上記感光性樹脂組成物の塗膜である感光性樹脂組成物層を基板上に形成する工程(感光層形成工程)と、(ii)上記感光性樹脂組成物層の少なくとも一部の領域に活性光線を照射する工程(露光工程)と、(iii)上記感光性樹脂組成物層の上記活性光線を照射した領域以外の領域を上記基板上から除去する工程(現像工程)と、を有する。上記レジストパターンの形成方法は必要に応じて更にその他の工程を有していてもよい。
まず、上記感光性樹脂組成物の塗膜である感光性樹脂組成物層を基板上に形成する。基板としては、絶縁層と該絶縁層上に形成された導体層とを備える基板(回路形成用基板)を用いることができる。
露光工程では、上記のようにして基板上に形成された感光性樹脂組成物層の少なくとも一部の領域に活性光線を照射することで、活性光線が照射された露光部が光硬化して、潜像が形成される。この際、感光性樹脂組成物層上に存在する支持フィルムが活性光線に対して透明である場合には、支持フィルムを通して活性光線を照射することが出来る。一方、支持フィルムが活性光線に対して遮光性を示す場合には、支持フィルムを除去した後に感光性樹脂組成物層に活性光線を照射する。
現像工程では、上記感光性樹脂組成物層の未硬化部分が回路形成用基板上から現像処理により除去されることで、感光性樹脂組成物層が光硬化した硬化物であるレジストパターンが基板上に形成される。感光性樹脂組成物層上に支持フィルムが存在している場合には、支持フィルムを除去してから、未露光部分の除去(現像)を行う。現像処理には、ウェット現像とドライ現像とがあるが、ウェット現像が広く用いられている。
本発明のプリント配線板の製造方法は、絶縁層と該絶縁層上に形成された導体層とを備える基板(回路形成用基板)の該導体層上に、上記レジストパターンの形成方法によりレジストパターンが形成された基板をエッチング処理又はめっき処理して、導体パターンを形成する工程を含む。プリント配線板の製造方法は、必要に応じてレジスト除去工程等のその他の工程を含んでいてもよい。基板のエッチング処理又はめっき処理は、形成されたレジストパターンをマスクとして、基板の導体層等に対して行われる。
(感光性樹脂組成物の溶液の調製)
表2及び表3に示す(A)~(E)成分及び染料を同表に示す配合量(g単位)で、アセトン9g、トルエン5g及びメタノール5gとともに混合することにより、実施例1~7及び比較例1~5の感光性樹脂組成物の溶液をそれぞれ調製した。表2及び表3に示す(A)成分の配合量は不揮発分の質量(固形分量)である。表2及び表3に示す各成分の詳細については、以下のとおりである。なお、表2及び表3における「-」は未配合を意味する。
[バインダーポリマ(A-1)の合成]
重合性単量体(モノマ)であるメタクリル酸90g、メタクリル酸メチル6g、スチレン150g及びメタクリル酸ベンジル54g(質量比30/2/50/18)と、アゾビスイソブチロニトリル1.5gとを混合して得た溶液を「溶液a」とした。
ポンプ:日立 L-6000型((株)日立製作所)
カラム:以下の計3本、カラム仕様:10.7mmφ×300mm
Gelpack GL-R440
Gelpack GL-R450
Gelpack GL-R400M(以上、日立化成(株))
溶離液:テトラヒドロフラン(THF)
試料濃度:固形分が47.4質量%のバインダーポリマ溶液を120mg採取し、5mLのTHFに溶解して試料を調製した。
測定温度:40℃
注入量:200μL
圧力:49Kgf/cm2(4.8MPa)
流量:2.05mL/分
検出器:日立 L-3300型RI((株)日立製作所)
重合性単量体(モノマ)であるメタクリル酸90g、メタクリル酸メチル6g、スチレン150g及びメタクリル酸ベンジル54g(質量比30/2/50/18)と、アゾビスイソブチロニトリル0.72gとを混合して得た溶液を「溶液a’」とした。
重合性単量体(モノマ)として、表1に示す材料を同表に示す質量比で用いたほかは、バインダーポリマ(A-1)の溶液を得るのと同様にしてバインダーポリマ(A-3)~(A-4)の溶液を得た。
