WO1994018643A1 - Procede et appareil de mise en image de surfaces - Google Patents

Procede et appareil de mise en image de surfaces Download PDF

Info

Publication number
WO1994018643A1
WO1994018643A1 PCT/US1993/012141 US9312141W WO9418643A1 WO 1994018643 A1 WO1994018643 A1 WO 1994018643A1 US 9312141 W US9312141 W US 9312141W WO 9418643 A1 WO9418643 A1 WO 9418643A1
Authority
WO
WIPO (PCT)
Prior art keywords
recited
illumination
field illumination
inspection region
dark field
Prior art date
Application number
PCT/US1993/012141
Other languages
English (en)
Inventor
Jack A. Dean
Original Assignee
Golden Aluminum Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Golden Aluminum Company filed Critical Golden Aluminum Company
Priority to AU60145/94A priority Critical patent/AU6014594A/en
Publication of WO1994018643A1 publication Critical patent/WO1994018643A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G01N2021/8825—Separate detection of dark field and bright field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • G01N2021/8918—Metal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/102—Video camera

Definitions

  • the present invention relates to a method and apparatus for imaging the surface characteristics of an object.
  • the present invention is directed to a method and apparatus for imaging the surface of an object as the object moves through an inspection region.
  • Video cameras have been used as a means of inspection for various applications including the inspection of electronic circuit boards and the inspection of moving webs of material such as plastic, paper and metals.
  • the video camera images the object and the image obtained by the camera is evaluated for the presence of contaminants, the orientation of the object, the identification of the object or the measurement of geometric dimensions on the object.
  • a charge coupled device (CCD) camera has been utilized.
  • CCD charge coupled device
  • conventional CCD cameras light reflected from the object being observed is focused onto an image section of a CCD sensor that comprises an array of photoelements, for a selected interval of time. The time interval is selected to produce acceptable image contrast without significant blurring of the image due to the motion of the object.
  • the stored charge representing the light intensity reaching the photoelement is periodically shifted from the image section to a storage section and each element is thereafter erased or reset.
  • CCD cameras have also been modified to operate in time delayed integration (TDI) mode.
  • TDI time delayed integration
  • the charge representing the light intensity reaching the photoelement is shifted to the next row simultaneously with the light pattern impinging upon the photoelements from the moving object.
  • the charge representing the light reflected from a selected portion of the object is integrated as the object moves.
  • the accumulated charge is shifted into a storage section.
  • U.S. Patent No. 4,922,337 by Hunt et al. discloses a method of quality control utilizing a CCD camera operating in TDI mode and teaches the operation of a CCD camera in TDI mode.
  • U.S. Patent No. 5,085,517 by Chadwick et al. discloses a method for high speed optical inspection of printed wire boards using a CCD camera in TDI mode.
  • the present invention is directed to a method and apparatus for imaging the surface of an object, such as a continuous web of material. It has been found that when inspecting certain types of objects, particularly continuous webs of metal, certain surface features are not readily visible under typical lighting conditions. For example, it has been found that certain surface defects that can occur in a metal sheet are more readily visible under bright field illumination while other surface defects are more readily visible under dark field illumination. Therefore, it would be advantageous to provide an apparatus and method capable of imaging different surface features simultaneously. It would be particularly advantageous if such an apparatus and method was capable of imaging the object as the object moved continuously through an inspection region.
  • an apparatus for inspecting the surface of an object can include illumination means for illuminating the object as the object moves through an inspection region wherein a portion of the illumination means illuminates the object with dark field illumination and a portion of the illumination means illuminates the object with bright field illumination.
  • the apparatus also preferably includes imaging means for imaging the object within the inspection region to produce a composite image of the object under both dark field illumination and bright field illumination.
  • the apparatus preferably includes a single CCD camera operating in TDI mode to image the object in the inspection region.
  • the illumination means can include separate illumination sources for providing bright field and dark field illumination. In one embodiment, substantially separate portions of the inspection region are illuminated by the bright field and dark field illumination.
  • the apparatus can also include conveying means for moving objects through the inspection region.
  • a method for imaging the surface of an object includes the steps of illuminating a first portion of an inspection region with dark field illumination and illuminating a second portion of the inspection region with bright field illumination. An object is then placed in the inspection region and is imaged to produce a composite image of bright field and dark field illumination.
  • the object can be imaged with a CCD camera, preferably operating in TDI mode.
  • TDI mode The use of a CCD camera operating in TDI mode allows an image of the object to be generated that can include different surface features in a single image.
  • the image is inspected to determine if any defects are present on the object.
