WO2013080336A1 - 誤差測定方法及び工作機械 - Google Patents
誤差測定方法及び工作機械 Download PDFInfo
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- WO2013080336A1 WO2013080336A1 PCT/JP2011/077682 JP2011077682W WO2013080336A1 WO 2013080336 A1 WO2013080336 A1 WO 2013080336A1 JP 2011077682 W JP2011077682 W JP 2011077682W WO 2013080336 A1 WO2013080336 A1 WO 2013080336A1
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- machine tool
- axis
- laser length
- measuring device
- length measuring
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02016—Interferometers characterised by the beam path configuration contacting two or more objects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
- B23Q17/2428—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring existing positions of tools or workpieces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
- B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
- B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
Definitions
- the present invention eliminates errors in linear feed axes of multi-axis machine tools having at least two rotary feed axes of A axis and C axis in addition to the three orthogonal feed axes of X axis, Y axis and Z axis.
- the present invention relates to a measuring method and a machine tool.
- the machine tool processes the workpiece by relatively moving the workpiece mounted on the table and the tool mounted on the tip of the spindle in the linear direction of the three orthogonal axes of the X, Y, and Z axes.
- an error measuring method using a laser beam has been developed in order to improve the axial feed accuracy of three orthogonal axes.
- Patent Document 1 a reflector attached to a tool mounting shaft, a reflector is tracked, and the amount of movement of the reflector to be tracked is measured, and the coordinates of the tool are determined from the amount of movement of the reflector.
- a laser tracking measurement device for detection is disclosed.
- Patent Document 1 has a problem that four laser tracking devices including a rotation support mechanism are required to track the reflector, which is very large and expensive.
- an object of the present invention is to provide a method and a machine tool for measuring an error of a linear feed shaft that has a simple configuration and is low in cost.
- a method of measuring an error of the linear feed axis of a multi-axis machine tool having at least two rotary feed axes in addition to three orthogonal linear feed axes of the X, Y, and Z axes.
- the at least first to third reflecting mirrors are attached to the table of the machine tool, a laser length measuring device is attached to the tip of the spindle of the machine tool, and the three-axis linear feed shaft is driven to drive the laser length measuring device. Is moved to a predetermined measurement point, and at each of the measurement points, the at least two rotary feed shafts are driven to direct the laser length measuring device in the direction of the reflecting mirror, so that the first to third reflecting mirrors are driven.
- the coordinates of each of the measurement points are calculated, and the machine coordinates of the machine tool at the measurement points, and the measurement points obtained by the calculation By comparing each coordinate Method of measuring the errors so as to determine the error of the linear feed axis of the machine tool is provided.
- a table for mounting a workpiece a main shaft that holds a tool and is rotatably supported, and the table and the main shaft are relatively arranged in an X axis, a Y axis, and a Z axis.
- a machine tool including a linear feed shaft that moves in three orthogonal directions and at least two rotary feed shafts, a laser length measuring device attached to the tip of the main shaft, and first to first attached to the table 3 reflectors, driving the linear feed shaft to move the laser length measuring device to a predetermined measurement point, and driving the at least two rotary feed shafts at each of the measurement points,
- the coordinates of each of the measurement points are calculated, Of the machine tool at the measurement point And ⁇ coordinates, by comparing the respective coordinates of the measurement points obtained by the calculation, the machine tool to measure the error of the linear feed axis of the machine tool is provided.
- a laser length measuring device is attached to the tip of a main spindle of a machine tool having three orthogonal feed axes orthogonal to the machine tool and at least two rotary feed axes of A axis and C axis, and is reflected on the table.
- the laser length measuring device can always be directed to the reflecting mirror, and high-precision error measurement can be performed with a simple configuration.
- 1 is a side view of a machine tool according to a preferred embodiment of the present invention. It is a column front view of the machine tool of FIG. It is a block diagram which shows one Embodiment of the numerical control apparatus which controls the feed axis of the machine tool of FIG. It is a flowchart which shows an example of an error measuring method.
- 1 is a schematic diagram of an error measuring device for explaining an error measuring method.
- 1 is a schematic diagram of an error measuring device for explaining an error measuring method.
