WO2011138994A1 - 실리콘 나노 와이어의 형성방법 및 이를 이용한 리튬 이차 전지의 제조방법 - Google Patents

실리콘 나노 와이어의 형성방법 및 이를 이용한 리튬 이차 전지의 제조방법 Download PDF

Info

Publication number
WO2011138994A1
WO2011138994A1 PCT/KR2010/003138 KR2010003138W WO2011138994A1 WO 2011138994 A1 WO2011138994 A1 WO 2011138994A1 KR 2010003138 W KR2010003138 W KR 2010003138W WO 2011138994 A1 WO2011138994 A1 WO 2011138994A1
Authority
WO
WIPO (PCT)
Prior art keywords
manufacturing
forming
secondary battery
lithium secondary
same
Prior art date
Application number
PCT/KR2010/003138
Other languages
English (en)
French (fr)
Inventor
박수진
방병만
이정필
송현곤
조재필
Original Assignee
국립대학법인 울산과학기술대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 국립대학법인 울산과학기술대학교 산학협력단 filed Critical 국립대학법인 울산과학기술대학교 산학협력단
Publication of WO2011138994A1 publication Critical patent/WO2011138994A1/ko
Priority to US13/650,754 priority Critical patent/US8574942B2/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/04Construction or manufacture in general
    • H01M10/0436Small-sized flat cells or batteries for portable equipment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134Electrodes based on metals, Si or alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

실리콘 나노 와이어의 제조방법 및 이를 이용한 리튬 이차전지의 제조방법이 제공된다. 이 실리콘 나노 와이어의 제조방법은, 실리콘층 상에, 서로 이격된 금속 입자들을 포함하는 촉매층을 형성하는 단계, 금속 입자들과 접촉하는 실리콘층을 선택적으로 식각하는 단계 및 금속 입자들을 제거하는 단계를 포함할 수 있다.
PCT/KR2010/003138 2010-05-07 2010-05-18 실리콘 나노 와이어의 형성방법 및 이를 이용한 리튬 이차 전지의 제조방법 WO2011138994A1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/650,754 US8574942B2 (en) 2010-05-07 2012-10-12 Method of forming silicon nanowires and method of fabricating lithium secondary battery using the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100043132A KR101195546B1 (ko) 2010-05-07 2010-05-07 실리콘 나노 와이어의 제조방법 및 이를 이용한 리튬 이차 전지의 제조방법
KR10-2010-0043132 2010-05-07

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US13/650,754 Continuation US8574942B2 (en) 2010-05-07 2012-10-12 Method of forming silicon nanowires and method of fabricating lithium secondary battery using the same

Publications (1)

Publication Number Publication Date
WO2011138994A1 true WO2011138994A1 (ko) 2011-11-10

Family

ID=44903843

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/003138 WO2011138994A1 (ko) 2010-05-07 2010-05-18 실리콘 나노 와이어의 형성방법 및 이를 이용한 리튬 이차 전지의 제조방법

Country Status (3)

Country Link
US (1) US8574942B2 (ko)
KR (1) KR101195546B1 (ko)
WO (1) WO2011138994A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103950889A (zh) * 2014-05-08 2014-07-30 清华大学 一种场发射性能优良具有尖端结构的硅纳米线阵列的制备方法

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100485133B1 (ko) * 2001-12-27 2005-04-22 류종훈 천초근 추출물을 함유하는 뇌세포 보호 및 뇌졸중 치료를위한 조성물
TW201302600A (zh) * 2011-07-04 2013-01-16 Univ Nat Taiwan Science Tech 矽奈米線陣列之製作方法
GB201122315D0 (en) * 2011-12-23 2012-02-01 Nexeon Ltd Etched silicon structures, method of forming etched silicon structures and uses thereof
KR101351252B1 (ko) * 2012-04-16 2014-01-24 희성전자 주식회사 다직경 구조를 갖는 음극 활물질의 제조방법 및 이를 이용한 리튬 이차전지
KR101327744B1 (ko) * 2012-06-22 2013-11-11 원광대학교산학협력단 고효율의 태양전지 제조방법
KR101591571B1 (ko) * 2012-10-31 2016-02-03 주식회사 엘지화학 다공성 복합체 및 이의 제조방법
KR101436569B1 (ko) * 2012-12-26 2014-09-01 에스케이이노베이션 주식회사 리튬이차전지용 음극활물질 및 이를 이용한 리튬이차전지
WO2014120830A1 (en) * 2013-01-30 2014-08-07 Bandgap Engineering, Inc. Necklaces of silicon nanowires
WO2014193124A1 (ko) 2013-05-30 2014-12-04 주식회사 엘지화학 다공성 실리콘계 음극 활물질, 이의 제조 방법, 및 이를 포함하는 리튬 이차전지
GB2516318B (en) * 2013-07-19 2017-02-15 Nexeon Ltd Etched silicon structures, method of forming etched silicon structures and uses thereof
WO2015012516A1 (ko) * 2013-07-22 2015-01-29 광주과학기술원 실리콘 나노 와이어 어레이의 제조방법
KR101671627B1 (ko) * 2015-05-06 2016-11-01 경희대학교 산학협력단 그래핀을 촉매로 한 실리콘의 화학적 식각 방법
AT519922B1 (de) * 2017-05-11 2020-01-15 Univ Wien Tech SERS-Substrat
CN107799392B (zh) * 2017-09-22 2020-12-11 中国科学院微电子研究所 黑硅、制备工艺及基于黑硅的mems器件制备方法
US10974965B2 (en) * 2018-01-26 2021-04-13 Samsung Electronics Co., Ltd. Silicon-containing structure, method of preparing the same, carbon composite using the same, and electrode, lithium battery, and device each including the same
CN113213421B (zh) * 2021-05-12 2022-04-15 清华大学 大面阵纳米针结构制备方法及装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050062825A (ko) * 2003-12-18 2005-06-28 엘지전자 주식회사 나노 와이어 제조 방법
KR100809929B1 (ko) * 2006-09-08 2008-03-06 한국과학기술원 나노 와이어 제조방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7641863B2 (en) * 2003-03-06 2010-01-05 Ut-Battelle Llc Nanoengineered membranes for controlled transport
US20090236317A1 (en) * 2008-03-21 2009-09-24 Midwest Research Institute Anti-reflection etching of silicon surfaces catalyzed with ionic metal solutions

