JP2010236859A - Method for inspecting end face of optical fiber - Google Patents

Method for inspecting end face of optical fiber Download PDF

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JP2010236859A
JP2010236859A JP2009081722A JP2009081722A JP2010236859A JP 2010236859 A JP2010236859 A JP 2010236859A JP 2009081722 A JP2009081722 A JP 2009081722A JP 2009081722 A JP2009081722 A JP 2009081722A JP 2010236859 A JP2010236859 A JP 2010236859A
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face
light
inspected
optical fiber
inspection
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JP5351582B2 (en
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Masayuki Imanishi
将之 今西
Tetsushi Miyamoto
哲史 宮本
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Mitsubishi Cable Industries Ltd
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Mitsubishi Cable Industries Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection method for accurately inspecting flaws on an end face of an optical fiber and chippings of its circumferential end edge. <P>SOLUTION: This inspection method includes: a reflected-light inspection process R for performing inspection by irradiating the end face 31 to be inspected of the optical fiber 30 with light F and using reflected light from the end face 31; and a transmitted-light inspection process T for inspecting the end face 31 by irradiating the other end face 12 on the opposite side to the end face 31 with the light F, allowing the light to pass through the optical fiber 30, and using the transmitted light FT. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、光ファイバ端面の検査方法に関する。   The present invention relates to an optical fiber end face inspection method.

従来、一般に光ファイバ端面の傷等の有無を検査のために、マイクロスコープ等で端面を拡大表示して、検査員が目視にて検査する方法が行われていた。
さらに、検査作業の能率向上のために、光ファイバ端面を撮像装置を用いて撮像し、画像処理して、傷や欠け等を検査する装置が提案されている（例えば特許文献１参照）。 Conventionally, in general, in order to inspect for the presence or absence of scratches on the end face of an optical fiber, a method in which the end face is enlarged and displayed by a microscope or the like, and an inspector visually inspects.
Furthermore, in order to improve the efficiency of inspection work, an apparatus has been proposed in which an optical fiber end face is imaged using an imaging device, image processing is performed, and scratches and chips are inspected (see, for example, Patent Document 1).

特開平９−５２０５号公報Japanese Patent Laid-Open No. 9-5205

ところで、上述の従来の検査員による場合、及び、検査装置による場合のいずれにあっても、光ファイバの端面（被検査端面）に直接に光（照明）を当てて検査していた。
即ち、図７に従来の検査装置を示し、光ファイバ30の被検査端面31に対向して、カメラ32と照明器33から成る照明ユニット34を配置して、被検査端面31に直接照明光35を照射し、カメラ32にて撮像して、その画像で良否判定を行っていた。 By the way, in the case of using the above-described conventional inspector and the case of using the inspection apparatus, the inspection is performed by directly applying light (illumination) to the end face (inspected end face) of the optical fiber.
That is, FIG. 7 shows a conventional inspection apparatus, in which an illumination unit 34 including a camera 32 and an illuminator 33 is disposed opposite to an end face 31 to be inspected of an optical fiber 30, and the illumination light 35 is directly applied to the end face 31 to be inspected. And imaged by the camera 32, and the pass / fail judgment was performed with the image.

図８に拡大された撮像を例示し、光ファイバ30の被検査端面31には、表面部の傷Ｙ及び外周縁36の欠けＺが検出された不良品の場合を示しているが、光ファイバ30の周囲を、着色された樹脂製コネクタ37にて覆われた構造のものならば、図８に示すように光ファイバ外周縁36と、コネクタ37の内周縁38との境界線Ｅが鮮明に識別できる。
ところが、エアクラッド構造の光ファイバ30である場合（図４参照）、さらに、不均一にメッキが施された金属製コネクタが使用された構造では、図９に例示するように、境界線Ｅ′が不鮮明かつ不安定に映り、（前述の表面部の傷Ｙは検出できるといえども）周端縁の欠けＺを検査できない場合がある。 FIG. 8 shows an example of enlarged imaging, and the inspected end face 31 of the optical fiber 30 shows a defective product in which a scratch Y on the surface portion and a chip Z on the outer peripheral edge 36 are detected. If the periphery of 30 is covered with a colored resin connector 37, the boundary line E between the outer peripheral edge 36 of the optical fiber and the inner peripheral edge 38 of the connector 37 is sharp as shown in FIG. Can be identified.
However, in the case of the optical fiber 30 having an air clad structure (see FIG. 4), in addition, in a structure using a metal connector plated nonuniformly, as shown in FIG. 9, the boundary line E ′ May appear unclear and unstable, and the chip Z on the peripheral edge may not be inspected (although the above-described surface damage Y can be detected).

