WO2012093653A1 - 振動素子および光走査装置ならびにこれを用いた画像形成装置および画像投影装置 - Google Patents
振動素子および光走査装置ならびにこれを用いた画像形成装置および画像投影装置 Download PDFInfo
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- WO2012093653A1 WO2012093653A1 PCT/JP2012/000015 JP2012000015W WO2012093653A1 WO 2012093653 A1 WO2012093653 A1 WO 2012093653A1 JP 2012000015 W JP2012000015 W JP 2012000015W WO 2012093653 A1 WO2012093653 A1 WO 2012093653A1
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- Prior art keywords
- torsion bar
- light
- magnet
- optical scanning
- longitudinal axis
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/44—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using single radiation source per colour, e.g. lighting beams or shutter arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/47—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light
- B41J2/471—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/28—Reflectors in projection beam
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
- H04N1/1135—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors for the main-scan only
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49009—Dynamoelectric machine
Definitions
- the present invention relates to a vibration element and an optical scanning device using resonance of a torsion bar, and an image forming apparatus and an image projection device incorporating the optical scanning device.
- Patent Document 1 An optical scanning device that scans light by oscillating a reflecting mirror at high speed using resonance of a vibration system instead of a rotating reflecting mirror such as a polygon mirror used in an optical scanner is disclosed in Patent Document 1 and It is proposed in Patent Document 2 and the like.
- Patent Document 2 An oscillator device and a potential sensor having the same principle are also proposed in Patent Document 3.
- An optical scanning element as an oscillating element constituting such an optical scanning device or an electric potential sensor includes a plate-like oscillating body, a torsion bar to which the oscillating body is fixed, and the oscillating body on the longitudinal axis of the torsion bar.
- it comprises drive means for rocking as a center.
- the driving means has a magnet that is integrally attached to the oscillator and a coil that is opposed to the magnet and through which an alternating current is passed, and by passing the alternating current through the coil, the torsion bar is elastically twisted.
- the swinging body swings. For this reason, it is possible to oscillate the oscillating body with a large sway angle with relatively little electric power by utilizing the resonance phenomenon caused by the elastic torsion of the torsion bar.
- the “swing angle” described in this specification is an angle formed by two oscillating ends at which the oscillating body is switched when the oscillating body oscillates about the longitudinal axis of the torsion bar. Means.
- one flat mirror is formed by sticking a mirror coating applied to one side of two flat plate glasses having the same wall thickness.
- the plane mirror is swung around an axis passing through the mirror coating sticking surface so that the reflection position is not displaced due to the deflection of the plane mirror.
- light is not reflected on the surface of the flat plate glass, but is incident on the flat plate glass, reflected on the mirror coating portion, and then emitted from the surface of the flat plate glass.
- the flat glass must be optically transparent and essentially cannot utilize optically opaque materials such as metals.
- Patent Document 2 shows a configuration in which a magnet is attached to a torsion bar via a fixing member, and the surface of the magnet is formed as a light reflecting surface.
- the common center of gravity of the fixed member and the magnet to be joined to it is away from the central axis of the torsion bar, the light reflecting surface formed on the surface of the magnet causes abnormal vibration and scans light in a desired direction. It may not be possible to
- An object of the present invention is to provide a vibration element that can effectively prevent abnormal vibrations from occurring in a rocking body provided in a torsion bar, and an optical scanning device using the vibration element.
- Another object of the present invention is to provide a compact and high-performance image forming apparatus and an image projection apparatus incorporating such an optical scanning device.
- Another object of the present invention is to provide a vibrating element, an optical scanning apparatus, an image forming apparatus using the same, and an image projecting apparatus capable of widening a deflection angle range while ensuring the straightness of a desired torsion bar.
- a further object of the present invention is to provide a vibration element capable of simplifying the assembly of the vibration element and improving the positioning accuracy of components. It is also an object of the present invention to provide an optical scanning apparatus that realizes stable optical scanning, an image forming apparatus using the same, and an image projection apparatus.
- a vibrating element comprising: an oscillating body having two plate members having the above.
- the oscillator has a light reflection surface that extends in parallel with the longitudinal axis of the torsion bar and reflects light from the light source, and is accompanied by elastic deformation of the torsion bar.
- the light may be swung around its longitudinal axis, and thereby the light reflected by the light reflecting surface of the rocking body may be swung in a direction intersecting the longitudinal axis of the torsion bar.
- An accommodation groove for accommodating the torsion bar is formed on the joint surface of the two plate members, and the two plate members have a symmetrical shape with the longitudinal axis of the torsion bar as the axis of symmetry. preferable.
- the light reflecting surface of the oscillating body may be formed on a surface opposite to the joint surface of at least one of the two plate members.
- a center of gravity adjusting member for adjusting the center of gravity of the rocking body and the torsion bar can be further provided.
- the torsion bar may be one that has been subjected to tension processing or ironing processing.
- the rocking body can be provided with a notch serving as a reference for attaching the magnet.
- a torsion bar, a rocking body fixed to the torsion bar, a first magnetic field generating means fixed to the rocking body or the torsion bar, and the first magnetic field generating means are generated.
- a vibrating element including a second magnetic field generating means for generating a magnetic field corresponding to the magnetic field to be generated and rotating the rocking body by deforming the torsion bar, wherein the torsion bar has a linear shape with a constant cross-sectional shape. It has a flat part formed in a part of the formed wire, and the rocking body is joined to this flat part.
- the second magnetic field generating means generates a magnetic field corresponding to the magnetic field generated by the first magnetic field generating means to deform the torsion bar, and the rocking body rotates with the elastic deformation of the torsion bar.
- a method for manufacturing a vibration element according to the second aspect of the present invention wherein the step of forming a flat portion on a part of the surface of a linear wire having a constant cross-sectional shape, And a step of joining an oscillating body to a flat portion formed on a part of the surface of the wire.
- the flat portion has a rotationally symmetric shape with respect to the longitudinal axis of the wire.
- the flat portion has a pair of flat surfaces parallel to the longitudinal axis of the wire.
- the step of forming the flat portion includes the step of intermittently forming a plurality of flat portions on the wire along the longitudinal direction of the wire, and from the longitudinal central portion of at least one flat portion of the plurality of flat portions.
- the method may further comprise cutting the wire at a right angle to its longitudinal axis.
- the flat part is formed at least at one end part in the longitudinal direction of the wire or in the middle part in the longitudinal direction.
- the step of forming the flat portion may include plastic processing or removal processing for the wire. More specifically, the flat portion can be formed by pressing such as indentation, grinding, cutting, wet etching, pulling, or ironing.
- It can further comprise a step of subjecting the flat surface portion to age hardening.
- a vibration element according to the first or second aspect of the present invention, a light source that irradiates light toward a light reflection surface provided on a rocking body of the vibration element,
- An optical scanning device characterized by comprising driving means for swinging the swinging body about the longitudinal axis of the torsion bar.
- the oscillating body oscillates about the longitudinal axis of the torsion bar by the operation of the driving means, and the torsion bar resonates and undergoes repeated elastic torsional deformation.
- the light from the light source is reflected and scanned by the light reflecting surface of the oscillator.
- two plate members each having a magnet whose driving means is integrally attached to the oscillating body and a coil that is opposed to the magnet and through which an alternating current is passed.
- Grooves for accommodating or holding magnets may be formed symmetrically on the joint surface with the longitudinal axis of the torsion bar as the axis of symmetry.
- the magnetic pole of the magnet can be extended in a direction perpendicular to the longitudinal axis of the torsion bar and parallel to the light reflecting surface of the rocking body.
- an optical scanning device according to the fourth aspect of the present invention, and a light reflecting surface in which light from a light source of the optical scanning device is provided on an oscillating body of a vibration element of the optical scanning device. And an image forming medium irradiated through the image forming apparatus.
- the light from the light source is applied to the image forming medium through the light reflecting surface of the oscillator of the vibrating element.
- a torsion bar that emits light from a light source that is reflected by a light reflecting surface provided on an oscillating body of a vibration element of the optical scanning device according to the fourth aspect of the present invention.
- An image projection apparatus comprising: a light deflecting device that deflects along a direction parallel to the longitudinal axis of the light; and a screen irradiated with light deflected by the light deflecting device.
- the light from the light source is reflected by the light reflecting surface of the oscillating body of the vibrating element, and the reflected light that is in the scanning state by the oscillation of the oscillating body is reflected by the light deflector in a direction crossing the scanning direction. It is deflected and irradiated to the screen.
