WO2002084850A1 - Induit de moteur lineaire protege et moteur lineaire protege - Google Patents

Induit de moteur lineaire protege et moteur lineaire protege Download PDF

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Publication number
WO2002084850A1
WO2002084850A1 PCT/JP2002/003517 JP0203517W WO02084850A1 WO 2002084850 A1 WO2002084850 A1 WO 2002084850A1 JP 0203517 W JP0203517 W JP 0203517W WO 02084850 A1 WO02084850 A1 WO 02084850A1
Authority
WO
WIPO (PCT)
Prior art keywords
armature
linear motor
winding
resin
refrigerant
Prior art date
Application number
PCT/JP2002/003517
Other languages
English (en)
Japanese (ja)
Inventor
Toru Shikayama
Akihiko Maemura
Yuji Nitta
Mitsuhiro Matsuzaki
Yoshiyuki Nagamatsu
Original Assignee
Kabushiki Kaisha Yaskawa Denki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001110101A external-priority patent/JP3539493B2/ja
Priority claimed from JP2001122973A external-priority patent/JP4706119B2/ja
Application filed by Kabushiki Kaisha Yaskawa Denki filed Critical Kabushiki Kaisha Yaskawa Denki
Publication of WO2002084850A1 publication Critical patent/WO2002084850A1/fr

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
    • H02K9/197—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil in which the rotor or stator space is fluid-tight, e.g. to provide for different cooling media for rotor and stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Definitions

  • the present invention eliminates generation of eddy currents in the can and the winding fixed frame, prevents can deformation, and reduces dust and gas generation from the can surface even when exposed to a light source for exposure. Also, the present invention relates to a cand linear motor armature and a cand linear motor that can eliminate liquid leakage of a refrigerant flowing in a can.
  • canned linear motors that have been used for table feed of semiconductor manufacturing equipment and machine tools and that require low temperature rise and constant speed feed accuracy are, for example, those disclosed in FIGS. 6 and 7. is there.
  • FIG. 6 is an overall perspective view of a cand / liner motor showing the first related art.
  • 10 is a stator
  • 11 is a stator base
  • 12 is a can
  • 13 is a header
  • 14 is a refrigerant supply port
  • 15 is a refrigerant outlet
  • 20 is a mover
  • 2 1 is a mover base
  • 2 is a field yoke
  • 23 is a permanent magnet.
  • An armature having an inverted T-shape that forms the stator 10 is disposed between the permanent magnets 23 and 23 that form the mover 20.
  • the mover 20 is supported by the stator 10 by a linear guide or the like (not shown). By passing a predetermined current through the armature winding, a thrust is generated in the mover 20 by acting on the magnetic field created by the permanent magnet 23. Then, the mover 20 moves in the traveling direction indicated by the arrow.
  • FIG. 7 is a front sectional view of the cand linear motor taken along the line AA in FIG.
  • the stator 10 has an inverted T-shape.
  • the stator 10 includes a stator base 11, a can 12 supported upward in a recess of the stator base 11, a header 13 sealing the can 12 (see FIG. 6), and a Winding fixed frame 16 placed in the space created by 1 2 and header 13 3, 3-phase armature winding 17 fixed along the longitudinal direction of winding fixed frame 16 It is constituted by a refrigerant passage 18 through which the refrigerant passes.
  • the armature winding 17 is composed of, for example, a plurality of concentrated winding coils prepared for three phases. It is affixed to the left and right sides of the winding fixed frame 16. In addition, since the winding fixed frame 16 requires its own strength, stainless steel is used.
  • the can 12 is constructed by symmetrically arranging two stainless steel thin plates formed in a U-shape and welding their joint end faces.
  • the two headers 13 also made of stainless steel have a refrigerant supply port 14 for allowing refrigerant to pass through one end of the can 12, and a refrigerant discharge port 15 at the other end. Have each.
  • the can 12 and the header 13 are joined by welding at the joining surface.
  • the shape of the mover 20 has a concave shape so as to sandwich the armature portion of the stator 10.
  • the mover 20 is composed of a permanent magnet 23 disposed on both sides of the can 12 of the stator 10 through a magnetic gap, and a magnetic field made of a magnetic material for passing a magnetic flux generated by the permanent magnet 23. It is composed of yokes 22 and a mover base 21 that supports them.
  • a plurality of permanent magnets 23 are arranged along the moving direction of the mover (perpendicular to the paper surface) so that the polarity is alternately different for each pole pitch.
