WO2011125609A1 - Capteur de détection de flux magnétique - Google Patents

Capteur de détection de flux magnétique Download PDF

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Publication number
WO2011125609A1
WO2011125609A1 PCT/JP2011/057645 JP2011057645W WO2011125609A1 WO 2011125609 A1 WO2011125609 A1 WO 2011125609A1 JP 2011057645 W JP2011057645 W JP 2011057645W WO 2011125609 A1 WO2011125609 A1 WO 2011125609A1
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WO
WIPO (PCT)
Prior art keywords
movable body
magnetic flux
axis direction
curved surface
flux density
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Application number
PCT/JP2011/057645
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English (en)
Japanese (ja)
Inventor
信二 天池
保 南谷
雅也 植田
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株式会社村田製作所
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Publication of WO2011125609A1 publication Critical patent/WO2011125609A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02—Details
    • G01C9/06—Electric or photoelectric indication or reading means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/10—Measuring inclination, e.g. by clinometers, by levels by using rolling bodies, e.g. spheres, cylinders, mercury droplets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02—Details
    • G01C9/06—Electric or photoelectric indication or reading means
    • G01C2009/064—Electric or photoelectric indication or reading means inductive

Definitions

  • the present invention relates to a magnetic flux detection sensor suitable for use in, for example, detection of posture inclination.
  • Patent Document 1 As a conventional magnetic flux detection sensor, a tilt sensor that detects the tilt of a posture is known (for example, see Patent Document 1).
  • a configuration including a spherical movable body made of a magnetic material provided on a tilted surface of a magnet so as to be able to roll is disclosed.
  • the tilt sensor of Patent Document 1 the movable body rolls and displaces on the tilted surface according to the tilt of the magnet, and the change in magnetic flux density accompanying the displacement of the movable body is detected by the magnetoelectric conversion element.
  • some magnetoelectric conversion elements used in the tilt sensor according to the prior art have a characteristic (anisotropy) in which the output level of the detection signal varies depending on the application direction of the magnetic flux density.
  • anisotropy in which the output level of the detection signal varies depending on the application direction of the magnetic flux density.
  • the output level of the detection signal differs depending on the tilting direction.
  • an accurate tilt angle cannot be detected compared to the direction in which the output level of the detection signal changes small with respect to the tilt angle. .
  • the present invention has been made in view of the above-described problems of the prior art, and an object of the present invention is to provide a magnetic flux detection sensor that can obtain an output level of a substantially constant detection signal for the same tilt angle regardless of the tilt direction. It is to provide.
  • the present invention is provided in a nonmagnetic container including a movable body, a movable body housing space having an upward concave curved surface that slidably supports the movable body, and the nonmagnetic container.
  • a magnetic flux detection sensor that detects a change in magnetic flux density caused by the sliding of the movable body, wherein the magnetic flux density detection means is configured in the X-axis direction and the Y-axis direction orthogonal to each other in the horizontal plane.
  • the detection signal when the magnetic flux is tilted in the Y-axis direction has a greater anisotropy than the detection signal when the magnetic flux is tilted in the axial direction, and the concave curved surface of the movable body accommodating space is
  • the movable body and the magnetic flux density detection are formed by an anisotropic curved surface that greatly displaces the movable body in the Y-axis direction compared to the X-axis direction.
  • the movable body When the non-magnetic container is tilted from the horizontal state, the movable body is displaced from a steady position along the concave curved surface of the non-magnetic container, and when the non-magnetic container returns to the horizontal state, the movable body Is configured to return to a steady position along the concave curved surface of the non-magnetic container.
  • the movable body housed in the movable body housing space slides on the concave curved surface and moves toward the lowest position of the concave curved surface when the non-magnetic container is tilted from the horizontal state.
  • the magnetic flux density detection means is disposed opposite to the movable body and embedded in the nonmagnetic container, the relative position between the movable body and the magnetic flux density detection means changes according to the inclination angle of the nonmagnetic container.
  • the magnetic flux density applied to the magnetic flux density detection means changes according to the change in the relative position between the movable body and the magnetic flux density detection means.
  • the magnetic flux density detection means has anisotropy with a larger output level of the detection signal accompanying the magnetic flux change when tilted in the Y-axis direction than when tilted in the X-axis direction by the same tilt angle.
  • the concave curved surface of the movable body accommodating space is formed by an anisotropic curved surface that greatly displaces the movable body in the Y-axis direction compared to the X-axis direction. For this reason, the amount of displacement of the movable body with respect to the tilt angle is larger when the nonmagnetic container is tilted in the Y-axis direction than when the non-magnetic container is tilted in the X-axis direction. The position change with the movable body can be increased.
  • the magnetic flux density applied to the magnetic flux density detection means is greatly reduced when the nonmagnetic container is tilted in the X-axis direction by the same tilt angle when tilted in the Y-axis direction.
  • the output levels for the same tilt angle when the non-magnetic container is tilted in the X-axis direction and when the non-magnetic container is tilted in the Y-axis direction can be made substantially equal, and the magnetic flux density detection means is different.
  • the directionality can be compensated.
  • the movable body is formed using a magnetic material, and has a sliding surface that slides on the bottom surface of the concave curved surface of the movable body accommodating space, and the sliding surface and the upper surface have opposite polarities. In this state, the magnetized structure is in a state of being heated.