- the oscillating body has two plate members having the same shape, and these two plate members are joined to each other with the torsion bar interposed therebetween, so that abnormal oscillation occurs in the oscillating body. Can be effectively prevented.
- the rocking body when the rocking body includes two plate members in which a receiving groove for receiving the torsion bar is formed on the joint surface, and these have a symmetrical shape with the longitudinal axis of the torsion bar as an axis of symmetry,
- the oscillator can be fixed accurately. Further, it is possible to improve the flatness of the light reflecting surface which is lowered by processing of the housing groove formed on the joining surface of the two plate members. Furthermore, the rocking body can be efficiently rocked without causing abnormal vibration.
- the light reflecting surface of the oscillating body is formed on the surface opposite to the joint surface of at least one of the two plate members, the one having better flatness can be used as the light reflecting surface.
- the oscillator can be resonated efficiently.
- the groove for accommodating or holding the magnet of the driving means is formed symmetrically with the longitudinal axis of the torsion bar as the symmetry axis on the joint surface of the two plate members, the position of the center of gravity of the oscillator including the magnet is determined. It can be located on the longitudinal axis of the torsion bar. Moreover, the positioning of the magnet can be performed accurately, and deterioration caused by exposing the magnet to the atmosphere can be suppressed.
- the magnetic pole of the magnet extends in a direction perpendicular to the longitudinal axis of the torsion bar and parallel to the light reflecting surface of the rocking body, the amount of vibration from the unloaded state to one side of the rocking body and the other The amount of deflection to the side can be made uniform.
- the optical scanning apparatus of the present invention and the image forming medium on which the light from the light source of the optical scanning apparatus is irradiated through the light reflecting surface of the oscillator of the vibration element of the optical scanning apparatus, Therefore, a small and high-performance image forming apparatus can be realized.
- the optical scanning device of the present invention and the light deflection device for deflecting the light from the light source along the direction parallel to the longitudinal axis of the torsion bar and irradiating the screen are provided. Therefore, a small and high-performance image projector can be realized.
- FIG. 1 is a principle diagram of an embodiment in which an image forming apparatus according to the present invention is applied to LBP. It is a top view of one Embodiment of the vibration element in the optical scanning device by this invention integrated in LBP of FIG.
- FIG. 3 is a cross-sectional view taken along arrows III-III in FIG.
- FIG. 4 is an enlarged sectional view taken along the line IV-IV in FIG. 2.
- FIG. 3 is a three-dimensional projection view showing a part of an oscillating body in the vibration element shown in FIG. It is a partially broken front view showing the structure of the principal part in one Embodiment of the vibration element by this invention.
- FIG. 7 is a cross-sectional view taken along the arrow VII-VII in FIG. 6.
- FIG. 7 is a three-dimensional projection diagram illustrating the embodiment illustrated in FIG. 6 in an exploded state. It is a partially broken front view showing the structure of the principal part in other embodiment of the vibration element by this invention.
- FIG. 10 is a stereoscopic projection diagram illustrating the embodiment illustrated in FIG. 9 in an exploded state. It is a conceptual diagram which shows typically the relationship between the ideal rocking
- FIG. 10 is a stereoscopic projection diagram illustrating the embodiment illustrated in FIG. 9 in an exploded state. It is a conceptual diagram which shows typically the relationship between the ideal rocking
- FIG. 14 is a cross-sectional view taken along line XIV-XIV in FIG. 13.
- FIG. 14 is a cross-sectional view taken along the arrow XV-XV in FIG. 13. It is a partially broken front view showing the structure of the principal part in other embodiment of the vibration element by this invention.
- FIG. 17 is a cross-sectional view taken along the arrow XVII-XVII in FIG. It is a graph showing the relationship between the maximum amplitude of the rocking
- FIG. 20 is a right side view of the embodiment shown in FIG. 19.
- FIG. 27 is a top view of the principal part in another embodiment of a vibration element. It is a right view of embodiment shown in FIG.
- FIG. 27 is a three-dimensional projection diagram schematically showing a manufacturing procedure of the vibration element shown in FIGS. 19 and 20 together with FIGS.
- FIG. 27 is a three-dimensional projection diagram schematically illustrating a manufacturing procedure of the vibration element illustrated in FIGS. 19 and 20 together with FIGS. 23, 25, and 26.
- FIG. 27 is a three-dimensional projection diagram schematically illustrating a manufacturing procedure of the resonator element illustrated in FIGS. 19 and 20 together with FIGS. 23, 24, and 26.
- FIG. 26 is a three-dimensional projection view schematically showing a manufacturing procedure of the vibration element shown in FIGS. 19 and 20 together with FIGS.
- FIG. 31 is a stereoscopic projection diagram showing the embodiment shown in FIG. 30 in an exploded state. It is a three-dimensional projection figure showing the external appearance of the torsion bar in the middle of manufacture used by embodiment shown in FIG. It is a side view of the principal part in still another embodiment of the vibration element using the torsion bar shown in FIG.
- the exposure part of the LBP in this embodiment is schematically shown in FIG. 1, the main part of the vibration element in the optical scanning device is extracted and shown in FIG. 2, and the cross-sectional shape along the line III-III is shown in FIG.
- FIG. 4 shows an enlarged cross-sectional shape taken along line IV-IV in FIG.
- the principal part of this vibration element is shown in FIG. 5 in an exploded state.
- the LBP 10 of this embodiment includes a photosensitive drum 11 as an image forming medium in the present invention, and an exposure unit 12 for forming an electrostatic latent image corresponding to image information on the photosensitive drum 11.
- the LBP 10 of the present embodiment includes a well-known paper feeding unit, charging unit, toner supply unit, transfer unit, fixing unit, and paper transport unit (none of which are shown). It has.
- the exposure unit 12 includes an optical scanning device 14 including a laser light source 13 for oscillating a pulsed laser beam L corresponding to image information, a known collimating optical system 15 and an f ⁇ lens 16.
- the optical scanning device 14 includes the previous laser light source 13, an optical scanning element 17 for scanning the laser light L from the laser light source 13, an element driving unit 18 for driving the optical scanning element 17, And a control device 19 for controlling the operation of the element driving unit 18.
- the optical scanning element 17 as a vibration element in the present invention holds a base 20, a rocking body 22 on which a light reflecting surface 21 on which laser light L from a laser light source 13 is incident, and the rocking body 22.
- a torsion bar 23 and a cover member 25 are provided.
- the base 20 in the present embodiment is mounted with a substrate 27 provided with a spirally formed sheet coil 26 that constitutes a part of the element driving unit 18 as the driving means in the present invention.
- a frame body 28 constituting the outer peripheral edge portion of the base 20 is overlapped with the peripheral edge portion of the substrate 27, and these are integrally joined.
- An optically transparent cover member 25 is superimposed on the frame body 28, and the internal space S formed by integrally joining them is kept airtight in a reduced pressure state.
- a round torsion bar 23 provided in a beam shape from the base 20, the oscillator 22, and a tip that is a part of the element driving unit 18.
- the substrate 27 on which the sheet coil 26 is formed is accommodated.
- the torsion bar 23 that holds the oscillator 22 is an axis that is orthogonal to the rotational axis of the photosensitive drum 11 (hereinafter referred to as the longitudinal axis of the torsion bar, but in the illustrated example, it is perpendicular to the plane of FIG. Extending along A).
- the base end of the torsion bar 23 is fixed between the frame body 28 and the cover member 25 of the base 20 in a cantilever state, and the distal end is a central portion of the sheet coil 26 formed on the substrate 27 from the frame body 28. It protrudes to the nearest.
- the oscillating body 22 fixed to the end of the torsion bar 23 can oscillate with elastic deformation (twisting) of the torsion bar 23 about the longitudinal axis of the torsion bar 23.
- the oscillating body 22 in the present embodiment includes two rectangular plate members 29 and 30 having the same shape (specifically, the same size and shape) joined to each other with the torsion bar 23 interposed therebetween.
- These two plate members 29 and 30 have a symmetrical shape with the longitudinal axis A of the torsion bar 23 as the axis of symmetry.
- the joint surfaces 29a, 30a of the two plate members 29, 30 are set in parallel to the longitudinal axis A of the torsion bar 23, and are torsionally parallel to the surface of the sheet coil 26 formed on the substrate 27. It is joined to the bar 23.
- the surface of one plate member 29 facing the cover member 25 side is a light reflecting surface 21, and this light reflecting surface 21 is formed by depositing aluminum, gold or the like on the surface of one plate member 29. Can be formed.
