WO2002077462A2 - Turbomolekularpumpe - Google Patents
Turbomolekularpumpe Download PDFInfo
- Publication number
- WO2002077462A2 WO2002077462A2 PCT/EP2002/002884 EP0202884W WO02077462A2 WO 2002077462 A2 WO2002077462 A2 WO 2002077462A2 EP 0202884 W EP0202884 W EP 0202884W WO 02077462 A2 WO02077462 A2 WO 02077462A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- temperature
- stator
- pump
- power
- motor
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2270/00—Control
- F05D2270/30—Control parameters, e.g. input parameters
- F05D2270/335—Output power or torque
Definitions
- the invention relates to a turbomolecular pump with a pump stator, a rapidly rotating pump rotor and a motor for driving the pump rotor.
- a gas or gas particles are compressed to produce a high vacuum by rotating blades of the pump rotor and the fixed blades of the pump stator to a multiple of the inlet pressure.
- the gas heating caused by the gas compression and gas friction is mainly dissipated again via the pump rotor and the pump stator.
- the cooling of the pump stator can be effected by a cooling fluid leading cooling channels, the active pump rotor cooling is problematic, since the rotating pumps 'rotor' no cooling fluid can be supplied. The pump rotor can therefore overheat under unfavorable operating conditions.
- the turbomolecular pump therefore has a control device which limits the engine power to a predetermined constant maximum engine power, so that the pump power and the gas and rotor heating correlating therewith are also limited to a constant maximum value.
- the permissible maximum motor power is calculated and / or experimentally determined by assuming the most unfavorable process conditions for pump operation, for example a thermally unfavorable gas, poor pump stator cooling, high ambient temperatures etc.
- the permissible maximum motor power is selected so that the pump rotor cannot exceed the maximum permissible rotor temperature even under the most unfavorable process conditions.
- the engine power is limited to the predetermined maximum power even if the process conditions are more favorable than assumed for the calculation of the maximum engine power.
- the motor power is therefore limited to the specified maximum motor power even if the actual rotor temperature has not yet reached the maximum permissible rotor temperature.
- the output power of the turbomolecular pump is generally limited to a value far below an actually thermally permissible value.
- the object of the invention is therefore to create a device and a method with which the output power of a turbomolecular pump is increased.
- a temperature sensor for measuring the stator temperature is arranged on the pump stator. Furthermore, the control device has a maximum power determination device which determines the maximum permissible motor power as a function of the measured stator temperature. The permissible maximum motor power is therefore not a constant, unchangeable value, but is determined depending on the respective stator temperature.
- the rotor temperature correlates strongly with the temperature of the stator-side parts of the pump, for example with the temperature of the base flange, the pump housing, the motor housing, the bearing housing, the pump stator, the motor and with the actual motor or pump power.
- the stator temperature therefore provides information about the rotor temperature, so that the rotor temperature can also be reliably limited to a maximum value by measuring the stator temperature and limiting the permissible maximum motor power for the respective stator temperature.
- the permissible maximum motor power is adapted to the respective thermal situation, and is therefore usually above a constant permissible maximum motor power determined for the most unfavorable thermal circumstances.
- the actual motor power and thus the output power of the pump can be significantly increased in this way under normal process conditions.
- the pump rotor is more reliably protected against overheating, ie exceeding the maximum permissible rotor temperature, since the rotor temperature is monitored indirectly.
- the maximum power determination device has a rotor temperature determination device which determines the rotor temperature from the stator temperature measured by the temperature sensor. The maximum power determination device then determines the permissible maximum engine power as a function of the determined rotor temperature.
- the rotor temperature determining device determines the motor rotor temperature from one or more different stator temperatures which are inserted into a polynomial whose constant coefficients were previously determined experimentally. In this way, the permissible maximum engine power can be determined quickly and with little storage space.
- the limitation of the maximum motor power may only intervene when a threshold temperature of the rotor is reached and limit the permissible maximum motor power, while the maximum motor power is not limited as long as the calculated rotor temperature is below the threshold temperature.
- the permissible maximum motor power can also be determined directly from a polynomial which is resolved according to the permissible maximum motor power and which already contains the rotor threshold temperature and / or a maximum rotor temperature in the form of coefficients.
- the maximum engine power calculated on the basis of the coefficients can, if necessary, be additionally limited by other parameters.