  • the movable body is formed using a magnetic material and magnetized in a state where the sliding surface and the upper surface have opposite polarities, the magnetic flux is directed toward the normal direction of the sliding surface. appear. Therefore, when the magnetic flux density detecting means is disposed around the deepest part of the concave curved surface when the non-magnetic container is placed in a horizontal state, for example, as the position where the movable body and the magnetic flux density detecting means face each other, the sliding surface is interposed. Thus, a magnetic flux can be applied to the magnetic flux density detecting means.
  • the movable body slides on the concave curved surface, and the movable body moves toward the lowest position of the concave curved surface. For this reason, the relative position of the movable body and the magnetic flux density detection means changes, and the magnetic flux density applied from the movable body to the magnetic flux density detection means changes according to the tilt angle. For this reason, when tilting in all directions at the same tilt angle, the output level of the magnetic flux density detecting means can be made substantially equal by the anisotropic curved surface, and the anisotropy of the magnetic flux density detecting means can be compensated.
  • At least one of the sliding surface of the movable body and the concave curved surface of the movable body housing space is subjected to a smoothing process.
  • the sliding surface of the movable body and the concave curved surface of the movable body housing space is smoothed, the sliding surface of the movable body and the concave curved surface of the movable body housing space The frictional resistance between them can be reduced, and the movable body can be smoothly slid on the concave curved surface.
  • the anisotropic curved surface is formed by a half-shaped ellipsoidal surface in which the X-axis direction of the magnetic flux density detection means is a short direction and the Y-axis direction of the magnetic flux density detection means is a longitudinal direction. Yes.
  • the anisotropic curved surface is formed by a half-shaped ellipsoidal surface in which the X-axis direction of the magnetic flux density detection means is the short direction and the Y-axis direction of the magnetic flux density detection means is the longitudinal direction.
  • the anisotropic curved surface includes a half-shaped ellipsoidal surface in which the X-axis direction of the magnetic flux density detecting means is a short direction and the Y-axis direction of the magnetic flux density detecting means is a longitudinal direction; It is formed in combination with a hemispherical surface having a diameter dimension smaller than the length dimension in the longitudinal direction of the body surface and larger than the length dimension in the lateral direction.
  • the anisotropic curved surface is formed by combining a half-shaped ellipsoidal surface and a hemispherical surface
  • the Y-axis direction is compared to when the non-magnetic container is inclined in the X-axis direction by the same inclination angle.
  • the amount of movement of the movable body increases, and the change in the magnetic flux density applied to the magnetic flux density detection means decreases.
  • the output level of the detection signal of the magnetic flux density detection means when tilted in the Y-axis direction can be made substantially equal.
  • the contact area between the movable body and the anisotropic curved surface can be reduced, and these frictional resistances can be reduced. For this reason, the responsiveness of the movable body with respect to the inclination angle can be improved, and the detection accuracy of the inclination angle can be improved.
  • FIG. 5 is a cross-sectional view of the tilt sensor as seen from the direction of arrows II-II in FIG. 4.
  • FIG. 3 is a cross-sectional view of the tilt sensor as seen from the direction of arrows III-III in FIG.
  • It is a top view which shows the inclination sensor in FIG. 1 in the state which excluded the cover body.
  • It is explanatory drawing which shows the positional relationship of the movable body and magnetoelectric conversion element in FIG.
  • It is a front view which shows the magnetoresistive sensor of a magnetoelectric conversion element.
  • It is an equivalent circuit diagram which shows a magnetoelectric conversion element.
  • FIG. 2 which shows the inclination sensor by 3rd Embodiment. It is sectional drawing which looked at the inclination sensor from the arrow XIV-XIV direction in FIG. It is a top view which shows the inclination sensor in FIG. 13 in the state which excluded the cover body. It is sectional drawing of the same position as FIG. 2 which shows the inclination sensor by 4th Embodiment. It is sectional drawing of the position similar to FIG. 2 which shows the inclination sensor by a 1st modification. It is sectional drawing of the position similar to FIG. 2 which shows the inclination sensor by a 2nd modification. It is sectional drawing of the position similar to FIG. 2 which shows the inclination sensor by a 3rd modification.
  • FIG. 2 It is sectional drawing of the same position as FIG. 2 which shows the inclination sensor by a 4th modification. It is sectional drawing of the position similar to FIG. 2 which shows the inclination sensor by a 5th modification. It is sectional drawing of the position similar to FIG. 2 which shows the inclination sensor by the 6th modification.
  • the tilt sensor 1 is composed of a casing 2, a magnetoelectric conversion element 8, and a movable body 12, which will be described later.
  • the casing 2 is a nonmagnetic container formed using a nonmagnetic material such as an insulating resin material.
  • the casing 2 includes a casing main body 3 formed in a substantially cylindrical shape with a bottom, and a lid body 4 that covers an upper side that serves as an opening of the casing main body 3.
  • the casing body 3 has a height dimension of several mm (for example, about 9 mm) in the Z-axis direction among the X axis, the Y axis, and the Z axis orthogonal to each other. Further, the cross-sectional shape on the XY plane which is a horizontal plane is a substantially circular shape having an outer diameter of several mm (for example, about 9 mm).
  • a concave portion 3A that is recessed in a substantially semi-elliptical bowl shape is formed on the upper side of the casing body 3, and a substantially cylindrical male fitting portion 3B faces upward at the opening edge of the concave portion 3A. It is integrally formed.
