WO2008062896A1 - Microréacteur - Google Patents
Microréacteur Download PDFInfo
- Publication number
- WO2008062896A1 WO2008062896A1 PCT/JP2007/072883 JP2007072883W WO2008062896A1 WO 2008062896 A1 WO2008062896 A1 WO 2008062896A1 JP 2007072883 W JP2007072883 W JP 2007072883W WO 2008062896 A1 WO2008062896 A1 WO 2008062896A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microreactor
- layer
- getter
- metal
- called
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
- B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
- B01J23/80—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with zinc, cadmium or mercury
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/02—Impregnation, coating or precipitation
- B01J37/0215—Coating
- B01J37/0225—Coating of metal substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/02—Impregnation, coating or precipitation
- B01J37/024—Multiple impregnation or coating
- B01J37/0242—Coating followed by impregnation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
- B01J37/349—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/02—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen
- C01B3/32—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air
- C01B3/34—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air by reaction of hydrocarbons with gasifying agents
- C01B3/38—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air by reaction of hydrocarbons with gasifying agents using catalysts
- C01B3/384—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air by reaction of hydrocarbons with gasifying agents using catalysts the catalyst being continuously externally heated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/06—Combination of fuel cells with means for production of reactants or for treatment of residues
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/06—Combination of fuel cells with means for production of reactants or for treatment of residues
- H01M8/0606—Combination of fuel cells with means for production of reactants or for treatment of residues with means for production of gaseous reactants
- H01M8/0612—Combination of fuel cells with means for production of reactants or for treatment of residues with means for production of gaseous reactants from carbon-containing material
- H01M8/0618—Reforming processes, e.g. autothermal, partial oxidation or steam reforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/0015—Controlling the temperature by thermal insulation means
- B01J2219/00153—Vacuum spaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00819—Materials of construction
- B01J2219/00822—Metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00819—Materials of construction
- B01J2219/00835—Comprising catalytically active material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00851—Additional features
- B01J2219/00858—Aspects relating to the size of the reactor
- B01J2219/0086—Dimensions of the flow channels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00873—Heat exchange
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/02—Impregnation, coating or precipitation
- B01J37/0215—Coating
- B01J37/0217—Pretreatment of the substrate before coating
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/02—Processes for making hydrogen or synthesis gas
- C01B2203/0205—Processes for making hydrogen or synthesis gas containing a reforming step
- C01B2203/0227—Processes for making hydrogen or synthesis gas containing a reforming step containing a catalytic reforming step
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/06—Integration with other chemical processes
- C01B2203/066—Integration with other chemical processes with fuel cells
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/08—Methods of heating or cooling
- C01B2203/0805—Methods of heating the process for making hydrogen or synthesis gas
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/10—Catalysts for performing the hydrogen forming reactions
- C01B2203/1041—Composition of the catalyst
- C01B2203/1047—Group VIII metal catalysts
- C01B2203/1064—Platinum group metal catalysts
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/10—Catalysts for performing the hydrogen forming reactions
- C01B2203/1041—Composition of the catalyst
- C01B2203/1076—Copper or zinc-based catalysts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2250/00—Fuel cells for particular applications; Specific features of fuel cell system
- H01M2250/30—Fuel cells in portable systems, e.g. mobile phone, laptop
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02B90/10—Applications of fuel cells in buildings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/52—Improvements relating to the production of bulk chemicals using catalysts, e.g. selective catalysts
Definitions
- the present invention relates to a microreactor, and more particularly to a microreactor for advancing a desired process by a mature female.
- Background branch art The present invention relates to a microreactor, and more particularly to a microreactor for advancing a desired process by a mature female.
- reactors using soot are itffl in various fields, and are optimally designed according to the purpose.
- microreactors have been developed in which microchannels are formed in metal ® f, silicon fiber, ceramics, etc., and a catalyst is purchased in the microchannel (Japanese Patent Laid-Open No. 2000-025-20). 1 4 3 ⁇ 4 ⁇ Satoshi.
- the temperature may become a high temperature of 200 ° CJ ⁇ ⁇ due to heating by the body to advance the desired J3 ⁇ 4S by the supported catalyst or separation by. For this reason, when the microreactor is used for portable equipment, it is necessary to insulate between the microreactor in the high temperature state and the surrounding equipment and soldering.
- a known heat insulating material such as glass wool or ceramic material is arranged around the microreactor in a high temperature state, and the thickness is high in order to make the HIS degree of the failure a normal temperature to about 50 ° C.
- a ⁇ material is necessary, and a small size cannot be used for a mobile device that is required. Disclosure of the invention
- the object of the present invention is the heat of outside sound!
- the objective is to provide a highly reliable microreactor that enables high-efficiency touch while suppressing ⁇ .
- the microreactor of the present invention is provided on at least one surface of a vacuum casing, a microreactor body placed in an S3 ⁇ 4 sealed cavity in the vacuum casing, and a 3 ⁇ 4v chloroactor body.
- the 5 microreactor body has a raw inlet and a gas outlet, and the inlet is separated from the outside of the housing by the raw material, and the ⁇ 3 ⁇ 4 ⁇ 'outlet is a gas.
- the outside of the casing and the length of the 5 getter suspension are configured to have a heel, a body and a getter material layer that are arranged non-rotatably with respect to the S3 ⁇ 4 ⁇ . .
- the so-called anti-modulation of the s getter is a metal anti-
- the structure is such that there are 15 layers of the front and 5 getters through the electrical layer.
- the 5th getter is a metal substrate that constitutes the body of the microreactor S, and the metal substrate is electrically connected to the metal substrate via the metal layer.
- the body and the getter material layer were arranged.