  • the object is conveyed through the inspection region in a substantially continuous fashion and the object can be larger than the illuminated portions.
  • the object is a continuous web of material such as a continuous sheet of metal.
  • the illumination can include at least two illumination sources having different primary wavelengths.
  • the method and apparatus of the present invention are particularly useful as an integral part of a process for producing cast aluminum sheet, and one embodiment of the present invention is directed to a method for the production of aluminum alloy sheet stock that includes the steps of casting an aluminum alloy metal to form a cast sheet, hot rolling the cast sheet to form a hot rolled sheet, cold rolling the hot rolled sheet to form a cold rolled sheet, and inspecting the cold rolled sheet by illuminating a first portion of an inspection region with dark field illumination and illuminating a second portion of the inspection region with bright field illumination, moving the cold rolled sheet through the inspection region and imaging the cold rolled sheet to generate an image of at least a portion of the cold rolled sheet wherein the image is a composite image of the portion under bright field illumination and dark field illumination
  • Fig. 1 illustrates examples of bright field and dark field illumination according to the present invention.
  • Fig. 2 illustrates an apparatus according to the present invention for inspecting a moving web.
  • Figs. 3a and 3b illustrate two views of an illumination system for inspecting objects according to one embodiment of the present invention.
  • Fig. 4 illustrates illumination means for inspecting objects according to one embodiment of the present invention.
  • the present invention is directed to a method and apparatus for inspecting the surface of an object as the object moves through an inspection region by illuminating the object with bright field and dark field illumination.
  • the method and apparatus are particularly applicable to the inspection of continuous webs of material for defects or irregularities on the surface of the material.
  • Processes in which continuous webs of material are routinely inspected include the fabrication of sheets, films and rolls of plastics, metals, glass, plywood, paper, fabrics and the like.
  • the method and apparatus are particularly applicable to the inspection of continuous webs of reflective metal, such as aluminum, copper, bronze and the like.
  • the method and apparatus can be particularly useful as an integral part of a process for producing aluminum alloy sheet stock. An example of such a process is disclosed in U.S. Patent No. 4,976,790 by McAuliffe et al.
  • bright field illumination and dark field illumination refer to the way that the object is illuminated by one or more illumination sources. Whether the object is illuminated in bright field or dark field depends on the angle of incidence of the illumination relative to the object being viewed and the position of the observer or imaging camera relative to the object being viewed. Therefore, whether the illumination is dark field or bright field can be determined by the position of the illumination source and/or the position of the imaging camera.
  • Bright field illumination refers generally to a setup wherein illumination is directed at the surface of the object such that the light that is reflected from the object to the imaging camera is reflected in a specular mode. That is, the light is reflected to the camera at an angle approximately equal to the incident angle of the illumination relative to a normal to the object's plane.
  • the illumination source can be positioned such that the light strikes the surface of the object substan ⁇ tially normal to the object's plane (e.g., about 90° to the plane) wherein the imaging camera is positioned directly over the object.
  • the illumination can be directed at the surface of the object at an angle that is close to 90° to the object plane (e.g., from about 70° to about 90° to the plane) and the camera can be positioned at a substantially similar angle on the opposite side of the object.
  • dark field illumination refers generally to a setup wherein illumination that is detected by the camera is predominantly light that is diffused by the surface of the object.
  • Dark field illumi ⁇ nation can be provided, for example, by an illumination source that directs light at the surface of the object at a glancing angle, for example less than about 45° to the plane of the object.
  • the imaging camera is positioned to reduce the amount of specular reflection that is detected from the illumination source.
  • Bright field and dark field illumination can be understood in more detail by reference to Fig. 1 which illustrates the manner in which illumination can be reflected from the surface of an object.
  • a substantially planar object 104 is illustrated in Fig. 1.
  • Light beam 112 is directed at the object 104 in a direction that is close to the normal 118 to the plane of the object 104.
  • the light beam 112 strikes the object 104 and is predominately reflected upwards in a specular mode where the specular reflection 114 is detected by a camera 130. This is the bright field illumination.
  • the diffuse reflections 116 that reflect from the surface of the object 104 are predominately reflected outside of the field of view of the camera 130.
  • Dark field illumination can be achieved by directing a light beam 120 at the object 104 at a small angle in relation to the plane of the object 104.
  • a portion 122 of the reflected illumination is reflected upward towards the camera 130 in diffuse mode thereby creating dark field illumination.
  • the specular reflection 124 is reflected out of the field of view of the camera 130.
  • Illumination striking the surface of the object at a small angle can be diffusely reflected to the camera by microscopic or macroscopic surface roughness, by surface features or by the presence of foreign material on the object.
