WO1997045521A1 - Procede de nettoyage d'articles - Google Patents
Procede de nettoyage d'articles Download PDFInfo
- Publication number
- WO1997045521A1 WO1997045521A1 PCT/JP1997/001807 JP9701807W WO9745521A1 WO 1997045521 A1 WO1997045521 A1 WO 1997045521A1 JP 9701807 W JP9701807 W JP 9701807W WO 9745521 A1 WO9745521 A1 WO 9745521A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- cleaning
- solvent
- rinsing
- rinse
- layer
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 119
- 238000000034 method Methods 0.000 title claims abstract description 51
- 239000002904 solvent Substances 0.000 claims abstract description 94
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 86
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 84
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 46
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 9
- 125000001153 fluoro group Chemical group F* 0.000 claims abstract description 7
- 238000000926 separation method Methods 0.000 claims description 35
- 238000013020 steam cleaning Methods 0.000 claims description 24
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 150000001923 cyclic compounds Chemical class 0.000 claims description 4
- 230000036571 hydration Effects 0.000 claims description 2
- 238000006703 hydration reaction Methods 0.000 claims description 2
- 125000004122 cyclic group Chemical group 0.000 abstract description 46
- 239000000356 contaminant Substances 0.000 abstract description 8
- 230000001464 adherent effect Effects 0.000 abstract 1
- 239000003921 oil Substances 0.000 description 22
- 238000005406 washing Methods 0.000 description 22
- -1 flux Substances 0.000 description 15
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 15
- 238000009835 boiling Methods 0.000 description 12
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- XMGQYMWWDOXHJM-UHFFFAOYSA-N limonene Chemical compound CC(=C)C1CCC(C)=CC1 XMGQYMWWDOXHJM-UHFFFAOYSA-N 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 7
- 238000007639 printing Methods 0.000 description 7
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 6
- 238000001816 cooling Methods 0.000 description 6
- 230000005484 gravity Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 229920003023 plastic Polymers 0.000 description 6
- 239000004033 plastic Substances 0.000 description 6
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 5
- 235000019441 ethanol Nutrition 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 229920006395 saturated elastomer Polymers 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 150000001298 alcohols Chemical class 0.000 description 4
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 4
- 239000010730 cutting oil Substances 0.000 description 4
- NNBZCPXTIHJBJL-UHFFFAOYSA-N decalin Chemical compound C1CCCC2CCCCC21 NNBZCPXTIHJBJL-UHFFFAOYSA-N 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- 238000007598 dipping method Methods 0.000 description 4
- 238000004090 dissolution Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 239000003344 environmental pollutant Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 231100000719 pollutant Toxicity 0.000 description 4
- BGHCVCJVXZWKCC-UHFFFAOYSA-N tetradecane Chemical compound CCCCCCCCCCCCCC BGHCVCJVXZWKCC-UHFFFAOYSA-N 0.000 description 4
- IIYFAKIEWZDVMP-UHFFFAOYSA-N tridecane Chemical compound CCCCCCCCCCCCC IIYFAKIEWZDVMP-UHFFFAOYSA-N 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 3
- QVEJLBREDQLBKB-UHFFFAOYSA-N 1,1,2,2,3,3,4,5-octafluorocyclopentane Chemical compound FC1C(F)C(F)(F)C(F)(F)C1(F)F QVEJLBREDQLBKB-UHFFFAOYSA-N 0.000 description 3
- LMSLTAIWOIYSGZ-UHFFFAOYSA-N 1,1,2,2,3,4-hexafluorocyclobutane Chemical compound FC1C(F)C(F)(F)C1(F)F LMSLTAIWOIYSGZ-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- SGVYKUFIHHTIFL-UHFFFAOYSA-N 2-methylnonane Chemical compound CCCCCCCC(C)C SGVYKUFIHHTIFL-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 3
- 239000010721 machine oil Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 235000014593 oils and fats Nutrition 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 239000001993 wax Substances 0.000 description 3
- RIQRGMUSBYGDBL-UHFFFAOYSA-N 1,1,1,2,2,3,4,5,5,5-decafluoropentane Chemical compound FC(F)(F)C(F)C(F)C(F)(F)C(F)(F)F RIQRGMUSBYGDBL-UHFFFAOYSA-N 0.000 description 2