  • the canned linear motor configured as described above becomes the mover 20 by flowing a predetermined current according to the electrical relative position of the mover 20 and the stator 10 to the armature winding 17. Acting on the magnetic field generated by the permanent magnets 23, thrust is generated in the mover 20. At this time, the armature winding 17 that has generated heat due to the copper loss is cooled by the refrigerant, and the temperature rise on the surface of the stator 10 is suppressed to a low level.
  • the can 12 and the winding fixing frame 16 are made of stainless steel, and the permanent magnet 23 of the mover 20 is provided on the surface of the member made of stainless steel.
  • eddy current is generated according to Lenz's law.
  • the eddy current and the magnetic flux generated by the permanent magnet 23 are linked, and a viscous braking force is generated in a direction opposite to the traveling direction of the mover 20.
  • the magnitude of the viscous braking force is roughly proportional to the thickness and width of the stainless steel, the moving speed of the mover, the number of magnetic poles, and the square of the magnetic flux density. The following problems occurred due to the generation of such viscous braking force.
  • Eddy current is converted to heat at the place where it is generated as so-called eddy current loss.
  • the heat was generated at the can, the winding fixing frame, which caused the heat, causing a further rise in temperature. Therefore, it cannot be used in applications where the temperature rise is very limited.
  • a first object of the present invention is to reduce the viscous braking force, and at the same time, have a strength that can withstand the reaction of thrust, and furthermore, a can that can suppress can deformation into the magnetic gap between the mover and the stator. ⁇ Linear motor armature and cand ⁇ To provide linear motor overnight.
  • FIG. 12 is a front sectional view of an armature of Canned Linear Motors showing the second prior art.
  • 51 is a mover
  • 52 is a yoke
  • 53 is a permanent magnet
  • 54 is a stator
  • 55 is a can
  • 56 is a multi-phase armature winding
  • 57 is a refrigerant passage
  • Reference numeral 58 denotes a fixing screw
  • reference numeral 59 denotes a fixing base.
  • This cand linear motor has an armature winding 56 on the stator 54 side and a yoke 52 and permanent magnet 53 on the mover 51 side. belongs to.
  • the first and second cans 55, 55 are fixedly arranged on a fixed base 59 in a state where they are connected to each other with fixing screws 58.
  • the cans 55, 55 are plate-shaped parts formed by a laminated material formed by impregnating a synthetic resin into a sheet-like member, laminating and pressing the same.
  • Material As a laminate, a laminated material obtained by laminating glass cloth impregnated with epoxy resin and press-molding is used. In this laminated material, first, a sheet-like member such as paper, thick yarn cloth, fine yarn cloth, or glass cloth is impregnated with a synthetic resin such as phenol resin, epoxy resin, silicon, melamine resin, or polyester. Then, a large number of the sheet-like members are stacked and laminated, and are pressed into a plate shape by a multi-stage laminating press or the like to be formed into a plate shape.
  • An armature winding 56 is provided in a winding accommodating groove provided on the facing surface (inner surface side) of the cans 55, 55, and a refrigerant passage 57 for flowing a refrigerant is provided. Refrigerant is evenly distributed around the armature windings 56, so that heat generated from the armature windings 56 is efficiently absorbed.
  • the mover 51 has a concave shape with the armature portion of the stator 54 interposed therebetween.
  • the mover 51 includes permanent magnets 53, 53 arranged through magnetic gaps on both outer sides of the cans 55, 55 of the stator 54, and a magnetic flux generated by the permanent magnets 53, 53. It is composed of a field yoke 52 made of a magnetic material for passing through. Further, a plurality of permanent magnets 53 are arranged along the moving direction of the mover 51 (perpendicular to the paper surface) so that the polarity is alternately different for each pole pitch.
  • the canned linear motor configured as described above becomes the mover 51 by passing a predetermined current according to the electrical relative position of the mover 51 and the stator 54 to the armature winding 56. Acting on the magnetic field generated by the permanent magnet 53, a thrust is generated in the mover 51. At this time, the armature winding 56 heated by the copper loss is cooled by the refrigerant, and the temperature rise on the surface of the stator 54 is suppressed low.
  • the surface of the resin can 55 is not smooth and a fine concave portion is formed. Therefore, it was found that particles of about 0.1 m may adhere to the concave portion directly or through the accumulated water.
  • FIG. 14 is an explanatory diagram showing the relationship between the resin composition and gas generation.
