WO2012147313A1 - 配線基板の製造方法 - Google Patents
配線基板の製造方法 Download PDFInfo
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- WO2012147313A1 WO2012147313A1 PCT/JP2012/002705 JP2012002705W WO2012147313A1 WO 2012147313 A1 WO2012147313 A1 WO 2012147313A1 JP 2012002705 W JP2012002705 W JP 2012002705W WO 2012147313 A1 WO2012147313 A1 WO 2012147313A1
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- conductive paste
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- wiring board
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/12—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances organic substances
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
- H05K3/4069—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in organic insulating substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4084—Through-connections; Vertical interconnect access [VIA] connections by deforming at least one of the conductive layers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/17—Post-manufacturing processes
- H05K2203/178—Demolishing, e.g. recycling, reverse engineering, destroying for security purposes; Using biodegradable materials
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49126—Assembling bases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base
- Y10T29/49167—Manufacturing circuit on or in base by forming conductive walled aperture in base with deforming of conductive path
Definitions
- the present invention relates to a method of manufacturing a wiring board in which wiring patterns formed on both sides are connected by vias or a wiring board in which layers are connected by a conductive paste.
- FIGS. 14A to 15C are cross-sectional views illustrating a method for manufacturing a wiring board using a conductive paste.
- FIG. 14A shows a cross section of the prepreg 1 in which the protective film 2 is provided on both sides.
- FIG. 14B shows a state in which the hole 3 is provided in the prepreg 1 shown in FIG. 14A.
- 14C the prepreg 1 in which the hole 3 is formed is fixed to the base 6 and the jig 4 of a rubber squeegee (or a rubbing rubber plate) is moved in the direction of the arrow 7 so that the conductive paste 5 is removed from the hole 3.
- the state of filling is shown.
- FIG. 14D shows a state in which the protective film 2 is peeled off from both surfaces of the prepreg 1 and the protruding portions 8 formed of the conductive paste 5 are provided.
- 15A to 15C are cross-sectional views illustrating a method for manufacturing a double-sided substrate using a conductive paste, which is a process following FIG. 14D.
- FIG. 15A shows a state in which copper foils 9 are arranged on both surfaces of the prepreg 1 provided with the protruding portions 8 and are pressed and integrated as shown by an arrow 71 using a press device (not shown). . It is also useful to heat at the time of this integration.
- the electrically conductive powder contained in the electrically conductive paste 5 can be compressed and closely_contact
- FIG. 15B is a cross-sectional view showing a state after the copper foil 9 is integrated through the prepreg 1 and the conductive paste 5.
- the insulating layer 10 is formed by heat-curing the prepreg 1.
- the via 11 the conductive powders contained in the conductive paste 5 are compressed, deformed, and adhered to each other.
- FIG. 15C shows a state where the wiring 12 having a predetermined pattern is formed by etching the copper foil 9 of FIG. 15B. Thereafter, a double-sided substrate is manufactured by forming a solder resist or the like (not shown).
- Patent Documents 1 and 2 are known as prior art documents related to the present invention.
- the method for manufacturing a wiring board according to the present invention includes a step of preparing a fiber piece containing paste having a conductive paste having conductive powder and resin, and a fiber piece missing from the first prepreg, and a fiber piece containing paste. And filtering with a filter in a strike state to prepare a filtered recovered paste. Further, adding at least one of a solvent, a resin, and a paste having a composition different from that of the filtered recovery paste to the filtered recovered paste, producing a reuse paste, and forming a second prepreg on the surface of the second prepreg, 1 is attached.
- the step of forming the first hole in the second prepreg through the first protective film the step of filling the first hole with the reuse paste, the first protective film is peeled off, Forming a protrusion made of a reuse paste on the surface of the second prepreg. Furthermore, a step of disposing metal foil on both surfaces of the second prepreg, pressurizing the second prepreg from the outside of the metal foil, heating the second prepreg, and curing the second prepreg and the reuse paste, And processing the metal foil into a wiring pattern.
- FIG. 1A is a cross-sectional view illustrating a state in which fiber pieces attached on a first protective film are collected in a conductive paste.
- FIG. 1B is a cross-sectional view for explaining how the fiber pieces attached on the first protective film are collected in the conductive paste.
- FIG. 1C is a cross-sectional view for explaining a state in which the fiber pieces attached on the first protective film are collected in the conductive paste.
- FIG. 2A is a cross-sectional view for explaining a state where a hole in the first prepreg is filled with a conductive paste.
- FIG. 2B is a cross-sectional view illustrating how the conductive paste is filled in the holes of the first prepreg.
- FIG. 3A is a cross-sectional view illustrating an example of a method for manufacturing a wiring board.
- FIG. 3B is a cross-sectional view illustrating an example of a method for manufacturing a wiring board.
- FIG. 3C is a cross-sectional view illustrating an example of a method for manufacturing a wiring board.
- FIG. 4A is a cross-sectional view illustrating a case where a large number of fiber pieces are mixed in the conductive paste.
- FIG. 4B is a cross-sectional view illustrating a case where a large number of fiber pieces are mixed in the conductive paste.
- FIG. 5A is a cross-sectional view illustrating a case where a via made of a conductive paste has an unfilled portion or a gap.
- FIG. 5B is a cross-sectional view illustrating a case where a via made of a conductive paste has an unfilled portion or a gap.
- FIG. 5C is a cross-sectional view illustrating a case where a via made of a conductive paste has an unfilled portion or a gap.
- FIG. 6 is a schematic diagram for explaining a state in which a paste that has been conventionally discarded is regenerated and regenerated as a reuse paste.
- FIG. 7 is a schematic diagram for explaining how the recovered combined paste is filtered to produce a filtered recovered paste.
- FIG. 8 is a schematic diagram for explaining how to manufacture a reuse paste by adding a solvent or the like to the filtered recovered paste.
- FIG. 9A is a cross-sectional view illustrating a state in which a reuse paste is filled into a second hole formed in a second prepreg via a second protective film.
- FIG. 9B is a cross-sectional view illustrating a state in which the reuse paste is filled in the second hole formed in the second prepreg via the second protective film.
- FIG. 10A is a cross-sectional view illustrating a state in which a second wiring board is manufactured using a reuse paste.
- FIG. 10B is a cross-sectional view illustrating a state in which the second wiring board is manufactured using the reuse paste.
- FIG. 10C is a cross-sectional view illustrating a state in which the second wiring board is manufactured using the reuse paste.
- FIG. 11A is an explanatory diagram of a method for manufacturing a multilayer substrate having four wiring layers.
- FIG. 11B is an explanatory diagram of a method for manufacturing a multilayer substrate having four wiring layers.
- FIG. 11C is an explanatory diagram of a method for manufacturing a multilayer substrate having four wiring layers.
- FIG. 12A is a diagram showing an SEM observation image of the recovered paste.
- FIG. 12B is a schematic diagram of FIG. 12A.
- FIG. 13A is a schematic diagram illustrating an experimental example of a conductive paste as a comparative example.
- FIG. 13B is a schematic diagram illustrating an experimental example of a conductive paste as a comparative example.
- FIG. 13C is a schematic diagram illustrating an experimental example of a conductive paste as a comparative example.
- FIG. 14A is a cross-sectional view illustrating a conventional method for manufacturing a wiring substrate using a conductive paste.
- FIG. 14B is a cross-sectional view illustrating a conventional method for manufacturing a wiring substrate using a conductive paste.
- FIG. 14C is a cross-sectional view illustrating a conventional method for manufacturing a wiring substrate using a conductive paste.
- FIG. 14D is a cross-sectional view illustrating a conventional method for manufacturing a wiring board using a conductive paste.
- FIG. 15A is a cross-sectional view illustrating a method for manufacturing a double-sided substrate using a conductive paste, which is a process subsequent to FIG. 14.
- FIG. 15A is a cross-sectional view illustrating a method for manufacturing a double-sided substrate using a conductive paste, which is a process subsequent to FIG. 14.
- FIG. 15A is a cross-sectional view illustrating a method for manufacturing a double-sided substrate using a conductive paste, which is
- FIG. 15B is a cross-sectional view illustrating a method for manufacturing the double-sided substrate using the conductive paste, which is a process subsequent to FIG. 14.