- a plate-like member that has been mirror-finished in advance may be attached to the surface of one plate member 29 and used as the light reflecting surface 21.
- the surface of the other plate member 30 is also subjected to the same processing as the surface of the one plate member 29, so that the weight balance between the two plate members 29 and 30 can be matched. More stable vibration can be brought about with respect to the vibration system.
- one of the two plate members 29 and 30 having better flatness can be selected as the light reflecting surface 21.
- the surfaces of the two plate members 29 and 30 can be used as independent light reflecting surfaces.
- the light reflecting surface 21 is relative to a virtual plane including a longitudinal axis A of the torsion bar extending in a straight line along the longitudinal direction of the torsion bar 23 and the center of gravity G of the rocking body 22 fixed to the torsion bar 23. In an orthogonal state. Therefore, this virtual plane is a plane parallel to the paper surface of FIG.
- a thin film such as aluminum or gold is formed by vacuum deposition or the like in order to improve the surface reflectance. Can do.
- a metal thin film such as titanium, copper, or silver can be used.
- the metal thin film since the surface of the metal thin film is relatively easily damaged, and depending on the metal used, the metal thin film has a tendency to be relatively easily oxidized. Therefore, when the light reflecting surface 21 is formed only with the metal thin film, the reflectance gradually decreases. End up. Therefore, it may be effective to further form a metal protective film for protecting the metal thin film.
- the metal protective film can also have a function as a reflection increasing film and the reflectance of the light reflecting surface 21 as a whole can be increased, the light reflection efficiency can be increased while protecting the metal thin film.
- a highly reflective metal protective film for example, a laminate in which a low refractive index dielectric and a high refractive index dielectric are combined can be employed.
- SiO 2 and MgF 2 are known as the low refractive index dielectric
- examples of the high refractive index dielectric include TiO 2 , Nb 2 O 5 , ZrO 2 , and Ta 2 O 5 . It is also effective to laminate a dielectric having an intermediate refractive index such as Al 2 O 3 on these. Note that it is not necessary to limit the highly reflective metal protective film only to these materials, and it is possible to select an optimal material as appropriate.
- a magnet 31 having a round bar shape constituting a part of the element driving unit 18 is embedded.
- a hole 32 into which a round bar-like magnet 31 is inserted is formed along the direction orthogonal to the longitudinal direction of the torsion bar 23 at the end portion of the torsion bar 23, and the magnet 31 is inserted therein. It is in the state.
- the direction of the magnet 31 is defined so that the pair of magnetic poles of the magnet 31 are arranged in a direction orthogonal to the longitudinal axis A of the torsion bar 23.
- Torsion bar housing grooves 29b and 30b for inserting the torsion bar 23 in advance and magnet housing for housing the magnet 31 on the joint surfaces 29a and 30a of the two plate members 29 and 30 constituting the rocking body 22 are provided.
- Grooves 29c and 30c are formed.
- Each of these two grooves 29b, 30b, 29c, and 30c has a semicircular cross section, is orthogonal to each other at the center of the joint surfaces 29a and 30a, and the longitudinal axis A of the torsion bar 23 is the symmetry axis. It goes without saying that they are arranged at symmetrical positions.
- accommodation grooves 29b, 30b, 29c, and 30c By forming such accommodation grooves 29b, 30b, 29c, and 30c, the relative positions of the torsion bar 23, the rocking body 22, and the magnet 31 can be accurately determined. Abnormal vibration of the system can be prevented beforehand.
- the element driving unit 18 in the present embodiment includes a magnet 31 fixed to the oscillator 22 and / or the torsion bar 23, a sheet coil 26 provided on the base 20 side so as to face the magnet 31 with a gap therebetween, A power supply (not shown) is provided.
- An alternating current corresponding to the resonance frequency of the vibration system including the torsion bar 23, the rocking body 22, and the magnet 31 is applied to the sheet coil 26 from the power source of the element driving unit 18.
- the light reflecting surface 21 of the rocking body 22 can be swung around the longitudinal axis A of the torsion bar at the resonance frequency of the vibration system, that is, swung in a resonance state.
- the amplitude of this vibration system that is, the magnitude of the deflection angle ⁇ of the light reflecting surface 21 of the oscillator 22 can be adjusted by the amount of current applied to the sheet coil 26.
- the waveform of the alternating current may be a triangular wave or a pulse output in addition to the sine wave. It is also possible to use a coil containing a soft magnetic material serving as a yoke instead of the sheet coil 26 as described above. It is also possible to provide a pair of magnetic field applying means arranged so as to sandwich the oscillating body 22 within a range that does not interfere with the light reflecting surface 21 of the oscillating body 22.
- the control device 19 controls the output of the element drive unit 18 by receiving a pair of BD sensors 34 arranged close to both ends in the longitudinal direction of the photosensitive drum 11 and detection signals from the pair of BD sensors 34. Part 35.
- the control unit 35 uses the detection signals from the pair of BD sensors 34 so that the deflection angle ⁇ of the light reflecting surface 21 due to the swinging of the swinging member 22 of the optical scanning element 17 falls within a predetermined range on the surface of the photosensitive drum 11. Based on this, the output of the element driving unit 18 is feedback-controlled.
- the pulsed laser light L emitted from the laser light source 13 according to the image signal is incident on the light reflecting surface 21 of the oscillator 22 of the optical scanning element 17 through the collimating optical system 15, and this light reflecting surface 21. And is irradiated onto the surface of the photosensitive drum 11 through the f ⁇ lens 16.
- the light reflecting surface 21 of the oscillating body 22 of the optical scanning element 17 oscillates around the longitudinal axis A of the torsion bar due to the resonance of the torsion bar 23, so that the laser beam L can be converted to the longitudinal axis A of the torsion bar. Is scanned in a direction that intersects.
- the laser light L scans the surface of the photosensitive drum 11 in a direction parallel to the rotational axis of the photosensitive drum 11, and further rotates the photosensitive drum 11, so that image information, that is, an electrostatic latent image is rotated by the photosensitive drum 11. It will be formed on the surface along the direction.
- the material constituting the torsion bar 23 is generally divided into a circular shape and a rectangular shape in cross-section, and both can be processed into a predetermined cross-sectional shape by dicing.
- the processing rate is indicated by the rate of change in the cross-sectional area of the material before and after processing.
- a work hardening and age hardening type cobalt (Co) -nickel (Ni) based alloy subjected to work hardening treatment and age hardening treatment is suitable.
- the Co—Ni based alloy referred to here is an alloy containing Co and Ni.
- chromium (Cr) which lowers stacking fault energy
- molybdenum (Mo) molybdenum
- Fe iron
- a Co—Ni—Cr—Mo alloy, a Co—Ni—Fe—Cr alloy, and the like can be exemplified.
- These alloys can further include niobium (Nb), manganese (Mn), tungsten (W), titanium (Ti), boron (B), magnesium (Mg), carbon (C), and the like.
- Nb functions like Mo and iron as solute elements
- Mn has the function of stabilizing the face-centered cubic lattice phase and lowering stacking fault energy
- W strengthens the matrix and lowers stacking fault energy. Contribute to.
- the weight ratio of the main composition is Co: 20.0 to 50.0%, Ni: 20.0 to 45.0%, Cr / Mo: 20. It is preferably 0 to 40.0% (Cr: 18 to 26%, Mo: 3 to 11%). In particular, Co: 31.0 to 37.3%, Ni: 31.4 to 33.4%, Cr: 19.5 to 20.5%, Mo: 9.5 to 10.5% preferable.
- work hardening by cold rolling is performed from a starting material containing a substitutional solute element in a matrix containing at least Co and Ni obtained through processes such as hot forging and homogenization heat treatment after melting.
- a Co—Ni—Cr—Mo alloy material is obtained.
- This alloy material usually has a ⁇ 100> texture in the rolling direction and a ⁇ 110> texture in a direction perpendicular to the rolling direction. For this reason, when using as the torsion bar 23 of this embodiment, it cuts out so that the direction orthogonal to a rolling direction may become the longitudinal direction of the torsion bar 23 by press processing, laser processing, wire cutting processing, etc.
- the desired straightness is achieved.
- the torsion bar 23 can be obtained.
- the age hardening treatment is optimally performed at a temperature of 400 ° C. to 700 ° C. for several tens of minutes to several hours (for example, 550 ° C. for 2 hours), but in order to shorten the processing time, for example, in a strong magnetic field. It is also effective to use heat treatment.
