WO2010047129A1 - 冷却装置を有するリニアモータコイル組立体 - Google Patents
冷却装置を有するリニアモータコイル組立体 Download PDFInfo
- Publication number
- WO2010047129A1 WO2010047129A1 PCT/JP2009/005604 JP2009005604W WO2010047129A1 WO 2010047129 A1 WO2010047129 A1 WO 2010047129A1 JP 2009005604 W JP2009005604 W JP 2009005604W WO 2010047129 A1 WO2010047129 A1 WO 2010047129A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- base plate
- linear motor
- coil assembly
- cooling pipe
- motor coil
- Prior art date
Links
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
- H02K5/203—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium specially adapted for liquids, e.g. cooling jackets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/22—Auxiliary parts of casings not covered by groups H02K5/06-H02K5/20, e.g. shaped to form connection boxes or terminal boxes
- H02K5/225—Terminal boxes or connection arrangements
Definitions
- the present invention relates to a linear motor that generates linear movement.
- the present invention relates to a linear motor coil assembly including armature coils arranged in a linear movement direction and a device for cooling the armature coils.
- linear motors that position a precision table with high accuracy are known.
- the linear motor requires a large thrust and is often sealed by a cover that prevents dust from entering. For this reason, it is important to cool the linear motor efficiently.
- Patent Document 1 discloses a linear motor including two rows of coils and four flat cooling pipes. These flat cooling tubes are in contact with two of the four surfaces of each coil.
- Patent Document 2 discloses a linear motor provided with one flat cooling pipe extending around two rows of coils. The flat cooling tube is in contact with two of the four surfaces of each coil.
- Patent Document 3 discloses a linear motor coil assembly including a flat cooling pipe meandering in a row of coils.
- the iron core on which the coil is formed is fixed to the base plate.
- the width of the flat cooling pipe is equal to or greater than the axial length of the coil. Most of the surface of each coil is in contact with the flat cooling tube.
- an object of the present invention is to provide a linear motor that effectively reduces adverse effects of heat on the positioning accuracy of a precision table with a simple configuration.
- the present invention relates to a base plate (1), a row of iron cores (42) fixed in the longitudinal direction on the upper surface of the base plate, a plurality of coils (44) respectively provided on the iron core (42), and a plurality of coils (44 And a first cooling pipe (50) through which a first refrigerant is passed and a lower surface of a base plate can be attached to a table.
- the base plate (1) has a groove (8) extending linearly in the longitudinal direction on the lower surface of the base plate, and the linear motor coil assembly is provided in the groove (8) and a second cooling pipe through which a second refrigerant passes. (92, 94).
- the first cooling pipe (50) includes a flat cooling pipe meandering through the plurality of coils (44), and the second cooling pipe (92, 94) includes a straight flat cooling pipe.
- the linear motor coil assembly according to 1.
- the heat generated from the coil is removed from the coil assembly by the first refrigerant. Further, the heat remaining in the coil is transferred to the second cooling pipe via the iron core and the base plate, and the second refrigerant in the second cooling pipe removes the heat from the base plate. Further, the temperature of the precision table is kept constant without applying any processing to the precision table.
- the coil assembly includes a base plate 1 and a plurality of iron cores 42.
- a linear motor that generates movement in the X-axis direction includes a mover and a stator, and the coil assembly constitutes one of the mover and the stator.
- the iron core 42 is formed of laminated silicon steel plates and is divided for each magnetic pole. A plurality of coils 44 are formed on each iron core 42. As well shown in FIG. 1, the iron cores 42 are attached to the upper surface of the base plate 1 in a row in the X-axis direction by screws 48. A hole 46 for a screw 48 is formed in the base plate 1. A hole 43 for the screw 48 is formed in the iron core 42.
- the flat cooling pipe 50 is arranged to meander through the coil 44.
- the flat cooling pipe 50 is made by extrusion molding of aluminum.
- the height of the flat cooling pipe 50 is equal to or slightly larger than the height of the coil 44.
- the flat cooling pipe 50 contacts most of the outer surface of the coil 44 that is a heat source. A large number of through holes through which the refrigerant flows are formed in the flat cooling pipe 50. Since the flat cooling pipe 50 does not have a branch, no stagnation occurs in the flow of the refrigerant. The heat generated in the coil 44 is immediately cooled by the refrigerant in the flat cooling pipe 50.
- a pair of manifolds 56 and 58 are fixed side by side at one end of the base plate 1.
