WO2005107959A1 - 塗布装置及び塗布方法 - Google Patents
塗布装置及び塗布方法 Download PDFInfo
- Publication number
- WO2005107959A1 WO2005107959A1 PCT/JP2005/007914 JP2005007914W WO2005107959A1 WO 2005107959 A1 WO2005107959 A1 WO 2005107959A1 JP 2005007914 W JP2005007914 W JP 2005007914W WO 2005107959 A1 WO2005107959 A1 WO 2005107959A1
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- WO
- WIPO (PCT)
- Prior art keywords
- coating
- vibration
- film
- web
- coating liquid
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0245—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to a moving work of indefinite length, e.g. to a moving web
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
- B05D1/265—Extrusion coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2252/00—Sheets
- B05D2252/02—Sheets of indefinite length
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
Definitions
- the present invention relates to a coating apparatus and a coating method, and particularly to a method for forming a long and wide coating film surface by coating various liquid compositions on a continuously running web (belt-shaped flexible support).
- the present invention relates to a suitable coating device and a suitable coating method.
- a coating apparatus for applying a coating liquid to a web surface for example, a roll coater type, a gravure coat type, a roll coat plus doctor type, a reverse roll coater type, an extrusion type, a slide coat type, and the like are known. At present, they are properly used depending on the application.
- Patent Document 1 JP-A-2002-239432
- Patent Document 2 Japanese Patent Application Laid-Open No. 9-206660
- the present invention has been made in view of such circumstances, and while a coating liquid is supplied from a coating liquid supply unit, the coating liquid is continuously conveyed at a position separated by a predetermined distance from the coating liquid supply unit.
- the thickness accuracy of the film is small, and does not require a large amount of installation cost and has few restrictions on design and layout. It is an object of the present invention to provide a coating apparatus and a coating method capable of obtaining a coating film having a high surface roughness and a smooth surface without coating unevenness.
- the present invention provides a coating liquid supply unit for supplying a coating liquid, and a predetermined distance from the coating liquid supply unit while supplying the coating liquid from the coating liquid supply unit.
- An application device is provided, wherein the application means is fixed on an active vibration isolator.
- the application means is fixed on the active vibration isolator, various vibrations are suppressed, and the applied film is hardly adversely affected.
- the installation does not require a large amount of cost, and there are few restrictions on design and layout. In other words, it is not always necessary to install the coating device at the base level. For example, it can be installed on the 4th floor.
- the active vibration isolator is also called an active vibration isolator, and is different from a normal vibration isolator using a laminated rubber, an air spring, or the like (a so-called passive vibration isolator). This is a device that actively removes vibration by feedback control using
- the band-shaped support which is an object to be coated, is usually a band-shaped flexible support (web) in many cases.
- a band-shaped plate-shaped body for example, a glass substrate, a silicon wafer, or the like is used. Even so, the present invention can be applied, and similar effects can be obtained.
- the active vibration isolator is a device that performs feedback control of a vibration component detected by a sensor to activate a pneumatic actuator to actively perform vibration isolation.
- the active anti-vibration device having such a configuration, various vibrations are suppressed, and the coating film is hardly adversely affected.
- the active vibration isolation device has an explosion-proof structure.
- the vibration acceleration of the application unit is 0.2 Gal or less. According to various experiments by the applicant of the present application, it has been confirmed that a coating film having such a vibration acceleration coating method can provide a coating film with high film thickness accuracy and a smooth surface without coating unevenness. . The details will be described later.
- the primary natural frequency of the application unit is 80 Hz or more. According to various experiments conducted by the applicant of the present application, a coating means having such a primary natural frequency has a high film thickness accuracy and has a smooth surface with no coating unevenness. It was confirmed that a film could be obtained. This will be described later in detail.
- the present invention also provides a coating method using the above-mentioned coating device, wherein the primary natural frequency of the floor on which the coating device is installed is 10 Hz or more. I do. According to various experiments conducted by the applicant of the present application, by installing a coating device on the floor surface having such a primary natural frequency, coating accuracy is high, the surface is smooth, and coating is performed smoothly. It was confirmed that a film could be obtained. The details will be described later.
- the application unit is fixed on the active anti-vibration device, various vibrations are suppressed, and the application film is hardly adversely affected. As a result, it is possible to easily obtain a coating film having high film thickness accuracy, a smooth surface and no coating unevenness.
- FIG. 1 is an explanatory diagram illustrating a production line of an optical compensation sheet to which a coating method and a coating device according to the present invention are applied.
- FIG. 2 is an enlarged conceptual view of a main part showing an embodiment of a coating apparatus.