- SPRON 510 (trade name: SPRON is a registered trademark) of Seiko Instruments Inc. This SPRON 510 has a composition of Co: 35%, Ni: 32%, Cr: 20%, Mo: 10%.
- the torsion bar 23 having a sharp resonance frequency and a characteristic in which the vibration is line symmetric with respect to the resonance frequency, that is, a high Q value (for example, 1000 or more) and a very small non-linearity of the spring characteristic is obtained. be able to.
- a high Q value for example, 1000 or more
- the optical scanning element 17 with low power consumption can be realized. Therefore, the LBP 10 according to the present embodiment can be reduced in size while ensuring desired fatigue characteristics and vibration characteristics, and can be stably scanned with the laser beam L while reducing instabilities such as jitter. High-precision control is possible.
- the torsion bar 23 is formed of a non-magnetic Co—Ni-based alloy, but this uses a magnet 31 and an alternating magnetic field as means for swinging the rocking body 22 together with the torsion bar 23. This is because stable driving can be realized. Therefore, when a means other than an alternating magnetic field, such as a piezoelectric element, is used as the element driving unit 18, a general spring material other than a nonmagnetic metal can be used as the material of the torsion bar 23. More specifically, stainless steel such as SUS301, 302, 304, 316, 631, 632, spring steel (SUP), piano wire (SWP), oil tempered wire (SWO) of spring carbon steel can be employed. .
- silicon chrome steel oil tempered wire SWOSC
- spring beryllium copper alloys C1700, C1720
- spring titanium copper alloys C1990
- spring phosphor bronze C5210
- spring white C7701
- the magnet 31 attached to the torsion bar 23 together with the oscillator 22 is preferably as small and light as possible and has a high coercive force, and an Nd—Fe—B or Sm—Co rare earth magnet is suitable.
- an Nd—Fe—B or Sm—Co rare earth magnet is suitable.
- a sintered magnet such as can be employed.
- it may be a thin film magnet formed by a bond magnet or a sputtering method, and is not particularly limited by a material, a manufacturing method or a shape.
- Non-magnetic materials such as alumina, zirconia, beryllium, silicon nitride, aluminum nitride, sapphire, silicon carbide, silicon dioxide, glass, and resin are used as materials for the two plate members 29 and 30 constituting the oscillator 22. Can be used. Further, these surfaces can be used as the light reflecting surface 21 by making them into mirror surfaces.
- a SPRON 510 wire rod having a diameter of 240 ⁇ m is used as the torsion bar 23, and a Si wafer having a thickness of 300 ⁇ m is cut into a 1 mm ⁇ 3 mm rectangle with a dicer as the plate members 29 and 30.
- the vibration characteristics were evaluated as follows.
- the flatness of the surfaces of the plate members 29 and 30 is 20 to 30 nm.
- the flatness of the plate members 29 and 30 is determined by the PV value (maximum measured value ⁇ minimum) obtained using a surface roughness meter of ZYGO. (Measurement value).
- the torsion bar housing grooves 29b and 30b and the magnet housing grooves 29c and 30c are formed on the joint surfaces 29a and 30a of the plate members 29 and 30 obtained in this way, respectively.
- the width and depth of the torsion bar receiving grooves 29b and 30b are 120 ⁇ m because the diameter of the torsion bar 23 is 240 ⁇ m, but the grooves 29b and 30b do not have to be semicircular, but have a rectangular cross section. It may be a groove.
- the PV value becomes 70 to 80 nm.
- the joining surfaces 29a and 30a of the two plate members 29 and 30 are overlapped and joined with an adhesive or the like, thereby deforming due to the groove processing. Will be corrected.
- the flatness of the light reflecting surface 21 is improved to 50 to 60 nm.
- the two plate members 29 and 30 have a symmetrical shape with the longitudinal axis A of the torsion bar 23 as the axis of symmetry, and their center of gravity G is located on the longitudinal axis A of the torsion bar 23. For this reason, the rocking body 22 can be stably resonated around the longitudinal axis A of the torsion bar 23.
- Si wafers having thicknesses of 200 ⁇ m and 525 ⁇ m were cut into 1 mm ⁇ 3 mm rectangles with a dicer, and two plate members having different thicknesses were prepared.
- the flatness of these two plate members is 20 to 30 nm.
- a rectangular torsion bar accommodating groove having a width and a depth of 240 ⁇ m was formed only on the joint surface of the plate member having a thickness of 525 ⁇ m. As a result, it was confirmed that the surface opposite to the joint surface of the plate member having a thickness of 525 ⁇ m was deformed into a concave shape, and the flatness was reduced to 70 to 80 nm.
- the scanning trajectory of the laser light L formed on the surface of the photosensitive drum 11 should originally draw a single straight line parallel to the rotational axis of the photosensitive drum 11.
- high-order complex vibration modes are generated, and abnormal scanning such as waveform waviness, figure 8 or circle is detected.
- the length of the torsion bar 23 was first adjusted so that the resonance frequency of the oscillator 22 was 2 kHz.
- the supply value of the alternating current was adjusted so that the deflection angle ⁇ would be ⁇ 10 degrees, ⁇ 17 degrees, ⁇ 25 degrees, ⁇ 32 degrees, ⁇ 38 degrees, ⁇ 45 degrees, and ⁇ 50 degrees. Then, as a result of obtaining the scanning trajectory of the laser beam L formed on the surface of the photosensitive drum 11 in this case, it can be confirmed that no abnormal vibration occurs at all the deflection angles ⁇ and a stable scanning trajectory is drawn. did it.
- the configuration of the main part of the optical scanning element 17 shown in FIGS. 2 to 5 as the vibration element in the present invention can be changed as shown in FIGS. 6 to 10 as necessary. That is, the front shape of the main part of another embodiment of the optical scanning element 17 of the present invention is partly broken and shown in FIG. 6, and the cross-sectional shape along the arrow VII-VII is shown in FIG. The appearance is shown in a disassembled state in FIG. Further, the front shape of the main part of another embodiment of the optical scanning element 17 as the vibration element in the present invention is partly broken and shown in FIG. 9, and the appearance is shown in an exploded state in FIG.
- a truncated cone-shaped stopper portion 36 is formed at the tip of the torsion bar 23 which serves both as prevention of slipping and positioning.
- the magnet 31 having a rectangular bar shape is formed integrally with the rocking body 22 so as to face the stopper portion 36, and one end face thereof facing the stopper portion 36 is exposed to the outside from the rocking body 22.
- the magnet 31 in the present embodiment has a split structure so as to sandwich the torsion bar 23, a single magnet 31 in which a hole 31a through which the torsion bar 23 penetrates may be formed in advance.
- the stopper portion 36 in the above embodiment is embedded in the rocking body 22, and the relative position of the rocking body 22 with respect to the torsion bar 23 can be more reliably defined. it can.
- the notch 37 that communicates with the magnet receiving grooves 29c, 30c formed in the two plate members 29, 30 is provided as a stopper so that the magnet 31 can cross the stopper 36 of the torsion bar 23.
- a portion 36 is formed. Therefore, it becomes possible to join the tip of the magnet 31 and the torsion bar 23 and the rocking body 22 more firmly.
- FIG. 11 exaggerates the degree of warping of such a torsion bar 23.
- the base end of the torsion bar 23 is pressed against the surface of the glass surface plate 33, the torsion bar 23 is rolled on the glass surface plate 33 around this portion, and the height from the surface of the glass surface plate 33 to the center of gravity G of the oscillator 22 is increased.
- the surface of one plate member 29 serving as the light reflecting surface 21 faces upward, and the surface of the other plate member 30 faces the surface of the glass surface plate 33 so as to face the torsion bar 23.
- a moving body 22 is attached.
- the direction of the magnetic pole of the magnet 31 is parallel to the surface of the glass surface plate 33 and perpendicular to the longitudinal axis A of the torsion bar 23.
- the direction of is also defined.
- the center-of-gravity position correcting member 24 is mounted on the oscillator 22 and / or the torsion bar 23. More specifically, as the center of gravity of the center of gravity position correcting member 24 is positioned in the ideal pivot axis A R side than the center of gravity G of the be in the above imaginary plane rocking body 22, 27 side substrate in the present embodiment The center-of-gravity position correcting member 24 is joined to the surface of the other plate member 30 facing the direction.
- the center-of-gravity position correcting member 24 is attached to the surface of the torsion bar 23 warped to the convex side, that is, the surface of the other plate member 30 in this embodiment.
