WO2013046979A1 - Procédé de stratification et appareil de stratification - Google Patents

Procédé de stratification et appareil de stratification Download PDF

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Publication number
WO2013046979A1
WO2013046979A1 PCT/JP2012/070781 JP2012070781W WO2013046979A1 WO 2013046979 A1 WO2013046979 A1 WO 2013046979A1 JP 2012070781 W JP2012070781 W JP 2012070781W WO 2013046979 A1 WO2013046979 A1 WO 2013046979A1
Authority
WO
WIPO (PCT)
Prior art keywords
laminating
vacuum
workpiece
lower chamber
degree
Prior art date
Application number
PCT/JP2012/070781
Other languages
English (en)
Japanese (ja)
Inventor
昌人 笠原
活之 榊原
Original Assignee
日清紡メカトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日清紡メカトロニクス株式会社 filed Critical 日清紡メカトロニクス株式会社
Priority to CN201280057213.7A priority Critical patent/CN103946006A/zh
Priority to KR1020147011339A priority patent/KR20140070635A/ko
Publication of WO2013046979A1 publication Critical patent/WO2013046979A1/fr

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B32B37/1009Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure using vacuum and fluid pressure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B5/00Presses characterised by the use of pressing means other than those mentioned in the preceding groups
    • B30B5/02Presses characterised by the use of pressing means other than those mentioned in the preceding groups wherein the pressing means is in the form of a flexible element, e.g. diaphragm, urged by fluid pressure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/048Encapsulation of modules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/12Photovoltaic modules
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • H01L21/67109Apparatus for thermal treatment mainly by convection
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Definitions

