WO2007040673A1 - A diamond field emmission tip and a method of formation - Google Patents

Abstract

A diamond field emission tip and methods of forming such diamond field emission tips, for use with cathodes that will act as a source of and emit beams of charged particles.

Description

A DIAMOND FIELD EMMISSION TIP AND A METHOD OF FORMATION

COPYRIGHT NOTICE

[0001] A portion of the disclosure of this patent document contains material which is subject to copyright or mask work protection. The copyright or mask work owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure, as it appears in the Patent and Trademark Office patent file or records, but otherwise reserves all copyright or mask work rights whatsoever.

RELATED APPLICATIONS

[0002] This application is related to and claims priority from U.S. Patent

Application No. 11/238,991 [Atty, Docket No. 2549/0003], titled "Ultra-Small

Resonating Charged Particle Beam Modulator," and filed September 30, 2005, the entire

contents of which are incorporated herein by reference. This application is related to

U.S. Patent Application No. 10/917,511 [Atty, Docket No. 2549/0002], filed on August

13, 2004, entitled "Patterning Thin Metal Film by Dry Reactive Ion Etching"; U.S.

Application No. 11/203,407 [Atty, Docket No. 2549/0040], entitled "Method Of

Patterning Ultra-Small Structures," filed on August 15, 2005; U.S. Patent Application

No. 11/243,476 [Atty, Docket No. 2549/0058], filed on October 5, 2005, entitled

"Structures and Methods For Coupling Energy From An Electromagnetic Wave"; and,

U.S. Application No. 11/243,477 [Atty, Docket No. 2549/0059], titled "Electron Beam

Induced Resonance," filed on October 5, 2005, all of which are commonly owned with

the present application at the time of filing, and the entire contents of each of which are

incorporated herein by reference. Attorney Docket 2549-0054

C T /^'U S O G ,/" E S .78 C

FIELD OF INVENTION

[0003] This disclosure relates to an improved charged particle field emission tip.

INTRODUCTION AND BACKGROUND Electromagnetic Radiation & Waves [0004] Electromagnetic radiation is produced by the motion of electrically charged

particles. Oscillating electrons produce electromagnetic radiation commensurate in

frequency with the frequency of the oscillations. Electromagnetic radiation is essentially

energy transmitted through space or through a material medium in the form of

electromagnetic waves. The term can also refer to the emission and propagation of such

energy. Whenever an electric charge oscillates or is accelerated, a disturbance

characterized by the existence of electric and magnetic fields propagates outward from it.

This disturbance is called an electromagnetic wave. Electromagnetic radiation falls into

categories of wave types depending upon their frequency, and the frequency range of

such waves is tremendous, as is shown by the electromagnetic spectrum in the following

chart (which categorizes waves into types depending upon their frequency):

[0005] The ability to generate (or detect) electromagnetic radiation of a particular

type (e.g., radio, microwave, etc.) depends upon the ability to create a structure suitable

for electron oscillation or excitation at the frequency desired. Electromagnetic radiation

at radio frequencies, for example, is relatively easy to generate using relatively large or

even somewhat small structures.

ELECTROMAGNETIC WAVE GENERATION

[0006] There are many traditional ways to produce high-frequency radiation in

ranges at and above the visible spectrum, for example, up to high hundreds of Terahertz.

As frequencies increase, however, the kinds of structures needed to create the

electromagnetic radiation at a desired frequency become generally smaller and harder to

manufacture. We have discovered ultra-small-scale devices that obtain multiple different

frequencies of radiation from the same operative layer and that these ultra small devices

can be activated by the flow of beams of charged particles.

