WO2008032489A1 - Structure for attaching plasma gun to chamber - Google Patents

Structure for attaching plasma gun to chamber Download PDF

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Publication number
WO2008032489A1
WO2008032489A1 PCT/JP2007/064418 JP2007064418W WO2008032489A1 WO 2008032489 A1 WO2008032489 A1 WO 2008032489A1 JP 2007064418 W JP2007064418 W JP 2007064418W WO 2008032489 A1 WO2008032489 A1 WO 2008032489A1
Authority
WO
WIPO (PCT)
Prior art keywords
flange
chamber
positioning
plasma gun
plasma
Prior art date
Application number
PCT/JP2007/064418
Other languages
French (fr)
Japanese (ja)
Inventor
Motoi Okada
Kenji Yamakawa
Takeshi Furutsuka
Yoshiro Murashita
Original Assignee
Shinmaywa Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmaywa Industries, Ltd. filed Critical Shinmaywa Industries, Ltd.
Publication of WO2008032489A1 publication Critical patent/WO2008032489A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources

Definitions

  • the present invention relates to a structure for attaching a plasma gun to a chamber.
  • a plasma film forming apparatus is an apparatus that forms a film using plasma generated by a plasma gun force as an ion source.
  • a plasma gun used in such a plasma film forming apparatus a composite cathode type plasma gun, a pressure gradient type plasma gun, and a dual type plasma gun combining these are known (for example, Patent Document 1). reference).
  • the dual-type plasma gun is a plasma gun that has both the advantages of a composite cathode type plasma gun and the advantages of a pressure gradient type plasma gun.
  • this dual type plasma gun has a problem that its working efficiency is poor, for example, when two intermediate electrodes must be attached at the same time when it is attached to a plasma film forming apparatus.
  • Patent Document 2 a plasma source of a vacuum film forming apparatus that improves the workability of attachment work is known (for example, see Patent Document 2). Since the plasma source of the vacuum film forming apparatus disclosed in Patent Document 2 can attach two intermediate electrodes separately, the workability of the attaching work can be improved.
  • Patent Document 1 Japanese Patent No. 2921874
  • Patent Document 2 JP-A-11 315371
  • the present invention has been made to solve the above-described problems, and provides a structure for attaching a plasma gun to a chamber that can be easily positioned and has high workability.
  • the purpose is to provide.
  • a plasma gun mounting structure includes a chamber in which a plasma inlet is provided on a wall thereof, and a first provided around the plasma inlet.
  • An engagement portion, a first positioning portion, and a flange around the plasma outlet, and the flange is positioned by the second engagement portion and the first positioning portion that engage with the first engagement portion.
  • a plasma gun having a second positioning portion formed thereon, and a lock mechanism, wherein the second engaging portion engages with the first engaging portion of the chamber, and the second positioning portion has the chamber.
  • the plasma outlet is in communication with the plasma inlet of the chamber, and the flange is pressed against and fixed to the wall of the chamber by the lock mechanism.
  • Unishi Te, the flop Razumagan is attached to the chamber.
  • the first engagement portion may be an engagement protrusion
  • the second engagement portion may be an engagement recess. Good.
  • the engaging convex portion includes a main body portion and a head portion having a larger cross-sectional area than the main body portion provided at the distal end of the main body portion.
  • the first positioning portion may be a positioning convex portion
  • the second positioning portion may be a positioning concave portion
  • the positioning convex portion is a second pin
  • the positioning concave portion has a width that allows the second pin to fit in a direction to be positioned. However, it may have a width larger than the width of the second pin in the other direction.
  • the lock mechanism may be a clamp mechanism! /.
  • the invention's effect [0014] According to the structure for mounting a plasma gun on a chamber according to the present invention, it is possible to easily perform positioning, and it is possible to improve the work efficiency of the mounting work.
  • FIG. 1 is a schematic diagram showing a schematic configuration of a structure for attaching a plasma gun to a chamber according to Embodiment 1 of the present invention.
  • FIG. 2 is a cross-sectional view showing a cross section taken along line II-II of the structure for attaching the plasma gun shown in FIG. 1 to the chamber.
  • FIG. 3 is a schematic diagram showing a schematic configuration of a first cooling flow path of the plasma gun shown in FIG. 1.
  • FIG. 4 is a cross-sectional view showing a cross section taken along line III-III of the structure of the plasma gun shown in FIG. 1 attached to the chamber.
  • FIG. 5 is a schematic diagram showing a schematic configuration of a second cooling flow path of the plasma gun shown in FIG. 1.
  • FIG. 6 is a schematic diagram showing a schematic configuration of the lock mechanism shown in FIG. 4.
  • First cooling medium discharge port through hole
  • First cooling medium supply port through hole
  • Second cooling medium supply port through hole
  • Second cooling medium discharge port through hole
  • FIG. 1 is a schematic diagram showing a schematic configuration of a structure for attaching a plasma gun to a chamber according to Embodiment 1 of the present invention. In FIG. 1, some parts are omitted. In FIG. 1, the vertical direction in the plasma gun chamber mounting structure is shown as the vertical direction in the figure.
  • a plasma gun mounting structure 100 includes a plasma gun 1, a chamber 2, and a lock mechanism 3 (see FIG. 4). ing.
  • the plasma gun 1 has a force sword portion 7 and an intermediate electrode unit 6, and the intermediate electrode unit 6 includes a first intermediate electrode subunit 96 composed of the first intermediate electrode 4 and the first magnet 49, a second intermediate electrode subunit 97 composed of the second intermediate electrode 5 and the second magnet 72, an insulating member 51, ,have.
  • the force sword portion 7 has a cylindrical container 10.
  • a discharge space 11 is formed by the internal space of the container 10.
  • flanges 12 and 13 are provided, respectively.
  • the flange 10 side end of the container 10 is open.
  • the end of the container 10 on the flange 12 side is closed by a disc-like lid member 14.
  • On the surface of the lid member 14 that contacts the flange 12 (hereinafter referred to as the back surface of the lid member 14), an annular first positioning recess 15 that is recessed in the thickness direction is formed between the outer peripheral surface of the flange 12 and the first positioning recess 15. Is provided so as to be in contact with the outer peripheral wall constituting the. That is, the first positioning recess 15 is provided so as to engage with the flange 12.
  • the container 10 and the lid member 14 are positioned with respect to each other so that their central axes coincide.
  • An annular groove 26 is formed in the first positioning recess 15 in the thickness direction, and an 'O-ring 27 for maintaining airtightness is disposed in the groove 26.
  • An annular fixing member 28 is fitted into the container 10 at the flange 12 side end of the peripheral wall of the container 10, and a ring member 30 is interposed between the fixing member 28 and the flange 12.
  • the container 10 is inserted into the container 10.
  • a plurality of through holes 29 are provided at appropriate positions of the fixing member 28 in the thickness direction, and bolts 31 are passed through the through holes 29.
  • the tip of the bolt 31 is screwed into a screw hole formed in the lid member 14.
  • the container 10 and the lid member 14 are fixed by fastening the bolt 31 force fixing member 28 and the lid member 14.
  • the ring member 30 can prevent excessive force from being applied to the flange 12 and can prevent the flange 12 from being damaged. This facilitates the positioning and attachment of the container 10 and the lid member 14 with a force S.
  • annular cooling channel recess 21 that is recessed in the thickness direction is provided so as to surround a base end portion of an auxiliary cathode 16 to be described later.
  • the cooling channel recess 21 is provided with a cooling channel lid member 22 so as to cover the opening of the cooling channel recess 21.
  • cooling A space formed by the channel recess 21 and the cooling channel lid member 22 constitutes the third cooling channel 23.
  • a third cooling medium supply port 24 and a third cooling medium discharge port 25 for supplying and discharging the cooling medium to and from the third cooling flow path 23 are respectively provided at appropriate positions on the cooling flow path lid member 22. Is provided.
  • the third cooling medium supply port 24 is connected to a first cooling medium discharge port 45, which will be described later, through appropriate piping through an L-shaped joint 78.
  • the third cooling medium discharge port 25 is connected to a cooling medium supply device (not shown) by appropriate piping.
  • a cooling medium here, water
  • the lid member 14 has a cylindrical auxiliary cathode 16 made of tantalum (Ta) so as to penetrate the central portion of the lid member 14 in an airtight manner and extend along the central axis of the container 10. Is arranged.
  • the base end portion of the auxiliary cathode 16 is connected to an argon (Ar) gas tank (not shown) by appropriate piping, and the tip force Ar gas of the auxiliary cathode 16 is supplied into the discharge space 11.
  • the outer peripheral surface near the tip of the auxiliary cathode 16 has a circle made of lanthanum hexaboride (LaB).
  • An annular main cathode 17 is provided.
  • the auxiliary cathode 16 and the main cathode 17 constitute a force sword 18.
  • the force sword 18 is electrically connected to the negative electrode of a main power source (not shown) composed of a DC power source and a resistor (not shown) by appropriate wiring.
  • molybdenum (Mo) having a diameter larger than that of the auxiliary cathode 16 so as to extend in the thickness direction of the lid member 14 coaxially with the central axis of the lid member 14, or
  • a cylindrical protective member 19 made of tandastain (W) is hermetically disposed on the lid member 14.
  • An annular window member 20 made of tungsten is provided at the tip of the protection member 19. The force sword 18 is protected by the protection member 19 and the window member 20.
  • the first intermediate electrode subunit 96 includes a plate-shaped first flange 32, a cylindrical first holder member 43, a first housing 8 and a cylindrical first electrode member 47.
  • the first intermediate electrode 4 is provided and is provided so as to contact the flange 13.
  • the first flange 32 1S is in contact with the flange 13.
  • One end of the first holder member 43 is connected to one main surface of the first flange 32.
  • the first electrode in the inner hole of the first holder member 43 The member 47 is fitted.
  • the first flange 32 has a disc-shaped first flange main body portion 32a and a disc-shaped first lid portion 32b. Through holes 33a and 33b are provided in the central portions of the first flange main body portion 32a and the first lid portion 32b. These through-holes 33a and 33b constitute a plasma passing port 33. Further, an annular second positioning recess 34 that is recessed in the thickness direction is provided on a main surface that contacts the flange 13 of the first flange body 32a (hereinafter referred to as a surface of the first flange body 32a). .
  • the first flange body part is aligned with the center axis of the container 10 and the center axis of the first flange body part 32a.
  • the container 10 is positioned with respect to 32a.
  • a recess 121 that is one step lower than the second positioning recess 34 is formed in the inner portion of the surface of the first flange main body 32 a from the second positioning recess 34.
  • the inner end portion of the second positioning recess 34 is configured to be flush with the inner peripheral surface of the flange 13. Thereby, the positioning of the container 10 and the first flange main body 32a can be facilitated.
  • An annular groove 35 is formed in the bottom surface of the second positioning recess 34, and an O-ring 36 for maintaining airtightness is disposed in the groove 35.
  • An annular fixing member 37 is fitted into the container 10 at the flange 13 side end of the peripheral wall of the container 10, and a ring member 40 is inserted between the fixing member 37 and the flange 13. 10 is inserted and arranged.
  • a plurality of through holes 38 are provided at appropriate positions of the fixing member 37, and Bonoleto 39 force S is passed through the through holes 38.
  • the tip portion force of the bolt 39 is screwed into a screw hole (not shown) provided in the first flange body portion 32a.
  • the container 39 and the first flange main body 32a are fixed by the bolt 39 fastening the fixing member 37 and the first flange main body 32a.
  • the ring member 40 can prevent an excessive force from being applied to the flange 13 and prevent the flange 13 from being damaged.
  • the container 10 and the first flange main body 32a can be easily positioned and attached.
  • a concave portion 123 is formed on the back surface of the first flange main body portion 32a so that the outer peripheral portion 122 remains as a convex portion.
  • the recess 123 is provided with a first cooling channel groove 42 that constitutes a first cooling channel 41 described later.
  • the first lid portion 32 b is fitted into the recess 123 to cover the first cooling groove 42.
  • the upper part of the first lid part 32b communicates with the first cooling channel groove 42.
  • a through hole 46 is provided, and the through hole 46 forms a first cooling medium supply port 46.
  • the first cooling medium supply port 46 is connected to a second cooling medium discharge port 70 described later by appropriate piping.
  • the first holder member 43 is connected to the first flange 32, and the first holder member 43 is provided coaxially with the central axis of the plasma passage port 33.
  • the first holder member 43 includes a first outer cylinder 43a and a first inner cylinder 43b.
  • the inner hole of the first outer cylinder 43a is formed with a small diameter at the end far from the cathode 18, and the first inner cylinder 43b is connected to the first outer cylinder 43a so as to be fitted to the small diameter part 56. It is inserted.
  • a first cylindrical space 44 extending in the axial direction is formed between the first inner cylinder 43b and the first outer cylinder 43a.
  • the end of the first inner cylinder 43b closer to the force sword 18 is fitted into the opening of the through hole 33a provided in the first flange main body 32a.
  • the end of the first outer cylinder 43a closer to the force sword 18 is fitted into the through hole 33b of the first lid portion 32b, and the end abuts against the bottom surface of the recess 123 of the first flange body portion 32a. Yes. Thereby, the first cylindrical space 44 is closed.
  • a flange 56 that protrudes inward toward the central axis is provided at the end of the first outer cylinder 43a far from the force sword 18, and the first cylindrical space 44 is formed by the flange 56. It is closed.
  • the first cooling channel groove 42 and the first cylindrical space 44 constitute a first cooling channel 41.
  • the end of the first inner cylinder 43b far from the force sword 18 is disposed so as to protrude in the axial direction from the end face of the flange 56.
  • the first intermediate electrode 4 is electrically connected to the positive electrode of a main power source (not shown) and a resistor (not shown) by appropriate wiring! /,
  • first cooling channel 41 will be described in detail with reference to FIGS. 1 to 3.
  • FIG. 2 is a cross-sectional view taken along line II-II of structure 100 for attaching plasma gun 1 to chamber 2 shown in FIG.
  • FIG. 3 is a schematic diagram showing a schematic configuration of the first cooling channel 41. 2 and 3, the vertical and horizontal directions in the structure 100 for attaching the plasma gun 1 to the chamber 2 are represented as vertical and horizontal directions in the drawings.
  • a through hole 45 penetrating in the thickness direction is provided in the lower portion of the first flange main body 32a of the first flange 32.
  • the through hole 45 constitutes a first cooling medium discharge port 45.
  • the bottom surface of the recess 123 of the first flange main body 32a has a through hole.
  • a first cooling channel groove 42 is provided so as to communicate with 45.
  • the first cooling flow channel groove 42 is composed of a first cooling flow channel groove 42a to a first cooling flow channel groove 42d, and the first cooling flow channel groove 42a is a first cooling flow channel groove 42a.
  • 1 is formed so as to be routed from the cooling medium supply port 46 to the lower portion of the first flange body 32a along the outer periphery of the first flange body 32a.
  • the first cooling channel groove 42b extends to the first cylindrical space 44 along the radial direction.
  • the first cooling channel groove 42c is formed so as to extend from the upper part of the first cylindrical space 44 to the upper part of the first flange main body part 32a along the radial direction.
  • the first cooling channel groove 42d extends along the outer periphery of the first flange body 32a and communicates with the through hole 45 (first cooling medium discharge port 45). It is routed to the bottom of part 32a.
  • the first cylindrical space 44 is provided with a pair of partition plates 101 and 101 that partition the first cylindrical space 44.
  • the partition plate 101 is connected to the outer peripheral surface of the first inner cylinder 43b and the inner peripheral surface of the first outer cylinder 43a, and the end near the force sword 18 is connected to the first flange main body 32a, The end on the side far from the force sword 18 is provided so as to have a gap 102 between the small diameter portion 56 of the first outer cylinder 43a.
  • One space partitioned by the partition plate 101 of the first cylindrical space 44 constitutes the first cooling forward path 103a, and the other space ( The space on the side communicating with the first cooling flow path groove 42c) constitutes the first cooling return path 103b.
  • the first holder member 43 (more precisely, the first inner cylinder 43b) is fitted with a cylindrical first electrode member 47 made of tantalum and having heat resistance.
  • the electrode member 47 is provided coaxially with the central axis of the plasma passage port 33.
  • the first electrode member 47 has a male screw formed on the outer peripheral surface thereof, and is screwed into a first inner cylinder 43b having a female screw formed on the inner surface thereof.
  • Plasma generated by the force sword 18 passes through the internal space of the first electrode member 47.
  • the first electrode member 47 has a flange 57 projecting outward at the end close to the force sword 18, and the flange 57 and the first flange body 32a of the first flange 32 are connected to each other.
  • a nut-shaped protection plate 48 is sandwiched. As a result, it exists in the discharge space 11 etc. It is possible to prevent the first flange 32 from being sputtered by the plasma.
  • an annular first magnet 49 is fitted into the first holder member 43 (more precisely, the first outer cylinder 43a), and the first magnet 49 is connected to the central axis of the plasma passage port 33. It is provided coaxially.
  • the first magnet 49 is composed of a permanent magnet, and is arranged so that the side close to the force sword 18 is an N pole and the side far from the force sword 18 is an S pole.
  • the first stop member 50 here, the nut
  • the first magnet 49 is sandwiched between the first flange 32 (more precisely, the first lid portion 32b)! Do n’t fall out! / Stop like this.
  • the other end portion of the first holder member 43 (more precisely, the end surface of the first outer cylinder 43a) is in contact with one end surface of the annular insulating member 51.
  • An annular groove 52 is formed on the contact surface of the first outer cylinder 43a with the insulating member 51, and an O-ring 53 for maintaining airtightness is disposed in the groove 52. Further, a part of the insulating member 51 is fitted into the first inner cylinder 43b. Thereby, the first holder member 43 and the insulating member 51 can be easily positioned and attached.
  • annular short-circuit preventing groove 54 is provided on the outer peripheral surface of the insulating member 51.
  • the condensed water generated at the first intermediate electrode or the like can prevent a short circuit between the first intermediate electrode 4 and the second intermediate electrode 5 that occurs when the outer peripheral surface of the insulating member 51 is wetted. it can.
  • the short-circuit preventing groove 54 is provided in an annular shape on the outer peripheral surface of the insulating member 51, but is not limited thereto, and a groove is provided in at least a lower portion of the insulating member 51. It ’s good.