  • Fig. 1 is for illustration by example only, and it is to be understood that many types of surface conditions can exist that can reflect incident light in different ways.
  • the method and apparatus of the present invention are particularly applicable to the inspection of continuous webs of material. It has been found that among the many types of defects possible in a continuous web of some materials, certain defects will not be easily detectable under bright field illumination while other defects will not be easily detectable under dark field illumination.
  • the method and apparatus of the present invention are particularly applicable to the inspection of continuous sheets of reflective metal, such as aluminum sheet metal used to fabricate drawn and ironed beverage containers. During the fabrication of aluminum metal sheet, many types of defects can occur. Discoloring effects such as oxide bands, grease spots, water stains and the like are most easily detected by illuminating the sheet with bright field illumination.
  • a continuous web of material 204 for example aluminum sheet
  • the inspection region can be an integral part of a process for producing aluminum sheet stock.
  • aluminum metal is cast and then treated in a series of hot rolling and cold rolling steps to reduce the thickness of the aluminum sheet.
  • Intermediate annealing steps between rolling steps can advantageously enhance the properties of the metal sheet.
  • the inspection region 210 can be placed anywhere in the process where it is advantageous to inspect the web and in a preferred embodiment the web is inspected after the final rolling step. Additional inspection regions can be used as necessary.
  • a second inspection region 270 can be used so that both sides of the web are imaged.
  • the conveying means can include a series of rollers 252. 254. and 256 that rotate to convey and maintain tension in the sheet.
  • the rollers 252. 254. and 256 can conveniently be an integral part of a fabrication or finishing process, such as a process for applying a protective film to the sheet or a process for leveling the sheet.
  • the conveying means can include, for example, a conveyer belt for supporting and moving the objects through the inspection region.
  • the continuous web 204 As the continuous web 204 is conveyed through the process it enters an inspection region 210.
  • the inspection region is defined by the field of view of the camera 230.
  • the speed of the continuous web 204 moving through the inspection region 210 can be controlled by adjusting the speed of the rollers 252. 254 and 256 to rotate the rollers 252. 254 and 256 at a substantially constant frequency.
  • Tachometer means 258 can also be used to monitor the rotational speed of the rollers and hence the speed of the continuous web 204 moving through the inspection region 210.
  • the tachometer means 258 can be electronically connected to control means 260 for regulating the speed of the rollers.
  • the tachometer means 258 can also be electronically connected to the camera 230 to slave the speed of the object movement with the charge transfer rate in the camera.
  • the tachometer means 258 can also be connected to the illumination sources 236 and 240. as is described in more detail hereinbelow.
  • the conveying means maintains the object at a substantially constant speed.
  • the inspection region 210 is illuminated with both dark field illumination from a dark field illumination source 236 and bright field illumination from a bright field illumination source 240 to produce a dark field image and a bright field image.
  • the inspection region 210 includes two distinct portions wherein one of the portions is subjected to bright field illumination while the other portion is subjected to dark field illumination.
  • the illumination can be provided by two or more separate illumination means that provide the desired illumination effects.
  • Figs. 3a and 3b an apparatus according to one embodiment of the present invention is illustrated.
  • the web is moving from left to right and in Fig. 3b the web is moving out of the pagn.
  • the apparatus includes a camera 330. preferably a CCD camera operating in TDI mode.
  • An illumination source 340 provides bright field illumination to the moving web 304.
  • dark field illumination source 332 is illustrated.
  • an additional dark field illumination source 336 can also be provided.
  • the angle at which the dark field illumination source is positioned with relation to the object can be changed to suit the type of object being inspected.
  • the field of illumination for the dark field illumination source 332 and bright field illumination source 340 do not substantially overlap.
  • the illumination source can be any light source that is convenient for providing illumination to the moving web.
  • the illumination sources 332. 336. and 340 utilize standard 48 inch fluorescent bulbs.
  • each illumination source can include two 48 inch fluorescent bulbs placed substantially parallel to one another in a rectangular box approximately 12 inches wide by 50 inches long. Fluorescent lights are generally preferred since they generate less infrared (heat) energy than, for example, incandescent lights.
  • the box includes a diffuser for diffusing the light as the light passes through the box and towards the object.
  • the diffuser can be made from, for example, a translucent plastic sheet. Such a sheet will advantageously minimize the appearance of horizontal bright bands on the surface of the object as the object moves through the inspection region.
  • the illumination means includes at least two different types of illumination sources capable of providing light of different primary wavelengths.
  • an ultraviolet illumination source or an infrared illumination source can advantageously be used.
  • the illumination sources are preferably regulated to account for sudden power fluctuations that may occur during operation.
