WO2014041639A1 - X線管装置およびx線管装置の使用方法 - Google Patents
X線管装置およびx線管装置の使用方法 Download PDFInfo
- Publication number
- WO2014041639A1 WO2014041639A1 PCT/JP2012/073340 JP2012073340W WO2014041639A1 WO 2014041639 A1 WO2014041639 A1 WO 2014041639A1 JP 2012073340 W JP2012073340 W JP 2012073340W WO 2014041639 A1 WO2014041639 A1 WO 2014041639A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electron emission
- emitter
- ray tube
- deformation
- tube apparatus
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
- H01J1/16—Cathodes heated directly by an electric current characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/064—Details of the emitter, e.g. material or structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
- H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray
- H01J35/305—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray by using a rotating X-ray tube in conjunction therewith
Definitions
- the present invention relates to an X-ray tube apparatus and a method for using the X-ray tube apparatus, and more particularly to an X-ray tube apparatus having an emitter having a flat electron emission portion and a method for using the X-ray tube apparatus.
- an X-ray tube apparatus having an emitter having a flat electron emission portion is known.
- Such an X-ray tube apparatus is disclosed in, for example, Japanese Translation of PCT International Publication No. 2010-534396.
- the X-ray tube apparatus disclosed in the above-mentioned Japanese translations of PCT publication No. 2010-534396 includes an emitter including a flat electron emission portion and a pair (two) of terminal portions that connect the electron emission portion and the electrode. .
- An anisotropic polycrystalline material (tungsten) having a long crystal structure is used for the electron emission portion.
- the terminal portion supports a lower surface (a side surface opposite to the electron emission surface) in the vicinity of both end portions of the flat electron emission portion and has a function of energizing the electron emission portion.
- the electron emission part emits electrons by being heated and heated to about 2000 ° C. or more through the terminal part.
- the electron emission portion is configured such that the longitudinal direction of the crystal grains is directed to a predetermined direction, whereby the action direction of the main stress load during normal use (direction parallel to the electron emission surface) ) To improve the mechanical strength of the electron emission portion.
- the action direction of the main stress load during normal use (direction parallel to the electron emission surface)
- the mechanical strength of the electron emission portion is suppressed.
- the mechanical strength in the direction parallel to the electron emission surface is improved by the material configuration in which the direction of crystal grains in the electron emission portion is aligned in a predetermined direction.
- a phenomenon that the electron emission part is deformed to sink due to creep deformation accompanying long-term use referred to as a sag phenomenon) Is difficult to sufficiently suppress.
- the convergence of the electrons emitted from the emitter is lowered, and as a result, the focal diameter of the X-rays emitted from the X-ray tube device can be kept within a desired range. Disappear. For this reason, in order to maintain a desired X-ray focal spot diameter for a longer period of time and to further extend the life of the emitter, it is desired to sufficiently suppress the sinking of the electron emission portion.
- the present invention has been made in order to solve the above-described problems, and one object of the present invention is to sufficiently suppress the sinking of the electron emission portion due to creep deformation accompanying use. It is to provide a method of using a tube apparatus and an X-ray tube apparatus.
- an X-ray tube apparatus includes an anode and a cathode including an emitter that emits electrons to the anode, and the emitter is a flat electron emission portion.
- a pair of terminal portions extending from the electron emission portion and connected to the electrode, and a terminal portion provided separately from the terminal portion, insulated from the electrode, and supporting the electron emission portion .
- the emitter is provided separately from the terminal portion, is insulated from the electrode, and supports the electron emitting portion at the emitter.
- the flat electron emission portion can be structurally supported not only by the terminal portion but also by a support portion provided separately from the terminal portion.
- the subsidence (sag phenomenon) of the electron emission part due to creep deformation due to use which is unavoidably generated in the structure of the flat electron emission part, is not enough in the material, but more sufficiently by the support part which is a structural means. Can be suppressed.
- the electron emission portion can be easily supported without obstructing the current path flowing from the electrode to the electron emission portion via the terminal portion.
- the support portion is a deformed portion having a relatively large degree of change in flatness of the electron emitting portion due to creep deformation accompanying the use of the emitter among the electron emitting portions. It arrange
- “flatness” means, in the present specification, the upper and lower surfaces of an ideal electron emission portion in a state of no deformation as the reference plane, and the upper and lower sides in the projection view in the side direction parallel to the electron emission portion, respectively.
- the upper surface of the electron emission portion is an electron emission surface
- the lower surface is a surface opposite to the electron emission surface.
- the “deformation part” is a part where the degree of flatness change in the electron emission part is relatively large when it is assumed that no support part is provided.
- the portion of the electron emitting portion that is the deformed portion is determined by the shape of the electron emitting portion, and can be derived, for example, by simulation.
- “in the vicinity of the deforming portion” includes the deforming portion and the vicinity region around the deforming portion.
- the electron emitting portion is preferably formed in a flat plate shape by a tortuous current path, and the supporting portion is an electron emitting portion including the deforming portion among the electron emitting portions. It arrange
- the electron emission part is formed in a flat plate shape with a winding current path in this way, there is a deformed part whose flatness is likely to change in the current path on the outer periphery side of the electron emission part (outer periphery side).
- the current path is easy to creep. For this reason, sinking (sag phenomenon) of the electron emission portion can be more effectively suppressed by arranging the support portion so as to structurally support the current path on the outer peripheral side as in the present invention.
- the current path includes at least a first part on the outer peripheral side extending from one terminal part toward the other terminal part side, And a second portion extending from the other terminal portion side toward the one terminal portion side, the support portion including the first portion and the second portion. It arrange
- the support portion so as to support the vicinity of the connection portion between the first portion and the second portion as in the present invention, the vicinity of the portion where the flatness is particularly likely to change among the deformation portions. Since it can support structurally, the subsidence (sag phenomenon) of an electron emission part can be suppressed reliably and more effectively.
- the support portion is formed to extend on the same side as the terminal portion in a direction intersecting with the electron emission portion, one end is fixed, and the other end is an electron. It is connected to the emission part or arranged at a position in contact with the electron emission part. If comprised in this way, since it is only necessary to add a support part to the terminal part side of an emitter, a support part can be easily provided on structure. In addition, since a support part should just be able to support an electron emission part, not only when a support part is connected and fixed to an electron emission part, but a support part only contacts and supports an electron emission part from the same side as a terminal part. Good.
- the support portion is pulled out from the outer peripheral portion of the plate-shaped electron emission portion and bent to the same side as the terminal portion, so that it is integrated with the electron emission portion. It is formed in a flat plate shape. If comprised in this way, since a support part and an electron emission part can be integrally formed from a common flat plate material, a support part can be formed easily. Further, unlike the case where the support portion and the electron emission portion are provided separately, the support portion can be provided without increasing the number of parts.
- the X-ray tube apparatus further includes a cylindrical envelope that accommodates an emitter and a target as an anode, and rotates around a central axis. A pair is provided at positions facing each other.
- the electron emission portion includes a deformation portion in which the degree of flatness change of the electron emission portion due to creep deformation accompanying use of the emitter is relatively large.
- a projecting portion projecting in a direction opposite to the deformation direction of the deformable portion is provided. If comprised in this way, even if creep deformation
- the protruding portion protrudes in the direction opposite to the direction of gravity action during use. If comprised in this way, the creep deformation
- the electron emission portion is preferably formed in a flat plate shape by a tortuous current path, and the protrusion is an outer periphery of the electron emission portion including the deformation portion of the electron emission portion. Arranged in the current path on the side. According to this structure, since there is a deformed portion whose flatness is likely to change in the current path on the outer peripheral side of the electron emitting portion, the subsidence of the electron emitting portion in the portion where the flatness is likely to change ( Sag phenomenon) can be effectively canceled out.
- the current path includes at least a first part on the outer peripheral side extending from one terminal part toward the other terminal part side, and an inner peripheral side from the first part continuously from the first part.
- a second portion extending from the other terminal portion side toward the one terminal portion side, and the protruding portion inclines the first portion so that the vicinity of the connection portion between the first portion and the second portion protrudes. Is formed.
- the vicinity of the connection portion between the first portion and the second portion is a portion where the flatness is particularly easily changed. The subsidence (sag phenomenon) of the electron emission part in the vicinity can be canceled out more reliably and more effectively.
- the electron emission portion is formed in a flat plate shape by a tortuous current path and has a wide portion having a path width larger than that of other portions of the current path.
- the wide portion is disposed in a region including a deformation portion in which the degree of flatness of the electron emission portion is relatively large due to creep deformation accompanying the use of the emitter. If comprised in this way, the mechanical strength of the electric current path (wide part) in the area
- sinking of an electron emission part can be suppressed further fully.
