WO2010092845A1 - Structure de passages de micro-écoulement et micropompe - Google Patents

Structure de passages de micro-écoulement et micropompe Download PDF

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Publication number
WO2010092845A1
WO2010092845A1 PCT/JP2010/050216 JP2010050216W WO2010092845A1 WO 2010092845 A1 WO2010092845 A1 WO 2010092845A1 JP 2010050216 W JP2010050216 W JP 2010050216W WO 2010092845 A1 WO2010092845 A1 WO 2010092845A1
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WO
WIPO (PCT)
Prior art keywords
solid
liquid
main member
interface energy
upper lid
Prior art date
Application number
PCT/JP2010/050216
Other languages
English (en)
Japanese (ja)
Inventor
豪 柳原
孝裕 毛利
達夫 高部
良治 立川
康博 山東
楠 東野
Original Assignee
コニカミノルタホールディングス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コニカミノルタホールディングス株式会社 filed Critical コニカミノルタホールディングス株式会社
Publication of WO2010092845A1 publication Critical patent/WO2010092845A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0605—Metering of fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0684—Venting, avoiding backpressure, avoid gas bubbles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/16—Surface properties and coatings
    • B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0481—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure squeezing of channels or chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0688—Valves, specific forms thereof surface tension valves, capillary stop, capillary break

