WO2009119470A1 - Détecteur de vitesse angulaire - Google Patents

Détecteur de vitesse angulaire Download PDF

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Publication number
WO2009119470A1
WO2009119470A1 PCT/JP2009/055581 JP2009055581W WO2009119470A1 WO 2009119470 A1 WO2009119470 A1 WO 2009119470A1 JP 2009055581 W JP2009055581 W JP 2009055581W WO 2009119470 A1 WO2009119470 A1 WO 2009119470A1
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WO
WIPO (PCT)
Prior art keywords
axis direction
angular velocity
mass
velocity sensor
support beam
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Application number
PCT/JP2009/055581
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English (en)
Japanese (ja)
Inventor
康男 早川
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アルプス電気株式会社
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Filing date
Publication date
Application filed by アルプス電気株式会社 filed Critical アルプス電気株式会社
Publication of WO2009119470A1 publication Critical patent/WO2009119470A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Definitions

  • the present invention relates to an angular velocity sensor formed by using a MEMS (Micro Electro Mechanical System) technology.
  • MEMS Micro Electro Mechanical System
  • the angular velocity sensor disclosed in the following Patent Document 1 includes a plurality of mass parts (Mass), and has a structure in which mass parts located at the center and mass parts located on both sides thereof are excited in opposite directions.
  • the center mass is displaced by Coriolis force.
  • a movable-side vibrating electrode constituting the detection electrode and the vibration generating unit is integrally formed in the central mass unit.
  • the mass part is also integrally formed with a movable vibration electrode that constitutes a vibration generating part together with the detection electrode.
  • the angular velocity sensor disclosed in Patent Document 3 has a structure in which a circular mass portion is excited by a comb-like electrode, and a second mass portion provided in the notch portion is displaced by receiving Coriolis force.
  • the circular mass is supported on the substrate at the center.
  • the angular velocity sensor disclosed in Patent Document 4 includes mass parts on the inner side and the outer side, respectively.
  • the outer mass part is vibrated, the Coriolis force is transmitted from the outer mass part to the inner mass part, and the displacement amount received by the Coriolis force at the inner mass part is measured.
  • both the detection electrode and the movable vibration electrode are integrally formed in the mass portion.
  • the drive signal supplied to the movable-side vibration electrode is likely to leak to the detection side via a parasitic capacitance such as a substrate, and vibration (leakage vibration) in the detection direction occurs in the mass part even when the angular velocity ⁇ is not acting. It was easy to occur.
  • a leakage vibration suppression electrode quadrature cancellation (balancing) electrode
  • the movable-side vibration electrode is not directly provided in the mass portion including the detection electrode, and the movable-side vibration electrode is integrated with another mass portion connected to the mass portion including the detection electrode.
  • the structure is complicated and the leakage of the drive signal supplied to the vibration generator to the detection side cannot be made sufficiently small.
  • the configuration that gives rotational vibration as in the angular velocity sensor of Patent Document 3 is more difficult and less feasible than linear vibration, and the vibration direction of the mass portion and the design vibration direction when rotating and vibrating. It is considered that a gap is likely to occur between them, and there is a fear that vibration in an unnecessary direction increases.
  • an object of the present invention is to provide an angular velocity sensor capable of suppressing leakage vibration and appropriately improving angular velocity detection accuracy.
  • the angular velocity sensor according to the present invention is disposed so as to face the Y-axis direction with the X-axis direction as the longitudinal direction when the two directions orthogonal to the support substrate and the plane of the support substrate are the X-axis direction and the Y-axis direction.
  • a detection unit for detecting the amount When an angular velocity is generated around the Z-axis orthogonal to the X-axis direction and the Y-axis direction in a state where the pair of mass parts are excited in the X-axis direction in the opposite phase by the excitation unit, When the Coriolis force is generated and the pair of mass portions vibrate in the opposite phase in the Y-axis direction, the pair of support beams vibrate in the Y-axis direction with the anchor portion as a fulcrum. It is.
  • the support beam and the mass portion are connected via the spring portion, and a detection unit for detecting the displacement amount of the support beam is provided.
