WO1997013120A1 - Vorrichtung zur berührungslosen positionserfassung eines objektes und verwendung der vorrichtung - Google Patents
Vorrichtung zur berührungslosen positionserfassung eines objektes und verwendung der vorrichtung Download PDFInfo
- Publication number
- WO1997013120A1 WO1997013120A1 PCT/DE1996/001729 DE9601729W WO9713120A1 WO 1997013120 A1 WO1997013120 A1 WO 1997013120A1 DE 9601729 W DE9601729 W DE 9601729W WO 9713120 A1 WO9713120 A1 WO 9713120A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor
- magnetic
- magnetic field
- sensors
- layer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
Definitions
- the invention relates to a device for contactless detection of the position of an object with respect to a predetermined starting position.
- the device comprises a magnetic field generating device and a sensor device which contains at least one current-carrying sensor with an increased magnetoresistive effect, which has a layer system with at least one magnetically soft measuring layer with a magnetization which can be rotated in its layer plane and at least one magnetically harder biological part with at least largely unchanged magnetization.
- the object is rigidly connected to this sensor device or to the magnetic field generating device.
- the invention further relates to the use of such a device. A corresponding device and its use can be found in WO 94/17426.
- the electrical resistance can depend on the size and direction of a magnetic field penetrating the material.
- the effect that occurs with such layers is called “anisotropic magnetoresistance (AMR)" or “anisotropic magnetoresistive effect”. It is based physically on the different scattering cross sections of electrons with different spin and the spin polarity of the D band. The electrons are called majority or minority electrons.
- AMR anisotropic magnetoresistance
- magnetoresistive multilayer systems which contain a plurality of ferromagnetic layers arranged in a stack, each of which are separated from one another by metallic intermediate layers and whose magnetizations each lie in the layer plane.
- the thicknesses of the individual layers are selected to be significantly smaller than the mean free path length of the conduction electrons.
- GMR giant magnetoresistive effect
- GMR giant magnetoresistance
- Such a GMR effect is based on the differently strong scattering of majority and minority conduction electrons at the interfaces between the ferromagnetic layers and the adjacent layers, as well as on scattering effects within these layers, especially when using alloys.
- the GMR effect is an isotropic effect. It can be considerably larger than the anisotropic effect AMR.
- adjacent metallic layers are initially magnetized in opposite directions, a bias layer or a bias layer part being magnetically harder than a measuring layer. Under the influence of an external magnetic field, i.e. a component of this field that is pronounced in the layer plane, the initial antiparallel orientation of the magnetizations can then be converted into a parallel one. This fact is exploited with corresponding magnetic field sensors.
- a corresponding sensor is evident from the WO document mentioned at the beginning. It is part of a device for contactless detection of an angular position of an object.
- the object is rigidly connected to a permanent magnet, which is arranged rotatably in a plane parallel to a measuring layer plane.
- This magnet creates in the measuring layer a magnetic field component which can thus be rotated with respect to a preferred magnetic axis of a biological part of the sensor and therefore leads to a corresponding rotation of the magnetization in the magnetically softer measuring layer.
- the electrical resistance of the sensor thus depends on the angle between the magnetization of the measuring layer and the magnetic preferred direction of the biological part. This dependency is generally anisotropic due to the predetermined shape (geometry! Of the layer structure of the sensor.
- a corresponding device for detecting an angular position which in particular can form a contactless potentiometer, is restricted to a common axis of symmetry of the magnet and of the sensor, around which either the magnet or the sensor itself is rotatably arranged.
- the object of the present invention is to design the known device with the features mentioned at the outset such that such a restriction no longer exists.
- the magnetic field generating device forms a magnetic pole on an imaginary reference line or several magnetic poles which are arranged one behind the other and produce alternating magnetic field directions and is arranged with respect to the sensor device in such a way that the direction of a normal on the The plane of the measuring layer of the at least one sensor runs at an angle other than zero with respect to the imaginary reference line of the at least one magnetic pole.
- the magnetic field generating device should be moved relative to the sensor device such that the magnetic field of the at least one magnetic pole is detected by the measuring layer of the at least one sensor and that the sensor characteristic curve or passes through multiple times in accordance with the number of detected magnetic poles part of the same is effected.
- the advantages associated with this configuration of the position detection device can be seen in particular in the fact that, on the one hand, contactless detection of angular positions of objects in the entire angular range of 360 ° or of linear positions can be realized and, on the other hand, the requirements for the required accuracy of the assembly ⁇ positions of the magnetic field generating device and the sensor devices are reduced. Because with the use of at least one sensor for the sensor device, which has a layer system with an increased magnetoresistive effect, when the at least one magnetic pole is guided past the sensor device on the reference line, essentially only the dependency of the sensor measurement signal on the direction of the external magnetic field, but not exploited by its field strength.
