WO2012056858A1 - Apparatus for observing edge of subject to be observed and apparatus for inspecting edge of subject to be observed - Google Patents

Apparatus for observing edge of subject to be observed and apparatus for inspecting edge of subject to be observed Download PDF

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Publication number
WO2012056858A1
WO2012056858A1 PCT/JP2011/073040 JP2011073040W WO2012056858A1 WO 2012056858 A1 WO2012056858 A1 WO 2012056858A1 JP 2011073040 W JP2011073040 W JP 2011073040W WO 2012056858 A1 WO2012056858 A1 WO 2012056858A1
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WIPO (PCT)
Prior art keywords
observation
observation object
image
unit
light
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Application number
PCT/JP2011/073040
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French (fr)
Japanese (ja)
Inventor
央樹 谷川
豪 常吉
英一 大美
Original Assignee
東レエンジニアリング株式会社
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Publication of WO2012056858A1 publication Critical patent/WO2012056858A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to an apparatus and an inspection apparatus for observing an end portion of a substrate, a sheet material, a foil-like thin plate, which are used in, for example, a printed wiring circuit or a secondary battery.
  • the drive power source has become smaller, lighter, has higher energy density, and is a sealed secondary that can be repeatedly charged and discharged. Batteries are prevalent.
  • a large-sized secondary battery is also becoming popular as a driving power source for automobiles in consideration of the environment.
  • the secondary battery has various shapes such as a coin shape, a cylindrical shape, a box shape, and an oval shape.
  • an active material is coated on a thin plate or sheet material that serves as an electrode for a positive electrode and a negative electrode, and an insulating sheet material called a separator between them. Is sandwiched.
  • each of the electrode plates is manufactured by cutting a sheet material into a predetermined shape with a cutter or the like. During this cutting, an elongated burr with a sharp tip may be formed on the cut end surface of the electrode plate. Although such burrs are generally minute, if such burrs are formed so as to protrude in the stacking direction, the negative electrode plate that penetrates the adjacent separator and faces the positive electrode plate is electrically connected. There is also a possibility of connecting to lead to short circuit failure of the battery. For this reason, it is necessary to inspect for the presence or absence of burrs at the end of the sheet material, which is performed using various apparatuses (for example, Patent Document 2).
  • the burr extends near the surface of the active material, but it is difficult to reliably detect the burr when it is buried in the active material or when the burr is exposed very little. Further, in the case of contact-type automatic inspection, there is a possibility that the active material may be peeled off due to variations in the film thickness of the coating film or shaking during conveyance.
  • Patent Document 3 a technique such as Patent Document 3 is disclosed in order to perform a non-contact type inspection using the observation image obtained by using observation means and illumination.
  • FIG. 11 is an image diagram of an observation image according to a conventional embodiment
  • FIG. 12 is an image diagram of an observation image according to another conventional embodiment.
  • an electrode sheet for a secondary battery is an observation object
  • an active material 101 is applied to both sides of the metal stay 100. Furthermore, it shows a state in which burrs 110, 111, 114 and chips 120, 121, 124 are included at the end of the active material 101.
  • the observation object is projected in the observation visual field 44, the observation object is thin and flexible, and it is necessary to support the lower surface with a support portion.
  • an observation image as shown in FIG. 11 is obtained.
  • illumination hereinafter referred to as back side illumination
  • the portion without the support portion is on the back side.
  • the portion of the support portion is blocked by light, resulting in a range where burrs and chips cannot be observed.
  • an illumination arranged on the observation means side with respect to the observation object (hereinafter, near side illumination) is used, an observation image as shown in FIG. 12 is obtained. Regardless of the presence or absence of the support portion, both the region 150 and the region 151 can be observed.
  • an active material with low reflectance is attached to the surface of the burr, it is necessary to increase the amount of light while observing the electrode. Since the part is made of metal, halation occurs when the amount of light is increased too much, and there are various problems such that an appropriate observation image cannot be obtained and minute burrs and chips may not be accurately grasped.
  • the present invention has been made in view of the above problems, and it is possible to reduce the time and labor to be spent while observing the end of an observation object and increasing the accuracy of inspection and measurement of minute burrs or chips.
  • An object of the present invention is to provide an observation device that can be used.
  • the invention described in claim 1 A support part for supporting the inner side from the end of the observation object; Observation means for observing the end face of the observation object and the end face in the thickness direction; First illumination means for irradiating light toward the observation object from the observation means side; A second illuminating means for irradiating light toward the observation object and the observation means from a location facing the observation means side; An observation device for observing an end of an observation object, wherein the support portion includes a reflection surface that reflects light emitted from the first illumination unit.
  • the end observation device for the observation object is used, Even when light emitted from the near-side illumination on the observation means side is used, an observation image using illumination arranged behind the end of the observation target can be obtained. Therefore, a minute burr can be observed as a shadow in a bright background and a minute chip can be observed as a bright part. As a result, the contrast of the image is improved and fine burrs and chips are easily found compared to observation using only the front side illumination. In addition, the shadow of the support portion that occurs when only the back side illumination is used does not occur, and the area that can be observed is expanded.
  • the invention described in claim 2 The first illuminating means or the second illuminating means is connected via a light amount adjusting unit that adjusts the intensity of light emitted from the illuminating means,
  • the light quantity adjustment unit is The intensity of the light emitted from the first illumination means and reflected by the reflecting surface observed by the observation means is the same as the intensity of the light emitted from the second illumination means.
  • the intensity of the light can be made the same in the part where the observation object is observed with the back side illumination and the part where the observation object is observed with the light from the reflecting member. For this reason, when inspection or dimension measurement is performed based on the observation image, it is possible to prevent variations in the inspection result caused by the difference in brightness of the observation image, and the accuracy of the inspection or dimension measurement is improved.
  • the invention according to claim 3 The support is attached via a rotation mechanism that can change the angle of the observation surface of the observation object with respect to the observation means,
  • the rotation mechanism has a structure capable of adjusting the angle so that the observation means and the angle of the observation surface of the observation object are orthogonal to each other,
  • observation part end observation device When adjusting the direction of the observation object, even if the observation object and the support part are not parallel, the side surface of the support part does not cause a portion where the light from the back illumination does not reach the observation means and cannot be observed. . Even if the orientation of placing the observation object on the support is shifted, the end of the observation object can be observed while maintaining a desired contrast.
  • Second observation means for observing the end of the observation object from a direction orthogonal to the observation means;
  • the third illuminating means for irradiating light toward the end portion of the observation object and the second observing means from a location facing the second observing means side.
  • An end observation apparatus for an observation object according to any one of 1 to 3.
  • observation part end observation device It becomes possible to observe the end portion of the observation object from two directions, and when the burr extends in an oblique direction, it is useful when it is difficult to make a judgment by observing from one direction.
  • observation device for the end of the observation object If the observation device for the end of the observation object is used, an observation image can be recorded, so that time shift can be performed such that only observation is performed first and inspection and measurement are performed later. In addition, it can be reviewed later whether the judgment at that time was correct after the inspection, or a confirmation work by another operator can be performed later. By doing so, it is possible to minimize variations in inspection standards due to differences in workers, and to reduce educational time spent for inexperienced workers.
  • the collection operation can be facilitated by linking it with information such as the date of manufacture, lot number, serial number and the like.
  • An image acquisition unit for acquiring the observation image observed using the observation apparatus for an observation object according to any one of claims 1 to 4;
  • a pass / fail criterion information registration unit for registering pass / fail criteria information for determining whether or not the acquired image is a non-defective product;
  • An observation object end inspection device comprising: an observation image inspection unit for determining whether or not the acquired image is a non-defective product based on the quality determination reference information.
  • the above-mentioned end inspection device for an observation object it is possible to automatically perform an inspection that has been conventionally performed by an operator. By doing so, it is possible to inspect continuously based on a certain judgment criterion, and to minimize variations in inspection criteria due to differences in workers and long-time inspection.
  • FIG. 1 is a perspective view showing a first example embodying the present invention.
  • the three axes of the orthogonal coordinate system are X, Y, and Z
  • the XY plane is the horizontal plane
  • the Z direction is the vertical direction.
  • the direction of the arrow is represented as the top
  • the opposite direction is represented as the bottom.
  • the observation apparatus 1 includes a stage unit 2, an alignment camera unit 3, an observation unit 4, an observation illumination unit 5, and a control unit 9.
  • the stage unit 2 includes an X-axis stage 21 attached on the apparatus base 11, a Y-axis stage 22 attached on the X-axis stage 21, a ⁇ -axis motor 23 attached on the Y-axis stage 22, and ⁇ And a table 24 mounted on the shaft motor 23, and constitutes a support portion in the present invention.
  • the X axis stage 21 can move the Y axis stage 22 mounted thereon in the X direction.
  • the Y-axis stage 22 can move the ⁇ -axis motor 23 mounted thereon in the Y direction.
  • the ⁇ -axis motor 23 can rotate the table 24 mounted thereon in the ⁇ direction.
  • Examples of the X-axis stage 21 and the Y-axis stage 22 include a slider-type stage mechanism that combines a motor, a ball screw, and a linear guide, and a slider-type stage mechanism that combines a linear motor and a linear guide.
  • examples of the ⁇ -axis motor include a rotation mechanism that is provided with a bearing at the center of rotation and can be rotated in the ⁇ direction by applying an external force from the left and right directions, and a rotation mechanism that uses a DD motor.
  • the observation object 10 placed on the table 24 can be moved in the XY direction and further rotated in the ⁇ direction.
  • the table 24 has grooves and holes formed on the surface thereof, and the grooves and holes are connected to a vacuum source via an opening / closing control valve.
  • the observation object 10 placed on the table 24 is attracted and held by a negative pressure so that the position of the observation object 10 does not shift during the movement of the table 24.
  • the side surface 25 of the table 24 is configured by a surface that reflects light.
  • the alignment camera unit 3 includes a camera 31, a camera 36, optical system units 32 and 37, and illuminations 33 and 38.
  • Examples of the cameras 31 and 36 include CCDs, CMOSs, and other imaging cameras using other imaging elements, and any cameras that can output captured images as video signals to the control unit 9 may be used.
  • the camera 31 is attached on the connection bracket 12 attached on the apparatus base 11 so that the corners and ends of the observation object 10 can be observed from the upper direction to the lower direction in the Z direction.
  • the camera 36 is attached on the connection bracket 14 attached on the apparatus base 11 so that another corner or end of the observation object 10 can be observed from the upper side to the lower side in the Z direction. It has been.
  • the illumination 33 is attached on the connection bracket 13 attached to the connection bracket 12 so that light can be emitted toward the camera 31.
  • the illumination 38 is attached on the connection bracket 15 attached to the connection bracket 14 so that light can be irradiated toward the camera 36 for observation by the camera 36.
  • the observation unit 4 includes a camera 41 and an optical system unit 42 and constitutes observation means in the present invention, and observes the end of the observation target object 10 in the X direction from the arrow direction to the arrowhead direction. In order to be able to do so, it is mounted on a connecting bracket 16 mounted on the device base 11.
  • the observation illumination unit 5 includes a near-side illumination 55, a back-side illumination 51, and another form of a back-side illumination 53 as necessary.
  • the back side illumination 51 and the back side illumination 53 are attached to connection brackets 17 and 18 (not shown) attached on the apparatus base 11 so that light can be emitted toward the camera 41.
  • the optical system units 32, 37, and 42 are configured to focus on the end of the observation target object 10 so that images can be observed with the cameras 31, 36, and 41. Any optical system component may be used.
  • Illuminations 33 and 38 can be exemplified by LEDs, halogens, incandescent bulbs, fluorescent lamps and other light emitting means.
  • the sensitivity wavelength of the camera 40 can be observed with the camera so that the pattern of the surface of the observation object 10 can be observed. Any light that irradiates a light beam having a predetermined wavelength may be used.
  • the light irradiation form can be selected from continuous light emission and strobe light emission, and may be selected in consideration of the observation object 10, the size of the observation visual field, the light reception sensitivity of the camera, the light emission amount and the light emission time.
  • the control unit 9 includes an information input unit 91, an information output unit 92, a notification unit 93, and other control devices, details of which will be described later.
  • FIG. 2 is a system configuration diagram showing a first example of a form embodying the present invention. As illustrated in FIG. 2, each device of the stage unit 2, the alignment camera unit 3, the observation unit 4, and the observation illumination unit 5 of the observation apparatus 1 described above is connected to each device of the control unit 9.
  • the control unit 9 includes a control computer 90, an information input unit 91, an information output unit 92, a reporting unit 93, an information recording unit 94, and a device control unit 95.
  • Examples of the control computer 90 include a computer equipped with a numerical operation unit such as a microcomputer, a personal computer, or a workstation.
  • Examples of the information input unit 91 include a keyboard, a mouse, and a switch.
  • Examples of the information output unit 92 include an image display display and a lamp.
  • Examples of the reporting means 93 include a buzzer, a speaker, and a lamp that can alert the worker.
  • Examples of the information recording means 94 include a semiconductor recording medium, a magnetic recording medium, a magneto-optical recording medium, such as a memory card and a data disk.
  • Examples of the device control unit 95 include devices called programmable controllers and motion controllers.
  • Video signals output from the cameras 31, 36 and 41 are input to the control computer 90 via an image processing unit (not shown).
  • the device control unit 95 is connected to the X-axis stage 21, the Y-axis stage 22, and the ⁇ -axis motor 23. Further, the device control unit 95 is connected with light amount adjustment units 34, 39, 52, 54, 56 for individually adjusting the light amounts of the illuminations 33, 38, 51, 53, 55. Examples of a method for adjusting the amount of illumination light in these light amount adjustment units include a method for adjusting an applied voltage or current, or adjusting a voltage or current application time.