  • the diameter dimension of the insulating member 51, the diameter dimension of the first outer cylinder 43a, and the diameter dimension of the second outer cylinder 58a described later are substantially constant, and the insulating member 51, the first outer cylinder 43a, and The outer surface force of the second outer cylinder 58a is a force formed so as not to have a step, but is not limited to this. Alternatively, a step may be formed. When formed in this way, it is possible to more reliably prevent a short circuit between the first intermediate electrode 4 and the second intermediate electrode 5 caused by condensed water.
  • the second intermediate electrode subunit 97 includes a cylindrical second holder member 58, a plate-like second flange 64 force, a second housing 9 and a cylindrical second electrode member 71.
  • a second intermediate electrode 5 is provided and is in contact with the other end face of the insulating member 51. Specifically, the second holder member 5 8 force Abuts against insulating member 51. The end of the second holder member 58 on the side far from the force sword 18 is in contact with the second flange 64.
  • a cylindrical second electrode member 71 made of molybdenum and having heat resistance is fitted into the inner hole of the second holder member 58.
  • the second intermediate electrode 5 is electrically connected to the positive electrode of a main power source (not shown) and a resistor (not shown) by appropriate wiring.
  • the second holder member 58 has a cylindrical second outer cylinder 58a and a cylindrical second inner cylinder 58b, and the second holder member 58 is coaxial with the central axis of the plasma passage port 33. Is provided.
  • the end portion of the second outer cylinder 58a closer to the force sword 18 is formed with a small diameter, and the second inner cylinder 58b is fitted into the second outer cylinder 58a so as to be fitted to the small diameter section 61. ing.
  • a second cylindrical space 62 extending in the axial direction is formed between the second inner cylinder 58b and the second outer cylinder 58a.
  • the end surface of the second holder member 58 (more precisely, the second outer cylinder 58a) closer to the force sword 18 is in contact with the end surface of the insulating member 51, and the second outer cylinder
  • An annular groove 59 is formed in the contact surface of the 58a with the insulating member 51, and an O-ring 60 is disposed in the groove 59.
  • a positioning projection 63 having a notch on the outer peripheral surface side is provided at the end of the second inner cylinder 58b on the side close to the force sword 18.
  • the end of the second inner cylinder 58b far from the force sword 18 is fitted into an opening of a through hole 65a provided in the second flange main body 64a described later.
  • the end of the second outer cylinder 58a far from the force sword 18 is fitted into the through hole 65b of the second lid 64b, and the end abuts the bottom surface of the recess 125 of the second flange body 64a. Yes.
  • the second cylindrical space 62 is closed.
  • the second cylindrical space 62 constitutes the second cooling channel 66.
  • annular second magnet 72 is fitted into the second holder member 58 (more precisely, the second outer cylinder 58a), and the second magnet 72 is the center of the plasma passage port 33. It is provided coaxially with the shaft.
  • the second magnet 72 is composed of an electromagnetic coil, and a current is applied in a direction in which the side close to the force sword 18 is the S pole and the side far from the force sword 18 is the N pole.
  • a second stopper member 77 (here, a nut) sandwiches the second magnet 72 with the second flange 64, and Don't come out of the second outer cylinder 58a!
  • the second flange 64 has a disk-shaped second flange body 64a and a disk-shaped second lid 64b.
  • the second flange body 64a and the second lid 64b include Through holes 65a and 65b are provided in the center of each through the thickness direction. These through holes 65a and 65b constitute a plasma outlet 65.
  • the end of the second inner cylinder 58b far from the force sword 18 is fitted in the through hole 65a of the second flange main body 64a, and the second flange main body 64a is connected to the plasma passage port 33. It is provided coaxially with the central axis.
  • a recess 125 is formed on the main surface of the second flange body 64a close to the force sword 18 (hereinafter referred to as the surface of the second flange body 64a) so that the outer periphery 124 remains as a protrusion.
  • the recess 125 is provided with a second cooling channel groove 67 that constitutes the second cooling channel 66.
  • the second lid portion 64 b is fitted in the recess 125 and covers the second cooling flow channel groove 67.
  • the second lid portion 64b is provided coaxially with the central axis of the plasma passage port 33, and the second lid portion
  • the end of the second outer cylinder 58a on the side far from the force sword 18 is in contact with 64b.
  • a small diameter portion 68 is formed at the end portion of the second outer cylinder 58a, the small diameter portion 68 is fitted into the through hole 65b of the second lid portion 64b, and the tip thereof is 2 It contacts the bottom surface of the recess 125 of the flange body 64a.
  • a through hole 69 is provided in the upper part of the second lid portion 64b so as to communicate with the upstream end of the second cooling flow channel groove 67, and the through hole 69 is provided with the second cooling medium.
  • a supply port 69 is formed.
  • a through hole 70 penetrating in the thickness direction is provided in the lower portion of the second lid portion 64b so as to communicate with the downstream end of the second cooling flow channel groove 67.
  • the through hole 70 is provided in the second cooling passage groove 67.
  • Form media outlet 70 is provided.
  • the second cooling medium supply port 69 is connected to a cooling medium supply device (not shown) by appropriate piping, and the second cooling medium discharge port 70 is connected to the first cooling medium supply port 46. They are connected by appropriate piping.
  • FIG. 4 is a cross-sectional view taken along the line III-III of the structure 100 for attaching the plasma gun 1 to the chamber 2 shown in FIG. Fig. 5 shows the outline of the second cooling channel 66 of the plasma gun 1 shown in Fig. 1.
  • It is a schematic diagram which shows a schematic structure. 4 and 5, the vertical and horizontal directions in the structure 100 for attaching the plasma gun 1 to the chamber 2 are shown as vertical and horizontal directions in the drawings.
  • a second cooling channel groove 67 is disposed on the bottom surface of the recess 125 of the second flange main body portion 64a.
  • the second cooling channel groove 67 includes second cooling channel grooves 67a to 67d, and the second cooling channel groove 67a extends from the second cooling medium supply port 69 to the second flange. It is formed so as to be routed to the lower part of the second flange main body 64a along the outer periphery of the main body 64a. From there, the second cooling channel groove 67b extends to the second cylindrical space 62 along the radial direction.
  • the second cooling channel groove 67c is formed so as to extend from the upper part of the second cylindrical space 62 to the upper part of the second flange main body part 64a along the radial direction. From there, the second cooling passage groove 67d extends along the outer periphery of the second flange main body 64a, and communicates with the through hole 70 (second cooling medium discharge port 70). It is formed so as to be routed to the lower part of 64a.
  • the second cylindrical space 62 is provided with a pair of partition plates 104, 104 that partition the second cylindrical space 62.
  • the partition plate 104 is connected to the outer peripheral surface of the second inner cylinder 58b and the inner peripheral surface of the second outer cylinder 58a, and the end on the side far from the force sword 18 is connected to the second flange main body part 64a.
  • the end portion on the side close to the force sword 18 is provided so as to have a gap 105 with the small diameter portion 61 of the second outer cylinder 58a.
  • One space partitioned by the partition plate 104 of the second cylindrical space 62 (the space on the side communicating with the second cooling flow path groove 67b) constitutes the second cooling forward path 106a, and the other space ( The space on the side communicating with the second cooling passage groove 67c) constitutes the second cooling return passage 106b.
  • annular protective plate 73 having a through hole in the thickness direction is attached to the back surface of the second flange main body portion 64 a coaxially with the central axis of the plasma passage port 33.
  • the diameter of the through hole of the protective plate 73 is slightly smaller than the diameter of the through hole 65a of the second flange main body 64a.
  • the opening of the protective plate 73 is smaller than the inner peripheral surface of the second flange main body 64a. Is also formed so as to protrude toward the central axis.
  • the cathode of the second electrode member 71 The end force S on the side far from the door 18 abuts against the opening of the protective plate 73 so that the second electrode member 71 can be easily positioned. Further, it is possible to prevent the second flange 64 from being sputtered by the plasma present at the plasma outlet 65 or the like.
  • a screw hole 74 that is recessed in the thickness direction is provided on the upper portion of the second flange 64 (more precisely, the surface of the second flange main body 64a) (see FIGS. 1 and 4).
  • a positioning through hole 75 penetrating in the thickness direction is provided in the upper portion of the first flange 32 at a position corresponding to the screw hole 74 (see FIGS. 1 and 2).
  • a bolt (fastener) 76 that is fitted into the positioning through hole 75 and screwed into the screw hole 74 is provided on the surface of the first flange main body portion 32a. The bolt 76 fastens the first flange 32 to the second flange 64 by fastening them together.
  • the first intermediate electrode 4 and the second intermediate electrode 5 can be easily positioned and attached with a force S.
  • the surface of the wall 80 to which the plasma gun 1 of the chamber 2 is attached is provided with a recess 81 that is recessed in the thickness direction and has a stepped surface 82.
  • a through hole 83 penetrating in the thickness direction is provided on the bottom surface of the recess 81 so as to communicate with the plasma outlet 65, and the through hole 83 constitutes the plasma inlet 83.
  • a short cylindrical second insulating member 84 is disposed. At one end portion (end portion far from the force sword 18) on the outer peripheral surface of the second insulating member 84, a protruding portion 84a protruding outward in the radial direction is provided.
  • the second insulating member 84 is attached to the concave portion 81 by screwing a ring member 85 disposed over the projecting portion 84a and the stepped surface 82 into the concave portion 81.
  • an annular groove 86 is provided in a portion of the second recess 82 where the second insulating member 84 is in contact, and an O-ring 87 is provided in the groove 86.
  • the surface of the second insulating member 84 opposite to the surface in contact with the wall 80 (hereinafter referred to as the surface of the second insulating member 84) is in contact with the second flange body 64a of the plasma gun 1.
  • An annular groove 88 is provided on the surface.
  • the groove 88 has an O-ring 89 for maintaining airtightness. Is provided.
  • the upper portion of the wall 80 is composed of a main body 90a having a cylindrical insulating collar 92 and a shaft 99 into which the insulating collar 92 is fitted, and an insulating material, and is provided at the tip of the main body 90a.
  • a first pin 90 which is a first engagement portion (engagement convex portion), is provided, which includes a head 90b having a larger cross-sectional area than the main body 90a.
  • the upper portion of the second flange member 64 has a large hole portion 91a that penetrates in the thickness direction and allows the head portion 90b of the first pin 90 to pass therethrough, and a main body portion 90a of the first pin 90 that communicates therewith.
  • An engaging recess (second engaging portion) 91 is provided which is made up of a small hole portion 91b that can be threaded (see FIG. 4).
  • a second pin 94 which is a positioning convex portion (first positioning portion), comprising a cylindrical insulating collar 93a and a shaft portion 93b into which the insulating collar 93a is fitted. It is arranged.
  • a lower portion of the second flange body 64a is provided with a notch 95 that is a positioning recess (second positioning portion) extending in the radial direction from the lower end of the second flange body 64a.
  • the notch 95 is formed so as to have a width that the second pin 94 fits in the direction to be positioned and to have a width larger than the width of the second pin 94 in the other direction.
  • the horizontal dimension of the notch 95 is slightly larger than the diameter of the second pin 94 so that the second pin 94 can pass through and can be positioned by the second pin 94. Designed. Further, the vertical dimension of the notch 95 is designed to be larger than the diameter dimension of the second pin 94 from the lower end of the second flange body 64a.
  • the upper end portion of the inner surface of the engaging recess 91 (more precisely, the small hole portion 91b) is brought into contact with the upper end portion of the main body portion 90a (more precisely, the insulating collar 92) of the first pin 90.
  • the plasma gun 1 is positioned with respect to the chamber 2 in the vertical direction.
  • the upper edge portion of the small hole portion 91b of the engaging recess 91 engages with the main body portion 90a (more precisely, the insulating collar 92) of the first pin 90, and the inner surface of the notch portion 95
  • the plasma gun 1 is positioned in the circumferential direction (left-right direction) with respect to the chamber 2 by the two pins 94 contacting in the left-right direction.
  • the chamber 2 and the plasma gun 1 can be easily positioned and temporarily fixed.
  • the plasma gun 1 temporarily fixed in the chamber 2 is locked by the lock mechanism 3 so that the plasma gun 1 can be easily attached to the chamber 2.
  • a method of locking the plasma gun 1 to the chamber 2 by the lock mechanism 3 will be described with reference to FIG.
  • FIG. 6 is a schematic diagram showing a schematic configuration of the lock mechanism 3 shown in FIG.
  • the lock mechanism 3 is disposed on a table 98 provided on the wall 80 of the chamber 2, and here, a known toggle-type clamp is used.
  • the lock mechanism 3 includes a base 3a, an operation arm 3b, a locking arm 3c, and a link member 3d that couples the operation arm 3b and the locking arm 3c.
  • the base portion 3a also serves as a force with a plate-like fixing portion 301a fixed to the base 98, a base portion 301b protruding in a direction perpendicular to the fixing portion 301a.
  • An operation arm 3b is provided at the base end portion of the base portion 301b, and a locking arm 3c is provided at the distal end portion of the base portion 301b.
  • the operation arm 3b includes a grip portion 302a and an arm portion 302b.
  • the operation arm 3b is provided on the base portion 301b of the base end portion force base portion 3a of the arm portion 302b so as to be rotatable about the rotation shaft 201.
  • the locking arm 3c is formed in an L shape, which is composed of a first portion 303a having a long length and a second portion 303b having a short length and a second portion 303b.
  • the base end of the first portion 303a is rotatably provided around the rotation shaft 202 at the tip of the base portion 301b of the base portion 3a.
  • the distal end portion of the second portion 303b is configured to abut or separate from the second flange main body portion 64a of the second flange 64.
  • one end of the link member 3d is provided at a position near the base end of the first portion 303a so as to be rotatable about the rotation shaft 203.
  • the other end of the link member 3d is rotatably provided about the rotation shaft 204 at the approximate center of the operation arm 3b. Further, a stopper 304 that comes into contact with or is separated from the first portion 303a of the locking arm 3c is provided at a substantially central portion of the link member 3d.
  • the cooling medium cooled by the cooling medium supply device (not shown) is supplied to the second cooling medium supply port 69 via an appropriate pipe. Then, the cooling medium flows along the outer periphery of the second flange main body portion 64a from the second cooling medium supply port 69 to the lower portion of the second flange main body portion 64a, and flows from there to the second cooling passage groove 67a. It flows through the second cooling passage groove 67b reaching the second cylindrical space 62 (more precisely, the second cooling forward passage 106a) (see FIG. 4). Then, the cooling medium flows through the second cooling forward path 106a, turns back at the gap 105, and flows through the second cooling backward path 106b (see FIG. 5).
  • the second electrode member 71 is cooled via the second inner cylinder 58b, and the second magnet 72 is cooled via the second outer cylinder 58a.
  • the cooling medium flows through the second cooling flow path groove 67c to the upper part of the second flange main body part 64a, and then flows through the second cooling flow path groove 67d along the outer periphery of the second flange main body part 64a.
  • the cooling medium outlet 70 To the second cooling medium outlet 70.
  • the cooling medium flows through the second cooling flow path grooves 67a to 67d, whereby the second flange main body 64a is cooled, and the O-ring 89 is thereby cooled.
  • the O-ring 89, the second magnet 72, and the second electrode member 71 are cooled by the cooling medium flowing through the second cooling channel 66.
  • the cooling medium is supplied from the second cooling medium discharge port 70 to the first cooling medium supply port 46 through appropriate piping. Then, the cooling medium flows along the outer periphery of the first flange main body portion 32a from the first cooling medium supply port 46 to the lower portion of the first flange main body portion 32a, and flows from there through the first cooling flow path groove 42a. Then, it flows through the first cooling flow path groove 42b reaching the first cylindrical space 44 (more precisely, the first cooling forward path 103a) (see FIG. 2). Then, the cooling medium flows through the first cooling forward path 103a, turns back at the gap 102, and flows through the first cooling backward path 103b (see FIG. 3).
  • the first electrode member 47 is cooled via the first inner cylinder 43b, and the first magnet 49 is cooled via the first outer cylinder 43a.
  • the cooling medium flows through the first cooling flow path groove 42c to the top of the first flange main body portion 32a, and from there, extends along the outer periphery of the first flange main body portion 32a. 1 Flows through the cooling channel groove 42d and reaches the first cooling medium discharge port 45. In this manner, the first flange main body portion 32a is cooled by flowing through the cooling medium 1S first cooling flow path grooves 42a to 42d, whereby the O-ring 36 is cooled. As a result of the cooling medium flowing through the first cooling channel 41, the O-ring 36, the first magnet 49, and the first electrode member 47 are cooled.
  • the cooling medium is supplied from the first cooling medium discharge port 45 to the third cooling medium supply port 24 through appropriate piping, and flows through the third cooling channel 23. Thereby, the base end portion of the auxiliary cathode 16 is cooled. Then, the cooling medium is discharged from the third cooling medium discharge port 25 to the cooling medium supply device via an appropriate pipe.
  • a force sword 18 or the like is attached to the back surface of the lid member 14. Since the force sword 18 is equivalent to a known composite negative electrode type, detailed mounting method is omitted.
  • An O-ring 27 is fitted into an annular groove 26 provided on the back surface of the lid member 14 to which a force sword 18 or the like is attached, and the flange 12 of the container 10 is fitted into the first positioning recess 15. At this time, since the outer peripheral surface of the flange 12 and the outer peripheral wall constituting the first positioning recess 15 are in contact with each other, the container 10 and the lid member 14 are positioned relative to each other. Therefore, positioning can be performed easily.
  • the bolt 31 is passed through the through hole 29 provided in the fixing member 28, and the fixing member 28 and the lid member 14 are fastened by the bolt 31.
  • the container 10 is fixed to the lid member 14.
  • a protective plate 48 is disposed at one end of the first inner cylinder 43b, and the first electrode member 47 is fitted into the inner hole of the first inner cylinder 43b.
  • the inner peripheral surface of the first inner cylinder 43b and the outer peripheral surface of the first electrode member 47 are threaded, and the first electrode member 47 is screwed into the first inner cylinder 43b.
  • the protective plate 48 is sandwiched and fixed between one end face of the first inner cylinder 43b and the flange 57 of the first electrode member 47.
  • the first flange main body portion 32a is fitted into the first inner cylinder 43b in the through hole 33a, and the first flange main body portion 32a is brought into contact with the protective plate 48. Then the first flange body The first lid member 32b is fitted into the recess 123 provided on the back surface of the portion 32a, is attached to the first flange main body portion 32a, and the first outer cylinder 43a is fitted into the first inner cylinder 43b. In this way, the first intermediate electrode 4 is assembled.
