WO2011093357A1 - インプリント用モールド及びその製造方法 - Google Patents
インプリント用モールド及びその製造方法 Download PDFInfo
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- WO2011093357A1 WO2011093357A1 PCT/JP2011/051550 JP2011051550W WO2011093357A1 WO 2011093357 A1 WO2011093357 A1 WO 2011093357A1 JP 2011051550 W JP2011051550 W JP 2011051550W WO 2011093357 A1 WO2011093357 A1 WO 2011093357A1
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- Prior art keywords
- layer
- fine pattern
- pattern forming
- forming layer
- thickness
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
- B29C59/046—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts for layered or coated substantially flat surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
Definitions
- the present invention relates to an imprint mold and a method for manufacturing the same, and more particularly to an imprint mold for forming a fine pattern on the mold surface and a method for manufacturing the same.
- stepper by using light and an electron beam having a wavelength shorter than that of visible light from an ultraviolet laser or an extreme ultraviolet light source, processing from the micron order to several tens of nanometers becomes possible.
- micron-order processing takes a considerable amount of time to form a pattern. For this reason, the time required for nano-order microfabrication further increases.
- an ultraviolet laser or an extreme ultraviolet light source is used, the apparatus becomes large and the cost increases. Further, the technique of performing microfabrication by exposure / development with an electron beam is sequential processing, and the work efficiency is lowered.
- nanoimprint technology is a method for transferring a fine pattern onto a material to be transferred like a stamp using a mold on which a fine pattern is formed.
- nanoimprint technology a fine structure of several tens of nm level can be manufactured at a low cost with good reproducibility and in large quantities.
- thermal imprinting is a method in which a mold on which a fine pattern is formed is pressed against a thermoplastic resin as a molding material while being heated, and then the molding material is cooled and released to transfer the fine pattern.
- Optical imprinting is a method in which a mold on which a fine pattern is formed is pressed against a photocurable resin that is a molding material, irradiated with ultraviolet light, and then the molding material is released to transfer the fine pattern. is there.
- This fine pattern formation includes direct drawing on the fine pattern formation layer by a blue laser or electron beam (EB), or performing etching processing on the fine pattern formation layer after drawing and development of the fine pattern on the resist. Means are used.
- EB electron beam
- the drawing apparatus usually has an autofocus function, and if it is a nano-order flaw, it is difficult to cause a focus error. However, when a micron-order scratch occurs, a focus error may occur even if the autofocus function is used. Due to this focus error, the fine pattern stored in the drawing apparatus may not be accurately reproduced on the imprint mold.
- An object of the present invention is to provide an imprint mold having a fine pattern with high pattern accuracy and a method for manufacturing the same, in which the surface roughness of the substrate is reduced.
- the first aspect of the present invention is characterized in that a planarizing layer having a layer made of a planarizing agent is provided on a substrate, and a layer having a fine pattern is provided on the planarizing layer.
- the base material is a cylindrical base material made of stainless steel
- the planarizing agent is polysilazane.
- the layer having the fine pattern is a fine pattern forming layer, and the fine pattern forming layer includes a chromium oxide layer.
- the layer having the fine pattern is a fine pattern forming layer, and the fine pattern forming layer includes a chromium nitride layer.
- the chromium nitride layer has a thickness of 20 nm or more, and the total thickness of the fine pattern forming layer is 20 nm or more and 1 ⁇ m or less.
- the layer having the fine pattern is a fine pattern forming layer, and the fine pattern forming layer is a chromium oxide layer and a nitriding layer.
- a chromium layer is included, the thickness of the chromium nitride layer is 20 nm or more, and the total thickness of the fine pattern forming layer is 20 nm or more and 1 ⁇ m or less.
- the layer having the fine pattern is a fine pattern forming layer, and the fine pattern forming layer includes an amorphous carbon layer.
- a seventh aspect of the present invention is a method for producing an imprint mold, comprising a substrate surface planarization step of applying a planarizing agent on a substrate.
- the base material is a cylindrical base material made of stainless steel, and the planarizing agent is polysilazane.
- a fine pattern forming layer is formed on the planarizing layer having a layer made of a planarizing agent after the substrate surface planarizing step.
- the fine pattern forming layer includes a chromium oxide layer, and the thickness of the chromium oxide layer is greater than 100 nm. The total thickness is more than 100 nm and not more than 1 ⁇ m.
- the fine pattern forming layer includes a chromium nitride layer, and the chromium nitride layer has a thickness of 20 nm or more.
- the total thickness of the layer is 20 nm or more and 1 ⁇ m or less.
- the fine pattern forming layer includes a chromium oxide layer and a chromium nitride layer, and the chromium nitride layer has a thickness of 20 nm or more,
- the total thickness of the fine pattern forming layer is 20 nm or more and 1 ⁇ m or less.
- the fine pattern forming layer includes an amorphous carbon layer, and the thickness of the amorphous carbon layer is greater than 50 nm, and the fine pattern forming layer is The thickness of is greater than 50 nm and 1 ⁇ m or less.
- blue laser drawing is performed in the drawing step.
- the surface roughness of the substrate is reduced, and as a result, an imprint mold having a fine pattern with high pattern accuracy and a method for manufacturing the same can be provided.
- the fine pattern provided in the master mold or sub master mold serving as the original mold has high pattern accuracy.
- This high pattern accuracy is largely caused by the surface roughness of the substrate, that is, the flatness of the substrate.