  • the device control unit 95 is connected to other control devices (not shown), and by giving control signals to them, each device can be operated or stopped. Yes.
  • FIG. 3 is a flowchart showing a first example of a form embodying the present invention.
  • a series of flows for observing the end of the observation object 10 is shown for each step.
  • the observation object 10 is placed on the table 24.
  • the end portion of the observation object 10 is placed in a form that supports the inside from the end portion, that is, in an overhanging state from the table 24 (s101).
  • observation object 10 is sucked and held on the table 24 (s102), and the end of the observation object 10 is observed with the cameras 31 and 36 of the alignment camera unit 3 or measured with a position measuring device. Then, the positional deviations of the corners and ends of the observation object 10 are measured (s103), and the observation object 10 placed on the table 24 is aligned (s104).
  • the end of the observation object 10 is observed while moving the X-axis stage 21 and moving the table 24 in the X direction (s105), and an observation image is recorded as necessary (s115). It is determined whether or not observation has been completed for one side of the end of the observation object 10 (s106). If observation is in progress, the process returns to step s105, and if observation is completed, whether or not observation of all sides has been completed. Judgment is made (s107).
  • the table 24 is rotated 90 degrees (s108), and the process returns to step s105 to observe the next observation target side. If the observation of all sides is completed, the suction of the observation object 10 is released (s109), and the observation object 10 is taken out from the table 24 (s110). When observing another observation object 10, the steps s101 and after are performed in the same manner.
  • FIG. 4 is a side view showing a first example of a form embodying the present invention.
  • the observation object 10 is placed on the table 24 in an overhanged state so that the end to be measured does not touch the table 24.
  • the lens 42 includes an objective lens 42a and a lens barrel 42b, and is attached so that the end portion of the observation object 10 can be observed by the camera 41.
  • the light emitted from the light emitting unit 51h of the back illumination 51 passes through the periphery of the observation target 10, interferes with the light 51a entering the light receiving unit 41s of the camera 41, and the observation target 10, and reaches the light receiving unit 41s.
  • a near-side illumination 55 is attached so that light is irradiated toward the side surface 25 of the table 24 that is a support portion of the observation object 10.
  • a part of the light 55 a emitted from the light emitting surface 55 h of the front side illumination 55 is reflected by the reflecting surface provided on the table side surface 25 and becomes light 55 b entering the light receiving part 41 s of the camera 41.
  • burrs and chips at the end of the observation object 10 are observed using the light 51a and the light 55b.
  • the front side illumination 55 constitutes the first illumination means
  • the back side illumination 51 constitutes the second illumination means
  • FIG. 5 is a side view showing a second example of the embodiment embodying the present invention.
  • the observation object 10 is placed on the table 24 in an overhanged state so that the end to be measured does not touch the table 24.
  • the lens 42B includes an objective lens 42a, a lens barrel 42b, and a half mirror 42c, and a coaxial illumination 57 attached to a side surface of the lens 42B.
  • the light emitted from the light emitting part 51h of the back side illumination 51 passes around the observation object 10 and interferes with the light 51a incident on the light receiving part 41s of the camera 41 and the observation object 10, and enters the light receiving part 41s.
  • the light 51b that does not reach and is blocked and the light 51c that interferes with the table 24 and does not reach the light receiving unit 41s and is blocked are included.
  • the light emitted from the light emitting portion 57h of the coaxial illumination 57 attached to the side surface of the lens 42B is reflected by the half mirror 42c and diffused without being irradiated on the observation target 10, and the observation target 10
  • the camera 41 can observe burrs and chips at the end of the observation object 10 using the light 51a and the light 57c.
  • the coaxial illumination 57 constitutes a first illumination means.
  • the side surface 25 of the table 24 is processed so that the illumination light is reflected.
  • the table side surface 25 may be polished to easily reflect light, or a reflective material may be applied or pasted.
  • a reflecting member may be attached to or attached to the table side surface 25.
  • the light irradiated from the camera side toward the observation object 10 is reflected by the reflecting surface of the table side surface 25 and is incident on the camera.
  • the periphery of the observation object 10 is bright and the observation object 10 can be observed as a dark shadow. Therefore, if there is a burr at the end of the observation object 10, the burr portion is projected as a dark image, and it can be seen that there is a burr.
  • the chipped portion is projected as a bright image due to diffraction of light from behind, and it can be seen that there is a chip.
  • FIG. 6 is an image view of an observation image in a form embodying the present invention.
  • the image shown in FIG. 6 shows an image in which the observation image of the end of the observation object 10 observed with the camera 41 is displayed in the observation visual field 44 of the camera 41.
  • the upper part of the observation visual field 44 and a part of the lower part of the observation visual field 44 are areas 150 with the light emitted from the back side illumination 51 as a background, and the lower part of the observation visual field 44 is a reflection of the side surface 25 of the table. This is an area 151 whose background is the light reflected by the surface.
  • the observation object 10 has the active material 101 applied on both sides of the metal stay 100, similarly to the electrode sheet for the secondary battery described above with reference to FIGS.
  • the active material 101 includes burrs 110, 111, 114 and chips 120, 121, 124.
  • the burr becomes a dark part because light from the background is blocked, and the chipped part becomes a bright part because the background light wraps around.
  • the back side illumination and the illumination that irradiates light toward the side of the table can be adjusted independently. Then, the brightness is adjusted by the light amount adjustment unit so that the area 150 and the area 151 have the same brightness. By doing so, the brightness of the above-mentioned areas 150 and 151 becomes the same, and the presence / absence or size of the end of the observation object 10 is inspected under the same conditions in all of the observation area. Can do.
  • FIGS. 7A and 7B are plan views showing a first example of a form embodying the present invention.
  • the observation object 10 is placed on a table 24 mounted on a ⁇ -axis motor 23 (Y-axis stage 22 is not shown) on the X-axis stage 21.
  • Y-axis stage 22 is not shown
  • the case where the observation surface 10s of the observation object 10 and the side surface 24s of the table 24 are not orthogonal to each other will be described.
  • the ⁇ motor 23 is rotated about the rotation center 23c in the ⁇ direction so that the traveling direction of the X-axis stage 21 and the observation surface 10s are parallel to each other (step s102 described above). See s104).
  • the posture is as shown in FIG. 7B, and even when the table 24 is moved in the X direction, the distance between the camera 41 and the lens 42 and the observation surface 10s is kept constant. However, in this case, there is a position where light from the light emitting portion 51 h of the back side illumination 51 is blocked by the table corner portion 24 c and does not reach the camera 41. In that case, the portion cannot be observed, and even if there are burrs or chips, it cannot be grasped.
  • FIG. 7C is a plan view showing a third example of the embodiment embodying the present invention.
  • light is emitted from the back side illumination 53 toward the camera 41 and the lens 42 from a location wider than the angle at which the table 24 is rotated in the ⁇ direction for angle adjustment. Then, even when the observation surface 10s of the observation object 10 and the table end surface 24s are not orthogonal to each other, the light emitted from the back side illumination 53 is not blocked by the table corner portion 24c and is not blocked by the observation portion 4. The light enters the camera 41.
  • FIG. 7C shows a state in which the position in the X direction and the angle in the ⁇ direction are changed with respect to the back side illumination 51.
  • the back side illumination 53 may be configured to be movable and rotatable by attaching the mounting bracket on a stage that can move in the X direction and the ⁇ direction.
  • the same effect may be obtained by arranging a plurality of lights side by side in the dimension in the X direction, or by using one light having a large light emitting area in the X direction and a wide light emitting area.
  • FIG. 8A is a side view showing a fourth example of the embodiment embodying the present invention.
  • the lens 42a is attached to the first camera 41a, and the observation area 44a including the side edge of the observation object 10 can be observed.
  • the lens 42b is attached to the second camera 41b, and the observation area 44b including the upper surface corner or upper surface edge of the observation object 10 can be observed.
  • the end of the observation object 10 can be observed from two directions, that is, a side surface and an upper surface.
  • the second camera 41b preferably has an angle formed by the first camera 41a and the moving direction during observation of the observation object 10 of 90 degrees.
  • the burr extends toward the first camera 41a or the second camera 41b
  • the other camera can observe the full length.
  • FIG. 8B is an image diagram of an observation image in the fourth example of the embodiment of the present invention.
  • the upper row is an image of the observation area 44b observed with the second camera 41b
  • the lower row is an image of the observation area 44a observed with the first camera 41a.
  • the image of the observation area 44a is the same as the image shown in FIG. 6, but by observing with the second camera 41b, the minute burr 115 that was not found by the observation with only the first camera 41a is observed. It becomes possible to understand that the burr 111 extends obliquely. Further, in the chip 121, not only the width and depth but also the depth can be understood.
  • the second camera 41b may be shared with the camera 31 that observes the alignment mark shown in FIG. If it does so, the edge part of the observation target object 10 can be observed from two directions, without increasing the number of cameras.
  • a second camera 41b may be prepared that is different from the camera 31 that observes the alignment mark. By doing so, a camera having a field of view, magnification, and sensitivity suitable for the observation of the alignment mark and the observation object can be obtained, and the degree of freedom of selection increases.
  • FIG. 9 is a perspective view showing a fifth example embodying the present invention.
  • the band-shaped observation object 10b is conveyed in the direction indicated by the arrow 10f, and the first camera 41a, the lens 42a, the opposite-side observation camera 41c, and the lens 42c are both ends of the band-shaped observation object 10b.
  • the predetermined ranges 44a and 44c are arranged so that they can be observed.
  • the back side illumination 51a and the back side illumination 51c are opposed to the first camera 41a, the opposite-side observation camera 41c, and the strip-shaped observation object 10, as indicated by the alternate long and short dash lines 43a and 43b. Are arranged to be. Therefore, two opposing sides of the observation object 10b can be observed simultaneously.
  • the center part of the band-shaped observation object 10b may bend compared to both ends.
  • the deflection occurs, when the observation is performed using only the back side illumination, a shadow is caused by the deflection portion, and it is difficult to observe the edge end on the lower surface side of the band-shaped observation object 10b. Therefore, in order to eliminate deflection, it supports with rotating bodies 27 and 28, such as a roller. Furthermore, while maintaining the strip-shaped observation object 10b in a horizontal state and rotating it in the direction indicated by the arrows 27r and 28r, this portion is formed on the side surfaces 27s and 28s of the member that supports the band-shaped observation object 10b. Attach a reflective member.
  • the same operation as that shown in the first or second example of the embodiment embodying the present invention is performed.
  • the rotating bodies 27 and 28 are arranged on the lower surface of the strip-shaped observation object 10b, it is possible to continuously observe only burrs and chips.
  • the light is reflected so that the side surfaces 27s and 28s of the member become reflecting surfaces. May be processed to obtain the same effect.
  • the fourth example of the embodiment can be applied when observing both ends of the strip-shaped observation object 10b. By doing so, even if burrs extending in an oblique direction exist, an accurate determination can be made by observation from two directions.
  • the movement amount from the moving means such as the X-axis stage 21 and the transport roller is detected while moving the table 24, and a predetermined amount is detected.
  • Observation images can be recorded at places and intervals. At this time, it is more preferable to associate the position information from the place where the observation is started, the position information corresponding to the movement interval, etc. with the recorded observation image data.
  • the distance information from the edge of the sheet based on the position information of the corners of the observation object 10 obtained in the alignment step (s1010 to s104) of the observation object 10 is associated with the recorded observation image data. May be.
  • the movement amount detecting means As the movement amount detecting means, the movement amount of the X-axis stage 21 and the Y-axis stage 22, the rotation angle of the ⁇ -axis motor 23, and the rotation angle of the rotating bodies 27 and 28 are detected optically or magnetically to obtain the movement amount.
  • An encoder that outputs a corresponding signal can be exemplified.
  • the observation apparatus 1 for inspecting burrs and chips based on the acquired observation image has been described. However, based on the acquired observation images, the height and thickness of the burrs, the width and depth of the chips, and the like. It can also be applied to measuring dimensions.
  • the present invention is not limited to observation / inspection / dimension measurement of burrs and chips, but can also be applied to observation / inspection / dimension measurement of minute foreign matter adhering to the end of the object to be observed and the molded product at the end. Can do.
  • the inspection apparatus embodying the present invention includes an image acquisition unit, a pass / fail criterion information registration unit, and an observation image inspection unit.
  • the image acquisition unit can be configured by using an image processing function built in the control computer 90 or an image processing unit, or can be configured by linking them. It has a function of acquiring an image observed using the edge observation device.
  • the pass / fail judgment reference information registration unit can be configured by using the information recording means 94 and has a function of registering pass / fail judgment reference information for judging whether or not the acquired image is a non-defective product. Yes.
  • the observation image inspection unit can be configured by using an image processing function built in the control computer 90, an image processing unit, or by linking them together. It has a function of determining whether or not the acquired image is a non-defective product based on the quality determination criterion information. Therefore, the inspection apparatus according to the present invention acquires an image observed using the end observation apparatus for the observation object according to the above-described invention, and acquires the image based on the quality criterion information registered in advance. It has a function of determining whether or not the obtained image is a non-defective product.
  • FIG. 10A is an image diagram of an inspection based on an observation image in a form embodying the present invention, and an observation image observed using the end observation device for an observation object according to the present invention is acquired by an image acquisition unit. It is a thing.
  • this image represents an image including burrs and chips to be inspected, and the active material 101 is applied to both sides of the metal stay 100. A thing is observed as the observation object 10.
  • the active material 101 includes burrs 110, 111, 114 and chips 120, 121, 124.
  • the burr is displayed as a dark part because light from the background is blocked, and the chipped part is displayed as a bright part due to the background light.