  • the surface (exposed surface) of the recess 3A is a concave curved surface 5 that opens upward, and the cross-sectional shapes of the XZ plane and the YZ plane are different.
  • the concave curved surface 5 is formed of a half-shaped ellipsoidal surface in which the X-axis direction is a short axis and the Y-axis direction is a long axis.
  • the major axis dimension D1a and minor axis dimension D1b of the concave curved surface 5 compensate for the anisotropy of the output level of the detection signal of the magnetoelectric transducer 8 as will be described later, and the casing 2 is in any direction on the XY plane. Even when tilted, the magnetoelectric transducer 8 is designed so that the detection signal Vout having the same output level can be obtained. Further, the minimum curvature radius r1 along the minor axis direction of the concave curved surface 5 is larger than the curvature radius r2 of the sliding surface 13 of the movable body 12 described later.
  • the lid body 4 is formed in a substantially disc shape, and a cylindrical female fitting portion 4A is integrally formed on the outer peripheral edge thereof downward.
  • a cylindrical female fitting portion 4A is integrally formed on the outer peripheral edge thereof downward.
  • a substantially cylindrical rod portion 7 extending downward toward the deepest portion 5A of the concave curved surface 5 is provided at the center portion of the lid body 4.
  • the lower end part of the rod part 7 is formed in the substantially hemispherical shape.
  • the magnetoelectric conversion element 8 serving as a magnetic flux density detection means is constituted by, for example, a bridge circuit 8A constituted by four magnetoresistive elements R1 to R4 and a differential amplifier 8B.
  • the bridge circuit 8A and the differential amplifier 8B are formed as an integrated AMR-IC (Anisotropic Magneto Resistance Integrated Circuit).
  • the input terminal of the differential amplifier 8B is connected to a connection point between the magnetoresistive elements R1 and R2 and a connection point between the magnetoresistive elements R3 and R4.
  • the differential amplifier 8B differentially amplifies the potential difference generated between these two connection points and outputs a detection signal Vout.
  • connection point between the magnetoresistive elements R2 and R4 is connected to a ground terminal 9 for connection to an external ground GND.
  • the connection point between the magnetoresistive elements R1 and R3 is connected to a drive voltage terminal 10 for supplying the drive voltage Vdd.
  • the output terminal of the differential amplifier 8B is connected to a signal output terminal 11 that outputs a detection signal Vout such as a voltage.
  • the ground terminal 9, the drive voltage terminal 10, and the signal output terminal 11 are formed of, for example, a conductive metal material, embedded in the casing body 3, and a part of the ground terminal 9, the driving voltage terminal 10, and the signal output terminal 11 protrude downward from the lower surface side of the casing body 3. Yes.
  • the magnetoresistive elements R1 to R4 are formed on a sensor substrate S arranged in parallel to the XZ plane as shown in FIG.
  • the magnetoresistive elements R1 to R4 are formed by chemical vapor deposition (CVD) or the like of a magnetoresistive material such as indium antimony (InSb).
  • the magnetoresistive elements R1 and R4 are formed in a shape in which a plurality of elongated patterns extending in the Z-axis direction are connected in a meander shape, and their resistance values according to the magnetic flux density in the X-axis direction orthogonal to the current direction (Z-axis direction). Changes.
  • the magnetoresistive elements R2 and R3 are formed in a shape in which a plurality of elongated patterns extending in the X-axis direction are connected in a meander shape, and depending on the magnetic flux density in the Z-axis direction orthogonal to the current direction (X-axis direction). The resistance value changes.
  • the detection signal Vout when the magnetic flux is tilted in the Y-axis direction has a higher output level than the detection signal Vout when the magnetic flux ⁇ is tilted in the X-axis direction, and the anisotropy have.
  • the magnetoelectric conversion element 8 is provided inside the casing main body 3 positioned below the deepest part 5A of the concave curved surface 5 by a minute dimension ⁇ .
  • the magnetoelectric conversion element 8 is disposed at a position facing the sliding surface 13 of the movable body 12 accommodated in the movable body accommodating space 6.
  • a magnetic flux ⁇ from the movable body 12 is applied to the magnetoelectric conversion element 8 via the sliding surface 13 of the movable body 12. Thereby, the magnetoelectric conversion element 8 detects a change in magnetic flux density caused by the sliding of the movable body 12.
  • the movable body 12 is formed using a magnetic material such as ferrite, for example, and is formed into a substantially hemispherical magnet (permanent magnet).
  • a sliding surface 13 made of a downward convex curved surface is formed on the bottom side of the movable body 12, and a flat upper surface 14 is formed on the upper side of the movable body 12.
  • the movable body 12 has the maximum thickness at the apex portion 12A of the sliding surface 13 that is substantially hemispherical, and approaches the upper surface peripheral portion 12B of the upper surface 14 from the apex portion 12A along the sliding surface 13. The thickness gradually decreases according to
  • the movable body 12 is magnetized so that the sliding surface 13 and the upper surface 14 have opposite polarities, for example, the sliding surface 13 is an N pole and the upper surface 14 is an S pole. As a result, the movable body 12 generates a magnetic flux ⁇ toward the normal direction of the sliding surface 13. Note that the magnetic flux density around the apex portion 12A where the thickness of the movable body 12 is maximum increases, and the magnetic flux density gradually decreases as it approaches the upper surface peripheral portion 12B.