Definitions

  • the present invention relates to a microchannel structure and a micropump, in particular, a microchannel structure having a microchannel for sending a minute amount of liquid, and a micropump for feeding a minute amount of liquid with high accuracy.
  • a microchannel structure having a microchannel for sending a minute amount of liquid, and a micropump for feeding a minute amount of liquid with high accuracy.
  • microchips umps, valves, flow paths, sensors, etc. have been miniaturized and integrated on one chip by making full use of micromachine technology and ultra-fine processing technology in fields such as biotests, chemical analysis, and drug discovery (A typical example is ⁇ -TAS) (see Patent Document 1).
  • the applicant then injects a specimen such as blood into a microchip enclosing a reagent, etc., and feeds the driving liquid (usually water) into the microchannel by a micropump to move the specimen etc. through the microchannel.
  • a reaction detector capable of measuring the result by reacting during movement (see Patent Document 2).
  • microchips are diagnosed by mixing, reacting, and detecting a predetermined amount of specimen and reagent at a predetermined ratio required for the reaction, and a minute amount of liquid can be quantitatively analyzed with high accuracy.
  • a micropump that can deliver liquids.
  • a general micropump is configured by superposing an upper lid material on a main member having a fine channel formed on the surface, and by driving (vibrating) a diaphragm with a piezoelectric element, liquid is sucked from an inlet, It discharges from the outlet via a fine channel.
  • a resin substrate can be used as the main member, a silicon substrate capable of easily forming a fine flow path by a photolithography method is usually used, and a glass substrate is used as the upper lid member.
  • Patent Document 3 proposes discharging bubbles by hydrophilizing (grafting) the surface of the channel.
  • Patent Document 4 proposes preventing bubbles from staying by making the flow path ascending and making the inner surface hydrophilic.
  • Patent Document 5 proposes discharging bubbles in a hybrid configuration including a main pump and a sub pump (pressurizing mechanism, heating unit) that applies pressure to the main pump.
  • Patent Document 6 proposes that the liquid head is depressurized from the upstream side during liquid filling to suppress the retention of bubbles.
  • an object of the present invention is to provide a microchannel structure and a micropump that can prevent the generation of bubbles during liquid filling or the retention of bubbles in a microchannel with a simple configuration and can stably supply liquid. There is to do.
  • the microchannel structure according to the first aspect of the present invention includes: In a microchannel structure comprising a main member having a fine channel formed on the surface and an upper lid material covering the surface of the main member,
  • the fine channel has a portion for imparting resistance to the flow of liquid,
  • the solid-liquid interface energy of the surface of the fine channel is smaller than the solid-liquid interface energy of the surface facing the fine channel of the upper lid member, or the solid-gas interface energy of the surface of the fine channel is smaller than that of the upper lid member. Is larger than the solid-gas interface energy of the surface facing the flow path, It is characterized by.
  • Bubbles are generated and stay mainly in the part where resistance to flow occurs.
  • the liquid easily flows, and when the solid-gas interface energy is relatively large, the liquid easily flows. Therefore, even if it is a part that gives resistance to the flow of liquid provided in the fine flow path, the liquid flow is easier on the surface where the fine flow path is formed than the upper lid material, so that the generation of bubbles is suppressed, and bubbles are temporarily generated. However, it flows downstream and is discharged.
  • the micropump according to the second aspect of the present invention is A main member having a fine channel formed on the surface and an upper cover material covering the surface of the main member, and is driven by a piezoelectric element between the pair of throttle channels and the throttle channel in the fine channel.
  • the solid-liquid interface energy of the surface of the fine channel is smaller than the solid-liquid interface energy of the surface facing the fine channel of the upper lid member, or the solid-gas interface energy of the surface of the fine channel is smaller than that of the upper lid member. Is larger than the solid-gas interface energy of the surface facing the flow path, It is characterized by.
  • the throttle channel provided in the fine channel provides resistance to the flow of the liquid, but since the fine channel forming surface is more liable to flow the liquid than the upper lid material, the generation of bubbles is suppressed, Even if bubbles are generated, they flow downstream and are discharged.
  • FIG. 2 shows an initial stage of filling the driving liquid in one embodiment of the micropump according to the present invention
  • (A) is a plan view of a fine flow path
  • (B) is a cross-sectional view.
  • the stage which filled the drive liquid in one Example of the micropump which concerns on this invention is shown,
  • (A) is a top view of a microchannel,
  • (B) is sectional drawing.
  • FIG. 1 In the conventional example of the micropump, an initial stage of filling the driving liquid is shown, (A) is a plan view of the fine flow path, and (B) is a sectional view.
  • the stage which filled the drive liquid in the prior art example of a micropump is shown, (A) is a top view of a microchannel, (B) is sectional drawing. It is explanatory drawing which shows the relationship between surface energy and a contact angle.
  • the micro pump is configured by joining the upper lid member 11 and the main member 20.
  • a chamber 21 and throttle channels 22 and 23 are formed in the main member 20 by etching.
  • the throttle channel 22 has a shorter channel length than the throttle channel 23.
  • a piezoelectric element 30 as an actuator is attached to the back surface of the chamber 21, and a thin film portion constituting the chamber 21 functions as a diaphragm.
  • the thickness of the main member 20 is 200 ⁇ m
  • the thickness of the thin film diaphragm constituting the chamber 21 is 30 ⁇ m
  • the gap between the throttle channels 22 and 23 is 25 ⁇ m.
  • the chamber 21, the throttle channels 22, 23 and the channels 24, 25 shown in FIGS. 3 to 6 are collectively referred to as a fine channel.
  • this micropump has throttle channels 22 and 23 whose channel resistances change in accordance with the differential pressure at both ends of the chamber 21, respectively, and the rate of change in channel resistance of the throttle channel 22 Is repeatedly pressurized and depressurized in a first pattern that is larger than the rate of change in the channel resistance of the throttle channel 23 and shorter than the time for depressurizing the liquid in the chamber 21 by the piezoelectric element 30.
  • the liquid is fed from the throttle channel 22 toward the throttle channel 23 (forward feeding, see FIG. 1).
  • the piezoelectric element 30 in a second pattern longer than the time for depressurizing, the liquid is directed from the throttle channel 23 toward the throttle channel 22.