  • FIG. 10B is an image diagram of an inspection based on an observation image in a form embodying the present invention, and shows a state in which image processing is performed in the inspection process in the edge observation apparatus of the observation object according to the present invention.
  • a line 130 that is regarded as the outer shape of the observation object defined by the approximate line is fitted and displayed at the boundary between the metal stay 100 and the active material 101 that are the observation object 10 and the background areas 150 and 151. . This fitting can be performed using the image processing function of the image processing unit.
  • the dark area is subjected to image processing, and the thickness and length of each burr are extracted.
  • the lacks 120, 121, and 124 in the area surrounded by the line 130 regarded as the outer shape of the observation object the bright area is subjected to image processing, and the depth, size, and area of each lack are extracted. . Then, the degree of the extracted burrs and chips is compared with the quality criterion information registered in advance, and the observation image inspection unit determines whether or not the acquired image is a non-defective product.
  • the observation object end inspection apparatus can be used in the production process of the observation object. In this way, it is possible to save the observation image while simultaneously performing the inspection while producing the product continuously.
  • the postponed observation image is saved, it will be based on the latest quality criteria information. Can be re-inspected automatically.

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Abstract

Provided is an apparatus for observing an edge of a thin board with reduced time and labor, while improving accuracies of inspection and measurement of fine burrs or chips. Specifically provided is an apparatus for observing an edge of a subject to be observed, which is characterized in being provided with: a supporting section which supports the inner side of the edge of the thin board to be observed; an observing means, which observes the surface of the edge of the subject to be observed, said surface being in the thickness direction; a first illuminating means, which radiates light toward the side of the subject to be observed from the observing means side; and a second illuminating means, which radiates light toward the subject to be observed and to the observing means from a position facing the observing means side. The apparatus is also characterized in that the supporting section is provided with a member that reflects light applied from the first illuminating means.

Description

観察対象物の端部観察装置及び端部検査装置End observation device and end inspection device for observation object
　本発明は、例えばプリント配線回路や二次電池等に用いられる、基板やシート材、箔状の薄板の端部を観察する装置及び検査装置に関するものである。 The present invention relates to an apparatus and an inspection apparatus for observing an end portion of a substrate, a sheet material, a foil-like thin plate, which are used in, for example, a printed wiring circuit or a secondary battery.
　近年、ノートパソコンや携帯電話、デジタルカメラ等の電子機器の小形化、軽量化、コードレス化に伴い、その駆動電源として小形、軽量でエネルギー密度が高く、繰り返し充放電が可能な密閉形の二次電池が普及している。また、環境に配慮した自動車の走行用電源として、大型の二次電池も普及しつつある。この二次電池の形状としては、コイン形、筒形、箱形、長円形等の、種々の形状の物がある。 In recent years, as electronic devices such as notebook computers, mobile phones, and digital cameras have become smaller, lighter, and cordless, the drive power source has become smaller, lighter, has higher energy density, and is a sealed secondary that can be repeatedly charged and discharged. Batteries are prevalent. In addition, a large-sized secondary battery is also becoming popular as a driving power source for automobiles in consideration of the environment. The secondary battery has various shapes such as a coin shape, a cylindrical shape, a box shape, and an oval shape.
　ところで、自動車や電車などの車両用の電池として使用する大型電池の場合には、電池の性能や生産性の点から、円筒形の電池に用いられる巻き取り式の構造よりも、正の電極板と負の電極板とを交互に積層する構造の方が適していること、及び、電池が設置されるスペースを効率よく利用する必要性が大きいことから、円筒形よりも角形の電池を用いることが提案されている（例えば、特許文献１）。 By the way, in the case of a large battery used as a battery for vehicles such as automobiles and trains, from the viewpoint of battery performance and productivity, a positive electrode plate rather than a roll-up structure used for a cylindrical battery. Use a rectangular battery rather than a cylindrical one because the structure in which the negative electrode plate and the negative electrode plate are alternately stacked is more suitable, and the space where the battery is installed is more efficient. Has been proposed (for example, Patent Document 1).
　積層する構造の二次電池の場合には、正極及び負極用の電極となる薄板やシート材に活物質と呼ばれるものが塗工されており、それらの間にはセパレータと呼ばれる絶縁性のシート材が挟まれている。 In the case of a secondary battery having a laminated structure, what is called an active material is coated on a thin plate or sheet material that serves as an electrode for a positive electrode and a negative electrode, and an insulating sheet material called a separator between them. Is sandwiched.
　上述の積層する構造の場合、前記各電極板は、シート材をカッター等により所定形状の大きさに切断することにより製造される。この切断の際に、電極板の切断端面に、先端が尖った細長いバリが形成される場合がある。そのようなバリは概ね微小であるが、そのようなバリが積層方向において突出するように形成されると、隣のセパレータを貫通し正の電極板と対向する負の電極板とを電気的に接続して、電池の短絡不良に繋がる可能性もある。そのため、シート材端部のバリの有無を検査する必要があり、種々の装置を用いて行われている（例えば、特許文献２）。 In the case of the laminated structure described above, each of the electrode plates is manufactured by cutting a sheet material into a predetermined shape with a cutter or the like. During this cutting, an elongated burr with a sharp tip may be formed on the cut end surface of the electrode plate. Although such burrs are generally minute, if such burrs are formed so as to protrude in the stacking direction, the negative electrode plate that penetrates the adjacent separator and faces the positive electrode plate is electrically connected. There is also a possibility of connecting to lead to short circuit failure of the battery. For this reason, it is necessary to inspect for the presence or absence of burrs at the end of the sheet material, which is performed using various apparatuses (for example, Patent Document 2).
　活物質の表層近くまでバリが伸びているが、活物質に埋もれている場合、バリの露出が微小な場合など、バリを確実に検知するのが困難である。また、接触式の自動検査の場合、塗工膜の膜厚のばらつきや搬送時の揺れなどにより、活物質を剥がしてしまう可能性もある。 The burr extends near the surface of the active material, but it is difficult to reliably detect the burr when it is buried in the active material or when the burr is exposed very little. Further, in the case of contact-type automatic inspection, there is a possibility that the active material may be peeled off due to variations in the film thickness of the coating film or shaking during conveyance.
　一方、観察手段と照明を用い、得られた観察画像を用いて非接触式の検査を行うために、特許文献３のような技術が開示されている。 On the other hand, a technique such as Patent Document 3 is disclosed in order to perform a non-contact type inspection using the observation image obtained by using observation means and illumination.
特開２００３－２７２５９３号公報JP 2003-272593 A 特開２０１０－１１４０１１号公報JP 2010-1114011 A 特開平６－１６００６５号公報Japanese Patent Laid-Open No. 6-160065
　図１１に従来の実施形態による観察画像のイメージ図を、図１２に従来の別の実施形態による観察画像のイメージ図を示す。どちらも２次電池用電極シートを観察対象物としており、金属泊１００の両側に活物質１０１が塗布されている。さらに活物質１０１の端部には、バリ１１０，１１１，１１４や、欠け１２０，１２１，１２４が含まれている様子を表している。観察視野４４内に観察対象物が映し出されているが、観察対象は薄くてたわみやすく、支持部で下面をサポートする必要がある。 FIG. 11 is an image diagram of an observation image according to a conventional embodiment, and FIG. 12 is an image diagram of an observation image according to another conventional embodiment. In both cases, an electrode sheet for a secondary battery is an observation object, and an active material 101 is applied to both sides of the metal stay 100. Furthermore, it shows a state in which burrs 110, 111, 114 and chips 120, 121, 124 are included at the end of the active material 101. Although the observation object is projected in the observation visual field 44, the observation object is thin and flexible, and it is necessary to support the lower surface with a support portion.
　前記各電極板の端部のバリや欠けを非接触式で検査するために、観察手段と照明を用いて観察画像を得ようとすると、図１１に示すような観察画像が得られる。このとき、観察対象物に対して観察手段と対向した場所に配置した照明（以下、奥側照明）を用いてバリや欠けを観察しようとすると、支持部のない部分（領域１５０）は奥側照明の光を用いて観察できるが、支持部の部分（領域１５１）は光が遮られ、バリや欠けを観察できない範囲が生じる。 When an observation image is obtained using observation means and illumination in order to inspect non-contact burrs and chips at the end of each electrode plate, an observation image as shown in FIG. 11 is obtained. At this time, if a burr or a chip is observed using illumination (hereinafter referred to as back side illumination) arranged at a position opposite to the observation means with respect to the observation object, the portion without the support portion (region 150) is on the back side. Although it can be observed using illumination light, the portion of the support portion (region 151) is blocked by light, resulting in a range where burrs and chips cannot be observed.
　一方、観察対象物に対して観察手段側に配置した照明（以下、手前側照明）を用いると、図１２に示すような観察画像が得られる。支持部の有無にかかわらず、領域１５０も領域１５１も観察可能であるが、バリの表面には反射率の低い活物質が付着しているため、光量を上げて観察する必要がある反面、電極部は金属であるため、光量を上げすぎるとハレーションを起こしてしまい、適切な観察画像が得られず、微小なバリや欠けを正確に把握できない場合があるなど、種々の問題があった。 On the other hand, when an illumination arranged on the observation means side with respect to the observation object (hereinafter, near side illumination) is used, an observation image as shown in FIG. 12 is obtained. Regardless of the presence or absence of the support portion, both the region 150 and the region 151 can be observed. However, since an active material with low reflectance is attached to the surface of the burr, it is necessary to increase the amount of light while observing the electrode. Since the part is made of metal, halation occurs when the amount of light is increased too much, and there are various problems such that an appropriate observation image cannot be obtained and minute burrs and chips may not be accurately grasped.
　そのため従来は、非接触式のバリや欠けの検査や測定に必要なコントラストの高い画像を得ることが困難で、自動化が思うように実施できず、人手による顕微鏡観察などの目視による検査や測定に頼らざるを得なかった。 Therefore, conventionally, it is difficult to obtain images with high contrast required for inspection and measurement of non-contact type burrs and chips, and automation cannot be performed as expected, and it is difficult to perform inspection and measurement by visual observation such as manual microscope observation. I had to rely on it.
　この場合、生産数が多い場合には、長時間にわたりかなりの処理能力が必要であるので、それに適合した多数の人員を動員する必要がある。しかし、多数の人員動員は、人件費の増加につながるとともに、長時間の検査作業を強いられるために検査や測定のミスが増加するおそれがあり、結果にばらつきが生じやすくなり、人手による検査や測定には限界があった。 In this case, if the number of production is large, a considerable amount of processing capacity is required for a long time, and it is necessary to mobilize a large number of personnel adapted to it. However, a large number of personnel mobilization leads to an increase in labor costs, and due to forced long inspection work, there is a risk of increased inspection and measurement errors. There was a limit to the measurement.
　本発明は、上記の問題点に鑑みてなされたものであり、観察対象物の端部を観察し、微小なバリ又は欠けの検査や測定の精度を高めつつ、費やす時間や労力を減らすことができる観察装置を提供することを目的としている。 The present invention has been made in view of the above problems, and it is possible to reduce the time and labor to be spent while observing the end of an observation object and increasing the accuracy of inspection and measurement of minute burrs or chips. An object of the present invention is to provide an observation device that can be used.
　以上の課題を解決するために、請求項１に記載の発明は、
　観察対象物の端部より内側を支持する支持部と、
　前記観察対象物の端部であって厚み方向の端面を観察する観察手段と、
　前記観察手段側から前記観察対象物に向けて光を照射する第１の照明手段と、
　前記観察手段側と対向した場所から前記観察対象物及び前記観察手段に向けて光を照射する第２の照明手段とを備え、
　前記支持部には前記第１の照明手段から照射された光を反射する反射面を備えたことを特徴とする、観察対象物の端部観察装置である。 In order to solve the above problems, the invention described in claim 1
A support part for supporting the inner side from the end of the observation object;
Observation means for observing the end face of the observation object and the end face in the thickness direction;
First illumination means for irradiating light toward the observation object from the observation means side;
A second illuminating means for irradiating light toward the observation object and the observation means from a location facing the observation means side;
An observation device for observing an end of an observation object, wherein the support portion includes a reflection surface that reflects light emitted from the first illumination unit.
　上記観察対象物の端部観察装置を用いるので、
観察手段側にある手前側照明から発せられた光を用いても観察対象物の端部よりも奥側に配置した照明を用いたような観察画像を得ることができる。そのため、微小なバリを明るい背景の中の影として、微小な欠けを明部として観察することができる。
そのため手前側照明のみによる観察に比べて、画像のコントラストが向上し、微細なバリや欠けを見つけやすくなる。また、奥側照明のみを使用した場合に発生する支持部の影も生じなくなり、観察できる領域が広がる。 Since the end observation device for the observation object is used,
Even when light emitted from the near-side illumination on the observation means side is used, an observation image using illumination arranged behind the end of the observation target can be obtained. Therefore, a minute burr can be observed as a shadow in a bright background and a minute chip can be observed as a bright part.
As a result, the contrast of the image is improved and fine burrs and chips are easily found compared to observation using only the front side illumination. In addition, the shadow of the support portion that occurs when only the back side illumination is used does not occur, and the area that can be observed is expanded.
　請求項２に記載の発明は、
　前記第１の照明手段又は前記第２の照明手段は、照明手段から発せられる光の強さを調節する光量調節ユニットを介して接続されており、
　前記光量調節ユニットが、
前記観察手段で観察される、前記第１の照明手段から発せられて前記反射面で反射した光の強さと、前記第２の照明手段から発せられた光の強さとが、同じになるように調節できることを特徴とする、請求項１に記載の観察対象物の端部観察装置である。 The invention described in claim 2
The first illuminating means or the second illuminating means is connected via a light amount adjusting unit that adjusts the intensity of light emitted from the illuminating means,
The light quantity adjustment unit is
The intensity of the light emitted from the first illumination means and reflected by the reflecting surface observed by the observation means is the same as the intensity of the light emitted from the second illumination means. The end observation device for an observation object according to claim 1, wherein the device can be adjusted.
