WO2013037807A3 - Verfahren zur temporären elektrischen kontaktierung einer bauelementanordnung und vorrichtung hierfür - Google Patents
Verfahren zur temporären elektrischen kontaktierung einer bauelementanordnung und vorrichtung hierfür Download PDFInfo
- Publication number
- WO2013037807A3 WO2013037807A3 PCT/EP2012/067806 EP2012067806W WO2013037807A3 WO 2013037807 A3 WO2013037807 A3 WO 2013037807A3 EP 2012067806 W EP2012067806 W EP 2012067806W WO 2013037807 A3 WO2013037807 A3 WO 2013037807A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- component arrangement
- electrical contact
- temporary electrical
- device therefor
- connection
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
- G01R1/07321—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support the probes being of different lengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06744—Microprobes, i.e. having dimensions as IC details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2632—Circuits therefor for testing diodes
- G01R31/2635—Testing light-emitting diodes, laser diodes or photodiodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Manufacturing Of Electrical Connectors (AREA)
- Connecting Device With Holders (AREA)
Abstract
Es wird ein Verfahren zur temporären elektrischen Kontaktierung einer Bauelementanordnung (9) mit einer Mehrzahl von Kontaktflächen (93, 94) angegeben. Ein Anschlussträger (1) mit einer Mehrzahl von Anschlussflächen (11, 12), auf denen Kontakterhebungen (2) angeordnet sind, wird bereitgestellt. Anschlussträger (1) und Bauelementanordnung (9) werden derart zusammengeführt, dass die Anschlussflächen (11, 12) und die zugeordneten Kontaktflächen (93, 94) in einer Aufsicht überlappen und die Kontakterhebungen (2) zur elektrischen Kontaktierung der Bauelementanordnung (9) einen elektrischen Kontakt zu den Kontaktflächen (93, 94) bilden. Nachfolgend werden Anschlussträger (1) und Bauelementanordnung (9) voneinander getrennt.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201280044836.0A CN103782181A (zh) | 2011-09-14 | 2012-09-12 | 用于暂时电接触器件装置的方法和用于此的设备 |
US14/345,113 US20140354313A1 (en) | 2011-09-14 | 2012-09-12 | Method for Temporary Electrical Contacting of a Component Arrangement and Apparatus Therefor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011113430.5 | 2011-09-14 | ||
DE102011113430A DE102011113430A1 (de) | 2011-09-14 | 2011-09-14 | Verfahren zur temporären elektrischen Kontaktierung einer Bauelementanordnung und Vorrichtung hierfür |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2013037807A2 WO2013037807A2 (de) | 2013-03-21 |
WO2013037807A3 true WO2013037807A3 (de) | 2013-06-20 |
Family
ID=47008508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2012/067806 WO2013037807A2 (de) | 2011-09-14 | 2012-09-12 | Verfahren zur temporären elektrischen kontaktierung einer bauelementanordnung und vorrichtung hierfür |
Country Status (5)
Country | Link |
---|---|
US (1) | US20140354313A1 (de) |
CN (1) | CN103782181A (de) |
DE (1) | DE102011113430A1 (de) |
TW (1) | TW201330132A (de) |
WO (1) | WO2013037807A2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101845652B1 (ko) * | 2017-01-17 | 2018-04-04 | 주식회사 텝스 | 부품 실장된 웨이퍼 테스트를 위한 하이브리드 프로브 카드 |
TWI678537B (zh) * | 2018-01-05 | 2019-12-01 | 旺矽科技股份有限公司 | 探針卡 |
TWI728531B (zh) * | 2019-10-30 | 2021-05-21 | 巨擘科技股份有限公司 | 探針卡裝置 |
DE102020111394A1 (de) | 2020-04-27 | 2021-10-28 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zum herstellen einer halbleiterlaseranordnung und halbleiterlaseranordnung |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4418679A1 (de) * | 1994-05-28 | 1995-11-30 | Telefunken Microelectron | Vorrichtung zur Kontaktierung zweier Schaltungsteile |
US6555764B1 (en) * | 1998-03-12 | 2003-04-29 | Fujitsu Limited | Integrated circuit contactor, and method and apparatus for production of integrated circuit contactor |
US20060214675A1 (en) * | 2005-03-28 | 2006-09-28 | Stillman Daniel J | Resilient probes for electrical testing |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US655764A (en) * | 1900-04-14 | 1900-08-14 | Eli Denne | Device for unlatching doors. |
US6456099B1 (en) * | 1998-12-31 | 2002-09-24 | Formfactor, Inc. | Special contact points for accessing internal circuitry of an integrated circuit |
US6989040B2 (en) * | 2002-10-30 | 2006-01-24 | Gerald Zebrowski | Reclaimed magnesium desulfurization agent |
US20050003652A1 (en) * | 2003-07-02 | 2005-01-06 | Shriram Ramanathan | Method and apparatus for low temperature copper to copper bonding |
US7135704B2 (en) * | 2003-08-14 | 2006-11-14 | Lockhead Martin Corporation | VCSEL settling fixture |
JP4427298B2 (ja) * | 2003-10-28 | 2010-03-03 | 富士通株式会社 | 多段バンプの形成方法 |
JP4413130B2 (ja) * | 2004-11-29 | 2010-02-10 | Okiセミコンダクタ株式会社 | プローブカードを用いた半導体素子の検査方法およびその検査方法により検査した半導体装置 |
US7939934B2 (en) * | 2005-03-16 | 2011-05-10 | Tessera, Inc. | Microelectronic packages and methods therefor |
TWI422075B (zh) * | 2009-03-13 | 2014-01-01 | Advanced Optoelectronic Tech | 覆晶式半導體光電元件之結構及其製造方法 |
-
2011
- 2011-09-14 DE DE102011113430A patent/DE102011113430A1/de not_active Withdrawn
-
2012
- 2012-08-23 TW TW101130601A patent/TW201330132A/zh unknown
- 2012-09-12 US US14/345,113 patent/US20140354313A1/en not_active Abandoned
- 2012-09-12 WO PCT/EP2012/067806 patent/WO2013037807A2/de active Application Filing
- 2012-09-12 CN CN201280044836.0A patent/CN103782181A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4418679A1 (de) * | 1994-05-28 | 1995-11-30 | Telefunken Microelectron | Vorrichtung zur Kontaktierung zweier Schaltungsteile |
US6555764B1 (en) * | 1998-03-12 | 2003-04-29 | Fujitsu Limited | Integrated circuit contactor, and method and apparatus for production of integrated circuit contactor |
US20060214675A1 (en) * | 2005-03-28 | 2006-09-28 | Stillman Daniel J | Resilient probes for electrical testing |
Also Published As
Publication number | Publication date |
---|---|
CN103782181A (zh) | 2014-05-07 |
TW201330132A (zh) | 2013-07-16 |
WO2013037807A2 (de) | 2013-03-21 |
DE102011113430A1 (de) | 2013-03-14 |
US20140354313A1 (en) | 2014-12-04 |
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