図４に於て追加説明すれば、光ファイバ30はコアとクラッド層から成り、最先端外周のクラッド層を剥いで、コネクタ（フェルール）37に挿入して取着するが、エアクラッド構造とするために、コネクタ（フェルール）37の先端面内周縁に面取り39が形成されており、図４の左方側から照射光を当てると、Ｎｉメッキを施した面取り39から反射した光が、悪影響して、図９に例示するように、検査領域外の背景の映りが不安定となって、光ファイバ30の外周縁とコネクタ（フェルール）37の孔の内周端縁との境界線Ｅ′が不鮮明で、周端縁の欠けＺを区別至難となる場合があった。   As will be further described with reference to FIG. 4, the optical fiber 30 is composed of a core and a clad layer, and the clad layer on the outermost periphery is peeled off and inserted into a connector (ferrule) 37 for attachment. For this reason, a chamfer 39 is formed on the inner peripheral edge of the front end surface of the connector (ferrule) 37. When irradiated light is applied from the left side of FIG. As shown in FIG. 9, the background image outside the inspection region becomes unstable, and the boundary line E ′ between the outer peripheral edge of the optical fiber 30 and the inner peripheral edge of the hole of the connector (ferrule) 37 is In some cases, it was unclear and it was difficult to distinguish the chip Z at the peripheral edge.

そこで、本発明は、特にエアクラッド構造の光ファイバの端面の検査に於て、ファイバ端面の欠けを正確に検査可能とすることを目的とする。   Accordingly, an object of the present invention is to make it possible to accurately inspect the chip of the fiber end face particularly in the inspection of the end face of an optical fiber having an air clad structure.

上記目的を達成するため、本発明に係る光ファイバ端面の検査方法は、光ファイバの被検査端面に光を照射させて該被検査端面からの反射光にて検査する反射光検査工程と；上記被検査端面とは反対側の他端面に光を照射させて上記光ファイバ内に光を透過させて上記被検査端面を透過光にて検査する透過光検査工程とを；備えている。
また、上記反射光検査工程では、上記被検査端面の表面部の欠陥を検査し、上記透過光検査工程では、上記被検査端面の周端縁の欠陥を検査する方法である。 In order to achieve the above object, an optical fiber end face inspection method according to the present invention includes a reflected light inspection step of irradiating light to an end face to be inspected of an optical fiber and inspecting with reflected light from the end face to be inspected; A transmitted light inspection step of irradiating light on the other end surface opposite to the end face to be inspected, transmitting light through the optical fiber, and inspecting the end face to be inspected with transmitted light;
In the reflected light inspection step, a defect in the surface portion of the end face to be inspected is inspected, and in the transmitted light inspection step, a defect in a peripheral edge of the end face to be inspected is inspected.

また、第１照明器・第１カメラを上記光ファイバの一端面側に配設し、第２照明器・第２カメラを上記光ファイバの他端面側に配設して；上記一端面を上記被検査端面として上記反射光検査工程及び透過光検査工程によって該一端面について表面部の傷及び周端縁の欠け等の各欠陥を検査する一端面検査工程と；上記他端面を上記被検査端面として上記反射光検査工程及び透過光検査工程によって該他端面について表面部の傷及び周端縁の欠け等の各欠陥を検査する他端面検査工程とを；具備している。
また、照射させる上記光は白色光であるのが好ましい。
また、上記反射光検査工程において照射される上記光が、上記透過光検査工程において照射される上記光よりも、光量大に設定されている。 Also, the first illuminator / first camera is disposed on one end face side of the optical fiber, and the second illuminator / second camera is disposed on the other end face side of the optical fiber; One end surface inspection step for inspecting each defect such as a scratch on the surface portion and a chip on the peripheral edge with respect to the one end surface by the reflected light inspection step and the transmitted light inspection step as the end surface to be inspected; And the other end surface inspection step of inspecting each other defect such as a scratch on the surface portion and a chip on the peripheral edge on the other end surface by the reflected light inspection step and the transmitted light inspection step.
Moreover, it is preferable that the said light to irradiate is white light.
Further, the light irradiated in the reflected light inspection step is set to have a larger light quantity than the light irradiated in the transmitted light inspection step.