- Such a position detection device particularly advantageously enables the construction of a contactless potentiometer.
- Figures 1 and 2 each schematically show a first view in side or top view
- FIGS. 3 and 4 in side view a second and a third embodiment of a corresponding device
- FIG. 5 in side view an embodiment of a linear position detection device according to the invention with a linear pole arrangement
- 6 shows a side view of a fourth embodiment of a rotational position detection device according to the invention with a magnet wheel
- FIG. 7 shows a top view of the device according to FIG. 6
- FIG. 8 shows a fifth embodiment of a rotation position detection device according to the invention with another magnet wheel.
- a linear position or a rotational position of any object can be detected without contact.
- the device has two main units, namely a device for generating a magnetic field component and a device for detecting this magnetic field component in order to generate an output signal which is essentially only dependent on the magnetic field direction.
- One of these two devices is rigidly connected to the object, so that its position with respect to a given starting position or relative to the position of the other device can be detected.
- the magnetic field generating device has one or more magnetic poles which are to be guided past the detection device one or more times and face them. If only one magnetic pole is provided, it can be viewed lying on an imaginary reference line.
- the reference line can represent a straight or a curved line.
- detection of a linear position of an object is possible in particular.
- a curved line can in particular form a circumferential line of a circle, such as that formed by a pole wheel. This enables angular positions between 0 and 360 ° to be detected.
- the device which is to be regarded as a sensor device and which is sensitive to the magnetic field direction comprises at least one current-carrying sensor.
- a plurality of corresponding sensors can be electrically connected to the sensor device and, for example, form a Wheatstone bridge.
- Each sensor has a multilayer system which exhibits an increased magnetoresistive effect, in particular a so-called GMR effect.
- the layer system therefore contains at least one magnetically softer measuring layer with a magnetization rotatable in its layer plane.
- a bias part with a bias layer or a bias layer system is arranged, the bias part being magnetically harder and under the influence of the magnetic field of the at least one magnetic pole having an at least largely unchanged magnetization.
- Corresponding multilayer systems with a GMR effect are known, for example, from the documents EP-A-0 483 373, DE-A-42 32 244, DE-A-42 43 357 or DE-A-42 43 358.
- its magnetic field generating device is to be arranged in a predetermined manner with respect to the sensor device: For this purpose, a normal on the level of the measuring layer of the multi-layer system of the at least one sensor and the imaginary reference line on which the at least one magnetic pole of the magnetic field generating device. Then the normal direction with the reference line should enclose an angle at its point closest to the measuring layer which is different from zero. This angle is preferably at least approximately 90 °. The reference line then lies in a plane that runs at least approximately parallel to the plane of the measuring layer.
- the magnetic field generating device and the sensor device should be able to be moved relative to one another such that the magnetic field of the at least one magnetic pole of the magnetic field generating device is detected by the measuring layer of the multilayer system of the at least one sensor and when guiding the at least one magnetic pole through the detection area of the sensor device, the sensor characteristic curve passes through the sensor characteristic many times according to the number of existing or detected magnetic poles or a part thereof.
- the sensor values are the resistance values which can be represented in a diagram and which the sensor device can assume when a magnetic pole is guided past its at least one measuring layer.
- the magnetic poles of the magnetic field generating device can be repeatedly guided through the detection range of the sensor device (or vice versa). Then the sensor characteristic curve or its sub-line is often traversed in accordance with the number of magnetic poles that are successively detected by the sensor device overall.
- a corresponding device 2 for detecting a rotational position indicated in FIGS. 1 and 2 its magnetic field generating device is designed as a magnetic pole wheel 3.
- the pole wheel is rotatably mounted about a reference axis G and is mounted, for example, on the axis of an electric motor.
- the between see neighboring poles with different polarity running magnetic field is indicated by a field line h.
- the pole wheel 3 is at a distance. its reference line L ⁇ is arranged at a distance from the sensor 6 of a sensor device 5.
- a current I flows through the sensor, which is not shown to scale in the figures with respect to the pole wheel, and has a multilayer system with a layer part 7, a so-called bias part, in its magnetization M D , and a soft magnetic measuring layer 8 with an in of the layer plane rotatable magnetization K m .
- a normal on the surface level of the layer package of the multilayer system of the sensor 6 or the measuring layer 8 is denoted by H] _.