  • the first magnet 49 is inserted into the first outer cylinder 43a, the first stopper member (nut) 50 is screwed into the first outer cylinder 43a, and the first magnet 49 is attached to the first stopper member. 50 and the first lid member 32b are fixed to the first outer cylinder 43a. In this way, the first intermediate electrode subunit 96 is assembled.
  • the second intermediate electrode subunit 97 is assembled as follows.
  • the protective plate 73 is screwed and fixed to the back surface of the second flange body 64a, and the second lid member 64b is fitted into the recess 125 of the second flange body 64a.
  • one end of the second holder member 58 is fitted into the plasma outlet 65 of the second flange 64, and the second electrode member 71 is fitted into the inner hole of the second inner cylinder 58b.
  • the inner peripheral surface of the second inner cylinder 58b and the outer peripheral surface of the second electrode member 71 are threaded, and the second electrode member 71 is screwed into the second inner cylinder 58b. In this way, the second intermediate electrode 5 is assembled.
  • the second magnet 72 is fitted into the second outer cylinder 58a, the second stopper member (nut) 77 is screwed into the second outer cylinder 58a, and the second magnet 72 is fixed to the second stopper member 77. And the second lid member 64b. In this way, the second intermediate electrode subunit 97 is assembled.
  • the O-ring 60 is fitted into the groove 59 of the second outer cylinder 58a in the assembled second intermediate electrode subunit 97, and the first outer cylinder 43a in the first intermediate electrode subunit 96 described above is fitted. Fit the O-ring 53 into the groove 52. Next, the back surface of the first flange body portion 32a and the surface of the second flange body portion 64a are made to face each other, and the insulating member 51 is sandwiched between the end surface of the first outer cylinder 43a and the end surface of the second outer cylinder 58a.
  • a bolt (fastener) 76 is passed through the through hole 75 of the first flange 32, and the tip end of the bolt 76 is screwed into the screw hole 74 of the second flange 64, so that the first flange 32 (first The intermediate electrode subunit 96) and the second flange 64 (second intermediate electrode subunit 97) are fastened and fixed to each other.
  • one end of the insulating member 51 is fitted into the outer peripheral surface of the first inner cylinder 43b, and the other end force of the insulating member 51 is fitted into the positioning projection 63 of the second inner cylinder 58b.
  • the through hole 75 of the first flange 32 is provided at a position that coincides with the screw hole 74 provided in the second flange 64, the first intermediate electrode subunit 96, the insulating member 51, and the first 2 Positioning and mounting of intermediate electrode subunit 97 Can be easily performed. In this way, the intermediate electrode unit 6 is assembled.
  • the O-ring 36 is fitted into the groove 35 of the first flange main body 32a in the assembled intermediate electrode unit 6. Then, the flange 13 of the force sword portion 7 described above is fitted into the second positioning recess 34 of the intermediate electrode unit 6. Next, a bolt 39 is passed through the through hole 38 of the fixing member 37, and the fixing member 37 and the first flange 32 are fastened by the bolt 39, and the intermediate electrode unit 6 and the force sword portion 7 are fixed to each other. At this time, the outer peripheral wall of the second positioning recess 34 is in contact with the outer peripheral surface of the flange 13, and the inner end of the second positioning recess 34 is flush with the inner peripheral surface of the flange 13. The electrode unit 6 and the force sword section 7 can be easily positioned and attached. In this way, the plasma gun 1 is assembled.
  • the first pin 90 provided on the surface of the wall 80 of the chamber 2 is inserted into the large hole portion 91a of the engaging recess 91 provided on the upper portion of the second base member 64 of the plasma gun 1 assembled as described above. Communicate. At this time, the second pin 94 provided on the surface of the wall 80 is passed through the notch 95 provided in the lower part of the second base member 64. Then, the entire plasma gun 1 is moved downward to allow the first pin 90 to pass through the small hole portion 91b of the engagement recess 91, and the upper end portion of the inner surface of the small hole portion 91b is connected to the main body portion of the first pin 90. 90a (To be exact, the insulating collar 92) is brought into contact with the upper end portion.
  • the upper edge portion of the small hole portion 91b engages with the main body portion 90a (more precisely, the insulating collar 92) of the first pin 90.
  • the plasma gun 1 is positioned and temporarily fixed with respect to the chamber 2 in the vertical direction.
  • the inner surface of the small hole portion 91b of the engaging recess 91 and the main body portion 90a of the first pin 90 abut on each other in the left-right direction, and the second pin 94 abuts on the inner surface of the notch portion 95 in the left-right direction.
  • the plasma gun 1 is positioned in the circumferential direction (left-right direction) with respect to the chamber 2.
  • the operation arm 3b of the locking mechanism 3 is swung in the upright direction, and the locking arm 3c is brought into contact with the second flange 64, whereby the plasma gun 1 is brought into the chamber 2. It is spoken.
  • the plasma gun 1 can be easily assembled, and the plasma gun assembled in this way is used. 1 can be easily installed in chamber 2, and its working time Can be shortened.
  • the force that the first holder part and the second holder part are each composed of an outer cylinder and an inner cylinder is not limited to this. Also good. Also,
  • the force formed from the lid portion is not limited to this, and may be a single member integrally formed. Furthermore, the first housing and the second housing each have a force formed of a holder part and a flange part.
  • the present invention is not limited to this, and a single member may be formed as a single body. In addition, cool the second intermediate electrode 5 etc.
  • the mounting structure of the plasma gun to the chamber of the present invention is useful as the mounting structure of the plasma gun to the chamber with high work efficiency because it can be easily positioned.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A structure for attaching a plasma gun to a chamber is provided with a chamber (2); a first engaging section (90) and a first positioning section (94) arranged on the chamber (2); a plasma gun (1) wherein a second engaging section (91) to be engaged with the first engaging section (90) and a second positioning section (95) to be positioned by the first positioning section (94) are formed on a flange (64); and a lock mechanism (3). The plasma gun (1) is attached to the chamber (2) by having the second engaging section (91) engaged with the first engaging section (90) of the chamber (2), the second positioning section (95) positioned by the first positioning section (94) of the chamber (2), and the flange (64) fixed by being pressed to a wall (80) of the chamber (2) by the lock mechanism (3).

Description

明 細 書  Specification
プラズマガンのチャンバへの取り付け構造  Mounting structure of plasma gun to chamber
技術分野  Technical field
[0001] 本発明は、プラズマガンのチャンバへの取り付け構造に関する。  The present invention relates to a structure for attaching a plasma gun to a chamber.
背景技術  Background art
[0002] プラズマ成膜装置は、プラズマガン力 発生したプラズマをイオン源として用いて成 膜する装置である。このようなプラズマ成膜装置に用いられているプラズマガンとして 、複合陰極型のプラズマガン、圧力勾配型のプラズマガン及びこれらを組み合わせ たデュアルタイプのプラズマガンが知られている (例えば、特許文献 1参照）。特許文 献 1によれば、デュアルタイプのプラズマガンは、複合陰極型のプラズマガンの利点 と圧力勾配型のプラズマガンの利点の両方を併せ持つプラズマガンである。  A plasma film forming apparatus is an apparatus that forms a film using plasma generated by a plasma gun force as an ion source. As a plasma gun used in such a plasma film forming apparatus, a composite cathode type plasma gun, a pressure gradient type plasma gun, and a dual type plasma gun combining these are known (for example, Patent Document 1). reference). According to Patent Document 1, the dual-type plasma gun is a plasma gun that has both the advantages of a composite cathode type plasma gun and the advantages of a pressure gradient type plasma gun.
[0003] しかしながら、このデュアルタイプのプラズマガンは、プラズマ成膜装置に取り付け る際、 2つの中間電極を同時に取り付けなければならない等、その作業効率が悪いと いう問題があった。  [0003] However, this dual type plasma gun has a problem that its working efficiency is poor, for example, when two intermediate electrodes must be attached at the same time when it is attached to a plasma film forming apparatus.
[0004] このような問題に対して、取り付け作業の作業性を良くした真空成膜装置のプラズ マ源が知られている（例えば、特許文献 2参照）。特許文献 2に開示されている真空 成膜装置のプラズマ源は、 2つの中間電極を別々に取り付けることができるため、そ の取り付け作業の作業性を良くすることができる。  [0004] For such a problem, a plasma source of a vacuum film forming apparatus that improves the workability of attachment work is known (for example, see Patent Document 2). Since the plasma source of the vacuum film forming apparatus disclosed in Patent Document 2 can attach two intermediate electrodes separately, the workability of the attaching work can be improved.
特許文献 1 :特許第 2921874号  Patent Document 1: Japanese Patent No. 2921874
特許文献 2 :特開平 11 315371号公報  Patent Document 2: JP-A-11 315371
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0005] しかしながら、特許文献 2に開示されているようなプラズマ源では、各々の中間電極 の位置決めが困難であり、その取り付け作業の作業性には未だ改善の余地があった However, in the plasma source as disclosed in Patent Document 2, it is difficult to position each intermediate electrode, and there is still room for improvement in workability of the mounting work.
[0006] 本発明は、上記課題を解決するためになされたもので、容易に位置決めすることが でき、取り付け作業の作業性が高いプラズマガンのチャンバへの取り付け構造を提 供することを目的とする。 [0006] The present invention has been made to solve the above-described problems, and provides a structure for attaching a plasma gun to a chamber that can be easily positioned and has high workability. The purpose is to provide.
課題を解決するための手段  Means for solving the problem
[0007] 前記課題を解決するために本発明に係るプラズマガンのチャンバへの取り付け構 造は、その壁にプラズマ流入口が設けられたチャンバと、前記プラズマ流入口の周囲 に設けられた第 1係合部及び第 1位置決め部と、そのプラズマ流出口の周囲にフラン ジを有し、該フランジに前記第 1係合部と係合する第 2係合部及び前記第 1位置決め 部によって位置決めされる第 2位置決め部が形成されたプラズマガンと、ロック機構と 、を備え、前記第 2係合部が前記チャンバの前記第 1係合部と係合し、前記第 2位置 決め部が前記チャンバの前記第 1位置決め部によって位置決めされ、前記プラズマ 流出口が前記チャンバの前記プラズマ流入口に連通し、かつ、前記フランジが前記 ロック機構によって前記チャンバの壁に押し付けられて固定されるようにして、前記プ ラズマガンが前記チャンバに取り付けられている。  [0007] In order to solve the above problems, a plasma gun mounting structure according to the present invention includes a chamber in which a plasma inlet is provided on a wall thereof, and a first provided around the plasma inlet. An engagement portion, a first positioning portion, and a flange around the plasma outlet, and the flange is positioned by the second engagement portion and the first positioning portion that engage with the first engagement portion. A plasma gun having a second positioning portion formed thereon, and a lock mechanism, wherein the second engaging portion engages with the first engaging portion of the chamber, and the second positioning portion has the chamber. The plasma outlet is in communication with the plasma inlet of the chamber, and the flange is pressed against and fixed to the wall of the chamber by the lock mechanism. Unishi Te, the flop Razumagan is attached to the chamber.
[0008] これにより、容易に位置決めすることができ、取り付け作業の作業効率がよくなる。  [0008] Thereby, the positioning can be easily performed, and the work efficiency of the mounting work is improved.
[0009] 本発明に係るプラズマガンのチャンバへの取り付け構造では、前記第 1係合部が係 合凸部で構成されており、前記第 2係合部が係合凹部で構成されていてもよい。  [0009] In the plasma gun chamber mounting structure according to the present invention, the first engagement portion may be an engagement protrusion, and the second engagement portion may be an engagement recess. Good.
[0010] 本発明に係るプラズマガンのチャンバへの取り付け構造では、前記係合凸部が本 体部と該本体部の先端に設けられた前記本体部より断面積が大きい頭部とからなる 第 1ピンであり、前記係合凹部が貫通孔で、前記係合凸部の頭部が揷通可能な大孔 部とこれに連通する前記係合凸部の本体部が揷通可能な小孔部であってもよい。  In the plasma gun chamber mounting structure according to the present invention, the engaging convex portion includes a main body portion and a head portion having a larger cross-sectional area than the main body portion provided at the distal end of the main body portion. 1 pin, a small hole through which the engaging recess is a through-hole, and a large hole part through which the head of the engaging convex part can pass and a main body part of the engaging convex part communicating with the large hole part. Part.
[0011] 本発明に係るプラズマガンのチャンバへの取り付け構造では、前記第 1位置決め部 は、位置決め凸部であり、前記第 2位置決め部は、位置決め凹部であってもよい。  In the plasma gun mounting structure according to the present invention, the first positioning portion may be a positioning convex portion, and the second positioning portion may be a positioning concave portion.
[0012] 本発明に係るプラズマガンのチャンバへの取り付け構造では、前記位置決め凸部 は、第 2ピンであり、前記位置決め凹部は、位置決めすべき方向において前記第 2ピ ンが勘合する幅を有し、その他の方向において前記第 2ピンの幅より大きい幅を有し てもよい。  In the plasma gun chamber mounting structure according to the present invention, the positioning convex portion is a second pin, and the positioning concave portion has a width that allows the second pin to fit in a direction to be positioned. However, it may have a width larger than the width of the second pin in the other direction.
[0013] 本発明に係るプラズマガンのチャンバへの取り付け構造では、前記ロック機構は、 クランプ機構で構成されて!/、てもよレ、。  [0013] In the plasma gun chamber mounting structure according to the present invention, the lock mechanism may be a clamp mechanism! /.
発明の効果 [0014] 本発明のプラズマガンのチャンバへの取り付け構造によれば、容易に位置決めす ることができ、取り付け作業の作業効率をよくすることが可能となる。 The invention's effect [0014] According to the structure for mounting a plasma gun on a chamber according to the present invention, it is possible to easily perform positioning, and it is possible to improve the work efficiency of the mounting work.
図面の簡単な説明  Brief Description of Drawings
[0015] [図 1]図 1は、本発明の実施の形態 1に係るプラズマガンのチャンバへの取り付け構 造の概略構成を示す模式図である。  FIG. 1 is a schematic diagram showing a schematic configuration of a structure for attaching a plasma gun to a chamber according to Embodiment 1 of the present invention.
[図 2]図 2は、図 1に示したプラズマガンのチャンバへの取り付け構造の II II線に沿 つた断面を示す断面図である。  [FIG. 2] FIG. 2 is a cross-sectional view showing a cross section taken along line II-II of the structure for attaching the plasma gun shown in FIG. 1 to the chamber.
[図 3]図 3は、図 1に示したプラズマガンの第 1冷却流路の概略構成を示す模式図で ある。  FIG. 3 is a schematic diagram showing a schematic configuration of a first cooling flow path of the plasma gun shown in FIG. 1.
[図 4]図 4は、図 1に示したプラズマガンのチャンバへの取り付け構造の III III線に 沿った断面を示す断面図である。  [FIG. 4] FIG. 4 is a cross-sectional view showing a cross section taken along line III-III of the structure of the plasma gun shown in FIG. 1 attached to the chamber.
[図 5]図 5は、図 1に示したプラズマガンの第 2冷却流路の概略構成を示す模式図で ある。  FIG. 5 is a schematic diagram showing a schematic configuration of a second cooling flow path of the plasma gun shown in FIG. 1.
[図 6]図 6は、図 4に示したロック機構の概略構成を示した模式図である。  FIG. 6 is a schematic diagram showing a schematic configuration of the lock mechanism shown in FIG. 4.
符号の説明  Explanation of symbols
[0016] 1 プラズマガン [0016] 1 Plasma gun
3 ロック機構 3 Lock mechanism
3a 基部  3a base
3b 操作アーム  3b Operation arm
3c 係止アーム  3c Locking arm
3d リンク部材  3d link member
4 第 1中間電極  4 First intermediate electrode
5 第 2中間電極  5 Second intermediate electrode
6 中間電極ユニット  6 Intermediate electrode unit
7 力ソード部  7 Power sword section
8 第 1ハウジング 容器 8 First housing container
放電空間 フランジ  Discharge space Flange
フランジ  Flange
蓋部材  Lid member
第 1位置決め凹部 補助陰極  First positioning recess Auxiliary cathode
主陰極  Main cathode
力ソード  Force sword
保護部材  Protective member
窓部材  Window member
冷却流路用凹部 冷却流路用蓋部材 第 3冷却流路 第 3冷却媒体供給口 第 3冷却媒体排出口 溝  Cooling channel recess Cooling channel lid member Third cooling channel Third cooling medium supply port Third cooling medium discharge port Groove
Oリング  O-ring
固定部材  Fixed member
貫通孔  Through hole
リング部材 ボル卜  Ring member
第 1フランジa 第 1フランジ本体部b 第 1蓋部  1st flange a 1st flange body b 1st lid
プラズマ通過口a 貫通孔 Plasma passage port a Through hole
b 貫通孔 第 2位置決め凹部 b Through hole Second positioning recess
溝  Groove
Oリング  O-ring
固定部材  Fixed member
貫通孔  Through hole
ボル卜  Bol
リング部材  Ring member
第 1冷却流路  1st cooling channel
第 1冷却流路溝  1st cooling channel groove
第 1ホルダ部 First holder part
a 第 1外筒a First outer cylinder
b 第 1内筒 b First inner cylinder
第 1筒状空間  1st cylindrical space
第 1冷却媒体排出口（貫通孔) 第 1冷却媒体供給口（貫通孔) 第 1電極部材  First cooling medium discharge port (through hole) First cooling medium supply port (through hole) First electrode member
保護プレート  Protective plate
第 1磁石  1st magnet
第 1止め部材  First stop member
絶縁部材  Insulation material
溝  Groove
Oリング  O-ring
短絡防止溝  Short-circuit prevention groove
小径部  Small diameter part
フランジ  Flange
第 2ホルダ部材 Second holder member
a 第 2外筒a Second outer cylinder
b 第 2内筒 溝 b Second inner cylinder groove
Oリング  O-ring
小径部  Small diameter part
第 2筒状空間  Second cylindrical space
位置決め突起部  Positioning protrusion
第 2フランジ 2nd flange
a 第 2フランジ本体部b 第 2蓋部 a Second flange body b Second lid
プラズマ流出口 Plasma outlet
a 負通孔a Negative hole
b 貫通孔 b Through hole
第 2冷却流路  Second cooling channel
第 2冷却流路溝  Second cooling channel groove
小径部  Small diameter part
第 2冷却媒体供給口（貫通孔) 第 2冷却媒体排出口（貫通孔) 第 2電極部材  Second cooling medium supply port (through hole) Second cooling medium discharge port (through hole) Second electrode member
第 2磁石  Second magnet
保護プレート  Protective plate
ねじ孔  Screw hole
位置決め貫通孔  Positioning through hole
締結具  Fastener
第 2止め部材  Second stop member
継ぎ手  Fitting
壁  Wall
凹部  Recess
段面  Stepped surface
プラズマ流入口（貫通孔） 84 第 2絶縁部材 Plasma inlet (through hole) 84 Second insulation member
84a 突起部  84a Projection
85 リング部材  85 Ring member
86 溝  86 groove
87 Oリング  87 O-ring
88 溝  88 groove
89 Oリング  89 O-ring
90 第 1ピン (第 1係合部;係合凸部）  90 1st pin (1st engaging part; engaging convex part)
90a 本体部 90a body
90b 頭部 90b head
91 係合凹部 (第 2係合部）  91 Engaging recess (second engaging part)
91 a 大孔部  91 a Large hole
91b 小孔部  91b Small hole
92 絶縁カラー  92 Insulation collar
93a 絶縁カラー  93a Insulation collar
93b 軸部  93b Shaft
94 第 2ピン (位置決め凸部；第 1位置決め部） 94 2nd pin (Positioning convex part; 1st positioning part)
95 切り欠き部（第 2位置決め部） 95 Notch (second positioning part)
96 第 1中間電極サブユニット  96 1st intermediate electrode subunit
97 第 2中間電極サブユニット  97 Second intermediate electrode subunit
98 台  98 units
99 軸部  99 Shaft
100 プラズマガンのチャンバへの取り付け構造 100 Plasma gun mounting structure
101 仕切り板 101 partition
102 隙間  102 Clearance
103a 第 1冷却往路  103a First cooling forward
103b 第 1冷却復路  103b First cooling return path
104 仕切り板 106a 第 2冷却往路 104 divider 106a Second cooling path
106b 第 2冷却復路  106b Second cooling return path
121 凹部  121 recess
122 外周部  122 outer periphery
123 凹部  123 recess
124 外周部  124 Outer part
125 凹部  125 recess
201 回転軸  201 Rotation axis
202 回転軸  202 Rotation axis
203 回転軸  203 Rotation axis
204 回転軸  204 Rotation axis
301a ベース部  301a Base part
301b 固定部  301b Fixed part
302a グリップ部  302a Grip part
302b アーム部  302b Arm
303a 第 1部分  303a 1st part
303b 第 2部分  303b second part
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0017] 以下、本発明の好ましい実施の形態を、図面を参照しながら説明する。 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
(実施の形態 1)  (Embodiment 1)
図 1は、本発明の実施の形態 1に係るプラズマガンのチャンバへの取り付け構造の 概略構成を示す模式図である。なお、図 1においては、一部を省略している。また、 図 1において、プラズマガンのチャンバへの取り付け構造における上下方向を、図に おける上下方向として表わしている。  FIG. 1 is a schematic diagram showing a schematic configuration of a structure for attaching a plasma gun to a chamber according to Embodiment 1 of the present invention. In FIG. 1, some parts are omitted. In FIG. 1, the vertical direction in the plasma gun chamber mounting structure is shown as the vertical direction in the figure.