- One end of the flat cooling pipe 50 is connected to the manifold 56 and the other end is connected to 58 by welding.
- the refrigerant is introduced into the manifold 56 from a supply source.
- the refrigerant passing through the meandering flat cooling pipe 50 passes through a number of coils from one end of the base plate 1 to the other end, that is, from left to right in the drawing. Finally, the refrigerant is fed linearly from the other end of the base plate 1 to the manifold 58 and immediately discharged out of the coil assembly.
- FIGS. A commutation sensor 5 is provided in the coil assembly between the manifolds 56 and 58.
- Reference numerals 4, 5 and 6 in the figure indicate a coil harness, a commutation sensor harness, and a temperature sensor harness, respectively.
- the lower surface of the base plate 1 can be joined to a precision table in a machine tool or a semiconductor manufacturing apparatus.
- a number of screw holes 82 for attaching the base plate 1 to the precision table are formed along the opposite side surfaces of the base plate 1.
- a straight groove 8 is formed on the lower surface of the base plate 1 over its entire length.
- a silicon thin film having good thermal conductivity is formed in the groove 8.
- the additional cooling device has a pair of flat cooling tubes 92, 94 provided in the groove 8.
- the additional cooling device further includes a pair of manifolds 96,98.
- the flat cooling pipes 92 and 94 extend in parallel between the pair of manifolds 96 and 98.
- the flat cooling tubes 92 and 94 are made of an aluminum alloy. Both ends of the flat cooling pipes 92 and 94 are fixed to the manifolds 96 and 98 by aluminum brazing.
- the flat cooling pipes 92 and 94 have a thickness of about 3 mm.
- the flat cooling pipes 92 and 94 extend linearly in the groove 8, the difference in refrigerant temperature is minimized in the flat cooling pipes 92 and 94.
- the flat cooling pipes 92 and 94 are designed to fit into the groove 8. Instead of the pair of flat cooling pipes 92 and 94, one or three or more flat cooling pipes may be fitted in the groove 8. However, from the viewpoint of the strength and manufacturing efficiency of the aluminum flat cooling pipe, a pair of flat cooling pipes 92 and 94 were selected in this embodiment.
- FIGS. A coil assembly provided with an additional cooling device is shown in FIGS.
- a manifold 96 for introducing the refrigerant is attached to one end of the base plate 1 by a fixture 30.
- a manifold 98 for discharging the refrigerant is attached to the other end of the base plate 1 by a fixture 30.
- the fixture 30 has a U-shape, and includes flange portions 34 and 36 parallel to the body portion 32.
- the barrel 32 has approximately the same length as the manifolds 92,96.
- the fixtures 30 are attached to both ends of the base plate 1 by their body portions 32.
- Manifolds 92 and 96 are then attached to fixture 30 by hooks 34 and 36.
- a first refrigerant is introduced into the manifold 56 from a supply source.
- a second refrigerant is introduced into manifold 96 from the same or another source.
- the heat generated from the coil 44 is removed from the coil assembly by the first refrigerant.
- the heat remaining in the coil 44 is transferred to the flat cooling tubes 92 and 94 via the iron core 42, the base plate 1 and the silicon thin film.
- the second refrigerant in the flat cooling tubes 92 and 94 removes heat from the base plate 1 and maintains the temperature of the precision table constant.