- the wide portion is arranged in the current path on the outer peripheral side of the electron emission portion including the deformation portion among the electron emission portions. If comprised in this way, since there exists a deformation
- the electron emission portion includes at least a first portion on the outer peripheral side extending from one terminal portion toward the other terminal portion, A second portion extending from the other terminal portion side toward the one terminal portion side continuously from the first portion, and the wide portion is a connection between the first portion and the second portion.
- the first portion including the vicinity of the portion is formed.
- an X-ray tube apparatus comprising an anode and a cathode including an emitter that emits electrons to the anode, the emitter comprising a plate-shaped electron emission portion and an electron emission portion.
- An X-ray tube apparatus including a pair of terminal portions that are respectively connected to the electrodes and that are provided separately from the terminal portions, are insulated from the electrodes, and support portions that support the electron emission portions And a step of emitting X-rays by emitting electrons in a state in which the emitter faces the first direction along the direction of gravity and faces the anode, and the emitter is along the direction of gravity and the first direction. And a step of energizing and heating at least the emitter in a state facing the opposite second direction and facing the anode.
- the X-ray tube apparatus includes a support portion that is provided separately from the terminal portion, is insulated from the electrode, and supports the electron emission portion.
- the flat electron emission part can be structurally supported not only by the terminal part but also by a support part provided separately from the terminal part. Sinking of the electron emission portion due to creep deformation due to use can be sufficiently suppressed.
- the emitter is heated by energizing at least the emitter in a state of facing the anode in the second direction opposite to the first direction along the direction of gravity.
- Sinking of the electron emission portion due to creep deformation (deformation generated by energizing and heating the emitter in the first direction) generated in the step of generating a line is caused by energization heating of the emitter in the opposite second direction. It can be counteracted by deformation in the reverse direction. Thereby, the sink of the electron emission part by the creep deformation accompanying use can be suppressed more sufficiently.
- a method of using the X-ray tube apparatus is a method of using an X-ray tube apparatus including an anode and an emitter having a flat electron emission portion that emits electrons to the anode.
- the step of conducting and heating the emitter while facing the second direction is under the same conditions as the conduction and heating conditions of the emitter in the step of generating X-rays, and , And a time substantially equal to the energization heating time in the step of generating X-rays.
- produced at the time of normal use can be generated in a reverse direction by the process of energizing and heating toward a 2nd direction.
- An X-ray tube apparatus includes an anode and a cathode including an emitter that emits electrons to the anode.
- the emitter is formed from a plate-shaped electron emission portion and both ends of the electron emission portion.
- the electron emission portion includes a deformation portion having a relatively large degree of change in flatness of the electron emission portion due to creep deformation accompanying use of the emitter. In the region, there is a protruding portion that protrudes in the direction opposite to the deformation direction of the deformation portion.
- the deformation is performed in the region including the deformed portion in which the flatness of the electron emitting portion changes relatively due to the creep deformation accompanying the use of the emitter.
- the electron emitting portion With a protruding portion that protrudes in the direction opposite to the deformation direction of the portion, even when creep deformation occurs in the electron emitting portion, the protruding portion protruding in the direction opposite to the deformation direction is flattened. The change in degree can be counteracted. Thereby, since the change of the flatness in the area including the deformed portion can be canceled, the sinking of the electron emitting portion due to the creep deformation accompanying use can be sufficiently suppressed.
- An X-ray tube apparatus includes an anode and a cathode including an emitter that emits electrons to the anode, and the emitter is formed in a flat plate shape by a winding current path, An electron emission portion having a wide portion having a larger path width than other portions of the current path, and a pair of terminal portions extending from both ends of the electron emission portion and connected to the electrodes, and the wide portion is an emitter Is disposed in a region including a deformed portion in which the degree of change in flatness of the electron emission portion is relatively large due to creep deformation accompanying the use of.
- the wide portion in the region including the deformed portion in which the flatness of the electron emitting portion is relatively large due to the creep deformation accompanying the use of the emitter By arranging, the mechanical strength of the current path (wide portion) in the region including the deformable portion can be improved relative to other portions. Thereby, since generation
- FIG. 3 is a top view (plan view) showing an electron emission portion of the emitter shown in FIG. 2.
- FIG. 3 is a side view (front view) of the emitter shown in FIG. 2. It is the side view which looked at the emitter shown in FIG. 2 from the terminal part side.
- It is the schematic diagram which showed the simulation result of the flatness change in the emitter by a comparative example. It is the schematic diagram which showed the simulation result of the flatness change in the emitter by the Example of this invention.
- FIG. 13 is a top view (plan view) showing an electron emission portion of the emitter shown in FIG. 12.
- FIG. 17 is a top view (plan view) showing an electron emission portion of the emitter shown in FIG. 16. It is the schematic diagram which showed the apparatus structure for demonstrating the usage method of the X-ray tube apparatus by 6th Embodiment of this invention. It is a schematic diagram for demonstrating the usage method of the X-ray tube apparatus by 6th Embodiment of this invention. It is a schematic diagram for demonstrating the usage method of the X-ray tube apparatus by 7th Embodiment of this invention.
- an X-ray tube apparatus 100 includes an electron source 1 that generates an electron beam, a target 2, an envelope 3 that accommodates the electron source 1 and the target 2, and an envelope 3 And a magnetic field generator 4 provided outside.
- the X-ray tube apparatus 100 is a rotary anode X-ray tube apparatus in which the target 2 rotates, and more specifically, an envelope in which the envelope 3 rotates integrally with the target 2.
- This is a rotary X-ray tube device.
- the electron source 1 and the target 2 are examples of the “cathode” and the “anode” in the present invention, respectively.
- the electron source 1 is fixedly attached to one end in the axial direction (A direction) of the envelope 3 via an insulating member 5.
- the electron source 1 is disposed on the rotation shaft 3a of the envelope 3 and is configured to rotate integrally with the envelope 3 around the rotation shaft 3a.
- the electron source 1 includes an emitter 10 and a pair of electrodes 1 a for energizing and heating the emitter 10. The structure of the emitter 10 will be described later.
- the target 2 is integrally (fixed) attached to the other end in the axial direction (A direction) of the envelope 3 so as to face the electron source 1.
- the target 2 has a disc shape that is inclined so that the edge 2a becomes thinner toward the outside.
- the center of the target 2 coincides with the rotating shaft 3a of the envelope 3, and the target 2 is configured to rotate integrally with the envelope 3 around the rotating shaft 3a.
- the target 2 and the electron source 1 are respectively connected to positive and negative electrodes of a power supply unit (not shown).
- a positive high voltage is applied to the target 2 and a negative high voltage is applied to the electron source 1
- an electron beam is generated from the electron source 1 toward the target 2 along the rotation axis 3a (axial direction A). .
- the envelope 3 has a cylindrical shape that extends in the axial direction A about the rotation axis (center axis) 3a.
- the envelope 3 is supported by a shaft 7 and a bearing 7a provided at both ends so as to be rotatable around the rotation shaft 3a.
- the envelope 3 is rotationally driven by a motor 6 connected to the shaft 7.
- One end of the envelope 3 is closed by a disk-shaped insulating member 5, and the other end of the envelope 3 is closed by the target 2.
- the inside of the envelope 3 is evacuated.
- the envelope 3 is made of a nonmagnetic metal material such as stainless steel (SUS), and the insulating member 5 is made of an insulating material such as ceramic.
- the magnetic field generator 4 includes a plurality of magnetic poles arranged on an annular core and a coil wound around each magnetic pole.
- the magnetic field generator 4 has a function of generating a magnetic field for focusing and deflecting an electron beam from the electron source 1 toward the target 2.
- the electron beam traveling toward the target 2 along the axial direction A is focused and deflected by the action of the magnetic field generated from the magnetic field generator 4, and collides with the inclined edge 2 a of the target 2.
- X-rays are generated from the edge 2 a of the target 2 and are emitted to the outside from a window portion (not shown) of the envelope 3.
- the emitter 10 is made of pure tungsten or a tungsten alloy, and integrally includes a flat plate-like electron emission portion 11, a pair of terminal portions 12, and a pair of support portions 13. ing.
- the electron emission portion 11, the pair of terminal portions 12, and the pair of support portions 13 are cut out from a single flat plate material and integrally formed by bending.
- the emitter 10 is a so-called thermoelectron emission type emitter, and is configured to be energized and heated from the electrode 1 a through a pair of terminal portions 12. As a result, the plate-shaped electron emission portion 11 is energized and heated to a predetermined temperature (about 2400 K to about 2500 K) with a predetermined current, whereby electrons are emitted from the electron emission portion 11.
- the electron emission portion 11 is formed in a flat plate shape by a current path 20 having a meandering shape (a meander shape), and the electron emission portion 11 has a circular shape when seen in a plan view. Is formed.
- the central portion 24 of the electron emission portion 11 coincides with the rotation axis 3 a of the envelope 3, and the emitter 10 rotates around the central portion 24 (rotation shaft 3 a) as the envelope 3 rotates.
- the current passage 20 is formed with a substantially constant passage width W1, and is connected to the terminal portion 12 at both ends of the current passage 20, respectively.