  • Liquid feeding reverse liquid feeding, see FIG. 2.
  • FIG. 1 shows a forward liquid feeding state (first pattern), and the voltage in the waveform shown in FIG. 1A is applied to the piezoelectric element 30 to quickly pressurize the liquid in the chamber 21. Then, a turbulent flow is generated in the throttle channel 22 to increase the channel resistance, and the liquid is discharged from the chamber 21 through the throttle channel 23. Then, the liquid in the chamber 21 is slowly decompressed, whereby the liquid is introduced into the chamber 21 through the throttle channel 22 having a small channel resistance.
  • FIG. 2 shows a liquid feeding state in the reverse direction (second pattern).
  • the liquid is discharged from the chamber 21 through the narrowed flow path 22. Then, by rapidly depressurizing the liquid in the chamber 21, a turbulent flow is generated in the throttle channel 22 and the channel resistance is increased, and the liquid is introduced into the chamber 21 through the throttle channel 23.
  • the upper lid member 11 is made of a glass substrate, and the main member 20 is made of a silicon substrate.
  • gamma] s of the glass 73mNm -1, ⁇ sL is 4.4mNm -1, ⁇ s of silicon 24mNm -1, ⁇ sL the 24MNm -1 It is. That is, the upper lid material 11 is more hydrophilic than the main member 20. In other words, the main member 20 has higher water repellency than the upper lid member 11.
  • the surface energy ratio of water is 73 mNm ⁇ 1 and the surface energy ⁇ s of silicon is 24 mNm ⁇ 1 , so the solid-liquid interface energy ⁇ sL is 24 mNm. -1 .
  • the surface energy ratio of the glass substrate is such that the surface energy ⁇ L of water is 73 mNm ⁇ 1 and the surface energy ⁇ s of glass is 73 mNm ⁇ 1. Is 4.4 mNm ⁇ 1 .
  • the upper cover material 11 has higher hydrophilicity than the main member 20.
  • the driving liquid introduced into the flow path 24 from the inlet portion 12 of the upper lid member 11 (water, a portion indicated by cross-hatching) is along the lower surface of the upper lid member 11 having a small solid-liquid interface energy ⁇ sL.
  • the progress along the main member 20 (flow path forming surface) having a large solid-liquid interface energy ⁇ sL is slow.
  • the driving liquid is introduced by sucking the air in the fine channel formed in the main member 20 from the outlet portion 13 of the upper lid member 11.
  • the wall portion 22a of the throttle channel 22 exists as a portion that imparts resistance to the flow of the driving liquid, and the driving liquid runs ahead along the back surface of the upper lid member 11 and flows on the upstream side of the wall section 22a. Since the disturbance is generated, the bubble X is generated as shown in FIG. This bubble X stays in a state where it adheres to the wall portion 22a after the driving fluid is filled in the fine channel. If the bubbles X stay in the fine flow path, then when the piezoelectric element 30 is driven and fed, the stable feeding of the driving liquid is impaired.
  • the upper lid 11 is made of polytetrafluoroethylene (generally called Teflon (registered trademark)).
  • Teflon registered trademark
  • a silicon substrate is used as the main member 20.
  • the main member 20 is formed with a chamber 21, throttle channels 22, 23 and channels 24, 25 as fine channels.
  • the upper lid member 11 is formed with an inlet portion 12 for introducing the driving liquid and an outlet portion 13 for discharging the driving liquid.
  • the solid-gas interface energy ⁇ s of the upper lid member 11 is 18.5 mNm ⁇ 1
  • the solid-liquid interface energy ⁇ sL is 43.5 mNm ⁇ 1
  • the solid-gas interface energy ⁇ s of the main member 20 is 24 mNm ⁇ 1
  • the solid-liquid interface energy ⁇ sL is 24 mNm ⁇ 1 . Therefore, the main member 20 is more easily wetted by the liquid than the upper lid member 11, and as shown in FIG. 3, the driving liquid (water, cross-hatched) introduced into the flow path 24 from the inlet portion 12 of the upper lid member 11. ) Proceeds along the flow path 24 having a small solid-liquid interface energy ⁇ sL, and the progress along the lower surface of the upper lid member 11 having a large solid-liquid interface energy ⁇ sL is slow.
  • the wall portion 22a of the throttle channel 22 exists as a portion that imparts resistance to the flow of the driving liquid.
  • the driving liquid runs ahead and wets the wall section 22a, thereby suppressing the generation of bubbles.
  • the driving liquid runs ahead and wets the wall section 22a, thereby suppressing the generation of bubbles.
  • the driving liquid is filled in the entire fine channel without bubbles remaining in the fine channel.
  • the back surface of the upper lid member 11 is flat and has a small force to prevent the movement of the bubbles. 13 is discharged. Since there is no retention of bubbles in the fine channel, the liquid feeding performance is not adversely affected when the piezoelectric element 30 is driven and fed thereafter, and the quantitative performance and reliability are excellent.
  • FIGS. 3 and 4 show a micropump as an embodiment of the present invention
  • the present invention is not limited to a micropump, and the present invention is not limited to a micropump having a microchannel having a portion for imparting resistance to a liquid flow.
  • the present invention can be widely applied to flow channel structures (for example, microchips used for biotests).
  • the solid-liquid interface energy of the surface of the fine channel is smaller than the solid-liquid interface energy of the surface facing the fine channel of the upper lid member, or the solid-gas interface energy of the surface of the fine channel is smaller than the fine flow of the upper lid member. It is only necessary to satisfy either of the solid-gas interface energy of the surface facing the road.
  • the main member is a material (for example, glass) whose solid-gas interface energy is larger than the solid-liquid interface energy. Since the wettability of the main member is good, the liquid is filled in a state where it crawls the flow path surface, and bubbles are not easily generated.
  • glass it is preferable to use polytetrafluoroethylene as the upper lid material.
  • the upper cover material itself may be made of a material having higher water repellency than the main member material itself, or the main member material itself may be made of a material that is more hydrophilic than the upper cover material itself. Good.
  • the water repellency means that the angle ⁇ (see FIG. 7) of the gas-liquid interface energy ⁇ L is 90 ° or more, and the hydrophilic property means that the angle ⁇ of the gas-liquid interface energy ⁇ L is 90 ° or less.
  • a conventionally known water repellent treatment may be applied to at least the surface of the upper cover material facing the fine flow path, or the main member
  • Conventionally known hydrophilic treatment may be applied to at least the fine channel surface.
  • microchannel structure and the micropump according to the present invention are not limited to the above-described embodiments, and can be variously modified within the scope of the gist thereof.
  • the present invention is useful for a microchannel structure and a micropump, and is particularly excellent in that it can prevent generation of bubbles or retention of bubbles in a microchannel with a simple configuration.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)