- the present inventor has conceived of providing a layer for forming a fine pattern after applying a planarizing agent on a base material which is a basic portion of an imprint mold.
- a planarizing agent on a base material which is a basic portion of an imprint mold.
- the present inventor has conceived that a layer that is more opaque than the leveling agent is provided on at least a part of the fine pattern forming layer 8 on the leveling layer having the layer made of the leveling agent. .
- the focus at the time of fine pattern drawing can be surely adjusted on the opaque layer.
- the situation as shown in FIG. 3B is suppressed, that is, even when the bent base material is flattened by the flattening layer, the focus at the time of drawing the fine pattern is not the flattening layer. It has been found that it is possible to suppress passing and fitting onto a rough surface substrate.
- flatness is an index indicating the surface roughness of the mold substrate, and is determined from the geometric plane of the surface of the portion that should not have scratches. This indicates the size of the deviation and is an index defined in JIS B 0182.
- FIG. 1 is a diagram schematically showing a manufacturing process of an imprint mold 1 (hereinafter also simply referred to as a mold 1) in the present embodiment.
- FIG. 1A shows a mold substrate 2 and
- FIG. 1B shows a state in which a planarizing layer 6 made of a planarizing agent is provided on the mold substrate 2.
- FIG. 1C shows a state in which the adhesion layer 7, the fine pattern forming layer 8, and the resist layer 9 are laminated in this order on the planarizing layer 6, and
- FIG. Shows a state in which a fine pattern is drawn and developed.
- FIG. 1E shows a state in which the fine pattern forming layer 8 is etched, and FIG.
- FIG. 1F shows a state in which the mold 1 is completed by cleaning after the etching.
- a planarizing layer 6 is provided on the mold substrate 2, and an adhesion layer 7 and a fine pattern forming layer 8 on which a fine pattern is formed are formed on the planarized layer 6.
- the provided imprint mold is obtained.
- FIGS. 1 and 2 show an overview of the imprint mold completed through these processes.
- 2A and 2B are schematic views of the imprint mold according to the present embodiment, in which FIG. 2A is a perspective view, FIG. 2B is a front view, and FIG. 2C is a cross-sectional view of the A-A ′ portion of FIG.
- FIGS. 1 and 2 are schematic views of the imprint mold according to the present embodiment, in which FIG. 2A is a perspective view, FIG. 2B is a front view, and FIG. 2C is a cross-sectional view of the A-A ′ portion of FIG.
- the imprint mold and the manufacturing method thereof according to the present embodiment will be described in detail with reference to FIGS. 1 and 2.
- the mold substrate 2 may be of any composition as long as it can be used as the imprint mold 1.
- a base material made of an alloy such as metal or stainless steel can be mentioned.
- glass such as quartz, SiC, silicon wafer, a silicon wafer provided with a SiO 2 layer, graphite, glassy carbon, carbon fiber reinforced plastic (CFRP) carbon-based material, and the like can be given.
- the shape of the mold substrate 2 is not limited as long as it can be used as an imprint mold.
- the shape of the mold base 2 includes a disk-shaped base, a cylindrical base, and the like. If it is disk shape, when apply
- the cylindrical shape is suitable for mass production because imprinting by a roller method is possible.
- the shape of the mold base 2 may be other than a disk shape, and may be a rectangle, a polygon, or a semicircular shape.
- examples of the shape of the mold base 2 include a polygonal shape such as a column, a triangular column, and a quadrangular column.
- the column or the cylinder is finer continuously and uniformly on the material to be transferred. It is more preferable because the pattern can be transferred.
- whatever shape the mold substrate 2 has, what is used as a basis for manufacturing an imprint mold is referred to as a “substrate”.
- the mold base 2 made of cylindrical stainless steel having a hollow central portion. As shown in FIG. 2, the mold base 2 has left and right mold end faces, a mold outer peripheral face 20, and a rotating shaft 3 that is not formed physically.
- a layer having a fine pattern is not directly formed on the surface of the mold base 2 as in the prior art, but is made of a planarizing agent whose surface is flattened by a planarizing agent.
- a layer (hereinafter also referred to as a flattening layer 6) is formed on the mold substrate 2.
- this substrate surface flattening step will be described in detail.
- a leveling agent examples include conventionally used liquid flattening film forming agents, and specific examples include polysilazane, methylsiloxane, and metal alkoxide.
- the above-described materials may be used as the material constituting the planarizing layer 6, or a mixture of the materials exemplified above may be used.
- the mold base 2 is held in a state where the rotary shaft 3 is horizontal, and a container containing a flattening agent is prepared below the mold base 2. Thereafter, the mold base 2 is lowered, and a part of the outer peripheral surface of the mold base 2 is brought into contact with the planarizing agent. And a part of mold base material 2 is immersed in a planarizing agent.
- the mold base 2 is brought into contact with the planarizing agent in parallel to the rotation axis direction. By making them contact in parallel, it is possible to prevent a difference in the degree of application between the left and right mold end faces in the immersed portion of the mold base 2. As a result, unevenness is not caused in the application of the flattening agent.
- the mold base 2 is rotated by the plurality of rollers 107 in a state where the planarizing agent and the mold base 2 are in contact with each other in parallel to the rotation axis direction, and the mold outer peripheral surface 20 is thus rotated.
- the leveling agent is applied (FIG. 1B).