- 1 is a schematic diagram of an error measuring device for explaining an error measuring method.
- 1 is a schematic diagram of an error measuring device for explaining an error measuring method.
- a numerically controlled machine tool includes a numerical control device that operates a machine according to a machining program.
- a 5-axis horizontal machine tool 10 having two rotation feed axes A and C on the main shaft side is shown.
- the machine tool 10 includes a rear bed 12 installed on a floor, a column 14 erected on the upper surface of the rear bed 12 so as to be linearly movable in the X-axis direction that is horizontal, and a Y-axis that is vertical to the column 14.
- Headstock 16 mounted so as to be linearly movable in the Z-axis direction, which is a horizontal direction and a horizontal direction, a bracket 18 rotatably mounted on the C-axis around the Z-axis on the front surface of the headstock 16, and the bracket 18 around the X-axis
- a spindle head 20 rotatably attached to the A-axis and rotatably supporting the spindle 22, a front bed 24 juxtaposed in the Z-axis direction with respect to the rear bed 12, and the spindle 22 facing the spindle 22 on the front bed 24
- the table 26 is provided.
- the Z axis is a horizontal direction perpendicular to both the X axis and the Y axis.
- the machine tool 10 includes a measuring device 52.
- the numerical control device 30 that controls the position of the feed axis of the machine tool 10 reads and interprets the machining program 32 to calculate the command speed and command position of each feed axis
- Interpolation unit 36 that calculates a command pulse based on a command position, a command speed, and the like for linearly or circularly interpolating the feed on the feed axis, acquires the command pulse, and recognizes a position command to each feed axis
- An error is calculated based on the measurement data measured by the position command recognition means 38 and the measuring device 52 and the machine coordinates which are readings such as the digital scale of each of the X axis, Y axis and Z axis linear feed axes of the machine tool 10.
- Correction data for calculating the correction data for correcting the position command from the error calculation storage means 48 for calculating and storing the obtained error and the position command and the error data stored in the error calculation storage means 48.
- Addition means 44 for outputting to the servo section 46 is provided.
- the measuring device 52 includes a laser length measuring device 54 mounted in a tool mounting hole (not shown) of the main shaft 22 and a plurality of reflecting mirrors 56 mounted on the table 26.
- the laser length measuring device 54 uses a laser interferometer.
- the laser interferometer 54 includes, for example, a laser light source that irradiates a frequency-stabilized helium-neon laser, a beam splitter that divides the laser beam from the laser light source into two, and one of the two laser beams divided by the beam splitter.
- a counter comprising, for example, a photodiode array, for counting the number of interference fringes created by the interference with the other laser beam reflected back by the reflecting mirror 56, and the optical path to the reflecting mirror 56 from the change in the number of interference fringes Changes in length can be measured.
- the reflection mirror 56 includes a so-called retroreflector that reflects the laser beam in the original direction even when the incident angle of the laser beam to the reflection mirror 56 changes.
- the reflecting mirror 56 includes first to fourth reflecting mirrors 56a to 56d fixed to four corners of a pallet 28 that is detachably attached to the table 26.
- the laser length measuring device 54 is a laser interferometer, and based on a change in interference fringes, one of the first to fourth reflecting mirrors 56a to 56d and The difference between the distance (optical path length) between one measurement point and the distance (optical path length) between the same reflector and the current measurement point is measured by the following equation.
- ⁇ L (i, j) (L (P i , H j ) ⁇ L (P 0 , H j ))
- ⁇ L optical path length difference
- P i i-th measurement point
- P 0 first reference measurement point
- H j j-th reflecting mirror
- L P 0 , H j
- L distance (optical path length) between the first measurement point and the j-th reflecting mirror
- the distance between the i-th measurement point and the j-th reflector is generally expressed by the following equation.
- L (P i , H j ) ((X i -X hj ) 2 + (Y i -Y hj ) 2 + (Z i -Z hj ) 2 ) 1/2 (1) here, X i : X coordinate of the i-th measurement point (P i ) X hj : X coordinate of the jth reflector (H j ) Y i : Y coordinate of i-th measurement point (P i ) Y hj : Y coordinate of the jth reflector (H j ) Z i : Z coordinate of the i-th measurement point (P i ) Z hj : Z coordinate of the j-th reflecting mirror (H j ).