- the refrigerant is immediately discharged from the manifold 98 out of the coil assembly.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
- Motor Or Generator Cooling System (AREA)
Abstract
Description
ベースプレート(1)はベースプレートの下面に長手方向に直線的に延びる溝(8)を有し、リニアモータコイル組立体は溝(8)の中に設けられ第2の冷媒を通す第2の冷却管(92、94)をさらに含む。
4 コイル用のハーネス
5 転流センサ用ハーネス
6 温度センサ用ハーネス
8 溝
30 取付具
32 胴部
34、36 鉤部
42 鉄心
43 孔
44 コイル
46 孔
48 ねじ
50 扁平冷却管
52 転流センサ
56、58 マニホルド
82 ねじ穴
92、94 扁平冷却管
96、98 マニホルド
Claims (2)
- 上面と下面を有するベースプレートと、前記ベースプレートの上下面のうち一方の面に長手方向に固定された一列の鉄心と、前記鉄心にそれぞれ設けられた複数のコイルと、前記複数のコイルに接触し第1の冷媒を通す第1の冷却管とを含む、前記ベースプレートの上下面のうち他方の面をテーブルに取付け可能なリニアモータコイル組立体において、
前記ベースプレートは前記ベースプレートの他方の面に長手方向に直線的に延びる溝を有し、リニアモータコイル組立体は溝の中に設けられ第2の冷媒を通す第2の冷却管をさらに含むことを特徴とするリニアモータコイル組立体。 - 前記第1の冷却管は前記複数のコイルの中を蛇行する扁平冷却管を含み、前記第2の冷却管は直線的な扁平冷却管を含む請求項1に記載のリニアモータコイル組立体。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09821829.0A EP2352221B1 (en) | 2008-10-23 | 2009-10-23 | Linear motor coil assembly comprising cooling device |
US13/124,358 US8664808B2 (en) | 2008-10-23 | 2009-10-23 | Linear motor coil assembly with cooling device |
JP2010534722A JPWO2010047129A1 (ja) | 2008-10-23 | 2009-10-23 | 冷却装置を有するリニアモータコイル組立体 |
CN200980141274XA CN102187555A (zh) | 2008-10-23 | 2009-10-23 | 具有冷却装置的直线电机线圈组装体 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008-273258 | 2008-10-23 | ||
JP2008273258 | 2008-10-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010047129A1 true WO2010047129A1 (ja) | 2010-04-29 |
Family
ID=42119180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/005604 WO2010047129A1 (ja) | 2008-10-23 | 2009-10-23 | 冷却装置を有するリニアモータコイル組立体 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8664808B2 (ja) |
EP (1) | EP2352221B1 (ja) |
JP (1) | JPWO2010047129A1 (ja) |
CN (1) | CN102187555A (ja) |
WO (1) | WO2010047129A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013105214A1 (ja) * | 2012-01-10 | 2013-07-18 | 富士機械製造株式会社 | リニアモータ |
CN107910977A (zh) * | 2017-11-09 | 2018-04-13 | 广州市昊志机电股份有限公司 | 一种带隔离冷却结构的直线电机初级部件 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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EP2393188A4 (en) * | 2009-03-05 | 2017-05-03 | Sanyo Denki Co., Ltd. | Armature for linear motor |
US20130069449A1 (en) * | 2011-09-15 | 2013-03-21 | Nikon Corporation | Modular coil arrays for planar and linear motors |
JP6360288B2 (ja) * | 2013-09-04 | 2018-07-18 | Ckd株式会社 | 電磁コイルの冷却構造、及び電磁アクチュエータ |
CN105743267A (zh) * | 2014-12-10 | 2016-07-06 | 鸿富锦精密工业(深圳)有限公司 | 线性马达 |
EP3322075B1 (en) * | 2016-11-11 | 2021-08-11 | Agie Charmilles SA | Linear shaft motor |
CN106487199A (zh) * | 2016-12-23 | 2017-03-08 | 广州市昊志机电股份有限公司 | 直线电机动子 |
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JP2000228860A (ja) | 1999-02-08 | 2000-08-15 | Yaskawa Electric Corp | リニアモータの冷却装置 |
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- 2009-10-23 EP EP09821829.0A patent/EP2352221B1/en active Active
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- 2009-10-23 JP JP2010534722A patent/JPWO2010047129A1/ja active Pending
- 2009-10-23 WO PCT/JP2009/005604 patent/WO2010047129A1/ja active Application Filing
- 2009-10-23 US US13/124,358 patent/US8664808B2/en active Active
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2013105214A1 (ja) * | 2012-01-10 | 2013-07-18 | 富士機械製造株式会社 | リニアモータ |
JPWO2013105214A1 (ja) * | 2012-01-10 | 2015-05-11 | 富士機械製造株式会社 | リニアモータ |
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CN107910977A (zh) * | 2017-11-09 | 2018-04-13 | 广州市昊志机电股份有限公司 | 一种带隔离冷却结构的直线电机初级部件 |
CN107910977B (zh) * | 2017-11-09 | 2024-02-27 | 广州市昊志机电股份有限公司 | 一种带隔离冷却结构的直线电机初级部件 |
Also Published As
Publication number | Publication date |
---|---|
EP2352221B1 (en) | 2018-05-23 |
US8664808B2 (en) | 2014-03-04 |
EP2352221A4 (en) | 2016-03-02 |
US20110198946A1 (en) | 2011-08-18 |
EP2352221A1 (en) | 2011-08-03 |
JPWO2010047129A1 (ja) | 2012-03-22 |
CN102187555A (zh) | 2011-09-14 |
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