WO2011099562A1 - 帯状のシート基板のための搬送装置及び処理装置 - Google Patents
帯状のシート基板のための搬送装置及び処理装置 Download PDFInfo
- Publication number
- WO2011099562A1 WO2011099562A1 PCT/JP2011/052871 JP2011052871W WO2011099562A1 WO 2011099562 A1 WO2011099562 A1 WO 2011099562A1 JP 2011052871 W JP2011052871 W JP 2011052871W WO 2011099562 A1 WO2011099562 A1 WO 2011099562A1
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- WIPO (PCT)
- Prior art keywords
- sheet substrate
- guide member
- substrate
- guide roller
- guide
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
- B65H23/032—Controlling transverse register of web
- B65H23/038—Controlling transverse register of web by rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
- B65H23/0204—Sensing transverse register of web
- B65H23/0216—Sensing transverse register of web with an element utilising photoelectric effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/32—Arrangements for turning or reversing webs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2301/00—Handling processes for sheets or webs
- B65H2301/30—Orientation, displacement, position of the handled material
- B65H2301/31—Features of transport path
- B65H2301/311—Features of transport path for transport path in plane of handled material, e.g. geometry
- B65H2301/31122—Omega-shaped
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2553/00—Sensing or detecting means
- B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
- B65H2553/42—Cameras
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2801/00—Application field
- B65H2801/61—Display device manufacture, e.g. liquid crystal displays
Definitions
- the present invention relates to a transfer apparatus and a substrate processing apparatus.
- display elements constituting display devices such as display devices, for example, liquid crystal display elements, organic electroluminescence (organic EL) elements, electrophoretic elements used in electronic paper, and the like are known.
- organic EL organic electroluminescence
- electrophoretic elements used in electronic paper, and the like.
- a switching element called a thin film transistor (TFT) is formed on a substrate surface, and then an active element (active device) for forming each display device has become a mainstream. ing.
- TFT thin film transistor
- a technique for forming a display element on a sheet-like substrate for example, a film member
- a technique called a roll-to-roll system for example, a technique called a roll-to-roll system (hereinafter simply referred to as “roll system”) is known (see, for example, Patent Document 1).
- roll system a technique called a roll-to-roll system
- a single sheet-like substrate for example, a belt-like film member wound around a substrate supply-side supply roller is sent out, and the sent-out substrate is wound up with a recovery roller on the substrate recovery side. Transport.
- the gate electrode constituting the TFT, the gate oxide film, A semiconductor film, source / drain electrodes, and the like are formed, and components of the display element are sequentially formed on the surface to be processed of the substrate.
- a light emitting layer, an anode, a cathode, an electric circuit, and the like are sequentially formed on the substrate.
- the surface to be processed may come into contact with, for example, a transport roller, which may affect the processing state of the surface to be processed. Therefore, there is a demand for a configuration that minimizes contact with the surface of the substrate before and after performing various processes on the surface of the substrate.
- a transport device for transporting a belt-shaped sheet substrate, wherein the sheet substrate transported from the first direction (or in the first direction) is bent obliquely to transport the sheet substrate.
- the first guide member that changes the direction from the first direction to a second direction that is different from the first direction, and the sheet substrate that is conveyed from the second direction (or in the second direction) is bent obliquely to convey the sheet substrate.
- a second guide member that changes the second direction from the second direction to a third direction different from the second direction, and at least one of the first guide member and the second guide member, the position of the first guide member and the position of the second guide member
- a transport device that includes at least one of the adjustment mechanism and an adjustment mechanism that adjusts the position of the sheet substrate in a direction intersecting the second direction.
- the apparatus includes a conveying device that conveys a belt-shaped sheet substrate and a processing device that performs a predetermined process on the sheet substrate, and the conveying device of the above aspect is used as the conveying device.
- a substrate processing apparatus is provided.
- a conveying device that conveys a belt-shaped sheet substrate, which supports the back surface of the sheet substrate and obliquely conveys the sheet substrate conveyed from the first direction (or in the first direction).
- the first guide member that changes the conveyance direction of the sheet substrate from the first direction to the second direction different from the first direction, supports the back surface of the sheet substrate, and conveys from the second direction (or in the second direction).
- the sheet substrate to be bent obliquely the second guide member for changing the sheet substrate transport direction from the second direction to the third direction different from the second direction, and supporting the back surface of the sheet substrate, from the third direction (or And a third guide member that bends the sheet substrate conveyed in the third direction obliquely and changes the conveyance direction of the sheet substrate from the third direction to a fourth direction different from the third direction.
- the conveyance apparatus includes a conveyance apparatus that conveys a belt-shaped sheet substrate and a processing apparatus that performs a predetermined process on the sheet substrate, and the conveyance apparatus according to the above aspect is used as the conveyance apparatus.
- a substrate processing apparatus is provided.
- a substrate processing apparatus for performing a predetermined process on the surface of a belt-shaped sheet substrate, supporting the back surface of the sheet substrate, from the first direction (or in the first direction).
- the sheet substrate to be conveyed is bent at an angle, and the first guide member that changes the conveyance direction of the sheet substrate from the first direction to the second direction different from the first direction, and supports the back surface of the sheet substrate, from the second direction
- a second guide member that bends the sheet substrate conveyed (or in the second direction) obliquely to change the conveyance direction of the sheet substrate from the second direction to a third direction different from the second direction; and a back surface of the sheet substrate
- a third guide for supporting and bending the sheet substrate conveyed from the third direction (or in the third direction) obliquely to change the conveyance direction of the sheet substrate from the third direction to a fourth direction different from the third direction.
- the fourth direction A fourth guide member that obliquely bends the sheet substrate conveyed (or in the fourth direction) and changes the conveyance direction of the sheet substrate from the fourth direction to a fifth direction different from the fourth direction;
- a substrate processing apparatus comprising a first processing unit that performs a predetermined process on the surface of the sheet substrate between the first guide member and the second guide member.
- the position of the substrate can be adjusted with higher positioning accuracy than in the prior art. Moreover, according to the aspect of the present invention, the substrate can be transported while suppressing contact of the substrate with the surface to be processed.
- FIG. 1 is an overall view showing a schematic configuration of a substrate processing apparatus according to a first embodiment.
- FIG. 4 is a side cross-sectional view illustrating a partial configuration of a transport device according to the present embodiment.
- FIG. 3 is a plan view illustrating a configuration of a part of the transport device according to the embodiment.
- the perspective view which shows the structure of a part of conveying apparatus which concerns on this embodiment.
- FIG. 6 is an overall view showing a schematic configuration of a substrate processing apparatus according to a fourth embodiment.
- FIG. 3 is a plan view illustrating a configuration of a part of the transport device according to the embodiment.
- FIG. 1 is a diagram showing a configuration of a substrate processing apparatus FPA according to the first embodiment.
- the substrate processing apparatus FPA performs processing on a substrate supply unit SU that supplies a sheet substrate (for example, a strip-shaped film member) FB, and a surface (surface to be processed) of the sheet substrate FB. It includes a part PR, a substrate recovery part CL for recovering the sheet substrate FB, and a control part CONT for controlling these parts.
- the substrate processing apparatus FPA is installed in a factory, for example.
- the substrate processing apparatus FPA is a roll toe that performs various processes on the surface of the sheet substrate FB from when the sheet substrate FB is sent out from the substrate supply unit SU to when the sheet substrate FB is recovered by the substrate recovery unit CL.
- a device of a roll method hereinafter simply referred to as “roll method”.
- the substrate processing apparatus FPA can be used when forming a display element (electronic device) such as an organic EL element or a liquid crystal display element on the sheet substrate FB.
- the processing apparatus FPA can also be used when forming elements other than these elements.
- the sheet substrate FB to be processed in the substrate processing apparatus FPA for example, a foil such as a resin film or stainless steel can be used.
- the resin film is made of polyethylene resin, polypropylene resin, polyester resin, ethylene vinyl copolymer resin, polyvinyl chloride resin, cellulose resin, polyamide resin, polyimide resin, polycarbonate resin, polystyrene resin, vinyl acetate resin, etc. Can be used.
- the dimension of the sheet substrate FB in the Y direction is, for example, about 1 m to 2 m
- the dimension in the X direction (long direction) is, for example, 10 m or more.
- this dimension is only an example and is not limited thereto.
- the dimension of the sheet substrate FB in the Y direction may be 1 m or less, 50 cm or less, or 2 m or more.
- substrate FB may be 10 m or less.
- the sheet substrate FB is formed to have flexibility, for example.
- the term “flexibility” refers to the property that the substrate can be bent without being broken or broken even when a predetermined force of at least its own weight is applied to the substrate. Further, for example, the property of bending by the predetermined force is also included in the flexibility.
- the flexibility varies depending on the material, size, thickness, environment such as temperature, etc. of the substrate.
- substrate FB you may use the sheet
- the sheet substrate FB preferably has a relatively small coefficient of thermal expansion so that its dimensions do not substantially change even when it receives heat at a relatively high temperature (eg, about 200 ° C.) (thermal deformation is small).
- a relatively high temperature eg, about 200 ° C.
- an inorganic filler can be mixed with a resin film to reduce the thermal expansion coefficient.
- the inorganic filler include titanium oxide, zinc oxide, alumina, silicon oxide and the like.
- the substrate supply unit SU sends out the sheet substrate FB wound in a roll shape to the substrate processing unit PR, for example.