- SOJZMJXWEOBDIC-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5-nonafluorocyclopentane Chemical compound FC1C(F)(F)C(F)(F)C(F)(F)C1(F)F SOJZMJXWEOBDIC-UHFFFAOYSA-N 0.000 description 2
- JRZJOMJEPLMPRA-UHFFFAOYSA-N 1-nonene Chemical compound CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 2
- HFDVRLIODXPAHB-UHFFFAOYSA-N 1-tetradecene Chemical compound CCCCCCCCCCCCC=C HFDVRLIODXPAHB-UHFFFAOYSA-N 0.000 description 2
- RJWUMFHQJJBBOD-UHFFFAOYSA-N 2-methylheptadecane Chemical compound CCCCCCCCCCCCCCCC(C)C RJWUMFHQJJBBOD-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- NHTMVDHEPJAVLT-UHFFFAOYSA-N Isooctane Chemical compound CC(C)CC(C)(C)C NHTMVDHEPJAVLT-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 2
- FHAWCGORBRLUCW-UHFFFAOYSA-N carbonic acid;9h-fluorene Chemical compound OC(O)=O.C1=CC=C2CC3=CC=CC=C3C2=C1 FHAWCGORBRLUCW-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000006184 cosolvent Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- JVSWJIKNEAIKJW-UHFFFAOYSA-N dimethyl-hexane Natural products CCCCCC(C)C JVSWJIKNEAIKJW-UHFFFAOYSA-N 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 229920006351 engineering plastic Polymers 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- DCAYPVUWAIABOU-UHFFFAOYSA-N hexadecane Chemical compound CCCCCCCCCCCCCCCC DCAYPVUWAIABOU-UHFFFAOYSA-N 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 235000001510 limonene Nutrition 0.000 description 2
- 229940087305 limonene Drugs 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- WFWNFBYXZQJMFM-UHFFFAOYSA-N methylcyclodecane Chemical compound CC1CCCCCCCCC1 WFWNFBYXZQJMFM-UHFFFAOYSA-N 0.000 description 2
- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 description 2
- GDOPTJXRTPNYNR-UHFFFAOYSA-N methylcyclopentane Chemical compound CC1CCCC1 GDOPTJXRTPNYNR-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000006082 mold release agent Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- BKIMMITUMNQMOS-UHFFFAOYSA-N nonane Chemical compound CCCCCCCCC BKIMMITUMNQMOS-UHFFFAOYSA-N 0.000 description 2
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 2
- YCOZIPAWZNQLMR-UHFFFAOYSA-N pentadecane Chemical compound CCCCCCCCCCCCCCC YCOZIPAWZNQLMR-UHFFFAOYSA-N 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 238000010791 quenching Methods 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 239000010731 rolling oil Substances 0.000 description 2
- 229930195734 saturated hydrocarbon Natural products 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- HLZKNKRTKFSKGZ-UHFFFAOYSA-N tetradecan-1-ol Chemical compound CCCCCCCCCCCCCCO HLZKNKRTKFSKGZ-UHFFFAOYSA-N 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- PXXNTAGJWPJAGM-UHFFFAOYSA-N vertaline Natural products C1C2C=3C=C(OC)C(OC)=CC=3OC(C=C3)=CC=C3CCC(=O)OC1CC1N2CCCC1 PXXNTAGJWPJAGM-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- YHHHHJCAVQSFMJ-FNORWQNLSA-N (3e)-deca-1,3-diene Chemical compound CCCCCC\C=C\C=C YHHHHJCAVQSFMJ-FNORWQNLSA-N 0.000 description 1
- IRVGWDJFZXOKDK-FNORWQNLSA-N (3e)-trideca-1,3-diene Chemical compound CCCCCCCCC\C=C\C=C IRVGWDJFZXOKDK-FNORWQNLSA-N 0.000 description 1
- CRSBERNSMYQZNG-UHFFFAOYSA-N 1 -dodecene Natural products CCCCCCCCCCC=C CRSBERNSMYQZNG-UHFFFAOYSA-N 0.000 description 1
- LGWNSTJNCWGDPH-UHFFFAOYSA-N 1,1,2,2,3,3,4-heptafluorocyclobutane Chemical compound FC1C(F)(F)C(F)(F)C1(F)F LGWNSTJNCWGDPH-UHFFFAOYSA-N 0.000 description 1
- MITPAYPSRYWXNR-UHFFFAOYSA-N 1,1,2,2,3,3-hexafluorocyclopentane Chemical compound FC1(F)CCC(F)(F)C1(F)F MITPAYPSRYWXNR-UHFFFAOYSA-N 0.000 description 1
- WAECBMNQMWVHQC-UHFFFAOYSA-N 1,1,2,2,3,4,4,5-octafluorocyclopentane Chemical compound FC1C(F)(F)C(F)C(F)(F)C1(F)F WAECBMNQMWVHQC-UHFFFAOYSA-N 0.000 description 1
- AKQMZZOTFNLAQJ-UHFFFAOYSA-N 1,1,2,2-tetrafluorocyclobutane Chemical compound FC1(F)CCC1(F)F AKQMZZOTFNLAQJ-UHFFFAOYSA-N 0.000 description 1
- HSLLADIXLPLESS-UHFFFAOYSA-N 1,1,2,3,3,4,5-heptafluorocyclopentane Chemical compound FC1C(F)C(F)(F)C(F)C1(F)F HSLLADIXLPLESS-UHFFFAOYSA-N 0.000 description 1
- ZEAMCWOTEYDCCH-UHFFFAOYSA-N 1,1,2,3,4-pentafluorocyclobutane Chemical compound FC1C(F)C(F)(F)C1F ZEAMCWOTEYDCCH-UHFFFAOYSA-N 0.000 description 1
- BITLXSQYFZTQGC-UHFFFAOYSA-N 1-fluoroheptane Chemical compound CCCCCCCF BITLXSQYFZTQGC-UHFFFAOYSA-N 0.000 description 1