  • Can surface When exposed to a light source, C and H for compositions of resin shown in Fig. 1 4, and ⁇ second aerial is excited by UV CH 4, C 2 H 6, in air becomes C_ ⁇ 2 or H 2 0, etc. And the chemical cleanliness is reduced. Reduced chemical cleanliness, i.e. CH 4, C 2 H 6, when C_ ⁇ 2 or H 2 ⁇ like exist, adheres these CH 4 or the like on a silicon wafer, the manufacturing yield of the silicon chip is deteriorated.
  • a second object of the present invention is to reduce the generation of dust and gas from the can surface even when exposed to a light source for exposure, and to cause leakage of liquid due to erosion of the resin of the can by the refrigerant flowing in the can.
  • a canned motor with a can structure that suppresses dust generation and gas generation due to increased exposure surface area due to the resin surface being damaged due to the contact of the can surface with the stage etc. To provide armature and canned linear motors.
  • the present invention includes a winding fixing frame, an armature winding fixed along a longitudinal direction of the winding fixing frame, and a frame including the winding fixing frame.
  • a metal housing provided so as to surround the armature, a can for sealing both openings of the housing, and the housing and the can so that a refrigerant can flow around the armature winding.
  • a can having a refrigerant passage formed in a closed space formed, and a refrigerant supply port and a refrigerant discharge port provided at one of one end and the other end of both ends of the can *
  • the can is made of resin.
  • the configuration according to claim 1 eliminates the eddy current generated in the can and the winding fixed frame in the past, and eliminates the heat generated in the can part due to the eddy current and the heat generated in the armature winding due to an increase in the thrust corresponding to the viscous braking force.
  • viscous braking force is not generated regardless of the speed, it can be used for high speed applications.Furthermore, the winding fixed frame that receives the reaction of thrust is fixed with a metal housing. As a result, vibration of the winding fixed frame can be suppressed.
  • the can in the canned linear motor armature according to the first aspect, is curved in advance, and the can is connected to both openings of the housing such that the convex surfaces of the curvature face each other. It is characterized by being arranged in.
  • the invention according to claim 3 is the canned linear motor electric device according to claim 1 or 2, wherein the armature winding is constituted by a plurality of concentrated winding coils, and a nonmagnetic material is provided in the air core of the concentrated winding coil. A pillar of material is provided, and the pillar is fastened to the can.
  • the flow rate of the refrigerant can be increased, and the rise in the temperature of the can surface can be reduced.
  • the can and the winding fixing frame are formed of a resin filled with glass fiber or carbon fiber. It is characterized by.
  • the configuration of the fourth aspect it is possible to suppress the deformation of the can into the gap facing the mover due to the pressure of the refrigerant.
  • the flow rate of the refrigerant can be increased, and the rise in temperature can be reduced.
  • the invention of a canned linear motor according to claim 5 is the canned linear motor armature according to claim 1 or 2, wherein the can is formed of a resin plate, and at least an outer surface or an inner surface of the resin plate is provided. A coating cover is provided.
  • the problem of dust generation and gas generation can be reduced, and liquid leakage can be reduced even if the resin in the can is eroded by the refrigerant flowing in the can.
  • the coating cover is a metal film, foil, or plate.
  • the coating cover is formed of a metal film, foil or plate, at least the outer surface or the inner surface of the resin plate material forming the can is covered with the metal film, foil or plate,
  • the refrigerant flowing into the can can erode the resin of the can and reduce the leakage of the liquid, and can also be made robust against mechanical shock.
  • the invention according to claim 7 is the canned linear motor armature according to claim 6, wherein the metal film is formed by plating.
  • a metal plating film is used as the coating cover of claim 6, at least the outer surface or the inner surface of the resin plate material constituting the can is covered with a plating that is strong against mechanical shock.
  • a metal plating film is used as the coating cover of claim 6, at least the outer surface or the inner surface of the resin plate material constituting the can is covered with a plating that is strong against mechanical shock.
  • the stainless steel foil or plate is attached to the can by adhesion.
  • a foil or plate made of stainless steel is used as the coating cover of claim 6, and this is adhered to the can, so that at least the outer surface or the inner surface of the resin plate constituting the can is mechanical. It will be covered with stainless steel, which is strong against impact, and when used for driving the linear stage of a semiconductor exposure apparatus in a clean room, even if the can surface is exposed to the light source for exposure, it will generate dust and dust from the can surface.
  • the resin plate is made of a resin filled with glass fiber or carbon fiber.
  • the configuration of the tenth aspect it is possible to suppress the deformation of the can into the gap facing the mover due to the pressure of the refrigerant, so that the can-free fatigue of the can is eliminated and the liquid leakage can be reduced.