- the substrate supply unit SU is provided with, for example, a shaft around which the sheet substrate FB is wound, a rotation drive source that rotates the shaft, and the like.
- the substrate supply unit SU may have a configuration in which, for example, a cover unit that covers the sheet substrate FB wound in a roll shape is provided.
- the substrate collecting unit CL collects the sheet substrate FB from the substrate processing unit PR in a roll shape, for example.
- the substrate recovery unit CL is provided with a shaft portion for winding the sheet substrate FB, a rotational drive source for rotating the shaft portion, a cover portion for covering the recovered sheet substrate FB, and the like. Yes.
- the substrate recovery unit CL is in the form of a roll.
- the sheet substrate FB may be collected in a state different from the state wound around the sheet.
- the substrate processing unit PR transports the sheet substrate FB supplied from the substrate supply unit SU to the substrate recovery unit CL, and processes the surface Fp to be processed of the sheet substrate FB in the course of transport.
- the substrate processing unit PR includes, for example, a processing apparatus 10, a transfer apparatus 30, an alignment apparatus 50, and the like.
- the processing apparatus 10 includes various apparatuses for forming, for example, organic EL elements on the processing surface Fp of the sheet substrate FB.
- an apparatus for example, a partition forming apparatus for forming a partition on the processing surface Fp, an electrode forming apparatus for forming an electrode for driving an organic EL element, and light emission for forming a light emitting layer Examples thereof include a layer forming apparatus. More specifically, film forming apparatuses such as droplet coating apparatuses (for example, ink jet type coating apparatuses, spin coating type coating apparatuses, etc.), vapor deposition apparatuses, sputtering apparatuses, exposure apparatuses, developing apparatuses, surface modification apparatuses, and cleaning apparatuses. Etc. Each of these apparatuses is appropriately provided, for example, on the conveyance path of the sheet substrate FB. For example, two or more processing apparatuses can be arranged along the transport direction.
- the transport device 30 is disposed, for example, on the upstream side and the downstream side of the processing device 10 so as to sandwich the processing device 10 and the roller device R that transports the sheet substrate FB toward the substrate recovery unit CL.
- Guide roller G For example, a plurality of roller devices R are provided along the conveyance path of the sheet substrate FB.
- a drive mechanism (not shown) is attached to at least some of the plurality of roller devices R. By rotating such a roller device R, the sheet substrate FB is conveyed in the X-axis direction.
- a part of the plurality of roller devices R may be configured to be movable in a direction orthogonal to the transport direction.
- the conveying device 30 has a slack portion (not illustrated) on the sheet substrate FB so that tension is not applied to the sheet substrate FB on the upstream side and the downstream side of the guide roller G in the conveying direction of the sheet substrate FB. ).
- FIG. 2 and 3 are schematic views showing the configuration of the processing apparatus 10 and the guide roller G.
- FIG. FIG. 2 shows a configuration when the substrate processing apparatus FPA is viewed from the side (+ X direction).
- FIG. 3 shows a configuration when the substrate processing apparatus FPA is viewed from above (+ Z direction).
- the guide roller G has a first guide roller G1 and a second guide roller G2.
- the first guide roller G1 is formed in, for example, a columnar shape or a cylindrical shape, and is disposed on the upstream side of the processing apparatus 10 in the transport direction of the sheet substrate FB.
- the second guide roller G2 is formed in, for example, a columnar shape or a cylindrical shape, and is disposed on the downstream side of the processing apparatus 10 in the transport direction of the sheet substrate FB.
- the first guide roller G1 is a first portion of the sheet substrate FB that is conveyed in the first direction (+ X direction) from the upstream side of the first guide roller G1 (ie, the portion before being guided by the first guide roller G1, that is, With respect to the first guide roller G1, the central axis C1 is arranged so as to incline in an oblique direction with respect to the short side direction (width direction: Y direction here) of the upstream side of the sheet substrate FB) F1. .
- the first guide roller G1 guides the back surface of the sheet substrate FB on the roller surface (guide surface) G1a. Note that the sheet substrate FB conveyed from the upstream side of the first guide roller G1 is in a state where the back surface Fq of the sheet substrate FB faces upward in FIG.
- the first guide roller G1 bends the sheet substrate FB in an oblique direction with respect to the short side direction of the sheet substrate FB, and folds the sheet substrate FB along the roller surface of the first guide roller G1, whereby the sheet substrate FB Is changed from the first direction to the second direction ( ⁇ Y direction).
- the first guide roller G1 can bend the sheet substrate FB substantially obliquely.
- the sheet substrate FB can be bent with a twist through the first guide roller G1.
- the sheet substrate FB may be formed with a partial peripheral surface that is inclined with respect to the transport direction (first direction) in a portion guided by the first guide roller G1.
- a sheet substrate FB having a traveling direction in the first direction (+ X direction) enters the first guide roller G1.
- the second direction is a direction orthogonal to the first direction, for example.
- the sheet substrate FB folded by the first guide roller G1 has the processing surface Fp facing upward (the processing apparatus 10 side) in the second direction.
- the sheet substrate FB is in front of and behind the first guide roller G1, and the first portion F1 and the second portion (the portion before being guided by the second guide roller G2, that is, the sheet substrate FB with respect to the second guide roller G2). Are supported by the roller surface G1a of the first guide roller G1 until they are parallel to each other.
- the second guide roller G2 is arranged such that the central axis C2 is inclined in the oblique direction with respect to the second portion F2 of the sheet substrate FB conveyed in the second direction from the upstream side of the second guide roller G2. Yes.
- the second guide roller G2 guides the back surface of the sheet substrate FB on the roller surface (guide surface) G2a. Note that the sheet substrate FB conveyed from the upstream side of the second guide roller G2 is in a state in which the processing surface Fp of the sheet substrate FB faces upward as described above in FIG.
- the second guide roller G2 bends the second portion F2 of the sheet substrate FB in an oblique direction with respect to the short direction of the sheet substrate FB, and folds the sheet substrate FB along the roller surface of the second guide roller G2.
- the conveyance direction of the sheet substrate FB is changed from the second direction to the third direction (+ X direction).
- the second guide roller G2 can bend the sheet substrate FB substantially obliquely.
- the sheet substrate FB can be bent with a twist via the second guide roller G2.
- the sheet substrate FB may be formed with a partial circumferential surface that is inclined with respect to the transport direction (second direction) in the portion guided by the second guide roller G2.
- the sheet substrate FB having the traveling direction in the second direction enters the second guide roller G2.
- the sheet substrate FB having the third direction (+ X direction) travels from the second guide roller G2.
- the third direction is, for example, a direction parallel to the first direction.
- the sheet substrate FB folded by the second guide roller G2 has the back surface Fq facing upward and the processing surface Fp facing downward in the third direction.
- the sheet substrate FB includes a second portion F2 and a third portion (a portion before being guided by the third guide roller G3, that is, a portion on the upstream side of the sheet substrate FB with respect to the third guide roller G3) F3, Are supported by the roller surface G2a of the second guide roller G2.
- the conveyance direction of the sheet substrate FB is the + X direction (first direction) in the upstream portion (first portion F1) of the sheet substrate FB in the conveyance direction with respect to the first guide roller G1, and the first guide roller G1.
- the + X direction third direction.
- the sheet substrate FB is transported along a crank-shaped path having the first guide roller G1 and the second guide roller G2 as corners.
- the first guide roller G1 is supported by a bearing member 60, for example.
- the bearing member 60 is provided with a drive mechanism 61 that drives the first guide roller G1.
- the drive mechanism 61 rotates the first guide roller G1 in the central axis direction.
- the second guide roller G2 is supported by, for example, a bearing member 62 in the same manner as the first guide roller G1.
- the bearing member 62 is provided with a drive mechanism 63 that drives the second guide roller G2.
- the drive mechanism 63 rotates the second guide roller G2 in the central axis direction.
- the first guide roller G1 and the second guide roller G2 are each provided with a detection device (not shown) such as an encoder that detects a rotation amount, a rotation speed, and the like.
- the detection result by the detection device is transmitted to the control unit CONT, for example.
- a stage device ST that supports the sheet substrate FB is disposed between the first guide roller G1 and the second guide roller G2.
- the stage device ST is disposed on the back surface side ( ⁇ Z side) with respect to the second portion F2 of the sheet substrate FB, and has a support surface Sa that supports the second portion F2 of the sheet substrate FB.
- the support surface Sa is formed of, for example, a flat surface or a surface having a curvature.
- the stage device ST is disposed so that the support surface Sa is parallel to the XY plane.
- the stage apparatus ST is provided with a stage drive mechanism 64.
- the stage device ST is provided so as to be movable in the X direction, the Y direction, and the Z direction by the stage driving mechanism 64, for example.
- the stage device ST has a suction part 40 (see FIG. 2) on the support surface Sa.
- a suction part 40 (see FIG. 2) on the support surface Sa.
- one or more suction portions 40 are arranged on the support surface Sa.
- a suction mechanism 41 such as a suction pump is connected to the suction unit 40. For this reason, the stage apparatus ST can support the second portion F2 of the sheet substrate FB while adsorbing to the support surface Sa.
- the alignment apparatus 50 performs an alignment operation on the sheet substrate FB.
- the alignment apparatus 50 includes an alignment camera 51 that detects the position state of the sheet substrate FB, and the sheet substrate FB based on the detection result of the alignment camera 51 in the X direction, Y direction, Z direction, ⁇ X direction, ⁇ Y direction, and ⁇ Z direction.
