WO2013105341A1 - Procédé de dressage pour meule de meulage de bord de substrat en verre et procédé de fabrication de substrat en verre utilisant ledit procédé de dressage - Google Patents

Procédé de dressage pour meule de meulage de bord de substrat en verre et procédé de fabrication de substrat en verre utilisant ledit procédé de dressage Download PDF

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Publication number
WO2013105341A1
WO2013105341A1 PCT/JP2012/079994 JP2012079994W WO2013105341A1 WO 2013105341 A1 WO2013105341 A1 WO 2013105341A1 JP 2012079994 W JP2012079994 W JP 2012079994W WO 2013105341 A1 WO2013105341 A1 WO 2013105341A1
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WO
WIPO (PCT)
Prior art keywords
glass substrate
grinding
dressing
grindstone
face
Prior art date
Application number
PCT/JP2012/079994
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English (en)
Japanese (ja)
Inventor
潤 大川
勝俊 福間
秀之 遠藤
宮本　幹大
Original Assignee
旭硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 旭硝子株式会社 filed Critical 旭硝子株式会社
Priority to CN201280056653.0A priority Critical patent/CN103945985A/zh
Priority to KR1020147011536A priority patent/KR20140123038A/ko
Priority to JP2013512042A priority patent/JP5500313B2/ja
Publication of WO2013105341A1 publication Critical patent/WO2013105341A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
    • B24B53/07—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels by means of forming tools having a shape complementary to that to be produced, e.g. blocks, profile rolls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/102—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets

Definitions

  • the present invention relates to a dressing method for a grindstone for grinding an end face of a glass substrate and a method for producing a glass substrate using the dressing method.
  • a glass substrate such as a plate glass or a liquid crystal panel is cut into a predetermined size and then processed into a glass substrate having a product outer diameter by grinding and chamfering the end faces of the four sides.
  • Grinding processing for performing such grinding and chamfering is performed by rotating a cylindrical grindstone having a groove formed on its side surface along the circumferential direction, and the groove portion (groove surface) of the glass substrate to be ground. This is performed by moving the glass substrate or the grindstone while applying the end face (for example, Patent Document 1).
  • Grinding processing of the glass substrate end face can be carried out continuously for a plurality of glass substrates, but as the amount of grinding increases, the clogging of the surface of the grindstone groove (loading), or the abrasive grains falling Spilling or the like occurs and the processing ability of the grindstone decreases. For this reason, dressing is performed in which the end surface grinding apparatus for the glass substrate is periodically stopped to sharpen the grindstone and restore its ability.
  • the present invention can perform dressing without stopping the end surface grinding apparatus for the glass substrate, and can stably recover the processing ability of the grindstone regardless of the operator. It aims at providing the dressing method of the grindstone for the end surface grinding of a glass substrate.
  • a dressing method for a grindstone for grinding an end surface of a glass substrate wherein the glass substrate is used as a dressing material, and the feed rate of the glass substrate used as a dressing material is ground at the time of product manufacture.
  • the end surface grinding is performed so that the amount of grinding of the glass substrate used as a dressing material is slower than the feeding rate of the glass substrate at the time of manufacture, and is larger than the amount of grinding of the glass substrate when the end surface is ground during product manufacture.
  • a glass dressing method for grinding an end surface of a glass substrate is provided, wherein the glass substrate used as a dressing material is supplied to a grinding wheel for use.
  • a normal process of grinding the end face of the glass substrate with a first grinding amount while feeding the glass substrate to the grindstone for end face grinding at a first feed rate A step of determining whether or not dressing of the end surface grinding wheel is necessary at a predetermined timing; and when the dressing is determined to be necessary, the first feeding of the glass substrate to the end surface grinding wheel
  • FIG. 1A, 1B, and 2 a configuration example of a glass substrate end surface grinding apparatus provided with an end surface grinding wheel will be described with reference to FIGS. 1A, 1B, and 2.