　上記観察対象物の端部観察装置を用いれば、観察対象物を奥側照明で観察する部分と、反射部材からの光で観察する部分とで、光の強さを同じにすることができる。そのため、観察画像に基づいて検査や寸法測定をする場合、観察画像の明るさの差から生じる検査結果のばらつきを防ぐことができ、検査や寸法測定の精度が向上する。 If the end observation device for the observation object is used, the intensity of the light can be made the same in the part where the observation object is observed with the back side illumination and the part where the observation object is observed with the light from the reflecting member. For this reason, when inspection or dimension measurement is performed based on the observation image, it is possible to prevent variations in the inspection result caused by the difference in brightness of the observation image, and the accuracy of the inspection or dimension measurement is improved.
　請求項３に記載の発明は、
　前記支持部は、前記観察手段に対する前記観察対象物の観察面の角度を変更できる回転機構を介して取り付けられており、
　前記回転機構は、前記観察手段と前記観察対象物の観察面の角度とが直交するように角度調整できる構造を備えており、
　前記第２の照明手段は、前記角度調整できる角度よりも広い範囲の場所から前記観察対象物及び前記観察手段に向けて光を照射できることを特徴とする、請求項１又は２に記載の観察対象物の端部観察装置である。 The invention according to claim 3
The support is attached via a rotation mechanism that can change the angle of the observation surface of the observation object with respect to the observation means,
The rotation mechanism has a structure capable of adjusting the angle so that the observation means and the angle of the observation surface of the observation object are orthogonal to each other,
The observation object according to claim 1, wherein the second illumination unit can irradiate the observation object and the observation unit with light from a location in a range wider than the angle adjustable. This is an object edge observation device.
　上記観察対象物の端部観察装置を用いれば、
観察対象物の向きを調節する際に、観察対象物と支持部とが平行でない場合でも、支持部の側面によって奥側照明の光が観察手段に届かずに観察できない部分が生じるといったことが無くなる。観察対象物を支持部に置く向きがずれたとしても、所望のコントラストを維持して観察対象物の端部を観察できる。 If the above-mentioned observation part end observation device is used,
When adjusting the direction of the observation object, even if the observation object and the support part are not parallel, the side surface of the support part does not cause a portion where the light from the back illumination does not reach the observation means and cannot be observed. . Even if the orientation of placing the observation object on the support is shifted, the end of the observation object can be observed while maintaining a desired contrast.
　請求項４に記載の発明は、
　前記観察対象物の端部を前記観察手段と直交する方向から観察する第２の観察手段と、
前記第２の観察手段側と対向した場所から前記観察対象物の端部及び前記第２の観察手段に向けて光を照射する第３の照明手段とを備えたことを特徴とする、請求項１～３のいずれか一つに記載の観察対象物の端部観察装置である。 The invention according to claim 4
Second observation means for observing the end of the observation object from a direction orthogonal to the observation means;
The third illuminating means for irradiating light toward the end portion of the observation object and the second observing means from a location facing the second observing means side. An end observation apparatus for an observation object according to any one of 1 to 3.
　上記観察対象物の端部観察装置を用いれば、
観察対象物の端部を２方向から観察することができるようになり、バリが斜め方向に伸びている場合に、１方向からの観察では判断が難しい状況で判断を要する場合に役に立つ。 If the above-mentioned observation part end observation device is used,
It becomes possible to observe the end portion of the observation object from two directions, and when the burr extends in an oblique direction, it is useful when it is difficult to make a judgment by observing from one direction.
　請求項５に記載の発明は、
　前記観察対象物を、前記観察手段及び第２の観察手段に対して相対移動をさせる移動手段と、
　前記相対移動量を検出する移動量検出部と、
　前記観察手段で観察された画像を記録する観察画像記録部とを備え、
　前記相対移動中に、前記移動量検出部からの検出結果に基づいて、所定の位置又は間隔で、観察画像を記録する機能を備えたことを特徴とする、請求項１～４のいずれか一つに記載の観察対象物の端部観察装置である。 The invention described in claim 5
Moving means for moving the observation object relative to the observation means and the second observation means;
A movement amount detection unit for detecting the relative movement amount;
An observation image recording unit that records an image observed by the observation unit;
5. A function of recording an observation image at a predetermined position or interval based on a detection result from the movement amount detection unit during the relative movement. It is an edge part observation apparatus of the observation object as described in one.
　上記観察対象物の端部観察装置を用いれば、観察画像を記録しておけるので、先に観察のみを行い、後で検査や測定を行うといった、タイムシフトができる。また、検査後にその時の判断が正しかったかどうか、後で見直すことができるし、後で別の作業者による確認作業をすることもできる。そうすることで、作業者の違いによる検査基準のばらつきを最小限に抑えたり、経験の浅い作業者に対する費やす教育時間を減らしたりすることもできる。 If the observation device for the end of the observation object is used, an observation image can be recorded, so that time shift can be performed such that only observation is performed first and inspection and measurement are performed later. In addition, it can be reviewed later whether the judgment at that time was correct after the inspection, or a confirmation work by another operator can be performed later. By doing so, it is possible to minimize variations in inspection standards due to differences in workers, and to reduce educational time spent for inexperienced workers.
　また、判断基準を変えた場合、遡って再検査を実施することができる。さらには、後で不合格品であったと判明した場合であっても、製造年月日やロット番号、シリアル番号などの情報とリンクさせておけば、回収作業を容易にすることもできる。 Also, if the criteria are changed, re-inspection can be performed retrospectively. Furthermore, even if it is later determined that the product has been rejected, the collection operation can be facilitated by linking it with information such as the date of manufacture, lot number, serial number and the like.
　請求項６に記載の発明は、
請求項１～４のいずれか一つに記載の観察対象物の観察装置を用いて観察された
前記観察画像を取得する画像取得部と、
前記取得した画像が良品であるか否かを判定するための、良否判定基準情報を登録する良否判定基準情報登録部と、
前記良否判定基準情報に基づいて前記取得した画像が良品であるか否かを判定する観察画像検査部とを備えたことを特徴とする、観察対象物の端部検査装置である。 The invention described in claim 6
An image acquisition unit for acquiring the observation image observed using the observation apparatus for an observation object according to any one of claims 1 to 4;
A pass / fail criterion information registration unit for registering pass / fail criteria information for determining whether or not the acquired image is a non-defective product;
An observation object end inspection device comprising: an observation image inspection unit for determining whether or not the acquired image is a non-defective product based on the quality determination reference information.
　上記観察対象物の端部検査装置を用いれば、従来は作業者が行っていた検査を自動で行うことができる。そうすることで、一定の判断基準に基づいて連続的に検査することができ、作業者の違いや長時間検査に起因する検査基準のばらつきを最小限に抑えることができる。 If the above-mentioned end inspection device for an observation object is used, it is possible to automatically perform an inspection that has been conventionally performed by an operator. By doing so, it is possible to inspect continuously based on a certain judgment criterion, and to minimize variations in inspection criteria due to differences in workers and long-time inspection.
　観察対象物の端部を観察し、微小なバリ又は欠けの検査や測定の精度を高めつつ、費やす時間や労力を減らすことができる。 観 察 By observing the edge of the object to be observed, it is possible to reduce the time and labor spent while increasing the accuracy of inspection and measurement of minute burrs or chips.
本発明を具現化する形態の第１の例を示す斜視図である。It is a perspective view which shows the 1st example of the form which embodies this invention. 本発明を具現化する形態の第１の例を示すシステム構成図である。It is a system configuration figure showing the 1st example of the form which embodies the present invention. 本発明を具現化する形態の第１の例を示すフロー図である。It is a flowchart which shows the 1st example of the form which embodies this invention. 本発明を具現化する形態の第１の例を示す側面図である。It is a side view which shows the 1st example of the form which embodies this invention. 本発明を具現化する形態の第２の例を示す側面図である。It is a side view which shows the 2nd example of the form which embodies this invention. 本発明を具現化する形態における観察画像のイメージ図である。It is an image figure of the observation image in the form which embodies the present invention. 本発明を具現化する形態の第１の例を示す平面図である。It is a top view which shows the 1st example of the form which embodies this invention. 本発明の具現化する形態の第１の例を示す平面図である。It is a top view which shows the 1st example of the form which embodies this invention. 本発明の具現化する形態の第３の例を示す平面図である。It is a top view which shows the 3rd example of the form which embodies this invention. 本発明を具現化する形態の第４の例を示す側面図である。It is a side view which shows the 4th example of the form which embodies this invention. 本発明の具現化する形態の第４の例における観察画像のイメージ図である。It is an image figure of the observation picture in the 4th example of the form which embodies the present invention. 本発明を具現化する形態の第５の例を示す斜視図である。It is a perspective view which shows the 5th example of the form which embodies this invention. 本発明を具現化する形態における観察画像に基づく検査のイメージ図である。It is an image figure of the test | inspection based on the observation image in the form which embodies this invention. 本発明を具現化する形態における観察画像に基づく検査のイメージ図である。It is an image figure of the test | inspection based on the observation image in the form which embodies this invention. 従来の実施形態による観察画像のイメージ図である。It is an image figure of the observation image by the conventional embodiment. 従来の別の実施形態による観察画像のイメージ図である。It is an image figure of the observation image by another conventional embodiment.
　本発明を実施するための形態について、図を用いながら説明する。以下の説明においては、本発明の観察例として、長方形形状の観察対象物の１つの辺の端部を観察する場合について説明を行う。
図１は、本発明を具現化する形態の第１の例を示す斜視図である。
各図において直交座標系の３軸をＸ、Ｙ、Ｚとし、ＸＹ平面を水平面、Ｚ方向を鉛直方向
とする。特にＺ方向は矢印の方向を上とし、その逆方向を下と表現する。 DESCRIPTION OF EMBODIMENTS Embodiments for carrying out the present invention will be described with reference to the drawings. In the following description, the case of observing the end of one side of a rectangular observation object will be described as an observation example of the present invention.
FIG. 1 is a perspective view showing a first example embodying the present invention.
In each figure, the three axes of the orthogonal coordinate system are X, Y, and Z, the XY plane is the horizontal plane, and the Z direction is the vertical direction. In particular, in the Z direction, the direction of the arrow is represented as the top, and the opposite direction is represented as the bottom.
　観察装置１は、ステージ部２と、アライメントカメラ部３と、観察部４と、観察照明部５と、制御部９を含んで、構成されている。 The observation apparatus 1 includes a stage unit 2, an alignment camera unit 3, an observation unit 4, an observation illumination unit 5, and a control unit 9.
　ステージ部２は、装置ベース１１上に取り付けられたＸ軸ステージ２１と、Ｘ軸ステージ２１上に取り付けられたＹ軸ステージ２２と、Ｙ軸ステージ２２上に取り付けられたθ軸モータ２３と、θ軸モータ２３上に取り付けられたテーブル２４とを含んで、構成されており、本発明における支持部を構成している。 The stage unit 2 includes an X-axis stage 21 attached on the apparatus base 11, a Y-axis stage 22 attached on the X-axis stage 21, a θ-axis motor 23 attached on the Y-axis stage 22, and θ And a table 24 mounted on the shaft motor 23, and constitutes a support portion in the present invention.
　Ｘ軸ステージ２１は、その上に取り付けられたＹ軸ステージ２２をＸ方向に移動させることができる。Ｙ軸ステージ２２は、その上に取り付けられたθ軸モータ２３をＹ方向に移動させることができる。θ軸モータ２３は、その上に取り付けられたテーブル２４をθ方向に回転させることができる。 The X axis stage 21 can move the Y axis stage 22 mounted thereon in the X direction. The Y-axis stage 22 can move the θ-axis motor 23 mounted thereon in the Y direction. The θ-axis motor 23 can rotate the table 24 mounted thereon in the θ direction.
　Ｘ軸ステージ２１及びＹ軸ステージ２２としては、モータとボールネジと直動ガイドを組み合わせたスライダ式ステージ機構や、リニアモータと直動ガイドを組み合わせたスライダ式ステージ機構などが例示できる。
また、θ軸モータとしては、回転中心にベアリングを備えて左右方向から外力を加えることでθ方向に回転可能な回転機構や、ＤＤモータを利用した回転機構などが例示できる。 Examples of the X-axis stage 21 and the Y-axis stage 22 include a slider-type stage mechanism that combines a motor, a ball screw, and a linear guide, and a slider-type stage mechanism that combines a linear motor and a linear guide.
Further, examples of the θ-axis motor include a rotation mechanism that is provided with a bearing at the center of rotation and can be rotated in the θ direction by applying an external force from the left and right directions, and a rotation mechanism that uses a DD motor.
　ステージ部２は、前記のような構成をしているので、テーブル２４上に載置された観察対象物１０を、ＸＹ方向に移動させ、さらにθ方向に回転させることができる。 Since the stage unit 2 is configured as described above, the observation object 10 placed on the table 24 can be moved in the XY direction and further rotated in the θ direction.
　テーブル２４は、表面に溝や孔が形成されており、前記溝や孔は、開閉制御用バルブを介して真空源に接続されている。テーブル２４に載置された観察対象物１０は、負圧により吸着保持され、テーブル２４の移動中に位置ずれしないようになっている。
テーブル２４については詳細を後述するが、テーブル２４の側面２５は、光を反射する面で構成されている。 The table 24 has grooves and holes formed on the surface thereof, and the grooves and holes are connected to a vacuum source via an opening / closing control valve. The observation object 10 placed on the table 24 is attracted and held by a negative pressure so that the position of the observation object 10 does not shift during the movement of the table 24.