- KWKAKUADMBZCLK-UHFFFAOYSA-N 1-octene Chemical compound CCCCCCC=C KWKAKUADMBZCLK-UHFFFAOYSA-N 0.000 description 1
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- GTJOHISYCKPIMT-UHFFFAOYSA-N 2-methylundecane Chemical compound CCCCCCCCCC(C)C GTJOHISYCKPIMT-UHFFFAOYSA-N 0.000 description 1
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- HNIUKPONOHHYDE-UHFFFAOYSA-N bicyclo[2.2.1]heptane hept-1-ene Chemical compound CCCCCC=C.C1CC2CCC1C2 HNIUKPONOHHYDE-UHFFFAOYSA-N 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- LMGZGXSXHCMSAA-UHFFFAOYSA-N cyclodecane Chemical compound C1CCCCCCCCC1 LMGZGXSXHCMSAA-UHFFFAOYSA-N 0.000 description 1
- DDTBPAQBQHZRDW-UHFFFAOYSA-N cyclododecane Chemical compound C1CCCCCCCCCCC1 DDTBPAQBQHZRDW-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 229940069096 dodecene Drugs 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- 239000003925 fat Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- VKPSKYDESGTTFR-UHFFFAOYSA-N isododecane Natural products CC(C)(C)CC(C)CC(C)(C)C VKPSKYDESGTTFR-UHFFFAOYSA-N 0.000 description 1
- 229940053080 isosol Drugs 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 238000003760 magnetic stirring Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000005555 metalworking Methods 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- 239000010812 mixed waste Substances 0.000 description 1
- AFFLGGQVNFXPEV-UHFFFAOYSA-N n-decene Natural products CCCCCCCCC=C AFFLGGQVNFXPEV-UHFFFAOYSA-N 0.000 description 1
- 238000011328 necessary treatment Methods 0.000 description 1
- UZGLIIJVICEWHF-UHFFFAOYSA-N octogen Chemical compound [O-][N+](=O)N1CN([N+]([O-])=O)CN([N+]([O-])=O)CN([N+]([O-])=O)C1 UZGLIIJVICEWHF-UHFFFAOYSA-N 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- YWAKXRMUMFPDSH-UHFFFAOYSA-N pentene Chemical compound CCCC=C YWAKXRMUMFPDSH-UHFFFAOYSA-N 0.000 description 1
- LGUZHRODIJCVOC-UHFFFAOYSA-N perfluoroheptane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F LGUZHRODIJCVOC-UHFFFAOYSA-N 0.000 description 1
- ZJIJAJXFLBMLCK-UHFFFAOYSA-N perfluorohexane Chemical class FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZJIJAJXFLBMLCK-UHFFFAOYSA-N 0.000 description 1
- 239000003348 petrochemical agent Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000700 radioactive tracer Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000002594 sorbent Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 229940095068 tetradecene Drugs 0.000 description 1
- VQOXUMQBYILCKR-UHFFFAOYSA-N tridecaene Natural products CCCCCCCCCCCC=C VQOXUMQBYILCKR-UHFFFAOYSA-N 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 239000003021 water soluble solvent Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5018—Halogenated solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5027—Hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
- C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/40—Specific cleaning or washing processes
- C11D2111/44—Multi-step processes
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/40—Specific cleaning or washing processes
- C11D2111/48—Regeneration of cleaning solutions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/24—Hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/28—Organic compounds containing halogen
Definitions
- the present invention is used in the precision machine industry, optical machine industry, electronics industry, plastics industry, etc. to clean objects to be cleaned such as oils, fats and oils, oils and fats, grease, flux, metal, glass, plastic, etc. On how to do it. Background technology
- cleaning solvents such as hydrocarbons, alcohols, and silicones that have a cleaning action, low boiling point non-flammable and highly durable perfluorocarbon (PFC), and hydrid black are used.
- PFC low boiling point non-flammable and highly durable perfluorocarbon
- hydrid black a variety of co-solvent systems have been proposed that use both rinsing solvents, such as mouth fluorocarbon (HCFC) and high mouth fluorocarbon (HFC).
- HCFC mouth fluorocarbon
- HFC high mouth fluorocarbon
- WO 95/05448 discloses that washing with an organic solvent selected from hydrocarbons, higher alcohols, ethers and organosilicons, followed by rinsing with a C4 to C5 cyclic hydrofluorcarbon. A method for cleaning is disclosed.