[0018] 図 1に示すように、本実施の形態 1に係るプラズマガンのチャンバへの取り付け構造 100は、プラズマガン 1と、チャンバ 2と、ロック機構 3 (図 4参照）と、を有している。  [0018] As shown in FIG. 1, a plasma gun mounting structure 100 according to Embodiment 1 includes a plasma gun 1, a chamber 2, and a lock mechanism 3 (see FIG. 4). ing.
[0019] プラズマガン 1は、力ソード部 7と中間電極ユニット 6を有しており、中間電極ユニット 6は、第 1中間電極 4及び第 1磁石 49からなる第 1中間電極サブユニット 96と、第 2中 間電極 5及び第 2磁石 72からなる第 2中間電極サブユニット 97と、絶縁部材 51と、を 有している。 The plasma gun 1 has a force sword portion 7 and an intermediate electrode unit 6, and the intermediate electrode unit 6 includes a first intermediate electrode subunit 96 composed of the first intermediate electrode 4 and the first magnet 49, a second intermediate electrode subunit 97 composed of the second intermediate electrode 5 and the second magnet 72, an insulating member 51, ,have.
[0020] まず、力ソード部 7について説明する。  [0020] First, the force sword portion 7 will be described.
[0021] 力ソード部 7は、円筒状の容器 10を有している。そして、容器 10の内部空間により、 放電空間 11が形成される。  The force sword portion 7 has a cylindrical container 10. A discharge space 11 is formed by the internal space of the container 10.
[0022] 容器 10の両端には、それぞれフランジ 12、 13が設けられている。容器 10のフラン ジ 13側の端は開放されている。一方、容器 10のフランジ 12側の端は、円板状の蓋 部材 14によって閉鎖されている。蓋部材 14のフランジ 12と当接する面（以下、蓋部 材 14の裏面という）には、厚み方向に凹んだ環状の第 1位置決め凹部 15が、フラン ジ 12の外周面と第 1位置決め凹部 15を構成する外周壁とが接するように設けられて いる。すなわち、第 1位置決め凹部 15が、フランジ 12と勘合するように設けられてい る。これにより、容器 10と蓋部材 14とは、各々の中心軸が一致するように互いに位置 決めされる。  [0022] At both ends of the container 10, flanges 12 and 13 are provided, respectively. The flange 10 side end of the container 10 is open. On the other hand, the end of the container 10 on the flange 12 side is closed by a disc-like lid member 14. On the surface of the lid member 14 that contacts the flange 12 (hereinafter referred to as the back surface of the lid member 14), an annular first positioning recess 15 that is recessed in the thickness direction is formed between the outer peripheral surface of the flange 12 and the first positioning recess 15. Is provided so as to be in contact with the outer peripheral wall constituting the. That is, the first positioning recess 15 is provided so as to engage with the flange 12. As a result, the container 10 and the lid member 14 are positioned with respect to each other so that their central axes coincide.
[0023] 第 1位置決め凹部 15には、厚み方向に環状の溝 26が形成されており、 '溝 26には、 気密性を保っための Oリング 27が配設されている。また、容器 10の周壁のフランジ 1 2側端部には、円環状の固定部材 28が、容器 10に嵌入されており、固定部材 28とフ ランジ 12との間には、リング部材 30が、容器 10に嵌入されて配設されている。固定 部材 28の適所には、厚み方向に貫通孔 29が複数設けられており、貫通孔 29には、 ボルト 31が揷通されている。このボルト 31の先端部は、蓋部材 14に形成されたねじ 孔に螺入されている。このように、ボルト 31力 固定部材 28と蓋部材 14とを締結する ことにより、容器 10と蓋部材 14が固定されている。このとき、リング部材 30によって、 フランジ 12に過度の力が加わるのが防止され、フランジ 12が破損されるのを防止す ること力 Sできる。これにより、容器 10と蓋部材 14の位置決め及び取り付けを容易に行 うこと力 Sでさる。  [0023] An annular groove 26 is formed in the first positioning recess 15 in the thickness direction, and an 'O-ring 27 for maintaining airtightness is disposed in the groove 26. An annular fixing member 28 is fitted into the container 10 at the flange 12 side end of the peripheral wall of the container 10, and a ring member 30 is interposed between the fixing member 28 and the flange 12. The container 10 is inserted into the container 10. A plurality of through holes 29 are provided at appropriate positions of the fixing member 28 in the thickness direction, and bolts 31 are passed through the through holes 29. The tip of the bolt 31 is screwed into a screw hole formed in the lid member 14. Thus, the container 10 and the lid member 14 are fixed by fastening the bolt 31 force fixing member 28 and the lid member 14. At this time, the ring member 30 can prevent excessive force from being applied to the flange 12 and can prevent the flange 12 from being damaged. This facilitates the positioning and attachment of the container 10 and the lid member 14 with a force S.
[0024] 蓋部材 14の表面には、厚み方向に凹んだ環状の冷却流路用凹部 21が、後述する 補助陰極 16の基端部を囲むように設けられている。冷却流路用凹部 21には、冷却 流路用凹部 21の開口部を覆うように冷却流路用蓋部材 22が設けられている。冷却 流路用凹部 21と冷却流路用蓋部材 22で形成される空間が、第 3冷却流路 23を構 成する。そして、冷却流路用蓋部材 22の適所には、冷却媒体を第 3冷却流路 23に 供給及び排出するための第 3冷却媒体供給口 24及び第 3冷却媒体排出口 25がそ れぞれ設けられている。第 3冷却媒体供給口 24は、 L字状の継ぎ手 78を介して、後 述する第 1冷却媒体排出口 45と適宜な配管により接続されている。また、第 3冷却媒 体排出口 25は、適宜な配管により冷却媒体供給装置（図示せず）と接続されている。 このように形成された第 3冷却流路 23に冷却媒体 (ここでは、水）を流すことにより、補 助陰極 16の基端部が、冷却される。 [0024] On the surface of the lid member 14, an annular cooling channel recess 21 that is recessed in the thickness direction is provided so as to surround a base end portion of an auxiliary cathode 16 to be described later. The cooling channel recess 21 is provided with a cooling channel lid member 22 so as to cover the opening of the cooling channel recess 21. cooling A space formed by the channel recess 21 and the cooling channel lid member 22 constitutes the third cooling channel 23. A third cooling medium supply port 24 and a third cooling medium discharge port 25 for supplying and discharging the cooling medium to and from the third cooling flow path 23 are respectively provided at appropriate positions on the cooling flow path lid member 22. Is provided. The third cooling medium supply port 24 is connected to a first cooling medium discharge port 45, which will be described later, through appropriate piping through an L-shaped joint 78. The third cooling medium discharge port 25 is connected to a cooling medium supply device (not shown) by appropriate piping. By flowing a cooling medium (here, water) through the third cooling flow path 23 formed in this way, the base end portion of the auxiliary cathode 16 is cooled.
[0025] 蓋部材 14には、蓋部材 14の中心部を気密的に貫通して、容器 10の中心軸に沿つ て延びるように、タンタル (Ta)で構成された円筒状の補助陰極 16が配設されている 。補助陰極 16の基端部は、図示されないアルゴン (Ar)ガスタンクと適宜な配管によ り接続されており、補助陰極 16の先端力 Arガスが放電空間 11内に供給される。ま た、補助陰極 16の先端近傍の外周面には、 6ホウ化ランタン (LaB )で構成された円 The lid member 14 has a cylindrical auxiliary cathode 16 made of tantalum (Ta) so as to penetrate the central portion of the lid member 14 in an airtight manner and extend along the central axis of the container 10. Is arranged. The base end portion of the auxiliary cathode 16 is connected to an argon (Ar) gas tank (not shown) by appropriate piping, and the tip force Ar gas of the auxiliary cathode 16 is supplied into the discharge space 11. In addition, the outer peripheral surface near the tip of the auxiliary cathode 16 has a circle made of lanthanum hexaboride (LaB).
6  6
環状の主陰極 17が設けられている。補助陰極 16と主陰極 17によって、力ソード 18 が構成されている。力ソード 18は、適宜な配線により、直流電源からなる主電源（図 示せず）の負極と抵抗体（図示せず）を介して電気的に接続されて!/、る。  An annular main cathode 17 is provided. The auxiliary cathode 16 and the main cathode 17 constitute a force sword 18. The force sword 18 is electrically connected to the negative electrode of a main power source (not shown) composed of a DC power source and a resistor (not shown) by appropriate wiring.
[0026] また、蓋部材 14の裏面には、蓋部材 14の中心軸と同軸状に、蓋部材 14の厚み方 向に延びるように、補助陰極 16よりも径の大きいモリブデン (Mo)、又は、タンダステ ン (W)で構成された円筒状の保護部材 19が、蓋部材 14に気密的に配設されている 。保護部材 19の先端には、タングステンで構成された円環状の窓部材 20が設けられ ている。この保護部材 19と窓部材 20により、力ソード 18が保護される。  [0026] Further, on the back surface of the lid member 14, molybdenum (Mo) having a diameter larger than that of the auxiliary cathode 16 so as to extend in the thickness direction of the lid member 14 coaxially with the central axis of the lid member 14, or A cylindrical protective member 19 made of tandastain (W) is hermetically disposed on the lid member 14. An annular window member 20 made of tungsten is provided at the tip of the protection member 19. The force sword 18 is protected by the protection member 19 and the window member 20.
[0027] 次に、中間電極ユニット 6について説明する。  Next, the intermediate electrode unit 6 will be described.
[0028] まず、第 1中間電極サブユニット 96について説明する。  [0028] First, the first intermediate electrode subunit 96 will be described.
[0029] 第 1中間電極サブユニット 96は、板状の第 1フランジ 32と筒状の第 1ホルダ部材 43 力、らなる第 1ハウジング 8と、筒状の第 1電極部材 47と、を有する第 1中間電極 4を備 えており、フランジ 13と当接するように設けられている。具体的には、第 1フランジ 32 1S フランジ 13と当接している。そして、第 1フランジ 32の一方の主面には、第 1ホル ダ部材 43の一端が接続されている。また、第 1ホルダ部材 43の内孔には、第 1電極 部材 47が嵌揷されている。 The first intermediate electrode subunit 96 includes a plate-shaped first flange 32, a cylindrical first holder member 43, a first housing 8 and a cylindrical first electrode member 47. The first intermediate electrode 4 is provided and is provided so as to contact the flange 13. Specifically, the first flange 32 1S is in contact with the flange 13. One end of the first holder member 43 is connected to one main surface of the first flange 32. In addition, the first electrode in the inner hole of the first holder member 43 The member 47 is fitted.
[0030] 第 1フランジ 32は、円板状の第 1フランジ本体部 32aと円板状の第 1蓋部 32bとを有 している。第 1フランジ本体部 32a及び第 1蓋部 32bの中心部には、貫通孔 33a、 33 bが設けられている。この貫通孔 33a、 33b力 プラズマ通過口 33を構成する。そして 、第 1フランジ本体部 32aのフランジ 13と当接する主面（以下、第 1フランジ本体部 32 aの表面という）には、厚み方向に凹んだ環状の第 2位置決め凹部 34が設けられてい る。この第 2位置決め凹部 34に、フランジ 13が勘合する（嵌揷される）ことで、容器 10 の中心軸と第 1フランジ本体部 32aの中心軸とがー致するように、第 1フランジ本体部 32aに対し、容器 10が位置決めされる。また、第 1フランジ本体部 32aの表面の第 2 位置決め凹部 34より内方の部分には、該第 2位置決め凹部 34より一段低い凹部 12 1が形成されている。そして、第 2位置決め凹部 34の内側端部は、フランジ 13の内周 面と面一になるように構成されている。これにより、容器 10と第 1フランジ本体部 32a の位置決めを容易にすることができる。  [0030] The first flange 32 has a disc-shaped first flange main body portion 32a and a disc-shaped first lid portion 32b. Through holes 33a and 33b are provided in the central portions of the first flange main body portion 32a and the first lid portion 32b. These through-holes 33a and 33b constitute a plasma passing port 33. Further, an annular second positioning recess 34 that is recessed in the thickness direction is provided on a main surface that contacts the flange 13 of the first flange body 32a (hereinafter referred to as a surface of the first flange body 32a). . By fitting (fitting) the flange 13 to the second positioning recess 34, the first flange body part is aligned with the center axis of the container 10 and the center axis of the first flange body part 32a. The container 10 is positioned with respect to 32a. In addition, a recess 121 that is one step lower than the second positioning recess 34 is formed in the inner portion of the surface of the first flange main body 32 a from the second positioning recess 34. The inner end portion of the second positioning recess 34 is configured to be flush with the inner peripheral surface of the flange 13. Thereby, the positioning of the container 10 and the first flange main body 32a can be facilitated.
[0031] 第 2位置決め凹部 34の底面には、環状の溝 35が形成されており、溝 35には、気密 性を保っための Oリング 36が配設されている。また、容器 10の周壁のフランジ 13側 端部には、円環状の固定部材 37が、容器 10に嵌入されており、固定部材 37とフラン ジ 13との間には、リング部材 40が、容器 10に嵌入されて配設されている。固定部材 37の適所には、貫通孔 38が複数設けられており、貫通孔 38には、ボノレト 39力 S揷通 されている。このボルト 39の先端部力 第 1フランジ本体部 32aに設けられたねじ孔（ 図示せず）に螺入されている。このように、ボルト 39が、固定部材 37と第 1フランジ本 体部 32aとを締結することにより、容器 10と第 1フランジ本体部 32aが固定される。こ のとき、リング部材 40によって、フランジ 13に過度の力が加わるのが防止され、フラン ジ 13が破損されるのを防止することができる。これにより、容器 10と第 1フランジ本体 部 32aの位置決め及び取り付けを容易に行うことができる。  [0031] An annular groove 35 is formed in the bottom surface of the second positioning recess 34, and an O-ring 36 for maintaining airtightness is disposed in the groove 35. An annular fixing member 37 is fitted into the container 10 at the flange 13 side end of the peripheral wall of the container 10, and a ring member 40 is inserted between the fixing member 37 and the flange 13. 10 is inserted and arranged. A plurality of through holes 38 are provided at appropriate positions of the fixing member 37, and Bonoleto 39 force S is passed through the through holes 38. The tip portion force of the bolt 39 is screwed into a screw hole (not shown) provided in the first flange body portion 32a. In this manner, the container 39 and the first flange main body 32a are fixed by the bolt 39 fastening the fixing member 37 and the first flange main body 32a. At this time, the ring member 40 can prevent an excessive force from being applied to the flange 13 and prevent the flange 13 from being damaged. As a result, the container 10 and the first flange main body 32a can be easily positioned and attached.
[0032] 第 1フランジ本体部 32aの裏面には外周部 122を凸部として残すようにして凹部 12 3が形成されている。凹部 123には、後述する第 1冷却流路 41を構成する第 1冷却 流路溝 42が設けられている。そして、凹部 123に第 1蓋部 32bが嵌め込まれて、第 1 冷却溝 42を覆っている。第 1蓋部 32bの上部には、第 1冷却流路溝 42と連通するよ うに貫通孔 46が設けられており、該貫通孔 46が、第 1冷却媒体供給口 46を形成す る。第 1冷却媒体供給口 46は、適宜な配管により、後述する第 2冷却媒体排出口 70 と接続されている。 A concave portion 123 is formed on the back surface of the first flange main body portion 32a so that the outer peripheral portion 122 remains as a convex portion. The recess 123 is provided with a first cooling channel groove 42 that constitutes a first cooling channel 41 described later. Then, the first lid portion 32 b is fitted into the recess 123 to cover the first cooling groove 42. The upper part of the first lid part 32b communicates with the first cooling channel groove 42. A through hole 46 is provided, and the through hole 46 forms a first cooling medium supply port 46. The first cooling medium supply port 46 is connected to a second cooling medium discharge port 70 described later by appropriate piping.