- an alignment mark AM is formed on the surface of the sheet substrate FB (surface to be processed Fp side).
- the alignment mark AM is formed on each surface of the sheet substrate FB, for example, at both ends in the lateral direction of the sheet substrate FB.
- a plurality of alignment marks AM are actually arranged along each end of the sheet substrate FB.
- the alignment camera 51 in this embodiment is each arrange
- the alignment camera 51 on the sheet substrate FB separately detects the alignment marks AM on both ends of the sheet substrate FB.
- the detection area CA by each alignment camera 51 is set to an area including, for example, the alignment mark AM.
- the first adjustment mechanism 52 supports, for example, both end portions of the first guide roller G1.
- the first adjusting mechanism 52 is configured so that the first guide roller G1 is parallel to the central axis of the first guide roller G1, for example, the first guide roller G1 is in the XY plane, in a plane orthogonal to or intersecting with the XY plane. Move. Further, the first adjustment mechanism 52 rotates the first guide roller G1 around the ⁇ X direction, the ⁇ Y direction, and the ⁇ Z direction. In addition, the 1st adjustment mechanism 52 sets the rotation center of each rotation direction to one edge part among the both ends of the 1st guide roller G1, or sets to the center part in the center axis direction of the 1st guide roller G1. can do.
- the second adjustment mechanism 53 supports, for example, both end portions of the second guide roller G2.
- the second adjusting mechanism 53 is configured so that the second guide roller G2 is parallel to the central axis of the second guide roller G2, for example, the second guide roller G2 is in the XY plane, in a plane orthogonal to or intersecting the XY plane. Move. Further, the second adjustment mechanism 53 rotates the second guide roller G2 around the ⁇ X direction, the ⁇ Y direction, and the ⁇ Z direction. Note that the second adjustment mechanism 53 sets the rotation center in each rotation direction to, for example, one end of the both ends of the second guide roller G2, or the center portion of the second guide roller G2 in the central axis direction. Can be set to
- the alignment camera 51 detects the alignment mark AM and transmits the detection result to the control unit CONT.
- the control unit CONT transmits an adjustment signal for adjusting the position of the first guide roller G1 to the adjustment mechanism 52 based on the detection result, and adjusts an adjustment signal for adjusting the position of the second guide roller G2. Transmit to mechanism 53.
- the adjustment mechanism 52 adjusts the position of the first guide roller G1 based on the adjustment signal from the control unit CONT.
- the adjustment mechanism 53 adjusts the position of the second guide roller G2 based on the adjustment signal from the control unit CONT.
- the control unit CONT can also generate an adjustment signal without using the detection result by the alignment camera 51, and can transmit the generated adjustment signal to the adjustment mechanisms 52 and 53.
- the substrate processing apparatus FPA configured as described above manufactures display elements (electronic devices) such as organic EL elements and liquid crystal display elements by a roll method under the control of the control unit CONT.
- display elements electronic devices
- CONT control unit
- the belt-like sheet substrate FB wound around the roller is attached to the substrate supply unit SU.
- the controller CONT rotates the roller so that the sheet substrate FB is sent out from the substrate supply unit SU from this state.
- substrate process part PR is wound up with the roller of the board
- the control unit CONT transfers the sheet substrate FB to the inside of the substrate processing unit PR by the transfer device 30 of the substrate processing unit PR after the sheet substrate FB is sent out from the substrate supply unit SU until it is wound up by the substrate recovery unit CL. Then, the components of the display element are sequentially formed on the sheet substrate FB by the processing apparatus 10 while being appropriately conveyed.
- the control unit CONT causes the alignment of the sheet substrate FB using the alignment apparatus 50.
- the alignment mark 51 on the sheet substrate FB is detected by the alignment camera 51, and based on the detection result, for example, the driving amount of the roller device R of the conveying device 30 and the guide roller G (first guide roller G1 and second guide roller G2). Adjust the position and orientation, rotation amount, rotation speed, etc.
- FIG. 4 shows that the first guide roller G1 and the second guide roller G2 are moved from the state shown in FIG. 3 by the same amount of movement in the direction parallel to the respective central axes (in the case of FIG. 4, the ⁇ X direction). Shows the state.
- the sheet substrate FB is tensioned in a state of being folded back by the first guide roller G1 and the second guide roller G2. Therefore, when the first guide roller G1 and the second guide roller G2 are moved as described above, the respective folding positions move by an equal distance in the ⁇ X direction, and accordingly, the second portion F2 of the sheet substrate FB. Moves in the -X direction.
- the control unit CONT moves the stage device ST in the X direction and the Y direction according to the position of the second portion F2 of the sheet substrate FB, for example.
- the slack portion of the sheet substrate FB is provided on the upstream side of the first guide roller G1 and the downstream side of the second guide roller G2 with respect to the conveyance direction of the sheet substrate FB, the position of the first guide roller G1 and Even if the position of the second guide roller G2 is adjusted, the force acting on the sheet substrate FB can be suppressed or eliminated.
- the control unit CONT moves the stage device ST in the + Z direction and brings the back surface of the sheet substrate FB into contact with the support surface Sa.
- the back surface of the sheet substrate FB is supported on the support surface Sa of the stage apparatus ST.
- the control unit CONT may adsorb the sheet substrate FB to the adsorption unit 40 of the stage apparatus ST, for example. Further, before the back surface of the sheet substrate FB is brought into contact with the support surface Sa of the stage device ST, the distance between the first guide roller G1 and the second guide roller G2 is made closer to each other, and the sheet substrate FB is slackened. Good.
- the sheet substrate FB By sagging the sheet substrate FB, the sheet substrate FB can be brought into contact with and adsorbed to the support surface Sa of the stage device ST without tension. Further, the control unit CONT adjusts the position of the sheet substrate FB in the Z direction by moving the stage device ST to the + Z side, for example, while supporting the sheet substrate FB. In this case, the control unit CONT moves the first guide roller G1 and the second guide roller G2 in the Z direction according to the amount of movement of the stage device ST in the Z direction.
- the control unit CONT After the alignment of the sheet substrate FB in the Z direction is performed, the control unit CONT causes the processing surface 10 to perform a predetermined process on the target surface Fp of the second portion F2 of the sheet substrate FB.
- the control unit CONT performs the process while adjusting the timing of the process by the processing apparatus 10 and the timing of conveyance of the sheet substrate FB. Make it.
- the control unit CONT moves the stage apparatus ST in the substrate transport direction (for example, the ⁇ Y direction) in accordance with the movement of the sheet substrate FB, for example.
- the constituent elements of the display element are formed on the processing surface Fp of the sheet substrate FB.
- the sheet substrate FB conveyed in the first direction (+ X direction) is bent in an oblique direction with respect to the width direction (Y direction) of the sheet substrate FB, and thus the sheet substrate FB.
- a first guide roller G1 that changes the first conveying direction from a first direction to a second direction ( ⁇ Y direction) different from the first direction, and a sheet substrate conveyed from the second direction (a sheet conveyed in the second direction)
- the substrate) FB is bent in an oblique direction with respect to the width direction (X direction) of the sheet substrate FB, and the conveyance direction of the sheet substrate FB is changed from the second direction to a third direction (+ X direction) different from the second direction.
- the second guide roller G2, the first guide roller G1 and the second guide roller G2 are provided to adjust the position of the first guide roller G1 and the position of the second guide roller G2, respectively, in a direction intersecting the second direction.
- Sheet To provide an adjustment mechanism for adjusting the position of the plate FB, it is possible to suppress the force acts in a direction different from the conveying direction to the sheet substrate FB. Thereby, the sheet substrate FB can be conveyed with high conveyance accuracy while suppressing the formation of defects such as wrinkles on the sheet substrate FB.
- FIG. 5 is a diagram illustrating a conveyance state of the sheet substrate FB when the first guide roller G1 and the second guide roller G2 are rotated in the ⁇ Z direction.
- the first guide roller G1 is rotated while maintaining the tension in the second portion of the sheet substrate FB while maintaining the conveyance direction for the first portion F1 and the third portion F3 of the sheet substrate FB. Show.
- the control unit CONT does not change the conveyance direction of the third portion F3.
- the second guide roller G2 are rotated around the ⁇ Z direction in synchronization with each other, and the second guide roller G2 is moved in the ⁇ X direction.
- the rotation center of the second guide roller G2 may be shifted from the rotation center of the first guide roller G1.
- the controller CONT sets the first guide roller G1 and the first guide roller G1 and the second guide roller G2 so that the rotation start timing, the rotation direction, the rotation angle, and the rotation speed are uniform.
- the two guide rollers G2 are rotated.
- the control unit CONT moves the second guide roller G2 in the ⁇ X direction according to the amount by which the sheet substrate FB is displaced by the rotation of the first guide roller G1.
- the second portion F2 of the sheet substrate FB is transferred in the transport direction ( ⁇ Y direction) of the second portion F2. Can be tilted.
- the first part F1 to the third part F3 of the sheet substrate FB it is possible to prevent a force from acting in a direction different from the respective conveyance directions, and thus it is possible to prevent the occurrence of defects such as wrinkles in the sheet substrate FB. be able to. Thereby, more advanced conveyance can be performed while maintaining the conveyance state of the sheet substrate FB.
- the case where the position of the second guide roller G2 in the X direction is moved without changing the position of the first guide roller G1 in the X direction has been described as an example. There is no.
- both the first guide roller G1 and the second guide roller G2 may be moved in the X direction.
