WO2006103766A1 - ボール捕捉装置、半田ボール配置装置、ボール捕捉方法、および半田ボール配置方法 - Google Patents
ボール捕捉装置、半田ボール配置装置、ボール捕捉方法、および半田ボール配置方法 Download PDFInfo
- Publication number
- WO2006103766A1 WO2006103766A1 PCT/JP2005/006099 JP2005006099W WO2006103766A1 WO 2006103766 A1 WO2006103766 A1 WO 2006103766A1 JP 2005006099 W JP2005006099 W JP 2005006099W WO 2006103766 A1 WO2006103766 A1 WO 2006103766A1
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- WIPO (PCT)
- Prior art keywords
- ball
- solder
- capturing
- blowing
- solder ball
- Prior art date
Links
- 229910000679 solder Inorganic materials 0.000 title claims abstract description 193
- 238000000034 method Methods 0.000 title claims abstract description 41
- 238000007664 blowing Methods 0.000 claims abstract description 70
- 230000007246 mechanism Effects 0.000 claims description 31
- 239000012530 fluid Substances 0.000 claims description 19
- 230000008859 change Effects 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 5
- 230000004044 response Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000009191 jumping Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000006187 pill Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/06—Solder feeding devices; Solder melting pans
- B23K3/0607—Solder feeding devices
- B23K3/0623—Solder feeding devices for shaped solder piece feeding, e.g. preforms, bumps, balls, pellets, droplets
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3478—Applying solder preforms; Transferring prefabricated solder patterns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
- H01L2224/11334—Manufacturing methods by local deposition of the material of the bump connector in solid form using preformed bumps
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0195—Tool for a process not provided for in H05K3/00, e.g. tool for handling objects using suction, for deforming objects, for applying local pressure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/041—Solder preforms in the shape of solder balls
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/081—Blowing of gas, e.g. for cooling or for providing heat during solder reflowing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/082—Suction, e.g. for holding solder balls or components
Definitions
- Ball catching device solder ball placement device, ball catching method, and solder ball placement method
- the present invention relates to a ball catching device that catches one ball from a plurality of balls of the same size, a method thereof, and a solder in which a solder ball containing solder is arranged at a predetermined position on a circuit board.
- the present invention relates to a ball placement device and a method thereof. Background art
- Patent Document 1 Japanese Patent Laid-Open No. 7-307340
- Patent Document 2 Japanese Patent Laid-Open No. 2001-44624
- Patent Document 3 Japanese Patent No. 3440836
- Patent Document 4 Japanese Patent Laid-Open No. 9-18130
- Patent Documents 1 to 4 are based on the premise that a plurality of solder balls are captured in a lump. A single solder ball cannot be captured due to air leakage.
- the present invention provides a ball catching device, a method thereof, and a ball catching device capable of reliably catching one ball from a plurality of balls of the same size. It is an object of the present invention to provide a solder ball placement apparatus and method for placing solder balls containing solder at predetermined positions on a circuit board.
- the ball catching device of the present invention that solves the above-described object is provided with two balls larger than the size of one ball on the upper part of the housing wall that seals the space for housing a plurality of balls of the same size.
- a container provided with a hole smaller than the size of
- It has a blowing means for blowing up the ball accommodated in the container, and a capturing means for catching the ball blown up by the blowing means and reaching the hole.
- a solder ball placement device of the present invention that solves the above-mentioned object is a solder ball placement device that places a solder ball containing solder at a predetermined position on a circuit board.
- a container provided with a hole larger than the size of one solder ball and smaller than the size of two solder balls in the upper part of the housing wall that seals the space for accommodating the plurality of solder balls of the same size;
- Blowing means for blowing upward the solder balls accommodated in the container, and capturing means for catching the solder balls blown by the blowing means and reaching the holes;
- It has a placement mechanism for aligning the position of the solder ball captured by the capturing means with the predetermined position on the circuit board and arranging the solder ball at the predetermined position. .
- the capturing means has a flow path through which the sucked air flows, and a flow meter for measuring the flow rate of the air flowing through the flow path,
- the ball capturing device or the solder ball placement device is provided with a detection unit that detects that the capturing means has captured the ball in accordance with a change in flow rate measured by the flow meter. .