  • the movable body 12 is accommodated in the movable body accommodation space 6 of the casing 2 with the sliding surface 13 facing downward so that the concave curved surface 5 of the casing 2 and the sliding surface 13 of the movable body 12 come into contact with each other and can slide. For this reason, when the casing 2 is tilted from the horizontal state, the movable body 12 slides and displaces inside the movable body accommodating space 6 along the concave curved surface 5.
  • the movable body 12 since the movable body 12 has a hemispherical shape protruding downward, the upper surface 14 is stationary in a horizontal state based on its weight balance. Therefore, the positional relationship between the apex portion 12A of the movable body 12 and the magnetoelectric conversion element 8 changes according to the inclination angle ⁇ of the casing 2, and the magnetic flux ⁇ applied from the movable body 12 to the magnetoelectric conversion element 8 The direction of changes.
  • the upper peripheral edge portion 12B of the movable body 12 is rounded in a circular arc shape, and a chamfered portion 15 is formed.
  • the movable body 12 is formed with a recessed portion 16 that is located in the center of the upper surface 14 and is recessed in a substantially circular shape.
  • the recessed portion 16 By providing the recessed portion 16, the position of the center of gravity of the movable body 12 moves to the apex portion 12A side, and the stability of the movable body 12 is enhanced.
  • the tilt sensor 1 according to the present embodiment has the above-described configuration, and the operation thereof will be described next.
  • the movable body 12 is disposed on the deepest part 5A side of the concave curved surface 5 as a steady position. Specifically, the movable body 12 is supported by the concave curved surface 5 in a state where the apex portion 12A of the movable body 12 is in contact with the deepest portion 5A of the concave curved surface 5. At this time, the apex portion 12 ⁇ / b> A having a high magnetic flux density in the movable body 12 is disposed at a position directly above the magnetoelectric conversion element 8.
  • the magnetic flux ⁇ by the movable body 12 is applied to the magnetoelectric conversion element 8 along the Z-axis direction that is the height direction of the casing 2. For this reason, the magnetoelectric transducer 8 outputs the largest detection signal Vout according to the magnetic flux density in the Z-axis direction.
  • the movable body 12 is displaced from the steady position along the concave curved surface 5 and moves toward the lowest position of the movable body accommodating space 6. . Therefore, the apex portion 12A having a high magnetic flux density in the movable body 12 is separated from the deepest portion 5A of the concave curved surface 5 in accordance with the inclination angle ⁇ of the casing 2, and the uppermost peripheral portion having a low magnetic flux density is included in the deepest portion 5A. 12B approaches. Therefore, the magnetic flux density applied from the movable body 12 to the magnetoelectric conversion element 8 decreases according to the inclination angle ⁇ .
  • the magnetoelectric conversion element 8 detects the magnetic flux density in the direction inclined by the inclination angle ⁇ with respect to the Z-axis direction, and outputs a detection signal Vout corresponding to the magnetic flux density. As a result, the magnetoelectric transducer 8 outputs the detection signal Vout corresponding to the inclination angle ⁇ , and the detection signal Vout gradually decreases as the inclination angle ⁇ increases.
  • the movable body 12 is displaced toward the deepest part 5A along the concave curved surface 5, and the apex part 12A returns to the steady position where it contacts the deepest part 5A. To do. Thereby, the magnetic flux density applied to the magnetoelectric conversion element 8 increases again, and the magnetoelectric conversion element 8 outputs the largest detection signal Vout according to the magnetic flux density in the Z-axis direction.
  • the magnetoelectric transducer 8 is anisotropic in which the detection signal Vout when the magnetic flux ⁇ is inclined in the Y-axis direction has a higher output level than the detection signal Vout when the magnetic flux ⁇ is inclined in the X-axis direction.
  • the concave curved surface 5 of the movable body accommodating space 6 is formed by an ellipsoidal surface that greatly displaces the movable body 12 in the Y-axis direction compared to the X-axis direction.
  • the displacement amount of the movable body 12 becomes larger when the casing 2 is tilted in the Y-axis direction than when the casing 2 is tilted in the X-axis direction at the same tilt angle ⁇ , and the magnetoelectric conversion element 8 and the movable body.
  • the position change with 12 apex portions 12A becomes large.
  • the magnetoelectric current is more when the casing 2 is tilted in the Y-axis direction than when the casing 2 is tilted in the X-axis direction.
  • a change in magnetic flux density applied to the conversion element 8 increases. That is, the magnetic flux density applied to the magnetoelectric transducer 8 from the movable body 12 is lower when tilted in the Y-axis direction than when tilted in the X-axis direction at the same tilt angle ⁇ , and the detection signal Vout.
  • the output level can be reduced.
  • the detection signal Vout of the magnetoelectric conversion element 8 when the casing 2 is tilted in the X-axis direction and the detection signal Vout of the magnetoelectric conversion element 8 when the casing 2 is tilted in the Y-axis direction are relative to the tilt angle ⁇ .
  • the output level can be made substantially equal.
  • the movable body 12 of the present embodiment has formed the sliding surface 13 made of a downward hemispherical surface on the bottom side of the movable body 12, as the sliding surface 13 moves from the apex portion 12A toward the upper peripheral portion 12B.
  • the thickness gradually decreases. For this reason, the magnetic flux density is high around the apex portion 12 ⁇ / b> A of the movable body 12, and the magnetic flux density is reduced at the upper peripheral edge portion 12 ⁇ / b> B of the movable body 12.