Advantages & Benefits

[0007] Myriad benefits and advantages can be obtained by a ultra-small resonant

structure that emits varying electromagnetic radiation at higher radiation frequencies such

as infrared, visible, UV and X-ray. For example, if the varying electromagnetic radiation

is in a visible light frequency, the micro resonant structure can be used for visible light

applications that currently employ prior art semiconductor light emitters (such as LCDs, Attorney Docket 2549-0054

PC T/ U S O IB / 52.78 O LEDs, and the like that employ electroluminescence or other light-emitting principals). If

small enough, such micro-resonance structures can rival semiconductor devices in size,

and provide more intense, variable, and efficient light sources. Such micro resonant

structures can also be used in place of (or in some cases, in addition to) any application

employing non-semiconductor illuminators (such as incandescent, fluorescent, or other

light sources).

[0008] The use of radiation per se in each of the above applications is not new.

But, obtaining that radiation from particular kinds of increasingly small ultra-small

resonant structures revolutionizes the way electromagnetic radiation is used in and can be

used in electronic and other devices.

GLOSSARY [0009] As used throughout this document:

[0010] The phrase "ultra-small resonant structure" shall mean any structure of any

material, type or microscopic size that by its characteristics causes electrons to resonate at

a frequency in excess of the microwave frequency.

[0011] The term "ultra-small" within the phrase "ultra-small resonant structure"

shall mean microscopic structural dimensions and shall include so-called "micro"

structures, "nano" structures, or any other very small structures that will produce

resonance at frequencies in excess of microwave frequencies. Attorney Docket 2549-0054

PCT/USO6/S578O

DESCRIPTION OF PRESENTLY PREFERRED EXEMPLARY EMBODIMENTS OF THE

INVENTION

BRIEF DESCRIPTION OF FIGURES

[0012] The invention is better understood by reading the following detailed

description with reference to the accompanying drawings in which:

[0013] FIG. 1 shows a diagrammatic cross-section of a first step in the production

cycle of a first embodiment of the present invention;

[0014] FIG. 2 shows a diagrammatic cross-section of the next step in the

production cycle of a first embodiment of the present invention;

[0015] FIG. 3 shows a diagrammatic cross-section of the next step in the

production cycle of a first embodiment of the present invention;

[0016] FIG. 4A shows the results of etching a diamond layer during the formation

of diamond emission tips according to a first embodiment of the present invention;

[0017] FIG. 4B shows a completed diamond field emission tip from the structure

of FIG. 4 A;

[0018] FIG. 5 shows a diagrammatic cross-section of a first step in the production

cycle of a second embodiment of the present invention;

[0019] FIG. 6 shows a diagrammatic cross-section of a first step in the production

cycle of a second embodiment of the present invention;

[0020] FIG. 7A shows a diagrammatic cross-section of a metal layer etching step

in the production cycle of a second embodiment of the present invention; Attorney Docket 2549-0054

IP¹ C T/ U S O B ,/" Ξ Ξ 78 O [0021] FIG 7B shows a completed diamond field emission tip from the structure

ofFIG 7A; and

DETAILED DESCRIPTION

[0022] Below we describe methods for forming an improved, diamond field

emission tip that will act as a source of charged particles for use with ultra-small resonant

structures. A surface of a micro-resonant structure is excited by energy from an

electromagnetic wave, causing the micro-resonant structure to resonate. This resonant

energy interacts as a varying field. A highly intensified electric field component of the

varying field is coupled from the surface. A source of charged particles, referred to

herein as a beam, is provided. The beam can include ions (positive or negative),

electrons, protons and the like. The beam may be produced by any source, including,

e.g., without limitation an ion gun, a tungsten filament, a cathode, a planar vacuum

triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an

ion-impact ionizer.

[0023] The beam travels on a path approaching the varying field. The beam is

deflected or angularly modulated upon interacting with a varying field coupled from the

surface. Hence, energy from the varying field is transferred to the charged particles of

the beam. Characteristics of the micro-resonant structure including shape, size and type

of material disposed on the micro-resonant structure can affect the intensity and

wavelength of the varying field. Further, the intensity of the varying field can be

increased by using features of the micro-resonant structure referred to as intensifiers. _A™ ->nn₇ r

WO 2007 0 Attorney Docket 2549-0054

PCT/US06/EΞ780

Further, the micro-resonant structure may include structures, nano-structures, sub-

wavelength structures and the like, as are described in the above identified co-pending

applications which are hereby incorporated by reference.