- FIG. 3 is a perspective view of a coating head with a part cut away.
- FIG. 4 is a perspective view showing a state where the coating apparatus is installed.
- FIG. 5 is a conceptual diagram illustrating a system configuration of an active vibration isolation device.
- FIG. 1 is an explanatory diagram illustrating a production line of an optical compensation sheet to which a coating apparatus and a coating method according to the present invention are applied.
- FIG. 2 is an enlarged conceptual view of a main part showing an embodiment of the coating apparatus 10 in this production line
- FIG. 3 is a perspective view of the coating apparatus 10 in which a coating head 18 is partially cut away. is there.
- FIG. 4 is a perspective view showing a state where the coating apparatus 10 is installed.
- a web 16 as a transparent support on which a polymer layer for forming an alignment film is formed in advance is fed from a feeder 66. .
- the web 16 is guided by a guide roller 68 and fed into a rubbing processing device 70.
- the rubbing roller 72 is provided to perform a rubbing process on the polymer layer.
- a dust remover 74 is provided downstream of the rubbing device 70 so that dust adhering to the surface of the web 16 can be removed.
- a coating device 10 is provided downstream of the dust remover 74 so that a coating liquid containing a disconematic liquid crystal can be coated on the web 16. Downstream of this, a drying zone 76 and a heating zone 78 are sequentially provided so that a liquid crystal layer can be formed on the web 16. Further, an ultraviolet lamp 80 is provided downstream of this, so that the liquid crystal is cross-linked by irradiation with ultraviolet light so that a desired polymer can be formed. The web 16 on which the polymer is formed is wound by a winder 82 provided downstream of the web.
- the coating apparatus 10 includes a coating liquid tank 14 and a coating liquid tank 14.
- a pump 15 for feeding the coating solution a coating head 18 for coating the web 16 with the coating solution sent from the pump 15, a pipe connecting them, and a web provided for facing the coating head 18. It is composed of a backup roller 20 that supports 16.
- a metering pump As the pump 15, it is preferable to use a metering pump because the supply flow rate of the coating liquid is stabilized.
- a gear pump and a roller pump can be used as the metering pump.
- a gear pump can be particularly preferably used.
- the coating head 18 is disposed opposite to the web 16 in which the tip of the coating head runs continuously. As shown in FIG. 3, a cylindrical pocket portion 18B is formed in the coating head 18 in parallel with the width direction of the web 16, and the coating pocket portion 18B is connected to a supply line 18A. A coating slit 18C having a discharge port at the tip of the coating head is formed in the coating head 18, and the coating slit 18C communicates with the coating pocket 18B.
- the coating slit 18C is a narrow flow path connecting the pocket portion 18B and the tip of the coating head, and extends in the width direction of the web 16. Then, a supply amount of the application liquid for applying the supply line 18 ⁇ / b> A to the web 16 is supplied to the application pocket 18 ⁇ / b> B of the application head 18.
- a force that also supplies one side force of the application pocket 18B is used as a method of feeding the application liquid to the application pocket 18B.
- a force that also supplies one side force of the application pocket 18B is used as a method of feeding the application liquid to the application pocket 18B.
- the coating apparatus 10 is configured such that the tip of the coating head 18 faces the position of 9 o'clock in the clockwise direction of the knock-up roller 20. Then, a distance t between the tip of the coating head 18 and the surface of the web 16 is set. As shown in the drawing, a coating film 28 is formed on the web 16 to which the coating liquid has been applied by the coating head 18, and the web 16 is supported by the backup roller 20 and conveyed clockwise.
- the position of the tip of the coating head 18 is not limited to the clockwise position of the backup roller 20 at 9 o'clock. There is no limitation on the position of the tip of the coating head 18 as long as uniform coating can be performed.
- the outer diameter of the knock-up roller 20 is not particularly limited, uniform application can be performed. I just need.
- a configuration in which a plurality of small-diameter backup rollers are arranged in a circle in place of the backup roller 20 as shown in the drawing may be employed.
- the coating head 18 is not limited to an eta-strosion type, but may be of any type as long as the coating liquid is supplied from a slit to apply the coating liquid to the web 16.
- An application head can be used.
- various types of coating means such as a coating means of a type not using the coating head 18 such as a coating means of a roll coater type and a coating means of a reverse roll coater type can be adopted.
- a tension roller for controlling the tension of the web 16 and a drive roller for controlling the conveyance of the web 16 may be arbitrarily provided.
- the coating head 18 is fixed on a coating head base 30, and active vibration isolator devices 32 are arranged at four corners on the lower surface of the coating head base 30. It is supported on the floor F via vibration devices 32, 32.
