USD804436S1 - Upper chamber for a plasma processing apparatus - Google Patents
Upper chamber for a plasma processing apparatus Download PDFInfo
- Publication number
- USD804436S1 USD804436S1 US29/544,068 US201529544068F USD804436S US D804436 S1 USD804436 S1 US D804436S1 US 201529544068 F US201529544068 F US 201529544068F US D804436 S USD804436 S US D804436S
- Authority
- US
- United States
- Prior art keywords
- processing apparatus
- plasma processing
- upper chamber
- view
- elevational view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
Claims (1)
- The ornamental design for an upper chamber for a plasma processing apparatus, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015-013035 | 2015-06-12 | ||
JPD2015-13035F JP1546799S (en) | 2015-06-12 | 2015-06-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD804436S1 true USD804436S1 (en) | 2017-12-05 |
Family
ID=55539623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/544,068 Active USD804436S1 (en) | 2015-06-12 | 2015-10-30 | Upper chamber for a plasma processing apparatus |
Country Status (3)
Country | Link |
---|---|
US (1) | USD804436S1 (en) |
JP (1) | JP1546799S (en) |
TW (1) | TWD175852S (en) |
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD826300S1 (en) * | 2016-09-30 | 2018-08-21 | Oerlikon Metco Ag, Wohlen | Rotably mounted thermal plasma burner for thermalspraying |
USD837754S1 (en) * | 2017-04-28 | 2019-01-08 | Applied Materials, Inc. | Plasma chamber liner |
USD838681S1 (en) * | 2017-04-28 | 2019-01-22 | Applied Materials, Inc. | Plasma chamber liner |
USD842259S1 (en) * | 2017-04-28 | 2019-03-05 | Applied Materials, Inc. | Plasma chamber liner |
USD844768S1 (en) * | 2017-09-06 | 2019-04-02 | Rheem Manufacturing Company | Water heater top cap assembly |
USD847224S1 (en) * | 2016-06-29 | 2019-04-30 | Superior Industries, Inc. | Vertical shaft impact crusher crushing chamber |
USD849227S1 (en) * | 2017-12-12 | 2019-05-21 | Systems Spray-Cooled, Inc. | Burner bump out |
USD849228S1 (en) * | 2017-12-19 | 2019-05-21 | Systems Spray-Cooled, Inc | Burner bump out |
USD849072S1 (en) * | 2017-04-05 | 2019-05-21 | Sundyne, Llc | Bearing box frame |
USD851237S1 (en) * | 2017-11-01 | 2019-06-11 | Systems Spray-Cooled, Inc | Watertight sidewall dustcover |
USD851743S1 (en) * | 2017-12-19 | 2019-06-18 | Systems Spray-Cooled, Inc | Burner bump out |
USD869376S1 (en) * | 2018-04-13 | 2019-12-10 | Protective Enclosures Company, Llc | Venting device |
USD875055S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875054S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875053S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD882536S1 (en) * | 2017-04-28 | 2020-04-28 | Applied Materials, Inc. | Plasma source liner |
USD892882S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power transmission unit of an industrial robot arm |
USD892881S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power transmission unit and power receiving unit of an industrial robot arm |
USD892880S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power transmission unit and power receiving unit of an industrial robot arm |
USD892884S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power receiving unit of an industrial robot arm |
USD892883S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power transmission unit of an industrial robot arm |
USD907593S1 (en) * | 2017-01-20 | 2021-01-12 | Hitachi High-Tech Corporation | Discharge chamber for a plasma processing apparatus |
USD913979S1 (en) * | 2019-08-28 | 2021-03-23 | Applied Materials, Inc. | Inner shield for a substrate processing chamber |
USD925481S1 (en) * | 2018-12-06 | 2021-07-20 | Kokusai Electric Corporation | Inlet liner for substrate processing apparatus |
USD931241S1 (en) * | 2019-08-28 | 2021-09-21 | Applied Materials, Inc. | Lower shield for a substrate processing chamber |
USD973609S1 (en) * | 2020-04-22 | 2022-12-27 | Applied Materials, Inc. | Upper shield with showerhead for a process chamber |
USD1008967S1 (en) * | 2022-05-16 | 2023-12-26 | Japan Aviation Electronics Industry, Limited | Collar for connector |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD859333S1 (en) | 2018-03-16 | 2019-09-10 | Applied Materials, Inc. | Collimator for a physical vapor deposition chamber |
