WO2012150802A3 - Device for preparing nano particle attached to support - Google Patents

Device for preparing nano particle attached to support Download PDF

Info

Publication number
WO2012150802A3
WO2012150802A3 PCT/KR2012/003420 KR2012003420W WO2012150802A3 WO 2012150802 A3 WO2012150802 A3 WO 2012150802A3 KR 2012003420 W KR2012003420 W KR 2012003420W WO 2012150802 A3 WO2012150802 A3 WO 2012150802A3
Authority
WO
WIPO (PCT)
Prior art keywords
vessel
support
agitating
nano particle
vacuum evaporation
Prior art date
Application number
PCT/KR2012/003420
Other languages
French (fr)
Korean (ko)
Other versions
WO2012150802A2 (en
Inventor
고석근
Original Assignee
주식회사 나노케미
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 나노케미 filed Critical 주식회사 나노케미
Publication of WO2012150802A2 publication Critical patent/WO2012150802A2/en
Publication of WO2012150802A3 publication Critical patent/WO2012150802A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Abstract

The present invention relates to a device for preparing a metal or a metallic compound nano particle attached to a support, the device comprising: a vacuum evaporation vessel; an agitating vessel provided in the vacuum evaporation vessel; a screw provided inside the agitating vessel, for agitating the support; and an evaporation source provided on the upper portion of the agitating vessel inside the vacuum evaporation vessel, for evaporating the metal or the metallic compound, wherein the upper end of the side surface of the agitating vessel is bent at 1-90 degrees towards the center with the perpendicular plane as the basis, and the screw is provided in a horizontal or a vertical direction, so as to agitate 1/5-3/4 of the entire depth of the support charged in the agitating vessel.
PCT/KR2012/003420 2011-05-02 2012-05-02 Device for preparing nano particle attached to support WO2012150802A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20110041583A KR101484572B1 (en) 2011-05-02 2011-05-02 Manufacturing device for nano particle attached to support
KR10-2011-0041583 2011-05-02

Publications (2)

Publication Number Publication Date
WO2012150802A2 WO2012150802A2 (en) 2012-11-08
WO2012150802A3 true WO2012150802A3 (en) 2013-01-17

Family

ID=47108126

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/003420 WO2012150802A2 (en) 2011-05-02 2012-05-02 Device for preparing nano particle attached to support

Country Status (2)

Country Link
KR (1) KR101484572B1 (en)
WO (1) WO2012150802A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070044879A (en) * 2005-10-26 2007-05-02 주식회사 피앤아이 Manufacture method of powder and the device that metal, alloy and ceramic nano particle is vacuum-metallized evenly
KR100835207B1 (en) * 2007-05-31 2008-06-09 대한민국(관리부서:농촌진흥청장) Process for preparation of natural silk including ag nano-particle
JP2009079251A (en) * 2007-09-26 2009-04-16 Ulvac Japan Ltd Metal-vapor-deposition apparatus and method for stirring powdery carrier in the same apparatus
KR20100086907A (en) * 2009-01-23 2010-08-02 세종대학교산학협력단 Powder agitator in vacuum for dry deposition process

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070044879A (en) * 2005-10-26 2007-05-02 주식회사 피앤아이 Manufacture method of powder and the device that metal, alloy and ceramic nano particle is vacuum-metallized evenly
KR100835207B1 (en) * 2007-05-31 2008-06-09 대한민국(관리부서:농촌진흥청장) Process for preparation of natural silk including ag nano-particle
JP2009079251A (en) * 2007-09-26 2009-04-16 Ulvac Japan Ltd Metal-vapor-deposition apparatus and method for stirring powdery carrier in the same apparatus
KR20100086907A (en) * 2009-01-23 2010-08-02 세종대학교산학협력단 Powder agitator in vacuum for dry deposition process

Also Published As

Publication number Publication date
KR101484572B1 (en) 2015-01-20
WO2012150802A2 (en) 2012-11-08
KR20120123939A (en) 2012-11-12

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