WO2005003737A1 - 光検出装置及び方法 - Google Patents
光検出装置及び方法 Download PDFInfo
- Publication number
- WO2005003737A1 WO2005003737A1 PCT/JP2004/009748 JP2004009748W WO2005003737A1 WO 2005003737 A1 WO2005003737 A1 WO 2005003737A1 JP 2004009748 W JP2004009748 W JP 2004009748W WO 2005003737 A1 WO2005003737 A1 WO 2005003737A1
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- WIPO (PCT)
- Prior art keywords
- light
- measurement mode
- optical fiber
- measured
- fiber probe
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
Definitions
- the present invention relates to a light detection device and method applied to an optical microscope or the like that measures physical properties using near-field light generated in a near-field region.
- the near-field optical microscope can detect the physical properties of the sample from the light emission or transmitted light obtained from the sample, for example, by detecting the light intensity, wavelength, polarization, etc. of the light emitted or transmitted from the sample.
- the near-field optical microscope has a protruding portion that protrudes the sharpened core at one end of an optical fiber provided with a cladding around the core, and the protruding portion is coated with a metal such as Au or Ag. It is equipped with an optical probe and can obtain an optical image with a resolution exceeding the wavelength of light. In other words, in addition to measuring the physical properties of a small area of a sample with nanometer-level resolution by using a force and a near-field optical microscope, memory operations such as writing and reading, and optical processing are also performed. It becomes possible.
- the above-described optical probe used in this near-field optical microscope has already been disclosed.
- the shape of the sample is measured by detecting evanescent light localized in an area smaller than the wavelength of light on the surface of the sample. Then, evanescent light generated by irradiating the sample with light under the condition of total reflection is scattered by the above-described optical probe and converted into scattered light. The converted scattered light is transmitted to the optical fiber through the protrusion on which the optical probe is formed. The light is guided by the core and detected by a detector connected to the other output end of the optical fiber. That is, this near-field optical microscope can perform both scattering and detection by the optical probe provided with the protruding portion.
- the near-field optical microscope as described above can measure at a high resolution, but has a disadvantage that the measurement range is very narrow, several tens of xm.
- a laser microscope using ordinary propagating light has a problem that it can measure a wide range, but has a lower resolution than a near-field optical microscope or the like.
- the resolution of the near-field optical microscope is governed by the aperture diameter of the optical probe to be used, when measuring the physical properties while changing the resolution, a low-resolution optical probe with a different aperture diameter must be connected to the near-field optical microscope. Need to be installed separately. For this reason, when switching to high-resolution measurement using near-field light, it is necessary to constantly change the optical probe to be used. There was also a problem that the position of the optical probe already adjusted with respect to the region was shifted.
- an object of the present invention is to realize both wide-range measurement using ordinary propagating light and high-resolution measurement using near-field light by using one attached optical probe. It is an object of the present invention to provide a photodetection device and a photodetection method.
- the photodetector according to the present invention causes the tip of the optical fiber probe to face the surface to be measured, and forms a spot by light from the optical fiber probe on the surface to be measured.
- a photodetector that detects light from a surface to be measured by the above-described optical fiber probe a wide-range measurement mode using propagation light propagating through the core of the optical fiber probe, and a near-field exuding the core of the optical fiber probe And a high-resolution measurement mode using light.
- a light detection method to which the present invention is applied is such that a tip of an optical fiber probe is opposed to a surface to be measured, and a spot formed by light from the optical fiber probe is formed on the surface to be measured.
- the optical detection method includes a wide-range measurement mode using propagation light propagating through the core of the optical fiber probe, and a high-resolution measurement mode using near-field light exuding from the core of the optical fiber probe.
- FIG. 1 is a diagram showing a configuration example of a photodetector to which the present invention is applied.
- FIG. 2 is a diagram for explaining a wide range measurement and a high resolution measurement.
- FIG. 3 is a diagram showing an optical profile when the wavelength ⁇ power of light emitted from a light source is 3 ⁇ 430 nm.