- the rotation directions of the first guide roller G1 and the second guide roller G2 are not limited to the directions shown in FIG. 5, and may be rotated in the direction opposite to the direction shown in FIG.
- FIG. 6 shows a configuration when the substrate processing apparatus FPA is viewed from above (+ Z direction).
- the conveying device 30 uses a first spindle member G3 as a first guide member, and uses a second spindle member G4 as a second guide member.
- the first spindle member G3 or the second spindle member G4 may be applied to only one of the first guide member and the second guide member.
- the first spindle member G3 and the second spindle member G4 are formed in a conical shape, for example.
- the first spindle member G3 and the second spindle member G4 have circular bottom surfaces (one end portions) 80a and 80b, respectively, and apexes (other end portions) 81a and 81b from the bottom surfaces 80a and 80b. It has a side surface (guide surface) formed so that the outer diameter dimension gradually becomes smaller as it goes to.
- the first spindle member G3 has a central axis C3 that passes through the center point of the bottom surface 80a and the vertex 81a.
- the first spindle member G3 is disposed so that the central axis C3 is parallel to the width direction (Y direction) of the first portion F1 of the sheet substrate FB.
- the first spindle member G3 is provided with a drive mechanism 61 that rotates the spindle member G3 about the central axis C3.
- the drive mechanism 61 drives the first spindle member G3 also in the X direction, the Y direction, and the ⁇ Z direction.
- the first spindle member G3 guides the sheet substrate on the side surface (guide surface) G3a.
- the sheet substrate FB is supported by the side surface G3a of the first weight member G3 until the processing surface Fp becomes parallel between the first portion F1 and the second portion F2.
- the second spindle member G4 has a central axis C4 passing through the center point of the bottom surface 80b and the vertex 81b.
- the second spindle member G4 is arranged so that the central axis C4 is parallel to the width direction (X direction) of the second portion F2 of the sheet substrate FB.
- the second spindle member G4 is provided with a drive mechanism 63 that rotates the spindle member G4 about the central axis C4.
- the drive mechanism 61 drives the second spindle member G4 also in the X direction, the Y direction, and the ⁇ Z direction.
- the second spindle member G4 guides the sheet substrate on the side surface (guide surface) G4a.
- the sheet substrate FB is supported on the side surface G4a of the second spindle member G4 until the processing surface Fp becomes parallel between the second portion F2 and the third portion F3.
- the control unit CONT moves the first spindle member G3 and the second spindle member G4 to ⁇ For example, it is moved in the X direction by the same amount of movement.
- the position where the sheet substrate FB is wound moves in the ⁇ X direction by the movement of the first spindle member G3 and the second spindle member G4, and the second portion F2 of the sheet substrate FB moves in the ⁇ X direction accordingly.
- the force acts on the sheet substrate FB in a direction different from the conveyance direction.
- the second portion F2 of the sheet substrate FB can be moved without causing wrinkles or the like with respect to the sheet substrate FB.
- the center axis C4 of the second spindle member G4 is parallel to the center axis C4 of the first spindle member G3.
- the second spindle member G4 may be arranged so as to be. Even in this case, the same effect as the configuration shown in FIG. 6 is obtained.
- the movable range of the stage device ST is widened compared to the configuration shown in FIG.
- the configuration shown in FIG. 8 is a configuration in which the central axis C3 and the central axis C4 are arranged in parallel to the Y direction.
- the configuration is not limited to this.
- the central axis C3 and the central axis C4 can be arranged so as to be parallel to the X direction.
- the shapes of the first spindle member G3 and the second spindle member G4 are not limited to the conical configuration as shown in FIGS. 6 to 8, for example.
- the structure formed in other weight shape (ellipse cone shape, polygonal cone shape) is applicable.
- a configuration in which a tapered portion is formed in a part of a columnar member and the sheet substrate FB is bent using the tapered portion can be applied.
- the present invention is not limited to this.
- a columnar member, a cylindrical member, or a weight member fixed in the substrate processing apparatus FPA may be used.
- the position of the sheet substrate FB can be adjusted by the same operation as the guide roller G, except that there is no rotation operation like the guide roller G. it can.
- a fixed columnar member, cylindrical member, or weight-like member in this way, only the guide surface that supports the back surface of the sheet substrate FB may be left and portions other than the guide surface may be removed. .
- the sheet substrate FB is used as the first guide member and the second guide member.
- the configuration in which the contact is made has been described as an example, the configuration is not limited thereto.
- the sheet substrate FB and the guide member may be in a non-contact state. Examples of such a configuration include a configuration in which a gas layer is formed on the surfaces of the first guide member and the second guide member, and the sheet substrate FB is held via the gas layer.
- the alignment camera 51 is arrange
- the configuration for driving the second guide roller G2 has been described as an example.
- another alignment camera may be disposed on at least one of the upstream side in the transport direction with respect to the first guide roller G1 and the downstream side in the transport direction with respect to the second guide roller G2.
- an adjustment mechanism that adjusts the position of the sheet substrate FB based on the detection result of the separately arranged alignment camera can be provided separately.
- a roller device R may be used, or another configuration may be used.
- the configuration in which the alignment of the sheet substrate FB is performed using the alignment mark AM formed on the sheet substrate FB is described as an example.
- the configuration is not limited thereto.
- the alignment camera 51 detects both sides of the sheet substrate FB parallel to the transport direction, and uses the detection result to align the sheet substrate FB. It does not matter even if it is the composition which performs.
- the present invention is not limited to this.
- the present invention can be applied even when the support surface Sa is a curved surface formed in a concave shape or a convex shape.
- a roller may be arrange
- the present invention is not limited to this.
- the sheet substrate FB may be adsorbed to the adsorption unit 40 of the stage apparatus ST.
- the driving of the stage device ST and the driving of the first guide roller G1 and the second guide roller G2 are synchronized, and the force acting on the sheet substrate FB is synchronized.
- the position of the sheet substrate FB is adjusted while maintaining the orientation.
- the first guide member and the second guide member described in the above embodiment are not limited to the positions sandwiching the processing apparatus 10, for example, and can be appropriately disposed in the transport path of the sheet substrate FB in the substrate processing apparatus FPA.
- positioned between a 1st guide member and a 2nd guide member may be single, or may be plural.
- a slack portion (not shown) is formed between the first guide roller G1 and the roller device R on the upstream side of the first guide roller G1, and the second guide roller G2 and a roller on the downstream side of the second guide roller G2
- a slack portion may be formed between the device R and the device R.
- the upstream roller device R and the downstream roller device R may be configured to contact the front surface and the back surface of the sheet substrate FB and sandwich the sheet substrate FB.
- FIG. 9 is a diagram showing a configuration of a substrate processing apparatus FPA according to the fourth embodiment of the present invention.
- the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.
- the substrate processing unit PR transports the sheet substrate FB supplied from the substrate supply unit SU to the substrate recovery unit CL, and the surface to be processed of the sheet substrate FB during the transport process. Processing is performed on Fp.
- the substrate processing unit PR includes, for example, a processing apparatus 10, a transfer apparatus 30, an alignment apparatus (not shown), and the like.
- the processing apparatus 10 includes various processing units (for example, the processing unit 10A and the processing unit 10B) for forming, for example, organic EL elements on the processing surface Fp of the sheet substrate FB.
- a processing section for example, a partition forming apparatus for forming a partition on the processing surface Fp, an electrode forming apparatus for forming an electrode for driving an organic EL element, and a light emitting layer A light emitting layer forming apparatus or the like is provided.
- film forming apparatuses such as droplet coating apparatuses (for example, ink jet type coating apparatuses, spin coating type coating apparatuses, etc.), vapor deposition apparatuses, sputtering apparatuses, exposure apparatuses, developing apparatuses, surface modification apparatuses, and cleaning apparatuses. Etc. Each of these apparatuses is appropriately provided, for example, on the conveyance path of the sheet substrate FB.
- the transport device 30 is disposed, for example, on the upstream side and the downstream side of the processing device 10 so as to sandwich the processing device 10 and the roller device R that transports the sheet substrate FB to the substrate recovery unit CL side. And a guide roller G.
- a plurality of roller devices R are provided along the conveyance path of the sheet substrate FB.
- a drive mechanism (not shown) is attached to at least some of the plurality of roller devices R.
- the sheet substrate FB is conveyed in the X-axis direction.
- a part of the plurality of roller devices R may be configured to be movable in a direction orthogonal to the transport direction. Note that the sheet substrate FB is transported in the + X direction throughout the substrate processing unit PR.
- FIG. 10 is a schematic diagram showing the configuration of the processing apparatus 10 and the guide roller G.
- FIG. 10 shows a configuration when the substrate processing apparatus FPA is viewed from above (+ Z direction).
- the guide roller G has a first guide roller G21, a second guide roller G22, a third guide roller G23, and a fourth guide roller G24.
- the first guide roller G21 to the fourth guide roller G24 are arranged in order from the upstream side to the downstream side of the conveyance path of the sheet substrate FB.
- the first guide roller G21 to the fourth guide roller G24 are each formed in, for example, a columnar shape or a cylindrical shape.
- the first guide roller G21 is a first portion of the sheet substrate FB that is conveyed in the first direction (+ X direction) from the upstream side of the first guide roller G21 (ie, the portion before being guided by the first guide roller G21, that is, With respect to the first guide roller G21, the central axis C1 is arranged to be inclined in the oblique direction with respect to the short direction (width direction: Y direction here) of the upstream side F1 of the sheet substrate FB. .