  • the movable body 12 accommodated in the movable body accommodating space 6 has a sliding surface 13 of the movable body 12 that slides on the concave curved surface 5 when the casing 2 is tilted from the horizontal state, and the lowest of the concave curved surface 5.
  • the apex portion 12A of the movable body 12 moves toward the position.
  • the magnetoelectric conversion element 8 is provided in the casing 2 and the sliding surface 13 of the movable body 12 and the magnetoelectric conversion element 8 are disposed to face each other, the apex portion 12A of the movable body 12 according to the inclination angle ⁇ of the casing 2.
  • the relative position of the magnetoelectric transducer 8 change. For this reason, the magnetic flux density applied to the magnetoelectric conversion element 8 changes according to the inclination angle ⁇ of the casing 2.
  • the apex portion 12A of the movable body 12 only needs to be displaced with respect to the magnetoelectric conversion element 8. Therefore, the movable body accommodating space 6 of the casing 2 has a volume that allows the movable body 12 to be rotationally displaced. If there is enough. For this reason, the volume of the movable body accommodation space 6 can be brought close to the volume of the movable body 12, and the inclination sensor 1 can be reduced in size.
  • the magnetoelectric conversion element 8 is arranged around the deepest part 5A of the concave curved surface 5 when the casing 2 is in a horizontal state, the apex portion 12A of the movable body 12 is magnetoelectrically converted when the inclination angle ⁇ of the casing 2 decreases.
  • the magnetic flux density applied to the magnetoelectric conversion element 8 increases as it approaches the element 8.
  • the apex portion 12A of the movable body 12 moves away from the magnetoelectric conversion element 8, and the magnetic flux density applied to the magnetoelectric conversion element 8 decreases.
  • the magnetic flux density applied to the magnetoelectric conversion element 8 changes according to the thickness dimension of the portion of the movable body 12 facing the magnetoelectric conversion element 8. For this reason, the linearity of the detection signal of the magnetoelectric conversion element 8 with respect to the inclination angle ⁇ of the casing 2 can be improved compared with the case where the movable body 12 is formed into a thick disk shape or a spherical shape with a small diameter, for example.
  • the range of possible tilt angles can be expanded.
  • the chamfered portion 15 can alleviate the concentration of the magnetic flux ⁇ at the upper peripheral portion 12B of the movable body 12. For this reason, the magnetic flux density can be gradually decreased as the apex portion 12A approaches the upper surface peripheral portion 12B. As a result, the tilt angle ⁇ increases, and the magnetic flux density decreases continuously and uniformly as the tilt angle ⁇ increases even in the range where the upper surface peripheral portion 12B and the magnetoelectric transducer 8 approach each other (for example, 50 ° or more). Thereby, the magnetic flux density has a region that is nearly linear with respect to the tilt angle ⁇ , and the range of the detectable tilt angle ⁇ can be further expanded.
  • the movable body 12 is composed of magnets in which the sliding surface 13 and the upper surface 14 have opposite polarities, a magnetic flux ⁇ is generated in the normal direction of the sliding surface 13.
  • the magnetoelectric conversion element 8 is disposed so as to face the sliding surface 13 of the movable body 12, when the casing 2 is tilted from the horizontal state, the sliding surface 13 of the movable body 12 slidable facing the magnetoelectric conversion element 8.
  • the magnetoelectric transducer 8 is also tilted substantially in line with the normal direction of the portion.
  • the magnetic flux density gradually decreases from the apex portion 12A of the movable body 12 toward the upper peripheral edge portion 12B, and the portion of the sliding surface 13 of the movable body 12 that faces the magnetoelectric conversion element 8 according to the inclination angle ⁇ of the casing 2 Is displaced. For this reason, the magnetic flux density applied from the movable body 12 to the magnetoelectric conversion element 8 can be changed in accordance with the inclination angle ⁇ of the casing 2, and the magnetoelectric conversion element 8 ensures the magnetic flux density in accordance with the inclination angle ⁇ . Can be detected. As a result, the magnetoelectric conversion element 8 outputs a detection signal corresponding to the inclination angle ⁇ .
  • the concave curved surface 5 of the movable body accommodating space 6 is formed by a half-shaped ellipsoidal surface having a radius of curvature r1 larger than the sliding surface 13 which is the hemispherical surface of the movable body 12, the movable body 12 is It is possible to slide on the concave curved surface 5 with the apex portion 12A in contact with the concave curved surface 5.
  • the concave curved surface 5 of the movable body accommodating space 6 is formed by an ellipsoidal surface that greatly displaces the movable body 12 in the Y-axis direction compared to the X-axis direction, the concave curved surface 5 is inclined in any direction at the same inclination angle ⁇ . Even in this case, the output level with respect to the inclination angle ⁇ can be made substantially equal, and the anisotropy of the magnetoelectric transducer 8 can be compensated.
  • the amount of displacement of the movable body 12 with respect to the tilt angle ⁇ is increased when the casing 2 is tilted in the Y-axis direction compared to when the casing 2 is tilted in the X-axis direction.
  • the positional change between the magnetoelectric conversion element 8 and the apex portion 12A of the movable body 12 can be increased.
  • the magnetoelectric current is more when the casing 2 is tilted in the Y-axis direction than when the casing 2 is tilted in the X-axis direction.
  • a change in magnetic flux density applied to the conversion element 8 increases.