- FIG. 15C is a cross-sectional view illustrating a method for manufacturing the double-sided substrate using the conductive paste, which is a step subsequent to FIG. 14.
- FIG. 1A to FIG. 1C, FIG. 2A, and FIG. 2B are cross-sectional views for explaining how fiber pieces made of glass fibers and resin fibers adhering to a protective film are collected in a conductive paste.
- FIG. 1A to FIG. 1C are cross-sectional views for explaining how fiber pieces made of resin fibers such as glass fibers and aramid adhered on a first protective film are collected in a conductive paste.
- the first prepreg 101 is formed in a semi-cured state (that is, a B-stage state) by impregnating a glass woven fabric, a glass nonwoven fabric, an aramid woven fabric, or an aramid nonwoven fabric with an epoxy resin or the like.
- the first protective film 102 is a PET film or the like. Specifically, PET (polyethylene terephthalate), PEN (polyethylene naphthalate), PPS (polyphenylene sulfide), or the like is used for the first protective film 102.
- the first protective film 102 is formed on the surface of the first prepreg 101 by thermocompression bonding while removing air using a vacuum laminator or a roll laminator.
- the first hole 103 is formed by a carbon dioxide laser, a YAG laser, or the like. In the case where the large first hole 103 is formed, a drill or a punch may be used.
- the jig 104 is a squeegee rubber or the like.
- the conductive paste 105 has conductive powder, a main agent, and a curing agent.
- a conductive powder for example, copper powder having an average particle size of 0.5 ⁇ m or more and 20 ⁇ m or less and a specific surface area of 0.1 m 2 / g or more and 1.5 m 2 / g or less is used.
- the main agent for example, a liquid epoxy resin is used.
- the curing agent for example, a latent curing agent is used.
- the conductive paste 105 contains conductive powder in an amount of 80 wt% or more and 92 wt% or less, a main agent in an amount of 4.5 wt% or more and 17 wt% or less, and a curing agent in an amount of 0.5 wt% or more and 5 wt% or less. ing.
- the conductive powder 105 may be silver powder, alloy powder, solder powder, Ag-coated powder, or a mixture thereof having an average particle size of 0.5 ⁇ m or more and 20 ⁇ m or less.
- the fiber piece 108 is a foreign matter made of glass fiber or fiber such as aramid to which a semi-cured epoxy resin or the like has dropped off from the cut surface of the first prepreg 101, and a plurality of fiber pieces are bound by the resin.
- a fiber piece group may be sufficient.
- a first protective film 102 is provided on both surfaces of the first prepreg 101.
- Fiber pieces 108 are attached to the surface of the first protective film 102.
- the fiber pieces 108 are attached to the surface of each first prepreg 101 by static electricity or the like. Even if the fiber pieces 108 are removed with a suction device or an adhesive roll (both not shown), when the first prepreg 101 or the like is stacked in the thickness direction, or is peeled off individually, or during transportation. New fiber pieces 108 adhere to the surface of the first prepreg 101 due to static electricity generated during handling such as friction.
- the new semi-cured epoxy resin or the fiber piece 108 is dropped off from the side surface of the prepreg and the like, and both sides of the first prepreg 101 are formed as new foreign matters.
- the first protective film 102 is attached to the first protective film 102 by static electricity or the like. Therefore, it is necessary to take measures against static electricity for each process in the manufacturing process of the wiring board.
- static electricity of the first protective film 102 is removed by an electrostatic blower or the like, when the next process is handled, stacked, or peeled off one by one, the static electricity is newly charged. There is.
- FIG. 1B shows a state in which the first protective film 102 and the first hole 103 are formed in the first prepreg 101.
- the first hole 103 may be a through hole as shown, but may be a bottomed hole (not shown) depending on the application.
- new fiber pieces 108 may adhere to the surface of the first protective film 102. is there.
- FIG. 1C shows a state in which the jig 104 is moved in the direction indicated by the arrow 107 on the first protective film 102 to which the fiber pieces 108 are adhered, and the conductive paste 105 is filled in the first hole 103.
- the pushing force of the conductive paste 105 into the first hole 103 can be increased.
- the fiber piece 108 on the first protective film 102 can be accommodated in the conductive paste 105 to form a fiber piece accommodation paste 109.
- the conductive paste 105 can be changed by increasing the pressure applied to the first protective film 102 of the jig 104 as shown in FIG. 1C. Can be pushed into one hole 103.
- the pressure of the jig 104 By setting the pressure of the jig 104 to a certain level or more, the amount of the conductive paste 105 (not shown) remaining as a residue on the surface of the first protective film 102 can be reduced. As a result, it is possible to reduce the conductive paste 105 that is discarded while attached to the first protective film 102.
- the conductive particles contained in the conductive paste 105 are not left on the surface of the first protective film 102. It is desirable to scrape firmly.
- the conductive particles for example, copper particles having a particle size of about 1 to 10 ⁇ m are used. The more firmly the first protective film 102 is scraped off with the jig 104, the more the fiber pieces 108 adhering to the first protective film 102 are accommodated inside the conductive paste 105.
- the diameter of the fiber piece 108 may be 1 ⁇ m or more, further 5 ⁇ m or more, or may be equal to or larger than the particle diameter of the copper particles.
- FIG. 2A and 2B are cross-sectional views illustrating a state in which the first paste 103 of the first prepreg 101 is filled with the conductive paste 105.
- FIG. A fiber piece 108 is accommodated in the conductive paste 105 to be filled in the first hole 103 using the jig 104, and becomes a fiber piece accommodation paste 109.
- the jig 104 is moved in the direction indicated by the arrow 207 to fill the first hole 103 with the conductive paste 105.
- the viscosity of the fiber piece accommodation paste 109 is increased.
- the filling of the conductive paste 105 into the first hole 103 in FIG. 2B may be affected.
- a hole for vacuum suction or the like is provided in the base 106, and the conductive paste 105 is sucked into the first prepreg 101 as shown by an arrow 107b through a ventilation sheet (for example, paper). Fillability is improved.
- the components of the conductive paste 105 include, for example, a liquid component or a solvent component. And as a composition of the fiber piece accommodation paste 109, there exists a ratio of solid content or a liquid component, for example.
- 3A to 3C are cross-sectional views illustrating an example of a method for manufacturing a wiring board, and an example of a process following the manufacturing method of FIG. 2B.
- FIG. 3A is a cross-sectional view showing a state in which a first copper foil 110 is laminated as a metal foil on both surfaces of a first prepreg 101 provided with a first protrusion 111 formed of a conductive paste 105.
- the thickness of the 1st protrusion part 111 can be increased / decreased by adjusting the thickness of the 1st protective film 102 in FIG. 2A, FIG. 2B, etc.
- the first copper foil 110 is disposed on both surfaces of the first prepreg 101 provided with the first protrusion 111, and is pressed and integrated as shown by an arrow 307 using a press device (not shown). Turn into. It is also useful to heat at the time of this integration.
- the electrically conductive powder contained in the electrically conductive paste 105 can be compressed and closely_contact
- FIG. 3B is a cross-sectional view illustrating a state after lamination.
- the first insulating layer 112 is a cured product of the first prepreg 101.
- the first via 113 is a cured product of the conductive paste 105.
- the first via 113 is strongly compressed and compressed by the thickness of the first protrusion 111. Therefore, the conductive powders such as copper powder contained in the conductive paste 105 are deformed and are in surface contact with each other. As a result, the resistance of the via portion is low.
- the first wiring 114 is formed by patterning the first copper foil 110 into a predetermined shape.
- the first wiring board 115 includes a first insulating layer 112, a first wiring 114 fixed to both surfaces of the first insulating layer 112, and a first via 113 connecting the first wiring 114. Have.
- the first wiring board 115 can be used as a core board, and an insulating layer, wiring, or the like can be stacked on both surfaces of the first wiring board 115 to be multilayered.
- FIG. 4A and 4B are cross-sectional views for explaining a case where a large number of fiber pieces 108 are mixed in the conductive paste 105.
- FIG. 4A a large number of fiber pieces 108 are mixed in the conductive paste 105.