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050062825A (ko) * 2003-12-18 2005-06-28 엘지전자 주식회사 나노 와이어 제조 방법
KR100809929B1 (ko) * 2006-09-08 2008-03-06 한국과학기술원 나노 와이어 제조방법

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FANG, HUI ET AL.: "Silver catalysis in the fabrication of silicon nanowire arrays.", NANOTECHNOLOGY., vol. 17, 2006, pages 3768 - 3774 *
WOLFSTELLER, A. ET AL.: "Comparison of the top-down and bottom-up approach to fabricate nanowire-based silicon/germanium heterostructures.", THIN SOLID FILMS, vol. 518, no. IS.9, 26 February 2010 (2010-02-26), pages 2555 - 2561 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103950889A (zh) * 2014-05-08 2014-07-30 清华大学 一种场发射性能优良具有尖端结构的硅纳米线阵列的制备方法

Also Published As

Publication number Publication date
US20130040412A1 (en) 2013-02-14
KR20110123578A (ko) 2011-11-15
US8574942B2 (en) 2013-11-05
KR101195546B1 (ko) 2012-10-29

Similar Documents

Publication Publication Date Title
WO2011138994A1 (ko) 실리콘 나노 와이어의 형성방법 및 이를 이용한 리튬 이차 전지의 제조방법
EP3761399A4 (en) SEPARATOR, PROCESS FOR ITS MANUFACTURING AND LITHIUM BATTERY THEREFORE
WO2012057504A3 (ko) 태양전지 및 그 제조 방법
EP2169743A4 (en) SEPARATOR FOR NONAQUEOUS SECONDARY BATTERY, METHOD FOR PRODUCING THE SAME, AND NONAQUEOUS SECONDARY BATTERY
EP2506340A4 (en) METHOD FOR PRODUCING A SEPARATOR, SEPARATOR PRODUCED IN THIS PROCESS AND ELECTRONIC DEVICE WITH THE SEPARATOR
WO2012057512A3 (ko) 화합물 반도체 장치 및 그 제조 방법
WO2013049042A3 (en) Coalesced nanowire structures with interstitial voids and method for manufacturing the same
WO2011056534A3 (en) Methods of forming pillars for memory cells using sequential sidewall patterning
WO2013009007A3 (en) Optical member, display device having the same and method of fabricating the same
EP3817093A4 (en) SEPARATOR FOR ELECTROCHEMICAL DEVICE WITH A STRUCTURED ELECTRODE ADHESIVE LAYER AND METHOD FOR MANUFACTURING THE SEPARATOR
EP3944354A4 (en) COMPARTMENT, SECONDARY BATTERY, BATTERY PACK, VEHICLE AND METHOD FOR MAKING SECONDARY BATTERY
WO2012169550A9 (ja) 金属箔パターン積層体,金属箔積層体,金属箔積層基板,太陽電池モジュール,及び金属箔パターン積層体の製造方法
WO2013134592A3 (en) Atomic layer deposition strengthening members and method of manufacture
WO2012080833A3 (en) Controlled release dosage forms
EP2550147B8 (en) Immunoassays, methods for carrying out immunoassays, immunoassay kits and method for manufacturing immunoassay kits
EP3790070A4 (en) BATTERY PACK, ITS MANUFACTURING PROCESS AND VEHICLE
PL2615665T3 (pl) Separator, sposób jego wytwarzania i zawierające go urządzenie elektrochemiczne
WO2012105800A3 (ko) 나노전력발전소자 및 이의 제조방법
EP3796462A4 (en) BATTERY MODULE, ITS MANUFACTURING PROCESS, AND BATTERY PACK INCLUDING A BATTERY MODULE
EP3648213A4 (en) SOLID POLYMER TYPE FUEL CELL CATALYST BRACKET, SOLID POLYMER TYPE FUEL CELL CATALYST BRACKET MANUFACTURING PROCESS, SOLID POLYMER TYPE FUEL CELL CATALYST LAYER, AND FUEL CELL
EP3920313A4 (en) BATTERY MODULE, METHOD OF MANUFACTURING IT AND BATTERY PACK
EP3859823A4 (en) FUNCTIONAL SEPARATOR WITH CATALYTIC SITE INTRODUCED THEREIN, PROCESS FOR ITS MANUFACTURE AND LITHIUM SECONDARY BATTERY THEREOF
EP3690999A4 (en) POSITIVE ELECTRODE ACTIVE MATERIAL FOR LITHIUM-ION SECONDARY BATTERY, METHOD OF MANUFACTURING POSITIVE ELECTRODE ACTIVE MATERIAL FOR LITHIUM-ION SECONDARY BATTERY, AND SECONDARY LITHIUM-ION BATTERY
EP3783690A4 (en) BATTERY PACK MANUFACTURING DEVICE, MANUFACTURING PROCESS, AND BATTERY PACK
EP3780149A4 (en) FUNCTIONAL SEPARATOR, ASSOCIATED MANUFACTURING PROCESS, AND SECONDARY LITHIUM BATTERY INCLUDING IT

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10851082

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 10851082

Country of ref document: EP

Kind code of ref document: A1