  • the magnetic flux density applied from the movable body 12 to the magnetoelectric transducer 8 is lowered when tilted in the Y-axis direction compared to when tilted in the X-axis direction at the same tilt angle ⁇ , and the detection signal Vout.
  • the output level can be suppressed.
  • the magnetoelectric transducer 8 is anisotropic in that the detection signal Vout when the magnetic flux ⁇ is tilted in the Y-axis direction has a higher output level than the detection signal Vout when the magnetic flux ⁇ is tilted in the X-axis direction. Even if it has a property, the anisotropy of this magnetoelectric conversion element 8 can be supplemented. Thereby, the detection signal Vout of the magnetoelectric conversion element 8 when the casing 2 is inclined in the X-axis direction and the detection signal Vout of the magnetoelectric conversion element 8 when the casing 2 is inclined in the Y-axis direction are relative to the inclination angle ⁇ .
  • the output level can be made substantially equal.
  • FIGS. 10 to 12 show a second embodiment of the present invention.
  • the concave curved surface of the movable body housing space has a half-shaped ellipsoidal surface in which the X-axis direction is the short direction and the Y-axis direction is the longitudinal direction, and the central portion of the ellipsoidal surface. It is formed by an anisotropic curved surface combined with a hemispherical surface in contact with.
  • the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
  • the inclination sensor 21 includes a casing 22, a magnetoelectric conversion element 8, and a movable body 12 in substantially the same manner as the inclination sensor 1 according to the first embodiment.
  • the casing 22 is a nonmagnetic container formed using a nonmagnetic material such as an insulating resin material.
  • the casing 22 includes a casing main body 23 formed in a substantially cylindrical shape with a bottom, and a lid body 24 that covers an upper portion serving as an opening of the casing main body 23.
  • the casing body 23 has a substantially circular cross-sectional shape with respect to the XY plane, and has a height of about several millimeters in the Z-axis direction (axial direction). Further, a concave portion 23A that is recessed in a substantially semi-ellipsoidal shape is formed on the upper side of the casing body 23, and a cylindrical male fitting portion 23B is formed on the opening side of the concave portion 23A.
  • a concave curved surface 25 opened upward is formed on the surface (exposed surface) of the concave portion 23A.
  • the concave curved surface 25 is formed by an anisotropic curved surface having different shapes in the X-axis direction and the Y-axis direction. Specifically, the concave curved surface 25 is shorter than the half length of the ellipsoidal surface 25A in which the X-axis direction is the short axis and the Y-axis direction is the long axis, and the length in the longitudinal direction of the ellipsoidal surface 25A. It is formed by an anisotropic curved surface combined with a hemispherical surface 25B having a diameter dimension D2b larger than the length dimension in the hand direction.
  • the central portion of the ellipsoidal surface 25A and the central portion of the hemispherical surface 25B are both located at and in contact with the deepest portion 25C of the concave curved surface 25, and the concave portion 23A is formed symmetrically with respect to the XZ plane and the YZ plane.
  • the major axis dimension D2a of the ellipsoidal surface 25A and the diameter dimension D2b of the hemispherical surface 25B are the magnetoelectric conversion located below the deepest portion 25C of the concave curved surface 25, regardless of the direction of the casing 22 in the XY plane.
  • the detection signal Vout having the same output level is obtained from the element 8.
  • the lid body 24 is formed in a substantially disc shape, and a cylindrical female fitting portion 24A is integrally formed on the outer peripheral edge thereof downward.
  • a substantially semi-elliptical movable body accommodating space 26 is formed by combining the ellipsoidal surface and the substantially hemispherical surface.
  • a rod portion 27 substantially the same as the rod portion 7 according to the first embodiment is provided at the central portion of the lid body 24.
  • the movable body 12 is compared to the case where the concave curved surface 25 is formed only by the half-shaped ellipsoidal surface. And the concave curved surface 25 can be reduced to reduce these frictional resistances. For this reason, the responsiveness of the movable body 12 with respect to the inclination angle ⁇ can be enhanced, and the detection accuracy of the inclination angle ⁇ can be improved.
  • the same operational effects as those in the first embodiment can be obtained.
  • FIG. 13 to FIG. 15 show a third embodiment of the present invention.
  • the feature of the present embodiment is that a flat bottom portion is formed on the deepest side of the concave curved surface.
  • the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
  • the inclination sensor 31 includes a casing 32, a magnetoelectric conversion element 8, and a movable body 12 in substantially the same manner as the inclination sensor 1 according to the first embodiment.
  • the casing 32 is a nonmagnetic container formed using a nonmagnetic material such as an insulating resin material.
  • the casing 32 includes a casing main body 33 formed in a substantially cylindrical shape with a bottom, and a lid body 34 that covers an upper portion serving as an opening of the casing main body 33.
  • the casing body 33 has a substantially circular cross-sectional shape with respect to the XY plane, and has a height dimension of about several millimeters in the Z-axis direction (axial direction).
  • a concave portion 33A that is recessed in a substantially semi-ellipsoidal shape is formed on the upper side of the casing body 33, and a cylindrical male fitting portion 33B is formed on the opening side of the concave portion 33A.
  • a concave curved surface 35 made of an anisotropic curved surface opened upward is formed on the surface (exposed surface) of the concave portion 33A.