  • FIG. 1A, 1B, and 2 a configuration example of a glass substrate end surface grinding apparatus provided with an end surface grinding wheel will be described with reference to FIGS. 1A, 1B, and 2.
  • FIG. 1A and 1B are schematic views of the glass substrate end surface grinding apparatus 10, FIG. 1A is a side view, and FIG. 1B is a top view.
  • the dressing method of this Embodiment is not limited to the end surface grinding apparatus which concerns.
  • the rectangular workpiece W (glass substrate) to be ground is detachably held on the holding means 11 with the end face exposed from the holding means 11.
  • the holding means 11 is disposed on a traveling body S that can move in the left-right direction in FIG. 1 (the arrow direction in FIG. 1A and FIG. 1B). It is configured to be transportable.
  • the conveyance mechanism 12 can be comprised so that the conveyance speed (feeding speed) of the workpiece
  • work W can be controlled by the controller 100 (control part) mentioned later.
  • FIG. 1B shows an example in which one grinding mechanism 13 is arranged on each of the left and right sides of the conveyance mechanism 12 (in the direction orthogonal to the conveyance direction of the workpiece W) (in FIG. 1A, only one grinding mechanism 13 is shown for easy understanding of the structure).
  • a plurality of grinding mechanisms can be arranged in the conveying direction by changing the type and roughness of the grindstone as in rough grinding and finishing.
  • the grinding mechanism 13 is preferably configured so that the distance from the workpiece W can be changed manually or automatically in order to adjust the grinding amount (grinding width).
  • the grinding mechanism 13 is preferably provided with a servo mechanism or the like.
  • the position of the grinding mechanism 13 can also be configured to be controlled by the controller 100 (control unit) described later.
  • the grinding mechanism 13 has a cylindrical end grinding wheel (hereinafter, also simply referred to as “grinding stone”) 132 inside the grinding mechanism 13, and the grinding stone 132 at the center axis of the grinding stone 132 during grinding processing.
  • a motor 131 is provided for rotationally driving the motor as a rotation axis.
  • a grinding mechanism 13 includes a coolant supply mechanism 14 for supplying coolant (coolant) to the periphery of a portion where the grindstone 132 and the workpiece W are in contact with each other, and a suction mechanism 15 for drawing the used coolant through the duct L. Can be connected to.
  • the coolant supplied to the periphery of the portion where the grindstone and the workpiece W come into contact with each other during grinding by the coolant supply mechanism 14 is collected by the suction mechanism 15 and then circulated and used by removing foreign substances with a filter or the like.
  • the dressing material is mixed into the coolant and cannot be removed by a filter during the grinding process.
  • the workpiece W was scratched by the foreign matter.
  • the dressing method of the present embodiment since a glass substrate is used as a dressing material, foreign substances (those different from an object to be ground) are not mixed into the coolant even after performing dressing. The problem can be solved.
  • the type of the grindstone 132 is not particularly limited, and for example, a diamond grindstone can be used.
  • a groove 132 (a) is formed on the side surface (circumferential surface) of the grindstone 132, and the end surface of the workpiece W is applied to the groove.
  • the grinding process of the end surface of the workpiece W is performed.
  • the end face of the workpiece W is chamfered according to the surface shape of the groove.
  • FIG. 2 shows an example in which one groove 132 (a) is provided.
  • a plurality of grooves are provided at predetermined intervals in the axial direction, and each groove is ground when continuously operating the end face grinding apparatus. Depending on the amount or the like, the groove to be used can be switched.
  • the present embodiment relates to a dressing method for an end surface grinding wheel arranged in a grinding mechanism in the above-described glass substrate end surface grinding apparatus, and the dressing method of the present embodiment will be described below.
  • a glass substrate is used as a dressing material, and the feed rate of the glass substrate is made slower than the conditions for grinding the end face during normal product manufacturing, and the amount of grinding of the glass substrate is increased.
