WO2008093693A1 - 静電容量型加速度センサ - Google Patents

静電容量型加速度センサ Download PDF

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Publication number
WO2008093693A1
WO2008093693A1 PCT/JP2008/051344 JP2008051344W WO2008093693A1 WO 2008093693 A1 WO2008093693 A1 WO 2008093693A1 JP 2008051344 W JP2008051344 W JP 2008051344W WO 2008093693 A1 WO2008093693 A1 WO 2008093693A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
acceleration sensor
electrostatic capacitance
capacitance type
type acceleration
Prior art date
Application number
PCT/JP2008/051344
Other languages
English (en)
French (fr)
Inventor
Chisato Iwasaki
Manabu Tamura
Kosuke Uga
Tsuyoshi Sugawara
Takuo Ito
Original Assignee
Alps Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co., Ltd. filed Critical Alps Electric Co., Ltd.
Publication of WO2008093693A1 publication Critical patent/WO2008093693A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

　Ｘ軸方向、Ｙ軸方向及びＺ軸方向の加速度をそれぞれ独立して検出するための３つの可動電極である錘部（１２ａ，１２ｂ，１２ｃ）を有する第１基板であるシリコン製基板（１１）の一方の主面と、それぞれの錘部（１２ａ，１２ｂ，１２ｃ）に対して所定の間隔を持つそれぞれ一対の検出用電極対（１４ａ，１４ｂ，１４ｃ，１４ｄ，１４ｅ，１４ｆ）を有する第２基板であるガラス基板（１３）とが接合されて構成されており、シリコン製基板（１１）の他方の主面には、錘部（１２ａ，１２ｂ）を揺動させ、錘部（１２ｃ）を昇降させる領域（１８ａ，１８ｂ，１８ｃ）を構成するように、第３基板であるガラス基板（１５）が接合されている。
PCT/JP2008/051344 2007-02-02 2008-01-30 静電容量型加速度センサ WO2008093693A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-023850 2007-02-02
JP2007023850 2007-02-02

Publications (1)

Publication Number Publication Date
WO2008093693A1 true WO2008093693A1 (ja) 2008-08-07

Family

ID=39674002

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/051344 WO2008093693A1 (ja) 2007-02-02 2008-01-30 静電容量型加速度センサ

Country Status (2)

Country Link
TW (1) TW200839242A (ja)
WO (1) WO2008093693A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210423A (ja) * 2009-03-10 2010-09-24 Panasonic Electric Works Co Ltd 加速度センサ
JP2013217794A (ja) * 2012-04-10 2013-10-24 Seiko Epson Corp 物理量センサーおよびその製造方法、並びに電子機器
JP5357166B2 (ja) * 2008-09-22 2013-12-04 アルプス電気株式会社 Ｍｅｍｓセンサ及び検出装置
WO2015014179A1 (zh) * 2013-07-30 2015-02-05 苏州固锝电子股份有限公司 电容式mems加速度传感器
CN104914273A (zh) * 2013-07-30 2015-09-16 苏州固锝电子股份有限公司 用于检测三维方向加速度的传感器
CN114485599A (zh) * 2020-10-28 2022-05-13 精工爱普生株式会社 物理量传感器、物理量传感器器件以及惯性测量装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05203667A (ja) * 1991-11-21 1993-08-10 Nec Corp 容量型三軸加速度センサ
EP1243930A1 (de) * 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
JP2005249454A (ja) * 2004-03-02 2005-09-15 Mitsubishi Electric Corp 容量型加速度センサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05203667A (ja) * 1991-11-21 1993-08-10 Nec Corp 容量型三軸加速度センサ
EP1243930A1 (de) * 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
JP2005249454A (ja) * 2004-03-02 2005-09-15 Mitsubishi Electric Corp 容量型加速度センサ

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5357166B2 (ja) * 2008-09-22 2013-12-04 アルプス電気株式会社 Ｍｅｍｓセンサ及び検出装置
JP2010210423A (ja) * 2009-03-10 2010-09-24 Panasonic Electric Works Co Ltd 加速度センサ
JP2013217794A (ja) * 2012-04-10 2013-10-24 Seiko Epson Corp 物理量センサーおよびその製造方法、並びに電子機器
US9383383B2 (en) 2012-04-10 2016-07-05 Seiko Epson Corporation Physical quantity sensor, manufacturing method thereof, and electronic apparatus
WO2015014179A1 (zh) * 2013-07-30 2015-02-05 苏州固锝电子股份有限公司 电容式mems加速度传感器
CN104914273A (zh) * 2013-07-30 2015-09-16 苏州固锝电子股份有限公司 用于检测三维方向加速度的传感器
CN104914273B (zh) * 2013-07-30 2018-05-22 苏州固锝电子股份有限公司 用于检测三维方向加速度的传感器
CN114485599A (zh) * 2020-10-28 2022-05-13 精工爱普生株式会社 物理量传感器、物理量传感器器件以及惯性测量装置
CN114485599B (zh) * 2020-10-28 2024-03-05 精工爱普生株式会社 物理量传感器、物理量传感器器件以及惯性测量装置

Also Published As

Publication number Publication date
TW200839242A (en) 2008-10-01

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