[0033] そして、第 1フランジ 32には、第 1ホルダ部材 43の一端が接続されており、第 1ホル ダ部材 43は、プラズマ通過口 33の中心軸と同軸状に設けられている。第 1ホルダ部 材 43は、第 1外筒 43aと第 1内筒 43bとで構成されている。第 1外筒 43aの内孔はカ ソード 18から遠い方の端部が小径に形成されていて、この小径部 56に嵌合するよう にして、第 1内筒 43bが第 1外筒 43aに嵌揷されている。これにより、第 1内筒 43bと 第 1外筒 43aとの間に軸方向に延びる第 1筒状空間 44が形成されている。第 1内筒 4 3bの力ソード 18に近い方の端部は、第 1フランジ本体部 32aに設けられた貫通孔 33 aの開口部に嵌揷されている。第 1外筒 43aの力ソード 18に近い方の端部は、第 1蓋 部 32bの貫通孔 33bに嵌揷され、その端が第 1フランジ本体部 32aの凹部 123の底 面と当接している。これにより、第 1筒状空間 44が閉鎖される。  One end of the first holder member 43 is connected to the first flange 32, and the first holder member 43 is provided coaxially with the central axis of the plasma passage port 33. The first holder member 43 includes a first outer cylinder 43a and a first inner cylinder 43b. The inner hole of the first outer cylinder 43a is formed with a small diameter at the end far from the cathode 18, and the first inner cylinder 43b is connected to the first outer cylinder 43a so as to be fitted to the small diameter part 56. It is inserted. Thereby, a first cylindrical space 44 extending in the axial direction is formed between the first inner cylinder 43b and the first outer cylinder 43a. The end of the first inner cylinder 43b closer to the force sword 18 is fitted into the opening of the through hole 33a provided in the first flange main body 32a. The end of the first outer cylinder 43a closer to the force sword 18 is fitted into the through hole 33b of the first lid portion 32b, and the end abuts against the bottom surface of the recess 123 of the first flange body portion 32a. Yes. Thereby, the first cylindrical space 44 is closed.
[0034] また、第 1外筒 43aの力ソード 18から遠い方の端部には、中心軸に向かって内側に 突出したフランジ 56が設けられており、フランジ 56によって第 1筒状空間 44が閉鎖さ れている。そして、第 1冷却流路溝 42及び第 1筒状空間 44が、第 1冷却流路 41を構 成する。なお、第 1内筒 43bの力ソード 18から遠い方の端部は、フランジ 56の端面よ りも軸方向に突出するように配設されている。また、第 1中間電極 4は、適宜な配線に より、主電源（図示せず）の正極と抵抗体（図示せず）を介して電気的に接続されて!/、  In addition, a flange 56 that protrudes inward toward the central axis is provided at the end of the first outer cylinder 43a far from the force sword 18, and the first cylindrical space 44 is formed by the flange 56. It is closed. The first cooling channel groove 42 and the first cylindrical space 44 constitute a first cooling channel 41. Note that the end of the first inner cylinder 43b far from the force sword 18 is disposed so as to protrude in the axial direction from the end face of the flange 56. The first intermediate electrode 4 is electrically connected to the positive electrode of a main power source (not shown) and a resistor (not shown) by appropriate wiring! /,
[0035] ここで、第 1冷却流路 41について、図 1乃至図 3を参照しながら詳細に説明する。 Here, the first cooling channel 41 will be described in detail with reference to FIGS. 1 to 3.
[0036] 図 2は、図 1に示したプラズマガン 1のチャンバ 2への取り付け構造 100の II— II線 に沿った断面図である。図 3は、第 1冷却流路 41の概略構成を示す模式図である。 なお、図 2及び図 3において、プラズマガン 1のチャンバ 2への取り付け構造 100にお ける上下左右方向を、図における上下左右方向として表わしている。 FIG. 2 is a cross-sectional view taken along line II-II of structure 100 for attaching plasma gun 1 to chamber 2 shown in FIG. FIG. 3 is a schematic diagram showing a schematic configuration of the first cooling channel 41. 2 and 3, the vertical and horizontal directions in the structure 100 for attaching the plasma gun 1 to the chamber 2 are represented as vertical and horizontal directions in the drawings.
[0037] 図 1及び図 2に示すように、第 1フランジ 32の第 1フランジ本体部 32aの下部には、 厚み方向に貫通する貫通孔 45が設けられている。該貫通孔 45が、第 1冷却媒体排 出口 45を構成する。そして、第 1フランジ本体部 32aの凹部 123の底面には、貫通孔 45に連通するように、第 1冷却流路溝 42が設けられている。 As shown in FIGS. 1 and 2, a through hole 45 penetrating in the thickness direction is provided in the lower portion of the first flange main body 32a of the first flange 32. The through hole 45 constitutes a first cooling medium discharge port 45. The bottom surface of the recess 123 of the first flange main body 32a has a through hole. A first cooling channel groove 42 is provided so as to communicate with 45.
[0038] 図 2に示すように、第 1冷却流路溝 42は、第 1冷却流路溝 42a乃至第 1冷却流路溝 42dから構成されており、第 1冷却流路溝 42aは、第 1冷却媒体供給口 46から第 1フ ランジ本体部 32aの外周に沿うようにして、第 1フランジ本体部 32aの下部まで引き回 されるように形成されている。そして、そこから、第 1冷却流路溝 42bが、径方向に沿 つて第 1筒状空間 44まで延設されている。そして、第 1冷却流路溝 42cは、第 1筒状 空間 44の上部から径方向に沿って第 1フランジ本体部 32aの上部まで延びるように 形成されている。そして、そこから、第 1冷却流路溝 42dが、第 1フランジ本体部 32a の外周に沿うようにして、貫通孔 45 (第 1冷却媒体排出口 45)と連通するように第 1フ ランジ本体部 32aの下部まで引き回されている。  [0038] As shown in FIG. 2, the first cooling flow channel groove 42 is composed of a first cooling flow channel groove 42a to a first cooling flow channel groove 42d, and the first cooling flow channel groove 42a is a first cooling flow channel groove 42a. 1 is formed so as to be routed from the cooling medium supply port 46 to the lower portion of the first flange body 32a along the outer periphery of the first flange body 32a. From there, the first cooling channel groove 42b extends to the first cylindrical space 44 along the radial direction. The first cooling channel groove 42c is formed so as to extend from the upper part of the first cylindrical space 44 to the upper part of the first flange main body part 32a along the radial direction. From there, the first cooling channel groove 42d extends along the outer periphery of the first flange body 32a and communicates with the through hole 45 (first cooling medium discharge port 45). It is routed to the bottom of part 32a.
[0039] また、図 3に示すように、第 1筒状空間 44には、該第 1筒状空間 44を仕切る一対の 仕切り板 101、 101が設けられている。仕切り板 101は、第 1内筒 43bの外周面と第 1 外筒 43aの内周面とに接続され、力ソード 18に近い側の端部は、第 1フランジ本体部 32aと接続され、一方、力ソード 18から遠い側の端部は、第 1外筒 43aの小径部 56と の間に、隙間 102を有するように設けられている。第 1筒状空間 44の仕切り板 101で 仕切られている一方の空間（第 1冷却流路溝 42bと連通されている側の空間）が、第 1冷却往路 103aを構成し、他方の空間（第 1冷却流路溝 42cと連通されている側の 空間）が、第 1冷却復路 103bを構成している。このように形成された冷却流路溝 42と 第 1筒状空間 44で構成されている第 1冷却流路 41に冷却媒体を流すことにより、 Oリ ング 36、第 1磁石 49及び第 1電極部材 47が冷却される。  Further, as shown in FIG. 3, the first cylindrical space 44 is provided with a pair of partition plates 101 and 101 that partition the first cylindrical space 44. The partition plate 101 is connected to the outer peripheral surface of the first inner cylinder 43b and the inner peripheral surface of the first outer cylinder 43a, and the end near the force sword 18 is connected to the first flange main body 32a, The end on the side far from the force sword 18 is provided so as to have a gap 102 between the small diameter portion 56 of the first outer cylinder 43a. One space partitioned by the partition plate 101 of the first cylindrical space 44 (the space on the side communicating with the first cooling flow path groove 42b) constitutes the first cooling forward path 103a, and the other space ( The space on the side communicating with the first cooling flow path groove 42c) constitutes the first cooling return path 103b. By flowing the cooling medium through the cooling channel groove 42 formed in this way and the first cooling channel 41 configured by the first cylindrical space 44, the O-ring 36, the first magnet 49, and the first electrode Member 47 is cooled.
[0040] また、第 1ホルダ部材 43 (正確には、第 1内筒 43b)には、タンタルで構成され、耐 熱性を有する円筒状の第 1電極部材 47が嵌揷されており、第 1電極部材 47は、ブラ ズマ通過口 33の中心軸と同軸状に設けられている。第 1電極部材 47は、ここでは、 その外周面に雄ねじが形成されており、内面に雌ねじが形成された第 1内筒 43bに 螺入されている。第 1電極部材 47の内部空間を、力ソード 18で発生したプラズマが 通過する。第 1電極部材 47は、力ソード 18に近い側の端部に外側に突出したフラン ジ 57を有しており、該フランジ 57と第 1フランジ 32の第 1フランジ本体部 32aとで、ド 一ナツ状の保護プレート 48を挟持している。これにより、放電空間 11等に存在する プラズマによって第 1フランジ 32がスパッタされるのを防止することができる。 [0040] Further, the first holder member 43 (more precisely, the first inner cylinder 43b) is fitted with a cylindrical first electrode member 47 made of tantalum and having heat resistance. The electrode member 47 is provided coaxially with the central axis of the plasma passage port 33. Here, the first electrode member 47 has a male screw formed on the outer peripheral surface thereof, and is screwed into a first inner cylinder 43b having a female screw formed on the inner surface thereof. Plasma generated by the force sword 18 passes through the internal space of the first electrode member 47. The first electrode member 47 has a flange 57 projecting outward at the end close to the force sword 18, and the flange 57 and the first flange body 32a of the first flange 32 are connected to each other. A nut-shaped protection plate 48 is sandwiched. As a result, it exists in the discharge space 11 etc. It is possible to prevent the first flange 32 from being sputtered by the plasma.
[0041] さらに、第 1ホルダ部材 43 (正確には、第 1外筒 43a)には、円環状の第 1磁石 49が 嵌入されており、第 1磁石 49はプラズマ通過口 33の中心軸と同軸状に設けられてい る。第 1磁石 49は、ここでは、永久磁石で構成されており、力ソード 18に近い側が N 極、力ソード 18に遠い側が S極となるように配設されている。そして、第 1止め部材 50 (ここでは、ナット）力 第 1磁石 49を第 1フランジ 32 (正確には、第 1蓋部 32b)とで挟 んで!/、て、これを第 1外筒 43aから抜け落ちな!/、ように止めてレ、る。 [0041] Furthermore, an annular first magnet 49 is fitted into the first holder member 43 (more precisely, the first outer cylinder 43a), and the first magnet 49 is connected to the central axis of the plasma passage port 33. It is provided coaxially. Here, the first magnet 49 is composed of a permanent magnet, and is arranged so that the side close to the force sword 18 is an N pole and the side far from the force sword 18 is an S pole. Then, the first stop member 50 (here, the nut) force The first magnet 49 is sandwiched between the first flange 32 (more precisely, the first lid portion 32b)! Do n’t fall out! / Stop like this.
[0042] 第 1ホルダ部材 43の他方の端部（正確には、第 1外筒 43aの端面）は、円環状の絶 縁部材 51の一方の端面と当接している。第 1外筒 43aの絶縁部材 51との当接面に は、環状の溝 52が形成されており、該溝 52には、気密性を保っための Oリング 53が 配設されている。また、絶縁部材 51の一部は、第 1内筒 43bに嵌入されている。これ により、第 1ホルダ部材 43と絶縁部材 51の位置決め及び取り付けを容易に行うことが できる。 The other end portion of the first holder member 43 (more precisely, the end surface of the first outer cylinder 43a) is in contact with one end surface of the annular insulating member 51. An annular groove 52 is formed on the contact surface of the first outer cylinder 43a with the insulating member 51, and an O-ring 53 for maintaining airtightness is disposed in the groove 52. Further, a part of the insulating member 51 is fitted into the first inner cylinder 43b. Thereby, the first holder member 43 and the insulating member 51 can be easily positioned and attached.
[0043] また、絶縁部材 51の外周面には、環状の短絡防止溝 54が設けられている。これに より、第 1中間電極等で生じた結露水が、絶縁部材 51の外周面を濡らすことにより発 生する第 1中間電極 4と第 2中間電極 5との間の短絡を防止することができる。  Further, an annular short-circuit preventing groove 54 is provided on the outer peripheral surface of the insulating member 51. As a result, the condensed water generated at the first intermediate electrode or the like can prevent a short circuit between the first intermediate electrode 4 and the second intermediate electrode 5 that occurs when the outer peripheral surface of the insulating member 51 is wetted. it can.
[0044] なお、ここでは、短絡防止用溝 54は、絶縁部材 51の外周面に環状に設けているが 、これに限定されず、絶縁部材 51の少なくとも下の部分に溝が設けられていればよ い。また、絶縁部材 51の直径寸法と、第 1外筒 43aの直径寸法と、後述する第 2外筒 58aの直径寸法と、が略一定となっており、絶縁部材 51、第 1外筒 43a及び第 2外筒 58aの外表面力 段差がないように形成している力、これに限定されず、絶縁部材 51 の直径寸法を第 1外筒 43a及び第 2外筒 58aの直径寸法より大きくし、段差を有する ように形成してもよい。このように形成すると結露水による第 1中間電極 4と第 2中間電 極 5との間に生じる短絡をより確実に防止することができる。  Here, the short-circuit preventing groove 54 is provided in an annular shape on the outer peripheral surface of the insulating member 51, but is not limited thereto, and a groove is provided in at least a lower portion of the insulating member 51. It ’s good. Further, the diameter dimension of the insulating member 51, the diameter dimension of the first outer cylinder 43a, and the diameter dimension of the second outer cylinder 58a described later are substantially constant, and the insulating member 51, the first outer cylinder 43a, and The outer surface force of the second outer cylinder 58a is a force formed so as not to have a step, but is not limited to this. Alternatively, a step may be formed. When formed in this way, it is possible to more reliably prevent a short circuit between the first intermediate electrode 4 and the second intermediate electrode 5 caused by condensed water.
[0045] 次に、第 2中間電極サブユニット 97について説明する。  Next, the second intermediate electrode subunit 97 will be described.
[0046] 第 2中間電極サブユニット 97は、筒状の第 2ホルダ部材 58と板状の第 2フランジ 64 力、らなる第 2ハウジング 9と、筒状の第 2電極部材 71と、を有する第 2中間電極 5を備 えており、絶縁部材 51の他方の端面と当接している。具体的には、第 2ホルダ部材 5 8力 絶縁部材 51と当接している。そして、第 2ホルダ部材 58の力ソード 18から遠い 側の端部は、第 2フランジ 64に当接している。また、第 2ホルダ部材 58の内孔には、 モリブデンで構成され、耐熱性を有する円筒状の第 2電極部材 71が嵌揷されている 。なお、第 2中間電極 5は、適宜な配線により、主電源（図示せず）の正極と抵抗体（ 図示せず）を介して電気的に接続されて!/、る。 The second intermediate electrode subunit 97 includes a cylindrical second holder member 58, a plate-like second flange 64 force, a second housing 9 and a cylindrical second electrode member 71. A second intermediate electrode 5 is provided and is in contact with the other end face of the insulating member 51. Specifically, the second holder member 5 8 force Abuts against insulating member 51. The end of the second holder member 58 on the side far from the force sword 18 is in contact with the second flange 64. In addition, a cylindrical second electrode member 71 made of molybdenum and having heat resistance is fitted into the inner hole of the second holder member 58. The second intermediate electrode 5 is electrically connected to the positive electrode of a main power source (not shown) and a resistor (not shown) by appropriate wiring.
[0047] 第 2ホルダ部材 58は、円筒状の第 2外筒 58aと円筒状の第 2内筒 58bを有しており 、第 2ホルダ部材 58は、プラズマ通過口 33の中心軸と同軸状に設けられている。第 2 外筒 58aの力ソード 18に近い方の端部が小径に形成されていて、この小径部 61に 嵌合するようにして、第 2内筒 58bが第 2外筒 58aに嵌揷されている。これにより、第 2 内筒 58bと第 2外筒 58aとの間に軸方向に延びる第 2筒状空間 62が形成されている [0047] The second holder member 58 has a cylindrical second outer cylinder 58a and a cylindrical second inner cylinder 58b, and the second holder member 58 is coaxial with the central axis of the plasma passage port 33. Is provided. The end portion of the second outer cylinder 58a closer to the force sword 18 is formed with a small diameter, and the second inner cylinder 58b is fitted into the second outer cylinder 58a so as to be fitted to the small diameter section 61. ing. Thus, a second cylindrical space 62 extending in the axial direction is formed between the second inner cylinder 58b and the second outer cylinder 58a.
[0048] 上述したように、第 2ホルダ部材 58 (正確には、第 2外筒 58a)の力ソード 18に近い 側の端面は、絶縁部材 51の端面と当接しており、第 2外筒 58aの絶縁部材 51との当 接面には、環状の溝 59が形成されており、該溝 59には、 Oリング 60が配設されてい る。また、第 2内筒 58bの力ソード 18に近い側の端部には、外周面側に切り欠きを有 する位置決め突起部 63が設けられている。この位置決め突起部 63に、絶縁部材 51 の一部が嵌入されることにより、絶縁部材 51と第 2ホルダ部材 58との位置決め及び 取り付けを容易に行うことができる。 [0048] As described above, the end surface of the second holder member 58 (more precisely, the second outer cylinder 58a) closer to the force sword 18 is in contact with the end surface of the insulating member 51, and the second outer cylinder An annular groove 59 is formed in the contact surface of the 58a with the insulating member 51, and an O-ring 60 is disposed in the groove 59. A positioning projection 63 having a notch on the outer peripheral surface side is provided at the end of the second inner cylinder 58b on the side close to the force sword 18. By inserting a part of the insulating member 51 into the positioning protrusion 63, the insulating member 51 and the second holder member 58 can be easily positioned and attached.