- the unknown is 12 + 3 ⁇ m (four The number of coordinates of the reflecting mirror is 12 and the coordinate of the measuring point is 3 ⁇ m).
- Equation (1) can be solved by simultaneous equations.
- m is larger than 12
- the number of simultaneous equations is larger than the unknown and the solution becomes redundant (a combination of different solutions can be made depending on the combination of equations).
- averaging is performed by, for example, the least square method.
- the measured error can be stored in the error calculation storage means 48 as an error map within the machining space in the three orthogonal directions of the X, Y, and Z axes.
- the error measurement method will be described below with reference to FIGS.
- the parameters I and J are reset to 0 (step S10), and then 1 is added to J (step S12).
- Parameter I indicates the measurement point.
- the parameter J is a parameter related to the first to fourth reflecting mirrors 56a to 56d.
- the laser length measuring device 54 is driven by driving the X axis, Y axis, and Z axis orthogonal feed axes of the machine tool 10 and the A axis and C axis rotation feed axes.
- the number of interference fringes at the reference point P 0 is counted (step S14).
- 1 is added to the parameter I (step S16), and as shown in FIG.
- the X-axis, Y-axis, and Z-axis feed axes are driven while the laser beam is always directed to the first reflecting mirror 56a. Then, the laser length measuring device 54 is moved along the predetermined path 58 to the measurement point (P 1 ) (step S18). The interference fringes counted in the measurement point (P 1), in association with the reflector (J) and the measurement point (P 1) (step S20).
- I is compared with a predetermined integer II to determine whether or not the currently measured measurement point (P i ) is the last measurement point (step S22).
- step S24 When the measurement is completed at all measurement points (Yes in step S22), J is compared with a predetermined integer JJ to determine whether or not the currently measured reflector (J) is the last reflector ( Step S24). If the measurement has not yet been completed for all the reflecting mirrors (No in step S24), the flowchart returns to step S12, and 1 is added to J to add the next reflecting mirror, for example, as shown in FIG.
- the measurement process of steps S14 to S22 is performed on the reflecting mirror 56b (FIG. 8). When the measurement is completed for all the reflectors (Yes in step S24), the measurement process is completed.
- the coordinates of Pi obtained by solving the simultaneous equations for the expression (1) and the machine coordinates which are readings of the digital scales of the feed axes of the machine tool 10, such as the X axis, the Y axis, and the Z axis, are obtained.
- the error calculation storage means 48 By comparing the error calculation storage means 48, the errors of the feed axes of the X axis, the Y axis, and the Z axis are obtained.
- the laser length measuring device 54 is attached to the tool mounting hole at the tip of the main shaft 22, the X axis, the Y axis, and the Z axis of the machine tool 10 can be provided without providing any special tracking device.
- the laser length measuring device 54 can always be directed to the first to fourth reflecting mirrors 56a to 56d by using the three linear feed axes orthogonal to the axis and the rotary feed axes A and C.
- a low-cost error measuring device with a simple configuration is provided.
- the reflecting mirror is attached to the table 26 via the pallet 28, but the reflecting mirror may be directly attached to the table.
- the pallet 28 to which the reflecting mirror 56 is attached is prepared in advance, and the laser length measuring device 54 described above is prepared by a pallet exchanging device (not shown) attached to the machine tool 10.
- error measurement can be automated.
- routine error measurement and seasonal error measurement can be programmed and automated.
- the laser length measuring device 54 composed of a laser interferometer is used.
- the present invention is not limited to this, and the absolute distance between the reflecting mirror 56 and the laser length measuring device 54 is set.
- a measurable laser length measuring device may be used. In this case, instead of four reflecting mirrors 56, if the position of the reflecting mirror is known by three reflecting mirrors, an error can be measured.
- the position error and the posture error are stored for each angle of the rotation feed axis (A, C axis), the linear feed axis (X, Y, Z axis) is corrected according to the position error, The rotary feed axis is corrected according to the attitude error.