- the first guide roller G21 guides the back surface of the sheet substrate FB on the roller surface (guide surface) G21a.
- substrate FB conveyed from the upstream of the 1st guide roller G21 is a state in which the back surface Fq of the sheet
- the first guide roller G21 bends the first portion F1 of the sheet substrate FB in an oblique direction with respect to the short direction of the sheet substrate FB, and folds the sheet substrate FB along the roller surface of the first guide roller G21. Then, the conveyance direction of the sheet substrate FB is changed from the first direction to the second direction ( ⁇ Y direction).
- the first guide roller G21 can bend the sheet substrate FB substantially obliquely.
- the sheet substrate FB can be bent with a twist via the first guide roller G21.
- the sheet substrate FB may be formed with a partial peripheral surface that is inclined with respect to the transport direction (first direction) in the portion guided by the first guide roller G21.
- the second direction is a direction orthogonal to the first direction, for example.
- the first guide roller G21 folds the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB.
- the surface Fp of the sheet substrate FB folded by the first guide roller G21 is directed upward (the processing apparatus 10 side) in the second direction.
- the sheet substrate FB is supported by the roller surface G21a of the first guide roller G21 before and after the first guide roller G21 until the first portion F1 and a second portion F2 described later are parallel to each other.
- the second guide roller G22 is a second part of the sheet substrate FB conveyed in the second direction from the upstream side of the second guide roller G22 (the part before being guided by the second guide roller G22, that is, the second With respect to the guide roller G22, the central axis C2 is disposed in an oblique direction with respect to the upstream portion (F2) of the sheet substrate FB.
- the second guide roller G22 guides the back surface of the sheet substrate FB on the roller surface (guide surface) G22a. Note that the sheet substrate FB conveyed from the upstream side of the second guide roller G22 is in a state where the processing surface Fp of the sheet substrate FB faces upward as described above in FIG.
- the second guide roller G22 bends the second portion F2 of the sheet substrate FB in an oblique direction with respect to the short direction of the sheet substrate FB, and folds the sheet substrate FB along the roller surface of the second guide roller G22.
- the conveyance direction of the sheet substrate FB is changed from the second direction to the third direction (+ X direction).
- the second guide roller G22 can bend the sheet substrate FB substantially obliquely.
- the sheet substrate FB can be bent with a twist through the second guide roller G22.
- the sheet substrate FB may be formed with a partial peripheral surface that is inclined with respect to the transport direction (second direction) in the portion guided by the second guide roller G22.
- the sheet substrate FB having the traveling direction in the second direction enters the second guide roller G22.
- the sheet substrate FB having the third direction (+ X direction) travels from the second guide roller G22.
- the third direction is, for example, a direction parallel to the first direction.
- the second guide roller G22 folds the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB.
- the sheet substrate FB turned back by the second guide roller G22 has the back surface Fq facing upward and the processing surface Fp facing downward in the third direction.
- the sheet substrate FB is supported by the roller surface G22a of the second guide roller G22 before and after the second guide roller G22 until the second portion F2 and a third portion F3 described later are parallel to each other. .
- the third guide roller G23 is a third portion of the sheet substrate FB conveyed in the third direction (+ X direction) from the upstream side of the third guide roller G23 (the portion before being guided by the third guide roller G23, That is, with respect to the third guide roller G23, the central axis C3 is arranged to be inclined in the oblique direction with respect to the short side direction (width direction: here the Y direction) of the sheet substrate FB) F3. Yes.
- the third guide roller G23 guides the back surface of the sheet substrate FB on the roller surface (guide surface) G23a. Note that the sheet substrate FB conveyed from the upstream side of the third guide roller G23 is in a state in which the back surface Fq of the sheet substrate FB faces upward as described above in FIG.
- the third guide roller G23 bends the third portion F3 of the sheet substrate FB in an oblique direction with respect to the short direction of the sheet substrate FB, and folds the sheet substrate FB along the roller surface of the third guide roller G23.
- the conveyance direction of the sheet substrate FB is changed from the third direction to the fourth direction (+ Y direction).
- the third guide roller G23 can bend the sheet substrate FB substantially obliquely.
- the sheet substrate FB can be bent with a twist through the third guide roller G23.
- the sheet substrate FB may be formed with a partial circumferential surface that is inclined with respect to the transport direction (third direction) in the portion guided by the third guide roller G23.
- the fourth direction is, for example, a direction orthogonal to the first direction and the third direction, and is the direction opposite to the second direction.
- the third guide roller G23 folds the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB.
- the sheet substrate FB turned back by the third guide roller G23 has the processing surface Fp facing upward in the fourth direction, and the processing apparatus 10 can process the processing surface.
- the sheet substrate FB is supported by the roller surface G23a of the third guide roller G23 before and after the third guide roller G23 until a third portion and a fourth portion described later are parallel to each other.
- the fourth guide roller G24 is a fourth portion of the sheet substrate FB conveyed in the fourth direction (+ Y direction) from the upstream side of the fourth guide roller G24 (the portion before being guided by the fourth guide roller G24, That is, the central axis C4 is disposed to be inclined in the oblique direction with respect to the fourth guide roller G24 and the upstream portion F4 of the sheet substrate FB.
- the fourth guide roller G24 guides the back surface of the sheet substrate FB on the roller surface (guide surface) G24a. Note that the sheet substrate FB conveyed from the upstream side of the fourth guide roller G24 is in a state where the processing surface Fp of the sheet substrate FB faces upward as described above in FIG.
- the fourth guide roller G24 bends the fourth portion F4 of the sheet substrate FB in an oblique direction with respect to the short direction of the sheet substrate FB, and folds the sheet substrate FB along the roller surface of the fourth guide roller G24.
- the conveying direction of the sheet substrate FB is changed from the fourth direction to the fifth direction (+ X direction).
- the fourth guide roller G24 can bend the sheet substrate FB substantially obliquely.
- the sheet substrate FB can be bent with a twist through the fourth guide roller G24.
- the sheet substrate FB may be formed with a partial peripheral surface that is inclined with respect to the transport direction (fourth direction) in a portion guided by the fourth guide roller G24.
- the sheet substrate FB having the fourth direction (+ Y direction) travels into the fourth guide roller G24.
- the sheet substrate FB having the fifth direction (+ X direction) travels from the fourth guide roller G24.
- the fifth direction is, for example, a direction parallel to the first direction and the third direction.
- the fourth guide roller G24 folds the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB.
- the sheet substrate FB folded by the fourth guide roller G24 has the back surface Fq facing upward and the processing surface Fp facing downward in the fifth direction.
- the sheet substrate FB has a fourth portion F4 and a fifth portion F5 (a portion after being guided by the fourth guide roller G24, that is, the fourth guide roller G24, before and after the fourth guide roller G24.
- the fourth guide roller G24 is supported by the roller surface G24a until the portion on the downstream side of the substrate FB) is parallel to each other.
- the conveyance direction of the sheet substrate FB conveyed by the four guide rollers G21 to G24 is the + X direction (first direction) in the first portion F1, and the -Y direction (second direction) in the second portion F2.
- the third portion F3 is again in the + X direction (third direction)
- the fourth portion F4 is in the + Y direction (fourth direction)
- the fifth portion F5 is in the + X direction (fifth direction). is there.
- the sheet substrate FB has the back surface Fq of the sheet substrate FB facing upward in the first direction, the third direction, and the fifth direction, and the surface to be processed of the sheet substrate FB in the second direction and the third direction. Fp faces upward.
- processing surface Fp of the sheet substrate FB is processed by the processing apparatus 10 (processing unit 10A, processing unit 10B), the processing surface Fp faces downward, so that dust or the like on the processing surface Fp Adhesion can be reduced.
- the sheet substrate FB is transported along a crank-shaped path having the first guide roller G21, the second guide roller G22, the third guide roller G23, and the fourth guide roller G24, respectively, at the corners. Further, the sheet substrate FB bent by the fourth guide roller G24 is transported in the fifth direction, that is, the transport direction of the sheet substrate FB as the whole substrate processing unit PR.
- the processing apparatus 10 includes a processing unit 10A and a processing unit 10B.
- the processing unit 10A is provided, for example, at a position between the first guide roller G21 and the second guide roller G22 in the Y direction, and is disposed to face the processing surface Fp of the second portion F2 of the sheet substrate FB.
- the processing unit 10B is disposed at a position between the third guide roller G23 and the fourth guide roller G24 in the Y direction, and is disposed so as to face the processing surface Fp of the fourth portion F4 of the sheet substrate FB. ing.
- the processing unit 10A and the processing unit 10B perform different processes, for example.
- the processing unit 10A is connected to the drive mechanism 11, for example, and is provided to be movable in the X direction and the Y direction, for example.
- the processing unit 10A can move between the first position A1 on the second portion F2 and the second position A2 on the fourth portion F4 (movement in the X direction). Further, the processing unit 10A can move on the second part F2 and the fourth part F4 (movement in the Y direction).
- the processing unit 10B is connected to the drive mechanism 12, for example, and is provided so as to be movable in the X direction and the Y direction, for example.
- the processing unit 10B can move between the first position B1 on the fourth portion F4 and the second position B2 on the second portion F2 (movement in the X direction).
- the processing unit 10B can move on the second portion F2 and the fourth portion F4 (movement in the Y direction).
- the first guide roller G21 to the fourth guide roller G24 are supported by a bearing member (not shown), for example.