[0024] An improved charged particle emission tip includes diamond as one of the

principle tip materials, together with a highly conductive metal as an improved charged

particle source.

[0025] In manufacturing such a field emission tip, a substrate material 10, such as

silicon as shown in Fig.1, provides a starting base layer. A diamond layer 12 is then

formed on or deposited, typically by using a chemical vapor deposition (CVD) technique,

on the upper surface 20 of the substrate 10. Thereafter, a layer of photoresist 14 is

formed at discrete locations on, or across the entire upper exposed surface of diamond

layer 12.

[0026] The "photoresist" layer 14 is then patterned, as shown in Fig. 2, by using

one or more etching techniques, including, for example, isotropic etching, RIE etching

techniques, lift off or chemical etching techniques, to form holes having vertical

sidewalls 17. This is followed, as shown in Fig. 2, by etching the diamond layer using ,

for example, a reactive ion etch that is tuned to provide an isotropic etch as is known to

those skilled in the art. It is preferred to completely etch through the full height of the

diamond layer 12 down to the substrate's upper surface 20. It is also preferred to form

the etched holes in the diamond layer 12 with angled side walls 18, for example at a

discrete angle to the substrate's upper surface 20 which is thereby exposed in that etched Attorney Docket 2549-0054

PCT/ySO6/H278O opening. This angle of side walls 18 relative to the upper surface 20 will preferably

range from about 91° to about 135°, with the preferred range of angles being 95° to 120°.

[0027] A conductive material, such as, for example, silver (Ag) 22, is then

preferably electroplated into the etched patterned areas of the diamond layer 12 as shown

in Fig. 3. Other deposition techniques could be used as well, so long as the desired

amount of silver, or other conductive metal, is deposited. It is preferred to have the

deposited silver 22 remain within the vertical confines of the patterned areas within the

diamond layer 12 and that the silver not migrate onto or across the top surface 24 of the

diamond layer 12. The silver will typically extend above the surface of the diamond

layer when the hole is completely filled. It is desired to nearly fill the hole, leaving the

edge 34 at least slightly exposed. That way, edge 34 will comprise the emission edge or

tip. The shape of the extended portion 26 of the deposited silver 22 can be one of a

variety of shapes including curved, polygonal, spherical or other shape. Regardless of the

exact shape of the extending portion of the conductive material, what is desired is that

some volume of the deposited material, such as the silver material 22, extend above the

horizontal level of diamond surface 24. It is also desirable that the conductive material

22 come as close as possible to the upper edge 34 of the diamond material 12.

[0028] Following the electroplating of the conductive material, e.g., the silver 22,

the diamond layer 12 will be further etched, for example by plasma etching, to cut away

the diamond material 12 close to the deposited material thus forming the side wall 32 of

the diamond layer and forming as well the shaped structure 30. This structure 30 can be Attorney Docket 2549-0054

P CT/ ϋ SOB/ ES 70 O formed into a number of shapes including, for example, a circular collar or ring that

extends around and is in tight contact against the conductive material, silver 22, as is

shown in Fig. 4A. As noted above, the structure 30 can be segmented rather than a

continuous structure, with the segments be of any desired shape or portion of the total

structure.

[0029] The outer side walls 32 of the resulting final shape 30 will preferably be

formed at 90° to the surface 20 of the substrate 10, and the upper edge 34 of the diamond

structure 30 preferably extends only a part of the way up the total vertical height of the

deposited silver 22 and will comprise the edge, line or tip from which emissions will

occur.