- a part for rotating the mold base 2 with the roller 107 may be separately provided on the mold base 2.
- the rotation speed and rotation speed at this time are set so that the planarizing agent can be sufficiently applied to the mold base 2.
- the adhesion layer 7, the fine pattern forming layer 8, and the resist layer 9 are laminated in this order on the planarizing layer 6 made of the planarizing agent applied as described above (FIG. 1 (c). )). Thereafter, the resist layer 9 is subjected to electron beam exposure and etching is performed (FIGS. 1D and 1E). Thus, a fine pattern is formed on the fine pattern forming layer 8 on the mold substrate 2 (FIG. 1 (f)).
- the adhesion layer 7 provided on the planarizing layer 6 this is for bonding the fine pattern forming layer 8 and the planarizing layer 6 and eventually the mold substrate 2. Any material can be used as long as it is used as the adhesion layer 7, but an amorphous silicon layer is preferable. If the fine pattern forming layer 8 is formed on the planarizing layer 6, the adhesion layer 7 may not be provided as long as the fine pattern forming layer 8 can be adhered well. In the present embodiment, a case where the adhesion layer 7 is provided on the planarizing layer 6 will be described.
- the fine pattern forming layer 8 provided on the adhesion layer 7, in the present embodiment it is preferable that at least a part of the fine pattern forming layer 8 is an opaque layer. Furthermore, the transmittance at a wavelength of 405 nm of the entire fine pattern forming layer 8 having an opaque layer is preferably within an appropriate range. As shown in FIG. 3A, when the laser beam 109 is irradiated from the upper part of the mold base 2 on which the fine pattern forming layer 8 is laminated, the focus of the laser beam 109 at the time of pattern drawing is set to the opaque layer. Can be adjusted to the top reliably. More specifically, the situation shown in FIG.
- the “opaque layer” in the present embodiment refers to focusing on the opaque layer when pattern drawing is focused on the substrate on which the fine pattern forming layer 8 is laminated.
- the opaque layer mentioned here examples include a chromium oxide layer (CrOx), a chromium nitride layer (CrNx), and an amorphous carbon layer. These layers may be used as the fine pattern forming layer 8 itself.
- the thickness of the chromium oxide layer is larger than 100 nm, and the total thickness of the fine pattern forming layer 8 is larger than 100 nm and 1 ⁇ m or less. Still preferred. If it is 100 nm or more, sufficient focusing can be performed on the chromium oxide layer. If it is 1 ⁇ m or less, it can withstand practical use during pattern transfer.
- the thickness of the chromium nitride layer is 20 nm or more, and the total thickness of the fine pattern forming layer 8 is 20 nm or more and 1 ⁇ m or less. Is preferred.
- the thickness of the chromium nitride layer is more preferably 30 nm or more.
- the thickness of the chromium nitride layer is 20 nm or more, and the total thickness of the fine pattern forming layer 8 is 20 nm or more and 1 ⁇ m or less.
- the chromium nitride layer since the chromium nitride layer is more opaque than the chromium oxide layer, the chromium nitride layer mainly serves as an opaque layer. Therefore, as a stacking order, it is preferable to form a chromium nitride layer on the chromium oxide layer.
- the focus of the laser beam 109 can be surely adjusted to the upper chromium nitride layer, and a precise pattern can be formed in the subsequent etching of the chromium oxide layer. That is, it is preferable to dispose a relatively opaque layer as an upper layer in the fine pattern forming layer 8.
- an amorphous carbon layer may be used. Since the amorphous carbon layer is not as highly transparent as the chromium oxide layer, it is possible to prevent the mold base 2 from being focused on when drawing a fine pattern.
- the thickness of the amorphous carbon layer is preferably greater than 50 nm, and the total thickness of the fine pattern forming layer 8 is preferably greater than 50 nm and 1 ⁇ m or less.
- the focus of the laser beam 109 can be surely adjusted to the fine pattern forming layer 8 formed on the surface of the planarizing layer 6. Further, if the thickness of the fine pattern forming layer 8 is within the above range, the fine pattern forming layer 8 can be reliably focused and a fine pattern having an appropriate aspect ratio can be formed. .
- a resist layer 9 for blue laser drawing is formed on the fine pattern forming layer 8.
- the resist layer 9 for blue laser drawing may be a heat-sensitive material that changes its state due to a heat change, and may be suitable for the subsequent etching process. Further, a photosensitive material may be used. At this time, an inorganic resist layer made of tungsten oxide (WOx) having a composition gradient is more preferable from the viewpoint of improving resolution.
- WOx tungsten oxide
- the fine pattern forming layer 8 is etched using the resist layer 9 as an etching mask.
- the layer 8 for fine pattern formation in which the fine pattern was formed can be formed with respect to the mold base material 2 made of stainless steel.
- This etching process may use a conventional method. For example, dry etching with chlorine gas and oxygen gas can be mentioned. By this etching process, as shown in FIG.1 (e), the mold base material 2 with the resist layer 9 which has a desired fine pattern is obtained.
- the resist layer 9 is removed by performing alkali cleaning and vapor drying with isopropanol on the mold substrate 2 with the resist layer 9. Thereby, as shown in FIG.1 (f), the mold 1 by which the desired fine pattern was transcribe
- the fine pattern at this time may be a pattern in a range from nano-order to micro-order, but more preferably a nano-order periodic structure of several nm to several hundred nm.