- the self-reacting microreactor main body is formed of a pair of metal dies jt ⁇ ® formed of at least one of a pair of metal dies and a so-called 51 pair of anti-metals. It comprises a configured tunnel, a leaked layer formed in the tunnel, and a soot trapped by the im purchased layer, so-called source inlet and soot discharge outlet are entitled s tunnel, so-called soot layer
- the structure is such that it is an awakening trap.
- the 5 microreactor main body is composed of three or more metal layers, L0 formed in the inside, an eaves layer formed in ⁇ 3 ⁇ 43 ⁇ 4, and an eaves formed in the layer. At least one of the so-called metal si sites not located in the outermost layer was formed in at least one of them; and a through hole formed in! ⁇ .
- the knitting source inlet and the basin ⁇ 'discharge outlet were constructed as 3 ⁇ 43 ⁇ 4, and the tii mist layer was composed of inorganic oxide.
- Ken ⁇ is configured to be made through a fence. It was.
- the through-hole formed in the trench is formed such that there is iic.
- the microreactor body since the microreactor body is located in the m3 ⁇ 4 sealed cavity of the housing and the sealed cavity is maintained by the getter material layer opposite to the getter, the microreactor body is at a high temperature :) Even if it becomes ⁇ , s3 ⁇ 4 sealed cavity is the mouth of the reactor. The heat transfer from the reactor body to the outside is effectively cut off, and the effect of this sealed cavity is better than that of f ⁇
- the microreactor ( ⁇ casing) ⁇ H ⁇ can be brought to room temperature to 50 ° C ii without increasing the size of the vacuum casing.
- FIG. 1 is a perspective view showing an embodiment of the microreactor of the present invention.
- FIG. 2 is an enlarged cross-sectional view of the microreactor shown in FIG. 1, taken along line ⁇ - FIG. 3 is a difficult view showing an example of a microreactor body constituting the microreactor of the present invention.
- Figures 4 and 4 are ifcWi® diagrams along the A-A line of the microreactor body shown in Figure 3.
- Fig. 5 is a perspective view showing 1 ⁇ 1 with the main body of the microreactor shown in Fig. 3 separated from each other.
- Figure 6 shows the structure of the getter heating substrate that makes up the microreactor shown in Figure 1 and Figure 2. Plane [3 ⁇ 4.
- FIG. 7 is a 3 ⁇ 4M diagram corresponding to FIG. 4 and showing another form of the microreactor body constituting the main part.
- FIG. 8 is a $ 4 ⁇ view showing another form of the microreactor body constituting the present invention.
- FIG. 9 is an enlarged view of the microreactor body shown in FIG.
- Fig. ⁇ 0 is a diagram of the microreactor body shown in Fig. 8 along the DD line.
- FIG. 11 is a perspective view showing the microreactor main body shown in FIG. 8 in a state where five pieces of 3 ⁇ 45 pieces are separated from each other.
- FIG. 12 is a perspective view showing another embodiment of one microreactor main body constituting the present invention.
- Fig. 13 is a diagram of the microreactor body shown in Fig. 12 along the ⁇ - ⁇ line.
- FIG. 14 is a perspective view showing a state in which six sheets of the microreactor body shown in FIG. 12 are separated from each other.
- FIG. 15 is a side view corresponding to FIG. 9 and showing another embodiment of the main body of the microreactor constituting the present invention.
- FIG. 16 is a perspective view showing a state in which five metal webs constituting the main body of the microreactor shown in FIG. 15 are separated from each other. Best Mode for Invention
- FIG. 1 is a perspective view showing one embodiment of the microreactor of the present invention
- FIG. 2 is an enlarged sectional view taken along the line A-A of the microreactor shown in FIG.
- the microreactor 1 is arranged in a vacuum casing 2, a microreactor body 4 disposed in an S3 ⁇ 4 sealed cavity 3 in the vacuum casing 2, and the microreactor body 4.
- the getter separation 6 is composed of a metal plate 7, a so-called storm layer 8 formed on the metal fiber 7, and a body 9 formed on the metal layer 8 without any mutual damage. It has a getter material layer 10 and an anti 7 is the microreactor body 4 Has been aged.
- FIG. 1 is a perspective view showing one embodiment of the microreactor of the present invention
- FIG. 2 is an enlarged sectional view taken along the line A-A of the microreactor shown in FIG.
- the microreactor 1 is arranged in a vacuum casing 2, a microreactor body 4 disposed in an S3 ⁇ 4 sealed cavity 3 in the vacuum cas
- the casing 2 is for providing the vacuum-sealed cavity 3 around the microreactor body 4 and can be made of, for example, stainless steel, copper, aluminum, titanium, or cocoon.
- the dog in g3 ⁇ 4case 2 has a rectangular parallelepiped shape in the figure.
- 3 ⁇ 4 The inner wall and shape of the housing 2 can be described in consideration of the shape of the microreactor body 4 and the heat insulation action. For example, 3 ⁇ 4 the thickness of the sealed cavity 3 (the microreactor main body 4 and the vacuum housing 2 S
- the microreactor body 4 has an inlet 19a and a gas outlet 19b.
- the raw material inlet 19a is connected to the outside of the vacuum casing 2 by the raw material supply pipe 5A.
- the outlet 19 b is made outside the vacuum housing 2 by the gas discharge pipe 5 B.
- FIG. 3 is a first view showing an example of the microreactor body 4 constituting the microreactor 1 of the present invention
- FIG. 4 is an enlarged view of the microreactor body 4 shown in FIG. is there. 3 and 4
- the microreactor body 4 is composed of one side 1 4 a with a microscopic surface 15 or “B-formed metal Si 1 4 and one side 1 6 a with a side surface 1 7
- the formed 1 1 1 6 has a body 1 2 in which the micro-groove 15 and the micro-groove 1 7 are opposed to each other.