  • the intensity of the light will therefore remain substantially constant throughout the process.
  • the light sources are preferably regulated to automatically correct the current and maintain a substantially constant level of light intensity.
  • the light source can also be slaved to the tachometer means so that the intensity can be reduced when the object movement slows down, thus increasing the time that the image is exposed to the illumination.
  • Other means can also be utilized to provide portions of dark field illumination and bright field illumination to the inspection region, such as a single light source.
  • Fig. 4 illustrates a fiber optic light pipe that can be utilized to provide a continuum of both dark field and bright field illumination to the object.
  • the center 410 of the light pipe 400 is raised above the surface of the object 420 at one end of the inspection region to provide bright field illumination.
  • the light pipe 400 is then tapered down and to the sides of the inspection region such that the light pipe 400 is closer to and at the sides of the object 420 near the opposite end of the inspection region to provide dark field illumination.
  • the illumination from both the dark field and bright field illumination sources is preferably imaged with a CCD camera 330 operating in TDI mode.
  • a camera that is particularly useful in the present invention is the Visioneer 4050 camera available from Sierra Scientific of Sunnyvale, CA.
  • the preferred CCD camera 330 includes a two- dimensional array of light sensitive photoelements. When illumination striking the object is reflected to the camera, photons enter the photoelements and electrons are released. The electrons migrate to a potential energy well created by clock lines on the face of the array. Once a row of charge has accumulated on the photoelements, it can be moved to an adjacent row of photoelements by changing the voltages on the clock lines.
  • the charge is transferred in a row from photoelement to photoelement.
  • additional charge corresponding to the photons reaching the photoelement is added to the transferred charge.
  • the photo- elements are controlled in such a way that the accumulated charge is transferred in synchronization with the movement of the object being imaged. Thus, as the object moves some small increment, the charge is shifted one row to follow the motion. If there are 244 rows of photoelements, then the total exposure time for each small area of the image will be 244 times as long as a single row imager or line scan camera.
  • the size of the CCD array can vary, and in one embodiment the CCD camera 330 comprises a 244 X 610 array of photoelements.
  • the rate at which accumulated charge is transferred between rows preferably corresponds to the rate at which the object passes through the inspection region 210 (Fig. 2) .
  • the metal web may move at rates of from about 1000 to about 4000 feet per minute.
  • the synchronization can be accomplished using a conveyor speed sensor or tachometer means 258 connected to the camera to clock the CCD array at a corresponding rate.
  • the tachometer means 258 can be connected to the power source for the illumination means 236 and 240 to dim the illumination means 236 and 240 when the speed of the conveying means decreases.
  • the charge is shifted from row to row along the CCD array in synchronization with the movement of the object being imaged. If the lens of the camera focuses a 1 millimeter x 1 millimeter area of the object on each photoelement of the CCD array, then each time the object moves 1 millimeter, the integrated light values are shifted one row or line in the CCD array. Eventually, the charge representing the integrated light values reaches an optically insensitive storage section where the total accumulated charge is stored temporarily.
  • This process allows an image to be formed that represents a row of the object as integrated over the entire inspection region.
  • the total charge accumulated represents illumination reflected or diffused from the surface of the object at that point in both bright field and dark field illumination. Different types of defects will therefore be visible in the same image.
  • the charge that is accumulated eventually reaches a storage section where the integrated value of the row is stored for image processing.
  • the image can then be processed through a computer hardware system that converts the data to digital images.
  • the image that the camera captures is converted to a digital image in a frame grabber.
  • the frame grabber gathers images of the object in lines, which are assembled in the frame grabber into whole frames that can be viewed and processed by computer software programs. Each frame represents the object being imaged or a portion of the object being imaged, such as a portion of a continuous web.
  • the software can scan the image for defects by comparing the image to a standard image that does not contain defects and looking for changes in pixel values. Images that the system identifies as containing defects can then be saved onto a storage device such as a hard disk drive. An operator can scan the defect images on the hard drive to either save or discard the defect image and to classify the defect if it is saved.
  • a trained operator may be able to distinguish between a water stain on a metal sheet and a grease mark on the sheet.
  • the operator can classify the defect accordingly and may be able to decide if the flaw is critical or can be ignored.
  • Information about the defect for example, its size, location, severity, and classification, can be saved as a part of a data file on the objects being inspected.
  • the present invention thus provides a method and apparatus for imaging the surface of objects such that features visible under bright field illumination and features visible under dark field illumination are both visible in one composite image.

