WO2002004705A1 - Procede de traitement preliminaire d'un materiau devant etre soumis a un depot autocatalytique - Google Patents
Procede de traitement preliminaire d'un materiau devant etre soumis a un depot autocatalytique Download PDFInfo
- Publication number
- WO2002004705A1 WO2002004705A1 PCT/JP2000/004491 JP0004491W WO0204705A1 WO 2002004705 A1 WO2002004705 A1 WO 2002004705A1 JP 0004491 W JP0004491 W JP 0004491W WO 0204705 A1 WO0204705 A1 WO 0204705A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pretreatment method
- electroless plating
- laser
- inorganic filler
- aqueous solution
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2026—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by radiant energy
- C23C18/204—Radiation, e.g. UV, laser
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2053—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment only one step pretreatment
- C23C18/206—Use of metal other than noble metals and tin, e.g. activation, sensitisation with metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
- H05K3/185—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method by making a catalytic pattern by photo-imaging
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0104—Properties and characteristics in general
- H05K2201/0129—Thermoplastic polymer, e.g. auto-adhesive layer; Shaping of thermoplastic polymer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0141—Liquid crystal polymer [LCP]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0145—Polyester, e.g. polyethylene terephthalate [PET], polyethylene naphthalate [PEN]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0154—Polyimide
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0209—Inorganic, non-metallic particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/107—Using laser light
Definitions
- the present invention relates to a pretreatment method for electroless plating.
- a molded article made of a polymer material is roughened with a chemical agent on the surface, and after absorbing palladium, electroless plating is performed.
- a chemical agent on the surface
- electroless plating is performed.
- it is difficult to adsorb only palladium it is necessary to reduce tin after adsorbing the tin-palladium compound.
- this method it is possible to illuminate only a specific portion by merely irradiating an ultraviolet laser and immersing in an aqueous palladium colloid solution, and then performing electroless plating. That is, since only the irradiated area is positively charged by the irradiation of the ultraviolet laser, the palladium colloid can be easily adhered only to the irradiated area by immersing in the anionic palladium colloid aqueous solution. By including a reducing agent in the aqueous solution, it is possible to precipitate only palladium, which serves as a catalyst for electroless plating.
- the surface roughness of the irradiated area becomes small, and the formed plating is easily peeled off.
- the charging phenomenon caused by irradiation at low fluence is unique to ultraviolet lasers, which limits the equipment that can be selected.
- an object of the present invention is to provide a pretreatment method for electroless plating that can efficiently and strongly plate a specific portion regardless of the type of laser used. Disclosure of the invention
- the present inventors have found that the main cause of electrification of the surface of a molded article due to laser irradiation is a scattered matter (hereinafter, referred to as debris) generated by abrasion.
- the inventor has found that the debris can be made difficult to be scattered by including an inorganic boiler in the molded product.
- the present invention provides a pretreatment method for electroless plating, which comprises adding an inorganic filler to a polymer material, irradiating the obtained polymer molded article with a laser, In a noble metal aqueous solution.
- the added inorganic filler generates a sufficient amount of charged debris at the time of laser irradiation, regardless of the difference in the size of the fluence, and prevents scattering to areas other than the irradiation area. Therefore, when immersed in an anionic noble metal aqueous solution, the noble metal can be attached only to the laser irradiation area. As a result, when electroless plating is performed, the noble metal attached to the laser irradiation area acts as a catalyst, and a good plating film can be formed at a desired location (irradiation area).
- Figure 1 is a rough diagram showing the state of the irradiation area according to the difference between the fluence and the number of irradiations. is there. BEST MODE FOR CARRYING OUT THE INVENTION
- an inorganic filler is added to a polymer material, and the obtained polymer molded article is irradiated with a laser.
- the polymer material includes a liquid crystal polymer (LCP: Liquid Crystal Polymer), polyethers ⁇ / lefon, polybutylene terephthalate, polycarbonate, polyphenylene ether, polyphenylene oxide, polyacetanol, polyethylene terephthalate, polyethylene terephthalate, Polyamide, acrylonitrile 'butadiene' styrene (ABS), polyphenylene sulfide, polyetherenolide, polyester ether ketone, polysulfone, polyimide, epoxy resin, or composite resins of these are used. It is possible.