- ⁇ I 5 and 1 7 are formed as a tunnel-like flow 1 3, and the inner wall of this tunnel-like flow 1 3 is formed with a contact iliiit layer 1 8 or 3
- a jump C is trapped in the soot layer 1 8.
- the tunnel 3 communicates with the raw material introduction port 1 9a and the gas exhaust port 19b provided on the two opposing end surfaces. ing.
- FIG. 5 is a perspective view showing t ⁇ i in which the metal substrate 14 and the metal substrate 16 of the microreactor body 4 shown in FIG. 3 are separated from each other.
- m ⁇ mm ⁇ 8 is omitted.
- Satoshi Tsuruta [VI 5 17 is formed in a shape that folds 1800 degrees while meandering.
- the mWm ⁇ 5 and the micro-groove portion 17 have a pattern shape that is in a relation to the contact of the metal fabric 14, 16.
- the positions of the dog, the material inlet 19a and the force outlet 19b in the tunnel 3 of the microreactor body 4 are not shown in the illustrated example. Therefore, the positions of the raw material 5 ⁇ and the gas exhaust pipe 5 B are not limited to those shown in FIGS. 1 and 2.
- the microreactor main body 4 is made up of 11 11 and 14 with the addition of Microda 5 and 17 that make up the wall surface of Nunn 3! ⁇
- Forehead and old forehead materials can be scaled, for example, stainless steel, copper, aluminum, titanium, iron, iron, etc. Good.
- the processing of ⁇ ⁇ ⁇ m 5, 17 is a forehead and a strong ⁇ M 2 can be obtained by ⁇ 3 ⁇ 4 ⁇ .
- the affairs of Satoshi Hamada m 5, 17 are added!
- sigma ig ⁇ l 2 can be obtained by laser separation and ⁇ mouth-up.
- the thickness of the metal anti-14, 16 is the size of the microreactor main body 4
- ⁇ can be set in the range of 5 0 to 5 0 0 0 ⁇ mig.
- Hida j gfn 5, 1 7 formed on metal anti-14, 16 is an open dog as shown in Fig. 5
- It can be made into any shape that makes the flow of contact with the catalyst C longer, and the flow of the material in contact with the catalyst C. .
- the shape of the inner wall surface of Tsuruta ⁇ 15 and 17 at the tunnel perpendicular to the flow direction of the tunnel ⁇ T ⁇ 13 is preferably an arc shape, a semicircular shape, or a U-shape:
- the diameter of the tunnel 3 composed of such fine fields; 3 ⁇ 4g [n 5, 17 can be set, for example, within a range of about 100-200 ⁇ m; It should be in the range of ⁇ 300 mm.
- Leakage layer 18 is a solid material, for example, an alumina ( ⁇ 1 2 0 3 ) coating formed according to dimensions, an aluminum lay (AI 2 0 3 ⁇ 2 Si 0 2 ) coating, etc. Can do.
- the thickness of such a catalyst soot layer 18 can be obtained, for example, in the range of 10 to 50 mfgg.
- the catalyst C can be appropriately selected according to the iiffl purpose of the microreactor 1. For example, when used for hydrogen production, the catalyst C is reformed such as Cu—Zn system, P d—Zn system, etc. catalysts, P t, can be used P d, N i 0, C o 2 0 3, C u retardant of O, etc. 'Momonakadachi. FIG.
- FIG. 6 is a plan view of the getter-one heat generating substrate 6 constituting the microreactor 1 !! of the present invention.
- the suspension 9 is formed on the electrode layer 8 in a shape that is imprinted while being bent by 1800 degrees, and the body 9 has two positions. Is electrode 9a, 9 & or 1 ⁇ . And this separation 9 and non- ⁇ t ⁇ J woven (5 in the illustrated example) single getter material layer .10 or ⁇ ⁇ # layer 8 are formed.
- the getter material layer 10 is shown with wrinkles.
- the metal shell 7 can be scaled with the microreactor body 4, such as stainless steel, copper, aluminum, titanium, iron, iron, etc. It's okay.
- the microreactor body 4 is configured.
- the electrode layer 8 can be made of, for example, polyimide, ceramics (Al 2 0 3 , S i 0 2 ), or the like. Further, the electrode layer 8 may be a metal oxide formed by anodizing the metal substrate 7.
- the thickness of the electrowoven layer 8 can be determined in consideration of the difficulty of the material to be used. For example, the thickness can be set in the range of 0.5 to 150 m2.
- the heating element 9 is for heat generation necessary for the touch of the raw material, such as carbon pace ⁇ , nichrome (Ni-C “alloy”), W, Mo, Au, etc.
- the shape of the housing 9 is, for example, as shown in Fig. 6, in which a thin wire having a width of 10 to 2 0 0 ⁇ ⁇ ⁇ ⁇ is drawn on the electro-mi ⁇ layer 8
- the present invention is not limited to such a shape and can be appropriately formed.
- the energization electrodes 9 a and 9 a formed on the heating element 9 can be formed using a conductive material such as A u, A g, P d, P d -A g, The same material may be used.
- the electrodes 9a and 9a are connected to the outer casing of the vacuum casing 2 by a not-shown cage.
- the getter material layer 10 is for maintaining the vacuum sealed cavity 3 of the vacuum casing 2 in a vacuum state, and is a non-contact crane with respect to the body 9. Examples of getter materials to be iiffl include at least one of Zr, Ti, Ni, Pd, and Pt, or two or more of these metals.
- the shape / ⁇ method of the getter material layer 10 for example; it can be formed by screen stamping using a pace punch containing the getter material as described above. Thickness is ⁇ . It is preferable to appropriately adjust the thickness in the range of ⁇ 1500 m.