- Specific examples are a line-and-space pattern and a fine protrusion structure composed of a plurality of fine irregularities.
- Examples of the cross-sectional shape include a triangle, a trapezoid, and a square in the case of a one-dimensional periodic structure.
- the shape of the fine protrusions is not limited to an accurate cone (bus line is straight) or pyramid (ridge line is straight), as long as it is tapered in consideration of extraction after imprinting.
- the ridgeline shape may be a curved surface with a side surface bulging outward. Specific examples include a bell, a cone, a truncated cone, and a cylinder.
- the period in this periodic structure is also referred to as a pitch, and indicates the distance between the fine protrusion vertices.
- the tip portion may be flattened or rounded in consideration of moldability and breakage resistance.
- this fine protrusion may produce a continuous fine protrusion with respect to one direction.
- the imprint mold according to the present embodiment is configured. According to the embodiment, the following effects can be obtained. That is, a fine pattern is formed on a flat surface by applying a flattening agent on a base material that is a base part of an imprint mold to form a flattened layer and forming a fine pattern forming layer on the flattened layer. can do. As a result, it is possible to focus on a flat surface made of a flattening agent when drawing a fine pattern. Furthermore, the fine pattern forming layer 8 in which a fine pattern is formed can be formed on the surface having high flatness. As a result, a fine pattern can be formed with high accuracy.
- an opaque fine pattern forming layer on the flattening layer containing the flattening agent, it is possible to reliably focus on the opaque layer when drawing a fine pattern. That is, it is possible to suppress the focus at the time of drawing a fine pattern from passing through the flattening layer onto the rough surface base material even though the bent base material is flattened by the flattening layer. As a result, a fine pattern forming layer can be formed with higher accuracy.
- Embodiment 2 a highly transparent substance is used as the leveling agent.
- an opaque material is used as the leveling agent.
- the surface of the mold base 2 originally has a certain level of flatness, such as a silicon wafer, even if a highly transparent substance is used as the leveling agent, On top of this, a resist layer 9 having a fine pattern can be directly formed and used as an imprint mold.
- the leveling agent having opacity include a leveling agent to which a dye additive is added.
- a transparent material for the planarizing agent, for example, a configuration in which a chromium layer is sandwiched between two layers made of polysilazane may be used as the planarizing layer 6.
- Example 1 An Example is shown and this invention is demonstrated concretely.
- a leveling agent was prepared.
- As the leveling agent a solution in which 20% of polysilazane was dissolved in dibutyl ether was used.
- the leveling agent container containing the polysilazane solution was disposed below the mold base 2.
- the mold substrate 2 was brought into contact with the polysilazane solution. At this time, a part of the outer peripheral surface 20 of the mold was immersed in the flattening agent at a depth of 0.3 mm or less from the liquid surface of the flattening agent.
- the mold was rotated three times at a rotation speed of 32 rotations / minute by a separately provided rotating shaft 3, and the polysilazane solution was applied to the entire outer peripheral surface 20 of the mold.
- the polysilazane solution was applied onto the cylindrical mold base 2 so that the planarizing layer 6 had a thickness of 1.5 ⁇ m. Then, the cylindrical mold base material 2 and the planarizing agent were pulled apart and dried while rotating the mold base material 2.
- an adhesion layer 7, a fine pattern forming layer 8 which is itself opaque, and an inorganic resist layer 9 were laminated in this order.
- an amorphous silicon layer was formed to a thickness of 30 nm.
- An amorphous carbon layer having a thickness of 200 nm was formed as the fine pattern forming layer 8.
- a tungsten oxide (WOx) layer was formed to a thickness of 20 nm by sputtering.
- the flow rate ratio of Ar: O 2 was continuously changed by using an ion beam sputtering method to incline the oxygen concentration in the inorganic resist layer 9. Further, Rutherford Back Scattering Spectroscopy (RBS) was used for composition analysis in the inorganic resist layer 9.
- RBS Rutherford Back Scattering Spectroscopy
- a fine pattern composed of line and space was drawn on the inorganic resist layer 9 using a blue laser drawing apparatus (wavelength: 405 nm). After drawing, an etching process and a cleaning process were performed to produce a mold 1.
- Example 2 ⁇ Examples 2 to 9>
- the mold 1 was prepared in the same manner as in Example 1 except that the type of the mold base 2 and the type and thickness of the fine pattern forming layer 8 were changed. Produced.
- the fine pattern forming layer 8 was not provided, but a fine pattern drawn on the inorganic resist layer 9 and developed was used as a completed mold. Further, in Example 6, a fine pattern composed of dots instead of lines and spaces was drawn.
- N 2 30: 70 (flow rate ratio).