  • the mass portion excited in the opposite phase in the X-axis direction receives Coriolis force in the Y-axis direction and vibrates. To do.
  • the pair of mass portions vibrate in the opposite phase in the Y-axis direction, and the support beam connected via the mass portion and the spring portion vibrates in the Y-axis direction with the anchor portion serving as a fulcrum.
  • the configuration of the present invention it is possible to appropriately suppress the occurrence of leakage vibration and improve the detection accuracy of angular velocity with a simple structure.
  • the excitation unit is a comb-like fixed-side excitation electrode fixedly supported on the support substrate, and a comb-like movable unit positioned above the support substrate and provided integrally with the mass unit.
  • a side excitation electrode is provided, and the movable side excitation electrode vibrates in the X-axis direction by a Coulomb force generated between the fixed side excitation electrode and the movable side excitation electrode.
  • the detection unit includes a comb-like fixed-side detection electrode fixedly supported on the support substrate, and a comb-teeth-shaped detection electrode positioned above the support substrate and provided integrally with the support beam.
  • a movable detection electrode is provided, and a displacement amount of the support beam when the support beam is subjected to seesaw vibration is detected based on a change in capacitance between the movable detection electrode and the fixed detection electrode. Accordingly, the displacement amount of the support beam can be detected with a simple configuration, and the angular velocity detection accuracy can be improved.
  • the detection unit is provided on both sides of the anchor portion of each support beam in the X-axis direction. As a result, a differential output can be obtained with a simple configuration, and the angular velocity can be detected with high accuracy.
  • the detection unit is located outside the connection point of the support beam with the mass unit in the X-axis direction.
  • the entire detection unit is located outside the connection point in the X-axis direction. Therefore, the displacement amount of a support beam can be enlarged and the detection accuracy of angular velocity can be improved more effectively.
  • the spring portion has a function of absorbing vibration of the mass portion in the X-axis direction and transmitting vibration of the mass portion in the Y-axis direction to the support beam.
  • the mass portion and the support beam are provided with arm portions extending in directions approaching each other
  • the spring portion includes a first spring portion extending in the Y-axis direction, and a second spring portion and a third spring portion extending in opposite directions of the X-axis direction at both ends of the first spring portion, and the second spring.
  • One of the first portion and the third spring portion is connected to the arm portion of the mass portion and the other is connected to the arm portion of the support beam, and the length dimension of the first spring portion is the second spring portion and the third spring portion. It is preferable that the length is longer than the length of the spring portion.
  • the vibration is absorbed by the spring part to suppress the vibration of the support beam, while the pair of mass parts receive the Coriolis force and receive the Y-axis.
  • the vibration can be appropriately transmitted to the support beam via the spring portion, and the support beam can be effectively vibrated to seesaw. Therefore, the detection accuracy of angular velocity can be improved more effectively.
  • the occurrence of leakage vibration can be appropriately suppressed, and the detection accuracy of angular velocity can be improved with a simple structure.
  • FIG. 1 is a plan view of an angular velocity sensor according to the first embodiment of the present invention
  • FIG. 2 is a plan view of the angular velocity sensor according to the second embodiment of the present invention
  • FIGS. 3 and 4 are diagrams of the angular velocity sensor according to the present embodiment.
  • FIG. 5 is a conceptual diagram of the operation
  • FIG. 5 is a cross-sectional view of the angular velocity sensor shown in FIG. 1 cut along the line AA in the height direction and viewed from the arrow direction
  • FIG. 6 shows the angular velocity sensor shown in FIG. A sectional view taken along the line BB in the height direction and viewed from the direction of the arrow
  • FIG. 7 is a plan view of the spring portion used in the present embodiment.
  • the X-axis direction and the Y-axis direction indicate two orthogonal directions in the support substrate plane.
  • the Z-axis direction indicates a height direction (film thickness direction) orthogonal to the X-axis direction and the Y-axis direction.
  • the angular velocity sensor 1 is formed using an SOI (Silicon on Insulator) substrate 2.
  • SOI substrate 2 is located between a support substrate 3 formed of a silicon substrate, an SOI layer (active layer) 5 formed of a silicon substrate, and the support substrate 3 and the SOI layer 5.