- the getter material layer 10 is made of a true material using the above getter material. It can also be formed by swelling, and in this case, it is preferable that the thickness is suitably in the range of 0.1 to 5 m. In the case of forming the pattern of the getter material layer 10 according to the previous method, it can be performed, for example, by a3 ⁇ 4vapor deposition using a metal mask.
- the microreactor main body 4 is located in the E3 ⁇ 4 sealed cavity 3 of the casing 2 and the getter material layer 10 of getter ⁇ i anti 6 Be thighed. For this reason, even if the microreactor body 4 is in a high temperature state, the vacuum-sealed cavity 3 is removed from the microreactor body 4
- Micro reactor 1 (S3 ⁇ 4housing 2) tHj displayed at room temperature It can be about ⁇ 50 ° C.
- the housing 2 having the opening and the microreactor main body 4 are arranged in a relaxed manner, the microreactor main body 4 is disposed in the g3 ⁇ 4housing 2 and the microreactor main body 4 is arranged.
- Reactor body 4 original, half 4 # inlet 1 9a is made external to a3 ⁇ 4 housing 2 by raw material supply pipe 5A, and gas outlet 1 9b is made by gas exhaust pipe 5B. It is connected to the outside, and the electrodes 9 a and 9 a of the body 9 are rubbed against the outside source to close the opening sound of the vacuum casing 2.
- the suction port provided in the housing 2 (by sucking from the figure, the suction port in the E3 ⁇ 4 housing 2 is set as the sealing cavity 3, and the suction port is sealed.
- the above suction port is provided :: 3 ⁇ 4 S3 ⁇ 4 Opening of housing 2! 3 ⁇ 4
- the microreactor 1 of the present invention can be removed.
- the external force P iM of the microreactor 1 can be obtained without passing through the getter material layer 10 by passing the electricity through the getter anti 6 ⁇ 3 ⁇ 4 body 9. Yes, microreactor! Initial activity amount of getter material layer 10.
- the getter material layer 10 is positioned in the vicinity of the ⁇ body 9, so that the microreactor operation Bt0 getter material layer 10 can be reactivated and the vacuum sealed. Cavity 3 is high 3 ⁇ 4 ⁇ burned.
- the getter material layer 10 is integrated into the getter layer 6, the fixing force to the microreactor 1 is substantial. Further, in the microreactor 1 of the present invention, when ⁇ is performed in the microreactor main body 4, the getter material layer 10 can be regenerated and steadily generated by using this, Energy efficiency is very high.
- FIG. 7 is a vertical cross-sectional view corresponding to FIG. 4 and showing another form of the microreactor body constituting the microreactor 1 of the present invention.
- the microreactor body 4A is composed of a metal plate 2 4 formed on one side 2 4 a with 5 ⁇ ⁇ ⁇ and the surface 2 4 of the base plate 2 4 so as to cover the 2 ⁇ 2 5 It has a jt ⁇ * 2 2 consisting of an aged crane (with cover) 2 6. Inside this 2 is formed a tunnel 3 ⁇ 4 » ⁇ 2 3 composed of a micro-groove 25 and a fabric 26, and a leakage layer 2 on the inner wall of ⁇ g 3 ⁇ 4g 25 8 This leak layer is 2-8. Has been deceived.
- the metal ridge 2.4 of the metal fabric 2.4 may have a shape that folds 180 degrees and meanders, similar to the cocoons 5 and 17 shown in Fig. 5. (Yes.
- the awakening shape of the solitary difficulty 25 may be a circular shape, a semicircular shape, a U shape, etc., and one open end of the tunnel superior S ⁇ 23 is the original.
- Such a microreactor main body 4 A is made of the same material as the metal cloth 24, ⁇ mmsi (cover material) 26, which is made of ⁇ 3 ⁇ 43 ⁇ 4 can do.
- the thickness of ⁇ 24 may be appropriately determined in consideration of the size of the microreactor body 4 A, the heat capacity of the material to be formed, the characteristics of heat conduction, the size of the formed micro-groove 25, etc. For example, it can be in the range of 5 0 to 5 0 0 0 ⁇ .
- the thickness of ⁇ 11 anti-26 can be appropriately set to 1S in consideration of the material ⁇ , for example, in the range of 2 0 to 2 00 mfi.
- the contact i S layer 28 constituting the microreactor main body 4A can be the same as the above-described il fiit layer 1 & in the f-type.
- Day 8 is a view showing another form of the microreactor main body that constitutes the microreactor of this month
- Fig. 9 is a diagram of the microreactor main-C line shown in Fig. 8
- 10 represents the D—D line of the microreactor body shown in FIG. FIG. 8 to 10
- the microreactor body 4 B has five metal plates 34, 35, 36, 37, 38, or 32, which are made up of two layers.
- one layer, ⁇ 1S3 ⁇ 434 functions as a cover and has three through-holes 34B at predetermined positions.
- the three anti-35, 36, and 37 anti-m-layers that are not located in the m-layer and the outermost metal anti-vibration 38 are placed on one side of three 3 ⁇ 4gP35A, 36A, 37A, and 38A that are sandwiched through IHI.
- through holes 35B, 36B, 37B, 38B are provided in the flanges 35A, 36A, 37A, 38A, respectively.
- 4 B is the original inlet 39 a of the three weaves 33 A, 33 B, 33 C, and the three through holes 38 B of the 3 ⁇ 4 ⁇ layer ⁇ 3 ⁇ 4 substrate 38 are 3 ⁇ 3 ⁇ 4 5iS & 33 A, 33B, 33 C gas outlet 39 b.
- FIG. 11 is a perspective view showing a state where the five H fibers 34, 35, 36, 37, 38 constituting the microreactor body 4B shown in FIG. 8 are separated.
- the Mm retaining layer 40 is omitted.
- the metal substrate 35, 36, 37, 38 is formed with three rows of grooves 35A, 36A, 37A, 38 A through Hi!