  • the flow rate can be increased and the temperature rise can be reduced.
  • the invention of a canned linear motor according to claim 11 is the armature according to any one of claims 1 to 10, wherein the armature and the armature are arranged to face each other via a magnetic gap and are alternately polarized.
  • a field yoke in which a plurality of permanent magnets different from each other are arranged side by side, and one of the armature and the field yoke as a stator and the other as a movable element, and the field yoke and the electric machine The feature is that the child runs relatively.
  • the can-structured electric machine according to any of claims 1 to 10. At least the outer or inner surface of the resin plate material that composes the can is covered with a coating cover, and when used for driving a linear stage of a semiconductor exposure apparatus in a clean room, the can surface is exposed to a light source for exposure.
  • the problem of dust generation and gas generation from the can surface can be reduced, and liquid leakage can be reduced even if the resin of the can is eroded by the refrigerant flowing in the can.
  • FIG. 1 is an overall perspective view of a canned linear motor showing a first embodiment of the present invention
  • FIG. 2 is a cross-sectional view of a canned linear motor along the line A--A in FIG. 1
  • FIG. FIG. 4 is a view showing the internal structure of the stator with the can removed
  • FIG. 4 is a front sectional view of a stator of a canned linear motor showing a second embodiment of the present invention
  • FIG. 5 is a third embodiment of the present invention.
  • Fig. 6 is an overall perspective view of a canned linear motor showing the first prior art
  • Fig. 7 is a canned linear along the line A-A in Fig. 6.
  • FIG. 8 is an overall perspective view of a canned linear motor according to a fifth embodiment of the present invention
  • FIG. 8 is an overall perspective view of a canned linear motor according to a fifth embodiment of the present invention
  • FIG. 9 is a front sectional view of the canned linear motor along line A--A in FIG. 10 is an enlarged front sectional view illustrating the configuration of the can 12 of FIG. 9, and FIG. 11 is a coat showing a sixth embodiment of the present invention.
  • enlarged front sectional view of the can in which a Ngukaba In enlarged front sectional view of the can in which a Ngukaba,
  • FIG. 12 is a configuration explanatory view showing a configuration of a can of the second prior art
  • FIG. 3 is an explanatory diagram of the resin surface and dust generation
  • FIG. 14 is an explanatory diagram of the resin composition and gas generation.
  • FIG. 1 is an overall perspective view of a candid linear motor according to a first embodiment of the present invention.
  • 100 is a stator
  • 101 is a housing
  • 102 is a can
  • 103 is a port for fixing a can
  • 100 is a holding plate
  • 105 is a terminal block
  • 106 is a terminal block.
  • a refrigerant supply port Is a refrigerant supply port
  • 107 is a refrigerant discharge port
  • 200 is a mover
  • 201 is a field yoke support member
  • 202 is a field yoke
  • 203 is a permanent magnet.
  • the mover 200 is provided with field yokes 202 above and below at a distance corresponding to the length of the field yoke support member 201, and the field support members 201 are arranged at the four corners. Then, permanent magnets 203 are attached to opposing surfaces of the field yokes 202, respectively.
  • stator 100 is inserted into the hollow space of the mover 200, in which case the permanent magnet 203 is arranged so as to face the armature 108 of the stator 100.
  • the mover 200 is supported by a linear guide (not shown) or the like.
  • FIG. 2 is a front cross-sectional view of the canned linear motor according to the present invention along the line AA in FIG. Fig. 3 shows the internal structure of the stator excluding the can of Fig. 2.
  • the stator 100 has a mouth-shaped (frame-shaped) metal housing 101 having a hollow inside, and a stator 100 for covering the hollow of the mouth-shaped housing 101.
  • the material of the can 102 is made of stainless steel in the first prior art, but is made of resin according to the present invention.
  • resin for example, an epoxy resin, which is a functionalizing resin, or a polyphenylene sulfide (PPS), which is a thermoplastic resin, is used.
  • the shape of the hollow portion of the housing 101 is drawn so as to surround the outer periphery of the armature winding 108.
  • the armature windings 108 are arranged on both sides of a plate-shaped winding fixing frame 109.
  • the winding fixed frame 1 09 integrated with the armature winding 108 is placed in the hollow space of the housing 101, and fixed to the housing 101 with the winding fixing port 1 1 2 Is done. Case 1 0
  • the front and back edges of 1 are provided with orbital grooves, in which the o-rings 11 are arranged.