- Japanese Patent Application Laid-Open No. 4-272192 discloses that perfluorocarbon is recovered by specific gravity separation after washing with a hydrocarbon solvent, rinsing with perfluorocarbon, and reuse. A way to do that has been proposed. However, this method has the disadvantage that the perfluorocarbon rinse power is weak. Disclosure of the invention
- an object of the present invention is to (1) wash an object to be cleaned with a cleaning solvent containing hydrocarbon as a main component, and (2) clean an object to be cleaned to which the cleaning solvent has adhered to a cover for cleaning. Rinsing with a rinsing solvent mainly composed of sorbent, followed by (3) a separation step of separating the hydrocarbon-containing rinsing cleaning solvent discharged from the rinsing step into two layers.
- Another object of the present invention is to provide a method that can be implemented at low running cost.
- the present inventors have found that in the above-described cleaning process including (1) the cleaning step, (2) the rinsing cleaning step, and (3) the separation step, the number of fluorine atoms as a rinse cleaning solvent is reduced.
- the use of a fluorine-containing fluorocarbon having a larger number of hydrogen atoms and a cyclic structure enables (1) an extremely high rinsing effect for hydrocarbons.
- (2) The amount of the fluoridated carbon component at the hydrated mouth mixed into the hydrocarbon layer removed by the two-layer separation can be significantly reduced, and (3) The hydrated fluorocarbon layer recovered by the two-layer separation is a hydrocarbon.
- the present inventors have found that the amount of components mixed is small and that they can be sufficiently reused as a rinsing solvent and a vapor cleaning solvent, and have completed the present invention.
- a cleaning element for bringing a cleaning object into contact with a cleaning solvent containing hydrocarbon as a main component, and (2) a cleaning substance adhered to the cleaning solvent taken out of the cleaning step and adhered thereto.
- hydrofluorocarbon is a cyclic compound having more fluorine atoms than hydrogen atoms.
- FIG. 1 is a sectional view schematically showing an example of a cleaning apparatus used in the cleaning method of the present invention.
- the cleaning method of the present invention is useful for cleaning articles to be contaminated (objects to be cleaned).
- the object to be cleaned is not particularly limited.
- processed products such as metals, ceramics, glass, plastics, and elastomers in the precision machine industry, metal processing industry, optical machine industry, electronic industry, plastic industry, and the like.
- automotive parts such as bumpers, gears, transmission parts, radiators, etc.
- electronic and electrical parts such as printed circuit boards, IC parts, lead frames, motor parts, condensers, bearings, gears, and engineering plastics
- Precision machine parts such as gears, clock parts, camera parts, optical lenses, printing machines, printing machine blades, printing equipment Products, large machinery parts such as construction machinery, glass substrates, large heavy machinery parts, and household products such as tableware.
- contaminants include cutting oils, quenching oils, rolling oils, lubricating oils, machine oils, press working oils, punching oils, drawing oils, assembly oils, oils such as drawing oils, greases, and waxes.
- an object to be cleaned is cleaned with a cleaning solvent containing hydrocarbon as a main component.
- hydrocarbon examples include aliphatic hydrocarbons and aromatic hydrocarbons such as linear saturated, linear unsaturated, cyclic saturated, and cyclic unsaturated, and among them, aliphatic hydrocarbons And particularly preferred are aliphatic hydrocarbons such as chain saturated and cyclic unsaturated.
- the number of carbon atoms of the hydrocarbon may be appropriately selected according to the washing purpose, but is usually 5 to 30, preferably 8 to 20, and more preferably 10 to 15 carbon atoms.
- Such hydrocarbons include, for example, pentane, hexane, heptane, octane, isooctane, nonane, decane, isodecane, pendecane, dodecane, isododecane, tridecane, tetradecane, pentadecane, hexadecane, heptanedecane, octanedecane , Saturated aliphatic hydrocarbons such as isooctadecane; cyclic saturated hydrocarbons such as cyclopentane, methylcyclopentane, cyclohexane, methylcyclohexane, cyclodecane, methylcyclodecane, cyclododecane, decalin, norbornane Heptene, hebutadiene, octene, octagen, nonene, nonagen, decene, decad
- hydrocarbons can be used alone or in combination of two or more.
- Commercially available hydrocarbon-based detergents include, for example, Normal Paraffin Series, Isosol Series, Aisolan Series (Nippon Petrochemical Co., Ltd.), No. 0-5 Solvent, and Teclean Series (Nippon Petrochemicals). Petroleum Corporation), NS Clean Series (manufactured by Nikko Petrochemical Co., Ltd.) and the like can be used.
- a solvent containing these hydrocarbons as a main component is used, and only hydrocarbons may be used, or a cutting oil, a lubricating oil, a machine oil, a breathing oil, etc.