- FIG. 4 is a diagram showing an optical profile when the wavelength ⁇ power of light emitted from a light source is 3 ⁇ 480 nm.
- FIG. 5 is a diagram for explaining a case where a wavelength ⁇ of light emitted from a light source is switched between a wide-range measurement and a high-resolution measurement.
- FIG. 6 is a diagram showing a relationship of a light profile with respect to a diameter t of an exit aperture D.
- FIG. 7 is a diagram for explaining an optical probe having a configuration in which an emission aperture is not provided.
- FIG. 8 is a diagram for explaining another configuration of the photodetector to which the present invention is applied.
- FIG. 9 is a diagram for explaining another configuration of the optical probe provided in the photodetector to which the present invention is applied. ⁇
- the present invention is applied to, for example, a photodetector 1 as shown in FIG.
- the light detection device 1 is applied to, for example, a near-field optical microscope or the like that measures physical properties in a minute region of a sample, and includes a light source 11 that emits light, and a polarized light that is disposed in an optical path of light emitted from the light source 11
- An optical probe 13 for irradiating the surface 2a and a photodetector 14 for detecting return light from the measured surface 2a are provided.
- the light source 11 is connected to an optical wavelength conversion unit 17 that oscillates light based on a driving power supply received via a power supply device (not shown) and that can switch the wavelength of emitted light according to each measurement mode described later. I have.
- the polarizing beam splitter 12 transmits the light emitted from the light source 11 and guides the light to the measured surface 2a, and reflects the returned light from the measured surface 2a to guide the light to the photodetector 14.
- the light transmitted through the polarizing beam splitter 12 is incident on a quarter-wave plate 18.
- a normal beam splitter may be used.
- the quarter-wave plate 18 gives a phase difference of ⁇ / 2 to the passing light.
- the linearly polarized light emitted from the light source 11 passes through the quarter-wave plate 18 to become circularly polarized light, and is directly incident on the core 31 of the optical probe. Further, the circularly polarized light returning from the surface 2a to be measured becomes linearly polarized light different from the polarization direction of the light emitted from the light source when passing through the quarter-wave plate 18, so that it is described above.
- the light will be reflected by the polarization beam splitter 12.
- the optical probe 13 includes an optical waveguide 21 and a protrusion 22.
- the optical waveguide 21 is composed of an optical fiber in which a clad 32 is provided around a core 31.
- the core 31 and the clad 32 are each made of SiO-based glass.
- the structure is controlled so that the refractive index of the cladding 32 becomes lower than 1.
- the protruding portion 22 includes a core 20a protruding from the clad at one end of the optical waveguide portion 21.
- the protruding core 20a is provided with a gradient that gradually tapers down to the tip 13 as shown in FIG.
- An emission opening D is provided at the center of the protruded core 20a. The diameter t of the exit aperture D is determined based on the propagation mode, the transmission refractive index, and the light efficiency.
- the optical probe 13 emits light propagating through the core 31 (hereinafter referred to as “propagating light”) through the emission aperture D.
- the emitted propagation light is irradiated onto the surface to be measured 2a when the distance h is larger than the wavelength ⁇ / 4 of the light emitted from the light source.
- the case where the measured surface 2a is measured using the transmitted light is hereinafter referred to as wide-range measurement.
- near-field light as an evanescent wave oozes from the end face of the exit aperture D.
- the exuded near-field light has a distance h between the exit aperture D and the surface 2a to be measured.
- the wavelength of light emitted from the light source is less than or equal to / 4
- the light is irradiated onto the surface to be measured 2a.
- the measured surface 2a is measured using the near-field light, it is hereinafter referred to as high-resolution measurement.
- the classification of the wide-range measurement and the high-resolution measurement is not limited to the above-described classification based on the relationship of the distance h to the wavelength of the inter-mode interference type light. You may classify based on a relationship. At this time, when the distance h is within the exit aperture D, high-resolution measurement is performed, and when the distance h is larger than the exit aperture D, and when the distance h is wide range measurement, the measurement is performed.