- the inner diameter of the suction port of the capturing means is somewhat large, it can be detected that the capturing means has captured (sucked) the ball by the pressure change in the flow path, but the smaller the ball, The inner diameter of the suction port of the capturing means is also reduced, making this detection difficult. However, if attention is paid to the change in the flow rate of the air flowing through the flow path, it is possible to easily detect that the ball has been captured (sucked) even if the suction port of the capturing means has a small inner diameter.
- the blowing means may be one that blows a round opening force fluid into the housing body, but it is preferable that the slit-like opening force also blows the fluid.
- blowing means blows out a round opening force fluid
- the round If the balls are lined up and the fluid is blown out next time, it may take time until the balls reach the holes.
- a ball exists on the opening so as to close the slit-like opening, and when the fluid is blown next time, the ball reaches the hole. The acquisition time is shortened and the capture efficiency is improved.
- the blowing means blows out a fluid into the containing body, and is provided in a flow path through which the fluid flows, and part of the pressure in the flow path. It is also a preferred embodiment that it has a pressure release means for escaping to the outside. [0016] While stopping the flow of fluid, unintentional pressure is applied to the flow path at some moment, and the ball accommodated in the container is blown upward and jumps out of the hole. According to the aspect described above, even if an unintended pressure is applied in the flow path, the unintended pressure is released by the pressure release means.
- a first ball catching method of the present invention that solves the above-described object is a method of capturing one of the balls provided on an upper portion of a housing wall that seals a space for housing a plurality of balls of the same size.
- a first solder ball arrangement method of the present invention that solves the above object is a solder ball arrangement method in which solder balls containing solder are arranged at predetermined positions on a circuit board. A hole larger than the size of one solder ball and smaller than the size of two solder balls provided in the upper part of the housing wall that seals the space for accommodating the plurality of solder balls. An alignment step for aligning the capturing means for capturing the ball;
- the upward blowing of the ball is stopped. While stopped, it is preferable to draw the ball accommodated in the space downward.
- the capturing step is a step of blowing upward the ball accommodated in the space by blowing the fluid into the space from the slit-shaped opening.
- the second ball capturing method of the present invention that solves the above-mentioned object is the one of the balls provided on the upper part of the housing wall that seals the space for housing a plurality of balls of the same size.
- a suction start step for starting the suction operation of the capturing means that has been aligned with the hole
- the second solder ball arrangement method of the present invention that solves the above object is the same size as the solder ball arrangement method in which the solder ball containing solder is arranged at a predetermined position on the circuit board.
- a hole that is larger than the size of one solder ball and smaller than the size of two solder balls is provided in the upper part of the housing wall that seals the space for housing the plurality of solder balls.
- the size of the hole makes it possible to remove one ball from the two balls at the same time. It can be captured reliably.
- the stop step is a step of stopping the upward blowing of the ball and pulling the ball downward with a suction force weaker than the suction force of the capturing means
- the step is performed after the arrangement step force and the stop step.
- the stopping step stops the upward blowing of the ball in response to the fact that the air flow rate in the flow path through which the air sucked by the capturing means flows is lower than a predetermined flow rate. Also preferred to be a step.
- the flow rate of the air flowing through the flow path is a predetermined flow rate. Below the amount. For this reason, the stopping step is performed after the capturing means captures the ball, and one ball can be captured more reliably from a plurality of balls having the same size.
- a ball catching device capable of reliably catching one of a plurality of balls of the same size, a method thereof, and the ball catching device. It is possible to provide a solder ball placement apparatus and method for placing solder balls containing solder at predetermined positions on a substrate.
- FIG. 1 is a diagram showing a schematic configuration of an apparatus corresponding to one embodiment of a solder ball arrangement apparatus of the present invention.
- FIG. 2 is a flow chart showing a solder ball placement method implemented by the solder ball placement device shown in FIG. 1.
- FIG. 3 is a graph showing changes in the flow rate of air flowing through the piping of the suction mechanism when an experiment was performed using three types of capillaries with different inner diameters.
- FIG. 4 is a diagram showing the container shown in FIG. 1 and the periphery of the container.
- FIG. 5 is a graph showing the relationship between the position of the hole in the container and the time from the start of blowing up to the time when the solder ball is sucked into the force.