  • the laminating apparatus generally has a vacuum performance specification of reaching 100 to 200 Pa or less within 1 minute or 2 minutes from the start of the process. Since the lower chamber was able to prevent the generation of bubbles by improving the degree of vacuum as much as possible from the start to the end of the process, depending on the performance of the vacuum pump and the degree of sealing of the chamber, the workpiece has a high vacuum level of 100 Pa or less. Had been exposed to.
  • FIG. 2 is a diagram illustrating an overall configuration of the laminating apparatus 100 according to the present embodiment.
  • the laminating apparatus 100 includes an upper case 110, a lower case 120, and a conveyance belt 130 for conveying the workpiece 10.
  • the conveyor belt 130 conveys the workpiece 10 between the upper case 110 and the lower case 120.
  • the laminating apparatus 100 is provided with a carry-in conveyor 200 for conveying the workpiece 10 before laminating to the laminating apparatus 100. Further, the laminating apparatus 100 is provided with a carry-out conveyor 300 for carrying out the workpiece 10 after lamination from the laminating apparatus 100.
  • the carry-in conveyor 200 and the carry-out conveyor 300 are connected to the laminating apparatus.
  • the workpiece 10 is transferred from the carry-in conveyor 200 to the conveyance belt 130 and from the conveyance belt 130 to the carry-out conveyor 300.
  • the laminating apparatus 100 is provided with a lifting device (not shown) composed of a cylinder, a piston rod, and the like.
  • the diaphragm 112 is formed of heat-resistant rubber such as silicone rubber. As will be described later, the diaphragm 112 functions as a pressing member that presses the workpiece 10 and performs lamination.
  • a space (upper chamber 113) partitioned by a diaphragm 112 is formed in the upper case 110.
  • An intake / exhaust port 114 communicating with the upper chamber 113 is provided on the upper surface of the upper case 110.
  • the inside of the upper chamber 113 can be evacuated by a vacuum pump through the intake / exhaust port 114, or the atmosphere can be introduced into the upper chamber 113.
  • a space (lower chamber 121) opened upward is formed in the lower case 120.
  • a hot plate 122 (panel-shaped heater) is provided.
  • the hot plate 122 is supported by a support member erected on the bottom surface of the lower case 120 so as to maintain a horizontal state.
  • the hot plate 122 is supported so that the surface thereof is substantially level with the opening surface of the lower chamber 121.
  • An intake / exhaust port 123 communicating with the lower chamber 121 is provided on the lower surface of the lower case 120.
  • the inside of the lower chamber 121 can be evacuated by a true vacuum pump through the intake / exhaust port 123, or the atmosphere can be introduced into the lower chamber 121.
  • a conveyor belt 130 is movably provided between the upper case 110 and the lower case 120 and above the heat plate 122.
  • the conveyance belt 130 conveys the workpiece 10 to the center position of the laminate unit 101.
  • the workpiece 10 is held at a position spaced apart from the hot plate 122 by raising a holding pin (not shown) which is arranged in the lower chamber 121 and the hot plate 122 and can move up and down. May be.
  • the lifting device lowers the upper case 110.
  • the internal space between the upper case 110 and the lower case 120 is sealed as shown in FIG. That is, the upper chamber 113 and the lower chamber 121 can be kept sealed inside the upper case 110 and the lower case 120, respectively.
  • the laminating apparatus 100 evacuates the inside of the upper chamber 113 with a vacuum pump through the intake / exhaust port 114 of the upper case 110.
  • the laminating apparatus 100 introduces air into the upper chamber 113 through the intake / exhaust port 114 of the upper case 110 while maintaining the vacuum state of the lower chamber 121.
  • a pressure difference is generated between the upper chamber 113 and the lower chamber 121, so that the diaphragm 112 expands.
  • the diaphragm 112 is pushed downward as shown in FIG. 4 (hereinafter referred to as a pressurizing step).
  • the workpiece 10 is sandwiched between the diaphragm 112 extruded downward and the hot plate 122, and the constituent members are bonded to each other by the fillers 13 and 14 melted by heating.
  • the laminating apparatus 100 introduces air into the lower chamber 121 through the intake / exhaust port 123 of the lower case 120.
  • the lifting device raises the upper case 110.
  • the conveyor belt 130 By raising the upper case 110, the conveyor belt 130 can be moved as shown in FIG.
  • the conveyor belt 130 delivers the workpiece 10 after lamination to the carry-out conveyor 300.
  • Lamination is performed as described above. However, if the degree of vacuum is excessively improved in the vacuuming process and pressurizing process in the lamination process, heat from the hot plate in FIGS. 2 to 4 is transmitted to the workpiece 10. It becomes difficult, the heating time becomes longer, and the laminating time becomes longer.
  • a laminating method for shortening the heating time of the workpiece during laminating and reducing the laminating time will be described.
  • the degree of vacuum in the lower chamber during laminating is deteriorated (the numerical value of the degree of vacuum is increased), heat transfer from the hot plate to the workpiece is improved, and the laminating time is shortened.
  • the deterioration of the degree of vacuum during laminating is performed as follows.
  • V1 and V2 are switching valves used for conventional vacuuming.
  • a constant control of the pressurizing pressure (differential pressure of the upper and lower chambers) by the pressing member (diaphtom) is also performed. Therefore, in this means 2, these valves VE1, VE2, and VE3 are all operated by an electric control signal.
  • Such a degree-of-vacuum deterioration means 2 can be combined with the degree-of-vacuum deterioration means 1 to further control the degree of vacuum.
  • ⁇ Lamination method using vacuum degree deterioration means> The vacuum degree deterioration means 1 and 2 are used, and the vacuum degree control is performed as follows in the laminating process.
  • the vacuum degree deterioration means 1 In the evacuation step, the vacuum degree deterioration means 1 is used, and the vacuum degree is kept constant at a value of about 300 Pa ⁇ 50 Pa, for example.
  • the value of the degree of vacuum is set to an optimum value depending on the types of the fillers (sealing materials) 13 and 14 in FIG. Thereby, the heating of the structural member of the solar cell module of FIG. 1 in a vacuum drawing process is accelerated
  • the laminating process shifts from the vacuuming process to the pressurizing process using a pressing member such as the diaphragm 112
  • generally the pressure of only the upper chamber is deteriorated (for example, released to the atmosphere), and the workpiece is processed by the pressure difference with the lower chamber.
  • Example 1 of laminating a solar cell module having the configuration shown in FIG. 1 by a laminating method using the vacuum degree deterioration means 1 or 2 of the present invention will be described.
  • the constituent members of the solar cell module having the configuration of FIG. 1 are carried into the laminating apparatus of FIG. 2, the upper case is lowered, overlapped with the lower case and closed, and then the degree of vacuum in the lower chamber Is exacerbated from the beginning of the vacuuming process.
  • the ultimate vacuum setting of the lower chamber is deteriorated from the conventional level of about 100 Pa.
  • the normal laminating time is about 15 to 20 minutes, and it can be seen that the laminating time is shortened by 20% to 30% compared to the conventional case by the laminating method of the present invention.
  • the degree of deterioration of the degree of vacuum of the lower chamber in the vacuuming step in the present embodiment can be reduced to such an extent that bubbles do not remain in the peripheral part of the ramie processed product.
  • Example 1 of laminating the solar cell module having the configuration shown in FIG. 1 using the laminating method by the vacuum degree deterioration means 2 of the present invention will be described.
  • the components of the solar cell module having the configuration shown in FIG. 1 are carried into the laminating apparatus shown in FIG. 2, and the upper case is lowered and overlapped with the lower case to be closed.
  • the lower chamber and the upper chamber start to be evacuated to reach a vacuum degree of about 100 Pa (after 6 minutes in FIGS. 9 and 10). 2) Depressurize the upper chamber to 15 kPa, expand the diaphragm as a pressing member downward, and start the pressurizing process.
  • the laminating method of the present invention when used and when the conventional laminating method is used, the temperature change of the workpiece is measured at the center X portion and the end Y portion of the workpiece. It shows in FIG. 9 and FIG. 9 showing the temperature change in the central part X of the object to be measured and FIG. 10 showing the temperature change in the end Y part of the object to be measured, the temperature of the object reaches 150 ° C. compared to the conventional laminating method. It turns out that the time to do is 4 to 5 minutes earlier.
  • the laminating time is shortened by about 4 to 5 minutes as compared with the prior art.
  • the normal laminating time is about 15 to 20 minutes, and it can be seen that the laminating time is shortened by 20 to 30% compared to the conventional case by the laminating method of the present invention.