- a hydrocarbon-based cleaning agent to which various additives have been added may be used as a cleaning method as long as the object to be cleaned is brought into contact with the above-mentioned cleaning solvent, and a normal cleaning method can be employed.
- methods such as hand wiping, dipping, spraying, and showering can be used, and the dipping method is particularly preferably used.
- physical means such as ultrasonic shaking, rocking, stirring, and brushing may be used in combination.
- the temperature of the washing solvent may be appropriately selected according to the properties of the object to be washed, but is usually in the range from room temperature to the boiling point, preferably in the range from 40 to the boiling point, more preferably in the range from 50 to the boiling point. Range.
- the present invention is characterized in that after the washing step, the object to be washed to which the washing solvent has been adhered is rinsed with a rinse solvent mainly composed of cyclic hydrofluorocarbon.
- cyclic hydrofluorocarbon as the rinse solvent significantly improves the rinsing power of hydrocarbons compared to the use of chain hydrofluorocarbons or perfluorocarbons. . In particular, the difference in the effects is more remarkable when the object to be cleaned is continuously cleaned.
- cyclic fluorene carbonates generally have a higher boiling point than fluorene carbons having the same carbon number, which makes it possible to rinse at higher temperatures and further improve the solubility of hydrocarbons.
- perfluorocarbon When perfluorocarbon is used as a rinse solvent, hydrocarbons dropped from the object to be cleaned are separated on the rinse solvent surface because perfluorocarbon and hydrocarbons are almost incompatible. . If a hydrocarbon layer is formed on the upper surface of the rinsing solvent, the hydrocarbons will re-adhere when the immersed object is lifted, causing a large decrease in rinse efficiency. Since the solubility of hydrocarbons in chain-like hydrofluorocarbons is not so high, the upper layer of hydrocarbons is formed at an early stage of repeated washing, which is a drawback similar to that of perfluorocarbons.
- the fluorocarbons at the annular hydrid have high hydrocarbon solubility, so that even if the object to be cleaned is continuously rinsed, it can maintain a uniform state for a long period of time, and furthermore, a part of the rinse solvent is recovered.
- continuous rinsing in a uniform state can be achieved by continuously exchanging with a fresh cyclic hydrofluorocarbon.
- the cyclic hydride fluorocarbon used in the present invention is a cyclic compound comprising a carbon atom, a hydrogen atom and a fluorine atom, wherein the number of fluorine atoms is larger than the number of hydrogen atoms.
- the amount of fluorine atoms is excessively small, the difference in specific gravity from hydrocarbons will be small, and separation of two layers will be difficult. If there are no hydrogen atoms, compatibility with hydrocarbons will be poor and the rinsing effect will be poor.
- the number of hydrogen atoms in the cyclic hydrofluorocarbon is 1 to 5, preferably 1 to 3, and more preferably 2, the effect of rinsing hydrocarbons and mixing of hydrocarbons during two-layer separation Are highly improved and preferred.
- the number of carbon atoms of the cyclic hydrated fluorocarbon is 4 to 10, preferably 4 to 6, and more preferably 5, the solubility of hydrocarbons at the time of washing and two-layer separation varies. Is preferred.
- cyclic hydridated fluorocarbon examples include, for example, 1,1,2,2_tetrafluorocyclobutane, 1,2,3,4,4-pentafluorofluorocyclobutane, 1,1,2,2, 3,4-hexafluorocyclobutane, heptafluorocyclobutane, 1,1,2,2,3-pentafluorofluorocyclopentane, 1,1,2,2,3,3-hexafluoro Rocyclopentane, 1,1,2,2,3,4,5 -Heptanefluorocyclopentane, 1,1,2,3,3,4,5-Heptanefluorocyclopentane, 1,1, 2,2,3,3,4,5-fluorocyclopentane, 1,1,2,2,3,4,4,5-fluorocyclopentane, 1,1 , 2,2,3,3,4,4-Fluorocyclopentane, Nonafluorocyclopentane, 1,1,2,2,3,3,4,5-Fluorocyclohe
- cyclic fluorene carbonates can be used alone or in combination of two or more.
- a solvent containing the above-mentioned cyclic hydrofluorocarbon as a main component is used, and a cyclic hydrated fluorocarbon is used alone (one type of cyclic hydrofluorocarbon or two or more types). Or a combination of a cyclic hide-portion fluorocarbon and another organic solvent.
- organic solvents those used as ordinary rinse cleaning solvents can be used.
- chain-saturated hydrocarbons such as hexane, octane, and isooctane; cyclopentane, and cyclohexane
- Cyclic saturated hydrocarbons such as xane: aromatic hydrocarbons such as toluene and xylene; lower alcohols such as methyl alcohol, ethyl alcohol, propyl alcohol and isopropyl alcohol; ketones such as acetone and methyl ethyl ketone; Ethers such as tyl ether and getyl ether; esters such as vinyl acetate; 1,1,1,1,2,2,3,4,5,5,5—chain hydrofluoro such as decafluoropentane Carbons; perfluorohexanes, perfluoroheptane, and other perfluorocarbons; It can gel.