- the fiber pieces 108 increase in an integrated manner.
- a part of the fiber piece 108 attached to the surface of the first protective film 102 in the filling process of the conductive paste 105 is attached to the jig 104.
- fiber pieces 108 that cannot be removed in the previous step are attached to the surface of the first protective film 102 in which the first paste 103 is not filled with the conductive paste 105.
- FIG. 4B illustrates the fiber piece 108 attached to the first protective film 102 when the conductive paste 105 is filled in the first hole 103 formed in the first protective film 102 or the first prepreg 101.
- a state in which a part is further mixed into the conductive paste 105 is shown.
- the viscosity of the conductive paste 105 increases. Therefore, the filling property of the conductive paste 105 into the first hole 103 is affected, and the unfilled portion 137 and the gap 138 may be generated.
- the unfilled portion 137 indicates an insufficiently filled portion of the conductive paste 105 in an open state.
- the gap 138 indicates an insufficiently filled portion of the conductive paste 105 in a sealed state. Further, when a new conductive paste 105 is supplied by the jig 104 on the unfilled portion 137, a gap 138 may be generated.
- FIG. 5A to 5C are cross-sectional views illustrating a case where the first via 113 on which the conductive paste 105 is formed has an unfilled portion 137 and a gap 138.
- FIG. 5A the first prepreg 101 is filled with the conductive paste 105 with an unfilled portion 137 and a gap 138.
- the protrusion of the first protrusion 111 is lowered by the amount of the unfilled portion 137.
- the compressive force may be reduced due to the influence of the gap 138 when pressurized, even if the protrusion of the first protrusion 111 of the conductive paste 105 is sufficient. is there.
- FIG. 5B is a cross-sectional view for explaining the influence of the conductive paste 105 having the unfilled portion 137 and the gap 138.
- FIG. 5C is a cross-sectional view illustrating a state after patterning the first copper foil 110 of FIG. 5B and forming the first wiring 114.
- the first insulating layer 112 is obtained by curing the first prepreg 101
- the first via 113 is obtained by curing the conductive paste 105.
- the unfilled portion 137 affects the contact of the interface portion between the first via 113 and the first copper foil 110.
- the air gap 138 affects the inside of the first via 113.
- the resistance of the first via 113 may be increased in each portion. That is, compression of the conductive paste 105 is insufficient, contact between the conductive powders is insufficient, and contact resistance is increased.
- the fiber pieces 108 attached to the first prepreg 101 are filled. May be mixed in the conductive paste 105 and affect the electrical characteristics. This becomes more pronounced as the via diameter decreases.
- Such a problem caused by the fiber piece 108 hardly occurs in the screen printing method widely used in the manufacture of a wiring board or the like. This is because, in the case of the screen printing method, the screen plate (especially the emulsion used therein) prevents contact between the fiber pieces 108 and the conductive paste 105. Moreover, it hardly occurs even in a conventional method of manufacturing a wiring board that performs interlayer connection by plating.
- the conductive paste 105 adhered to the first protective film 102 when squeezing (or rubbing) on the first protective film 102.
- the fiber pieces 108 are mixed in the conductive paste 105.
- the conductive paste 105 mixed with the fiber pieces 108 becomes the fiber piece containing paste 109.
- the quantity of the fiber piece 108 accommodated in the fiber piece accommodation paste 109 exceeds a fixed quantity, conventionally, it is discarded as a waste paste.
- the first prepreg 101 includes fibers such as glass and aramid and a semi-cured resin.
- the semi-cured epoxy resin is uncured and is brittle and small and easily broken. Further, in order to impregnate the epoxy resin without bubbles in the fiber, a fiber opening treatment is performed to loosen the fiber. Therefore, the fiber pieces 108 and the semi-cured resin attached to the fibers are likely to be missing from the side surface or the cut surface of the first prepreg 101.
- the missing resin and fiber pieces 108 are likely to adhere to the surface of another stacked first prepreg 101 due to static electricity or the like. This is because the first prepreg 101, the fiber piece 108, and the semi-cured resin are both insulators and are easily charged with static electricity.
- the first prepreg 101 (for example, a sheet shape of 500 mm ⁇ 600 mm) is often stacked in the thickness direction before manufacture, peeled off one by one at the time of manufacture, and processed alone. Therefore, the first prepreg 101 is easily charged with static electricity during such stacking or peeling, and the fiber pieces 108 and the like detached from the side surfaces of the first prepreg 101 adhere to the first prepreg 101.
- FIG. 6 is a schematic diagram for explaining a state in which a paste that has been conventionally discarded is regenerated and reused as a reuse paste.
- the recovered pastes 119a to 119d are used pastes that have been used in different squeegee processes, different conductive paste filling processes, or attached to different jigs 104, and are conventionally treated as industrial waste. .
- the recovered pastes 119a to 119d have composition misalignment pastes 116a to 116d in which composition misalignment has occurred due to squeezing or the like, and fiber pieces 108a to 108d, respectively.
- a large number of recovered pastes 119a to 119d are generated from each process, although a small amount. Further, in the composition shifted pastes 116a to 116d included in the recovered pastes 119a to 119d, the composition ratios of the conductive powder, the resin, and the like included therein are out of the standard value in the manufacturing specification.
- the conductive paste 105 has conductive powder, a main agent, and a curing agent. When the number of times of printing increases, the number of fiber pieces 108 in the conductive paste 105 increases, and as a result, the composition shifts.
- the composition ratio varies depending on the conditions of the squeegee (or the rub-in condition), the frequency of use of the paste, the first protective film 102, the first hole 103, and the like.
- the fiber pieces 108a to 108d included in the recovered pastes 119a to 119d vary in type and amount depending on the type of substrate, environment, processing apparatus and handling apparatus, and the like.
- the fiber piece containing paste 109 in which a plurality of fiber pieces obtained in a plurality of different lots or squeezing steps are contained in a large amount is recovered as a plurality of recovery pastes 119a to 119d. And these are put together and it is set as the recovery unity paste 120.
- the recovery unity paste 120 includes various fiber pieces 108a to 108d.
- the recovered pastes 119a to 119d can recover only a small amount of about 10g to 50g for each lot, a plurality of such small lots are periodically collected as necessary, so that the recovered combined paste 120 is obtained. It can be 1 kg to 10 kg or more. As a result, the yield during recycling can be increased and processing costs can be reduced.
- the term “plurality” refers to, for example, 10 to 100 lots or more.
- FIG. 7 is a schematic diagram for explaining how the recovered combined paste 120 is filtered to produce a filtered recovered paste 122.
- the filter 121 a mesh-like mesh such as stainless steel or polyester is used.
- Various fiber pieces 108 a to 108 d mixed in the recovered coalesced paste 120 are removed by the filter 121. That is, the recovered combined paste 120 is filtered according to the direction of the arrow 407, and the filtered recovered paste 122 is obtained.
- the filtration rate can be increased by using vacuum suction, a rotary pushing blade or screw, a slurry pressure pump, a diaphragm pump, etc. (both not shown).
- the vacuum suction for example, a vacuum pump or an aspirator that reduces pressure by a venturi effect using a fluid is used.
- the opening diameter of the filter 121 is not less than 3 times the average diameter of the metal particles contained in the recovered coalesced paste 120 and not more than 20 times the average diameter of the fibers constituting the first prepreg 101, Is preferably 10 times or less, and more preferably 5 times or less. This is because, when fibers such as glass fibers are included as foreign matter in the recovery coalescence paste 120, the length of the glass fiber as foreign matter is 20 times or more, more preferably 50 times or more of the average diameter of the glass fibers. Because there is.
- the opening diameter of the filter 121 is not less than 3 times the average particle diameter of the metal particles, not more than 20 times the average diameter of the fiber pieces 108, and preferably not less than 2 times the diameter of the latent curing agent. .
- a latent curing agent is produced by reacting several types of amines with an epoxy resin to form particles.
- the latent curing agent can be stored for a long time without changing its properties at room temperature, and is cured when heated to a predetermined temperature or higher.
- the viscosity of the recovered combined paste 120 can be reduced by adding a small amount of an organic solvent or the like to the recovered combined paste 120.