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Abstract
Description
本発明の第2の態様は、第1の態様に記載の発明において、前記基材はステンレス鋼よりなる円筒形基材であり、前記平坦化剤はポリシラザンであることを特徴とする。
本発明の第3の態様は、第1または第2の態様に記載の発明において、前記微細パターンを有する層は、微細パターン形成用層であり、前記微細パターン形成用層は酸化クロム層を含み、前記酸化クロム層の厚さは100nmより大きく、前記微細パターン形成用層全体の厚さは100nmより大きく1μm以下であることを特徴とする。
本発明の第4の態様は、第1または第2の態様に記載の発明において、前記微細パターンを有する層は、微細パターン形成用層であり、前記微細パターン形成用層は窒化クロム層を含み、前記窒化クロム層の厚さは20nm以上であり、前記微細パターン形成用層全体の厚さは20nm以上であり1μm以下であることを特徴とする。
本発明の第5の態様は、第1または第2の態様に記載の発明において、前記微細パターンを有する層は、微細パターン形成用層であり、前記微細パターン形成用層は酸化クロム層および窒化クロム層を含み、前記窒化クロム層の厚さは20nm以上であり、前記微細パターン形成用層全体の厚さは20nm以上であり1μm以下であることを特徴とする。
本発明の第6の態様は、第1または第2の態様に記載の発明において、 前記微細パターンを有する層は、微細パターン形成用層であり、前記微細パターン形成用層はアモルファスカーボン層を含み、前記アモルファスカーボン層の厚さは50nmより大きく、前記微細パターン形成用層の厚さは50nmより大きく1μm以下であることを特徴とする。
本発明の第7の態様は、基材上に平坦化剤を塗布する基材表面平坦化工程を有することを特徴とするインプリント用モールドの製造方法である。
本発明の第8の態様は、第7の態様に記載の発明において、前記基材はステンレス鋼よりなる円筒形基材であり、前記平坦化剤はポリシラザンであることを特徴とする。
本発明の第9の態様は、第7または第8の態様に記載の発明において、前記基材表面平坦化工程後に、平坦化剤よりなる層を有する平坦化層上に、微細パターン形成用層を有する層を設け、その上に更に微細パターン形成用のレジスト層を設ける工程と、前記レジスト層に対して微細パターンを描画して現像する描画工程と、前記描画工程後、微細パターン形成用層をエッチングして微細パターンを形成する工程と、を有することを特徴とする。
本発明の第10の態様は、第9の態様に記載の発明において、前記微細パターン形成用層は酸化クロム層を含み、前記酸化クロム層の厚さは100nmより大きく、前記微細パターン形成用層全体の厚さは100nmより大きく1μm以下であることを特徴とする。
本発明の第11の態様は、第9の態様に記載の発明において、前記微細パターン形成用層は窒化クロム層を含み、前記窒化クロム層の厚さは20nm以上であり、前記微細パターン形成用層全体の厚さは20nm以上であり1μm以下であることを特徴とする。
本発明の第12の態様は、第9の態様に記載の発明において、前記微細パターン形成用層は酸化クロム層および窒化クロム層を含み、前記窒化クロム層の厚さは20nm以上であり、前記微細パターン形成用層全体の厚さは20nm以上であり1μm以下であることを特徴とする。
本発明の第13の態様は、第9の態様に記載の発明において、前記微細パターン形成用層はアモルファスカーボン層を含み、前記アモルファスカーボン層の厚さは50nmより大きく、前記微細パターン形成用層の厚さは50nmより大きく1μm以下であることを特徴とする。
本発明の第14の態様は、第9の態様に記載の発明において、前記描画工程においては、青色レーザー描画を行うことを特徴とする。
以下、本発明を実施するための形態を、図1に基づき説明する。
図1は、本実施形態におけるインプリント用モールド1(以降、単にモールド1ともいう)の製造工程を概略的に示す図である。図1(a)はモールド基材2を示し、図1(b)はモールド基材2に平坦化剤よりなる平坦化層6を設けた様子を示す。さらに、図1(c)はその平坦化層6の上に、密着層7、微細パターン形成用層8、レジスト層9をこの順に積層した様子を示し、図1(d)はこのレジスト層9に対して微細パターンを描画・現像した様子を示す。そして図1(e)は微細パターン形成用層8に対してエッチングを行った様子を示し、図1(f)はエッチング後に洗浄を行い、モールド1を完成させた様子を示す図である。図1(f)に示すように、モールド基材2上に平坦化層6が設けられ、前記平坦化層6上に、密着層7、及び微細パターンが形成された微細パターン形成用層8が設けられたインプリント用モールドが得られる。
まず図1(a)に示すような、インプリント用モールド1のためのモールド基材2を用意する。
このモールド基材2は、インプリント用モールド1として用いることができるのならばどのような組成のものでも良い。工業用としての耐久性を考慮すると、金属またはステンレス鋼のような合金製基材が挙げられる。この他にも、石英などのガラス、SiC、シリコンウエハ、さらにはシリコンウエハ上にSiO2層を設けたもの、グラファイト、グラッシーカーボン、カーボンファイバー強化プラスチック(CFRP)のカーボン系材料等が挙げられる。
上述の通り、インプリント用モールド1に用いられる基材においては、ミクロンオーダーの傷が微細パターンの再現性に大きな影響を与えるおそれがある。
そのため、本実施形態においては、従来のようにモールド基材2の表面に直接に微細パターンを有する層を形成するのではなく、平坦化剤により基材表面が平坦化された平坦化剤からなる層(以降、平坦化層6ともいう)をモールド基材2上に形成する。以下、この基材表面平坦化工程について詳述する。
このときの回転速度および回転数は、平坦化剤をモールド基材2に十分塗布することができるように設定する。
本実施形態においては、上述のように塗布された平坦化剤からなる平坦化層6の上に、密着層7、微細パターン形成用層8、レジスト層9をこの順に積層する(図1(c))。その後、レジスト層9に対して電子ビーム露光を行い、エッチング処理を行う(図1(d)(e))。これにより、モールド基材2上にある微細パターン形成用層8に対して微細パターンを形成する(図1(f))。
このエッチング加工により、図1(e)に示すように、所望の微細パターンを有するレジスト層9付きモールド基材2が得られる。
さらには、成形性や耐破損性を考慮して、先端部を平坦にしたり、丸みをつけたりしてもよい。さらに、この微細突起は一方向に対して連続的な微細突起を作製してもよい。
すなわち、インプリントモールドの基礎部分となる基材上に平坦化剤を塗布して平坦化層を形成し、その上に微細パターン形成層を形成することにより、平坦な表面上に微細パターンを形成することができる。