  • the support substrate 3 and the SOI layer 5 For example, it is a laminated structure of an oxide insulating layer (sacrificial layer) 4 made of SiO 2 .
  • the SOI layer 5 constituting the SOI substrate 2 includes mass parts (Mass) 10 and 11, excitation parts 12 to 15, support beams 16 and 17, detection parts 18 to 21, and spring parts 32 to 35 is formed.
  • Mass mass parts
  • lines are drawn at the boundaries between the parts, but these are made easy to see each part. In fact, these parts are all formed by the same SOI layer 5 and are integrated. None of the mass portions 10 and 11 and the support beams 16 and 17 are below the oxide insulating layer 4, and the mass portions 10 and 11 and the support beams 16 and 17 are located above the support substrate 3.
  • the structures of the excitation units 12 to 15 and the detection units 18 to 21 will be described in detail later.
  • the support beams 16 and 17 extend linearly with the X-axis direction as the longitudinal direction, and the pair of support beams 16 and 17 are arranged to face each other with a gap in the Y-axis direction.
  • the substantially central position in the X-axis direction of the support beams 16 and 17 is fixedly supported on the support substrate 3 via the anchor portions 22 and 23.
  • a pair of mass portions 10 and 11 are disposed opposite to each other between the pair of support beams 16 and 17 in the X-axis direction.
  • arms 24 to 27 extending in the direction of the support beams 16 and 17 are provided on the opposing surfaces 10 a, 10 b, 11 a, and 11 b of the mass portions 10 and 11, respectively, with the support beams 16 and 17. Yes.
  • the positions of the arm portions 24 to 27 are equidistant from the center position in the X-axis direction between the mass portions 10 and 11.
  • arms 28 to 31 extending in the directions of the mass portions 10 and 11 are provided on the opposing surfaces 16a and 17a of the support beams 16 and 17 facing the mass portions 10 and 11, respectively.
  • the positions of the arm portions 28 to 31 are equidistant from the anchor portions 22 and 23.
  • Spring portions 32 to 35 are interposed between the portion 26 and the arm portion 30 of the support beam 16 and between the arm portion 27 of the mass portion 11 and the arm portion 31 of the support beam 17, respectively.
  • the spring portions 32 to 35 are less rigid than the support beams 16 and 17.
  • the rigidity can be adjusted by width, length, thickness, and the like. For example, the widths of the spring portions 32 to 35 are formed thinner than the support beams 16 and 17 to reduce the rigidity.
  • the spring portions 32 to 35 are formed in the shape shown in FIG. 7, for example.
  • FIG. 7 representatively shows the shape of the spring portion 32.
  • the spring portion 32 includes a first spring portion 32a extending in the Y-axis direction, a second spring portion 32b extending in opposite directions of the X-axis direction from both ends of the first spring portion 32a in the Y-axis direction, and A third spring portion 32c.
  • the length dimension L1 of the first spring portion 32a is longer than the length dimensions L2 and L3 of the second spring portion 32b and the third spring portion 32c.
  • the lengths L2 and L3 of the second spring part 32b and the third spring part 32c are the same.
  • the length dimensions L1 to L3 are defined by the length of the spring portion 32 on the width center line.
  • the spring portions 33 and 34 shown in FIG. 1 coincide with a line-symmetric shape with the center line of the first spring portion 32a of the spring portion 32 shown in FIG.
  • the end portion of the second spring portion 32b of the spring portion 32 shown in FIG. 7 is connected to the arm portion 24 of the mass portion 10, and the end portion of the third spring portion 32c is connected to the arm portion 28 of the support beam 16. Yes.
  • the spring portions 33, 34, and 35 are connected to the mass portions 10 and 11 and the arm portions of the support beams 16 and 17.
  • a first excitation unit 12 and a second excitation unit 13 are provided on both outer sides of the mass unit 10 facing each other in the X-axis direction. Further, a third excitation unit 14 and a fourth excitation unit 15 are provided on both outer sides of the mass unit 11 facing in the X-axis direction.
  • the structure of each excitation part is the same, the structure of the 1st excitation part 12 is demonstrated as a representative.