- the filtration workability of the filter 121 can be improved.
- the organic solvent added for filtration may be appropriately subtracted from the solvent added later to the filtered recovery paste 122 as necessary. In this way, the recovered coalesced paste 120 is filtered while in a paste state.
- FIG. 8 is a schematic diagram for explaining a state in which a solvent or the like 123 is added to the filtered recovered paste 122 to produce a reuse paste 124.
- Solvent etc. 123 is any one or more of a solvent, a resin, or a paste having a composition different from that of the filtered paste.
- the solvent the same solvent as that contained in the conductive paste is used.
- diethylene glycol monobutyl ether acetate (Diethylene monobutyl ether acetate), also known as butyl carbitol acetate, is used as the solvent.
- the resin the same resin as that contained in the conductive paste is used.
- an epoxy resin or the like is used as the resin.
- the solvent or the like 123 may be added at once or divided into a plurality and mixed. Further, after the viscosity is lowered, it may be filtered to obtain a filtered recovery paste 122.
- the reuse paste 124 is a conductive paste regenerated for reuse in which the fiber pieces 108 are removed from the used conductive paste without affecting the shape or the like of the copper powder contained therein. It is useful to adjust the reuse paste 124 so that the composition, solid content, viscosity, and the like of the new conductive paste 105 described with reference to FIG. However, the reuse paste 124 may include extremely small fiber pieces that are not included in the new conductive paste 105. Therefore, it is useful to clarify the difference between the conductive paste 105 and the reuse paste 124 by analysis. Specifically, using TG / DTA, the organic component is skipped and the content of the inorganic component is measured.
- the extremely small fiber piece is, for example, a fiber piece having a length of about 1 to 2 times its diameter.
- the solvent 123 may be not only an organic solvent but also a liquid thermosetting resin or other conductive paste.
- a conductive paste is used as the solvent 123 or the like, it is useful to use another conductive paste having a different viscosity or composition ratio from the conductive paste 105 described with reference to FIG. 1C and the like.
- the conductive paste composition ratio contained in the filtered recovered paste 122 is greatly different from the initial conductive paste 105 in viscosity, composition ratio, and the like. In order to correct this deviation, it is desirable to add an initial conductive paste 105 and another conductive paste having a different viscosity or composition ratio.
- a kneading device for example, a planetary mixer or a roll kneading device
- a kneading device for example, a planetary mixer or a roll kneading device
- a viscometer for viscosity adjustment (or viscosity measurement).
- a solid content meter or a thermal analyzer referred to as DSC, TG, DTA, etc.
- TG thermogravimetric analysis
- the composition ratio includes the amount of conductive powder in the paste (% by weight), the amount of volatile matter in the paste (% by weight), the amount of organic matter in the paste (% by weight), and the like.
- the specific gravity of the paste since the specific gravity of the paste is greatly influenced by the content of the metal contained in the paste, the specific gravity of the paste may be referred to.
- a buoyancy method, a specific gravity bottle method, a vibratory density meter, a balance method, or the like may be used based on JIS K 0061 (chemical product density and specific gravity measurement method).
- JIS K 0061 chemical product density and specific gravity measurement method
- you may use a commercially available specific gravity bottle.
- the Wardone type, the Gérysac type, the Rucharite type, or the Harvard specific gravity bottle of JIS K 2249 is used for measuring the specific gravity of relatively high viscosity liquid and semi-solid paving tar.
- a paste having a high viscosity it is also useful to make a specific gravity bottle itself.
- a specific gravity bottle with a volume of about 1 cc to 100 cc it is useful to use a metal material such as stainless steel.
- the fiber having a length of 10 times or more the average particle diameter of the conductive powder contained in the fiber piece containing paste 109 is 50 wt% or more of all the fiber pieces 108. This is because fibers having a length of 10 times or more the average particle size of the conductive powder are easily removed in the filtration step.
- the fiber having a length of 10 times or more of the average particle diameter of the conductive powder is less than 50 wt%, that is, 10 times the average particle diameter of the conductive powder.
- the ratio of the fiber pieces contained in the reuse paste 124 increases. That is, there are many short fiber pieces that could not be removed by filtration. As a result, the properties of the reuse paste 124 may be affected.
- the fiber having a length of 10 times or more and less than 100 times the average particle diameter of the conductive powder is 50 wt% or more and less than 90 wt% of all the fiber pieces 108. It is. Filtration may be difficult when fibers having a length of 100 times or more of the average particle diameter of the conductive powder or 90 wt% or more of fibers having a length of 10 or more times the average particle diameter are present. Further, the fiber having a length of 10 times or more of the average particle diameter of the conductive powder contained in the fiber piece-containing paste 109 is 0.01 wt% or more and 10 wt% or less of the fiber piece-containing paste 109. 124 can be easily manufactured.
- the amount of fibers 10 times or more the average particle size of the conductive powder contained in the fiber piece-containing paste 109 is less than 0.01 wt% with respect to the fiber piece-containing paste 109, The removal effect may not be obtained. Moreover, when it is 10.00 wt% or more, filtration may be difficult.
- the fiber piece 108 included in the fiber piece containing paste 109 is preferably glass fiber or aramid fiber.
- the glass fiber is a part of a glass woven fabric or a glass nonwoven fabric constituting the core material of the prepreg.
- An aramid fiber is also a part of an aramid fiber or an aramid nonwoven fabric constituting the core material of the prepreg.
- the opening diameter of the filter used for filtration is not less than 3 times the average particle diameter of the conductive powder contained in the fiber piece containing paste 109 and not more than 20 times the average diameter of the fiber pieces 108.
- the average particle size is less than 3 times, the filterability of the conductive powder may be affected.
- it exceeds 20 times the average diameter of a fiber piece the removability of a long fiber may be affected.
- the temperature of the fiber piece containing paste 109 it is useful to keep the temperature of the fiber piece containing paste 109 within a temperature range of 0 ° C. or higher and 80 ° C. or lower. If it is lower than 0 ° C., care must be taken in handling. If it exceeds 80 ° C., the thermosetting resin contained in the reuse paste 124 may start to harden.
- the reuse paste 124 it is useful to set the ratio of fibers having a length of 10 times or more the average particle diameter of the conductive powder to 10 wt% or less in the total fiber pieces. By setting the ratio of long fibers to 10% wt or less, and further 5 wt% or less, it is possible to reduce an increase in viscosity during the manufacturing process when a wiring board is manufactured using the reuse paste 124.
- the ratio of the fiber pieces having a length less than 3 times the average particle size of the conductive powder contained in the reuse paste 124 it is useful to keep the ratio of the fiber pieces having a length less than 3 times the average particle size of the conductive powder contained in the reuse paste 124 to 5 wt% or less of the weight of all the reuse pastes 124.
- By setting the content to 5 wt% or less it is possible to reduce an increase in viscosity during the manufacturing process when a wiring board is manufactured using the reuse paste 124.
- the second wiring board is the conductive paste 105 used in the production of the first wiring board, and the conductive paste 105 that has been conventionally discarded because a large number of fiber pieces 108 are mixed is shown in FIGS.
- the reuse paste 124 reproduced in this way is used.
- FIGS. 9A to 11C are cross-sectional views for explaining a state in which the second wiring board is manufactured using the reuse paste 124.
- FIG. 9A to 11C are cross-sectional views for explaining a state in which the second wiring board is manufactured using the reuse paste 124.
- FIGS. 9A and 9B are cross-sectional views illustrating a state in which the reuse paste is filled into the second hole 127 formed in the second prepreg 125 through the second protective film.
- the second prepreg 125 is formed in a semi-cured state (that is, a B stage state) by impregnating a glass woven fabric, a glass nonwoven fabric, an aramid woven fabric or an aramid nonwoven fabric with an epoxy resin or the like.
- the second protective film 126 is a PET film or the like. Specifically, PET, PEN, PPS, or the like is used for the second protective film 126.
- the second protective film 126 is formed on the surface of the second prepreg 125 by thermocompression bonding while removing air using a vacuum laminator or a roll laminator.
- the second hole 127 is formed by a carbon dioxide laser, a YAG laser, or the like. Further, when forming the large second hole 127, a drill, a punch, or the like may be used.