- One end of each of A, 36 A, 37 A, and 38 A is a penetrating element, and 35B, 36B, 37B, and 38B are provided.
- Fig. 11 is a perspective view showing a state where the five H fibers 34, 35, 36, 37, 38 constituting the microreactor body 4B shown in FIG. 8 are separated.
- the Mm retaining layer 40 is omitted.
- the metal substrate 35, 36, 37, 38 is formed with three rows of grooves 35A, 36A, 37A, 38 A through Hi!
- One end of each of A, 36 A, 37 A, and 38 A is a penetr
- the five metal plates 34, 35, 36, 37, 38 that make up the microreactor body 4 B can be decorated with the same materials as io mm 4, 16.
- the thickness of the metal loose 35, 36, 37, 38 is the size of the microreactor body 4 B, the heat capacity, the heat transfer, etc., required 3 ⁇ 4S 35A, 36A, 37A, 38 A Although it can be appropriately determined in consideration of the size and the like, for example, it can be in the range of 50 to 5000 tm fgg. Further, the thickness of the metal rod 34 can be set to S3 ⁇ 4TT in consideration of the material to be processed, and can be, for example, in the range of 20 to 2000 tm.
- the purchase layer 40 that constitutes the microreactor body 4 B can be made the same as the jumping imm ⁇ 8 of ⁇ ⁇ .
- the microreactor body 4 B of ⁇ ⁇ there is no restriction on the flow direction of ⁇ - »33 ⁇ , 33 ⁇ , and 33C fluid flow. You may head to the opposite side.
- the three raw material inlets 39a and the three gas outlets 39b are reversed.
- the positions of the three raw material inlets 39a and the three gas outlets 39 are not limited to the illustrated example.
- the awakening layer 40 may be arranged on the surface of the fiber 34 (the surface tb on the side of the surface 35), and the dew C may be sit on the layer 40. Further, the contact layer 40 may be placed on each ⁇ 1 anti-35, 36, 7 ⁇ Dm (the surface exposed to 3 ⁇ 43 ⁇ 4P36A, 37 A, 38 A), and seismic C may be applied to this iSi layer 40. . This further increases the iSC's peristalsis, improving reaction efficiency and effective use of space.
- FIG. 12 is a perspective view showing another form of the microreactor body constituting the microreactor of the present invention
- FIG. 13 is a view taken along the line E-E of the microreactor body shown in FIG. FIG.
- the microreactor main body 4 C has six metal substrates 44, 45, 46, 47, 48, 49 or a joined body 42 in which two layers are joined.
- Fig. 14 shows the $ 4 ⁇ view showing «11 with six mRA 4, 45, 46, 47, 48, 49 separated from the microreactor body 4 C shown in Fig. 12. It is. In FIG. 14, the Raji layer 51 described later is omitted.
- the metal substrate 44 which is the outermost layer, functions as a cover sound and has three penetrations in a row in the middle. It has 44 holes.
- the four metal substrates 45, 46, 47, 48 that are not located on the outermost layer and the metal substrate 49 on the outermost layer are arranged in three rows of ⁇ 5 ⁇ , 46 A, 47 A, respectively.
- 48A and 49A are provided on one side (metal substrate 44 side).
- Each of 47, 49 [M 5A, 47 A, 49 A has one Ki? L45 B, 47 B, 49 B or almost one at the center.
- each of the two metal strips 46 and 48 is provided with two through holes 46 B and 48 B, one on each side 46 A and 48 A. And the three rows of ⁇ 45A, 46A, 47 A, 48A, 49 A
- the 5 keys of 3 453 ⁇ 4; 3 ⁇ 4g ⁇ 43 A, 43 B, and 43 C of the above statement 5 are respectively ⁇ 45 ⁇ , 46 A, 47 A of 45, 46, 4.7, 48, 49 , 48 A, 49 A, and 4 key chains 45, 46, 47, 48 through holes 45 B, 46 B, 47 B, 48 B on the inner wall, 3 ⁇ 43 ⁇ 43 ⁇ 4 ⁇ C is entered in this layer 51.
- the three through-holes 44 B of the metal fabric 44 are the raw material inlets 50 0 a of 3 * ⁇ ; 3 ⁇ 4S ⁇ 43A, 43 B, 43 C, and 3 ⁇ 4 ⁇
- Each through hole 49 B is a gas outlet 50 b for 3 ⁇ ⁇ 4343, 43 ⁇ , 43C.
- the six metal substrates 44, 45, 46, 47, 48, and 49 that constitute such a microreactor body 4C may be made of the same material as that of the above-described metal substrates 14, 16, and 6. it can.
- the thickness of the metal Si anti-45, 46, 47, 48, 49 is the size of the microreactor body 4 C, gold llffl SWm> 3 ⁇ 4 amount, heat transfer » ⁇ glue, required 4 5A , 46A, 47A, 48A, 49A in consideration of the size, etc., for example, it can be said in the range of 50 to 5000 111 separation.
- the thickness of the metal substrate 44 can be expressed in consideration of the material to be Hffl, for example, in the range of about 20 to 2000 m.
- the purchase layer 51 constituting the microreactor body 4C can be the same as the is rnom layer .18.
- the positions of the three raw material inlets 50a and the positions of the three gas outlets 50a are not limited to the illustrated example.
- a leakage layer 51 may be arranged on the surface of the metal St anti-44 ( ⁇ i side on the P45A side), and ⁇ C may be gffed on this layer 51, and each metal anti-45, 46, 4 7 and 48 (surfaces exposed to Gi3 ⁇ 4 46A, 47 A, 48 A and 49 A) may also have layer 51, and ⁇ C may be printed on this oil layer 51. : This further increases the carrying capacity of Mi3 ⁇ 4C, improving the efficiency and space efficiency.