- multiple temperature sensors are provided at various points of the stator, wherein the maximum power follow-ER- ⁇ averaging means the permissible maximum motor output power in dependence on the determined ge messengeren- temperatures of all temperature sensors.
- the temperature sensors can be attached to the housing of the turbomolecular pump, to a pump stator element part of the motor on the stator side, for example on the motor housing or on the motor winding, or in a cooling duct of the pump stator.
- the temperature transmitters can also be arranged at other points on the stator side of the turbomolecular pump, the temperature and temperature behavior of which allow reliable conclusions to be drawn about the temperature of the rotor.
- the maximum power determination device has a Kehnfeld memory, in which the permissible maximum motor power for each stator temperature is stored in a map.
- a complex non-linear characteristic curve can also be stored in the characteristic diagram, so that a complex determination of the permissible maximum motor power through arithmetic operations can be omitted.
- a secondary method for limiting the maximum permissible motor output of a motor in a turbomolecular pump that drives a pump rotor mounted in a pump stator the following method steps are provided: measuring the pump stator temperature, determining a permissible maximum motor output from the measured pump stator temperature and limiting the motor output to that permissible maximum engine power determined.
- FIG. 1 shows a turbomolecular pump in longitudinal section with a plurality of temperature sensors
- FIG. 2 shows a block diagram of the regulation of the turbomolecular pump of FIG. 1.
- FIG. 1 shows a turbomolecular pump 10 which has a pump housing 12, one longitudinal end of which forms the suction side 14 and the other end of which forms the pressure side and has a gas outlet 16.
- a pump stator 18, which comprises a pump rotor 20, is arranged in the pump housing 12.
- the pump rotor 20 has a rotor shaft 22 which is rotatably mounted in the pump housing 12 with two radial magnetic bearings 24, 26 and an axial bearing (not shown).
- the rotor shaft 22 and the pump rotor 20 connected to it are driven by an electric motor 28.
- the electric motor 28 and the two radial magnetic bearings 24, 26 are accommodated in a common bearing motor housing 30.
- the turbomolecular pump 10 • serves to generate a high vacuum and rotates at speeds of up to 100,000 rpm.
- the turbomolecular pump 10 has a plurality of temperature sensors 32-38 on the stator side, ie on the side of the fixed parts.
- a first temperature sensor 32 is in the area of the base flange of the pump housing. 12 arranged.
- a second temperature sensor 34 is arranged on or in the pump stator 18.
- a third temperature sensor 36 is arranged on the motor 28 and measures the temperature in the area of the motor coils or the motor magnetic guide plates.
- a fourth temperature sensor 38 is arranged on the bearing motor housing 30. Another temperature sensor can be arranged in the course of the cooling channel 13.
- the heat transferred by the gas heating of the compressed gas to the pump rotor 20 and induced by the active magnetic bearings 26 and the electric motor 28 in the pump rotor 20 is essentially dissipated by heat radiation from the pump rotor 20 to the parts on the stator side.
- the parts on the stator side that is to say the pump housing 12, the pump stator 18, the bearing motor housing 30 as well as the magnetic bearings 24, 26 and the electric motor 28 are thus heated in addition to their own heating by the heat radiated onto them by the pump rotor 20.
- the measurement of the temperature and the temperature profile of the parts on the stator side therefore allows conclusions to be drawn about the rotor temperature.
- the relationship between the actual temperature of the pump rotor 20 and the temperatures of the parts on the stator side measured by the temperature sensors 32-38 can be determined with a simple experimental setup.
- a rotor temperature sensor 40 is suitably arranged as close as possible to the pump rotor 20 on the suction side. In this way, the rotor temperature can be measured directly in the experiment, so that the relationship between the rotor temperature and the temperatures measured by the stator-side temperature sensors 32-38 can be recorded under different process conditions.
- P is the instantaneous motor power
- Ti to T n are the respectively measured temperatures of the stator-side temperature sensors 32-38 and the rotor temperature sensor 40.
- the coefficients ⁇ 0 to ⁇ n and ⁇ i to ⁇ n are constants which are obtained by evaluating the experimentally measured pump rotor and pump location temperatures were determined. If you enter the maximum permissible rotor temperature in this polynomial instead of the measured • rotor temperature, the permissible maximum motor power P max is determined with this polynomial.
- FIG. 2 the control of the pump rotor otor 28 is shown schematically.