  • the can 102 is arranged on the front and back of the housing 101 so as to cover the housing 101.
  • a holding plate 104 is laid from the top of the can 102 along the edge of the housing 101, and is tightened with the can fixing bolts 103.
  • the armature winding 108 is formed by preparing a plurality of concentrated winding coils for three phases, and is attached to the left and right sides of the fixed winding frame 109. Power is supplied to the armature winding 108 from a terminal block 105 attached to the housing 101. The terminal block 105 and the armature winding 108 are electrically connected by lead wires (not shown).
  • the refrigerant is supplied from a refrigerant supply port 106 provided in the housing 101 and discharged from a refrigerant discharge port 107. In the meantime, the refrigerant flows through the refrigerant passage 110 between the armature winding 108 and the can 102, and cools the armature winding 108 that generates heat.
  • the cross-sectional shape of the mover 200 as viewed from the traveling direction has a mouth shape so as to sandwich the armature portion of the stator 100.
  • the mover 200 is a magnetic material for passing the magnetic flux created by the permanent magnet 203 and the permanent magnet 203 arranged on both sides of the can 102 of the stator 100 via magnetic gaps.
  • a field yoke supporting member 201 that supports them.
  • a plurality of magnets 203 are arranged along the moving direction of the mover (perpendicular to the plane of the drawing) so that the poles are alternately alternately arranged at every pole pitch.
  • the canned linear motor configured as described above is configured such that a predetermined current corresponding to the electrical relative position of the mover 200 and the stator 100 is supplied to the armature winding 108 so that the mover A thrust is generated in the mover 200 by acting on the magnetic field generated by the permanent magnet 203, which becomes 0.
  • the armature winding 108 heated by the copper loss is cooled by the refrigerant flowing through the refrigerant passage, it is possible to suppress a rise in the temperature of the surface of the can 102 as in the first related art. it can.
  • the effect of the first embodiment is different from the first conventional technique in the following points.
  • the use of resin for the can and winding fixing frame, which conventionally used stainless steel, has eliminated the eddy current generated in that part.
  • problems such as heat generation in the can part due to eddy current and reduction in thrust due to viscous braking force can be solved.
  • FIG. 4 is a front sectional view of a stator of a canned linear motor according to a second embodiment of the present invention.
  • 100 ' is the stator according to the invention.
  • the stator 100 ′ has a frame-shaped metal casing 101 having a hollow inside, and a plate-shaped resin can 1 covering the hollow of the casing 101.
  • 0 2a and resin can 1 0 2a in housing 1 0
  • Port 1 103 for fixing the can for fixing to 1 Port 104 for fixing the port 103 for fixing the can, and a holding plate 104 that evenly presses the can, and placed inside the hollow of the housing 101
  • the three-phase armature winding 108, the winding fixing frame 109 fixing the armature winding 108, the housing 101 and the coolant in the can 102a , Through which the refrigerant passes, an O-ring that is slightly larger than the edge of the housing, and a winding fixing frame
  • the effect of the second embodiment is similar to that of the first embodiment. Since 2a is made of resin, eddy current can be eliminated.
  • the second embodiment differs from the first embodiment in that the can 102 of the first embodiment has a straight plate shape, whereas the can 10 of the second embodiment has a straight plate shape.
  • 2a is that it is formed to be curved in advance. That is, when the refrigerant is not flowing through the refrigerant passage 110, the can 102 a is formed in a shape that is curved in advance so that it does not slightly contact the armature winding 108 at the center thereof. When the refrigerant flows through the refrigerant passage 110, the can 102a is deformed by the pressure of the refrigerant so that the central portion protrudes outward.
  • the can in a curved shape in advance, it is possible to suppress can deformation to the gap facing the mover due to the flow rate of the refrigerant, as an effect exceeding that of the first embodiment. Therefore, the flow rate of the refrigerant can be increased as compared with the first embodiment, and the temperature rise can be further reduced.
  • FIG. 5 is a front sectional view of a canned linear motor stator according to a third embodiment.
  • Reference numeral 100 denotes a stator according to the present invention.
