WO2008093693A1 - 静電容量型加速度センサ - Google Patents
静電容量型加速度センサ Download PDFInfo
- Publication number
- WO2008093693A1 WO2008093693A1 PCT/JP2008/051344 JP2008051344W WO2008093693A1 WO 2008093693 A1 WO2008093693 A1 WO 2008093693A1 JP 2008051344 W JP2008051344 W JP 2008051344W WO 2008093693 A1 WO2008093693 A1 WO 2008093693A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- acceleration sensor
- electrostatic capacitance
- capacitance type
- type acceleration
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
X軸方向、Y軸方向及びZ軸方向の加速度をそれぞれ独立して検出するための3つの可動電極である錘部(12a,12b,12c)を有する第1基板であるシリコン製基板(11)の一方の主面と、それぞれの錘部(12a,12b,12c)に対して所定の間隔を持つそれぞれ一対の検出用電極対(14a,14b,14c,14d,14e,14f)を有する第2基板であるガラス基板(13)とが接合されて構成されており、シリコン製基板(11)の他方の主面には、錘部(12a,12b)を揺動させ、錘部(12c)を昇降させる領域(18a,18b,18c)を構成するように、第3基板であるガラス基板(15)が接合されている。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-023850 | 2007-02-02 | ||
JP2007023850 | 2007-02-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008093693A1 true WO2008093693A1 (ja) | 2008-08-07 |
Family
ID=39674002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/051344 WO2008093693A1 (ja) | 2007-02-02 | 2008-01-30 | 静電容量型加速度センサ |
Country Status (2)
Country | Link |
---|---|
TW (1) | TW200839242A (ja) |
WO (1) | WO2008093693A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010210423A (ja) * | 2009-03-10 | 2010-09-24 | Panasonic Electric Works Co Ltd | 加速度センサ |
JP2013217794A (ja) * | 2012-04-10 | 2013-10-24 | Seiko Epson Corp | 物理量センサーおよびその製造方法、並びに電子機器 |
JP5357166B2 (ja) * | 2008-09-22 | 2013-12-04 | アルプス電気株式会社 | Memsセンサ及び検出装置 |
WO2015014179A1 (zh) * | 2013-07-30 | 2015-02-05 | 苏州固锝电子股份有限公司 | 电容式mems加速度传感器 |
CN104914273A (zh) * | 2013-07-30 | 2015-09-16 | 苏州固锝电子股份有限公司 | 用于检测三维方向加速度的传感器 |
CN114485599A (zh) * | 2020-10-28 | 2022-05-13 | 精工爱普生株式会社 | 物理量传感器、物理量传感器器件以及惯性测量装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05203667A (ja) * | 1991-11-21 | 1993-08-10 | Nec Corp | 容量型三軸加速度センサ |
EP1243930A1 (de) * | 2001-03-08 | 2002-09-25 | EADS Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
JP2005249454A (ja) * | 2004-03-02 | 2005-09-15 | Mitsubishi Electric Corp | 容量型加速度センサ |
-
2008
- 2008-01-11 TW TW097101228A patent/TW200839242A/zh unknown
- 2008-01-30 WO PCT/JP2008/051344 patent/WO2008093693A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05203667A (ja) * | 1991-11-21 | 1993-08-10 | Nec Corp | 容量型三軸加速度センサ |
EP1243930A1 (de) * | 2001-03-08 | 2002-09-25 | EADS Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
JP2005249454A (ja) * | 2004-03-02 | 2005-09-15 | Mitsubishi Electric Corp | 容量型加速度センサ |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5357166B2 (ja) * | 2008-09-22 | 2013-12-04 | アルプス電気株式会社 | Memsセンサ及び検出装置 |
JP2010210423A (ja) * | 2009-03-10 | 2010-09-24 | Panasonic Electric Works Co Ltd | 加速度センサ |
JP2013217794A (ja) * | 2012-04-10 | 2013-10-24 | Seiko Epson Corp | 物理量センサーおよびその製造方法、並びに電子機器 |
US9383383B2 (en) | 2012-04-10 | 2016-07-05 | Seiko Epson Corporation | Physical quantity sensor, manufacturing method thereof, and electronic apparatus |
WO2015014179A1 (zh) * | 2013-07-30 | 2015-02-05 | 苏州固锝电子股份有限公司 | 电容式mems加速度传感器 |
CN104914273A (zh) * | 2013-07-30 | 2015-09-16 | 苏州固锝电子股份有限公司 | 用于检测三维方向加速度的传感器 |
CN104914273B (zh) * | 2013-07-30 | 2018-05-22 | 苏州固锝电子股份有限公司 | 用于检测三维方向加速度的传感器 |
CN114485599A (zh) * | 2020-10-28 | 2022-05-13 | 精工爱普生株式会社 | 物理量传感器、物理量传感器器件以及惯性测量装置 |
CN114485599B (zh) * | 2020-10-28 | 2024-03-05 | 精工爱普生株式会社 | 物理量传感器、物理量传感器器件以及惯性测量装置 |
Also Published As
Publication number | Publication date |
---|---|
TW200839242A (en) | 2008-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2008093693A1 (ja) | 静電容量型加速度センサ | |
WO2010110989A3 (en) | Vertically integrated mems acceleration transducer | |
Sun et al. | Implementation of a monolithic single proof-mass tri-axis accelerometer using CMOS-MEMS technique | |
EP3248936B1 (en) | Mems pressure sensor and mems inertial sensor integration structure | |
EP2060533A3 (en) | Semiconductor device and method of manufacturing the same | |
US10371714B2 (en) | Teeter-totter type MEMS accelerometer with electrodes on circuit wafer | |
JP5965934B2 (ja) | 改善されたオフセットおよびノイズ性能を有する傾斜モード加速度計 | |
WO2008076172A3 (en) | Proof-mass with supporting structure on integrated circuit-mems platform and method of fabricating the same | |
TWI266879B (en) | Acceleration sensor | |
WO2008051781A3 (en) | Vertically integrated mems | |
FI20065484A (fi) | Menetelmä mikroelektromekaanisen komponentin valmistamiseksi ja mikroelektromekaaninen komponentti | |
WO2005121810A3 (en) | Dynamically balanced capacitive pick-off accelerometer | |
WO2009009803A3 (en) | Integrated motion processing unit (mpu) with mems inertial sensing and embedded digital electronics | |
WO2012037492A3 (en) | Multi-die mems package | |
WO2020061131A8 (en) | 3-axis accelerometer | |
EP2053412A3 (en) | Pendulous accelerometer with balanced gas damping | |
WO2011016859A3 (en) | Micromachined inertial sensor devices | |
WO2009047120A3 (de) | Beschleunigungssensor | |
WO2010039307A3 (en) | Cmos integrated micromechanical resonators and methods for fabricating the same | |
TW200619628A (en) | Acceleration sensor | |
US20130042686A1 (en) | Inertia sensing apparatus | |
CN105445495B (zh) | 一种对称的mems加速度敏感芯片及其制造工艺 | |
US20150260751A1 (en) | Detector module for mems sensor and mems sensor having the same | |
CN104483511B (zh) | (111)单硅片集成的三轴微机械加速度传感器及制作方法 | |
WO2015069386A1 (en) | Accelerometer with offset compensation |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08704126 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 08704126 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: JP |