WO2009008265A1 - 微細パターン形成用組成物およびそれを用いた微細パターン形成方法 - Google Patents

微細パターン形成用組成物およびそれを用いた微細パターン形成方法 Download PDF

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Publication number
WO2009008265A1
WO2009008265A1 PCT/JP2008/061619 JP2008061619W WO2009008265A1 WO 2009008265 A1 WO2009008265 A1 WO 2009008265A1 JP 2008061619 W JP2008061619 W JP 2008061619W WO 2009008265 A1 WO2009008265 A1 WO 2009008265A1
Authority
WO
WIPO (PCT)
Prior art keywords
composition
forming
micropattern
same
forming micropattern
Prior art date
Application number
PCT/JP2008/061619
Other languages
English (en)
French (fr)
Inventor
Kazumichi Akashi
Yoshiharu Sakurai
Tomonori Horiba
Original Assignee
Az Electronic Materials (Japan) K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Az Electronic Materials (Japan) K.K. filed Critical Az Electronic Materials (Japan) K.K.
Priority to KR1020107001334A priority Critical patent/KR101426321B1/ko
Priority to US12/452,522 priority patent/US20100119975A1/en
Priority to CN200880023839XA priority patent/CN101730866B/zh
Priority to JP2009522576A priority patent/JP5323698B2/ja
Publication of WO2009008265A1 publication Critical patent/WO2009008265A1/ja

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0338—Process specially adapted to improve the resolution of the mask

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

　本発明は、アスペクト比の高いパターンを露光波長の限界解像以下にまで微細化することができる微細パターン形成用組成物とそれを用いた微細パターン形成方法を提供する。この微細パターン形成用組成物は、水溶性樹脂と、水を含有する溶媒とを含んでなり、前記組成物の２５°Cにおける動粘度をν、固形分濃度をＣとしたとき、νが１０～３５（ｍｍ２／ｓ）であり、かつν／Ｃが０．５～１．５（ｍｍ２／ｓ／ｗｔ％）である。この組成物を用いてアスペクト比が４～１５の、または厚さ２μｍ以上のレジストパターンをさらに微細化させることができる。
PCT/JP2008/061619 2007-07-11 2008-06-26 微細パターン形成用組成物およびそれを用いた微細パターン形成方法 WO2009008265A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020107001334A KR101426321B1 (ko) 2007-07-11 2008-06-26 미세 패턴 형성용 조성물 및 이것을 사용한 미세 패턴 형성 방법
US12/452,522 US20100119975A1 (en) 2007-07-11 2008-06-26 Composition for forming micropattern and method for forming micropattern using the same
CN200880023839XA CN101730866B (zh) 2007-07-11 2008-06-26 精细图案形成用组合物以及使用它的精细图案形成方法
JP2009522576A JP5323698B2 (ja) 2007-07-11 2008-06-26 微細パターン形成用組成物およびそれを用いた微細パターン形成方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-182152 2007-07-11
JP2007182152 2007-07-11

Publications (1)

Publication Number Publication Date
WO2009008265A1 true WO2009008265A1 (ja) 2009-01-15

Family

ID=40228444

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061619 WO2009008265A1 (ja) 2007-07-11 2008-06-26 微細パターン形成用組成物およびそれを用いた微細パターン形成方法

Country Status (6)

Country Link
US (1) US20100119975A1 (ja)
JP (1) JP5323698B2 (ja)
KR (1) KR101426321B1 (ja)
CN (1) CN101730866B (ja)
TW (1) TW200910014A (ja)
WO (1) WO2009008265A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120025393A (ko) * 2010-09-02 2012-03-15 도쿄엘렉트론가부시키가이샤 도포, 현상 장치, 도포, 현상 방법 및 기억 매체
WO2013008912A1 (ja) * 2011-07-14 2013-01-17 ＡｚエレクトロニックマテリアルズＩｐ株式会社 微細パターン形成用組成物およびそれを用いた微細化されたパターン形成方法
WO2016060116A1 (ja) * 2014-10-14 2016-04-21 メルクパフォーマンスマテリアルズマニュファクチャリング合同会社 レジストパターン処理用組成物およびそれを用いたパターン形成方法
WO2023238737A1 (ja) * 2022-06-08 2023-12-14 東京エレクトロン株式会社 基板処理方法、記憶媒体、及び基板処理装置
US12014612B2 (en) 2014-08-04 2024-06-18 LiveView Technologies, Inc. Event detection, event notification, data retrieval, and associated devices, systems, and methods

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106486346B (zh) * 2015-08-27 2019-04-26 中芯国际集成电路制造(上海)有限公司 光刻胶图形的形成方法

Citations (6)