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

Procédé et appareil de mise en image de la surface d'un objet. On déplace l'objet (204) à travers une région d'inspection (210) dans laquelle il est éclairé en utilisant au moins deux types d'éclairage (236, 240). Une image intégrée est obtenue, cette image présentant avantageusement différents types de caractéristiques de surfaces qui, individuellement, sont visibles uniquement sous l'un des deux types d'éclairage. Dans un mode préférentiel de réalisation, l'objet inspecté est une bande continue de matériau telle qu'une feuille métallique.
PCT/US1993/012141 1993-02-02 1993-12-13 Procede et appareil de mise en image de surfaces WO1994018643A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU60145/94A AU6014594A (en) 1993-02-02 1993-12-13 Method and apparatus for imaging surfaces

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US1231093A 1993-02-02 1993-02-02
US012,310 1993-02-02

Publications (1)

Publication Number Publication Date
WO1994018643A1 true WO1994018643A1 (fr) 1994-08-18

Family

ID=21754366

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1993/012141 WO1994018643A1 (fr) 1993-02-02 1993-12-13 Procede et appareil de mise en image de surfaces

Country Status (2)

Country Link
AU (1) AU6014594A (fr)
WO (1) WO1994018643A1 (fr)

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998020327A1 (fr) * 1996-11-04 1998-05-14 Kla-Tencor Corporation Systeme de controle automatise par eclairage sur fond clair ou sur fond noir
EP0898163A1 (fr) * 1997-08-22 1999-02-24 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Procédé et appareil d'inspection automatique des surfaces en mouvement
WO1999013319A1 (fr) * 1997-09-08 1999-03-18 Affymetrix, Inc. Appareil et procede pour l'imagerie d'echantillons marques a l'aide de materiau diffusant la lumiere
WO2001023869A1 (fr) * 1999-09-28 2001-04-05 Parsytec Ag Procede et dispositif pour inspecter la surface d'un feuillard circulant en continu
US6327374B1 (en) 1999-02-18 2001-12-04 Thermo Radiometrie Oy Arrangement and method for inspection of surface quality
GB2384852A (en) * 2001-09-03 2003-08-06 Millennium Venture Holdings Lt Workpiece inspection apparatus
EP1503206A1 (fr) * 2003-07-28 2005-02-02 The Boeing Company Systèmes et méthodes pour identifier des objets étrangers et des débris et des défauts pendant la fabrication d'une structure composée
US7039485B2 (en) 2004-03-12 2006-05-02 The Boeing Company Systems and methods enabling automated return to and/or repair of defects with a material placement machine
US7193696B2 (en) 2004-04-12 2007-03-20 United Technologies Corporation Systems and methods for using light to indicate defect locations on a composite structure
US7289656B2 (en) 2003-12-02 2007-10-30 The Boeing Company Systems and methods for determining inconsistency characteristics of a composite structure
US7372556B2 (en) 2005-10-31 2008-05-13 The Boeing Company Apparatus and methods for inspecting a composite structure for inconsistencies
DE102007007828A1 (de) * 2007-02-16 2008-08-21 Bst International Gmbh Verfahren und Vorrichtung zum Beleuchten eines Druckbildes auf einer Materialbahn
US7435947B2 (en) 2005-10-31 2008-10-14 The Boeing Company Apparatus and methods for integrating encoding functions in material placement machines
DE102006009593B4 (de) * 2005-10-01 2008-12-18 Vistec Semiconductor Systems Gmbh Vorrichtung zur Aufnahme von mehreren Bildern von scheibenförmigen Objekten
EP2144052A1 (fr) * 2008-07-11 2010-01-13 Dr. Schenk GmbH Industriemesstechnik Procédé et dispositif de détection et de classification de défauts
US7889907B2 (en) 2005-01-12 2011-02-15 The Boeing Company Apparatus and methods for inspecting tape lamination
US8524021B2 (en) 2004-11-24 2013-09-03 The Boeing Company In-process vision detection of flaw and FOD characteristics
US8578995B2 (en) 2002-11-22 2013-11-12 The Boeing Company Parallel configuration composite material fabricator and related methods
US8934702B2 (en) 2003-12-02 2015-01-13 The Boeing Company System and method for determining cumulative tow gap width
WO2015010681A2 (fr) 2013-07-22 2015-01-29 Zs-Handling Gmbh Dispositif servant à inspecter des surfaces de pièces à usiner et des matériaux en bande
CN106168580A (zh) * 2016-07-18 2016-11-30 广东华冠新型材料有限公司 带材孔洞实时检测装置
DE102016100437A1 (de) 2016-01-12 2017-07-13 Stephan Krebs Vorrichtung zur Druckbildkontrolle
EP3279645A4 (fr) * 2015-03-31 2018-09-26 Nisshin Steel Co., Ltd. Dispositif d'inspection des défauts superficiels dans une tôle d'acier galvanisée à chaud, et procédé associé
EP3712600A1 (fr) * 2019-03-20 2020-09-23 ThyssenKrupp Rasselstein GmbH Procédé et dispositif d'inspection de la surface d'une bande en mouvement
US10942132B2 (en) * 2018-11-12 2021-03-09 Samsung Display Co., Ltd. Apparatus and method for inspecting glass substrate
CN113447485A (zh) * 2020-03-26 2021-09-28 捷普电子(新加坡)公司 光学检测方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4922337A (en) * 1988-04-26 1990-05-01 Picker International, Inc. Time delay and integration of images using a frame transfer CCD sensor
US5030008A (en) * 1988-10-11 1991-07-09 Kla Instruments, Corporation Method and apparatus for the automated analysis of three-dimensional objects

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4922337A (en) * 1988-04-26 1990-05-01 Picker International, Inc. Time delay and integration of images using a frame transfer CCD sensor
US4922337B1 (en) * 1988-04-26 1994-05-03 Picker Int Inc Time delay and integration of images using a frame transfer ccd sensor
US5030008A (en) * 1988-10-11 1991-07-09 Kla Instruments, Corporation Method and apparatus for the automated analysis of three-dimensional objects