Although the details of the table 24 will be described later, the side surface 25 of the table 24 is configured by a surface that reflects light.
　アライメントカメラ部３は、カメラ３１，カメラ３６、光学系ユニット３２，３７および照明３３，３８を含んで、構成されている。カメラ３１，３６としては、ＣＣＤやＣＭＯＳ、その他の撮像素子を用いた撮像カメラが例示でき、撮像した画像を映像信号として、制御部９へ出力することができるものであれば良い。 The alignment camera unit 3 includes a camera 31, a camera 36, optical system units 32 and 37, and illuminations 33 and 38. Examples of the cameras 31 and 36 include CCDs, CMOSs, and other imaging cameras using other imaging elements, and any cameras that can output captured images as video signals to the control unit 9 may be used.
　カメラ３１は、観察対象物１０の角部や端部を、Ｚ方向に上方向から下方向に向けて観察することができるように、装置ベース１１上に取り付けられた連結ブラケット１２上に取り付けられている。また、カメラ３６は、観察対象物１０の別の角部や端部を、Ｚ方向上方から下方に向けて観察することができるように、装置ベース１１上に取り付けられた連結ブラケット１４上に取り付けられている。 The camera 31 is attached on the connection bracket 12 attached on the apparatus base 11 so that the corners and ends of the observation object 10 can be observed from the upper direction to the lower direction in the Z direction. ing. The camera 36 is attached on the connection bracket 14 attached on the apparatus base 11 so that another corner or end of the observation object 10 can be observed from the upper side to the lower side in the Z direction. It has been.
　カメラ３１による観察のために、照明３３が、カメラ３１に向けて光線を照射できるように、連結ブラケット１２に取り付けられた連結ブラケット１３上に取り付けられている。また、カメラ３６による観察のために、照明３８が、カメラ３６に向けて光線を照射できるように、連結ブラケット１４に取り付けられた連結ブラケット１５上に取り付けられている。 For observation by the camera 31, the illumination 33 is attached on the connection bracket 13 attached to the connection bracket 12 so that light can be emitted toward the camera 31. Moreover, the illumination 38 is attached on the connection bracket 15 attached to the connection bracket 14 so that light can be irradiated toward the camera 36 for observation by the camera 36.
　観察部４は、カメラ４１、光学系ユニット４２を含み、本発明における観察手段を構成しており、観察対象物１０の端部を、Ｘ方向に矢印の方向から矢尻の方向に向けて観察することができるように、装置ベース１１上に取り付けられた連結ブラケット１６上に取り付けられている。 The observation unit 4 includes a camera 41 and an optical system unit 42 and constitutes observation means in the present invention, and observes the end of the observation target object 10 in the X direction from the arrow direction to the arrowhead direction. In order to be able to do so, it is mounted on a connecting bracket 16 mounted on the device base 11.
　観察照明部５は、手前側照明５５及び奥側照明５１、必要に応じて別形態の奥側照明５３を含んで構成されている。奥側照明５１や奥側照明５３は、カメラ４１に向けて光を照射することができるように、装置ベース１１上に取り付けられた連結ブラケット１７、１８（不図示）に取り付けられている。 The observation illumination unit 5 includes a near-side illumination 55, a back-side illumination 51, and another form of a back-side illumination 53 as necessary. The back side illumination 51 and the back side illumination 53 are attached to connection brackets 17 and 18 (not shown) attached on the apparatus base 11 so that light can be emitted toward the camera 41.
　光学系ユニット３２，３７，４２は、観察対象物１０の端部に焦点を合わせて、カメラ３１，３６、４１にて画像を観察することができるようにしたものであって、レンズやミラーなどの光学系部品で構成されるものであれば良い。 The optical system units 32, 37, and 42 are configured to focus on the end of the observation target object 10 so that images can be observed with the cameras 31, 36, and 41. Any optical system component may be used.
　照明３３，３８は、ＬＥＤ、ハロゲン、白熱電球、蛍光灯その他の発光手段が例示でき、前記カメラにて、観察対象物１０の表面のパターンを観察することができるように、カメラ４０の感度波長に合わせて、所定の波長を含む光線を照射するものであれば良い。 Illuminations 33 and 38 can be exemplified by LEDs, halogens, incandescent bulbs, fluorescent lamps and other light emitting means. The sensitivity wavelength of the camera 40 can be observed with the camera so that the pattern of the surface of the observation object 10 can be observed. Any light that irradiates a light beam having a predetermined wavelength may be used.
　また光線の照射形態は、連続発光、ストロボ発光を選択でき、観察対象物１０、観察視野の寸法、カメラの受光感度、発光光量及び発光時間などを考慮して選定すれば良い。 Further, the light irradiation form can be selected from continuous light emission and strobe light emission, and may be selected in consideration of the observation object 10, the size of the observation visual field, the light reception sensitivity of the camera, the light emission amount and the light emission time.
　制御部９は、詳細を後述するが、情報入力手段９１と、情報出力手段９２と、発報手段９３と、その他の制御機器を含んで構成されている。 The control unit 9 includes an information input unit 91, an information output unit 92, a notification unit 93, and other control devices, details of which will be described later.
　図２は、本発明を具現化する形態の第１の例を示すシステム構成図である。図２に示すように、上述した観察装置１のステージ部２、アライメントカメラ部３、観察部４、観察照明部５の各機器は、制御部９の各機器と接続されている。 FIG. 2 is a system configuration diagram showing a first example of a form embodying the present invention. As illustrated in FIG. 2, each device of the stage unit 2, the alignment camera unit 3, the observation unit 4, and the observation illumination unit 5 of the observation apparatus 1 described above is connected to each device of the control unit 9.
　制御部９には、制御用コンピュータ９０と、情報入力手段９１と、情報出力手段９２と、発報手段９３と、情報記録手段９４と、機器制御ユニット９５とが接続されて含まれている。 The control unit 9 includes a control computer 90, an information input unit 91, an information output unit 92, a reporting unit 93, an information recording unit 94, and a device control unit 95.
　制御用コンピュータ９０としては、マイコン、パソコン、ワークステーションなどの、数値演算ユニットが搭載されたものが例示される。
情報入力手段９１としては、キーボードやマウスやスイッチなどが例示される。
情報出力手段９２としては、画像表示ディスプレイやランプなどが例示される。 Examples of the control computer 90 include a computer equipped with a numerical operation unit such as a microcomputer, a personal computer, or a workstation.
Examples of the information input unit 91 include a keyboard, a mouse, and a switch.
Examples of the information output unit 92 include an image display display and a lamp.
　発報手段９３としては、ブザーやスピーカ、ランプなど、作業者に注意喚起をすることができるものが例示される。
情報記録手段９４としては、メモリーカードやデータディスクなどの、半導体記録媒体や磁気記録媒体や光磁気記録媒体などが例示される。
機器制御ユニット９５としては、プログラマブルコントローラやモーションコントローラと呼ばれる機器などが例示される。 Examples of the reporting means 93 include a buzzer, a speaker, and a lamp that can alert the worker.
Examples of the information recording means 94 include a semiconductor recording medium, a magnetic recording medium, a magneto-optical recording medium, such as a memory card and a data disk.
Examples of the device control unit 95 include devices called programmable controllers and motion controllers.
　制御用コンピュータ９０には、画像処理ユニット（不図示）を介して、カメラ３１，３６，４１から出力された映像信号が入力される。 Video signals output from the cameras 31, 36 and 41 are input to the control computer 90 via an image processing unit (not shown).
　機器制御ユニット９５には、Ｘ軸ステージ２１と、Ｙ軸ステージ２２と、θ軸モータ２３とが接続されている。また、機器制御ユニット９５には、照明３３，３８，５１，５３，５５の光量をそれぞれ個別に調節するための光量調整ユニット３４，３９，５２，５４，５６が接続されている。これら光量調節ユニットにおける照明の光量調節の方式としては、印可する電圧や電流を調節したり、電圧や電流の印可時間を調節したりする方式を例示できる。 The device control unit 95 is connected to the X-axis stage 21, the Y-axis stage 22, and the θ-axis motor 23. Further, the device control unit 95 is connected with light amount adjustment units 34, 39, 52, 54, 56 for individually adjusting the light amounts of the illuminations 33, 38, 51, 53, 55. Examples of a method for adjusting the amount of illumination light in these light amount adjustment units include a method for adjusting an applied voltage or current, or adjusting a voltage or current application time.
　機器制御ユニット９５は、その他の制御機器（図示せず）と接続されており、それらに対して制御用信号を与えることにより、各機器を動作させたり静止させたりすることができるようになっている。 The device control unit 95 is connected to other control devices (not shown), and by giving control signals to them, each device can be operated or stopped. Yes.
　［観察カメラによる端面観察フロー］
図３は、本発明を具現化する形態の第１の例を示すフロー図である。図３では、観察対象物１０の端部を観察する一連のフローが、ステップ毎に示されている。 [End face observation flow with observation camera]
FIG. 3 is a flowchart showing a first example of a form embodying the present invention. In FIG. 3, a series of flows for observing the end of the observation object 10 is shown for each step.
　先ず、観察対象物１０をテーブル２４に載置する。このとき、観察対象物１０の端部は、端部より内側を支持する形態、つまりテーブル２４からオーバーハングした状態で、載置する（ｓ１０１）。 First, the observation object 10 is placed on the table 24. At this time, the end portion of the observation object 10 is placed in a form that supports the inside from the end portion, that is, in an overhanging state from the table 24 (s101).
　次に、観察対象物１０をテーブル２４にて吸着保持させ（ｓ１０２）、観察対象物１０の端部をアライメントカメラ部３のカメラ３１，３６で観察したり、位置計測器で測定したりして、観察対象物１０の角部や端部の位置ずれを計測し（ｓ１０３）、テーブル２４に載置された観察対象物１０の位置合わせを行う（ｓ１０４）。 Next, the observation object 10 is sucked and held on the table 24 (s102), and the end of the observation object 10 is observed with the cameras 31 and 36 of the alignment camera unit 3 or measured with a position measuring device. Then, the positional deviations of the corners and ends of the observation object 10 are measured (s103), and the observation object 10 placed on the table 24 is aligned (s104).
　次に、Ｘ軸ステージ２１を移動させて、テーブル２４をＸ方向に移動させながら、観察対象物１０の端部を観察し（ｓ１０５）、必要に応じて観察画像を記録する（ｓ１１５）。観察対象物１０の端部の１辺について観察が終了したかどうかを判断し（ｓ１０６）、観察途中であれば前記ステップｓ１０５へ戻り、観察終了すれば、全辺の観察が終了したかどうかを判断する（ｓ１０７）。 Next, the end of the observation object 10 is observed while moving the X-axis stage 21 and moving the table 24 in the X direction (s105), and an observation image is recorded as necessary (s115). It is determined whether or not observation has been completed for one side of the end of the observation object 10 (s106). If observation is in progress, the process returns to step s105, and if observation is completed, whether or not observation of all sides has been completed. Judgment is made (s107).
　全辺の観察が終了しておらず、他辺を観察する必要があれば、テーブル２４を９０度回転させ（ｓ１０８）、前記ステップｓ１０５へ戻り、次の観察対象となる辺を観察する。
全辺の観察が終了していれば、観察対象物１０の吸着を解除し（ｓ１０９）、テーブル２４から観察対象物１０を取り出す（ｓ１１０）。
他の観察対象物１０を観察する場合は、前記ステップｓ１０１以降を同様に行う。 If the observation of all sides is not completed and it is necessary to observe the other sides, the table 24 is rotated 90 degrees (s108), and the process returns to step s105 to observe the next observation target side.
If the observation of all sides is completed, the suction of the observation object 10 is released (s109), and the observation object 10 is taken out from the table 24 (s110).
When observing another observation object 10, the steps s101 and after are performed in the same manner.
　［観察カメラ及び照明詳細］
（１）奥側照明と手前側照明
図４は、本発明を具現化する形態の第１の例を示す側面図である。
観察対象物１０は、測定対象となる端部がテーブル２４と触れないように、オーバーハングした状態で、テーブル２４の上に載置されている。
レンズ４２は、対物レンズ４２ａ及び鏡筒４２ｂで構成されており、カメラ４１で観察対象物１０の端部を観察できるように取り付けられている。 [Details of observation camera and lighting]
(1) Back side illumination and near side illumination FIG. 4 is a side view showing a first example of a form embodying the present invention.
The observation object 10 is placed on the table 24 in an overhanged state so that the end to be measured does not touch the table 24.
The lens 42 includes an objective lens 42a and a lens barrel 42b, and is attached so that the end portion of the observation object 10 can be observed by the camera 41.
　奥側照明５１の発光部５１ｈから発せられた光は、観察対象物１０の周囲を通過し、カメラ４１の受光部４１ｓに入る光５１ａと、観察対象物１０に干渉し、受光部４１ｓに届かない光５１ｂと、テーブル２４に干渉し、受光部４１ｓに届かない光５１ｃを含んで構成されている。 The light emitted from the light emitting unit 51h of the back illumination 51 passes through the periphery of the observation target 10, interferes with the light 51a entering the light receiving unit 41s of the camera 41, and the observation target 10, and reaches the light receiving unit 41s. Light 51b and light 51c that interferes with the table 24 and does not reach the light receiving unit 41s.