- the current path 20 includes a first portion 21, a second portion 22, a third portion 23, and a central portion 24.
- the first portions 21 are a portion on the outer peripheral side provided as a pair so as to extend in an arc from one (other) terminal portion 12 toward the other (one) terminal portion 12 side.
- the second portion 22 is provided so as to extend in an arc shape continuously from the first portion 21 on the inner peripheral side of the first portion 21 toward the opposite terminal portion 12 side.
- the third portion 23 extends continuously in an arc from the second portion 22 toward the opposite side, and is provided so as to be connected to the central portion 24.
- each of the pair of terminal portions 12 is formed by extending from the end portion of the current passage 20 (electron emission portion 11) and being bent in the Z1 direction.
- the part is fixed to the electrode 1 a of the electron source 1.
- the terminal portion 12 functions as a connection terminal with the electrode 1a for energization heating of the electron emission portion 11, and has a function of supporting the electron emission portion 11 by being fixed to the electrode 1a.
- the terminal portion 12 has a flat plate shape having a width equal to the passage width (W1) of the current passage 20.
- the pair of support portions 13 are provided separately from the terminal portion 12, are insulated from the electrode 1 a, and are formed to support the electron emission portion 11. . Further, the pair of support portions 13 are arranged so as to face each other with the rotation axis (center axis) 3a of the envelope 3 in between when viewed in a plan view. These support portions 13 extend from a predetermined portion of the current path 20 (electron emission portion 11) and are formed in a flat plate shape by being bent in the same Z1 direction as the terminal portion 12. An end portion of the support portion 13 is fixed by a fixing member 1 b provided at a base portion (not shown) of the electron source 1. The fixing member 1b is insulated from the electrode 1a. The end portion of the support portion 13 may be directly fixed to the base portion (not shown) of the electron source 1. The electrode 1a and the fixing member 1b are not shown in FIGS.
- the support portion 13 has a width W2 smaller than the passage width W1 of the terminal portion 12 and the current passage 20, and in the first embodiment, the width W2 is about one half of the width W1.
- the width W ⁇ b> 2 of the support portion 13 may be greater than or equal to a size necessary for obtaining strength capable of supporting the electron emission portion 11. Further, it is preferable that the width W ⁇ b> 2 of the support portion 13 is small so that the heat of the electron-emitting portion 11 that is heated by conduction can be prevented from escaping to the support portion 13.
- the support unit 13 has a degree of change in flatness of the electron emission unit 11 due to creep deformation (sag phenomenon) associated with the use of the emitter 10 in the electron emission unit 11 (current path 20). Is arranged so as to support the vicinity of the deformed portion Df having a relatively large diameter.
- the deformation portion Df of the electron emission portion 11 is determined by the shape of the electron emission portion, and can be derived by a computational method such as simulation.
- FIG. 6 shows a simulation result (comparative example) for evaluating the creep deformation of the emitter when the support portion 13 is not provided. Note that the creep deformation of the electron emission part is mainly caused by the high temperature when the emitter is energized and the external force acting on the electron emission part (gravity, inertial force due to centrifugal force, etc.), but strictly speaking, Since the slip of metal crystal grains constituting the emitter occurs, it is difficult to accurately reproduce the creep deformation by simulation.
- the degree of creep deformation is evaluated by the flatness.
- the flatness is determined by the upper side (electron emission surface side) reference surface Rt and the lower side (opposite side of the electron emission surface) reference surface Rb in a projection view (see FIG. 4) viewed from the side surface direction parallel to the electron emission portion 11. Is the amount of deviation of each of the electron emission portions 11 from. Therefore, in a state without deformation, the upper surface (electron emission surface) 11a of the electron emission portion 11 coincides with the upper reference surface Rt, the flatness is +0, and the lower surface 11b of the electron emission portion 11 is the lower reference surface Rb.
- the flatness is -0.
- the flatness is + X
- the gravity direction (vertically downward) G2 coincides with the Z1 direction (flatness minus direction) from the upper surface 11a toward the lower surface 11b.
- the flatness of the electron emission portion 11 changes greatly in the current path 20 on the outer peripheral side of the electron emission portion 11 (the dark hatching region in FIG. 6). reference).
- the periphery of the connection portion P ⁇ b> 1 between the first portion 21 and the second portion 22 (substantially half of the first portion 21 and the second portion 22 around the connection portion P ⁇ b> 1).
- Half is a deformed portion Df having a relatively large change in flatness.
- the flatness change is maximum ( ⁇ 52 ⁇ m) in the connecting portion P1 in the deformed portion Df.
- the electron emitting portion 11 has a second portion 22 and a third portion on the inner peripheral side at the tip of the first portion 21 supported by the pair of terminal portions 12 (connection portion P1 with the second portion 22). It can be easily understood from the structure that supports the weight of the central portion 24 and the central portion 24.
- the support portion 13 is the current path 20 on the outer peripheral side of the electron emission portion 11, and is a connection portion between the first portion 21 and the second portion 22. It arrange
- the discharge part 11 can be structurally supported not only by the terminal part 12 but also by the support part 13 provided separately from the terminal part 12. Thereby, the subsidence (sag phenomenon) of the electron emission part 11 by the creep deformation
- the degree of change in flatness of the electron emitting portion 11 due to creep deformation accompanying the use of the emitter 10 is relatively large.
- the support part 13 is arranged so as to support Thereby, the subsidence (sag phenomenon) of the electron emission part 11 can be effectively suppressed by supporting the vicinity of the deformation part Df having a large change in flatness.
- the support portion 13 is disposed so as to support the vicinity of the connection portion P1 between the first portion 21 and the second portion 22 on the outer peripheral side.
- the vicinity of the connection portion P1 where the flatness is most likely to change can be structurally supported, so that the subsidence (sag phenomenon) of the electron emission portion 11 can be reliably and more effectively suppressed. it can.
- the support portion 13 is pulled out from the outer peripheral portion of the plate-shaped electron emission portion 11 and bent to the same side as the terminal portion 12, whereby the electron emission portion 11 and It is integrally formed in a flat plate shape.
- the support part 13 and the electron emission part 11 can be integrally formed from a common flat plate material, the support part 13 can be formed easily.
- the support portion 13 can be provided without increasing the number of parts.
- a pair of support portions 13 are provided at positions facing each other with the rotation axis (center axis) 3a interposed therebetween.
- the simulation result (example) in FIG. 7 is the same as the simulation result shown in FIG. 6 (comparative example in which the support portion 13 is not provided) for the emitter 10 according to the first embodiment provided with the support portion 13.
- the simulation results are shown.
- the amount of change in flatness at the connection portion P ⁇ b> 1 that showed the maximum amount of change in flatness in FIG. 6 was 0 ⁇ m (no change in flatness).
- the change in flatness becomes maximum at the connection portion P2 between the second portion 22 and the third portion 23 on the inner peripheral side, and the amount of change was ⁇ 13 ⁇ m.
- the flatness at the connection portion P2 was ⁇ 36 ⁇ m in the comparative example of FIG. Therefore, when the change in flatness is observed for each part, the amount of change in flatness at the connection portion P1 is suppressed from ⁇ 52 ⁇ m (comparative example) to 0 ⁇ m (example), and the amount of change in flatness at the connection portion P2 is reduced. That is, it was suppressed from ⁇ 36 ⁇ m (comparative example) to ⁇ 13 ⁇ m (example). From this result, it was confirmed that the flatness change due to the creep deformation is sufficiently suppressed over the entire electron emission portion 11 including the deformation portion Df by providing the support portion 13.
- the support portion 113 has the same lower surface 11 b as the terminal portion 12 in the direction intersecting (orthogonal) with the electron emission portion 11. It is formed to extend to the side (Z1 direction).
- One end of the support portion 113 is fixed by a fixing member 1b provided at a base portion (not shown) of the electron source 1, and the other end 113a (see FIG. 8B) of the support portion 113 is an electron emission portion. 11 or fixedly connected to the lower surface 11b of the electron emission portion 11 or disposed at a position where the lower surface 11b of the electron emission portion 11 contacts.
- the support part 113 only needs to support the electron emission part 11 and suppress creep deformation of the electron emission part 11, and does not need to be fixed to the electron emission part 11.
- 8 shows an example in which the other end 113a of the support portion 113 is in contact with the lower surface 11b of the electron emission portion 11.
- the support portion 113 is formed separately from the electron emission portion 11, the support portion 113 is formed of a material different from that of the electron emission portion 11 (a material other than tungsten or a tungsten alloy). May be.
- the support portion 113 may be formed of, for example, a refractory metal material other than tungsten such as molybdenum, or a ceramic material such as alumina (Al 2 O 3 ) or silicon nitride (Si 3 N 4 ).
- the emitters 210 and 230 of the X-ray tube apparatus 200 (see FIG. 1) according to the second embodiment of the present invention will be described with reference to FIGS.