  • the concave curved surface 35 is formed by an anisotropic curved surface having different cross-sectional shapes in the X-axis direction and the Y-axis direction, almost like the concave curved surface 5 according to the first embodiment.
  • the concave curved surface 35 is formed by a substantially ellipsoidal surface having a halved shape in which the X-axis direction is the short axis and the Y-axis direction is the long axis.
  • the concave curved surface 35 compensates for the anisotropy of the magnetoelectric conversion element 8 and is formed in a shape that allows the detection signal Vout of the same output level to be obtained from the magnetoelectric conversion element 8 when the casing 32 is inclined in any direction of the XY plane. Has been.
  • a bottom surface portion 35A that is, for example, a small-diameter elliptical flat surface parallel to the XY plane is formed.
  • the surface of the substantially ellipsoidal surface of the recess 33A and the outer periphery of the bottom surface portion 35A are connected by a bottom surface connection portion 35B having a side shape of an elliptical truncated cone that swells downward.
  • the concave curved surface 35 is formed in a substantially semi-ellipsoidal surface shape as a whole.
  • the bottom surface portion 35A and the bottom surface connection portion 25B support the sliding surface 13 of the movable body 12 in a state close to point contact. For this reason, even when the inclination angle ⁇ is small, the frictional resistance between the concave curved surface 35 and the movable body 12 can be reduced, and the movable body 12 can be easily slid. Further, since the bottom surface portion 35A that is a flat surface is provided on the deepest side of the concave curved surface 35, when the casing 32 is returned to the horizontal state, the movable body 12 is surely returned to the bottom surface portion 35A that is the steady position. Can do.
  • the lid body 34 is formed in a substantially disk shape, and a cylindrical female fitting portion 34A is integrally formed on the outer peripheral edge thereof downward.
  • a substantially semi-elliptical shape is provided between the casing main body 33 and the lid body 34.
  • a body-like movable body accommodating space 36 is formed.
  • a rod portion 37 that is substantially the same as the rod portion 7 according to the first embodiment is provided at the central portion of the lid 34.
  • the bottom surface portion 35A which is a flat surface is provided on the deepest side of the concave curved surface 35, the bottom surface portion 35A supports the sliding surface 13 of the movable body 12 in a state close to point contact. .
  • the inclination angle ⁇ is small, the frictional resistance between the concave curved surface 35 and the movable body 12 can be reduced, and the movable body 12 can be easily slid.
  • the casing 32 is returned to the horizontal state, the movable body 12 can be reliably returned to the bottom surface portion 35A at the steady position.
  • the same operational effects as those in the first embodiment can be obtained.
  • the concave curved surface 35 according to the third embodiment is formed by a substantially split ellipsoidal surface like the concave curved surface 5 according to the first embodiment, but like the concave curved surface 25 according to the second embodiment.
  • the semi-ellipsoidal surface and the hemispherical surface may be combined.
  • FIG. 16 shows a fourth embodiment of the present invention.
  • the feature of this embodiment is that a coating film as a smoothing process is formed on a concave curved surface.
  • the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
  • the inclination sensor 41 is constituted by the casing 2, the magnetoelectric conversion element 8, and the movable body 12 in substantially the same manner as the inclination sensor 1 according to the first embodiment.
  • a thin coating film 42 made of fluorine resin, silicon resin or the like is formed on the surface of the concave curved surface 5 as a smoothing process.
  • the coating film 42 has, for example, a smooth surface having lubricity, and reduces the contact resistance with respect to the movable body 12.
  • the fourth embodiment can provide the same operational effects as the first embodiment.
  • the coating film 42 as the smoothing process is formed on the concave curved surface 5
  • the frictional resistance between the concave curved surface 5 and the movable body 12 can be reduced.
  • the responsiveness of the movable body 12 can be improved with respect to the change of the inclination angle ⁇ , and the detection accuracy of the inclination angle ⁇ can be improved.
  • the coating film 42 is formed on the surface of the concave curved surface 5.
  • the coating film 42 may be formed on the sliding surface 13 of the movable body 12.
  • a coating film 42 may be formed on both surfaces 13.
  • the resin coating film 42 is used as the smoothing process.
  • a metal thin film by plating or the like may be formed, and surface irregularities are reduced as in the surface polishing process.
  • Various surface treatments that can be applied are applicable.
  • the movable body 12 including the chamfered portion 15 is used.
  • a movable body that omits the chamfered portion may be used.
  • the chamfered portion 15 having a circular arc cross section is provided on the upper peripheral edge portion 12B of the movable body 12.
  • the present invention is not limited to this.
  • the movable body 52 includes a sliding surface 53 and a flat upper surface 54 with the apex portion 52A protruding downward.
  • the chamfered portion 55 of the movable body 52 is configured to form a conical side surface that is inclined from the radially outer side toward the inner side of the movable body 52 as it goes upward.
  • a circumferential surface parallel to the vertical direction may be formed.
  • the movable body 12 has a thickness dimension close to the radius of curvature r2 of the sliding surface 13 made of a hemispherical surface.
  • the present invention is not limited to this, and the movable body 62 is made of a hemispherical surface within a range where a desired magnetic flux density distribution can be obtained, such as the tilt sensor 61 according to the second modification shown in FIG.
  • a configuration having a thickness dimension smaller than the curvature radius of the surface 63 (for example, about half of the curvature radius) may be adopted.