  • a glass substrate is supplied to the grindstone for end face grinding (end face grinding apparatus) to recover the processing ability of the grindstone.
  • the feeding speed of the glass substrate is a relative speed between the glass substrate and the grinding mechanism section.
  • the grinding mechanism 13 is fixed, and the end surface grinding is performed to convey the glass substrate.
  • it means the conveyance speed of a glass substrate (workpiece).
  • the grinding mechanism 13 when the glass substrate is fixed and the grinding mechanism 13 is moved, it means the moving speed of the grinding mechanism 13, and when both the glass substrate and the grinding mechanism 13 are transported and moved, the relative speed between the two is determined. Means.
  • the grinding amount means the size (width) of the grinding allowance when the glass substrate end face is ground.
  • the conditions of grinding processing during normal product manufacturing are defined by the characteristics of the edge grinding machine, the shape of the glass substrate, the surface roughness required for the glass substrate product, the type of grindstone (for example, surface roughness and type), etc. Is done. For this reason, the conditions for the grinding processing of the glass substrate end face during normal product production are not limited.
  • the feed rate of the glass substrate is 6000 to 24000 mm / min, and the grinding amount is 80 to 240 ⁇ m. It is preferable to carry out under conditions.
  • the dressing method of this embodiment is a glass substrate that is a dressing material for the grindstone for end face grinding so that it is slower than the feed rate of the glass substrate for the grinding process at the time of product manufacture and the grinding amount is increased. Any other method may be used, and other conditions are not limited.
  • the feeding speed of the glass substrate used as the dressing material can be set to 1/6 or more of the feeding speed of the glass substrate when the end surface is ground during the production of the product.
  • the glass substrate feed rate used as the dressing material can be reduced to 1/6 or more of the glass substrate feed rate at the time of product manufacture, the reduction in the operating rate of the glass substrate end face grinding device is suppressed, and the productivity is improved. Can be maintained.
  • the feed rate of the glass substrate used as a dressing material can be set to 1/3 or less of the feed rate of the glass substrate when the end surface is ground during product production. A sufficient dressing effect can be obtained by setting the feeding speed of the glass substrate used as the dressing material to 1/3 or less of the feeding speed of the glass substrate at the time of manufacturing the product.
  • the amount of grinding of the glass substrate used as the dressing material can be 1.1 times or more of the amount of grinding of the glass substrate when the end surface is ground during product production.
  • a sufficient dressing effect can be obtained by making the grinding amount of the glass substrate used as the dressing material 1.1 times or more of the grinding amount of the glass substrate at the time of manufacturing the product.
  • the grinding amount of the glass substrate used as a dressing material can be 3.5 times or less of the grinding amount of the glass substrate when the end surface is ground during the production of the product.
  • the glass substrate used as the dressing material is not particularly limited, and various glass substrates can be used.
  • a glass substrate can be prepared exclusively for dressing and used for dressing.
  • the glass substrate used at the time of normal product manufacture can also be used.
  • the size is not particularly limited as long as a sufficient amount of grinding can be ensured.
  • the size is the same as that of a glass substrate of a normal product so that the configuration and arrangement of the end face grinding apparatus need not be changed.
  • the material is not particularly limited, it is preferable to use a glass substrate made of the same material as the glass substrate for products.
  • the glass substrate used as the dressing material can be used either a glass substrate that has been subjected to end face grinding processing or a glass substrate that has not been subjected to grinding processing.
  • the glass substrate used as the dressing material is sufficient without changing the surface shape of the groove of the grindstone regardless of the presence or absence of the grinding process (chamfering process) of the end face part. This is because the effect of dressing can be obtained.
  • the step of processing the glass substrate in advance can be omitted, so that the working efficiency can be increased, which is preferable from the viewpoint of cost.