- FIG. 6 is a graph showing the relationship between the supply hole size of the container and the supply time.
- FIG. 7 is a view showing the inside of a container having a round opening at the bottom.
- FIG. 8 is a view showing an example in which a slit-like opening is provided at the bottom of the container.
- FIG. 9 is a structural view of the bottom of the container shown in FIG. 8 as viewed from above.
- FIG. 10 is a view showing the inside of a container having a slit-like opening at the bottom.
- FIG. 1 is a diagram showing a schematic configuration of an apparatus corresponding to an embodiment of a solder ball arrangement apparatus of the present invention.
- a solder ball placement device 1 shown in Fig. 1 includes a plurality of pads provided on a circuit board surface. A device that places solder balls one by one on top.
- the solder ball is a minute ball having a diameter of 0.15 mm, and the peripheral surface of the copper ball is covered with solder.
- the direction perpendicular to the paper surface of FIG. 1 is defined as the X-axis direction
- the left-right direction is defined as the Y-axis direction
- the up-down direction is defined as the Z-axis direction.
- the solder ball placement device 1 includes a base 21, an X-axis direction positioning stage 22, a Y-axis direction positioning stage 23, and a Z-axis direction positioning stage 24.
- solder ball placement device 1 shown in FIG. 1 incorporates a solder ball catching device 10 corresponding to one embodiment of the ball catching device of the present invention.
- the solder ball capturing device 10 includes a ball supply unit 11 and a hand unit 12.
- the ball supply unit 11 includes a container 111 that stores a plurality of solder balls of the same size.
- the container 11 has a funnel shape, and the upper opening is closed by a plate member provided with a supply hole 1111 larger than 0.15 mm and smaller than 0.30 mm in the center. That is, the container 11 shown in FIG. 1 is larger than the size of one solder ball and larger than the size of two solder balls on the upper portion of the housing wall that seals the space S that accommodates a plurality of balls of the same size. Is provided with a small supply hole 1111.
- the container 111 is fixed to the base 21 of the solder ball arranging device 1.
- the ball supply unit 11 also has a blowing mechanism 112.
- the blowing mechanism 112 includes a pump 1121 and a pipe 1122 having one end connected to the pump 1121.
- the other end of the pipe 1122 is connected to the bottom of the container 111, and air compressed by the pump 1121 or sucked air flows through the pipe 1122.
- the blowing mechanism 112 has a T-branch 1123.
- This T-branch 1123 is provided in the middle of the pipe 1122, and has a flow path that leads to the pump 1121 and has a flow path that acts as a throttle by branching to the outside, and a part of the pressure in the pipe 1122 To escape to the outside.
- a check valve is provided in the flow path acting as the throttle.
- the hand unit 12 includes a clearance 121 and a suction mechanism 122.
- the carriage 121 is attached to the Z-axis positioning stage 24 in a posture in which the tip is directed to the supply hole 1111 of the container 111.
- the Z-axis positioning stage 24 moves in the Z-axis direction (see arrow Z in the figure), that is, in the vertical direction as the motor 241 rotates.
- This solder ball placement device In the apparatus 1, in the X-axis direction, the position of the tip of the carriage 121 and the position of the supply hole 1111 of the container 111 are always aligned.
- Fig. 1 shows that the Z-axis positioning stage 24 is raised and the tip of the capillary 121 is in a position far away from the supply hole 1111 of the container 111.
- the suction mechanism 122 constituting the hand unit 12 includes a pump 1221 and a pipe 1222 having one end connected to the pump 1221. When this pump 1221 is driven, air is sucked into the tip 121 of the mechanical force 121 and a suction operation is performed.
- the other end of the pipe 1222 is connected to the rear end of the cavity 121, and the air sucked from the tip of the cavity 121 flows through the pipe 1222.
- the suction mechanism 122 also has a flow meter 123.
- the flow meter 123 measures the flow rate of the air flowing through the pipe 1222.
- an X-axis positioning stage 21 is provided at a position away from the container 111 in the Y-axis direction.
- the circuit board is placed on the X-axis positioning stage 21.
- the X-axis positioning stage 21 moves in the X-axis direction (direction perpendicular to the paper surface) as the motor 211 rotates.
- the controller 25 controls the entire solder ball placement device, and also controls the solder ball capturing device.