- a pressure reducing channel 34 is provided below the backup roller 20, and the pressure in the pressure reducing chamber 34 is reduced to reduce the pressure of the coating liquid formed between the web 16 and the coating head 18. You can now stabilize the bead! /
- the coating head base 30 is of a large size depending on the width of the web 16 and the like, and for example, has a plane size of 2.4 x 1.5m and a total weight of 6.5 tons. It is. By disposing the active vibration isolator 32 to the coating head 18 fixed on the coating head base 30 as described above, various vibrations are suppressed, and the coating film is hardly adversely affected. .
- FIG. 5 is a conceptual diagram illustrating the system configuration of the active vibration isolation device 32.
- a load receiver 44 is supported on a base 40 of the active vibration isolator 32 via an air actuator 42.
- An acceleration sensor 46 capable of detecting acceleration is fixed on the load receiving portion 44, and a displacement sensor 48 capable of measuring the displacement of the load receiving portion 44 is provided between the base 40 and the load receiving portion 44. Further, an acceleration sensor 50 capable of detecting acceleration is fixed also on the base 40.
- the load receiving section 44 is controlled by adjusting the flow rate of the compressed air supplied from the air source 52 with the servo valve 54 and supplying the compressed air to the air actuator 42.
- This servo valve 5 In 4 the signal from the acceleration sensor 46 is fed back via the vibration controller 56, and the signal from the displacement sensor 48 is fed back via the position controller 58.
- the above-described acceleration sensor 50 is used for feedforward control.
- the coating apparatus 10 of FIG. 4 it is possible to easily obtain a coating film with high film thickness accuracy, a smooth surface and no coating unevenness.
- the installation of the coating apparatus 10 does not require a large amount of cost, and there are few restrictions on design and layout. That is, it is not always necessary to install the coating apparatus 10 at the base level (the first floor). For example, the coating apparatus 10 can be installed at the fourth floor.
- the active vibration isolator 32 is of an explosion-proof type, it is superior in safety.
- the primary natural frequency of the coating apparatus 10 is preferably 80 Hz or more.
- the frequency range of the primary natural frequency is that the coating device 10 vibrates strongly when a vibration is applied. Then, the pitch of unevenness or the like generated at the time of application corresponds to this frequency.
- the coating film of an optical film optical compensation film, anti-reflection film, etc. hardly adversely affects the coating film which is less likely to cause step unevenness at this frequency.
- the primary natural frequency of the coating apparatus 10 is more preferably 100 Hz or more, more preferably 120 Hz or more.
- the reason why it is preferable to set the primary natural frequency of the floor surface on which the coating apparatus 10 is installed to 10 Hz or more is described.
- the primary natural frequency of the floor surface on which the coating apparatus 10 is installed is less than 10 Hz, almost no vibration isolation effect can be obtained.
- the vibration frequency is 100Hz, a force that can be attenuated to about 1Z100
- the vibration frequency is less than 10Hz, only the effect that can be slightly attenuated is obtained.
- the primary natural frequency of the floor surface on which the coating apparatus 10 is installed is 20 Hz or more, and it is even more preferable that the primary natural frequency is 30 Hz or more!
- the coating liquid for example, a liquid having a viscosity of lOmPa's or less and containing an organic solvent can be used. However, those having other viscosities and those not containing an organic solvent can also be used.
- polyethylene terephthalate PET
- polyethylene mono 2,6-naphthalate cellulose diacetate having a predetermined width and a predetermined length and a thickness of about 2 to 200 ⁇ m
- cellulose diacetate cellulose
- Plastic films such as triacetate, cellulose acetate propionate, polychlorinated polyvinyl chloride, polyvinyl chloride, polycarbonate, polyimide, polyamide, etc.
- paper, polyethylene, polypropylene, ethylene butene copolymer, etc. have 2 to 1 carbon atoms.
- a flexible band such as paper or a metal plate coated or laminated with 0 oc-polyolefins or a band having a processed layer formed on the surface of the band as a base material can be used.
- the average flow velocity of the coating liquid in the slit 18C of the coating head 18 of the coating apparatus 10 is adjusted to 100 to 500 mmZ seconds.
- the coating is performed by controlling the flow rate of the pump 15 (see FIG. 2) and controlling the transport speed of the web 16 so that the thickness of the coating film 28 immediately after coating is 2 to 40 m.
- the drying zone 76, the heating zone 78, the ultraviolet lamp 80, and the like are set so as to obtain a coating film 28 with high thickness accuracy and a smooth surface.
- the web 16 after application and drying is wound by a winder 82.