- the deformation portion Df of the electron emission portion 11 is opposite to the deformation direction (gravity direction) due to creep deformation.
- An example configured to protrude in the following manner will be described.
- the configuration other than the emitter is the same as that of the first embodiment, and a description thereof will be omitted. Further, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
- the Z1 direction (the flatness minus direction) from the upper surface 11a to the lower surface 11b is the gravity direction (vertically downward) G2 in use. It is provided to match.
- the electron emitting portion 211 of the emitter 210 has a deformation direction (gravity) of the deforming portion Df in a region including the deforming portion Df in which the flatness of the electron emitting portion 211 is relatively large due to creep deformation accompanying the use of the emitter 210.
- a projecting portion 212 projecting in the direction opposite to the direction (Z2 direction) is formed.
- the protruding portion 212 is arranged in the current path 20 (first portion 21) on the outer peripheral side of the electron emitting portion 211 including the deformed portion Df among the electron emitting portions 211. Further, the protruding portion 212 is formed by inclining the first portion 21 so that the vicinity of the connection portion P1 between the first portion 21 and the second portion 22 protrudes.
- the first portion 21 on the side of one terminal portion 12 (referred to as the terminal portion 12a), the first portion from the position A on the terminal portion 12a side to the position B on the connection portion P1 side.
- the portion 21 is inclined to the Z2 direction side.
- the first portion 21 on the terminal portion 12a side protrudes in the Z2 direction so that the flatness is + ⁇ at the position B (projects by ⁇ with respect to the upper reference plane Rt).
- the first portion 21 from the position C on the terminal portion 12b side to the position D on the connection portion P1 side is the Z2 direction side. It is inclined to.
- the first portion 21 on the terminal portion 12b side also projects in the Z2 direction so that the flatness at the position D is + ⁇ (projects by ⁇ with respect to the upper reference plane Rt).
- the protruding portion 212 by inclining the first portion 21, the second portion 22, the third portion 23, and the central portion 24 of the electron emitting portion 211 also slightly protrude in the Z2 direction, and the electron emitting portion
- the upper surface 11a of 211 is substantially parallel to the upper reference surface Rt as a whole.
- the emitter 210 it is possible to cancel the flatness change in the Z1 direction, which coincides with the gravity direction G2, by the projecting portion 212 previously projected so that the flatness becomes + ⁇ in the Z2 direction. That is, in the second embodiment, the flatness becomes 0 when the flatness change in the Z1 direction is caused by approximately - ⁇ due to the sag phenomenon. As a result, sinking in the Z1 direction due to the sag phenomenon is alleviated by the protrusion amount ⁇ of the protrusion 212, and the lifetime of the emitter 210 until the desired X-ray focal spot diameter cannot be obtained can be extended.
- the protrusion amount ⁇ by the protrusion 212 is preferably as large as possible within a range where a desired X-ray focal spot diameter can be obtained.
- the direction of the emitter with respect to the direction of gravity varies depending on the direction of the X-ray tube apparatus 200 in use (during exposure) in the apparatus in which the X-ray tube apparatus 200 is mounted. Therefore, when the X-ray tube apparatus 200 is in use, when the deformation direction (gravity direction G2) coincides with the Z1 direction (flatness minus direction) from the upper surface 11a toward the lower surface 11b, the X including the emitter 210 is provided. When the deformation direction (gravity direction G2) coincides with the Z2 direction (flatness plus direction) from the lower surface 11b to the upper surface 11a using the ray tube device 200, the emitter 230 shown in FIG. What is necessary is just to provide.
- the emitter 230 is provided so that the Z2 direction (the flatness plus direction) from the lower surface 11b to the upper surface 11a coincides with the gravity direction G2 in use. .
- a protruding portion 232 that protrudes in the Z1 direction is formed in the electron emitting portion 231 of the emitter 230.
- the first portion 21 from the position A on the terminal portion 12a side to the position B on the connection portion P1 side is inclined to the Z1 direction side, and the flatness is Projecting in the Z1 direction so as to be ⁇ (projecting by ⁇ with respect to the lower reference surface Rb).
- the first portion 21 from the position C on the terminal portion 12b side to the position D on the connection portion P1 side is inclined to the Z1 direction side, and the flatness is ⁇ . It protrudes in the Z1 direction so that
- the protrusion 232 of the emitter 230 is formed by inclining the first portion 21 in the Z1 direction so that the vicinity of the connection portion P1 of the electron emission portion 231 protrudes.
- the protruding portion 212 (232) protruding in the direction opposite to the deformation direction of the deformation portion Df is provided in the electron emission portion 211 (231). . Accordingly, even when creep deformation occurs in the electron emission portion 211 (231), the change in flatness can be canceled by the protrusion 212 (232) protruding in the direction opposite to the deformation direction. That is, in the emitter 210 shown in FIG. 9, the change in flatness in the Z1 direction that coincides with the gravity direction G2 can be canceled by the protruding portion 212 that protrudes in the opposite Z2 direction in advance. In addition, in the emitter 230 shown in FIG.
- the change in flatness in the Z2 direction which coincides with the gravity direction G2
- the protruding portion 232 previously protruding in the opposite Z1 direction.
- the deformation can be canceled out by the protruding portion 212 (232) even when the deformation occurs, so that the electron emission portion 211 (231) is further submerged. It can be sufficiently suppressed.
- the protruding portion 212 (232) is protruded in the direction opposite to the gravity direction G2 during use.
- the creep deformation of the electron emitting portion 211 (231) due to gravity that always acts on the emitter 210 (230) can be canceled by the protruding portion 212 (232).
- the first portion 21 is inclined so that the vicinity of the connection portion P1 between the first portion 21 and the second portion 22 protrudes, whereby the protruding portion 212 (232). Form.
- the subsidence (sag phenomenon) of the electron emission portion 211 (231) in the vicinity of the connection portion P1 where the flatness is most likely to change can be canceled reliably and more effectively.
- sinking of the electron emission part due to creep deformation due to use is due to the high temperature when the emitter is energized and the external force acting on the electron emission part (gravity, centrifugal force, etc.) Etc.).
- the flatness of the electron emission portion changes due to the centrifugal force acting on the emitter as the envelope 3 rotates, There may be a case where the flatness of the electron emission portion changes due to an inertial force when the entire X-ray tube apparatus is moved by the moving mechanism.
- the direction of gravity G2 is different from the deformation direction due to the sag phenomenon, such as the emitter 210a shown in FIG. 11A and the emitter 230a shown in FIG.
- the protruding portion 212a (232a) is provided in the electron emitting portion 211a (231a) so as to protrude in the direction opposite to the deformation direction.
- the protruding portion 212a is Z2 in the direction opposite to the deformation direction. It is formed so as to protrude in the direction (flatness plus direction).
- the protruding portion 232a is in the direction opposite to the deformation direction. Are formed so as to protrude in the Z1 direction (negative flatness direction).
- the protruding portion 212a (232a) that protrudes in the direction opposite to the creep deformation direction. Is provided in the electron emission portion 211a (231a), the sinking (sag phenomenon) of the electron emission portion 211a (231a) can be canceled.
- the emitter 310 of the X-ray tube apparatus 300 will be described with reference to FIGS.
- the third embodiment an example in which the passage width of the current path including the deformed portion of the electron emission portion is increased in addition to the configuration of the first embodiment in which the electron emission portion 11 is provided with the support portion 13 will be described.
- the configuration other than the emitter is the same as that of the first embodiment, and a description thereof will be omitted.
- symbol is attached
- the electron emission portion 311 of the emitter 310 of the X-ray tube apparatus 300 is wider than the other portions of the current path 320.
- the wide portion 312 is a region including the deformation portion Df, and is disposed in the current path 320 on the outer peripheral side of the electron emission portion 311. More specifically, the wide portion 312 is formed over the entire first portion 21 including the vicinity (deformed portion Df) of the connection portion P1 between the first portion 21 and the second portion 22 of the current path 320. That is, in the third embodiment, in the current passage 320, the entire first portion 21 is the wide portion 312 having the passage width W4, and the second portion 22 and the third portion 23 have the passage width W3. ing. As a result, the electron emitting portion 311 has a mechanical strength in the first portion 21 (wide portion 312) on the outer peripheral side where the passage width is relatively larger than that of the second portion 22 and the third portion 23 on the inner peripheral side. growing.
- the passage width W4 of the first portion 21 is made larger than the passage width W1 (see FIG. 3) of the emitter 10 according to the first embodiment, and the wide portion 312 is obtained.
- An example is shown in which the passage width W3 of the second portion 22 and the third portion 23 other than those is equal to the passage width W1.
- the passage width of the wide portion 312 may be relatively increased by making the passage width of the portion other than the wide portion 312 (the second portion 22 and the third portion 23) smaller than W1. .
- the electron emission part 311 is provided with the wide part 312 having a larger path width than the other part of the current path 320.