- the center-of-gravity position correcting member 24, rocking body 22, magnet 31, the common center of gravity of the vibration system including the center of gravity position correcting member 24 has a mass such that the final match the ideal pivot axis A R Is desirable.
- the element driving unit 18 in the present embodiment includes a magnet 31 fixed to the oscillator 22 and / or the torsion bar 23, a sheet coil 26 provided on the base 20 side so as to face the magnet 31 with a gap therebetween, And a power supply (not shown).
- An alternating current corresponding to the resonance frequency of the vibration system composed of the torsion bar 23, the rocking body 22, the magnet 31, and the gravity center position correcting member 24 is applied to the sheet coil 26 from the power source of the element driving unit 18.
- the amplitude of this vibration system that is, the magnitude of the deflection angle ⁇ of the light reflecting surface 21 of the oscillator 22 can be adjusted by the amount of current applied to the sheet coil 26.
- the waveform of the alternating current may be a triangular wave or a pulse output in addition to the sine wave. It is also possible to use a coil containing a soft magnetic material serving as a yoke instead of the sheet coil 26 as described above. It is also possible to provide a pair of magnetic field applying means arranged so as to sandwich the oscillating body 22 within a range that does not interfere with the light reflecting surface 21 of the oscillating body 22.
- FIG. 22 This is a rocking body when a constant alternating current is passed through the sheet coil 26 with respect to the torsion bar 23 having a length of 32 mm and a rectangular cross section of 0.35 ⁇ 0.15 mm and having a warp of 50 ⁇ m in FIG. 22 shows a change in the deflection angle ⁇ of the 22 light reflecting surfaces 21.
- the two plate members 29 and 30 used here each have a thickness of 0.1 mm, have a rectangular surface of 2.8 ⁇ 1.4 mm, and incorporate a magnet 31 having a length of 3 mm.
- the gravity center position correcting member 24 having a different weight is joined to the surface of the other plate member 30.
- the deflection angle ⁇ is maximized when the gravity center position correcting member 24 having a weight of about 3 mg is joined. Therefore, even if the position of the center of gravity G of the oscillating body 22 is unknown, as long as the direction of warping of the torsion bar 23 can be recognized, the optimum center of gravity position correcting member 24 that maximizes the deflection angle ⁇ of the oscillating body 22 is selected. Is possible.
- the center-of-gravity position correcting member 24 having a different mass may be attached to the warped convex surface of the torsion bar 23 to measure the deflection angle ⁇ of the oscillator 22.
- the cross-sectional shape orthogonal to the longitudinal axis A of the torsion bar 23 is not limited to a circle, and any cross-sectional shape such as a rectangular cross-section as described with reference to FIG. 12 can be adopted.
- the control device 19 controls the output of the element drive unit 18 by receiving a pair of BD sensors 34 arranged close to both ends in the longitudinal direction of the photosensitive drum 11 and detection signals from the pair of BD sensors 34. Part 35.
- the control unit 35 uses the detection signals from the pair of BD sensors 34 so that the deflection angle ⁇ of the light reflecting surface 21 due to the swinging of the swinging member 22 of the optical scanning element 17 falls within a predetermined range on the surface of the photosensitive drum 11. Based on this, the output of the element driving unit 18 is feedback-controlled.
- the pulsed laser light L emitted from the laser light source 13 according to the image signal is incident on the light reflecting surface 21 of the oscillator 22 of the optical scanning element 17 through the collimating optical system 15, and this light reflecting surface 21. And is irradiated onto the surface of the photosensitive drum 11 through the f ⁇ lens 16.
- Parallel by the light reflecting surface 21 of the oscillator 22 of the optical scanning element 17 is swung to the ideal pivot axis A R direction by the resonance of the torsion bar 23, the laser beam L and the rotation axis of the photosensitive drum 11 Scan in different directions. Further, image information, that is, an electrostatic latent image is formed on the surface of the photosensitive drum 11 along the rotation direction of the photosensitive drum 11 by the rotation of the photosensitive drum 11.
- the configuration of the main part of the optical scanning element 17 shown in FIGS. 2 to 5 can be changed as shown in FIGS. 13 to 17 as necessary. That is, the front shape of the main part of another embodiment of the optical scanning element 17 as the vibration element in the present invention is partly broken and shown in FIG. 13, and the cross-sectional shape along the arrow XIV-XIV is shown in FIG. 14 and FIG. 15 shows an enlarged cross-sectional shape along the line XV-XV in FIG. Further, the front shape of the main part of another embodiment of the optical scanning element 17 as the vibration element in the present invention is partly broken and shown in FIG. 16, and the cross-sectional shape along the arrow XVII-XVII is shown in FIG. Shown in
- a truncated cone-shaped stopper portion 36 is formed at the tip of the torsion bar 23, which serves both to prevent slipping and positioning.
- the magnet 31 is formed integrally with the oscillating body 22 so as to face the stopper portion 36, and one end face thereof facing the stopper portion 36 is exposed to the outside from the oscillating body 22.
- the magnet 31 in this embodiment has a split structure so as to sandwich the torsion bar 23, it can be a single magnet 31 in which a hole 32 through which the torsion bar 23 passes is formed in advance.
- the center-of-gravity position correcting member 24 has a wedge shape in which the thickness gradually decreases toward the proximal end along the longitudinal axis A of the torsion bar 23.
- the stopper portion 36 in the above embodiment is embedded in the rocking body 22, and the relative position of the rocking body 22 with respect to the torsion bar 23 can be reliably defined.
- the magnet 31 is also used as the gravity center position correcting member 24. That is, a notch portion 37 is formed on the surface along the convex side of the torsion bar 23, the magnet 31 is inserted therein, and in this state, the two plate members 29 and 30 are overlapped to form the stopper portion 36 and the magnet 31. Is sandwiched between the plate members 29 and 30.
- This structure is particularly suitable when the oscillating body 22 is injection-molded with resin, and the magnet 31 and the tip of the torsion bar 23 can be integrally joined.
- the plane portion of the rocking body is orthogonal to the virtual plane including the ideal rocking axis and the center of gravity of the rocking body, and the center of gravity of the center of gravity position correcting member is ideally rocked from the center of gravity of the rocking body. Since it is located on the axis side, the oscillator can be resonated efficiently.
- the rocking body includes two plate members having the same size and shape that are joined to each other with the torsion bar interposed therebetween, and the center of gravity position correcting member is arranged as one plate member closer to the ideal rocking axis, or one of them The same applies to the case where it is disposed between the plate member and the torsion bar. Even when the thickness dimension along the imaginary plane of the gravity center position correcting member has a wedge shape in which the thickness dimension gradually decreases toward one end of the torsion bar along the axis of the torsion bar, the oscillator can resonate more efficiently.
- the light reflecting surface of the oscillating body is orthogonal to the virtual plane including the ideal oscillating axis and the centroid of the oscillating body, and the centroid of the centroid position correcting member is more ideal than the centroid of the oscillating body. Since it is located on the rocking axis side, the rocking body can resonate efficiently.
- the image forming apparatus of the present invention since the optical scanning apparatus according to the present invention and the image forming medium on which the light from the light source is irradiated through the light reflecting surface of the oscillating body of the vibration element, the image forming apparatus is small and high in size. A high-performance image forming apparatus can be realized.
- the optical scanning device According to the image projection device of the present invention, the optical scanning device according to the present invention, the light deflecting device for deflecting the light from the light source along the direction parallel to the ideal swing axis, and the screen irradiated with the light deflected thereby Therefore, a small and high-performance image projector can be realized.
- the base end of the torsion bar 23 is pressed against the surface of the glass surface plate 33, and the torsion bar 23 is rolled on the glass surface plate 33 around this portion.
- the amount of warpage at the position where the height h from the glass surface plate 33 of the end of the torsion bar 23, more precisely, the center of gravity of the rocking body 22 is maximized is measured as straightness.
- a torsion bar 23 having a warp amount of 0 ⁇ m, 50 ⁇ m, and 100 ⁇ m was prepared as a sample, and a rocking body 22 attached to the end was rocked at a resonance frequency of 2 kHz.
- the method of measuring the swing angle of the swinging body 22 is to change the value of the current flowing through the sheet coil 26 so that the light reflecting surface 21 of the swinging body 22, that is, the swing angle ⁇ of the reflected laser light L is stepped. Changed to be larger.
- the laser beam L reflected from the light reflecting surface 21 should draw a scanning line as one straight line that scans on the photosensitive drum 11, but when the deflection angle increases, an abnormality such as a curve, a figure of 8 or a circle is formed.