[0049] 第 2内筒 58bの力ソード 18に遠い方の端部は、後述する第 2フランジ本体部 64aに 設けられた貫通孔 65aの開口部に嵌揷されている。第 2外筒 58aの力ソード 18に遠 い方の端部は、第 2蓋部 64bの貫通孔 65bに嵌揷され、その端が第 2フランジ本体部 64aの凹部 125の底面と当接している。これにより、第 2筒状空間 62が閉鎖される。 そして、第 2筒状空間 62が、第 2冷却流路 66を構成する。  [0049] The end of the second inner cylinder 58b far from the force sword 18 is fitted into an opening of a through hole 65a provided in the second flange main body 64a described later. The end of the second outer cylinder 58a far from the force sword 18 is fitted into the through hole 65b of the second lid 64b, and the end abuts the bottom surface of the recess 125 of the second flange body 64a. Yes. As a result, the second cylindrical space 62 is closed. The second cylindrical space 62 constitutes the second cooling channel 66.
[0050] また、第 2ホルダ部材 58 (正確には、第 2外筒 58a)には、円環状の第 2磁石 72が、 嵌入されており、第 2磁石 72は、プラズマ通過口 33の中心軸と同軸状に設けられて いる。第 2磁石 72は、ここでは、電磁コイルで構成されており、力ソード 18に近い側が S極、力ソード 18に遠い側が N極とする向きの電流が通電されている。そして、第 2止 め部材 77 (ここでは、ナット）が、第 2磁石 72を第 2フランジ 64とで挟んでいて、これを 第 2外筒 58aから抜けな!/、ように止めてレ、る。 [0050] Further, an annular second magnet 72 is fitted into the second holder member 58 (more precisely, the second outer cylinder 58a), and the second magnet 72 is the center of the plasma passage port 33. It is provided coaxially with the shaft. Here, the second magnet 72 is composed of an electromagnetic coil, and a current is applied in a direction in which the side close to the force sword 18 is the S pole and the side far from the force sword 18 is the N pole. A second stopper member 77 (here, a nut) sandwiches the second magnet 72 with the second flange 64, and Don't come out of the second outer cylinder 58a!
[0051] 第 2フランジ 64は、円板状の第 2フランジ本体部 64aと円板状の第 2蓋部 64bを有 しており、第 2フランジ本体部 64a及び第 2蓋部 64bには、それぞれ中心部に厚み方 向に貫通する貫通孔 65a、 65bが設けられている。この貫通孔 65a、 65b力 プラズ マ流出口 65を構成する。  [0051] The second flange 64 has a disk-shaped second flange body 64a and a disk-shaped second lid 64b. The second flange body 64a and the second lid 64b include Through holes 65a and 65b are provided in the center of each through the thickness direction. These through holes 65a and 65b constitute a plasma outlet 65.
[0052] 第 2フランジ本体部 64aの貫通孔 65aには、第 2内筒 58bの力ソード 18から遠い方 の端部が嵌揷されており、第 2フランジ本体部 64aは、プラズマ通過口 33の中心軸と 同軸状に設けられている。また、第 2フランジ本体部 64aの力ソード 18に近い側の主 面（以下、第 2フランジ本体部 64aの表面という）には、外周部 124を凸部として残す ようにして、凹部 125が形成されている。凹部 125には、第 2冷却流路 66を構成する 第 2冷却流路溝 67が設けられている。そして、凹部 125に第 2蓋部 64bがはめ込ま れて第 2冷却流路溝 67を覆っている。  [0052] The end of the second inner cylinder 58b far from the force sword 18 is fitted in the through hole 65a of the second flange main body 64a, and the second flange main body 64a is connected to the plasma passage port 33. It is provided coaxially with the central axis. In addition, a recess 125 is formed on the main surface of the second flange body 64a close to the force sword 18 (hereinafter referred to as the surface of the second flange body 64a) so that the outer periphery 124 remains as a protrusion. Has been. The recess 125 is provided with a second cooling channel groove 67 that constitutes the second cooling channel 66. Then, the second lid portion 64 b is fitted in the recess 125 and covers the second cooling flow channel groove 67.
[0053] 第 2蓋部 64bは、プラズマ通過口 33の中心軸と同軸状に設けられており、第 2蓋部  [0053] The second lid portion 64b is provided coaxially with the central axis of the plasma passage port 33, and the second lid portion
64bには、第 2外筒 58aの力ソード 18から遠い側の端部が当接している。具体的には 、第 2外筒 58aの該端部には、小径部 68が形成されており、該小径部 68が第 2蓋部 64bの貫通孔 65bに嵌揷され、その先端が、第 2フランジ本体部 64aの凹部 125の底 面に当接している。  The end of the second outer cylinder 58a on the side far from the force sword 18 is in contact with 64b. Specifically, a small diameter portion 68 is formed at the end portion of the second outer cylinder 58a, the small diameter portion 68 is fitted into the through hole 65b of the second lid portion 64b, and the tip thereof is 2 It contacts the bottom surface of the recess 125 of the flange body 64a.
[0054] また、第 2蓋部 64bの上部には、貫通孔 69が第 2冷却流路溝 67の上流端と連通す るように設けられており、該貫通孔 69が、第 2冷却媒体供給口 69を形成する。さらに 、第 2蓋部 64bの下部には、厚み方向に貫通する貫通孔 70が第 2冷却流路溝 67の 下流端と連通するように設けられており、該貫通孔 70が、第 2冷却媒体排出口 70を 形成する。そして、第 2冷却媒体供給口 69は、適宜な配管により、冷却媒体供給装 置（図示せず）に接続されており、第 2冷却媒体排出口 70は、第 1冷却媒体供給口 4 6と適宜な配管により接続されている。  [0054] In addition, a through hole 69 is provided in the upper part of the second lid portion 64b so as to communicate with the upstream end of the second cooling flow channel groove 67, and the through hole 69 is provided with the second cooling medium. A supply port 69 is formed. Further, a through hole 70 penetrating in the thickness direction is provided in the lower portion of the second lid portion 64b so as to communicate with the downstream end of the second cooling flow channel groove 67. The through hole 70 is provided in the second cooling passage groove 67. Form media outlet 70. The second cooling medium supply port 69 is connected to a cooling medium supply device (not shown) by appropriate piping, and the second cooling medium discharge port 70 is connected to the first cooling medium supply port 46. They are connected by appropriate piping.
[0055] ここで、第 2冷却流路 66について、図 1、図 4及び図 5を参照しながら詳細に説明す  Here, the second cooling channel 66 will be described in detail with reference to FIGS. 1, 4 and 5.
[0056] 図 4は、図 1に示したプラズマガン 1のチャンバ 2への取り付け構造 100の III— III線 に沿った断面図である。図 5は、図 1に示したプラズマガン 1の第 2冷却流路 66の概 略構成を示す模式図である。なお、図 4及び図 5において、プラズマガン 1のチャンバ 2への取り付け構造 100における上下左右方向を、図における上下左右方向として 表わしている。 FIG. 4 is a cross-sectional view taken along the line III-III of the structure 100 for attaching the plasma gun 1 to the chamber 2 shown in FIG. Fig. 5 shows the outline of the second cooling channel 66 of the plasma gun 1 shown in Fig. 1. It is a schematic diagram which shows a schematic structure. 4 and 5, the vertical and horizontal directions in the structure 100 for attaching the plasma gun 1 to the chamber 2 are shown as vertical and horizontal directions in the drawings.
[0057] 図 4に示すように、第 2フランジ本体部 64aの凹部 125の底面には、第 2冷却流路 溝 67が配設されている。第 2冷却流路溝 67は、第 2冷却流路溝 67a乃至第 2冷却流 路溝 67dから構成されており、第 2冷却流路溝 67aは、第 2冷却媒体供給口 69から 第 2フランジ本体部 64aの外周に沿うようにして、第 2フランジ本体部 64aの下部まで 引き回されるようにして形成されている。そして、そこから第 2冷却流路溝 67bが、径 方向に沿って第 2筒状空間 62まで延設されている。そして、第 2冷却流路溝 67cは、 第 2筒状空間 62の上部から径方向に沿って第 2フランジ本体部 64aの上部まで延び るようにして形成されている。そして、そこから第 2冷却流路溝 67dが、第 2フランジ本 体部 64aの外周に沿うようにして、貫通孔 70 (第 2冷却媒体排出口 70)と連通するよ うに第 2フランジ本体部 64aの下部まで引き回されるようにして形成されている。  As shown in FIG. 4, a second cooling channel groove 67 is disposed on the bottom surface of the recess 125 of the second flange main body portion 64a. The second cooling channel groove 67 includes second cooling channel grooves 67a to 67d, and the second cooling channel groove 67a extends from the second cooling medium supply port 69 to the second flange. It is formed so as to be routed to the lower part of the second flange main body 64a along the outer periphery of the main body 64a. From there, the second cooling channel groove 67b extends to the second cylindrical space 62 along the radial direction. The second cooling channel groove 67c is formed so as to extend from the upper part of the second cylindrical space 62 to the upper part of the second flange main body part 64a along the radial direction. From there, the second cooling passage groove 67d extends along the outer periphery of the second flange main body 64a, and communicates with the through hole 70 (second cooling medium discharge port 70). It is formed so as to be routed to the lower part of 64a.
[0058] また、図 5に示すように、第 2筒状空間 62には、該第 2筒状空間 62を仕切る一対の 仕切り板 104、 104が設けられている。仕切り板 104は、第 2内筒 58bの外周面と第 2 外筒 58aの内周面とに接続され、力ソード 18から遠い側の端部は、第 2フランジ本体 部 64aと接続され、一方、力ソード 18に近い側の端部は、第 2外筒 58aの小径部 61と の間に、隙間 105を有するように設けられている。第 2筒状空間 62の仕切り板 104で 仕切られている一方の空間（第 2冷却流路溝 67bと連通されている側の空間）が、第 2冷却往路 106aを構成し、他方の空間（第 2冷却流路溝 67cと連通されている側の 空間）が、第 2冷却復路 106bを構成している。このように形成された第 2冷却流路溝 67と第 2筒状空間 62から構成される第 2冷却流路 66に冷却媒体を流すことにより、 後述する Oリング 89、第 2磁石 72及び第 2電極部材 71が冷却される。  In addition, as shown in FIG. 5, the second cylindrical space 62 is provided with a pair of partition plates 104, 104 that partition the second cylindrical space 62. The partition plate 104 is connected to the outer peripheral surface of the second inner cylinder 58b and the inner peripheral surface of the second outer cylinder 58a, and the end on the side far from the force sword 18 is connected to the second flange main body part 64a. The end portion on the side close to the force sword 18 is provided so as to have a gap 105 with the small diameter portion 61 of the second outer cylinder 58a. One space partitioned by the partition plate 104 of the second cylindrical space 62 (the space on the side communicating with the second cooling flow path groove 67b) constitutes the second cooling forward path 106a, and the other space ( The space on the side communicating with the second cooling passage groove 67c) constitutes the second cooling return passage 106b. By flowing a cooling medium through the second cooling flow channel 66 composed of the second cooling flow channel groove 67 and the second cylindrical space 62 formed in this way, an O-ring 89, a second magnet 72, and a second The two-electrode member 71 is cooled.
[0059] また、第 2フランジ本体部 64aの裏面には、厚み方向に貫通孔を有する円環状の保 護プレート 73が、プラズマ通過口 33の中心軸と同軸状に取り付けられている。保護 プレート 73の貫通孔の直径寸法は、第 2フランジ本体部 64aの貫通孔 65aの直径寸 法よりも若干小さぐ保護プレート 73の開口部が、第 2フランジ本体部 64aの内周面よ りも中心軸側に突出するように形成されている。これにより、第 2電極部材 71のカソー ド 18から遠い側の端部力 S、保護プレート 73の開口部と当接し、第 2電極部材 71の位 置決めを容易に行うことができる。また、プラズマ流出口 65等に存在するプラズマに よって第 2フランジ 64がスパッタされるのを防止することができる。 In addition, an annular protective plate 73 having a through hole in the thickness direction is attached to the back surface of the second flange main body portion 64 a coaxially with the central axis of the plasma passage port 33. The diameter of the through hole of the protective plate 73 is slightly smaller than the diameter of the through hole 65a of the second flange main body 64a. The opening of the protective plate 73 is smaller than the inner peripheral surface of the second flange main body 64a. Is also formed so as to protrude toward the central axis. As a result, the cathode of the second electrode member 71 The end force S on the side far from the door 18 abuts against the opening of the protective plate 73 so that the second electrode member 71 can be easily positioned. Further, it is possible to prevent the second flange 64 from being sputtered by the plasma present at the plasma outlet 65 or the like.
[0060] 第 2フランジ 64 (正確には、第 2フランジ本体部 64aの表面）の上部には、厚み方向 に凹んだねじ孔 74が設けられている（図 1及び図 4参照）。また、第 1フランジ 32の上 部には、ねじ孔 74に対応する位置に、厚み方向に貫通する位置決め貫通孔 75が設 けられている（図 1及び図 2参照）。そして、第 1フランジ本体部 32aの表面には、位置 決め貫通孔 75に嵌揷され、ねじ孔 74に螺入されているボルト（締結具） 76が設けら れている。ボルト 76は、第 1フランジ 32を第 2フランジ 64に相互に締結し、固定してい る。これにより、第 1中間電極 4と第 2中間電極 5とを、容易に位置決めして、取り付け ること力 Sでさる。 [0060] A screw hole 74 that is recessed in the thickness direction is provided on the upper portion of the second flange 64 (more precisely, the surface of the second flange main body 64a) (see FIGS. 1 and 4). In addition, a positioning through hole 75 penetrating in the thickness direction is provided in the upper portion of the first flange 32 at a position corresponding to the screw hole 74 (see FIGS. 1 and 2). A bolt (fastener) 76 that is fitted into the positioning through hole 75 and screwed into the screw hole 74 is provided on the surface of the first flange main body portion 32a. The bolt 76 fastens the first flange 32 to the second flange 64 by fastening them together. Thus, the first intermediate electrode 4 and the second intermediate electrode 5 can be easily positioned and attached with a force S.
[0061] 次に、本実施の形態 1に係るプラズマガン 1のチャンノ¾へ取り付けた状態の構造 について説明する。  Next, the structure of the plasma gun 1 according to Embodiment 1 attached to the channel is described.
[0062] 図 1に示すように、チャンバ 2のプラズマガン 1が取り付けられる壁 80の表面には、 厚み方向に凹み、段面 82を有する凹部 81が設けられている。凹部 81の底面には、 プラズマ流出口 65と連通するように、厚み方向に貫通する貫通孔 83が設けられてお り、該貫通孔 83が、プラズマ流入口 83を構成する。  As shown in FIG. 1, the surface of the wall 80 to which the plasma gun 1 of the chamber 2 is attached is provided with a recess 81 that is recessed in the thickness direction and has a stepped surface 82. A through hole 83 penetrating in the thickness direction is provided on the bottom surface of the recess 81 so as to communicate with the plasma outlet 65, and the through hole 83 constitutes the plasma inlet 83.
[0063] 凹部 81には、短円筒状の第 2絶縁部材 84が配設されている。第 2絶縁部材 84の 外周面における一方の端部（力ソード 18から遠い側の端部）には、径方向外方に突 出する突起部 84aが設けられている。第 2絶縁部材 84は、突起部 84aと段面 82とに 跨ってそれらの上に配置されたリング部材 85を凹部 81にねじ止めすることにより、凹 部 81に取り付けられている。また、第 2凹部 82の第 2絶縁部材 84が当接している部 分には、環状の溝 86が設けられており、該溝 86には、 Oリング 87が設けられている。 これにより、チャンバ 2と第 2中間電極 5とが気密状態を保つことができ、かつ、互いに 絶縁すること力 Sでさる。  [0063] In the recess 81, a short cylindrical second insulating member 84 is disposed. At one end portion (end portion far from the force sword 18) on the outer peripheral surface of the second insulating member 84, a protruding portion 84a protruding outward in the radial direction is provided. The second insulating member 84 is attached to the concave portion 81 by screwing a ring member 85 disposed over the projecting portion 84a and the stepped surface 82 into the concave portion 81. Further, an annular groove 86 is provided in a portion of the second recess 82 where the second insulating member 84 is in contact, and an O-ring 87 is provided in the groove 86. As a result, the chamber 2 and the second intermediate electrode 5 can be kept in an airtight state and are insulated from each other by the force S.
[0064] 第 2絶縁部材 84の壁 80と当接している面の反対の面（以下、第 2絶縁部材 84の表 面という）は、プラズマガン 1の第 2フランジ本体部 64aと当接しており、該表面には、 環状の溝 88が設けられている。そして、溝 88には、気密性を保っための Oリング 89 が設けられている。 [0064] The surface of the second insulating member 84 opposite to the surface in contact with the wall 80 (hereinafter referred to as the surface of the second insulating member 84) is in contact with the second flange body 64a of the plasma gun 1. An annular groove 88 is provided on the surface. The groove 88 has an O-ring 89 for maintaining airtightness. Is provided.
[0065] 壁 80の上部には、円筒状の絶縁カラー 92と該絶縁カラー 92が嵌入された軸部 99 とを有する本体部 90aと、絶縁材料で構成され、該本体部 90aの先端に設けられた 本体部 90aよりも断面積が大きい頭部 90bとからなる、第 1係合部 (係合凸部）である 第 1ピン 90が配設されている。一方、第 2フランジ部材 64の上部には、厚み方向に貫 通し、第 1ピン 90の頭部 90bが揷通可能な大孔部 91aと、これに連通し第 1ピン 90の 本体部 90aが揷通可能な小孔部 91bからなる係合凹部（第 2係合部） 91が設けられ ている（図 4参照）。  [0065] The upper portion of the wall 80 is composed of a main body 90a having a cylindrical insulating collar 92 and a shaft 99 into which the insulating collar 92 is fitted, and an insulating material, and is provided at the tip of the main body 90a. A first pin 90, which is a first engagement portion (engagement convex portion), is provided, which includes a head 90b having a larger cross-sectional area than the main body 90a. On the other hand, the upper portion of the second flange member 64 has a large hole portion 91a that penetrates in the thickness direction and allows the head portion 90b of the first pin 90 to pass therethrough, and a main body portion 90a of the first pin 90 that communicates therewith. An engaging recess (second engaging portion) 91 is provided which is made up of a small hole portion 91b that can be threaded (see FIG. 4).