　レンズ４２の近傍には、手前側照明５５が観察対象物１０の支持部であるテーブル２４の側面２５に向けて光が照射されるように取り付けられている。
手前側照明５５の発光面５５ｈから照射された光５５ａの一部は、テーブル側面２５に備えた反射面にて反射され、カメラ４１の受光部４１ｓに入る光５５ｂとなる。
そうすることで、カメラ４１では、前記光５１ａと前記光５５ｂを用いて、観察対象物１０の端部のバリや欠けが観察される。 In the vicinity of the lens 42, a near-side illumination 55 is attached so that light is irradiated toward the side surface 25 of the table 24 that is a support portion of the observation object 10.
A part of the light 55 a emitted from the light emitting surface 55 h of the front side illumination 55 is reflected by the reflecting surface provided on the table side surface 25 and becomes light 55 b entering the light receiving part 41 s of the camera 41.
By doing so, in the camera 41, burrs and chips at the end of the observation object 10 are observed using the light 51a and the light 55b.
　本発明において、手前側照明５５は第１の照明手段を、奥側照明５１は第２の照明手段を構成する。 In the present invention, the front side illumination 55 constitutes the first illumination means, and the back side illumination 51 constitutes the second illumination means.
　（２）奥側照明と同軸照明
図５は、本発明を具現化する形態の第２の例を示す側面図である。
観察対象物１０は、測定対象となる端部がテーブル２４と触れないように、オーバーハングした状態で、テーブル２４の上に載置されている。
対物レンズ４２ａ、鏡筒４２ｂ及びハーフミラー４２ｃで構成されるレンズ４２Ｂと、レンズ４２Ｂの側面に取り付けられた同軸照明５７とを含んで構成されている。 (2) Back side illumination and coaxial illumination FIG. 5 is a side view showing a second example of the embodiment embodying the present invention.
The observation object 10 is placed on the table 24 in an overhanged state so that the end to be measured does not touch the table 24.
The lens 42B includes an objective lens 42a, a lens barrel 42b, and a half mirror 42c, and a coaxial illumination 57 attached to a side surface of the lens 42B.
　奥側照明５１の発光部５１ｈから発せられた光は、観察対象物１０の周囲を通過し、カメラ４１の受光部４１ｓに入射する光５１ａと、観察対象物１０に干渉し、受光部４１ｓに届かず遮光される光５１ｂと、テーブル２４に干渉し、受光部４１ｓに届かず遮光される光５１ｃを含んで構成されている。 The light emitted from the light emitting part 51h of the back side illumination 51 passes around the observation object 10 and interferes with the light 51a incident on the light receiving part 41s of the camera 41 and the observation object 10, and enters the light receiving part 41s. The light 51b that does not reach and is blocked and the light 51c that interferes with the table 24 and does not reach the light receiving unit 41s and is blocked are included.
　レンズ４２Ｂの側面に取り付けられた同軸照明５７の発光部５７ｈから発せられた光は、ハーフミラー４２ｃで反射され、観察対象物１０に照射されずに拡散される光５７ａと、観察対象物１０の端部で吸収あるいは拡散されて受光部４１ｓには届かない光５７ｂと、テーブル側面２５の反射面で反射されてカメラ４１の受光部４１ｓに入射する光５７ｃとなる。そうすることで、カメラ４１では、前記光５１ａと前記光５７ｃを用いて、観察対象物１０の端部のバリや欠けが観察できる。 The light emitted from the light emitting portion 57h of the coaxial illumination 57 attached to the side surface of the lens 42B is reflected by the half mirror 42c and diffused without being irradiated on the observation target 10, and the observation target 10 Light 57b that is absorbed or diffused at the end and does not reach the light receiving portion 41s, and light 57c that is reflected by the reflecting surface of the table side surface 25 and enters the light receiving portion 41s of the camera 41. By doing so, the camera 41 can observe burrs and chips at the end of the observation object 10 using the light 51a and the light 57c.
　本発明において、同軸照明５７は第１の照明手段を構成する。 In the present invention, the coaxial illumination 57 constitutes a first illumination means.
　［テーブル詳細構造］
テーブル２４の側面２５は、照明の光が反射するような処理を施していることが好ましい。例えば、テーブル側面２５を研磨して光を反射しやすくしても良いし、反射材料を塗布したり、貼り付けたりしても良い。
また、テーブル側面２５に、反射部材を取り付けたり、貼り付けたりしても良い。 [Detailed structure of table]
It is preferable that the side surface 25 of the table 24 is processed so that the illumination light is reflected. For example, the table side surface 25 may be polished to easily reflect light, or a reflective material may be applied or pasted.
Further, a reflecting member may be attached to or attached to the table side surface 25.
　そうすることで、カメラ側から観察対象物１０に向けて照射された光が、テーブル側面２５の反射面で反射し、カメラに入射される。このとき、観察対象物１０の周りが明るく、観察対象物１０が暗い影となって観察できる。そのため、観察対象物１０の端部にバリがあると、バリ部分が暗い画像として映し出され、バリがあることが分かる。一方、観察対象物１０の端部に欠けがあると、背後からの光の回折などにより、欠け部分が明るい画像として映し出され、欠けがあることが分かる。 By doing so, the light irradiated from the camera side toward the observation object 10 is reflected by the reflecting surface of the table side surface 25 and is incident on the camera. At this time, the periphery of the observation object 10 is bright and the observation object 10 can be observed as a dark shadow. Therefore, if there is a burr at the end of the observation object 10, the burr portion is projected as a dark image, and it can be seen that there is a burr. On the other hand, if there is a chip at the end of the observation object 10, the chipped portion is projected as a bright image due to diffraction of light from behind, and it can be seen that there is a chip.
　図６は、本発明を具現化する形態における観察画像のイメージ図である。
図６に示す画像は、カメラ４１の観察視野４４内に、カメラ４１で観察した観察対象物１０の端部の観察画像が表示されているイメージを示したものである。そして、観察視野４４の上方と、下方の一部とは、奥側照明５１から発せられた光を背景とする領域１５０であり、観察視野４４の下方の一部は、テーブルの側面２５の反射面で反射した光を背景とする領域１５１である。 FIG. 6 is an image view of an observation image in a form embodying the present invention.
The image shown in FIG. 6 shows an image in which the observation image of the end of the observation object 10 observed with the camera 41 is displayed in the observation visual field 44 of the camera 41. The upper part of the observation visual field 44 and a part of the lower part of the observation visual field 44 are areas 150 with the light emitted from the back side illumination 51 as a background, and the lower part of the observation visual field 44 is a reflection of the side surface 25 of the table. This is an area 151 whose background is the light reflected by the surface.
　観察対象物１０は、図１１及び図１２を用いて前述した２次電池用電極シートと同様に、金属泊１００の両側に活物質１０１が塗布されている。活物質１０１には、バリ１１０，１１１，１１４や、欠け１２０，１２１，１２４が含まれている。バリは、背景からの光が遮られるため暗部となり、欠けは背景の光が回り込んで明部となる。 The observation object 10 has the active material 101 applied on both sides of the metal stay 100, similarly to the electrode sheet for the secondary battery described above with reference to FIGS. The active material 101 includes burrs 110, 111, 114 and chips 120, 121, 124. The burr becomes a dark part because light from the background is blocked, and the chipped part becomes a bright part because the background light wraps around.
　奥側照明と、テーブル側面に向けて光を照射する照明とは、独立して明るさを調節できるようにすることが好ましい。そして、領域１５０と、領域１５１とが同じ明るさになるように、光量調節ユニットで明るさを調節する。そうすることで、上記領域１５０と１５１との明るさが同じになり、観察エリア内の全てにおいて同じ条件で、観察対象物１０の端部のバリや欠けの有無や大きさなどを検査することができる。 It is preferable that the back side illumination and the illumination that irradiates light toward the side of the table can be adjusted independently. Then, the brightness is adjusted by the light amount adjustment unit so that the area 150 and the area 151 have the same brightness. By doing so, the brightness of the above-mentioned areas 150 and 151 becomes the same, and the presence / absence or size of the end of the observation object 10 is inspected under the same conditions in all of the observation area. Can do.
　［別形態の照明の使用］
図７Ａ及び図７Ｂは、本発明を具現化する形態の第１の例を示す平面図である。
Ｘ軸ステージ２１上のθ軸モータ２３（Ｙ軸ステージ２２は不図示）の上に取り付けられたテーブル２４の上に、観察対象物１０が載置されている。
このとき、観察対象物１０の観察面１０ｓとテーブル２４の側面２４ｓとは直交していない場合について説明をする。 [Use of another form of lighting]
7A and 7B are plan views showing a first example of a form embodying the present invention.
The observation object 10 is placed on a table 24 mounted on a θ-axis motor 23 (Y-axis stage 22 is not shown) on the X-axis stage 21.
At this time, the case where the observation surface 10s of the observation object 10 and the side surface 24s of the table 24 are not orthogonal to each other will be described.
　この状態でＸ軸ステージ２１を用いて、テーブル２４をＸ方向の矢印から矢尻方向に向けて動かすと、カメラ４１及びレンズ４２と、観察面１０ｓとの間隔が変化してしまう。そうすると、観察画像の焦点がずれてしまう。それを解消するために、θモータ２３を回転中心２３ｃを中心に、θ方向に回転させて、Ｘ軸ステージ２１の走行方向と観察面１０ｓとが平行になるように調節する（上述のステップｓ１０２～ｓ１０４を参照）。 In this state, when the table 24 is moved from the X direction arrow to the arrowhead direction using the X axis stage 21, the distance between the camera 41 and the lens 42 and the observation surface 10s changes. If it does so, the focus of an observation image will shift. In order to solve this problem, the θ motor 23 is rotated about the rotation center 23c in the θ direction so that the traveling direction of the X-axis stage 21 and the observation surface 10s are parallel to each other (step s102 described above). See s104).
　このようにすれば、図７Ｂで示すような姿勢となり、テーブル２４をＸ方向に動かしても、カメラ４１及びレンズ４２と、観察面１０ｓとの間隔は一定に保たれる。
しかし、この場合、奥側照明５１の発光部５１ｈから照射される光のうち、テーブル角部２４ｃで遮られて、カメラ４１に光が届かない位置がある。その場合、その部分の観察ができず、バリや欠けがあったとしても把握できない。 In this way, the posture is as shown in FIG. 7B, and even when the table 24 is moved in the X direction, the distance between the camera 41 and the lens 42 and the observation surface 10s is kept constant.
However, in this case, there is a position where light from the light emitting portion 51 h of the back side illumination 51 is blocked by the table corner portion 24 c and does not reach the camera 41. In that case, the portion cannot be observed, and even if there are burrs or chips, it cannot be grasped.
　図７Ｃは、本発明を具現化する形態の第３の例を示す平面図である。
上述の状態において、テーブル２４がθ方向に角度調整のために回転した角度よりも広い範囲の場所から、奥側照明５３をカメラ４１及びレンズ４２に向けて光を照射するようにしている。そうすれば、観察対象物１０の観察面１０ｓとテーブル端面２４ｓとが直交していない場合でも、奥側照明５３から照射された光は、テーブル角部２４ｃで遮られることなく、観察部４のカメラ４１に入射される。 FIG. 7C is a plan view showing a third example of the embodiment embodying the present invention.
In the above-described state, light is emitted from the back side illumination 53 toward the camera 41 and the lens 42 from a location wider than the angle at which the table 24 is rotated in the θ direction for angle adjustment. Then, even when the observation surface 10s of the observation object 10 and the table end surface 24s are not orthogonal to each other, the light emitted from the back side illumination 53 is not blocked by the table corner portion 24c and is not blocked by the observation portion 4. The light enters the camera 41.
　図７Ｃでは、奥側照明５３がを奥側照明５１に対して、Ｘ方向の位置とθ方向の角度とが変化している様子を示している。このとき、奥側照明５３は、取付ブラケットをＸ方向及びθ方向に移動可能なステージの上に取り付けて、移動及び回転可能な構造にしても良い。あるいは、Ｘ方向の寸法に複数の照明を並べて配置したり、Ｘ方向に発光部の寸法が長く発光面積の広い照明を１つ用いて、同様の効果を得られるようにしても良い。 FIG. 7C shows a state in which the position in the X direction and the angle in the θ direction are changed with respect to the back side illumination 51. At this time, the back side illumination 53 may be configured to be movable and rotatable by attaching the mounting bracket on a stage that can move in the X direction and the θ direction. Alternatively, the same effect may be obtained by arranging a plurality of lights side by side in the dimension in the X direction, or by using one light having a large light emitting area in the X direction and a wide light emitting area.
　［第２のカメラ併用による直交２方向観察］
図８Ａは、本発明を具現化する形態の第４の例を示す側面図である。
第１のカメラ４１ａにはレンズ４２ａが取り付けられており、観察対象物１０の側面端部を含む、観察エリア４４ａを観察することができる。
第２のカメラ４１ｂにはレンズ４２ｂが取り付けられており、観察対象物１０の上面角部又は上面端部を含む、観察エリア４４ｂを観察することができる。 [Orthogonal two-way observation using a second camera]
FIG. 8A is a side view showing a fourth example of the embodiment embodying the present invention.
The lens 42a is attached to the first camera 41a, and the observation area 44a including the side edge of the observation object 10 can be observed.
The lens 42b is attached to the second camera 41b, and the observation area 44b including the upper surface corner or upper surface edge of the observation object 10 can be observed.
　本実施形態では、観察対象物１０の端部を、側面と上面の２方向から観察することができる。この第２のカメラ４１ｂは、第１のカメラ４１ａ及び観察対象物１０の観察時の移動方向とのなす角度を９０度とすることが好ましい。 In the present embodiment, the end of the observation object 10 can be observed from two directions, that is, a side surface and an upper surface. The second camera 41b preferably has an angle formed by the first camera 41a and the moving direction during observation of the observation object 10 of 90 degrees.