- each of these other organic solvents can be used alone or in combination of two or more.
- the amount of the organic solvent used may be appropriately selected within a range that does not impair the effects of the present invention. It is 40% by weight or less, preferably 20% by weight or less, preferably 10% by weight or less of the total amount of the solvent.
- an object to be cleaned to which the cleaning solvent after cleaning has adhered may be brought into contact with the rinse cleaning solvent, and a normal rinse cleaning method can be employed.
- a normal rinse cleaning method can be employed.
- methods such as hand wiping, dipping, spraying, and showering can be used, and a dipping method is preferably used.
- physical means such as ultrasonic wave, rocking, stirring, and brushing may be used together.
- These rinsing methods can be used alone or in combination of two or more.
- the temperature of the rinse solvent may be appropriately selected depending on the properties of the object to be cleaned, but is usually in the range from room temperature to the boiling point, preferably in the range from 40 to the boiling point, more preferably in the range from 50 to the boiling point. It is in the range up to the boiling point.
- the hydrocarbon used in the step (1) and the cyclic hydrate fluorocarbon used in the step (2) are separated into an upper layer of the hydrocarbon and a lower layer of the cyclic hydrate port fluorocarbon due to a difference in specific gravity.
- the hydrocarbons can be removed by adding a new cyclic hydrofluorocarbon in the same vessel and overflowing the upper hydrocarbon layer to remove it.However, a part of the rinsing solvent in step (2) is transferred to another vessel. Then, a method of separating into two layers, a hydrocarbon layer and a cyclic hydrofluorocarbon layer, and recovering the lower cyclic hydrofluorocarbon layer, and then returning it to the rinsing solvent in the step (2) is suitably performed. In the two-layer separation, a centrifugal separation method may be used.
- the cyclic hydrofluorocarbon used in the present invention has a high solubility for hydrocarbons at high temperatures, but, like the chain hydrofluorocarbons and perfluorocarbons, has low hydrocarbon solubility at low temperatures. Has the property of hardly being dissolved. Therefore, the operation of the two-layer separation is preferably performed at a lower temperature, usually at least 10 times, preferably 2 OX: or more, more preferably 30 "C or more lower than the temperature of the rinse solvent.
- the minimum temperature during the two-layer separation operation is preferably equal to or higher than the melting point of the hydrocarbon or the fluorcarbon of the cyclic hydrid ..
- the method for cooling the rinse solvent is not particularly limited.
- the fluorocarbon layer at the cyclic hydrid mouth recovered by the two-layer separation is used as it is or after necessary treatment such as distillation, filtration, activated carbon treatment, and drying.
- Steam cleaning can be performed according to a conventional method.
- the solvent for steam cleaning is not particularly limited, and a solvent for steam cleaning used in general steam cleaning can be used without any particular limitation.
- a solvent for steam cleaning used in general steam cleaning can be used without any particular limitation.
- the cyclic hydrofluorocarbon recovered in the step (3) is of high purity, it is used as a steam cleaning solvent, and is further circulated as a rinse cleaning solvent in the step (2) after the steam cleaning. Can be done.
- FIG. 1 showing an example of a cleaning apparatus used in the present invention.
- the object to be cleaned to which contaminants such as oil, wax, and flux adhere, is immersed in a cleaning solvent containing hydrocarbons as a main component in the first cleaning tank 1, where the contaminants adhere to the surface of the object to be cleaned. Is removed.
- the cleaning solvent placed in the first cleaning tank 1 can be heated by the heating device 9 or ultrasonically cleaned by the ultrasonic oscillation device 10 as needed to improve the cleaning power.
- FIG. 1 shows two washing tanks, there is no particular limitation, and one or more washing tanks can be used as needed.
- the object to be cleaned to which the cleaning has been completed and the cleaning solvent (hydrocarbon) has adhered, is then immersed in a rinsing cleaning solvent containing cyclic hydrofluorocarbon as a main component, which is placed in the rinsing tank 3.
- a rinsing cleaning solvent containing cyclic hydrofluorocarbon as a main component which is placed in the rinsing tank 3.
- ultrasonic cleaning can be used together with the ultrasonic oscillating device 10, or shower cleaning and oscillating cleaning can be used together.
- the hydrocarbon adhering to the surface of the object to be cleaned is separated from the surface of the object to be cleaned.
- the separated hydrocarbons are transferred to the separation tank 4 by the rinse liquid transfer pump 14, overflow, or other flow of the rinse solvent.
- the cyclic hydrated fluorocarbon which is a main component of the rinse solvent, exhibits excellent hydrocarbon solubility in a high temperature range, it is heated by the heating device 9. This is preferable in that the rinsing effect is significantly improved.