[0066] また、壁 80の下部には、円筒状の絶縁カラー 93aと該絶縁カラー 93aが嵌入された 軸部 93bとからなる、位置決め凸部（第 1位置決め部）である第 2ピン 94が配設されて いる。一方、第 2フランジ本体部 64aの下部には、第 2フランジ本体部 64aの下端から 径方向に延びる、位置決め凹部（第 2位置決め部）である切り欠き部 95が設けられて いる。該切り欠き部 95は、位置決めすべき方向において、第 2ピン 94が勘合する幅 を有し、その他の方向において第 2ピン 94の幅より大きい幅を有するように、形成さ れている。すなわち、切り欠き部 95の左右方向の寸法は、第 2ピン 94が揷通でき、か つ、第 2ピン 94によって位置決めできるように、第 2ピン 94の直径寸法よりも若干大き くなるように設計されている。また、切り欠き部 95の上下方向の寸法は、第 2フランジ 本体部 64aの下端から第 2ピン 94の直径寸法よりも大きくなるように設計されている。  [0066] Also, at the lower part of the wall 80, there is a second pin 94, which is a positioning convex portion (first positioning portion), comprising a cylindrical insulating collar 93a and a shaft portion 93b into which the insulating collar 93a is fitted. It is arranged. On the other hand, a lower portion of the second flange body 64a is provided with a notch 95 that is a positioning recess (second positioning portion) extending in the radial direction from the lower end of the second flange body 64a. The notch 95 is formed so as to have a width that the second pin 94 fits in the direction to be positioned and to have a width larger than the width of the second pin 94 in the other direction. That is, the horizontal dimension of the notch 95 is slightly larger than the diameter of the second pin 94 so that the second pin 94 can pass through and can be positioned by the second pin 94. Designed. Further, the vertical dimension of the notch 95 is designed to be larger than the diameter dimension of the second pin 94 from the lower end of the second flange body 64a.
[0067] そして、係合凹部 91 (正確には、小孔部 91b)の内面の上端部を、第 1ピン 90の本 体部 90a (正確には絶縁カラー 92)の上端部に当接させることによって、プラズマガン 1がチャンバ 2に対し、上下方向において位置決めされる。また、係合凹部 91の小孔 部 91bの上側の縁部が、第 1ピン 90の本体部 90a (正確には絶縁カラー 92)と係合し 、また、切り欠き部 95の内面に、第 2ピン 94が左右方向において当接することにより、 プラズマガン 1がチャンバ 2に対し周方向（左右方向）において位置決めをされる。こ れにより、チャンバ 2とプラズマガン 1を容易に位置決め及び仮止めすることができる  [0067] Then, the upper end portion of the inner surface of the engaging recess 91 (more precisely, the small hole portion 91b) is brought into contact with the upper end portion of the main body portion 90a (more precisely, the insulating collar 92) of the first pin 90. Thus, the plasma gun 1 is positioned with respect to the chamber 2 in the vertical direction. Further, the upper edge portion of the small hole portion 91b of the engaging recess 91 engages with the main body portion 90a (more precisely, the insulating collar 92) of the first pin 90, and the inner surface of the notch portion 95 The plasma gun 1 is positioned in the circumferential direction (left-right direction) with respect to the chamber 2 by the two pins 94 contacting in the left-right direction. As a result, the chamber 2 and the plasma gun 1 can be easily positioned and temporarily fixed.
[0068] このようにして、チャンバ 2に仮止めしたプラズマガン 1をロック機構 3でロックするこ とにより、プラズマガン 1をチャンバ 2に容易に取り付けることができる。 [0069] ここで、ロック機構 3によるプラズマガン 1をチャンバ 2にロックする方法について、図 6を参照して説明する。 In this way, the plasma gun 1 temporarily fixed in the chamber 2 is locked by the lock mechanism 3 so that the plasma gun 1 can be easily attached to the chamber 2. Here, a method of locking the plasma gun 1 to the chamber 2 by the lock mechanism 3 will be described with reference to FIG.
[0070] 図 6は、図 4に示したロック機構 3の概略構成を示した模式図である。  FIG. 6 is a schematic diagram showing a schematic configuration of the lock mechanism 3 shown in FIG.
[0071] 図 4及び図 6に示すように、ロック機構 3は、チャンバ 2の壁 80に設けられた台 98に 配設されており、ここでは、公知のトグル型のクランプを用いている。  As shown in FIGS. 4 and 6, the lock mechanism 3 is disposed on a table 98 provided on the wall 80 of the chamber 2, and here, a known toggle-type clamp is used.
[0072] ロック機構 3は、基部 3a、操作アーム 3b、係止アーム 3c、及び操作アーム 3bと係止 アーム 3cとを連結するリンク部材 3dを有している。基部 3aは、台 98に固定される板 状の固定部 301aと、該固定部 301aに垂直な方向に突出したベース部 301bと、力も なる。ベース部 301bの基端部には、操作アーム 3bが設けられており、また、ベース 部 301bの先端部には、係止アーム 3cが設けられている。  The lock mechanism 3 includes a base 3a, an operation arm 3b, a locking arm 3c, and a link member 3d that couples the operation arm 3b and the locking arm 3c. The base portion 3a also serves as a force with a plate-like fixing portion 301a fixed to the base 98, a base portion 301b protruding in a direction perpendicular to the fixing portion 301a. An operation arm 3b is provided at the base end portion of the base portion 301b, and a locking arm 3c is provided at the distal end portion of the base portion 301b.
[0073] 操作アーム 3bは、グリップ部 302aとアーム部 302bからなつている。そして、操作ァ ーム 3bは、アーム部 302bの基端部力 基部 3aのベース部 301bに回動軸 201を軸 にして回動自在に設けられて!/、る。  [0073] The operation arm 3b includes a grip portion 302a and an arm portion 302b. The operation arm 3b is provided on the base portion 301b of the base end portion force base portion 3a of the arm portion 302b so as to be rotatable about the rotation shaft 201.
[0074] また、係止アーム 3cは、長さ寸法の長い第 1部分 303aと長さ寸法の短い第 2部分 3 03bと力、らなり、 L字状に形成されている。第 1部分 303aの基端は、基部 3aのベース 部 301bの先端部に回動軸 202を軸にして回動自在に設けられている。第 2部分 30 3bの先端部は、第 2フランジ 64の第 2フランジ本体部 64aと当接、または、離隔する ように構成されている。また、第 1部分 303aの基端寄りの位置には、リンク部材 3dの 一端が回動軸 203を軸にして回動自在に設けられている。  In addition, the locking arm 3c is formed in an L shape, which is composed of a first portion 303a having a long length and a second portion 303b having a short length and a second portion 303b. The base end of the first portion 303a is rotatably provided around the rotation shaft 202 at the tip of the base portion 301b of the base portion 3a. The distal end portion of the second portion 303b is configured to abut or separate from the second flange main body portion 64a of the second flange 64. Further, one end of the link member 3d is provided at a position near the base end of the first portion 303a so as to be rotatable about the rotation shaft 203.
[0075] リンク部材 3dの他端は、操作アーム 3bの略中央に回動軸 204を軸にして回動自在 に設けられている。また、リンク部材 3dの略中央部分には、係止アーム 3cの第 1部分 303aと当接または離隔するストッパ 304が設けられている。  [0075] The other end of the link member 3d is rotatably provided about the rotation shaft 204 at the approximate center of the operation arm 3b. Further, a stopper 304 that comes into contact with or is separated from the first portion 303a of the locking arm 3c is provided at a substantially central portion of the link member 3d.
[0076] そして、回動軸 201を起点にして、操作アーム 3bを起立方向（壁 80の厚み方向）に 揺動させると、それに伴って、係止アーム 3cが回転軸 202を起点にして揺動する。係 止アーム 3cの第 2部分の先端部力 第 2フランジ本体部 64aの表面と当接し、第 2フ ランジ本体部 64aをチャンバ 2の壁 80側に押し付ける。このとき、リンク部材 3dのスト ッパ 304の端部が係止アーム 3cの第 1部分と当接し、また、係止アーム 3cの起立方 向に回転軸 203と回転軸 204が並ぶことにより、係止アーム 3cが起立方向に揺動す ることがないため、プラズマガン 1がチャンバ 2にロックされる。なお、ロック機構 3として 、ここでは、トグル型のクランプを使用している力 S、これに限定されず、倍力機構を備 えた各種のクランプを用いることができる。 [0076] Then, when the operation arm 3b is swung in the standing direction (the thickness direction of the wall 80) with the rotation shaft 201 as a starting point, the locking arm 3c swings with the rotation shaft 202 as a starting point. Move. The force at the tip of the second portion of the locking arm 3c comes into contact with the surface of the second flange main body 64a and presses the second flange main body 64a against the wall 80 side of the chamber 2. At this time, the end of the stopper 304 of the link member 3d is in contact with the first portion of the locking arm 3c, and the rotation shaft 203 and the rotation shaft 204 are aligned in the cubic direction of the locking arm 3c. Locking arm 3c swings in the standing direction The plasma gun 1 is locked to the chamber 2. Here, as the locking mechanism 3, here, the force S using a toggle-type clamp, but not limited thereto, various clamps equipped with a boosting mechanism can be used.
[0077] 次に、本実施の形態 1に係るプラズマガン 1における冷却媒体の流れにつ!/、て説明 する。 Next, the flow of the cooling medium in the plasma gun 1 according to the first embodiment will be described.
[0078] まず、図示されな!/、冷却媒体供給装置で冷却された冷却媒体が、適宜な配管を介 して第 2冷却媒体供給口 69に供給される。そして、冷却媒体は、第 2冷却媒体供給 口 69から第 2フランジ本体部 64aの外周に沿うようにして、第 2フランジ本体部 64aの 下部まで第 2冷却流路溝 67aを流れ、そこから、第 2筒状空間 62 (正確には、第 2冷 却往路 106a)に到る第 2冷却流路溝 67bを流れる（図 4参照）。それから、冷却媒体 は、第 2冷却往路 106aを流れ、隙間 105で折り返して、第 2冷却復路 106bを流れる (図 5参照）。このとき、第 2内筒 58bを介して第 2電極部材 71が冷却され、また、第 2 外筒 58aを介して第 2磁石 72が冷却される。そして、冷却媒体は、第 2フランジ本体 部 64aの上部まで第 2冷却流路溝 67cを流れ、そこから、第 2フランジ本体部 64aの 外周に沿うようにして第 2冷却流路溝 67dを流れて第 2冷却媒体排出口 70に到る。こ のようにして、冷却媒体が、第 2冷却流路溝 67a乃至 67dを流れることにより、第 2フラ ンジ本体部 64aが冷却され、これにより Oリング 89が冷却される。力、くして、第 2冷却 流路 66に冷却媒体が流れることにより、 Oリング 89、第 2磁石 72及び第 2電極部材 7 1が冷却される。  First, the cooling medium cooled by the cooling medium supply device (not shown) is supplied to the second cooling medium supply port 69 via an appropriate pipe. Then, the cooling medium flows along the outer periphery of the second flange main body portion 64a from the second cooling medium supply port 69 to the lower portion of the second flange main body portion 64a, and flows from there to the second cooling passage groove 67a. It flows through the second cooling passage groove 67b reaching the second cylindrical space 62 (more precisely, the second cooling forward passage 106a) (see FIG. 4). Then, the cooling medium flows through the second cooling forward path 106a, turns back at the gap 105, and flows through the second cooling backward path 106b (see FIG. 5). At this time, the second electrode member 71 is cooled via the second inner cylinder 58b, and the second magnet 72 is cooled via the second outer cylinder 58a. Then, the cooling medium flows through the second cooling flow path groove 67c to the upper part of the second flange main body part 64a, and then flows through the second cooling flow path groove 67d along the outer periphery of the second flange main body part 64a. To the second cooling medium outlet 70. In this manner, the cooling medium flows through the second cooling flow path grooves 67a to 67d, whereby the second flange main body 64a is cooled, and the O-ring 89 is thereby cooled. As a result, the O-ring 89, the second magnet 72, and the second electrode member 71 are cooled by the cooling medium flowing through the second cooling channel 66.
[0079] 次に、冷却媒体は、第 2冷却媒体排出口 70から適宜な配管を介して第 1冷却媒体 供給口 46に供給される。そして、冷却媒体は、第 1冷却媒体供給口 46から第 1フラン ジ本体部 32aの外周に沿うようにして、第 1フランジ本体部 32aの下部まで第 1冷却 流路溝 42aを流れ、そこから、第 1筒状空間 44 (正確には、第 1冷却往路 103a)に到 る第 1冷却流路溝 42bを流れる（図 2参照）。それから、冷却媒体は、第 1冷却往路 10 3aを流れ、隙間 102で折り返して、第 1冷却復路 103bを流れる（図 3参照）。このとき 、第 1内筒 43bを介して第 1電極部材 47が冷却され、また、第 1外筒 43aを介して第 1 磁石 49が冷却される。そして、冷却媒体は、第 1フランジ本体部 32aの上部まで第 1 冷却流路溝 42cを流れ、そこから、第 1フランジ本体部 32aの外周に沿うようにして第 1冷却流路溝 42dを流れて第 1冷却媒体排出口 45に到る。このようにして、冷却媒体 1S 第 1冷却流路溝 42a乃至 42dを流れることにより、第 1フランジ本体部 32aが冷却 され、これにより Oリング 36が冷却される。力、くして、第 1冷却流路 41に冷却媒体が流 れることにより、 Oリング 36、第 1磁石 49及び第 1電極部材 47が冷却される。 Next, the cooling medium is supplied from the second cooling medium discharge port 70 to the first cooling medium supply port 46 through appropriate piping. Then, the cooling medium flows along the outer periphery of the first flange main body portion 32a from the first cooling medium supply port 46 to the lower portion of the first flange main body portion 32a, and flows from there through the first cooling flow path groove 42a. Then, it flows through the first cooling flow path groove 42b reaching the first cylindrical space 44 (more precisely, the first cooling forward path 103a) (see FIG. 2). Then, the cooling medium flows through the first cooling forward path 103a, turns back at the gap 102, and flows through the first cooling backward path 103b (see FIG. 3). At this time, the first electrode member 47 is cooled via the first inner cylinder 43b, and the first magnet 49 is cooled via the first outer cylinder 43a. Then, the cooling medium flows through the first cooling flow path groove 42c to the top of the first flange main body portion 32a, and from there, extends along the outer periphery of the first flange main body portion 32a. 1 Flows through the cooling channel groove 42d and reaches the first cooling medium discharge port 45. In this manner, the first flange main body portion 32a is cooled by flowing through the cooling medium 1S first cooling flow path grooves 42a to 42d, whereby the O-ring 36 is cooled. As a result of the cooling medium flowing through the first cooling channel 41, the O-ring 36, the first magnet 49, and the first electrode member 47 are cooled.
[0080] 次に、冷却媒体は、第 1冷却媒体排出口 45から適宜な配管を介して第 3冷却媒体 供給口 24に供給され、第 3冷却流路 23を流れる。これにより、補助陰極 16の基端部 が冷却される。そして、冷却媒体は、第 3冷却媒体排出口 25から適宜な配管を介し て冷却媒体供給装置に排出される。  Next, the cooling medium is supplied from the first cooling medium discharge port 45 to the third cooling medium supply port 24 through appropriate piping, and flows through the third cooling channel 23. Thereby, the base end portion of the auxiliary cathode 16 is cooled. Then, the cooling medium is discharged from the third cooling medium discharge port 25 to the cooling medium supply device via an appropriate pipe.
[0081] 次に、本実施の形態 1に係るプラズマガン 1のチャンバ 2への取り付け構造 100に おけるプラズマガン 1の組み立て方法について説明する。  Next, a method for assembling plasma gun 1 in structure 100 for attaching plasma gun 1 to chamber 2 according to the first embodiment will be described.
[0082] まず、力ソード部 7の組み立て方法について説明する。  First, a method for assembling the force sword portion 7 will be described.
[0083] 蓋部材 14の裏面に、力ソード 18等を取り付ける。この力ソード 18は、公知の複合陰 極型のものと同等であるので、詳細な取り付け方法については省略する。力ソード 18 等を取り付けた蓋部材 14の裏面に設けられた環状の溝 26に Oリング 27をはめ込み 、第 1位置決め凹部 15に容器 10のフランジ 12を嵌め込む。このとき、フランジ 12の 外周面と第 1位置決め凹部 15を構成する外周壁とが接触するので、容器 10と蓋部 材 14との位置決めが相互にされる。したがって、位置決めを容易に行うことができる。  A force sword 18 or the like is attached to the back surface of the lid member 14. Since the force sword 18 is equivalent to a known composite negative electrode type, detailed mounting method is omitted. An O-ring 27 is fitted into an annular groove 26 provided on the back surface of the lid member 14 to which a force sword 18 or the like is attached, and the flange 12 of the container 10 is fitted into the first positioning recess 15. At this time, since the outer peripheral surface of the flange 12 and the outer peripheral wall constituting the first positioning recess 15 are in contact with each other, the container 10 and the lid member 14 are positioned relative to each other. Therefore, positioning can be performed easily.
[0084] そして、固定部材 28に設けられた貫通孔 29にボルト 31を揷通させ、ボルト 31によ り、固定部材 28と蓋部材 14とを締結する。これにより、蓋部材 14に容器 10が固定さ れる。  Then, the bolt 31 is passed through the through hole 29 provided in the fixing member 28, and the fixing member 28 and the lid member 14 are fastened by the bolt 31. As a result, the container 10 is fixed to the lid member 14.
[0085] 次に、中間電極ユニット 6の組み立て方法について説明する。  Next, a method for assembling the intermediate electrode unit 6 will be described.
[0086] 第 1内筒 43bの一端に保護プレート 48を配置し、第 1電極部材 47を第 1内筒 43b の内孔に嵌揷する。ここでは、第 1内筒 43bの内周面及び第 1電極部材 47の外周面 には、ねじが切ってあり、第 1電極部材 47を第 1内筒 43bに螺嵌させる。このとき、第 1内筒 43bの一方の端面と第 1電極部材 47のフランジ 57とで、保護プレート 48を挟 んで固定する。 [0086] A protective plate 48 is disposed at one end of the first inner cylinder 43b, and the first electrode member 47 is fitted into the inner hole of the first inner cylinder 43b. Here, the inner peripheral surface of the first inner cylinder 43b and the outer peripheral surface of the first electrode member 47 are threaded, and the first electrode member 47 is screwed into the first inner cylinder 43b. At this time, the protective plate 48 is sandwiched and fixed between one end face of the first inner cylinder 43b and the flange 57 of the first electrode member 47.