- FIG. 15 is a longitudinal sectional view corresponding to FIGS. 9 and 13 showing another embodiment of the microreactor body constituting the microreactor of the present invention.
- the microreactor main body 4D has five pieces of ⁇ H fabric 64, 65, 66, 67, 68, or aged ⁇ ( ⁇ ; 62.
- Fig. 16 Fig. 15 is a view showing ⁇ ⁇ with five metal plates 64, 65, 66, 67, 68 separated from the main body 4D shown in Fig. 15. In Fig. 16, it will be described later. Yes Layer 70 is omitted.
- one of the top layers, ⁇ 64 functions as a cover, and 6 It is equipped with one 3 ⁇ 4 ⁇ 64 mm straddling 5 A and one through hole 64 B in the approximate center.
- the three metal substrates 65, 66, and 67 that are not positioned on the outermost layer are each provided with six 3 ⁇ 4gP65 A, 66 A, and 67 A on one surface (the metal rod 64 side).
- the metal layer 68 of the 3 ⁇ 4 layer has one ridge 68 A corresponding to the ridge 64 A of the substrate 64 on one surface (the metal fiber 64 side).
- through holes 65 B, 66 B, and 67 B are provided in the three grooves 65, 66, and 67, respectively.
- the metal substrate 68; 8A has one penetrator 68B. And each 3 ⁇ 4S 65 A, 66 A, 67 A,
- 68 A is arranged in the stacking direction through ⁇ [through holes 65 B, 66 B, 67 B, respectively. Therefore, after entering the groove 64 A from one through hole 64 B of the metal substrate 64, the groove 5 A ⁇ through hole 65 B ⁇ 66 A ⁇ through hole 66 ⁇ ⁇ ⁇ 67 ⁇ ⁇ through hole 67 ⁇ ⁇ »Six independent- ⁇ & 63 are formed, up to 68 ⁇ .
- each of the four metal substrates 65, 66, 67, 6 8 constituting the above six independent flow paths 63 3 ⁇ 4 ⁇ 65 mm, 66 A, 67 A, 68 A and three metal fibers 65, 66, 67 penetration
- a layer 70 or M is formed, and igC is formed in the holding layer 70.
- one hole 6 4 B of the metal fiber 6 4 is the original inlet 6 9 a of the flow path 6 3
- one through hole 6 8 B of the metal layer 6 8 B of the 3 ⁇ 4 ⁇ layer is 6 3 Gas outlet 6 9 b.
- the 5 metal substrates 6 4, 6 5, 6 6, 6 7, 6 & 6 that constitute the microreactor body 4 D are the same as the above-mentioned metal substrates 14, 16. You can ⁇ ffl materials.
- the thickness of the metal substrates 6 5, 6 6, 6 7 and 6 8 is the size of the microreactor body 4 D, the amount of H material * 4013 ⁇ 4, heat transfer, etc. , 6 6 A, 6 7 A, & 8 A, etc., can be used in the range of 5 0-5 0 0 0, mfig. Further, the thickness of the metal substrate 64 can be appropriately described in consideration of the material to be polished, the required size of 64 A, and the like, for example, in the range of 5 mm to 2000 mig You can do it.
- This microreactor main body 4D is made up of the layer 70, which is the above-mentioned simple! Same as Sit layer 1-8.
- a catalyst support layer 70 may be provided also in the groove portion 6 4 A of the metal substrate 64, and ft3 ⁇ 4! 3 ⁇ 4C may be provided to the support layer 70, and each metal Si layer 6 5, 6 6 , 6 7 may have a leaking layer 70 on the surfaces 6 7 A and 6 8 A), and this awakening layer 70 may be capped. This further increases the dynamics of ⁇ c, improving efficiency and effective use of space.
- micro-reactor of the ⁇ ⁇ microreactor is merely an example, and the present invention is not limited to these.
- Example 1
- each set of S US 31 6 LSt was exposed through a photomask, and then exposed to a large amount of resist and developed with sodium hydrogen night.
- the opening of the stripe dog having a width of 500 ⁇ is arranged with a pitch of 2000 ⁇ , and a stripe-like opening is formed.
- a resist wrinkle pattern was formed that continued alternately at the end.
- a pair of SUS 31 6 L wafers is formed on one side with a width of 1 000 tm, a depth of 6 50 ⁇ and a length of 20 mm. Formed as shown in 3 ⁇ 45 in the adjacent fine paddle fiber (shape of meandering while being folded back 180 degrees as shown in ⁇ 5; TO's ⁇ ⁇ 220 mm). This transport field; Flow ⁇ (The shape of the inner wall surface of the ridge perpendicular to the flow direction was a circle shape.
- the microreactor body (outside dimensions 25mmX 25mmX approx. 2.1 mm) was made.
- the inner rule is a rectangular parallelepiped of 35 mm X 35 mm X 4.1 mm, and the case where the 35 mm X 35 mm surface is an opening is used. did.
- one through-hole for inserting the raw material supply pipe, two through-holes for inserting SE ⁇ , and a suction port were formed on the wall of 35mmX4.1mm.
- a 34 mm x 34 mm lid was made to close the opening sound. This lid was formed with one through hole for inserting the gas exhaust pipe.
- the raw material inlet tube and the gas outlet tube were inserted into the original 1 inlet and the gas outlet of the microreactor main body, respectively, and the body electrode was covered. Then, the main body of the microreactor was placed in the casing so that the raw material score was inserted into the above-mentioned fistula and ⁇ protruded outside the casing. In addition, the metal 3 ⁇ 4
- suction was performed from the P and the pulling port to obtain a vacuum degree of ⁇ 10-2 Pa. Thereafter, the bow I port was sealed with a scissors to form a vacuum-sealed cavity.
- the body was energized (150 mA) and let it darken, and an initial layer formation of the getter material layer was performed. As a result, the microreactor of the present invention was obtained.