- the rinse solvent in the rinse tank 3 can be maintained in a uniform state. As a result, a hydrocarbon layer is not formed on the upper layer, and therefore, the conventional maximum disadvantage of such an apparatus that the upper layer hydrocarbons re-adhere when the object to be cleaned is removed can be solved.
- the uniform rinse solvent after use is transferred to the separation tank 4 as described above.
- the separation tank 4 the upper hydrocarbon layer 6 and the lower hydrofluorcarbon layer 7 are separated from each other by a difference in specific gravity.
- the lower hydrofluorocarbon is a cyclic compound
- the solubility of the hydrocarbon in the cyclic hydrofluorocarbon and the solubility of the cyclic hydrofluorocarbon in the hydrocarbon are greatly affected by the temperature change. In this case, the solubility of any of them significantly decreases. Therefore, by lowering the temperature of the separation tank 4, the purity of the recovered cyclic hydride fluorocarbon can be increased, and the mixing of the cyclic hydrofluorocarbon into the hydrocarbon layer can be significantly reduced. Therefore, the operation of the two-layer separation is performed at a temperature which is usually 10 or more, preferably 20 or more, more preferably 30 or more lower than the temperature of the rinse bath 3.
- the lower annular hydrofluorocarbon layer 7 separated into two layers is circulated to the rinse cleaning tank 3 by the circulation pump 11 and to the steam cleaning tank 5 by the circulation pump 12. Steam cleaning is used when a high degree of cleaning is required or when the consumption of fluorocarbon at the annular hydrid is reduced.
- the annular hydrofluorocarbon recovered from the circulation pump 12 is transferred to the steam cleaning tank 5 and heated by the heating device 9 to form the steam zone 8.
- the object to be cleaned lifted up from the rinse cleaning tank 3 is subjected to steam cleaning in the vapor zone 8 of the fluorocarbon at the annular hydration opening.
- the cyclic hydrofluorocarbon used for the steam cleaning is transferred to the rinsing cleaning tank 3 by coagulation or overflow and used.
- FIG. 1 shows an outline of an example of an apparatus used for carrying out the cleaning method of the present invention. Details of individual cleaning methods, rinse cleaning methods, two-layer separation methods, steam cleaning methods, etc. However, the present invention is not limited to this. In the present invention, other general methods Can be used. The number of washings and rinsings can be increased or decreased as needed.
- NS Clean 230 (hydrocarbon detergent of C13) is installed in a two-tank type washing machine (washing tank 1 and washing tank 2) equipped with a heating device 9 and an ultrasonic oscillator 10; Nippon Petrochemical Co., Ltd.) was used as the washing tank, and the rinse washing machine (rinse washing tank 3) equipped with heating device 9 and ultrasonic oscillator 10 was equipped with 1, 1, 2, 2, 3, 3, 4 , 5-octafluorocyclopentane (OFCPA), and transfer the cyclic hydrofluorocarbon recovered in the separation tank 4 to the steam cleaning device (steam cleaning tank 5) equipped with a cooling pipe 13. Then, the mixture was heated by a heating device 9 to generate a steam zone 8. The temperature of the separation tank 4 was controlled at 2 Ot :.
- the articles to be cleaned are the articles shown in Table 1 with 1,1,1 trichloroethane dissolved in 25% by weight of the contaminants shown in Table 1, and 0.1% by weight of sudan dye added as a tracer. And prepared by adhering contaminants. The amount of adhesion was determined from the weight difference before and after the immersion.
- the cleaning operation of the cleaning object was performed by manually performing the following operations on the cleaning object in the order of cleaning tank 1, cleaning tank 2, rinse cleaning tank 3, and steam cleaning tank 5.
- Residual amount of pollutants The washed object is treated with a fixed amount of purified 1,1,1-trichloroethane to extract residual contaminants and dye, and absorbance of the red color of sudan at 550 nm is measured. The remaining amount was determined from the calibration curve. The residual amount was divided by the measured adhesion amount, and the result was indicated as a residual ratio (%).
- the washed object was observed and evaluated according to the following three grades.
- the smell of the washed object was smelled and evaluated according to the following three grades.
- Examples of the present invention show good results in any of the evaluation of the residual amount of pollutants, the visual evaluation, and the odor evaluation.
- a chain-like fluorocarbon with a hydrated mouth was used as the rinse solvent (Comparative Example 1), the evaluation of the residual amount of contaminants and odor was poor, and the cleaning effect was not sufficient.
- perfluorocarbon is used as a rinse solvent
- Example 3 The cleaning method of Example 1 and Comparative Example 1 was repeated 20 times, and the cleaning power at that time was evaluated. The results are shown in Table 3. Table 3
- Example 6 maintains a sufficiently high rinsing effect even after repeated use.