- the attitude error of the rotary feed shaft (A, C axis) is small, the deviation of the reference point of the laser length measuring device is stored for each angle of the rotary feed shaft (A, C axis). Only the linear feed axes (X, Y, Z axes) can be corrected so that the coordinates of the reference point are at a desired position.
- the error of the stored rotary feed axes (A, C axes) is corrected according to the rotational position of the rotary feed axes (A, C axes).
- the error of the linear feed axes (X, Y, Z axes) can be measured with higher accuracy.
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- Optics & Photonics (AREA)
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Abstract
Description
上述したように、本実施の形態において、レーザー測長器54はレーザー干渉計であって、干渉縞の変化に基づいて、第1~第4の反射鏡56a~56dのうち1つの反射鏡と1つの測定点との間の距離(光路長)と、同じ反射鏡と現在の測定点との間の距離(光路長)との差が以下の式によって測定される。
ΔL(i, j)=(L(Pi,Hj)-L(P0,Hj))
ここで
ΔL:光路長差
Pi:i番目の測定点
P0:基準となる最初の測定点
Hj:j番目の反射鏡
L(P0,Hj):最初の測定点とj番目の反射鏡との間の距離(光路長)
L(Pi,Hj):i番目の測定点とj番目の反射鏡との間の距離(光路長)
である。
L(Pi, Hj)=((Xi-Xhj)2+(Yi-Yhj)2+(Zi-Zhj)2)1/2…(1)
ここで、
Xi:i番目の測定点(Pi)のX座標
Xhj:j番目の反射鏡(Hj)のX座標
Yi:i番目の測定点(Pi)のY座標
Yhj:j番目の反射鏡(Hj)のY座標
Zi:i番目の測定点(Pi)のZ座標
Zhj:j番目の反射鏡(Hj)のZ座標
である。
誤差測定プロセスが開始されると、パラメータI、Jを0にリセット(ステップS10)した後に、Jに1が加算される(ステップS12)。パラメータIは測定点を示している。パラメータJは第1~第4反射鏡56a~56dに関連したパラメータであって、J=1は第1反射鏡56aを、J=2は第2反射鏡56bを、J=3は第3反射鏡56cを、そしてJ=4は第4反射鏡56dを夫々表している。
12 後部ベッド
14 コラム
16 主軸台
18 ブラケット
22 主軸
24 前部ベッド
26 テーブル
28 パレット
30 数値制御装置
32 加工プログラム
34 読取解釈部
36 補間部
46 サーボ部
50 送りモータ
52 測定装置
54 レーザー測長器
56 反射鏡
56a 第1反射鏡
56b 第2反射鏡
56c 第3反射鏡
56d 第4反射鏡
Claims (8)
- X軸、Y軸、Z軸の直交3軸の直線送り軸に加えて、少なくとも2つの回転送り軸を有した多軸工作機械の前記直線送り軸の誤差を測定する方法において、
前記工作機械のテーブルに少なくとも第1~第3の反射鏡を取り付け、
前記工作機械の主軸先端にレーザー測長器を取り付け、
前記3軸の直線送り軸を駆動して前記レーザー測長器を所定の測定点へ移動させ、
前記測定点の各々で、前記少なくとも2つの回転送り軸を駆動して前記レーザー測長器を前記反射鏡の方向に向け、前記第1~第3の反射鏡と前記レーザー測長器との間の距離を測定することによって、前記測定点の各々の座標を演算し、
前記測定点における工作機械の機械座標と、前記演算して得られた前記測定点の各々の座標とを比較することによって、前記工作機械の前記直線送り軸の誤差を求めるようにした誤差を測定する方法。 - 更に、第4の反射鏡を前記工作機械のテーブルに取り付け、前記主軸先端に取り付けられたレーザー測長器は、レーザー干渉計であり、前記第1~第4の反射鏡と前記レーザー干渉計との間の距離の変化を測定することによって、前記測定点の各々の座標を延設する請求項1に記載の方法。
- 前記レーザー測長器は、反射鏡と該レーザー測長器との間の絶対距離を測定する請求項1に記載の方法。
- 前記反射鏡がレトロレフレクタである請求項1~3の何れか1項に記載の方法。
- ワークを取り付けるテーブルと、工具を把持し回転可能に支持された主軸と、前記テーブルと前記主軸とを相対的にX軸、Y軸、Z軸の直交3軸方向に移動させる直線送り軸と、少なくとも2つの回転送り軸とを具備した工作機械において、
前記主軸の先端に取り付けられたレーザー測長器と、
前記テーブルに取り付けられた第1~第3の反射鏡とを具備し、