[0087] そして、第 1内筒 43bに第 1フランジ本体部 32aを貫通孔 33aにおいて嵌入させて、 第 1フランジ本体部 32aを保護プレート 48に当接させる。それから、第 1フランジ本体 部 32aの裏面に設けられた凹部 123に第 1蓋部材 32bを嵌め込んで、これを第 1フラ ンジ本体部 32aに取り付け、第 1外筒 43aを第 1内筒 43bに嵌入する。このようにして 、第 1中間電極 4が組み立てられる。 [0087] Then, the first flange main body portion 32a is fitted into the first inner cylinder 43b in the through hole 33a, and the first flange main body portion 32a is brought into contact with the protective plate 48. Then the first flange body The first lid member 32b is fitted into the recess 123 provided on the back surface of the portion 32a, is attached to the first flange main body portion 32a, and the first outer cylinder 43a is fitted into the first inner cylinder 43b. In this way, the first intermediate electrode 4 is assembled.
[0088] 次に、第 1外筒 43aに第 1磁石 49を嵌入して、第 1止め部材（ナット） 50を第 1外筒 4 3aに螺嵌させ、第 1磁石 49を第 1止め部材 50と第 1蓋部材 32bとで挟んで第 1外筒 43aに固定する。このようにして、第 1中間電極サブユニット 96が組み立てられる。  [0088] Next, the first magnet 49 is inserted into the first outer cylinder 43a, the first stopper member (nut) 50 is screwed into the first outer cylinder 43a, and the first magnet 49 is attached to the first stopper member. 50 and the first lid member 32b are fixed to the first outer cylinder 43a. In this way, the first intermediate electrode subunit 96 is assembled.
[0089] 一方、第 2中間電極サブユニット 97は、以下のようにして組み立てられる。  On the other hand, the second intermediate electrode subunit 97 is assembled as follows.
[0090] まず、第 2フランジ本体部 64aの裏面に、保護プレート 73をねじ止めして固定し、第 2フランジ本体部 64aの凹部 125に、第 2蓋部材 64bを嵌め込む。そして、第 2ホルダ 部材 58の一端を第 2フランジ 64のプラズマ流出口 65に嵌入し、第 2電極部材 71を 第 2内筒 58bの内孔に嵌揷する。ここでは、第 2内筒 58bの内周面及び第 2電極部材 71の外周面には、ねじが切ってあり、第 2電極部材 71を第 2内筒 58bに螺嵌させる。 このようにして、第 2中間電極 5が組み立てられる。  First, the protective plate 73 is screwed and fixed to the back surface of the second flange body 64a, and the second lid member 64b is fitted into the recess 125 of the second flange body 64a. Then, one end of the second holder member 58 is fitted into the plasma outlet 65 of the second flange 64, and the second electrode member 71 is fitted into the inner hole of the second inner cylinder 58b. Here, the inner peripheral surface of the second inner cylinder 58b and the outer peripheral surface of the second electrode member 71 are threaded, and the second electrode member 71 is screwed into the second inner cylinder 58b. In this way, the second intermediate electrode 5 is assembled.
[0091] 次に、第 2外筒 58aに第 2磁石 72を嵌入させて、第 2止め部材（ナット） 77を第 2外 筒 58aに螺嵌させ、第 2磁石 72を第 2止め部材 77と第 2蓋部材 64bとで挟んで固定 する。このようにして、第 2中間電極サブユニット 97が組み立てられる。  Next, the second magnet 72 is fitted into the second outer cylinder 58a, the second stopper member (nut) 77 is screwed into the second outer cylinder 58a, and the second magnet 72 is fixed to the second stopper member 77. And the second lid member 64b. In this way, the second intermediate electrode subunit 97 is assembled.
[0092] そして、この組み立てた第 2中間電極サブユニット 97における第 2外筒 58aの溝 59 に、 Oリング 60をはめ込み、また、上述した第 1中間電極サブユニット 96における第 1 外筒 43aの溝 52に、 Oリング 53をはめ込む。ついで、第 1フランジ本体部 32aの裏面 と第 2フランジ本体部 64aの表面を対向させ、第 1外筒 43aの端面と第 2外筒 58aの 端面で絶縁部材 51を挟む。そして、第 1フランジ 32の貫通孔 75にボルト (締結具） 7 6を揷通させ、ボルト 76の先端部を第 2フランジ 64のねじ孔 74に螺入させ、第 1フラ ンジ 32 (第 1中間電極サブユニット 96)と第 2フランジ 64 (第 2中間電極サブユニット 9 7)とを締結して、互いに固定する。このとき、絶縁部材 51の一方の端部が、第 1内筒 43bの外周面に嵌入され、また、絶縁部材 51の他方の端部力 第 2内筒 58bの位置 決め突起部 63に嵌入され、さらには、第 1フランジ 32の貫通孔 75が、第 2フランジ 64 に設けられたねじ孔 74に一致する位置に設けられていることから、第 1中間電極サブ ユニット 96、絶縁部材 51及び第 2中間電極サブユニット 97の位置決め及び取り付け を容易に行うことができる。このようにして、中間電極ユニット 6が組み立てられる。 [0092] Then, the O-ring 60 is fitted into the groove 59 of the second outer cylinder 58a in the assembled second intermediate electrode subunit 97, and the first outer cylinder 43a in the first intermediate electrode subunit 96 described above is fitted. Fit the O-ring 53 into the groove 52. Next, the back surface of the first flange body portion 32a and the surface of the second flange body portion 64a are made to face each other, and the insulating member 51 is sandwiched between the end surface of the first outer cylinder 43a and the end surface of the second outer cylinder 58a. Then, a bolt (fastener) 76 is passed through the through hole 75 of the first flange 32, and the tip end of the bolt 76 is screwed into the screw hole 74 of the second flange 64, so that the first flange 32 (first The intermediate electrode subunit 96) and the second flange 64 (second intermediate electrode subunit 97) are fastened and fixed to each other. At this time, one end of the insulating member 51 is fitted into the outer peripheral surface of the first inner cylinder 43b, and the other end force of the insulating member 51 is fitted into the positioning projection 63 of the second inner cylinder 58b. Further, since the through hole 75 of the first flange 32 is provided at a position that coincides with the screw hole 74 provided in the second flange 64, the first intermediate electrode subunit 96, the insulating member 51, and the first 2 Positioning and mounting of intermediate electrode subunit 97 Can be easily performed. In this way, the intermediate electrode unit 6 is assembled.
[0093] この組み立てた中間電極ユニット 6における第 1フランジ本体部 32aの溝 35に Oリン グ 36をはめ込む。そして、上述した力ソード部 7のフランジ 13を、中間電極ユニット 6 の第 2位置決め凹部 34に嵌め込む。ついで、固定部材 37の貫通孔 38にボルト 39を 揷通させ、ボルト 39により固定部材 37と第 1フランジ 32とを締結し、中間電極ユニット 6と力ソード部 7とを相互に固定する。このとき、第 2位置決め凹部 34の外周壁とフラ ンジ 13の外周面とが接触し、また、第 2位置決め凹部 34の内側端部は、フランジ 13 の内周面と面一になるため、中間電極ユニット 6と力ソード部 7の位置決め及び取り付 けを容易に行うことができる。このようにして、プラズマガン 1が組み立てられる。 [0093] The O-ring 36 is fitted into the groove 35 of the first flange main body 32a in the assembled intermediate electrode unit 6. Then, the flange 13 of the force sword portion 7 described above is fitted into the second positioning recess 34 of the intermediate electrode unit 6. Next, a bolt 39 is passed through the through hole 38 of the fixing member 37, and the fixing member 37 and the first flange 32 are fastened by the bolt 39, and the intermediate electrode unit 6 and the force sword portion 7 are fixed to each other. At this time, the outer peripheral wall of the second positioning recess 34 is in contact with the outer peripheral surface of the flange 13, and the inner end of the second positioning recess 34 is flush with the inner peripheral surface of the flange 13. The electrode unit 6 and the force sword section 7 can be easily positioned and attached. In this way, the plasma gun 1 is assembled.
[0094] 次に、プラズマガン 1のチャンバ 2への取り付け方法について説明する。 Next, a method for attaching the plasma gun 1 to the chamber 2 will be described.
[0095] 上述のように組み立てたプラズマガン 1の第 2ベース部材 64の上部に設けられた係 合凹部 91の大孔部 91aに、チャンバ 2の壁 80の表面に設けられた第 1ピン 90を揷通 させる。このとき、第 2ベース部材 64の下部に設けられた切り欠き部 95に、壁 80の表 面に設けられた第 2ピン 94を揷通させる。そして、プラズマガン 1全体を下方に移動さ せ、係合凹部 91の小孔部 91bに第 1ピン 90を揷通させ、小孔部 91bの内面の上端 部を、第 1ピン 90の本体部 90a (正確には絶縁カラー 92)の上端部に当接させる。こ れにより、小孔部 91bの上側の縁部が、第 1ピン 90の本体部 90a (正確には絶縁カラ 一 92)と係合する。このようにして、プラズマガン 1がチャンバ 2に対し、上下方向の位 置決めと仮止めがされる。また、係合凹部 91の小孔部 91bの内面と第 1ピン 90の本 体部 90aが、左右方向において当接し、切り欠き部 95の内面に、第 2ピン 94が左右 方向に当接することにより、プラズマガン 1がチャンバ 2に対し周方向（左右方向）の 位置決めされる。 The first pin 90 provided on the surface of the wall 80 of the chamber 2 is inserted into the large hole portion 91a of the engaging recess 91 provided on the upper portion of the second base member 64 of the plasma gun 1 assembled as described above. Communicate. At this time, the second pin 94 provided on the surface of the wall 80 is passed through the notch 95 provided in the lower part of the second base member 64. Then, the entire plasma gun 1 is moved downward to allow the first pin 90 to pass through the small hole portion 91b of the engagement recess 91, and the upper end portion of the inner surface of the small hole portion 91b is connected to the main body portion of the first pin 90. 90a (To be exact, the insulating collar 92) is brought into contact with the upper end portion. As a result, the upper edge portion of the small hole portion 91b engages with the main body portion 90a (more precisely, the insulating collar 92) of the first pin 90. In this way, the plasma gun 1 is positioned and temporarily fixed with respect to the chamber 2 in the vertical direction. Further, the inner surface of the small hole portion 91b of the engaging recess 91 and the main body portion 90a of the first pin 90 abut on each other in the left-right direction, and the second pin 94 abuts on the inner surface of the notch portion 95 in the left-right direction. As a result, the plasma gun 1 is positioned in the circumferential direction (left-right direction) with respect to the chamber 2.
[0096] そして、図 6に示すように、ロック機構 3の操作アーム 3bを起立方向に揺動させ、係 止アーム 3cを第 2フランジ 64と当接させることにより、プラズマガン 1がチャンバ 2に口 ックされる。  Then, as shown in FIG. 6, the operation arm 3b of the locking mechanism 3 is swung in the upright direction, and the locking arm 3c is brought into contact with the second flange 64, whereby the plasma gun 1 is brought into the chamber 2. It is spoken.
[0097] このように、本実施の形態 1に係るプラズマガン 1のチャンバ 2への取り付け構造 10 0では、プラズマガン 1を容易に組み立てることが可能となり、また、このように組み立 てたプラズマガン 1を容易にチャンバ 2に取り付けることが可能となり、その作業時間 の短縮を図ることが可能になる。 As described above, in the structure 100 0 for attaching the plasma gun 1 to the chamber 2 according to the first embodiment, the plasma gun 1 can be easily assembled, and the plasma gun assembled in this way is used. 1 can be easily installed in chamber 2, and its working time Can be shortened.
なお、本実施の形態では、第 1ホルダ部及び第 2ホルダ部を、それぞれ外筒と内筒 から構成されているとした力 これに限定されず、 1つの部材で一体成形されている 構成としてもよい。また、
Figure imgf000027_0001
In the present embodiment, the force that the first holder part and the second holder part are each composed of an outer cylinder and an inner cylinder is not limited to this. Also good. Also,
Figure imgf000027_0001
蓋部から構成されているとした力 これに限定されず、 1つの部材で一体成形されて いる構成としてもよい。さらには、第 1ハウジング及び第 2ハウジングを、それぞれホル ダ部とフランジ部とから構成されているとした力 これに限定されず、 1つの部材でー 体成形されている構成としてもよい。また、チャンバ 2の下部に第 2中間電極 5等を冷
Figure imgf000027_0002
The force formed from the lid portion is not limited to this, and may be a single member integrally formed. Furthermore, the first housing and the second housing each have a force formed of a holder part and a flange part. The present invention is not limited to this, and a single member may be formed as a single body. In addition, cool the second intermediate electrode 5 etc.
Figure imgf000027_0002
[0099] 上記説明から、当業者にとっては、本発明の多くの改良や他の実施形態が明らか である。従って、上記説明は、例示としてのみ解釈されるべきであり、本発明を実行 する最良の態様を当業者に教示する目的で提供されたものである。本発明の精神を 逸脱することなぐその構造及び/又は機能の詳細を実質的に変更できる。  [0099] From the above description, many modifications and other embodiments of the present invention are apparent to persons skilled in the art. Accordingly, the foregoing description should be construed as illustrative only and is provided for the purpose of teaching those skilled in the art the best mode of carrying out the invention. The details of the structure and / or function may be substantially changed without departing from the spirit of the invention.
産業上の利用可能性  Industrial applicability
[0100] 本発明のプラズマガンのチャンバへの取り付け構造は、容易に位置決めすることが できることにより、取り付け作業の作業効率がよいプラズマガンのチャンバへの取り付 け構造として有用である。 [0100] The mounting structure of the plasma gun to the chamber of the present invention is useful as the mounting structure of the plasma gun to the chamber with high work efficiency because it can be easily positioned.

Claims

請求の範囲 The scope of the claims
[1] その壁にプラズマ流入口が設けられたチャンバと、  [1] a chamber with a plasma inlet on its wall;
前記プラズマ流入口の周囲に設けられた第 1係合部及び第 1位置決め部と、 そのプラズマ流出口の周囲にフランジを有し、該フランジに前記第 1係合部と係合 する第 2係合部及び前記第 1位置決め部によって位置決めされる第 2位置決め部が 形成されたプラズマガンと、  A first engagement portion and a first positioning portion provided around the plasma inlet, and a second engagement having a flange around the plasma outlet and engaging the flange with the first engagement portion. A plasma gun formed with a second positioning portion positioned by the joint portion and the first positioning portion;
ロック機構と、を備え、  A locking mechanism,
前記第 2係合部が前記チャンバの前記第 1係合部と係合し、前記第 2位置決め部 が前記チャンバの前記第 1位置決め部によって位置決めされ、前記プラズマ流出口 が前記チャンバの前記プラズマ流入口に連通し、かつ、前記フランジが前記ロック機 構によって前記チャンバの壁に押し付けられて固定されるようにして、前記プラズマ ガンが前記チャンバに取り付けられている、プラズマガンのチャンバへの取り付け構 The second engaging portion engages with the first engaging portion of the chamber, the second positioning portion is positioned by the first positioning portion of the chamber, and the plasma outlet is connected to the plasma flow of the chamber. An attachment structure of the plasma gun to the chamber, wherein the plasma gun is attached to the chamber so as to communicate with the inlet and so that the flange is pressed against and fixed to the chamber wall by the locking mechanism.
Λ &。 Λ &.
[2] 前記第 1係合部が係合凸部であり、  [2] The first engaging portion is an engaging convex portion,
前記第 2係合部が係合凹部である、請求項 1に記載のプラズマガンのチャンバへの 取り付け構造。  The structure for attaching a plasma gun to a chamber according to claim 1, wherein the second engagement portion is an engagement recess.
[3] 前記係合凸部が本体部と該本体部の先端に設けられた前記本体部より断面積が 大きい頭部とからなる第 1ピンであり、  [3] The engagement convex portion is a first pin including a main body portion and a head portion having a larger cross-sectional area than the main body portion provided at a tip of the main body portion,
前記係合凹部が貫通孔で、前記係合凸部の頭部が揷通可能な大孔部とこれに連 通する前記係合凸部の本体部が揷通可能な小孔部である、請求項 2に記載のブラ ズマガンのチャンバへの取り付け構造。  The engaging recess is a through-hole, and a large hole portion through which the head of the engaging convex portion can pass and a main body portion of the engaging convex portion communicating with the small hole portion can pass through. The structure for attaching the plasma gun according to claim 2 to a chamber.
[4] 前記第 1位置決め部は、位置決め凸部であり、 [4] The first positioning part is a positioning convex part,
前記第 2位置決め部は、位置決め凹部である、請求項 1に記載のプラズマガンのチ ヤンバへの取り付け構造。  2. The structure for attaching a plasma gun to a chamber according to claim 1, wherein the second positioning portion is a positioning recess.
[5] 前記位置決め凸部は、第 2ピンであり、 [5] The positioning protrusion is a second pin,
前記位置決め凹部は、位置決めすべき方向において前記第 2ピンが勘合する幅を 有し、その他の方向において前記第 2ピンの幅より大きい幅を有する、請求項 4に記 載のプラズマガンのチャンバへの取り付け構造。 [6] 前記ロック機構は、クランプ機構で構成されて!、る、請求項 1に記載のプラズマガン のチャンバへの取り付け構造。 5. The plasma gun chamber according to claim 4, wherein the positioning recess has a width that fits the second pin in a direction to be positioned, and has a width larger than the width of the second pin in the other direction. Mounting structure. 6. The structure for mounting a plasma gun on a chamber according to claim 1, wherein the lock mechanism is a clamp mechanism!
PCT/JP2007/064418 2006-09-11 2007-07-23 Structure for attaching plasma gun to chamber WO2008032489A1 (en)

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JP2006245759A JP4641014B2 (en) 2006-09-11 2006-09-11 Mounting structure of plasma gun to chamber

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JP6205527B2 (en) * 2015-05-19 2017-09-27 株式会社アルバック Rotary cathode unit for magnetron sputtering equipment
CN108601192B (en) * 2018-06-25 2019-07-12 超力等离子技术(常州)有限公司 A kind of plasma generator

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