- each SUS 31 6 L substrate was provided with a mask with three rows of 7 mm pitch ridges (6 mm x 20 mm) on the resist coating 1 on the surface of the shape / itT.
- each SUS 31 6 LS ⁇ on the opposite side of the resist coating fl ⁇ is provided with a mask with three circular sections of 4 mm in 7 mm pitch. did.
- the resist coating film was exposed through this mask, and developed with i ⁇ ffl of a sodium bicarbonate solution. As a result, each S US 31 6 ⁇
- each SU S 31 6 L was etched from both sides (3 minutes) with the following cattle using the ⁇ 1 resist pattern as a mask.
- the alumina surface was formed by the plasma spray method on the surface of the four S US 31 6 LSSs formed through and through ⁇ .
- the resist wrinkle pattern was removed using a ⁇ saponified sodium solution, and 7) ⁇ ahead.
- an alumina inching lift-off was performed, and an alumina leaking layer (thickness 30 m) was formed only in the soot and the Kit hole.
- the SUS ⁇ 6 6 LSI anti-through-hole that becomes the 3 ⁇ 4 ⁇ layer was polished by polishing to remove alumina; ⁇ -size membrane, and formed a through-shaped through-hole with an opening diameter of 4 mm .
- SUS 31 6 L which has a thickness of 10 O / m, was attached as a canove, and three through holes were formed on this SUS 31 6 L by forming a resist pattern and etching from one side. .
- This il hole had one opening of 4 mm, ffe ⁇ opening of 3.5 mm, and formation pitch of 7 mm.
- the four S US 31 6 L films were stacked and aligned so that the heel side was in the same direction and the penetrating ⁇ W crossing was on the heel side.
- the top SUS31 6 L S US 31 as a cover attached to cover the opposite side of P and to be on the through ⁇ ⁇ ' ⁇ side A 6 L fabric was laminated and aligned (see Fig. 9).
- a ⁇ -type getter material (SAES Getters Co., Ltd.) was printed by screen printing in a desired pattern, and a 100 m thick getter material layer was obtained as shown in FIG. It was formed on the ⁇ layer in non-contact with the 3 ⁇ 4 body, which formed a regetter separation on one side of the 3 ⁇ 4 ⁇ .
- the microreactor body (outside dimensions 25mmX 25mmX approximately 4.1 mm) was installed.
- the inner rule is a rectangular parallelepiped of 35 mm X 35 mm X 6.1 mm, and the case where the 35 mm X 6.1 mm surface is an opening is used. .
- 35 mm x 35 mm 3 Kis for inserting the raw material on the il surface, 2 through holes for inserting ⁇ 3 ⁇ 41 and P and inlet were formed.
- a lid of 34mmX6.Omm was covered with three through-holes for inserting the gas exhaust pipe.
- the raw material ⁇ table and gas discharge pipe were placed in the three raw 1 ⁇ inlets and three gas outlets of the microreactor body, respectively, and I ⁇ was placed in the housing electrode.
- the microreactor main body was inserted into the casing so that the three resin raw materials were respectively inserted into the through holes and ⁇ protruded outside the casing.
- ⁇ which was wound on the electrode of the woven body, was inserted into the above-mentioned through hole and kneeled on the outer sound field.
- the lid member was closed at the opening of the casing so that the gas discharge pipe was inserted into the through hole, thereby obtaining a casing.
- Spread cattle were the same as above.
- «II the inner wall of the housing and the microreactor main body were not in contact with each other through a space with a width of 1 to 5 mm.
- the present invention can be used for applications such as reforming methanol, hydrogen consisting of oxygen, and the like in which a desired catalyst is advanced by a supported catalyst.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Sustainable Energy (AREA)
- Sustainable Development (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- General Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Hydrogen, Water And Hydrids (AREA)
- Micromachines (AREA)
- Catalysts (AREA)
- Fuel Cell (AREA)
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/282,074 US7879298B2 (en) | 2006-11-24 | 2007-11-20 | Microreactor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006316710A JP2008126191A (ja) | 2006-11-24 | 2006-11-24 | マイクロリアクター |
JP2006-316710 | 2006-11-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008062896A1 true WO2008062896A1 (fr) | 2008-05-29 |
Family
ID=39429823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/072883 WO2008062896A1 (fr) | 2006-11-24 | 2007-11-20 | Microréacteur |
Country Status (6)
Country | Link |
---|---|
US (1) | US7879298B2 (ja) |
JP (1) | JP2008126191A (ja) |
KR (1) | KR20090006071A (ja) |
CN (1) | CN101472677A (ja) |
TW (1) | TW200830602A (ja) |