  • a stator 100 includes a frame-shaped metal casing 101 having a hollow interior, A plate-shaped resin can 102 b that covers the hollow of the body 101, a can-fixing port 110 3 for fixing the resin can 102 b to the housing 101, and a can-fix Presser plate 104 that has through-holes of Porto 103 and presses cans evenly, 3-phase armature winding 108 arranged in the hollow of housing 101, Armature winding 1 From the edge of the housing 101, the winding fixing frame 1 09 fixing the housing 8, the refrigerant passage 1 10 through which the refrigerant passes through the housing 101 and the can 102 b, It is composed of an O-ring 111, which is slightly larger, a winding fixing frame 109, and a winding fixing port 112 for fixing the housing 101
  • the difference between the third embodiment and the first and second embodiments is that the pillar 1 13 passing through the air core of the concentrated winding coil and the pillar fixing screw 1 14 are mechanically fastened.
  • the can 1 102 b is fixed by the support 113 fixed to the winding fixed frame 109. Supported in the center.
  • the can 102 b b projects the middle of the column 113 and the housing 101 to the gap facing the mover.
  • the effect of the third embodiment is that the eddy current is eliminated, as in the first and second embodiments. Further, as an effect surpassing the first embodiment, the center of the can is supported by a column. By doing so, it is possible to suppress can deformation into the void due to the pressure of the refrigerant. Since the flow rate of the refrigerant can be increased as compared with the first embodiment, the flow rate of the refrigerant can be increased and the temperature rise can be further reduced as in the second embodiment.
  • the fourth embodiment is different from the first to third embodiments in that a resin filled with glass fiber or carbon fiber is used as the material of the can and the winding frame.
  • the Young's modulus of the unidirectional glass fiber laminated thermosetting resin is about 6 0, 0 0 0 N / mm 2
  • the Young's modulus of the thermosetting resin laminated carbon fibers also becomes about 2 0, 0 0 O NZmm 2 .
  • GFRP and CFRP can obtain a Young's modulus comparable to that of aluminum or stainless steel, so it is possible to reduce the can deformation rate or improve the strength of the winding fixed frame.
  • the can and the winding fixing frame are formed in a flat plate shape, these materials can be easily applied.
  • the effect of the fourth embodiment is that, as in the first to third embodiments, the eddy current is eliminated and the can deformation to the gap facing the mover can be suppressed.
  • the coolant flow rate can be increased, and the temperature rise can be further reduced.
  • the structure in which the armature has the armature winding and the stator has the permanent magnet as the magnetic field has been described, but the permanent magnet is used in the mover, and the armature winding is used in the stator.
  • the structure may be good.
  • the shape of the mover is a mouth shape
  • the present invention is also applicable to the same concave shape as that of the first prior art or a structure in which permanent magnets are simply arranged on one side.
  • FIG. 8 is an overall perspective view of a canned linear motor (magnetic flux penetration type) showing a fifth embodiment of the present invention.
  • 10 is a stator
  • 11 is a stator base
  • 12 is a can
  • 13 is a header
  • 14 is a refrigerant supply port
  • 15 is a refrigerant discharge port
  • 20 is a mover
  • 21 is a mover.
  • the mover base, 22 is a field yoke
  • 23 is a permanent magnet.
  • the stator 10 includes two cans 12, a housing 19 connecting the two cans 12 to each other at an upper portion and a lower portion, and two cans 12 and a housing 19.
  • a winding fixing frame arranged in a closed space consisting of a header 13 that seals the space at the front and rear ends in the longitudinal direction, and a can 12, a housing 19, and a header 13.
  • a three-phase armature winding 17 fixed along the longitudinal direction of the winding fixing frame 16
  • a refrigerant passage 18 through which the refrigerant passes through the can 12. I have.
  • the header 13 is formed of a stainless steel material, and has a refrigerant supply port 14 for allowing a refrigerant to pass at one end and a refrigerant discharge port 15 at the other end of both ends of the can 12.
  • the can 12 and the housing 19 and the header 13 are joined by welding at the joining surface. Further, by supplying the refrigerant from the refrigerant supply port 14 and discharging the refrigerant from the refrigerant discharge port 15, the refrigerant flows through the refrigerant passage 18 between the armature winding 17 and the can 12.
  • the shape of the mover 20 is an inverted concave shape so as to sandwich the armature portion of the stator 10.
  • the mover 20 is composed of a permanent magnet 23 disposed on both sides of the can 12 of the stator 10 through a magnetic gap, and a magnetic field made of a magnetic material for passing a magnetic flux generated by the permanent magnet 23. It is composed of yokes 22 and a mover base 21 that supports them. Further, a plurality of permanent magnets 23 are arranged along the moving direction of the mover (the direction of the arrow in the figure) so that the polarity is alternately different for each pole pitch.
  • the mover 20 is supported by the stator 10 by a linear guide or the like (not shown).