Cited By (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5917588A (en) * 1996-11-04 1999-06-29 Kla-Tencor Corporation Automated specimen inspection system for and method of distinguishing features or anomalies under either bright field or dark field illumination
WO1998020327A1 (fr) * 1996-11-04 1998-05-14 Kla-Tencor Corporation Systeme de controle automatise par eclairage sur fond clair ou sur fond noir
EP0898163A1 (fr) * 1997-08-22 1999-02-24 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Procédé et appareil d'inspection automatique des surfaces en mouvement
WO1999010730A1 (fr) * 1997-08-22 1999-03-04 Spectra-Physics Visiontech Oy Procede et appareil de controle automatique de surfaces en deplacement
US6166393A (en) * 1997-08-22 2000-12-26 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Method and apparatus for automatic inspection of moving surfaces
WO1999013319A1 (fr) * 1997-09-08 1999-03-18 Affymetrix, Inc. Appareil et procede pour l'imagerie d'echantillons marques a l'aide de materiau diffusant la lumiere
US6294327B1 (en) 1997-09-08 2001-09-25 Affymetrix, Inc. Apparatus and method for detecting samples labeled with material having strong light scattering properties, using reflection mode light and diffuse scattering
US6327374B1 (en) 1999-02-18 2001-12-04 Thermo Radiometrie Oy Arrangement and method for inspection of surface quality
DE19946520B4 (de) * 1999-09-28 2010-09-16 Parsytec Ag Vorrichtung und Verfahren zur Oberflächeninspektion eines kontinuierlich zulaufenden Bandmaterials
WO2001023869A1 (fr) * 1999-09-28 2001-04-05 Parsytec Ag Procede et dispositif pour inspecter la surface d'un feuillard circulant en continu
GB2384852A (en) * 2001-09-03 2003-08-06 Millennium Venture Holdings Lt Workpiece inspection apparatus
US8578995B2 (en) 2002-11-22 2013-11-12 The Boeing Company Parallel configuration composite material fabricator and related methods
JP2005049344A (ja) * 2003-07-28 2005-02-24 Boeing Co:The 複合構造の製造の際に、欠陥ならびに異物および破片を識別するためのシステムおよび方法
JP4615919B2 (ja) * 2003-07-28 2011-01-19 ザ・ボーイング・カンパニー 複合構造の製造の際に、欠陥ならびに異物および破片を識別するためのシステムおよび方法
US7236625B2 (en) 2003-07-28 2007-06-26 The Boeing Company Systems and method for identifying foreign objects and debris (FOD) and defects during fabrication of a composite structure
EP1503206A1 (fr) * 2003-07-28 2005-02-02 The Boeing Company Systèmes et méthodes pour identifier des objets étrangers et des débris et des défauts pendant la fabrication d'une structure composée
US7769224B2 (en) 2003-12-02 2010-08-03 The Boeing Company Systems and methods for determining inconsistency characteristics of a composite structure
US8184281B2 (en) 2003-12-02 2012-05-22 The Boeing Company Methods for determining inconsistency characteristics of a composite structure
US8934702B2 (en) 2003-12-02 2015-01-13 The Boeing Company System and method for determining cumulative tow gap width
US7289656B2 (en) 2003-12-02 2007-10-30 The Boeing Company Systems and methods for determining inconsistency characteristics of a composite structure
US7983469B2 (en) 2003-12-02 2011-07-19 The Boeing Company Systems and methods for determining inconsistency characteristics of a composite structure