- Each bearing member is provided with a drive mechanism (not shown) for rotating the first guide roller G21 to the fourth guide roller G24.
- the drive mechanism rotates the first guide roller G21 to the fourth guide roller G24 about the central axes C1 to C4, respectively.
- the stage device may be arranged on the ⁇ Z side of the second portion F2 and the fourth portion F4 of the sheet substrate FB.
- the stage apparatus supports a portion processed by the processing unit 10A and the processing unit 10B.
- the support surface that supports the second portion F2 and the fourth portion F4 of the stage device may be a flat surface or a curved surface.
- An alignment apparatus performs an alignment operation on the sheet substrate FB.
- This alignment apparatus includes an alignment camera (not shown) that detects the position state of the sheet substrate FB, and the sheet substrate FB based on the detection result of the alignment camera in the X direction, the Y direction, the Z direction, the ⁇ X direction, the ⁇ Y direction, An adjustment mechanism (not shown) for fine adjustment in the ⁇ Z direction is provided.
- an alignment mark (not shown) is formed on the processing surface Fp of the sheet substrate FB. The alignment mark is formed on both ends of the processing surface Fp in the short direction of the sheet substrate FB, for example.
- the substrate processing apparatus FPA configured as described above manufactures display elements (electronic devices) such as organic EL elements and liquid crystal display elements by a roll method under the control of the control unit CONT.
- display elements electronic devices
- CONT control unit
- the belt-like sheet substrate FB wound around the roller is attached to the substrate supply unit SU.
- the controller CONT rotates the roller so that the sheet substrate FB is sent out from the substrate supply unit SU from this state.
- substrate process part PR is wound up with the roller of the board
- the control unit CONT transfers the sheet substrate FB to the inside of the substrate processing unit PR by the transfer device 30 of the substrate processing unit PR after the sheet substrate FB is sent out from the substrate supply unit SU until it is wound up by the substrate recovery unit CL. Then, the components of the display element are sequentially formed on the sheet substrate FB by the processing apparatus 10 (each processing unit including the processing unit 10A and the processing unit 10B).
- the sheet substrate FB is folded in a state where the back surface Fq is supported by the first guide roller G21, the second guide roller G22, the third guide roller G23, and the fourth guide roller G24. become. Therefore, before and after the processing unit 10A and the processing unit 10B, the sheet substrate FB is conveyed without the processing surface Fp coming into contact with the four guide rollers G21 to G24.
- the sheet substrate FB is conveyed so that the processing surfaces Fp of the second part F2 and the fourth part F4 corresponding to the processing part 10A and the processing part 10B are directed to the processing part 10A and the processing part 10B.
- the second part F2 and the fourth part F4 are arranged in the X direction. Therefore, the processing unit 10A that processes the processed surface Fp of the second part F2 can process the processed surface Fp of the fourth part F4, and conversely, the processed surface Fp of the fourth part F4 is processed. It is also possible for the processing unit 10B to process the processed surface Fp of the second portion F2.
- the substrate processing apparatus FPA since the substrate processing apparatus FPA includes the first guide roller G21 to the fourth guide roller G24, the sheet substrate FB is transported as a whole of the substrate processing apparatus FPA (for example, the conveyance direction of the sheet substrate FB can be defined so as to be conveyed in the + X direction).
- the processing portions 10A and 10B are in the second portion F2. And the fourth portion F4 can be easily moved. Thereby, various processing operations are possible.
- the configuration in which the processing unit 10A processes the processing surface Fp of the second portion F2 and the processing unit 10B processes the processing surface Fp of the fourth portion F4 has been described.
- the present embodiment is limited to this configuration. Is not to be done.
- the fourth guide roller G24 may be omitted, and the sheet substrate FB may be conveyed by the first guide roller G21, the second guide roller G22, and the third guide roller G23. .
- the conveyance device 30 includes at least three of the first guide roller G21, the second guide roller G22, and the third guide roller G23, and thus the sheet substrate FB.
- the sheet substrate FB can be transported while supporting only the back surface Fq. Thereby, the sheet substrate FB can be transported while preventing contact from the outside with respect to the processing surface Fp of the sheet substrate FB.
- FIG. 11 shows a configuration when the substrate processing apparatus FPA is viewed from above (+ Z direction).
- the conveying device 30 uses a first spindle member G25 as a first guide member, and uses a second spindle member G26 as a second guide member.
- a third spindle member G27 is used as the third guide member, and a fourth spindle member G28 is used as the fourth guide member.
- a configuration in which a weight member is used for only a part of the first guide member to the fourth guide member may be used.
- FIG. 12 is a diagram illustrating the configuration of the first spindle member G25 as an example.
- the first spindle member G25 to the fourth spindle member G28 are each formed in a conical shape.
- each of the first spindle member G25 to the fourth spindle member G28 has a circular bottom surface (one end portion) 80 and a vertex (other end portion) 81, and as it goes from the bottom surface 80 toward the vertex 81, respectively. It has a side surface (guide surface) formed so that the outer diameter dimension is gradually reduced.
- the first spindle member G25 to the fourth spindle member G28 have center axes C5 to C8 passing through the center point of the bottom surface 80 and the vertex 81, respectively.
- the first spindle member G25 is disposed so that the central axis C5 is parallel to the width direction (Y direction) of the first portion F1 of the sheet substrate FB.
- the first spindle member G25 is provided with a drive mechanism (not shown) that rotates the first spindle member G25 about the central axis C5.
- the first spindle member G25 guides the sheet substrate on the side surface (guide surface) G25a.
- the sheet substrate FB is supported on the side surface G25a of the first spindle member G25 until the processing surface Fp becomes parallel between the first portion F1 and the second portion F2.
- the second spindle member G26 is disposed so that the central axis C6 is parallel to the width direction (X direction) of the second portion F2 of the sheet substrate FB.
- the second spindle member G26 is provided with a drive mechanism (not shown) that rotates the second spindle member G26 around the central axis C6.
- the second spindle-shaped member G26 guides the sheet substrate on the side surface (guide surface) G26a.
- the sheet substrate FB is supported by the side surface G26a of the second weight member G26 until the processing surface Fp becomes parallel between the second portion F2 and the third portion F3.
- the third spindle member G27 is disposed so that the central axis C7 is parallel to the width direction (Y direction) of the third portion F3 of the sheet substrate FB.
- the third spindle member G27 is provided with a drive mechanism (not shown) that rotates the third spindle member G27 about the central axis C7.
- the third spindle member G27 guides the sheet substrate on the side surface (guide surface) G27a.
- the sheet substrate FB is supported on the side surface G27a of the third spindle member G27 until the processing surface Fp becomes parallel between the third portion F3 and the fourth portion F4.
- the fourth spindle-shaped member G28 is arranged so that the central axis C8 is parallel to the width direction (X direction) of the fourth portion F4 of the sheet substrate FB.
- the fourth spindle member G28 is provided with a drive mechanism (not shown) that rotates the fourth spindle member G28 about the central axis C8.
- the fourth pyramidal member G28 guides the sheet substrate on the side surface (guide surface) G28a.
- the sheet substrate FB is supported by the side surface G28a of the fourth spindle member G28 until the processing surface Fp becomes parallel between the fourth portion F4 and the fifth portion F5.
- the sheet substrate FB is folded by the first spindle member G25 to the fourth spindle member G28, the back surface Fq of the sheet substrate FB is supported also in this case.
- the sheet substrate FB can be conveyed. Thereby, the sheet substrate FB can be transported while preventing contact from the outside with respect to the processing surface Fp of the sheet substrate FB.
- the central axis C5 of the first spindle member G25 is parallel to the central axis C8 of the fourth spindle member G28.
- the first spindle member G25 to the fourth spindle member G28 are arranged so that the central axis C6 of the second spindle member G26 is parallel to the central axis C7 of the third spindle member G27. It doesn't matter.
- This configuration has the same effect as the configuration shown in FIG. Moreover, the distance between the second portion F2 and the fourth portion F4 of the sheet substrate FB is shorter than that in the configuration shown in FIG. For this reason, the processing units 10A and 10B can easily move between the second part F2 and the fourth part F4, which can be said to be a preferable configuration.
- the shapes of the first spindle member G25 to the fourth spindle member G28 for example, a configuration formed in a conical shape as shown in FIGS. 11 to 13 is preferable, but other spindles (elliptical cones) are preferable.
- the shape may be a polygonal pyramid shape. Further, for example, a configuration may be adopted in which a tapered portion is formed in a part of a columnar member, and the sheet substrate FB is bent using the tapered portion.
- the configuration in which the first guide member to the fourth guide member are rotated has been described as an example, but the present invention is not limited to this.
- a columnar member, a cylindrical member, or a spindle member fixed in the substrate processing apparatus FPA may be used.
- the position of the sheet substrate FB can be adjusted by the same operation as the guide roller G, except that there is no rotation operation like the guide roller G. it can.
- a fixed columnar member, cylindrical member, or weight-like member in this way, only the guide surface that supports the back surface of the sheet substrate FB may be left and portions other than the guide surface may be removed. .
- the sheet substrate FB is attached to the first guide member to the fourth guide member.
- the configuration in which the four guide members are brought into contact has been described as an example, the configuration is not limited thereto.
- the configuration may be such that the sheet substrate FB and each guide member are not in contact with each other. Examples of such a configuration include a configuration in which a gas layer is formed on the surfaces of the first guide member to the fourth guide member and the sheet substrate FB is held via the gas layer.