  • the canned linear motor configured as described above becomes a mover 20 by flowing a predetermined current according to the electrical relative position of the mover 20 and the stator 10 through the armature winding 17. Acting on the magnetic field generated by the permanent magnet 23, a thrust is generated in the mover 20, and the mover 20 moves in the traveling direction indicated by the arrow. At this time, the armature windings 17 generated by the copper loss are cooled by the refrigerant to reduce the temperature rise on the surface of the stator 10. I keep it down.
  • FIG. 9 is a front sectional view of the cand linear motor taken along the line AA in FIG.
  • 10 is a stator
  • 12 is a can
  • 16 is a winding fixing frame
  • 17 is an armature winding
  • 18 is a refrigerant passage
  • 19 is a housing.
  • the can 12 uses a resin plate 1 2 2 as a base material, and the resin plate 1 2 2 uses a plate-like GFRP made of glass cloth solidified with epoxy resin, or a plate made of carbon fiber solidified with epoxy resin CFRP can be used. These have good distribution and can be obtained at relatively low cost.
  • the armature winding 17 is formed, for example, by preparing a plurality of concentrated winding coils for three phases, and is attached to the left and right sides of the winding fixed frame 16.
  • the housing 19 is a strength material against the deflection of the stator 10.
  • the housing 19 can be formed by machining stainless steel, machining aluminum, or die casting. Then, it was constructed by machining aluminum material.
  • the armature winding 17 is attached to the winding fixing frame 16 so as to sandwich both sides along the longitudinal direction, and the winding fixing frame 16 is fixed between the upper and lower housings 19. ing.
  • the housing 19 is provided with a can 12 so as to cover these armature windings 17 while keeping a desired gap from the surface of the armature windings 17.
  • a coolant for cooling the armature winding 17 flows through the gap between the armature winding 17 and the can 12, so that the housing 19 and the can 12 are illustrated.
  • HFE-7200 was used in place of florinate, and the solubility of water cannot be ignored.
  • HFE-720 was used as the refrigerant.
  • Reference numeral 121 denotes a coating cover (to be described later) provided according to the present invention, which covers the resin plate 122, which is the base material of the can 12, and separates dust and gas from the surface of the resin plate 122. Has been reduced.
  • FIG. 10 is an enlarged front sectional view illustrating the configuration of the can 12 of FIG.
  • reference numeral 10 denotes a stator
  • reference numeral 12 denotes a can
  • reference numeral 121 denotes a coating cover provided by the present invention
  • reference numeral 122 denotes a can material (resin plate material)
  • reference numeral 19 denotes a housing.
  • the can 12 has a resin plate 1 on the outer surface of the resin plate 1 2 facing the permanent magnet 3 (FIG. 9) and an inner surface facing the armature winding 17 (FIG. 9). It was configured to provide a coating cover 1 2 1 covering 2 2.
  • the coating cover 1 2 1 is provided on at least the outer surface or the inner surface of the resin plate 1 2 2 constituting the can material 1 2, so that the linear stage of the semiconductor exposure apparatus can be driven in a clean room.
  • the can surface is used, even if the can surface is exposed to the UV light from the light source for exposure, the generation of dust and gas from the can surface can be reduced, and the problem of chemical clean can be reduced. Even if the resin of the can is eroded, liquid leakage can be reduced.
  • Table 1 shows the results of counting the number of particles with and without a coating cover by irradiating the surface with UV.
  • a plate-like C F R P was used for the resin plate material, and the coating cover 121 was formed by the nickel plating shown in the following sixth example.
  • the coating cover when used as in the present invention, even if the resin is eroded by the refrigerant, even if a hole is formed in the resin, it can be prevented by the coating cover.
  • the erosion of the resin gradually causes a capillary phenomenon between the resin and the coating cover. As a result, rapid and sudden large leaks can be prevented.
  • FIG. 11 is an enlarged front sectional view of a can provided with a coating cover according to a sixth embodiment of the present invention.
  • (A) is a specific example of a coating cover
  • (B) is a modified example of (A). Is shown.
  • Fig. 11 (A) 10 is a stator
  • 12 is a can
  • 12 la is a metal film according to the present embodiment
  • 122 is a can material (resin plate material)
  • 19 is a housing. It is.
  • the can material 122 and the casing 19 were the same as those shown in FIG. 10, and the can 121 was fixed tightly using an O-ring or the like (not shown).
  • the metal film 122 a is provided by plating. In this embodiment, nickel plating is used, but zinc plating, copper plating, or aluminum plating may be used.