US7039485B2 (en) 2004-03-12 2006-05-02 The Boeing Company Systems and methods enabling automated return to and/or repair of defects with a material placement machine
US7193696B2 (en) 2004-04-12 2007-03-20 United Technologies Corporation Systems and methods for using light to indicate defect locations on a composite structure
US8770248B2 (en) 2004-11-24 2014-07-08 The Boeing Company In-process vision detection of flaw and FOD characteristics
US8524021B2 (en) 2004-11-24 2013-09-03 The Boeing Company In-process vision detection of flaw and FOD characteristics
US7889907B2 (en) 2005-01-12 2011-02-15 The Boeing Company Apparatus and methods for inspecting tape lamination
DE102006009593B4 (de) * 2005-10-01 2008-12-18 Vistec Semiconductor Systems Gmbh Vorrichtung zur Aufnahme von mehreren Bildern von scheibenförmigen Objekten
US7435947B2 (en) 2005-10-31 2008-10-14 The Boeing Company Apparatus and methods for integrating encoding functions in material placement machines
US7372556B2 (en) 2005-10-31 2008-05-13 The Boeing Company Apparatus and methods for inspecting a composite structure for inconsistencies
DE102007007828A1 (de) * 2007-02-16 2008-08-21 Bst International Gmbh Verfahren und Vorrichtung zum Beleuchten eines Druckbildes auf einer Materialbahn
DE102007007828B4 (de) * 2007-02-16 2011-02-24 Bst International Gmbh Verfahren und Vorrichtung zum Beleuchten eines Druckbildes auf einer Materialbahn
EP2144052A1 (fr) * 2008-07-11 2010-01-13 Dr. Schenk GmbH Industriemesstechnik Procédé et dispositif de détection et de classification de défauts
US10056071B2 (en) 2013-07-22 2018-08-21 Zs-Handling Gmbh Device for inspecting workpiece surfaces and strip materials
WO2015010681A2 (fr) 2013-07-22 2015-01-29 Zs-Handling Gmbh Dispositif servant à inspecter des surfaces de pièces à usiner et des matériaux en bande
CN105960589A (zh) * 2013-07-22 2016-09-21 Zs-处理有限责任公司 用于检查工件表面和带材料的装置
CN105960589B (zh) * 2013-07-22 2019-04-26 Zs-处理有限责任公司 用于检查工件表面和带材料的装置
EP3279645A4 (fr) * 2015-03-31 2018-09-26 Nisshin Steel Co., Ltd. Dispositif d'inspection des défauts superficiels dans une tôle d'acier galvanisée à chaud, et procédé associé
DE102016100437B4 (de) 2016-01-12 2018-08-02 Stephan Krebs Vorrichtung zur Druckbildkontrolle
DE102016100437A1 (de) 2016-01-12 2017-07-13 Stephan Krebs Vorrichtung zur Druckbildkontrolle
US11295428B2 (en) 2016-01-12 2022-04-05 Elexis Ag Device for inspecting printed images
CN106168580A (zh) * 2016-07-18 2016-11-30 广东华冠新型材料有限公司 带材孔洞实时检测装置
US10942132B2 (en) * 2018-11-12 2021-03-09 Samsung Display Co., Ltd. Apparatus and method for inspecting glass substrate
EP3712600A1 (fr) * 2019-03-20 2020-09-23 ThyssenKrupp Rasselstein GmbH Procédé et dispositif d'inspection de la surface d'une bande en mouvement
DE102019107174A1 (de) * 2019-03-20 2020-09-24 Thyssenkrupp Rasselstein Gmbh Verfahren und Vorrichtung zur Inspektion der Oberfläche eines sich bewegenden Bands
DE102019107174B4 (de) * 2019-03-20 2020-12-24 Thyssenkrupp Rasselstein Gmbh Verfahren und Vorrichtung zur Inspektion der Oberfläche eines sich bewegenden Bands
CN113447485A (zh) * 2020-03-26 2021-09-28 捷普电子(新加坡)公司 光学检测方法