- FIG. 2 is a flowchart showing a solder ball arrangement method implemented by the solder ball arrangement apparatus shown in FIG.
- a plurality of solder balls having a diameter of 0.15 mm are accommodated in the accommodating body 111 shown in FIG.
- the pump 1121 of the blowing mechanism 112 performs a suction operation so that air is sucked from the supply hole 1111 of the container 111.
- one solder ball is placed in each of the supply holes 1111 and the solder balls are drawn into the container 111 one by one.
- a circuit board having a plurality of nodes / nodes on the surface is placed on the X-axis positioning stage 21 shown in FIG.
- a solder ball arrangement method is performed.
- the supply hole 1111 of the container 111 in which a plurality of solder balls are accommodated is aligned with the leading end of the cavity 121 (step Sl). That is, with respect to the X-axis direction, the Z-axis positioning stage 24 is moved in the Y-axis direction with the position of the tip of the carriage 121 aligned with the position of the supply hole 1111 of the container 111.
- the tip of the cavity 121 is aligned with the supply hole 1111 of the container 111, and then the tip of the cavity 121 is moved to the suction position by moving the Z-axis positioning stage 24 in the Z-axis direction.
- the position of the tip of the carrier 121 may be fixed, and the container 111 may be moved in the Y-axis direction and the Z-axis direction so that the supply hole 1111 of the container 111 and the tip of the member 121 are aligned. ! /
- step S2 the pump 1221 of the suction mechanism 122 is driven in a state in which the tip of the capillary 121 is at the suction position, and the suction operation for sucking air is also started (step S2).
- the pump 1121 of the blowing mechanism 112 performs a compression operation, and the compressed air is sent into the pipe 112 (step S3). Then, air blows upward toward the bottom force of the container 111, and the solder ball that is received in the container 111 is blown upward by the air and blown up to reach the supply hole 1111. Is sucked into the tip of the magnetic pole 121 and the solder ball is captured. That is, in this step S3, the solder ball accommodated in the accommodating body 111 is blown upward, and the solder ball that has been blown up and reaches the supply hole 1111 is sucked by the capillary 121 and captured.
- the compression operation of the pump 1121 of the blowing mechanism 112 is stopped, and this time, the pump 1121 performs a suction operation (step S4).
- the suction operation of the pump 1121 of the blowing mechanism 112 is an operation that generates a suction force that is weaker than the suction force of the pump 1221 of the suction mechanism 122, and the pump 1221 of the suction mechanism 122 continues the sucking bow from step S2. It is operating. For this reason, the solder ball that has been blown up by the blown-off air of the container 111 is attracted to the bottom side and falls, but the solder ball that is sucked to the tip of the mechanical 121 is a pump in the suction mechanism 122. With a suction force of 1221, It remains sucked at the tip of the pill 121.
- step S5 the solder ball attracted to the tip of the cab 121 is placed on a desired pad provided on the circuit board surface. That is, with the pump 1 221 of the suction mechanism 122 being driven, the Z-axis positioning stage 24 is raised, and then the Z-axis positioning stage 24 is moved in the Y-axis direction. The position of the desired pad among the plurality of knobs on the surface of the circuit board placed on the positioning stage 21 is aligned with the position of the solder ball absorbed by the tip of the cavity 121. Do. Next, the X-axis positioning stage 21 is moved in the X-axis direction (perpendicular to the paper surface in FIG.
- step S6 the Z-axis positioning stage 24 is raised, and if the placement of the solder balls on the remaining pads is necessary, the process returns to step S1, and if not necessary, the process ends (step S6).
- step S4 suction operation of the pump 1121 in the blowing mechanism 112 performed in step S4 is continued until this flowchart ends or when the process returns to step S1, until step S3 is started. And continue to draw the solder balls accommodated in the container 111 downward. In this way, even if an unintentional force that blows upward is applied to the solder ball accommodated in the container 111 with some beat, the solder ball accommodated in the container 111 is attracted downward. Therefore, the solder ball can be prevented from jumping out from the supply hole 1111.
- a T-branch 1123 is provided in the middle of the pipe 1122 of the blowing mechanism 112.
- the flow meter 1223 shown in FIG. 1 will be described in detail.