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JP2001312060A (ja) * 2000-05-01 2001-11-09 Tokyo Ohka Kogyo Co Ltd ポジ型ホトレジスト組成物、感光性膜付基板およびレジストパターンの形成方法
JP2003255564A (ja) * 2002-03-05 2003-09-10 Fujitsu Ltd レジストパターン改善化材料およびそれを用いたパターンの製造方法
JP2004145050A (ja) * 2002-10-25 2004-05-20 Tokyo Ohka Kogyo Co Ltd 微細パターンの形成方法
WO2005008340A1 (ja) * 2003-07-17 2005-01-27 Az Electronic Materials (Japan) K.K. 微細パターン形成材料およびそれを用いた微細パターン形成方法
WO2005098545A1 (ja) * 2004-04-09 2005-10-20 Az Electronic Materials (Japan) K.K. 水溶性樹脂組成物およびそれを用いたパターン形成方法
WO2006019135A1 (ja) * 2004-08-20 2006-02-23 Tokyo Ohka Kogyo Co., Ltd. パターン微細化用被覆形成剤およびそれを用いた微細パターンの形成方法

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US2676172A (en) * 1950-08-04 1954-04-20 Gen Mills Inc Allyl dextrins
US3366481A (en) * 1963-09-20 1968-01-30 Harmick Res & Dev Corp Photoengraving resists and compositions therefor
JP3343341B2 (ja) * 2000-04-28 2002-11-11 ティーディーケイ株式会社 微細パターン形成方法及びそれに用いる現像／洗浄装置、及びそれを用いためっき方法、及びそれを用いた薄膜磁気ヘッドの製造方法
JP3476081B2 (ja) 2001-12-27 2003-12-10 東京応化工業株式会社 パターン微細化用被覆形成剤およびそれを用いた微細パターンの形成方法
JP3953822B2 (ja) * 2002-01-25 2007-08-08 富士通株式会社 レジストパターン薄肉化材料、レジストパターン及びその製造方法、並びに、半導体装置及びその製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001312060A (ja) * 2000-05-01 2001-11-09 Tokyo Ohka Kogyo Co Ltd ポジ型ホトレジスト組成物、感光性膜付基板およびレジストパターンの形成方法
JP2003255564A (ja) * 2002-03-05 2003-09-10 Fujitsu Ltd レジストパターン改善化材料およびそれを用いたパターンの製造方法
JP2004145050A (ja) * 2002-10-25 2004-05-20 Tokyo Ohka Kogyo Co Ltd 微細パターンの形成方法
WO2005008340A1 (ja) * 2003-07-17 2005-01-27 Az Electronic Materials (Japan) K.K. 微細パターン形成材料およびそれを用いた微細パターン形成方法
WO2005098545A1 (ja) * 2004-04-09 2005-10-20 Az Electronic Materials (Japan) K.K. 水溶性樹脂組成物およびそれを用いたパターン形成方法
WO2006019135A1 (ja) * 2004-08-20 2006-02-23 Tokyo Ohka Kogyo Co., Ltd. パターン微細化用被覆形成剤およびそれを用いた微細パターンの形成方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120025393A (ko) * 2010-09-02 2012-03-15 도쿄엘렉트론가부시키가이샤 도포, 현상 장치, 도포, 현상 방법 및 기억 매체
JP2012054469A (ja) * 2010-09-02 2012-03-15 Tokyo Electron Ltd 塗布、現像装置、塗布、現像方法及び記憶媒体
KR101667433B1 (ko) 2010-09-02 2016-10-18 도쿄엘렉트론가부시키가이샤 도포, 현상 장치
WO2013008912A1 (ja) * 2011-07-14 2013-01-17 ＡｚエレクトロニックマテリアルズＩｐ株式会社 微細パターン形成用組成物およびそれを用いた微細化されたパターン形成方法
JP2013020211A (ja) * 2011-07-14 2013-01-31 Az Electronic Materials Ip Ltd 微細パターン形成用組成物およびそれを用いた微細化されたパターン形成方法
CN103649838A (zh) * 2011-07-14 2014-03-19 Az电子材料Ip(日本)株式会社 微细图案形成用组合物以及使用其的微细化图案形成方法
US9298094B2 (en) 2011-07-14 2016-03-29 Merck Patent Gmbh Composition for forming fine pattern and method for forming fined pattern using same
CN103649838B (zh) * 2011-07-14 2016-08-24 默克专利有限公司 微细图案形成用组合物以及使用其的微细化图案形成方法
US12014612B2 (en) 2014-08-04 2024-06-18 LiveView Technologies, Inc. Event detection, event notification, data retrieval, and associated devices, systems, and methods
WO2016060116A1 (ja) * 2014-10-14 2016-04-21 メルクパフォーマンスマテリアルズマニュファクチャリング合同会社 レジストパターン処理用組成物およびそれを用いたパターン形成方法
JPWO2016060116A1 (ja) * 2014-10-14 2017-07-27 アーゼッド・エレクトロニック・マテリアルズ（ルクセンブルグ）ソシエテ・ア・レスポンサビリテ・リミテ レジストパターン処理用組成物およびそれを用いたパターン形成方法
WO2023238737A1 (ja) * 2022-06-08 2023-12-14 東京エレクトロン株式会社 基板処理方法、記憶媒体、及び基板処理装置

Also Published As

Publication number Publication date
TW200910014A (en) 2009-03-01
CN101730866B (zh) 2013-08-07
CN101730866A (zh) 2010-06-09
KR20100047229A (ko) 2010-05-07
JPWO2009008265A1 (ja) 2010-09-09
JP5323698B2 (ja) 2013-10-23
US20100119975A1 (en) 2010-05-13
KR101426321B1 (ko) 2014-08-06

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