- the above series of steps is preferably performed in an environment with good dust-freeness and optimum temperature and humidity. Therefore, it is preferable that the application is performed in a clean room, and it is particularly preferable that the coating apparatus 10 be installed in an environment of class 100 or less. For this purpose, a down flow clean room or a clean bench may be used in combination.
- an eta-strusion-type coater is employed as the coating device 10.
- a coater other than this for example, a bar coater (also referred to as a "rod coater", includes a major bar coater) ), A gravure coater (such as a direct gravure coater, a gravure kiss coater), a rhono recorder (such as a transfer rono recorder, a reverse rohno recorder), a die coater, a fountain coater, and a slide hopper.
- the application of the coating apparatus 10 can be applied not only to an optical film such as an optical compensation film but also to various coatings.
- a coating film was formed on the web 16 using the coating device 10 of the optical compensation sheet production line shown in FIG. 1, and the state of the coated surface was evaluated.
- the coating device 10 was installed on a coating station provided on the second floor in a building having an SRC beam structure.
- the primary natural frequency of the floor of the coating station on the second floor of this building was 15 Hz.
- the primary natural frequency of the entire coating apparatus 10 was 120 Hz.
- the width of the opening (length in the running direction of the web 16) of the coating slit 18C is 150 m, and the length of the opening is 50 mm.
- the upstream lip land length of the coating head 18 is 1 mm, and the downstream lip land length is 50 m.
- the distance t between the tip of the coating head 18 and the surface of the web 16 shown in FIG. 2 was set to 50 ⁇ m, and the negative pressure inside the decompression chamber 34 shown in FIG. did.
- a cellulose acetate film (trade name: Fujitac, manufactured by Fuji Photo Film Co., Ltd.) having a thickness of 100 ⁇ m was used as the web 16, and a long-chain alkyl-modified polyvinyl alcohol (trade name) was used before the coating solution was applied.
- a long-chain alkyl-modified polyvinyl alcohol (trade name) was used before the coating solution was applied.
- the web 16 on which the resin layer for the alignment film has been formed in advance is sent out from the feeder 66, and is subjected to a rubbing process.
- a rubbing treatment was performed on the surface of the resin layer for an alignment film by the treatment device 70 to form an alignment film, and the substrate was transported to the coating device 10 for coating.
- the rotation speed of the rubbing roller 72 in the rubbing process was set to 5. OmZ seconds, and the pressing force against the web 16 was set to 9.8 X 10-3 Pa.
- a photopolymerization initiator (trade name: Irgacure 907, manufactured by Nippon Chigeigy Co., Ltd.) was added to a mixture of discotic compound TE— (1) and TE— (2) at a weight ratio of 4: 1.
- the transport speed of the web 16 was set to 50 mZ, and the coating apparatus 10 adjusted the wet film thickness at the time of coating so that the wet film thickness became m.
- the set temperature of the drying zone 76 was set to 100 ° C, and the set temperature of the heating zone 78 was set to 130 ° C.
- the web 16 passed through the drying zone 76 and the heating zone was irradiated with ultraviolet light by an ultraviolet lamp 80. As a result, the liquid crystal was crosslinked, and a desired polymer was formed. Then, the web 16 on which the polymer was formed was wound by the winder 82.
- the web 16 treated under the above conditions was used as Example 1, and the surface state of the coating film formed on the surface of the web 16 after winding was evaluated by visual sensory inspection.
- the maximum vibration acceleration of the coating device 10 while the loaded heavy truck was running was 0.2 Gal.
- the results of the visual inspection of the web 16 (coated sample) corresponding to the vibration indicate that coating unevenness and the like are not detected and that a good surface condition is exhibited.
- Example 2 The application was performed under the same conditions as in Example 1 except that the explosion-proof active anti-vibration device was not operated. At this time, the measured value of the maximum vibration acceleration in the coating apparatus 10 was 0.4 Gal. Visual inspection of the portion of the web 16 (coated sample) corresponding to the vibration showed fine coating unevenness in the coated film.
- Comparative Example 2 The application was performed under the same conditions as in Comparative Example 1 except that the truck load was reduced. At this time, the measured value of the maximum vibration acceleration in the coating apparatus 10 was 0.3 Gal (75% of Comparative Example 1). The result of the visual inspection of the web 16 (coated sample) corresponding to the vibration was slightly smaller than that of Comparative Example 1, but uneven coating was detected although the coating film was fine.