- a state of drawing a simple scanning line When such a state occurs while the deflection angle ⁇ is gradually increased, it is determined that abnormal vibration has occurred.
- the swing angle is changed by further dividing the swing angle at the stage where the abnormal vibration has occurred and the swing angle at the previous stage, and the largest swing angle at which the abnormal vibration does not occur is set as the maximum swing angle. Stipulated.
- the maximum deflection angle in the case of the torsion bar 23 having a warp amount of 0 ⁇ m is ⁇ 45 to ⁇ 50 degrees, in the case of 50 ⁇ m is ⁇ 25 to ⁇ 39 degrees, and in the case of 100 ⁇ m is ⁇ 17. It became ⁇ ⁇ 25 degrees. From this, it is understood that the maximum deflection angle when the warp is 50 ⁇ m and when the warp is 100 ⁇ m is reduced by about 30% and 60%, respectively, compared with the case of 0 ⁇ m where there is no warp of the torsion bar 23. That is, it is confirmed that the warp of the torsion bar 23, in other words, the straightness has a great influence on the swing angle of the swing body 22 of the optical scanning element 17.
- the torsion bar 23 When forming the torsion bar 23 from a plate-like material, the torsion bar 23 is processed into a predetermined shape by press processing, laser processing, wire cutting, etching, superplastic processing, or the like. In this case, the variation in the amount of warpage of the torsion bar 23 obtained is large, and is in the range of 100 ⁇ m to 200 ⁇ m. In particular, in the case of processing from a roll-shaped material, the RD direction, which is the rolling direction, generally has a larger initial warp than the TD direction, which is a direction orthogonal to the rolling direction.
- the torsion bar 23 when used as the torsion bar 23, it is effective as a countermeasure against warping of the torsion bar 23 to set the TD direction as the longitudinal direction of the torsion bar 23. That is, by forming the torsion bar 23 by a tensile process, a processing mark by the tensile process is formed on the outer peripheral surface of the torsion bar 23.
- the identification as schematically shown in FIG. 19, processing marks the material surface, i.e. can be determined in the direction of the kerf C S. That is, longitudinal kerf C S extends is rolling direction.
- heat treatment is performed as an age hardening treatment in order to improve the vibration characteristics of the material.
- the torsion bar 23 is processed and formed with SUS304 or the like, in addition to this heat treatment, the material is subjected to the necessary prescribed tension in the furnace. By performing so-called tension annealing, it is possible to almost eliminate the warpage. Further, if the torsion bar 23 is slightly warped even after such age hardening treatment, two torsion bars having the same amount of warpage, in other words, straightness are prepared. As schematically shown in FIG.
- the two torsion bar pieces 23 a and 23 b are back-to-back so as to be warped against each other and bonded together with an adhesive or the like, and assembled as one torsion bar 23.
- the amount of warpage of the torsion bar 23 formed in this way is 10 ⁇ m or less, and the maximum deflection angle is ⁇ 45 degrees as shown in FIG. 18, so that the optical scanning element 17 capable of optical scanning at a wide angle can be stably formed. Can be supplied.
- the torsion bar 23 is processed from a linear material such as a round bar or a square bar, or processed from a raw material into a linear shape
- the torsion bar 23 is processed into a predetermined shape by dicing.
- the amount of warpage of the torsion bar 23 obtained is large as in the case of forming from a plate-like material.
- identification in this case it can be determined by the direction of the slit CSa formed on the material surface. That is, as schematically shown in FIG. 21 and FIG.
- a spiral groove CSa is formed in the longitudinal direction of the torsion bar 23.
- the machining rate determined by the ratio of the cross-sectional area of the torsion bar 23 before and after the machining is the most important factor, and the optimum value is 70 to 80%.
- the amount of warpage of the torsion bar 23 formed in this way is also 10 ⁇ m or less, and the optical scanning element 17 capable of optical scanning at a wide angle can be stably supplied.
- the straightness of the torsion bar 23 is improved in this embodiment, but the straightness is further improved by adding the gravity center position correction member 24 to the oscillator 22 as in the previous embodiment.
- the center of gravity position of the oscillator 22 shown in FIG. 6 is brought closer to the surface of the glass surface plate 33 by joining the center of gravity position correcting member 24 to the surface of the second plate member 30 of the oscillator 22.
- the present invention is configured as described above to ensure a desired straightness of the torsion bar and to make the vibration element advantageous for widening the design range of the deflection angle, an optical scanning device, and an image using the same.
- a forming apparatus and an image projection apparatus can be realized.
- FIG. 23 to 26 schematically show a method for assembling the vibration element according to the present invention schematically shown in FIG.
- FIG. 23 shows a torsion bar, a rocking body (first and second plate members), and a magnet in a disassembled state as components constituting the vibration element.
- the original coordinate axes (x, y, z) are shown.
- the main parts of the vibration element are assembled in the order of FIGS. 27 to 29 schematically show examples of arrangement positions of magnets arranged inside the oscillating body constituting the vibration element.
- the material of the torsion bar 23 constituting the vibration element 17 is formed from a linear material made of a work-hardening and age-hardening type Co—Ni based alloy as described later. ing. More specifically, the SPRON 510 wire having a diameter of 300 ⁇ m is used as the material of the torsion bar 23.
- the torsion bar 23 is not limited to a linear material, and can be formed of a plate material.
- the magnet 31 has a cylindrical shape with a diameter of 200 ⁇ m and a length of 2 mm, but is not limited to a cylindrical shape, and may be a prism.
- the oscillating body 22 constituting the vibration element 17 is composed of first and second plate members 29 and 30 having the same size and shape as in the above-described embodiment.
- the first and second plate members 29 and 30 are Si wafers each having a thickness of 300 ⁇ m.
- the first and second plate members 29 and 30 have a rectangular shape of 1 mm in the x direction and 3 mm in the y direction.
- the joint surfaces 29a, 30a of the first and second plate members 29, 30 constituting the oscillating body 22 are respectively provided with torsion bar housing grooves 29b, 30b and magnet housing grooves 29c, 30c (one magnet housing groove 30c). Only shown).
- the torsion bar housing grooves 29b, 30b are formed so as to extend in the longitudinal direction along the x axis at the substantially central portion of the joint surface 29a of the first plate member 29.
- the magnet housing groove 30c is formed so as to extend in the lateral direction along the y-axis at the front portion (x-axis direction in FIG. 23) of the joint surface 30a of the second plate member 30.
- the length of the magnet housing groove 30 c along the coordinate axis y direction is the same as the length of the magnet 31.
- the widths of the torsion bar housing grooves 29 b and 30 b are the same as the diameter of the torsion bar 23, and their depth is 1 ⁇ 2 of the diameter of the torsion bar 23.
- the width of the magnet housing groove 30 c is the same as the diameter of the magnet 31, and the depth is 1 ⁇ 2 of the diameter of the magnet 31.
- the length of the magnet housing groove 30 c in this embodiment is the same as the length of the magnet 31.
- both ends of the magnet housing groove 30c are closed, but the present invention is not limited to this, and both ends may be open as shown in other embodiments.
- the cross-sectional shape of the torsion bar housing grooves 29b and 30b may be a rectangular shape as shown in FIG. 23 or a semicircular shape.
- the semicircular shape as shown in FIG. 23 may be sufficient as the cross-sectional shape of the magnet accommodation groove
- the torsion bar housing grooves 29b and 30b and the magnet housing groove 30c intersect with each other on the respective joint surfaces 29a and 30a in the present embodiment.
- a magnet accommodation groove 29c (not shown) having the same size and shape as the magnet accommodation groove 30c formed in the second plate member 30 is also formed on the joint surface 29a of the first plate member 29. Needless to say, it is formed.
- the magnet 31 is positioned at a predetermined position with respect to the oscillating body 22 by incorporating the magnet 31 into the magnet accommodation groove 30 c of the second plate member 30 constituting a part of the oscillating body 22.
- the tip of the torsion bar 23 abuts against the side surface of the magnet 31, and the torsion bar 23 is incorporated into the torsion bar accommodating groove 30 b of the second plate member 30. Thereby, the tip of the torsion bar 23 is positioned at a predetermined position with respect to the rocking body 22.
- the torsion bar 23 is arranged such that the longitudinal axis A of the torsion bar 23 is orthogonal to the longitudinal direction of the rocking body 22.
- the bonding surface 29a of the first plate member 29 is opposed to the bonding surface 30a of the second plate member 30, and the first plate member 29 is moved in such a manner that the torsion bar 23 and the magnet 31 are sandwiched therebetween.