前記直線送り軸を駆動して前記レーザー測長器を所定の測定点へ移動させ、前記測定点の各々で、前記少なくとも2つの回転送り軸を駆動して前記レーザー測長器を前記反射鏡の方向に向け、前記第1~第3の反射鏡と前記レーザー測長器との間の距離を測定することによって、前記測定点の各々の座標を演算し、前記測定点における工作機械の機械座標と、前記演算して得られた前記測定点の各々の座標とを比較することによって、前記工作機械の前記直線送り軸の誤差を測定する工作機械。 - テーブルに取り付けられた第4の反射鏡を更に具備し、前記主軸先端に取り付けられたレーザー測長器はレーザー干渉計である請求項5に記載の工作機械。
- 前記レーザー測長器は、反射鏡と該レーザー測長器との間の絶対距離を測定する請求項5に記載の工作機械。
- 前記反射鏡がレトロレフレクタである請求項5~7の何れか1項に記載の工作機械。
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PCT/JP2011/077682 WO2013080336A1 (ja) | 2011-11-30 | 2011-11-30 | 誤差測定方法及び工作機械 |
JP2013546904A JP5745646B2 (ja) | 2011-11-30 | 2011-11-30 | 誤差測定方法及び工作機械 |
US14/361,656 US9506745B2 (en) | 2011-11-30 | 2011-11-30 | Error measurement method and machine tool |
EP11876460.4A EP2786839A4 (en) | 2011-11-30 | 2011-11-30 | ERROR MEASURING METHOD AND TOOL MACHINE |
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DE102017003257A1 (de) | 2017-03-31 | 2018-10-04 | Institut für innovative Technologien, Technologietransfer, Ausbildung und berufsbegleitende Weiterbildung (ITW) e. V. | Verfahren für die Erfassung von Positionsabweichungen eines Achssystems einer Werkzeugmaschine und Vorrichtung zur Durchführung dieses Verfahrens |
EP3745223B1 (en) * | 2018-01-22 | 2023-03-15 | Fundación Tekniker | Method for self-verification of mechatronic systems |
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Cited By (7)
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JP2015006721A (ja) * | 2013-06-26 | 2015-01-15 | Dmg森精機株式会社 | 測定装置を備えた工作機械 |
CN104634248A (zh) * | 2015-02-04 | 2015-05-20 | 西安理工大学 | 一种双目视觉下的转轴标定方法 |
CN105538038A (zh) * | 2016-01-27 | 2016-05-04 | 清华大学 | 机床平动轴几何误差辨识方法 |
CN105538038B (zh) * | 2016-01-27 | 2018-01-16 | 清华大学 | 机床平动轴几何误差辨识方法 |
CN113970293A (zh) * | 2021-10-15 | 2022-01-25 | 湖北三江航天险峰电子信息有限公司 | 一种点激光的精确在机测量方法及*** |
CN113970293B (zh) * | 2021-10-15 | 2024-01-05 | 湖北三江航天险峰电子信息有限公司 | 一种点激光的精确在机测量方法及*** |
CN118081480A (zh) * | 2024-04-29 | 2024-05-28 | 浙江大学 | 一种基于振动响应重构的电主轴径向回转误差测量方法 |
Also Published As
Publication number | Publication date |
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JP5745646B2 (ja) | 2015-07-08 |
JPWO2013080336A1 (ja) | 2015-04-27 |
EP2786839A1 (en) | 2014-10-08 |
EP2786839A4 (en) | 2015-10-21 |
US20140355002A1 (en) | 2014-12-04 |
US9506745B2 (en) | 2016-11-29 |
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