  • the first excitation unit 12 is a comb-shaped fixed-side excitation electrode 37 and a comb-shaped movable-side excitation electrode that is integrally formed on the outer surface of the mass unit 10 and is alternately arranged with the fixed-side excitation electrode 37. 36.
  • the fixed-side excitation electrode 37 includes a fixed portion 39 fixedly supported on the support substrate 3 via the oxide insulating layer 4 and a space between the fixed portion 39 and the comb-like movable-side excitation electrode 36. And a comb-like electrode 40 extending in the direction.
  • the oxide insulating layer 4 is not present under the comb-like electrode 40 of the fixed side excitation electrode 37, and the comb-like electrode 40 floats above the support substrate 3.
  • a first detection unit 18 is provided on the opposite side (outside) of the support beam 16 from the opposite surface 16 a and on the right side of the anchor portion 22 in the drawing, and on the left side of the anchor portion 22 in the drawing. 2 detector 19 is provided.
  • a third detection unit 20 is provided on the opposite side (outer side) of the support surface 17 of the support beam 17 and on the right side of the anchor portion 23 in the figure, and on the left side of the anchor portion 23 in the figure. Is provided with a fourth detector 21.
  • the configuration of each detection unit is the same, the configuration of the first detection unit 18 will be described as a representative.
  • the first detection unit 18 has a comb-like movable detection electrode 63 formed integrally with the support beam 16 and a comb-teeth shape alternately arranged with the movable detection electrode 63.
  • the fixed side detection electrode 64 is provided.
  • the fixed side detection electrode 64 includes a fixed portion 65 fixedly supported on the support substrate 3 via the oxide insulating layer 4, and a space between the fixed portion 65 and the comb-like movable side detection electrode 63. And a comb-like electrode 66 extending in a straight line.
  • the oxide insulating layer 4 is not present under the comb-like electrode 66 of the fixed-side detection electrode 64, and the comb-like electrode 66 floats above the support substrate 3.
  • the mass units 10 and 11 are excited in the opposite phase in the X-axis direction as shown in FIGS. 3 and 4 by the driving force of the excitation units 12 to 15 shown in FIG. 3 shows a state in which excitation is performed in a direction in which the interval between the mass parts 10 and 11 is widened, and FIG. 4 shows a state in which excitation is performed in a direction in which the interval between the mass parts 10 and 11 is narrowed.
  • the structure of the spring portions 32 to 35 shown in FIG. 1 or FIG. 7 is adopted, so that the second spring of the spring portion 32 that connects the mass portion 10 and the support beam 16 as shown in FIG.
  • the third spring portion 32 c is on the side fixed to the support beam 16
  • the first spring portion 32 a having a long length dimension. 7 is bent in the X-axis direction as indicated by a dotted line in FIG.
  • the vibration can be effectively absorbed and the vibration is hardly transmitted to the support beam 16 via the third spring portion 32 c.
  • the other spring portions 33 to 35 absorb the vibration caused by the excitation of the mass portions 10 and 11 and suppress the transmission to the support beams 16 and 17.
  • the transmission of vibration is slightly absorbed by the spring portion due to the bending of the second spring portion 32b and the third spring portion 32c, but the vibration in the Y-axis direction is dominated by the first spring portion 32a that similarly extends in the Y-axis direction.
  • the vibration is effectively transmitted to the support beams 16 and 17 through the spring portions 32 to 35.
  • the mass part 10 vibrates in the downward direction in the figure
  • the mass part 11 vibrates in the upward direction in the figure
  • the support beams 16 and 17 on the right side of the anchor parts 22 and 23 vibrate in the directions of arrows C and D.
  • the support beams 16 and 17 on the left side of the anchors 22 and 23 are vibrated in the directions of arrows E and F
  • the support beams 16 and 17 are seesaw-oscillated with the anchor portions 22 and 23 as fulcrums in the same direction. Indicates the state.
  • FIG. 3 the mass part 10 vibrates in the downward direction in the figure
  • the mass part 11 vibrates in the upward direction in the figure
  • the support beams 16 and 17 on the right side of the anchor parts 22 and 23 vibrate in the directions of arrows C and D.