- the first guide member to the fourth guide member described in the above embodiment are not limited to positions near the processing apparatus 10 in the transport path of the sheet substrate FB, for example, and can be appropriately arranged at other positions. Further, the configuration from the first guide member to the fourth guide member of the above embodiment may be configured to be repeatedly provided in the X direction, for example.
- the present invention is not limited to this.
- the present invention can be applied even when the same processing is performed between the processing unit 10A and the processing unit 10B.
- the sheet substrate FB is moved in the + Y direction by the third guide member so that the second portion F2 and the fourth portion F4 of the sheet substrate FB are arranged adjacent to each other in the X direction.
- the present invention is not limited to this.
- the sheet substrate FB may be folded back in the direction opposite to the second portion F2 (for example, in the ⁇ Y direction in FIG. 10) by the third guide member.
- the first guide member is folded until the first portion F1 and the second portion F2 are parallel to each other. It may be folded.
- the relationship between the second part F2 and the third part F3, the third part F3 and the fourth part F4, and the fourth part F4 and the fifth part F5 are not limited to parallel.
- the roller device R on the upstream side of the first guide roller G21 functions as a transport roller before executing processing on the surface to be processed of the sheet substrate FB
- the roller device R is used on the front and back surfaces of the sheet substrate FB. You may comprise so that it may contact and the sheet
- the roller device is in contact with the back and front surfaces of the sheet substrate FB on the downstream side of the fourth guide roller G24 and sandwiches the sheet substrate FB. R may be arranged.
- FPA Substrate processing apparatus FB ... Sheet substrate CONT ... Control unit
- Fp Processing surface G1, G21 ... First guide roller G2, G2 ... Second guide roller G23 ... Third guide roller G24 ... Fourth guide roller C1-C8 ... Center Axis G1a, G2a, G21a-G24a ... Roller surface ST ... Stage device Sa ... Support surface AM ... Alignment mark CA ... Detection area G3, G25 ... First spindle member G4, G26 ... Second spindle member G27 ... Third spindle -Like member G28 ... fourth pyramidal member G3a, G4a G21a-G24a ... roller surface G25a-G28a ... side face 10 ... processing device 30 ... conveying device 40 ... adsorption part 51 ... alignment camera 52, 53 ... adjustment mechanism 61, 63 ... drive Mechanism 63 ... Drive mechanism 64 ... Stage drive mechanism
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Abstract
Description
図1は、第一実施形態に係る基板処理装置FPAの構成を示す図である。
図1に示すように、基板処理装置FPAは、シート基板(例えば、帯状のフィルム部材)FBを供給する基板供給部SU、シート基板FBの表面(被処理面)に対して処理を行う基板処理部PR、シート基板FBを回収する基板回収部CL、及び、これらの各部を制御する制御部CONTを有している。基板処理装置FPAは、例えば工場などに設置される。
例えば、2以上の処理装置を搬送方向に沿って配置できる。
なお、第一案内ローラーG1の上流側から搬送されてくるシート基板FBは、図2において、シート基板FBの裏面Fqが上方を向いている状態である。
なお、第二案内ローラーG2の上流側から搬送されてくるシート基板FBは、図2において、前述したように、シート基板FBの被処理面Fpが上方を向いている状態である。
図4は、図3に示す状態から、第一案内ローラーG1及び第二案内ローラーG2をそれぞれの中心軸に対して平行な方向(図4の場合、-X方向)に等しい移動量ずつ移動させた状態を示している。この場合、シート基板FBは、第一案内ローラーG1及び第二案内ローラーG2によって折り返された状態で張力が加えられている。したがって、第一案内ローラーG1及び第二案内ローラーG2を上記のように移動させた場合、それぞれの折り返し位置が-X方向に等しい距離ずつ移動し、これに伴ってシート基板FBの第二部分F2が-X方向に移動する。
次に、本発明の第二実施形態を説明する。本実施形態では、第一実施形態の基板処理装置FPAと同一構成の基板処理装置を用いて説明する。以下、基板処理装置の各構成要素を表記する場合には、第一実施形態で用いた符号と同一の符号を用いるものとする。
図5は、第一案内ローラーG1及び第二案内ローラーG2をθZ方向に回転させた場合のシート基板FBの搬送状態を示す図である。図5では、シート基板FBの第一部分F1及び第三部分F3についてはそれぞれ搬送方向を維持しつつ、シート基板FBの第二部分における張力を維持したまま第一案内ローラーG1を回転させた状態を示している。
次に、本発明の第三実施形態を説明する。
本実施形態では、基板処理装置に設けられる第一案内部材及び第二案内部材として、例えば錘状部材を用いた構成を説明する。本実施形態に係る基板処理装置は、第一案内部材及び第二案内部材以外の構成要素については上記各実施形態と同一構成となっているため、同一の符号を付して説明する。
図6に示すように、搬送装置30は、第一案内部材として第一錘状部材G3が用いられており、第二案内部材として第二錘状部材G4が用いられている。勿論、第一案内部材及び第二案内部材のうち一方のみに第一錘状部材G3又は第二錘状部材G4を適用させる構成であっても構わない。
また、このように、固定された円柱状部材、円筒状部材や錘状部材を用いる場合には、シート基板FBの裏面を支持する案内面のみを残し、案内面以外の部分を取り除いてもよい。
次に、本発明の第四実施形態を説明する。図9は、本発明の第四実施形態に係る基板処理装置FPAの構成を示す図である。以下の説明において、上述の実施形態と同一または同等の構成部分については同一の符号を付し、その説明を簡略若しくは省略する。
図10に示すように、案内ローラーGは、第一案内ローラーG21、第二案内ローラーG22、第三案内ローラーG23及び第四案内ローラーG24を有している。第一案内ローラーG21~第四案内ローラーG24は、シート基板FBの搬送経路の上流側から下流側に向かって順に配置されている。第一案内ローラーG21~第四案内ローラーG24は、それぞれ例えば円柱状や円筒状などに形成されている。
次に、本発明の第五実施形態を説明する。
本実施形態では、基板処理装置に設けられる第一案内部材~第四案内部材として、例えば錘状部材を用いた構成を説明する。以下の説明において、上述の実施形態と同一または同等の構成部分については同一の符号を付し、その説明を簡略若しくは省略する。
図11に示すように、搬送装置30は、第一案内部材として第一錘状部材G25が用いられており、第二案内部材として第二錘状部材G26が用いられている。また、第三案内部材として第三錘状部材G27が用いられており、第四案内部材として第四錘状部材G28が用いられている。勿論、第一案内部材~第四案内部材のうち一部のみに錘状部材を用いた構成としても構わない。
また、このように、固定された円柱状部材、円筒状部材や錘状部材を用いる場合には、シート基板FBの裏面を支持する案内面のみを残し、案内面以外の部分を取り除いてもよい。
Claims (40)
- 帯状のシート基板を搬送する搬送装置であって、
第一方向から搬送される前記シート基板を斜めに曲げて、前記シート基板の搬送方向を前記第一方向から前記第一方向と異なる第二方向に変える第一案内部材と、
前記第二方向から搬送される前記シート基板を斜めに曲げて、前記シート基板の搬送方向を前記第二方向から前記第二方向と異なる第三方向に変える第二案内部材と、
前記第一案内部材及び前記第二案内部材の少なくとも一方に設けられ、前記第一案内部材の位置及び前記第二案内部材の位置の少なくとも一方を調整し、前記第二方向と交差する方向における前記シート基板の位置を調整する調整機構と
を備える搬送装置。 - 前記第一案内部材は、前記シート基板の幅方向に対して斜め方向に延びる中心軸を備えた円柱状部材を有する
請求項1に記載の搬送装置。 - 前記第一案内部材は、前記中心軸を中心に前記円柱状部材を回転させる駆動機構を備える