その結果、微細パターン描画の際に、平坦化剤からなる平坦な表面上にフォーカスを合わせることができる。さらには、高い平坦度を有する表面上に、微細パターンが形成された微細パターン形成用層8を形成することができる。その結果、高い精度で微細パターンを形成できる。
それに加え、前記平坦化剤を含む平坦化層の上に不透明な微細パターン形成用層を設けることにより、微細パターン描画の際のフォーカスをこの不透明な層上に確実に合わせることができる。すなわち、平坦化層により折角基材を平坦化したにもかかわらず、微細パターン描画の際のフォーカスが、平坦化層を通り越して粗表面基材上に合わせられるのを抑制できる。その結果、さらに高い精度で微細パターン形成層を形成できる。
実施の形態1においては、平坦化剤として透明性の高い物質を用いた。しかし、本実施形態においては、平坦化剤として不透明性を有する物質を用いる。こうすることにより、微細パターン形成用層8にて不透明な層を用いなくとも、パターン描画のフォーカスが粗表面の基材上に合うことを抑制することができる。すなわち、平坦化剤そのものが不透明であることから、平坦化された平坦化層6の表面に、確実にパターン描画のフォーカスを合わせることができる。そのため、平坦化層6の上に、微細パターンを有するレジスト層9を直接形成することも可能となる。なお、シリコンウエハのように、モールド基材2の表面が元々ある程度の平坦性を有していれば、平坦化剤として透明性の高い物質を用いた場合であっても、平坦化層6の上に、微細パターンを有するレジスト層9を直接形成し、それをもってインプリント用モールドとすることも可能となる。
不透明性を有する平坦化剤としては、例えば色素添加剤を加えた平坦化剤が挙げられる。また、平坦化剤に透明性を有する物質を用いた場合であっても、たとえばポリシラザンからなる2つの層の間にクロム層を挟んだ形態を平坦化層6としてもよい。
次に実施例を示し、本発明について具体的に説明する。
ステンレス製の円筒形の中空モールド基材2(SUS304、直径100mmすなわち半径50mm、そのうち中空部分の直径84mm、モールド端面間距離300mm)を用意した。
その後、円筒形モールド基材2と平坦化剤とを引き離し、モールド基材2を回転させながら乾燥させた。
密着層7としてはアモルファスシリコン層を30nmの厚さで成膜した。微細パターン形成用層8としてはアモルファスカーボン層を200nmの厚さで成膜した。無機レジスト層9としては酸化タングステン(WOx)層をスパッタ法により、20nmの厚さで成膜した。なお、無機レジスト層9の深さ方向への組成変化については、中空モールド基材側x=0.95、レジスト最表面側x=1.60の傾斜組成とした。この無機レジスト層9の形成には、イオンビームスパッタ法を用いてAr:O2の流量比を連続的に変化させて無機レジスト層9中の酸素濃度を傾斜させた。また、無機レジスト層9中の組成分析にはラザフォード後方散乱分光法(Rutherford Back Scattering Spectroscopy:RBS)を使用した。
実施例2~9においては、表1に示すとおり、モールド基材2の種類、微細パターン形成用層8の種類及び厚さを各々変化させたこと以外は、実施例1と同様にモールド1を作製した。
なお、実施例3においては、微細パターン形成用層8を設けず、無機レジスト層9に微細パターンを描画して現像したものを完成モールドとした。また、実施例6においては、ライン・アンド・スペースではなくドットからなる微細パターンを描画した。
なお、微細パターン形成用層8の作製に当たり、酸化クロム層を形成する際にはAr:O2=80:20(流量比)とし、その上に更に窒化クロム層を形成する際にはAr:N2=30:70(流量比)とした。
本実施例にて製造したモールドについて、走査型電子顕微鏡による観察を行った。その観察結果に基づき、フォーカス異常の有無について検討した。
2 モールド基材
20 モールド外周面
3 回転軸
6 平坦化層
7 密着層
8 微細パターン形成用層
9 レジスト層
107 ローラー
108 傷
109 レーザー光
Claims (14)
- 基材上に平坦化剤よりなる層を有する平坦化層が設けられ、前記平坦化層上には微細パターンを有する層が設けられたことを特徴とするインプリント用モールド。
- 前記基材はステンレス鋼よりなる円筒形基材であり、
前記平坦化剤はポリシラザンであることを特徴とする請求項1に記載のインプリント用モールド。 - 前記微細パターンを有する層は、微細パターン形成用層であり、
前記微細パターン形成用層は酸化クロム層を含み、
前記酸化クロム層の厚さは100nmより大きく、
前記微細パターン形成用層全体の厚さは100nmより大きく1μm以下であることを特徴とする請求項1または2に記載のインプリント用モールド。 - 前記微細パターンを有する層は、微細パターン形成用層であり、
前記微細パターン形成用層は窒化クロム層を含み、
前記窒化クロム層の厚さは20nm以上であり、
前記微細パターン形成用層全体の厚さは20nm以上であり1μm以下であることを特徴とする請求項1または2に記載のインプリント用モールド。 - 前記微細パターンを有する層は、微細パターン形成用層であり、
前記微細パターン形成用層は酸化クロム層および窒化クロム層を含み、
前記窒化クロム層の厚さは20nm以上であり、
前記微細パターン形成用層全体の厚さは20nm以上であり1μm以下であることを特徴とする請求項1または2に記載のインプリント用モールド。 - 前記微細パターンを有する層は、微細パターン形成用層であり、
前記微細パターン形成用層はアモルファスカーボン層を含み、
前記アモルファスカーボン層の厚さは50nmより大きく、
前記微細パターン形成用層の厚さは50nmより大きく1μm以下であることを特徴とする請求項1または2に記載のインプリント用モールド。 - 基材上に平坦化剤を塗布する基材表面平坦化工程を有することを特徴とするインプリント用モールドの製造方法。
- 前記基材はステンレス鋼よりなる円筒形基材であり、
前記平坦化剤はポリシラザンであることを特徴とする請求項7に記載のインプリント用モールドの製造方法。 - 前記基材表面平坦化工程後に、平坦化剤よりなる層を有する平坦化層上に、微細パターン形成用層を有する層を設け、その上に更に微細パターン形成用のレジスト層を設ける工程と、
前記レジスト層に対して微細パターンを描画して現像する描画工程と、
前記描画工程後、微細パターン形成用層をエッチングして微細パターンを形成する工程と、
を有することを特徴とする請求項7または8に記載のインプリント用モールドの製造方法。 - 前記微細パターン形成用層は酸化クロム層を含み、
前記酸化クロム層の厚さは100nmより大きく、