- the reference axis Gi and the normal H ⁇ enclose an angle ⁇ with a value not equal to zero, preferably an angle ⁇ of at least approximately 90 °. Then, when the pole wheel 3 rotates about the reference axis G ⁇ , the magnetic poles 4j with their pole faces one after the other directly face the sensor 6.
- the resistance characteristic of the giant magnetoresistive sensor 6 is run through n times. Since the direction of the magnetization U m of the soft magnetic measuring layer 8 in the giant magnetoresistive sensor 6 follows the acting magnetic field in a wide field range and the change in resistance of the multilayer package only depends on the angle of the magnetizations M m in the measuring layer and M ⁇ in depends on the biological part, the signal emitted by the sensor, which depicts the angular position of the magnetic pole wheel 3, is advantageously independent of the distance between the pole wheel and the sensor over a wide range. As can also be seen from FIG. 2, the normal H] _ need not necessarily represent the central axis H ⁇ 'of the sensor 6, but can also be shifted by a distance a ⁇ from this axis.
- the distance between the magnet wheel 3 and the sensor 6 can be determined by the distance. marked space, a partition or housing wall can be inserted. This wall must be made of a non-ferromagnetic material.
- a partition or housing wall can be inserted.
- This wall must be made of a non-ferromagnetic material.
- Such a structure can be provided in particular if, for example, the magnet wheel or the sensor are installed in a housing or are to be arranged in different surrounding media which are to be separated from one another by a partition.
- the embodiment of a device 10 shown in FIG. 3 for detecting the rotational position of a magnet wheel 3 (according to FIG. 1) with n magnetic poles 4j has a sensor device 11 with a pair of magnetoresistive sensors 12 and 13.
- the sensors are not shown to scale relative to the magnet wheel - enlarged for reasons of clarity. They are electrically connected to each other and a current I flows through them.
- Their multilayer systems lie in a common plane and are aligned with one another in such a way that the directions of the magnetizations Mbi and Mfc2 of their biological parts are preferably at right angles to one another.
- the reference axis H2 is laterally displaced by a distance a2, wherein a2 should be significantly less than half a period of the pole spacing of adjacent magnetic poles.
- the giant magnetoresistive sensors 16 and 17 of their sensor device 18 are not arranged in a common plane, but lie in parallel planes.
- the multilayer systems of the sensors can be constructed either by hybrid means or by suitable coating and structuring of a wafer 19 either on its opposite flat sides or also on one side.
- the sensors have a common reference axis H3 in the direction of their surface normal.
- FIGS. 1 to 4 it was assumed that a reference line L ⁇ of the magnetic poles of a magnetic field generating device describes a circumferential line of a magnet wheel 3.
- the reference line can equally well form a straight line.
- a corresponding exemplary embodiment of a linear position detection device is illustrated in FIG. 5.
- This device, designated 20, contains, as a magnetic field generating device, a magnetic band 21 which extends along a straight reference line L2 and has n magnetic poles 4 ⁇ arranged in series (with 1 ⁇ k ⁇ n) of alternating polarity.
- the reference line L2 runs in the vertical direction with respect to the normal H] _ on the giant magnetoresistive sensor 6 (for example according to FIG. 1).
- a distance 83 is maintained between the multilayer system of the sensor and the magnetic band 21.
- the signal emitted by the sensor device which depicts the position of the magnetic band 21, is advantageously in a wide range independent of the distance a3 between the magnetic Band 21 and the sensor 6.
- FIGS. 1 to 5 provide that the reference axes or normals on their sensor devices or sensors are each at least approximately perpendicular with respect to the axis of rotation G ⁇ and / or perpendicular to the reference lines L ⁇ and L2.
- a position detection device according to the invention is not limited to such angles between the normals and the reference lines. Rather, angles greater than or less than 90 °, preferably from the range between 60 ° and 120 °, can also be selected.
- the signal emitted by the multilayer system which for example represents the angular position of a magnetic pole wheel, is largely independent of the angle between a normal at the level of the measuring layer of a multilayer system and the reference line of the at least one magnetic pole. This advantageously allows high installation tolerances in the manufacture and assembly of corresponding systems and means that different copies of the same system can have different angles from the angular range mentioned, without their electrical functioning practically changing.
- a corresponding exemplary embodiment can be seen from FIGS. 6 and 7.
- each sensor instead of the arrangement of a sensor device with two sensors shown in FIGS. 3 and 4, such a device 25 with more than two, for example three, sensors 26 lying in one plane is now used to 28 used.
- each sensor only has two linear areas of 60 ° each 360 ° detection is required instead of 90 ° each according to the embodiment according to FIGS. 3 and 4.
- FIG. 8 shows an embodiment of a rotational position detection device 30 with a pole wheel 31 as a magnetic field generating device, which has only a single magnetic double pole 32.