  • the support beams 16 and 17 on the left side of the anchors 22 and 23 are vibrated in the directions of arrows E and F
  • the support beams 16 and 17 are seesaw-oscillated with
  • the mass part 10 vibrates in the upward direction in the figure
  • the mass part 11 vibrates in the direction shown in the figure
  • the support beams 16 and 17 on the right side of the anchor parts 22 and 23 vibrate in the directions of arrows G and H.
  • the support beams 16 and 17 on the left side of the anchor portions 22 and 23 are vibrated in the directions of arrows I and J so that the support beams 16 and 17 are in the same direction and in the opposite direction to FIG. , 23 is used as a fulcrum, and the seesaw is oscillating.
  • the capacitances of the detectors 18 to 21 change based on the displacement of the support beams 16 and 17 in the Y-axis direction. Specifically, as shown in FIG. 3, when the support beams 16 and 17 perform seesaw vibration that moves downward (upward to the right) in the figure, the capacitances of the first detector 18 and the fourth detector 21 shown in FIG. 1 are small. Thus, the capacitances of the second detection unit 19 and the third detection unit 20 are increased. On the other hand, as shown in FIG. 4, when the support beams 16 and 17 perform seesaw vibration that moves upward (downward to the left) in the figure, the capacitances of the first detector 18 and the fourth detector 21 shown in FIG. The capacitances of the second detector 19 and the third detector 20 are reduced. Thereby, the displacement amount of the support beams 16 and 17 can be obtained as a differential output of capacitance change.
  • the support beams 16 and 17 and the mass portions 10 and 11 are connected via the spring portions 32 to 35, and the detection units 18 to 21 that detect the displacement amount of the support beams 16 and 17 are provided.
  • the mass parts 10 and 11 that have been excited in the opposite phase in the X-axis direction have the Coriolis force in the Y-axis direction. Vibrate in response.
  • the pair of mass portions 10 and 11 vibrate in opposite phases in the Y-axis direction, and the support beams 16 and 17 connected to the mass portions 10 and 11 via the spring portions 32 to 35 are anchor portions in the Y-axis direction.
  • the seesaw vibrates using 22 and 23 as fulcrums. According to the configuration of the present embodiment, the occurrence of leakage vibration can be appropriately suppressed, and the detection accuracy of the angular velocity ⁇ can be improved with a simple structure.
  • space portions 10d and 11d are formed inside the mass portions 10 and 11, and excitation portions 50 and 51 are formed in the space portions 10d and 11d.
  • the configuration of the excitation units 50 and 51 includes a fixed-side excitation electrode and a movable-side excitation electrode, similarly to the excitation units 12 to 15 shown in FIG.
  • the embodiment of FIG. 2 is the same as FIG. 1 except for the configuration of the excitation unit. If the excitation units 50 and 51 are positioned inside the mass units 10 and 11 as shown in FIG. 2, the angular velocity sensor can be reduced in size.
  • the detection units 18 to 21 is positioned outside in the X-axis direction from the connection point between the support beams 16 and 17 and the mass units 10 and 11.
  • the “connection point” shown in FIGS. 1 and 2 is the center position of the arm portions 28 to 31 protruding from the support beams 16 and 17 in the direction of the mass portions 10 and 11.
  • the entire detection units 18 to 21 are positioned outside the connecting point of the support beams 16 and 17 with the mass units 10 and 11 in the X-axis direction, the displacement amount of the support beams is more effectively increased. Thus, the detection accuracy of angular velocity can be improved.
  • the detection units 18 to 21 may be other than the capacitance type, but the capacitance type can detect the displacement amount of the support beams 16 and 17 with a simple configuration with high accuracy.