- the wide part 312 is arrange
- the mechanical strength of the current path 320 (wide portion 312) in the region including the deformed portion Df can be improved relative to other portions.
- the sinking of the electron emission part 311 can be suppressed more fully.
- the wide portion 312 is located on the outer peripheral side of the electron emission portion 311 and in the vicinity of the connection portion P1 (deformation portion Df) between the first portion 21 and the second portion 22. Formed in the first portion 21. Thereby, the subsidence (sag phenomenon) of the electron emission part 311 in the vicinity of the connection part P1 (deformation part Df) in which the flatness is most likely to change can be surely and more effectively suppressed.
- an emitter 410 (430) of an X-ray tube apparatus 400 according to a fourth embodiment of the present invention will be described with reference to FIGS.
- the second embodiment the example in which both the support portion 13 and the protruding portion 212 (232) are provided in the electron emitting portion 11 has been shown.
- the fourth embodiment only the protruding portion is provided in the electron emitting portion.
- the configuration other than the emitter is the same as that of the second embodiment, and a description thereof will be omitted.
- symbol is attached
- the emitter 410 (430) of the X-ray tube apparatus 400 (see FIG. 1) according to the fourth embodiment includes the emitter 210 (230) according to the second embodiment (see FIGS. 9 and FIG. 15). 10), the support portion 13 is not provided, and only the protruding portion 212 (232) is formed. The structure of the protrusion 212 (232) is the same as that of the second embodiment.
- the emitter 410 shown in FIG. 14 is an example in which the deformation direction of the deformation portion Df in the electron emission portion 411 is the Z1 direction (the flatness minus direction), and the deformation direction of the deformation portion Df matches the gravity direction G2 in use. An example of doing this is shown.
- the emitter 430 shown in FIG. 15 is an example in which the deformation direction of the deformation portion Df in the electron emission portion 431 is the Z2 direction (flatness plus direction), and the deformation direction of the deformation portion Df matches the gravity direction G2 in use. An example of doing this is shown.
- the Z1 direction flatness minus direction
- the Z2 direction flatness plus direction
- the X-ray tube apparatus 400 including the emitter 430 illustrated in FIG. Use it.
- the protruding portion 212 (232) protruding in the direction opposite to the deformation direction of the deformation portion Df is provided in advance to the electron emission portion 411 (431).
- the change in flatness can be canceled by the protruding portion 212 (232) protruding in the direction opposite to the deformation direction.
- the sinking of the electron emitting portion 411 (431) due to creep deformation accompanying use can be sufficiently suppressed.
- the sinking of the electron emission portion 411 (431) can be suppressed by providing only the protruding portion 212 (232) without providing the support portion 13.
- an emitter 510 of an X-ray tube apparatus 500 will be described with reference to FIGS.
- the third embodiment an example in which both the support portion 13 and the wide portion 312 are provided in the electron emission portion 11 has been described.
- the fifth embodiment an example in which only the wide portion is provided in the electron emission portion will be described.
- the configuration other than the emitter is the same as that of the third embodiment, and a description thereof will be omitted.
- symbol is attached
- the electron emitting portion 511 of the emitter 510 in the X-ray tube apparatus 500 (see FIG. 1) according to the fifth embodiment is different from the emitter 310 according to the third embodiment in that a support portion is provided. 13 is not provided, and only the wide portion 312 is formed in the current path 520.
- the configuration of the wide portion 312 is the same as that of the third embodiment.
- the passage width of the wide portion 312 is relatively increased by reducing the passage width of the portion other than the wide portion 312 (the second portion 22 and the third portion 23). It may be configured.
- the electron emission part 511 is provided with the wide part 312 having a larger path width than the other part of the current path 520.
- the wide part 312 is arrange
- the sinking of the electron emission portion 511 can be sufficiently suppressed by providing only the wide portion 312 without providing the support portion 13.
- any one of the X-ray tube apparatuses according to the first to fifth embodiments (or the first and second modifications) described above is used, and the X-ray tube apparatus is used (at the time of exposure).
- the emitter is arranged in the opposite direction and energized and heated will be described.
- the X-ray tube apparatus 100 according to the first embodiment (see FIG. 1). An example using is shown.
- the X-ray tube apparatus 100 is a medical X-ray tube, for example, and is mounted on an X-ray imaging apparatus such as an X-ray apparatus or an X-ray tomography apparatus.
- the X-ray imaging apparatus 601 includes an irradiation unit 602 incorporating the X-ray tube apparatus 100 and a support mechanism 603 that supports the irradiation unit 602 so as to be movable.
- the irradiation unit 602 is supported by a rotation shaft 603a of the support mechanism 603 so as to be rotatable about an axis, and is configured to be movable up and down and left and right together with the rotation shaft 603a.
- an imaging unit 604 including an X-ray detector is disposed so as to face the irradiation unit 602.
- the imaging unit 604 is also supported by the support mechanism 605 so as to be movable up and down.
- X-rays are emitted from the X-ray tube apparatus 100 with a subject (patient) placed at a predetermined imaging position 606 between the irradiation unit 602 and the imaging unit 604.
- the imaging unit 604 detects X-rays emitted from the irradiation unit 602 (X-ray tube apparatus 100), thereby performing X-ray imaging.
- the emitter 10 When in use (during exposure), the emitter 10 emits electrons while facing the target 2 in the G1 direction (vertically upward) along the gravity direction (vertically downward) G2, and generates X-rays. That is, as shown in FIG. 19A, since the upper surface 11a of the electron emission portion 11 is an electron emission surface, the emitter 10 in a state where the Z2 direction of the emitter 10 from the lower surface 11b toward the upper surface 11a faces the G1 direction. X-rays are generated by energizing and heating.
- the irradiation unit 602 (X-ray tube apparatus 100) is rotated around the rotation shaft 603a to move the X-ray tube apparatus 100 up and down.
- the emitter 10 is energized and heated in the inverted state.
- the irradiation unit 602 (X-ray tube device 100) is rotated so that the Z2 direction of the emitter 10 faces the G2 direction opposite to that in use. Invert. Then, the emitter 10 is energized and heated in a state where the Z2 direction of the emitter 10 (electron emitting portion 11) faces the G2 direction opposite to the G1 direction and faces the target 2.
- the emitter 10 After that, at the time of the next use (at the time of exposure), as shown in FIG. 19C, the emitter 10 returns again to the state facing the G1 direction to face the target 2 to generate X-rays.
- the emitter 10 returns again to the state facing the G1 direction to face the target 2 to generate X-rays.
- the inversion heating when not in use shown in FIG. 19B is the same as the energization heating condition (heating temperature (current value)) of the emitter 10 in use and is in use. It is carried out over a time approximately equal to the total time of the energization heating time of the emitter 10. It should be noted that the reversal heating when not in use does not need to generate X-rays, since it is only necessary to heat the emitter 10 by energization. Further, the reversal heating when not in use may be performed, for example, at night time when the X-ray imaging apparatus 601 is not used, or at a holiday of a facility where the X-ray imaging apparatus 601 is used.
- the emitter 10 is energized in a state where the emitter 10 is in the direction of gravity and faces the target 2 in the G2 direction opposite to the G1 direction during use (during exposure). Heat.
- the change in flatness in the Z1 direction of the electron emission portion 11 due to creep deformation that occurs during normal use (during exposure) occurs in the reverse direction (Z2) generated by energization heating with the emitter 10 directed in the G2 direction. Direction) and can be canceled out by the change in flatness.
- the subsidence (sag phenomenon) of the electron emission part 11 by creep deformation accompanying use of the emitter 10 can be effectively suppressed.
- the support unit 13 (see FIG. 2) is provided separately from the terminal unit 12 and insulated from the electrode 1a and supports the electron emission unit 11.
- the plate-shaped electron emission portion 11 can be supported by the support portion 13, so that the electron emission portion 11 is subducted (sag) due to creep deformation accompanying use. Phenomenon).
- the present invention is not limited to this.
- any of the X-ray tube apparatuses according to the second to fifth embodiments (or modifications of the first embodiment and the second embodiment) other than the first embodiment may be used. Also in these cases, sinking (sag phenomenon) of the electron emission portion 11 can be similarly suppressed.
- the emitter 710 of the X-ray tube apparatus 700 (see FIG. 1) used in the seventh embodiment is not provided with a support portion 13.
- the emitter 710 is not provided with any of the protrusion 212 (232) shown in the second embodiment and the wide part 312 shown in the third embodiment, and is based on the comparative example shown in FIG. It has the same configuration as the emitter. Since the other configuration of the emitter 710 is the same as that of the first embodiment, description thereof is omitted.
- the emitter 710 faces the G1 direction (vertically upward) along the direction of gravity.
- the configuration of the X-ray imaging apparatus using the X-ray tube apparatus 700, the specific operation when the X-ray tube apparatus 700 is used (at the time of exposure), and the specific operation when not in use (at the time of inversion heating) are as follows. This is the same as the sixth embodiment.