Also Published As

Publication number Publication date
AU6014594A (en) 1994-08-29

Similar Documents

Publication Publication Date Title
WO1994018643A1 (fr) Procede et appareil de mise en image de surfaces
KR100267665B1 (ko) 표면검사장치
US5132791A (en) Optical sheet inspection system
US7551274B1 (en) Defect detection lighting system and methods for large glass sheets
US7567344B2 (en) Apparatus and method for characterizing defects in a transparent substrate
US6011620A (en) Method and apparatus for the automatic inspection of optically transmissive planar objects
JP4511978B2 (ja) 表面疵検査装置
US20070008538A1 (en) Illumination system for material inspection
US5953130A (en) Machine vision methods and apparatus for machine vision illumination of an object
US20070097359A1 (en) Apparatus and methods for inspecting a composite structure for defects
JP2000055829A (ja) 単一領域のアレイセンサと交互のストロボ光源を使用する容器の検査装置及びその方法
JP2012042297A (ja) 撮像光学検査装置
US5274243A (en) Cylindrical allumination system for inspection of sheet material
CN113686879A (zh) 光学薄膜缺陷视觉检测***及方法
JP4190636B2 (ja) 表面検査装置
EP0731350A1 (fr) Appareil de détection optique de défauts de surfaces, en particulier dans des bandes laminées
US6346982B1 (en) Device for examining flat workpieces
JP2000055826A (ja) 品質検査装置
JP4932595B2 (ja) 表面疵検査装置
JP2018163134A (ja) 表面検査方法及びその装置
JP7448808B2 (ja) 表面検査装置及び表面検査方法
JP3339416B2 (ja) 落射照明を用いた品質検査装置
JP2000161937A (ja) 円柱状物体の表面検査装置
JP4212711B2 (ja) 金属表面の検査方法及び装置
JP5471157B2 (ja) ガラス板面の付着物の検出方法および装置

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AT AU BB BG BR BY CA CH CZ DE DK ES FI GB HU JP KP KR KZ LK LU LV MG MN MW NL NO NZ PL PT RO RU SD SE SK UA UZ VN

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN ML MR NE SN TD TG

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
121 Ep: the epo has been informed by wipo that ep was designated in this application
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: CA