- a light-shielding coating layer 33 is formed on the surface of the optical fiber constituting the optical probe 13 so that the light emission opening D is provided at the center of the protruded core 20a.
- the light-shielding coating layer 33 is composed of a thin film made of a light-shielding material such as Au, Ag, or A1, and is made of Au having chemical stability that suppresses the promotion of oxidation due to contact with the outside air. May be.
- the optical probe 13 is further mounted on the probe control unit 15.
- the probe control unit 15 is composed of, for example, a two-axis actuator, and moves the optical probe 13 in a direction approaching or separating from the surface 2a to be measured, or scans in a horizontal direction.
- the probe control unit 15 moves the measured surface 2a in the direction of approaching or separating from the optical probe 13. May be.
- the photodetector 14 receives the return light from the surface to be measured 2a and performs a photoelectric conversion to generate a luminance signal. An image created based on the luminance signal generated by the photodetector 14 is displayed on a display (not shown). The user can measure and observe the details of the measured surface 2a based on an image displayed on a display (not shown).
- the photodetector 1 having such a configuration, light having a wavelength ⁇ having a linearly polarized light component emitted from the light source 11 is transmitted through the polarization beam splitter 12, and the polarization component is controlled by the 1Z4 wavelength plate 18. Then, the light enters the optical probe 13. The light incident on the optical probe 13 propagates through the core 31 as it is.
- the probe control unit 15 for example, as shown in FIG.
- the optical probe 13 is moved in the approaching direction to a region where the distance h is equal to or less than the wavelength ⁇ / 4 (hereinafter referred to as a near-field region).
- the near-field light oozing from the end face of the exit aperture D is irradiated onto the surface to be measured 2a, and a minute spot is formed by the near-field light.
- the probe control unit 15 moves the optical probe 13 in the separating direction so that the distance h becomes larger than the wavelength ⁇ / 4, for example, as shown in FIG.
- the propagating light propagating in the core is emitted as it is and irradiated onto the surface to be measured 2a, so that a large spot is formed by the propagating light.
- the propagating light or the near-field light reflected from the surface 2a to be measured respectively enters the optical probe 13 again through the exit aperture D, and propagates in the core 31.
- the propagating light or near-field light emitted from the core 31 is reflected by the polarization beam splitter 12 and guided to the photodetector 14.
- the propagating light or the near-field light guided to the photodetector 14 is converted into a luminance signal that can be measured by the user.
- the user can visually recognize an image based on the spot formed by the propagating light or an image based on the spot formed by the near-field light formed on the measured surface 2a through a display (not shown).
- the photodetector 1 first, the optical probe 13 is moved in the direction away from the surface 2a to be measured, and the propagation light is irradiated onto the surface 2a to be measured, thereby performing a wide range measurement. By irradiating near-field light by bringing the optical probe 13 close to the surface 2a to be measured, You can also perform a resolution measurement.
- the entire surface of the sample is scanned over a wide area using the same principle as that of an ordinary optical microscope, and then a small area where more detailed physical property measurement is desired is specified.
- the optical probe 13 is moved in the horizontal direction to the region to perform positioning, and high-resolution measurement using near-field light as described above can be performed.
- the height of the optical probe 13 with respect to the surface to be measured 2a can be kept constant, so that control in the proximity and separation directions is not required during such measurement.
- This has the advantage that higher-speed measurement is possible, and that restrictions can be reduced in terms of the control band for proximity and separation.
- the measurement range per point is wider and lower resolution, so that a wide range of measurement can be realized with the same number of measurement points.
- the photodetector 1 in which two types of spots, that is, propagating light and near-field light can be formed on the surface 2a to be measured by one optical probe 13 attached, replacement of the optical probe is omitted. Therefore, the position of the optical probe 13 that has already been adjusted to the minute area during wide-range measurement does not shift during high-resolution measurement.
- the photodetector 1 to which the present invention is applied utilizes the fact that the optical aperture file corresponding to the distance d from the exit aperture D is different for each wavelength, and further controls the wavelength of the light emitted from the light source 11. By doing so, you can perform various measurements.