- the flatness change in the negative direction (Z1 direction) of the electron emission portion 711 during use shown in FIG. 20A is the plus direction of the electron emission portion 711 in the inversion heating when not in use as shown in FIG. It is canceled by the change in flatness (Z2 direction).
- the emitter 710 is energized with the emitter 710 along the direction of gravity and facing the target 2 facing the G2 direction opposite to the G1 direction during use (during exposure). Heat.
- a change in flatness in the Z1 direction of the electron emission portion 711 due to creep deformation that occurs during normal use (during X-ray exposure) occurs in the reverse direction generated by energization heating with the emitter 710 directed in the G2 direction. It can be canceled by the change in flatness in the (Z1 direction).
- sinking (sag phenomenon) of the electron emission portion 711 due to creep deformation accompanying use of the emitter 710 can be sufficiently suppressed.
- sinking of the electron emission portion 711 can be sufficiently suppressed by performing only inversion heating without providing the support portion 13.
- the present invention is not limited to this.
- the present invention may be applied to an X-ray tube apparatus other than the envelope rotating type, such as an anode rotating type X-ray tube apparatus in which only the envelope is fixed, or an anode fixing type X-ray tube apparatus.
- the electron emission part may be a flat plate shape
- the planar view shape of the electron emission part may be a rectangular shape or a polygonal flat plate shape.
- the shape of the electron emitting portion in plan view is circular or circular in consideration of stability during rotation. A polygonal shape close to the shape is preferred.
- the plate-shaped electron emission portion may be formed by a current path having a shape different from the shape shown in the above embodiments.
- the arrangement of the support portion is determined according to the shape of the electron emitting portion (current path). do it.
- the support portion is formed so as to extend on the same side as the terminal portion of the emitter.
- the present invention is not limited to this.
- the support portion may be formed so as to extend on a side different from the terminal portion.
- the support portion is provided so as to extend to the side of the emitter (in a direction parallel to the plate-shaped electron emission portion). Also good.
- the present invention is not limited to this.
- One or three or more support portions may be provided.
- the number of support parts is large, the heat of the electron emission part may escape to the support part during energization heating, and the temperature distribution of the electron emission part may vary, so the support part supports the electron emission part. It is preferable to provide a sufficient number and as few as possible.
- the present invention is not limited to this.
- the present invention may be applied to an X-ray tube apparatus used in an industrial apparatus such as an X-ray inspection apparatus (non-destructive inspection apparatus).
Landscapes
- X-Ray Techniques (AREA)
Abstract
Description
まず、図1~図3を参照して、第1実施形態によるX線管装置100の構成について説明する。
次に、図7を参照して、第1実施形態によるX線管装置100の効果を確認するために行ったシミュレーション結果(実施例)について説明する。
上記第1実施形態では、支持部13を、電流通路20(電子放出部11)と一体的に形成した例を示したが、この第1実施形態の変形例では、支持部を、電流通路20(電子放出部11)とは別体で設けている。
次に、図1、図9および図10を参照して、本発明の第2実施形態によるX線管装置200(図1参照)のエミッタ210および230について説明する。第2実施形態では、電子放出部11に支持部13を設けた上記第1実施形態の構成に加えて、電子放出部11の変形部Dfをクリープ変形による変形方向(重力方向)とは逆方向に突出するように構成した例について説明する。なお、第2実施形態では、エミッタ以外の構成は上記第1実施形態と同様であるので、説明を省略する。また、エミッタについて上記第1実施形態と同一の構成については同一の符号を付し、説明を省略する。
上記第2実施形態では、突出部212(232)を、使用時における重力方向G2とは逆方向に向けて突出させた例を示したが、この第2実施形態の変形例では、突出部を、重力方向G2とは異なる方向に突出させている。
次に、図1、図12および図13を参照して、本発明の第3実施形態によるX線管装置300のエミッタ310について説明する。第3実施形態では、電子放出部11に支持部13を設けた上記第1実施形態の構成に加えて、電子放出部の変形部を含む電流通路の通路幅を大きくした例について説明する。なお、第3実施形態では、エミッタ以外の構成は上記第1実施形態と同様であるので、説明を省略する。また、上記第1実施形態と同一の構成については同一の符号を付し、説明を省略する。
次に、図1、図14および図15を参照して、本発明の第4実施形態によるX線管装置400のエミッタ410(430)について説明する。上記第2実施形態では、電子放出部11に支持部13と突出部212(232)との両方を設けた例を示したが、この第4実施形態では、電子放出部に突出部のみを設けた例について説明する。なお、第4実施形態では、エミッタ以外の構成は上記第2実施形態と同様であるので、説明を省略する。また、上記第1実施形態と同一の構成については同一の符号を付し、説明を省略する。
次に、図1、図16および図17を参照して、本発明の第5実施形態によるX線管装置500のエミッタ510について説明する。上記第3実施形態では、電子放出部11に支持部13と幅広部312との両方を設けた例を示したが、第5実施形態では、電子放出部に幅広部のみを設けた例について説明する。なお、第5実施形態では、エミッタ以外の構成は上記第3実施形態と同様であるので、説明を省略する。また、上記第1実施形態と同一の構成については同一の符号を付し、説明を省略する。
次に、図1、図2、図18および図19を参照して、本発明の第6実施形態によるX線管装置の使用方法について説明する。この第6実施形態では、上記した第1~第5実施形態(または第1および第2変形例)によるX線管装置のいずれかを用いて、X線管装置の使用時(曝射時)とは逆方向にエミッタを配置して通電加熱する例について説明する。なお、第6実施形態では、上記第1~第5実施形態(または第1および第2変形例)に示した構成の一例として、上記第1実施形態によるX線管装置100(図1参照)を用いる例を示す。
次に、図1、図6および図20を参照して、本発明の第7実施形態によるX線管装置の使用方法について説明する。この第7実施形態では、上記した第1~第5実施形態(または第1実施形態および第2実施形態の変形例)によるX線管装置以外の構成において、X線管装置の使用時(曝射時)とは逆方向にエミッタを配置して通電加熱する例について説明する。
1a 電極
2 ターゲット(陽極)
3 外囲器
10、110、210、210a、230、230a、310、410、430、510、710 エミッタ
11、211、211a、231、231a、311、411、431、511、711 電子放出部
12(12a、12b) 端子部
13 113 支持部
20、320、520 電流通路
21 第1部分
22 第2部分
212、212a、232、232a 突出部
312 幅広部
Df 変形部
P1 接続部分
100、200、300、400、500、700 X線管装置
Claims (19)
- 陽極と、
前記陽極に対して電子を放出するエミッタを含む陰極とを備え、
前記エミッタは、
平板状の電子放出部と、
前記電子放出部からそれぞれ延びるとともに、電極に接続される一対の端子部と、
前記端子部とは別個に設けられ、前記電極に対して絶縁されるとともに、前記電子放出部を支持する支持部とを含む、X線管装置。 - 前記支持部は、前記電子放出部のうち、前記エミッタの使用に伴うクリープ変形により前記電子放出部の平坦度が変化する度合いが相対的に大きい変形部の近傍を支持するように配置されている、請求項1に記載のX線管装置。
- 前記電子放出部は、曲がりくねった電流通路により平板状に形成され、
前記支持部は、前記電子放出部のうち、前記変形部を含む前記電子放出部の外周側の前記電流通路を支持するように配置されている、請求項2に記載のX線管装置。 - 前記電流通路は、少なくとも、一方の前記端子部から他方の前記端子部側に向けて延びる外周側の第1部分と、前記第1部分から連続して前記第1部分よりも内周側を前記他方の端子部側から前記一方の端子部側に向けて延びる第2部分とを含み、
前記支持部は、前記第1部分と前記第2部分との接続部分の近傍を支持するように配置されている、請求項3に記載のX線管装置。 - 前記支持部は、前記電子放出部と交差する方向で前記端子部と同じ側に延びるように形成されるとともに、一端が固定され、他端が前記電子放出部に連結されるか、または前記電子放出部と接触する位置に配置されている、請求項1に記載のX線管装置。
- 前記支持部は、平板状の前記電子放出部の外周部から引き出されるとともに前記端子部と同じ側に折り曲げられることにより、前記電子放出部と一体的に平板状に形成されている、請求項1に記載のX線管装置。
- 前記エミッタと前記陽極としてのターゲットとを収容するとともに、中心軸回りに回転する筒状の外囲器をさらに備え、
前記支持部は、前記中心軸を挟んで対向する位置に一対設けられている、請求項1に記載のX線管装置。 - 前記電子放出部は、前記エミッタの使用に伴うクリープ変形により前記電子放出部の平坦度が変化する度合いが相対的に大きい変形部を含む領域において、前記変形部の変形方向とは逆方向に向けて突出した突出部を有する、請求項1に記載のX線管装置。