[0030] Thereafter, the substrate 10 will be cut into individual, separate pieces

thereby forming finished individual emission tips each of which being comprised of the

silver material 22, the diamond material 30 surrounding at least the base of the silver

material 22 and the underlying substrate 10 as is shown in Fig. 4B.

[0031] A second method of forming diamond field emission tips begins with a

substrate 40 of typically silicon on which a diamond layer 42, shown by the dotted lines

in Fig. 5 was formed by being deposited, for example, by CVD techniques. The diamond

layer 42 is thereafter suitably patterned by depositing a layer of a photoresist or e-beam

resist material, such as PMMA, and which is then patterned by one or more of the

techniques mentioned above. Optionally, and intermediate hard mask of material, such

as SiO₂ or metal may be used. The diamond layer is then etched by using typically Attorney Docket 2549-0054

PCT/USOB /iS!iB:78 O oxygen plasma etching techniques. When the photoresist is removed this process will

have created a plurality of vertically extending, separated, individual diamond posts 44,

shown in Fig, 5 in full line. Each diamond post 44 can have any shape that is desired and

constructed by the pattern chosen, and the shape can be arbitrary as long as an edge,

corner, tip or other sharp area is created from which the emissions will occur. The height

can range from about 100 run to about 1000 run, and a width ranging from about 100 nm

to about 500 nm, although these dimensions are not to be construed as limiting, but are

rather only exemplary in the context of this invention.

[0032] With reference to Fig.6, a layer of highly conductive metal 46, for example,

silver (Ag), is then deposited or otherwise formed on and around the diamond posts 44,

for example, by employing sputter deposition process, thereby covering them with a

metal layer preferably about 100 nm thick. The layer 46 can be shaped to extend around

the posts 44 or layer 46 can undulate over and around the diamond posts 44.

[0033] As shown in Fig. 7A, following the step of depositing the conductive metal

layer 46, an etching process, for example slightly anisotropic reactive ion etching, will be

used to remove selected portions of metal layer 46 so that a portion 50 remains on the top

surface 48 of posts 44, and a triangular cross-sectional shaped portion 52 extends about

the outer circumference of each of the posts 44. The remaining conductive metal layer 46

preferably extends from a position adjacent the upper edge of the posts 44, leaving the

upper edge 58 of the diamond exposed, down to and in contact with the top surface of

substrate 40. It is preferred to have the outer wall 54 of the roughly triangular portion 52 Attorney Docket 2549-0054

PC T/ U S OB /ϊS S 78 O form an angle between the top surface 56 of substrate 40 and the outer wall 54 ranging

from about 95° to about 120°. Similarly, the metal 50 remaining on the outer ends of

posts 44 can have a spherical, triangular, rounded or other shape. However, it should be

understood that the metal structure 52 could have other shapes, such as, for example, and

that structure could also.be either fully enclosing the outer circumference of posts 44 or

could extend around posts 44 in a segmented manner.

[0034] In the end, the final structure is formed as shown in Fig. 7B where the

metal structure 52 is formed about the sides of the diamond posts 44 substantially in the

form of a triangular cross-sectional structure, as well as a small amount of metal 50 on

the exposed top surface of the posts 44 along with the exposed upper edge 58 which will

act as the emission edge or area. Preferably, there will be more metal adjacent the base

of the posts 44 than there is near the top of the posts.

[0035] Following the completion of the formation steps, the substrate will be cut

apart thereby forming individual diamond emission tips as in Fig. 7B.

[0036] While the invention has been described in connection with what is

presently considered to be the most practical and preferred embodiment, it is to be

understood that the invention is not to be limited to the disclosed embodiment, but on the

contrary, is intended to cover various modifications and equivalent arrangements

included within the spirit and scope of the appended claims.