  • dressing can be performed without changing the glass substrate only by changing the operating conditions of the end grinding device for glass substrate that has been operating normally (slowing the feed rate and increasing the grinding amount). It can be performed. Furthermore, after the dressing is completed, the glass substrate end face can be ground by returning to normal operating conditions. For this reason, since the fall of the operation rate of the end surface grinding apparatus of a glass substrate can also be suppressed especially, it is preferable.
  • a glass substrate used as a dressing material it is preferable to use (can be used) a glass substrate used as a dressing material.
  • a glass substrate used at the time of product manufacture is used as a dressing material, it can be used as a product as long as the amount of grinding increased during dressing is within the tolerance range of the product. In this case, it is not necessary to discard or rework the glass substrate used for dressing, which is preferable from the viewpoint of reducing the cost and environmental burden.
  • the timing for performing the dressing method of the present embodiment is not particularly limited, and can be arbitrarily set. For example, it is possible to perform dressing periodically based on the accumulated grinding amount of the grinding wheel for end face grinding (groove of the grindstone), or to inspect the ground product and perform it at an arbitrary timing based on the inspection result.
  • Fig. 3 shows an example of a specific dressing control flow.
  • dressing is performed at an arbitrary timing based on the accumulated grinding amount of the grindstone for end face grinding.
  • a grindstone for end face grinding is set in the end face grinding apparatus 10 for the end face of the glass substrate, and operation is started under the conditions at the time of product manufacture.
  • the grinding wheel cumulative grinding amount (A) for counting the cumulative grinding amount (processing amount) of the end face grinding wheel is reset to 0 (step S10).
  • the dressing interval grindstone integrated grinding amount (B), which is the cumulative grinding amount (processing amount) since the last dressing, is reset to 0 (step S12).
  • step S14 an end surface grinding process of the glass substrate is performed (step S14).
  • This step is a step of grinding the end face of the glass substrate during product manufacture.
  • the glass substrate is fed to the end surface grinding wheel at a first feed rate, and the end surface of the glass substrate is ground with a first grinding amount. Accordingly, the value of the grinding wheel cumulative grinding amount (A) and the dressing interval grinding wheel cumulative grinding amount (B) are counted up according to the grinding amount (step S16).
  • the following determination is made at a predetermined timing (for example, every time one glass substrate end face grinding process is performed).
  • the set value (A1) defines the accumulated grinding amount of the end surface grinding wheel from when the end surface grinding wheel is installed in the end surface grinding device to when it needs to be replaced. It is defined in advance based on the grindstone for end face grinding, the type of glass substrate to be ground, and the like. That is, since the set value (A1) is defined as a limit value that can be used for the grindstone for end face grinding, it is necessary to replace the grindstone for end face grinding when it is determined that the set value (A1) has been reached.
  • step S18 when it is determined that the set value (A1) has been reached (Yes in step S18), the operation is stopped (step S34), and the end grinding wheel is replaced. If it is determined that the set value (A1) has not been reached (No in step S18), the process proceeds to the next determination.
  • Step S20 As a result of inspecting the end face of the manufactured glass substrate, it is determined whether or not an arbitrary glass dressing start button that is arbitrarily pressed when it is determined that sufficient grinding is not performed.
  • step S24 a dressing process described later is performed. If it is determined that the button has not been pressed (No in step S20), the process proceeds to the next determination.
  • the set value (B1) defines the cumulative grinding amount of the grindstone for end face grinding after dressing until the next dressing.
  • the set value (B1) is defined in advance based on, for example, the configuration of the end face grinding apparatus, the grindstone for end face grinding, the type of the glass substrate to be ground, and the like. .
  • step S22 If it is determined that the set value (B1) has not been reached (No in step S22), the grinding process of the glass substrate end face is repeated.
  • step S22 If it is determined that the set value (B1) has been reached (Yes in step S22), the set value (B1) as described above is accumulated from the last dressing to the next. Since the amount of grinding is determined, dressing is automatically executed (step S24).
  • the glass substrate feed speed (grinding wheel processing speed) is changed to the dressing feed speed as described above, and the position of the grinding mechanism is changed so that the grinding amount becomes a condition for dressing (step). S26).