- the inner diameter of the capillaries is large to some extent, it can be detected that the capillaries 121 suck the solder balls by the pressure change in the pipe 1222 of the suction mechanism 122. This also makes the detection difficult. Therefore, in the solder ball placement device 1 shown in FIG. 1 that handles a small solder ball of 0.15 mm, it is detected that the capillary 121 has sucked the solder ball I due to a change in the flow rate of the air flowing through the pipe 1222 of the suction mechanism 122.
- FIG. 3 is a graph showing a change in the flow rate of air flowing through the piping of the suction mechanism when an experiment was performed using three types of capillaries with different inner diameters.
- the horizontal axis of the graph shown in Fig. 3 indicates the inner diameter m) of the fly, and the vertical axis indicates the flow rate (mlZmin) of the air flowing through the pipe of the suction mechanism.
- the black circle plot in the graph represents the result when the capillary does not suck the solder ball, and the white circle plot represents the result when the capillary sucks the solder ball.
- the capillaries used in this experiment have an inner diameter of 51 ⁇ m, an inner diameter of 64 ⁇ m, and an inner diameter of 89 m.
- the flow rate of the air flowing through the piping of the suction mechanism is lower than when it is not sucked when it sucks the solder ball, regardless of which of the caps is used. That is, regardless of the inner diameter of the girder, when the girder is not sucking the solder ball, the flow rate of air flowing through the piping of the suction mechanism is higher than lOmlZmin, but when the girder is sucking the solder ball, The flow rate is less than lOmlZmin.
- step S4 shown in Fig. 2 is executed.
- FIG. 4 is a diagram showing the container shown in FIG. 1 and the periphery of the container.
- the bottom force of the container 111 is blown upward and air is blown to the container 111.
- the solder ball B contained therein is blown upward by the air, and the solder ball B that has been blown up and reaches the supply hole 1111 is sucked to the tip of the mechanical beam 121.
- a round opening 1112 to which a pipe 1122 of the blowing mechanism is connected is provided at the bottom of the container 111, and the compressed air that has passed through the pipe 1122 enters the inside of the container 11 1 from the round opening 1112. Blow out.
- the diameter of the round opening 1112 is 0.08 mm, and the diameter of the portion of the pipe 1122 connected to the round opening 1112 is 0.16 mm.
- FIG. 4 shows the position of the round opening 1112 and the position of the container 111 in two directions, the X-axis direction (direction perpendicular to the paper surface of FIG. 4) and the Y-axis direction (left-right direction).
- the positions of the supply holes 1111 are the same.
- FIG. 5 is a graph showing the relationship between the position of the hole of the container and the time from the start of blowing up to the time when the solder balls are sucked into the force girder.
- the horizontal axis of the graph shown in FIG. 5 indicates the amount of deviation (unit: mm) in the Y-axis direction from the position of the circular opening 1112 in the supply hole 1111 of the container 111, and the vertical axis represents The time (seconds) until the solder ball B is sucked into the force beam 121 (hereinafter referred to as supply time) is shown. Note that the suction of the solder ball B to the mechanical member 121 was detected using the change in the flow rate of the air flowing through the pipe 1222 of the suction mechanism 122 (the same applies hereinafter).
- the triangular plot represents the shortest supply time of 10 time measurements
- the circle plot represents 10 Represents the average supply time of the time measurement.
- the number on the side of each plot represents the supply time.
- the supply time tends to increase as the position of the supply hole 1111 of the container 111 is further away from the position of the round opening 1112. If the supply time is long, the trapping efficiency decreases, which is not preferable. For this reason, the position of the supply hole 1111 of the container 111 matches the position of the opening 1112 as much as possible in the Y-axis direction. It is preferable.
- FIG. 6 is a graph showing the relationship between the size of the supply hole of the container and the supply time.
- the horizontal axis of the graph shown in FIG. 6 indicates the size (mm) of the supply hole 1111 of the container 111, and the vertical axis indicates the supply time (seconds).
- the square plot shown in Figure 6 represents the longest supply time of 10 time measurements
- the triangular plot represents the shortest supply time of 10 time measurements
- the circle plot represents 10 times. It represents the average supply time of the time measurement.
- the number on the side of each plot represents the supply time.