検査領域（ファイバ端面外周縁）と背景の境界を明確に区別でき、エアクラッド構造等の被検査端面であっても、ファイバ端面の欠けを、正確かつ確実に検査可能となる。かつ、検査作業の能率向上を図り得る。また、外径測定検査についても正確に行い得る利点もある。   The boundary between the inspection region (the outer peripheral edge of the fiber end surface) and the background can be clearly distinguished, and even the end surface to be inspected such as an air clad structure can accurately and reliably inspect the chip of the fiber end surface. In addition, the efficiency of inspection work can be improved. There is also an advantage that the outer diameter measurement inspection can be performed accurately.

本発明の実施の一形態を示す全体簡略構成図である。1 is an overall simplified configuration diagram showing an embodiment of the present invention. 本発明を構成する各工程を説明する図である。It is a figure explaining each process which constitutes the present invention. 光ファイバーの具体的一例を示す要部半截図である。It is a principal part half view which shows a specific example of an optical fiber. 要部拡大半截図である。FIG. 光ファイバ端面の一例を示す拡大図である。It is an enlarged view which shows an example of an optical fiber end surface. 光ファイバ端面の撮影画像を示す説明図である。It is explanatory drawing which shows the picked-up image of an optical fiber end surface. 従来例の説明図である。It is explanatory drawing of a prior art example. 従来例における良好な状態を示した撮像図である。It is the imaging figure which showed the favorable state in a prior art example. 従来の不良状態を説明する撮像図である。It is an imaging figure explaining the conventional defective state.

以下、実施の形態を示す図面に基づき本発明を詳説する。
図３と図４に例示した被検査用光ファイバ30は、コアとクラッド層から成るが、符号２にて示した最先端外周のクラッド層を剥いで、コネクタ３のフェルール37の孔37ａに挿入し、フェルール先端面４の孔側内周端縁の面取り39の形成によって、光ファイバ30の最先端２の一部と、面取り39の間に（断面三角形の）空気層を設け、この空気層がクラッドとしての機能をなしている、いわゆるエアクラッド構造である。 Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments.
The optical fiber 30 to be inspected illustrated in FIGS. 3 and 4 includes a core and a clad layer, but the clad layer at the outermost periphery shown by reference numeral 2 is peeled off and inserted into the hole 37a of the ferrule 37 of the connector 3. Then, by forming the chamfer 39 on the inner peripheral edge of the hole side of the ferrule tip end face 4, an air layer (with a triangular cross section) is provided between a part of the tip 2 of the optical fiber 30 and the chamfer 39, and this air layer This is a so-called air clad structure that functions as a clad.

フェルール37は一般に金属製であり、Ｎｉメッキ等のメッキ処理が外表面に施されている。フェルール37の先端面４と同一平面上の位置に光ファイバ30の一端面11が露出している。なお、図３に於て、22はカップリングナット、23はチャックナットを示す。   The ferrule 37 is generally made of metal, and a plating process such as Ni plating is applied to the outer surface. One end face 11 of the optical fiber 30 is exposed at a position on the same plane as the distal end face 4 of the ferrule 37. In FIG. 3, 22 is a coupling nut, and 23 is a chuck nut.

本発明は、このようなエアクラッド構造として、フェルール37の孔37ａに挿入された光ファイバ30の一端面11を、被検査端面31として、図５に例示したような、表面部の傷Ｙ及び周端縁の欠けＺ等の欠陥の有無を検査するものである。   The present invention has such an air clad structure in which the end face 11 of the optical fiber 30 inserted into the hole 37a of the ferrule 37 is used as the end face 31 to be inspected, and the scratch Y and the surface portion as illustrated in FIG. The presence or absence of defects such as chipping Z on the peripheral edge is inspected.