- FIG. 3 shows an optical profile when the light emitted from the light source 11 has a wavelength ⁇ of 30 nm.
- FIG. 4 shows an optical profile in the case where the wavelength of light emitted from the light source 11 is 8011111. Shows Isle. As shown in FIG. 4, the optical profile in the near-field region has a single peak, but changes to a single peak as the distance d from the exit aperture D increases.
- the reasons for the change in the light profile as described above are that the transmittance of the light-shielding material such as Au, Ag, and A1 applied as the light-shielding coating layer 33 differs for each wavelength, and that the light For example, the occurrence of inter-mode interference occurs. That is, in the photodetection device 1 to which the present invention is applied, the wavelength ⁇ of the light emitted from the light source 11 is converted into the light wavelength conversion unit 17 as shown in FIG. To switch between wide-range measurement and high-resolution measurement. For example, as shown in FIG. 5, by setting the wavelength of light emitted from the light source 11 at the time of high-resolution measurement to 83 Onm, a light profile having a sharpened central portion in the near-field region is formed.
- the near-field light can be efficiently leached from the exit aperture D.
- various measurements can be performed using the wavelength dependence of the formed light profile.
- a spot by near-field light or a spot by propagated light can be efficiently formed on the surface 2a to be measured.
- a single optical probe 13 can efficiently realize both wide-range measurement using propagating light and high-resolution measurement using near-field light.
- the diameter h of the exit aperture D of the optical probe 13 may be adjusted as necessary.
- FIG. 6 shows the relationship of the light profile to the diameter t of the exit aperture D.
- the diameter t of the exit aperture D is 2.O zm
- the light profile has a peak centered on the detection position O zm.
- the diameter t of the exit aperture D is 1.
- the maximum value of the light intensity at which two peaks are formed across the detection position 0 ⁇ m is larger than when the diameter t is 2.0 ⁇ ⁇ . I have.
- the diameter t can be optimized at the exit aperture D of the light probe 13 applied to the light detection device 1.
- the spot due to the propagating light is measured in a wide range of measurement, and the near field is measured in a high-resolution measurement.
- a light spot can be formed on the surface to be measured 2a.
- an emission aperture having a diameter t of 0.9 ⁇ or more can be provided in the optical probe 13 applied to the photodetector 1.
- an emission aperture having a diameter t of 0.9 ⁇ or more can be provided in the optical probe 13 applied to the photodetector 1.
- much of the return light reflected from the surface 2a to be measured is incident on the exit aperture D, and it is possible to suppress a decrease in the amount of light received by the photodetector 14 particularly in a wide range measurement where the distance h is long.
- the S / N ratio of a brightness signal obtained by photoelectric conversion can be improved.
- the optical probe 13 provided with the emission opening D is provided at the center of the protruding core 20a.
- an optical probe 43 having a configuration in which an emission opening is not provided by forming a light-shielding coating layer 33a on the entire surface of the protruded core 20a may be provided.
- the light propagating through the core 31 passes through the light-shielding coating layer 33a and exits to the measured surface 2a side, and the light incident from the measured surface 2a passes through the light-shielding coating layer 33a. The light is transmitted to the core 31.
- incident light resonates with the light-shielding coating layer 33a formed on the probe surface, and surface plasmon is generated. Since near-field light is generated at the tip of the probe by this surface plasmon, high-resolution measurement is possible. Further, the near field light or evanescent light generated on the surface 2a to be measured may be detected by the probe 43 for measurement.
- the distance between the probe and the sample is defined as h. If a probe with an opening is used, wide-range measurement is performed if h is greater than the opening diameter. The following cases may be classified as high-resolution measurement. In the case of a probe with no opening as shown in Fig. 7, if the distance h ⁇ the radius of curvature of the core tip 20a, then a wide range of measurements is taken, and the distance h is the radius of curvature of the core tip 20a. In some cases, high resolution measurement may be used.