USD858468S1 (en) | 2018-03-16 | 2019-09-03 | Applied Materials, Inc. | Collimator for a physical vapor deposition chamber |
USD937329S1 (en) | 2020-03-23 | 2021-11-30 | Applied Materials, Inc. | Sputter target for a physical vapor deposition chamber |
USD998575S1 (en) | 2020-04-07 | 2023-09-12 | Applied Materials, Inc. | Collimator for use in a physical vapor deposition (PVD) chamber |
USD1009816S1 (en) | 2021-08-29 | 2024-01-02 | Applied Materials, Inc. | Collimator for a physical vapor deposition chamber |
USD997111S1 (en) | 2021-12-15 | 2023-08-29 | Applied Materials, Inc. | Collimator for use in a physical vapor deposition (PVD) chamber |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4153907A (en) * | 1977-05-17 | 1979-05-08 | Vactec, Incorporated | Photovoltaic cell with junction-free essentially-linear connections to its contacts |
USD274836S (en) * | 1982-12-02 | 1984-07-24 | Smith Edward J | Space heater assembly |
US5641375A (en) * | 1994-08-15 | 1997-06-24 | Applied Materials, Inc. | Plasma etching reactor with surface protection means against erosion of walls |
USD404369S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Manifold cover for use in a semiconductor wafer heat processing apparatus |
US20010023821A1 (en) * | 1999-07-12 | 2001-09-27 | Randy Harris | Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same |
USD448729S1 (en) * | 1999-12-14 | 2001-10-02 | Mitsubishi Denki Kabushiki Kaisha | Stator of AC generator for vehicles |
US20010035131A1 (en) * | 2000-04-26 | 2001-11-01 | Takeshi Sakuma | Single-substrate-heat-processing apparatus for semiconductor process |
US20040069223A1 (en) * | 2002-10-10 | 2004-04-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wall liner and slot liner for process chamber |
USD491963S1 (en) * | 2002-11-20 | 2004-06-22 | Tokyo Electron Limited | Inner wall shield for a process chamber for manufacturing semiconductors |
US20120018402A1 (en) * | 2010-07-21 | 2012-01-26 | Applied Materials, Inc. | Plasma processing apparatus and liner assembly for tuning electrical skews |
US20130292254A1 (en) * | 2012-03-28 | 2013-11-07 | Santosh Kumar | Methods and apparatuses for cleaning electroplating substrate holders |
US20140097088A1 (en) * | 2009-06-17 | 2014-04-10 | Novellus Systems, Inc. | Electrofill vacuum plating cell |
USD716240S1 (en) * | 2013-11-07 | 2014-10-28 | Applied Materials, Inc. | Lower chamber liner |
US20160307743A1 (en) * | 2015-04-17 | 2016-10-20 | Lam Research Corporation | Chamber with vertical support stem for symmetric conductance and rf delivery |
-
2015
- 2015-06-12 JP JPD2015-13035F patent/JP1546799S/ja active Active
- 2015-10-06 TW TW104305548F patent/TWD175852S/en unknown
- 2015-10-30 US US29/544,068 patent/USD804436S1/en active Active
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4153907A (en) * | 1977-05-17 | 1979-05-08 | Vactec, Incorporated | Photovoltaic cell with junction-free essentially-linear connections to its contacts |
USD274836S (en) * | 1982-12-02 | 1984-07-24 | Smith Edward J | Space heater assembly |
US5641375A (en) * | 1994-08-15 | 1997-06-24 | Applied Materials, Inc. | Plasma etching reactor with surface protection means against erosion of walls |
USD404369S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Manifold cover for use in a semiconductor wafer heat processing apparatus |
US20010023821A1 (en) * | 1999-07-12 | 2001-09-27 | Randy Harris | Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same |
USD448729S1 (en) * | 1999-12-14 | 2001-10-02 | Mitsubishi Denki Kabushiki Kaisha | Stator of AC generator for vehicles |
US20010035131A1 (en) * | 2000-04-26 | 2001-11-01 | Takeshi Sakuma | Single-substrate-heat-processing apparatus for semiconductor process |
US20040069223A1 (en) * | 2002-10-10 | 2004-04-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wall liner and slot liner for process chamber |
USD491963S1 (en) * | 2002-11-20 | 2004-06-22 | Tokyo Electron Limited | Inner wall shield for a process chamber for manufacturing semiconductors |