WO (1) | WO2008062896A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019122101A1 (de) * | 2017-12-21 | 2019-06-27 | Hte Gmbh The High Throughput Experimentation Company | Reaktorsystem für durchflussreaktionen |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202010000262U1 (de) * | 2009-05-12 | 2010-05-20 | Lonza Ag | Strömungsreaktor mit Mikrokanalsystem |
KR101752669B1 (ko) * | 2013-12-10 | 2017-06-30 | 삼성전자주식회사 | 진공단열재 및 이를 포함하는 냉장고 |
CN105171701A (zh) * | 2015-07-20 | 2015-12-23 | 中国科学院上海光学精密机械研究所 | 高洁净真空位移台 |
JP6372868B2 (ja) * | 2016-05-31 | 2018-08-15 | Idein株式会社 | 報酬分配方法、報酬分配システム及び端末 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003043387A (ja) * | 2001-04-30 | 2003-02-13 | Agilent Technol Inc | バブル光スイッチの熱効率を改善する高効率の断熱 |
JP2003290649A (ja) * | 2002-03-29 | 2003-10-14 | Casio Comput Co Ltd | 小型化学反応装置 |
JP2004290880A (ja) * | 2003-03-27 | 2004-10-21 | Casio Comput Co Ltd | 小型反応器 |
JP2004537425A (ja) * | 2001-08-06 | 2004-12-16 | マサチューセッツ・インスティチュート・オブ・テクノロジー | 熱効率にすぐれるマイクロマシンデバイス |
JP2005097089A (ja) * | 2003-09-05 | 2005-04-14 | Dainippon Printing Co Ltd | 水素製造用のマイクロリアクターおよびその製造方法 |
JP2007176760A (ja) * | 2005-12-28 | 2007-07-12 | Casio Comput Co Ltd | 反応装置および反応装置の製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100783168B1 (ko) | 2003-02-06 | 2007-12-07 | 다이니폰 인사츠 가부시키가이샤 | 마이크로 리액터 및 그 제조방법 |
US7572417B2 (en) * | 2005-09-29 | 2009-08-11 | Casio Computer Co., Ltd. | Reactor |
-
2006
- 2006-11-24 JP JP2006316710A patent/JP2008126191A/ja active Pending
-
2007
- 2007-11-20 KR KR1020087022702A patent/KR20090006071A/ko not_active Application Discontinuation
- 2007-11-20 US US12/282,074 patent/US7879298B2/en not_active Expired - Fee Related
- 2007-11-20 WO PCT/JP2007/072883 patent/WO2008062896A1/ja active Application Filing
- 2007-11-20 CN CNA2007800234040A patent/CN101472677A/zh active Pending
- 2007-11-23 TW TW096144605A patent/TW200830602A/zh not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003043387A (ja) * | 2001-04-30 | 2003-02-13 | Agilent Technol Inc | バブル光スイッチの熱効率を改善する高効率の断熱 |
JP2004537425A (ja) * | 2001-08-06 | 2004-12-16 | マサチューセッツ・インスティチュート・オブ・テクノロジー | 熱効率にすぐれるマイクロマシンデバイス |
JP2003290649A (ja) * | 2002-03-29 | 2003-10-14 | Casio Comput Co Ltd | 小型化学反応装置 |
JP2004290880A (ja) * | 2003-03-27 | 2004-10-21 | Casio Comput Co Ltd | 小型反応器 |
JP2005097089A (ja) * | 2003-09-05 | 2005-04-14 | Dainippon Printing Co Ltd | 水素製造用のマイクロリアクターおよびその製造方法 |
JP2007176760A (ja) * | 2005-12-28 | 2007-07-12 | Casio Comput Co Ltd | 反応装置および反応装置の製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019122101A1 (de) * | 2017-12-21 | 2019-06-27 | Hte Gmbh The High Throughput Experimentation Company | Reaktorsystem für durchflussreaktionen |
Also Published As
Publication number | Publication date |
---|---|
CN101472677A (zh) | 2009-07-01 |
JP2008126191A (ja) | 2008-06-05 |
TWI357675B (ja) | 2012-02-01 |
TW200830602A (en) | 2008-07-16 |
US7879298B2 (en) | 2011-02-01 |
US20090047192A1 (en) | 2009-02-19 |
KR20090006071A (ko) | 2009-01-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2008062896A1 (fr) | Microréacteur | |
TWI221041B (en) | Bipolar plate assembly, fuel cell stacks and fuel cell systems incorporating the same | |
CA2445599A1 (en) | Metal-supported solid electrolyte electrochemical cell and multi cell reactors incorporating same | |
JP3899985B2 (ja) | 微小反応炉構成体およびその製造方法 | |
JP2017183177A (ja) | 電気化学素子、セルユニット、電気化学モジュール、電気化学装置およびエネルギーシステム | |
JP5061408B2 (ja) | 固体電解質型燃料電池用スタック及び固体電解質型燃料電池 | |
US20080085433A1 (en) | Process and corresponding apparatus for continuously producing gaseous hydrogen to be supplied to micro fuel cells and integrated system for producing electric energy | |
JP2005132712A (ja) | 水素製造用のマイクロリアクター | |
JP2007214135A (ja) | 燃料改質室を有する溶融炭酸塩型燃料電池用分離板及びその製造方法 | |
JP5455607B2 (ja) | 固体酸化物燃料電池及びその運転方法 | |
JP4867357B2 (ja) | 水素製造用のマイクロリアクター | |
JP4414780B2 (ja) | 水素製造用のマイクロリアクターおよびその製造方法 | |
US20100159304A1 (en) | Thermomechanical sealing of interconnect manifolds in fuel cell stacks | |
US20060280661A1 (en) | Micro-reformer and manufacturing method thereof | |
JP4877211B2 (ja) | マイクロリアクターおよびその製造方法 | |
JP4537685B2 (ja) | 水素製造用のメンブレンリアクター | |
JP4486429B2 (ja) | 水素製造用のマイクロリアクターおよびその製造方法 | |
JP2004290873A (ja) | 触媒反応器の製造方法及び触媒反応器 | |
JP2003334418A (ja) | 水素分離装置の製造方法 | |
JP4928491B2 (ja) | マイクロリアクターの製造方法 | |
JP2007296495A (ja) | マイクロリアクターおよびその製造方法 | |
JP2017152097A (ja) | 燃料電池セルスタック、及び、固体酸化物形燃料電池装置 | |
JP5038619B2 (ja) | マイクロリアクターおよびその製造方法 | |
JP2017152098A (ja) | 燃料電池セルスタック、及び、固体酸化物形燃料電池装置 | |
JP7500712B2 (ja) | セル、セルスタック装置、モジュールおよびモジュール収容装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200780023404.0 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 07832607 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12282074 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020087022702 Country of ref document: KR |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 07832607 Country of ref document: EP Kind code of ref document: A1 |