  • the movable body 62 includes a sliding surface 63 with a vertex portion 62A projecting downward and a flat upper surface 64, and the thickness dimension gradually decreases from the vertex portion 62A toward the upper surface peripheral portion 62B. It is. Further, the movable body may have a thickness dimension larger than the radius of curvature of the sliding surface within a range in which rolling can be prevented.
  • the movable body 12 is provided with the recessed portion 16 that is located in the central portion of the upper surface 14 and is recessed in a columnar shape.
  • the present invention is not limited to this, and may have a configuration in which the recessed portion is omitted.
  • the movable body 72 is positioned at the central portion of the upper surface 74. It is good also as a structure which provides the concave-concave part 75 dented in the concave shape.
  • the movable body 72 preferably includes the sliding surface 73 formed of a hemispherical surface, and the thickness dimension thereof gradually decreases as the apex portion 72A approaches the upper surface peripheral portion 72B.
  • the movable body 12 made of a substantially hemispherical magnet is used.
  • the present invention is not limited to this, and the movable body 82 may be formed of a thick disk-shaped (columnar) magnet, such as the tilt sensor 81 according to the fourth modification shown in FIG. Good.
  • the circular lower surface 82A and upper surface 82B are magnetized with opposite polarities.
  • the movable body 92 may be formed of a substantially spherical magnet.
  • the lower part 92A and the upper part 92B which are located on both ends in the upper and lower directions of the movable body 92 are magnetized to have opposite polarities.
  • the movable body 92 has a spherical shape, the direction of the magnetic flux ⁇ changes when it is rolled and displaced.
  • a connecting means 93 such as rubber or a spring is provided between the body 4 'and the body 4'.
  • the movable body 12 is constituted by a magnet.
  • the present invention is not limited to this, and a configuration in which a magnet 105 serving as a generation source of the magnetic flux ⁇ is provided in the casing 2 ′′ separately from the movable body 102, as in the tilt sensor 101 according to the sixth modification shown in FIG.
  • the movable body 102 is formed of a magnetic material, it is not necessary to be magnetized, and the movable body 102 includes a sliding surface 103 formed of a hemispherical surface and a flat upper surface 104. The thickness dimension gradually decreases as the apex portion 102A approaches the upper surface peripheral portion 102B.
  • the magnet 105 is provided on the lid body 4 ′′ of the casing 2 ′′ and the sliding surface 103 of the movable body 102 is interposed therebetween.
  • the magnet 105 is arranged at a position opposite to the magnetoelectric conversion element 8 with the movable body 102 interposed therebetween.
  • the entire movable body 12 is formed using a magnetic material.
  • the present invention is not limited to this, and the movable body may be configured such that, for example, a hemispherical outer shape is formed using a non-magnetic resin material with a magnetic material inserted.
  • the magnetic flux detection sensor is applied to the inclination sensors 1, 21, 31, 41 for detecting the inclination angle ⁇ of the casings 2, 22, 32 has been described as an example. May be applied to a tilt switch that switches on and off when the switch is tilted by a desired tilt angle.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

L'invention porte sur un capteur d'inclinaison (1) comprenant un boîtier (2), un élément de conversion magnéto-électrique (8) et un corps mobile (12). Le boîtier (2) comprend un espace (6) logeant le corps mobile, qui loge le corps mobile (12), lequel comprend un aimant hémisphérique. L'espace (6) logeant le corps mobile possède une surface incurvée en renfoncement (5), formée par une surface semi-ellipsoïdale, et qui agit en tant que surface anisotrope pour compenser l'anisotropie de l'élément de conversion magnéto-électrique (8). L'élément de conversion magnétoélectrique (8), qui détecte la densité de flux magnétique dans la direction de la hauteur du boîtier (2), est disposé dans le boîtier (2) et est placé sur la face inférieure de la section la plus profonde (5A) de la courbe incurvée en renfoncement (5).
PCT/JP2011/057645 2010-04-02 2011-03-28 Capteur de détection de flux magnétique WO2011125609A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010085967 2010-04-02
JP2010-085967 2010-04-02

Publications (1)

Publication Number Publication Date
WO2011125609A1 true WO2011125609A1 (fr) 2011-10-13

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107621223A (zh) * 2016-07-14 2018-01-23 舍弗勒技术股份两合公司 用于确定永磁体的角位置的传感器装置的永磁体
CN114175202A (zh) * 2019-07-27 2022-03-11 日本艾礼富株式会社 翻倒检测传感器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6326520A (ja) * 1986-07-21 1988-02-04 Tdk Corp 傾斜センサ
JPH0763556A (ja) * 1993-08-30 1995-03-10 Kyoto Doki Kk 傾斜センサ
JPH08261758A (ja) * 1995-03-24 1996-10-11 Mitsuba Electric Mfg Co Ltd 傾斜センサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6326520A (ja) * 1986-07-21 1988-02-04 Tdk Corp 傾斜センサ
JPH0763556A (ja) * 1993-08-30 1995-03-10 Kyoto Doki Kk 傾斜センサ
JPH08261758A (ja) * 1995-03-24 1996-10-11 Mitsuba Electric Mfg Co Ltd 傾斜センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107621223A (zh) * 2016-07-14 2018-01-23 舍弗勒技术股份两合公司 用于确定永磁体的角位置的传感器装置的永磁体
CN114175202A (zh) * 2019-07-27 2022-03-11 日本艾礼富株式会社 翻倒检测传感器

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