- the first prepreg 101 and the second prepreg 125 may be the same type of the same manufacturer.
- the first wiring board 115 formed by curing the first prepreg 101 is thermally cured before the second wiring board 133 formed by curing the second prepreg 125.
- the reuse paste 124 used for the first prepreg 101 and the second prepreg 125 may be the same lot or different lots.
- first and “second” in the first prepreg 101 and the second prepreg 125 indicate before and after the process.
- the reuse paste 124 is used for the second prepreg 125 to produce the second wiring substrate 133.
- the reuse wiring 124 may be used for the first prepreg 101 to produce the first wiring board 115.
- a second protective film 126 is provided on both surfaces of the second prepreg 125. Fiber pieces 108 such as glass fibers may adhere to the surface of the second protective film 126. The fiber pieces 108 may not be removed by a suction device or an adhesive roll (both not shown).
- the jig 104 is moved in the direction indicated by the arrow 607 on the second protective film 126 to which the fiber pieces 108 are adhered, and the reuse paste 124 is filled in the second hole 127.
- the fiber piece 108 on the second protective film 126 can be accommodated in the reuse paste 124 by increasing the contact pressure (or pressing pressure) of the second protective film 126 of the jig 104. .
- the fiber piece 108 can be removed as shown in FIGS.
- a second reuse paste (not shown) or even a third reuse paste (not shown) can be produced, and the paste can be recycled.
- the reuse of the conductive paste 105 means that the fiber pieces 108 and the like are removed without affecting the shape and dispersion state of the conductive powder contained in the conductive paste 105, and the composition of the conductive paste 105 is reused. Is to adjust.
- FIG. 10A to FIG. 10C are cross-sectional views for explaining how the second wiring board is manufactured using the reuse paste 124.
- the second prepreg 125 has a second protrusion 129 made of the reuse paste 124.
- a second copper foil 128 is disposed on both sides of the second prepreg 125 as a metal foil.
- the state shown in FIG. 10B is obtained.
- the reuse paste 124 is compressed and cured to form the second via 131 and the second prepreg 125 is cured to form the second insulating layer 130.
- the second copper foil 128 shown in FIG. 10B is formed in a predetermined pattern by etching or the like, and becomes the second wiring 132 of FIG. In this way, the second wiring board 133 is manufactured.
- FIG. 11A to FIG. 11C are explanatory diagrams of a method for manufacturing a multilayer substrate having four wiring layers.
- the second prepreg 125 and the second copper foil 128 having the second protrusions 129 are set on both surfaces of the first wiring board 115, and pressed in the direction of the arrow 807 to be integrated. Turn into. You may heat at the time of this pressurization.
- FIG. 11B is a cross-sectional view showing a state where the second prepreg 125 is cured and becomes the second insulating layer 130. Thereafter, the second copper foil 128 in the surface layer is etched to form the second wiring 132, whereby a second wiring substrate 133 as shown in FIG. 11C is obtained. Further, by repeating such steps, further multilayering can be achieved.
- FIG. 12A and FIG. 12B are a diagram showing a SEM observation image of a part of the recovered paste and a schematic diagram thereof.
- the collection pastes 119a to 119d include conductive powder 134 made of copper powder or the like and fiber pieces 108 made of glass fiber or the like.
- the particle size, shape, particle size distribution, etc. of the conductive powder 134 can be optimized according to each application. As shown in FIGS. 12A and 12B, the particle size of the conductive powder 134 and the diameter of the fiber piece 108 are substantially equal. The length of the fiber piece 108 is about 5 times (or more than 10 times) the diameter. That is, the fiber piece 108 extends in the length direction compared to the diameter.
- the particulate conductive powder 134 has a spherical shape having a diameter and a length that are substantially equal. In the present embodiment, the difference in shape between the fiber piece 108 and the conductive powder 134 is used.
- conventionally discarded waste paste is recovered as recovered pastes 119a to 119d and collected to be recovered combined paste 120. Then, the fiber pieces 108 are selectively removed from the recovered coalesced paste 120, the viscosity, solid content, composition ratio, and the like are adjusted and regenerated as a reuse paste to manufacture a wiring board.
- the fiber piece containing paste 109 generated in the process of FIGS. 1A to 3C, which is the manufacturing process of the first wiring board 115, that is, the recovered paste mixed with the fiber pieces 108 shown in FIGS. 12A and 12B. 119a to 119d are reproduced by the steps shown in FIGS.
- the reuse paste 124 is used in the manufacturing process of the second wiring board 133 as shown in FIGS. 9A to 11C.
- FIGS. 13A to 13C are schematic diagrams for explaining filling of a conductive paste as a comparative example.
- the first prepreg 101 in which the first hole 103 is formed is fixed to the base 106, and the jig 104 is moved in the direction of the arrow 907, thereby filling the first hole 103 with the conductive paste 105.
- the conductive paste 105 has a viscosity higher than the standard value in the manufacturing specification as a result of mixing the fiber pieces 108 adhering to the first protective film 102.
- the additional paste 135 is an additional paste for reducing the viscosity, and the viscosity of the additional paste 135 is lower than that of the conductive paste 105 to be added.
- FIG. 13B is a cross-sectional view showing a state where an additional paste 135 having a viscosity lower than that of the conductive paste 105 is added to the conductive paste 105 whose viscosity has become higher than the standard value.
- the added paste 136 is obtained by adding an additional paste 135 having a viscosity lower than the standard value to the conductive paste 105 whose viscosity is higher than the standard value in the manufacturing specification.
- the viscosity range of the added paste 136 is within the range of the standard value in the manufacturing specification due to the addition of the additional paste 135. By adding the additional paste 135, not only the viscosity range but also the composition ratio of the paste can be within the standard value in the manufacturing specification.
- FIG. 13C is a schematic diagram for explaining a problem caused by the added paste 136.
- the viscosity of the conductive paste before printing is 15 (Pa ⁇ s)
- the viscosity after printing 250 sheets is about 89 (Pa ⁇ s) (see Table 1 described later). If a new conductive paste is simply added without adjusting the viscosity of the conductive paste after printing 250 sheets, the viscosity will be higher than 50 (Pa ⁇ s). When the viscosity is high, the filling property to the first hole 103 may be affected. The initial viscosity of the reuse paste is 50 Pa. When s is exceeded, the number of sheets that can be printed thereafter decreases.
- the viscosity before starting printing it is preferable to adjust the viscosity before starting printing to be 5 (Pa ⁇ s) or more and 50 (Pa ⁇ s) or less. That is, in this embodiment, it is important to adjust the viscosity of the used conductive paste and to filter the used conductive paste using a filter.
- the present invention proposes not a simple reuse of used conductive paste, but a high-level technical idea utilizing the laws of nature for reuse.
- the waste amount of the conductive paste is reduced and the reuse thereof is performed again in the EU (for example, WEE Directive Article 7) for the same purpose as the beginning including reuse, that is, continuous use. It is thought that it corresponds to doing.
- recycling is divided into two types, namely, recovery (Discovery) and disposal (Disposal). Further, the recovery (Recovery) is divided into three types of reuse (Reuse), recycling (Recycling), and energy recovery (Energy Recovery).
- disposal is amortization or landfill.
- Reuse means re-use for the same purpose as the beginning including continuous use. Recycling is the reworking of waste materials in the production process for initial or other purposes. Energy recovery is energy recovery by direct combustion with heat regeneration.
- This embodiment corresponds to the regeneration of the EU recycling definition, and is useful for reducing waste and other resource energy consumption.
- a fiber piece mixed (or accumulated) in the conductive paste only by mixing the conductive paste with the used (or in use) conductive paste, etc. Cannot be removed.
- the used conductive paste (or the conductive paste used for reuse) in the present embodiment is collected outside the printing machine from a metal mask or the like provided around the printing medium.
- the used conductive paste is taken out (or collected) from a metal mask or the like (further used printing machine, squeegee, etc.) provided around the substrate to be printed, outside the printing machine (or another The conductive paste is recycled (especially reused) at a place or another device.