前記微細パターン形成用層全体の厚さは100nmより大きく1μm以下であることを特徴とする請求項9に記載のインプリント用モールドの製造方法。 - 前記微細パターン形成用層は窒化クロム層を含み、
前記窒化クロム層の厚さは20nm以上であり、
前記微細パターン形成用層全体の厚さは20nm以上であり1μm以下であることを特徴とする請求項9に記載のインプリント用モールドの製造方法。 - 前記微細パターン形成用層は酸化クロム層および窒化クロム層を含み、
前記窒化クロム層の厚さは20nm以上であり、
前記微細パターン形成用層全体の厚さは20nm以上であり1μm以下であることを特徴とする請求項9に記載のインプリント用モールドの製造方法。 - 前記微細パターン形成用層はアモルファスカーボン層を含み、
前記アモルファスカーボン層の厚さは50nmより大きく、
前記微細パターン形成用層の厚さは50nmより大きく1μm以下であることを特徴とする請求項9に記載のインプリント用モールドの製造方法。 - 前記描画工程においては、青色レーザー描画を行うことを特徴とする請求項9に記載のインプリント用モールドの製造方法。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013035243A (ja) * | 2011-08-10 | 2013-02-21 | Hoya Corp | ローラーモールド、ローラーモールド用基材及びパターン転写方法 |
WO2013077066A1 (ja) * | 2011-11-25 | 2013-05-30 | Hoya株式会社 | インプリント用モールド及びその製造方法 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2053146B1 (en) | 2006-08-07 | 2016-08-31 | Seiko Instruments Inc. | Method for manufacturing electroformed mold, electroformed mold, and method for manufacturing electroformed parts |
US9161448B2 (en) | 2010-03-29 | 2015-10-13 | Semprius, Inc. | Laser assisted transfer welding process |
US9412727B2 (en) | 2011-09-20 | 2016-08-09 | Semprius, Inc. | Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion |
KR101614628B1 (ko) * | 2012-01-27 | 2016-04-21 | 아사히 가세이 이-매터리얼즈 가부시키가이샤 | 미세 요철 구조체, 건식 에칭용 열반응형 레지스트 재료, 몰드의 제조 방법 및 몰드 |
KR20140076357A (ko) * | 2012-12-12 | 2014-06-20 | 삼성전자주식회사 | 고대비 정렬 마크를 가진 나노임프린트 스탬프 및 그 제조방법 |
CN110265344B (zh) | 2014-07-20 | 2023-09-12 | 艾克斯展示公司技术有限公司 | 用于微转贴印刷的设备及方法 |
US9704821B2 (en) | 2015-08-11 | 2017-07-11 | X-Celeprint Limited | Stamp with structured posts |
US10468363B2 (en) | 2015-08-10 | 2019-11-05 | X-Celeprint Limited | Chiplets with connection posts |
US10103069B2 (en) | 2016-04-01 | 2018-10-16 | X-Celeprint Limited | Pressure-activated electrical interconnection by micro-transfer printing |
KR20180009825A (ko) * | 2016-07-19 | 2018-01-30 | 삼성디스플레이 주식회사 | 롤 타입 임프린트 마스터 몰드, 이의 제조 방법 및 이를 이용한 임프린트 방법 |
US10222698B2 (en) | 2016-07-28 | 2019-03-05 | X-Celeprint Limited | Chiplets with wicking posts |
US11064609B2 (en) | 2016-08-04 | 2021-07-13 | X Display Company Technology Limited | Printable 3D electronic structure |
US11391780B2 (en) | 2018-04-10 | 2022-07-19 | Lg Energy Solution, Ltd. | Battery diagnostic device and method |
US10748793B1 (en) | 2019-02-13 | 2020-08-18 | X Display Company Technology Limited | Printing component arrays with different orientations |
US11062936B1 (en) | 2019-12-19 | 2021-07-13 | X Display Company Technology Limited | Transfer stamps with multiple separate pedestals |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6240725A (ja) * | 1985-08-17 | 1987-02-21 | Oki Electric Ind Co Ltd | 電子線レジスト組成物及びレジストパタ−ンの形成方法 |
JPH09134917A (ja) * | 1995-11-07 | 1997-05-20 | Catalysts & Chem Ind Co Ltd | 半導体装置 |
JP2004306554A (ja) * | 2003-04-10 | 2004-11-04 | Mitsubishi Rayon Co Ltd | 凹凸表面構造シート転写成形用の円筒状型部材の製造方法 |
JP2009119695A (ja) * | 2007-11-14 | 2009-06-04 | Hitachi High-Technologies Corp | ナノプリント用樹脂スタンパ |