図２（Ｂ）に於て、右側の一端面11を被検査端面31とすれば、この被検査端面31に、カメラ５と照明器６を同軸心上に一体に有する照明ユニット７を接近して対向配置して、被検査端面31に（照明）光Ｆを照射して、その端面31からの反射光をカメラ５で受像して、反射光検査を行う。これを反射光検査工程Ｒと呼ぶこととする。この反射光検査工程Ｒによって、図６（Ｂ）に示すような撮像８が得られるが、この撮像８では（図９にて述べた従来例と同様に）境界線Ｅ′が不明瞭で、かつ、図５に示す周端縁の欠けＺも不鮮明になる。   In FIG. 2 (B), if the right end surface 11 is the end face 31 to be inspected, the lighting unit 7 having the camera 5 and the illuminator 6 integrally on the same axis is brought close to the end face 31 to be inspected. Are arranged opposite to each other, the (illumination) light F is irradiated to the end face 31 to be inspected, and the reflected light from the end face 31 is received by the camera 5 to perform the reflected light inspection. This is called a reflected light inspection process R. The reflected light inspection step R provides an image 8 as shown in FIG. 6B. In this image 8 (as in the conventional example described with reference to FIG. 9), the boundary line E ′ is unclear, Also, the peripheral edge chip Z shown in FIG. 5 becomes unclear.

しかしながら、図６（Ｂ）でも明らかな如く、被検査端面31の表面部の欠陥（欠けＺ）は明瞭に撮影できる。つまり、図２（Ｂ）に示した反射光検査工程Ｒによって、被検査端面31の表面部の欠陥としての欠けＺを、図６（Ｂ）に示すように、正確に検査できる。
そして、本発明では、さらに図２（Ａ）に示すように、透過光検査工程Ｔを有し、反射光検査工程Ｒの後に、又は、前に、透過光検査工程Ｔを備えた光ファイバ端面検査方法である。つまり、両工程Ｒ，Ｔの内のいずれを先に、いずれを後に、行うかは、自由に選択可能である。 However, as clearly shown in FIG. 6B, the defect (chip Z) of the surface portion of the end face 31 to be inspected can be clearly photographed. That is, by the reflected light inspection step R shown in FIG. 2 (B), a chip Z as a defect in the surface portion of the end face 31 to be inspected can be accurately inspected as shown in FIG. 6 (B).
And in this invention, as shown to FIG. 2 (A), it has the transmitted light test process T, and the optical fiber end surface provided with the transmitted light test process T after or before the reflected light test process R Inspection method. That is, it is possible to freely select which one of the processes R and T is performed first and which is performed later.

ところで、この透過光検査工程Ｔについて具体的に説明すれば、図２（Ａ）に示す如く、前記被検査端面31とは反対側の他端面12に光Ｆを、照明器６′にて照射し、光ファイバ30内に光を透過させて、被検査端面31を透過光ＦT にて検査する。 By the way, the transmitted light inspection step T will be described in detail. As shown in FIG. 2A, the other end surface 12 opposite to the end surface 31 to be inspected is irradiated with light F by an illuminator 6 '. and, by transmitting light to the optical fiber 30, to inspect the inspected end face 31 with a transmission light F T.

図２に於て、一端面11側―――被検査端面31側―――にはカメラ５が配設され、このカメラ５にて、透過光ＦT を受光して、図６（Ａ）に示す透過光撮像９が得られる。図３と図４に示した被検査端面31及びフェルール37の面取り39には光の照射が無いので、図６（Ａ）に示すように、被検査端面31の周端縁13が鮮明かつ明瞭に映り、欠けＺを検査できる。
なお、図２に於て、被検査端面31に近接配置のカメラ５としては、両工程Ｒ，Ｔに共用することも望ましい。さらに、図２に於て、上述の（Ａ）（Ｂ）の各工程Ｔ，Ｒを行うと共に、他端面12を今度は被検査端面として、図２（Ａ）のカメラ５と照明器６′を左右入れ替え（置換し）、図２（Ｂ）の照明ユニット７を他端面12側に置換して、他端面12を被検査端面としての検査を同様に実施することも、望ましい。 At a 2, one end face 11 side --- inspected end face 31 side --- camera 5 is disposed on the at the camera 5, by receiving the transmitted light F T, FIG. 6 (A) The transmitted light imaging 9 shown in FIG. Since there is no light irradiation on the test end face 31 and the chamfer 39 of the ferrule 37 shown in FIGS. 3 and 4, the peripheral edge 13 of the test end face 31 is clear and clear as shown in FIG. The chip Z can be inspected.
In FIG. 2, it is desirable that the camera 5 disposed close to the end face 31 to be inspected is shared by both processes R and T. Further, in FIG. 2, the above-described steps T and R of (A) and (B) are performed, and the other end surface 12 is now used as the end surface to be inspected, and the camera 5 and the illuminator 6 'in FIG. It is also desirable to replace the left and right sides (replace), replace the illumination unit 7 in FIG. 2B with the other end surface 12 side, and similarly perform the inspection using the other end surface 12 as the end surface to be inspected.