- the conductive paste generated at different printing lots, different days and at different times can be efficiently recovered, and one large lot (1 kg or more, 5 kg or more, or even 10 kg) Above). Therefore, the efficiency and yield of conductive paste recycling (especially reuse) can be increased.
- the used conductive paste generated after the end of printing is a small amount (for example, less than 1 kg, and further 500 g to 50 g).
- the amount of the conductive paste is small, the conductive paste is scattered discontinuously on the linear contact surface between the squeegee and the substrate to be printed, and the holes formed in the prepreg cannot be filled. Rather than regenerating with a small amount, collecting a plurality of small amounts of conductive paste and making it into a large amount (1 kg or more, further 10 kg or more) can remove the fiber pieces and the like in the used paste with high efficiency.
- the recovered conductive paste is regenerated so that the dispersed state of the conductive particles can be reused, and a high technical idea is proposed.
- Table 1 to (Table 5) are tables showing examples of the results of experiments on the effects in the present embodiment.
- Table 1 to (Table 5) show the hole diameter and the number of holes formed in the prepreg and the defect rate when the number of printed sheets is changed.
- the right end of the table indicates the viscosity for each number of printed sheets.
- the apparent viscosity at 0.5 rpm is measured using a cone plate type rheometer.
- the unit of viscosity is Pa ⁇ s.
- the cone plate type rheometer has a cone diameter of 25 mm and a cone angle of 2 degrees.
- the measurement temperature of the sample is 25 ° C.
- the viscosity measurement and the like are based on JIS K7117-2.
- the defect rate is 7.5 for holes with a diameter of 80 ⁇ m, and the defect rate is 1.7 for holes with a diameter of 100 ⁇ m. In the case of holes having a diameter of 130 to 200 ⁇ m, no defect occurred. From the above, it can be seen that as the number of printed sheets increases to 300, the defect rate increases as the hole diameter decreases. Further, the viscosity when the number of printed sheets is 300 is 137 (Pa ⁇ s), and in the case of holes having a diameter of 130 to 200 ⁇ m, no defect occurs on the 300th sheet. A defect occurs when the diameter of the hole is 100 ⁇ m or less, and no defect occurs when the diameter of the hole is 130 ⁇ m or more.
- the diameter of the hole having a diameter of 130 to 200 ⁇ m is larger than that of the diameter of 80 to 100 ⁇ m. Therefore, even if the viscosity of the conductive paste is increased to 137 (Pa ⁇ s), the conductive paste is in the hole. It is thought that it can be filled reliably.
- the defect rate is 14.5 in the case of 10,000 holes with a diameter of 80 ⁇ m, 5.8 in the case of 10,000 holes with a diameter of 100 ⁇ m, and 130 ⁇ m in diameter.
- the number of holes is 10,000, it is 1.0 (because this value is normalized as 1.0).
- the defect rate is zero. This is thought to be because the conductive paste can be reliably filled into the holes because the diameter of the holes is as large as 150 ⁇ m or more despite the fact that the viscosity of the paste further increased to 169 (Pa ⁇ s).
- the defect rate is 33.2 when 10,000 holes with a diameter of 80 ⁇ m are 9.9, 9.9 when holes with a diameter of 100 ⁇ m are 10,000, and 130 ⁇ m in diameter.
- the number of holes is 10,000, it is 3.8, and when the number of holes having a diameter of 150 ⁇ m is 10,000, it is 1.2.
- the defect rate is zero. This is presumably because the conductive paste can be reliably filled into the holes because the diameter of the holes is as large as 200 ⁇ m despite the fact that the viscosity of the paste further increased to 247 (Pa ⁇ s).
- the defect rate is 63.9 when the number of holes having a diameter of 80 ⁇ m is 10,000, 21.4 when the number of holes having a diameter of 100 ⁇ m is 10,000, and the diameter is 130 ⁇ m
- the number is 10.3 when the number of holes is 10,000, 3.8 when the number of holes having a diameter of 150 ⁇ m is 10,000, and 0.9 when the number of holes having a diameter of 200 ⁇ m is 10,000. Even in the case of a hole having a diameter of 200 ⁇ m, a defect has occurred.
- the hole diameter is smaller than 130 ⁇ m, no defect occurs when the viscosity of the conductive paste is 89 (Pa ⁇ s), but a defect occurs at 137 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste reaches about 80 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste. Since the viscosity of the conductive paste in the initial stage (before starting printing) is 15 (Pa ⁇ s), the conductive paste that has not been filled in the holes is used as the recovered paste when the viscosity is about 5 times the initial viscosity or higher. Collect it.
- the hole diameter is 130 ⁇ m or more and smaller than 150 ⁇ m
- no failure occurs when the viscosity of the conductive paste is 137 (Pa ⁇ s), but failure occurs at 169 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste becomes about 130 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste. Since the initial conductive paste has a viscosity of 15 (Pa ⁇ s), when the viscosity becomes about 8 times or more than the initial viscosity, the conductive paste that has not been filled in the holes may be recovered as a recovery paste.
- the hole diameter is 150 ⁇ m or more and smaller than 200 ⁇ m
- no failure occurs when the viscosity of the conductive paste is 169 (Pa ⁇ s), but failure occurs at 247 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste reaches about 160 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste. Since the initial conductive paste has a viscosity of 15 (Pa ⁇ s), when the viscosity becomes about 10 times or more of the initial viscosity, the conductive paste that is not filled in the holes may be recovered as a recovery paste.
- the hole diameter is 200 ⁇ m or more
- no defect occurs when the viscosity of the conductive paste is 247 (Pa ⁇ s), but a defect occurs at 511 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste becomes about 240 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste. Since the initial conductive paste has a viscosity of 15 (Pa ⁇ s), when the viscosity is about 16 times or more of the initial viscosity, the conductive paste not filled in the holes may be recovered as a recovery paste.
- the initial viscosity (before the start of printing) is set to 1. It is useful to measure how many times the viscosity after printing has become the initial viscosity, and to recover the unfilled conductive paste as a recovery paste.
- the viscosity before starting printing is set to 1, but the viscosity after printing a certain number of sheets (for example, 10 sheets) may be set to 1.
- the diameter of the hole is 80 ⁇ m, specifically 80 ⁇ m ⁇ 8 ⁇ m.
- the diameter of the hole is 100 ⁇ m, specifically, 100 ⁇ m ⁇ 10 ⁇ m.
- the diameter of the hole is 130 ⁇ m, specifically 130 ⁇ m ⁇ 13 ⁇ m.
- 150 ⁇ m specifically means 150 ⁇ m ⁇ 15 ⁇ m.
- 200 ⁇ m specifically means 200 ⁇ m ⁇ 20 ⁇ m. This is because the hole diameter may vary. It is useful to set the diameter of the hole at the portion where the cross-sectional area of the hole is minimum.
- the conductive paste was discarded regardless of the hole diameter. Even in the case of a used conductive paste in which a defect occurs in a small hole having a diameter of 80 ⁇ m, the defect may not occur in a relatively large hole having a diameter of 200 ⁇ m. However, conventionally, even a conductive paste that can be used by selecting the diameter of the hole is often discarded.
- the conductive paste that has been discarded (Table 1) and exceeds the number of printed sheets 450 is recovered as recovery pastes 119a to 119d. Further, about 10 kg of the recovered combined paste 120 is prepared together with the used conductive paste in other lots. Note that the viscosity of each of the recovered pastes 119a to 119d varies widely from about 600 to 800 (Pa ⁇ s).
- the defect rate can be drastically reduced even when the number of printed sheets is increased by using a small diameter of 80 ⁇ m in diameter, which tends to increase the defect rate.
- the defect rate is 66.7 for holes with a diameter of 80 ⁇ m, 30.6 for holes with a diameter of 100 ⁇ m, and 21. 3. 12.5 for holes with a diameter of 150 ⁇ m and 1.2 for holes with a diameter of 200 ⁇ m. Even with a reuse paste, it can be seen that as the number of printed sheets increases, the defect rate increases especially as the hole diameter decreases.
- the viscosity of the reuse paste is adjusted to be 5 (Pa ⁇ s) or more and 50 (Pa ⁇ s) or less.