・FA-321M:2,2-ビス(4-(メタクリロキシペンタエトキシ)フェニル)プロパン(日立化成(株)、「FA-321M」)
・FA-324M:2,2-ビス(4-(メタクリロキシジエトキシ)フェニル)プロパン(日立化成(株)、「FA-324M」)
・FA-3200MY:2,2-ビス(4-(メタクリロキシエトキシプロポキシ)フェニル)プロパン(エチレンオキサイド平均12mol及びプロピレンオキサイド平均4mol付加物)(日立化成(株)、「FA-3200MY」)
・BA-4PO10EO-DM:2,2-ビス(4-(メタクリロキシエトキシプロポキシ)フェニル)プロパン(エチレンオキサイド平均10mol及びプロピレンオキサイド平均4mol付加物)(日立化成(株)、「BA-4PO10EO-DM」)
・BA-4PO8EO-DM:2,2-ビス(4-(メタクリロキシエトキシプロポキシ)フェニル)プロパン(エチレンオキサイド平均8mol及びプロピレンオキサイド平均4mol付加物)(日立化成(株)、「BA-4PO8EO-DM」)
・BA-4PO6EO-DM:2,2-ビス(4-(メタクリロキシエトキシプロポキシ)フェニル)プロパン(エチレンオキサイド平均6mol及びプロピレンオキサイド平均4mol付加物)(日立化成(株)、「BA-4PO6EO-DM」)
・BA-2PO8EO-DM:2,2-ビス(4-(メタクリロキシエトキシプロポキシ)フェニル)プロパン(エチレンオキサイド平均8mol及びプロピレンオキサイド平均2mol付加物)(日立化成(株)、「BA-2PO8EO-DM」)
・B-CIM:2,2’-ビス(2-クロロフェニル)-4,4’,5,5’-テトラフェニルビスイミダゾール[2-(2-クロロフェニル)-4,5-ジフェニルイミダゾール二量体](Hampford社、「B-CIM」)
・PYR-1:1-フェニル-3-(4-メトキシスチリル)-5-(4-メトキシフェニル)ピラゾリン((株)日本化学工業所)
・LCV:ロイコクリスタルバイオレット(山田化学(株)、「LCV」)
・MKG:マラカイトグリーン(大阪有機化学工業(株)、「MKG」)
上記で得られた感光性樹脂組成物の溶液を、それぞれ厚さ16μmのポリエチレンテレフタレートフィルム(東レ(株)、「FB-40」)上に塗布し、70℃及び110℃の熱風対流式乾燥器で順次乾燥処理して、乾燥後の膜厚が25μmである感光性樹脂組成物層を形成した。この感光性樹脂組成物層上に保護フィルム(王子製紙(株)、「E-200K」)を貼り合わせ、ポリエチレンテレフタレートフィルム(支持フィルム)と、感光性樹脂組成物層と、保護フィルムとが順に積層された感光性エレメントをそれぞれ得た。
ガラスエポキシ材と、その両面に形成された銅箔(厚さ16μm)とからなる銅張積層板(日立化成(株)、「MCL-E-679F」)(以下、「基板」という。)を加熱して80℃に昇温させた後、実施例1~7及び比較例1~5に係る感光性エレメントを用いて、各々、基板の銅表面上に感光層を形成(ラミネート)した。ラミネートは、保護フィルムを除去しながら、各感光性エレメントの感光性樹脂組成物層が基板の銅表面に密着するようにして、温度120℃、ラミネート圧力4kgf/cm2(0.4MPa)の条件下で行った。このようにして、基板の銅表面上に感光性樹脂組成物層及びポリエチレンテレフタレートフィルムが積層された積層基板を得た。
露光後、積層基板からポリエチレンテレフタレートフィルムを剥離し、感光性樹脂組成物層を露出させ、30℃の1質量%炭酸ナトリウム水溶液を60秒間スプレーすることにより、未露光部分を除去した。このようにして、基板の銅表面上に感光性樹脂組成物の硬化物からなるレジストパターンを形成した。レジストパターン(硬化膜)として得られたステップタブレットの残存段数(ステップ段数)を測定することにより、感光性樹脂組成物の感度を評価した。感度は、上記ステップ段数により示され、この段数が高いほど感度が良好であることを意味する。結果を表4及び表5に示す。
ライン幅(L)/スペース幅(S)(以下、「L/S」と記す。)が3/3~30/30(単位:μm)である描画パターンを用いて、41段ステップタブレットの残存段数が16段となるエネルギー量で上記積層基板の感光性樹脂組成物層に対して露光(描画)した。露光後、上記感度の評価と同様の現像処理を行った。