次に、図１に示す検査装置とそれを使用した検査方法について、説明すれば、第１照明器６Ａ・第１カメラ５Ａを、光ファイバ30の一端面11側に配設し、かつ、第２照明器６Ｂ・第２カメラ５Ｂを、上記光ファイバ30の他端面12側に配設する。言い換えると、検査装置を一定位置にセットして、次々と検査すべき光ファイバ30を持込んで検査するのが一般的であるから、ファイバーセット治具14，14を、照明器６Ａ、６Ｂの各々に対応して配設しておいて、検査対象の光ファイバ30の両端をファイバーセット治具14，14にセット（固定）して、光ファイバ30の一端面11を第１照明器６Ａ・第１カメラ５Ａに対応させ、かつ、他端面12を第２照明器６Ｂ・第２カメラ５Ｂに対応させる。   Next, the inspection apparatus shown in FIG. 1 and the inspection method using the inspection apparatus will be described. The first illuminator 6A and the first camera 5A are disposed on the one end face 11 side of the optical fiber 30, and the first The two illuminators 6B and the second camera 5B are disposed on the other end face 12 side of the optical fiber 30. In other words, it is common to set the inspection device at a fixed position and bring in the optical fibers 30 to be inspected one after another, so that the fiber setting jigs 14 and 14 are connected to the illuminators 6A and 6B. The both ends of the optical fiber 30 to be inspected are set (fixed) to the fiber setting jigs 14 and 14, and the one end surface 11 of the optical fiber 30 is set to the first illuminator 6A. The other end surface 12 is made to correspond to the second illuminator 6B and the second camera 5B, corresponding to the first camera 5A.

そして、図１に於て、15は照明コントローラであり、各照明器６Ａ，６Ｂの光量を、コンピュータ制御装置16からの指令Ｉ16にて増減調整可能である。また、17は画像処理装置であって、配線18，19にて第１・第２カメラ５Ａ，５Ｂに接続され、上記コンピュータ制御装置16からの指令Ｉ16′により撮影や画像処理が行われ、ディスプレイ（モニタ）20に表示される。 In FIG. 1, reference numeral 15 denotes an illumination controller, and the light quantity of each illuminator 6 </ b> A, 6 </ b> B can be increased or decreased by a command I 16 from the computer controller 16. Reference numeral 17 denotes an image processing apparatus, which is connected to the first and second cameras 5A and 5B via wirings 18 and 19, and performs photographing and image processing in accordance with a command I 16 'from the computer control apparatus 16. It is displayed on the display (monitor) 20.

例えば、上記一端面11を被検査端面31として、反射光検査工程Ｒ（図２（Ｂ）参照）、及び、透過光検査工程Ｔ（図２（Ａ）参照）によって、この一端面11について、表面部の傷Ｙ及び周端縁13の欠けＺ等の各欠陥を検査する。これを一端面検査工程と呼ぶ。
この一端面検査工程に於て、図２（Ａ）の照明器６′として図１の第２照明器６Ｂが相当し、かつ、図２（Ａ）のカメラ５として図１の第１カメラ５Ａが相当する。即ち、図１の第２照明器６Ｂにて他端面12を照射し、第１カメラ５Ａにて撮影することで、一端面11の検査―――つまり一端面検査工程―――が行われる。 For example, with the one end face 11 as an end face 31 to be inspected, the reflected light inspection step R (see FIG. 2 (B)) and the transmitted light inspection step T (see FIG. 2 (A)) Each defect such as a scratch Y on the surface and a chip Z on the peripheral edge 13 is inspected. This is called a one-end surface inspection process.
In this one end face inspection step, the second illuminator 6B in FIG. 1 corresponds to the illuminator 6 ′ in FIG. 2A, and the first camera 5A in FIG. 1 as the camera 5 in FIG. 2A. Corresponds. That is, the other end surface 12 is irradiated with the second illuminator 6B of FIG. 1 and the first camera 5A takes an image, whereby the inspection of the one end surface 11—that is, the one end surface inspection step—is performed.