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Photovoltaic Devices (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

L'objectif de l'invention consiste à produire un procédé de stratification qui peut raccourcir le temps de chauffage par rapport aux procédés classiques lors de la stratification de pièces traitées telles que des modules de batterie solaire. Le procédé de stratification est conçu de sorte que, dans le processus de stratification, qui comprend un processus de mise sous vide et un processus de mise sous pression, le degré de vide à l'intérieur de la chambre inférieure est réduit de façon appropriée.
PCT/JP2012/070781 2011-09-29 2012-08-09 Procédé de stratification et appareil de stratification WO2013046979A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201280057213.7A CN103946006A (zh) 2011-09-29 2012-08-09 层压方法及层压装置
KR1020147011339A KR20140070635A (ko) 2011-09-29 2012-08-09 라미네이트 방법 및 라미네이트 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011213625A JP5781412B2 (ja) 2011-09-29 2011-09-29 ラミネート方法
JP2011-213625 2011-09-29

Publications (1)

Publication Number Publication Date
WO2013046979A1 true WO2013046979A1 (fr) 2013-04-04

Family

ID=47995030

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PCT/JP2012/070781 WO2013046979A1 (fr) 2011-09-29 2012-08-09 Procédé de stratification et appareil de stratification

Country Status (5)

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JP (1) JP5781412B2 (fr)
KR (1) KR20140070635A (fr)
CN (1) CN103946006A (fr)
TW (1) TW201345725A (fr)
WO (1) WO2013046979A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015037135A1 (fr) * 2013-09-13 2015-03-19 株式会社エヌ・ピー・シー Dispositif de stratification d'un module à surface incurvée et procédé de stratification
CN104827742A (zh) * 2014-09-10 2015-08-12 安阳高新区生产力促进中心 一种光伏组件层压机及层压工艺
JP6403159B2 (ja) * 2015-02-26 2018-10-10 株式会社日立プラントメカニクス フィルムの真空ラミネート装置
CN105415858B (zh) * 2015-12-28 2017-09-29 合肥晶澳太阳能科技有限公司 一种具有报警提示功能的光伏组件用层压机
CN107283988A (zh) * 2016-03-30 2017-10-24 上海渤明机电设备有限公司 一种太阳能电池层压工艺及层压阶段下腔充气***
CN107399140A (zh) * 2017-08-17 2017-11-28 衡水英利新能源有限公司 一种太阳能光伏组件的层压方法及层压机
CN107833942B (zh) * 2017-11-24 2024-01-23 河北羿珩科技有限责任公司 多功能层压机及其使用方法
WO2020121036A1 (fr) 2018-12-13 2020-06-18 Arcelormittal Dispositif de stratification et son processus
CN109904267B (zh) * 2019-04-12 2020-12-08 来斯奥集成家居股份有限公司 一种真空层压机的层压结构

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000101119A (ja) * 1999-09-27 2000-04-07 Nisshinbo Ind Inc 太陽電池におけるラミネ―ト方法及びそのラミネ―ト装置
JP2002347115A (ja) * 2001-05-22 2002-12-04 Nisshinbo Ind Inc ラミネート装置におけるダイヤフラムの取付方法とこの方法を用いたラミネート装置
JP2008047765A (ja) * 2006-08-18 2008-02-28 Npc Inc ラミネート装置
JP2010149506A (ja) * 2008-11-26 2010-07-08 Kyocera Corp 太陽電池モジュールのラミネータ及びこれにより製造された太陽電池モジュール
JP2011135068A (ja) * 2009-11-26 2011-07-07 Kyocera Corp 太陽電池モジュールの製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6389327A (ja) * 1986-10-02 1988-04-20 Stanley Electric Co Ltd 熱圧着装置
JP2915327B2 (ja) * 1995-07-19 1999-07-05 キヤノン株式会社 太陽電池モジュール及びその製造方法
JP4401649B2 (ja) * 2002-12-13 2010-01-20 キヤノン株式会社 太陽電池モジュールの製造方法
JP4250488B2 (ja) * 2003-09-16 2009-04-08 キヤノン株式会社 熱圧着方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000101119A (ja) * 1999-09-27 2000-04-07 Nisshinbo Ind Inc 太陽電池におけるラミネ―ト方法及びそのラミネ―ト装置
JP2002347115A (ja) * 2001-05-22 2002-12-04 Nisshinbo Ind Inc ラミネート装置におけるダイヤフラムの取付方法とこの方法を用いたラミネート装置
JP2008047765A (ja) * 2006-08-18 2008-02-28 Npc Inc ラミネート装置
JP2010149506A (ja) * 2008-11-26 2010-07-08 Kyocera Corp 太陽電池モジュールのラミネータ及びこれにより製造された太陽電池モジュール
JP2011135068A (ja) * 2009-11-26 2011-07-07 Kyocera Corp 太陽電池モジュールの製造方法

Also Published As

Publication number Publication date
TW201345725A (zh) 2013-11-16
KR20140070635A (ko) 2014-06-10
CN103946006A (zh) 2014-07-23
JP5781412B2 (ja) 2015-09-24
JP2013071387A (ja) 2013-04-22

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