- the size of the supply hole 1111 of the container 111 provided with the round opening 1112 at the bottom is 120% or more and 140 or less with respect to the diameter of the solder ball to be stored.
- FIG. 7 is a view showing a state in the container having a round opening at the bottom.
- FIG. 7 shows a state in which air is blown out from the round opening 1112 provided in the bottom, the solder ball B is blown up, and then the blowing out of air from the round opening 1112 is stopped.
- the solder balls B are arranged so as to circulate around the opening 1112 around the opening 1112 while centering around the round opening 1112 and avoiding the round opening 1112 along the peripheral wall 11 la of the container 111! . If solder balls B are aligned as shown in Fig. 7, the next time air is blown out from the round opening 11 12, the air does not directly hit the solder ball B at first, but the solder ball B is in the upper supply hole 1111 (Fig. It takes time to reach (see 4), and the supply time tends to be longer.
- FIG. 8 is a diagram showing an example in which a slit-like opening is provided at the bottom of the container
- FIG. 9 is a structural view of the bottom of the container shown in FIG.
- the container 111 and the piping 1122 of the blowing mechanism are connected via a thin plate member 113.
- the circular bottom 1113 of the container 111 is provided with a slit-shaped opening 1114 having a length of 0.6 mm and a width of 0.06 mm.
- the container 111 is longer and slightly wider than the slit-shaped opening 1114, and is provided with a slit 1131.
- the slit-shaped opening 1114 of the container 111 and the slit 1131 of the thin plate member 113 are aligned in the width direction, and air is blown into the container 111 from the slit-shaped opening 1114. It is. Note that the slit-shaped opening 1114 shown in FIGS. 8 and 9 extends in the X-axis direction.
- the supply hole of the container 111 is the same as the container provided with the round opening at the bottom.
- An experiment in which the position of 1111 was changed in the Y-axis direction and an experiment in which the size of the supply hole 1111 of the container 111 was changed were performed, and the results will be described.
- the experiment was performed in the same manner as the experiment for the container provided with a round opening.
- the supply hole 1111 of the container 111 is supplied even if the position force of the slit-shaped opening 1114 is shifted by 2. Omm in the Y-axis direction.
- the time was 0.3 seconds, the same as the supply time when both positions were matched in the Y-axis direction.
- the supply time of the supply hole 1111 is 0.179 mm. It was 0.3 seconds, the same as the supply time.
- the size of the supply hole 1111 of the container 111 was 0.226 mm, it was confirmed that the solder ball was sucked in the form of being displaced toward the tip of the cavity 121. Accordingly, even in the housing body 111 provided with the slit-shaped opening 1114, the size of the supply hole 1111 is preferably 120% or more and 140 or less with respect to the diameter of the solder ball to be housed.
- FIG. 10 is a view showing a state in the container in which a slit-like opening is provided at the bottom.
- FIG. 10 shows a state in which air is blown out from the slit-like opening 1114 provided at the bottom, and after blowing the solder ball B, the air blowing from the slit-like opening 1114 is stopped. It is shown.
- the slit is formed so as to close the slit-shaped opening 1114.
- the solder ball capturing device 10 incorporated in the solder ball placement device 1 of the present embodiment has a simple structure and has the same size without much equipment cost.
- One solder ball can be reliably captured from a plurality of solder balls.
- the force described using an example targeting a solder ball having a diameter of 0.15 mm is not limited to a solder ball, and can be applied to various balls.
- the size is not particularly limited. However, the smaller the ball, the more pronounced the effect of the present invention.