また、図１に於て、今度は、他端面12を被検査端面31として、反射光検査工程Ｒ及び透過光検査工程Ｔによって、この他端面12について、表面部の傷Ｙ及び周端縁13の欠けＺ等の各欠陥を検査する。これを他端面検査工程と呼ぶ。具体的には、第１照明器６Ａにて（反対側の）一端面11を照射し、第２カメラ５Ｂにて撮影することで、他端面12の検査―――つまり他端面検査工程―――が行われる。   In FIG. 1, this time, the other end face 12 is set as the end face 31 to be inspected, and the reflected light inspection process R and the transmitted light inspection process T are performed on the other end face 12. Each defect such as chip Z is inspected. This is called the other end surface inspection step. Specifically, the first illuminator 6A irradiates one end surface 11 (on the opposite side) and the second camera 5B takes an image to inspect the other end surface 12—that is, the other end surface inspection step— -Is done.

ところで、図１に基づいて説明した一端面検査工程と他端面検査工程とは、いずれを先に、いずれを後に、行うも自由である。しかも、一端面検査工程内の反射光検査工程Ｒと透過光検査工程Ｔと、他端面検査工程内の反射光検査工程Ｒと透過光検査工程Ｔとを、交互に入れかえつつ、行うことも可能である。また、一端面検査工程と他端面検査工程の各々内の反射光検査工程Ｒと透過光検査工程Ｔは、いずれを先に行うも自由である。   By the way, the one end surface inspection step and the other end surface inspection step described with reference to FIG. 1 can be performed first and later. In addition, the reflected light inspection process R and the transmitted light inspection process T in the one end face inspection process and the reflected light inspection process R and the transmitted light inspection process T in the other end face inspection process can be performed alternately. It is. In addition, the reflected light inspection process R and the transmitted light inspection process T in each of the one end surface inspection process and the other end surface inspection process can be freely performed first.

そして、上述の反射光検査工程Ｒにおいて照射される光Ｆは、透過光検査工程Ｔにおいて、照射される光Ｆよりも、光量大に設定する。つまり、図１では、照明コントローラ15によって、被検査端面31と反対側の端面から入光させる場合は、比較的暗めにコントロールし、かつ、被検査端面31へ直接に照射する場合は比較的明るめに調整する。
また、照射させる光Ｆは白色光が好ましい。つまり、照明器６Ａ，６Ｂ（６，６′）として、白色ＬＥＤを使用し、カメラ５Ａ，５Ｂ（５）としては、カラーカメラを使用するのが次の理由から望ましい。即ち、（ｉ）欠陥（傷Ｙや欠けＺ）の種類や、大きさ（縦、横、深さ寸法）によっては、青色、赤色、緑色の波長の光（ＬＥＤ光源）では傷や欠けが消える場合があり、全ての欠陥を写し出せないことがあり、（ii）検査装置を、検査員による目視検査と併用した場合に検査員が自然光で見た画像と同じとすることができ好都合である。 And the light F irradiated in the above-mentioned reflected light inspection process R is set larger in light quantity than the irradiated light F in the transmitted light inspection process T. In other words, in FIG. 1, when the illumination controller 15 enters light from the end surface opposite to the end surface 31 to be inspected, the light is controlled to be relatively dark, and relatively bright when directly irradiated to the end surface 31 to be inspected. Adjust to.
The light F to be irradiated is preferably white light. That is, it is desirable to use white LEDs as the illuminators 6A and 6B (6, 6 ') and use color cameras as the cameras 5A and 5B (5) for the following reasons. That is, (i) depending on the type of defect (scratch Y or chipping Z) and the size (vertical, horizontal, depth dimensions), the scratches and chipping disappear with light of blue, red, and green wavelengths (LED light source). (Ii) When the inspection device is used in combination with visual inspection by the inspector, it can be conveniently the same as the image that the inspector has seen with natural light. .

