WO2009069335A1 - 電子放出源及び電子放出源の製造方法 - Google Patents

電子放出源及び電子放出源の製造方法 Download PDF

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Publication number
WO2009069335A1
WO2009069335A1 PCT/JP2008/062590 JP2008062590W WO2009069335A1 WO 2009069335 A1 WO2009069335 A1 WO 2009069335A1 JP 2008062590 W JP2008062590 W JP 2008062590W WO 2009069335 A1 WO2009069335 A1 WO 2009069335A1
Authority
WO
WIPO (PCT)
Prior art keywords
electron emitting
emitting source
manufacturing
heater
emitting chip
Prior art date
Application number
PCT/JP2008/062590
Other languages
English (en)
French (fr)
Inventor
Toshiyuki Morishita
Yoshinori Terui
Original Assignee
Denki Kagaku Kogyo Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo Kabushiki Kaisha filed Critical Denki Kagaku Kogyo Kabushiki Kaisha
Priority to EP08778105A priority Critical patent/EP2216797A4/en
Priority to US12/745,316 priority patent/US8456076B2/en
Publication of WO2009069335A1 publication Critical patent/WO2009069335A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06375—Arrangement of electrodes

Abstract

　端子間抵抗値の上昇を防ぐことができる電子放出源及び電子放出源の製造方法を提供する。 希土類六硼化物からなる電子放出源チップ（４）と、上記電子放出源チップを把持し加熱するための炭素質部材からなるヒーター（５）とを有する電子放出源であって、上記電子放出源チップ（４）とヒーター（５）の間隙に導電性物質（６）が設けられていることを特徴とする電子放出源。
PCT/JP2008/062590 2007-11-30 2008-07-11 電子放出源及び電子放出源の製造方法 WO2009069335A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08778105A EP2216797A4 (en) 2007-11-30 2008-07-11 ELECTRON-EMITTING SOURCE AND MANUFACTURING METHOD FOR AN ELECTRON-EMITTING SOURCE
US12/745,316 US8456076B2 (en) 2007-11-30 2008-07-11 Electron emitting source and manufacturing method of electron emitting source

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007309726A JP4951477B2 (ja) 2006-12-04 2007-11-30 電子放出源
JP2007-309726 2007-11-30

Publications (1)

Publication Number Publication Date
WO2009069335A1 true WO2009069335A1 (ja) 2009-06-04

Family

ID=39695423

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062590 WO2009069335A1 (ja) 2007-11-30 2008-07-11 電子放出源及び電子放出源の製造方法

Country Status (4)

Country Link
US (1) US8456076B2 (ja)
EP (1) EP2216797A4 (ja)
JP (1) JP4951477B2 (ja)
WO (1) WO2009069335A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014531A (ja) * 2009-06-01 2011-01-20 National Institute For Materials Science 耐熱電子放出源

Families Citing this family (11)

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Publication number Priority date Publication date Assignee Title
US8581481B1 (en) 2011-02-25 2013-11-12 Applied Physics Technologies, Inc. Pre-aligned thermionic emission assembly
JP6043476B2 (ja) * 2011-10-12 2016-12-14 株式会社日立ハイテクノロジーズ イオン源およびそれを用いたイオンビーム装置
US9165737B2 (en) * 2012-10-04 2015-10-20 Nuflare Technology, Inc. High-brightness, long life thermionic cathode and methods of its fabrication
JP2014102929A (ja) * 2012-11-19 2014-06-05 Nuflare Technology Inc カソード、カソードの製造方法
JP6529920B2 (ja) * 2016-03-01 2019-06-12 株式会社日立ハイテクノロジーズ 電界放出電子源、その製造方法および電子線装置
JP6938498B2 (ja) * 2016-07-19 2021-09-22 デンカ株式会社 電子源およびその製造方法
JP2019153563A (ja) * 2018-03-06 2019-09-12 株式会社Ｐａｒａｍ 電子銃
JP6548179B1 (ja) * 2018-03-19 2019-07-24 株式会社Ｐａｒａｍ 電子銃
US11380511B2 (en) * 2020-03-24 2022-07-05 Fei Company Charged particle beam source
WO2022039042A1 (ja) * 2020-08-17 2022-02-24 デンカ株式会社 エミッター及びこれを備える装置
WO2023189842A1 (ja) * 2022-03-29 2023-10-05 デンカ株式会社 エミッター及びこれを備える装置

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JPS4513831Y1 (ja) 1965-04-14 1970-06-12
JPS6023456B2 (ja) 1978-11-01 1985-06-07 電気化学工業株式会社 熱電子陰極装置
JPS62140331A (ja) * 1985-12-16 1987-06-23 Hitachi Ltd 熱電子放出陰極
JPS632222A (ja) * 1986-06-23 1988-01-07 Hitachi Ltd 六硼化ランタン熱陰極
JPH03105833A (ja) * 1989-09-12 1991-05-02 Siemens Ag 電子源
JPH0676730A (ja) * 1992-08-24 1994-03-18 Denki Kagaku Kogyo Kk 熱電子放射陰極
JPH07335161A (ja) * 1994-06-03 1995-12-22 Hitachi Medical Corp 電子銃
JP2000058448A (ja) * 1998-06-05 2000-02-25 Nikon Corp 電子ビ―ム転写装置及び半導体デバイス製造方法
JP2005190758A (ja) * 2003-12-25 2005-07-14 Denki Kagaku Kogyo Kk 電子源

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JPS6023456A (ja) 1983-07-18 1985-02-06 Tetsuhiko Inoue 無毒性防カビ塗料
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4513831Y1 (ja) 1965-04-14 1970-06-12
JPS6023456B2 (ja) 1978-11-01 1985-06-07 電気化学工業株式会社 熱電子陰極装置
JPS62140331A (ja) * 1985-12-16 1987-06-23 Hitachi Ltd 熱電子放出陰極
JPS632222A (ja) * 1986-06-23 1988-01-07 Hitachi Ltd 六硼化ランタン熱陰極
JPH03105833A (ja) * 1989-09-12 1991-05-02 Siemens Ag 電子源
JPH0676730A (ja) * 1992-08-24 1994-03-18 Denki Kagaku Kogyo Kk 熱電子放射陰極
JPH07335161A (ja) * 1994-06-03 1995-12-22 Hitachi Medical Corp 電子銃
JP2000058448A (ja) * 1998-06-05 2000-02-25 Nikon Corp 電子ビ―ム転写装置及び半導体デバイス製造方法
JP2005190758A (ja) * 2003-12-25 2005-07-14 Denki Kagaku Kogyo Kk 電子源

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Title
See also references of EP2216797A4

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014531A (ja) * 2009-06-01 2011-01-20 National Institute For Materials Science 耐熱電子放出源

Also Published As

Publication number Publication date
JP4951477B2 (ja) 2012-06-13
JP2008166265A (ja) 2008-07-17
US8456076B2 (en) 2013-06-04
EP2216797A4 (en) 2012-01-04
US20100301736A1 (en) 2010-12-02
EP2216797A1 (en) 2010-08-11

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