- the application unit is fixed on the active anti-vibration device, various vibrations are suppressed, and the application film is hardly adversely affected. As a result, it is possible to easily obtain a coating film having high film thickness accuracy, a smooth surface and no coating unevenness.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Vibration Prevention Devices (AREA)
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2005800146267A CN1950156B (zh) | 2004-05-07 | 2005-04-26 | 涂敷装置以及涂敷方法 |
US11/579,674 US7927665B2 (en) | 2004-05-07 | 2005-04-26 | Coating device and coating method |
KR1020067023123A KR101209619B1 (ko) | 2004-05-07 | 2006-11-03 | 도포장치 및 도포방법 |
US13/047,079 US8703246B2 (en) | 2004-05-07 | 2011-03-14 | Coating device and coating method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004138839A JP4764615B2 (ja) | 2004-05-07 | 2004-05-07 | 塗布装置、塗布方法及び塗布膜付きウエブの製造方法 |
JP2004-138839 | 2004-05-07 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/579,674 A-371-Of-International US7927665B2 (en) | 2004-05-07 | 2005-04-26 | Coating device and coating method |
US13/047,079 Continuation US8703246B2 (en) | 2004-05-07 | 2011-03-14 | Coating device and coating method |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005107959A1 true WO2005107959A1 (ja) | 2005-11-17 |
Family
ID=35320089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2005/007914 WO2005107959A1 (ja) | 2004-05-07 | 2005-04-26 | 塗布装置及び塗布方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7927665B2 (ja) |
JP (1) | JP4764615B2 (ja) |
KR (1) | KR101209619B1 (ja) |
CN (2) | CN1950156B (ja) |
TW (1) | TWI350207B (ja) |
WO (1) | WO2005107959A1 (ja) |
Cited By (1)
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CN101274315B (zh) * | 2007-03-30 | 2012-12-19 | 富士胶片株式会社 | 涂敷装置、以及使用该涂敷装置的涂敷方法和涂敷膜的制造方法 |
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JP4879070B2 (ja) * | 2007-03-30 | 2012-02-15 | 富士フイルム株式会社 | 塗布装置、及び塗布方法 |
JP5335319B2 (ja) * | 2008-08-25 | 2013-11-06 | 富士フイルム株式会社 | 塗布装置及び塗布方法 |
JP5623786B2 (ja) * | 2009-05-22 | 2014-11-12 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 薄膜蒸着装置 |
TWI472639B (zh) * | 2009-05-22 | 2015-02-11 | Samsung Display Co Ltd | 薄膜沉積設備 |
US8899182B2 (en) | 2009-09-21 | 2014-12-02 | Pioneer Pet Products, Llc | Pet fountain assembly |
JP5624444B2 (ja) | 2010-12-02 | 2014-11-12 | 日東電工株式会社 | 塗布液の塗布方法及び塗布装置、並びに、塗布物の製造方法 |
CN102671815A (zh) * | 2012-05-10 | 2012-09-19 | 苏州市飞莱克斯电路电子有限公司 | 制造柔性电路板用的基材涂胶装置 |
CN102671814A (zh) * | 2012-05-10 | 2012-09-19 | 苏州市飞莱克斯电路电子有限公司 | 柔性电路板基材涂胶装置 |
JP6152287B2 (ja) * | 2013-03-27 | 2017-06-21 | 株式会社Screenホールディングス | 間欠塗工装置および塗膜形成システム |
JP5748364B2 (ja) * | 2013-08-28 | 2015-07-15 | 富士フイルム株式会社 | 塗布方法 |
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CN106269392A (zh) * | 2016-10-27 | 2017-01-04 | 重庆文理学院 | 一种涂布机 |
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CN109894328B (zh) * | 2017-12-11 | 2021-06-11 | 财团法人金属工业研究发展中心 | 振动线棒涂布方法及涂布装置 |
KR102074772B1 (ko) * | 2019-09-23 | 2020-03-02 | (주)엠디산업 | 조립식판넬 판재 제조장치 |
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Also Published As
Publication number | Publication date |
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TWI350207B (en) | 2011-10-11 |
US20080261047A1 (en) | 2008-10-23 |
JP4764615B2 (ja) | 2011-09-07 |
CN1950156A (zh) | 2007-04-18 |
US8703246B2 (en) | 2014-04-22 |
JP2005319385A (ja) | 2005-11-17 |
KR20070007896A (ko) | 2007-01-16 |
CN101811111B (zh) | 2011-08-03 |
US20110165317A1 (en) | 2011-07-07 |
CN1950156B (zh) | 2010-05-26 |
KR101209619B1 (ko) | 2012-12-07 |
CN101811111A (zh) | 2010-08-25 |
TW200539953A (en) | 2005-12-16 |
US7927665B2 (en) | 2011-04-19 |
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