レジストパターンの屈曲性を以下のようにして評価した。FPC(Flexible Printed Circuit)基板(ニッカン工業(株)、「F-30VC1」、基板厚:25μm、銅厚:18μm)を80℃に加温し、その銅表面上に実施例1~7及び比較例1~5に係る感光性エレメントの感光性樹脂組成物層及び支持フィルムを、感光性樹脂組成物層がFPC基板側に対向するように、保護フィルムを剥がしながら110℃のヒートロールを用い1.5m/分の速度でラミネートした。この感光性樹脂組成物層及び支持体が積層されたFPC基板を、屈曲性を評価するための試験片とした。上記試験片には、405nmの青紫色レーザダイオードを光源とする直描露光機(日立ビアメカニクス(株)、「DE-1UH」)を使用して、41段ステップタブレットの現像後の残存ステップ段数で16段となるエネルギー量で露光を行い、感光性樹脂組成物層を光硬化させた。その後、支持フィルムを剥離、現像してFPC基板上にレジストパターンが積層された屈曲性評価用基板を得た。
感光性樹脂組成物層の現像性の評価を、以下のようにして最小現像時間(秒)を測定することで評価した。
上記積層基板を5cm四方に切断して評価用の積層基板とした。得られた評価用の積層基板を露光せずに現像した場合に、基板上に感光性樹脂組成物層が残らなくなるのに要する最小の現像時間(秒)を測定した。
<1> (メタ)アクリル酸に由来する構造単位、スチレン又はα-メチルスチレンに由来する構造単位及び(メタ)アクリル酸ベンジルに由来する構造単位を有するバインダーポリマーと、
エチレンオキシ基及びプロピレンオキシ基を有し、前記エチレンオキシ基の構造単位数が1~20であり、前記プロピレンオキシ基の構造単位数が2~7であり、前記エチレンオキシ基及び前記プロピレンオキシ基の総構造単位数が10を超える第一のビスフェノール型ジ(メタ)アクリレートを含む光重合性化合物と、
光重合開始剤と、
を含有する感光性樹脂組成物。
<2> ピラゾリン誘導体及びビスアルコキシアントラセンからなる群より選ばれる少なくとも1種の増感色素を更に含有する<1>に記載の感光性樹脂組成物。
<3> エチレンオキシ基を有し、前記エチレンオキシ基の構造単位数が8以下であり、前記第一のビスフェノール型ジ(メタ)アクリレートとは異なる第二のビスフェノール型ジ(メタ)アクリレートを更に含む<1>又は<2>に記載の感光性樹脂組成物。
<4> 支持フィルムと、
前記支持フィルム上に設けられた<1>~<3>のいずれか1に記載の感光性樹脂組成物の塗膜である感光性樹脂組成物層と、
を備える感光性エレメント。
<5> 基板上に、<1>~<3>のいずれか1項に記載の感光性樹脂組成物の塗膜である感光性樹脂組成物層を形成する感光層形成工程と、
前記感光性樹脂組成物層の少なくとも一部の領域に活性光線を照射する工程と、
前記感光性樹脂組成物層の前記活性光線を照射した領域以外の領域を前記基板上から除去する工程と、
を有するレジストパターンの形成方法。
<6> 前記活性光線の波長が340nm~430nmの範囲内である<5>に記載のレジストパターンの形成方法。
<7> <5>又は<6>に記載のレジストパターンの形成方法によりレジストパターンが形成された基板をエッチング処理又はめっき処理する工程を含むプリント配線板の製造方法。
本明細書に記載された全ての文献、特許出願、および技術規格は、個々の文献、特許出願、および技術規格が参照により取り込まれることが具体的かつ個々に記された場合と同程度に、本明細書中に参照により取り込まれる。
Claims (7)
- (メタ)アクリル酸に由来する構造単位、スチレン又はα-メチルスチレンに由来する構造単位及び(メタ)アクリル酸ベンジルに由来する構造単位を有するバインダーポリマーと、
エチレンオキシ基及びプロピレンオキシ基を有し、前記エチレンオキシ基の構造単位数が1~20であり、前記プロピレンオキシ基の構造単位数が2~7であり、前記エチレンオキシ基及び前記プロピレンオキシ基の総構造単位数が10を超える第一のビスフェノール型ジ(メタ)アクリレートを含む光重合性化合物と、