  • the thickness is preferably about 3 to 20 m.
  • At least the outer or inner surface of the resin plate material 1 2 2 constituting the can material 12 is provided with a coating cover made of a metal film 12 1 a, thereby providing a clean room.
  • the problem of dust generation and gas generation from the can surface can be reduced even if the can surface is exposed to the UV light from the exposure light source. It is possible to reduce liquid leakage even if the resin of the can is eroded by the refrigerant flowing inside, and to make the resin can covered with metal made of metal to make it strong against mechanical shock. it can.
  • the coating cover is formed by plating, the work of providing the coating cover on the surface of the resin plate material can be greatly simplified, and a large number of units can be manufactured at low cost.
  • FIG. 11B will be described.
  • 10 is a stator
  • 12 is a can
  • 12 lb is a metal foil according to the present embodiment
  • 122 is a can material (resin plate material)
  • 19 is a housing. .
  • the can material 122 and the housing 19 were the same as those shown in FIG. 10, and the can 122 was fixed so as to be hermetically closed using a ring or the like (not shown).
  • Metal foils 1 2 1 b are formed as coating covers 1 2 1 on the outer and inner surfaces of the resin plate 1 2 2 shown in FIG.
  • the metal foil 121b was made of stainless steel having a thickness of about 5 to 20 m, and this was adhered to the can 122 by bonding.
  • the coating cover 1 21 b made of stainless steel which is strong against mechanical shock.
  • the coating cover 1 21 b made of stainless steel which is strong against mechanical shock.
  • a metal foil is used as the coating cover in this embodiment, a metal plate may be used instead.
  • the number of particles with and without the coating cover using a metal foil was counted by irradiating the surface with UV and the results were similar to those in Table 1. In other words, the generation of particles was class 15 without the coating cover, but it was reduced to class 3 by providing a coating cover 121 using metal foil.
  • the structure has been described in which the stator has the armature winding and the mover has the permanent magnet as the field, but the armature winding is used for the mover and the permanent magnet is used for the stator.
  • the structure may be good.
  • the canned linear motor armature and the canned linear motor according to the present invention are useful as, for example, those used in semiconductor manufacturing equipment and machine tools that require high precision, fine feed and low temperature rise. is there.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)

Abstract

L'invention concerne un stator (induit) (100) de moteur linéaire protégé comprenant un châssis de fixation d'enroulement (109), un enroulement d'induit (108) fixé sur le châssis de fixation d'enroulement (109), un caisson métallique rectangulaire (101) entourant le châssis de fixation d'enroulement (109), un boîtier (102) scellant les deux ouvertures du caisson (101), un passage pour fluide de refroidissement (110) formé dans un espace scellé défini par le caisson métallique (101) et le boîtier (102), une entrée de fluide de refroidissement (106) et une sortie de fluide de refroidissement (107) situées respectivement à l'entrée et à la sortie du passage pour fluide de refroidissement (110). Le boîtier est réalisé en résine et, en particulier, une matière de charge est constituée d'une résine de fibres de verre ou de fibres de carbone. Il est ainsi possible d'éviter une élévation de la température de la partie boîtier, provoquée par des courants de Foucault. L'induit peut également être utilisé pour une application à vitesse élevée. Il est en outre possible d'obtenir un induit de moteur linéaire protégé et un moteur linéaire protégé pouvant supporter les vibrations du châssis de fixation d'enroulement.
PCT/JP2002/003517 2001-04-09 2002-04-08 Induit de moteur lineaire protege et moteur lineaire protege WO2002084850A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001-110101 2001-04-09
JP2001110101A JP3539493B2 (ja) 2001-04-09 2001-04-09 キャンド・リニアモータ電機子およびキャンド・リニアモータ
JP2001122973A JP4706119B2 (ja) 2001-04-20 2001-04-20 キャンド・リニアモータ電機子およびキャンド・リニアモータ
JP2001-122973 2001-04-20

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JP2000004572A (ja) * 1998-04-13 2000-01-07 Hitachi Metals Ltd リニアモ―タ
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US4625132A (en) * 1984-08-07 1986-11-25 Anorad Linear motor with seal
JPH05275755A (ja) * 1992-03-25 1993-10-22 Toshiba Corp クライオスタット
JP2000004572A (ja) * 1998-04-13 2000-01-07 Hitachi Metals Ltd リニアモ―タ
JP2001037200A (ja) * 1999-07-19 2001-02-09 Canon Inc リニアモータ、ステージ装置、露光装置およびデバイス製造方法

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