- 前記突出部は、使用時における重力作用方向とは逆方向に向けて突出している、請求項8に記載のX線管装置。
- 前記電子放出部は、曲がりくねった電流通路により平板状に形成され、
前記突出部は、前記電子放出部のうち、前記変形部を含む前記電子放出部の外周側の前記電流通路に配置されている、請求項8に記載のX線管装置。 - 前記電流通路は、少なくとも、一方の前記端子部から他方の前記端子部側に向けて延びる外周側の第1部分と、前記第1部分から連続して前記第1部分よりも内周側を前記他方の端子部側から前記一方の端子部側に向けて延びる第2部分とを含み、
前記突出部は、前記第1部分と前記第2部分との接続部分の近傍が突出するように前記第1部分を傾斜させることにより、形成されている、請求項10に記載のX線管装置。 - 前記電子放出部は、曲がりくねった電流通路により平板状に形成されているとともに、前記電流通路の他の部分より経路幅の大きい幅広部を有し、
前記幅広部は、前記エミッタの使用に伴うクリープ変形により前記電子放出部の平坦度が変化する度合いが相対的に大きい変形部を含む領域に配置されている、請求項1に記載のX線管装置。 - 前記幅広部は、前記電子放出部のうち、前記変形部を含む前記電子放出部の外周側の前記電流通路に配置されている、請求項12に記載のX線管装置。
- 前記電子放出部は、少なくとも、一方の前記端子部から他方の前記端子部側に向けて延びる外周側の第1部分と、前記第1部分から連続して前記第1部分よりも内周側を前記他方の端子部側から前記一方の端子部側に向けて延びる第2部分とを含み、
前記幅広部は、前記第1部分と前記第2部分との接続部分の近傍を含む前記第1部分に形成されている、請求項13に記載のX線管装置。 - 陽極と、前記陽極に対して電子を放出するエミッタを含む陰極とを備え、前記エミッタは、平板状の電子放出部と、前記電子放出部からそれぞれ延びるとともに、電極に接続される一対の端子部と、前記端子部とは別個に設けられ、前記電極に対して絶縁されるとともに、前記電子放出部を支持する支持部とを含む、X線管装置の使用方法であって、
前記エミッタが重力方向に沿う第1方向を向いて前記陽極と対向する状態で電子を放出してX線を発生させる工程と、
前記エミッタが重力方向に沿うとともに前記第1方向とは反対の第2方向を向いて前記陽極と対向する状態で、少なくとも前記エミッタに通電して加熱する工程とを備える、X線管装置の使用方法。 - 陽極と、前記陽極に対して電子を放出する平板状の電子放出部を有するエミッタとを備えたX線管装置の使用方法であって、
前記エミッタが重力方向に沿う第1方向を向いて前記陽極と対向する状態で電子を放出してX線を発生させる工程と、
前記エミッタが重力方向に沿うとともに前記第1方向とは反対の第2方向を向いて前記陽極と対向する状態で、少なくとも前記エミッタに通電して加熱する工程とを備える、X線管装置の使用方法。 - 前記エミッタが前記第2方向を向いて通電加熱する工程は、前記X線を発生させる工程における前記エミッタの通電加熱条件と同一条件で、かつ、前記X線を発生させる工程における通電加熱時間と略等しい時間、実施される、請求項16に記載のX線管装置の使用方法。
- 陽極と、
前記陽極に対して電子を放出するエミッタを含む陰極とを備え、
前記エミッタは、
平板状の電子放出部と、
前記電子放出部の両端からそれぞれ延びるとともに、電極に接続される一対の端子部と、を含み、
前記電子放出部は、前記エミッタの使用に伴うクリープ変形により前記電子放出部の平坦度が変化する度合いが相対的に大きい変形部を含む領域において、前記変形部の変形方向とは逆方向に向けて突出した突出部を有する、X線管装置。 - 陽極と、
前記陽極に対して電子を放出するエミッタを含む陰極とを備え、
前記エミッタは、
曲がりくねった電流通路により平板状に形成されているとともに、前記電流通路の他の部分よりも経路幅の大きい幅広部を有する電子放出部と、
前記電子放出部の両端からそれぞれ延びるとともに、電極に接続される一対の端子部と、を含み、
前記幅広部は、前記エミッタの使用に伴うクリープ変形により前記電子放出部の平坦度が変化する度合いが相対的に大きい変形部を含む領域に配置されている、X線管装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2012/073340 WO2014041639A1 (ja) | 2012-09-12 | 2012-09-12 | X線管装置およびx線管装置の使用方法 |
CN201280075793.2A CN104620350B (zh) | 2012-09-12 | 2012-09-12 | X射线管装置 |
US14/427,580 US9887061B2 (en) | 2012-09-12 | 2012-09-12 | X-ray tube device and method for using X-ray tube device |
EP12884377.8A EP2897155B1 (en) | 2012-09-12 | 2012-09-12 | X-ray tube device |
JP2014535286A JP6003993B2 (ja) | 2012-09-12 | 2012-09-12 | X線管装置およびx線管装置の使用方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2012/073340 WO2014041639A1 (ja) | 2012-09-12 | 2012-09-12 | X線管装置およびx線管装置の使用方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014041639A1 true WO2014041639A1 (ja) | 2014-03-20 |
Family
ID=50277794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2012/073340 WO2014041639A1 (ja) | 2012-09-12 | 2012-09-12 | X線管装置およびx線管装置の使用方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9887061B2 (ja) |
EP (1) | EP2897155B1 (ja) |
JP (1) | JP6003993B2 (ja) |
CN (1) | CN104620350B (ja) |
WO (1) | WO2014041639A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016208012A1 (ja) * | 2015-06-24 | 2016-12-29 | 株式会社島津製作所 | X線管装置および陰極 |
JP2017033733A (ja) * | 2015-07-31 | 2017-02-09 | 株式会社島津製作所 | 陰極の製造方法、陰極およびx線管装置 |
US10111311B2 (en) | 2016-03-14 | 2018-10-23 | Shimadzu Corporation | Emitter and X-ray tube device having the same |
US10121628B2 (en) | 2015-12-14 | 2018-11-06 | Shimadzu Corporation | Emitter and X-ray tube device |
US10475615B2 (en) | 2018-02-08 | 2019-11-12 | Shimadzu Corporation | Production method of negative electrode, negative electrode, and X-ray tube device |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10109284B2 (en) | 2016-02-12 | 2018-10-23 | Qualcomm Incorporated | Inter-channel encoding and decoding of multiple high-band audio signals |
US10109450B2 (en) * | 2016-03-18 | 2018-10-23 | Varex Imaging Corporation | X-ray tube with structurally supported planar emitter |
JP6744116B2 (ja) * | 2016-04-01 | 2020-08-19 | キヤノン電子管デバイス株式会社 | エミッター及びx線管 |
US10636608B2 (en) * | 2017-06-05 | 2020-04-28 | General Electric Company | Flat emitters with stress compensation features |
SG10201904997TA (en) | 2018-06-01 | 2020-01-30 | Micromass Ltd | Filament assembly |
CN111029233B (zh) * | 2019-12-25 | 2022-07-26 | 上海联影医疗科技股份有限公司 | 电子发射体、电子发射器、x射线管及医疗成像设备 |
CN113421809B (zh) * | 2021-06-29 | 2022-02-15 | 成都锐明合升科技有限责任公司 | 辐照用x射线管及其剂量周向和轴向均匀分布调制方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713658A (en) * | 1980-06-30 | 1982-01-23 | Hitachi Ltd | Thermion emitting structured body for x-ray tube |
JPS61260529A (ja) * | 1985-05-14 | 1986-11-18 | Fujitsu Ltd | 電子銃 |
JPH10321119A (ja) * | 1997-05-15 | 1998-12-04 | Rigaku Corp | 熱電子放出フィラメントおよび熱電子放出装置 |
JP2000093419A (ja) * | 1998-09-22 | 2000-04-04 | Kazuhide Urabe | X線スキャン装置及びx線ctスキャナ |
JP2002298771A (ja) * | 2001-03-30 | 2002-10-11 | Siemens Ag | 熱電子エミッタ |
JP2005174939A (ja) * | 2003-12-12 | 2005-06-30 | Ge Medical Systems Global Technology Co Llc | X線管陰極フィラメントの製造方法及びx線管 |
JP2010534396A (ja) | 2007-07-24 | 2010-11-04 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 熱イオン電子エミッタ、熱イオン電子エミッタを作成する方法、及び熱イオン電子エミッタを含むx線源 |
JP2010534395A (ja) * | 2007-07-24 | 2010-11-04 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 熱イオン電子エミッタ及びそれを含むx線源 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3082339A (en) * | 1959-08-11 | 1963-03-19 | Gen Electric | Electric discharge device |
DE3534793A1 (de) * | 1985-09-30 | 1987-04-02 | Leybold Heraeus Gmbh & Co Kg | Einspannvorrichtung fuer spiralfoermige drahtkatoden |
GB2214705A (en) * | 1988-01-26 | 1989-09-06 | English Electric Valve Co Ltd | Directly heated cathode |
US5343112A (en) * | 1989-01-18 | 1994-08-30 | Balzers Aktiengesellschaft | Cathode arrangement |
DE19627025C2 (de) * | 1996-07-04 | 1998-05-20 | Siemens Ag | Röntgenröhre |
US6115453A (en) * | 1997-08-20 | 2000-09-05 | Siemens Aktiengesellschaft | Direct-Heated flats emitter for emitting an electron beam |
US6259193B1 (en) * | 1998-06-08 | 2001-07-10 | General Electric Company | Emissive filament and support structure |
DE10016125A1 (de) * | 1999-04-29 | 2000-11-02 | Siemens Ag | Lebensdaueroptimierter Emitter |