US20140097088A1 (en) * | 2009-06-17 | 2014-04-10 | Novellus Systems, Inc. | Electrofill vacuum plating cell |
US20120018402A1 (en) * | 2010-07-21 | 2012-01-26 | Applied Materials, Inc. | Plasma processing apparatus and liner assembly for tuning electrical skews |
US20130292254A1 (en) * | 2012-03-28 | 2013-11-07 | Santosh Kumar | Methods and apparatuses for cleaning electroplating substrate holders |
USD716240S1 (en) * | 2013-11-07 | 2014-10-28 | Applied Materials, Inc. | Lower chamber liner |
US20160307743A1 (en) * | 2015-04-17 | 2016-10-20 | Lam Research Corporation | Chamber with vertical support stem for symmetric conductance and rf delivery |
Cited By (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD875795S1 (en) * | 2016-06-29 | 2020-02-18 | Superior Industries, Inc. | Vertical shaft impact crusher rotor |
USD910725S1 (en) | 2016-06-29 | 2021-02-16 | Superior Industries, Inc. | Vertical shaft impact crusher rotor floor |
US11192116B2 (en) | 2016-06-29 | 2021-12-07 | Superior Industries, Inc. | Vertical shaft impact crusher |
USD847224S1 (en) * | 2016-06-29 | 2019-04-30 | Superior Industries, Inc. | Vertical shaft impact crusher crushing chamber |
USD826300S1 (en) * | 2016-09-30 | 2018-08-21 | Oerlikon Metco Ag, Wohlen | Rotably mounted thermal plasma burner for thermalspraying |
USD907593S1 (en) * | 2017-01-20 | 2021-01-12 | Hitachi High-Tech Corporation | Discharge chamber for a plasma processing apparatus |
USD849072S1 (en) * | 2017-04-05 | 2019-05-21 | Sundyne, Llc | Bearing box frame |
USD875055S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD842259S1 (en) * | 2017-04-28 | 2019-03-05 | Applied Materials, Inc. | Plasma chamber liner |
USD838681S1 (en) * | 2017-04-28 | 2019-01-22 | Applied Materials, Inc. | Plasma chamber liner |
USD875054S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875053S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD837754S1 (en) * | 2017-04-28 | 2019-01-08 | Applied Materials, Inc. | Plasma chamber liner |
USD882536S1 (en) * | 2017-04-28 | 2020-04-28 | Applied Materials, Inc. | Plasma source liner |
USD844768S1 (en) * | 2017-09-06 | 2019-04-02 | Rheem Manufacturing Company | Water heater top cap assembly |
USD851237S1 (en) * | 2017-11-01 | 2019-06-11 | Systems Spray-Cooled, Inc | Watertight sidewall dustcover |
USD849227S1 (en) * | 2017-12-12 | 2019-05-21 | Systems Spray-Cooled, Inc. | Burner bump out |
USD849228S1 (en) * | 2017-12-19 | 2019-05-21 | Systems Spray-Cooled, Inc | Burner bump out |
USD851743S1 (en) * | 2017-12-19 | 2019-06-18 | Systems Spray-Cooled, Inc | Burner bump out |
USD892881S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power transmission unit and power receiving unit of an industrial robot arm |
USD892880S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power transmission unit and power receiving unit of an industrial robot arm |
USD892884S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power receiving unit of an industrial robot arm |
USD892883S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power transmission unit of an industrial robot arm |
USD892882S1 (en) * | 2018-03-29 | 2020-08-11 | Daihen Corporation | Power transmission unit of an industrial robot arm |
USD869376S1 (en) * | 2018-04-13 | 2019-12-10 | Protective Enclosures Company, Llc | Venting device |
USD925481S1 (en) * | 2018-12-06 | 2021-07-20 | Kokusai Electric Corporation | Inlet liner for substrate processing apparatus |
USD913979S1 (en) * | 2019-08-28 | 2021-03-23 | Applied Materials, Inc. | Inner shield for a substrate processing chamber |
USD931241S1 (en) * | 2019-08-28 | 2021-09-21 | Applied Materials, Inc. | Lower shield for a substrate processing chamber |
USD973609S1 (en) * | 2020-04-22 | 2022-12-27 | Applied Materials, Inc. | Upper shield with showerhead for a process chamber |
USD1008967S1 (en) * | 2022-05-16 | 2023-12-26 | Japan Aviation Electronics Industry, Limited | Collar for connector |
Also Published As
Publication number | Publication date |
---|---|
TWD175852S (en) | 2016-05-21 |
JP1546799S (en) | 2016-03-28 |
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