- the second plate member 30 is joined.
- the exposed upper half of the torsion bar 23 is incorporated into the torsion bar accommodating groove 29b formed in the first plate member 29, and the exposed upper half of the magnet 31 is the second plate.
- the member 30 is incorporated in the magnet housing groove 30b.
- the torsion bar 23, the rocking body 22, and the magnet 31 are accurately positioned at a predetermined relative position, and the magnet 31 is embedded in the rocking body 22.
- the magnet 31 can be disposed at an arbitrary position along the x-axis direction with respect to the oscillator 22 as shown in FIGS.
- the magnet 31 is disposed at the front end in FIG. 27, the center in FIG. 28, and the rear end in FIG.
- FIG. 28 when the magnet 31 is arranged at the center of the oscillating body 22, for example, a configuration similar to that of the embodiment shown in FIGS.
- the magnet 31 is disposed at the rear end portion of the oscillating body 22, the same configuration as that of the embodiment shown in FIGS. 27 to 29, it will be understood that the torsion bar 23 is disposed in a state orthogonal to the magnet 31, that is, in a state orthogonal to the longitudinal direction of the oscillator 22.
- the torsion bar 23 can have a certain amount of warpage, the straightness of the torsion bar 23 is lowered.
- the smooth rocking motion of the rocking body 22 supported by the torsion bar 23 is lost, and as a result, the deflection angle ⁇ of the light reflecting surface 21 becomes small with respect to the input energy. Act on.
- the longitudinal axis A of the torsion bar 23 does not coincide with the ideal oscillating axis, and the oscillating body 22 is likely to generate abnormal vibration. .
- more electrical energy must be input to the sheet coil 26.
- the present invention can simplify the assembly of the vibration element and can improve the positioning system of components such as a torsion bar, an oscillating body, and a magnet constituting the vibration element. Further, since the magnet is disposed inside the rocking body, it is possible to suppress and further prevent the floating substance such as dust from directly adhering. Furthermore, by improving the positioning accuracy, the center-of-gravity shift of the entire vibration element is also reduced. Therefore, it is possible to provide an optical scanning apparatus capable of realizing stable optical scanning, and an image forming apparatus or an image projection apparatus using the same. it can.
- the torsion bar 23 having a cantilever structure has been described. However, both ends in the longitudinal direction of the torsion bar 23 are fixed between the frame body 28 and the cover member 25, and the rocking body 22 is provided at the center thereof. May be fixed.
- FIG. 30 shows a plan view of the main part of another embodiment of such a vibration element 17 according to the present invention
- FIG. 31 shows its appearance in an exploded state. Elements having the same functions as those of the previous embodiment are shown in FIG. The same reference numerals are used, and duplicate descriptions are omitted.
- the torsion bar 23 in the present embodiment is formed of a wire having a circular cross section, flat portions 38a serving as fixing portions for the frame body 28 and the cover member 25 at both longitudinal ends thereof, and an oscillating body at the longitudinal center portion thereof. And a flat portion 38b to be a joint portion to 22 is formed.
- These flat portions 38a and 38b have a rotationally symmetric structure with the longitudinal axis A of the torsion bar 23 as an axis of symmetry, each having a pair of flat surfaces parallel to each other and the flat surfaces of all the flat portions 38a and 38b. Are formed parallel to each other.
- the oscillating body 22 in this embodiment includes two rectangular plate members 29 and 30 having the same size and shape that are joined to each other with the flat portion 38b of the torsion bar 23 interposed therebetween.
- Torsion bar housing grooves 29b, 30b having a shape substantially corresponding to the cross-sectional shape of the flat portion 38b are formed on the joint surfaces 29a, 30a of the two plate members 29, 30.
- the same material as in the previous embodiment can be used, and the cross-sectional shape is not limited to a circle, and a wire having a rectangular cross section can also be used.
- the same material as that of the previous embodiment can be used as appropriate for the material constituting the oscillator 22 and the light reflecting surface 21 thereof.
- the material before processing of the torsion bar 23 is a wire having a circular cross section, and in this embodiment, a material having a diameter of 0.24 mm is adopted. Prior to processing the flat portions 38a and 38b on this material, it is preferable to straighten the straightness of the wire in advance, whereby the accuracy of the torsion bar 23 can be further improved.
- the flat portions 38a and 38b can be formed on the surface of the wire material by a removal process such as cutting, grinding, or wet etching, in addition to a plastic process such as an indentation process, a tension process, or an ironing process.
- the flat portion 38a corresponding to the molding surface of the punch is formed by pressing the wire using a pair of punches having molding surfaces facing each other in the radial direction across the central axis of the wire. , 38b are formed on the wire.
- the thickness of the pair of flat portions 38a and 38b is preferably 40% or more of the diameter of the wire.
- the relative displacement of the flat portions 38a and 38b with respect to the longitudinal axis A of the torsion bar 23 can be minimized, and the base 20 and the cover member It is also possible to improve the positional accuracy when the torsion bar 23 is assembled to 25.
- the width dimension of the flat portions 38a and 38b is substantially larger than the diameter of the wire, and the rocking body 22 is rocked more than when the rocking body 22 is joined to the circular cross section of the wire. As a result of improving the adhesion with the moving body 22, the vibration characteristics can be enhanced.
- FIG. 32 schematically shows the appearance of such a wire in which a plurality of flat portions 38a and 38b are formed at predetermined intervals.
- the flat portion 38a that remains after cutting, and 38b described above It can function as a fixed part and a joint part. In this way, by properly cutting a wire in which a large number of flat portions 38a and 38b are intermittently formed at predetermined intervals along the longitudinal direction of the wire, a lot of torsion can be made from one wire without the waste portion of the wire. Bars 23 can be formed. However, it is also possible to perform the wire cutting process before forming the flat portions 38a and 38b for the wire.
- an age hardening process may be performed after the formation of the flat portions 38a and 38b.
- the age hardening treatment referred to here is a treatment in which the heat treatment for the flat portions 38a and 38b and the heat treatment for the other portions are performed under different temperature conditions.
- the Young's modulus of the torsion bar 23 can be further improved, and the distortion of the flat portions 38a and 38b can be further reduced.
- the workability of the material may be reduced, and the distortion of the flat portions 38a and 38b after forming may be increased. Please note that there is.
- the flat portions 38a and 38b are formed by pushing the wire rod without going through a high-cost and long-time film forming process, thereby easily and mass-producing torsion bars 23 with little variation in characteristics. be able to.
- FIG. 33 shows the side shape of such a main part
- FIG. 34 shows the disassembled structure thereof. Elements having the same functions as those of the previous embodiment are designated by the same reference numerals, and redundant description is omitted. .
- flat portions 38a and 38b are formed only at both ends, the flat portion 38a on the proximal end side functions as a fixing portion for the base 20 and the cover member 25, and the flat portion 38b on the distal end side. It functions as a joint for the rocking body 22. Also in the present embodiment, the oscillating body 22 is hardly peeled off or displaced from the torsion bar 23, and stable vibration characteristics can be obtained. Moreover, by aligning the phase of the flat portion 38a as the fixing portion of the torsion bar 23 with the flat portion 38b as the joint portion, it is possible to easily set the orientation of the rocking body 22 with respect to the frame body 28. .
- the resonance frequency is set to 2 kHz
- the drive frequency is set to around 2 kHz
- the deflection angle is fixed to ⁇ 40 degrees.
- the reliability was tested by driving the optical scanning element 17 continuously for 2000 hours. As a result, although the resonance frequency was shifted several Hz toward the low frequency side, it was confirmed that the reliability was good. Also, no abnormal vibration occurred.
- the optical scanning element 17 capable of realizing stable vibration characteristics can be manufactured at low cost with high productivity.
- the present invention can also be applied to an image projection apparatus such as an overhead projector, and the concept of such another embodiment of the present invention is shown in FIG.
- the image projection apparatus 40 in the present embodiment includes an optical scanning apparatus 14 having the same basic configuration as that of the previous embodiment, an optical deflection apparatus 42 that deflects light from the light source 41 in a predetermined direction, and the optical deflection apparatus. And a screen 43 on which the light deflected by 42 is irradiated.
- the light deflection device 42 deflects light from the light source 41 reflected by the light reflecting surface 21 of the oscillator 22 of the light scanning element 17 of the light scanning device 14 along a direction parallel to the longitudinal axis A of the torsion bar. It is something to be made. Since the light deflection speed of the light deflecting device 42 can be made relatively slower than the vibration period of the oscillating body (not shown) of the optical scanning element 17, a known galvanometer mirror is used in this embodiment.