- the shape of the optical probes 13 and 43 and the material of the light-shielding coating layer 33 may be any. That is, the shape and material of the optical probes 13 and 43 to be provided may be determined in relation to the above-described wavelength according to the shape and size of the spot formed on the surface 2a to be measured.
- the photodetecting device 1 to which the present invention is applied may be applied to a photodetecting device 8 as shown in FIG.
- the same components and members as those of the photodetector 1 are assigned the same numbers and their explanation is omitted.
- the light detecting device 8 includes a light source 11 for emitting light, an optical coupling optical system 53 for controlling the spot diameter of the light emitted from the light source 11, a fiber coupler 51 for splitting the incident light, and a fiber coupler.
- the photodetector 14 includes a photodetector 14 for detecting return light from the surface 2a to be measured, and a monitoring power meter 52 for monitoring light split by the fiber coupler.
- the fiber coupler 51 is a device for splitting the light emitted from the light source into the optical probe 13 and the monitor parameter 52.
- the fiber coupler 51 splits the light into 50% and 50% for both.
- the light incident from the optical path p is emitted by 50% each from the optical paths r and s.
- the intensity of light emitted from the optical path s is detected by the monitor power meter 52, and the distance between the light source 11 and the end face of the fiber coupler 51 with respect to the optical path p is adjusted based on the detected light intensity.
- the intensity of the near-field light emitted from the optical probe 13 can be adjusted and estimated.
- a spot due to the exuded near-field light is formed on the measured surface 2a using the optical probe 13 in the same manner as in the photodetector 1.
- the return light from the surface to be measured 2a to the optical probe 13 is split so that its intensity becomes 50%: 50% when passing through the fiber coupler 51, and a part is detected by the photodetector 14. Will be done. Thereby, the same measurement as that of the light detection device 1 is realized.
- the photodetector 8 modulates the frequency of the light source 11 by using a function generator (FG) 58 and detects only the frequency component by using a lock-in amplifier (LIA) 59, thereby disturbing disturbance light. Of course, it may be removed.
- FG function generator
- LIA lock-in amplifier
- optical probe provided in the photodetector 1 to which the present invention is applied is not limited to the above-described embodiment.
- the same components and members as those of the optical probe 13 described above are given the same reference numerals, and the description thereof will be omitted.
- the optical probe 93 is composed of an optical fiber in which a clad 32 is provided around a core 31.
- the core 31 is finished so as to have a two-step taper. It is covered with a covering film 33.
- the light propagating in the core 31 has a wavelength that can be transmitted through the light-shielding coating film 33, the light transmitted through the first taper in FIG. By connecting a spot on the surface 2a, a wide range of measurement is possible.
- the light-shielding coating film 33 is set to a wavelength that cannot be transmitted with respect to the power and the transmitted light, the light is transmitted by the first-stage taper. The transmitted light is collected on the second taper, and near-field light is generated. For this reason, the generation efficiency of near-field light can be increased, and higher-resolution measurement can be performed.
- the taper of the optical probe 93 may be a multi-stage taper shape having three or more steps to further improve the efficiency of generating near-field light and to increase the shear force resolution by sharpening. It is.
- the photodetector and the method to which the present invention is applied are an optical fiber probe in which a light-shielding coating layer is formed so as to provide an emission aperture, or a light-shielding coating on the core tip.
- the light emitted to the core of the optical fiber probe covered with the layer is propagated, and the optical fiber probe is moved in the direction of approaching or separating from the surface to be measured, or the surface to be measured is moved with respect to the optical fiber probe. Moving the sensor toward and away from the surface, a spot is formed on the surface to be measured based on either the propagating light propagating through the core or the near-field light exuding from the exit aperture, and the return light based on the spot is detected. I do.
- the tip of the optical fiber probe is opposed to the surface to be measured, and the spot formed by the light from the optical fiber probe is formed on the surface to be measured.
- the light detection method of detecting light from the surface to be measured with an optical fiber probe the light transmitted through the core of the optical fiber probe is used. Wide-range measurement mode, and a high-resolution measurement mode using near-field light oozing from the core of the optical fiber probe.