- LCP Liquid Crystal Polymer
- the inorganic filler examples include glass fillers, ceramic particles, and the like.
- the shape is ⁇ 1 to 20 ⁇ , a fiber shape having a length of 10 or more, or ⁇ 0.5 to 0.2.
- the particle size is 0 ⁇ m and the amount added to the polymer material is 10 to 50% by weight because scattering of debris can be further suppressed.
- the charged state of the laser irradiation area can be set to a state suitable for the adhesion of the noble metal.
- the laser irradiation conditions are set so that the fluence (energy per unit area of the unit pulse: J / CM 2 Z 1 pulse) and the number of times of irradiation are set to a charged state suitable for precipitating a noble metal. Is good.
- the laser fluence and the number of times of irradiation may be set to be any of the values in the region A of the graph shown in FIG.
- the debris generated by the application has a good charge state, and the noble metal described below is appropriately deposited.
- Plating can be applied to the entire surface of the laser irradiation area.
- the molded article is immersed in an aqueous solution of an anionic noble metal.
- the usable noble metal aqueous solution or by dissolving the P d C 1 2 powder in deionized water, or to dissolve the N a 2 P d C 1 4 powder Ion-exchanged water, P d C 1 2 powder Aqueous palladium solution prepared by dissolving chlorobenzene in ion-exchanged water, or a palladium colloid aqueous solution obtained by mixing palladium chloride, sodium chloride, polyethylene glycol 'mono-P-nor-fluoroether, sodium boride fluoride, etc. No.
- the noble metal can be deposited only in the laser irradiation area of the molded article, and when electroless plating is performed thereafter, the electroless plating film is formed only in this area. Can be formed.
- the unevenness of the laser irradiation area can be further increased, and the plating can be formed in a state in which the plating is more difficult to peel.
- Example 1 LCP was used as a polymer material, and a glass filler having a diameter of 10 zz m was added as an inorganic filler by 30% by weight. This material is injection-molded, and the surface of the obtained molded article is irradiated with a KrF excimer laser to obtain a fluence of 0.2 j / cm 2 / ⁇ pulse, an irradiation frequency of 200 pulses, and a repetition cycle. Laser irradiation was performed under the condition of a wave number of 50 Hz.
- the molded article was immersed in a palladium colloid solution containing a mixture of palladium chloride, sodium chloride, polyethylene glycol 'mono-P-noylphenyl ether, and sodium boride fluoride for 15 minutes. Thereafter, the molded product was lightly washed with ion-exchanged water and immersed in an electroless nickel solution for 15 minutes. This enabled nickel electroless plating to adhere to the laser irradiation area. In addition, in the LCP to which the inorganic filler was not added, it was not possible to obtain the plating by the treatment under the same conditions.
- Example 2 using the PES as a polymeric material, in which, as an inorganic filler, and 3 0 wt 0/0 added glass filler having a diameter phi 1 0.
- nickel electroless plating is adhered to the laser irradiation area by processing under the same conditions as in Example 1 above. I was able to. In the case of PES with no inorganic filler added, it was not possible to obtain plating with the treatment under the same conditions.
- Example 3 PC was used as a polymer material, and a glass filler having a diameter of 10 Aim was added as an inorganic filler in an amount of 30% by weight. Then, this material is injection-molded, and the surface of the obtained molded product is subjected to fluence by using a KrF excimer laser. ⁇ :! Laser irradiation was performed under the conditions of pulse, irradiation frequency of 1000 pulses, and repetition frequency of 50 Hz. Subsequently, the molded article was immersed in the same palladium colloid solution as in Example 1 for 30 minutes. Thereafter, the molded article was washed lightly with ion-exchanged water and immersed in an electroless-aqueous solution for 30 minutes. As a result, nickel electroless plating was able to adhere to the laser irradiation area.