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- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200580049258.XA CN101151947B (zh) | 2005-03-30 | 2005-03-30 | 球捕捉方法及焊锡球配置方法 |
PCT/JP2005/006099 WO2006103766A1 (ja) | 2005-03-30 | 2005-03-30 | ボール捕捉装置、半田ボール配置装置、ボール捕捉方法、および半田ボール配置方法 |
JP2007510291A JP4576424B2 (ja) | 2005-03-30 | 2005-03-30 | ボール捕捉装置、半田ボール配置装置、ボール捕捉方法、および半田ボール配置方法 |
US11/864,600 US7717317B2 (en) | 2005-03-30 | 2007-09-28 | Ball capturing apparatus, solder ball disposing apparatus, ball capturing method, and solder ball disposing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2005/006099 WO2006103766A1 (ja) | 2005-03-30 | 2005-03-30 | ボール捕捉装置、半田ボール配置装置、ボール捕捉方法、および半田ボール配置方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/864,600 Continuation US7717317B2 (en) | 2005-03-30 | 2007-09-28 | Ball capturing apparatus, solder ball disposing apparatus, ball capturing method, and solder ball disposing method |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006103766A1 true WO2006103766A1 (ja) | 2006-10-05 |
Family
ID=37053040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/006099 WO2006103766A1 (ja) | 2005-03-30 | 2005-03-30 | ボール捕捉装置、半田ボール配置装置、ボール捕捉方法、および半田ボール配置方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7717317B2 (ja) |
JP (1) | JP4576424B2 (ja) |
CN (1) | CN101151947B (ja) |
WO (1) | WO2006103766A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101982281B (zh) * | 2010-10-19 | 2012-05-30 | 哈尔滨工业大学 | 植球键合机的锡球供料装置 |
US10730128B2 (en) | 2016-01-20 | 2020-08-04 | Western Digital Technologies, Inc. | Reliable transportation mechanism for micro solder balls |
CN110313632B (zh) * | 2019-06-26 | 2024-04-02 | 苏州英派克自动化设备有限公司 | 一种烟用滤棒加香珠装置及加香珠方法 |
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JP3528264B2 (ja) * | 1994-08-19 | 2004-05-17 | ソニー株式会社 | ソルダーボールのマウント装置 |
JP2926308B2 (ja) * | 1995-03-24 | 1999-07-28 | 澁谷工業株式会社 | ハンダボール供給方法 |
JPH0918130A (ja) | 1995-06-30 | 1997-01-17 | Tosok Corp | 吹き上げ装置 |
KR100268632B1 (ko) * | 1996-03-08 | 2000-10-16 | 야마구치 다케시 | 범프형성방법 및 장치 |
JP3252748B2 (ja) * | 1997-04-25 | 2002-02-04 | 松下電器産業株式会社 | 導電性ボールの移載方法 |
JP3449178B2 (ja) * | 1997-07-08 | 2003-09-22 | 松下電器産業株式会社 | 導電性ボールの移載方法 |
JP3440836B2 (ja) | 1998-08-21 | 2003-08-25 | 松下電器産業株式会社 | 導電性ボールの移載装置および移載方法 |
US6595408B1 (en) * | 1998-10-07 | 2003-07-22 | Micron Technology, Inc. | Method of attaching solder balls to BGA package utilizing a tool to pick and dip the solder ball in flux prior to placement |
JP3346345B2 (ja) | 1999-07-27 | 2002-11-18 | 日本電気株式会社 | 微細ボール供給装置 |
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-
2005
- 2005-03-30 CN CN200580049258.XA patent/CN101151947B/zh not_active Expired - Fee Related
- 2005-03-30 JP JP2007510291A patent/JP4576424B2/ja not_active Expired - Fee Related
- 2005-03-30 WO PCT/JP2005/006099 patent/WO2006103766A1/ja not_active Application Discontinuation
-
2007
- 2007-09-28 US US11/864,600 patent/US7717317B2/en not_active Expired - Fee Related
Patent Citations (4)
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JPH09298356A (ja) * | 1996-03-08 | 1997-11-18 | Hitachi Ltd | バンプ形成方法とその装置および形成された電子部品 |
JPH11284003A (ja) * | 1998-03-31 | 1999-10-15 | Hitachi Ltd | バンプ形成方法 |
JP2001068840A (ja) * | 1999-06-24 | 2001-03-16 | Asuriito Fa Kk | ボール搭載装置及びボール搭載方法 |
JP2004023028A (ja) * | 2002-06-20 | 2004-01-22 | Matsushita Electric Ind Co Ltd | 電子部品実装装置および電子部品実装方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101151947A (zh) | 2008-03-26 |
JPWO2006103766A1 (ja) | 2008-09-04 |
CN101151947B (zh) | 2010-05-12 |
US20080020561A1 (en) | 2008-01-24 |
US7717317B2 (en) | 2010-05-18 |
JP4576424B2 (ja) | 2010-11-10 |
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