　そうすれば、バリが第１のカメラ４１ａや第２のカメラ４１ｂに向かって伸びている場合でも、他方のカメラで全長を観察することができる。また、斜めに伸びている場合でも、互いのカメラで観察した画像から斜めに伸びていることを把握したり、計測した見かけの寸法から実際の寸法を計算して求めることもできる。 Then, even when the burr extends toward the first camera 41a or the second camera 41b, the other camera can observe the full length. Further, even when extending obliquely, it is possible to grasp that the image extends obliquely from the images observed by the cameras, or to calculate the actual dimensions from the measured apparent dimensions.
　図８Ｂは、本発明の具現化する形態の第４の例における観察画像のイメージ図である。
上段が第２のカメラ４１ｂで観察した観察エリア４４ｂの画像、下段が第１のカメラ４１ａで観察した観察エリア４４ａの画像である。
観察エリア４４ａの画像は図６で示した画像と同様であるが、第２のカメラ４１ｂを用いて観察することにより、第１のカメラ４１ａのみの観察では見つからなかった、微小なバリ１１５を観察できるようになったり、バリ１１１が斜めに伸びていることが分かったりする。また、欠け１２１においては、幅と深さだけでなく、奥行きも分かるようになる。 FIG. 8B is an image diagram of an observation image in the fourth example of the embodiment of the present invention.
The upper row is an image of the observation area 44b observed with the second camera 41b, and the lower row is an image of the observation area 44a observed with the first camera 41a.
The image of the observation area 44a is the same as the image shown in FIG. 6, but by observing with the second camera 41b, the minute burr 115 that was not found by the observation with only the first camera 41a is observed. It becomes possible to understand that the burr 111 extends obliquely. Further, in the chip 121, not only the width and depth but also the depth can be understood.
　この第２のカメラ４１ｂは、図１で示したアライメントマークを観察するカメラ３１と、共通としても良い。そうすれば、カメラ台数を増やすことなく、観察対象物１０の端部を２方向から観察することができる。
或いは、上記実施形態に替えて、第２のカメラ４１ｂを、アライメントマークを観察するカメラ３１とは別のカメラを用意しても良い。そうすることで、アライメントマークと観察対象物のそれぞれの観察に適した視野、倍率、感度を備えるカメラとすることができるので、選択の自由度が増す。 The second camera 41b may be shared with the camera 31 that observes the alignment mark shown in FIG. If it does so, the edge part of the observation target object 10 can be observed from two directions, without increasing the number of cameras.
Alternatively, instead of the above embodiment, a second camera 41b may be prepared that is different from the camera 31 that observes the alignment mark. By doing so, a camera having a field of view, magnification, and sensitivity suitable for the observation of the alignment mark and the observation object can be obtained, and the degree of freedom of selection increases.
　［対向する２辺同時観察］
　図９は、本発明を具現化する形態の第５の例を示す斜視図である。
帯状の観察対象物１０ｂが矢印１０ｆで示す方向に搬送されており、第１のカメラ４１ａと、レンズ４２ａと、対辺観察用のカメラ４１ｃと、レンズ４２ｃとが、帯状の観察対象物１０ｂの両端部の所定の範囲４４ａ、４４ｃが観察できるように配置されている。
また、奥側照明５１ａと奥側照明５１ｃとが、一点鎖線４３ａ、４３ｂでそれぞれの対応を示すように、第１のカメラ４１ａと対辺観察用のカメラ４１ｃと、帯状の観察対象物１０に対向するように配置されている。そのため、観察対象物１０ｂの対向する２辺を同時に観察することができる。 [Simultaneous observation of two opposing sides]
FIG. 9 is a perspective view showing a fifth example embodying the present invention.
The band-shaped observation object 10b is conveyed in the direction indicated by the arrow 10f, and the first camera 41a, the lens 42a, the opposite-side observation camera 41c, and the lens 42c are both ends of the band-shaped observation object 10b. The predetermined ranges 44a and 44c are arranged so that they can be observed.
Further, the back side illumination 51a and the back side illumination 51c are opposed to the first camera 41a, the opposite-side observation camera 41c, and the strip-shaped observation object 10, as indicated by the alternate long and short dash lines 43a and 43b. Are arranged to be. Therefore, two opposing sides of the observation object 10b can be observed simultaneously.
　このとき、帯状の観察対象物１０ｂは、両端部に比べて中央部がたわむ場合がある。たわみが生じると、奥側照明のみを用いて観察した場合、たわみ部分による影が生じ、帯状の観察対象物１０ｂの下面側のエッジ端部の観察が困難となる。そのため、たわみを無くすためにローラなどの回転体２７，２８で支持する。さらに、帯状の観察対象物１０ｂを水平状態に保つと共に、矢印２７ｒ，２８ｒで示す方向に回転させ、帯状の観察対象物１０ｂを支持する部材の側面２７ｓ、２８ｓには、この部分が反射面となるように反射する部材を取り付ける。 At this time, the center part of the band-shaped observation object 10b may bend compared to both ends. When the deflection occurs, when the observation is performed using only the back side illumination, a shadow is caused by the deflection portion, and it is difficult to observe the edge end on the lower surface side of the band-shaped observation object 10b. Therefore, in order to eliminate deflection, it supports with rotating bodies 27 and 28, such as a roller. Furthermore, while maintaining the strip-shaped observation object 10b in a horizontal state and rotating it in the direction indicated by the arrows 27r and 28r, this portion is formed on the side surfaces 27s and 28s of the member that supports the band-shaped observation object 10b. Attach a reflective member.
　そうすることで、上述の本発明を具現化する形態の第１又は第２の例に示したものと同じ作用がはたらく。その結果、帯状の観察対象物１０ｂの下面に回転体２７，２８を配置しても、バリや欠けのみを連続的に観察し続けることが可能となる。
このとき、帯状の観察対象物１０ｂを支持する部材の側面２７ｓ、２８ｓの側面には前記反射する部材を取り付ける替わりに、部材の側面２７ｓ，２８ｓが反射面となるように、光を反射するような加工を施し、同様の作用が得られるようにしても良い。 By doing so, the same operation as that shown in the first or second example of the embodiment embodying the present invention is performed. As a result, even if the rotating bodies 27 and 28 are arranged on the lower surface of the strip-shaped observation object 10b, it is possible to continuously observe only burrs and chips.
At this time, instead of attaching the reflecting member to the side surfaces 27s and 28s of the member supporting the band-shaped observation object 10b, the light is reflected so that the side surfaces 27s and 28s of the member become reflecting surfaces. May be processed to obtain the same effect.
　また、帯状の観察対象物１０ｂの両端部を観察する場合にも、実施形態の第４の例を適用することができる。そうすることで、斜め方向に伸びるバリが存在しても、２方向からの観察によって的確な判断が行える様になる。 Also, the fourth example of the embodiment can be applied when observing both ends of the strip-shaped observation object 10b. By doing so, even if burrs extending in an oblique direction exist, an accurate determination can be made by observation from two directions.
　上述のいずれの実施形態においても、観察画像を記録する画像記録部を用いることで、テーブル２４を移動させながら、Ｘ軸ステージ２１や搬送ローラなどの移動手段からの移動量を検出し、所定の場所や間隔で観察画像を記録することができる。このとき、観察をし始めた場所からの位置情報や、移動間隔に応じた位置情報などを、記録した観察画像データとを関連づけておくことがより好ましい。あるいは、観察対象物１０の位置合わせのステップ（ｓ１０１０～ｓ１０４）で得られた観察対象物１０の角部の位置情報に基づくシートの端部からの距離情報と、記録した観察画像データとを関連づけても良い。 In any of the above-described embodiments, by using the image recording unit that records the observation image, the movement amount from the moving means such as the X-axis stage 21 and the transport roller is detected while moving the table 24, and a predetermined amount is detected. Observation images can be recorded at places and intervals. At this time, it is more preferable to associate the position information from the place where the observation is started, the position information corresponding to the movement interval, etc. with the recorded observation image data. Alternatively, the distance information from the edge of the sheet based on the position information of the corners of the observation object 10 obtained in the alignment step (s1010 to s104) of the observation object 10 is associated with the recorded observation image data. May be.
　前記移動量検出手段としては、Ｘ軸ステージ２１やＹ軸ステージ２２の移動量やθ軸モータ２３の回転角度、回転体２７，２８の回転角度を光学的又は磁気的に検出し、移動量に応じた信号を出力するエンコーダなどが例示できる。 As the movement amount detecting means, the movement amount of the X-axis stage 21 and the Y-axis stage 22, the rotation angle of the θ-axis motor 23, and the rotation angle of the rotating bodies 27 and 28 are detected optically or magnetically to obtain the movement amount. An encoder that outputs a corresponding signal can be exemplified.
　そうすることで、観察対象物の端面の先に観察を行い、その観察画像に基づいて検査を実施することができる。そして、前記移動量検出手段によって得られた情報により、観察画像が観察対象物１０のどの部分にあるかが紐付けされているため、不良部分や、再検査を要する部分が観察後でも特定できる。あるいは、改めて抜き出して再検査したり、再検査が必要か判断したりすることもできる。そうすれば、検査を中断することなく、再検査品として一時保存させたり、不良部分を修復をしたり、不良と判断された部分を廃棄したりして、不良原因が懸念される製品を次工程に送らないような処置を行うことができる。 By doing so, it is possible to observe at the tip of the end face of the observation object and to inspect based on the observation image. Since the information obtained by the movement amount detecting means associates with which part of the observation object 10 the observation image is located, a defective part or a part requiring reexamination can be identified even after observation. . Alternatively, it can be extracted again and reinspected, or it can be determined whether reinspection is necessary. Then, without interrupting the inspection, you can temporarily store it as a re-inspection product, repair the defective part, or discard the part judged to be defective. It is possible to perform a treatment not to be sent to the process.
　上述では、取得した観察画像に基づいて、バリや欠けの検査を行う観察装置１について説明をしたが、取得した観察画像に基づいて、バリの高さや太さ、欠けの幅や深さなどの寸法を測定することにも適用できる。また本発明は、バリや欠けの観察・検査・寸法測定にとらわれず、観察対象物の端部に付着した微小な異物や、端部の成形物の観察・検査・寸法測定にも適用することができる。 In the above description, the observation apparatus 1 for inspecting burrs and chips based on the acquired observation image has been described. However, based on the acquired observation images, the height and thickness of the burrs, the width and depth of the chips, and the like. It can also be applied to measuring dimensions. In addition, the present invention is not limited to observation / inspection / dimension measurement of burrs and chips, but can also be applied to observation / inspection / dimension measurement of minute foreign matter adhering to the end of the object to be observed and the molded product at the end. Can do.
　［本発明に係る検査装置］
本発明を具現化する検査装置について詳細を述べる。本発明に係る検査装置は、画像取得部と、良否判定基準情報登録部と、観察画像検査部とを含んで構成されている。
前記画像取得部は、制御用コンピュータ９０に内蔵の画像処理機能や、画像処理ユニットを用いて構成したり、それらを連携させて構成したりすることができ、上述の発明に係る観察対象物の端部観察装置を用いて観察された画像を取得する機能を有している。
良否判定基準情報登録部は、情報記録手段９４を用いて構成することができ、前記取得した画像が良品であるか否かを判定するための、良否判定基準情報を登録する機能を有している。 [Inspection apparatus according to the present invention]
The inspection apparatus embodying the present invention will be described in detail. The inspection apparatus according to the present invention includes an image acquisition unit, a pass / fail criterion information registration unit, and an observation image inspection unit.
The image acquisition unit can be configured by using an image processing function built in the control computer 90 or an image processing unit, or can be configured by linking them. It has a function of acquiring an image observed using the edge observation device.
The pass / fail judgment reference information registration unit can be configured by using the information recording means 94 and has a function of registering pass / fail judgment reference information for judging whether or not the acquired image is a non-defective product. Yes.
　観察画像検査部は、制御用コンピュータ９０に内蔵の画像処理機能や、画像処理ユニットを用いて構成したり、或いはそれらを連携させて構成することができ、
前記良否判定基準情報に基づいて前記取得した画像が良品であるか否かを判定する機能を有している。
従って、本発明に係る検査装置は、上述の発明に係る観察対象物の端部観察装置を用いて観察された画像を取得し、予め登録しておいた良否判定基準情報に基づいて、前記取得した画像が良品か否かを判定する機能を有している。 The observation image inspection unit can be configured by using an image processing function built in the control computer 90, an image processing unit, or by linking them together.
It has a function of determining whether or not the acquired image is a non-defective product based on the quality determination criterion information.
Therefore, the inspection apparatus according to the present invention acquires an image observed using the end observation apparatus for the observation object according to the above-described invention, and acquires the image based on the quality criterion information registered in advance. It has a function of determining whether or not the obtained image is a non-defective product.
　［検査の具体例］
図１０Ａは、本発明を具現化する形態における観察画像に基づく検査のイメージ図であり、本発明に係る観察対象物の端部観察装置を用いて観察された観察画像を、画像取得部にて取得したものである。 [Specific example of inspection]
FIG. 10A is an image diagram of an inspection based on an observation image in a form embodying the present invention, and an observation image observed using the end observation device for an observation object according to the present invention is acquired by an image acquisition unit. It is a thing.
　この画像は、図６を用いて上述したものと同様に、検査の対象となるバリや欠けが含まれた画像を表したものであり、金属泊１００の両側に活物質１０１が塗布されているものが観察対象物１０として観察されている。活物質１０１には、バリ１１０，１１１，１１４や、欠け１２０，１２１，１２４が含まれている。バリは、背景からの光が遮られるため暗部となり、欠けは背景の光が回り込んで明部となって表示されている。 Similar to the image described above with reference to FIG. 6, this image represents an image including burrs and chips to be inspected, and the active material 101 is applied to both sides of the metal stay 100. A thing is observed as the observation object 10. The active material 101 includes burrs 110, 111, 114 and chips 120, 121, 124. The burr is displayed as a dark part because light from the background is blocked, and the chipped part is displayed as a bright part due to the background light.