- Comparative Example 3 the rinse cleaning power is extremely reduced. This is presumably because in Example 6, the rinse solvent was uniform, whereas in Comparative Example 3, the upper layer of the hydrocarbon layer was formed, so that it was re-adhered when the object to be cleaned was lifted.
- Reference Examples 1 to 7 (Recovery of cyclic hydrofluorocarbon in separation tank 4) A mixture of 10 g of the hydrocarbon shown in Table 4 and 100 m1 of the cyclic hydrofluorocarbon shown in Table 4 (Reference Examples 1 to 7) was charged into a flask containing a magnetic stirring bar of 20 Om 1, and the temperature was gradually increased while stirring and warmed to 75 to obtain a uniform solution. Then, when the homogeneous solution was transferred to the separation tank 4 (2O :) in FIG. 1, the solution began to become cloudy, and soon the two layers were completely separated. Analysis of the lower layer by gas chromatography showed that all the cyclic hydrofluorocarbon layers were of high purity, and that the used cyclic hydrofluorocarbon was almost completely purified and recovered.
- a so-called co-solvent system in which a contaminated article is washed with a hydrocarbon-based cleaning solvent, and then a fluorine-based solvent is used for rinsing, steam cleaning, and drying, is advantageously used.
- a two-layer specific gravity separator at a lower temperature is further provided, and the cyclic hydrofluorocarbon is recovered in accordance with the present invention, and the recovered cyclic hydrofluorocarbon is introduced again into the rinse tank.
- the objects to be cleaned to which the cleaning method of the present invention is applied include, for example, metals, ceramics, glass, plastics, and elastomers in the precision machine industry, metalworking industry, optical machine industry, electronic industry, plastic industry, and the like. And other processed products.
- automotive parts such as bumpers, gears, transmission parts, radiator parts, etc.
- electronic electric parts such as printed circuit boards, IC parts, lead frames, motor parts, capacitors, bearings, gears, engineering plastic gears, etc.
- Precision machine parts such as clock parts, camera parts, optical lenses, etc., printing machines, printing machine blades, printing rolls, rolled products, construction machinery, glass substrates, large machine parts such as large heavy machinery parts, and household products such as tableware Can be
- Pollutants removed by washing include, for example, cutting oil, quenching oil, rolling oil, lubricating oil, machine oil, press working oil, punching oil, drawing oil, assembly oil, oil such as drawing oil, and grease. , Waxes, adhesives, oils and fats, mold release agents at the time of molding, dirt, flux after soldering, registries, solder pastes and the like.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Detergent Compositions (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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EP97924236A EP0913464A4 (fr) | 1996-05-30 | 1997-05-28 | Procede de nettoyage d'articles |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP15909696 | 1996-05-30 | ||
JP8/159096 | 1996-05-30 |
Publications (1)
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WO1997045521A1 true WO1997045521A1 (fr) | 1997-12-04 |
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Family Applications (1)
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PCT/JP1997/001807 WO1997045521A1 (fr) | 1996-05-30 | 1997-05-28 | Procede de nettoyage d'articles |
Country Status (3)
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EP (1) | EP0913464A4 (fr) |
KR (1) | KR20000016203A (fr) |
WO (1) | WO1997045521A1 (fr) |
Cited By (3)
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WO1998051651A1 (fr) * | 1997-05-16 | 1998-11-19 | Nippon Zeon Co., Ltd. | Hydrocarbures fluores, detergents, procede detergent, fluides a base de polymeres et procede de formation de films polymeres |
JP4538953B2 (ja) * | 1997-12-26 | 2010-09-08 | 日本ゼオン株式会社 | −ch2−chf−基を有する化合物の製造方法 |
JP2019131450A (ja) * | 2018-02-02 | 2019-08-08 | パナソニックIpマネジメント株式会社 | 光学ガラス素子の処理方法および光学ガラス素子 |
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Cited By (4)
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WO1998051651A1 (fr) * | 1997-05-16 | 1998-11-19 | Nippon Zeon Co., Ltd. | Hydrocarbures fluores, detergents, procede detergent, fluides a base de polymeres et procede de formation de films polymeres |
US6312759B1 (en) | 1997-05-16 | 2001-11-06 | Nippon Zeon Co., Ltd. | Fluorinated hydrocarbons, detergents, deterging method, polymer-containing fluids, and method of forming polymer films |
JP4538953B2 (ja) * | 1997-12-26 | 2010-09-08 | 日本ゼオン株式会社 | −ch2−chf−基を有する化合物の製造方法 |
JP2019131450A (ja) * | 2018-02-02 | 2019-08-08 | パナソニックIpマネジメント株式会社 | 光学ガラス素子の処理方法および光学ガラス素子 |
Also Published As
Publication number | Publication date |
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EP0913464A1 (fr) | 1999-05-06 |
EP0913464A4 (fr) | 1999-09-01 |
KR20000016203A (ko) | 2000-03-25 |
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