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Abstract
Description
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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EP04747216A EP1643233A4 (en) | 2003-07-08 | 2004-07-08 | PHOTO DETECTION DEVICE AND METHOD |
US10/563,626 US7586085B2 (en) | 2003-07-08 | 2004-07-08 | Photo-detection device and method |
JP2005511415A JPWO2005003737A1 (ja) | 2003-07-08 | 2004-07-08 | 光検出装置及び方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2003-193680 | 2003-07-08 | ||
JP2003193680 | 2003-07-08 |
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WO2005003737A1 true WO2005003737A1 (ja) | 2005-01-13 |
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US (1) | US7586085B2 (ja) |
EP (1) | EP1643233A4 (ja) |
JP (1) | JPWO2005003737A1 (ja) |
WO (1) | WO2005003737A1 (ja) |
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WO2006083006A1 (en) * | 2005-02-04 | 2006-08-10 | Ricoh Company, Ltd. | Optical fiber probe, optical detection device, and optical detection method |
WO2008075763A1 (ja) * | 2006-12-20 | 2008-06-26 | Nec Corporation | 光分配器 |
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JP4553240B2 (ja) * | 2004-07-12 | 2010-09-29 | 株式会社リコー | 光検出装置、及び光検出方法 |
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- 2004-07-08 JP JP2005511415A patent/JPWO2005003737A1/ja active Pending
- 2004-07-08 US US10/563,626 patent/US7586085B2/en not_active Expired - Fee Related
- 2004-07-08 EP EP04747216A patent/EP1643233A4/en not_active Withdrawn
- 2004-07-08 WO PCT/JP2004/009748 patent/WO2005003737A1/ja active Application Filing
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006029831A (ja) * | 2004-07-12 | 2006-02-02 | Ricoh Co Ltd | 光ファイバプローブ、光検出装置、及び光検出方法 |
JP4553240B2 (ja) * | 2004-07-12 | 2010-09-29 | 株式会社リコー | 光検出装置、及び光検出方法 |
WO2006083006A1 (en) * | 2005-02-04 | 2006-08-10 | Ricoh Company, Ltd. | Optical fiber probe, optical detection device, and optical detection method |
JP2006214942A (ja) * | 2005-02-04 | 2006-08-17 | Ricoh Co Ltd | 光ファイバープローブ、光検出装置及び光検出方法 |
EP1844313A1 (en) * | 2005-02-04 | 2007-10-17 | Ricoh Company, Ltd. | Optical fiber probe, optical detection device, and optical detection method |
KR100853739B1 (ko) | 2005-02-04 | 2008-08-25 | 가부시키가이샤 리코 | 광섬유 탐침, 광검출 장치, 및 광검출 방법 |
US7586084B2 (en) | 2005-02-04 | 2009-09-08 | Ricoh Company, Ltd. | Optical fiber probe, optical detection device, and optical detection method |
EP1844313A4 (en) * | 2005-02-04 | 2010-12-15 | Ricoh Co Ltd | Lightwave Conductor Probe, Lightwave Conductor Detector, and Lightwave Conductor Detection Method |
WO2008075763A1 (ja) * | 2006-12-20 | 2008-06-26 | Nec Corporation | 光分配器 |
US10859625B2 (en) | 2018-08-21 | 2020-12-08 | Globalfoundries Singapore Pte. Ltd. | Wafer probe card integrated with a light source facing a device under test side and method of manufacturing |
TWI735915B (zh) * | 2018-08-21 | 2021-08-11 | 新加坡商格羅方德半導體私人有限公司 | 與面向受測裝置側之光源整合的晶圓探針卡及製造方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1643233A4 (en) | 2010-11-17 |
EP1643233A1 (en) | 2006-04-05 |
US7586085B2 (en) | 2009-09-08 |
US20070018082A1 (en) | 2007-01-25 |
JPWO2005003737A1 (ja) | 2006-11-16 |
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