　図１０Ｂは、本発明を具現化する形態における観察画像に基づく検査のイメージ図であり、本発明に係る観察対象物の端部観察装置における検査過程の中で画像処理を行っている状態を示したものである。観察対象物１０である金属泊１００及び活物質１０１と、背景とする領域１５０，１５１との境界部分に、近似直線で規定した観察対象物の外形と見なす線１３０がフィッティングさせて表示されている。このフィッティングは、画像処理ユニットの画像処理機能を用いて行うことができる。 FIG. 10B is an image diagram of an inspection based on an observation image in a form embodying the present invention, and shows a state in which image processing is performed in the inspection process in the edge observation apparatus of the observation object according to the present invention. Is. A line 130 that is regarded as the outer shape of the observation object defined by the approximate line is fitted and displayed at the boundary between the metal stay 100 and the active material 101 that are the observation object 10 and the background areas 150 and 151. . This fitting can be performed using the image processing function of the image processing unit.
　背景となる領域１５０，１５１の中にあるバリ１１０，１１１，１１４それぞれについて、暗部の領域を画像処理し、それぞれのバリの太さや長さを抽出する。
また、観察対象物の外形と見なす線１３０で囲まれた領域の中にある欠け１２０，１２１，１２４それぞれについて、明部の領域を画像処理し、それぞれの欠けの深さや大きさや面積を抽出する。
そして、前記抽出したバリや欠けの程度を、予め登録しておいた良否判定基準情報と比較し、当該取得した画像が良品であるか否かを、観察画像検査部にて判定する。 For each of the burrs 110, 111, and 114 in the background areas 150 and 151, the dark area is subjected to image processing, and the thickness and length of each burr are extracted.
In addition, for each of the lacks 120, 121, and 124 in the area surrounded by the line 130 regarded as the outer shape of the observation object, the bright area is subjected to image processing, and the depth, size, and area of each lack are extracted. .
Then, the degree of the extracted burrs and chips is compared with the quality criterion information registered in advance, and the observation image inspection unit determines whether or not the acquired image is a non-defective product.
　そうすることで、従来は作業者が行っていた検査を自動で行うことができるので、一定の判断基準に基づいて連続的に検査することができ、作業者の違いや長時間検査に起因する検査基準のばらつきを最小限に抑えることができる。その結果、観察対象物の端部を観察し、微小なバリ又は欠けの検査や測定の精度を高めつつ、費やす時間や労力を減らすことができる。 By doing so, it is possible to automatically perform inspections that have been performed by workers in the past, so it is possible to continuously inspect based on certain criteria, resulting from differences in workers and long-time inspections. Variations in inspection standards can be minimized. As a result, it is possible to reduce the time and labor spent while observing the end of the observation object and increasing the accuracy of inspection and measurement of minute burrs or chips.
　また、観察対象物の生産工程に本発明に係る観察対象物の端部検査装置を用いることができる。そうすれば、連続して製品を生産しながら検査を同時に行いつつ、観察画像を保存しておくことができ、当該製品の使用時に、良品部分のみを選択して用い、良品でない部分を選択して破棄することも可能となる。また、良品であるか否かの判定基準が再評価され、当該製品の生産後・使用前に変更となった場合でも、延期観察画像を保存しておけば、最新の良否判定基準情報に基づいて自動的に再検査を行うこともできる。 Also, the observation object end inspection apparatus according to the present invention can be used in the production process of the observation object. In this way, it is possible to save the observation image while simultaneously performing the inspection while producing the product continuously. When using the product, select only the non-defective part and select the non-defective part. Can also be discarded. In addition, even if the criteria for determining whether or not the product is non-defective is re-evaluated and the product is changed after production or before use, if the postponed observation image is saved, it will be based on the latest quality criteria information. Can be re-inspected automatically.
　　１　　観察装置
　　２　　ステージ部
　　３　　アライメントカメラ部
　　４　　観察部
　　５　　観察照明部
　　９　　制御部
　１０　　観察対象物
　１０ｂ　帯状の観察対象物
　１０ｆ　矢印
　１０ｓ　観察面
　１０ｖ　移動方向
　１１　　装置ベース
　１２　　連結ブラケット
　１３　　連結ブラケット
　１４　　連結ブラケット
　１５　　連結ブラケット
　１６　　連結ブラケット
　１７　　連結ブラケット
　１８　　連結ブラケット
　２１　　Ｘ軸ステージ
　２２　　Ｙ軸ステージ
　２３　　θ軸モータ
　２４　　テーブル
　２４ｃ　テーブル角部
　２４ｓ　テーブル側面
　２５　　テーブル側面
　２７　　バックアップローラ
　２７ｓ　バックアップローラ側面
　２７ｒ　　矢印
　２８　　バックアップローラ
　２８ｓ　バックアップローラ側面
　２８ｒ　　矢印
　３１　　カメラ
　３２　　レンズ
　３３　　奥側照明
　３４　　光量調節ユニット
　３６　　カメラ
　３７　　レンズ
　３８　　奥側照明
　３９　　光量調節ユニット
　４１　　カメラ
　４１ｓ　受光部
　４１ａ　第１のカメラ
　４１ｂ　第２のカメラ
　４１ｃ　対辺観察用のカメラ
　４２　　レンズ
　４２ａ　レンズ
　４２ｂ　レンズ
　４３ａ　観察光学系中心軸
　４３ｂ　観察光学系中心軸
　４４　　観察エリア
　４４ａ　観察エリア
　４４ｂ　観察エリア
　４５　　同軸落射レンズ
　５１　　奥側照明
　５１ａ　入射する光
　５１ｂ　遮光される光
　５１ｃ　遮光される光
　５１ｈ　発光部
　５２　　光量調節ユニット
　５２ａ　拡散される光
　５３　　奥側照明
　５４　　光量調節ユニット
　５５　　手前側照明
　５５ａ　照射された光
　５５ｂ　入射する光
　５５ｈ　発光部
　５６　　光量調節ユニット
　５７　　同軸照明
　５７ｂ　拡散される光
　５７ｃ　入射する光
　５７ｈ　発光部
　５８　　光量調節ユニット
　９０　　制御用コンピュータ
　９１　　情報入力手段
　９２　　情報表示手段
　９３　　発報手段
　９４　　情報記録手段
　９５　　機器制御ユニット
１００　　金属箔
１０１　　活物質
１１０～　バリ
１２０～　欠け
１３０　　外形と見なす線
１５０　　背景とする領域
１５１　　背景とする領域 DESCRIPTION OF SYMBOLS 1 Observation apparatus 2 Stage part 3 Alignment camera part 4 Observation part 5 Observation illumination part 9 Control part 10 Observation target object 10b Band-shaped observation target object 10f Arrow 10s Observation surface 10v Movement direction 11 Apparatus base 12 Connection bracket 13 Connection bracket 14 Connection bracket DESCRIPTION OF SYMBOLS 15 Connection bracket 16 Connection bracket 17 Connection bracket 18 Connection bracket 21 X-axis stage 22 Y-axis stage 23 θ-axis motor 24 Table 24c Table corner 24s Table side surface 25 Table side surface 27 Backup roller 27s Backup roller side surface 27r Arrow 28 Backup roller 28s Backup Roller side surface 28r Arrow 31 Camera 32 Lens 33 Back side illumination 34 Light quantity adjustment unit 36 Camera 37 Lens 38 Back Side illumination 39 Light amount adjustment unit 41 Camera 41s Light receiving part 41a First camera 41b Second camera 41c Camera for opposite side observation 42 Lens 42a Lens 42b Lens 43a Observation optical system central axis 43b Observation optical system central axis 44 Observation area 44a Observation Area 44b Observation area 45 Coaxial incident lens 51 Back side illumination 51a Incident light 51b Light blocked 51c Light blocked 51h Light emitting unit 52 Light quantity adjustment unit 52a Diffused light 53 Back light illumination 54 Light quantity adjustment unit 55 Front side illumination 55a Irradiated light 55b Incident light 55h Light emitting part 56 Light quantity adjusting unit 57 Coaxial illumination 57b Diffused light 57c Incident light 57h Light emitting part 58 Light quantity adjusting unit 90 Control computer 91 Information input means 92 Information display hand Region to region 151 background to 93 alarm means 94 recording means 95 device control unit 100 metal foil 101 active material 110 to validator 120 to chipping 130 outline as viewed line 150 background

Claims (6)

  1. 　観察対象物の端部より内側を支持する支持部と、
    　前記観察対象物の端部であって厚み方向の端面を観察する観察手段と、
    　前記観察手段側から前記観察対象物に向けて光を照射する第１の照明手段と、
    　前記観察手段側と対向した場所から前記観察対象物及び前記観察手段に向けて光を照射する第２の照明手段とを備え、
    　前記支持部には前記第１の照明手段から照射された光を反射する反射面を備えたことを特徴とする、観察対象物の端部観察装置。
    　     A support part for supporting the inner side from the end of the observation object;
    Observation means for observing the end face of the observation object and the end face in the thickness direction;
    First illumination means for irradiating light toward the observation object from the observation means side;
    A second illuminating means for irradiating light toward the observation object and the observation means from a location facing the observation means side;
    An end observation device for an observation object, wherein the support portion is provided with a reflection surface that reflects light emitted from the first illumination means.
  2. 　前記第１の照明手段又は前記第２の照明手段は、照明手段から発せられる光の強さを調節する光量調節ユニットを介して接続されており、
    　前記光量調節ユニットが、
    前記観察手段で観察される、前記第１の照明手段から発せられて前記反射面で反射した光の強さと、前記第２の照明手段から発せられた光の強さとが、同じになるように調節できることを特徴とする、請求項１に記載の観察対象物の端部観察装置。
    The first illuminating means or the second illuminating means is connected via a light amount adjusting unit that adjusts the intensity of light emitted from the illuminating means,
    The light quantity adjustment unit is
    The intensity of the light emitted from the first illumination means and reflected by the reflecting surface observed by the observation means is the same as the intensity of the light emitted from the second illumination means. The end observation device for an observation object according to claim 1, wherein the device can be adjusted.
  3. 　前記支持部は、前記観察手段に対する前記観察対象物の観察面の角度を変更できる回転機構を介して取り付けられており、
    　前記回転機構は、前記観察手段と前記観察対象物の観察面の角度とが直交するように角度調整できる構造を備えており、
    　前記第２の照明手段は、前記角度調整できる角度よりも広い範囲の場所から前記観察対象物及び前記観察手段に向けて光を照射できることを特徴とする、請求項１又は２に記載の観察対象物の端部観察装置。
    The support is attached via a rotation mechanism that can change the angle of the observation surface of the observation object with respect to the observation means,
    The rotation mechanism has a structure capable of adjusting the angle so that the observation means and the angle of the observation surface of the observation object are orthogonal to each other,
    The observation object according to claim 1, wherein the second illumination unit can irradiate the observation object and the observation unit with light from a location in a range wider than the angle adjustable. Equipment edge observation device.
  4. 　前記観察対象物の端部を前記観察手段と直交する方向から観察する第２の観察手段と、
    前記第２の観察手段側と対向した場所から前記観察対象物の端部及び前記第２の観察手段に向けて光を照射する第３の照明手段とを備えたことを特徴とする、請求項１～３のいずれか一つに記載の観察対象物の端部観察装置。
    Second observation means for observing the end of the observation object from a direction orthogonal to the observation means;
    The third illuminating means for irradiating light toward the end portion of the observation object and the second observing means from a location facing the second observing means side. The edge observation apparatus for an observation object according to any one of 1 to 3.
  5. 　前記観察対象物を、前記観察手段及び第２の観察手段に対して相対移動をさせる移動手段と、
    　前記相対移動量を検出する移動量検出部と、
    　前記観察手段で観察された画像を記録する観察画像記録部とを備え、
    　前記相対移動中に、前記移動量検出部からの検出結果に基づいて、所定の位置又は間隔で、観察画像を記録する機能を備えたことを特徴とする、請求項１～４のいずれか一つに記載の観察対象物の端部観察装置。
    Moving means for moving the observation object relative to the observation means and the second observation means;
    A movement amount detection unit for detecting the relative movement amount;
    An observation image recording unit that records an image observed by the observation unit;
    5. A function of recording an observation image at a predetermined position or interval based on a detection result from the movement amount detection unit during the relative movement. A device for observing an end of an observation object described in the above.
  6. 請求項１～４のいずれか一つに記載の観察対象物の観察装置を用いて観察された
    前記観察画像を取得する画像取得部と、
    前記取得した画像が良品であるか否かを判定するための、良否判定基準情報を登録する良否判定基準情報登録部と、
    前記良否判定基準情報に基づいて前記取得した画像が良品であるか否かを判定する観察画像検査部とを備えたことを特徴とする、観察対象物の端部検査装置。     An image acquisition unit for acquiring the observation image observed using the observation apparatus for an observation object according to any one of claims 1 to 4;
    A pass / fail criterion information registration unit for registering pass / fail criteria information for determining whether or not the acquired image is a non-defective product;
    An end inspection device for an observation object, comprising: an observation image inspection unit that determines whether or not the acquired image is a non-defective product based on the quality determination criterion information.
PCT/JP2011/073040 2010-10-26 2011-10-06 Apparatus for observing edge of subject to be observed and apparatus for inspecting edge of subject to be observed WO2012056858A1 (en)

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CN111729866A (en) * 2020-06-18 2020-10-02 速博达(深圳)自动化有限公司 CCD intelligent detection system
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