Abstract

L'invention concerne une structure de passages de micro-écoulement et une micropompe permettant de charger de manière stable un liquide et qui prévient la formation de bulles d'air pendant le chargement du liquide, ou empêche que les bulles d'air restent dans un passage de micro-écoulement grâce à une conception simple. Cette micropompe comprend un élément principal (20) prévu dans la surface avant constituant le passage de micro-écoulement (une chambre (21), des passages (22) à écoulement restreint (23), des passages (24, 25) d'écoulement); et un couvercle supérieur (11) pour couvrir la surface avant de l'élément principal (20). La partie inférieure de la chambre (21) est commandée par un élément piézoélectrique (30) afin de charger le liquide dans les sens avant et arrière. Le liquide de commande est chargé dans le passage de micro-écoulement par l'aspiration de l'air présent dans ledit passage par un orifice de sortie (13), et par l'introduction d'air dans le passage par un orifice d'entrée (12). L'énergie de surface solide-liquide de l'élément principal (20) est inférieure à celle du couvercle supérieur (11). L'énergie de surface solide-air de l'élément principal (20) est supérieure à celle du couvercle supérieur (11).
PCT/JP2010/050216 2009-02-13 2010-01-12 Structure de passages de micro-écoulement et micropompe WO2010092845A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-031757 2009-02-13
JP2009031757 2009-02-13