  • dressing is performed using the glass substrate as a dressing material (step S28).
  • This step is a step of dressing the grindstone for end face grinding using the end face of the glass substrate as a dressing material for the grindstone for end face grinding.
  • the glass substrate is fed to the edge grinding wheel at a second feed rate that is slower than the first feed rate.
  • the end surface of the glass substrate is ground with a second grinding amount larger than the first grinding amount.
  • the grinding mechanism 13 is controlled to reduce the distance between the grindstone for end face grinding and the end face of the glass substrate used as the dressing material.
  • the feed speed and the grinding amount are returned to the normal operating conditions, that is, the original setting values (conditions for manufacturing the product) during the grinding process (steps S30 and S32). ). Then, the dressing interval grindstone integrated grinding amount (B) is reset to 0 (step S12), and the grinding processing of the glass substrate end face is performed again.
  • the glass substrate end face can be ground while performing dressing at a predetermined timing without stopping the end face grinding device for the glass substrate end face.
  • steps S14 to S22 can be made every time processing is performed on a predetermined number (one or more) of glass substrates.
  • FIG. 5 is a block diagram functionally showing the configuration of the controller 100.
  • the controller 100 includes a control unit 102 and a setting condition storage unit 104.
  • the setting condition storage unit 104 includes the setting value (A1), the setting value (B1), the glass substrate feed speed and the grinding amount (position of the grinding mechanism 13) under normal operating conditions (product manufacturing), and the glass dressing time.
  • Preset conditions such as the glass substrate feed speed and grinding amount (position of the grinding mechanism 13), the predetermined timing for determining in steps S18 to S22 in FIG. 3, the predetermined execution time for performing glass dressing, and the like are stored. .
  • a plurality of these conditions can be set according to the type of glass substrate and the required product characteristics.
  • each grinding mechanism 13 You can set conditions.
  • the setting condition storage unit 104 stores these conditions.
  • the predetermined execution time for performing the glass dressing can be set, for example, according to the feed rate and the grinding amount of the glass substrate during the glass dressing. For example, as described above, when the grinding amount at the time of dressing is the same as that at the time of normal operation, the predetermined execution time for performing the glass dressing can be set to be long. In addition, the distance for performing glass dressing and the number of glass substrates for performing glass dressing can be set instead of the predetermined execution time for performing glass dressing.
  • the control unit 102 refers to the conditions set in the setting condition storage unit 104 and controls each procedure in the flowchart shown in FIG. Further, the control unit 102 controls the transport mechanism 12 and the grinding mechanism 13 based on the conditions set in the setting condition storage unit 104 so that the normal operation conditions and the glass dressing are performed.
  • the control unit 102 refers to the flag and performs the determination in step S20 of FIG. Can do.
  • the controller 100 can be configured by a computer having a central processing unit (CPU) that performs various controls, an input / output device, a storage device, and the like, and a configuration in which an execution program that causes the computer to execute each function described above is installed. can do.
  • CPU central processing unit
  • the glass substrate manufacturing apparatus is stopped. It becomes possible to perform dressing of a grindstone without this. For this reason, productivity is improved as compared with the prior art, and it is not necessary for the operator to manually perform dressing, and dressing can be easily performed.
  • the surface condition of the groove of the grindstone after dressing by the operator does not occur as in the conventional case, the processing ability of the grindstone can be stably recovered, and the surface shape of the groove formed on the grindstone is deformed. Can also prevent. For this reason, it becomes possible to manufacture more stable quality glass substrates continuously.
  • Example 1 In the present example, in the glass substrate end surface grinding apparatus having the same configuration as that shown in FIGS. 1A and 1B, dressing was performed on an end surface grinding grindstone that had undergone a grinding process on the glass substrate end surface to reduce the processing ability.