上述の図１に示した構成の検査装置によれば、反射光検査工程Ｒと透過光検査工程Ｔを、自動的に切り替えて、連続的に行うことが可能となり、しかも、一端面検査工程と他端面検査工程とを、自動的に連続的に行うことができ、ファイバーセット治具14，14への一回の光ファイバセッティングで、極めて高能率に両端面11，12の検査を行い得る。このように、一回のファイバセッティングで両端面11，12の検査を連続的に行うことができ、両端面11，12の表面部の傷Ｙ、及び、周端縁の欠けＺ、さらには、光ファイバの端面11，12の外径検査（外径測定）も、正確かつ能率良く行うことができる。   According to the inspection apparatus having the configuration shown in FIG. 1 described above, the reflected light inspection step R and the transmitted light inspection step T can be automatically switched and performed continuously, and the one end surface inspection step The other end face inspection process can be performed automatically and continuously, and the both end faces 11 and 12 can be inspected extremely efficiently by a single optical fiber setting on the fiber setting jigs 14 and 14. In this way, the end faces 11 and 12 can be inspected continuously with a single fiber setting, the surface portion of both end faces 11 and 12 is scratched Y, and the peripheral edge edge chip Z, The outer diameter inspection (outer diameter measurement) of the end faces 11 and 12 of the optical fiber can also be performed accurately and efficiently.

本発明は、以上述べたように、光ファイバ30の被検査端面31に光Ｆを照射させて該被検査端面31からの反射光にて検査する反射光検査工程Ｒと、上記被検査端面31とは反対側の他端面12に光Ｆを照射させて上記光ファイバ30内に光を透過させて上記被検査端面31を透過光ＦT にて検査する透過光検査工程Ｔとを、備えている構成であるので、図４に例示した光ファイバ端部とフェルール37から成るエアクラッド構造であっても、図６（Ａ）に示すように周端縁13の欠けＺを明瞭に検出可能で、かつ、図６（Ｂ）に示したように被検査端面31の表面部の傷Ｙを明瞭に検査でき、正確かつ高能率に光ファイバ端面の検査作業を行うことができる。 In the present invention, as described above, the reflected light inspection process R in which the end face 31 of the optical fiber 30 is irradiated with the light F and inspected with the reflected light from the end face 31 to be inspected, and the end face 31 to be inspected. is the transmitted light inspection step T which is irradiated with light F on the other end face 12 on the opposite side by transmitting light to the optical fiber 30 to be inspected by a transmission light F T the inspection end face 31, provided with a Therefore, even in the air clad structure including the optical fiber end portion and the ferrule 37 illustrated in FIG. 4, the chip Z of the peripheral edge 13 can be clearly detected as shown in FIG. 6 (A). Moreover, as shown in FIG. 6B, the scratch Y on the surface portion of the end face 31 to be inspected can be clearly inspected, and the optical fiber end face can be inspected accurately and efficiently.

５ カメラ
５Ａ 第１カメラ
５Ｂ 第２カメラ
６ 照明器
６Ａ 第１照明器
６Ｂ 第２照明器
11 一端面
12 他端面
13 周端縁
30 光ファイバ
31 被検査端面
37 フェルール（コネクタ）
Ｆ 光
ＦT 透過光
Ｒ 反射光検査工程
Ｔ 透過光検査工程
Ｙ 表面部の傷
Ｚ 周端縁の欠け 5 Camera 5A 1st Camera 5B 2nd Camera 6 Illuminator 6A 1st Illuminator 6B 2nd Illuminator
11 One end
12 other end
13 Perimeter edge
30 optical fiber
31 End face to be inspected
37 Ferrule (connector)
F light FT transmitted light R reflected light inspection process T transmitted light inspection process Y surface scratches Z chipped peripheral edge

Claims (5)

