WO2013037807A3 - Verfahren zur temporären elektrischen kontaktierung einer bauelementanordnung und vorrichtung hierfür - Google Patents

Verfahren zur temporären elektrischen kontaktierung einer bauelementanordnung und vorrichtung hierfür Download PDF

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Publication number
WO2013037807A3
WO2013037807A3 PCT/EP2012/067806 EP2012067806W WO2013037807A3 WO 2013037807 A3 WO2013037807 A3 WO 2013037807A3 EP 2012067806 W EP2012067806 W EP 2012067806W WO 2013037807 A3 WO2013037807 A3 WO 2013037807A3
Authority
WO
WIPO (PCT)
Prior art keywords
component arrangement
electrical contact
temporary electrical
device therefor
connection
Prior art date
Application number
PCT/EP2012/067806
Other languages
English (en)
French (fr)
Other versions
WO2013037807A2 (de
Inventor
Michael Kühnelt
Roland Enzmann
Original Assignee
Osram Opto Semiconductors Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osram Opto Semiconductors Gmbh filed Critical Osram Opto Semiconductors Gmbh
Priority to CN201280044836.0A priority Critical patent/CN103782181A/zh
Priority to US14/345,113 priority patent/US20140354313A1/en
Publication of WO2013037807A2 publication Critical patent/WO2013037807A2/de
Publication of WO2013037807A3 publication Critical patent/WO2013037807A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G01R1/07321—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support the probes being of different lengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06744—Microprobes, i.e. having dimensions as IC details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2632—Circuits therefor for testing diodes
    • G01R31/2635—Testing light-emitting diodes, laser diodes or photodiodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Connecting Device With Holders (AREA)

Abstract

Es wird ein Verfahren zur temporären elektrischen Kontaktierung einer Bauelementanordnung (9) mit einer Mehrzahl von Kontaktflächen (93, 94) angegeben. Ein Anschlussträger (1) mit einer Mehrzahl von Anschlussflächen (11, 12), auf denen Kontakterhebungen (2) angeordnet sind, wird bereitgestellt. Anschlussträger (1) und Bauelementanordnung (9) werden derart zusammengeführt, dass die Anschlussflächen (11, 12) und die zugeordneten Kontaktflächen (93, 94) in einer Aufsicht überlappen und die Kontakterhebungen (2) zur elektrischen Kontaktierung der Bauelementanordnung (9) einen elektrischen Kontakt zu den Kontaktflächen (93, 94) bilden. Nachfolgend werden Anschlussträger (1) und Bauelementanordnung (9) voneinander getrennt.
PCT/EP2012/067806 2011-09-14 2012-09-12 Verfahren zur temporären elektrischen kontaktierung einer bauelementanordnung und vorrichtung hierfür WO2013037807A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201280044836.0A CN103782181A (zh) 2011-09-14 2012-09-12 用于暂时电接触器件装置的方法和用于此的设备
US14/345,113 US20140354313A1 (en) 2011-09-14 2012-09-12 Method for Temporary Electrical Contacting of a Component Arrangement and Apparatus Therefor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011113430.5 2011-09-14
DE102011113430A DE102011113430A1 (de) 2011-09-14 2011-09-14 Verfahren zur temporären elektrischen Kontaktierung einer Bauelementanordnung und Vorrichtung hierfür

Publications (2)

Publication Number Publication Date
WO2013037807A2 WO2013037807A2 (de) 2013-03-21
WO2013037807A3 true WO2013037807A3 (de) 2013-06-20

Family

ID=47008508

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/067806 WO2013037807A2 (de) 2011-09-14 2012-09-12 Verfahren zur temporären elektrischen kontaktierung einer bauelementanordnung und vorrichtung hierfür

Country Status (5)

Country Link
US (1) US20140354313A1 (de)
CN (1) CN103782181A (de)
DE (1) DE102011113430A1 (de)
TW (1) TW201330132A (de)
WO (1) WO2013037807A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101845652B1 (ko) * 2017-01-17 2018-04-04 주식회사 텝스 부품 실장된 웨이퍼 테스트를 위한 하이브리드 프로브 카드
TWI678537B (zh) * 2018-01-05 2019-12-01 旺矽科技股份有限公司 探針卡
TWI728531B (zh) * 2019-10-30 2021-05-21 巨擘科技股份有限公司 探針卡裝置
DE102020111394A1 (de) 2020-04-27 2021-10-28 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zum herstellen einer halbleiterlaseranordnung und halbleiterlaseranordnung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4418679A1 (de) * 1994-05-28 1995-11-30 Telefunken Microelectron Vorrichtung zur Kontaktierung zweier Schaltungsteile
US6555764B1 (en) * 1998-03-12 2003-04-29 Fujitsu Limited Integrated circuit contactor, and method and apparatus for production of integrated circuit contactor
US20060214675A1 (en) * 2005-03-28 2006-09-28 Stillman Daniel J Resilient probes for electrical testing

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US655764A (en) * 1900-04-14 1900-08-14 Eli Denne Device for unlatching doors.
US6456099B1 (en) * 1998-12-31 2002-09-24 Formfactor, Inc. Special contact points for accessing internal circuitry of an integrated circuit
US6989040B2 (en) * 2002-10-30 2006-01-24 Gerald Zebrowski Reclaimed magnesium desulfurization agent
US20050003652A1 (en) * 2003-07-02 2005-01-06 Shriram Ramanathan Method and apparatus for low temperature copper to copper bonding
US7135704B2 (en) * 2003-08-14 2006-11-14 Lockhead Martin Corporation VCSEL settling fixture
JP4427298B2 (ja) * 2003-10-28 2010-03-03 富士通株式会社 多段バンプの形成方法
JP4413130B2 (ja) * 2004-11-29 2010-02-10 Ｏｋｉセミコンダクタ株式会社 プローブカードを用いた半導体素子の検査方法およびその検査方法により検査した半導体装置
US7939934B2 (en) * 2005-03-16 2011-05-10 Tessera, Inc. Microelectronic packages and methods therefor
TWI422075B (zh) * 2009-03-13 2014-01-01 Advanced Optoelectronic Tech 覆晶式半導體光電元件之結構及其製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4418679A1 (de) * 1994-05-28 1995-11-30 Telefunken Microelectron Vorrichtung zur Kontaktierung zweier Schaltungsteile
US6555764B1 (en) * 1998-03-12 2003-04-29 Fujitsu Limited Integrated circuit contactor, and method and apparatus for production of integrated circuit contactor
US20060214675A1 (en) * 2005-03-28 2006-09-28 Stillman Daniel J Resilient probes for electrical testing

Also Published As

Publication number Publication date
CN103782181A (zh) 2014-05-07
TW201330132A (zh) 2013-07-16
WO2013037807A2 (de) 2013-03-21
DE102011113430A1 (de) 2013-03-14
US20140354313A1 (en) 2014-12-04

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