- the viscosity of the reuse paste is less than 5 (Pa ⁇ s)
- the solid content becomes low and may affect the via resistance.
- the viscosity is high, the filling property to the via hole may be affected.
- the initial viscosity of the reuse paste is 50 Pa.
- the viscosity before starting printing is 5 (Pa ⁇ s) or more and 50 (Pa ⁇ s) or less.
- the viscosity of the reuse paste is in the range of 5 (Pa ⁇ s) to 50 (Pa ⁇ s), and the solid content is ⁇ 1 wt of the solid content of the new conductive paste (for example, 85 wt% to 95 wt%). It is desirable to adjust to the range of% or less.
- the hole diameter is smaller than 130 ⁇ m, no failure occurs when the viscosity of the conductive paste is 100 (Pa ⁇ s), but failure occurs at 125 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste reaches about 100 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste. Since the viscosity of the conductive paste before the start of the reuse paste printing is 20 (Pa ⁇ s), when the viscosity becomes about 5 times or more the viscosity of the reuse paste before the start of printing, the conductive material that has not been filled in the holes. The paste may be recovered as a recovery paste.
- the hole diameter is 130 ⁇ m or more and smaller than 200 ⁇ m
- no defect occurs when the viscosity of the conductive paste is 125 (Pa ⁇ s), but a defect occurs at 212 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste becomes about 120 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste. Since the viscosity of the conductive paste before starting the printing of the reuse paste is 20 (Pa ⁇ s), when the viscosity is about 6 times or more of the viscosity before starting the printing of the reuse paste, the conductive that has not been filled in the holes. The paste may be recovered as a recovery paste.
- the hole diameter is 200 ⁇ m or more
- no defect occurs when the viscosity of the conductive paste is 212 (Pa ⁇ s), but a defect occurs at 345 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste reaches about 200 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste. Since the viscosity of the conductive paste before starting the printing of the reuse paste is 20 (Pa ⁇ s), when the viscosity is about 10 times or more of the viscosity before starting the printing of the reuse paste, the conductive that has not been filled in the holes. The paste may be recovered as a recovery paste.
- the viscosity of the reuse paste before starting printing is set to 1. Then, it is useful to measure how many times the viscosity of the paste after printing has reached the viscosity of the reuse paste before starting printing, and to collect the unfilled conductive paste as a collected paste.
- the viscosity of the reuse paste before printing is set to 1
- the viscosity after printing a certain number of sheets for example, 10 sheets may be set to 1.
- the conductive paste on which a total of 900 sheets have been printed is used as a recovery coalescence paste 120, and a 100-mesh filter 121 is used to remove the fiber pieces 108, as shown in FIG. 7.
- the filtered recovered paste 122 is obtained.
- the viscosity is adjusted as shown in FIG. Further, the degree of composition deviation in the conductive paste is measured using thermogravimetric analysis (TG) or the like, and the solvent is added to the composition deviation to adjust the viscosity.
- TG thermogravimetric analysis
- This is the second reuse paste.
- a printing experiment similar to (Table 1) is performed. The results are shown in (Table 3).
- the number of prints of 150 is 450, the number of prints when it is new, and the number of prints of 450 as the reuse paste for the first reproduction is finished. Equivalent to what has been done.
- the hole diameter is smaller than 130 ⁇ m, no failure occurs when the viscosity of the conductive paste is 110 (Pa ⁇ s), but failure occurs at 158 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste becomes about 110 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste.
- the viscosity of the conductive paste before starting the printing of the second reuse paste is 35 (Pa ⁇ s)
- the viscosity becomes about three times or more than the viscosity before starting the printing of the second reuse paste.
- the conductive paste that has not been filled in the holes may be recovered as a recovery paste.
- the hole diameter is 130 ⁇ m or more and smaller than 200 ⁇ m
- no defect occurs when the viscosity of the conductive paste is 158 (Pa ⁇ s), but a defect occurs at 215 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste becomes about 150 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste.
- the viscosity of the conductive paste before starting the printing of the second reuse paste is 35 (Pa ⁇ s)
- the viscosity becomes about 4 times the viscosity before starting the printing of the second reuse paste.
- the conductive paste that has not been filled in the holes may be recovered as a recovery paste.
- the hole diameter is 200 ⁇ m or more
- no defect occurs when the viscosity of the conductive paste is 215 (Pa ⁇ s), but a defect occurs at 348 (Pa ⁇ s). Therefore, when the viscosity of the conductive paste becomes about 210 (Pa ⁇ s) or more, it is desirable to recover the conductive paste that has not been filled in the holes as a recovery paste.
- the viscosity of the conductive paste before starting the printing of the second reused paste is 35 (Pa ⁇ s)
- the viscosity becomes about 6 times the viscosity before starting the printing of the second reused paste.
- the conductive paste that has not been filled in the holes may be recovered as a recovery paste.
- the viscosity before starting printing of the second reuse paste is set to 1. Then, it is useful to measure how many times the viscosity before printing of the second reuse paste before printing is started, and to recover the unfilled conductive paste as a recovery paste.
- the viscosity before the printing of the second reuse paste is set to 1
- the viscosity after printing a certain number of sheets for example, 10 sheets may be set to 1.
- the relationship between the viscosity at which defects occur and the number of printed sheets may be examined, and the conductive paste that has not been filled in the holes may be collected as a collected paste after printing a certain number of sheets.
- the mesh does not need to be limited to a net-like shape.
- Surface filtration surface filtration
- depth filtration depth filtration
- cake filtration glass fiber deposited on the filter surface as a cake, and this cake as a filter
- the filter is used as a filtered recovered paste 122 by filtering as shown in FIG.
- the waste paste can be reduced by recycling and further reusing (reusing) the conductive paste 105.
- the fiber piece 108 is often a fiber piece 108 made of glass constituting the first prepreg 101 or the second prepreg 125. Therefore, the opening diameter of the filter 121 used in the filtration step is 3 times or more the average particle diameter of the metal particles contained in the conductive paste, 20 times or less the fiber average diameter, further 10 times or less, and further 5 It is desirable to be less than double. When the opening diameter of the filter 121 is not more than twice the average particle diameter of the metal particles, the filter 121 is likely to be clogged. Further, when the opening diameter of the filter 121 is larger than 30 times the average diameter of the fibers, the short fiber pieces 108 may not be completely filtered. The opening diameter of the filter 121, the average particle diameter of the metal particles, the diameter of the fibers, and the like can be observed and measured by SEM or the like.
- one or more of the thickness of the prepreg itself or the number or density (weaving method, density, number, etc.) of glass fibers or aramid fibers constituting the prepreg are different from each other. It is useful to let Various wiring boards can be obtained by using prepregs having different thicknesses, number of fibers constituting the prepreg, density, and the like.
- the via diameter in one prepreg may be unified to one diameter.
- a plurality of different via diameters may be formed in one prepreg.
- the protective film used when preparing the fiber piece containing paste is referred to as a first protective film
- the protective film used when producing a wiring board using the reuse paste is referred to as a second protective film.
- the protective film at the time of preparing the fiber piece containing paste may be described as a second protective film
- the protective film at the time of producing a wiring board using the reuse paste may be described as a first protective film.
- the hole formed in the prepreg when preparing the fiber piece containing paste is referred to as the first hole, and the hole formed in the prepreg when the wiring board is manufactured using the reuse paste. Marked as second hole.
- the hole formed in the prepreg when preparing the fiber piece containing paste is referred to as a second hole, and the hole formed in the prepreg when using the reuse paste is referred to as the first hole. May be.