光ファイバ（30）の被検査端面（31）に光（Ｆ）を照射させて該被検査端面（31）からの反射光にて検査する反射光検査工程（Ｒ）と、
上記被検査端面（31）とは反対側の他端面（12）に光（Ｆ）を照射させて上記光ファイバ（30）内に光を透過させて上記被検査端面（31）を透過光（ＦT ）にて検査する透過光検査工程（Ｔ）とを、
備えていることを特徴とする光ファイバ端面の検査方法。 A reflected light inspection step (R) in which light (F) is irradiated on the end face (31) to be inspected of the optical fiber (30) and inspected with the reflected light from the end face (31) to be inspected;
The other end face (12) opposite to the end face (31) to be inspected is irradiated with light (F) to transmit the light into the optical fiber (30) and transmitted through the end face (31) to be inspected ( Transmitted light inspection step (T) inspecting at F T ),
An inspection method for an end face of an optical fiber, comprising: 上記反射光検査工程（Ｒ）では、上記被検査端面（31）の表面部の欠陥を検査し、
上記透過光検査工程（Ｔ）では、上記被検査端面（31）の周端縁（13）の欠陥を検査する請求項1記載の光ファイバ端面の検査方法。 In the reflected light inspection step (R), the surface end of the inspection end surface (31) is inspected for defects,
2. The optical fiber end face inspection method according to claim 1, wherein in the transmitted light inspection step (T), a defect of the peripheral edge (13) of the end face to be inspected (31) is inspected. 第１照明器（６Ａ）・第１カメラ（５Ａ）を上記光ファイバ（30）の一端面（11）側に配設し、第２照明器（６Ｂ）・第２カメラ（５Ｂ）を上記光ファイバ（30）の他端面（12）側に配設して、
上記一端面（11）を上記被検査端面（31）として上記反射光検査工程（Ｒ）及び透過光検査工程（Ｔ）によって該一端面（11）について表面部の傷（Ｙ）及び周端縁の欠け（Ｚ）等の各欠陥を検査する一端面検査工程と、
上記他端面（12）を上記被検査端面（31）として上記反射光検査工程（Ｒ）及び透過光検査工程（Ｔ）によって該他端面（12）について表面部の傷（Ｙ）及び周端縁の欠け（Ｚ）等の各欠陥を検査する他端面検査工程とを、
具備している請求項１又は２記載の光ファイバ端面の検査方法。 The first illuminator (6A) and the first camera (5A) are arranged on the one end face (11) side of the optical fiber (30), and the second illuminator (6B) and the second camera (5B) are connected to the light. Arranged on the other end face (12) side of the fiber (30),
By using the one end face (11) as the end face to be inspected (31), the reflected light inspection step (R) and the transmitted light inspection step (T) are used to treat the surface of the end face (11) with a scratch (Y) and a peripheral edge. One end surface inspection process for inspecting each defect such as chipping (Z) of
Using the other end face (12) as the end face to be inspected (31), the reflected light inspection step (R) and the transmitted light inspection step (T) make the surface portion scratch (Y) and peripheral edge of the other end face (12). The other end surface inspection process for inspecting each defect such as chipping (Z) of
The optical fiber end face inspection method according to claim 1 or 2, further comprising: 照射させる上記光（Ｆ）は白色光である請求項１，２又は３記載の光ファイバ端面の検査方法。   4. The optical fiber end face inspection method according to claim 1, wherein the light (F) to be irradiated is white light. 上記反射光検査工程（Ｒ）において照射される上記光（Ｆ）が、上記透過光検査工程（Ｔ）において照射される上記光（Ｆ）よりも、光量大に設定されている請求項１，２，３又は４記載の光ファイバ端面の検査方法。
The light (F) irradiated in the reflected light inspection step (R) is set to have a larger light quantity than the light (F) irradiated in the transmitted light inspection step (T). 2. The method for inspecting an end face of an optical fiber according to 2, 3 or 4.
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WO2012056858A1 (en) * 2010-10-26 2012-05-03 東レエンジニアリング株式会社 Apparatus for observing edge of subject to be observed and apparatus for inspecting edge of subject to be observed

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JPS6344139A (en) * 1986-08-11 1988-02-25 アンプ　インコ−ポレ−テツド Optical-fiber end-surface inspection method and device
JPH08170908A (en) * 1994-12-19 1996-07-02 Kyocera Corp End face inspection apparatus for optical fiber connector
JPH08234052A (en) * 1995-02-24 1996-09-13 Nippon Telegr & Teleph Corp <Ntt> Automatic assembling and inspection method for optical connector
JP2005241398A (en) * 2004-02-26 2005-09-08 Fujikura Ltd Test method for optical fiber connector end face

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JPS6344139A (en) * 1986-08-11 1988-02-25 アンプ　インコ−ポレ−テツド Optical-fiber end-surface inspection method and device
JPH08170908A (en) * 1994-12-19 1996-07-02 Kyocera Corp End face inspection apparatus for optical fiber connector
JPH08234052A (en) * 1995-02-24 1996-09-13 Nippon Telegr & Teleph Corp <Ntt> Automatic assembling and inspection method for optical connector
JP2005241398A (en) * 2004-02-26 2005-09-08 Fujikura Ltd Test method for optical fiber connector end face

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Publication number Priority date Publication date Assignee Title
WO2012056858A1 (en) * 2010-10-26 2012-05-03 東レエンジニアリング株式会社 Apparatus for observing edge of subject to be observed and apparatus for inspecting edge of subject to be observed

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