  • the grindstone for end face grinding a cylindrical one having a diameter of 150 ⁇ was used, and a diamond grindstone in which eight grooves having the same shape were formed on the side surface was used.
  • Table 1 the eight grooves formed on the side surface of the grindstone for end face grinding are in the same state with a cumulative processing (grinding) distance of about 1500 m, and each groove was dressed and evaluated. Eight grooves correspond to Examples 1-1 to 1-8 in Table 1.
  • Dressing is performed using the same material and the same size glass substrate (non-alkali glass, manufactured by Asahi Glass Co., Ltd., product name: AN100) as that used during normal product manufacturing, one for each groove. It was. Specifically, a glass substrate having a size of 1850 mm in width, 1500 mm in length, and 0.7 mm in thickness and not subjected to end face grinding in advance was used in this example.
  • Table 1-1 shows Examples 1-1 to As shown in Example 1-8, dressing was performed by changing the feed rate and grinding amount for each groove.
  • Example 1-4 in which the feed rate is 1000 mm / min and the grinding amount is 500 ⁇ m and Example 1-8 in which the feed rate is 2000 mm / min and the grinding amount is 400 ⁇ m are recovered to the same level as before the use of the grindstone. It was confirmed that
  • Example 2 In this example, the feed rate and the grinding amount were changed for each groove in the same manner as in Example 1 except that a glass substrate that had been subjected to end face grinding processing in advance was used as the glass substrate used for dressing. The experiment was conducted.
  • the glass substrate that has been subjected to the end surface grinding processing in advance here is a glass substrate that has been subjected to grinding processing once for the end surface of the glass substrate using the same glass substrate end surface grinding device under the conditions for normal products. It means that there is.
  • Example 2 As the grinding wheel for end face grinding, a 150 ⁇ cylindrical one was used as in Example 1, and a diamond grinding stone having eight grooves of the same shape formed on its side surface was used. As shown in Table 2, the eight grooves formed on the side surface of the grindstone for end face grinding were in the same state with a cumulative processing (grinding) distance of about 1500 m, and each groove was dressed and evaluated. Eight grooves correspond to Examples 2-1 to 2-8 in Table 2.
  • Example 2-4 in which the feed rate is 1000 mm / min and the grinding amount is 500 ⁇ m and Example 2-8 in which the feed rate is 2000 mm / min and the grinding amount is 400 ⁇ m are recovered to the same level as before the start of use of the grindstone. It was confirmed that
  • Example 3 In the present Example, in the end surface grinding apparatus of the glass substrate which has the same structure as FIG. 1A and FIG. 1B, dressing was performed by changing the kind of glass substrate with Example 1,2.
  • Dressing was performed using a glass substrate (soda lime glass, manufactured by Asahi Glass Co., Ltd., product name: PD200) having the same material and size as those used during normal product manufacture as a dressing material.
  • the size of the glass substrate was 2250 mm wide ⁇ 1900 mm long ⁇ 1.8 mm thick, and a glass substrate not subjected to end face grinding was used.
  • Example 3-1 dressing was performed with two types of diamond grinding stones having different surface roughness.
  • the grindstone for end face grinding was a cylindrical shape of 204 ⁇ , and one having grooves formed on the side surface of the grindstone was used.
  • Example 3-1 dressing was performed for an accumulated machining distance of 16000 m
  • Example 3-2 dressing was performed for an accumulated machining distance of 6000 m.
  • the cumulative machining distance after the last dressing is 1000 m.
  • Example 3-1 and Example 3-2 during normal product manufacturing, the glass substrate end face is ground under the conditions of a glass substrate feed rate of 20000 mm / min and a grinding amount of 160 ⁇ m.
  • the conditions were such that the glass substrate feed rate was 4000 mm / min and the grinding amount was 500 ⁇ m.
  • the surface roughness, protrusion amount, and wear amount were measured before the start of use (the state at the time of grinding wheel shipment) and the groove portion of the grinding wheel for end face grinding after dressing.