What is claimed is:

Claims

Attorney Doom /:wy-uυ:>4PCT/USOB/SS70O

1. A method of forming diamond emission tips for a cathode source of

charged particles comprising the steps of supplying a silicon substrate, depositing a layer

of diamond material on the substrate, forming a resist layer on an exposed upper surface

of the diamond material, causing a pattern to be formed in the resist layer, etching away

selected portions of the diamond layer thereby forming holes therein defined by a sloped

interior sidewall, depositing a conductive metal into the holes formed in the diamond

layer, removing selected portions of the diamond layer so that portions of the diamond

layer remains around the deposited conductive metal, and dividing the substrate adjacent

the diamond material to form individual diamond emission tips.

2. The method of forming emission tips as in claim 1 wherein the sloped

interior side walls have an angle relative to the substrate of about 91° to about 135°.

3. The method of forming emission tips as in claim 1 wherein the step of

removing selected portions of the diamond layer includes the step of leaving at least a

portion of the diamond layer as a collar surrounding the conductive metal and permitting

at least a portion of the conductive metal to extend outwardly beyond the diamond

material.

4. The method of forming emission tips as in claim 1 wherein the step of

depositing a conductive metal includes the steps of forming the conductive metal to

extend vertically above the diamond layer.

5. The method of forming emission tips as in claim 4 wherein an upper edge

of the diamond layer remains exposed. Attorney DocKet ZD4y-υυ54

PC T/ MS O B /B ES 78 O

6. The method of forming emission tips as in claim 3 wherein the diamond

material has an outer cylindrical shape with a conical interior that is over filled with

conductive metal.

7. A method of forming diamond emission tips for a cathode source of

charged particles comprising the steps of supplying a substrate, depositing a layer of

diamond material on the substrate, forming the diamond layer into a plurality of

individual, spaced apart diamond posts defined by side walls and an upper surface,

depositing a conductive metal onto and surrounding at least a portion of the side walls

and upper surface of each of the plurality of individual diamond posts, removing selected

portions of the deposited conductive metal leaving conductive metal at selected portions

about the side walls of the diamond posts and on at least a portion of the upper surface

thereof, and dividing the substrate to form individual emission tips.

8. The method as in claim 7 wherein the conductive metal is silver.

9. The method as in claim 7 wherein the metal surrounding the diamond posts

is formed to have a substantially conical cross-sectional shape.

10. The method as in claim 7 wherein the diamond posts have a cylindrical

shape.

11. The method as in claim 7 wherein the conductive metal completely

surrounds side walls of the diamond posts.

12. The method as in claim 7 wherein the conductive metal is segmented. Attorney Docket 2549-0054

PCT/UB0S/ΞΞ780

13. The method as in claim 7 wherein the conductive metal is formed so that it

extends at least halfway up the diamond post away from the substrate.

14. A diamond field emission tip comprising:

a substrate,

a diamond structure in contact with the substrate, and

a conductive metal structure in contact with the diamond structure and the

substrate.

15. The diamond field tip as in claim 14 wherein the diamond structure

encloses the conductive metal.

16. The diamond field tip as in claim 15 wherein the conductive metal extends

outwardly beyond the diamond structure.

17. The diamond field tip as in claim 15 wherein the diamond structure

completely encircles the conductive metal.

18. The diamond field tip as in claim 15 wherein the diamond structure

includes a conically shaped interior recess in which the conductive metal is contained.

19. The diamond field tip as in claim 16 wherein the outwardly extending

portion of the conductive metal has a curved outer shape.

20. The diamond field tip as in claim 14 wherein the conductive metal encloses

at least a portion of the diamond structure. Attorney Docket 2549-0054

»CT/USO6/BB78O

21. The diamond field tip as in claim 14 wherein the diamond structure

comprises an upstanding post.

22. The diamond field tip as in claim 21 wherein the conductive metal

substantially encircles the diamond structure.

23. The diamond field tip as in claim 20 wherein the conductive metal is

defined by an angled exterior sidewall.

24. The diamond field tip as in claim 21 wherein the diamond post has an upper

surface and further including a second conductive metal structure positioned on the

upper surface.