- the light emitted from the light source 41 including the RGB three primary colors is two-dimensionally scanned by the light scanning element 17 and the light deflecting device 42 and projected onto the screen 43 as an image.
- the deflection angle ⁇ of the light reflecting surface 21 of the oscillator 22 constituting the main part of the optical scanning element 17 is adjusted by the element driving unit 18 based on a control signal output from the control device 19.
- the deflection angle of the galvanometer mirror around the axis orthogonal to the longitudinal axis A of the torsion bar of the oscillating body 22 is controlled based on the output from the control device 19.
- Image information projected on the screen 43 is transmitted from the input unit 44 to the control device 19, and information regarding the distance of the optical path from the light source 41 to the screen 43 is input from the distance measuring unit 45.
- the control device 19 sets the projection angle of view and magnification ratio according to the information from the input unit 44 and the distance measuring unit 45, the size of the image, and the aspect ratio of the optical scanning element 17 and the optical deflection device 42. Change each scan angle. Note that the enlargement ratio of the image can also be achieved by on / off control of energization to the light source 41 without changing the scanning angle. However, a high brightness image can be projected onto the screen 43 by reducing the off time of the light source 41 by changing the scanning angle.
- the oscillator 22 is fixed to the torsion bar 23 made of a work-hardening and age-hardening type Co—Ni-based alloy, instability such as jitter in addition to downsizing is achieved. It can be reduced, and stable operation is possible even when the scanning angle is changed. Moreover, since the distortion amplitude dependency of the vibration attenuation rate is small, there is no sudden increase in power consumption when the scanning angle is increased. Furthermore, the driving power of the light source 41 can be reduced by the effective use of light. As a result, in addition to downsizing, the capacity of the element driving unit 18 and the power source can be reduced, and a high-performance image projection apparatus 40 that is small and has a large projection angle of view can be realized.
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
- Facsimile Scanning Arrangements (AREA)
Abstract
Description
11 感光ドラム
12 露光部
13 レーザー光源
14 光走査装置
15 コリメート光学系
16 fθレンズ
17 光走査用素子
18 素子駆動部
19 制御装置
20 ベース
21 光反射面
22 揺動体
23 トーションバー
23a,23b トーションバー片
24 重心位置補正部材
25 カバー部材
26 シートコイル
27 基板
28 枠体
29,30 板部材
29a,30a 接合面
29b,30b トーションバー収容溝
29c,30c 磁石収容溝
31 磁石
31a 穴
32 穴
33 ガラス定盤
34 BDセンサー
35 制御部
36 ストッパー部
37 切欠き部
38a,38b 平坦部
40 画像投影装置
41 光源
42 光偏向装置
43 スクリーン
44 入力部
45 測距部
A トーションバーの長手方向軸線
AR 理想揺動軸線
α 振れ角
CS,CSa ひき目
CL 切断線
G 揺動体の重心
h ガラス定盤の表面から揺動体の重心までの高さ
L レーザー光
O ベースに対するトーションバーの基端の取り付け中心
S 内部空間
Claims (20)
- ベースと、
このベースから突出するトーションバーと、
このトーションバーの前記ベース側とは反対の側に設けられ、当該トーションバーを挟んで相互に接合される同一形状を持つ2枚の板部材を有する揺動体と
を具えたことを特徴とする振動素子。 - 前記揺動体は、前記トーションバーの長手方向軸線と平行に延在して光源からの光を反射する光反射面を有し、前記トーションバーの弾性変形を伴いつつその長手方向軸線を中心として揺動し、これにより前記揺動体の光反射面にて反射した光を前記トーションバーの長手方向軸線に対して交差する方向に振ることを特徴とする請求項1に記載の振動素子。
- 前記2枚の板部材の接合面には、前記トーションバーを収容する収容溝がそれぞれ形成され、当該2枚の板部材は前記トーションバーの長手方向軸線を対称軸とする対称形状を有していることを特徴とする請求項1または請求項2に記載の振動素子。
- 前記揺動体の光反射面は、前記2枚の板部材の少なくとも一方の板部材の前記接合面と反対側の面に形成されていることを特徴とする請求項2または請求項3に記載の振動素子。
- 前記揺動体と前記トーションバーとの重心を調整する重心調整部材をさらに具えたことを特徴とする請求項1から請求項4の何れか1項に記載の振動素子。
- 前記トーションバーは、引張り加工またはしごき加工が施されたものであることを特徴とする請求項1から請求項5の何れか1項に記載の振動素子。
- 前記揺動体には、磁石を取り付けるための基準となる切欠き部が設けられていることを特徴とする請求項1から請求項6の何れか1項に記載の振動素子。
- トーションバーと、
このトーションバーに固定される揺動体と、
この揺動体または前記トーションバーに固定される第1磁界発生手段と、
この第1磁界発生手段が発生する磁界に対応した磁界を発生し、前記トーションバーを変形させて前記揺動体を回動させる第2磁界発生手段と
を具えた振動素子であって、前記トーションバーが一定断面形状の直線状をなす線材の一部に形成された平坦部を有し、前記揺動体がこの平坦部に接合されていることを特徴とする振動素子。 - 請求項8に記載の振動素子の製造方法であって、
一定断面形状の直線状をなす線材の表面の一部に平坦部を形成するステップと、
前記線材の表面の一部に形成された平坦部に揺動体を接合するステップと
を具えたことを特徴とする振動素子の製造方法。 - 前記平坦部は、前記線材の長手方向軸線に対して回転対称形状であることを特徴とする請求項9に記載の振動素子の製造方法。
- 前記平坦部が前記線材の長手方向軸線と平行な一対の平坦面を有することを特徴とする請求項9または請求項10に記載の振動素子の製造方法。
- 前記平坦部を形成するステップが前記線材の長手方向に沿ってこの線材に複数の平坦部を間欠的に形成するステップを含み、これら複数の平坦部のうちの少なくとも1つの平坦部の長手方向中央部から前記線材をその長手方向軸線と直角に切断するステップをさらに具えたことを特徴とする請求項9から請求項11の何れかに記載の振動素子の製造方法。
- 前記平坦部が前記線材の長手方向一端部か、あるいは長手方向中間部分に形成されていることを特徴とする請求項9から請求項12の何れかに記載の振動素子の製造方法。
- 前記平坦部を形成するステップが前記線材に対する塑性加工または除去加工を含むことを特徴とする請求項9から請求項13の何れかに記載の振動素子の製造方法。
- 前記平坦面の部分に時効硬化処理を施すステップをさらに具えたことを特徴とする請求項9から請求項14の何れかに記載の振動素子の製造方法。
- 請求項1から請求項8の何れかに記載の振動素子と、
この振動素子の揺動体に設けられた光反射面に向けて光を照射する光源と、
前記振動素子の揺動体をトーションバーの長手方向軸線を中心として揺動させる駆動手段と
を具えたことを特徴とする光走査装置。 - 前記駆動手段が揺動体と一体に取り付けられる磁石と、この磁石と対向し、かつ交番電流が通されるコイルとを有し、前記2枚の板部材の接合面には、前記磁石を収容または保持する溝が前記トーションバーの長手方向軸線を対称軸としてそれぞれ対称に形成されていることを特徴とする請求項16に記載の光走査装置。
- 前記磁石の磁極は、前記トーションバーの長手方向軸線に対して直交し、かつ前記揺動体の光反射面と平行な方向に延在していることを特徴とする請求項16または請求項17に記載の光走査装置。
- 請求項16から請求項18の何れかに記載の光走査装置と、
この光走査装置の光源からの光が当該光走査装置の振動素子の揺動体に設けられた光反射面を介して照射される画像形成媒体と
を具えたことを特徴とする画像形成装置。 - 請求項16から請求項18の何れかに記載の光走査装置と、
この光走査装置の振動素子の揺動体に設けられた光反射面にて反射する光源からの光をトーションバーの長手方向軸線と平行な方向に沿って偏向させる光偏向装置と、
この光偏向装置により偏向する光が照射されるスクリーンと
を具えたことを特徴とする画像投影装置。
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JP2012551854A JP5744917B2 (ja) | 2011-01-07 | 2012-01-04 | 振動素子および光走査装置ならびにこれを用いた画像形成装置および画像投影装置 |
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CN108977763B (zh) * | 2018-06-20 | 2020-02-14 | 武汉华星光电半导体显示技术有限公司 | 有源矩阵有机发光二极管精细荫罩组件及其制造方法 |
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