- the double pole formed by a bar magnet is arranged such that it extends in the radial direction with respect to the axis of rotation G2 of the magnet wheel 31. That is, only one magnetic pole 32a of this bar magnet faces the giant magnetoresistive sensor 6 (e.g. according to FIG. 1) of a sensor device while maintaining a distance a5.
- the magnetic field caused by the bar magnet is indicated by field lines h '.
- the device 30 shown can be used in particular to generate trigger or counting pulses.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/043,818 US6154025A (en) | 1995-09-29 | 1996-09-13 | Contactless potentiometer and device for contactlessly sensing a position of an object |
DE59609412T DE59609412D1 (de) | 1995-09-29 | 1996-09-13 | Vorrichtung zur berührungslosen positionserfassung eines objektes und verwendung der vorrichtung |
JP9513867A JPH11513487A (ja) | 1995-09-29 | 1996-09-13 | 対象物の無接触位置検出装置およびこの装置の使用方法 |
EP96941573A EP0852700B1 (de) | 1995-09-29 | 1996-09-13 | Vorrichtung zur berührungslosen positionserfassung eines objektes und verwendung der vorrichtung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19536433.3 | 1995-09-29 | ||
DE19536433A DE19536433C2 (de) | 1995-09-29 | 1995-09-29 | Vorrichtung zur berührungslosen Positionserfassung eines Objektes und Verwendung der Vorrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997013120A1 true WO1997013120A1 (de) | 1997-04-10 |
Family
ID=7773647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1996/001729 WO1997013120A1 (de) | 1995-09-29 | 1996-09-13 | Vorrichtung zur berührungslosen positionserfassung eines objektes und verwendung der vorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6154025A (de) |
EP (1) | EP0852700B1 (de) |
JP (1) | JPH11513487A (de) |
AR (1) | AR003632A1 (de) |
DE (2) | DE19536433C2 (de) |
WO (1) | WO1997013120A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0867692A1 (de) * | 1997-03-26 | 1998-09-30 | Siemens Aktiengesellschaft | Einrichtung zur berührungslosen Positionserfassung eines Objektes und Verwendung der Einrichtung |
Families Citing this family (30)
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FR2773395B1 (fr) | 1998-01-05 | 2000-01-28 | Commissariat Energie Atomique | Capteur angulaire lineaire a magnetoresistances |
JP3560821B2 (ja) | 1998-07-17 | 2004-09-02 | アルプス電気株式会社 | 巨大磁気抵抗効果素子を備えたエンコーダ |
DE29815350U1 (de) | 1998-08-26 | 1998-12-03 | Delphi Automotive Systems Deutschland GmbH, 42369 Wuppertal | Vorrichtung zur Positionsbestimmung beweglicher Gegenstände |
DE19983599T1 (de) * | 1998-09-28 | 2001-08-09 | Seagate Technology | Vierfachschicht-Riesenmagnetwiderstands-Sandwichstruktur |
SE513428C2 (sv) * | 1999-01-07 | 2000-09-11 | Forskarpatent I Uppsala Ab | Lägesgivare |
DE19908361A1 (de) * | 1999-02-26 | 2000-09-21 | Klemens Gintner | Sensorvorrichtung zur Erfassung von Geschwindigkeit und Bewegungsrichtung eines Objektes, insbesondere von Drehzahl und -richtung eines rotierenden Objektes |
US6278270B1 (en) * | 1999-10-29 | 2001-08-21 | Xerox Corporation | Apparatus and method for detecting small distance changes between opposed surfaces using giant magneto resistance effect sensor |
JP2001304805A (ja) * | 2000-04-25 | 2001-10-31 | Tokai Rika Co Ltd | 回転角度検出装置 |
DE10041089A1 (de) * | 2000-08-22 | 2002-03-07 | Bosch Gmbh Robert | Verfahren zur Korrektur einer Winkelmessung |
US6940277B2 (en) * | 2000-11-17 | 2005-09-06 | University Of South Florida | Giant magnetoresistance based nanopositioner encoder |
DE10132215A1 (de) * | 2001-07-03 | 2003-01-23 | Philips Corp Intellectual Pty | Anordnung zum Messen der Winkelposition eines Objektes |