- a control device 42 controls a motor driver 44, which in turn controls the coils of the electric motor 28.
- An engine power setpoint is output to the control device 42 via an actuating element 46.
- the control device 42 has a maximum output power detecting device 50 and a power limiter • 52nd In the maximum power determination device 50, the permissible maximum engine power P max is determined from the temperature values supplied by the four temperature transmitters 32-38 according to the above formula.
- the engine power setpoint value supplied by the control element 46 is limited to the determined • permissible maximum engine power if the power value specified by the control element 46 is greater than the determined allowable maximum engine power.
- the rotor temperature is limited to a maximum temperature, so that the rotor is protected from being destroyed by overheating.
- the actual engine power, the ambient temperature and other measured variables can be used as further parameters for determining the permissible maximum engine power.
- the present rotor temperature can be inferred from a plurality of stator-side temperature sensors.
- a permissible maximum motor power is determined from the determined rotor temperature, to which the motor power is limited.
- the permissible maximum motor power is therefore variable, so that the performance of the motor and the pump can be fully utilized and is only limited if there is a risk of overheating.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Control Of Positive-Displacement Air Blowers (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA2441957A CA2441957C (en) | 2001-03-27 | 2002-03-15 | Turbomolecular pump |
EP02727419A EP1377752B1 (de) | 2001-03-27 | 2002-03-15 | Turbomolekularpumpe |
US10/473,237 US7090469B2 (en) | 2001-03-27 | 2002-03-15 | Turbomolecular pump |
AU2002257665A AU2002257665A1 (en) | 2001-03-27 | 2002-03-15 | Turbomolecular pump |
JP2002575481A JP4511117B2 (ja) | 2001-03-27 | 2002-03-15 | ターボ分子ポンプ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10114969A DE10114969A1 (de) | 2001-03-27 | 2001-03-27 | Turbomolekularpumpe |
DE10114969.7 | 2001-03-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002077462A2 true WO2002077462A2 (de) | 2002-10-03 |
WO2002077462A3 WO2002077462A3 (de) | 2002-12-12 |
Family
ID=7679189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2002/002884 WO2002077462A2 (de) | 2001-03-27 | 2002-03-15 | Turbomolekularpumpe |
Country Status (7)
Country | Link |
---|---|
US (1) | US7090469B2 (de) |
EP (1) | EP1377752B1 (de) |
JP (1) | JP4511117B2 (de) |
AU (1) | AU2002257665A1 (de) |
CA (1) | CA2441957C (de) |
DE (1) | DE10114969A1 (de) |
WO (1) | WO2002077462A2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007025854A1 (de) * | 2005-09-01 | 2007-03-08 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
EP1668256B1 (de) * | 2003-09-30 | 2016-08-17 | Edwards Limited | Vakuumpumpe |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI117350B (fi) * | 2002-10-16 | 2006-09-15 | Waertsilae Finland Oy | Laitteisto ja menetelmä polttoaineen syöttöjärjestelmän yhteydessä |
GB0229353D0 (en) | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping system and method of operating a vacuum pumping arrangement |
FR2861142B1 (fr) * | 2003-10-16 | 2006-02-03 | Mecanique Magnetique Sa | Pompe a vide turbo moleculaire |
GB0502149D0 (en) | 2005-02-02 | 2005-03-09 | Boc Group Inc | Method of operating a pumping system |
GB0508872D0 (en) * | 2005-04-29 | 2005-06-08 | Boc Group Plc | Method of operating a pumping system |
DE102005041501A1 (de) * | 2005-09-01 | 2007-03-08 | Leybold Vacuum Gmbh | Vakuum-Turbomolekularpumpe |