請求項2に記載の搬送装置。 - 前記第一案内部材は、前記シート基板の幅方向に対して平行な中心軸を備え、前記中心軸の一端部から他端部に向かうに従い外径寸法が小さくなる錘状部材を有する
請求項1に記載の搬送装置。 - 前記第一案部材は、前記中心軸を中心に前記錘状部材を回転させる駆動機構を備える
請求項4に記載の搬送装置。 - 前記第二案内部材は、前記シート基板の幅方向に対して斜め方向に延びる中心軸を備えた円柱状部材を有する
請求項1に記載の搬送装置。 - 前記第二案内部材は、前記中心軸を中心に前記円柱状部材を回転させる駆動機構を備える
請求項6に記載の搬送装置。 - 前記第二案内部材は、前記シート基板の幅方向に対して平行な中心軸を備え、前記中心軸の一端部から他端部に向かうに従い外径寸法が小さくなる錘状部材を有する
請求項1に記載の搬送装置。 - 前記第二案部材は、前記中心軸を中心に前記錘状部材を回転させる駆動機構を備える
請求項8に記載の搬送装置。 - 前記第一案内部材は、前記第二方向に搬送される前記シート基板の面と、前記第一方向から搬送される前記シート基板の面とが互いに平行になるまで、前記シート基板を曲げる案内面を有する
請求項1から請求項9のうちいずれか一項に記載の搬送装置。 - 前記第二案内部材は、前記第三方向に搬送される前記シート基板の面と、前記第二方向から搬送される前記シート基板の面とが互いに平行になるまで、前記シート基板を曲げる案内面を有する
請求項1から請求項10のうちいずれか一項に記載の搬送装置。 - 前記第二方向は、前記第一方向に対して交差する方向である
請求項1から請求項11のうちいずれか一項に記載の搬送装置。 - 前記第三方向は、前記第一方向と平行なである
請求項1から請求項12のうちいずれか一項に記載の搬送装置。 - 前記調整機構は、
前記第一案内部材の位置を調整する第一調整部と、
前記第二案内部材の位置を調整する第二調整部と、
前記第一調整部及び前記第二調整部を制御する制御部と、を有する
請求項1から請求項14のいずれか一項に記載の搬送装置。 - 前記制御部は、前記第一案内部材及び前記第二案内部材を制御し、前記シート基板をチルトさせる
請求項14に記載の搬送装置。 - 前記シート基板に設けられるマークを検出するマーク検出部を更に備え、
前記調整機構は、前記マーク検出部の検出結果に基づいて前記シート基板の位置を調整する
請求項1から請求項15のうちいずれか一項に記載の搬送装置。 - 前記第一案内部材と前記第二案内部材との間に配置され、前記シート基板を支持すると共に、少なくとも前記シート基板を押す方向に移動可能に設けられたステージ装置
を更に備える請求項1から請求項16のうちいずれか一項に記載の搬送装置。 - 前記ステージ装置は、前記シート基板を支持する面に当該シート基板を吸着する吸着部を有する
請求項17に記載の搬送装置。 - 帯状のシート基板を搬送する搬送装置と、
前記シート基板に対して所定の処理を行う処理装置と
を備え、
前記搬送装置として、請求項1から請求項18のうちいずれか一項に記載の搬送装置が用いられる
基板処理装置。 - 前記処理装置は、前記シート基板のうち前記搬送装置の前記第一案内部材と前記第二案内部材との間の領域に対して前記処理を行うように配置されている
請求項19に記載の基板処理装置。 - 帯状のシート基板を搬送する搬送装置であって、
前記シート基板の裏面を支持し、第一方向から搬送される前記シート基板を斜めに曲げて、前記シート基板の搬送方向を前記第一方向から前記第一方向と異なる第二方向に変える第一案内部材と、
前記シート基板の裏面を支持し、前記第二方向から搬送される前記シート基板を斜めに曲げて、前記シート基板の搬送方向を前記第二方向から前記第二方向と異なる第三方向に変える第二案内部材と、
前記シート基板の裏面を支持し、前記第三方向から搬送される前記シート基板を斜めに曲げて、前記シート基板の搬送方向を前記第三方向から前記第三方向と異なる第四方向に変える第三案内部材と
を備えることを特徴とする搬送装置。 - 前記第一案内部材は、前記第一方向から搬送される前記シート基板の表面と、前記第二方向に搬送される前記シート基板の表面とが互いに平行になるまで、前記シート基板を曲げる第一案内面を有することを特徴とする請求項21に記載の搬送装置。
- 前記第二案内部材は、前記第二方向から搬送される前記シート基板の表面と、前記第三方向に搬送される前記シート基板の表面とが互いに平行になるまで、前記シート基板を曲げる第二案内面を有することを特徴とする請求項21又は請求項22に記載の搬送装置。
- 前記第三案内部材は、前記第三方向から搬送される前記シート基板の表面と、前記第四方向に搬送される前記シート基板の表面とが互いに平行になるまで、前記シート基板を曲げる第三案内面を有することを特徴とする請求項21から請求項23のいずれか一項に記載の搬送装置。
- 前記第一案内部材、前記第二案内部材及び前記第三案内部材の少なくとも一つは、前記シート基板の幅方向に対して斜め方向に延びる中心軸を備えた円柱状部材を有することを特徴とする請求項21から請求項24のいずれか一項に記載の搬送装置。
- 前記第一案内部材、前記第二案内部材及び前記第三案内部材の少なくとも一つは、前記シート基板の幅方向に対して平行な中心軸を備え、前記中心軸の一端部から他端部に向かうに従い外径寸法が小さくなる錘状部材を有することを特徴とする請求項21から請求項24のいずれか一項に記載の搬送装置。
- 前記第二方向は、前記第一方向に対して交差する方向であることを特徴とする請求項21から請求項26のうちいずれか一項に記載の搬送装置。
- 前記第三方向は、前記第一方向と平行な方向であることを特徴とする請求項21から請求項27のうちいずれか一項に記載の搬送装置。
- 前記第四方向は、前記第二方向と平行な方向であることを特徴とする請求項21から請求項28のうちいずれか一項に記載の搬送装置。
- 前記第一案内部材は、前記シート基板の幅方向に対して斜め方向に延びる中心軸を備えた円柱状部材を有し、
前記第二案内部材は、前記第一案内部材の中心軸に対して平行に延びる中心軸を備える円柱状部材を有することを特徴とする請求項21から請求項29のうちいずれか一項に記載の搬送装置。 - 前記第三案内部材は、前記第二案内部材の中心軸に対して交差する方向に延びる中心軸を備える円柱状部材を有することを特徴とする請求項30に記載の搬送装置。
- 前記第一案内部材は、前記シート基板の幅方向に対して平行な中心軸を備え、かつ前記中心軸の一端部から他端部に向かうに従い外径寸法が小さくなる錘状部材を有し、
前記第二案内部材は、前記第一案内部材の中心軸に対して平行に延びる中心軸を備え、かつ前記中心軸の一端部から他端部に向かうに従い外径寸法が小さくなる錘状部材を有することを特徴とする請求項21から請求項29のうちいずれか一項に記載の搬送装置。 - 前記第三案内部材は、前記第二案内部材の中心軸に対して交差する方向に延びる中心軸を備え、かつ前記中心軸の一端部から他端部に向かうに従い外径寸法が小さくなる錘状部材を有することを特徴とする請求項32に記載の搬送装置。
- 前記シート基板の裏面を支持し、前記第四方向から搬送される前記シート基板を前記シート基板の幅方向に対して斜め方向に曲げて、前記シート基板の搬送方向を前記第四方向から前記第四方向と異なる第五方向に変える第四案内部材
を更に備えることを特徴とする請求項21から請求項33のうちいずれか一項に記載の搬送装置。 - 帯状のシート基板を搬送する搬送装置と、
前記シート基板に対して所定の処理を行う処理装置と
を備え、
前記搬送装置として、請求項21から請求項34のうちいずれか一項に記載の搬送装置が用いられることを特徴とする基板処理装置。 - 帯状のシート基板の表面に所定の処理を実施する基板処理装置であって、
前記シート基板の裏面を支持し、第一方向から搬送される前記シート基板を斜めに曲げて、前記シート基板の搬送方向を前記第一方向から前記第一方向と異なる第二方向に変える第一案内部材と、
前記シート基板の裏面を支持し、前記第二方向から搬送される前記シート基板を斜めに曲げて、前記シート基板の搬送方向を前記第二方向から前記第二方向と異なる第三方向に変える第二案内部材と、
前記シート基板の裏面を支持し、前記第三方向から搬送される前記シート基板を斜めに曲げて、前記シート基板の搬送方向を前記第三方向から前記第三方向と異なる第四方向に変える第三案内部材と、
前記シート基板の裏面を支持し、前記第四方向から搬送される前記シート基板を斜めに曲げて、前記シート基板の搬送方向を前記第四方向から前記第四方向と異なる第五方向に変える第四案内部材と、
前記第一案内部材と前記第二案内部材との間で、前記シート基板の表面に所定の処理を行う第一処理部と
を備えることを特徴とする基板処理装置。 - 前記第一案内部材は、前記第一方向から搬送される前記シート基板の表面と、前記第二方向に搬送される前記シート基板の表面とが互いに平行になるまで、前記シート基板を曲げる第一案内面を有し、
前記第二案内部材は、前記第二方向から搬送される前記シート基板の表面と、前記第三方向に搬送される前記シート基板の表面とが互いに平行になるまで、前記シート基板を曲げる第二案内面を有し、
前記第三案内部材は、前記第三方向から搬送される前記シート基板の表面と、前記第四方向に搬送される前記シート基板の表面とが互いに平行になるまで、前記シート基板を曲げる第三案内面を有することを特徴とする請求項36に記載の搬送処理装置。 - 前記第一処理部は、前記第一案内部材と前記第二案内部材との間に設置される第一位置と、前記第三案内部材と前記第四案内部材との間に設置される第二位置との間で移動可能に設けられている
ことを特徴とする請求項36又は請求項37に記載の基板処理装置。 - 前記第三案内部材と前記第四案内部材との間で、前記シート基板の表面に所定の処理を行う第二処理部を備えることを特徴とする請求項36又は請求項37に記載の基板処理装置。
- 前記第一処理部と前記第二処理部とは、互いに異なる処理を行うことを特徴とする請求項39に記載の基板処理装置。
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JP2021535881A (ja) * | 2018-10-29 | 2021-12-23 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー.Hewlett‐Packard Development Company, L.P. | ウェブのシフト補償 |
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TWI627120B (zh) | 2018-06-21 |
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JPWO2011099562A1 (ja) | 2013-06-17 |
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TWI592353B (zh) | 2017-07-21 |
CN102803109B (zh) | 2015-04-22 |
KR101747989B1 (ko) | 2017-06-15 |
KR20170069297A (ko) | 2017-06-20 |
JP5765240B2 (ja) | 2015-08-19 |
TW201733890A (zh) | 2017-10-01 |
CN102803109A (zh) | 2012-11-28 |
KR101803692B1 (ko) | 2017-11-30 |
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