  • the top view of the angular velocity sensor of 1st Embodiment of this invention The top view of the angular velocity sensor of 2nd Embodiment of this invention,
  • movement of the angular velocity sensor in this embodiment is a cross-sectional view when the angular velocity sensor shown in FIG. 1 is cut in the height direction along the line AA and viewed from the arrow direction;
  • FIG. 1 is a cross-sectional view of the angular velocity sensor shown in FIG. 1 taken along the line BB in the height direction and viewed from the arrow direction;

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

L'invention permet de fournir un détecteur de vitesse angulaire qui peut supprimer une oscillation de fuite et améliorer de manière appropriée la précision de détection de vitesse angulaire. Le détecteur de vitesse angulaire comprend : une paire de poutres de support (16, 17) agencées pour s'opposer entre elles dans la direction de l'axe des Y lorsque la direction de l'axe des X est la direction longitudinale ; des ancres (22, 23) pour fixer et supporter les positions centrales des poutres de support respectives ; une paire d'unités de masse (10, 11) agencées pour s'opposer entre elles entre les poutres de support dans la direction de l'axe des X ; des ressorts (32-35) connectant les unités de masse respectives aux poutres de support ; une unité d'excitation pour exciter les unités de masse ; et une unité de détection pour détecter une quantité de déplacement des poutres de support déplacées lorsque les unités de masse sont amenées à osciller par la force de Coriolis. Si une vitesse angulaire est générée autour de l'axe des Z lorsque la paire des unités de masse (10, 11) est excitée avec une phase inverse dans la direction de l'axe des X par l'unité d'excitation, la force de Coriolis est générée dans la direction de l'axe des Y et la paire d'unités de masse vibre avec une phase inverse dans la direction de l'axe des Y, ce qui fait osciller en dents de scie les poutres de support contre les ancres en tant que point d'appui dans la direction de l'axe des Y.
PCT/JP2009/055581 2008-03-24 2009-03-23 Détecteur de vitesse angulaire WO2009119470A1 (fr)

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JP2008074805 2008-03-24

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010100334A1 (fr) * 2009-03-02 2010-09-10 Vti Technologies Oy Capteur micromécanique vibrant de vitesse angulaire

Citations (6)

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Publication number Priority date Publication date Assignee Title
JPH0868637A (ja) * 1994-08-29 1996-03-12 Murata Mfg Co Ltd 捩れ振動型ジャイロ
JPH09119942A (ja) * 1995-08-16 1997-05-06 Robert Bosch Gmbh 回転角速度センサ
JP2001264069A (ja) * 2000-03-16 2001-09-26 Aisin Seiki Co Ltd 角速度センサ
JP2003510573A (ja) * 1999-09-24 2003-03-18 ザ・チャールズ・スターク・ドレイパー・ラボラトリー・インコーポレイテッド 微細組立式音叉ジャイロスコープおよび面外回転を検知するための関連する３軸慣性測定システム
JP2005516207A (ja) * 2002-01-30 2005-06-02 ローベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング マイクロメカニカル回転速度センサ
JP2008505315A (ja) * 2004-06-29 2008-02-21 ハネウェル・インターナショナル・インコーポレーテッド 水平に向けられた駆動電極を有するｍｅｍｓジャイロスコープ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0868637A (ja) * 1994-08-29 1996-03-12 Murata Mfg Co Ltd 捩れ振動型ジャイロ
JPH09119942A (ja) * 1995-08-16 1997-05-06 Robert Bosch Gmbh 回転角速度センサ
JP2003510573A (ja) * 1999-09-24 2003-03-18 ザ・チャールズ・スターク・ドレイパー・ラボラトリー・インコーポレイテッド 微細組立式音叉ジャイロスコープおよび面外回転を検知するための関連する３軸慣性測定システム
JP2001264069A (ja) * 2000-03-16 2001-09-26 Aisin Seiki Co Ltd 角速度センサ
JP2005516207A (ja) * 2002-01-30 2005-06-02 ローベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング マイクロメカニカル回転速度センサ
JP2008505315A (ja) * 2004-06-29 2008-02-21 ハネウェル・インターナショナル・インコーポレーテッド 水平に向けられた駆動電極を有するｍｅｍｓジャイロスコープ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010100334A1 (fr) * 2009-03-02 2010-09-10 Vti Technologies Oy Capteur micromécanique vibrant de vitesse angulaire
US8904865B2 (en) 2009-03-02 2014-12-09 Murata Electronics Oy Vibrating micro-mechanical sensor of angular velocity
US8997565B2 (en) 2009-03-02 2015-04-07 Murata Electronics Oy Micro-mechanical sensor of angular velocity

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