JP4821308B2 (ja) * | 2005-12-21 | 2011-11-24 | 株式会社島津製作所 | 真空ポンプ |
DE102007001065B4 (de) * | 2007-01-03 | 2021-07-22 | Leybold Gmbh | Gaspumpe |
JP4935509B2 (ja) * | 2007-06-05 | 2012-05-23 | 株式会社島津製作所 | ターボ分子ポンプ |
US10001126B2 (en) | 2009-08-21 | 2018-06-19 | Edwards Japan Limited | Vacuum pump |
FR2974175B1 (fr) * | 2011-04-14 | 2013-10-11 | Mecanique Magnetique Sa | Dispositif de detection de la position axiale d'un arbre tournant et application a une pompe turbo-moleculaire |
US9404811B2 (en) * | 2011-10-04 | 2016-08-02 | Hamilton Sundstrand Corporation | Motor housing thermal sensing |
EP2846043B1 (de) | 2013-09-09 | 2020-01-22 | Leybold GmbH | Berechnung der rotortemperatur einer vakuumpumpe mit hilfe des motorstroms oder der motorleistung |
DE102013223020A1 (de) | 2013-11-12 | 2015-05-13 | Oerlikon Leybold Vacuum Gmbh | Verfahren zum Betreiben einer Vakuumpumpe |
JP6705228B2 (ja) * | 2016-03-14 | 2020-06-03 | 株式会社島津製作所 | 温度制御装置およびターボ分子ポンプ |
US10590955B2 (en) * | 2017-02-23 | 2020-03-17 | Shimadzu Corporation | Turbo-molecular pump |
JP6445227B1 (ja) * | 2017-10-31 | 2018-12-26 | 株式会社アルバック | 真空ポンプおよびその制御方法 |
CN111213316B (zh) * | 2017-10-31 | 2021-07-13 | 株式会社爱发科 | 真空泵及其控制方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2757599A1 (de) * | 1977-12-23 | 1979-06-28 | Kernforschungsz Karlsruhe | Turbo-molekularpumpe |
EP0967394A1 (de) * | 1997-01-22 | 1999-12-29 | Seiko Seiki Kabushiki Kaisha | Turbomolekularpumpe |
US6123522A (en) * | 1997-07-22 | 2000-09-26 | Koyo Seiko Co., Ltd. | Turbo molecular pump |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1288738B1 (it) * | 1996-10-08 | 1998-09-24 | Varian Spa | Unita' elettronica di comando per pompa da vuoto. |
US6075337A (en) * | 1998-06-30 | 2000-06-13 | Fuji Electric Co., Ltd. | Speed control apparatus for induction motor |
US6329732B1 (en) * | 1999-07-20 | 2001-12-11 | General Electric Company | Electric motors and methods for assembling temperature sensors therein |
JP3480439B2 (ja) * | 1999-09-27 | 2003-12-22 | 日産自動車株式会社 | 回転電機の制御装置 |
-
2001
- 2001-03-27 DE DE10114969A patent/DE10114969A1/de not_active Withdrawn
-
2002
- 2002-03-15 JP JP2002575481A patent/JP4511117B2/ja not_active Expired - Fee Related
- 2002-03-15 CA CA2441957A patent/CA2441957C/en not_active Expired - Fee Related
- 2002-03-15 US US10/473,237 patent/US7090469B2/en not_active Expired - Fee Related
- 2002-03-15 EP EP02727419A patent/EP1377752B1/de not_active Expired - Lifetime
- 2002-03-15 AU AU2002257665A patent/AU2002257665A1/en not_active Abandoned
- 2002-03-15 WO PCT/EP2002/002884 patent/WO2002077462A2/de active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2757599A1 (de) * | 1977-12-23 | 1979-06-28 | Kernforschungsz Karlsruhe | Turbo-molekularpumpe |
EP0967394A1 (de) * | 1997-01-22 | 1999-12-29 | Seiko Seiki Kabushiki Kaisha | Turbomolekularpumpe |
US6123522A (en) * | 1997-07-22 | 2000-09-26 | Koyo Seiko Co., Ltd. | Turbo molecular pump |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1668256B1 (de) * | 2003-09-30 | 2016-08-17 | Edwards Limited | Vakuumpumpe |
WO2007025854A1 (de) * | 2005-09-01 | 2007-03-08 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
Also Published As
Publication number | Publication date |
---|---|
DE10114969A1 (de) | 2002-10-10 |
JP4511117B2 (ja) | 2010-07-28 |
US7090469B2 (en) | 2006-08-15 |
EP1377752A2 (de) | 2004-01-07 |
WO2002077462A3 (de) | 2002-12-12 |
AU2002257665A1 (en) | 2002-10-08 |
CA2441957C (en) | 2010-08-03 |
EP1377752B1 (de) | 2011-05-11 |
US20040081560A1 (en) | 2004-04-29 |
JP2004522040A (ja) | 2004-07-22 |
CA2441957A1 (en) | 2002-10-03 |
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