US6927566B2 (en) * | 2002-05-22 | 2005-08-09 | Ab Eletronik Gmbh | Device for generating output voltages |
DE10222467A1 (de) * | 2002-05-22 | 2003-12-11 | A B Elektronik Gmbh | GMR-Drehwinkelsensor |
JP2004144716A (ja) | 2002-10-28 | 2004-05-20 | Koyo Seiko Co Ltd | 回転角検出装置及びトルク検出装置 |
ITMI20041112A1 (it) * | 2004-06-01 | 2004-09-01 | Ansaldo Ricerche S R L Societa | Sensore di posizione ad effetto di hall ad alta risoluzione ed elevata immunita' al rumore elettro agnetico |
DE102005022596A1 (de) * | 2005-05-17 | 2006-11-23 | Continental Teves Ag & Co. Ohg | Anordnung zur eigensicheren Raddrehzahlerfassung |
US7427859B2 (en) * | 2005-08-10 | 2008-09-23 | Tdk Corporation | Moving body detecting apparatus |
EP1777501A1 (de) * | 2005-10-24 | 2007-04-25 | Getrag Ford Transmissions GmbH | Positionssensoranordnung zur berührungslosen Positionsbestimmung mittels redundanter magnetempfindlicher Sensorelemente |
FR2898189B1 (fr) * | 2006-03-02 | 2008-10-17 | Moving Magnet Tech | Capteur de position a direction d'aimantation variable et procede de realisation |
EP2062243A4 (de) * | 2006-08-21 | 2015-07-01 | Schacht Michael R | Systeme und verfahren zur bewegungssimulation mit ton |
DE102007026503B4 (de) * | 2007-06-05 | 2009-08-27 | Bourns, Inc., Riverside | Verfahren zur Herstellung einer Magnetschicht auf einem Substrat und druckbarer magnetisierbarer Lack |
JP5128416B2 (ja) * | 2008-08-20 | 2013-01-23 | 株式会社東海理化電機製作所 | 磁気センサ装置 |
CN101922933A (zh) * | 2009-06-12 | 2010-12-22 | 鸿富锦精密工业(深圳)有限公司 | 电子装置 |
JP2011127909A (ja) * | 2009-12-15 | 2011-06-30 | Alps Electric Co Ltd | 回転検出システム |
WO2011111494A1 (ja) * | 2010-03-12 | 2011-09-15 | アルプス電気株式会社 | 磁気センサ及び磁気エンコーダ |
US9417295B2 (en) | 2012-12-21 | 2016-08-16 | Allegro Microsystems, Llc | Circuits and methods for processing signals generated by a circular vertical hall (CVH) sensing element in the presence of a multi-pole magnet |
US9606190B2 (en) * | 2012-12-21 | 2017-03-28 | Allegro Microsystems, Llc | Magnetic field sensor arrangements and associated methods |
US10175061B2 (en) | 2013-11-21 | 2019-01-08 | Vladimir Savchenko | Method and apparatus to measure motion characteristics for bicycles and any vehicles on wheels |
CN103646736B (zh) * | 2013-12-18 | 2017-01-18 | 江苏多维科技有限公司 | 一种非接触式划线电位器 |
TWI627425B (zh) * | 2017-07-05 | 2018-06-21 | 致茂電子股份有限公司 | 交流馬達測試裝置與交流馬達測試方法 |
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- 1995-09-29 DE DE19536433A patent/DE19536433C2/de not_active Expired - Fee Related
-
1996
- 1996-09-13 EP EP96941573A patent/EP0852700B1/de not_active Expired - Lifetime
- 1996-09-13 DE DE59609412T patent/DE59609412D1/de not_active Expired - Lifetime
- 1996-09-13 WO PCT/DE1996/001729 patent/WO1997013120A1/de active IP Right Grant
- 1996-09-13 JP JP9513867A patent/JPH11513487A/ja active Pending
- 1996-09-13 US US09/043,818 patent/US6154025A/en not_active Expired - Lifetime
- 1996-09-20 AR ARP960104425A patent/AR003632A1/es unknown
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0867692A1 (de) * | 1997-03-26 | 1998-09-30 | Siemens Aktiengesellschaft | Einrichtung zur berührungslosen Positionserfassung eines Objektes und Verwendung der Einrichtung |
KR100532795B1 (ko) * | 1997-03-26 | 2006-02-13 | 지멘스 악티엔게젤샤프트 | 물체의 위치를 무접촉 방식으로 검출하기 위한 장치 |
Also Published As
Publication number | Publication date |
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DE19536433A1 (de) | 1997-04-10 |
EP0852700B1 (de) | 2002-07-03 |
EP0852700A1 (de) | 1998-07-15 |
DE59609412D1 (de) | 2002-08-08 |
JPH11513487A (ja) | 1999-11-16 |
US6154025A (en) | 2000-11-28 |
DE19536433C2 (de) | 1999-04-08 |
AR003632A1 (es) | 1998-08-05 |
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