光重合開始剤と、
を含有する感光性樹脂組成物。 - ピラゾリン誘導体及びビスアルコキシアントラセンからなる群より選ばれる少なくとも1種の増感色素を更に含有する請求項1に記載の感光性樹脂組成物。
- エチレンオキシ基を有し、前記エチレンオキシ基の構造単位数が8以下であり、前記第一のビスフェノール型ジ(メタ)アクリレートとは異なる第二のビスフェノール型ジ(メタ)アクリレートを更に含む請求項1又は請求項2に記載の感光性樹脂組成物。
- 支持フィルムと、
前記支持フィルム上に設けられる請求項1~請求項3のいずれか1項に記載の感光性樹脂組成物の塗膜である感光性樹脂組成物層と、
を備える感光性エレメント。 - 基板上に、請求項1~請求項3のいずれか1項に記載の感光性樹脂組成物の塗膜である感光性樹脂組成物層を形成する感光層形成工程と、
前記感光性樹脂組成物層の少なくとも一部の領域に活性光線を照射する工程と、
前記感光性樹脂組成物層の前記活性光線を照射した領域以外の領域を前記基板上から除去する工程と、
を有するレジストパターンの形成方法。 - 前記活性光線の波長が340nm~430nmの範囲内である請求項5に記載のレジストパターンの形成方法。
- 請求項5又は請求項6に記載のレジストパターンの形成方法によりレジストパターンが形成された基板をエッチング処理又はめっき処理する工程を含むプリント配線板の製造方法。
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- 2013-11-14 US US14/443,440 patent/US20150293443A1/en not_active Abandoned
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WO2016080375A1 (ja) * | 2014-11-17 | 2016-05-26 | 日立化成株式会社 | 感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法 |
KR20180125965A (ko) * | 2016-03-17 | 2018-11-26 | 히타치가세이가부시끼가이샤 | 감광성 수지 조성물, 감광성 엘리먼트, 레지스터 패턴 부착 기판의 제조 방법, 및 프린트 배선판의 제조 방법 |
KR102372527B1 (ko) | 2016-03-17 | 2022-03-08 | 쇼와덴코머티리얼즈가부시끼가이샤 | 감광성 수지 조성물, 감광성 엘리먼트, 레지스터 패턴 부착 기판의 제조 방법, 및 프린트 배선판의 제조 방법 |
Also Published As
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KR20200087270A (ko) | 2020-07-20 |
TW201426185A (zh) | 2014-07-01 |
KR102281035B1 (ko) | 2021-07-22 |
US20150293443A1 (en) | 2015-10-15 |
CN104781730B (zh) | 2020-03-06 |
CN104781730A (zh) | 2015-07-15 |
KR102171606B1 (ko) | 2020-10-29 |
TWI617888B (zh) | 2018-03-11 |
KR20150087236A (ko) | 2015-07-29 |
JP6358094B2 (ja) | 2018-07-18 |
KR102282817B1 (ko) | 2021-07-27 |
JPWO2014080834A1 (ja) | 2017-01-05 |
KR20200087269A (ko) | 2020-07-20 |
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