  • the surface roughness was measured using a surface roughness meter (product name: Surfcom 1400A-12, manufactured by Tokyo Seimitsu Co., Ltd.). Further, the groove portion was magnified 100 times using a microscope (trade name: VHX-100F, manufactured by Keyence Corporation), and the surface was observed.
  • Table 3 shows the measurement results of the surface roughness, protrusion amount, and wear amount.
  • 4A to 4D show surface images of the groove portion of the grinding wheel for end face grinding before use and after dressing.
  • FIG. 4A and 4B are surface images of the groove portion of the grinding wheel for end face grinding in Example 3-1, FIG. 4A is a surface image after dressing, and FIG. 4B is a surface image before starting use.
  • FIG. 4C and 4D are surface images of the groove portion of the end face grinding wheel of Example 3-2.
  • FIG. 4C is a surface image after dressing and FIG.
  • the dressing method for the end face grinding can be performed by the dressing method of the present embodiment regardless of the type and size of the glass substrate and the grindstone.
  • the dressing method of the grinding wheel for end face grinding of the glass substrate according to the present embodiment uses a glass substrate as a dressing material, makes the feed rate slower than that at the time of product manufacture, and increases the grinding amount (processing amount) than at the time of product manufacture. In this way, dressing is performed by supplying a glass substrate to the end face grinding apparatus. For this reason, it is possible to perform dressing without stopping the end surface grinding apparatus, and it is possible to improve the productivity as compared with the prior art, and it is not necessary for the operator to manually perform dressing, and dressing can be easily performed.
  • the surface condition of the groove of the grindstone after dressing by the operator does not occur, and the processing ability of the grindstone can be stably recovered, and the surface of the groove formed on the grindstone Shape deformation can also be prevented.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

La présente invention concerne un procédé de dressage pour une meule de meulage de bord de substrat en verre et un procédé de fabrication de substrat en verre qui utilise ledit procédé de dressage. Le procédé de dressage de meule de meulage de bord de substrat en verre est caractérisé en ce que : un substrat en verre est utilisé en tant que matériau de dressage ; et le substrat en verre utilisé en tant que matériau de dressage est fourni à la meule de meulage de bord de sorte que la vitesse d'avance pour le substrat en verre utilisé en tant que matériau de dressage soit plus lente que la vitesse d'avance pour des substrats en verre lorsque leurs bords sont meulés durant la fabrication de produit, et le meulage admissible pour le substrat en verre utilisé en tant que matériau de dressage est supérieur au meulage admissible pour des substrats en verre lorsque leurs bords sont meulés durant la fabrication de produit.
PCT/JP2012/079994 2012-01-13 2012-11-19 Procédé de dressage pour meule de meulage de bord de substrat en verre et procédé de fabrication de substrat en verre utilisant ledit procédé de dressage WO2013105341A1 (fr)

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CN201280056653.0A CN103945985A (zh) 2012-01-13 2012-11-19 玻璃基板的端面磨削用磨石的修整方法及使用该修整方法的玻璃基板的制造方法
KR1020147011536A KR20140123038A (ko) 2012-01-13 2012-11-19 유리 기판의 단부면 연삭용 지석의 드레싱 방법 및 상기 드레싱 방법을 사용한 유리 기판의 제조 방법
JP2013512042A JP5500313B2 (ja) 2012-01-13 2012-11-19 ガラス基板の端面研削用砥石のドレッシング方法および該ドレッシング方法を用いたガラス基板の製造方法

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CN112792717A (zh) * 2021-02-02 2021-05-14 河北光兴半导体技术有限公司 基板玻璃面抛光生产线***和基板玻璃面抛光生产方法

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CN108145600B (zh) * 2017-12-26 2019-12-03 武汉华星光电半导体显示技术有限公司 研磨装置
US10780549B2 (en) 2017-12-26 2020-09-22 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Polishing device

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TW201330981A (zh) 2013-08-01

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