DE10029253C1 (de) * | 2000-06-14 | 2001-10-25 | Siemens Ag | Direktgeheizter thermionischer Flachemitter |
US6480572B2 (en) * | 2001-03-09 | 2002-11-12 | Koninklijke Philips Electronics N.V. | Dual filament, electrostatically controlled focal spot for x-ray tubes |
DE10135995C2 (de) * | 2001-07-24 | 2003-10-30 | Siemens Ag | Direktgeheizter thermionischer Flachemitter |
JP2003297273A (ja) * | 2002-04-02 | 2003-10-17 | Jeol Ltd | 電子ビーム装置 |
US7320733B2 (en) * | 2003-05-09 | 2008-01-22 | Sukegawa Electric Co., Ltd. | Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof |
US7795792B2 (en) * | 2006-02-08 | 2010-09-14 | Varian Medical Systems, Inc. | Cathode structures for X-ray tubes |
DE102006018633B4 (de) * | 2006-04-21 | 2011-12-29 | Siemens Ag | Flächenemitter und Röntgenröhre mit Flächenemitter |
WO2007132380A2 (en) * | 2006-05-11 | 2007-11-22 | Philips Intellectual Property & Standards Gmbh | Emitter design including emergency operation mode in case of emitter-damage for medical x-ray application |
EP2084728A2 (en) * | 2006-10-17 | 2009-08-05 | Philips Intellectual Property & Standards GmbH | Emitter for x-ray tubes and heating method therefore |
EP2156459B1 (en) * | 2007-06-01 | 2013-03-27 | Philips Intellectual Property & Standards GmbH | Preparing method for electron emitting foil with temporary fixing bars |
CN101689465B (zh) * | 2007-08-09 | 2012-05-16 | 株式会社岛津制作所 | X射线管装置 |
CN101459019B (zh) * | 2007-12-14 | 2012-01-25 | 清华大学 | 热电子源 |
US8247971B1 (en) * | 2009-03-19 | 2012-08-21 | Moxtek, Inc. | Resistively heated small planar filament |
JP2010277822A (ja) | 2009-05-28 | 2010-12-09 | Shimadzu Corp | X線管装置 |
US8175222B2 (en) * | 2009-08-27 | 2012-05-08 | Varian Medical Systems, Inc. | Electron emitter and method of making same |
DE102011006654B3 (de) * | 2011-04-01 | 2012-04-26 | Siemens Aktiengesellschaft | Drehkolben-Röntgenstrahler sowie Verfahren zum Betrieb eines Drehkolben-Röntgenstrahlers |
US9251987B2 (en) * | 2012-09-14 | 2016-02-02 | General Electric Company | Emission surface for an X-ray device |
US9202663B2 (en) * | 2012-12-05 | 2015-12-01 | Shimadzu Corporation | Flat filament for an X-ray tube, and an X-ray tube |
US9953797B2 (en) * | 2015-09-28 | 2018-04-24 | General Electric Company | Flexible flat emitter for X-ray tubes |
US9530603B1 (en) * | 2015-10-26 | 2016-12-27 | Shimadzu Corporation | Flat emitter |
-
2012
- 2012-09-12 EP EP12884377.8A patent/EP2897155B1/en not_active Not-in-force
- 2012-09-12 CN CN201280075793.2A patent/CN104620350B/zh not_active Expired - Fee Related
- 2012-09-12 WO PCT/JP2012/073340 patent/WO2014041639A1/ja active Application Filing
- 2012-09-12 US US14/427,580 patent/US9887061B2/en not_active Expired - Fee Related
- 2012-09-12 JP JP2014535286A patent/JP6003993B2/ja not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5713658A (en) * | 1980-06-30 | 1982-01-23 | Hitachi Ltd | Thermion emitting structured body for x-ray tube |
JPS61260529A (ja) * | 1985-05-14 | 1986-11-18 | Fujitsu Ltd | 電子銃 |
JPH10321119A (ja) * | 1997-05-15 | 1998-12-04 | Rigaku Corp | 熱電子放出フィラメントおよび熱電子放出装置 |
JP2000093419A (ja) * | 1998-09-22 | 2000-04-04 | Kazuhide Urabe | X線スキャン装置及びx線ctスキャナ |
JP2002298771A (ja) * | 2001-03-30 | 2002-10-11 | Siemens Ag | 熱電子エミッタ |
JP2005174939A (ja) * | 2003-12-12 | 2005-06-30 | Ge Medical Systems Global Technology Co Llc | X線管陰極フィラメントの製造方法及びx線管 |
JP2010534396A (ja) | 2007-07-24 | 2010-11-04 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 熱イオン電子エミッタ、熱イオン電子エミッタを作成する方法、及び熱イオン電子エミッタを含むx線源 |
JP2010534395A (ja) * | 2007-07-24 | 2010-11-04 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 熱イオン電子エミッタ及びそれを含むx線源 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016208012A1 (ja) * | 2015-06-24 | 2016-12-29 | 株式会社島津製作所 | X線管装置および陰極 |
JPWO2016208012A1 (ja) * | 2015-06-24 | 2018-04-26 | 株式会社島津製作所 | X線管装置および陰極 |
US20180182589A1 (en) * | 2015-06-24 | 2018-06-28 | Shimadzu Corporation | X-ray tube device and negative electrode |
JP2017033733A (ja) * | 2015-07-31 | 2017-02-09 | 株式会社島津製作所 | 陰極の製造方法、陰極およびx線管装置 |
US10121628B2 (en) | 2015-12-14 | 2018-11-06 | Shimadzu Corporation | Emitter and X-ray tube device |
US10111311B2 (en) | 2016-03-14 | 2018-10-23 | Shimadzu Corporation | Emitter and X-ray tube device having the same |
US10475615B2 (en) | 2018-02-08 | 2019-11-12 | Shimadzu Corporation | Production method of negative electrode, negative electrode, and X-ray tube device |
Also Published As
Publication number | Publication date |
---|---|
EP2897155A4 (en) | 2016-09-07 |
CN104620350A (zh) | 2015-05-13 |
US9887061B2 (en) | 2018-02-06 |
EP2897155A1 (en) | 2015-07-22 |
US20150262782A1 (en) | 2015-09-17 |
JPWO2014041639A1 (ja) | 2016-08-12 |
CN104620350B (zh) | 2017-02-15 |
JP6003993B2 (ja) | 2016-10-05 |
EP2897155B1 (en) | 2018-05-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6003993B2 (ja) | X線管装置およびx線管装置の使用方法 | |
US10181389B2 (en) | X-ray tube having magnetic quadrupoles for focusing and collocated steering coils for steering | |
EP2450933B1 (en) | X-ray tube apparatus | |
EP2869327B1 (en) | X-ray tube | |
US9659755B2 (en) | Plasma generator and thermal electron emitter | |
JP6527296B2 (ja) | 構造的に支持される平面放射体を有するx線管 | |
US9953797B2 (en) | Flexible flat emitter for X-ray tubes | |
JP2012234810A (ja) | X線管およびx線管の動作方法 | |
CN104246964A (zh) | X射线管 | |
JP2007305337A (ja) | マイクロフォーカスx線管 | |
JP2011233365A (ja) | 回転陽極型x線管及び回転陽極型x線管装置 | |
JP2018060621A (ja) | X線管 | |
WO2017073109A1 (ja) | 回転陽極型x線管 | |
JP2018181768A (ja) | X線管 | |
JP6620348B2 (ja) | 回転陽極型x線管 | |
JP5574672B2 (ja) | X線管装置及びx線装置 | |
WO2019126008A1 (en) | Bipolar grid for controlling an electron beam in an x-ray tube | |
JP2018181410A (ja) | X線管 | |
JP2004288390A (ja) | 陰極線管 | |
JP2008071549A (ja) | X線管装置 | |
JP2006073385A (ja) | X線管装置 | |
JP2016039056A (ja) | X線管装置 | |
JP2008128973A (ja) | 電子線照射装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 12884377 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2014535286 Country of ref document: JP Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2012884377 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14427580 Country of ref document: US |