- the manufacturing method of the reuse paste according to the present embodiment can reduce the number of fiber pieces mixed in the conductive paste in the wiring board using the conductive paste for interlayer connection. As a result, the yield can be improved. Furthermore, since the conductive paste mixed with fiber pieces can be reused, the material cost of the wiring board can be greatly reduced and the amount of waste can be reduced.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Conductive Materials (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
102 第1の保護フィルム
103 第1の孔
104 治具
105 導電ペースト
106 台
107,107b,207,307,407,507,607,707,807,907 矢印
108,108a,108b,108c,108d 繊維片
109 繊維片収容ペースト
110 第1の銅箔
111 第1の突出部
112 第1の絶縁層
113 第1のビア
114 第1の配線
115 第1の配線基板
116a,116b,116c,116d 組成ずれペースト
119a,119b,119c,119d 回収ペースト
120 回収合一ペースト
121 フィルタ
122 ろ過済み回収ペースト
123 溶剤等
124 リユースペースト
125 第2のプリプレグ
126 第2の保護フィルム
127 第2の孔
128 第2の銅箔
129 第2の突出部
130 第2の絶縁層
131 第2のビア
132 第2の配線
133 第2の配線基板
134 導電粉
135 追加ペースト
136 追加済みペースト
137 未充填部
138 空隙
Claims (18)
- 導電粉と樹脂を有する導電ペーストと、第1のプリプレグから欠落した繊維片とを有する繊維片収容ペーストを準備するステップと、
前記繊維片収容ペーストを、ぺ-スト状態のまま、フィルタを用いてろ過し、ろ過済み回収ペーストを作製するステップと、
前記ろ過済み回収ペーストに、溶剤と樹脂と前記ろ過済み回収ペーストと異なる組成のペーストとのうちの少なくとも一つを添加し、リユースペーストを作製するステップと、
第2のプリプレグの表面に、第1の保護フィルムを貼り付けるステップと、
前記第1の保護フィルムを介して、前記第2のプリプレグに第1の孔を形成するステップと、
前記リユースペーストを、前記第1の孔に充填するステップと、
前記第1の保護フィルムを剥離し、前記第2のプリプレグの表面に前記リユースペーストからなる突出部を形成するステップと、
前記第2のプリプレグの両面に金属箔を配置し、前記金属箔の外側から前記第2のプリプレグを加圧するステップと、
前記第2のプリプレグを加熱し、前記第2のプリプレグと前記リユースペーストを硬化するステップと、
前記金属箔を配線パターンに加工するステップと、
を備える
配線基板の製造方法。 - 前記繊維片収容ペーストに含まれる、前記導電粉の平均粒径の10倍以上の長さの繊維が、前記繊維片収容ペースト中の全ての前記繊維片の50wt%以上となるように、前記繊維片収容ペーストを準備する
請求項1記載の配線基板の製造方法。 - 前記繊維片収容ペーストに含まれる、前記導電粉の平均粒径の10倍以上の長さの繊維が、前記繊維片収容ペーストの0.01wt%以上10wt%以下となるように、前記繊維片収容ペーストを準備する
請求項1記載の配線基板の製造方法。 - 前記リユースペーストに含まれる、前記導電粉の平均粒径の10倍以上の長さの繊維が、前記リユースペースト中の全ての繊維片の10wt%以下となるように、前記リユースペーストを作製する
請求項1記載の配線基板の製造方法。 - 前記リユースペーストの粘度が5Pa・s以上、50Pa・s以下である
請求項1記載の配線基板の製造方法。 - ろ過済み回収ペーストを作製するステップにおいて、
前記繊維片収容ペーストは、0℃以上80℃以下の温度に保たれる
請求項1記載の配線基板の製造方法。 - 前記フィルタの開口径は、前記金属粒子の平均粒径の3倍以上であり、前記繊維片の平均直径の20倍以下である
請求項1記載の配線基板の製造方法。 - 前記繊維片収容ペーストに含まれる前記繊維片は、ガラス繊維またはアラミド繊維である
請求項1記載の配線基板の製造方法。 - 前記フィルタは、網目状のステンレスまたはポリエステルである
請求項1記載の配線基板の製造方法。 - 前記導電ペースト中の前記樹脂は、熱硬化性樹脂である
請求項1記載の配線基板の製造方法。 - 前記導電ペースト中の前記樹脂の硬化剤として、潜在性硬化剤を用い、
前記フィルタの開口径は、前記金属粒子の平均粒径の3倍以上であり、前記繊維片の平均直径の20倍以下であり、前記潜在性硬化剤の直径の2倍以上である
請求項1記載の配線基板の製造方法。 - 前記溶剤は、前記導電ペーストに含まれている溶剤と同じ溶剤である
請求項1記載の配線基板の製造方法。 - 前記溶剤は酢酸ジエチレングリコールモノブチルエーテルである
請求項1記載の配線基板の製造方法。 - 前記ろ過済み回収ペーストに添加される前記樹脂は、前記導電ペーストに含まれている樹脂と同じ樹脂である
請求項1記載の配線基板の製造方法。 - 前記ろ過済み回収ペーストに添加される前記樹脂はエポキシ樹脂である
請求項1記載の配線基板の製造方法。 - 前記繊維片収容ペーストを準備してから、前記ろ過済み回収ペーストを作製するまでの間に、前記繊維片収容ペーストの粘度を測定するステップをさらに備え、
測定した前記繊維片収容ペーストの粘度が一定以上であれば、
前記ろ過済み回収ペーストを作製するステップに進む
請求項1記載の配線基板の製造方法。 - 前記繊維片収容ペーストを準備してから、前記ろ過済み回収ペーストを作製するまでの間に、前記繊維片収容ペーストの粘度を測定するステップをさらに備え、
測定した前記繊維片収容ペーストの粘度が前記導電ペーストの所定倍以上であれば、前記ろ過済み回収ペーストを作製するステップに進む
請求項1記載の配線基板の製造方法。 - 前記繊維片収容ペーストは、前記第1のプリプレグの表面に、第2の保護フィルムを貼り付けるステップと、
前記第2の保護フィルムを介して、前記第1のプリプレグに第2の孔を形成するステップと、
前記導電ペーストまたは前記リユースペーストを、前記第2の孔に充填するステップの後、
前記第2の孔に充填されなかった前記導電ペーストまたは前記リユースペーストを回収したペーストである
請求項1記載の配線基板の製造方法。
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CN2012800028805A CN103109589A (zh) | 2011-04-27 | 2012-04-19 | 布线基板的制造方法 |
EP12776691.3A EP2571340A4 (en) | 2011-04-27 | 2012-04-19 | METHOD FOR PRODUCING CONDUCTOR PLATES |
JP2012555624A JP5229437B2 (ja) | 2011-04-27 | 2012-04-19 | 配線基板の製造方法 |
US13/807,223 US8561294B2 (en) | 2011-04-27 | 2012-04-19 | Method of manufacturing circuit board |
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EP3050575B1 (en) * | 2013-09-27 | 2020-05-06 | Daicel Corporation | Disintegrating particle composition produced by two-stage wet granulation process, and intraorally disintegrating tablet containing same composition |
CN105322049A (zh) * | 2014-07-31 | 2016-02-10 | 国家电网公司 | 一种太阳能电池浆料回收利用方法 |
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US10276536B2 (en) * | 2017-04-28 | 2019-04-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Structure and formation method of chip package with fan-out structure |
JP7031955B2 (ja) * | 2019-09-10 | 2022-03-08 | Fict株式会社 | 回路基板の製造方法 |
WO2021241155A1 (ja) * | 2020-05-28 | 2021-12-02 | 京セラ株式会社 | 配線基板 |
CN113260162B (zh) * | 2021-04-29 | 2023-11-03 | 邹文华 | 一种组合印制电路板导电膏隔离薄膜剥离装置 |
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US20130097857A1 (en) | 2013-04-25 |
JP5229438B2 (ja) | 2013-07-03 |
EP2571341A4 (en) | 2013-12-11 |
JPWO2012147314A1 (ja) | 2014-07-28 |
EP2571341A1 (en) | 2013-03-20 |
TW201247809A (en) | 2012-12-01 |
CN103109589A (zh) | 2013-05-15 |
US20130299752A1 (en) | 2013-11-14 |
EP2571340A4 (en) | 2014-01-08 |
US8561294B2 (en) | 2013-10-22 |
WO2012147314A1 (ja) | 2012-11-01 |
EP2571340A1 (en) | 2013-03-20 |
TW201309145A (zh) | 2013-02-16 |
JPWO2012147313A1 (ja) | 2014-07-28 |
CN103125150A (zh) | 2013-05-29 |
JP5229437B2 (ja) | 2013-07-03 |
US20130146817A1 (en) | 2013-06-13 |
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