JP2009288340A (ja) * | 2008-05-27 | 2009-12-10 | Horon:Kk | ローラーモールド作製方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5756130A (en) * | 1993-05-20 | 1998-05-26 | Hitaci Maxell, Ltd. | Stamper for producing recording medium |
JPH11249168A (ja) * | 1998-03-04 | 1999-09-17 | Seiko Epson Corp | アクティブマトリックス基板およびその製造方法、液晶パネル |
JP2001310330A (ja) * | 2000-04-27 | 2001-11-06 | Hitachi Koki Co Ltd | 金型及びその成形品 |
JP2003100865A (ja) * | 2001-09-21 | 2003-04-04 | Catalysts & Chem Ind Co Ltd | 半導体基板の製造方法および半導体基板 |
US20050008821A1 (en) * | 2003-07-07 | 2005-01-13 | Pricone Robert M. | Process and apparatus for fabricating precise microstructures and polymeric molds for making same |
US7686970B2 (en) * | 2004-12-30 | 2010-03-30 | Asml Netherlands B.V. | Imprint lithography |
EP1746460B1 (en) * | 2005-07-21 | 2011-04-06 | Shin-Etsu Chemical Co., Ltd. | Photomask blank, photomask and fabrication method thereof |
JP2007293221A (ja) * | 2006-03-31 | 2007-11-08 | Fujifilm Corp | 平版印刷版の作製方法及び平版印刷版原版 |
WO2009041646A1 (ja) * | 2007-09-28 | 2009-04-02 | Asahi Glass Company, Limited | 光硬化性組成物、微細パターン形成体の製造方法および光学素子 |
JP2009295797A (ja) * | 2008-06-05 | 2009-12-17 | Kyowa Hakko Chemical Co Ltd | 溝構造または中空構造を有する部材の作製方法 |
JP2010006870A (ja) * | 2008-06-24 | 2010-01-14 | Fujifilm Corp | ナノインプリント用硬化性組成物、硬化物およびその製造方法 |
JP2010008604A (ja) * | 2008-06-25 | 2010-01-14 | Hoya Corp | マスクブランク及び転写用マスク |
-
2011
- 2011-01-27 WO PCT/JP2011/051550 patent/WO2011093357A1/ja active Application Filing
- 2011-01-27 KR KR1020127022474A patent/KR20120139711A/ko not_active Application Discontinuation
- 2011-01-27 SG SG2012053609A patent/SG182619A1/en unknown
- 2011-01-27 US US13/575,854 patent/US20120328728A1/en not_active Abandoned
- 2011-01-27 JP JP2011551888A patent/JP5677987B2/ja active Active
-
2015
- 2015-01-05 JP JP2015000456A patent/JP2015111691A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6240725A (ja) * | 1985-08-17 | 1987-02-21 | Oki Electric Ind Co Ltd | 電子線レジスト組成物及びレジストパタ−ンの形成方法 |
JPH09134917A (ja) * | 1995-11-07 | 1997-05-20 | Catalysts & Chem Ind Co Ltd | 半導体装置 |
JP2004306554A (ja) * | 2003-04-10 | 2004-11-04 | Mitsubishi Rayon Co Ltd | 凹凸表面構造シート転写成形用の円筒状型部材の製造方法 |
JP2009119695A (ja) * | 2007-11-14 | 2009-06-04 | Hitachi High-Technologies Corp | ナノプリント用樹脂スタンパ |
JP2009288340A (ja) * | 2008-05-27 | 2009-12-10 | Horon:Kk | ローラーモールド作製方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013035243A (ja) * | 2011-08-10 | 2013-02-21 | Hoya Corp | ローラーモールド、ローラーモールド用基材及びパターン転写方法 |
WO2013077066A1 (ja) * | 2011-11-25 | 2013-05-30 | Hoya株式会社 | インプリント用モールド及びその製造方法 |
JP2013111763A (ja) * | 2011-11-25 | 2013-06-10 | Hoya Corp | インプリント用モールド及びその製造方法 |
Also Published As
Publication number | Publication date |
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JP2015111691A (ja) | 2015-06-18 |
JP5677987B2 (ja) | 2015-02-25 |
SG182619A1 (en) | 2012-08-30 |
KR20120139711A (ko) | 2012-12-27 |
JPWO2011093357A1 (ja) | 2013-06-06 |
US20120328728A1 (en) | 2012-12-27 |
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