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014059061A (ja) * 2009-01-30 2014-04-03 Univ Leiden 液体操作のための相ガイドパターン
JP2015508705A (ja) * 2012-02-09 2015-03-23 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア 誘発されたキャビテーションによって駆動される高速オンデマンド型液滴生成および単一細胞封入
GB2555892A (en) * 2016-07-12 2018-05-16 Emulate Inc Removing bubbles in a microfluidic device
US10071359B2 (en) 2013-03-15 2018-09-11 The Regents Of The University Of California High-speed on demand microfluidic droplet generation and manipulation
US10226768B2 (en) 2009-08-08 2019-03-12 The Regents Of The University Of California Pulsed laser triggered high speed microfluidic switch and applications in fluorescent activated cell sorting

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JPH0476279A (ja) * 1990-07-18 1992-03-11 Seiko Epson Corp マイクロポンプの製造方法
JPH06264870A (ja) * 1993-03-15 1994-09-20 Toshiba Corp マイクロポンプ
JP2003094395A (ja) * 2001-09-26 2003-04-03 Olympus Optical Co Ltd アレイ化マイクロ流体素子
JP2006055837A (ja) * 2004-06-30 2006-03-02 Lifescan Scotland Ltd 流れ調整装置
JP2006349558A (ja) * 2005-06-17 2006-12-28 Toppan Printing Co Ltd 容器
JP2007224844A (ja) * 2006-02-24 2007-09-06 Konica Minolta Medical & Graphic Inc マイクロポンプによる送液方法および送液システム

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0476279A (ja) * 1990-07-18 1992-03-11 Seiko Epson Corp マイクロポンプの製造方法
JPH06264870A (ja) * 1993-03-15 1994-09-20 Toshiba Corp マイクロポンプ
JP2003094395A (ja) * 2001-09-26 2003-04-03 Olympus Optical Co Ltd アレイ化マイクロ流体素子
JP2006055837A (ja) * 2004-06-30 2006-03-02 Lifescan Scotland Ltd 流れ調整装置
JP2006349558A (ja) * 2005-06-17 2006-12-28 Toppan Printing Co Ltd 容器
JP2007224844A (ja) * 2006-02-24 2007-09-06 Konica Minolta Medical & Graphic Inc マイクロポンプによる送液方法および送液システム

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014059061A (ja) * 2009-01-30 2014-04-03 Univ Leiden 液体操作のための相ガイドパターン
US10226768B2 (en) 2009-08-08 2019-03-12 The Regents Of The University Of California Pulsed laser triggered high speed microfluidic switch and applications in fluorescent activated cell sorting
US10232368B2 (en) 2011-02-11 2019-03-19 The Regents Of The University Of California High-speed on demand droplet generation and single cell encapsulation driven by induced cavitation
JP2015508705A (ja) * 2012-02-09 2015-03-23 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア 誘発されたキャビテーションによって駆動される高速オンデマンド型液滴生成および単一細胞封入
US10780413B2 (en) 2013-03-15 2020-09-22 The Regents Of The University Of California High-speed on demand microfluidic droplet generation and manipulation
US10071359B2 (en) 2013-03-15 2018-09-11 The Regents Of The University Of California High-speed on demand microfluidic droplet generation and manipulation
US10335788B2 (en) 2016-07-12 2019-07-02 EMULATE, Inc. Removing bubbles in a microfluidic device
US10661275B2 (en) 2016-07-12 2020-05-26 EMULATE, Inc. Removing bubbles in a microfluidic device
GB2555892A (en) * 2016-07-12 2018-05-16 Emulate Inc Removing bubbles in a microfluidic device
US10913063B2 (en) 2016-07-12 2021-02-09 EMULATE, Inc. Removing bubbles in a microfluidic device
GB2555892B (en) * 2016-07-12 2021-03-31 Emulate Inc Removing bubbles in a microfluidic device
US10974242B2 (en) 2016-07-12 2021-04-13 EMULATE, Inc. Removing bubbles in a microfluidic device
US11065620B2 (en) 2016-07-12 2021-07-20 EMULATE, Inc. Removing bubbles in a microfluidic device
US11141727B2 (en) 2016-07-12 2021-10-12 EMULATE, Inc. Removing bubbles in a microfluidic device

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