- Example 4 LCP was used as a polymer material, and a glass filler having a diameter of 10 ⁇ was added to the inorganic filler by 30% by weight. Then, this material is injection-molded, and the surface of the obtained molded article is irradiated with a fluence of 0.5 J / cm 2 / l pulse, irradiation frequency of 200 pulses, and repetition by using a YAG third harmonic laser. Laser irradiation was performed at a return frequency of 1 OHz. Subsequently, the molded article was immersed in the same palladium colloid solution as in Example 1 for 15 minutes.
- the molded article was washed lightly with ion-exchanged water and immersed in an electroless Tuckel solution for 15 minutes. This enabled nickel electroless plating to adhere to the laser irradiation area. In the case of LCP to which no inorganic filler was added, no plating could be obtained by the treatment under the same conditions.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Toxicology (AREA)
- Chemically Coating (AREA)
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP01171099A JP3398713B2 (ja) | 1999-01-20 | 1999-01-20 | 無電解めっきの前処理方法 |
PCT/JP2000/004491 WO2002004705A1 (fr) | 1999-01-20 | 2000-07-06 | Procede de traitement preliminaire d'un materiau devant etre soumis a un depot autocatalytique |
EP00942476A EP1253217A4 (en) | 2000-07-06 | 2000-07-06 | PRE-TREATMENT PROCESSING OF ELECTRICALLY COATED MATERIAL |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP01171099A JP3398713B2 (ja) | 1999-01-20 | 1999-01-20 | 無電解めっきの前処理方法 |
PCT/JP2000/004491 WO2002004705A1 (fr) | 1999-01-20 | 2000-07-06 | Procede de traitement preliminaire d'un materiau devant etre soumis a un depot autocatalytique |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002004705A1 true WO2002004705A1 (fr) | 2002-01-17 |
Family
ID=11736233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2000/004491 WO2002004705A1 (fr) | 1999-01-20 | 2000-07-06 | Procede de traitement preliminaire d'un materiau devant etre soumis a un depot autocatalytique |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1253217A4 (ja) |
WO (1) | WO2002004705A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5022501B2 (ja) * | 2010-11-04 | 2012-09-12 | 株式会社日本表面処理研究所 | 成形回路部品の製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4877644A (en) * | 1988-04-12 | 1989-10-31 | Amp Incorporated | Selective plating by laser ablation |
JPH04183873A (ja) * | 1990-11-19 | 1992-06-30 | Agency Of Ind Science & Technol | 紫外レーザーを用いた高分子成形品への無電解めっき方法 |
EP0647729A1 (en) * | 1993-10-11 | 1995-04-12 | Koninklijke Philips Electronics N.V. | Method of providing a metal pattern on an electrically insulating substrate in an electroless process |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4532015A (en) * | 1982-08-20 | 1985-07-30 | Phillips Petroleum Company | Poly(arylene sulfide) printed circuit boards |
US4615907A (en) * | 1984-11-23 | 1986-10-07 | Phillips Petroleum Company | Plating poly(arylene sulfide) surfaces |
EP0272420A3 (en) * | 1986-12-22 | 1989-11-02 | General Electric Company | Photopatterned aromatic polymeric substrates, method for making same and use |
EP0926262B1 (de) * | 1997-11-05 | 2003-03-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur selektiven Abscheidung einer Metallschicht |
-
2000
- 2000-07-06 WO PCT/JP2000/004491 patent/WO2002004705A1/ja not_active Application Discontinuation
- 2000-07-06 EP EP00942476A patent/EP1253217A4/en not_active Withdrawn
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4877644A (en) * | 1988-04-12 | 1989-10-31 | Amp Incorporated | Selective plating by laser ablation |
JPH04183873A (ja) * | 1990-11-19 | 1992-06-30 | Agency Of Ind Science & Technol | 紫外レーザーを用いた高分子成形品への無電解めっき方法 |
EP0647729A1 (en) * | 1993-10-11 | 1995-04-12 | Koninklijke Philips Electronics N.V. | Method of providing a metal pattern on an electrically insulating substrate in an electroless process |
Non-Patent Citations (1)
Title |
---|
See also references of EP1253217A4 * |
Also Published As
Publication number | Publication date |
---|---|
EP1253217A4 (en) | 2006-11-29 |
EP1253217A1 (en) | 2002-10-30 |
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